TWI803847B - Heat treatment apparatus - Google Patents

Abstract

The object of the present invention is to provide a heat treatment apparatus that can prevent the complexity of the structure of the heat treatment apparatus for heat-treating the object to be processed by superheated steam, and can suppress the occurrence of an ambient atmosphere ( atmosphere) stagnation situation. The heat treatment apparatus 1 includes a heat treatment chamber 11 , a water vapor supply unit 13 , and a water vapor discharge unit 15 . The heat treatment chamber 11 is provided with an inlet 31 for carrying in the object 10 to be processed and an outlet 32 for carrying out the object 10 to perform heat treatment on the object 10 conveyed from the inlet 31 to the outlet 32 . The steam supply unit 13 is provided in the heating region HR in the heat treatment chamber 11 , and supplies superheated steam into the heat treatment chamber 11 . The steam discharge unit 15 is provided on the inlet 31 side and the outlet 32 side of the steam supply unit 13 in the heat treatment chamber 11 , and discharges the superheated water vapor in the heat treatment chamber 11 to the outside of the heat treatment chamber 11 .

Description

Heat treatment device

The present invention relates to a heat treatment device for heating an object to be processed by using superheated steam to heat the object to be processed.

Conventionally, there is known a heat treatment apparatus that heats an object to be processed with superheated steam to heat the object to be processed (for example, refer to Patent Document 1). The heat treatment apparatus described in Patent Document 1 includes a heat treatment chamber installed as a heating furnace for heat-treating an object to be processed, and a heating region for heating the object to be processed is formed in the heat treatment chamber. The heating area in the heat treatment chamber is divided into a plurality of zones (zones) arranged adjacent to each other sequentially from the upstream side toward the downstream side in the conveying direction of the object to be processed. Furthermore, the heat treatment apparatus of Patent Document 1 is configured such that the to-be-processed object is heated by superheated steam while being sequentially conveyed in each zone, and heat-processes the to-be-processed object.

In addition, the heat treatment apparatus of Patent Document 1 is configured such that water vapor as superheated water vapor is supplied to each of a plurality of sections in the heat treatment chamber. More specifically, an opening is provided on the upper surface of each block in the heat treatment chamber, and water vapor as superheated steam is supplied into each block from the opening on the upper face of each block. Also, in the heat treatment apparatus of Patent Document 1, exhaust holes are provided on the lower surfaces of the respective blocks of the heat treatment chamber. Accordingly, in the heat treatment apparatus of Patent Document 1, in each section of the heat treatment chamber, the water vapor supplied from the openings on the upper surface and passing through each section is exhausted from the exhaust holes on the lower surface. . [Prior Art Literature] [Patent Document]

[Patent Document 1] Japanese Patent Laid-Open No. 2015-2325

(Problem to be solved by the invention)

The heat treatment apparatus disclosed in Patent Document 1 is configured such that superheated steam is supplied from openings on the upper surface to each of a plurality of sections arranged in the heat treatment chamber along the conveying direction of the object to be processed, and the water vapor Exhaust from the vent hole on the lower surface. Therefore, there is a problem that the heat treatment device is complicated by the following structure: each of a plurality of sections in the heat treatment chamber needs to be used to supply superheated steam into the heat treatment chamber, and then use it to heat the object to be processed. The final water vapor is discharged toward the outside.

Also, in the heat treatment apparatus of Patent Document 1, as described above, in each of the plurality of sections in the heat treatment chamber, superheated steam is supplied from the openings on the upper surface and the steam is exhausted from the exhaust holes on the lower surface. Therefore, in each section of the heat treatment chamber, water vapor flows from the openings on the upper surface toward the exhaust holes on the lower surface, and the water vapor flowing from above to below is formed unevenly in each section. flow. This makes it difficult to generate a flow of water vapor in a direction parallel to the conveyance direction of the object to be processed in the heat treatment chamber. Therefore, the flow of water vapor along the direction parallel to the conveying direction of the object to be processed will have a large deviation, and a region where the flow of water vapor stagnates is likely to occur, and as a result, a region where the ambient atmosphere is likely to stagnate in the heat treatment chamber .

And it has the following problems: if the stagnation of the ambient atmosphere is likely to occur in the heat treatment chamber, the uneven distribution of superheated steam will easily occur in the heat treatment chamber, and there will be a large number of processed objects that are heat treated in the same heat treatment chamber. Uneven heat treatment tends to occur. Also, in the case of heat treatment in which a part of the components are vaporized from the object to generate gas, if stagnation occurs in the heat treatment chamber, the gas generated from the object will stagnate in the stagnant region. Moreover, it has the following problem: if the stagnation of the ambient atmosphere occurs and the gas generated from the object to be processed stays during the heat treatment, the purity of the superheated steam in the heating area will decrease, which will lead to a decrease in heat treatment efficiency. In addition, the gas generated from the object to be processed and retained in the stagnant area of the ambient atmosphere will not be discharged from the heat treatment chamber, but will be liquefied as the temperature drops at the end of the heat treatment, so that the top wall or wall of the heat treatment chamber will be liquefied. Condensation on the face. In addition, there is a problem that when a new heat treatment is started, the components condensed on the ceiling wall or the wall surface of the heat treatment chamber will drip onto the object to be processed, thereby causing the object to be treated to be soiled.

In addition, as a process in which a part of the components are vaporized from the object to be processed to generate gas during heat treatment, for example, sintering process is used. In the sintering process, the process of heating the to-be-processed object which is the to-be-sintered body integrated with the binder containing fats and oils, and vaporizing and removing a binder is performed. When this treatment is performed, if the vaporized binder stays in the stagnant area of the ambient atmosphere and is not discharged, it will be liquefied as the temperature drops at the end of the heat treatment, and dew will be condensed on the top wall or wall surface of the heat treatment chamber. Moreover, when a new heat treatment is started, the components of the adhesive condensed on the top wall or the wall surface of the heat treatment chamber will drop onto the object to be processed, causing the object to be processed to be soiled.

As mentioned above, if the stagnation of the ambient atmosphere is likely to occur in the heat treatment chamber, heat treatment unevenness will easily occur between a plurality of objects to be treated in the same heat treatment chamber, and the following problems will easily occur: The reduction of heat treatment efficiency due to the stagnation of gas generated in the object to be processed, and the generation of contamination of the object to be processed. Therefore, it is desired to realize a heat treatment apparatus capable of suppressing stagnation of the ambient atmosphere in the heat treatment chamber.

In view of the above circumstances, the present invention aims to provide a heat treatment apparatus that can prevent the complexity of the structure of the heat treatment apparatus for heat-treating the object to be processed by superheated steam, and can suppress the stagnation of the ambient atmosphere while the object is being processed. What happens in the heat treatment chamber of the heat treatment. (technical means to solve the problem)

(1) In order to solve the above-mentioned problems, a heat treatment apparatus according to an aspect of the present invention relates to heating an object to be processed with superheated steam to perform heat treatment on the object to be processed. Furthermore, a heat treatment apparatus according to an aspect of the present invention includes: a heat treatment chamber provided with an inlet for carrying in the object to be processed and an outlet for carrying out the object to be processed, and for the object to be processed that is conveyed from the inlet toward the outlet The object is heat-treated; the water vapor supply unit is installed in the heating area in the heat treatment chamber as the area where the object to be processed is heated, and supplies superheated steam to the heat treatment chamber; and the water vapor discharge unit is located in the above-mentioned heat treatment chamber. In the heat treatment chamber, the water vapor supply unit is provided on the inlet side and the outlet side respectively, and the superheated water vapor in the heat treatment chamber is discharged to the outside of the heat treatment chamber.

According to this configuration, the object to be processed is heated by the superheated steam supplied into the heat treatment chamber from the steam supply unit provided in the heating region of the heat treatment chamber, so that the object to be processed is heat-treated. In addition, the superheated steam used for heating the object flows from the steam supply part provided in the heating area toward the steam discharge parts respectively provided on the inlet side and the outlet side of the heat treatment chamber, and the steam The discharge portion is discharged toward the outside of the heat treatment chamber. Therefore, in the heat treatment chamber, the flow of water vapor that flows from the water vapor supply part in the heating area toward the inlet side and is discharged from the water vapor discharge part toward the outside, and the water vapor flow from the water vapor supply part in the heating area toward the outlet is formed. The flow of water vapor discharged from the water vapor discharge part to the outside by side flow. Moreover, in the heat treatment chamber, from the water vapor supply part in the heating area toward each of the inlet side and the outlet side, more uniform water with less variation in flow velocity is formed along the direction parallel to the conveyance direction of the object to be processed. The flow of steam. This makes it difficult to generate a region where the flow of water vapor stagnates in the heat treatment chamber, and as a result, hardly generates a region where the ambient atmosphere stagnates in the heat treatment chamber.

Therefore, according to the above configuration, it is possible to suppress stagnation of the ambient atmosphere in the heat treatment chamber in which the heat treatment of the object to be processed is performed. Also, according to the above configuration, since stagnation of the ambient atmosphere in the heat treatment chamber can be suppressed, it is possible to suppress unevenness in heat treatment among a plurality of objects to be treated that are heat treated in the same heat treatment chamber, and it is also possible to Suppresses the reduction of heat treatment efficiency and the occurrence of contamination of the processed object due to the stagnation of the gas generated from the processed object.

In addition, according to the above-mentioned configuration, the simple structure in which the water vapor supply part is provided in the heating area of the heat treatment chamber and the water vapor discharge part is provided on the inlet side and the outlet side of the heat treatment chamber can realize the suppression of the environmental atmosphere in the heat treatment chamber. Stagnation occurred in the heat treatment unit. Therefore, it is possible to prevent the complexity of the structure of the heat treatment apparatus for heat-treating the object to be treated with superheated steam.

As described above, according to the above configuration, it is possible to provide a heat treatment apparatus that can prevent the complexity of the structure of the heat treatment apparatus for heat-treating the object to be processed by superheated steam, and can suppress the heat treatment inside the heat treatment chamber for heat-treating the object to be processed. A stagnation of the environment occurs.

(2) There is a case where a gas supply unit for supplying at least one of an inert gas and air is further provided to the heat treatment chamber, the inlet is opened to the outside of the heat treatment chamber, and the heat treatment apparatus As the gas supply unit, there is an inlet-side gas supply unit, which is located closer to the above-mentioned water vapor discharge unit than the water vapor discharge unit provided on the inlet side with respect to the water vapor supply unit in the heat treatment chamber. entrance side.

According to this configuration, since the entrance of the heat treatment chamber is opened to the outside, it is possible to continuously, quickly and easily carry in an object to be processed into the heat treatment chamber. In this way, the heat treatment program can be continued to improve the operational efficiency of heat treatment. Furthermore, according to the above configuration, in addition to the opening of the inlet, it is also provided that an inert gas is supplied to the heat treatment chamber on the inlet side of the water vapor discharge part provided on the inlet side with respect to the water vapor supply part. and an inlet-side gas supply unit for at least any gas in the air. Therefore, with the gas supplied from the inlet-side gas supply unit, the ambient atmosphere in the heat treatment chamber can be separated between the inlet opened to the outside and the water vapor discharge unit. That is, the ambient atmosphere of the region from the water vapor supply unit to the inlet-side gas supply unit and the ambient atmosphere of the region from the inlet opened to the outside to the inlet-side gas supply unit can be separated. Thereby, in the heat treatment apparatus whose inlet is opened to improve the working efficiency of heat treatment, the ambient atmosphere in the area from the water vapor supply part to the water vapor discharge part can be blocked from the outside, and efficient Heat treatment of the object to be treated using superheated steam in the heating zone.

(3) There is a case where the inlet-side gas supply unit is provided as a pair, and in the heat treatment chamber, between the pair of the inlet-side gas supply units, there is a device that directs the gas in the heat treatment chamber toward the direction of the gas in the heat treatment chamber. An inlet-side exhaust unit for exhausting outside the heat treatment chamber.

According to this configuration, the inlet-side gas supply unit is provided as a pair, and the inlet-side exhaust unit is provided between them. Therefore, from the water vapor discharge part toward the inlet side, the water vapor discharge part, one of the pair of inlet side gas supply parts, the inlet side exhaust part, and the other of the pair of inlet side gas supply parts are ordered. and so on are configured. According to this configuration, the slight water vapor that leaks toward the inlet without being completely discharged by the water vapor discharge unit is mixed with the gas supplied from one of the pair of inlet side gas supply units to be diluted. Then, the water vapor diluted by mixing with the gas supplied from one of the pair of inlet-side gas supply parts is discharged from the inlet-side exhaust part toward the outside. Therefore, the slight amount of water vapor that leaks toward the inlet side from the water vapor discharge portion is also discharged from the inlet side exhaust portion. As a result, water vapor can be prevented from flowing into a region between the inlet side exhaust portion and the inlet, that is, a region with a relatively low temperature. Thereby, it is possible to prevent water vapor from flowing into a region with a lower temperature between the inlet side exhaust part and the inlet to cause dew condensation. By preventing the occurrence of condensation, it is possible to prevent moisture from dripping onto the object to be processed from the inlet and wet the object to be processed, thereby affecting the heat treatment state of the object to be processed. Moreover, according to the above configuration, the gas supplied from the other of the pair of inlet-side gas supply parts, that is, the gas supplied from the inlet-side gas supply part arranged between the inlet-side exhaust part and the inlet The gas can more reliably separate and block the ambient atmosphere of the area from the water vapor supply unit to the inlet-side gas supply unit, and the area from the inlet to the inlet-side gas supply unit.

(4) There is a case where a gas supply unit for supplying at least one of an inert gas and air is further provided to the heat treatment chamber, the outlet is opened to the outside of the heat treatment chamber, and the heat treatment apparatus As the gas supply unit, there is an outlet-side gas supply unit, which is located closer to the above-mentioned water vapor discharge unit than the water vapor discharge unit provided on the outlet side with respect to the water vapor supply unit in the heat treatment chamber. exit side.

According to this configuration, since the outlet of the heat treatment chamber is opened to the outside, it is possible to continuously, quickly and easily carry out the work of carrying out the to-be-processed object from the heat treatment chamber. In this way, the heat treatment program can be continued to improve the operational efficiency of heat treatment. Furthermore, according to the above configuration, in addition to the opening of the outlet, there is also a device for supplying inert gas and air into the heat treatment chamber with respect to the water vapor supply part which is arranged on the outlet side of the water vapor discharge part provided on the outlet side. An outlet-side gas supply unit for at least any one of the gases. Therefore, the atmosphere in the heat treatment chamber can be separated between the outlet opened to the outside and the water vapor discharge unit by the gas supplied from the outlet-side gas supply unit. That is, the ambient atmosphere of the region from the water vapor supply unit to the outlet-side gas supply unit and the ambient atmosphere of the region from the outlet opened to the outside to the outlet-side gas supply unit can be separated. Thereby, in the heat treatment apparatus whose outlet is opened to improve the working efficiency of heat treatment, the ambient atmosphere in the area from the water vapor supply part to the water vapor discharge part can be blocked from the outside, and efficient Carry out heat treatment of the object to be treated using superheated steam in the heating zone.

(5) The outlet-side gas supply unit is provided as a pair, and in the heat treatment chamber, an outlet side for discharging the gas in the heat treatment chamber toward the outside of the heat treatment chamber is provided between the pair of the outlet-side gas supply units. Exhaust.

According to this configuration, the outlet-side gas supply unit is provided as a pair, and the outlet-side exhaust unit is provided between them. Therefore, from the water vapor discharge part toward the outlet side, the water vapor discharge part, one of the pair of outlet side gas supply parts, the outlet side exhaust part, and the other of the pair of outlet side gas supply parts are ordered. and so on are configured. According to this configuration, the slight water vapor leaking toward the outlet side without being completely discharged by the water vapor discharge unit is mixed with the gas supplied from one of the pair of outlet side gas supply units to be diluted. Then, the water vapor diluted by mixing with the gas supplied from one of the pair of outlet-side gas supply parts is discharged from the outlet-side exhaust part toward the outside. Therefore, the slight amount of water vapor that leaks toward the outlet side from the water vapor discharge portion is also discharged from the outlet side exhaust portion. As a result, water vapor can be prevented from flowing into the region between the outlet-side exhaust portion and the outlet, that is, a region with a relatively low temperature. This prevents water vapor from flowing into the lower-temperature region between the exhaust portion on the outlet side and the outlet to cause dew condensation. By preventing the occurrence of dew condensation, it is possible to prevent the water from dripping on the processed object and wetting the processed object when the processed object is carried out from the outlet. Also, according to the above configuration, the gas supplied from the other of the pair of outlet-side gas supply parts, that is, the gas supplied from the outlet-side gas supply part arranged between the outlet-side exhaust part and the outlet The gas can more reliably separate and block the ambient atmosphere of the area from the water vapor supply unit to the outlet side gas supply unit, and the area from the outlet to the outlet side gas supply unit.

(6) The steam supply part is provided with a pair of nozzle parts arranged to face each other in the conveying direction of the object to be processed, and each of the pair of nozzle parts is configured to face one of the opposing pairs of the nozzle parts. Superheated steam is blown from the middle position side of the nozzle part.

According to this configuration, the superheated steam blown out from the pair of nozzle parts of the steam supply part flows toward the intermediate position side of the pair of nozzle parts facing each other. In the region between a pair of facing nozzle parts, there are cases where a partition configured to locally restrict the flow of gas in a direction parallel to the conveying direction of the object is provided, and the partition is not provided. The situation of the board. When a partition is installed, each superheated steam blown out from each nozzle part and flowing toward the middle position side of a pair of nozzle parts collides with the partition, thereby covering the conveyance direction of the object to be processed within the heating area. The overall diffusion of the vertical cross-section flows in such a way that it reverses and turns in a direction parallel to the conveying direction of the object to be processed. In addition, when no partition is provided, the superheated steam blown from each nozzle and flowing towards the middle position side of the pair of nozzles collides with each other, thereby covering the distance between the object and the object in the heating area. The entire cross-section perpendicular to the conveying direction flows so as to invert and return in a direction parallel to the conveying direction of the object to be processed. Therefore, regardless of whether a partition is provided or a partition is not provided, the superheated steam blown from each nozzle part flows toward the middle position side of a pair of nozzle parts and turns over. In the heated area, it flows in a direction parallel to the conveying direction of the processed object in the direction opposite to the middle position side of the pair of nozzle parts in the state of spreading across the entire cross section perpendicular to the conveying direction of the processed object. That is to say, the superheated steam blown out from the pair of nozzles is reversed at the middle position of the pair of nozzles, and diffused to the entire cross-section of the heating area, along the conveyance of the object to be processed. directions parallel to each other and flow in directions away from each other. Therefore, the superheated steam blown from one of the pair of nozzles flows from the middle position side of the pair of nozzles toward the inlet side of the heat treatment chamber and spreads over the entire cross section of the heating region. And, the superheated steam blown from the other of the pair of nozzles flows in a state of spreading from the middle position side of the pair of nozzles toward the outlet side of the heat treatment chamber to the entire cross section of the heating region. Thereby, in the heat treatment chamber, the flow of more uniform water vapor with less variation in flow velocity is formed in the following state: from the middle position side of a pair of nozzle parts toward the inlet side and the outlet side respectively, and along the The direction parallel to the conveying direction of the object spreads to the entire cross-section of the heating area. This makes it more difficult to generate a region where the flow of water vapor stagnates in the heat treatment chamber, and as a result, it becomes more difficult to generate a region where the ambient atmosphere stagnates in the heat treatment chamber. Therefore, according to the above configuration, stagnation of the ambient atmosphere in the heat treatment chamber can be further suppressed.

(7) An inlet-side partition is provided between each of the pair of inlet-side gas supply parts and the inlet-side exhaust part, and the inlet-side partition is configured to partially limit the connection between the heat treatment chamber and the gas outlet. The flow of gas in a direction parallel to the conveying direction of the object to be processed.

According to this configuration, an inlet-side partition plate that partially restricts the flow of gas in a direction parallel to the conveyance direction of the object is provided between each of the pair of inlet-side gas supply units and the inlet-side exhaust unit. Therefore, between the pair of inlet-side gas supply units arranged across the inlet-side exhaust unit, the ambient atmosphere can be separated more easily while maintaining a state in which the ambient atmosphere communicates so that the gas can flow. . Thereby, the ambient atmosphere of the region from the water vapor supply part to the inlet side gas supply part and the ambient atmosphere of the region from the inlet to the inlet side gas supply part can be separated and blocked more efficiently.

(8) Between each of the pair of outlet-side gas supply units and the outlet-side exhaust unit, an outlet-side partition is respectively provided, and the outlet-side partition is configured to locally restrict the connection between the heat treatment chamber and the outlet-side exhaust unit. The flow of gas in a direction parallel to the conveying direction of the object to be processed.

According to this configuration, between each of the pair of outlet-side gas supply units and the outlet-side exhaust unit, an outlet-side partition plate that locally restricts the flow of gas in a direction parallel to the conveyance direction of the object to be processed is provided. Therefore, between the pair of outlet-side gas supply units arranged across the outlet-side exhaust unit, the ambient atmosphere can be separated more easily while maintaining a state in which the ambient atmosphere communicates with the gas flow. . Thereby, the ambient atmosphere of the region from the steam supply unit to the outlet-side gas supply unit and the ambient atmosphere of the region from the outlet to the outlet-side gas supply unit can be separated and blocked more efficiently. (compared to the effect of previous technology)

According to the present invention, it is possible to prevent the complexity of the structure of the heat treatment apparatus for heat-treating the object to be processed by superheated steam, and to suppress stagnation of the ambient atmosphere in the heat-treatment chamber for heat-treating the object to be processed.

Hereinafter, an embodiment for implementing the present invention will be described with reference to the drawings.

[Outline of heat treatment equipment] FIG. 1 is a diagram schematically showing an example of a heat treatment apparatus 1 according to an embodiment of the present invention. 2 schematically shows the water vapor supply unit 13, the water vapor supply system 14, the water vapor discharge unit 15, the water vapor discharge system (16a, 16b), the gas supply unit 17, and the gas supply system 18 of the heat treatment apparatus 1. diagram. Fig. 3 is the figure that a part of heat treatment device 1 is enlarged and shown, and Fig. 3 (A) is that the entrance 31 of the heat treatment chamber 11 of heat treatment device 1 and its vicinity are enlarged and shown, and Fig. 3 (B) is It is an enlarged view showing the outlet 32 of the heat treatment chamber 1 of the heat treatment apparatus 1 and its vicinity.

Referring to FIGS. 1 to 3 , the heat treatment apparatus 1 is configured as a device for heating a metal object 10 to be processed by using superheated steam to perform heat treatment on the object 10 to be processed. In addition, superheated steam is water vapor heated to a temperature higher than the boiling point, and is dry water vapor at a temperature higher than the boiling point. The heat treatment apparatus 1 includes a heat treatment chamber 11 provided with an inlet 31 through which an object to be processed 10 is carried in and an outlet 32 through which the object to be processed 10 is carried out. In the heat treatment apparatus 1 , the object 10 is heated by superheated steam while being transported from the inlet 31 toward the outlet 32 in the heat treatment chamber 11 , and the object 10 is heat-treated. Examples of the heat treatment of the object 10 to be processed using superheated steam in the heat treatment apparatus 1 include degreasing treatment and sintering treatment.

When the heat treatment apparatus 1 performs the degreasing treatment, the object 10 to be treated 10 subjected to machining or the like in a processing step before the treatment by the heat treatment apparatus 1 is carried into the heat treatment apparatus 1 . In addition, in the heat treatment apparatus 1 , fats and oils adhering to the object 10 are heated by superheated steam to be vaporized and removed from the object 10 . Also, when the sintering process is performed in the heat treatment apparatus 1 , the object 10 to be sintered, which is composed of a material to be sintered and bonded with a binder containing oil and fat, is carried into the heat treatment apparatus 1 . Moreover, in the heat treatment apparatus 1, the object 10 to be processed is heated by superheated steam, and the binder is vaporized and removed, and then, by further heating with superheated steam, the treated object 10 is treated to remove the binder. The object 10 will be sintered.

In the heat treatment apparatus 1 , the object 10 to be processed is carried into the heat treatment chamber 11 , and is heated by superheated steam while being conveyed in the heat treatment chamber 11 . Thereby, the heat treatment of the object 10 to be processed is performed. Then, the processed object 10 after the heat treatment in the heat treatment chamber 11 is carried out from the heat treatment chamber 11 . Furthermore, the object 10 to be processed is continuously conveyed toward the heat treatment chamber 11 , is subjected to heat treatment while being continuously conveyed in the heat treatment chamber 11 , and is continuously carried out from the heat treatment chamber 11 .

The object to be processed 10 to be processed by the heat treatment apparatus 11 is, for example, a metal member, and is a substantially ring-shaped or substantially cylindrical member. Examples of the processed object 10 having a substantially annular or substantially cylindrical shape include a core of an electric motor, a race member such as an outer ring and an inner ring of a rolling bearing, and a gear such as a spur gear. , rolling bearing rollers, shafts, washers, etc. In addition, the object 10 to be processed may not be configured as a substantially annular or substantially cylindrical member, but may be configured as a member formed in a shape other than the substantially annular or substantially cylindrical shape. For example, various shapes such as a columnar shape, a prism shape, a square cylinder shape, a cuboid shape, a cube shape, a rod shape, a plate shape, and a shape having a special cross-sectional shape or surface shape may be used.

FIG. 3(A), which is an enlarged view of the entrance 31 of the heat treatment chamber 11 of the heat treatment apparatus 1 and its vicinity, shows a state in which the object 10 is carried into the heat treatment chamber 11 . 3(B), which is an enlarged view of the outlet 32 of the heat treatment chamber 11 of the heat treatment apparatus 1 and its vicinity, shows a state in which the object 10 is conveyed in the heat treatment chamber 11 and carried out from the heat treatment chamber 11. Referring to FIG. 3(A) and FIG. 3(B), when the object to be processed 10 is carried into the thermal processing chamber 11, it is carried in, for example, in a state of being arranged in a thin box-shaped casing 10a. In the casing 10a, a plurality of processed objects 10 are housed in a state of being spread and arranged at substantially equal intervals. Then, the object 10 to be processed is carried into the heat treatment chamber 11 in a state of being arranged in the casing 10a. Furthermore, in the housing 10a that accommodates a plurality of objects 10 to be processed, in such a manner that the surrounding air can pass through almost without resistance, for example, a plurality of holes formed on the surrounding side and bottom surface, and a plurality of holes formed on the openings on the upper surface. Thereby, superheated steam constituting the ambient atmosphere in the heat treatment chamber 11 flows through the casing 10a. Furthermore, the housing 10a only needs to be a structure that allows the superheated steam in the ambient atmosphere in the heat treatment chamber 11 to flow through the housing 10a almost without resistance, for example, it may also be formed by a mesh-like member. form.

The heat treatment apparatus 1 is configured to include a heat treatment chamber 11, a heater 12, a water vapor supply unit 13, a water vapor supply system 14, a water vapor discharge unit 15, a water vapor discharge system (16a, 16b), a gas supply unit 17, a gas Supply system 18, inlet side exhaust unit 19, outlet side exhaust unit 20, exhaust system (21a, 21b), partition plate 22, adhesive discharge unit 23, air curtain unit 24, control unit 25, etc. Hereinafter, the configuration of the heat treatment apparatus 1 will be described in detail.

[Heat treatment chamber] FIG. 4 is an enlarged view showing the water vapor supply unit 13 and its vicinity in the heat treatment chamber 11 of the heat treatment apparatus 1 . Fig. 5 is a schematic cross-sectional view of a part of the heat treatment device 11, Fig. 5(A) is a diagram showing the state observed from the position of the A-A arrow in Fig. 4 , and Fig. 5(B) is a view showing the position of the B-B arrow from Fig. 4 A graph of the observed state. Referring to FIGS. 1 to 5 , the heat treatment chamber 11 is provided with an inlet 31 for importing the object 10 to be processed and an outlet 32 for exporting the object 10 to be processed, and is configured to carry out the processing object 10 that will be conveyed from the inlet 31 toward the outlet 32 . Heat treatment furnace for heat treatment.

The heat treatment chamber 11 has a tunnel-like outer shape extending linearly and cylindrically, and a processing space in which the object 10 is transported and heat-treated for the object 10 is provided inside. The conveying direction of the processed object 10 , that is, the direction in which the processed object 10 is conveyed in the thermal processing chamber 11 is a direction parallel to the longitudinal direction in which the thermal processing chamber 11 extends in a cylindrical shape. In addition, in FIGS. 1-3, the conveyance direction of the object 10 to be processed is shown by the arrow X1 of a dot chain line, Hereinafter, this is called conveyance direction X1.

The heat treatment chamber 11 has a pair of side walls (11a, 11b), a top wall 11c, and a bottom wall 11d. A pair of side walls (11a, 11b), a ceiling wall 11c, and a bottom wall 11d of the heat treatment chamber 11 are formed of a plate-shaped member made of steel. The heat treatment chamber 11 is formed of a plate-shaped member made of steel, thereby being configured so that heat from the heater 12 described after heating the heat treatment chamber 11 from the outside can be easily conducted. A pair of side walls (11a, 11b) are arrange|positioned in parallel, and both are made into the wall part extended along the up-down direction and conveyance direction X1. The ceiling wall 11c is used as a wall part which divides the top surface part of the upper part of the heat processing chamber 11, and is provided so that the upper end part of a pair of side walls (11a, 11b) may be integrated. Moreover, the top wall 11c is formed so that it may extend in arch shape in the cross section perpendicular|vertical to conveyance direction X1. The bottom wall 11d is used as a wall part which divides the bottom surface part of the heat processing chamber 11, and is provided so that the lower end part of a pair of side walls (11a, 11b) may be integrated.

The entrance 31 of the heat treatment chamber 11 is set as an opening in the heat treatment chamber 11 for the object 10 to be processed to be carried in. In the present embodiment, the inlet 31 is defined as an opening defined by the end of the side wall 11a, the end of the side wall 11b, the end of the top wall 11c, and the end of the bottom wall 11d. In the heat treatment chamber 11 , the inlet 31 is opened at one end in a direction parallel to the conveyance direction X1 , and is opened at an end upstream of the heat treatment chamber 11 in the conveyance direction X1 . The entrance 31 is open to the outside of the heat treatment chamber 11 and is always open to the outside without providing a door panel. In addition, the object 10 to be processed is carried into the thermal processing chamber 11 from the entrance 31 in the state accommodated in the casing 10 a as described above.

The outlet 32 of the heat treatment chamber 11 is used as an opening in the heat treatment chamber 11 for carrying out the processed object 10 . In the present embodiment, the outlet 32 is defined as an opening defined by the end of the side wall 11a, the end of the side wall 11b, the end of the top wall 11c, and the end of the bottom wall 11d. Moreover, in the heat treatment chamber 11, the outlet 32 is provided as an opening at the end opposite to the end on the side of the entrance 31 in the direction parallel to the conveyance direction X1, and the end on the downstream side of the conveyance direction X1 of the heat treatment chamber 11 is opening. The outlet 32 is open to the outside of the heat treatment chamber 11 and is always open to the outside without providing a door panel. In addition, the object 10 to be processed is carried out from the outlet 32 toward the outside of the heat treatment chamber 11 in a state accommodated in the housing 10 a as described above.

Also, in the heat treatment chamber 11, a heating region HR is provided as a region where the object to be processed 10 is heated. The heating region HR is set as a partial region in the conveyance direction X1 in the heat treatment chamber 11 . Furthermore, in FIG. 1 , regarding the heating region HR in the heat treatment chamber 11, as a predetermined range on the conveying direction X1, it is represented by a double-headed arrow, and is schematically represented by a double-headed arrow shown outside the heat treatment chamber 11. to express.

In the heat treatment chamber 11, the object 10 to be processed is heated by the superheated steam supplied from the steam supply unit 13 described later, and is also heated by the ambient atmosphere in the heat treatment chamber 11 heated by the heat treatment chamber 11. , wherein the heat treatment chamber 11 is heated by the heater 12 described later after heating the heat treatment chamber 11 from the outside. Therefore, in the heat treatment chamber 11, the heating region HR, which is a region for heating the object 10 to be processed, is configured to perform heating by superheated steam and heating by heat from the heater 12 (that is, A region of at least any one of heating by the ambient atmosphere in the heat treatment chamber 11 heated by the heat from the heater 12 via the heat treatment chamber 11 .

Furthermore, in the heat treatment chamber 11, the heating of the object 10 to be processed by the heat from the heater 12 is performed in the area where the heater 12 is arranged in the conveyance direction X1. Furthermore, the heating of the object 10 to be processed by the superheated steam is performed in a region where the ambient atmosphere in the heat treatment chamber 11 contains the superheated steam. In this embodiment, the region where the object 10 is heated by superheated steam in the heat treatment chamber 11 is from the water vapor supply part 13 to the inlet-side gas supply part 36a of the gas supply part 17 described later. and the area from the water vapor supply unit 13 to the outlet-side gas supply unit 37b of the gas supply unit 17 described later. In addition, in the present embodiment, in the heat treatment chamber 11, the area where the object 10 is heated by the heater 12 is included in the area where the object 10 is heated by superheated steam. middle. That is, in the transfer direction X1 of the heat treatment chamber 11, the area where the object 10 is heated by the heat from the heater 12 is arranged in the area where the object 10 is heated by the superheated steam. inside of the area. Therefore, in the present embodiment, the heating region HR is the area from the steam supply part 13 to the inlet-side gas supply part 36a of the gas supply part 17 described later, and the region from the steam supply part 13 to the gas supply part 17 described later. The region up to the outlet side gas supply part 37b.

Also, in the present embodiment, as described above, the area where heating by the heat from the heater 12 is performed is arranged inside the area where heating by superheated steam is performed. Therefore, in the area within the heating area HR, where heating by the heat from the heater 12 is performed, both heating by the heat from the heater 12 and heating by superheated steam are performed. of heating. And, in the area within the heating area HR, where the heater 12 is not arranged and the heating by the heat from the heater 12 is not performed, only the heating by the superheated steam is performed.

Also, in this embodiment, an example has been described in which the region heated by the heat from the heater 12 is disposed inside the region heated by superheated steam, but this may not be the case. The area where the object 10 is heated by the heater 12 may be arranged so as to cover from the inside to the outside of the area where the object 10 is heated by superheated steam. In this case, the region where heating with superheated steam is performed is arranged inside the region where heating with heat from the heater 12 is performed. Furthermore, the heating region HR is a region including a region where heating with superheated steam is performed, and is a region where heating with heat from the heater 12 is performed.

In addition, a transfer mechanism 33 is provided in the heat treatment chamber 11 . The conveyance mechanism 33 is provided as a mechanism that conveys the object 10 to be processed within the thermal processing chamber 11 . In addition, in this embodiment, the conveyance mechanism 33 is comprised so that the to-be-processed object 10 may be conveyed in units of the whole casing 10a, ie, the to-be-processed object 10 shall be conveyed in the state accommodated in the casing 10a. The conveyance mechanism 33 is arranged in the lower region in the heat treatment chamber 11 and is arranged above the bottom wall 11d in parallel with the wall surface of the bottom wall 11d along the conveyance direction X1. The transport mechanism 33 is configured, for example, as a mechanism for transporting the processed object 10 by an endless mesh belt 34 . Furthermore, the conveyance mechanism 33 is configured so that the mesh belt 34 is surrounded, and the processed object 10 accommodated in the casing 10 a disposed on the upper surface of the mesh belt 34 is conveyed together with the casing 10 a.

Furthermore, the endless mesh belt 34 is, for example, configured to have a structure in which roller chains are respectively provided on both edges in the width direction thereof, and is formed by a plurality of drive shafts 35 provided with sprockets meshing with the roller chains. Drive around. The plurality of driving shafts 35 are provided so as to rotate about the respective axes while being inserted inside the mesh belt 34 . The plurality of drive shafts 35 are arranged to extend parallel to each other, and are arranged to extend in a direction perpendicular to the pair of side walls (11a, 11b). Moreover, each drive shaft 35 is rotatably supported with respect to a pair of side walls (11a, 11b). Also, a pair of sprockets (35a, 35a) arranged away from the axial direction is provided on each drive shaft 35, and each sprocket 35a meshes with each roller chain on both edges of the mesh belt 34. Moreover, at least one of the plurality of drive shafts 35 is configured to be rotationally driven by an electric motor (not shown) that operates in accordance with a control command from the control unit 25 . If the drive shaft 35 is rotationally driven by the electric motor, the rotational drive of the drive shaft 35 is transmitted to the mesh belt 34 through the meshing of the sprocket 35 a with the roller chain. Then, the winding motion of the grid belt 34 freely supported by the plurality of driving shafts 35 is performed. When the mesh belt 34 performs the winding operation, the processed object 10 arranged on the upper surface of the mesh belt 34 in a state of being housed in the case 10a is conveyed.

[heater] Referring to FIG. 1 , heater 12 is provided as a mechanism for heating heat treatment chamber 11 from the outside, and plural heaters 12 are provided. A plurality of heaters 12 are arranged in series along the longitudinal direction of the heat treatment chamber 11 (that is, along the conveyance direction X1). In addition, in FIG. 2 and FIG. 4 and later figures, the illustration of the heater 12 is abbreviate|omitted.

Each heater 12 is configured to include a heating element (not shown) arranged around the heat treatment chamber 11 , and an outer side of the heating element arranged around the heat treatment chamber 11 to cover the periphery of the heat treatment chamber 11 . A heat insulating member (not shown) arranged in the same way as a heating element. The heating element is disposed so as to heat the pair of side walls (11a, 11b), the top wall 11c, and the bottom wall 11d in the heat treatment chamber 11 from the outside. The heating element is configured, for example, to include an electric heating element that converts electric energy supplied from a power supply (not shown) into thermal energy, and generates heat by energizing the electric heating element. In addition, the heat generating element of the heater 12 operates according to a control command from the control unit 25 to generate heat. If the heating element of the heater 12 operates according to the control command from the control unit 25 to generate heat, the pair of side walls (11a, 11b), the top wall 11c, and the bottom wall 11d of the heat treatment chamber 11 will be heated by the heat from the heater 12. Heated by the heat of the heating element. Thereby, the ambient atmosphere in the heat treatment chamber 11 is heated. Then, the object to be processed 10 conveyed in the heat treatment chamber 11 is heated by the superheated steam, and is also heated by the ambient atmosphere in the heat treatment chamber 11 heated by the heat from the heater 12 .

[Water vapor supply part] Referring to FIG. 1 , FIG. 2 , FIG. 4 , and FIG. 5 , the steam supply unit 13 is provided in the heating region HR in the heat treatment chamber 11 , and serves as a mechanism for supplying superheated steam into the heat treatment chamber 11 . In the heat treatment apparatus 1 exemplified in this embodiment, the steam supply unit 13 is provided in the central portion of the object to be processed 10 in the conveyance direction X1 within the heating region HR. In addition, the steam supply part 13 should just be arrange|positioned in the heating area|region HR, and may be provided in the entrance 31 side or the exit 32 side rather than the central part of conveyance direction X1.

The steam supply unit 13 is configured to include a pair of nozzle units ( 38 a , 38 b ) for supplying superheated steam supplied from a steam supply system 14 described later into the heat treatment chamber 11 . A pair of nozzle parts (38a, 38b) are each extended in a cylindrical shape, and the both ends of a cylindrical axial direction are closed. A pair of nozzle parts (38a, 38b) is arrange|positioned facing mutually in the conveyance direction X1 of the object 10 to be processed. Moreover, in the conveyance direction X1 of the object 10, the nozzle part 38a is arrange|positioned at the inlet 31 side with respect to the nozzle part 38b, and the nozzle part 38b is arrange|positioned at the exit 32 side with respect to the nozzle part 38a. Moreover, in this embodiment, a pair of nozzle part (38a, 38b) is arrange|positioned in the center part of the conveyance direction X1 in the heating region HR in the heat processing chamber 11. Furthermore, the nozzle portion 38a is disposed on the entrance 31 side from the central position in the conveyance direction X1 in the heating region HR, and the nozzle portion 38b is disposed on the exit 32 side from the central position in the conveyance direction X1 in the heating region HR. . Moreover, each nozzle part (38a, 38b) is arrange|positioned in the heat processing chamber 11 in the state which the cylinder axial direction extended horizontally along the width direction of the heat processing chamber 11. The width direction of the heat treatment chamber 11 is defined as a direction perpendicular to the longitudinal direction of the heat treatment chamber 11 extending horizontally (that is, the transfer direction X1) and the height direction of the heat treatment chamber 11 (that is, the vertical direction).

Moreover, each nozzle part (38a, 38b) is connected to each steam supply pipe (42a, 42b) of the steam supply system 14 mentioned later at the substantially center position of the cylinder axial direction. In addition, the nozzle part 38a is connected to the water vapor supply pipe 42a, and the nozzle part 38b is connected to the water vapor supply pipe 42b. Each water vapor supply pipe (42a, 42b) penetrates through the ceiling wall 11c of the heat treatment chamber 11, and is connected to each nozzle part (38a, 38b) in the heat treatment chamber 11. Each steam supply pipe (42a, 42b) connected to each nozzle part (38a, 38b) is fixed to the ceiling wall 11c in a state penetrating through the ceiling wall 11c. Thereby, in the heat processing chamber 11, each nozzle part (38a, 38b) is supported by the ceiling wall 11c via each steam supply pipe (42a, 42b).

The inside of each nozzle part (38a, 38b) communicates with the inside of each steam supply pipe (42a, 42b), and the superheated steam supplied from each water vapor supply pipe (42a, 42b) is supplied to each nozzle part The interior of (38a, 38b). Moreover, the some nozzle hole 39 is provided in each nozzle part (38a, 38b). Each nozzle hole 39 is formed, for example, as a through hole opening in a circular shape. In addition, the opening shape of each nozzle hole 39 is not limited to a circular shape, For example, it can also be formed in various shapes, such as a rectangular shape and a slit shape. The plurality of nozzle holes 39 are arranged linearly along the cylindrical axis direction of each nozzle part (38a, 38b), for example, arranged at equal intervals. Furthermore, since the cylindrical axis direction of each nozzle part (38a, 38b) is along the width direction of the heat treatment chamber 11, the plurality of nozzle holes 39 of each nozzle part (38a, 38b) are drawn along the width direction of the heat treatment chamber 11. configuration. The superheated steam supplied from each steam supply pipe (42a, 42b) toward each nozzle portion (38a, 38b) fills each nozzle portion (38a, 38b) and is blown out from a plurality of nozzle holes 39. . By blowing the superheated steam from the plurality of nozzle holes 39, the superheated steam is supplied into the heat treatment chamber 11 from the respective nozzle portions (38a, 38b).

In addition, in the nozzle part 38a, a plurality of nozzle holes 39 arranged along the direction of the cylinder axis all open toward the middle position side of a pair of opposing nozzle parts (38a, 38b) and open toward the outlet 32 side. Therefore, the superheated steam supplied from the nozzle portion 38a disposed on the inlet 31 side out of the pair of nozzle portions (38a, 38b) toward the inside of the heat treatment chamber 11 is directed toward the outlet 32 side opposite to the inlet 31 side, and from The nozzle portion 38a is blown out. Moreover, in this embodiment, in the nozzle part 38a, the some nozzle hole 39 opens toward the center position side of the conveyance direction X1 in heating area|region HR. In addition, the nozzle part 38a is arrange|positioned at the entrance 31 side rather than the center position of the conveyance direction X1 in heating area|region HR, and each nozzle hole 39 of the nozzle part 38a opens toward the exit 32 side. Therefore, the superheated steam supplied to the heat treatment chamber 11 from the nozzle portion 38a disposed on the inlet 31 side closer to the central position of the conveyance direction X1 in the heating region HR flows from the inlet 31 side to the inside of the heating region HR. The center position side of the conveyance direction X1 is blown out from the nozzle part 38a.

In addition, in the nozzle part 38b, a plurality of nozzle holes 39 arranged along the direction of the cylinder axis all open toward the middle position side of a pair of opposing nozzle parts (38a, 38b) and open toward the inlet 31 side. Therefore, the superheated steam supplied to the heat treatment chamber 11 from the nozzle portion 38b disposed on the outlet 32 side among the pair of nozzle portions (38a, 38b) is directed toward the inlet 31 side opposite to the outlet 32 side, and flows from The nozzle portion 38b is blown out. Moreover, in this embodiment, in the nozzle part 38b, the some nozzle hole 39 opens toward the center position side of the conveyance direction X1 in heating region HR. In addition, the nozzle part 38b is arrange|positioned at the exit 32 side rather than the center position of the conveyance direction X1 in heating area|region HR, and each nozzle hole 39 of the nozzle part 38b opens toward the inlet 31 side. Therefore, the superheated steam supplied to the heat treatment chamber 11 from the nozzle portion 38a disposed on the outlet 32 side closer to the center position of the conveyance direction X1 in the heating region HR is directed from the outlet 32 side to the inside of the heating region HR. The center position side of the conveyance direction X1 is blown out from the nozzle part 38b.

According to the above structure, a pair of nozzle part (38a, 38b) is comprised so that superheated steam may be blown toward the intermediate position side of a pair of nozzle part (38a, 38b) which opposes each. Moreover, in this embodiment, the nozzle part 38a is arrange|positioned at the center part of the conveyance direction X1 in the heating area|region HR, and blows superheated steam from the inlet 31 side toward the center position side of the conveyance direction X1 in the heating area HR. And the nozzle part 38b is arrange|positioned so that superheated steam may blow out toward the center position side of the conveyance direction X1 in the heating region HR from the outlet 32 side in the center part of the conveyance direction X1 in the heating region HR. Therefore, a pair of nozzle parts (38a, 38b) are arrange|positioned facing each other in the conveyance direction X1 of the object 10 across the central position in the conveyance direction X1 in the heating area|region HR. Moreover, a pair of nozzle part (38a, 38b) is comprised so that superheated steam may be blown toward the center position side of the conveyance direction X1 of the object 10 in the heating area|region HR, respectively.

[Water vapor supply system] Referring to FIG. 2 , FIG. 4 , and FIG. 5 , the steam supply system 14 is a mechanism that generates superheated steam and supplies the superheated steam to the steam supply unit 13 . Furthermore, the steam supply system 14 is configured to include a superheated steam generating unit 40 and steam supply piping (41, 42a, 42b).

The superheated steam generator 40 is a mechanism for heating water to generate superheated steam, and includes a boiler and a superheater. The boiler heats and evaporates water to generate saturated steam at a temperature around the boiling point, and the superheater further heats the saturated steam generated in the boiler to generate superheated steam. The superheated steam generation unit 40 operates according to a control command from the control unit 25 to generate superheated steam. That is, the boiler and the superheater operate according to the control command from the control unit 25 to generate superheated steam. When the superheated steam generation unit 40 operates according to the control command from the control unit 25 to generate superheated steam, the superheated steam will be supplied to the steam supply unit 13 through the steam supply pipes (41, 42a, 42b) described later. A pair of nozzle portions (38a, 38b).

The steam supply pipe 41 is connected to the superheated steam generator 40 at its upstream end side, and serves as a piping system for supplying superheated steam generated by the superheated steam generator 40 . Moreover, the water vapor supply pipe 41 is connected to the water vapor supply pipe 42a and the water vapor supply pipe 42b on the downstream end side thereof. That is, the water vapor supply pipe 41 is connected to the water vapor supply pipe (42a, 42b) so as to branch in parallel. The steam supply piping 42a is a piping system connecting the steam supply piping 41 and the nozzle portion 38a, and is configured to attack the nozzle with the superheated steam generated by the superheated steam generation unit 40 and supplied via the steam supply piping 41. Section 38a. The steam supply pipe 42b is a piping system connecting the steam supply pipe 41 and the nozzle part 38b, and is configured to supply the superheated steam generated by the superheated steam generating part 40 and supplied via the steam supply pipe 41 to the nozzle. Section 38b.

[Water vapor discharge part] 6 is an enlarged view showing an inlet-side water vapor discharge unit 15a, an inlet-side gas supply unit (36a, 36b) described later, and their vicinity in the heat treatment chamber 11 of the heat treatment apparatus 1, which will be described later. Fig. 7 is a schematic cross-sectional view of a part of the heat treatment device 1, Fig. 7(A) is a view showing the state viewed from the position of the arrow C-C in Fig. 6, and Fig. 7(B) is a view showing the position of the arrow D-D in Fig. 6 A graph of the observed state. 8 is an enlarged view showing an outlet-side water vapor discharge unit 15b, an outlet-side gas supply unit (37a, 37b) described later, and their vicinity in the heat treatment chamber 11 of the heat treatment apparatus 1, which will be described later. Fig. 9 is a schematic cross-sectional view of a part of the heat treatment device 1, Fig. 9(A) is a view showing the state viewed from the direction of the E-E arrow in Fig. 8, and Fig. 9(B) is a view from the direction of the F-F arrow in Fig. 8 A graph of the observed state.

Referring to FIG. 1 to FIG. 3 , and FIG. 6 to FIG. 9 , the steam discharge unit 15 is set as a mechanism for discharging the superheated steam in the heat treatment chamber 11 to the outside of the heat treatment chamber 11 . Further, the water vapor discharge unit 15 is provided on the inlet 31 side and the outlet 32 side with respect to the water vapor supply unit 13 in the heat treatment chamber 11 .

On the inlet 31 side of the heat treatment chamber 11 , an inlet-side steam discharge unit 15 a is provided as the steam discharge unit 15 . On the outlet 32 side of the heat treatment chamber 11 , an outlet-side steam discharge unit 15 b is provided as the steam discharge unit 15 . In this embodiment, the inlet-side steam discharge part 15a and the outlet-side steam discharge part 15b are arranged in the heating region HR in the heat treatment chamber 11, and are respectively arranged at both ends of the conveying direction X1 in the heating region HR. area near the Ministry. In addition, in the present embodiment, the inlet-side steam discharge unit 15a is arranged in the heat treatment chamber 11 corresponding to the heater 12 arranged closest to the inlet 31 side among the plurality of heaters 12 arranged along the conveyance direction X1. s position. In addition, the outlet-side steam discharge unit 15b is arranged at a position corresponding to the heater 12 arranged closest to the outlet 32 side among the plurality of heaters 12 arranged along the conveyance direction X1 in the heat treatment chamber 11 . In addition, the inlet side steam discharge part 15a and the outlet side steam discharge part 15b are arranged on the top wall 11c side in the region from both ends in the direction parallel to the conveyance direction X1 of the heating zone HR to the vicinity of each. The area, that is, the area on the upper half side of the heat treatment chamber 11 in a cross section perpendicular to the conveyance direction X1.

The inlet-side steam discharge part 15 a and the outlet-side steam discharge part 15 b have the same configuration, and are formed in a hollow box shape extending along the width direction of the heat treatment chamber 11 . Furthermore, the inlet-side steam discharge part 15a and the outlet-side steam discharge part 15b are respectively configured to include an upper wall 43a extending arched along the top wall 11c in a cross section perpendicular to the conveyance direction X1, and extending horizontally. The lower wall 43b and a pair of side walls (43c, 43d) extending along a cross section perpendicular to the conveying direction X1. Thereby, the hollow area inside each of the inlet side water vapor discharge part 15a and the outlet side water vapor discharge part 15b is formed to be surrounded by the upper wall 43a, the lower wall 43b, and a pair of side walls (43c, 43d). The arc-shaped dome-shaped hollow area.

In addition, a plurality of through holes (not shown) for sucking superheated steam are provided on the lower wall 43b of each of the inlet side steam discharge part 15a and the outlet side steam discharge part 15b. The superheated water vapor is drawn in from the inlet side steam discharge part 15 a and the outlet side steam discharge part 15 b, and is discharged from the heat treatment chamber 11 .

[Water vapor discharge system] Referring to Fig. 2 and Fig. 6 to Fig. 9, the steam discharge system (16a, 16b) is set to suck the superheated steam from the inlet side steam discharge part 15a and the outlet side steam discharge part 15b and direct the superheated steam towards the heat treatment The mechanism for discharging outside the chamber 11. Furthermore, the water vapor discharge systems (16a, 16b) are respectively connected to the inlet side water vapor discharge part 15a and the outlet side water vapor discharge part 15b. Furthermore, the steam discharge system 16a is connected to the inlet side steam discharge unit 15a, and the superheated steam sucked into the inlet side steam discharge unit 15a is sucked into the steam discharge system 16a and discharged from the heat treatment chamber 11. Moreover, the steam discharge system 16b is connected to the outlet side steam discharge unit 15b, and the superheated steam sucked into the outlet side steam discharge unit 15b is sucked into the steam discharge system 16b and discharged from the heat treatment chamber 11.

The water vapor discharge system 16 a and the water vapor discharge system 16 b have the same configuration, and both are configured to include a water vapor discharge pipe 44 and an injector 45 .

Each water vapor discharge pipe 44 of the water vapor discharge system (16a, 16b) penetrates the top wall 11c of the heat treatment chamber 11, and is connected to the inlet side water vapor discharge part 15a and the outlet side water vapor discharge part 15b in the heat treatment chamber 11 respectively. . The interior of each of the inlet-side steam discharge part 15a and the outlet-side steam discharge part 15b communicates with each steam discharge pipe 44, and the superheated water sucked into the inlet-side steam discharge part 15a and the outlet-side steam discharge part 15b respectively The steam is sucked into each steam discharge pipe 44 . Moreover, each steam discharge pipe 44 connected to the inlet side steam discharge part 15a and the outlet side steam discharge part 15b is fixed to the ceiling wall 11c in the state which penetrates the ceiling wall 11c. Thereby, in the heat treatment chamber 11 , the inlet side steam discharge part 15 a and the outlet side steam discharge part 15 b are respectively supported by the ceiling wall 11 c through the respective water vapor discharge pipes 44 .

Each ejector 45 of the water vapor discharge system (16a, 16b) is connected to the inlet side water vapor discharge part 15a and the outlet side water vapor discharge part respectively in each water vapor discharge pipe 44 with respect to each water vapor discharge pipe 44. The ends opposite to the ends of 15b are connected. Furthermore, each ejector 45 is set to generate negative pressure by using a high-pressure fluid, suck superheated steam from the inlet-side steam discharge part 15a and the outlet-side steam discharge part 15b through each steam discharge pipe 44, and discharge A mechanism that discharges the sucked superheated steam toward the outside.

Each injector 45 of the water vapor discharge system (16a, 16b) is constituted, for example, with a nozzle to which compressed air is supplied as a high-pressure fluid, a main body that covers the periphery of the nozzle, and a nozzle that communicates with the main body and is provided with an opening to the outside. Diffuser for spit outlet. The nozzle is configured such that compressed air is supplied from a compressed air supply source (not shown). In addition, on the upstream side of the nozzle, a solenoid valve that is opened and closed according to a control command from a control unit 25 described later is provided to control the supply and discharge of compressed air to the nozzle. The main body divides the area around the downstream end of the nozzle into a negative pressure generating area, and is connected to each steam discharge pipe 44 . Moreover, in the part connected to the downstream end of each water vapor discharge pipe 44 in the main body, an electromagnetic valve that is opened and closed according to a control command from the control unit 25 is provided, and the ejector 45 is activated to discharge the water vapor through each water vapor. When the superheated steam of the pipe 44 is sucked, the solenoid valve is opened.

When discharging the adhesive using the inlet-side water vapor discharge part 15a and the outlet-side water vapor discharge part 15b, according to the control command from the control part 25, the solenoid valves of the injectors 45 of the water vapor discharge system (16a, 16b) The valve will be opened and injector 45 will be actuated. That is, the solenoid valve on the upstream side of the nozzle is opened, and the solenoid valve connected to the downstream end of each steam discharge pipe 44 in the main body is opened, and each injector 45 is activated. When each ejector 45 is activated, the compressed air is blown out from the nozzle at a high speed toward the inside of the main body to generate a negative pressure in the main body. The superheated steam inside is sucked through each steam discharge pipe 44 . The superheated steam in each of the inlet-side steam discharge part 15a and the outlet-side steam discharge part 15b is sucked into each steam discharge pipe 44, and the superheated steam in the heat treatment chamber 11 is discharged from the The plurality of through-holes of the lower wall 43b of each of the inlet-side steam discharge part 15a and the outlet-side steam discharge part 15b are sucked. The superheated steam sucked into the inlet-side steam discharge part 15a and the outlet-side steam discharge part 15b respectively flows toward the main body of each injector 45 through each steam discharge pipe 44, and is blown out from the nozzle in the main body. Compressed air mix. Then, the mixed gas in the state of mixing the superheated steam and the compressed air flows toward the downstream side in the diffuser, and is discharged toward the outside from the discharge port of the diffuser. In this way, the superheated steam in the heat treatment chamber 11 will be sucked in from the inlet side steam discharge part 15a and the outlet side steam discharge part 15b respectively, and will be discharged toward the outside through each steam discharge pipe 44 and each injector 45. discharge.

[Gas Supply Unit] Referring to FIGS. 1 to 3 and FIGS. 6 to 9 , the gas supply unit 17 is provided as a mechanism for supplying at least one of an inert gas and air into the heat processing chamber 11 . That is, the gas supply unit 17 is set as a mechanism for supplying an inert gas into the heat treatment chamber 11, or as a mechanism for supplying air into the heat treatment chamber 11, or as a mechanism for supplying an inert gas and air into the heat treatment chamber 11. Mechanism for mixing gases. In addition, in this embodiment, the form in which the gas supply part 17 is comprised as the mechanism which supplies inert gas to the inside of the heat processing chamber 11 was illustrated. The inert gas supplied by the gas supply unit 17 to the heat treatment chamber 11 is, for example, nitrogen gas. In addition, as an inert gas other than nitrogen gas supplied by the gas supply part 17, helium gas and argon gas can be illustrated, for example.

In the heat treatment apparatus 1, as the gas supply unit 17, an inlet-side gas supply unit (36a, 36b) and an outlet-side gas supply unit (37a, 37b) are provided. In the heat treatment chamber 11, the inlet-side gas supply part (36a, 36b) is provided on the inlet 31 side with respect to the water vapor supply part 13, and the outlet-side gas supply part (37a, 37b) is provided with respect to the water vapor supply part 13. On the exit 32 side.

The inlet-side gas supply unit (36a, 36b) is provided as a pair, and is provided closer to the inlet 31 than the inlet-side steam discharge unit 15a provided on the inlet 31 side with respect to the water vapor supply unit 13 in the heat treatment chamber 11. side. The pair of inlet-side gas supply parts (36a, 36b) are each formed, for example, as a member extending in a cylindrical shape and having both ends in the direction of the cylinder axis closed. In this embodiment, a pair of inlet side gas supply part (36a, 36b) is arrange|positioned in the area|region near the end part of the inlet 31 side in the direction parallel to the conveyance direction X1 of heating region HR. Furthermore, a pair of inlet side gas supply part (36a, 36b) is arrange|positioned along the conveyance direction X1, and the inlet side gas supply part 36a is arrange|positioned at the inlet 31 side with respect to the inlet side gas supply part 36b. In addition, each inlet-side gas supply part (36a, 36b) is arranged in the heat treatment chamber 11 in a state in which the cylinder axis direction extends horizontally along the width direction of the heat treatment chamber 11.

In addition, each inlet-side gas supply part (36a, 36b) is connected to each branch pipe (48a, 48b) of the gas supply system 18 described later for supplying an inert gas at a substantially center position in the direction of the cylinder axis. Furthermore, the inlet side gas supply part 36a is connected to the branch pipe 48a, and the inlet side gas supply part 36b is connected to the branch pipe 48b. Each branch pipe (48a, 48b) penetrates through the ceiling wall 11c of the heat treatment chamber 11, and is connected to each inlet side gas supply part (36a, 36b) in the heat treatment chamber 11. Each branch pipe (48a, 48b) connected to each inlet-side gas supply part (36a, 36b) is fixed to the ceiling wall 11c in a state penetrating through the ceiling wall 11c. Thereby, in the heat processing chamber 11, each inlet side gas supply part (36a, 36b) is supported by the ceiling wall 11c via each branch pipe (48a, 48b).

The inside of each inlet-side gas supply unit (36a, 36b) communicates with the inside of each branch pipe (48a, 48b), and the inert gas supplied from each branch pipe (48a, 48b) is supplied to each inlet-side gas supply unit. the interior of the portion (36a, 36b). Moreover, a plurality of nozzle holes (not shown) are provided in each inlet side gas supply part (36a, 36b). A plurality of nozzle holes are arranged linearly along the cylindrical axis direction of each inlet-side gas supply part (36a, 36b), for example, arranged at equal intervals. Moreover, the plurality of nozzle holes arranged along the cylinder axis direction in each inlet-side gas supply part (36a, 36b) all open downward. Therefore, the inert gas is blown downward from each inlet side gas supply part (36a, 36b).

According to the above structure, the inert gas supplied from each branch pipe (48a, 48b) toward each inlet-side gas supply part (36a, 36b) fills each inlet-side gas supply part (36a, 36b), and It blows out toward the outside from the plurality of nozzle holes downward. Then, the inert gas is supplied into the heat treatment chamber 11 from each inlet-side gas supply part (36a, 36b) by blowing the inert gas from the plurality of nozzle holes. The inert gas is supplied from the inlet-side gas supply part (36a, 36b) provided on the side of the inlet 31 than the inlet-side water vapor discharge part 15a, between the inlet 31 and the inlet-side water vapor discharge part 15a, heat treatment The ambient atmosphere in chamber 11 will be separated.

The outlet-side gas supply part (37a, 37b) is provided as a pair, and is provided in the heat treatment chamber 11 with respect to the water vapor supply part 13, and is arranged closer to the outlet than the outlet-side water vapor discharge part 15b provided on the outlet 32 side. 32 sides. The pair of outlet-side gas supply parts (37a, 37b) are each formed, for example, as a member extending in a cylindrical shape and having both ends in the direction of the cylinder axis closed. In this embodiment, a pair of outlet side gas supply part (37a, 37b) is arrange|positioned in the area|region near the end part of the outlet 32 side in the direction parallel to the conveyance direction X1 of heating region HR. And a pair of outlet side gas supply part (37a, 37b) is arrange|positioned along the conveyance direction X1, and the outlet side gas supply part 37b is arrange|positioned at the outlet 32 side with respect to the outlet side gas supply part 37a. In addition, each outlet-side gas supply part (37a, 37b) is arranged in the heat treatment chamber 11 in a state in which the cylinder axis direction extends horizontally along the width direction of the heat treatment chamber 11.

In addition, each outlet side gas supply part (37a, 37b) is connected to each branch pipe (48c, 48d) of the gas supply system 18 described later for supplying inert gas at approximately the center position in the direction of the cylinder axis. In addition, the outlet side gas supply part 37a is connected to the branch pipe 48c, and the outlet side gas supply part 37b is connected to the branch pipe 48d. Each branch pipe (48c, 48d) penetrates through the ceiling wall 11c of the heat treatment chamber 11, and is connected to each outlet side gas supply part (37a, 37b) in the heat treatment chamber 11. Each branch pipe (48c, 48d) connected to each outlet-side gas supply part (37a, 37b) is fixed to the ceiling wall 11c in a state penetrating through the ceiling wall 11c. Thereby, in the heat processing chamber 11, each outlet side gas supply part (37a, 37b) is supported by the ceiling wall 11c via each branch pipe (48c, 48d).

The inside of each outlet-side gas supply unit (37a, 37b) communicates with the inside of each branch pipe (48c, 48d), and the inert gas supplied from each branch pipe (48c, 48d) is supplied to each outlet-side gas supply unit. The interior of the portion (37a, 37b). In addition, a plurality of nozzle holes (not shown) are provided in each outlet-side gas supply part (37a, 37b). The plurality of nozzle holes are arranged linearly along the direction of the cylindrical axis in each outlet-side gas supply part (37a, 37b), for example, arranged at equal intervals. Moreover, in each outlet side gas supply part (37a, 37b), the some nozzle hole arrange|positioned along the cylinder axial direction opens downward. Therefore, the inert gas is blown downward from each outlet-side gas supply part (37a, 37b).

According to the above-mentioned structure, the inert gas supplied from each branch pipe (48c, 48d) toward each outlet side gas supply part (37a, 37b) will fill the inside of each outlet side gas supply part (37a, 37b), and will flow from A plurality of nozzle holes direct downward and blow out toward the outside. Then, the inert gas is supplied into the heat treatment chamber 11 from each outlet side gas supply part (37a, 37b) by blowing the inert gas from the plurality of nozzle holes. By supplying an inert gas from an outlet-side gas supply unit (37a, 37b) arranged at a position closer to the outlet 32 side than the outlet-side steam discharge unit 15b, between the outlet 32 and the outlet-side steam discharge unit 15b, the heat treatment chamber The ambient atmosphere within 11 is separated.

[Gas supply system] Referring to FIGS. 2 and 6 to 9 , the gas supply system 18 is provided as a mechanism for supplying an inert gas to the gas supply unit 17 . Furthermore, the gas supply system 18 is configured to include an inert gas supply source 46, a common pipe 47, branch pipes (48a, 48b, 48c, 48d), and gas supply valves (49a, 49b, 49c, 49d).

The inert gas supply source 46 is a supply source for supplying high-pressure inert gas equal to or higher than atmospheric pressure, and is configured as a tank or a container such as a gas cylinder storing the inert gas compressed to a high pressure equal to or higher than atmospheric pressure, for example. The common piping 46a is connected to the inert gas supply source 46, and is set as a piping system for supplying high-pressure inert gas from the inert gas supply source 46 to the branch pipes (48a, 48b, 48c, 48d).

The branch pipes (48a, 48b, 48c, 48d) are branched from the common pipe 47, and are set to connect the common pipe 47 and the inlet-side gas supply part (36a, 36b) and the outlet-side gas supply part (37a, 37b) of the gas supply part 17. ) to the piping system connected. Four branch pipes ( 48 a , 48 b , 48 c , 48 d ) are branched from the common pipe 47 in parallel. Furthermore, each branch pipe (48a, 48b) is connected to each inlet-side gas supply part (36a, 36b), and each branch pipe (48c, 48d) is connected to each outlet-side gas supply part (37a, 37b). Specifically, the branch pipe 48a is configured to connect the common pipe 47 and the inlet side gas supply part 36a, and to supply inert gas to the inlet side gas supply part 36a. The branch pipe 48b is configured to connect the common pipe 47 and the inlet-side gas supply part 36b, and supply inert gas to the inlet-side gas supply part 36b. The branch pipe 48c is configured to connect the common pipe 47 and the outlet-side gas supply part 37a, and to supply inert gas to the outlet-side gas supply part 37a. The branch pipe 48d is configured to connect the common pipe 47 and the outlet-side gas supply part 37b, and to supply the inert gas to the outlet-side gas supply part 37b.

Gas supply valves (49a, 49b, 49c, 49d) are electromagnetic valves, respectively, and are provided in branch pipes (48a, 48b, 48c, 48d). Furthermore, the gas supply valve 49a is provided in the branch pipe 48a, the gas supply valve 49b is provided in the branch pipe 48b, the gas supply valve 49c is provided in the branch pipe 48c, and the gas supply valve 49d is provided in the branch pipe 48d. Each gas supply valve (49a, 49b, 49c, 49d) is configured to switch the state of each branch pipe (48a, 48b, 48c, 48d) between an open state and a closed state by performing an opening and closing operation. Each gas supply valve (49a, 49b, 49c, 49d) operates according to a control command from the control unit 25. When each gas supply valve (49a, 49b, 49c, 49d) is opened according to the control command from the control unit 25, and the state of each branch pipe (48a, 48b, 48c, 48d) is switched to the open state, the inert gas The supply source 46 communicates with each inlet-side gas supply unit (36a, 36b) and each outlet-side gas supply unit (37a, 37b) via a common pipe 47 and each branch pipe (48a, 48b, 48c, 48d). Thereby, the inert gas supplied from the inert gas supply source 46 is supplied to each inlet side gas supply part (36a, 36b) and Each outlet-side gas supply unit (37a, 37b). Then, an inert gas is supplied into the heat treatment chamber 11 from each inlet side gas supply part (36a, 36b) and each outlet side gas supply part (37a, 37b). Furthermore, each gas supply valve (49a, 49b, 49c, 49d) is closed according to a control command from the control unit 25, and the state of each branch pipe (48a, 48b, 48c, 48d) is switched to the closed state. When the communication is cut off, the inert gas is not supplied to the heat treatment chamber 11 .

[Inlet side exhaust, outlet side exhaust] Referring to FIGS. 1 to 3 and FIGS. 6 to 9 , the inlet side exhaust unit 19 and the outlet side exhaust unit 20 are provided as mechanisms for exhausting the gas in the heat treatment chamber 11 to the outside of the heat treatment chamber 11 .

The inlet-side exhaust unit 19 is provided between the pair of inlet-side gas supply units (36a, 36b) in the heat treatment chamber 11. That is, the inlet-side exhaust unit 19 is provided in a region between the inlet-side gas supply unit 36 a and the inlet-side gas supply unit 36 b in the heat treatment chamber 11 . Therefore, in the region of the heat treatment chamber 11 closer to the inlet 31 than the inlet-side steam discharge portion 15a, from the inlet-side steam discharge portion 15a side toward the inlet 31 side, the inlet-side steam discharge portion 15a, the inlet-side gas The supply part 36b, the inlet-side exhaust part 19, and the inlet-side gas supply part 36a are arranged in this order. In addition, the inlet-side exhaust unit 19 is arranged in the area between the pair of inlet-side gas supply units (36a, 36b) in the heat treatment chamber 11, in the area on the side of the ceiling wall 11c, that is, in the direction of the heat treatment chamber 11 and the transfer direction. The area on the upper half side of the vertical section of X1.

The outlet side exhaust unit 20 is provided in the heat treatment chamber 11 between a pair of outlet side gas supply units (37a, 37b). That is, the outlet-side exhaust unit 20 is provided in a region between the outlet-side gas supply unit 37 a and the outlet-side gas supply unit 37 b in the heat treatment chamber 11 . Therefore, in the region of the heat treatment chamber 11 closer to the outlet 32 side than the outlet-side steam discharge part 15b, from the outlet-side steam discharge part 15b side toward the outlet 32 side, the outlet-side steam discharge part 15b, the outlet-side gas The supply part 37a, the outlet-side exhaust part 20, and the outlet-side gas supply part 36b are sequentially arranged in this order. In addition, the outlet side exhaust part 20 is arranged in the region between the pair of outlet side gas supply parts (37a, 37b) in the heat treatment chamber 11, in the region on the side of the ceiling wall 11c, that is, in the direction of the heat treatment chamber 11 and the transfer direction. The area on the side of the upper half of the cross-section perpendicular to X1.

The inlet-side exhaust section 19 and the outlet-side exhaust section 20 have the same configuration, and are formed in a hollow box shape extending along the width direction of the heat treatment chamber 11 . Furthermore, the inlet-side exhaust unit 19 and the outlet-side exhaust unit 20 are each provided with an upper wall 50a extending arcuately along the top wall 11c in a cross section perpendicular to the conveyance direction X1, and a lower wall extending horizontally. 50b, a pair of side walls (50c, 50d) extending along a cross section perpendicular to the conveyance direction X1. Thereby, the hollow area inside each of the inlet side exhaust part 19 and the outlet side exhaust part 20 is formed as a circle surrounded by the upper wall 50a, the lower wall 50b, and a pair of side walls (50c, 50d). Arc-shaped dome-shaped hollow area.

In addition, a plurality of through holes (not shown) for sucking the gas in the heat treatment chamber 11 are provided on the lower wall 50b of each of the inlet side exhaust part 19 and the outlet side exhaust part 20 . The gas in the heat processing chamber 11 is sucked in from the inlet side exhaust part 19 and the outlet side exhaust part 20 and discharged from the heat processing chamber 11 . Furthermore, from the inlet side exhaust part 19, the inert gas supplied into the heat treatment chamber 11 from the inlet side gas supply part 36b is supplied into the heat treatment chamber 11 from the inlet side gas supply part 36a, and is directed toward the direction opposite to the inlet side 31 side. The inert gas flowing on the opposite side and the slightly superheated steam flowing toward the inlet 31 without being discharged from the inlet-side steam discharge unit 15 a are sucked and discharged as gas in the heat treatment chamber 11 . In addition, from the outlet side exhaust part 20, the inert gas supplied from the outlet side gas supply part 37a into the heat treatment chamber 11 is supplied into the heat treatment chamber 11 from the outlet side gas supply part 37b, and is directed opposite to the outlet 32 side. The inert gas flowing sideways and the slightly superheated steam flowing toward the outlet 32 without being discharged from the outlet-side steam discharge unit 15 b are sucked into and discharged as gas in the heat treatment chamber 11 .

[exhaust system] Referring to Fig. 2 and Fig. 6 to Fig. 9, exhaust system (21a, 21b) is set as the gas in the heat treatment chamber 11 is sucked from inlet side exhaust part 19 and outlet side exhaust part 20 and the gas sucked A mechanism for exhausting air toward the outside of the heat treatment chamber 11 . Furthermore, exhaust systems (21a, 21b) are connected to the inlet side exhaust unit 19 and the outlet side exhaust unit 20, respectively. Furthermore, the exhaust system 21a is connected to the inlet side exhaust unit 19, and the gas sucked into the heat treatment chamber 11 of the inlet side exhaust unit 19 is drawn into the exhaust system 21a and discharged from the heat treatment chamber 11. Furthermore, the exhaust system 21b is connected to the outlet side exhaust unit 20, and the gas sucked into the heat treatment chamber 11 of the outlet side exhaust unit 20 is sucked into the exhaust system 21b and discharged from the heat treatment chamber 11.

The exhaust system 21 a and the exhaust system 21 b have the same configuration, and both are configured to include a gas exhaust pipe 51 and an injector 52 .

Each gas exhaust pipe 51 of the exhaust system (21a, 21b) penetrates the ceiling wall 11c of the heat treatment chamber 11, and is respectively connected to the inlet side exhaust part 19 and the outlet side exhaust part 20 in the heat treatment chamber 11. The inside of each of the inlet side exhaust part 19 and the outlet side exhaust part 20 communicates with each gas exhaust pipe 51, and the gas sucked into the inlet side exhaust part 19 and the outlet side exhaust part 20 respectively will be sucked into each Gas exhaust pipe 51. Moreover, each gas exhaust pipe 51 connected to the inlet side exhaust part 19 and the outlet side exhaust part 20 is fixed to the ceiling wall 11c in the state which penetrated the ceiling wall 11c. Thereby, in the heat processing chamber 11, the inlet side exhaust part 19 and the outlet side exhaust part 20 are supported by the ceiling wall 11c via each gas exhaust pipe 51, respectively.

Each injector 52 of the exhaust system (21a, 21b) is opposite to each gas exhaust pipe 51, and in each gas exhaust pipe 51, it is respectively connected to the end of the inlet side exhaust part 19 and the outlet side exhaust part 20. Ends on opposite sides are connected. Also, each injector 52 is set to generate negative pressure by using a high-pressure fluid, sucks gas from the inlet side exhaust part 19 and the outlet side exhaust part 20 respectively through each gas exhaust pipe 51, and discharges the sucked gas. The mechanism by which gas is discharged toward the outside. Each injector 52 of the exhaust system (21a, 21b) and each injector 45 of the water vapor discharge system (16a, 16b) have the same configuration. That is, each injector 52 is configured to include a nozzle to which compressed air as high-pressure fluid is supplied, a main body covering the periphery of the nozzle, and a diffuser communicating with the main body and having an outlet opening to the outside. The operation of the injector 52 is controlled by opening and closing the solenoid valve provided on the upstream side of the nozzle and the part of the main body connected to the downstream end of the gas exhaust pipe 51 according to a control command from the control unit 25 described later.

When the gas in the heat treatment chamber 11 carried out by the inlet side exhaust part 19 and the outlet side exhaust part 20 is discharged, according to the control command from the control part 25, each injector of the exhaust system (21a, 21b) The solenoid valve of 52 will be opened, and injector 52 will be actuated. That is, the solenoid valve on the upstream side of the nozzle is opened, and the solenoid valve provided in the part of the main body connected to the downstream end of each gas exhaust pipe 51 is opened, and each injector 52 is activated. The gas inside each of the inlet side exhaust part 19 and the outlet side exhaust part 20 is sucked through each gas exhaust pipe 51 by the operation of each injector 52 . The gas in each of the inlet-side exhaust part 19 and the outlet-side exhaust part 20 is sucked into each gas exhaust pipe 51, and the gas in the heat treatment chamber 11 will flow from the inlet-side exhaust part 19 and the outlet. The plurality of through-holes of the lower wall 50b of each of the side exhaust parts 20 are sucked. The gas sucked into the inlet side exhaust part 19 and the outlet side exhaust part 20 respectively will flow towards the main body of each injector 52 through each gas exhaust pipe 51, and mix with the compressed air in the main body, and be discharged from each injector. The outlet of the diffuser at 52 is discharged toward the outside. In this way, the gas in the heat treatment chamber 11 is sucked in from the inlet side exhaust part 19 and the outlet side exhaust part 20 respectively, and is discharged to the outside through each gas exhaust pipe 51 and each injector 52 .

[partition] Referring to Fig. 1 to Fig. 9, the partition board 22 is provided with a plurality of, in this embodiment, as a plurality of partition boards 22, and partition board (22a, 22b, 22c, 22d, 22e, 22f, 22g, 22h, 22i, 22j). A plurality of partition plates 22 ( 22 a to j ) are arranged along the transfer direction X1 in the heat treatment chamber 11 .

Each partition plate 22 (22a~j) is set as the plate-shaped member which partially closes only the upper half part of the cross section perpendicular|vertical to the conveyance direction X1 of the heat processing chamber 11. In addition, the edge portions of the upper ends of the respective partitions 22 (22a~j) are arranged along the top wall 11c, and are fixed to the top wall 11c. Furthermore, each partition plate 22 (22a~j) is provided so that it may expand along the cross section of the heat processing chamber 11 perpendicular|vertical to the conveyance direction X1 in the upper half area in the heat processing chamber 11. Each partition plate 22 (22a~j) is provided as mentioned above, and is comprised so that the flow of the gas in the direction parallel to the conveyance direction X1 of the object 10 in the thermal processing chamber 11 may be partially restricted. Furthermore, in the present embodiment, each partition plate 22 (22a~j) is configured to restrict the flow of gas in the region on the upper half side of the heat treatment chamber 11 on a cross section perpendicular to the transfer direction X1, and to allow the flow of the lower part. Gas flow in the area on the side of the half.

2, FIG. 3, FIG. 6, and FIG. 7, the partitions (22a, 22b) among the plurality of partitions 22 are set as inlet side partitions (22a, 22b) in this embodiment. The inlet-side partition plates (22a, 22b) are provided between each of the pair of inlet-side gas supply parts (36a, 36b) and the inlet-side exhaust part 19, respectively. More specifically, the inlet-side partition plate 22 a is provided between the inlet-side gas supply unit 36 a and the inlet-side exhaust unit 19 , and is arranged adjacent to the inlet-side exhaust unit 19 on the inlet 31 side. Furthermore, the inlet-side partition plate 22 b is provided between the inlet-side exhaust unit 19 and the inlet-side gas supply unit 36 b, and is arranged adjacent to the inlet-side exhaust unit 19 on the outlet 32 side.

According to the above-mentioned arrangement structure, in the area near the inlet side gas supply part (36a, 36b) in the heat treatment chamber 11, the inlet side gas supply part 36a, the inlet side partition plate 22a, the inlet side gas supply part 36a, the inlet side partition plate 22a, and the The side exhaust part 19, the inlet side partition plate 22b, and the inlet side gas supply part 36b are arranged sequentially in this order. Furthermore, the inlet-side partitions (22a, 22b) are configured to partially restrict the gas flow parallel to the transfer direction X1 of the object 10 in the heat treatment chamber 11 in the vicinity of the inlet-side gas supply parts (36a, 36b). the flow of gas in that direction.

2, FIG. 3, FIG. 6, and FIG. 7, the partitions (22c, 22d) among the plurality of partitions 22 are disposed near the inlet side steam discharge part 15a in the heat treatment chamber 11. Moreover, the partition plates (22c, 22d) are arranged on both sides in the conveyance direction X1 with respect to the inlet side steam discharge part 15a. More specifically, the partition plate 22c is provided between the inlet side gas supply part 36b and the water vapor discharge part 15a, and is arranged adjacent to the inlet side water vapor discharge part 15a on the inlet 31 side. Moreover, the partition plate 22d is arranged adjacent to the outlet 32 side with respect to the inlet side steam discharge part 15a.

Again, with reference to Fig. 2, Fig. 4, Fig. 5, the partition (22e, 22f) in the plurality of partitions 22 is set in a pair of nozzle parts (38a, 38b) in the water vapor supply part 13 in the heat treatment chamber 11. )between. Moreover, the adhesive discharge part 23 mentioned later is arrange|positioned between the separator 22e and the separator 22f. In addition, the partition 22 e is arranged adjacent to the inlet 31 side with respect to the adhesive discharge part 23 , and the partition 22 f is arranged adjacent to the outlet 32 side with respect to the adhesive discharge part 23 .

2, FIG. 3, FIG. 8, and FIG. 9, the partitions (22g, 22h) among the plurality of partitions 22 are arranged near the outlet side steam discharge part 15b in the heat treatment chamber 11. Moreover, the separators (22g, 22h) are arranged on both sides in the conveyance direction X1 with respect to the outlet side steam discharge part 15b. More specifically, the partition plate 22g is arranged adjacent to the inlet 31 side with respect to the outlet-side steam discharge portion 15b. Moreover, the partition plate 22h is provided between the water vapor discharge part 15b and the outlet side gas supply part 37a, and is arrange|positioned adjacent to the outlet 32 side with respect to the outlet side water vapor discharge part 15b.

2, FIG. 3, FIG. 8, and FIG. 9, the partitions (22i, 22j) in the plurality of partitions 22 are set as outlet-side partitions (22i, 22j) in this embodiment. The outlet-side partitions (22i, 22j) are provided between each of the pair of outlet-side gas supply parts (37a, 37b) and the outlet-side exhaust part 20, respectively. More specifically, the outlet-side partition plate 22 i is provided between the outlet-side gas supply unit 37 a and the outlet-side exhaust unit 20 , and is arranged adjacent to the outlet-side exhaust unit 20 on the outlet 32 side. In addition, the outlet-side partition plate 22 j is provided between the outlet-side exhaust unit 20 and the outlet-side gas supply unit 37 b, and is arranged adjacent to the outlet-side exhaust unit 20 on the outlet 32 side.

According to the above arrangement, in the area near the outlet side gas supply part (37a, 37b) in the heat treatment chamber 11, from the inlet 31 side toward the outlet 32 side, the outlet side gas supply part 37a, the outlet side partition plate 22i, The outlet-side exhaust part 20, the outlet-side partition plate 22j, and the outlet-side gas supply part 37b are arranged in this order and provided. In addition, the outlet-side partitions (22i, 22j) are configured to locally limit the direction of the heat treatment chamber 11 parallel to the conveyance direction X1 of the object 10 in the vicinity of the outlet-side gas supply parts (37a, 37b). direction of gas flow.

[Adhesive discharge part] Referring to Fig. 1, Fig. 2, Fig. 4 and Fig. 5, the adhesive discharge part 23 is configured to direct the gasified adhesive generated from the object 10 to the heat treatment chamber when the sintering process is performed in the heat treatment device 1. 11. External discharge mechanism. The binder discharge unit 23 is used to discharge a large amount of the binder generated from the object 10 during the sintering process in the heat treatment apparatus 1 , for example.

The adhesive discharge part 23 is arrange|positioned between the partition plate 22e and the partition plate 22f in the heat processing chamber 11, and is arrange|positioned at the center position of the conveyance direction X1 in the heating area|region HR. The partitions (22e, 22f) are arranged between the pair of nozzle parts (38a, 38b) of the steam supply part 13, and the partition board 22e is arranged on the side of the inlet 31 with respect to the adhesive discharge part 23, and the partition board 22f is arranged on the outlet 32 side. Therefore, in this embodiment, in the central part of the conveyance direction X1 in the heating region HR, from the inlet 31 side toward the outlet 32 side, the nozzle part 38a, the partition 22e, the adhesive discharge part 23, the partition 22f, and the nozzle The parts 38b are arranged in this order and provided. In addition, in the region between the partition plates (22e, 22f) in the heat treatment chamber 11, the adhesive discharge part 23 is arranged in the region on the side of the top wall 11c, that is, on the cross section of the heat treatment chamber 11 perpendicular to the conveyance direction X1. The area on the side of the upper half.

The adhesive discharge part 23 is formed in the shape of a hollow box extending along the width direction of the heat treatment chamber 11 . Furthermore, the adhesive discharge unit 23 is configured to include an upper wall 23a extending arcuately along the top wall 11c in a cross section perpendicular to the conveying direction X1, a lower wall 23b extending horizontally, and an upper wall 23b extending along the conveying direction X1. A pair of side walls (23c, 23d) extending perpendicular to the section. Thereby, the hollow area in the adhesive discharge part 23 is formed as an arc-shaped dome-shaped hollow area surrounded by the upper wall 23a, the lower wall 23b, and a pair of side walls (23c, 23d). Furthermore, a plurality of through holes (not shown) for sucking the adhesive are provided on the lower wall 23b of the adhesive discharge part 23 . Furthermore, when the adhesive is sucked from the adhesive discharge part 23 and discharged from the heat treatment chamber 11 , the adhesive is sucked into the binder discharge part 23 and discharged together with the ambient gas in the heat treatment chamber 11 . That is, the binder is sucked into the binder discharge part 23 and discharged from the heat treatment chamber 11 by the gas containing a high concentration of the binder in the ambient atmosphere in the heat treatment chamber 11 being sucked into the binder discharge part 23 .

In addition, the binder discharge unit 23 is connected to a binder discharge system 53 for sucking the gas containing a large amount of binder from the binder discharge unit 23 and directing the gas containing the binder toward the heat treatment chamber. 11 outsiders. The adhesive discharge system 53 is configured to include an adhesive discharge pipe 54 and an injector 55 .

The binder discharge pipe 54 passes through the ceiling wall 11 c of the heat treatment chamber 11 and is connected to the binder discharge part 23 in the heat treatment chamber 11 . The inside of the adhesive discharge part 23 communicates with the adhesive discharge pipe 54 , and the gas containing the adhesive sucked into the adhesive discharge part 23 is sucked into the adhesive discharge pipe 54 . Moreover, the adhesive discharge pipe 54 connected to the adhesive discharge part 23 is fixed to the top wall 11c in the state which penetrated the top wall 11c. Thereby, in the heat processing chamber 11, the adhesive discharge part 23 is supported by the top wall 11c via the adhesive discharge pipe 54. As shown in FIG.

The injector 55 is connected to the end of the adhesive discharge pipe 54 opposite to the end connected to the adhesive discharge part 23 . In addition, the injector 55 is a mechanism that generates negative pressure using high-pressure fluid, sucks the gas containing the adhesive from the adhesive discharge part 23 through the adhesive discharge pipe 54, and discharges the sucked gas to the outside. The injector 55 of the adhesive discharge system 53 is configured the same as the injector 45 of the water vapor discharge system (16a, 16b). That is, the ejector 55 is configured to include a nozzle to which compressed air as a high-pressure fluid is supplied, a main body covering the periphery of the nozzle, and a diffuser communicating with the main body and having an outlet opening to the outside. Furthermore, the operation of the injector 55 is controlled by opening and closing a solenoid valve provided on the upstream side of the nozzle and at the part of the main body connected to the downstream end of the adhesive discharge pipe 54 according to a control command from the control unit 25 described later. .

When the adhesive is discharged by the adhesive discharge unit 23 , the electromagnetic valve of the injector 55 is opened according to the control command from the control unit 25 , and the injector 55 is activated. That is, the solenoid valve on the upstream side of the nozzle is opened, and the solenoid valve of the part connected to the downstream end of the adhesive exhaust pipe 54 in the main body is opened, and the injector 55 is activated. As the injector 55 operates, the gas in the adhesive discharge part 23 is sucked through the adhesive exhaust pipe 54 . The gas from the binder discharge part 23 is sucked into the binder discharge pipe 54, and the gas containing the binder in the heat treatment chamber 11 is discharged from a plurality of through holes provided on the lower wall 23b of the binder discharge part 23. be inhaled. The adhesive-containing gas sucked into the adhesive exhaust part 23 flows toward the main body of the injector 55 through the adhesive exhaust pipe 54 , and is mixed with the compressed air blown out from the nozzle in the main body, and is discharged from the injector 55 . The outlet of the diffuser is discharged to the outside. In this way, the gas containing the binder in the heat treatment chamber 11 is sucked from the binder discharge part 23 and discharged to the outside through the binder discharge pipe 54 and the injector 55 .

[air curtain part] 1 and 3, the air curtain 24 is set at the end of the inlet 31 side and the end of the outlet 32 side in the heat treatment chamber 11, and injects inert gas in the form of an area where the inert gas diffuses like a curtain. Gas body. At the end of the inlet 31 side of the heat treatment chamber 11, an inlet air curtain 24a as the air curtain 24 is provided, and at the end of the outlet 32 of the heat treatment chamber 11, an outlet air curtain as the air curtain 24 is provided. Section 24b.

The inlet air curtain part 24 a and the outlet air curtain part 24 b are each formed in a hollow box shape, and have a gas supply box to which an inert gas from an inert gas supply source 46 is supplied. The gas supply box of the inlet air curtain 24a is provided at the end of the heat treatment chamber 11 on the inlet 31 side, and the gas supply box of the outlet air curtain 24b is provided at the end of the heat treatment chamber 11 on the outlet 32 side. The gas supply box of each of the inlet air curtain part 24a and the outlet air curtain part 24b is connected to the common pipe 47 of the gas supply system 18 through a pipe not shown in the figure, and is configured to be supplied from the inert gas supply source 46 inert gas.

In addition, a plurality of injection holes communicating with the inside of the heat treatment chamber 11 are provided in each gas supply box of the inlet air curtain part 24a and the outlet air curtain part 24b. Furthermore, the plurality of injection holes provided in each gas supply box are configured to inject the inert gas supplied from the inert gas supply source 46 into the heat treatment chamber 11 . In addition, the plurality of injection holes of the gas supply box of the inlet air curtain portion 24a is configured to inject the inert gas so that the inert gas diffuses in a curtain-like direction in a direction parallel to the opening surface of the inlet 31 . Furthermore, the plurality of injection holes of the gas supply box of the outlet air curtain portion 24b is configured to inject the inert gas so that the inert gas diffuses in a curtain-like direction in a direction parallel to the opening surface of the outlet 32 . At the end of the heat treatment chamber 11 on the side of the entrance 31, the inert gas is sprayed in a curtain shape from the entrance air curtain 24a. The environment atmosphere will be separated. Also, since the inert gas is sprayed from the outlet air curtain portion 24b at the end on the side of the outlet 32 of the heat treatment chamber 11, in the vicinity of the outlet 32 of the heat treatment chamber 11, the area inside the heat treatment chamber 11 and the The ambient atmosphere of the outer area will be separated.

[control department] Referring to Fig. 2, the conveying mechanism 33 of heat treatment chamber 11, heater 12, water vapor supply system 14, water vapor discharge system (16a, 16b), gas supply system 18, exhaust system (21a, 21b), and binder discharge The operation of the system 53 is controlled by the control unit 25 . Specifically, the control unit 25 controls the electric motor of the drive shaft 35 that drives the transport mechanism 33, the heating element of the heater 12, the boiler and the superheater of the superheated steam generation unit 40 of the steam supply system 14, and the water heater. The solenoid valve of the injector 45 of the steam discharge system (16a, 16b), the gas supply valve (49a~d) of the gas supply system 18, the solenoid valve of the injector 52 of the exhaust system (21a, 21b), and the adhesive discharge The operation of the electromagnetic valve of the injector 55 of the system 53 controls the conveying mechanism 33, the heater 12, the water vapor supply system 14, the water vapor discharge system (16a, 16b), the gas supply system 18, the exhaust system (21a, 21b ), and the action of the adhesive discharge system 53.

Also, the control unit 25 is configured to include a hardware processor such as a CPU (Central Processing Unit; central processing unit), a RAM (Random Access Memory; random access memory), and a ROM (Read Only Memory; read-only memory). ) and other memories, the operation part of the operation panel operated by the user, and the interface circuit, etc. In the memory of the control unit 25, there is stored a program for generating a control command for the electric motor driving the drive shaft 35, the heating element of the heater 12, the boiler and the superheater of the superheated steam generating unit 40, and the injection The electromagnetic valve of the injector 45, the gas supply valve (49a~d), the electromagnetic valve of the injector 52, the electromagnetic valve of the injector 55, and the like are controlled. For example, when the operating part is operated by an operator, the above-mentioned program will be read out from the memory by the hardware processor and executed. Thereby, the above-mentioned control command is generated, and according to the control command, the electric motor of the drive shaft 35, the heating element of the heater 12, the boiler and the superheater of the superheated steam generating part 40, and the solenoid valve of the injector 45 are driven. , the gas supply valve (49a~d), the electromagnetic valve of the injector 52, and the electromagnetic valve of the injector 55, etc. will operate.

[Operation of heat treatment device] Next, an example of the processing operation of the heat processing apparatus 1 will be described. When starting the processing operation of the heat treatment apparatus 1, at first, according to the control instruction from the control unit 25, the conveying mechanism 33, the heater 12, the water vapor supply system 14, the water vapor discharge system (16a, 16b), and the heat treatment chamber 11 are started. Operation of the gas supply system 18 and the exhaust system (21a, 21b). When the processing operation of the thermal processing apparatus 1 is started based on the control command from the control unit 25 , specifically, the following operations are performed in the thermal processing apparatus 1 .

First, the heating of the ambient atmosphere in the heat treatment chamber 11 by the heater 12 is performed. Specifically, when the electric heating element of the heating element of the heater 12 is energized, the heating element generates heat, and the heat treatment chamber 11 is heated by the heater 12 from the outside. Furthermore, the ambient atmosphere in the heat processing chamber 11 is heated by heating the heat processing chamber 11 from the outside.

Also, in the heat treatment chamber 11, the operation of the electric motor that drives the drive shaft 35 of the conveying mechanism 33 is started, and the mesh belt 34 of the conveying mechanism 33 is started to circle around, so that it can be performed by using the conveying mechanism 33. The state of conveyance of the object to be processed 10 in the heat treatment chamber 11. Furthermore, by appropriately setting the rotational speed of the electric motor, the conveying speed when the object 10 is conveyed by the winding operation of the mesh belt 34, that is, the conveying speed of the object 10 performed by the conveying mechanism 33 can be reduced. is set to a given speed. In addition, the conveyance speed of the object 10 to be processed by the conveyance mechanism 33 is appropriately set in accordance with the heat treatment conditions such as the heat treatment time of the object 10 to be heat treated in the heat treatment chamber 11 .

In addition, the boiler and the superheater of the superheated steam generating unit 40 of the steam supply system 14 are operated to continuously generate superheated steam. Furthermore, the temperature of the superheated steam generated in the superheated steam generation unit 40 and the amount of superheated steam generated per unit time are appropriately set in accordance with the heat treatment conditions of the object 10 to be processed. The object 10 is an object of heat treatment by heating with superheated steam. The heating steam generated in the superheated steam generating part 40 is continuously supplied to the pair of nozzle parts (38a, 38b) of the steam supplying part 13 via the steam supplying pipes (41, 42a, 42b). In addition, the superheated steam supplied to each nozzle part (38a, 38b) is blown out from the plurality of nozzle holes 39 of each nozzle part (38a, 38b), and the superheated steam is continuously supplied into the heat treatment chamber 11.

Also, the operation of each injector 45 of the water vapor discharge system (16a, 16b) is started. Thereby, the superheated steam in the heat treatment chamber 11 is drawn in from the inlet side steam discharge part 15a and the outlet side steam discharge part 15b respectively, and is continuously directed to the outside through each steam discharge pipe 44 and each ejector 45. was discharged.

Also, the supply of the inert gas into the heat treatment chamber 11 from the inlet-side gas supply part (36a, 36b) and the outlet-side gas supply part (37a, 37b) of the gas supply part 17 is started. Specifically, the gas supply valves (49a~d) of the gas supply system 18 are operated to open, and the inert gas supplied from the inert gas supply source 46 passes through the common pipe 47 and each branch pipe (48a~d). It is continuously supplied to the inlet side gas supply part (36a, 36b) and the outlet side gas supply part (37a, 37b). Then, the inert gas is continuously supplied into the heat treatment chamber 11 from the inlet side gas supply part (36a, 36b) and the outlet side gas supply part (37a, 37b).

Also, the operation of the injector 52 of the exhaust system (21a, 21b) is started. Thereby, the gas in the heat treatment chamber 11 is sucked in from the inlet side exhaust part 19 and the outlet side exhaust part 20 respectively, and is continuously discharged toward the outside through each gas exhaust pipe 51 and each injector 52 .

In addition, the binder discharge system 53 operates according to a control command from the control unit 25 when the heat treatment device 1 performs sintering treatment and the heat treatment condition is such that a large amount of binder is generated from the object 10 to be processed. During the operation of the injector 55 of the binder discharge system 53 , the gas containing a high concentration of binder in the ambient atmosphere in the heat treatment chamber 11 will be sucked into the binder discharge part 23 and discharged from the heat treatment chamber 11 .

As mentioned above, when the processing operation of the heat treatment apparatus 1 starts, the superheated water vapor supplied from the steam supply part 13 provided in the central part of the transfer direction X1 in the heating region HR fills the heat treatment chamber 11 while filling the heat treatment chamber 11. to flow. Furthermore, the flow of superheated steam flowing from the steam supply part 13 toward the steam discharge part 15 on the side of the inlet 31 and the side of the outlet 32 is continuously formed. That is, while the heat treatment chamber 11 is filled with superheated steam, the flow of superheated steam flowing from the steam supply part 13 to the inlet side steam discharge part 15a, and the flow of the superheated steam from the steam supply part 13 to the outlet side steam discharge part 15b The flow of superheated steam will continue to be formed.

In addition, the inert gas supplied from the inlet-side gas supply part (36a, 36b) of the gas supply part 17 flows so as to diffuse in the area near the inlet-side gas supply part (36a, 36b) in the heat treatment chamber 11. . Thereby, the separation of the ambient atmosphere by the inert gas is performed in the vicinity of the inlet side gas supply part (36a, 36b). In addition, the inert gas supplied from the outlet-side gas supply part (37a, 37b) of the gas supply part 17 flows so as to diffuse in the region near the outlet-side gas supply part (37a, 37b) in the heat treatment chamber 11. . Thereby, separation of the ambient atmosphere by the inert gas is carried out in the region near the outlet side gas supply part (37a, 37b).

As mentioned above, when the processing operation of the thermal processing apparatus 1 is started, in the thermal processing chamber 11, the flow of superheated steam from the steam supply part 13 toward the steam discharge part 15 on the side of the inlet 31 and the side of the outlet 32 will continue to flow. is formed, and the separation of the ambient atmosphere by the inert gas supplied from the gas supply unit 17 is also performed.

Here, the flow of water vapor in the heat treatment chamber 11 during the operation of the heat treatment apparatus 1 and the separation of the ambient atmosphere by an inert gas will be further described. 10 and 11 are views for explaining the flow of superheated steam and inert gas in the heat treatment chamber 11 of the heat treatment apparatus 1 . Furthermore, FIG. 11(A) is a diagram illustrating the flow of superheated steam in the area around the steam supply unit 13 . FIG. 11(B) is a diagram illustrating the flow of superheated steam and inert gas in the area around the inlet-side steam discharge unit 15a and the inlet-side gas supply unit (36a, 36b). FIG. 11(C) is a diagram illustrating the flow of superheated steam and inert gas in the area around the outlet-side steam discharge unit 15b and the outlet-side gas supply unit (37a, 37b). Moreover, in Fig. 10 and Fig. 11, the direction of the flow of the superheated steam in the heat treatment chamber 11 is schematically indicated by the dotted arrow, and the direction of the flow of the inert gas in the heat treatment chamber 11 is schematically indicated by the solid line arrow. direction.

As shown in Fig. 10 and Fig. 11 (A), the superheated steam that is respectively blown out from each of a pair of nozzle parts (38a, 38b) of the steam supply part 13 will be directed toward the pair of nozzle parts (38a, 38b). In the present embodiment, it flows toward the middle position side of the conveying direction X1 of the object 10 in the heating region HR. Moreover, partition plates (22e, 22f) are provided in the region between the pair of nozzle parts (38a, 38b) and in the vicinity of the central position of the heating region HR. Therefore, each superheated steam blown out from each nozzle part (38a, 38b) and flowing toward the middle position side (in this embodiment, the middle position side of the heating region HR) of the pair of nozzle parts (38a, 38b) , will collide with the partitions (22e, 22f). That is, the superheated steam blown from the nozzle part 38a collides with the partition plate 22e, and the superheated steam blown out from the nozzle part 38b collides with the partition plate 22f. Then, each superheated steam blown out from each nozzle portion (38a, 38b) and colliding with the partition plate (22e, 22f) diffuses in the heating region HR covering the entire cross-section perpendicular to the conveyance direction X1, while It flows so as to invert and turn back in the direction parallel to the conveyance direction X1.

As described above, the superheated steam blown from the nozzle part 38a flows toward the middle position side of the pair of nozzle parts (38a, 38b) and reverses to cover a cross section perpendicular to the conveyance direction X1 in the heating region HR. In a state where the entire body is diffused, it flows in a direction parallel to the conveyance direction X1 in a direction opposite to the middle position side of a pair of nozzle parts (38a, 38b). That is, the superheated steam blown from the nozzle portion 38a flows in a state of spreading from the middle position side of the pair of nozzle portions (38a, 38b) toward the inlet 31 side of the heat treatment chamber 11 to the entire cross section of the heating region HR. . Then, the superheated steam blown from the nozzle part 38b flows toward the middle position side of the pair of nozzle parts (38a, 38b), turns over, and spreads over the entire cross section perpendicular to the conveying direction X1 in the heating region HR. state, it flows in a direction parallel to the conveyance direction X1 in the direction opposite to the middle position side of a pair of nozzle parts (38a, 38b). That is, the superheated steam blown from the nozzle portion 38b flows from the middle position side of the pair of nozzle portions (38a, 38b) toward the outlet 32 side of the heat treatment chamber 11 to the entire cross section of the heating region HR. . Thereby, in the heat treatment chamber 11, from each of the intermediate position side of a pair of nozzle parts (38a, 38b) toward the inlet 31 side and the outlet 32 side, it diffuses to the heating area along the direction parallel to the conveyance direction X1 In the overall state of the cross-section of HR, the flow of substantially the same water vapor with less variation in flow velocity is formed.

Also, the superheated steam blown out from the nozzle portion 38a and flowing toward the inlet 31 side, as shown in FIGS. The portion 15 a is sucked in and discharged toward the outside of the heat treatment chamber 11 . Furthermore, the superheated steam flowing toward the inlet-side steam discharge part 15a will pass through the area below the partition plate 22d, and the inlet-side water will be sucked in from the plurality of through holes in the lower wall 43b of the inlet-side steam discharge part 15a. Steam discharge part 15a. Also, the superheated steam that is blown out from the nozzle portion 38b and flows toward the outlet 32 side, as shown in FIGS. 10 and 11(C), flows toward the outlet side steam discharge portion 15b, 15b is drawn in and discharged toward the outside of the heat treatment chamber 11 . Furthermore, the superheated steam flowing toward the outlet-side steam discharge portion 15b will pass through the region below the partition plate 22g, and the inlet-side water will be sucked in from the plurality of through holes in the lower wall 43b of the outlet-side steam discharge portion 15b. Steam discharge part 15a.

As described above, in the heat treatment chamber 11, substantially the same flow of superheated steam flows from the steam supply part 13 toward the steam discharge part 15 on the side of the inlet 31 and the side of the outlet 32 is continuously formed. Therefore, in the region from the steam supply part 13 to the steam discharge part 15 on the side of the inlet 31 and the side of the outlet 32, the superheated steam in a flowing state is filled and diffused to the entire cross section of the heating region HR. In this case, the flow of approximately the same superheated steam with less variation in flow velocity is continuously formed.

Also, in the region of the heat treatment chamber 11 closer to the inlet 31 than the inlet-side water vapor discharge portion 15a, as shown in FIGS. The inlet side gas supply part 36b is blown out.

The inert gas is blown out from the inlet side gas supply part 36a so as to diffuse downward. The inert gas blown out from the inlet-side gas supply part 36a diffuses so as to fill the vicinity of the inlet-side gas supply part 36b. Then, a part of the inert gas diffused so as to fill the region near the inlet-side gas supply part 36a flows toward the region closer to the inlet 31 than the inlet-side gas supply part 36a. Therefore, the gas of the ambient atmosphere in the region closer to the inlet 31 than the inlet-side gas supply part 36a can be prevented from flowing toward the inlet-side gas supply part 36a. Thereby, the ambient atmosphere of the region from the water vapor supply part 13 to the inlet side gas supply part (36a, 36b) and the ambient atmosphere of the region from the inlet 31 to the inlet side gas supply part (36a, 36b) are different. more definitely separated and blocked. Moreover, a part of the inert gas blown out from the inlet-side gas supply part 36a flows toward the inlet-side gas exhaust part 19, and passes through the space between the partition walls 22a while being diffused so as to fill the lower area of the partition wall 22a. the area below. Then, the inert gas passing through the region below the partition plate 22a will be sucked into the inlet side gas exhaust part 19 from the plurality of through holes in the lower wall 50b of the inlet side gas exhaust part 19, and will be drawn toward the outside of the heat treatment chamber 11. discharge.

In addition, the inert gas may be blown out from the inlet-side gas supply part 36b so as to diffuse downward. The inert gas diffused downward from the inlet-side gas supply part 36b and blown out flows toward the inlet-side gas exhaust part 19, and passes through the space between the partition plates 22b while being diffused so as to fill the area below the partition plate 22b. the area below. Then, the inert gas passing through the lower region of the partition plate 22b will be sucked into the inlet side gas exhaust part 19 from the plurality of through holes in the lower wall 50b of the inlet side gas exhaust part 19, and will be drawn toward the outside of the heat treatment chamber 11. discharge.

Also, in the vicinity of the inlet-side gas supply part 36b, the slight water vapor flowing toward the inlet 31 in such a manner that it is not completely discharged from the inlet-side water vapor discharge part 15a and leaks will be mixed with the gas from the inlet side. The supply part 36 b is mixed and diluted with the inert gas supplied into the heat treatment chamber 11 . Then, the water vapor diluted by mixing with the inert gas supplied into the heat treatment chamber 11 from the inlet side gas supply part 36 b is discharged from the inlet side exhaust part 19 to the outside. Therefore, the slight amount of water vapor flowing toward the inlet 31 side by leaking from the inlet side water vapor discharge portion 15 a is also discharged from the inlet side exhaust portion 19 .

As mentioned above, the inert gas supplied from the inlet side gas supply part (36a, 36b) flows so as to diffuse in the area near the inlet side gas supply part (36a, 36b) in the heat treatment chamber 11. Furthermore, the flow of the inert gas flowing toward the inlet 31 side and the flow of the inert gas flowing toward the inlet side gas exhaust part 19 disposed between the inlet side gas supply parts (36a, 36b) are continuously formed. . Thereby, in the area near the inlet-side gas supply part (36a, 36b), the environment atmosphere using the inert gas supplied from the inlet-side gas supply part (36a, 36b) into the heat treatment chamber 11 is carried out. separate.

Also, in the region of the heat treatment chamber 11 closer to the outlet 32 side than the outlet-side water vapor discharge part 15b, as shown in Fig. 10 and Fig. The outlet side gas supply part 37b is blown out.

The inert gas is blown out from the outlet side gas supply part 37a so as to diffuse downward. The inert gas diffused downward from the outlet-side gas supply part 37a and blown out flows toward the outlet-side gas exhaust part 20, and passes through the area below the partition plate 22i while being diffused so as to fill the area below the partition plate 22i. area. Then, the inert gas passing through the region below the partition plate 22i will be sucked into the outlet-side gas exhaust portion 20 from the plurality of through holes in the lower wall 50b of the outlet-side gas exhaust portion 20, and will be discharged toward the outside of the heat treatment chamber 11. discharge.

Also, in the region near the outlet side gas supply part 37a, the slight water vapor flowing toward the outlet 32 side in the manner of not being completely discharged and leaking at the outlet side water vapor discharge part 15b will be mixed with the gas from the outlet side. The supply unit 37 a mixes and dilutes the inert gas supplied in the heat treatment chamber 11 . Then, the water vapor diluted by mixing with the inert gas supplied into the heat treatment chamber 11 from the outlet-side gas supply unit 37 a is exhausted from the outlet-side exhaust unit 20 to the outside. Therefore, the slight amount of water vapor flowing toward the outlet 32 side by leaking from the outlet side water vapor discharge portion 15 b is also exhausted from the outlet side exhaust portion 20 .

In addition, the inert gas is also blown out from the outlet side gas supply part 37b so as to diffuse downward. The inert gas blown out from the outlet side gas supply part 37b diffuses so as to fill the area near the outlet side gas supply part 37b. Then, a part of the inert gas diffused so as to fill the area near the outlet-side gas supply part 37b flows toward the area closer to the outlet 32 than the outlet-side gas supply part 37b. Therefore, it is possible to prevent the gas of the ambient atmosphere in the region closer to the outlet 32 side than the outlet-side gas supply unit 37b from flowing toward the outlet-side gas supply unit 37b side. Thereby, the ambient atmosphere of the section from the water vapor supply part 13 to the outlet-side gas supply part (37a, 37b) and the ambient atmosphere of the area from the outlet 32 to the outlet-side gas supply part (37a, 37b) are will be more reliably separated and blocked. Moreover, a part of the inert gas blown out from the outlet-side gas supply part 37b flows toward the outlet-side gas exhaust part 20, and passes under the partition board 22j while being diffused so as to fill the area below the partition board 22j. Area. Then, the inert gas passing through the region below the partition plate 22j will be sucked into the outlet side gas exhaust part 20 from the plurality of through holes in the lower wall 50b of the outlet side gas exhaust part 20, and will be drawn toward the outside of the heat treatment chamber 11. discharge.

As mentioned above, the inert gas supplied from the outlet side gas supply part (37a, 37b) flows so as to diffuse in the area near the outlet side gas supply part (37a, 37b) in the heat treatment chamber 11. Then, the flow of the inert gas flowing toward the outlet 32 side and the flow of the inert gas flowing toward the outlet-side gas exhaust unit 20 disposed between the outlet-side gas supply units (37a, 37b) are continuously formed. . Thereby, in the area near the outlet-side gas supply part (37a, 37b), separation of the ambient atmosphere by the inert gas supplied from the outlet-side gas supply part (37a, 37b) into the heat treatment chamber 11 is carried out. .

As mentioned above, if the processing operation of the heat treatment device 1 is started and each device starts to operate, in the area from the water vapor supply part 13 to the water vapor discharge part 15 on the side of the inlet 31 and the side of the outlet 32, there will be one side in the heat treatment chamber. 11 is filled with a state where the flow of superheated steam flowing substantially uniformly is continuously formed. In addition, each of the vicinity of the inlet-side gas supply parts (36a, 36b) and the vicinity of the outlet-side gas supply parts (37a, 37b) is in a state of separating the atmosphere by the inert gas. In this state, the object to be processed 10 housed in the casing 10 a is carried in toward the heat treatment chamber 11 .

The processed object 10 housed in the casing 10 a is repeatedly, continuously and sequentially carried in from the inlet 31 toward the heat processing chamber 11 . More specifically, if a casing 10a containing a plurality of processed objects 10 is carried in from the entrance 31 toward the heat treatment chamber 11, after a predetermined time, the next casing 10a containing a plurality of processed objects 10 will be moved. It is carried in from the entrance 31 toward the heat treatment chamber 11 . Then, every time a predetermined time elapses, the next casing 10 a containing a plurality of processed objects 10 is carried in from the entrance 31 toward the heat treatment chamber 11 . In this way, the case 10 a containing the plurality of processed objects 10 is repeatedly, continuously and sequentially carried in from the inlet 31 to the heat treatment chamber 11 .

If the casing 10a containing the processed object 10 is carried into the heat treatment chamber 11 from the entrance 31, it will be placed on the upper surface of the grid belt 34 of the conveying mechanism 33, and the grid belt 34 will Together with the winding operation, it is conveyed in the heat treatment chamber 11 in the conveyance direction X1. The object to be processed 10 transported in the transport direction X1 together with the casing 10a in the heat treatment chamber 11 enters the heating region HR when it passes under the inlet-side gas supply part 36a, and starts to use superheated water in the heating region HR. Heating by steam. Furthermore, during the period from when the object 10 passes under the inlet-side gas supply part 36a to reaching the vicinity of the inlet-side gas supply part 36b, it will move toward the inlet by not being discharged by the inlet-side steam discharge part 15a. The superheated steam flowing on the 31 side is heated. And, during the period from reaching the vicinity of the inlet-side gas supply part 36b to passing through the region below the inlet-side steam discharge part 15a, the above-mentioned slight superheated steam flowing toward the inlet 31 side, and the gas from the The heat of the heater 12 is heated by heating the ambient atmosphere.

When the object to be processed 10 passes under the inlet-side steam discharge part 15a, it will be transported in the transport direction X1 in the atmosphere of superheated steam, which will be filled in the heat treatment chamber 11 while being substantially uniform. The ground flows from the water vapor supply part 13 toward the inlet side water vapor discharge part 15a. Then, the object 10 to be processed is continuously heated in the above-mentioned ambient atmosphere where the superheated steam flows. Furthermore, during this period, the object to be processed 10 is also heated by the ambient atmosphere heated by the heat from the heater 12 .

The object to be processed 10 is conveyed to the central portion of the heating region HR while being heated as described above. Then, when the object to be processed 10 passes under the steam supply unit 13 provided in the central portion of the heating region HR, it will be transported in the transport direction X1 in the atmosphere of the superheated steam. While filling the heat treatment chamber 11 , it flows from the water vapor supply part 13 toward the outlet side water vapor discharge part 15 b in substantially the same manner. Then, the object 10 to be processed is continuously heated in the above-mentioned ambient atmosphere where the superheated steam flows. Furthermore, during this period, the object to be processed 10 is also heated by the ambient atmosphere heated by the heat from the heater 12 .

The object to be processed 10 conveyed in the conveyance direction X1 while being heated in the heat treatment chamber 11 as described above is conveyed to the area below the outlet side steam discharge part 15b while being continuously heated. Furthermore, the heat treatment by superheated steam that must be carried out on the object 10 is mainly achieved by passing through the area below the water vapor supply part 13 from below the inlet side water vapor discharge part 15a to reach the outlet side water. The period up to the area below the steam discharge part 15b is performed by heating with superheated steam.

When the object to be treated 10 passes through the area below the outlet-side steam discharge unit 15b, it is heated by the slightly superheated steam flowing toward the outlet 32 side without being discharged by the outlet-side steam discharge unit 15b. In addition, if the object to be treated 10 is conveyed toward the outlet 32 side from the area below the outlet-side steam discharge unit 15b, it will pass below the outlet-side exhaust unit 20 and reach the area below the outlet-side gas supply unit 37b. Leave the heating zone HR. When the object to be processed 10 leaves the heating region HR through the region below the outlet side gas supply unit 37b, it is conveyed to the outlet 32 in the conveyance direction X1 in the heat treatment chamber 11 without undergoing heat treatment. Then, when reaching the exit 32 , the object 10 housed in the casing 10 a is carried out from the exit 32 toward the outside of the heat treatment chamber 11 . Furthermore, the case 10 a containing the object 10 is repeatedly and continuously and sequentially carried into the heat treatment chamber 11 , and when carried out from the exit 32 , it is repeatedly and continuously and sequentially carried out.

If the heat treatment of all objects to be treated 10 that must be heat treated in the heat treatment device 1 is finished, and all objects to be processed 10 are carried out from the heat treatment chamber 11, according to the control command from the control unit 25, the transport mechanism 33, the heater 12, the water The operation of the steam supply system 14, the water vapor discharge system (16a, 16b), the gas supply system 18, and the exhaust system (21a, 21b) will be stopped. Thereby, the processing operation of the thermal processing apparatus 1 ends.

[Effect of this embodiment] As described above, according to the heat treatment apparatus 1 of the present embodiment, the object 10 to be processed is supplied with superheated steam into the heat treatment chamber 11 from the steam supply unit 13 provided in the heating region HR of the heat treatment chamber 11. heated to perform heat treatment of the object 10 to be processed. Furthermore, the superheated steam used for heating the object 10 is discharged from the steam supply unit 13 provided in the heating region HR toward the steam provided on the inlet 31 side and the outlet 32 side of the heat treatment chamber 11, respectively. Part 15 (15a, 15b) flows, and is discharged from the steam discharge part 15 (15a, 15b) toward the outside of the heat treatment chamber. Therefore, in the heat treatment chamber 11, the flow of water vapor flowing from the water vapor supply part 13 in the heating region HR toward the inlet 31 side and discharged from the inlet side water vapor discharge part 15a toward the outside, and the water vapor flowing from the heating region HR are formed. The water vapor supply part 13 flows toward the outlet 32 side and is discharged from the outlet side water vapor discharge part 15b toward the outside. In addition, in the heat treatment chamber 11, from the steam supply unit 13 in the heating region HR toward each of the inlet 31 side and the outlet 32 side, there is a relatively small flow velocity deviation in a direction parallel to the conveyance direction X1 of the object 10 to be processed. Less and more the same flow of water vapor. This makes it difficult to generate a region where the flow of water vapor stagnates in the heat treatment chamber 11 , and as a result, it becomes difficult to generate a region where the ambient atmosphere stagnates in the heat treatment chamber 11 .

Therefore, according to the heat treatment apparatus 1 of the present embodiment, stagnation of the ambient atmosphere in the heat treatment chamber 11 where the heat treatment of the object 10 is performed can be suppressed. Moreover, according to the heat treatment apparatus 1, since stagnation of the ambient atmosphere in the heat treatment chamber 11 can be suppressed, it is possible to suppress unevenness in heat treatment among a plurality of objects 10 to be heat treated in the same heat treatment chamber 11. Furthermore, it is also possible to suppress the decrease in heat treatment efficiency and the occurrence of contamination of the object 10 due to the stagnation of gas generated from the object 10 to be processed.

Also, according to the present embodiment, since the steam supply part 13 is provided in the heating region HR of the heat treatment chamber 11, and the water vapor discharge part 15 (15a, 15b) is provided on the inlet 31 side and the outlet 32 side of the heat treatment chamber 11 With such a simple structure, it is possible to realize the heat treatment apparatus 1 that can suppress stagnation of the ambient atmosphere in the heat treatment chamber 11 . Therefore, it is possible to prevent the complexity of the structure of the heat treatment apparatus 1 for heat-treating the object 10 using superheated steam.

As described above, according to the present embodiment, it is possible to provide a heat treatment apparatus 1 that can prevent the complexity of the structure of the heat treatment apparatus 1 for heat-treating the object 10 by using superheated steam, and can suppress the heat treatment during the process of performing the heat treatment on the object 10. The stagnation of the ambient atmosphere occurs in the heat treatment chamber 11 of the heat treatment of the object 10 .

Furthermore, according to the heat treatment apparatus 1 of the present embodiment, since the entrance 31 of the heat treatment chamber 11 is opened to the outside, it is possible to continuously, quickly and easily carry in the object 10 into the heat treatment chamber 11 . Thereby, the heat treatment program can be continuous and the work efficiency of the heat treatment can be improved. Furthermore, according to the heat treatment apparatus 1, in addition to the opening of the inlet 31, an inlet-side gas supply part (36a, 36b) is provided, wherein the inlet-side gas supply part (36a, 36b) is closed relative to the water vapor supply part 13. The inlet-side water vapor discharge part 15 a provided on the inlet 31 side is provided on the inlet 31 side to supply an inert gas into the heat treatment chamber 11 . Therefore, the atmosphere in the heat treatment chamber 11 can be separated between the inlet 31 opened to the outside and the inlet-side steam discharge part 15a by the inert gas supplied from the inlet-side gas supply part (36a, 36b). That is, the ambient atmosphere of the region from the water vapor supply part 13 to the inlet-side gas supply part (36a, 36b) and the area from the inlet 31 opened to the outside to the inlet-side gas supply part (36a, 36b) can be adjusted. The environmental atmosphere of the area is separated. Thereby, in the heat treatment apparatus 1 in which the inlet 31 is opened in order to improve the working efficiency of the heat treatment, the ambient atmosphere in the region from the water vapor supply part 13 to the inlet side water vapor discharge part 15a can be blocked from the outside, and the The heat treatment of the object to be processed 10 by using the superheated steam in the heating region HR is performed efficiently.

Moreover, according to the heat treatment apparatus 1 of this embodiment, the inlet side gas supply part (36a, 36b) is provided as a pair, and the inlet side exhaust part 19 is provided between them. Therefore, from the inlet side water vapor discharge part 15a toward the inlet 31 side, in accordance with the order of the inlet side water vapor discharge part 15a, the inlet side gas supply part 36b, the inlet side exhaust part 19, and the inlet side gas supply part 36a, these will be configured. According to this configuration, the slight water vapor flowing toward the inlet 31 so as not to be completely discharged from the inlet side water vapor discharge part 15a and to leak is mixed with the inert gas supplied from the inlet side gas supply part 36b to be absorbed. dilution. Then, the water vapor diluted by mixing with the inert gas supplied from the inlet-side gas supply unit 36 b is discharged from the inlet-side exhaust unit 19 to the outside. Therefore, the slight amount of water vapor flowing toward the inlet 31 side by leaking from the inlet side water vapor discharge portion 15 a is also exhausted from the inlet side exhaust portion 19 . As a result, water vapor can be prevented from flowing into the region between the inlet-side exhaust portion 19 and the inlet 31 , which is a relatively low temperature region. Thereby, it is possible to prevent water vapor from flowing into a region with a relatively low temperature between the inlet-side exhaust portion 19 and the inlet 31 to cause dew condensation. By preventing condensation, it is possible to prevent moisture from dripping onto the object 10 carried in from the inlet 31 to wet the object 10 and affect the heat treatment state of the object 10 . In addition, according to the above-mentioned configuration, by the inert gas supplied from the inlet-side gas supply part 36a disposed between the inlet-side exhaust part 19 and the inlet 31, the water vapor supply part 13 to the inlet can be flowed more reliably. The ambient atmosphere of the area up to the side gas supply part (36a, 36b) is separated from the ambient atmosphere of the area from the inlet 31 to the inlet side gas supply part (36a, 36b) and blocked.

Furthermore, according to the heat treatment apparatus 1 of the present embodiment, since the outlet 32 of the heat treatment chamber 11 is opened to the outside, the unloading operation of the processed object 10 from the heat treatment chamber 11 can be carried out continuously, quickly and easily. Thereby, the heat treatment program can be continuous and the work efficiency of the heat treatment can be improved. Furthermore, according to the heat treatment apparatus 1, in addition to the outlet 32 being opened, an outlet-side gas supply unit (37a, 37b) is provided, wherein the outlet-side gas supply unit (37a, 37b) is closed relative to the water vapor supply unit 13. The outlet-side steam discharge portion 15b provided on the outlet 32 side is provided on the outlet 32 side, and supplies an inert gas into the heat treatment chamber 11 . Therefore, the atmosphere in the heat treatment chamber 11 can be separated between the outlet 32 opened to the outside and the outlet-side steam discharge unit 15b by the inert gas supplied from the outlet-side gas supply unit (37a, 37b). That is, the ambient atmosphere in the area from the water vapor supply part 13 to the outlet side gas supply part (37a, 37b) and the area from the outlet 32 opened to the outside to the outlet side gas supply part (37a, 37b) can be adjusted. The environmental atmosphere of the area is separated. Thereby, in the heat treatment apparatus 1 in which the outlet 32 is opened in order to improve the working efficiency of the heat treatment, the ambient atmosphere in the region from the water vapor supply part 13 to the outlet side water vapor discharge part 15b can be blocked from the outside, and Heat treatment of the object to be processed 10 using the superheated steam in the heating region HR can be efficiently performed.

Moreover, according to the heat treatment apparatus 1 of this embodiment, the outlet side gas supply part (37a, 37b) is provided as a pair, and the outlet side exhaust part 20 is provided between them. Therefore, from the outlet side water vapor discharge part 15b toward the outlet 32 side, according to the order of the outlet side water vapor discharge part 15b, the outlet side gas supply part 37a, the outlet side exhaust part 20, and the outlet side gas supply part 37b, these Components will be configured. According to this configuration, the slight water vapor flowing toward the outlet 32 side without being completely discharged from the outlet side water vapor discharge part 15b and leaking is mixed with the inert gas supplied from the outlet side gas supply part 37a and is absorbed. dilution. Then, the water vapor diluted by mixing with the inert gas supplied from the outlet-side gas supply unit 37 b is discharged from the outlet-side exhaust unit 20 to the outside. Therefore, the slight amount of water vapor flowing toward the outlet 32 side by leaking from the outlet side water vapor discharge portion 15 b is also exhausted from the outlet side exhaust portion 20 . As a result, water vapor can be prevented from flowing into the region between the outlet-side exhaust portion 20 and the outlet 32 , which is a relatively low temperature region. This prevents water vapor from flowing into a region with a relatively low temperature between the outlet-side exhaust portion 20 and the outlet 32 to cause dew condensation. By preventing the occurrence of condensation, when the processed object 10 is carried out from the outlet 32 , it is possible to prevent moisture from dripping onto the processed object 10 and making the processed object 10 wet. Also, according to the above-mentioned configuration, the gas supplied from the outlet-side gas supply unit 37b disposed between the outlet-side exhaust unit 20 and the outlet 32 can more reliably transfer gas from the steam supply unit 13 to the outlet side. The ambient atmosphere of the area up to the gas supply part (37a, 37b) is separated from the ambient atmosphere of the area from the outlet 32 to the outlet-side gas supply part (37a, 37b) and blocked.

Moreover, according to the heat processing apparatus 1 of this embodiment, the steam supply part 13 is equipped with a pair of nozzle part (38a, 38b). And the superheated steam blown from each of a pair of nozzle part (38a, 38b) flows toward the intermediate position side of a pair of opposing nozzle part (38a, 38b). In the region between a pair of facing nozzle parts (38a, 38b), partition plates (22e, 22f) configured to partially restrict the flow of gas in a direction parallel to the conveying direction X1 of the object 10 are provided. ). Each superheated steam that is blown out from each nozzle portion (38a, 38b) and flows toward the middle position side of a pair of nozzle portions (38a, 38b) will collide with the partition plate (22e, 22f), and will The entire diffusion covering the cross section perpendicular to the conveyance direction X1 of the object 10 flows so as to invert and return in a direction parallel to the conveyance direction X1 of the object 10 . Therefore, the superheated steam blown from each nozzle part (38a, 38b) flows toward the middle position side of the pair of nozzle parts (38a, 38b) and reverses to cover the object to be processed in the heating region HR. 10 in a state where the entire cross-section perpendicular to the conveying direction X1 is expanded, flows in a direction parallel to the conveying direction X1 of the object to be processed 10 in a direction opposite to the middle position side of a pair of nozzle parts (38a, 38b). That is, the superheated steam blown out from each of the pair of nozzle parts (38a, 38b) will flow in the middle position side of the pair of nozzle parts (38a, 38b) and turn over to spread to the heating region HR. The overall state of the cross-section flows in a direction parallel to the conveyance direction X1 of the object 10 and in directions away from each other. Therefore, the superheated steam blown from the nozzle portion 38a flows from the middle position side of the pair of nozzle portions (38a, 38b) toward the inlet 31 side of the heat treatment chamber 11 and spreads over the entire cross section of the heating region HR. The superheated steam blown from the nozzle portion 38b flows from the middle position side of the pair of nozzle portions (38a, 38b) toward the outlet 32 side of the heat treatment chamber 11 and spreads over the entire cross section of the heating region HR. Thereby, in the heat treatment chamber 11, from the middle position side of a pair of nozzle parts (38a, 38b) toward each of the inlet 31 side and the outlet 32 side, along the direction parallel to the conveyance direction X1 of the object 10 to be processed The state of spreading to the entire cross-section of the heating region HR forms a more uniform flow of water vapor with less variation in flow velocity. This makes it more difficult to generate a region where the flow of water vapor stagnates in the heat treatment chamber 11 , and as a result, it becomes more difficult to generate a region where the ambient atmosphere stagnates in the heat treatment chamber 11 . Therefore, according to the above configuration, stagnation of the ambient atmosphere in the heat processing chamber 11 can be further suppressed.

Furthermore, according to the heat treatment apparatus 1 of the present embodiment, between each of the pair of inlet-side gas supply units (36a, 36b) and the inlet-side exhaust unit 19, a device for locally restricting the transfer direction of the object 10 to be processed is provided. Inlet-side partitions (22a, 22b) for gas flow in a direction parallel to X1. Therefore, between the pair of inlet-side gas supply parts (36a, 36b) arranged across the inlet-side exhaust part 19, the state in which the atmosphere is communicated so that the gas can flow can be maintained, and a more easily separated environment can be formed. state of the atmosphere. Thereby, the ambient atmosphere of the section from the steam supply part 13 to the inlet-side gas supply part (36a, 36b) and the atmosphere from the inlet 31 to the inlet-side gas supply part (36a, 36b) can be more effectively separated and blocked. The environment of the segment.

In addition, according to the heat treatment apparatus 1 of the present embodiment, between each of the pair of outlet-side gas supply units (37a, 37b) and the outlet-side exhaust unit 20, an air conditioner for locally restricting the transfer direction of the object 10 to be processed is provided. Outlet-side partitions (22i, 22j) for gas flow in a direction parallel to X1. Therefore, between the pair of outlet-side gas supply units (37a, 37b) disposed across the outlet-side exhaust unit 20, it is possible to form a more easily separated state while maintaining a state in which the ambient atmosphere communicates so that the gas can flow. The state of the ambient atmosphere. Thereby, the ambient atmosphere of the region from the water vapor supply part 13 to the outlet-side gas supply part (37a, 37b) and the region from the outlet 32 to the outlet-side gas supply part (37a, 37b) can be more effectively adjusted. The surrounding atmosphere is separated and blocked.

[modified example] Although the embodiments of the present invention have been described above, the present invention is not limited to the above-mentioned embodiments, and various changes can be made and implemented within the scope described in the claims. For example, the following modifications can also be implemented.

(1) In the above-mentioned embodiment, although the example in which the heating area is configured as the area from the steam supply part to the inlet side gas supply part, and the area from the water vapor supply part to the outlet side gas supply part has been exemplified. , but it may not be like this, and other forms may also be implemented. As long as the heating region is a region for heating the object to be processed in the heat treatment chamber, it can be configured to perform heating using superheated steam and heating using heat from the heater (that is, using heat from the heating At least any one of the regions that are heated by the ambient atmosphere in the heat treatment chamber heated by the heat of the heat treatment chamber. For example, if the heater for heating the heat treatment chamber from the outside is arranged to cover the section from the entrance to the exit of the heat treatment chamber, the entire length of the heat treatment chamber from the entrance to the exit is the heating region.

(2) Also, in the above-mentioned embodiment, although the form in which the steam discharge part is provided in the central part of the conveying direction of the object to be processed in the heating area has been exemplified, this may not be the case, and other forms may also be implemented. . For example, a form in which the steam supply part is provided on the inlet side or the outlet side of the central part in the conveyance direction of the object in the heating area may be implemented.

(3) Also, in the above-mentioned embodiment, the water vapor supply unit has been exemplified as being provided with a pair of nozzle units arranged opposite to each other in the conveying direction of the object to be processed, but it may also be Not so, and other forms can also be implemented. For example, the water vapor supply unit may be configured to include one or three or more nozzle units. Moreover, in the above-mentioned embodiment, although the nozzle part formed in the cylindrical shape was illustrated, the shape of a nozzle part may not be like this, and various changes may be implemented. For example, various forms such as a box shape, a square tube shape, or a shape in which a plurality of cylindrical parts are connected in a state in which the interiors of these nozzles are connected can also be implemented. Also, in the above-mentioned embodiment, although it has been exemplified in the nozzle part, a plurality of nozzle holes are provided in the form of blowing superheated steam toward the middle position side of the pair of nozzle parts, but this may not be the case, and other methods may also be implemented. form. For example, in the nozzle portion, a plurality of nozzle holes may be provided so as to blow superheated steam upward or downward. Alternatively, in the nozzle portion, a plurality of nozzle holes may be provided so as to blow superheated steam toward the side opposite to the middle position side of the pair of nozzle portions.

(4) Also, in the above-mentioned embodiment, although the form in which a pair of partitions and an adhesive discharge part are provided between a pair of nozzle parts of the water vapor supply part has been illustrated, this may not be the case, and other embodiments may also be implemented. Shape. For example, it is also possible to implement a form in which one separator is provided between the pair of nozzle parts of the water vapor supply part without providing the adhesive discharge part. Alternatively, an aspect in which an adhesive discharge portion is provided without providing a partition between a pair of nozzle portions of the water vapor supply portion may be implemented. Alternatively, a form in which neither the partition plate nor the adhesive discharge portion is provided between the pair of nozzle portions of the water vapor supply portion may be implemented.

(5) In addition, in the above-mentioned embodiment, although the form in which the gas supply part supplies an inert gas to a thermal processing chamber was illustrated, this may not be the case, and other forms may be implemented. For example, an aspect in which the gas supply unit supplies air to the heat processing chamber may also be implemented. Alternatively, a form in which the gas supply unit supplies a mixed gas of an inert gas and air to the heat processing chamber may also be implemented.

(6) In addition, in the above-mentioned embodiment, although the form in which the inlet side gas supply part was provided as a pair was illustrated, this may not be the case, and other forms may be implemented. For example, one, or three or more inlet-side gas supply parts may be provided. Moreover, in the above-mentioned embodiment, although the inlet-side gas supply part formed in cylindrical shape was illustrated, the shape of the inlet-side gas supply part may not be like this, and various changes may be implemented. For example, various forms such as a box shape, a square tube shape, or a shape in which a plurality of cylindrical parts are connected in a state in which the insides of the inlet side gas supply part are connected can also be implemented. In addition, in the above-mentioned embodiment, the gas supply part on the inlet side was exemplified in the form in which the gas is blown downward from the plurality of nozzle holes, but this may not be the case, and other forms may also be implemented. For example, in the nozzle part, it is good also as the form which blows gas toward the direction other than downward direction from several nozzle holes.

(7) In addition, in the above-mentioned embodiment, although the form in which the outlet side gas supply part was provided as a pair was illustrated, this may not be the case, and other forms may be implemented. For example, one, or three or more outlet-side gas supply units may be provided. Moreover, in the above-mentioned embodiment, although the outlet side gas supply part formed in the cylindrical shape was illustrated, the shape of the outlet side gas supply part may not be like this, and various changes may be implemented. For example, various forms such as a box shape, a square tube shape, or a shape in which a plurality of cylindrical parts are connected in a state in which the insides of the outlet side gas supply part are connected can also be implemented. In addition, in the above-mentioned embodiment, the gas supply part on the outlet side is exemplified in the form in which the gas is blown downward from the plurality of nozzle holes, but this may not be the case, and other forms may also be implemented. For example, in the nozzle portion, a plurality of nozzle holes may be configured to blow gas in directions other than downward. (industrial availability)

The present invention relates to a heat treatment device for heat-treating an object to be processed by heating the object to be processed with superheated steam, and can be widely applied.

1: Heat treatment device 10: Processed objects 10a: shell 11: Heat treatment chamber 11a: side wall 11b: side wall 11c: top wall 11d: bottom wall 12: heater 13:Steam supply part 14: Water vapor supply system 15: Water vapor discharge part 15a: Water vapor discharge part 15b: Water vapor discharge part 16a: Water Vapor Exhaust System 16b: Water Vapor Exhaust System 17: Gas supply part 18: Gas supply system 19: Inlet side exhaust 20:Exit side exhaust 21a: Exhaust system 21b: Exhaust system 22: Partition 22a: Partition 22b: Partition 22c: Partition 22d: Partition 22e: Partition 22f: Partition 22g: separator 22h: Partition 22i: Partition 22j: Partition 23: Binder discharge part; Binder discharge part 23a: upper wall 23b: Lower wall extending horizontally 23c: side wall 23d: side wall 24: Air curtain 24a: Inlet air curtain 24b: Outlet air curtain 25: Control Department 31: Entrance 32: export 33: Transport mechanism 34: grid belt 35: drive shaft 35a: sprocket 36a: Inlet side gas supply part (gas supply part) 36b: Inlet side gas supply part (gas supply part) 37a: Outlet side gas supply part (gas supply part) 37b: Outlet side gas supply part (gas supply part) 38a: nozzle part 38b: nozzle part 39: nozzle hole 40:Superheated steam generating unit 41:Steam supply piping 42a: Steam supply piping 42b: Steam supply piping 43a: upper wall 43b: lower wall 43c: side wall 43d: side wall 44: Water vapor discharge pipe 45: Injector 46: Inert gas supply source 46a: Common piping 47:Common piping 48a: branch control 48b: branch control 48c: branch control 48d: branch control 49a: Gas supply valve 49b: Gas supply valve 49c: Gas supply valve 49d: Gas supply valve 50a: upper wall 50b: lower wall 50c: side wall 50d: side wall 51: Gas exhaust pipe 52: Injector 53: Binder discharge system 54: Adhesive exhaust pipe; adhesive exhaust pipe 55: Injector HR: heating zone X1: Transport direction

Fig. 1 is a diagram schematically showing an example of a heat treatment apparatus according to an embodiment of the present invention. 2 is a diagram schematically showing a water vapor supply unit, a water vapor supply system, a water vapor discharge unit, a water vapor discharge system, a gas supply unit, a gas supply system, and the like of the heat treatment apparatus. Fig. 3 is a part of the heat treatment device enlarged and shown, Fig. 3 (A) is the entrance of the heat treatment chamber in the heat treatment device and its vicinity is enlarged and shown, and Fig. 3 (B) is the heat treatment device An enlarged view of the exit of the heat treatment chamber and its vicinity. Fig. 4 is an enlarged view showing a water vapor supply part and its vicinity in a heat treatment chamber of a heat treatment apparatus. Fig. 5 is a schematic cross-sectional view of a part of the heat treatment device, Fig. 5(A) is a view showing the state observed from the position of the A-A arrow in Fig. 4, and Fig. 5(B) is a view from the position of the B-B arrow in Fig. 4 A diagram of states of observation. 6 is an enlarged view showing an inlet-side water vapor discharge unit, an inlet-side gas supply unit, and their vicinity in a heat treatment chamber of a heat treatment apparatus. Fig. 7 is a schematic cross-sectional view of a part of the heat treatment device, Fig. 7 (A) is a view showing the state observed from the position of the arrow C-C in Fig. 6, and Fig. 7 (B) is a view from the position of the arrow D-D in Fig. A diagram of states of observation. Fig. 8 is an enlarged view showing an outlet-side water vapor discharge unit, an outlet-side gas supply unit and their vicinity in a heat treatment chamber of a heat treatment apparatus. Fig. 9 is a schematic cross-sectional view of a part of the heat treatment device, Fig. 9 (A) is a view showing the state viewed from the position of the E-E arrow in Fig. 8, and Fig. 9 (B) is a view from the position of the F-F arrow in Fig. 8 A diagram of states of observation. Fig. 10 is a diagram for explaining the flow of superheated steam and inert gas in the heat treatment chamber of the heat treatment apparatus. Fig. 11 is a diagram for explaining the flow of superheated steam and inert gas in the heat treatment chamber of the heat treatment device, and Fig. 11(A) is a diagram for explaining the flow of superheated steam and inert gas in the area around the steam supply part , Figure 11(B) is a diagram illustrating the flow of superheated steam and inert gas in the area around the inlet side water vapor discharge part and the inlet side gas supply part, and Figure 11(C) is a diagram illustrating the outlet side water vapor discharge The diagram of the flow of superheated steam and inert gas in the area around the part and the gas supply part on the outlet side.

1: Heat treatment device

10: Processed objects

10a: Shell

11: Heat treatment chamber

12: heater

13:Steam supply part

15: Water vapor discharge part

15a: Water vapor discharge part

15b: Water vapor discharge part

17: Gas supply part

19: Inlet side exhaust

20:Exit side exhaust

22: Partition

23: Adhesive discharge part

24: Air curtain

24a: Inlet air curtain

24b: Outlet air curtain

31: Entrance

32: export

33: Transport mechanism

36a: Inlet side gas supply part (gas supply part)

36b: Inlet side gas supply part (gas supply part)

37a: Outlet side gas supply part (gas supply part)

37b: Outlet side gas supply part (gas supply part)

HR: heating zone

X1: Transport direction

Claims (8)

A heat treatment device that heats the object to be processed by using superheated steam to heat the object to be processed; it is equipped with: a heat treatment chamber, which is provided with an inlet for carrying in the object to be processed and an outlet for carrying out the object to be processed The outlet is used to heat-treat the object to be processed that is transported from the inlet toward the outlet; the water vapor supply unit is installed in the heating area of the heat treatment chamber as a region where the object to be processed is heated, and it is used for the above-mentioned Superheated steam is supplied in the heat treatment chamber; a water vapor discharge unit is provided on the inlet side and the outlet side of the water vapor supply unit in the heat treatment chamber, and directs the superheated steam in the heat treatment chamber toward the heat treatment chamber. and an ejector that sucks superheated steam from the steam discharge part and discharges it toward the outside of the heat treatment chamber; the steam discharge part is formed along a direction perpendicular to the conveying direction of the object to be processed It is a hollow box shape extending in the width direction of the above-mentioned heat treatment chamber, and is provided with a plurality of through holes for sucking superheated steam. The heat treatment apparatus according to claim 1, further comprising a gas supply unit for supplying at least one of an inert gas and air into the heat treatment chamber, the inlet being opened to the outside of the heat treatment chamber, and the heat treatment apparatus having The inlet-side gas supply part is the gas supply part, and the inlet-side gas supply part is provided on the inlet side of the water vapor discharge part provided on the inlet side with respect to the water vapor supply part in the heat treatment chamber. . The heat treatment device according to claim 2, wherein the inlet-side gas supply unit is provided as a pair, and in the heat treatment chamber, between the pair of the inlet-side gas supply units, the above-mentioned The gas in the heat treatment chamber is exhausted toward the outside of the heat treatment chamber. The heat treatment apparatus according to claim 1, further comprising a gas supply unit for supplying at least one of an inert gas and air into the heat treatment chamber, the outlet being opened to the outside of the heat treatment chamber, and the heat treatment apparatus having An outlet-side gas supply unit is the gas supply unit, and the outlet-side gas supply unit is provided on the outlet side of the water vapor discharge unit provided on the outlet side with respect to the water vapor supply unit in the heat treatment chamber. . The heat treatment device according to claim 4, wherein the outlet-side gas supply unit is provided as a pair, and in the heat treatment chamber, a device for directing the gas in the heat treatment chamber toward the heat treatment chamber is provided between the pair of outlet-side gas supply units. Exhaust on the outlet side of the chamber. The heat treatment apparatus according to any one of claims 1 to 5, wherein the steam supply unit includes a pair of nozzles arranged to face each other in the conveyance direction of the object to be processed, and the pair of nozzles Each of them is configured to blow superheated steam toward an intermediate position side of a pair of opposing nozzle portions. The heat treatment device according to claim 3, wherein an inlet-side partition is respectively provided between each of the pair of inlet-side gas supply parts and the above-mentioned inlet-side exhaust part, and the inlet-side partition is configured to partially restrict The gas flow in the direction parallel to the conveyance direction of the object to be processed in the heat treatment chamber. The heat treatment apparatus according to claim 5, wherein an outlet-side partition is provided between each of the pair of outlet-side gas supply units and the outlet-side exhaust unit, The outlet-side partition plate is configured to locally restrict a flow of gas in a direction parallel to a conveyance direction of the object to be processed in the heat treatment chamber.

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