JP2022147398A - Light irradiation device - Google Patents

Abstract

To restrains detection accuracy from decreasing due to light irradiation.SOLUTION: A light irradiation device includes a light irradiation part that applies light to a top surface of a stage. The stage is provided with a first scattering part for scattering light, and also provided with a detection part for detecting the light scattered by the first scattering part made of a transparent material. The detection part comprises a propagation member that is made of a transparent material, and a photodetector. The propagation member is provided with a second scattering part for scattering the light.SELECTED DRAWING: Figure 4

Description

The technology disclosed in this specification relates to technology for detecting emitted light.

2. Description of the Related Art Conventionally, an optical processing technique for processing an object by light irradiation such as laser light irradiation has been used.

Japanese Patent Application Laid-Open No. 2006-272430

In order to improve the processing accuracy in the above optical processing technology, it is important to control the position irradiated with light with high accuracy.

As a method of detecting the position irradiated with light, for example, there is a method of detecting the position irradiated with light by capturing an image of the light with an area camera. However, the accumulation of damage to the members or optical elements placed where the light is irradiated lowers the detection accuracy, especially when high-intensity light such as laser light is detected. was there.

The technology disclosed in the specification of the present application has been made in view of the problems described above, and is a technology for suppressing deterioration in detection accuracy caused by light irradiation.

A light irradiation device according to a first aspect of the technology disclosed in this specification includes a stage and at least one light irradiation unit for irradiating an upper surface of the stage with light, and at least a part of the stage is provided with at least one first scattering unit for scattering the light, further comprising a detection unit for detecting the light scattered in the first scattering unit, the first scattering unit The detection section includes a propagation member for propagating the light transmitted through the first scattering section, and light for detecting the light propagated by the propagation member. a detector, wherein the propagation member is made of a transparent material, and the propagation member is provided with a second scattering portion for scattering the light.

A light irradiation device that is a second aspect of the technology disclosed in this specification relates to the light irradiation device that is the first aspect, and the propagation member is made of a glass material.

A light irradiation device that is a third aspect of the technology disclosed in the specification of the present application relates to the light irradiation device that is the first or second aspect, and the second scattering part is a blasting light on the surface of the propagation member. Formed by processing.

A light irradiation device according to a fourth aspect of the technology disclosed in this specification relates to the light irradiation device according to any one of the first to third aspects, wherein the second scattering unit includes the It is a reflective film applied to the lower surface of the propagation member.

A light irradiation device according to a fifth aspect of the technology disclosed in this specification relates to the light irradiation device according to any one of the first to fourth aspects, wherein at least one of the second scattering units The part is provided in a range overlapping with the first scattering part in plan view.

A light irradiation device according to a sixth aspect of the technology disclosed in this specification relates to the light irradiation device according to any one of the first to fifth aspects, wherein the propagating member has a cylindrical shape .

A light irradiation device according to a seventh aspect of the technology disclosed in this specification relates to the light irradiation device according to any one of the first to sixth aspects, wherein the propagation member propagates the light The second scattering portion is formed to extend in a first direction, which is the direction in which the light is scattered, and the second scattering portion is provided continuously in the first direction.

A light irradiation device according to an eighth aspect of the technology disclosed in the specification of the present application relates to the light irradiation device according to any one of the first to seventh aspects, and the light emitted from the light irradiation unit The light is laser light.

A light irradiation device according to a ninth aspect of the technology disclosed in this specification relates to the light irradiation device according to any one of the first to eighth aspects, further comprising a chamber containing the stage. The photodetector detects the light propagated by the propagation member outside the chamber.

A light irradiation device according to a tenth aspect of the technology disclosed in the present specification relates to the light irradiation device according to any one of the first to ninth aspects, wherein the detection unit comprises: a condensing lens for condensing the light transmitted through the scattering section; and a light shield disposed at a position farther from the first scattering section than the condensing lens and at a condensing position of the condensing lens. and a plate, wherein the propagation member propagates the light condensed by the condensing lens.

According to at least the first aspect of the technology disclosed in the specification of the present application, since the first scattering section and the propagation member irradiated with light are made of a transparent material, high-intensity light such as laser light can be emitted. Even in the case of irradiation, it is possible to reduce damage to the portion irradiated with light. Therefore, the positional accuracy of the light detected by the detector is less likely to decrease.

Also, the objects, features, aspects, and advantages associated with the technology disclosed herein will become more apparent from the detailed description and accompanying drawings presented below.

It is a perspective view which shows roughly the example of a structure of the light irradiation apparatus regarding embodiment. FIG. 2 is a cross-sectional view showing an example of the internal configuration and peripheral configuration of a vacuum chamber of the light irradiation device according to the present embodiment; FIG. 3 is a perspective view mainly showing a light irradiation unit and a stage in the configuration shown in the example of FIG. 2; FIG. 3 is a cross-sectional view mainly showing an example of a configuration of a light irradiation unit and a stage among the configurations illustrated in FIG. 2; FIG. 4 is a schematic diagram showing the configuration and action of a detection unit; FIG. 4 is a schematic diagram showing the configuration and action of a detection unit; FIG. 4 is a cross-sectional view schematically showing an example of the configuration of a transparent rod;

Embodiments will be described below with reference to the attached drawings. In the following embodiments, detailed features and the like are also shown for technical explanation, but they are examples, and not all of them are necessarily essential features for enabling the embodiments.

It should be noted that the drawings are shown schematically, and for the sake of convenience of explanation, the configurations may be omitted or simplified in the drawings as appropriate. In addition, the mutual relationship of sizes and positions of configurations shown in different drawings is not necessarily described accurately and can be changed as appropriate. Also, in drawings such as plan views that are not cross-sectional views, hatching may be added to facilitate understanding of the contents of the embodiments.

In addition, in the description given below, the same components are denoted by the same reference numerals, and their names and functions are also the same. Therefore, a detailed description thereof may be omitted to avoid duplication.

Also, in the descriptions in this specification, when a component is described as “comprising,” “including,” or “having,” unless otherwise specified, it is an exclusive term that excludes other components. not an expression.

In addition, even if ordinal numbers such as “first” or “second” are used in the description given in this specification, these terms are used to understand the content of the embodiments. They are used for the sake of convenience and are not limited to the order or the like that can occur with these ordinal numbers.

Also, in the descriptions provided herein, specific positions or orientations such as "top", "bottom", "left", "right", "side", "bottom", "front" or "back" are used for convenience in order to facilitate understanding of the content of the embodiment, and the position or direction when actually implemented It has nothing to do with.

In addition, in the description given in this specification, when “the upper surface of” or “the lower surface of ...” is described, in addition to the upper surface itself or the lower surface itself of the target component, the target component A state in which other constituent elements are formed on the upper or lower surface of the is also included. That is, for example, when it is described as "B provided on the upper surface of A", it does not prevent another component "C" between A and B.

In addition, in the descriptions described in the specification of the present application, expressions indicating shapes, such as "square shape" or "cylindrical shape", unless otherwise specified, strictly indicate that shape, and It includes the case where irregularities or chamfers are formed within the range where tolerance or equivalent function can be obtained.

<Embodiment>
A light irradiation device according to this embodiment will be described below. In the following embodiments, as an example, a light irradiation apparatus in which the inside of the chamber is in a vacuum or a reduced pressure atmosphere is described, but the same can be applied even when the inside of the chamber is not in a vacuum.

<Regarding the configuration of the light irradiation device>
FIG. 1 is a perspective view schematically showing an example of the configuration of a light irradiation device 1 according to this embodiment. In FIG. 1, the illustration of the chamber frame that supports the vacuum chamber 12 or the wiring that is actually connected is omitted for the sake of convenience. It should be noted that the "vacuum" in the present embodiment is desirably a high vacuum (for example, 0.00001 Pa) in order to prevent deterioration of the characteristics of the substrate W, but if the degree of vacuum does not reach the high vacuum, shall also include

As an example is shown in FIG. 1, the light irradiation device 1 includes a vacuum chamber 12, an external fixed part 14 such as a granite surface plate, and the vacuum chamber 12 and the external fixed part 14, which are made of, for example, stainless steel. A bellows 16A which is a stretchable member, a light irradiation unit 18 which irradiates light into the vacuum chamber 12, a vacuum pump 21 which reduces the pressure in the vacuum chamber 12 to a vacuum state, and a light irradiation device 1. and a control unit 22 for controlling the driving unit. In the above description, bellows made of stainless steel or the like is shown as an example of the elastic member. An elastic member made of resin or the like may be employed. Further, the shape of the stretchable member may not be a bellows shape like the bellows 16A described above.

The vacuum chamber 12 has a space in which the substrate W is accommodated. The substrate W to be processed includes, for example, a semiconductor wafer, a glass substrate for a liquid crystal display device, a flat panel display (FPD) substrate such as an organic EL (electroluminescence) display device, an optical disk substrate, a magnetic disk substrate, and a magneto-optical substrate. It includes disk substrates, photomask glass substrates, ceramic substrates, field emission display (FED) substrates, solar cell substrates, and the like. The substrate W is, for example, a substrate having a thin film formed on its upper surface.

An opening 12A is formed in the side surface of the vacuum chamber 12 through which the substrate W passes when the substrate W is loaded and unloaded. The opening 12A is appropriately closed when the vacuum chamber 12 is evacuated. Other configurations accommodated inside the vacuum chamber 12 will be described later.

The light irradiation unit 18 irradiates the upper surface of the substrate W housed in the vacuum chamber 12 with light. At this time, the substrate W is aligned in advance by a detection unit or the like, which will be described later. The light irradiation unit 18 ablates the substrate W by irradiating it with laser light, for example. The light irradiator 18 may irradiate light such as an electron beam depending on the purpose of processing. The light irradiation unit 18 irradiates the upper surface of the substrate W accommodated in the vacuum chamber 12 from outside the vacuum chamber 12 through an irradiation window (transparent plate made of quartz or the like) (not shown). Light scans the upper surface of the substrate W by moving the substrate W in the vacuum chamber 12 relative to the light irradiation unit 18 or by controlling the optical system in the light irradiation unit 18 . Further, the light irradiation section 18 is arranged on the upper surface of the mount 24 fixed to the external fixing section 14 .

The control unit 22 includes, for example, a hard disk drive (ie, HDD), a random access memory (ie, RAM), a read only memory (ie, ROM), a flash memory, a volatile Or non-volatile semiconductor memory, magnetic disk, flexible disk, optical disk, compact disk, mini disk or storage device including memory (storage medium) including DVD, for example, the storage device, external CD-ROM, external A processing circuit such as a central processing unit (i.e., CPU) that executes programs stored in a DVD-ROM or an external flash memory, and a mouse, keyboard, touch panel, or various switches , an input device to which information can be input, and an output device, such as a display, a liquid crystal display, or a lamp, to which information can be output.

The control unit 22 controls the output of the light source in the light irradiation unit 18 and the direction in which the light is irradiated, the output control of the vacuum pump 21, and the driving control of each driving unit described later.

FIG. 2 is a cross-sectional view showing an example of the internal configuration and peripheral configuration of the vacuum chamber 12 of the light irradiation device 1 according to this embodiment. As an example is shown in FIG. 2, inside the vacuum chamber 12 are a stage 42 on which the substrate W is placed, and a slider 44 which is movable in the Y-axis direction and supports the stage 42 from below. a base 46 fixed to the external fixing portion 14 independently of the vacuum chamber 12; a linear guide 48 fixed to the base 46 and extending in the Y-axis direction; A linear motor mechanism 50 for moving in the axial direction and a lift pin mechanism 52 having lift pins 52A for supporting the substrate W through through holes (not shown here) formed in the stage 42 are provided.

The stage 42 holds the substrate W substantially horizontally while directing the processing surface of the substrate W upward. A detailed configuration of the stage 42 will be described later. The slider 44 that supports the stage 42 is moved in the Y-axis direction by the linear motor mechanism 50, and the light irradiated from the light irradiation unit 18 is scanned in the X-axis direction, whereby the processing area of the substrate W in plan view is changed. can be scanned with light. Alternatively, by scanning the light irradiated from the light irradiation unit 18 in the X-axis direction and the Y-axis direction, it is possible to scan the entire processing region of the substrate W with the light in plan view. Note that the lift pin mechanism 52 is fixed to the base 46 .

The linear motor mechanism 50 is fixed to the external fixing part 14 positioned on the side of the vacuum chamber 12 through an opening 12B formed in the side surface of the vacuum chamber 12 . Specifically, linear motor mechanism 50 is fixed to the end of hollow post 14A passing through bellows 16A welded to opening 12B. At this time, wiring and the like connected to the linear motor mechanism 50 are led out of the vacuum chamber 12 through the inside of the columnar member 14A. The columnar member 14A included in the external fixing portion 14 is fixed to the external member 14B included in the external fixing portion 14. As shown in FIG. Also, the columnar member 14A does not come into contact with the bellows 16A connected to the side surface of the vacuum chamber 12. As shown in FIG.

The base 46 is fixed to the external fixing part 14 positioned below the vacuum chamber 12 through an opening 12C formed in the bottom surface of the vacuum chamber 12 . Specifically, the base 46 is fixed to the end of the columnar member 14C passing through the bellows 16B welded to the opening 12C. The columnar member 14C included in the external fixing portion 14 is fixed to the external member 14B included in the external fixing portion 14. As shown in FIG. Also, the columnar member 14C does not come into contact with the bellows 16B connected to the bottom surface of the vacuum chamber 12. As shown in FIG.

In FIG. 2, the external fixtures 14 are arranged laterally and downwardly of the vacuum chamber 12, but it is not essential that the external fixtures 14 at these positions be continuous, but distributed at these positions. It may be provided as such, or may be provided only at one of the positions. In addition, the vacuum chamber 12 is supported and fixed vertically by a chamber frame (not shown) separately from the bellows 16B.

FIG. 3 is a perspective view mainly showing the light irradiation section 18 and the stage 42 in the configuration shown in FIG. 3 shows a state in which the substrate W is placed on the upper surface of the stage 42. As shown in FIG. The light irradiation unit 18 can scan the light irradiation direction in the X-axis direction in FIG. 3, and the stage 42 can be moved in the Y-axis direction by a linear motor mechanism 50 (see FIG. 2). Therefore, the light emitted from the light irradiation unit 18 to the upper surface of the stage 42 can form a rectangular irradiation area (light irradiation area) on the upper surface of the substrate W. FIG.

As shown in FIG. 3, the stage 42 calibrates a target placement region 42A in which the substrate W to be irradiated with light by the light irradiation unit 18 is placed, and the position of the light irradiated by the light irradiation unit 18. A position calibration area 42B is provided as an area for performing calibration.

The target placement area 42A places the substrate W at a specific position within the target placement area 42A. Thereby, the positional relationship between the stage 42 and the substrate W is specified in advance. In the position calibration area 42B, the position of the light irradiated from the light irradiation section 18 into the position calibration area 42B is detected. Then, in the position calibration region 42B, prior to the optical processing of the substrate W in the target placement region 42A, the correspondence relationship between the set value of the direction of the light irradiated from the light irradiation unit 18 and the detected irradiation position of the light. is calibrated.

At least part of the position calibration region 42B is provided with a light transmitting portion 142 that transmits light. Translucent portion 142 is made of a glass material such as quartz (SiO ₂ ) or a transparent material such as transparent resin (for example, silicon resin). The translucent part 142 is provided from the upper surface to the lower surface of the stage 42 corresponding to the position calibration area 42B. The light irradiated from the light irradiation section 18 to the light transmission section 142 is transmitted from the upper surface to the lower surface of the stage 42 .

At least one (two in FIG. 3) scattering portions 142A are provided in at least a portion of the light transmitting portion 142 . The scattering section 142A is made of a transparent material, and scatters and reflects or transmits the irradiated light. The position where the scattering section 142A is provided is a specific position on the stage 42 . That is, the position of the scattering portion 142A on the entire stage 42 is specified in advance. In FIG. 3, each scattering section 142A is arranged at the end of the light irradiation region of the light irradiation section 18 in the X-axis direction, but the position where the scattering section 142A is arranged is a specific position on the stage 42. It is not limited to the end portion of the light irradiation area of the light irradiation section 18 as long as it is sufficient. The scattering portion 142A has a property of scattering incident light, and can be obtained, for example, by subjecting a glass material to blasting or frosting using hydrofluoric acid or the like. 3, each scattering portion 142A is formed on the upper surface of the translucent portion 142, but at least one scattering portion 142A may be formed on the lower surface of the translucent portion 142. FIG.

In the case shown in FIG. 3, the target placement area 42A and the position calibration area 42B are separate areas, but these areas may overlap at least partially. That is, the translucent part 142 may be provided in at least a part of the area where the substrate W is arranged. In such a case, for example, the position of the light irradiated from the light irradiation unit 18 may be calibrated at the position where the substrate W is arranged in a state where the substrate W is not arranged.

Further, the translucent portion 142 may have a scattering portion 142A formed over its entire range. In other words, there may be no portion where only light is transmitted, and light scattering may occur over the entire range of the light transmitting portion 142 .

In FIG. 3, the translucent portions 142 are provided extending in the X-axis direction, and scattering portions 142A are provided at respective ends in the X-axis direction. It may be divided into parts. However, when a plurality of scattering portions 142A are provided in the integrally formed translucent portion 142 (that is, the case shown in FIG. 3), when the translucent portion 142 is manufactured with a transparent material, The light transmitting portion 142 can be attached (fitted in in the case of FIG. 3) to the stage 42 while maintaining the positional accuracy among the plurality of scattering portions 142A. Therefore, since there is no positional deviation between the scattering portions 142A when attached to the stage 42, it is possible to maintain high accuracy of calibration performed using the plurality of scattering portions 142A.

FIG. 4 is a sectional view mainly showing an example of the configuration of the light irradiation section 18 and the stage 42 among the configurations shown in FIG. As an example is shown in FIG. 4, the light irradiation unit 18 includes a scanner 18A such as a galvanometer mirror or a polygon mirror that controls the direction of the light to be irradiated in the X-axis direction and the Y-axis direction, and light from a light source (not shown). and a condensing lens 18B for condensing the light. In FIG. 4, the light irradiated through the condensing lens 18B and the irradiation window 20 made of quartz or the like is, for example, laser light 18C. The laser beam 18C can scan the substrate W placed on the upper surface of the stage 42 in the X-axis direction and the Y-axis direction under the control of the scanner 18A. Here, the light irradiation unit 18 is preferably capable of controlling light in the X-axis direction and the Y-axis direction, but the light irradiation unit 18 can control light in either the X-axis direction or the Y-axis direction. There may be.

The stage 42 includes a light-transmitting portion 142 formed in the position calibration region 42B and a scattering portion 142A formed on the top surface of the light-transmitting portion 142 . The laser beam 18C emitted from the light irradiation unit 18 can scan in the X-axis direction at least within a range reaching the scattering unit 142A.

A detector 62 for detecting light is arranged below the stage 42 . The detection unit 62 includes a light collecting unit 62A that collects light within the vacuum chamber 12, a transparent rod 62D that propagates the light collected by the light collecting unit 62A, a scattering unit 166 provided in the transparent rod 62D, A fiber 62B that propagates the light propagating in the transparent rod 62D further out of the vacuum chamber 12, and a photodetector 62C that detects the light propagated out of the vacuum chamber 12 by the fiber 62B. Since the photodetector 62</b>C is arranged outside the vacuum chamber 12 , it is possible to suppress the intrusion into the vacuum chamber 12 of gas that may be emitted from the photodetector 62</b>C. In the example shown in FIG. 4, the light propagating inside the transparent rod 62D is propagated to the outside of the vacuum chamber 12 by the fiber 62B. A lens or the like may be used for

5 and 6 are schematic diagrams showing the configuration and operation of the detection section 62. FIG. As examples are shown in FIGS. 5 and 6, the light collection unit 62A of the detection unit 62 includes a light collection lens 162 that collects the light on the optical axis of the light that is incident from the light irradiation unit 18, and a light blocking plate 164 arranged downstream of the light path of the condenser lens 162 on the optical axis of the light incident from the light irradiation unit 18 (that is, on the Z-axis negative direction side in FIGS. 5 and 6). Prepare. The light blocking plate 164 is a plate-like member that blocks incident light, and is arranged at a light condensing position of the condensing lens 162 at a position farther from the light transmitting portion 142 than the condensing lens 162 .

5 and 6, the transparent rod 62D of the detection unit 62 is made of a glass material such as quartz (SiO ₂ ) or a transparent material such as a transparent resin (for example, silicone resin). be done. Also, the transparent rod 62D is, for example, a cylindrical rod member, and is formed to extend in a plane along the surface of the stage 42 (that is, the XY plane). If the transparent rod 62D has a cylindrical shape, when the light condensed by the light condensing unit 62A is incident on the transparent rod 62D, the total reflection condition is easily satisfied within the transparent rod 62D, and the light can be efficiently propagated. can be done. However, the shape of the transparent rod 62D is not limited to a cylindrical shape. Further, in this embodiment, the transparent rod 62D has a bar shape, but the transparent rod 62D may have a surface shape corresponding to the entire surface of the stage 42, for example.

The transparent rod 62D is arranged at a conjugate position with the scattering section 142A with the condenser lens 162 as a reference in the Z-axis direction.

Also, the transparent rod 62D may be arranged in a range that overlaps at least the scattering portion 142A in plan view (for example, a range that includes the scattering portion 142A in plan view). With such an arrangement, the light scattered by the scattering section 142A and further condensed by the condensing unit 62A is efficiently incident on the transparent rod 62D and propagated.

A scattering portion 166 is provided on the lower surface of the transparent rod 62D. The scattering section 166 scatters and reflects or transmits the irradiated light. Scattering portion 166 is obtained, for example, by subjecting a glass material to blasting or frosting using hydrofluoric acid or the like.

Scattering portion 166 is arranged in a range that overlaps at least scattering portion 142A in plan view (for example, a range that includes scattering portion 142A in plan view). Note that the scattering portion 166 may be provided inside or on the upper surface of the transparent rod 62D. Moreover, the range in which the scattering portion 166 is provided may be, for example, continuously extending in the longitudinal direction of the transparent rod 62D as shown in FIG. may have been

The scattering portion provided on the transparent rod 62D is not limited to one formed by processing the surface of the transparent rod 62D. may be the case.

If the transparent material is processed like the scattering part 166, damage due to light irradiation is unlikely to occur, and it is possible to suppress outgassing, which is a problem under vacuum (or under reduced pressure). If a reflective film such as a metal film is provided as the scattering portion, the reflectance of the light incident on the transparent rod 62D is improved, so that the propagation efficiency of the light can be improved.

FIG. 7 is a cross-sectional view schematically showing an example of the configuration of the transparent rod 162D. As shown in FIG. 7, the lower surface of the transparent rod 162D is coated with a reflective film 168 as a scattering portion. Reflective film 168 is a metal film made of, for example, alumina (aluminum oxide).

Here, the light incident on the transparent rod 162D is scattered light that has already been scattered by the scattering section 142A, and has a lower intensity than the light directly irradiated from the light irradiation section 18 (see FIG. 4). Therefore, even if the reflective film 168 is provided instead of the scattering portion 166, the degree of deterioration of the reflective film 168 can be kept relatively low.

In the case shown in FIG. 5, the laser light 18C (parallel light) incident from the light irradiation section 18 (see FIG. 4) passes only through the light transmission section 142 of the stage 42 and reaches the light collecting unit 62A. ing. On the other hand, in the case shown in FIG. 6, the laser beam 18C incident from the light irradiation section 18 (see FIG. 4) passes through the scattering section 142A and the translucent section 142 in the stage 42 and reaches the light collecting unit 62A. have reached. Although the laser beam 18C passes through the scattering portion 142A and the translucent portion 142 in FIG. 6, the laser beam 18C may pass through only the scattering portion 142A.

In the case shown in FIG. 5, the laser beam 18C passing through the translucent portion 142 other than the scattering portion 142A reaches the condensing unit 62A without a large change in the irradiation range and direction of the light. Then, the laser beam 18C is condensed by the condensing lens 162 in the condensing unit 62A and enters the light blocking plate 164 arranged at the condensing position of the condensing lens 162 . Since light is blocked by the light blocking plate 164, the laser light 18C does not reach the transparent rod 62D located further downstream than the light blocking plate 164 in the light path along the optical axis of the laser light 18C.

On the other hand, in the case shown in FIG. 6, the laser light 18C passing through the scattering portion 142A in the translucent portion 142 undergoes light scattering when passing through the scattering portion 142A. Then, the laser beam 18C reaches the light collection unit 62A in a state in which the irradiation range of the laser beam 18C is expanded by the scattered light (the sandy portion in FIG. 6). Then, the laser beam 18C is condensed by the condensing lens 162 in the condensing unit 62A.

At this time, the laser beam 18C whose irradiation range is expanded due to the scattering of light in the scattering portion 142A contains many components that are not parallel light, and at least some of the components are at the condensing position of the condensing lens 162. Not focused. Therefore, the light blocking plate 164 arranged at the condensing position of the condensing lens 162 blocks only part of the laser beam 18C. In other words, a portion of the laser light 18C not blocked by the light shielding plate 164, that is, the laser light 18C scattered light arrives.

Then, the laser beam 18C that has entered the transparent rod 62D is scattered in the scattering portion 166. As shown in FIG. A portion of the scattered laser light 18C is reflected off the transparent rod 62D and propagates to reach the fiber 62B connected to the end of the transparent rod 62D. If a reflecting film 168 whose example is shown in FIG. 7 is provided at that location instead of the scattering portion 166, the laser beam 18C is totally reflected by the reflecting film 168 and propagates through the transparent rod 62D.

As described above, when the laser beam 18C irradiated onto the upper surface of the stage 42 is incident on the portion of the translucent portion 142 where the scattering portion 142A is formed, it becomes transparent after being condensed by the condensing unit 62A. Reach rod 62D. The light reaching the transparent rod 62D propagates through the transparent rod 62D and further through the fiber 62B connected to the end of the transparent rod 62D, and is detected by the photodetector 62C. Therefore, when the scattering portion 142A is irradiated with the laser beam 18C, the detector 62 can detect the scattered light of the laser beam 18C. The position of the emitted light can be calibrated so that As a result, when the substrate W placed on the upper surface of the stage 42 is optically processed in a later step, the position of the light emitted from the light irradiation unit 18 can be aligned with high accuracy.

In addition, since the light transmitting portion 142 and the transparent rod 62D to which light is irradiated by the light irradiation portion 18 are made of a transparent material, light is repeatedly transmitted in order to calibrate the position of the light irradiated by the light irradiation portion 18. Even if the portion 142 and the transparent rod 62D are irradiated with relatively high intensity light, damage to the targets irradiated with light for calibration (that is, the transparent portion 142 and the transparent rod 62D) is suppressed. be able to.

In addition, the light detected by the detection unit 62 is scattered light, and is not transmitted light that has passed through the light transmission unit 142 without being scattered. Damage caused by the light at 62 can be suppressed.

<About the effect produced by the embodiment described above>
Next, examples of effects produced by the embodiments described above are shown. In the following description, the effect will be described based on the specific configuration exemplified in the embodiment described above. may be substituted with other specific configurations shown. That is, hereinafter, for convenience, only one of the specific configurations to be associated may be described as a representative, but other specific configurations to which the specific configurations described as representative are associated may be replaced with a similar configuration.

According to the embodiments described above, the light irradiation device includes the stage 42 , at least one light irradiation section 18 and the detection section 62 . The light irradiation unit 18 irradiates the upper surface of the stage 42 with light. At least a portion of the stage 42 is provided with at least one first scattering portion for scattering light. Here, the first scattering portion corresponds to, for example, the scattering portion 142A. The detector 62 detects the light scattered by the scattering section 142A. Also, the scattering portion 142A is made of a transparent material. The detection unit 62 includes a condenser lens 162, a light shielding plate 164, a propagation member, and a photodetector 62C. Here, the propagating member corresponds to, for example, the transparent rod 62D. The condenser lens 162 collects the light that has passed through the scattering section 142A. The light blocking plate 164 is arranged at a position farther from the scattering section 142A than the condenser lens 162 is. Also, the light blocking plate 164 is arranged at the condensing position of the condensing lens 162 . The transparent rod 62D propagates the light condensed by the condensing lens 162. As shown in FIG. Photodetector 62C detects light propagated by transparent rod 62D. Also, the transparent rod 62D is made of a transparent material. A second scattering portion for scattering light is provided at least at a portion of the transparent rod 62D corresponding to the portion where the scattering portion 142A is formed. Here, the second scattering portion corresponds to, for example, the scattering portion 166 or the like. Note that the condenser lens 162 and the light shielding plate 164 in the detection unit 62 may not be provided.

According to such a configuration, the scattering portion 142A and the transparent rod 62D to which light is irradiated are made of a transparent material. It is possible to reduce damage to the irradiated locations (scattering portion 142A and transparent rod 62D). Therefore, the positional accuracy of the light detected by the detector 62 is less likely to decrease. In addition, by detecting the scattered light scattered by the scattering section 142A, damage to the detection section 62 caused by direct irradiation of the light can be reduced even when high-intensity light such as laser light is detected. can do. In addition, since the transparent rod 62D is provided with the scattering portion 166, the light incident on the transparent rod 62D can be scattered by the scattering portion 166 and efficiently propagated through the transparent rod 62D. Therefore, the light can be efficiently detected by the photodetector 62C.

It should be noted that when other configurations exemplified in the present specification are appropriately added to the above configurations, that is, when other configurations in the present specification that are not mentioned as the above configurations are added as appropriate can produce a similar effect.

Also, according to the embodiments described above, the transparent rod 62D is made of a glass material. According to such a configuration, it is possible to suppress damage to the transparent rod 62D that may occur when the light condensed by the condensing lens 162 is irradiated onto the transparent rod 62D. Therefore, the positional accuracy of the light detected by the detector 62 is less likely to decrease.

Also, according to the embodiments described above, the scattering portion 166 is formed by blasting the surface of the transparent rod 62D. According to such a configuration, damage due to light irradiation is unlikely to occur, and outgassing, which is a problem under vacuum (or under reduced pressure), can be suppressed.

Also, according to the embodiments described above, the scattering portion is the reflective film 168 applied to the lower surface of the transparent rod 62D. According to such a configuration, by increasing the reflectance of the lower surface of the transparent rod 62D, the reflectance of light entering the transparent rod 62D is improved. Therefore, the propagation efficiency of the light can be improved.

Moreover, according to the embodiments described above, at least part of the scattering portion 166 is provided in a range overlapping with the scattering portion 142A in plan view. According to such a configuration, the light scattered by the scattering portion 142A and incident on the transparent rod 62D is further scattered by the scattering portion 142A inside the transparent rod 62D, and the light is efficiently propagated inside the transparent rod 62D. be able to.

Also, according to the embodiments described above, the transparent rod 62D is cylindrical. According to such a configuration, the light incident on the transparent rod 62D easily satisfies the condition of total reflection within the transparent rod 62D, so that the propagation efficiency of the light is improved.

Moreover, according to the embodiments described above, the light irradiated from the light irradiation unit 18 is laser light. With such a configuration, damage to the scattering portion 142A and the transparent rod 62D is reduced even when high-intensity light such as laser light is irradiated.

Moreover, according to the embodiments described above, the light irradiation device includes a chamber in which the stage 42 is enclosed. Here, the chamber corresponds to, for example, the vacuum chamber 12 or the like. The photodetector 62C detects the light propagated by the transparent rod 62D outside the vacuum chamber 12. FIG. According to such a configuration, since the photodetector 62C of the detection unit 62 is provided outside the vacuum chamber 12, outgas emitted from the photodetector 62C is prevented from entering the vacuum chamber 12. be able to.

<Regarding Modifications of the Embodiments Described Above>
In the embodiments described above, the material, material, size, shape, relative arrangement relationship, implementation conditions, etc. of each component may be described, but these are only examples in all aspects. and shall not be limiting.

Accordingly, myriad modifications and equivalents not exemplified are contemplated within the scope of the technology disclosed herein. For example, modifications, additions, or omissions of at least one component shall be included.

Further, in the embodiments described above, when a material name is described without being specified, unless there is a contradiction, the material contains other additives, such as an alloy. shall be included.

Reference Signs List 1 light irradiation device 12 vacuum chamber 12A, 12B, 12C opening 14 external fixing part 14B external member 14A, 14C columnar member 16A, 16B bellows 18B, 162 condenser lens 18 light irradiation part 18A scanner 18C laser beam 20 irradiation window 21 vacuum Pump 22 Control Unit 24 Base 42 Stage 42A Target Arrangement Area 42B Position Calibration Area 44 Slider 46 Base 48 Linear Guide 50 Linear Motor Mechanism 52 Lift Pin Mechanism 52A Lift Pin 62 Detector 62A Condensing Unit 62B Fiber 62C Photodetector 62D, 162D Transparent Rod 142 Translucent portion 142A, 166 Scattering portion 164 Light shielding plate 168 Reflective film

Claims (10)

a stage;
At least one light irradiation unit for irradiating the upper surface of the stage with light,
At least part of the stage is provided with at least one first scattering section for scattering the light,
further comprising a detection unit for detecting the light scattered by the first scattering unit;
The first scattering section is made of a transparent material,
The detection unit is
a propagation member for propagating the light transmitted through the first scattering section;
a photodetector for detecting the light propagated by the propagation member;
The propagation member is made of a transparent material,
The propagation member is provided with a second scattering section for scattering the light.
Light irradiation device. A light irradiation device according to claim 1,
wherein the propagation member is made of a glass material,
Light irradiation device. A light irradiation device according to claim 1 or 2,
wherein the second scattering portion is formed by blasting the surface of the propagation member;
Light irradiation device. A light irradiation device according to any one of claims 1 to 3,
The second scattering part is a reflective film applied to the lower surface of the propagation member,
Light irradiation device. A light irradiation device according to any one of claims 1 to 4,
At least part of the second scattering part is provided in a range overlapping with the first scattering part in plan view,
Light irradiation device. A light irradiation device according to any one of claims 1 to 5,
The propagation member has a cylindrical shape,
Light irradiation device. A light irradiation device according to any one of claims 1 to 6,
the propagation member is formed to extend in a first direction, which is a direction in which the light is propagated;
The second scattering portion is provided continuously in the first direction,
Light irradiation device. A light irradiation device according to any one of claims 1 to 7,
The light irradiated from the light irradiation unit is laser light,
Light irradiation device. A light irradiation device according to any one of claims 1 to 8,
further comprising a chamber containing the stage,
wherein the photodetector detects the light propagated by the propagation member outside the chamber;
Light irradiation device. A light irradiation device according to any one of claims 1 to 9,
The detection unit is
a condenser lens for condensing the light transmitted through the first scattering part;
a light shielding plate disposed at a position farther from the first scattering unit than the condenser lens and at a light condensing position of the condenser lens,
the propagation member propagates the light condensed by the condensing lens;
Light irradiation device.

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