TW202307418A - Light detection device and light irradiation device - Google Patents

Abstract

The technology disclosed in the instant specification is used to suppress a reduction of a light detection accuracy by suppressing a reduction of an amount of light caused by transmission. The solution of the present invention is a light detection device capable of detecting lights irradiated from a light irradiation part. The light detection device is equipped with a transmission member for transmitting the lights irradiated from the light irradiation part; and a light detector for detecting the lights transmitted by the transmission member. The transmission member is dispersedly provided with a plurality of first scattering parts for scattering the lights.

Description

Light detection device and light irradiation device

The technology disclosed in this specification is related to the detection of irradiated light.

It is known to use a photoprocessing technique (for example, refer to Patent Document 1) for processing an object by light irradiation such as laser light irradiation. [Prior Art Literature] [Patent Document]

Patent Document 1: Japanese Patent Laid-Open No. 2006-272430

(Problem to be solved by the invention)

When the irradiated light is detected via the transmission member as described above, the light quantity of the detected light may be greatly reduced due to diffusion during transmission. In this case, the accuracy of light detection is reduced due to insufficient light quantity.

The technology disclosed in this specification is a technology completed in view of the problems described above, and suppresses a reduction in light detection accuracy by suppressing a reduction in the amount of light caused by transmission. (technical means to solve the problem)

A photodetection device according to a first aspect of the technology disclosed in this specification, which detects light irradiated from a light irradiation unit, and includes: a transmission member for transmitting the light irradiated from the light irradiation unit; and A light detector is used to detect the light transmitted by the transmission member; in the transmission member, a plurality of first scattering parts for scattering the light are arranged in a dispersed manner.

The photodetection device of the second aspect of the technology disclosed in this specification is related to the photodetection device of the first aspect, wherein the photodetector is located opposite to the end of the transmission member in the longitudinal direction. The plurality of first scattering parts are arranged in a dispersed manner along the longitudinal direction of the transmission member.

The photodetection device of the third aspect of the technology disclosed in this specification is related to the photodetection device of the first or second aspect, wherein the transmission member has an end opposite to the photodetector, and a plurality of The width of the second scattering part, which is one of the first scattering parts, is greater than the width of the third scattering part, and the third scattering part is located closer to the above-mentioned end than the second scattering part. position of the scatter section.

The photodetection device of the fourth aspect of the technology disclosed in this specification is related to the photodetection device of any one of the first to third aspects, wherein it is further equipped with a work table; the above-mentioned light irradiation part will The above-mentioned light is irradiated on the upper surface of the above-mentioned work table, and at least one fourth scattering part for scattering the above-mentioned light is provided on at least a part of the above-mentioned work table. The light incident on the fourth scattering unit.

The photodetection device of the fifth aspect of the technology disclosed in this specification is related to the photodetection device of the fourth aspect, wherein each of the above-mentioned first scattering parts is arranged to correspond to the position of the above-mentioned fourth scattering parts.

The photodetection device of the sixth aspect of the technology disclosed in this specification is related to the photodetection device of the fourth or fifth aspect, wherein it is further equipped with: a condenser lens, which is used to The above-mentioned light incident by the scattering part is condensed; and the shading plate is located at a position farther from the above-mentioned fourth scattering part than the above-mentioned condensing lens, and is arranged at the light-condensing position of the above-mentioned condensing lens; The above-mentioned light collected by the above-mentioned condensing lens.

The photodetection device of the seventh aspect of the technology disclosed in this specification is related to the photodetection device of any one of the first to sixth aspects, wherein the plurality of first scattering parts are passed through the transmission member Formed by sandblasting on the surface.

The photodetection device of the eighth aspect of the technology disclosed in this specification is related to the photodetection device of any one of the first to sixth aspects, wherein a plurality of the above-mentioned first scattering parts are coated on the above-mentioned transmission member reflective film below.

The photodetection device of the ninth aspect of the technology disclosed in this specification is related to the photodetection device of any one of the first to eighth aspects, wherein the light irradiated from the light irradiation part is laser light.

The photodetection device of the tenth aspect of the technology disclosed in this specification is related to the photodetection device of any one of the first to ninth aspects, and further includes a chamber containing the above-mentioned transmission member; the above-mentioned The light detector detects the light transmitted by the transmission member outside the chamber.

The light irradiation device of the eleventh aspect of the technology disclosed in this specification includes: at least one light irradiation unit for irradiating light; and the light detection device of any one of the first to tenth aspects. (compared to the effect of previous technology)

According to at least the first aspect of the technique disclosed in this specification, by suppressing excessive diffusion of light during transmission in the transmission member, it is possible to suppress reduction in the light quantity of transmitted light. As a result, reduction in light detection accuracy can be suppressed.

In addition, the purpose, characteristics, conditions, and advantages related to the technology disclosed in this specification can be further understood from the detailed description shown below and the attached drawings.

Embodiments will be described below with reference to the drawings. In the following embodiments, detailed features and the like are shown for technical explanation, but these are illustrative, and all of them are not necessarily essential features for the implementation of the embodiments.

In addition, drawings are shown schematically, and for convenience of description, omission of a structure, simplification of a structure, etc. are suitably performed in drawing. In addition, the mutual relationship of the size and position of the structure etc. which are shown separately in a different drawing is not necessarily described correctly, but it can change suitably. In addition, in order to make the content of embodiment easy to understand, this invention may add hatching to drawings, such as a top view which is not a cross-sectional view.

In addition, in the following description, the same component is given the same symbol and shown in figure, and it assumes that the name and function of these are also the same. Therefore, in order to avoid repetition, there are cases where detailed descriptions of the same are omitted.

In addition, in the explanations described in this specification, unless otherwise stated, when a certain constituent element is described as "having", "including" or "having", it does not mean that the existence of other constituent elements is excluded. exclusive performance.

In addition, in the descriptions described in this specification, even when using ordinal numbers such as "first" or "second", these terms are used to facilitate the understanding of the contents of the embodiments, and the contents of the embodiments are not to be referred to. Restricted to the order produced by its equal ordinal numbers.

In addition, in the explanations described in this manual, expressions such as "...the positive direction of the axis" or "the negative direction of the... axis" assume that the direction of the arrow along the ... The direction on the opposite side of the arrow on the ... axis is set as the negative direction.

In addition, in the explanations described in this manual, even if the meaning of "upper", "lower", "left", "right", "side", "bottom", "front" or "inner" is used to specify the position In the case of terms of direction or direction, such terms are also used to facilitate the understanding of the content of the embodiment, and have nothing to do with the position or direction when the embodiment is actually implemented.

In addition, in the explanation described in this specification, when it is described as "above" or "underneath", etc., in addition to the above itself or the underside itself as the constituent element of the object, it is also included in the object as the object. A state in which other constituent elements are formed above or below a constituent element. That is, for example, when it is described as "B installed on top of A", it does not prevent another component "C" from being interposed between A and B.

In addition, in the explanations described in this specification, expressions showing shapes, such as "square column shape" or "cylindrical shape", etc., are assumed to include the case of strictly showing the shape, and the tolerance or possible A case where unevenness or chamfering is formed within the range of obtaining the same degree of function.

＜Example of implementation＞ Hereinafter, a photodetection device and a photoirradiation device related to the present embodiment will be described. In addition, although the following embodiment describes as an example the light irradiation apparatus which made the inside of a chamber into a vacuum or a reduced-pressure gas environment, it is applicable also when the inside of a chamber is not a vacuum.

<Construction of light irradiation device> FIG. 1 is a perspective view schematically showing a configuration example of a light irradiation device 1 according to the present embodiment. In FIG. 1 , illustration of a chamber frame supporting the vacuum chamber 12 , actually connected wiring, and the like is omitted for convenience of description. Furthermore, in order to prevent deterioration of the properties of the substrate W, the term "vacuum" in the present embodiment is intended to be a high vacuum (for example, 0.00001 Pa), but it also includes cases where the degree of vacuum does not reach the high vacuum.

As shown in Figure 1, the light irradiation device 1 is provided with: a vacuum chamber 12; an external fixing part 14 such as a stone platform; and the external fixing part 14; the light irradiation part 18, which irradiates light toward the inside of the vacuum chamber 12; the vacuum pump 21, which decompresses the inside of the vacuum chamber 12 to form a vacuum state; and the control part 22, which controls the light irradiation device 1 for each drive unit. In the above configuration, bellows formed of stainless steel or the like are shown as examples of elastic members, but elastic members formed of metals other than stainless steel may also be used in accordance with the required specifications, or a flexible member may be used. A stretchable member made of resin or the like. In addition, the shape of the elastic member may not be the bellows shape of the above-mentioned bellows 16A.

The vacuum chamber 12 has a space for accommodating the substrate W therein. The substrate W to be processed includes, for example, semiconductor wafers, glass substrates for liquid crystal display devices, substrates for flat panel displays (FPD) such as organic EL (electro luminescence) display devices, substrates for optical disks, substrates for magnetic disks, and magneto-optical disks. A substrate, a glass substrate for a photomask, a ceramic substrate, a substrate for a field emission display (FED), or a substrate for a solar cell. In addition, this substrate W is, for example, a substrate in a state where a thin film is formed thereon.

In addition, an opening 12A is formed on a side surface of the vacuum chamber 12, and the opening 12A is used to allow the substrate W to pass through when the substrate W is carried in and out. When the vacuum chamber 12 is in a vacuum state, the opening 12A can be properly closed. Other configurations housed inside the vacuum chamber 12 will be described later.

The light irradiation unit 18 irradiates light onto the upper surface of the substrate W housed in the vacuum chamber 12 . At this time, the position of the substrate W is corrected in advance by a detection unit or the like described later. The light irradiation unit 18 performs ablation processing of the substrate W by, for example, irradiating laser light. Furthermore, the light irradiation unit 18 may also be adapted to the purpose of processing, for example, to irradiate light such as electron beams. The light irradiation unit 18 irradiates light from the outside of the vacuum chamber 12 to the upper surface of the substrate W housed in the vacuum chamber 12 through a not-shown irradiation window (transparent plate formed of quartz or the like). Then, the light is scanned on the upper surface of the substrate W by moving the substrate W in the vacuum chamber 12 relative to the light irradiation unit 18 or by controlling the optical system in the light irradiation unit 18 . In addition, the light irradiation part 18 is arranged on the upper surface of the stand 24 fixed to the external fixing part 14 .

The control unit 22 may have, for example, a memory device including a memory (memory medium), a processing circuit such as a central processing unit (central processing unit (CPU) for executing a program), an input device capable of inputting information, and an output capable of outputting information. device, wherein the memory system includes a hard disk drive (hard disk drive, namely HDD), random access memory (random access memory, namely RAM), read only memory (read only memory, namely ROM), flash memory memory, volatile or non-volatile semiconductor memory, magnetic disk, floppy disk, optical disk, compact disc (compact disc), mini-disc or DVD, etc., the program is stored in the memory device, external CD-ROM, external DVD-ROM, or external flash memory, etc., the input device is a mouse, keyboard, touch panel or various switches, etc., and the output device is a monitor, liquid crystal display device or lamp.

The control unit 22 controls the output of the light source in the light irradiation unit 18 and the direction of the irradiated light, the output control of the vacuum pump 21 , and the drive control of each driving unit described later.

FIG. 2 is a cross-sectional view showing an example of the internal configuration and peripheral configuration of the vacuum chamber 12 of the light irradiation device 1 according to the present embodiment. As shown in FIG. 2 , the interior of the vacuum chamber 12 is provided with: a workpiece table 42 on which a substrate W is disposed; a slider 44 that can move in the Y-axis direction and supports the workpiece table 42 from below; a base 46, It is fixed on the external fixing part 14 independently of the vacuum chamber 12; the linear guide rail 48 is fixed on the base 46 and extends toward the Y-axis direction; the linear motor mechanism 50 makes the slider 44 move linearly toward the Y-axis direction The guide rail 48 moves; and the lift pin mechanism 52 has a lift pin 52A that passes through a through hole (not shown) formed in the workpiece table 42 to support the substrate W.

The work stage 42 is used to orient the processing surface of the substrate W upward, and hold the substrate W substantially horizontally. The detailed structure of the workpiece table 42 will be described later. By moving the slider 44 supporting the workpiece table 42 in the Y-axis direction by the linear motor mechanism 50, and scanning the light irradiated from the light irradiation unit 18 in the X-axis direction, the effect of light on the substrate W in plan view can be utilized. The processing area is fully scanned. Alternatively, by scanning the light irradiated from the light irradiation unit 18 in the X-axis direction and the Y-axis direction, the entire processing region of the substrate W in plan view can be scanned by light. Furthermore, the lift pin mechanism 52 is fixed to the base 46 .

The linear motor mechanism 50 is fixed to the external fixing part 14 on the side of the vacuum chamber 12 through the opening 12B formed on the side of the vacuum chamber 12 . More specifically, the linear motor mechanism 50 is fixed to the end of the hollow columnar member 14A, which is welded into the bellows 16A of the opening 12B. At this time, the wiring and the like connected to the linear motor mechanism 50 pass through the inside of the columnar member 14A and are led out to the outside of the vacuum chamber 12 . Furthermore, the columnar member 14A included in the external fixing portion 14 is fixed to the outer member 14B included in the external fixing portion 14 . In addition, the columnar member 14A is not in contact with the bellows 16A connected to the side of the vacuum chamber 12 .

The susceptor 46 is fixed to the external fixing part 14 located below the vacuum chamber 12 via the opening 12C formed in the bottom surface of the vacuum chamber 12 . Specifically, the base 46 is fixed to the end of the columnar member 14C by being welded into the bellows 16B of the opening 12C. Furthermore, the columnar member 14C contained in the external fixing part 14 is fixed to the external member 14B contained in the external fixing part 14 . In addition, the columnar member 14C is not in contact with the bellows 16B connected to the bottom surface of the vacuum chamber 12 .

In FIG. 2, although the external fixing part 14 is disposed throughout the side and the bottom of the vacuum chamber 12, the external fixing part 14 in its position is not necessarily continuous, and it can also be arranged to be dispersed among them. position, it can also be set only at any position. In addition, although the vacuum chamber 12 is supported and fixed from vertically downward by a chamber frame (not shown) different from the bellows 16B, the chamber frame is provided independently of the external fixing portion 14 .

FIG. 3 is a perspective view mainly showing the light irradiation unit 18 and the work table 42 in the configuration shown in FIG. 2 . In FIG. 3, the state which arrange|positioned the board|substrate W on the work stage 42 is shown. The light irradiation part 18 can scan the irradiation direction of the light toward the X-axis direction in FIG. 3 , and the workpiece table 42 can move toward the Y-axis direction by the linear motor mechanism 50 (refer to FIG. 2 ). Thereby, the light irradiated from the light irradiation part 18 to the upper surface of the workpiece table 42 can form a rectangular irradiation area (light irradiation area) on the upper surface of the board|substrate W. As shown in FIG.

As shown in FIG. 3 , the work table 42 includes: an object arrangement area 42A in which a substrate W, which is an object irradiated with light by the light irradiation unit 18 , is arranged; The area where the light is illuminated.

Object placement area 42A Arranges the substrate W at a specific position within the object placement area 42A. Accordingly, the positional relationship between the work table 42 and the substrate W is determined in advance. In the position correction area 42B, the position of the light irradiated from the light irradiation part 18 into the position correction area 42B is detected. In addition, in the position correction area 42B, before the substrate W is subjected to photoprocessing in the object placement area 42A, the correspondence between the set value of the direction of the light irradiated from the light irradiation unit 18 and the irradiation position of the detected light is corrected. .

At least a part of the position correction area 42B is provided with a light-transmitting portion 142 that transmits light. The light-transmitting part 142 is made of a glass material such as quartz (SiO ₂ ) or a transparent material such as a transparent resin (eg, silicone resin). The light-transmitting portion 142 is provided from above to below the workpiece table 42 corresponding to the position correction area 42B. The light irradiated from the light irradiation part 18 to the translucent part 142 is transmitted from the upper surface of the workpiece table 42 to the lower surface.

For example, four scattering parts 142A are provided in the light transmitting part 142 . Furthermore, the number of scattering parts 142A is not limited to four. The scattering part 142A is made of a transparent material, and reflects or transmits the irradiated light while scattering it. The position where the scattering portion 142A is provided is a specific position in the work table 42 . That is, the position of the scattering portion 142A in the entire work stage 42 is specified in advance. In FIG. 3 , each scattering unit 142A is arranged at the end of the light irradiation area of the light irradiation unit 18 in the X-axis direction, but the position where the scattering unit 142A is arranged only needs to be a specific position in the workpiece table 42, and is not required. It is limited to the end of the light irradiation area of the light irradiation part 18 . The scattering portion 142A has a property of scattering incident light, and can be obtained, for example, by sandblasting a glass material, or performing frosting with hydrofluoric acid or the like. In FIG. 3 , each scattering portion 142A is formed on the upper surface of the light-transmitting portion 142 , but at least one scattering portion 142A may be formed on the lower surface of the light-transmitting portion 142 .

Furthermore, in the situation shown in FIG. 3 , although the object arrangement area 42A and the position correction area 42B are set in different areas, these areas may at least partially overlap each other. That is, the translucent part 142 may be provided in at least a part of the area where the substrate W is disposed. In this case, for example, correction of the position where the light is irradiated from the light irradiation section 18 may be performed at a predetermined position where the substrate W is arranged in a state where the substrate W is not arranged.

In addition, the light-transmitting part 142 may also be formed with the scattering part 142A in its entire range. That is, it is also possible to scatter light not only in the portion through which the light passes, but also in the entire range of the light-transmitting portion 142 .

In addition, in FIG. 3 , although the light-transmitting portion 142 is provided to extend toward the X-axis direction, and the scattering portions 142A are provided at each end portion in the X-axis direction, the light-transmitting portion 142 can also be divided into plural parts in the X-axis direction. parts. However, in the case where a plurality of scattering parts 142A are provided in the integrated light-transmitting part 142 (that is, the situation shown in FIG. 3 ), the plurality of scattering parts 142A when the light-transmitting part 142 is made of a transparent material can be maintained. In the state where the positional accuracy between the parts 142A is maintained, the light-transmitting part 142 is attached to the workpiece table 42 (in the case of FIG. 3 , embedded). Therefore, since the positional displacement between the scattering parts 142A does not occur when it is attached to the work table 42, the accuracy of correction using the plural scattering parts 142A can be maintained at a high level.

FIG. 4 is a cross-sectional view mainly showing a configuration example of the light irradiation unit 18 and the work table 42 in the configuration shown in FIG. 2 . As shown in FIG. 4 , the light irradiation unit 18 includes: a scanner 18A, which is a galvano mirror or a polygon mirror (Polygon mirror), etc., and is used to control the direction of the irradiated light in the X-axis direction and the Y-axis direction. direction; and a condensing lens 18B that condenses light from an unillustrated light source. In FIG. 4 , the light irradiated through the condensing lens 18B and through the irradiation window 20 formed of quartz or the like is, for example, laser light 18C. The laser beam 18C can be controlled by the scanner 18A to scan the substrate W arranged on the work table 42 in the X-axis direction and the Y-axis direction. Here, although it is preferable that the light irradiation part 18 can control the light in the X-axis direction and the Y-axis direction, the light irradiation part 18 can also control the light in either direction of the X-axis direction or the Y-axis direction.

The work table 42 includes: a light-transmitting portion 142 formed in a position correction region 42B (see FIG. 3 ); and a scattering portion 142A formed on the upper surface of the light-transmitting portion 142 . The laser light 18C irradiated from the light irradiation unit 18 can scan the range reaching at least the scattering unit 142A in the X-axis direction.

The detection part 62 for detecting light is arrange|positioned under the work table 42. As shown in FIG. The detecting unit 62 is provided with: a condensing unit 62A which condenses light in the vacuum chamber 12; a transparent rod 62D which transmits the light condensed by the condensing unit 62A; A plurality of optical fibers 62B are scattered in the X-axis direction; the optical fiber 62B emits the light transmitted in the transparent rod 62D from the transparent rod 62D; the condensing lens 62E condenses the light emitted from the optical fiber 62B; and light detection The device 62C detects the light condensed by the condensing lens 62E through the transparent window 20A provided in the frame of the vacuum chamber 12 on the outside of the vacuum chamber 12 . By including the transparent rod 62D and the photodetector 62C, a photodetection device can be constituted.

The plurality of scattering parts 166 include a scattering part 166A extending in the Y-axis direction and a scattering part 166B extending in the Y-axis direction longer than the scattering part 166A. In FIG. 4 , two scattering parts 166A are arranged at positions close to the photodetector 62C, and two scattering parts 166B are arranged at positions away from the photodetector 62C.

In FIG. 4 , two scattering portions 166A are continuously arranged, and two scattering portions 166B are continuously arranged. That is, the width of the scattering portion 166 in the Y-axis direction increases stepwise (discontinuously) from the approach to the photodetector 62C side. However, for example, it is also possible to arrange four scattering parts 166 with different widths in the Y-axis direction in a direction away from the self-photodetector 62C, and the widths of the Y-axis directions match the distance from the self-photodetector 62C. And continuously widened. In other words, it is sufficient that the width of the scattering portion 166 at a position away from the photodetector 62C is greater than the width of the scattering portion 166 at a position close to the photodetector 62C.

In addition, although the scattering portion 166 shown in FIG. 4 is formed by extending toward the Y-axis direction (the inner direction of the paper), the scattering portion 166 can also be formed by extending toward the X-axis direction (the left-right direction of the paper), and is close to the photodetector 62C. The width of the scattering portion 166 in the X-axis direction at the position is more than the width of the scattering portion 166 in the X-axis direction at a position away from the photodetector 62C. In other words, if the direction connecting the scattering part 166 and the photodetector 62C is set as the first direction, the width of the scattering part 166 corresponding to the change of the distance from the photodetector 62C can be the width in the first direction, or The width in the direction perpendicular to the first direction is not required.

FIG. 5 is a diagram showing an example of the formation width of the scattering portion 166A. FIG. 6 is a diagram showing an example of the formation width of the scattering portion 166B. As shown in FIG. 5 , when the transparent rod 62D is cylindrical, the scattering portion 166A is formed by extending along the circumferential direction of the transparent rod 62D. In addition, as shown in FIG. 6 , when the transparent rod 62D is cylindrical, the scattering portion 166B is also formed by extending along the circumferential direction of the transparent rod 62D. Here, since the width of the scattering portion 166B in the Y-axis direction is larger than that of the scattering portion 166A, the length in the circumferential direction is also longer.

The transparent window 20A in FIG. 4 can be made of transparent materials such as glass material or transparent resin, for example.

Since the photodetector 62C in FIG. 4 is disposed outside the vacuum chamber 12 , the gas released from the photodetector 62C can be prevented from entering the vacuum chamber 12 .

7 and 8 are schematic diagrams showing the light collecting unit 62A and the transparent rod 62D in the detection part. As shown in FIG. 7 and FIG. 8 , the condensing unit 62A includes: a condensing lens 162 that condenses the light incident on the light from the light irradiation unit 18 in FIG. 4 on the optical axis; It is arranged downstream of the light path (that is, on the negative side of the Z axis in FIGS. 7 and 8 ) than the condensing lens 162 on the optical axis of the light incident from the light irradiation unit 18 . The light-shielding plate 164 is a plate-shaped member that shields incident light, and is disposed at the light-condensing position of the light-condensing lens 162 that is farther away from the position of the light-transmitting portion 142 than the light-shielding lens 162 .

In addition, as shown in FIGS. 7 and 8 , the transparent rod 62D is made of a glass material such as quartz (SiO ₂ ) or a transparent material such as a transparent resin (eg, silicone resin). In addition, the transparent rod 62D is, for example, a cylindrical rod member, and is formed by extending along a plane (that is, an XY plane) along the surface of the workpiece table 42 in FIG. 4 . If the transparent rod 62D has a cylindrical shape, when the light condensed by the condensing unit 62A enters the transparent rod 62D, the total reflection condition is easily satisfied inside the transparent rod 62D, and the light can be transmitted efficiently. However, the shape of the transparent rod 62D is not limited to a cylindrical shape, for example, it can also be a square pillar shape. In addition, in this embodiment, although the case where the transparent rod 62D is a rod shape was shown, the transparent rod 62D may be the surface shape etc. which correspond to the whole surface of the work table 42, for example.

The transparent rod 62D is arranged at a position conjugate to the scattering portion 142A with respect to the condenser lens 162 in the Z-axis direction.

In addition, the transparent rod 62D should just be arrange|positioned in the range which overlaps with the scattering part 142A at least in planar view (for example, the range which includes the scattering part 142A in planar view). With such an arrangement, the light scattered by the scattering portion 142A and condensed by the condensing unit 62A can efficiently enter the transparent rod 62D and be transmitted.

In addition, a plurality of scattering parts 166 are disposed under the transparent rod 62D. Each scattering unit 166 reflects or transmits irradiated light while scattering it. Each scattering portion 166 is obtained by, for example, sandblasting a glass material, or performing frosting using hydrofluoric acid or the like.

Each scattering portion 166 is arranged in a range overlapping at least the scattering portion 142A when viewed from a planar view (for example, a range including the scattering portion 142A in a planar view). Furthermore, each scattering portion 166 may also be disposed inside or on the transparent rod 62D.

In the situation shown in FIG. 7 , the incident laser light 18C (parallel light) from the light irradiation unit 18 (refer to FIG. 4 ) reaches the light collecting unit 62A only through the light transmission unit 142 in the workpiece table 42 . On the other hand, in the situation shown in FIG. 8 , the incident laser light 18C from the light irradiation unit 18 (refer to FIG. 4 ) passes through the scattering unit 142A and the light-transmitting unit 142 in the work table 42 to reach the condensed light. Unit 62A. Furthermore, in FIG. 8 , although the laser light 18C passes through the scattering portion 142A and the light-transmitting portion 142 , the laser light 18C may pass only through the scattering portion 142A.

In the situation shown in FIG. 7 , the laser light 18C passing through the light-transmitting portion 142 other than the scattering portion 142A reaches the light-condensing unit 62A without significant changes in the irradiation range and direction of the light. Then, the laser light 18C is condensed by the condensing lens 162 in the condensing unit 62A, and enters the light shielding plate 164 arranged at the condensing position of the condensing lens 162 . Then, since the light is blocked by the light-shielding plate 164 , the laser light 18C does not reach the transparent rod 62D located further downstream than the light-shielding plate 164 along the light path along the optical axis of the laser light 18C.

On the other hand, in the case shown in FIG. 8 , the laser light 18C passing through the scattering portion 142A in the light-transmitting portion 142 is scattered when passing through the scattering portion 142A. Then, the laser light 18C arrives at the condensing unit 62A in a state where the irradiation range of the laser light 18C is enlarged due to the scattered light (the sand point portion in FIG. 8 ). Then, the laser light 18C is condensed by the condensing lens 162 in the condensing unit 62A.

At this time, the laser light 18C whose irradiation range is expanded due to light scattering in the scattering part 142A contains a large number of components that are not parallel light, and at least some of the components are not condensed at the condensing position of the condensing lens 162 . Therefore, the light-shielding plate 164 disposed at the condensing position of the condensing lens 162 blocks only a part of the laser light 18C. In other words, a portion of the laser light 18C not shielded by the light shielding plate 164, that is, the scattered light of the laser light 18C, reaches the transparent rod 62D located further downstream than the light shielding plate 164 in the light path along the optical axis of the laser light 18C.

Then, the laser light 18C incident into the transparent rod 62D is scattered by the scattering part 166 . A part of the scattered laser light 18C is reflected and transmitted inside the transparent rod 62D, and reaches the optical fiber 62B connected to the end of the transparent rod 62D.

As mentioned above, the laser light 18C irradiated onto the workpiece table 42 reaches the transparent rod 62D after being condensed by the light-condensing unit 62A while entering the portion of the light-transmitting portion 142 where the scattering portion 142A is formed. . Then, the light arriving at the transparent rod 62D is condensed by the condensing lens 62E after being transmitted in the transparent rod 62D and then in the optical fiber 62B connected to the end portion of the transparent rod 62D, and passed through the photodetector 62C. is detected. Thereby, when the laser light 18C is irradiated to the scattering part 142A, the detecting part 62 can detect the scattered light of the laser light 18C, so that the setting value of the scanner 18A (refer to FIG. 4 ) at this time is the same as that of the scattering part 142A. The position corresponding method can correct the position of the irradiated light. Thereby, when optical processing is performed on the substrate W arranged on the upper surface of the work table 42 in a subsequent step, the position of the light irradiated from the light irradiation unit 18 (see FIG. 4 ) can be corrected with high precision.

In addition, since the light-transmitting part 142 and the transparent rod 62D that irradiate light with the light irradiation part 18 (see FIG. 4 ) are made of transparent materials, even if the correction is made by the light irradiation part 18 (see FIG. 4 ), When the position of the light to be irradiated is repeatedly irradiated with relatively high-intensity light to the light-transmitting part 142 and the transparent rod 62D, the target (that is, the light-transmitting part 142 and the transparent rod 62D) that is irradiated due to correction can also be suppressed. damage.

In addition, since the light detected in the detection part 62 is scattered light, rather than the transmitted light transmitted through the light-transmitting part 142 without being scattered, it can be suppressed in comparison with the case of directly detecting the unscattered transmitted light. Damage to the detection unit 62 is caused by this light.

FIG. 9 is a diagram showing the state of transmission of light in the transparent rod 62D. As shown in FIG. 9 , laser light 18C incident from light irradiation unit 18 (see FIG. 4 ) is transmitted within transparent rod 62D, and reaches the end of transparent rod 62D. Then, the light propagates through the optical fiber 62B connected to the end portion of the transparent rod 62D in the longitudinal direction (X-axis direction), and then is condensed by the condensing lens 62E (see FIG. 4 ). And this light is detected by the photodetector 62C (refer FIG. 4) which opposes the end part of the transparent rod 62D via the condensing lens 62E.

As shown in FIG. 9 , since the scattering portion 166B is formed corresponding to the incident position of the laser light 18C, the laser light 18C incident on the transparent rod 62D does not pass through the transparent rod 62D and scatters at the scattering portion 166B, so that it is easy to pass through the transparent rod 62D. 62D pass.

In addition, since the scattering part 166A and the scattering part 166B are dispersedly provided in the longitudinal direction (X-axis direction) under the transparent rod 62D, compared with the case where the scattering part is provided under the entire transparent rod 62D, for example, the transparent rod The laser light 18C transmitted in 62D is less likely to scatter during transmission. Therefore, the laser light 18C can easily propagate through the transparent rod 62D while satisfying the total reflection condition, and as a result, the decrease in the light amount of the laser light 18C detected by the photodetector 62C can be suppressed.

FIG. 10 is a diagram showing the state of transmission of light in the transparent rod 62D. In FIG. 10 , the incident position of laser light 18C incident on transparent rod 62D is closer to the position of optical fiber 62B connected to photodetector 62C (see FIG. 4 ) than in the case of FIG. 9 .

As shown in FIG. 10 , the scattering portion 166A is formed corresponding to the incident position of the laser light 18C, whereby the laser light 18C incident on the transparent rod 62D does not pass through the transparent rod 62D and is scattered in the scattering portion 166A, so it can be easily The transparent rod 62D passes.

Here, the width of the scattering portion 166B in the Y-axis direction is greater than the width of the scattering portion 166A in the Y-axis direction. Thereby, compared with the laser light 18C incident on the position corresponding to the scattering part 166A as shown in FIG. 10, the laser light 18C incident on the position corresponding to the scattering part 166B as shown in FIG. The ratio of the scattering part 166 becomes high, and it can be scattered in the scattering part 166 and easily transmitted in the transparent rod 62D. That is, since the laser light 18C incident to a position away from the photodetector 62C (refer to FIG. 4 ) is more likely to be scattered in the corresponding scattering part 166 than the laser light 18C incident to a position close to the photodetector 62C , so the amount of light can be high and easily transmitted in the transparent rod 62D.

In this way, even when the light quantity of the laser light 18C incident to a position away from the photodetector 62C (refer to FIG. 4 ) decreases due to scattering or the like during transmission in the transparent rod 62D, when the laser light 18C incident to a position close to the photodetector 62C There is less difference in the amount of light detected by the photodetector 62C between the laser light 18C incident on the laser light 18C and the laser light 18C incident on a position away from the photodetector 62C. Thereby, since it is possible to set the threshold value (value for distinguishing from noise) and the like of the amount of light detected regardless of the position where the laser light 18C is incident, it is possible to effectively remove the noise transmitted. Laser light 18C for detection. As a result, the detection accuracy of light can be improved.

The scattering portion provided on the transparent rod 62D is not limited to the scattering portion formed by processing the surface of the transparent rod 62D. For example, a reflective film that functions as a scattering portion may be coated on the lower surface of the transparent rod 62D. situation.

If it is a structure in which a transparent material is processed like the scattering part 166, damage caused by light irradiation will be less likely to occur, and outgas (outgas), which becomes a problem under vacuum (or reduced pressure), can be suppressed. On the other hand, if a reflective film such as a metal film is provided as the scattering part, the reflectance of light incident into the transparent rod 62D can be increased, so that the transmission efficiency of the light can be improved.

FIG. 11 is a cross-sectional view schematically showing a configuration example of the transparent rod 162D. As shown in FIG. 11 , a reflective film 168 as a scattering portion is coated on the lower surface of the transparent rod 162D. The reflective film 168 is, for example, a metal film made of aluminum oxide (alumina).

When the reflective film 168 is provided at this position, the light is transmitted through the transparent rod 162D after being totally reflected by the reflective film 168 .

<About the effects produced by the embodiments described above> Next, an example of the effect produced by the embodiment described above will be shown. Furthermore, in the following description, although the effect has been described in the specific structure exemplified according to the embodiment described above, within the scope of producing the same effect, the exemplified in this specification can also be replaced with other specific configurations. constitute. That is, in the following, for convenience of description, only any one of the corresponding specific configurations is representatively described, but the representative specific configurations may be replaced with other corresponding specific configurations.

According to the embodiment described above, the photodetection device has the transmission member and the photodetector 62C. Here, the transmission member corresponds to at least one of the transparent rod 62D, the transparent rod 162D, and the like, for example. The transparent rod 62D is used to transmit the light irradiated from the light irradiating part 18 . Light detector 62C detects the light transmitted by transparent rod 62D. In addition, a plurality of first scattering portions for scattering light are provided in a dispersed manner on the transparent rod 62D. Here, the first scattering part corresponds to at least one of the scattering part 166 , the scattering part 166A, and the scattering part 166B, for example.

According to such a configuration, by suppressing excessive diffusion during transmission of the laser light 18C in the transparent rod 62D, reduction in the light quantity of the transmitted laser light 18C can be suppressed. As a result, reduction in photodetection accuracy can be suppressed.

Furthermore, when other configurations exemplified in this specification are appropriately added to the above-mentioned configurations, in other words, even when other configurations in this specification that are not mentioned in the above-mentioned configurations are appropriately added, the same effect can be produced. .

Moreover, according to the embodiment described above, the photodetector 62C is located in the position which opposes the end part of the longitudinal direction of the transparent rod 62D. In addition, a plurality of scattering parts 166 are arranged in a dispersed manner along the longitudinal direction of the transparent rod 62D. According to such a structure, light can be efficiently transmitted along the longitudinal direction of the transparent rod 62D.

In addition, according to the embodiment described above, the transparent rod 62D has the end facing the photodetector 62C. In addition, the width of the second scattering part, which is one of the plurality of scattering parts 166, is greater than the width of the third scattering part, and the third scattering part is provided at the end position of the scattering part closer to the second scattering part. Here, the second scattering portion corresponds to, for example, the scattering portion 166B. In addition, the third scattering portion corresponds to, for example, the scattering portion 166A. According to such a structure, since the reduction of the light quantity of the laser beam 18C corresponding to the transmission distance in the transparent rod 62D is offset, it is compared with the light quantity scattered by the scattering part 166A at the position where the transmission distance becomes short Therefore, the amount of light scattered by the scattering portion 166B at the position where the transmission distance becomes longer can be relatively increased, so that the difference in the amount of light transmitted from different incident positions in the transparent rod 62D and detected can be suppressed. As a result, the detection accuracy of light can be improved.

In addition, according to the embodiment described above, the photodetection device includes the work table 42 . In addition, the light irradiation unit 18 irradiates light onto the upper surface of the workpiece table 42 . In addition, at least one fourth scattering portion for scattering light is provided on at least a part of the work table 42 . Here, the fourth scattering part corresponds to, for example, the scattering part 142A. In addition, the scattering part 142A is made of a transparent material. In addition, the transparent rod 62D transmits the light incident through the scattering part 142A. According to such a configuration, since the light-irradiated scattering portion 142A is made of a transparent material, damage to the light-irradiated portion can be reduced even when high-intensity light such as the laser beam 18C is irradiated. Therefore, it is difficult to lower the positional accuracy of the light detected by the detection section 62 . In addition, by detecting the scattered light scattered by the scattering part 142A, even in the case of detecting high-intensity light such as the laser beam 18C, damage to the detection part 62 caused by direct irradiation of light can be reduced.

In addition, according to the embodiment described above, each scattering part 166 is arranged so as to correspond to the position of the scattering part 142A. According to such a structure, since the light which was diffused by the scattering part 142A and entered the transparent rod 62D can be further diffused by the scattering part 142A located directly under it, it can transmit this light efficiently in the transparent rod 62D.

Furthermore, according to the embodiment described above, the photodetection device includes the condensing lens 162 and the light shielding plate 164 . The condensing lens 162 condenses the light incident through the scattering unit 142A. The light shielding plate 164 is disposed at a position farther from the self-scattering portion 142A than the condensing lens 162 . In addition, the light-shielding plate 164 is arranged at the condensing position of the condensing lens 162 . Also, the transparent rod 62D transmits the light condensed by the condensing lens 162 . According to such a configuration, the scattered light scattered by the scattering part 142A is detected by the photodetector 62C while shielding the transmitted light by the light shielding plate 164. Even in the case of detecting high-intensity light such as laser light 18C, it is possible to reduce the Damage to the detection unit 62 caused by direct light irradiation.

In addition, according to the embodiment described above, the plurality of scattering parts 166 are formed by sandblasting the surface of the transparent rod 62D. According to such a structure, it becomes possible to form the scattering part which is hard to generate|occur|produce damage by light irradiation, and can suppress outgassing which becomes a problem under vacuum (or reduced pressure).

In addition, according to the embodiment described above, the plurality of first scattering parts are coated on the reflective film 168 under the transparent rod 162D. According to such a configuration, the reflection film 168 dispersedly provided on the lower surface increases the reflectance of the transparent rod 62D, suppresses excessive diffusion during light transmission, and improves the transmission efficiency of light incident into the transparent rod 62D.

In addition, according to the embodiment described above, the laser light 18C irradiated from the light irradiation part 18 is the light system. According to such a configuration, even in the case of irradiating high-intensity light such as the laser light 18C, it is possible to suppress a decrease in the amount of transmitted light by suppressing excessive diffusion during transmission.

In addition, according to the embodiment described above, the photodetection device includes a chamber in which the transparent rod 62D is contained. Here, the aforementioned chamber corresponds to, for example, the vacuum chamber 12 . And, the light detector 62C detects the light transmitted through the transparent rod 62D outside the vacuum chamber 12 . According to such a structure, since the photodetector 62C in the detection part 62 is provided outside the vacuum chamber 12, generation of the outgas released from the photodetector 62C in the vacuum chamber 12 can be suppressed.

<Modification of the embodiment described above> In the embodiments described above, although there are cases where the material, material, size, shape, relative arrangement relationship, and implementation conditions of each component are also described, these are only examples and are not intended to be limiting. By.

Therefore, countless modifications and equivalents that are not illustrated are included in the technical scope disclosed in this specification. For example, when at least one component is modified, addition or omission is also included.

In addition, in the embodiments described above, especially when the names of materials and the like are described in an unspecified manner, these materials should also include other additives, such as alloys, as long as there is no contradiction.

1: Light irradiation device 12: Vacuum chamber 12A, 12B, 12C: opening 14: External fixed part 14A, 14C: columnar member 14B: External components 16A, 16B: Bellows 18: Light irradiation department 18A: Scanner 18B, 62E, 162: condenser lens 18C: laser light 20: Irradiation window 20A: transparent window 21: Vacuum pump 22: Control Department 24: Stand 42:Workpiece table 42A: Object configuration area 42B: Position correction area 44: Slider 46: base 48: Linear guide rail 50: Linear motor mechanism 52: Lifting pin mechanism 52A:Lift pin 62: Detection Department 62A: Concentrating unit 62B: Optical fiber 62C: Photodetector 62D, 162D: transparent rod 142: Translucent part 142A, 166, 166A, 166B: scattering part 164: visor 168: reflective film W: Substrate

FIG. 1 is a perspective view schematically showing a configuration example of a light irradiation device according to the embodiment. Fig. 2 is a cross-sectional view showing an example of the internal configuration and peripheral configuration of a vacuum chamber of the light irradiation device according to the embodiment. FIG. 3 is a perspective view mainly showing a light irradiation unit and a work table in the configuration illustrated in FIG. 2 . FIG. 4 is a cross-sectional view mainly showing an example of the configuration of the light irradiation unit and the work table in the configuration illustrated in FIG. 2 . FIG. 5 is a diagram showing an example of a formation width of a scattering portion. FIG. 6 is a diagram showing an example of a formation width of a scattering portion. Fig. 7 is a schematic diagram showing the light collecting unit and the transparent rod in the detection part. Fig. 8 is a schematic diagram showing the light collecting unit and the transparent rod in the detection part. Fig. 9 is a diagram showing the state of transmission of light in a transparent rod. Fig. 10 is a diagram showing the state of transmission of light in a transparent rod. Fig. 11 is a cross-sectional view schematically showing a configuration example of a transparent rod.

12: Vacuum chamber

18: Light irradiation department

18A: Scanner

18B: condenser lens

18C: laser light

20: Irradiation window

20A: transparent window

42:Workpiece table

62: Detection Department

62A: Concentrating unit

62B: Optical fiber

62C: Photodetector

62D, 162D: transparent rod

62E: condenser lens

142: Translucent part

142A, 166, 166A, 166B: scattering part

W: Substrate

Claims (11)

A light detection device that detects light irradiated from a light irradiation unit; it has: a transmission member for transmitting the light irradiated from the light irradiation unit; and a photodetector for detecting the above-mentioned light transmitted by the above-mentioned transmission member; A plurality of first scattering parts for scattering the light are dispersedly provided on the transmission member. Such as the light detection device of claim 1, wherein, The photodetector is located at a position opposite to the end of the transmission member in the longitudinal direction, A plurality of the first scattering parts are arranged in a dispersed manner along the longitudinal direction of the transmission member. Such as the light detection device of claim 1 or 2, wherein, The transmission member has an end facing the photodetector, One of the plurality of first scattering parts, that is, the second scattering part, has a width greater than or equal to the width of the third scattering part, and the third scattering part is provided at a position closer to the above-mentioned end than the second scattering part. Scattering section. Such as the optical detection device of claim 1 or 2, wherein, it is further equipped with a workpiece table, The light irradiation unit irradiates the light onto the upper surface of the work table, At least one fourth scattering portion for scattering the light is provided on at least a part of the work table, The above-mentioned fourth scattering part is made of transparent material, The transmission member transmits the light incident through the fourth scattering unit. The photodetection device according to claim 4, wherein each of the first scattering parts is arranged to correspond to the position of the fourth scattering part. Such as the light detection device of claim 4, wherein, it is further equipped with: a condensing lens configured to condense the light incident through the fourth scattering part; and A shading plate, which is located at a position farther from the fourth scattering portion than the condensing lens, and is arranged at the condensing position of the condensing lens; The transmission member transmits the light condensed by the condensing lens. The photodetection device according to claim 1 or 2, wherein the plurality of first scattering portions are formed by sandblasting on the surface of the transmission member. The photodetection device according to claim 1 or 2, wherein the plurality of first scattering parts are reflective films coated on the lower surface of the transmission member. The photodetection device according to claim 1 or 2, wherein the light irradiated from the light irradiation unit is laser light. Such as the light detection device of claim 1 or 2, wherein, further comprising a chamber enclosing the transmission member described above, The light detector detects the light transmitted by the transmission member outside the chamber. A light irradiation device comprising: at least one light irradiation section for irradiating light; and The optical detection device of Claim 1 or 2.

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