TWI818543B - Light detection device and light irradiation device - Google Patents

Abstract

The technology disclosed in this specification is used to suppress the decrease in light detection accuracy by suppressing the decrease in the amount of transmitted light. The solution of the present invention is a light detection device that can detect the light irradiated from the light irradiation part. The light detection device is provided with: a transmission member for transmitting the light irradiation from the light irradiation part; and a photodetector, It is used to detect the light transmitted through the transmission member; a plurality of first scattering parts for scattering light are dispersedly provided on the transmission member.

Description

Light detection device and light irradiation device

The technology disclosed in this specification relates to technology for detecting irradiated light.

It is conventionally known to use a light processing technology (for example, refer to Patent Document 1) in which an object is processed by light irradiation such as laser light irradiation. [Prior technical literature] [Patent Document]

Patent Document 1: Japanese Patent Application Publication No. 2006-272430

(The problem that the invention wants to solve)

When the irradiated light is detected via the transmission member as described above, the amount of the detected light may be greatly reduced due to diffusion during the transmission process. In this case, the accuracy of light detection will be reduced due to insufficient light quantity.

The technology disclosed in this specification is a technology accomplished in view of the above-described problems, and is used to suppress the decrease in light detection accuracy by suppressing the decrease in the amount of light due to transmission. (Technical means to solve problems)

A light detection device according to a first aspect of the technology disclosed in this specification detects light irradiated from a light irradiation part, and includes: a transmission member for transmitting the light irradiation from the light irradiation part; and A photodetector is used to detect the light transmitted through the transmission member; in the transmission member, a plurality of first scattering parts for scattering the light are dispersedly provided.

A photodetection device according to a second aspect of the technology disclosed in this specification is related to the photodetection device according to the first aspect, wherein the photodetector is located opposite to the end of the transmission member in the length direction. position, the plurality of first scattering parts are dispersedly arranged along the length direction of the transmission member.

A third aspect of the light detection device of the technology disclosed in this specification is related to the light detection device of the first or second aspect, wherein the above-mentioned transmission member has an end opposite to the above-mentioned photodetector, and a plurality of The width of one of the above-mentioned first scattering parts, that is, the second scattering part, is greater than the width of the third scattering part, and the third scattering part is located closer to the above-mentioned end than the above-mentioned second scattering part. location of the scattering part.

The fourth aspect of the light detection device of the technology disclosed in this specification is related to the light detection device of any one of the first to third aspects, wherein it further includes a workpiece table; the above-mentioned light irradiation part is The above-mentioned light is irradiated onto the upper surface of the above-mentioned workpiece table, and at least one fourth scattering part for scattering the above-mentioned light is provided on at least a part of the above-mentioned workpiece table. The above-mentioned fourth scattering part is made of a transparent material, and the above-mentioned transmission member is transmitted through The above-mentioned light is incident on the above-mentioned fourth scattering part.

A fifth aspect of the light detection device of the technology disclosed in this specification is related to the light detection device of the fourth aspect, wherein each of the first scattering parts is arranged to correspond to the position of the fourth scattering part.

The light detection device of the sixth aspect of the technology disclosed in this specification is related to the light detection device of the fourth or fifth aspect, wherein it further includes: a condenser lens for detecting the light passing through the fourth aspect. The above-mentioned light incident on the scattering part is condensed; and the light shielding plate is located at a position farther from the above-mentioned fourth scattering part than the above-mentioned condenser lens, and is arranged at the condenser position of the above-mentioned condenser lens; the above-mentioned transmission member is a transmitter The above-mentioned light condensed by the above-mentioned condenser lens.

A seventh aspect of the light detection device of the technology disclosed in this specification is related to the light detection device of any one of the first to sixth aspects, wherein the plurality of first scattering parts are transmitted through the transmission member It is formed by sand blasting on the surface.

A light detection device according to an eighth aspect of the technology disclosed in this specification is related to the light detection device according to any one of the first to sixth aspects, wherein a plurality of the first scattering parts are coated on the transmission member Reflective film below.

A ninth aspect of the light detection device of the technology disclosed in this specification is related to the light detection device of any one of the first to eighth aspects, wherein the light irradiated from the light irradiation part is laser light.

A tenth aspect of the light detection device of the technology disclosed in this specification is related to the light detection device of any one of the first to ninth aspects, wherein it further includes a chamber containing the above-mentioned transmission member; the above-mentioned The photodetector detects the light transmitted through the transmission member outside the chamber.

A light irradiation device according to an eleventh aspect of the technology disclosed in this specification is provided with: at least one light irradiation part for irradiating light; and a light detection device according to any one of the first to tenth aspects. (Compare the effectiveness of previous technologies)

According to at least a first aspect of the technology disclosed in this specification, by suppressing excessive diffusion of light during transmission within the transmission member, it is possible to suppress a decrease in the amount of light being transmitted. As a result, reduction in light detection accuracy can be suppressed.

In addition, the objectives, features, states, and advantages related to the technology disclosed in this specification can be further understood through the detailed description and additional drawings shown below.

Hereinafter, embodiments will be described with reference to the drawings. In the following embodiments, detailed features are shown for the purpose of technical explanation, but they are illustrative and not all features that are necessary to make the embodiments feasible.

In addition, the drawings are schematically shown, and for convenience of explanation, structures are appropriately omitted or simplified in the drawings. In addition, the relationship between the size and position of components shown in different drawings may not be accurately described, but they may be changed appropriately. In addition, in order to make it easier to understand the contents of the embodiments, the present invention may include hatching in drawings such as plan views that are not cross-sectional views.

In addition, in the description shown below, the same components are assigned the same symbol for illustration, and their names and functions are also assumed to be the same. Therefore, in order to avoid duplication, detailed description thereof may be omitted.

In addition, in the description described in this specification, unless otherwise stated, when a certain component is described as "having", "including" or "having", it does not exclude the existence of other components. performance of exclusivity.

In addition, even when ordinal numbers such as "first" or "second" are used in the description described in this specification, these terms are used to facilitate understanding of the contents of the embodiments, and the contents of the embodiments are not intended to be used. Restricted to the order produced by their equal ordinal numbers.

In addition, in the explanations described in this specification, the expressions such as "...axis positive direction" or "...axis negative direction" mean that the direction of the arrow along the...axis shown in the figure is the positive direction, and will be consistent with the figure. Indicated... The direction on the opposite side of the arrow of the axis is set to the negative direction.

In addition, in the explanations described in this manual, even if the words "upper", "lower", "left", "right", "side", "bottom", "surface" or "inside" are used, they mean a specific position. In the case of the terms or directions, these terms are also used to facilitate the understanding of the content of the embodiment and have nothing to do with the position or direction when the embodiment is actually implemented.

In addition, in the description described in this specification, when it is described as "the upper part of..." or "the lower part of...", it is also included in the object as the upper part itself or the lower part itself as the constituent element of the object. A state in which other constituent elements are formed above or below the constituent elements. That is, for example, when it is described as "B placed on top of A", this does not prevent another component "C" from being interposed between A and B.

In addition, in the explanations described in this specification, expressions showing shapes, such as "square prism shape" or "cylindrical shape", etc., unless otherwise stated, are assumed to include the situation in which the shape is strictly displayed, and within the tolerance or possibility. There are dents, convexes, chamfers, etc. within the range of achieving the same level of functionality.

＜Implementation＞ Hereinafter, the light detection device and the light irradiation device related to this embodiment will be described. Furthermore, in the following embodiments, a light irradiation device is described as an example in which the chamber is in a vacuum or a reduced-pressure gas environment. However, the same is applicable when the chamber is not in a vacuum.

＜Construction of the light irradiation device＞ FIG. 1 is a perspective view schematically showing a structural example of the light irradiation device 1 according to this embodiment. In FIG. 1 , for convenience of explanation, illustration of the chamber frame that supports the vacuum chamber 12 or the wiring that is actually connected is omitted. In addition, in order to prevent the characteristics of the substrate W from deteriorating, "vacuum" in this embodiment refers to a desired high vacuum (for example, 0.00001 Pa), but it also includes cases where the vacuum degree does not reach the high vacuum.

As illustrated in FIG. 1 , the light irradiation device 1 includes: a vacuum chamber 12; an external fixing part 14 such as a stone platform; and a bellows 16A, which is a stretchable member, for example, made of stainless steel, and is connected to the vacuum chamber 12 with the external fixing part 14; the light irradiation part 18 that irradiates light into the vacuum chamber 12; the vacuum pump 21 that decompresses the vacuum chamber 12 to create a vacuum state; and the control part 22 that controls the light irradiation device 1. Each driving part. In the above structure, a bellows made of stainless steel or the like is shown as an example of the elastic member. However, depending on the required specifications, an elastic member made of metal other than stainless steel may also be used, or a flexible member may be used. A stretchable member made of resin. In addition, the shape of the elastic member may not be the bellows shape of the bellows 16A described above.

The vacuum chamber 12 has a space for accommodating the substrate W inside. The substrate W to be processed includes, for example, semiconductor wafers, glass substrates for liquid crystal display devices, substrates for flat panel displays (FPD) such as organic EL (electro luminescence) display devices, substrates for optical disks, substrates for magnetic disks, and substrates for magneto-optical disks. Substrates, glass substrates for photomasks, ceramic substrates, substrates for field emission displays (FED), or substrates for solar cells, etc. In addition, the substrate W is, for example, a substrate in which a thin film is formed on the upper surface.

In addition, an opening 12A is formed on the side surface of the vacuum chamber 12 for allowing the substrate W to pass when loading and unloading the substrate W. When the vacuum chamber 12 becomes a vacuum state, the opening 12A can be closed appropriately. Other components housed inside the vacuum chamber 12 will be described later.

The light irradiation part 18 irradiates light toward the upper surface of the substrate W accommodated in the vacuum chamber 12 . At this time, the position correction of the substrate W is performed in advance by a detection unit and the like described later. The light irradiation part 18 performs ablation processing of the substrate W by irradiating laser light, for example. Furthermore, the light irradiation part 18 may also irradiate light such as an electron beam according to the purpose of processing. The light irradiation part 18 irradiates light from outside the vacuum chamber 12 toward the upper surface of the substrate W housed in the vacuum chamber 12 through an irradiation window (not shown) (a transparent plate made of quartz or the like). Furthermore, by moving the substrate W in the vacuum chamber 12 relative to the light irradiation part 18 or by controlling the optical system in the light irradiation part 18, the light is scanned on the upper surface of the substrate W. Moreover, the light irradiation part 18 is arrange|positioned on the upper surface of the stand 24 fixed to the external fixing part 14.

The control unit 22 may have, for example, a memory device including a memory (storage medium), a processing circuit such as a central processing unit (CPU) that executes a program, an input device that can input information, and an output that can output information. device, wherein the memory system includes a hard disk drive (HDD), random access memory (RAM), read only memory (ROM), and flash memory body, volatile or non-volatile semiconductor memory, magnetic disk, floppy disk, optical disk, compact disc, mini-disc or DVD, etc., the program is stored in the memory device, external CD-ROM, external DVD-ROM, or external flash memory, etc., the input device is a mouse, keyboard, touch panel or various switches, etc., and the output device is a monitor, liquid crystal display device or lamp, etc.

The control unit 22 controls the output of the light source in the light irradiation unit 18 and the direction of the irradiation light, controls the output of the vacuum pump 21 , and controls the driving of each driving unit described below.

FIG. 2 is a cross-sectional view showing an example of the internal structure and peripheral structure of the vacuum chamber 12 of the light irradiation device 1 according to this embodiment. As illustrated in FIG. 2 , the inside of the vacuum chamber 12 is provided with: a workpiece table 42 on which the substrate W is placed; a slider 44 which is movable in the Y-axis direction and supports the workpiece table 42 from below; and a base 46 . It is fixed to the external fixing part 14 independently of the vacuum chamber 12; the linear guide rail 48 is fixed to the base 46 and extends toward the Y-axis direction; the linear motor mechanism 50 makes the slider 44 linearly move toward the Y-axis direction. The guide rail 48 moves; and the lift pin mechanism 52 has a lift pin 52A that passes through a through hole (not shown here) formed in the workpiece table 42 to support the substrate W.

The workpiece table 42 is used to face the processing surface of the substrate W upward and hold the substrate W substantially horizontally. The detailed structure of the workpiece table 42 will be described later. The linear motor mechanism 50 moves the slider 44 supporting the workpiece table 42 in the Y-axis direction, and scans the light irradiated from the light irradiation part 18 in the X-axis direction, whereby the light can be used to scan the substrate W when viewed from above. The entire processing area is scanned. Alternatively, by scanning the light irradiated from the light irradiation part 18 in the X-axis direction and the Y-axis direction, the entire processing area of the substrate W in plan view can be scanned using the light. Furthermore, the lifting pin mechanism 52 is fixed to the base 46 .

The linear motor mechanism 50 is fixed to the external fixing part 14 located on the side of the vacuum chamber 12 via the opening 12B formed on the side of the vacuum chamber 12 . More specifically, the linear motor mechanism 50 is fixed to the end of the hollow columnar member 14A, and the hollow columnar member 14A passes through the bellows 16A welded to the opening 12B. At this time, the wiring and the like connected to the linear motor mechanism 50 pass through the inside of the columnar member 14A and are led out of the vacuum chamber 12 . Furthermore, the columnar member 14A included in the external fixing part 14 is fixed to the external member 14B included in the external fixing part 14 . In addition, the columnar member 14A is not in contact with the bellows 16A connected to the side surface of the vacuum chamber 12 .

The base 46 is fixed to the external fixing part 14 located below the vacuum chamber 12 via the opening 12C formed in the bottom surface of the vacuum chamber 12 . Specifically, the base 46 is fixed to the end of the columnar member 14C passed through the bellows 16B welded to the opening 12C. Furthermore, the columnar member 14C included in the external fixing part 14 is fixed to the external member 14B included in the external fixing part 14 . In addition, the columnar member 14C is not in contact with the bellows 16B connected to the bottom surface of the vacuum chamber 12 .

In FIG. 2 , although the external fixing parts 14 are arranged all over the side and below the vacuum chamber 12 , the external fixing parts 14 at these positions are not necessarily continuous, and they may also be arranged dispersed among them. location, or it can be set at any location. In addition, the vacuum chamber 12 is supported and fixed from below in the vertical direction by a chamber frame (not shown) different from the bellows 16B, but this chamber frame is provided independently from the external fixing part 14 .

FIG. 3 is a perspective view mainly showing the light irradiation part 18 and the workpiece table 42 in the structure shown in FIG. 2 . In FIG. 3 , a state in which the substrate W is arranged on the workpiece table 42 is shown. The light irradiation part 18 can scan the light irradiation direction toward the X-axis direction in FIG. 3 , and the workpiece table 42 can move toward the Y-axis direction through the linear motor mechanism 50 (see FIG. 2 ). Thereby, the light irradiated from the light irradiation part 18 to the upper surface of the workpiece table 42 can form a rectangular irradiation area (light irradiation area) on the upper surface of the substrate W.

As shown in FIG. 3 , the workpiece table 42 includes: an object arrangement area 42A in which a substrate W, which is an object irradiated with light by the light irradiation part 18 , is arranged; and a position correction area 42B in which the object irradiated with light by the light irradiation part 18 is corrected. The area where the light shines.

The object arrangement area 42A arranges the substrate W at a specific position within the object arrangement area 42A. Thereby, the positional relationship between the workpiece table 42 and the substrate W is determined in advance. In the position correction area 42B, the position of the light irradiated from the light irradiation part 18 into the position correction area 42B is detected. Furthermore, in the position correction area 42B, before the substrate W is subjected to light processing in the object arrangement area 42A, the correspondence relationship between the set value of the direction of the light irradiated from the light irradiation part 18 and the irradiation position of the detected light is corrected. .

A light-transmitting portion 142 that transmits light is provided in at least part of the position correction area 42B. The light-transmitting part 142 is made of a transparent material such as a glass material such as quartz (SiO ₂ ) or a transparent resin (for example, silicone resin). The light-transmitting portion 142 is provided from the upper surface to the lower surface of the workpiece table 42 corresponding to the position correction area 42B. The light irradiated from the light irradiation part 18 to the light transmitting part 142 passes from the upper surface of the workpiece table 42 toward the lower surface.

The light-transmitting part 142 is provided with, for example, four scattering parts 142A. Furthermore, the number of scattering parts 142A is not limited to four. The scattering portion 142A is made of a transparent material and reflects or transmits the irradiated light while scattering it. The position where the scattering part 142A is provided is a specific position in the workpiece table 42 . That is, the position of the scattering part 142A in the entire workpiece table 42 is specified in advance. In FIG. 3 , each scattering part 142A is disposed at an end of the light irradiation area of the light irradiation part 18 in the X-axis direction. However, the position where the scattering part 142A is disposed only needs to be at a specific position on the workpiece table 42 and does not need to be. It is limited to the end of the light irradiation area of the light irradiation part 18 . The scattering portion 142A has the property of scattering incident light, and can be obtained, for example, by sandblasting a glass material or frosting it using hydrofluoric acid or the like. In FIG. 3 , although each scattering part 142A is formed on the upper surface of the light-transmitting part 142 , at least one scattering part 142A may also be formed on the lower surface of the light-transmitting part 142 .

Furthermore, in the case shown in FIG. 3 , although the object arrangement area 42A and the position correction area 42B are set in different areas, they may overlap at least partially. That is, the light-transmitting portion 142 may be provided in at least a part of the area where the substrate W is arranged. In this case, for example, in a state where the substrate W is not arranged, the position where the light is irradiated from the light irradiation part 18 can be corrected at a predetermined position where the substrate W is arranged.

In addition, the light-transmitting part 142 may also be formed with a scattering part 142A over its entire range. That is, light may be scattered not only in the portion through which light is transmitted, but also in the entire range of the light-transmitting portion 142 .

In addition, in FIG. 3 , although the light-transmitting part 142 is provided to extend in the X-axis direction, and a scattering part 142A is provided at each end in the X-axis direction, the light-transmitting part 142 may also be divided into a plurality of parts in the X-axis direction. parts. However, in the case where a plurality of scattering portions 142A are provided in the integrally formed light-transmitting portion 142 (that is, the situation shown in FIG. 3 ), the plurality of scatterings when the light-transmitting portion 142 is made of a transparent material can be maintained. In a state where the position accuracy between the parts 142A is maintained, the light-transmitting part 142 is mounted on the workpiece table 42 (in the case of FIG. 3, embedded). Therefore, since there is no positional deviation between the scattering parts 142A when being mounted on the workpiece table 42, the accuracy of correction using a plurality of the scattering parts 142A can be maintained to a high degree.

FIG. 4 is a cross-sectional view mainly showing a structural example of the light irradiation part 18 and the workpiece table 42 in the structure shown in FIG. 2 . As shown in FIG. 4 , the light irradiation unit 18 includes a scanner 18A, which is a galvano mirror, a polygon mirror, or the like, and is used to control the direction of the irradiated light in the X-axis direction and the Y-axis direction. direction; and a condenser lens 18B that condenses light from a light source not shown in the figure. In FIG. 4 , the light irradiated through the condenser lens 18B and the irradiation window 20 formed of quartz or the like is, for example, laser light 18C. The laser light 18C can be controlled by the scanner 18A to scan the substrate W arranged on the workpiece table 42 in the X-axis direction and the Y-axis direction. Here, the light irradiation part 18 is preferably capable of controlling light in the X-axis direction and the Y-axis direction. However, the light irradiation part 18 may control light in either the X-axis direction or the Y-axis direction.

The workpiece table 42 includes a light-transmitting part 142 formed in the position correction area 42B (see FIG. 3 ), and a scattering part 142A formed on the upper surface of the light-transmitting part 142 . The laser light 18C irradiated from the light irradiation part 18 can scan the range reaching at least the scattering part 142A in the X-axis direction.

A detection unit 62 for detecting light is arranged below the workpiece table 42 . The detection unit 62 includes a light condensing unit 62A that condenses light in the vacuum chamber 12 , a transparent rod 62D that transmits the light condensed by the light condensing unit 62A, and a scattering unit 166 that connects the transparent rod 62D to A plurality of optical fibers 62B are provided dispersedly in the X-axis direction, which causes the light transmitted in the transparent rod 62D to be emitted from the transparent rod 62D; a condenser lens 62E which condenses the light emitted from the optical fiber 62B; and light detection. The detector 62C detects the light condensed by the condenser lens 62E through the transparent window 20A provided in the frame of the vacuum chamber 12 outside the vacuum chamber 12 . By including the transparent rod 62D and the photodetector 62C, a photodetection device can be constructed.

The plurality of scattering portions 166 include a scattering portion 166A formed to extend along the Y-axis direction and a scattering portion 166B formed to extend along the Y-axis direction and longer than the scattering portion 166A. In FIG. 4 , two scattering parts 166A are arranged at a position close to the photodetector 62C, and two scattering parts 166B are arranged at a position far away from the photodetector 62C.

In FIG. 4 , two scattering parts 166A are continuously arranged, and two scattering parts 166B are continuously arranged. That is, the width of the scattering portion 166 in the Y-axis direction increases stepwise (discontinuously) from the side approaching the photodetector 62C. However, for example, four scattering portions 166 with different widths in the Y-axis direction can also be arranged in a direction away from the self-photodetector 62C, and their widths in the Y-axis direction match the distance from the self-photodetector 62C. And continuously widens. In other words, it suffices as long as the width of the scattering part 166 at a position far away from the photodetector 62C is greater than the width of the scattering part 166 at a position close to the photodetector 62C.

In addition, although the scattering part 166 shown in FIG. 4 is formed to extend in the Y-axis direction (the inner direction of the paper), the scattering part 166 may also be formed to extend in the X-axis direction (the left-right direction of the paper) and be close to the photodetector 62C. The width of the scattering portion 166 in the X-axis direction at the position far from the photodetector 62C may be equal to or larger than the width in the X-axis direction of the scattering portion 166 at the position far away from the photodetector 62C. In other words, if the direction connecting the scattering part 166 and the photodetector 62C is set as the first direction, the width of the scattering part 166 that changes in response to the distance from the photodetector 62C may be the width in the first direction, or The width can be any direction orthogonal to the first direction.

FIG. 5 is a diagram showing an example of the formation width of the scattering portion 166A. FIG. 6 is a diagram showing an example of the formation width of the scattering portion 166B. As illustrated in FIG. 5 , when the transparent rod 62D is cylindrical, the scattering portion 166A is formed by extending along the circumferential direction of the transparent rod 62D. In addition, as illustrated in FIG. 6 , when the transparent rod 62D is cylindrical, the scattering portion 166B is also formed by extending along the circumferential direction of the transparent rod 62D. Here, since the width of the scattering part 166B in the Y-axis direction is larger than the width of the scattering part 166A, the length in the circumferential direction also becomes longer.

The transparent window 20A in FIG. 4 can be made of a transparent material such as glass material or transparent resin.

Since the photodetector 62C in FIG. 4 is disposed outside the vacuum chamber 12 , the gas released from the photodetector 62C can be inhibited from entering the vacuum chamber 12 .

7 and 8 are schematic diagrams showing the light condensing unit 62A and the transparent rod 62D in the detection part. As illustrated in FIGS. 7 and 8 , the condensing unit 62A includes a condensing lens 162 that condenses the light incident on the optical axis of the light irradiation part 18 in FIG. 4 , and a light shielding plate 164 . It is arranged downstream of the light path of the condenser lens 162 on the optical axis of the light incident from the light irradiation part 18 (that is, on the Z-axis negative direction side in FIGS. 7 and 8 ). The light shielding plate 164 is a plate-shaped member that blocks incident light, and is arranged at a light condensing position of the condensing lens 162 that is farther away from the light transmitting portion 142 than the condensing lens 162 .

In addition, as illustrated in FIGS. 7 and 8 , the transparent rod 62D is made of a transparent material such as a glass material such as quartz (SiO ₂ ) or a transparent resin (for example, silicone resin). In addition, the transparent rod 62D is, for example, a cylindrical rod member, and is formed extending along a plane (ie, the XY plane) along the surface of the workpiece table 42 in FIG. 4 . If the transparent rod 62D has a cylindrical shape, when the light condensed by the light condensing unit 62A is incident on the transparent rod 62D, the total reflection condition is easily satisfied in the transparent rod 62D, and the light can be efficiently transmitted. However, the shape of the transparent rod 62D is not limited to a cylindrical shape, and may also be a square column shape, for example. In this embodiment, the transparent rod 62D is shown as having a rod shape, but the transparent rod 62D may have a surface shape corresponding to the entire workpiece table 42, for example.

The transparent rod 62D is arranged at a conjugate position with the scattering portion 142A in the Z-axis direction with the condenser lens 162 as a reference.

In addition, the transparent rod 62D only needs to be disposed within a range that at least overlaps the scattering portion 142A in a plan view (for example, a range that includes the scattering portion 142A in a plan view). With such an arrangement, the light scattered by the scattering portion 142A and condensed in the light condensing unit 62A can effectively enter the transparent rod 62D and be transmitted.

In addition, a plurality of scattering parts 166 are provided under the transparent rod 62D. Each scattering portion 166 scatters and reflects or transmits the irradiated light. Each scattering portion 166 is obtained by, for example, sandblasting or frosting a glass material using hydrofluoric acid or the like.

Each scattering portion 166 is arranged in a range that at least overlaps the scattering portion 142A when viewed from a plan view, that is, when viewed from the incident direction of light (for example, a range including the scattering portion 142A in a plan view). Furthermore, each scattering part 166 may also be provided inside or on the transparent rod 62D.

In the situation shown in FIG. 7 , the laser light 18C (parallel light) incident from the light irradiation part 18 (see FIG. 4 ) only passes through the light-transmitting part 142 in the workpiece table 42 and reaches the light condensing unit 62A. On the other hand, in the case shown in FIG. 8 , the laser light 18C incident from the light irradiation part 18 (see FIG. 4 ) passes through the scattering part 142A and the light-transmitting part 142 in the workpiece table 42 and reaches the condensed light. Unit 62A. Furthermore, in FIG. 8 , although the laser light 18C passes through the scattering part 142A and the light-transmitting part 142 , the laser light 18C may only pass through the scattering part 142A.

In the situation shown in FIG. 7 , the laser light 18C that passes through the light-transmitting part 142 other than the scattering part 142A reaches the light condensing unit 62A without significant changes in the irradiation range and direction of the light. Then, the laser light 18C is condensed by the condenser lens 162 in the condenser unit 62A, and enters the light shielding plate 164 arranged at the light collecting position of the condenser lens 162 . Then, since the light is blocked by the light shielding plate 164, the laser light 18C does not reach the transparent rod 62D located further downstream than the light shielding plate 164 along the light path along the optical axis of the laser light 18C.

On the other hand, in the situation shown in FIG. 8 , the laser light 18C that passes through the scattering portion 142A in the light-transmitting portion 142 causes light scattering when passing through the scattering portion 142A. Then, the laser light 18C reaches the light condensing unit 62A in a state where the irradiation range of the laser light 18C is expanded due to scattered light (in the sand dot portion in FIG. 8 ). Then, the laser light 18C is condensed by the condenser lens 162 in the condenser unit 62A.

At this time, the laser light 18C whose irradiation range is expanded due to light scattering in the scattering portion 142A contains a large amount of non-parallel light components, and at least part of the components are not condensed at the condensing position of the condensing lens 162 . Therefore, the light shielding plate 164 arranged at the light condensing position of the condensing lens 162 blocks only a part of the laser light 18C. In other words, part of the laser light 18C that is not blocked by the light shielding plate 164 , that is, the scattered light of the laser light 18C, reaches the transparent rod 62D located further downstream than the light shielding plate 164 in the light path along the optical axis of the laser light 18C.

Then, the laser light 18C incident into the transparent rod 62D causes light scattering at the scattering portion 166 . A part of the scattered laser light 18C is reflected and transmitted within the transparent rod 62D, and reaches the optical fiber 62B connected to the end of the transparent rod 62D.

As described above, the laser light 18C irradiated onto the workpiece table 42 enters the portion of the light-transmitting part 142 where the scattering part 142A is formed, and then reaches the transparent rod 62D after being condensed by the light-condensing unit 62A. . Then, the light reaching the transparent rod 62D is transmitted within the transparent rod 62D and further through the optical fiber 62B connected to the end of the transparent rod 62D, and is condensed by the condenser lens 62E and detected at the photodetector 62C. was detected. Thereby, when the laser light 18C is irradiated to the scattering part 142A, the detection part 62 can detect the scattered light of the laser light 18C. Therefore, the setting value of the scanner 18A (see FIG. 4 ) at this time is made equal to that of the scattering part 142A. The position corresponding to the position can correct the position of the illuminated light. Thereby, when the substrate W disposed on the workpiece table 42 is optically processed in a subsequent step, the position of the light irradiated from the light irradiation part 18 (see FIG. 4 ) can be accurately corrected.

In addition, since the light-transmitting part 142 and the transparent rod 62D that irradiate light by the light irradiation part 18 (see FIG. 4) are made of transparent materials, even if the light irradiation part 18 (see FIG. 4) is used for correction, When the position of the irradiated light is repeatedly irradiated with relatively high-intensity light to the light-transmitting part 142 and the transparent rod 62D, the target of the irradiated light (ie, the light-transmitting part 142 and the transparent rod 62D) can also be suppressed due to correction. of damage.

In addition, since the light detected in the detection part 62 is scattered light, rather than the transmitted light that passes through the light-transmitting part 142 without scattering, compared with the case of directly detecting the unscattered transmitted light, it is possible to suppress The detection unit 62 is damaged due to this light.

FIG. 9 is a diagram showing the transmission state of light in the transparent rod 62D. As shown in FIG. 9 , laser light 18C incident from the light irradiation part 18 (see FIG. 4 ) is transmitted within the transparent rod 62D and reaches the end of the transparent rod 62D. Then, this light is transmitted through the optical fiber 62B connected to the end in the longitudinal direction (X-axis direction) of the transparent rod 62D, and is then condensed by the condenser lens 62E (see FIG. 4 ). Then, this light is detected by the photodetector 62C (see FIG. 4 ) facing the end of the transparent rod 62D via the condenser lens 62E.

As shown in FIG. 9 , since the scattering part 166B is formed corresponding to the position where the laser light 18C is incident, the laser light 18C incident on the transparent rod 62D does not pass through the transparent rod 62D but is scattered on the scattering part 166B, making it easy to scatter on the transparent rod 62D. 62D pass.

In addition, since the scattering portions 166A and 166B are dispersedly provided in the length direction (X-axis direction) of the lower surface of the transparent rod 62D, compared with the case where the scattering portions are provided under the entire transparent rod 62D, for example, the structure of the transparent rod is smaller The laser light 18C transmitted within 62D has less chance of scattering during transmission. Therefore, the laser light 18C can be easily transmitted within the transparent rod 62D while satisfying the total reflection condition. As a result, the decrease in the amount of the laser light 18C detected by the photodetector 62C can be suppressed.

FIG. 10 is a diagram showing the transmission state of light in the transparent rod 62D. In FIG. 10 , the incident position of the laser light 18C incident on the transparent rod 62D is closer to the position of the optical fiber 62B connected to the photodetector 62C (see FIG. 4 ) than in the case of FIG. 9 .

As shown in FIG. 10 , the scattering portion 166A is formed corresponding to the position where the laser light 18C is incident, whereby the laser light 18C incident on the transparent rod 62D is scattered at the scattering portion 166A without passing through the transparent rod 62D. Therefore, it can be easily dispersed in the scattering portion 166A. Transparent rod 62D pass.

Here, the width of the scattering portion 166B in the Y-axis direction is larger than the width of the scattering portion 166A in the Y-axis direction. Thereby, compared with the laser light 18C that is incident on the position corresponding to the scattering part 166A as shown in FIG. 10 , the laser light 18C that is incident on the position corresponding to the scattering part 166B as shown in FIG. 9 is incident on the corresponding position. The ratio of the scattering part 166 becomes high, so that it can be scattered in the scattering part 166 and easily transmitted in the transparent rod 62D. That is, because the laser light 18C incident at a position far away from the photodetector 62C (see FIG. 4 ) is more likely to be scattered by the corresponding scattering portion 166 than the laser light 18C incident at a position close to the photodetector 62C. , so the amount of light can be high and easily transmitted within the transparent rod 62D.

In this way, even when the amount of laser light 18C incident on a position far away from the photodetector 62C (see FIG. 4 ) is reduced due to scattering during propagation in the transparent rod 62D, the amount of laser light 18C incident on a position close to the photodetector 62C is reduced. There will be less difference in the amount of light detected by the photodetector 62C between the laser light 18C and the laser light 18C incident at a position far away from the photodetector 62C. Thereby, since it is possible to set the threshold value of the detected light amount (a value used to distinguish it from noise) without considering the position where the laser light 18C is incident, it can effectively remove the light transmitted by the noise. Laser light 18C is used for detection. As a result, the light detection accuracy can be improved.

The scattering portion provided on the transparent rod 62D is not limited to the one formed by processing the surface of the transparent rod 62D. For example, it may be a reflection film that functions as a scattering portion and is coated on the lower surface of the transparent rod 62D. situation.

If the structure is made of a transparent material like the scattering portion 166, damage caused by light irradiation is less likely to occur, and outgas, which is a problem under vacuum (or reduced pressure), can be suppressed. In addition, On the other hand, if a reflective film such as a metal film is provided as the scattering portion, the reflectivity of the light incident on the transparent rod 62D can be increased, thereby improving the transmission efficiency of the light.

FIG. 11 is a cross-sectional view schematically showing a structural example of the transparent rod 162D. As shown in FIG. 11 , a reflective film 168 serving as a scattering portion is coated on the lower surface of the transparent rod 162D. The reflective film 168 is, for example, a metal film made of aluminum oxide (alumina) or the like.

When the reflective film 168 is provided at this location, the light is totally reflected by the reflective film 168 and then transmitted within the transparent rod 162D.

＜About the effects produced by the implementation described above＞ Next, examples of effects produced by the above-described embodiments will be shown. Furthermore, in the following description, although the effects have been described in the specific configurations illustrated based on the above-described embodiments, those illustrated in this specification may be replaced with other specific configurations within the scope of producing the same effects. composition. That is, in the following, for convenience of explanation, only any one of the corresponding specific configurations is described representatively. However, the specific configuration described in the representative description may be replaced with other corresponding specific configurations.

According to the above-described embodiment, the photodetection device includes the transmission member and the photodetector 62C. Here, the transmission member is, for example, a member corresponding to at least one of the transparent rod 62D, the transparent rod 162D, and the like. The transparent rod 62D is used to transmit the light irradiated from the light irradiation part 18 . Photodetector 62C detects light transmitted through transparent rod 62D. Furthermore, a plurality of first scattering parts for scattering light are provided in a dispersed manner on the transparent rod 62D. Here, for example, the first scattering part corresponds to at least one of the scattering part 166, the scattering part 166A, the scattering part 166B, and the like.

According to such a structure, by suppressing excessive diffusion of the laser light 18C during transmission in the transparent rod 62D, it is possible to suppress a decrease in the amount of the transmitted laser light 18C. As a result, reduction in light detection accuracy can be suppressed.

Furthermore, when other structures illustrated in this specification are appropriately added to the above-mentioned structure, in other words, even when other structures in this specification that are not mentioned in the above-mentioned structure are appropriately added, the same effect can be produced. .

Furthermore, according to the above-described embodiment, the photodetector 62C is located at a position facing the longitudinal end of the transparent rod 62D. Furthermore, the plurality of scattering portions 166 are disposed dispersedly along the length direction of the transparent rod 62D. According to this structure, light can be efficiently transmitted along the length direction of the transparent rod 62D.

Furthermore, according to the above-described embodiment, the transparent rod 62D has an end portion facing the photodetector 62C. Furthermore, the width of the second scattering portion, which is one of the plurality of scattering portions 166, is greater than the width of the third scattering portion. The third scattering portion is provided at an end position closer to the second scattering portion. Here, the second scattering part corresponds to the scattering part 166B, for example. In addition, the third scattering part corresponds to the scattering part 166A, for example. With this configuration, the decrease in the light amount of the laser light 18C generated corresponding to the transmission distance within the transparent rod 62D is offset, so that it is compared with the light amount scattered by the scattering portion 166A at the position where the transmission distance is shortened. , the amount of light scattered by the scattering portion 166B at the position where the transmission distance is longer can be relatively increased, and therefore the difference in the amount of light transmitted from different incident positions in the transparent rod 62D and detected can be suppressed. As a result, the light detection accuracy can be improved.

Furthermore, according to the embodiment described above, the light detection device includes the workpiece table 42 . Furthermore, the light irradiation part 18 irradiates the upper surface of the workpiece table 42 with light. In addition, at least one fourth scattering portion for scattering light is provided in at least a part of the workpiece table 42 . Here, the fourth scattering part corresponds to the scattering part 142A, for example. In addition, the scattering part 142A is made of transparent material. In addition, the transparent rod 62D transmits the light incident through the scattering part 142A. According to this configuration, since the scattering portion 142A to which light is irradiated is made of a transparent material, even when high-intensity light such as the laser light 18C is irradiated, damage to the portion irradiated with the light can be reduced. Therefore, it is difficult to reduce the position accuracy of the light detected by the detection unit 62 . In addition, by detecting the scattered light scattered by the scattering part 142A, even in the case of detecting high-intensity light such as the laser light 18C, damage to the detection part 62 caused by direct irradiation of light can be reduced.

In addition, according to the embodiment described above, each scattering part 166 is arranged corresponding to the position of the scattering part 142A. According to this configuration, the light scattered by the scattering part 142A and incident on the transparent rod 62D can be further scattered by the scattering part 142A located directly below the light scattering part 142A, so that the light can be efficiently transmitted within the transparent rod 62D.

Furthermore, according to the embodiment described above, the light detection device includes the condenser lens 162 and the light shielding plate 164 . The condenser lens 162 condenses the light incident through the scattering part 142A. The light shielding plate 164 is disposed farther away from the self-scattering portion 142A than the condenser lens 162 . In addition, the light-shielding plate 164 is arranged at the light-condensing position of the condenser lens 162 . Furthermore, the transparent rod 62D transmits the light condensed by the condenser lens 162 . According to such a structure, while blocking the transmitted light with the light shielding plate 164, the light detector 62C detects the scattered light scattered by the scattering part 142A. Even in the case of detecting high-intensity light such as the laser light 18C, it is possible to reduce the risk caused by Damage to the detection part 62 caused by direct light irradiation.

In addition, according to the embodiment described above, the plurality of scattering portions 166 are formed by sandblasting the surface of the transparent rod 62D. According to such a structure, it is possible to form a scattering portion that is less likely to be damaged by light irradiation and that can suppress outgassing that is a problem under vacuum (or reduced pressure).

In addition, according to the embodiment described above, the plurality of first scattering parts are coated on the reflective film 168 on the lower surface of the transparent rod 162D. According to this structure, the reflectivity of the lower surface of the transparent rod 62D is increased by using the reflective films 168 dispersedly provided on the lower surface, thereby suppressing excessive diffusion during light transmission and improving the transmission efficiency of the light incident on the transparent rod 62D.

In addition, according to the embodiment described above, the light irradiated from the light irradiation part 18 is laser light 18C. According to this configuration, even when high-intensity light such as laser light 18C is irradiated, reduction in the amount of transmitted light can be suppressed by suppressing excessive diffusion during transmission.

Furthermore, according to the above-described embodiment, the light detection device includes a chamber in which the transparent rod 62D is enclosed. Here, the above-mentioned chamber corresponds to the vacuum chamber 12, for example. Furthermore, the photodetector 62C detects the light transmitted through the transparent rod 62D outside the vacuum chamber 12 . According to this configuration, since the photodetector 62C in the detection unit 62 is provided outside the vacuum chamber 12, it is possible to suppress the release gas released from the photodetector 62C from being generated in the vacuum chamber 12.

＜Modifications of the embodiments described above＞ In the above-described embodiments, the material, material, size, shape, relative arrangement relationship, implementation conditions, etc. of each component may also be described. However, these are only examples and are not limiting. By.

Therefore, numerous modifications and equivalents not illustrated are included in the technical scope disclosed in this specification. For example, when at least one component is modified, it also includes addition or omission.

In addition, in the embodiments described above, especially when the names of materials are described in an unspecified manner, these materials should also include other additives, such as alloys, as long as there is no contradiction.

1:Light irradiation device 12: Vacuum chamber 12A, 12B, 12C: opening 14:External fixation part 14A, 14C: columnar member 14B:External components 16A, 16B: bellows 18:Light irradiation part 18A:Scanner 18B, 62E, 162: condenser lens 18C:Laser light 20:Illumination window 20A: Transparent window 21: Vacuum pump 22:Control Department 24: Erection 42:Workpiece table 42A:Object configuration area 42B: Position correction area 44:Slider 46:Pedestal 48:Linear guide rail 50: Linear motor mechanism 52: Lifting pin mechanism 52A: Lift pin 62:Testing Department 62A: Condensing unit 62B: Optical fiber 62C: Light detector 62D, 162D: Transparent rod 142: Transparent part 142A, 166, 166A, 166B: scattering part 164:Visor 168: Reflective film W: substrate

FIG. 1 is a perspective view schematically showing a structural example of a light irradiation device according to the embodiment. 2 is a cross-sectional view showing an example of the internal structure and peripheral structure of the vacuum chamber of the light irradiation device according to the embodiment. FIG. 3 is a perspective view mainly showing the light irradiation part and the workpiece table in the structure illustrated in FIG. 2 . FIG. 4 is a cross-sectional view mainly showing an example of the structure of the light irradiation part and the workpiece table in the structure illustrated in FIG. 2 . FIG. 5 is a diagram showing an example of the formation width of the scattering portion. FIG. 6 is a diagram showing an example of the formation width of the scattering portion. Figure 7 is a schematic diagram showing the light condensing unit and the transparent rod in the detection part. Figure 8 is a schematic diagram showing the light condensing unit and the transparent rod in the detection part. Figure 9 is a diagram showing the transmission state of light in a transparent rod. Figure 10 is a diagram showing the transmission state of light in a transparent rod. FIG. 11 is a cross-sectional view schematically showing an example of the structure of the transparent rod.

12: Vacuum chamber

18:Light irradiation part

18A:Scanner

18B: condenser lens

18C:Laser light

20:Illumination window

20A: Transparent window

42:Workpiece table

62:Testing Department

62A: Condensing unit

62B: Optical fiber

62C: Light detector

62D, 162D: Transparent rod

62E: condenser lens

142: Transparent part

142A, 166, 166A, 166B: scattering part

W: substrate

Claims (10)

A light detection device that detects light irradiated from a light irradiation part; it is provided with: a transmission member for transmitting the above-mentioned light irradiation from the above-mentioned light irradiation part; and a photodetector for detecting the light irradiation by the above-mentioned light irradiation part. The above-mentioned light transmitted by the transmission member; the above-mentioned transmission member is dispersedly provided with a plurality of first scattering parts for scattering the above-mentioned light; the above-mentioned light detection device further includes a workpiece table; the above-mentioned light irradiation part emits the above-mentioned light The upper surface of the above-mentioned workpiece table is irradiated, and at least one fourth scattering part for scattering the above-mentioned light is provided on at least a part of the above-mentioned workpiece table. The above-mentioned fourth scattering part is made of a transparent material, and the above-mentioned transmission member transmits the light through the above-mentioned third The above-mentioned light incident on the four scattering parts. The light detection device of claim 1, wherein the photodetector is located at a position opposite to an end of the transmission member in the length direction, and the plurality of first scattering parts are dispersed along the length direction of the transmission member. is configured. The light detection device of claim 1 or 2, wherein the transmission member has an end opposite to the photodetector, and the width of one of the plurality of first scattering parts, that is, the second scattering part, is equal to or greater than The width of the third scattering part is the scattering part provided at a position closer to the end than the second scattering part. The light detection device of claim 1, wherein each of the above-mentioned first scattering parts is It is arranged to correspond to the position of the fourth scattering part. The light detection device of claim 1, further comprising: a condenser lens for condensing the light incident through the fourth scattering part; and a light shielding plate located further than the light condenser. The lens is located away from the fourth scattering portion and is arranged at a condensing position of the condensing lens; and the transmission member transmits the light condensed by the condensing lens. The light detection device according to claim 1 or 2, wherein the plurality of first scattering parts are formed by sand blasting on the surface of the transmission member. The light detection device of claim 1 or 2, wherein the plurality of first scattering parts are reflective films coated on the underside of the transmission member. The light detection device according to claim 1 or 2, wherein the light irradiated from the light irradiation part is laser light. The light detection device according to claim 1 or 2, further comprising a chamber containing the transmission member, and the photodetector detects the light transmitted by the transmission member outside the chamber. A light irradiation device provided with: at least one light irradiation part for irradiating light; and the light detection device of claim 1 or 2.