KR20210120874A - Heat treatment apparatus - Google Patents

Abstract

The present invention provides a heat treatment apparatus which can prevent the complexity of a structure of a heat treatment apparatus performing heat treatment on an object to be treated by superheated steam, and suppress atmospheric stagnation in a heat treatment chamber in which the heat treatment on the object to be treated is performed. The heat treatment apparatus (1) comprises the heat treatment chamber (11), a steam supply unit (13), and a steam discharge unit (15). An inlet (31) receiving the object (10) to be treated and an outlet (32) discharging the object (10) to be treated are installed on the heat treatment chamber (11), and heat treatment on the object (10) to be treated, which is transported from the inlet (31) toward the outlet (32), is performed in the heat treatment chamber (11). The steam supply unit (13) is installed in a heating region (HR) in the heat treatment chamber (11) to supply superheated steam into the heat treatment chamber (11). The steam discharge unit (15) is installed on the inlet (31) side and the outlet (32) side with respect to the steam supply unit (13) in the heat treatment chamber (11), and discharges superheated steam in the heat treatment chamber (11) out of the heat treatment chamber (11).

Description

Heat treatment apparatus {HEAT TREATMENT APPARATUS}

The present invention relates to a heat treatment apparatus that heats an object to be treated with superheated steam to perform heat treatment of the object.

DESCRIPTION OF RELATED ART Conventionally, the heat processing apparatus which heats a to-be-processed object with superheated steam and heat-processes a to-be-processed object is known (for example, refer patent document 1). The heat treatment apparatus described in Patent Document 1 is provided as a heating furnace and includes a heat treatment chamber in which heat treatment of a target object is performed, and a heating region for heating the target object is formed in the heat treatment chamber. The heating region in the heat treatment chamber is divided into a plurality of zones provided adjacent to each other in order from the upstream side to the downstream side in the conveyance direction of the object to be processed. And the heat processing apparatus of patent document 1 is comprised so that the to-be-processed object may be heated by superheated steam, conveying in each zone in order, so that the heat processing of a to-be-processed object may be performed.

Moreover, the heat processing apparatus of patent document 1 WHEREIN: It is comprised so that water vapor|steam as superheated water vapor|steam may be supplied in each of the some zone in a heat processing chamber. More specifically, an opening is provided in the upper surface of each zone in the heat treatment chamber, and water vapor as superheated steam is supplied into each zone from the opening in the upper surface of each zone. Moreover, in the heat processing apparatus of patent document 1, the exhaust hole is formed in the lower surface of each zone in a heat processing chamber. Thereby, the heat processing apparatus of patent document 1 is each zone in a heat processing chamber WHEREIN: It is comprised so that water vapor|steam supplied from the opening part of an upper surface and passed through each zone may be discharged|emitted from the exhaust hole of the lower surface.

Japanese Patent Laid-Open No. 2015-2325

The heat treatment apparatus disclosed in Patent Document 1 is configured to supply superheated water vapor from an opening on the upper surface and discharge water vapor from an exhaust hole on the lower surface in each of a plurality of zones arranged in the conveyance direction of the object to be processed in the heat treatment chamber. has been For this reason, a configuration for supplying superheated steam into the heat treatment chamber and then discharging the steam used for heating the object to be processed is required for each of the plurality of zones in the heat treatment chamber, complicating the structure of the heat treatment apparatus. There is a problem with throwing it away.

Moreover, as mentioned above, in the heat processing apparatus of patent document 1, in each of the some zone in the heat processing chamber, superheated steam is supplied from the opening part of an upper surface, and water vapor|steam is discharged|emitted from the exhaust hole of a lower surface. For this reason, in each zone in the heat treatment chamber, water vapor flows from the opening on the upper surface to the exhaust hole on the lower surface, and a flow of water vapor which is unevenly distributed for each zone and flows from the upper side to the lower side is formed. Thereby, it becomes difficult to generate|occur|produce the flow of water vapor|steam along the direction parallel to the conveyance direction of a to-be-processed object in a heat processing chamber. As a result, variations in the flow of water vapor along a direction parallel to the conveying direction of the object to be processed are large, and regions where the flow of water vapor is likely to stagnate. lose

When the stagnation of the atmosphere tends to occur in the heat treatment chamber, the distribution of superheated steam tends to occur in the heat treatment chamber, and the heat treatment unevenness occurs between a plurality of objects subjected to heat treatment in the same heat treatment chamber. There is a problem that it becomes easy. Further, in the case of a process in which gas is generated by vaporization of some components from the object to be treated during heat treatment, if stagnation occurs in the heat treatment chamber, the gas generated from the object to be treated stays in the region where the stagnation occurs. In addition, if the atmosphere stagnates and the gas generated from the object to be processed stays during the heat treatment, there is a problem that the purity of the superheated water vapor in the heating region decreases, resulting in a decrease in the heat treatment efficiency. In addition, the gas generated from the object to be treated and remaining in the region where the atmosphere is stagnant is not discharged from the heat treatment chamber, but liquefies as the temperature decreases when the heat treatment is finished, and condenses on the ceiling or wall surface in the heat treatment chamber. . In addition, there is a problem that, when a new heat treatment is started, a component dew condensation on the ceiling or wall surface in the heat treatment chamber drips onto the object to be treated, thereby contaminating the object.

In addition, there is a sintering process as a process in which a part of component vaporizes from a to-be-processed object at the time of heat processing to generate|occur|produce gas, for example. In a sintering process, the process which vaporizes and removes the to-be-processed object as a to-be-sintered body integrated with the binder containing a fat and oil component is performed by heating. In this treatment, if the vaporized binder stays in the region where the atmosphere is stagnant and is not discharged, it liquefies according to a decrease in the temperature when the heat treatment is finished, and condensed on the ceiling or wall surface in the heat treatment chamber. Then, when a new heat treatment is started, the binder component that has condensed on the ceiling or wall surface in the heat treatment chamber drips onto the object to be treated, thereby contaminating the object.

As described above, when the stagnation of the atmosphere is likely to occur in the heat treatment chamber, non-uniformity in the heat treatment is likely to occur among a plurality of objects subjected to heat treatment in the same heat treatment chamber, and Problems such as a decrease in heat treatment efficiency due to the retention of gas and generation of contamination of the object to be treated also tend to occur. Therefore, it is desired to realize a heat treatment apparatus that suppresses the occurrence of stagnation of the atmosphere in the heat treatment chamber.

According to the present invention, in view of the above situation, the complexity of the structure of the heat treatment apparatus for performing the heat treatment of the object to be treated by the superheated steam can be prevented, and the stagnation of the atmosphere occurs in the heat treatment chamber where the heat treatment of the object to be treated is performed. An object of the present invention is to provide a heat treatment apparatus capable of suppressing burnout.

(1) In order to solve the above problems, a heat treatment apparatus according to a certain aspect of the present invention relates to a heat treatment apparatus that heats an object to be treated with superheated steam to perform heat treatment of the object. And, in the heat treatment apparatus according to a certain aspect of the present invention, an inlet through which the object to be treated is carried in and an outlet through which the object to be treated is taken out are provided, and the heat treatment of the object to be treated conveyed from the inlet toward the outlet is performed. is provided in a heat treatment chamber and a heating region that is a region in which the object to be processed in the heat treatment chamber is heated, and a water vapor supply unit for supplying superheated steam into the heat treatment chamber; and a water vapor discharge unit provided on the inlet side and the outlet side, respectively, for discharging superheated water vapor in the heat treatment chamber to the outside of the heat treatment chamber.

According to this configuration, the object to be treated is heated by the superheated steam supplied into the heat treatment chamber from the steam supply unit provided in the heating region of the heat treatment chamber, and the heat treatment of the object is performed. Then, the superheated steam used for heating the object to be treated flows from the steam supply unit provided in the heating region toward the steam discharge units respectively provided on the inlet side and the outlet side of the heat treatment chamber, and is discharged from the water vapor discharge unit to the outside of the heat treatment chamber. For this reason, in the heat treatment chamber, the flow of water vapor flowing from the water vapor supply unit in the heating region toward the inlet side and discharged from the water vapor discharge unit to the outside, and flowing from the water vapor supply unit in the heating region toward the outlet side and discharged from the water vapor discharge unit to the outside. A stream of water vapor is formed. Then, in the heat treatment chamber, a more uniform flow of water vapor with less variation in flow velocity is formed along a direction parallel to the conveying direction of the object to be treated from the water vapor supply unit in the heating region toward each of the inlet side and the outlet side. Thereby, it becomes difficult to generate|occur|produce the area|region where the flow of water vapor|steam stagnates in the heat processing chamber, and, as a result, it becomes difficult to produce the area|region where the atmosphere remains in the heat processing chamber.

Therefore, according to said structure, it can suppress that the stagnation of an atmosphere arises in the heat processing chamber in which the heat processing of a to-be-processed object is performed. In addition, according to the above configuration, since it is possible to suppress the occurrence of stagnation of the atmosphere in the heat treatment chamber, it is possible to prevent non-uniformity of heat treatment between a plurality of objects subjected to heat treatment in the same heat treatment chamber. It is possible to suppress the reduction in heat treatment efficiency and the occurrence of contamination of the object to be treated due to the retention of gas generated from the object to be treated.

In addition, according to the above configuration, the generation of stagnation of the atmosphere in the heat treatment chamber is prevented by the simple configuration in which the water vapor supply unit is provided in the heating region of the heat treatment chamber and the water vapor discharge unit is provided at the inlet side and the outlet side of the heat treatment chamber. It is possible to realize a heat treatment apparatus that can be suppressed. For this reason, the complexity of the structure of the heat processing apparatus which heat-processes a to-be-processed object with superheated steam can be prevented.

As described above, according to the above configuration, the complexity of the structure of the heat treatment apparatus for performing the heat treatment of the object to be treated by the superheated steam can be prevented, and stagnation of the atmosphere occurs in the heat treatment chamber where the heat treatment of the object is performed. It is possible to provide a heat treatment apparatus capable of suppressing burnout.

(2) a gas supply unit for supplying at least one of an inert gas and air into the heat treatment chamber, wherein the inlet is open to the outside of the heat treatment chamber In some cases, an inlet gas supply part provided on the inlet side more than the steam discharge part installed on the inlet side is provided with respect to the steam supply part.

According to this configuration, since the entrance of the heat treatment chamber is open to the outside, the carrying-in operation of the object to be processed into the heat treatment chamber can be carried out continuously and quickly and easily. Thereby, the heat treatment process can be made continuous, and the improvement of the work efficiency of heat processing can be aimed at. And, according to the above configuration, in addition to the inlet being open, the steam supply unit is provided on the inlet side further than the water vapor discharge unit provided on the inlet side to supply at least one of an inert gas and air into the heat treatment chamber. An inlet gas supply is provided. For this reason, the atmosphere in the heat treatment chamber can be separated between the inlet open to the outside and the water vapor discharge part by the gas supplied from the inlet gas supply unit. That is, the atmosphere in the region from the water vapor supply unit to the inlet gas supply unit and the atmosphere in the region from the inlet open to the outside to the inlet gas supply unit can be separated. Thereby, in the heat treatment apparatus with an open inlet for improving the working efficiency of the heat treatment, the atmosphere in the area from the water vapor supply unit to the water vapor discharge unit can be blocked from the outside, and to be treated by the superheated water vapor in the heating area Heat treatment of water can be performed efficiently.

(3) the inlet gas supply unit is provided as a pair, and in the heat treatment chamber, between the pair of inlet gas supply units, an inlet side for exhausting the gas in the heat treatment chamber to the outside of the heat treatment chamber An exhaust part may be provided.

According to this configuration, a pair of inlet gas supply units are provided and an inlet side exhaust unit is provided between them. For this reason, from the water vapor discharge unit toward the inlet side, the water vapor discharge unit, one of the pair of inlet gas supply units, the inlet side exhaust unit, and the other of the pair of inlet gas supply units are arranged in this order. With this configuration, some water vapor flowing to the inlet side to leak without being completely discharged from the water vapor discharge unit mixes with the gas supplied from one of the pair of inlet gas supply units and is diluted. Then, the water vapor mixed with the gas supplied from one of the pair of inlet gas supply units and diluted is exhausted from the inlet side exhaust unit to the outside. For this reason, even a small amount of water vapor flowing to the inlet side so as to leak from the water vapor discharge unit is also exhausted from the inlet side exhaust unit. As a result, it is possible to prevent water vapor from flowing into the region between the inlet side exhaust portion and the inlet and having a low temperature. Thereby, it is prevented that water vapor flows into the region with a low temperature between the inlet side exhaust portion and the inlet and dew condensation occurs. By preventing the occurrence of dew condensation, it is prevented that moisture drips onto the to-be-processed object carried in from the inlet, the to-be-processed object gets wet, and an influence arises on the heat treatment state of the to-be-processed object. Further, according to the above configuration, by the gas supplied from the other of the pair of inlet gas supply units, that is, by the gas supplied from the inlet side gas supply unit disposed between the inlet side exhaust unit and the inlet, water vapor The atmosphere in the region from the supply unit to the inlet gas supply unit and the atmosphere in the region from the inlet to the inlet gas supply unit can be more reliably separated and blocked.

(4) a gas supply unit for supplying at least one of an inert gas and air into the heat treatment chamber, wherein the outlet is open to the outside of the heat treatment chamber In some cases, an outlet gas supply unit provided on the outlet side more than the water vapor discharge unit provided on the outlet side is provided with respect to the water vapor supply unit.

According to this configuration, since the exit of the heat treatment chamber is open to the outside, it is possible to continuously, quickly and easily carry out the operation of taking out the object to be treated from the heat treatment chamber. Thereby, the heat treatment process can be made continuous, and the improvement of the work efficiency of heat processing can be aimed at. And, according to the above configuration, in addition to the outlet being opened, it is provided on the outlet side more than the water vapor discharge unit provided on the outlet side with respect to the water vapor supply unit to supply at least one of an inert gas and air into the heat treatment chamber. An outlet gas supply is provided. For this reason, the atmosphere in the heat treatment chamber can be separated between the outlet open to the outside and the water vapor discharge part by the gas supplied from the outlet gas supply part. That is, the atmosphere in the region from the water vapor supply unit to the outlet gas supply unit and the atmosphere in the region from the outlet open to the outside to the outlet gas supply unit can be separated. Thereby, in the heat treatment apparatus with an open outlet for improving the working efficiency of the heat treatment, the atmosphere in the area from the water vapor supply unit to the water vapor discharge unit can be blocked from the outside, and to be treated by the superheated water vapor in the heating area Heat treatment of water can be performed efficiently.

(5) The outlet gas supply unit is provided as a pair, and in the heat treatment chamber, between the pair of outlet gas supply units, an outlet side for exhausting the gas in the heat treatment chamber to the outside of the heat treatment chamber An exhaust is installed.

According to this configuration, a pair of outlet gas supply units are provided, and an outlet side exhaust unit is provided between them. For this reason, from the water vapor discharge unit toward the outlet side, the water vapor discharge unit, one of the pair of outlet gas supply units, the outlet side exhaust unit, and the other of the pair of outlet gas supply units are arranged in this order. With this configuration, some water vapor flowing to the outlet side to leak without being completely discharged from the water vapor discharging unit mixes with the gas supplied from one of the pair of outlet side gas supply units and is diluted. Then, the water vapor mixed with the gas supplied from one of the pair of outlet gas supply units and diluted is exhausted from the outlet side exhaust unit to the outside. For this reason, even a small amount of water vapor that has flowed to the outlet side so as to leak from the water vapor discharge unit is also exhausted from the outlet side exhaust unit. As a result, it is possible to prevent water vapor from flowing into the region between the outlet side exhaust portion and the outlet and having a low temperature. Thereby, it is prevented that water vapor flows into the area with a low temperature between the outlet side exhaust part and the outlet, and dew condensation occurs. By preventing the occurrence of dew condensation, when the object to be treated is taken out from the outlet, it is prevented that moisture drips onto the object to be treated and the object gets wet. In addition, according to the above configuration, the gas supplied from the other of the pair of outlet gas supply units, that is, the outlet gas supply unit disposed between the outlet exhaust unit and the outlet, is supplied from the water vapor supply unit to the outlet gas supply unit. It is possible to more reliably separate and block the atmosphere in the region from the outlet to the atmosphere in the region from the outlet to the outlet gas supply unit.

(6) The water vapor supply unit includes a pair of nozzle units disposed to face each other in the conveyance direction of the object, and each of the pair of nozzle units has an intermediate position side of the pair of opposing nozzle units. It may be comprised so that superheated water vapor|steam may be taken out toward the direction.

According to this structure, the superheated steam blown out from each of a pair of nozzle parts of a water vapor|steam supply part flows toward the intermediate position side of a pair of nozzle part which opposes. In the case where a partition plate configured to partially restrict the flow of gas in a direction parallel to the transport direction of the object to be processed is provided in the region between the pair of opposing nozzle units, and in the case where such a partition plate is not provided There are cases. When a partition plate is provided, each superheated steam blown out from each nozzle part and flowing toward the intermediate position side of a pair of nozzle parts collides with the partition plate, and in the heating area, the cross section perpendicular to the conveying direction of the to-be-processed object While spreading over the whole, it flows backward in a direction parallel to the conveyance direction of the object to be processed. Moreover, when the partition plate is not provided, each superheated water vapor taken out from each nozzle part and flowing toward the intermediate position side of a pair of nozzle part collides with each other, The cross section perpendicular|vertical to the conveyance direction of the to-be-processed object in a heating area|region. While spreading over the entire area, it flows backward in a direction parallel to the conveyance direction of the object to be processed. For this reason, in both the case where the partition plate is provided and the case where it is not provided, the superheated steam blown out from each nozzle part flows toward the intermediate position side of a pair of nozzle parts, and after being reversed, in a heating area, to-be-processed In a state of being spread over the entire cross section perpendicular to the conveying direction of water, it flows along a direction parallel to the conveying direction of the object to be processed toward a direction opposite to the intermediate position side of the pair of nozzles. That is, the superheated steam blown out from each of the pair of nozzles is in a state in which the flow is reversed at the intermediate position of the pair of nozzles and then spreads over the entire cross section of the heating region in a direction parallel to the conveying direction of the object to be processed. flow in the direction they fall from each other. For this reason, the superheated steam blown out from one of the pair of nozzle parts flows from the intermediate position side of the pair of nozzle parts toward the inlet side of the heat treatment chamber in a state of being spread over the entire cross section of the heating region. Then, the superheated steam blown out from the other of the pair of nozzles flows from the intermediate position side of the pair of nozzles toward the exit side of the heat treatment chamber in a state of being spread over the entire section of the heating region. As a result, in the heat treatment chamber, from the intermediate position side of the pair of nozzle units toward the inlet side and the outlet side, respectively, the flow velocity is spread over the entire cross section of the heating region along a direction parallel to the conveying direction of the object to be treated. There is less variation, resulting in a more uniform flow of water vapor. Thereby, it becomes more difficult to generate|occur|produce the area|region where the flow of water vapor|steam stagnates in the heat processing chamber, and, as a result, it becomes more difficult to generate|occur|produce the area|region where the atmosphere stagnates in the heat processing chamber. Therefore, according to the above configuration, it is possible to further suppress the occurrence of stagnation of the atmosphere in the heat treatment chamber.

(7) An inlet-side partition plate is provided between each of the pair of inlet-side gas supply units and the inlet-side exhaust unit, respectively, and the inlet-side partition plate is disposed in a direction in which the object to be processed in the heat treatment chamber is conveyed and It may be comprised so that the flow of gas in a parallel direction may be partially regulated.

According to this configuration, between each of the pair of inlet-side gas supply units and the inlet-side exhaust unit, an inlet-side partition plate for partially regulating the flow of gas in a direction parallel to the transport direction of the object to be processed is provided. For this reason, between a pair of inlet gas supply parts disposed with the inlet exhaust part interposed therebetween, while maintaining the state in which the atmosphere communicates so that gas can flow, a state in which the atmosphere is more easily separated can be formed. . Accordingly, the atmosphere in the region from the water vapor supply unit to the inlet gas supply unit and the atmosphere in the region from the inlet to the inlet gas supply unit can be more efficiently separated and blocked.

(8) An outlet partition plate is provided between each of the pair of outlet gas supply units and the outlet exhaust unit, and the outlet partition plate is disposed in a direction in which the object to be treated in the heat treatment chamber is conveyed and It may be comprised so that the flow of gas in a parallel direction may be partially regulated.

According to this configuration, between each of the pair of outlet-side gas supply units and the outlet-side exhaust unit, an outlet-side partition plate for partially regulating the flow of gas in a direction parallel to the transport direction of the object to be processed is provided. For this reason, it is possible to form a state in which the atmosphere is more easily separated while maintaining the state in which the atmosphere is communicated so that the gas can flow between the pair of outlet gas supply units disposed with the outlet exhaust unit interposed therebetween. . Thereby, the atmosphere in the region from the water vapor supply unit to the outlet gas supply unit and the atmosphere in the region from the outlet to the outlet gas supply unit can be separated and blocked more efficiently.

According to the present invention, it is possible to prevent the complication of the structure of the heat treatment apparatus for performing the heat treatment of the object to be treated by the superheated steam, and it is possible to suppress the occurrence of stagnation of the atmosphere in the heat treatment chamber where the heat treatment of the object to be treated is performed. can

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows typically an example of the heat processing apparatus which concerns on embodiment of this invention.
2 is a diagram schematically showing a water vapor supply unit, a water vapor supply system, a water vapor discharge unit, a water vapor discharge system, a gas supply unit, a gas supply system, and the like of the heat treatment apparatus.
Fig. 3 is an enlarged view showing a part of a heat treatment apparatus, Fig. 3 (A) is an enlarged view showing the inlet and the vicinity of the heat treatment chamber in the heat treatment apparatus, Fig. 3 (B) is, It is a figure which enlarges and shows the exit of the heat processing chamber in a heat processing apparatus, and its vicinity.
4 is an enlarged view showing a water vapor supply unit and its vicinity in a heat treatment chamber of the heat treatment apparatus.
Fig. 5 is a schematic cross-sectional view of a part of the heat treatment apparatus, Fig. 5 (A) is a view showing a state viewed from the line AA line-arrow line-of-sight position of Fig. 4 , Fig. 5 (B) is BB of Fig. 4 It is a drawing which shows the state seen from the line arrow gaze position.
6 is an enlarged view showing an inlet-side water vapor discharge unit and an inlet-side gas supply unit and the vicinity thereof in the heat treatment chamber of the heat treatment apparatus.
Fig. 7 is a schematic cross-sectional view of a part of the heat treatment apparatus, Fig. 7 (A) is a view showing a state viewed from the line CC line arrow line-of-sight position in Fig. 6, (B) is Fig. 6 DD It is a drawing which shows the state seen from the line arrow gaze position.
Fig. 8 is an enlarged view showing an outlet side water vapor discharge unit and an outlet side gas supply unit and the vicinity thereof in a heat treatment chamber of the heat treatment apparatus.
Fig. 9 is a schematic cross-sectional view of a part of the heat treatment apparatus, Fig. 9 (A) is a view showing a state viewed from the line EE line arrow line-of-sight position of Fig. 8, (B) is Fig. 8 FF It is a drawing which shows the state seen from the line arrow gaze position.
FIG. 10 is a diagram for explaining the flow of superheated steam and inert gas in the heat treatment chamber in the heat treatment apparatus.
11 is a diagram for explaining the flow of superheated steam and inert gas in the heat treatment chamber in the heat treatment apparatus, and FIG. 11A is the flow of superheated steam and inert gas in the region around the steam supply unit. FIG. 11B is a diagram for explaining the flow of superheated steam and inert gas in the area around the inlet water vapor discharge unit and the inlet gas supply unit, and FIG. 11C is, It is a figure explaining the flow of superheated steam and inert gas in the area|region around the outlet side water vapor discharge part and the outlet side gas supply part.

EMBODIMENT OF THE INVENTION Hereinafter, it demonstrates, referring drawings for the form for implementing this invention.

[Outline of heat treatment equipment]

1 : is a figure which shows typically an example of the heat processing apparatus 1 which concerns on embodiment of this invention. FIG. 2 shows a water vapor supply unit 13, a water vapor supply system 14, a water vapor discharge unit 15, a water vapor discharge system 16a, 16b, a gas supply unit 17, and a gas supply system 18 of the heat treatment apparatus 1 ) and the like are schematically shown. 3 is an enlarged view showing a part of the heat treatment apparatus 1, and FIG. 3(A) is an enlarged view of the inlet 31 and the vicinity of the heat treatment chamber 11 in the heat treatment apparatus 1 It is a figure which shows, and FIG.3(B) is a figure which enlarges and shows the outlet 32 of the heat processing chamber 1 in the heat processing apparatus 1, and its vicinity.

1 to 3 , the heat treatment apparatus 1 is configured as an apparatus that heats the metal object 10 with superheated steam to heat the object 10 . In addition, superheated steam is steam heated to a temperature higher than a boiling point, and is dry steam with a temperature higher than a boiling point. The heat treatment apparatus 1 is provided with the heat treatment chamber 11 provided with the inlet 31 through which the to-be-processed object 10 is carried in, and the outlet 32 from which the to-be-processed object 10 is carried out. And in the heat treatment apparatus 1, in the heat treatment chamber 11, the to-be-processed object 10 is heated with superheated steam while being conveyed from the inlet 31 toward the outlet 32, and the to-be-processed object 10 is heated. Heat treatment is performed. As the heat treatment for the object 10 to be processed using superheated steam in the heat treatment apparatus 1, for example, a degreasing treatment and a sintering treatment can be exemplified.

When the degreasing treatment is performed in the heat treatment apparatus 1 , the to-be-processed object 10 to which machining etc. were given in the treatment process before the treatment in the heat treatment apparatus 1 is carried into the heat treatment apparatus 1 . And in the heat processing apparatus 1, the fats and oils adhering to the to-be-processed object 10 are vaporized by heating with superheated steam, and are removed from the to-be-processed object 10. FIG. Moreover, when a sintering process is performed in the heat processing apparatus 1, the to-be-processed object 10 comprised as a to-be-sintered material couple|bonded with the binder containing a fat-and-oils component is carried into the heat processing apparatus 1 . And in the heat treatment apparatus 1, the to-be-processed object 10 is heated by superheated steam, the binder is vaporized and removed, and then, by further heating by the superheated steam, the to-be-processed object 10 from which the binder was removed. ) is sintered.

In the heat treatment apparatus 1 , the object 10 is loaded into the heat treatment chamber 11 , and is heated by the superheated steam while being conveyed in the heat treatment chamber 11 . Thereby, the heat treatment with respect to the to-be-processed object 10 is performed. Then, the object 10 after the heat treatment in the heat treatment chamber 11 is finished is taken out from the heat treatment chamber 11 . Moreover, the to-be-processed object 10 is conveyed continuously to the heat processing chamber 11, heat processing is performed while conveying continuously within the heat processing chamber 11, and is carried out continuously from the heat processing chamber 11. As shown in FIG.

The to-be-processed object 10 processed by the heat processing apparatus 11 is provided as a metal member, for example, and is provided as a member whose outer shape is substantially ring-shaped or a substantially cylindrical shape. Examples of the processing target 10 having a substantially ring or substantially cylindrical outer shape include a core (iron core) of an electric motor, race members such as outer and inner rings of rolling bearings, gears such as spur gears, and rolling bearings. A roller, a shaft, a washer, etc. can be illustrated. In addition, the to-be-processed object 10 does not need to be comprised as a substantially ring-shaped or substantially cylindrical member, and may be comprised as a member formed in a shape other than a substantially ring shape or a substantially cylindrical shape. For example, various shapes such as a cylindrical shape, a prismatic shape, a square cylindrical shape, a rectangular parallelepiped shape, a cube shape, a rod shape, a plate shape, and a shape having a special cross-sectional shape or a surface shape may be used.

In FIG. 3A , which is an enlarged view of the inlet 31 of the heat treatment chamber 11 and the vicinity thereof, in the heat treatment apparatus 1 , the object 10 is loaded into the heat treatment chamber 11 . indicates the status. Further, in FIG. 3B , which is an enlarged view of the outlet 32 of the heat treatment chamber 11 in the heat treatment apparatus 1 and its vicinity, the object 10 moves through the heat treatment chamber 11 . The state being conveyed and carried out from the heat treatment chamber 11 is shown. 3A and 3B, when the object 10 is carried into the heat treatment chamber 11, for example, in a case 10a formed in a thin box shape. It is brought in in a deployed state. In the case 10a, a plurality of to-be-processed objects 10 are accommodated in a state in which they are spread out at substantially equal intervals. And the to-be-processed object 10 is carried in into the heat processing chamber 11 in the state arrange|positioned in the case 10a. Further, in the case 10a for accommodating the plurality of objects 10 to be treated, a plurality of holes formed in the peripheral side and the bottom surface, for example, a plurality of holes formed in the peripheral surface and the bottom surface, so that the surrounding gas can pass through almost without resistance, and the upper surface are formed An opening is formed. Thereby, it is comprised so that the superheated steam of the atmosphere in the heat processing chamber 11 may flow through the case 10a. Incidentally, the case 10a may have a structure in which superheated steam in the atmosphere in the heat treatment chamber 11 can flow so as to pass through the case 10a with almost no resistance, for example, it may be formed of a net-like member. .

The heat treatment apparatus 1 includes a heat treatment chamber 11 , a heater 12 , a water vapor supply unit 13 , a water vapor supply system 14 , a water vapor discharge unit 15 , a water vapor discharge system 16a and 16b , and a gas supply unit ( 17), gas supply system 18, inlet side exhaust unit 19, outlet side exhaust unit 20, exhaust system 21a, 21b, partition plate 22, binder discharge unit 23, gas curtain unit (24), a control unit 25 and the like are provided. Hereinafter, the structure of the heat processing apparatus 1 is demonstrated in detail.

[Heat treatment room]

4 : is a figure which enlarges and shows the water vapor|steam supply part 13 in the heat processing chamber 11 of the heat processing apparatus 1, and its vicinity. Fig. 5 is a schematic cross-sectional view of a part of the heat treatment apparatus 11, Fig. 5A is a view showing a state seen from the line AA line-arrow line-of-sight position of Fig. 4, Fig. 5B is Fig. It is a figure which shows the state seen from the line BB line arrow line-of-sight position of 4 . 1 to 5 , in the heat treatment chamber 11 , an inlet 31 through which the object 10 is carried in and an outlet 32 through which the object 10 is discharged are installed, and the inlet 31 ) and is configured as a heat treatment furnace in which heat treatment of the object 10 conveyed toward the outlet 32 is performed.

The heat treatment chamber 11 has a tunnel-like external shape extending linearly in a cylindrical shape, and a processing space in which the object 10 is transported and heat treatment of the object 10 is performed is provided therein. have. The conveyance direction of the to-be-processed object 10, ie, the direction in which the to-be-processed object 10 is conveyed in the heat processing chamber 11, becomes a direction parallel to the longitudinal direction in which the heat processing chamber 11 extends cylindrically. . In addition, in FIGS. 1-3, about the conveyance direction of the to-be-processed object 10, it is shown by the arrow X1 of a dashed-dotted line, and hereafter, it calls the conveyance direction X1.

The heat treatment chamber 11 has a pair of side walls 11a and 11b, a ceiling wall 11c, and a bottom wall 11d. The pair of side walls 11a and 11b, the ceiling wall 11c, and the bottom wall 11d of the heat treatment chamber 11 are formed of a steel plate-shaped member. The heat treatment chamber 11 is formed of a plate-shaped member made of steel, so that heat from a heater 12 to be described later that heats the heat treatment chamber 11 from the outside is easily conducted. A pair of side walls 11a, 11b is arrange|positioned in parallel, and both are provided as a wall part extended along the up-down direction and the conveyance direction X1. The ceiling wall 11c is provided as a wall part dividing the ceiling part of the upper part of the heat processing chamber 11, and is provided so that the upper end of the pair of side walls 11a, 11b may be integrally coupled. Moreover, the ceiling wall 11c is formed so that it may extend in arc shape in the cross section perpendicular|vertical to the conveyance direction X1. The bottom wall 11d is provided as a wall portion that partitions the bottom portion of the heat treatment chamber 11, and is provided so as to integrally engage the lower ends of the pair of side walls 11a and 11b.

The inlet 31 of the heat treatment chamber 11 is provided as an opening into which the to-be-processed object 10 in the heat treatment chamber 11 is carried in. In this embodiment, the inlet 31 is provided as an opening partitioned into the edge part of the side wall 11a, the edge part of the side wall 11b, the edge part of the ceiling wall 11c, and the edge part of the bottom wall 11d. And the inlet 31 is provided as an opening of one end in the direction parallel to the conveyance direction X1 in the heat processing chamber 11, and the conveyance direction X1 in the heat processing chamber 11 is provided. is opened at the upstream end of the The inlet 31 is open to the outside of the heat treatment chamber 11, the door is not provided, and is always open to the outside. In addition, as mentioned above, the to-be-processed object 10 is carried into the heat processing chamber 11 from the entrance 31 in the state accommodated in the case 10a.

The outlet 32 of the heat treatment chamber 11 is provided as an opening through which the to-be-processed object 10 in the heat treatment chamber 11 is carried out. In this embodiment, the outlet 32 is provided as an opening partitioned into the edge part of the side wall 11a, the edge part of the side wall 11b, the edge part of the ceiling wall 11c, and the edge part of the bottom wall 11d. And the outlet 32 is provided as an opening of the end part on the opposite side to the end part on the side of the inlet 31 in the direction parallel to the conveyance direction X1 in the heat processing chamber 11, It opens at the downstream end of the conveyance direction X1 in 11). The outlet 32 is open to the outside of the heat treatment chamber 11, the door is not provided, and is always open to the outside. In addition, as described above, the object 10 is taken out of the heat treatment chamber 11 from the outlet 32 in the state accommodated in the case 10a.

Moreover, in the heat processing chamber 11, the heating area|region HR which is the area|region where the to-be-processed object 10 is heated is provided. The heating region HR is set as a partial region in the conveyance direction X1 in the heat treatment chamber 11 . In addition, in FIG. 1, with respect to the heating area|region HR in the heat processing chamber 11, it is shown by the both ends arrow as a predetermined range in the conveyance direction X1, and is shown outside the heat processing chamber 11. It is schematically represented by an arrow at both ends.

In the heat treatment chamber 11 , the object 10 to be treated is heated by superheated steam supplied from a steam supply unit 13 to be described later, and a heater 12 to be described later that heats the heat treatment chamber 11 from the outside. As the heat treatment chamber 11 is heated by the heat treatment chamber 11 , it is also heated by the atmosphere in the heat treatment chamber 11 heated through the heat treatment chamber 11 . For this reason, in the heat treatment chamber 11 , the heating region HR, which is a region in which the object 10 to be processed is heated, is heated by the superheated steam and heated by the heat from the heater 12 (that is, the heater). It is configured as a region in which at least one of (heating by the atmosphere in the heat treatment chamber 11 heated through the heat treatment chamber 11 by the heat from (12)) is performed.

In addition, in the heat processing chamber 11, the heating of the to-be-processed object 10 by the heat|fever from the heater 12 is performed in the area|region where the heater 12 is arrange|positioned in the conveyance direction X1. And the heating of the to-be-processed object 10 by superheated steam is performed in the area|region where the superheated steam is contained in the atmosphere in the heat processing chamber 11. FIG. In the present embodiment, in the heat treatment chamber 11 , the region in which the object 10 to be processed by the superheated steam is heated is from the steam supply unit 13 to the inlet gas supply unit in the gas supply unit 17 to be described later. It becomes the area|region up to 36a, and the area|region from the water vapor|steam supply part 13 to the outlet side gas supply part 37b in the gas supply part 17 mentioned later. And, in the present embodiment, in the heat treatment chamber 11 , in the region in which the object 10 is heated by the heat from the heater 12 , the heating of the object 10 by the superheated steam is not performed. included in the field of action. That is, in the conveyance direction X1 of the heat processing chamber 11, the area|region where heating of the to-be-processed object 10 by the heat from the heater 12 is performed is heating of the to-be-processed object 10 by superheated steam. It is arrange|positioned inside the area|region where this is performed. For this reason, in the present embodiment, the heating region HR is a region from the water vapor supply unit 13 to the inlet gas supply unit 36a in the gas supply unit 17 to be described later, and from the water vapor supply unit 13 . It becomes an area|region to the outlet side gas supply part 37b in the gas supply part 17 mentioned later.

Moreover, in this embodiment, as mentioned above, the area|region where heating by the heat|fever from the heater 12 is performed is arrange|positioned inside the area|region where heating by superheated steam is performed. For this reason, in the region within the heating region HR where heating by heat from the heater 12 is performed, both heating by heat from heater 12 and heating by superheated steam are performed. all. And, in the area|region within the heating area|region HR, in the area|region where the heater 12 is not arrange|positioned and heating by the heat|fever from the heater 12 is not performed, only heating by superheated steam is performed.

In addition, in this embodiment, although the area|region where heating by the heat|fever from the heater 12 is performed was arrange|positioned inside the area|region where heating by superheated steam is performed, it does not need to be as it is. The area in which the to-be-processed object 10 is heated by the heat from the heater 12 may be arrange|positioned from the inner side to the outer side of the area|region where the to-be-processed object 10 heating by superheated steam is performed. In this case, the region in which the heating by the superheated steam is performed is arranged inside the region in which the heating is performed by the heat from the heater 12 . And the heating area|region HR is an area|region including the area|region where heating by superheated steam is performed, and turns into an area|region where heating by the heat|fever from the heater 12 is performed.

Moreover, the conveyance mechanism 33 is provided in the heat treatment chamber 11 . The conveying mechanism 33 is provided as a mechanism for conveying the to-be-processed object 10 in the heat treatment chamber 11 . In addition, in this embodiment, the conveying mechanism 33 conveys the to-be-processed object 10 so that the to-be-processed object 10 may be conveyed in the case 10a, that is, so that it may convey the to-be-processed object 10 in the state accommodated in the case 10a, Consists of. The conveyance mechanism 33 is arrange|positioned in the area|region below in the heat processing chamber 11, and is arrange|positioned along the conveyance direction X1 in parallel with the wall surface of the bottom wall 11d above the bottom wall 11d. . The conveyance mechanism 33 is comprised as a mechanism which conveys the to-be-processed object 10 with the mesh belt 34 of endless shape revolving, for example. And the conveyance mechanism 33 conveys the to-be-processed object 10 accommodated in the case 10a arrange|positioned on the upper surface of the mesh belt 34 together with the case 10a as the mesh belt 34 goes around. Consists of.

Further, the endless mesh belt 34 has, for example, a structure in which roller chains are respectively provided on both edges in the width direction, and is formed by a plurality of drive shafts 35 provided with sprockets engaged with the roller chains. It is driven and configured to go around. The plurality of drive shafts 35 are provided so as to be respectively rotated around the axis while being inserted into the mesh belt 34 . The plurality of drive shafts 35 are arranged to extend in parallel to each other, and are arranged to extend along a direction perpendicular to the pair of sidewalls 11a and 11b. Moreover, each drive shaft 35 is rotatably supported with respect to a pair of side walls 11a, 11b. Further, each drive shaft 35 is provided with a pair of sprockets 35a and 35a spaced apart in the axial direction, and each sprocket 35a is attached to each roller chain at both edges of the mesh belt 34 . are interlocked In addition, at least one of the plurality of drive shafts 35 is configured to be rotationally driven by an electric motor (not shown) that operates based on a control command from the control unit 25 . When the drive shaft 35 is rotationally driven by the electric motor, the rotational drive of the drive shaft 35 is transmitted to the mesh belt 34 through the meshing of the sprocket 35a with the roller chain. Then, a winding operation of the mesh belt 34 freely supported by the plurality of drive shafts 35 is performed. When the mesh belt 34 performs a winding operation, the to-be-processed object 10 arrange|positioned on the upper surface of the mesh belt 34 in the state accommodated in the case 10a is conveyed.

[heater]

Referring to FIG. 1 , the heater 12 is provided as a mechanism for heating the heat treatment chamber 11 from the outside, and a plurality of heaters are provided. The plurality of heaters 12 are arranged in a row in series along the longitudinal direction of the heat treatment chamber 11 (that is, along the conveyance direction X1). In addition, in the drawings after FIG. 2 and FIG. 4, illustration of the heater 12 is abbreviate|omitted.

Each heater 12 covers the periphery of the heat treatment chamber 11 and the heating element from the outer side of the heating element (not shown) disposed around the heat treatment chamber 11 and the heat generating element disposed around the heat treatment chamber 11 . It is configured with a heat insulating member (not shown) arranged so as to The heat generating element is arranged so as to heat the pair of side walls 11a and 11b, the ceiling wall 11c, and the bottom wall 11d in the heat treatment chamber 11 from the outside. The heating element includes, for example, a heating element that converts electric energy supplied from a power source not shown in the figure into thermal energy, and is configured to generate heat by energizing the heating element. Moreover, the heat generating element of the heater 12 operates based on the control command from the control part 25, and generates heat. When the heating element of the heater 12 operates and generates heat based on a control command from the control unit 25, the heat from the heating element of the heater 12 causes a pair of sidewalls 11a and 11b of the heat treatment chamber 11, the cloth The barrier 11c and the bottom wall 11d are heated. Thereby, the atmosphere in the heat treatment chamber 11 is heated. And the to-be-processed object 10 conveyed by the heat processing chamber 11 is heated by the atmosphere in the heat processing chamber 11 heated by the heat from the heater 12 while being heated by superheated steam.

[Steam supply part]

1, 2, 4 and 5 , the steam supply unit 13 is installed in the heating region HR of the heat treatment chamber 11 to supply superheated steam into the heat treatment chamber 11 . installed as an instrument. In the heat treatment apparatus 1 illustrated in this embodiment, the water vapor supply part 13 is provided in the center part of the conveyance direction X1 of the to-be-processed object 10 in the heating area|region HR. In addition, the water vapor supply part 13 should just be arrange|positioned in the heating area|region HR, and may be provided in the inlet 31 side or the outlet 32 side rather than the central part of the conveyance direction X1.

The steam supply part 13 is provided with a pair of nozzle parts 38a, 38b which supplies the superheated steam supplied from the steam supply system 14 mentioned later into the heat treatment chamber 11, and is comprised. Each of the pair of nozzle portions 38a and 38b is provided as a member that extends in a cylindrical shape and is closed at both ends in the cylindrical axial direction. A pair of nozzle parts 38a, 38b is mutually opposed in the conveyance direction X1 of the to-be-processed object 10, and is arrange|positioned. And in the conveyance direction X1 of the to-be-processed object 10, the nozzle part 38a is arrange|positioned with respect to the nozzle part 38b at the entrance 31 side, and the nozzle part 38b is the nozzle part 38a. is disposed on the outlet 32 side. Moreover, in this embodiment, the pair of nozzle part 38a, 38b is arrange|positioned in the center part of the conveyance direction X1 in the heating area|region HR in the heat processing chamber 11. FIG. And the nozzle part 38a is arrange|positioned rather than the central position of the conveyance direction X1 in the heating area|region HR, and the inlet part 31 side is arrange|positioned, and the nozzle part 38b is located in the heating area|region HR. It is arrange|positioned at the exit 32 side rather than the center position of the conveyance direction X1. Moreover, each nozzle part 38a, 38b is arrange|positioned in the heat processing chamber 11 in the state which the cylindrical axial direction extends horizontally along the width direction of the heat processing chamber 11. As shown in FIG. In addition, the width direction of the heat treatment chamber 11 is in the longitudinal direction (ie, conveying direction X1) of the heat treatment chamber 11 extending horizontally, and in the height direction (ie, up and down direction) of the heat treatment chamber 11 . It is defined as a direction perpendicular to the

Moreover, each nozzle part 38a, 38b is connected to each water vapor|steam supply piping 42a, 42b of the vapor|steam supply system 14 mentioned later in the substantially central position in the cylindrical axial direction. Moreover, the nozzle part 38a is connected to the water vapor|steam supply piping 42a, and the nozzle part 38b is connected to the water vapor supply piping 42b. Each water vapor supply pipe 42a, 42b penetrates the ceiling wall 11c of the heat processing chamber 11, and is connected to each nozzle part 38a, 38b in the heat processing chamber 11. As shown in FIG. Each water vapor supply pipe 42a, 42b connected to each nozzle part 38a, 38b is being fixed to the ceiling wall 11c in the state which penetrated the ceiling wall 11c. Thereby, in the heat treatment chamber 11, each nozzle part 38a, 38b is supported by the ceiling wall 11c via each water vapor|steam supply piping 42a, 42b.

The inside of each nozzle part 38a, 38b and the inside of each steam supply piping 42a, 42b communicate, and the superheated steam supplied from each steam supply piping 42a, 42b is each nozzle part 38a, 38b. ) is supplied inside. Moreover, the some nozzle hole 39 is formed in each nozzle part 38a, 38b. Each nozzle hole 39 is formed as a through hole opened in a circular shape, for example. In addition, the opening shape of each nozzle hole 39 is not limited to a circular shape, For example, you may form in various shapes, such as a rectangular shape and a slit shape. The plurality of nozzle holes 39 are arranged in a straight line along the cylindrical axis direction in each nozzle portion 38a, 38b, for example, arranged in a row at equal intervals. Moreover, since the cylindrical axial direction of each nozzle part 38a, 38b follows the width direction of the heat processing chamber 11, the some nozzle hole 39 in each nozzle part 38a, 38b is heat-processed. It is arrange|positioned along the width direction of the thread|yarn 11. The superheated steam supplied from each water vapor supply pipe 42a, 42b to each nozzle part 38a, 38b is filled in each nozzle part 38a, 38b, and also from the some nozzle hole 39 to the outside. is taken out When the superheated steam is taken out from the plurality of nozzle holes 39 , the superheated steam is supplied from the respective nozzles 38a and 38b in the heat treatment chamber 11 .

Moreover, in the nozzle part 38a, the some nozzle hole 39 arrange|positioned along the cylindrical axial direction is all opened toward the intermediate position side of a pair of opposing nozzle part 38a, 38b, , is opened toward the outlet 32 side. For this reason, the superheated steam supplied into the heat treatment chamber 11 from the nozzle portion 38a disposed on the inlet 31 side among the pair of nozzle portions 38a and 38b is on the opposite side to the inlet 31 side. It is taken out from the nozzle part 38a toward the outlet 32 side. Moreover, in this embodiment, in the nozzle part 38a, the some nozzle hole 39 is opening toward the center position side of the conveyance direction X1 in the heating area|region HR. In addition, the nozzle part 38a is arrange|positioned rather than the center position of the conveyance direction X1 in the heating area|region HR, and is arrange|positioned at the entrance 31 side, and each nozzle hole 39 of the nozzle part 38a is, It opens toward the outlet 32 side. For this reason, the superheated steam supplied into the heat processing chamber 11 from the nozzle part 38a arrange|positioned rather than the central position of the conveyance direction X1 in the heating area|region HR into the inlet 31 side is the inlet 31. It is taken out from the nozzle part 38a toward the center position side of the conveyance direction X1 in the heating area|region HR from the side.

Moreover, in the nozzle part 38b, the some nozzle hole 39 arrange|positioned along the cylindrical axial direction all opens toward the intermediate position side of a pair of opposing nozzle part 38a, 38b, , is opened toward the inlet 31 side. For this reason, the superheated steam supplied into the heat treatment chamber 11 from the nozzle portion 38b disposed on the outlet 32 side among the pair of nozzle portions 38a and 38b is on the opposite side to the outlet 32 side. It is taken out from the nozzle part 38b toward the inlet 31 side. Moreover, in this embodiment, in the nozzle part 38b, the some nozzle hole 39 is opening toward the center position side of the conveyance direction X1 in the heating area|region HR. Moreover, the nozzle part 38b is arrange|positioned at the outlet 32 side rather than the central position in the conveyance direction X1 in the heating area|region HR, and each nozzle hole 39 of the nozzle part 38b is, It opens toward the inlet 31 side. For this reason, the superheated steam supplied into the heat treatment chamber 11 from the nozzle part 38a arrange|positioned at the exit 32 side rather than the central position of the conveyance direction X1 in the heating area|region HR is the exit 32. It is taken out from the nozzle part 38b toward the center position side of the conveyance direction X1 in the heating area|region HR from the side.

With the above configuration, each of the pair of nozzle portions 38a and 38b is configured to take out the superheated water vapor toward the intermediate position side of the pair of opposing nozzle portions 38a and 38b. Moreover, in this embodiment, the nozzle part 38a is a conveyance direction (in the heating area|region HR) in the heating area|region HR from the entrance 31 side in the central part of the conveyance direction X1 in the heating area|region HR. It is arrange|positioned so that superheated water vapor|steam may be taken out toward the central position side of X1). And the nozzle part 38b is a central part of the conveyance direction X1 in the heating area|region HR. WHEREIN: The center position of the conveyance direction X1 in the heating area|region HR from the exit 32 side. It is arrange|positioned so that superheated water vapor|steam may be taken out toward the side. For this reason, in the conveyance direction X1 of the to-be-processed object 10, a pair of nozzle part 38a, 38b interposes the center position of the conveyance direction X1 in the heating area|region HR. are placed opposite to each other. And each of the pair of nozzle parts 38a, 38b is comprised so that superheated steam may be taken out toward the center position side of the conveyance direction X1 of the to-be-processed object 10 in heating area|region HR. .

[Steam Supply System]

2 , 4 and 5 , the steam supply system 14 is provided as a mechanism for generating superheated steam and supplying the superheated steam to the steam supply unit 13 . And the steam supply system 14 is provided with the superheated steam generation part 40 and the steam supply piping 41, 42a, 42b, and is comprised.

The superheated steam generating unit 40 is provided as a mechanism for generating superheated steam by heating water, and includes a boiler and a superheater. The boiler heats and evaporates water to generate saturated steam having a temperature of about a boiling point, and the superheater further heats the saturated steam generated in the boiler to generate superheated steam. The superheated steam generating unit 40 operates based on a control command from the control unit 25 to generate superheated steam. That is, based on the control command from the control part 25, a boiler and a superheater operate, and superheated steam is produced|generated. When the superheated steam generating unit 40 operates according to a control command from the control unit 25 to generate superheated steam, a pair of steam supplying units 13 is connected through steam supply pipes 41, 42a, and 42b to be described later. Superheated steam is supplied to the nozzle portions 38a and 38b.

The steam supply pipe 41 is connected to the superheated steam generation unit 40 on the upstream end side thereof, and is provided as a piping system for supplying the superheated steam generated by the superheated steam generation unit 40 . Further, the steam supply pipe 41 is connected to the steam supply pipe 42a and the steam supply pipe 42b on the downstream end side thereof. That is, the steam supply pipe 41 is connected to the steam supply pipes 42a and 42b so as to branch in parallel. The steam supply pipe 42a is provided as a piping system connecting the steam supply pipe 41 and the nozzle part 38a, and the superheat generated by the superheated steam generation part 40 is supplied via the steam supply pipe 41. It is comprised so that water vapor|steam may be supplied to the nozzle part 38a. The steam supply pipe 42b is provided as a piping system connecting the steam supply pipe 41 and the nozzle part 38b, and the superheat generated by the superheated steam generation part 40 and supplied via the steam supply pipe 41 It is comprised so that water vapor|steam may be supplied to the nozzle part 38b.

[Water vapor outlet]

FIG. 6 is an enlarged view showing an inlet-side water vapor discharge portion 15a and inlet gas supply portions 36a and 36b described later and their vicinity in the heat treatment chamber 11 of the heat treatment apparatus 1 . Fig. 7 is a schematic cross-sectional view of a part of the heat treatment apparatus 1, Fig. 7 (A) is a view showing a state seen from the line CC line arrow line-of-sight position of Fig. 6, Fig. 7 (B) is Fig. It is a figure which shows the state seen from the line DD line arrow line-of-sight position of 6 . FIG. 8 is an enlarged view showing an outlet side water vapor discharge portion 15b and outlet gas supply portions 37a and 37b described later and their vicinity in the heat treatment chamber 11 of the heat treatment apparatus 1 . Fig. 9 is a schematic cross-sectional view of a part of the heat treatment apparatus 1, Fig. 9 (A) is a view showing a state viewed from the line EE line arrow line-of-sight position in Fig. 8, Fig. 9 (B) is Fig. It is a figure which shows the state seen from the line FF line arrow gaze position of 8.

1 to 3 and 6 to 9 , the water vapor discharge unit 15 is provided as a mechanism for discharging the superheated water vapor in the heat treatment chamber 11 to the outside of the heat treatment chamber 11 . And the water vapor discharge part 15 is provided in the inlet 31 side and the outlet 32 side with respect to the water vapor|steam supply part 13 in the heat processing chamber 11, respectively.

On the inlet 31 side of the heat treatment chamber 11 , an inlet-side water vapor discharge unit 15a is provided as a water vapor discharge unit 15 . At the outlet 32 side of the heat treatment chamber 11 , an outlet-side water vapor discharging unit 15b is provided as the water vapor discharging unit 15 . In the present embodiment, the inlet-side water vapor discharge portion 15a and the outlet-side water vapor discharge portion 15b are disposed in the heating region HR in the heat treatment chamber 11 , and They are respectively arrange|positioned in the area|region in the vicinity of the both ends of the conveyance direction X1. Moreover, in this embodiment, the inlet-side water vapor discharge part 15a is arrange|positioned in the heat processing chamber 11, and is arrange|positioned at the inlet 31 side most among the several heaters 12 lined up along the conveyance direction X1. It is arranged at a position corresponding to the heater 12 . And the outlet side water vapor discharge part 15b is the heater 12 arrange|positioned most at the outlet 32 side among the several heaters 12 lined up along the conveyance direction X1 in the heat processing chamber 11. placed in the corresponding position. In addition, the inlet-side water vapor discharge portion 15a and the outlet-side water vapor discharge portion 15b are each in the vicinity of both ends in the direction parallel to the conveying direction X1 of the heating region HR, respectively. It is arrange|positioned in the area|region on the side of the barrier 11c, ie, the area|region on the side of the upper half in the cross section perpendicular|vertical to the conveyance direction X1 of the heat processing chamber 11.

The inlet-side water vapor discharge portion 15a and the outlet-side water vapor discharge portion 15b have the same configuration and are formed in a hollow box shape extending along the width direction of the heat treatment chamber 11 . Then, each of the inlet-side water vapor discharge portion 15a and the outlet-side water vapor discharge portion 15b has an upper wall 43a extending in an arcuate shape along the ceiling wall 11c in a cross section perpendicular to the conveying direction X1. and a lower wall 43b extending horizontally, and a pair of side walls 43c and 43d extending along a cross section perpendicular to the conveyance direction X1. Accordingly, the hollow region inside each of the inlet-side water vapor discharge portion 15a and the outlet-side water vapor discharge portion 15b is formed by an upper wall 43a, a lower wall 43b, and a pair of side walls 43c and 43d. It is formed as an enclosed arc-shaped dome-shaped hollow area|region.

In addition, a plurality of through holes (not shown) for sucking in the superheated steam are formed in the lower walls 43b of each of the inlet-side water vapor discharge portion 15a and the outlet-side water vapor discharge portion 15b. The superheated steam is sucked in from each of the inlet side steam discharge part 15a and the outlet side steam discharge part 15b and is discharged from the heat treatment chamber 11 .

[Water vapor exhaust system]

2 and 6 to 9 , the steam discharge systems 16a and 16b suck superheated steam from the inlet side steam discharge part 15a and the outlet side steam discharge part 15b to heat treatment chamber 11 . It is installed as a mechanism for discharging superheated steam to the outside of the unit. And the water vapor discharge system 16a, 16b is connected to each of the inlet side water vapor discharge part 15a and the outlet side water vapor discharge part 15b. In addition, the water vapor discharge system 16a is connected to the inlet side water vapor discharge unit 15a, and the superheated steam sucked into the inlet side water vapor discharge unit 15a is sucked into the water vapor discharge system 16a and the heat treatment chamber ( 11) is emitted. And, the water vapor discharge system 16b is connected to the outlet side water vapor discharge unit 15b, and the superheated steam sucked into the outlet side water vapor discharge unit 15b is sucked into the water vapor discharge system 16b, and the heat treatment chamber ( 11) is emitted.

The water vapor discharge system 16a and the water vapor discharge system 16b are configured similarly, and both are provided with the water vapor discharge pipe 44 and the ejector 45, and are comprised.

Each water vapor discharge pipe 44 of the water vapor discharge systems 16a and 16b penetrates the ceiling wall 11c of the heat treatment chamber 11 , and the inlet side water vapor discharge portion 15a and the outlet side water vapor in the heat treatment chamber 11 . It is connected to each of the discharge parts 15b. Each of the inside of each of the inlet-side water vapor discharge unit 15a and the outlet-side water vapor discharge unit 15b and each water vapor discharge pipe 44 communicate with each other, and the inlet side water vapor discharge unit 15a and the outlet side water vapor discharge unit 15b communicate with each other. The superheated steam sucked in each of is sucked into each steam discharge pipe 44 . Moreover, each water vapor discharge pipe 44 connected to each of the inlet side water vapor discharge part 15a and the outlet side water vapor discharge unit 15b penetrates the ceiling wall 11c and is fixed to the ceiling wall 11c. has been Thereby, in the heat treatment chamber 11, each of the inlet side water vapor discharge part 15a and the outlet side water vapor discharge part 15b is supported by the ceiling wall 11c via each water vapor discharge pipe 44. .

Each ejector 45 of the water vapor discharge system 16a, 16b has an inlet side water vapor discharge part 15a and an outlet side water vapor discharge part 15b in each water vapor discharge pipe 44 with respect to each water vapor discharge pipe 44 . ) at an end opposite to the end connected to each of the ). Then, each ejector 45 generates a negative pressure using a high-pressure fluid, so that superheated steam is discharged from each of the inlet side water vapor discharge unit 15a and the outlet side water vapor discharge unit 15b through each water vapor discharge pipe 44 . It is provided as a mechanism for suctioning and discharging the suctioned superheated steam to the outside.

Each ejector 45 of the water vapor discharge system 16a, 16b has, for example, a nozzle to which compressed air as a high-pressure fluid is supplied, a body covering the periphery of the nozzle, and a discharge port that communicates with the body and opens to the outside It is configured with a diffuser installed. The nozzle is configured such that compressed air is supplied from a compressed air supply source (not shown). Moreover, the solenoid valve which opens and closes based on the control command from the control part 25 mentioned later is provided in the upstream of a nozzle, and supply/discharge of compressed air to a nozzle is controlled. The body is connected to each water vapor discharge pipe 44 while partitioning a region around the downstream end of the nozzle as a negative pressure generating region. In addition, a portion of the body connected to the downstream end of each water vapor discharge pipe 44 is provided with a solenoid valve that opens and closes based on a control command from the control unit 25 , and operates the ejector 45 to operate each water vapor discharge pipe When the suction operation of the superheated steam through (44) is performed, the solenoid valve is opened.

When the binder is discharged by the inlet water vapor discharge unit 15a and the outlet water vapor discharge unit 15b, on the basis of a control command from the control unit 25, each ejector ( 16a, 16b) of the water vapor discharge system The solenoid valve of 45 is opened, and the ejector 45 operates. That is, while the solenoid valve on the upstream side of the nozzle is opened, the solenoid valve provided in the part connected to the downstream end of each water vapor discharge pipe 44 in a body is opened, and each ejector 45 operates. When each ejector 45 operates, compressed air is blown out from the nozzle at high speed into the body, thereby generating a negative pressure in the body, and thereby, through each water vapor discharge pipe 44 , the inlet side water vapor discharge portion 15a and the outlet side The superheated water vapor inside each of the water vapor discharge parts 15b is sucked. Superheated steam inside each of the inlet-side water vapor discharge unit 15a and the outlet-side water vapor discharge unit 15b is sucked into each water vapor discharge pipe 44, so that the inlet side water vapor discharge unit 15a and the outlet side water vapor discharge unit ( The superheated water vapor in the heat treatment chamber 11 is sucked in from the plurality of through holes provided in each lower wall 43b of 15b). Superheated steam sucked into each of the inlet-side water vapor discharge portion 15a and the outlet-side water vapor discharge portion 15b flows to the body of each ejector 45 through each water vapor discharge pipe 44, and from the nozzle in the body It is mixed with the blown compressed air. And the mixed gas in the state in which superheated steam and compressed air were mixed flows downstream in the inside of a diffuser, and is discharged|emitted to the outside from the discharge port of a diffuser. In this way, the superheated steam in the heat treatment chamber 11 is sucked from each of the inlet side steam discharge part 15a and the outlet side steam discharge part 15b, and passes through each steam discharge pipe 44 and each ejector 45. discharged to the outside

[Gas supply part]

1 to 3 and 6 to 9 , the gas supply unit 17 is provided as a mechanism for supplying at least one of an inert gas and air into the heat treatment chamber 11 . That is, the gas supply unit 17 is a mechanism for supplying an inert gas into the heat treatment chamber 11 , or as a mechanism for supplying air into the heat treatment chamber 11 , or as a mechanism for supplying an inert gas and air into the heat treatment chamber 11 . It is provided as a mechanism for supplying a mixed gas of In addition, this embodiment exemplifies a configuration in which the gas supply unit 17 is configured as a mechanism for supplying an inert gas into the heat treatment chamber 11 . The inert gas supplied by the gas supply unit 17 into the heat treatment chamber 11 is, for example, nitrogen gas. In addition, as an inert gas other than nitrogen gas supplied by the gas supply part 17, helium and argon gas can be illustrated, for example.

In the heat treatment apparatus 1 , as the gas supply unit 17 , inlet side gas supply units 36a and 36b and outlet side gas supply units 37a and 37b are provided. In the heat treatment chamber 11 , the inlet gas supply units 36a and 36b are provided on the inlet 31 side with respect to the water vapor supply unit 13 , and the outlet gas supply units 37a and 37b include the water vapor supply unit 13 . ) is provided on the outlet 32 side.

The inlet gas supply parts 36a and 36b are provided as a pair, and in the heat treatment chamber 11, the inlet side steam discharge part 15a provided on the inlet 31 side with respect to the steam supply part 13 is more inlet ( 31) is installed on the side. Each of the pair of inlet gas supply parts 36a and 36b is provided as a member which extends, for example, in a cylindrical shape and is closed at both ends in the cylindrical axial direction. In this embodiment, the pair of inlet-side gas supply units 36a and 36b are arranged in a region near the end of the inlet 31 side in a direction parallel to the conveyance direction X1 of the heating region HR. has been In addition, the pair of inlet gas supply parts 36a and 36b are arranged in a row along the conveyance direction X1, and the inlet gas supply part 36a is connected to the inlet side gas supply part 36b with respect to the inlet ( 31) is placed on the side. Moreover, each inlet side gas supply part 36a, 36b is arrange|positioned in the heat processing chamber 11 with the cylindrical axial direction extending horizontally along the width direction of the heat processing chamber 11. FIG.

Moreover, each inlet side gas supply part 36a, 36b is each branch pipe 48a, 48b of the gas supply system 18 mentioned later which supplies an inert gas in the substantially central position in the cylindrical axial direction. are connecting In addition, the inlet gas supply part 36a is connected to the branch pipe 48a, and the inlet gas supply part 36b is connected to the branch pipe 48b. Each branch pipe 48a, 48b penetrates the ceiling wall 11c of the heat treatment chamber 11 and is connected to each inlet-side gas supply part 36a, 36b in the heat treatment chamber 11 . Each branch pipe 48a, 48b connected to each inlet side gas supply part 36a, 36b is fixed to the ceiling wall 11c in the state which penetrated the ceiling wall 11c. Thereby, in the heat processing chamber 11, each inlet side gas supply part 36a, 36b is supported by the ceiling wall 11c via each branch pipe 48a, 48b.

The inside of each inlet gas supply part 36a, 36b and the inside of each branch pipe 48a, 48b communicate, and the inert gas supplied from each branch pipe 48a, 48b is each inlet gas supply part 36a. , 36b) is supplied inside. In addition, a plurality of nozzle holes (not shown) are formed in each of the inlet-side gas supply portions 36a and 36b. The plurality of nozzle holes are arranged in a straight line along the cylindrical axial direction in each inlet-side gas supply part 36a, 36b, for example, arranged in a row at equal intervals. Moreover, in each inlet side gas supply part 36a, 36b, all the some nozzle hole arrange|positioned along the cylindrical axial direction is opened downward. For this reason, the inert gas is blown downward from each inlet side gas supply part 36a, 36b.

According to the above configuration, the inert gas supplied from each branch pipe 48a, 48b to each inlet gas supply part 36a, 36b is filled in each inlet gas supply part 36a, 36b, and a plurality of It is taken out from the nozzle hole of the downward direction to the outside. Then, the inert gas is taken out from the plurality of nozzle holes, so that the inert gas is supplied into the heat treatment chamber 11 from the respective inlet gas supply units 36a and 36b. The inert gas is supplied from the inlet gas supply units 36a and 36b provided on the inlet 31 side rather than the inlet water vapor discharge unit 15a, so that heat treatment is performed between the inlet 31 and the inlet water vapor discharge unit 15a. The atmosphere in the chamber 11 is separated.

The outlet gas supply parts 37a and 37b are provided as a pair, and in the heat treatment chamber 11, the outlet side vapor discharge part 15b provided on the outlet 32 side with respect to the steam supply part 13 is more exit ( 32) is installed on the side. Each of the pair of outlet gas supply parts 37a and 37b is provided as a member which extends in a cylindrical shape and is closed at both ends in the cylindrical axial direction, for example. The pair of outlet-side gas supply units 37a and 37b are, in the present embodiment, disposed in a region in the vicinity of an end portion on the outlet 32 side in a direction parallel to the conveyance direction X1 of the heating region HR. has been The pair of outlet gas supply units 37a and 37b are arranged in a row along the conveyance direction X1, and the outlet gas supply unit 37b is connected to the outlet gas supply unit 37a with respect to the outlet ( 32) is placed on the side. Moreover, each outlet gas supply part 37a, 37b is arrange|positioned in the heat processing chamber 11 with the cylindrical axial direction extending horizontally along the width direction of the heat processing chamber 11. FIG.

Moreover, each outlet gas supply part 37a, 37b is in the substantially central position in the cylindrical axial direction, In each branch pipe 48c, 48d of the gas supply system 18 which supplies an inert gas to be mentioned later. are connecting In addition, the outlet gas supply part 37a is connected to the branch pipe 48c, and the outlet gas supply part 37b is connected to the branch pipe 48d. Each branch pipe 48c, 48d passes through the ceiling wall 11c of the heat treatment chamber 11 and is connected to each outlet gas supply part 37a, 37b in the heat treatment chamber 11 . Each branch pipe 48c, 48d connected to each outlet gas supply part 37a, 37b is fixed to the ceiling wall 11c in the state which penetrated the ceiling wall 11c. Thereby, in the heat treatment chamber 11, each outlet gas supply part 37a, 37b is supported by the ceiling wall 11c via each branch pipe 48c, 48d.

The inside of each outlet gas supply part 37a, 37b and the inside of each branch pipe 48c, 48d communicate with each other, and the inert gas supplied from each branch pipe 48c, 48d is each outlet gas supply part 37a. , 37b) is supplied inside. In addition, a plurality of nozzle holes (not shown) are formed in each of the outlet gas supply portions 37a and 37b. The plurality of nozzle holes are arranged in a straight line along the cylindrical axis direction in each of the outlet gas supply units 37a and 37b, and are arranged in a row at equal intervals, for example. Moreover, in each outlet side gas supply part 37a, 37b, all the some nozzle hole arrange|positioned along the cylindrical axial direction is opened downward. For this reason, in each outlet gas supply part 37a, 37b, an inert gas is taken out toward the downward direction.

With the above configuration, the inert gas supplied from each branch pipe 48c, 48d to each outlet gas supply unit 37a, 37b is filled in each outlet gas supply unit 37a, 37b, and a plurality of It is taken out from the nozzle hole of the downward direction to the outside. Then, the inert gas is taken out from the plurality of nozzle holes, so that the inert gas is supplied into the heat treatment chamber 11 from the respective outlet gas supply units 37a and 37b. An inert gas is supplied from the outlet gas supply units 37a and 37b provided on the outlet 32 side rather than the outlet water vapor discharge unit 15b, whereby heat treatment is performed between the outlet 32 and the outlet water vapor discharge unit 15b. The atmosphere in the chamber 11 is separated.

[Gas supply system]

2 and 6 to 9 , the gas supply system 18 is provided as a mechanism for supplying an inert gas to the gas supply unit 17 . The gas supply system 18 includes an inert gas supply source 46, a common pipe 47, branch pipes 48a, 48b, 48c, 48d, and gas supply valves 49a, 49b, 49c, 49d, Consists of.

The inert gas supply source 46 is provided as a supply source for supplying an inert gas having a high pressure equal to or higher than atmospheric pressure, and is configured as a container such as a tank or a cylinder in which an inert gas compressed to a high pressure equal to or higher than atmospheric pressure is stored. The common pipe 46a is connected to the inert gas supply source 46 and is provided as a piping system for supplying high-pressure inert gas from the inert gas supply source 46 to the branch pipes 48a, 48b, 48c, 48d. .

The branch pipes 48a , 48b , 48c , and 48d branch from the common pipe 47 , and the inlet gas supply parts 36a and 36b and the outlet gas supply part 37a of the common pipe 47 and the gas supply part 17 . , 37b) is provided as a piping system for connecting them. The four branch pipes 48a, 48b, 48c, and 48d branch in parallel from the common pipe 47 . And, each branch pipe 48a, 48b is respectively connected to each inlet side gas supply part 36a, 36b, each branch pipe 48c, 48d is respectively connected to each outlet gas supply part 37a, 37b. are doing Specifically, the branch pipe 48a connects the common pipe 47 and the inlet gas supply part 36a, and is configured to supply an inert gas to the inlet gas supply part 36a. The branch pipe 48b connects the common pipe 47 and the inlet gas supply part 36b, and is configured to supply an inert gas to the inlet gas supply part 36b. The branch pipe 48c connects the common pipe 47 and the outlet gas supply part 37a, and is configured to supply an inert gas to the outlet gas supply part 37a. The branch pipe 48d connects the common pipe 47 and the outlet gas supply part 37b, and is configured to supply an inert gas to the outlet gas supply part 37b.

Each of the gas supply valves 49a, 49b, 49c, and 49d is provided as a solenoid valve, and is provided in each of the branch pipes 48a, 48b, 48c, and 48d. In addition, the gas supply valve 49a is installed in the branch pipe 48a, the gas supply valve 49b is installed in the branch pipe 48b, and the gas supply valve 49c is installed in the branch pipe 48c, A gas supply valve 49d is provided in the branch pipe 48d. Each gas supply valve 49a, 49b, 49c, 49d is comprised so that the state of each branch pipe 48a, 48b, 48c, 48d may be switched between an open state and a closed state by performing an opening/closing operation. Each of the gas supply valves 49a, 49b, 49c, and 49d operates based on a control command from the control unit 25 . Each gas supply valve 49a, 49b, 49c, 49d performs an opening operation based on a control command from the control unit 25, and the state of each branch pipe 48a, 48b, 48c, 48d is switched to an open state. At this time, the inert gas supply source 46, each inlet gas supply part 36a, 36b, and each outlet gas supply part 37a, 37b are connected to the common pipe 47 and each branch pipe 48a, 48b, 48c, 48d. communicate through Thereby, the inert gas supplied from the inert gas supply source 46 passes through the common pipe 47 and each branch pipe 48a, 48b, 48c, 48d to each inlet side gas supply part 36a, 36b and each outlet side. It is supplied to the gas supply parts 37a and 37b. Then, an inert gas is supplied into the heat treatment chamber 11 from each inlet gas supply part 36a, 36b and each outlet gas supply part 37a, 37b. Further, on the basis of the control command from the control unit 25, each gas supply valve 49a, 49b, 49c, 49d performs a closing operation, and the state of each branch pipe 48a, 48b, 48c, 48d is a closed state. When switching is performed and communication is interrupted, the inert gas is not supplied to the heat treatment chamber 11 .

[Inlet side exhaust, outlet side exhaust]

1 to 3 and 6 to 9 , the inlet side exhaust unit 19 and the outlet side exhaust unit 20 exhaust gas in the heat treatment chamber 11 to the outside of the heat treatment chamber 11 . It is installed as a tool for

The inlet-side exhaust section 19 is provided between the pair of inlet-side gas supply sections 36a and 36b in the heat treatment chamber 11 . That is, the inlet side exhaust unit 19 is provided in the region between the inlet side gas supply unit 36a and the inlet side gas supply unit 36b in the heat treatment chamber 11 . For this reason, in the region on the inlet 31 side rather than the inlet water vapor discharge unit 15a in the heat treatment chamber 11, from the inlet side water vapor discharge unit 15a side toward the inlet 31 side, the inlet side The water vapor discharge part 15a, the inlet side gas supply part 36b, the inlet side exhaust part 19, and the inlet side gas supply part 36a are arrange|positioned in this order. In addition, the inlet side exhaust section 19 is a region on the ceiling wall 11c side in the region between the pair of inlet gas supply sections 36a and 36b in the heat treatment chamber 11 , that is, heat treatment. It is arrange|positioned in the area|region on the side of the upper half in the cross section perpendicular|vertical to the conveyance direction X1 of the thread|yarn 11.

The outlet side exhaust unit 20 is provided between the pair of outlet side gas supply units 37a and 37b in the heat treatment chamber 11 . That is, the outlet side exhaust unit 20 is provided in the region between the outlet side gas supply unit 37a and the outlet side gas supply unit 37b in the heat treatment chamber 11 . For this reason, in the area|region on the side of the outlet 32 rather than the outlet side steam discharge part 15b in the heat treatment chamber 11, from the exit side steam discharge part 15b side toward the outlet 32 side, the exit side The water vapor discharge part 15b, the outlet side gas supply part 37a, the exit side exhaust part 20, and the exit side gas supply part 36b are arrange|positioned in this order. Moreover, the outlet side exhaust part 20 is the area|region on the side of the ceiling wall 11c in the area|region between a pair of outlet gas supply parts 37a, 37b in the heat processing chamber 11, ie, heat processing. It is arrange|positioned in the area|region on the side of the upper half in the cross section perpendicular|vertical to the conveyance direction X1 of the thread|yarn 11.

The inlet side exhaust section 19 and the outlet side exhaust section 20 have the same configuration and are formed in a hollow box shape extending along the width direction of the heat treatment chamber 11 . And, each of the inlet side exhaust section 19 and the outlet side exhaust section 20 has an upper wall 50a extending in an arcuate shape along the ceiling wall 11c in a cross section perpendicular to the conveying direction X1; A lower wall 50b extending horizontally and a pair of side walls 50c and 50d extending along a cross section perpendicular to the conveyance direction X1 are provided and configured. Thereby, the hollow region inside each of the inlet side exhaust section 19 and the outlet side exhaust section 20 is an arc surrounded by the upper wall 50a, the lower wall 50b, and the pair of side walls 50c and 50d. It is formed as a dome-shaped hollow region of the shape.

In addition, a plurality of through holes (not shown) for sucking in the gas in the heat treatment chamber 11 are formed in the lower walls 50b of each of the inlet exhaust portion 19 and the outlet exhaust portion 20 . The gas in the heat treatment chamber 11 is sucked in from each of the inlet side exhaust portion 19 and the outlet side exhaust portion 20 , and is discharged from the heat treatment chamber 11 . Further, from the inlet side exhaust unit 19, the inert gas supplied into the heat treatment chamber 11 from the inlet gas supply unit 36b, and the inert gas supplied into the heat treatment chamber 11 from the inlet side gas supply unit 36a, are supplied into the inlet ( 31) The inert gas flowing to the side opposite to the side and some superheated water vapor flowing toward the inlet 31 without being discharged from the inlet water vapor discharge unit 15a are sucked in as gas in the heat treatment chamber 11 and discharged. . Further, in the outlet side exhaust unit 20 , the inert gas supplied into the heat treatment chamber 11 from the outlet side gas supply unit 37a and the inert gas supplied into the heat treatment chamber 11 from the outlet side gas supply unit 37b are supplied into the heat treatment chamber 11 at the outlet 32 . ) side, the inert gas flowing to the opposite side and the slight superheated steam flowing toward the outlet 32 without being discharged from the outlet side water vapor discharge unit 15b are sucked in as gas in the heat treatment chamber 11 and discharged.

[Exhaust system]

2 and 6 to 9 , the exhaust systems 21a and 21b suck the gas in the heat treatment chamber 11 from the inlet side exhaust 19 and the outlet side exhaust 20 , and the inhaled It is provided as a mechanism for exhausting gas to the outside of the heat treatment chamber 11 . And the exhaust system 21a, 21b is connected to each of the inlet side exhaust part 19 and the outlet side exhaust part 20. As shown in FIG. In addition, the exhaust system 21a is connected to the inlet exhaust part 19, and the gas in the heat treatment chamber 11 sucked into the inlet exhaust part 19 is sucked into the exhaust system 21a and the heat treatment chamber. It is discharged from (11). And, the exhaust system 21b is connected to the outlet side exhaust unit 20, and the gas in the heat treatment chamber 11 sucked into the outlet side exhaust unit 20 is sucked into the exhaust system 21b and the heat treatment chamber. It is discharged from (11).

The exhaust system 21a and the exhaust system 21b are configured similarly, and both are configured with the gas exhaust pipe 51 and the ejector 52 .

Each gas exhaust pipe 51 of the exhaust systems 21a and 21b passes through the ceiling wall 11c of the heat treatment chamber 11, and an inlet side exhaust 19 and an outlet side exhaust portion in the heat treatment chamber 11 ( 20) is connected to each. Each gas exhaust pipe 51 communicates with the inside of each of the inlet side exhaust section 19 and the outlet side exhaust section 20 , and is sucked into each of the inlet side exhaust section 19 and the outlet side exhaust section 20 . The used gas is sucked into each gas exhaust pipe 51 . Moreover, each gas exhaust pipe 51 connected to each of the inlet side exhaust part 19 and the outlet side exhaust part 20 penetrates the ceiling wall 11c and is fixed to the ceiling wall 11c. . As a result, in the heat treatment chamber 11 , each of the inlet side exhaust section 19 and the outlet side exhaust section 20 is supported by the ceiling wall 11c via each gas exhaust pipe 51 .

Each ejector 52 of the exhaust systems 21a and 21b is, with respect to each gas exhaust pipe 51 , each of the inlet side exhaust section 19 and the outlet side exhaust section 20 of each gas exhaust pipe 51 . It is connected in the edge part on the opposite side to the edge part connected to. Then, each ejector 52 generates a negative pressure using a high-pressure fluid, thereby sucking gas from each of the inlet side exhaust unit 19 and the outlet side exhaust unit 20 through each gas exhaust pipe 51, It is also provided as a mechanism for discharging the sucked gas to the outside. Each ejector 52 of the exhaust systems 21a and 21b is configured similarly to each ejector 45 of the water vapor exhaust systems 16a and 16b. That is, each ejector 52 includes a nozzle to which compressed air as a high-pressure fluid is supplied, a body covering the periphery of the nozzle, and a diffuser communicating with the body and provided with an outlet opening to the outside. Then, the solenoid valve provided on the upstream side of the nozzle and the portion connected to the downstream end of the gas exhaust pipe 51 in the body opens and closes based on a control command from the control unit 25 to be described later, whereby the ejector 52 is operated. This is controlled.

When the gas in the heat treatment chamber 11 is discharged by the inlet exhaust portion 19 and the outlet exhaust portion 20 , based on a control command from the control unit 25 , the exhaust systems 21a and 21b are The solenoid valve of each ejector 52 is opened, and the ejector 52 operates. That is, while the solenoid valve on the upstream side of the nozzle is opened, the solenoid valve provided in the part connected to the downstream end of each gas exhaust pipe 51 in a body is opened, and each ejector 52 operates. As each ejector 52 operates, the gas inside each of the inlet side exhaust portion 19 and the outlet side exhaust portion 20 is sucked through each gas exhaust pipe 51 . Each gas of the inlet side exhaust portion 19 and the outlet side exhaust portion 20 is sucked into each gas exhaust pipe 51, so that each lower wall ( The gas in the heat treatment chamber 11 is sucked in from a plurality of through holes provided in 50b). The gas sucked into each of the inlet side exhaust section 19 and the outlet side exhaust section 20 flows to the body of each ejector 52 through each gas exhaust pipe 51, and is mixed with compressed air in the body. It is discharged from the discharge port of the diffuser of each ejector 52 to the outside. In this way, the gas in the heat treatment chamber 11 is sucked in from each of the inlet side exhaust section 19 and the outlet side exhaust section 20 and discharged to the outside through each gas exhaust pipe 51 and each ejector 52 . do.

[Partition board]

1 to 9, a plurality of partition plates 22 are provided, and in this embodiment, as a plurality of partition plates 22, partition plates 22a, 22b, 22c, 22d, 22e, 22f; 22g, 22h, 22i, 22j) are installed. The plurality of partition plates 22 ( 22a - j ) are arranged along the conveyance direction X1 in the heat treatment chamber 11 .

Each partition plate 22 (22a-j) is provided as a plate-shaped member which partially blocks only the upper half in the cross section perpendicular to the conveyance direction X1 of the heat processing chamber 11. As shown in FIG. Moreover, each partition plate 22 (22a-j) is arrange|positioned along the ceiling wall 11c, and the edge part of the upper end is fixed with respect to the ceiling wall 11c. And each partition plate 22 (22a-j) is provided so that it may spread along the cross section perpendicular to the conveyance direction X1 of the heat processing chamber 11 in the area of the upper half in the heat processing chamber 11, have. Since each partition plate 22 (22a-j) is provided as mentioned above, the gas in the direction parallel to the conveyance direction X1 of the to-be-processed object 10 in the heat processing chamber 11 is carried out. It is configured to partially regulate the flow. In addition, in this embodiment, each partition plate 22 (22a-j) regulates the flow of gas in the area|region on the upper half side in the cross section perpendicular to the conveyance direction X1 of the heat processing chamber 11, , is configured to allow the flow of gas in the region on the lower half side.

2, 3, 6, and 7, the partition plates 22a and 22b among the plurality of partition plates 22 are the entrance-side partition plates 22a and 22b in the present embodiment. installed. The inlet-side partition plates 22a and 22b are provided between each of the pair of inlet-side gas supply portions 36a and 36b and the inlet-side exhaust portion 19 , respectively. More specifically, the inlet-side partition plate 22a is provided between the inlet-side gas supply portion 36a and the inlet-side exhaust portion 19 , and is disposed on the inlet 31 side with respect to the inlet-side exhaust portion 19 . are placed next to each other. In addition, the inlet-side partition plate 22b is provided between the inlet-side exhaust section 19 and the inlet-side gas supply section 36b, and is adjacent to the inlet-side exhaust section 19 on the outlet 32 side. is placed.

With the above arrangement, in the region near the inlet gas supply parts 36a and 36b in the heat treatment chamber 11, from the inlet 31 side toward the outlet 32 side, the inlet gas supply unit ( 36a), the inlet-side partition plate 22a, the inlet-side exhaust section 19, the inlet-side partition plate 22b, and the inlet-side gas supply section 36b are arranged in this order. In addition, the inlet-side partition plates 22a and 22b are located in the vicinity of the inlet-side gas supply portions 36a and 36b in the transport direction X1 of the object 10 in the heat treatment chamber 11 and It is comprised so that the flow of gas in a parallel direction may be partially regulated.

In addition, with reference to FIGS. 2, 3, 6, and 7 , the partition plates 22c and 22d among the plurality of partition plates 22 are, in the heat treatment chamber 11, an inlet-side water vapor discharge part 15a. is placed in the vicinity of Moreover, the partition plates 22c and 22d are arrange|positioned on both sides in the conveyance direction X1 with respect to the inlet-side water vapor discharge part 15a. More specifically, the partition plate 22c is provided between the inlet gas supply part 36b and the steam discharge part 15a, and is adjacent to each other on the inlet 31 side with respect to the inlet steam discharge part 15a. is placed. Moreover, the partition plate 22d is arrange|positioned adjacent to each other on the outlet 32 side with respect to the inlet-side water vapor discharge part 15a.

In addition, with reference to FIGS. 2, 4, and 5 , among the plurality of partition plates 22 , partition plates 22e and 22f are a pair of water vapor supply units 13 in the heat treatment chamber 11 . It is provided between the nozzle parts 38a and 38b. Moreover, between the partition plate 22e and the partition plate 22f, the binder discharge part 23 mentioned later is arrange|positioned. In addition, the partition plate 22e is disposed adjacent to each other on the side of the inlet 31 with respect to the binder discharge part 23, and the partition plate 22f is disposed on the side of the outlet 32 with respect to the binder discharge part 23. are placed next to each other.

In addition, with reference to FIGS. 2, 3, 8, and 9 , the partition plates 22g and 22h among the plurality of partition plates 22 are, in the heat treatment chamber 11, an outlet side water vapor discharge part 15b. is placed in the vicinity of Moreover, the partition plates 22g and 22h are arrange|positioned on both sides in the conveyance direction X1 with respect to the exit side water vapor discharge part 15b. More specifically, the partition plates 22g are arranged adjacent to each other on the inlet 31 side with respect to the outlet water vapor discharge portion 15b. In addition, the partition plate 22h is provided between the water vapor discharge unit 15b and the outlet gas supply unit 37a, and is disposed adjacent to each other on the outlet 32 side with respect to the outlet side water vapor discharge unit 15b. have.

2, 3, 8, and 9, the partition plates 22i and 22j among the plurality of partition plates 22 are the exit-side partition plates 22i and 22j in the present embodiment. installed. The outlet-side partition plates 22i and 22j are provided between each of the pair of outlet-side gas supply units 37a and 37b and the outlet-side exhaust unit 20 , respectively. More specifically, the outlet-side partition plate 22i is provided between the outlet-side gas supply portion 37a and the outlet-side exhaust portion 20 , and is disposed on the outlet 32 side with respect to the outlet-side exhaust portion 20 . are placed next to each other. In addition, the outlet partition plate 22j is provided between the outlet exhaust part 20 and the outlet gas supply part 37b, and is adjacent to each other on the outlet 32 side with respect to the outlet exhaust part 20. is placed.

According to the above arrangement, in the region in the vicinity of the outlet gas supply parts 37a and 37b in the heat treatment chamber 11, from the inlet 31 side toward the outlet 32 side, the outlet gas supply unit ( 37a), the exit-side partition plate 22i, the exit-side exhaust part 20, the exit-side partition plate 22j, and the exit-side gas supply part 37b are arranged in this order. And, the exit-side partition plates 22i and 22j are in the vicinity of the exit-side gas supply parts 37a and 37b in the conveyance direction X1 of the object 10 in the heat treatment chamber 11 and It is comprised so that the flow of gas in a parallel direction may be partially regulated.

[Binder outlet]

1 , 2 , 4 and 5 , the binder discharging unit 23 heats the vaporized binder generated from the object 10 when the sintering treatment is performed in the heat treatment apparatus 1 . It is provided as a mechanism for discharging to the outside of the chamber 11 . The binder discharge unit 23 is used to discharge the binder generated in a large amount, for example, in the case where the binder is generated in a large amount from the object 10 during the sintering treatment in the heat treatment apparatus 1 . do.

The binder discharge unit 23 is disposed between the partition plate 22e and the partition plate 22f in the heat treatment chamber 11, and is located at a central position in the conveying direction X1 in the heating region HR. is placed. The partition plates 22e and 22f are arranged between a pair of nozzle parts 38a and 38b of the water vapor supply part 13, and are partition plates ( 22e) is disposed, and a partition plate 22f is disposed on the outlet 32 side. For this reason, in this embodiment, in the center part of the conveyance direction X1 in the heating area|region HR, toward the outlet 32 side from the inlet 31 side, the nozzle part 38a, the partition plate ( 22e), the binder discharge part 23, the partition plate 22f, and the nozzle part 38b are provided in a line in this order. Moreover, the binder discharge part 23 is the area|region on the side of the ceiling wall 11c in the area|region between the partition boards 22e, 22f in the heat processing chamber 11, ie, conveying the heat processing chamber 11. It is arrange|positioned in the area|region on the upper half side in the cross section perpendicular|vertical to the direction X1.

The binder discharge part 23 is formed in the shape of a hollow box extending along the width direction of the heat treatment chamber 11 . And, the binder discharge part 23 has an upper wall 23a extending in an arcuate shape along the ceiling wall 11c in a cross section perpendicular to the conveying direction X1, a lower wall 23b extending horizontally, and conveying A pair of side walls 23c and 23d extending along a cross section perpendicular to the direction X1 are provided. Thereby, the hollow area in the binder discharge part 23 is formed as an arc-shaped dome-shaped hollow area|region surrounded by the upper wall 23a, the lower wall 23b, and a pair of side walls 23c, 23d. In addition, a plurality of through holes (not shown) for sucking the binder are formed in the lower wall 23b of the binder discharging part 23 . In addition, when the binder is sucked from the binder discharge unit 23 and discharged from the heat treatment chamber 11 , the binder is sucked into the binder discharge unit 23 and discharged together with the gas in the atmosphere in the heat treatment chamber 11 . That is, as the gas containing a high concentration of the binder in the atmosphere in the heat treatment chamber 11 is sucked into the binder discharge unit 23 , the binder is sucked into the binder discharge unit 23 and discharged from the heat treatment chamber 11 .

In addition, the binder discharge unit 23 is a binder discharge system 53 for sucking a gas containing a large amount of binder from the binder discharge unit 23 and discharging the gas containing the binder to the outside of the heat treatment chamber 11 . connected. The binder discharge system 53 is provided with the binder discharge pipe 54 and the ejector 55, and is comprised.

The binder discharge pipe 54 penetrates the ceiling wall 11c of the heat treatment chamber 11 and is connected to the binder discharge part 23 in the heat treatment chamber 11 . The inside of the binder discharge part 23 and the binder discharge pipe 54 communicate with each other, and the gas containing the binder sucked into the binder discharge part 23 is sucked into the binder discharge pipe 54 . Moreover, the binder discharge pipe 54 connected to the binder discharge part 23 is being fixed to the ceiling wall 11c in the state which penetrated the ceiling wall 11c. Thereby, in the heat treatment chamber 11 , the binder discharge part 23 is supported by the ceiling wall 11c via the binder discharge pipe 53 .

The ejector 55 is connected to the binder discharge pipe 54 at an end opposite to the end connected to the binder discharge unit 23 . And, the ejector 55, by generating a negative pressure using a high-pressure fluid, suction the gas containing the binder from the binder discharge unit 23 through the binder discharge pipe 54, and also discharge the sucked gas to the outside installed as an instrument. The ejector 55 of the binder discharge system 53 is configured similarly to the ejector 45 of the water vapor discharge system 16a, 16b. That is, the ejector 55 includes a nozzle to which compressed air as a high-pressure fluid is supplied, a body covering the periphery of the nozzle, and a diffuser communicating with the body and provided with an outlet opening to the outside. Then, the solenoid valve provided on the upstream side of the nozzle and the portion connected to the downstream end of the binder discharge pipe 54 in the body opens and closes based on a control command from the control unit 25 to be described later, thereby operating the ejector 55 . This is controlled.

When the binder is discharged by the binder discharging unit 23 , based on a control command from the control unit 25 , the solenoid valve of the ejector 55 is opened, and the ejector 55 operates. That is, while the solenoid valve on the upstream side of the nozzle is opened, the solenoid valve provided in the part connected to the downstream end of the binder exhaust pipe 54 in a body is opened, and the ejector 55 operates. As the ejector 55 operates, the gas in the binder discharge unit 23 is sucked through the binder exhaust pipe 54 . When the gas of the binder discharge unit 23 is sucked into the binder exhaust pipe 54 , the binder-containing gas in the heat treatment chamber 11 is discharged from the plurality of through holes provided in the lower wall 23b of the binder exhaust unit 23 . is inhaled The gas containing the binder sucked into the binder exhaust part 23 flows to the body of the ejector 55 through the binder exhaust pipe 54 , and is mixed with the compressed air blown out from the nozzle in the body of the ejector 55 . It is discharged from the outlet of the diffuser to the outside. In this way, the gas containing the binder in the heat treatment chamber 11 is sucked in from the binder discharge unit 23 and discharged to the outside through the binder exhaust pipe 54 and the ejector 55 .

[Gas Curtain Department]

1 and 3 , the gas curtain unit 24 has an inert gas at the end of the inlet 31 side and the end at the outlet 32 side in the heat treatment chamber 11, in which the inert gas spreads in a curtain shape. It is provided as a mechanism for injecting an inert gas so as to form a region. At the end of the heat treatment chamber 11 on the inlet 31 side, an inlet gas curtain portion 24a is provided as the gas curtain portion 24 , and at the end of the heat treatment chamber 11 on the outlet 32 side, , as the gas curtain portion 24 , an outlet gas curtain portion 24b is provided.

The inlet gas curtain part 24a and the outlet gas curtain part 24b are each formed in the shape of a hollow box, and have gas supply boxes to which the inert gas from the inert gas supply source 46 is supplied. The gas supply box of the inlet gas curtain part 24a is provided at the end of the inlet 31 side in the heat treatment chamber 11 , and the gas supply box of the outlet gas curtain part 24b is the heat treatment chamber 11 . It is provided in the edge part on the side of the outlet 32 in. Each gas supply box of the inlet gas curtain part 24a and the outlet gas curtain part 24b is connected to the common pipe 47 of the gas supply system 18 via a pipe|tube (not shown), and is inert. The inert gas from the gas supply source 46 is configured to be supplied.

In addition, in each gas supply box of the inlet gas curtain part 24a and the outlet gas curtain part 24b, a plurality of injection holes communicating in the heat treatment chamber 11 are formed. And the some injection hole provided in each gas supply box is comprised so that the inert gas supplied from the inert gas supply source 46 may be injected into the inside of the heat treatment chamber 11 . In addition, the plurality of injection holes of the gas supply box of the inlet gas curtain portion 24a are configured to inject the inert gas so that the inert gas is spread in a curtain shape along a direction parallel to the opening surface of the inlet 31 . . And, the plurality of injection holes of the gas supply box of the outlet gas curtain portion 24b are configured to inject the inert gas so that the inert gas is spread in a curtain shape along a direction parallel to the opening surface of the outlet 32 . . In the vicinity of the inlet 31 of the heat treatment chamber 11, in the vicinity of the inlet 31 of the heat treatment chamber 11, by injecting an inert gas in a curtain shape from the inlet gas curtain part 24a at the end of the heat treatment chamber 11 on the inlet 31 side, the heat treatment chamber ( 11), the atmosphere of the inner region and the outer region is separated. In addition, in the vicinity of the outlet 32 of the heat treatment chamber 11, the inert gas is injected in a curtain shape from the outlet gas curtain portion 24b at the end of the heat treatment chamber 11 on the outlet 32 side. The atmosphere of the inner region and the outer region of the chamber 11 is separated.

[control unit]

Referring to FIG. 2 , the transport mechanism 33 of the heat treatment chamber 11 , the heater 12 , the steam supply system 14 , the steam discharge systems 16a and 16b , the gas supply system 18 , and the exhaust system 21a , 21b), the operation of the binder discharge system 53 is controlled by the control unit 25 . Specifically, the control unit 25 includes an electric motor that drives the drive shaft 35 of the conveying mechanism 33 , a heating element of the heater 12 , and a boiler of the superheated steam generation unit 40 of the steam supply system 14 . And the superheater, the solenoid valve of the ejector 45 of the water vapor discharge system 16a, 16b, the gas supply valve 49a-d of the gas supply system 18, the electron of the ejector 52 of the exhaust system 21a, 21b By controlling the operation of the valve and the solenoid valve of the ejector 55 of the binder discharge system 53, the conveying mechanism 33, the heater 12, the water vapor supply system 14, the water vapor discharge system 16a, 16b , controls the operation of the gas supply system 18 , the exhaust systems 21a and 21b , and the binder discharge system 53 .

In addition, the control unit 25 includes a hardware processor such as a CPU (Central Processing Unit), a memory such as a RAM (Random Access Memory) and a ROM (Read Only Memory), an operation unit such as an operation panel operated by a user, and an interface circuit It is composed of etc. In the memory of the control unit 25, the electric motor for driving the drive shaft 35, the heating element of the heater 12, the boiler and superheater of the superheated steam generating unit 40, the solenoid valve of the ejector 45, the gas supply valve ( 49a to d), a program for creating a control command for controlling the operation of the solenoid valve of the ejector 52, the solenoid valve of the ejector 55, and the like is stored. For example, when the operation unit is operated by the operator, the program is read from the memory by the hardware processor and executed. Thereby, the above control command is created, and based on the control command, the electric motor for driving the drive shaft 35, the heating element of the heater 12, the boiler and the superheater of the superheated steam generating unit 40, the ejector ( 45), the gas supply valves 49a-d, the solenoid valve of the ejector 52, the solenoid valve of the ejector 55, etc. operate.

[Operation of heat treatment device]

Next, an example of the processing operation|movement of the heat processing apparatus 1 is demonstrated. When the processing operation of the heat treatment apparatus 1 is started, first, based on a control command from the control unit 25 , the conveying mechanism 33 , the heater 12 , and the water vapor supply system 14 of the heat treatment chamber 11 . , the operation of the water vapor discharge system 16a, 16b, the gas supply system 18, and the exhaust system 21a, 21b is started. When the processing operation of the heat treatment apparatus 1 is started based on a control command from the control unit 25 , specifically, the following operations are performed in the heat treatment apparatus 1 .

First, the atmosphere in the heat treatment chamber 11 is heated by the heater 12 . Specifically, the heating element of the heater 12 is energized to the heating element, the heating element generates heat, and the heat treatment chamber 11 is heated by the heater 12 from the outside. Then, when the heat treatment chamber 11 is heated from the outside, the atmosphere in the heat treatment chamber 11 is heated.

Further, in the heat treatment chamber 11 , the operation of the electric motor for driving the drive shaft 35 of the conveying mechanism 33 is started, and the circling operation of the mesh belt 34 of the conveying mechanism 33 is started, It will be in a state in which the conveyance of the to-be-processed object 10 in the heat processing chamber 11 by the conveyance mechanism 33 is possible. In addition, by setting the rotation speed of the electric motor appropriately, the conveyance speed at the time of conveying the to-be-processed object 10 by the circling operation|movement of the mesh belt 34, ie, the to-be-processed object 10 by the conveyance mechanism 33. ) is set to be a predetermined speed. Moreover, the conveyance speed of the to-be-processed object 10 by the conveyance mechanism 33 is suitably set according to heat processing conditions, such as the heat processing time of the to-be-processed object 10 heat-processed in the heat processing chamber 11. As shown in FIG.

Moreover, the boiler and the superheater of the superheated steam generating part 40 of the steam supply system 14 operate, and generation|occurrence|production of superheated steam is performed continuously. In addition, the temperature of the superheated steam generated by the superheated steam generating unit 40 and the amount of superheated steam generated per unit time depend on the heat treatment conditions of the target object 10 to be subjected to heat treatment by heating with the superheated steam. is appropriately set accordingly. The heated steam generated by the superheated steam generating unit 40 is continuously supplied to the pair of nozzles 38a and 38b of the steam supplying unit 13 through the steam supplying pipes 41 , 42a , 42b . In addition, the superheated steam supplied to each of the nozzles 38a and 38b is taken out from the plurality of nozzle holes 39 of each of the nozzles 38a and 38b, and the superheated steam is continuously supplied into the heat treatment chamber 11 . .

In addition, the operation of each ejector 45 of the water vapor discharge system 16a, 16b is started. Thereby, the superheated steam in the heat treatment chamber 11 is sucked from each of the inlet side steam discharge part 15a and the outlet side steam discharge part 15b, and passes through each steam discharge pipe 44 and each ejector 45 to the outside. is continuously discharged.

In addition, supply of the inert gas into the heat treatment chamber 11 from the inlet gas supply parts 36a and 36b and the outlet gas supply parts 37a and 37b of the gas supply part 17 is started. Specifically, the gas supply valves 49a to 49a to d of the gas supply system 18 operate to perform an opening operation, and the inert gas supplied from the inert gas supply source 46 is transferred to the common pipe 47 and each branch pipe. It is continuously supplied to the inlet gas supply parts 36a and 36b and the outlet gas supply parts 37a and 37b through 48a to d. Then, the inert gas is continuously supplied into the heat treatment chamber 11 from the inlet gas supply parts 36a and 36b and the outlet gas supply parts 37a and 37b.

In addition, the operation of the ejectors 52 of the exhaust systems 21a and 21b is started. Thereby, the gas in the heat treatment chamber 11 is sucked in from each of the inlet side exhaust section 19 and the outlet side exhaust section 20 , and is continuously outward through each gas exhaust pipe 51 and each ejector 52 . is emitted

In addition, the binder discharge system 53, in the case of a heat treatment condition in which the sintering treatment is performed in the heat treatment apparatus 1 and a binder is generated in large quantities from the object 10 to be treated, based on a control command from the control unit 25 to work During the operation of the ejector 55 of the binder discharge system 53 , a gas containing a high concentration of binder in the atmosphere in the heat treatment chamber 11 is sucked into the binder discharge unit 23 and discharged from the heat treatment chamber 11 . .

As described above, when the processing operation of the heat treatment apparatus 1 is started, the superheated steam supplied from the steam supply unit 13 provided in the central portion of the conveying direction X1 in the heating region HR is converted into the heat treatment chamber 11 . ) flows while being filled within. Then, the flow of superheated steam flowing from the steam supply part 13 to the steam discharge part 15 on the inlet 31 side and the outlet 32 side is continuously formed. That is, while the superheated steam is filled in the heat treatment chamber 11 , the flow of superheated steam flowing from the steam supply unit 13 to the inlet side steam discharge unit 15a and the steam supply unit 13 to the exit side steam discharge unit 15b ), a flow of superheated water vapor is continuously formed.

In addition, the inert gas supplied from the inlet gas supply parts 36a and 36b of the gas supply part 17 flows so as to spread in the region in the vicinity of the inlet gas supply parts 36a and 36b in the heat treatment chamber 11 . . Thereby, in the area|region in the vicinity of the inlet side gas supply parts 36a, 36b, the atmosphere is separated by an inert gas. In addition, the inert gas supplied from the outlet gas supply units 37a and 37b of the gas supply unit 17 flows so as to spread in the region in the vicinity of the outlet gas supply units 37a and 37b in the heat treatment chamber 11 . . Thereby, in the area|region in the vicinity of the outlet side gas supply parts 37a, 37b, the atmosphere is separated by an inert gas.

As described above, when the processing operation of the heat treatment apparatus 1 is started, in the heat treatment chamber 11 , the steam flows from the steam supply part 13 to the steam discharge part 15 on the inlet 31 side and the outlet 32 side. While the flow of superheated steam is continuously formed, the atmosphere is separated by the inert gas supplied from the gas supply unit 17 .

Here, the flow of water vapor in the heat treatment chamber 11 during operation of the heat treatment apparatus 1 and separation of the atmosphere by the inert gas will be further described. 10 and 11 are diagrams for explaining the flow of superheated steam and inert gas in the heat treatment chamber 11 in the heat treatment apparatus 1 . 11A is a diagram for explaining the flow of superheated steam in the region around the steam supply unit 13 . FIG. 11B is a diagram for explaining the flow of superheated steam and inert gas in the region around the inlet water vapor discharge unit 15a and the inlet gas supply units 36a and 36b. 11C is a diagram for explaining the flow of superheated steam and inert gas in the region around the outlet side water vapor discharge unit 15b and the outlet side gas supply units 37a and 37b. In addition, in FIG. 10 and FIG. 11, the direction of the flow of superheated steam in the heat processing chamber 11 is schematically shown by the arrow of a broken line, and the flow of inert gas in the heat processing chamber 11. The direction of is schematically indicated by a solid arrow.

10 and 11(A) , the superheated steam blown out from each of the pair of nozzles 38a and 38b of the steam supply unit 13 is It flows toward the intermediate position side, and in this embodiment, it flows toward the center position side of the conveyance direction X1 of the to-be-processed object 10 in heating area|region HR. Moreover, partition plates 22e and 22f are provided in the area|region between a pair of nozzle part 38a, 38b, and the area|region near the center position of the heating area|region HR. For this reason, each superheated steam taken out from each nozzle part 38a, 38b and flowed toward the intermediate position side of a pair of nozzle part 38a, 38b (in this embodiment, the central position side of heating area|region HR). , collides with the partition plates 22e and 22f. That is, the superheated steam blown out from the nozzle part 38a collides with the partition plate 22e, and the superheated steam blown out from the nozzle part 38b collides with the partition plate 22f. And each superheated steam blown out from each nozzle part 38a, 38b and colliding with the partition plates 22e, 22f spreads over the whole cross section perpendicular to the conveyance direction X1 in the heating area|region HR. In the direction parallel to the conveyance direction X1, it flows so that it reverses and returns.

As described above, the superheated steam blown out from the nozzle portion 38a flows toward the intermediate position side of the pair of nozzle portions 38a and 38b and is reversed, and then in the heating region HR in the conveying direction X1. It flows along the direction parallel to the conveyance direction X1 toward the direction opposite to the intermediate position side of a pair of nozzle part 38a, 38b in the state spread over the whole perpendicular|vertical cross section. That is, the superheated steam blown out from the nozzle portion 38a flows from the intermediate position side of the pair of nozzle portions 38a and 38b toward the inlet 31 side of the heat treatment chamber 11 in the cross section of the heating region HR. It flows in a state of being spread throughout. And the superheated steam blown out from the nozzle part 38b flows toward the intermediate position side of a pair of nozzle part 38a, 38b, and after being reversed, it is perpendicular|vertical to the conveyance direction X1 in the heating area|region HR. It flows along the direction parallel to the conveyance direction X1 toward the direction opposite to the intermediate position side of a pair of nozzle part 38a, 38b in the state spread over the whole cross section. That is, the superheated steam blown out from the nozzle portion 38b is directed from the intermediate position side of the pair of nozzle portions 38a and 38b toward the outlet 32 side of the heat treatment chamber 11 in the cross section of the heating region HR. It flows in a state of being spread throughout. Thereby, in the heat treatment chamber 11, from the intermediate position side of the pair of nozzle parts 38a, 38b toward each of the inlet 31 side and the outlet 32 side, parallel to the conveyance direction X1 An approximately uniform flow of water vapor with a small variation in flow velocity is formed in a state of being spread over the entire cross section of the heating region HR along the direction.

Moreover, the superheated steam blown out from the nozzle part 38a and flowed to the inlet 31 side flows toward the inlet side steam discharge part 15a, as shown in FIGS. 10 and 11(B), and inlet side steam discharges. It is sucked in from the part 15a and discharged to the outside of the heat treatment chamber 11 . Further, the superheated steam flowing toward the inlet-side water vapor discharge portion 15a passes through the region below the partition plate 22d, and passes through the plurality of through holes in the lower wall 43b of the inlet-side water vapor discharge portion 15a to the inlet side. It is sucked into the water vapor discharge part 15a. Moreover, the superheated steam blown out from the nozzle part 38b and flowed toward the outlet 32 side flows toward the exit side steam discharge part 15b, as shown in FIGS. 10 and 11(C), and the exit side steam discharges It is sucked in from the part 15b and discharged to the outside of the heat treatment chamber 11 . In addition, the superheated steam flowing toward the outlet side water vapor discharge unit 15b passes through the region below the partition plate 22g and passes through the plurality of through holes in the lower wall 43b of the outlet side water vapor discharge unit 15b to the inlet side. It is sucked into the water vapor discharge part 15a.

As described above, in the heat treatment chamber 11, a substantially uniform flow of superheated steam flowing from the steam supply part 13 to the steam discharge part 15 on the inlet 31 side and the outlet 32 side is continuously formed. . For this reason, in the region from the water vapor supply unit 13 to the inlet 31 side and the water vapor discharge unit 15 on the outlet 32 side, the superheated water vapor in the flowing state is filled and the heating region ( HR), an approximately uniform flow of superheated water vapor with little variation in flow velocity is continuously formed in a state of being spread over the entire cross section of the HR).

Further, in the region on the inlet 31 side of the inlet side water vapor discharge portion 15a in the heat treatment chamber 11, as shown in FIGS. 10 and 11B, the inlet gas supply part 36a and An inert gas is taken out from each of the inlet-side gas supply parts 36b.

From the inlet side gas supply part 36a, the inert gas is blown out in such a way that it spreads downward. The inert gas blown out from the inlet gas supply part 36a spreads so as to be filled in a region in the vicinity of the inlet gas supply part 36b. Then, a part of the inert gas that has spread so as to be filled in the region near the inlet gas supply part 36a flows toward the inlet 31 side region rather than the inlet gas supply part 36a. For this reason, it is prevented that the gas of the atmosphere in the area|region on the side of the inlet 31 side rather than the inlet side gas supply part 36a flows to the inlet side gas supply part 36a side. Thereby, the atmosphere in the region from the water vapor supply unit 13 to the inlet gas supply units 36a and 36b and the atmosphere in the region from the inlet 31 to the inlet gas supply units 36a and 36b are more reliably separated. become blocked In addition, a part of the inert gas blown out from the inlet gas supply part 36a flows toward the inlet gas exhaust part 19 and spreads so as to fill the area below the partition plate 22a. pass through the area below the Then, the inert gas that has passed through the region below the partition plate 22a is sucked into the inlet gas exhaust section 19 through a plurality of through holes in the lower wall 50b of the inlet gas exhaust section 19, and the heat treatment chamber (11) is discharged to the outside.

Moreover, the inert gas is also blown out from the inlet side gas supply part 36b so as to spread downward. The inert gas spread downward from the inlet gas supply part 36b and blown out flows toward the inlet gas exhaust part 19 and spreads so as to fill the area below the partition plate 22b. pass through the lower area. Then, the inert gas that has passed through the region below the partition plate 22b is sucked into the inlet gas exhaust section 19 through a plurality of through holes in the lower wall 50b of the inlet gas exhaust section 19, and the heat treatment chamber (11) is discharged to the outside.

Further, in the region near the inlet gas supply part 36b, a small amount of water vapor flowing toward the inlet 31 so as not to be completely discharged from the inlet water vapor discharge part 15a but leaked out from the inlet gas supply part 36b is ) is mixed with the inert gas supplied into the heat treatment chamber 11 and diluted. Then, water vapor mixed with the inert gas supplied into the heat treatment chamber 11 from the inlet gas supply unit 36b and diluted is exhausted from the inlet side exhaust unit 19 to the outside. For this reason, even a small amount of water vapor flowing toward the inlet 31 so as to leak from the inlet water vapor discharge unit 15a is also exhausted from the inlet side exhaust unit 19 .

As described above, the inert gas supplied from the inlet gas supply units 36a and 36b flows so as to spread in the region near the inlet gas supply units 36a and 36b in the heat treatment chamber 11 . Then, the flow of the inert gas flowing toward the inlet 31 and the flow of the inert gas flowing to the inlet gas exhaust 19 disposed between the inlet gas supply parts 36a and 36b are continuously formed. Thereby, in the region near the inlet gas supply parts 36a and 36b, the atmosphere by the inert gas supplied into the heat treatment chamber 11 from the inlet gas supply parts 36a and 36b is separated.

Further, in the region on the outlet 32 side of the heat treatment chamber 11 from the outlet-side water vapor discharge portion 15b, as shown in FIGS. 10 and 11(C) , the outlet gas supply unit 37a and An inert gas is taken out from each of the outlet gas supply parts 37b.

The inert gas is blown out from the outlet gas supply part 37a so as to spread downward. The inert gas spread downward from the outlet gas supply part 37a and blown out flows toward the outlet gas exhaust part 20 and spreads so as to fill the area below the partition plate 22i. pass through the lower area. Then, the inert gas that has passed through the region below the partition plate 22i is sucked into the outlet gas exhaust unit 20 through a plurality of through holes in the lower wall 50b of the outlet gas exhaust unit 20, and the heat treatment chamber (11) is discharged to the outside.

Further, in the region near the outlet gas supply unit 37a, a small amount of water vapor that has flowed toward the outlet 32 so as not to be completely discharged from the outlet water vapor discharge unit 15b but leaked out from the outlet gas supply unit 37a ) is mixed with the inert gas supplied into the heat treatment chamber 11 and diluted. Then, the water vapor mixed with the inert gas supplied into the heat treatment chamber 11 from the outlet gas supply unit 37a and diluted is exhausted from the outlet side exhaust unit 20 to the outside. For this reason, even a small amount of water vapor flowing toward the outlet 32 so as to leak from the outlet water vapor discharge unit 15b is also exhausted from the outlet side exhaust unit 20 .

Moreover, the inert gas is also taken out from the outlet side gas supply part 37b so that it may spread downward. The inert gas blown out from the outlet-side gas supply unit 37b spreads so as to be filled in a region in the vicinity of the outlet-side gas supply unit 37b. Then, a part of the inert gas that has spread so as to be filled in the region near the outlet gas supply part 37b flows toward the region on the outlet 32 side from the outlet gas supply part 37b. For this reason, it is prevented that the gas of the atmosphere of the area|region on the side of the outlet 32 rather than the outlet gas supply part 37b flows to the side of the outlet gas supply part 37b. Thereby, the atmosphere in the region from the water vapor supply unit 13 to the outlet gas supply units 37a and 37b and the atmosphere in the region from the outlet 32 to the outlet gas supply units 37a and 37b are more reliably separated. become blocked In addition, a part of the inert gas blown out from the outlet gas supply part 37b flows toward the outlet gas exhaust part 20 and spreads so as to fill the area below the partition plate 22j. pass through the area below the Then, the inert gas that has passed through the region below the partition plate 22j is sucked into the outlet gas exhaust unit 20 through a plurality of through holes in the lower wall 50b of the outlet gas exhaust unit 20, and the heat treatment chamber (11) is discharged to the outside.

As described above, the inert gas supplied from the outlet gas supply units 37a and 37b flows so as to spread in the region in the vicinity of the outlet gas supply units 37a and 37b in the heat treatment chamber 11 . Then, the flow of the inert gas flowing toward the outlet 32 and the flow of the inert gas flowing to the outlet gas exhaust unit 20 disposed between the outlet gas supply units 37a and 37b are continuously formed. Thereby, in the region in the vicinity of the outlet gas supply units 37a and 37b, the atmosphere is separated by the inert gas supplied into the heat treatment chamber 11 from the outlet gas supply units 37a and 37b.

As described above, when the processing operation of the heat treatment apparatus 1 is started and each device is operated, in the region from the water vapor supply unit 13 to the inlet 31 side and the water vapor discharge unit 15 on the outlet 32 side, , a state in which the flow of superheated steam, which is filled and substantially uniformly flowing in the heat treatment chamber 11, is continuously formed. Then, in each of the vicinity of the inlet gas supply parts 36a and 36b and the vicinity of the outlet gas supply parts 37a and 37b, the atmosphere is separated by the inert gas. In this state, the to-be-processed object 10 accommodated in the case 10a is carried into the heat treatment chamber 11 .

The to-be-processed object 10 in the state accommodated in the case 10a is carried in in order from the inlet 31 to the heat processing chamber 11 repeatedly and continuously. More specifically, if one of the cases 10a in which a plurality of objects to be processed 10 are accommodated is brought into the heat treatment chamber 11 from the inlet 31 , after a predetermined time elapses, the objects 10 are stored in plurality. The next case (10a) that has been processed is brought into the heat treatment chamber (11) from the inlet (31). And further, every predetermined time elapses, the next case 10a in which the to-be-processed object 10 was accommodated is carried in into the heat processing chamber 11 from the entrance 31. As shown in FIG. In this way, the case 10a in which the to-be-processed object 10 was accommodated is carried in in order from the entrance 31 to the heat processing chamber 11 repeatedly and continuously.

When the case 10a containing the object 10 is carried in from the inlet 31 into the heat treatment chamber 11 , the case 10a is placed on the upper surface of the mesh belt 34 of the conveying mechanism 33 , and the mesh belt Together with the winding operation of (34), the inside of the heat treatment chamber 11 is conveyed in the conveyance direction X1. The to-be-processed object 10 conveyed together with the case 10a in the conveyance direction X1 in the heat processing chamber 11 enters the heating area|region HR when passing below the inlet side gas supply part 36a, and , heating by superheated steam in the heating region HR is started. In addition, the to-be-processed object 10 passes below the inlet side gas supply part 36a until it reaches the vicinity of the inlet side gas supply part 36b at the inlet side vapor discharge part 15a. It is heated by the slight superheated steam flowing toward the inlet 31 without being discharged. Then, between reaching the vicinity of the inlet gas supply part 36b and passing through the region below the inlet water vapor discharge part 15a, the above-mentioned slight superheated steam flowing toward the inlet 31 and , heated by the atmosphere heated by the heat from the heater 12 .

When the object to be treated 10 passes below the inlet water vapor discharge unit 15a, it flows from the water vapor supply unit 13 to the inlet gas discharge unit 15a while being filled in the heat treatment chamber 11 and substantially uniformly. It is conveyed in the conveyance direction X1 in the atmosphere of superheated water vapor|steam to be used. And the to-be-processed object 10 continues heating in said atmosphere in which superheated water vapor|steam flows. In the meantime, the object 10 is also heated by the atmosphere heated by the heat from the heater 12 .

The to-be-processed object 10 is conveyed to the center part of the heating area|region HR, heating as mentioned above. Then, when the object 10 passes below the steam supply unit 13 provided in the central portion of the heating region HR, it is filled and substantially uniformly discharged from the steam supply unit 13 in the heat treatment chamber 11 . The atmosphere of the superheated steam flowing to the side gas discharge part 15b is conveyed in the conveyance direction X1. And the to-be-processed object 10 continues heating in said atmosphere in which superheated water vapor|steam flows. In the meantime, the object 10 is also heated by the atmosphere heated by the heat from the heater 12 .

The to-be-processed object 10 conveyed in the conveyance direction X1 while heating the inside of the heat processing chamber 11 as mentioned above is conveyed while continuing heating to the area|region below the exit side water vapor discharge part 15b. In addition, the heat treatment by superheated steam, which is required to be performed on the object 10 , mainly passes through the lower part of the inlet-side water vapor discharge unit 15a and then passes through the region below the water vapor supply unit 13 and the outlet-side water vapor. It is performed by heating by superheated steam in the period until it reaches the area|region below the discharge part 15b.

When the object to be treated 10 passes through the region below the outlet side water vapor discharge unit 15b, it is not discharged from the outlet side water vapor discharge unit 15b and is heated by a small amount of superheated water vapor flowing toward the outlet 32 side. do. In addition, when the object 10 is conveyed from the region below the outlet side water vapor discharge unit 15b to the outlet 32 side, it passes below the outlet side exhaust unit 20 and is then transferred to the outlet side gas supply unit 37b. reaches the region below the , and exits from the heating region HR. When the object 10 to be processed passes through the region below the outlet gas supply part 37b and exits from the heating region HR, heat treatment is not performed on the object 10 through the outlet 32 . is conveyed along the conveying direction X1. Then, when the outlet 32 is reached, the to-be-processed object 10 in the state accommodated in the case 10a is carried out of the heat treatment chamber 11 from the outlet 32 . In addition, the case 10a in which the to-be-processed object 10 is accommodated is carried in in the heat processing chamber 11 in order repeatedly and continuously, also when carrying out from the exit 32, it is carried out repeatedly and continuously in order. do.

When the heat treatment of all the to-be-processed objects 10 requiring heat treatment in the heat treatment apparatus 1 is complete|finished and all the to-be-processed objects 10 are taken out from the heat processing chamber 11, based on the control command from the control part 25 Accordingly, the operation of the conveying mechanism 33 , the heater 12 , the steam supply system 14 , the steam discharge systems 16a and 16b , the gas supply system 18 , and the exhaust systems 21a and 21b is stopped. Thereby, the processing operation|movement of the heat processing apparatus 1 is complete|finished.

[Effect of this embodiment]

As described above, according to the heat treatment apparatus 1 of the present embodiment, the to-be-processed by the superheated steam supplied into the heat treatment chamber 11 from the water vapor supply part 13 provided in the heating region HR of the heat treatment chamber 11 . The water 10 is heated, and the heat treatment of the object 10 is performed. In addition, the superheated steam used for heating the object 10 is provided on the inlet 31 side and the outlet 32 side of the heat treatment chamber 11 from the steam supply unit 13 provided in the heating region HR, respectively. It flows toward the water vapor discharge part 15 (15a, 15b), and is discharged|emitted from the water vapor discharge part 15 (15a, 15b) to the outside of the heat treatment chamber. For this reason, in the heat treatment chamber 11, the flow of water vapor flowing from the water vapor supply unit 13 in the heating region HR toward the inlet 31 side and discharged from the inlet water vapor discharge unit 15a to the outside, and heating A flow of water vapor flowing from the water vapor supply unit 13 in the region HR toward the outlet 32 side and discharged from the outlet side water vapor discharge unit 15b to the outside is formed. And in the heat treatment chamber 11, the conveyance direction X1 of the to-be-processed object 10 toward each of the inlet 31 side and the outlet 32 side from the water vapor|steam supply part 13 in the heating area|region HR. A more uniform flow of water vapor with less variation in flow velocity along the direction parallel to Thereby, in the heat treatment chamber 11, it becomes difficult to generate|occur|produce the area|region where the flow of water vapor|steam stagnates, and as a result, it becomes difficult to produce the area|region where the atmosphere remains in the heat treatment chamber 11. FIG.

Therefore, according to the heat treatment apparatus 1 of this embodiment, it can suppress that the stagnation of an atmosphere arises in the heat processing chamber 11 in which the heat processing of the to-be-processed object 10 is performed. In addition, according to the heat treatment apparatus 1 , it is possible to suppress the occurrence of stagnation of the atmosphere in the heat treatment chamber 11 . Therefore, the plurality of objects 10 to be subjected to heat treatment in the same heat treatment chamber 11 . ), it is possible to suppress the occurrence of non-uniformity in the heat treatment, and also suppress the reduction in heat treatment efficiency due to the retention of gas generated in the object 10 and the occurrence of contamination of the object 10 . can do.

Moreover, according to this embodiment, the steam supply part 13 is provided in the heating area|region HR of the heat processing chamber 11, and the steam discharge parts 15 (15a, 15b) are the inlet 31 of the heat processing chamber 11. ) side and the simple structure provided on the outlet 32 side, the heat processing apparatus 1 which can suppress generation|occurrence|production of the stagnation of the atmosphere in the heat processing chamber 11 is realizable. For this reason, the complexity of the structure of the heat processing apparatus 1 which heat-processes the to-be-processed object 10 with superheated steam can be prevented.

As described above, according to the present embodiment, it is possible to prevent the complication of the structure of the heat treatment apparatus 1 for performing heat treatment of the object 10 by means of superheated steam, and the heat treatment of the object 10 can be performed It is possible to provide the heat treatment apparatus 1 capable of suppressing the occurrence of stagnation of the atmosphere in the heat treatment chamber 11 to be performed.

In addition, according to the heat treatment apparatus 1 of this embodiment, since the inlet 31 of the heat treatment chamber 11 is open to the outside, the carrying-in operation of the to-be-processed object 10 into the heat treatment chamber 11 is carried out. It can be performed continuously quickly and easily. Thereby, the heat treatment process can be made continuous, and the improvement of the work efficiency of heat processing can be aimed at. And, according to the heat treatment apparatus 1, in addition to the inlet 31 being open, the inlet 31 side more than the inlet side water vapor discharge part 15a provided on the inlet 31 side with respect to the water vapor supply part 13 side. Inlet gas supply units 36a and 36b for supplying an inert gas into the heat treatment chamber 11 are provided. For this reason, the atmosphere in the heat treatment chamber 11 is separated between the inlet 31 open to the outside and the inlet water vapor outlet 15a by the inert gas supplied from the inlet gas supply units 36a and 36b. can do. That is, the atmosphere in the region from the water vapor supply unit 13 to the inlet gas supply units 36a and 36b and the atmosphere in the region from the inlet 31 open to the outside to the inlet gas supply units 36a and 36b can be separated. can Accordingly, in the heat treatment apparatus 1 with the inlet 31 open, the atmosphere in the region from the steam supply unit 13 to the inlet side steam discharge unit 15a can be blocked from the outside in order to improve the working efficiency of the heat treatment. Thus, the heat treatment of the object 10 by the superheated steam in the heating region HR can be efficiently performed.

Moreover, according to the heat treatment apparatus 1 of this embodiment, the inlet side gas supply part 36a, 36b is provided as a pair, and the inlet side exhaust part 19 is provided between them. For this reason, from the inlet side water vapor discharge unit 15a toward the inlet 31 side, the inlet side water vapor discharge unit 15a, the inlet side gas supply unit 36b, the inlet side exhaust unit 19, and the inlet side gas supply unit ( 36a), they are arranged. With this configuration, some water vapor flowing to the inlet 31 side to leak without being completely discharged from the inlet water vapor discharge unit 15a is mixed with the inert gas supplied from the inlet side gas supply unit 36b and diluted. do. Then, the water vapor mixed with the inert gas supplied from the inlet gas supply unit 36b and diluted is exhausted from the inlet side exhaust unit 19 to the outside. For this reason, even a small amount of water vapor flowing toward the inlet 31 so as to leak from the inlet water vapor discharge unit 15a is also exhausted from the inlet side exhaust unit 19 . As a result, it is possible to prevent water vapor from flowing into the region between the inlet side exhaust portion 19 and the inlet 31 and having a low temperature. Thereby, it is prevented that water vapor flows into the region with a low temperature between the inlet side exhaust portion 19 and the inlet 31 and dew condensation occurs. Prevention of occurrence of dew condensation prevents moisture from dripping onto the object 10 brought in from the inlet 31 to wet the object 10 and affect the heat treatment state of the object 10 . do. Further, according to the above configuration, the inert gas supplied from the inlet gas supply unit 36a disposed between the inlet side exhaust unit 19 and the inlet 31 is supplied from the water vapor supply unit 13 to the inlet side gas supply unit. The atmosphere in the region up to 36a and 36b and the atmosphere in the region from the inlet 31 to the inlet gas supply portions 36a and 36b can be more reliably separated and blocked.

Moreover, according to the heat treatment apparatus 1 of this embodiment, since the outlet 32 of the heat processing chamber 11 is open with respect to the outside, the carrying out operation of the to-be-processed object 10 from the heat treatment chamber 11 is performed. It can be performed continuously quickly and easily. Thereby, the heat treatment process can be made continuous, and the improvement of the work efficiency of heat processing can be aimed at. And, according to the heat treatment apparatus 1, in addition to the outlet 32 being open, the outlet 32 side more than the outlet side water vapor discharge part 15b provided on the outlet 32 side with respect to the water vapor supply part 13 side. Gas supply units 37a and 37b on the outlet side for supplying an inert gas into the heat treatment chamber 11 are provided. For this reason, the atmosphere in the heat treatment chamber 11 is separated between the outlet 32 open to the outside and the outlet water vapor discharge unit 15b by the inert gas supplied from the outlet gas supply units 37a and 37b. can do. That is, the atmosphere in the region from the water vapor supply unit 13 to the outlet gas supply units 37a and 37b and the atmosphere in the region from the externally open outlet 32 to the outlet gas supply units 37a and 37b can be separated. can Accordingly, in the heat treatment apparatus 1 in which the outlet 32 is opened in order to improve the working efficiency of the heat treatment, the atmosphere in the region from the water vapor supply unit 13 to the outlet side water vapor discharge unit 15b can be blocked from the outside. Thus, the heat treatment of the object 10 by the superheated steam in the heating region HR can be efficiently performed.

Moreover, according to the heat treatment apparatus 1 of this embodiment, the outlet side gas supply part 37a, 37b is provided in a pair, and the outlet side exhaust part 20 is provided between them. For this reason, from the outlet side water vapor discharge unit 15b toward the outlet 32 side, the outlet side water vapor discharge unit 15b, the outlet gas supply unit 37a, the outlet side exhaust unit 20, and the outlet side gas supply unit ( 37b), they are arranged. With this configuration, some water vapor flowing toward the outlet 32 to leak without being completely discharged from the outlet side water vapor discharge unit 15b is mixed with the inert gas supplied from the outlet side gas supply unit 37a and diluted. do. Then, the water vapor mixed with the inert gas supplied from the outlet gas supply unit 37b and diluted is exhausted from the outlet side exhaust unit 20 to the outside. For this reason, even a small amount of water vapor flowing toward the outlet 32 so as to leak from the outlet water vapor discharge unit 15b is also exhausted from the outlet side exhaust unit 20 . As a result, it is possible to prevent water vapor from flowing into the region between the outlet side exhaust portion 20 and the outlet 32 and having a low temperature. Accordingly, it is prevented that water vapor flows into a region having a low temperature between the outlet side exhaust unit 20 and the outlet 32 and dew condensation occurs. By preventing the occurrence of dew condensation, when the to-be-processed object 10 is taken out from the outlet 32, it is prevented that water|moisture content drips on the to-be-processed object 10, and the to-be-processed object 10 gets wet. In addition, according to the above configuration, the gas supplied from the outlet gas supply unit 37b disposed between the outlet exhaust unit 20 and the outlet 32 is supplied from the water vapor supply unit 13 to the outlet gas supply unit ( The atmosphere in the region up to 37a and 37b and the atmosphere in the region from the outlet 32 to the outlet gas supply parts 37a and 37b can be more reliably separated and blocked.

Moreover, according to the heat treatment apparatus 1 of this embodiment, the water vapor|steam supply part 13 is equipped with a pair of nozzle part 38a, 38b. And the superheated steam blown out from each of a pair of nozzle part 38a, 38b flows toward the intermediate position side of a pair of nozzle part 38a, 38b which opposes. A partition plate 22e configured to partially restrict the flow of gas in a direction parallel to the conveyance direction X1 of the object 10 in a region between the opposing pair of nozzle portions 38a and 38b. , 22f) are installed. Each superheated steam blown out from each nozzle part 38a, 38b and flowed toward the intermediate position side of a pair of nozzle part 38a, 38b collides with partition plate 22e, 22f, and is heated in the heating area|region HR. In this case, while spreading over the entire cross section perpendicular to the conveyance direction X1 of the to-be-processed object 10, in the direction parallel to the conveyance direction X1 of the to-be-processed object 10, it flows so that it reverses and returns. For this reason, the superheated steam blown out from each nozzle part 38a, 38b flows toward the intermediate position side of a pair of nozzle part 38a, 38b, and after being reversed, in the heating area|region HR, the to-be-processed object ( The conveyance direction X1 of the to-be-processed object 10 toward the direction opposite to the intermediate position side of a pair of nozzle part 38a, 38b in the state spread over the whole cross section perpendicular to the conveyance direction X1 of 10). ) flows in a direction parallel to the That is, the superheated steam blown out from each of the pair of nozzles 38a and 38b is reversed at the intermediate position of the pair of nozzles 38a and 38b, and then the cross section of the heating region HR is In the state spread over the whole, it flows along the direction away from each other along the direction parallel to the conveyance direction X1 of the to-be-processed object 10. For this reason, the superheated steam blown out from the nozzle part 38a is the cross section of the heating area|region HR toward the inlet 31 side of the heat processing chamber 11 from the intermediate position side of a pair of nozzle part 38a, 38b. It flows in a state of being spread throughout the And the superheated water vapor taken out from the nozzle part 38b is toward the exit 32 side of the heat processing chamber 11 from the intermediate position side of a pair of nozzle part 38a, 38b of the cross section of the heating area|region HR. It flows in a state of being spread all over. Thereby, in the heat processing chamber 11, the to-be-processed object 10 is conveyed toward each of the inlet 31 side and the outlet 32 side from the intermediate position side of a pair of nozzle part 38a, 38b. A more uniform flow of water vapor is formed with a smaller variation in the flow velocity while being spread over the entire cross section of the heating region HR in a direction parallel to the direction X1. Thereby, in the heat treatment chamber 11, it becomes more difficult to generate|occur|produce the area|region where the flow of water vapor|steam stagnates, and as a result, it becomes more difficult to generate|occur|produce the area|region where the atmosphere remains in the heat treatment chamber 11. Therefore, according to the above structure, it is possible to further suppress the occurrence of stagnation of the atmosphere in the heat treatment chamber 11 .

Moreover, according to the heat treatment apparatus 1 of this embodiment, between each of the pair of inlet gas supply parts 36a, 36b and the inlet side exhaust part 19, the conveyance direction of the to-be-processed object 10 ( Inlet-side partition plates 22a and 22b are provided for partially regulating the flow of gas in a direction parallel to X1). For this reason, between the pair of inlet gas supply parts 36a and 36b disposed with the inlet exhaust part 19 interposed therebetween, while maintaining the state in communication with the atmosphere so that the gas can flow, the atmosphere is improved. A state that is easy to separate can be formed. Thereby, the atmosphere in the region from the water vapor supply unit 13 to the inlet gas supply units 36a and 36b and the atmosphere in the region from the inlet 31 to the inlet gas supply units 36a and 36b are more efficiently separated. can be blocked

Moreover, according to the heat treatment apparatus 1 of this embodiment, between each of the pair of outlet gas supply parts 37a and 37b and the outlet exhaust part 20, the conveyance direction of the to-be-processed object 10 ( Exit-side partition plates 22i and 22j are provided for partially regulating the flow of gas in a direction parallel to X1). For this reason, between the pair of outlet gas supply parts 37a and 37b arranged with the outlet side exhaust part 20 interposed therebetween, while maintaining the state in which the atmosphere is communicated so that the gas can flow, the atmosphere is improved. A state that is easy to separate can be formed. Thereby, the atmosphere in the region from the water vapor supply unit 13 to the outlet gas supply units 37a and 37b and the atmosphere in the region from the outlet 32 to the outlet gas supply units 37a and 37b are more efficiently separated. can be blocked

[Variation]

As mentioned above, although embodiment of this invention was described, this invention is not limited to embodiment mentioned above, As long as it describes in a claim, it can change and implement variously. For example, the following modifications may be implemented.

(1) In the above-described embodiment, the heating region has been exemplified as a region from the steam supply unit to the inlet gas supply unit and the region from the water vapor supply unit to the outlet gas supply unit. A form may be implemented. The heating region may be a region in which the object to be processed in the heat treatment chamber is heated, and heating by superheated steam and heat from the heater (that is, the atmosphere in the heat treatment chamber heated through the heat treatment chamber by the heat from the heater) is configured as a region in which at least one of the heating by For example, if the heater for heating the heat treatment chamber from the outside is arranged over the region from the inlet to the outlet of the heat treatment chamber, the region covering the entire length from the inlet to the outlet in the heat treatment chamber is the heating region becomes this

(2) In addition, in the above-mentioned embodiment, although the form provided in the center part of the to-be-processed object conveyance direction in a heating area|region was illustrated, it does not need to be as it is, and another aspect may be implemented. For example, the form in which the water vapor|steam supply part was provided in the inlet side or the outlet side rather than the central part in the conveyance direction of the to-be-processed object in a heating area may be implemented.

(3) Moreover, in the above-mentioned embodiment, although the form which the water vapor|steam supply part was provided with a pair of nozzle part arrange|positioned opposite to each other in the conveyance direction of a to-be-processed object was illustrated, it does not need to be as it is, and another aspect is implemented may be For example, the form in which the water vapor|steam supply part was provided with one or three or more nozzle parts may be implemented. Moreover, although the nozzle part formed in the cylindrical shape was illustrated in embodiment mentioned above, the shape of a nozzle part does not need to be as it is, and it may change and implement it variously. For example, the form in which the nozzle part was formed in various shapes, such as a box shape, a square cylinder shape, or a shape connected in the state in which the several cylindrical part communicated inside them, may be implemented. Moreover, in the above-mentioned embodiment, in the nozzle part, although the some nozzle hole illustrated the aspect provided so that the superheated water vapor|steam might be taken out toward the intermediate position side of a pair of nozzle part, it does not need to be as it is, and another aspect is implemented may be For example, the nozzle part WHEREIN: The aspect provided so that a some nozzle hole may take out superheated water vapor|steam toward upper or lower direction may be implemented. Or the nozzle part WHEREIN: The aspect provided so that a some nozzle hole may take out superheated water vapor|steam toward the side opposite to the intermediate position side of a pair of nozzle part may be implemented.

(4) Moreover, in the above-mentioned embodiment, although the form in which a pair of partition plate and a binder discharge part were provided between a pair of nozzle part of a water vapor|steam supply part was illustrated, it may not be as it is, and another form may be implemented. For example, between a pair of nozzle parts of a water vapor|steam supply part WHEREIN: The form in which the binder discharge part is not provided and the partition plate of 1 sheet is provided may be implemented. Alternatively, between the pair of nozzle portions of the water vapor supply portion, a partition plate may not be provided and the binder discharge portion may be provided. Alternatively, between the pair of nozzle portions of the water vapor supply portion, the form in which neither the partition plate nor the binder discharge portion is provided may be implemented.

(5) In addition, in the above-mentioned embodiment, although the form in which the gas supply part supplies an inert gas in a heat processing chamber was illustrated, it may not be as it is, and another aspect may be implemented. For example, the form in which the gas supply part supplies air in the heat processing chamber may be implemented. Alternatively, an embodiment in which the gas supply unit supplies a mixed gas of an inert gas and air into the heat treatment chamber may be implemented.

(6) Moreover, in the above-mentioned embodiment, although the form in which the inlet side gas supply part was provided as a pair was illustrated, it may not be as it is and another form may be implemented. For example, the form in which one or three or more inlet side gas supply parts were provided may be implemented. Moreover, although the inlet side gas supply part formed in the cylindrical shape was illustrated in the above-mentioned embodiment, the shape of the inlet side gas supply part may not be as it is and may be implemented with various changes. For example, the form in which the inlet side gas supply part was formed in various shapes, such as a box shape, a square cylinder shape, or a shape connected in the state in which the several cylindrical part communicated inside them, may be implemented. Moreover, in the above-mentioned embodiment, in the inlet side gas supply part, WHEREIN: Although the form provided so that the some nozzle hole might blow out gas downward was illustrated, it does not need to be as it is, and another form may be implemented. For example, the nozzle part WHEREIN: The form provided so that a some nozzle hole may take out gas toward the direction other than downward may be implemented.

(7) Moreover, in the above-mentioned embodiment, although the form in which the outlet side gas supply part was provided as a pair was illustrated, it may not be as it is and another form may be implemented. For example, the form in which one or three or more outlet gas supply parts were provided may be implemented. In addition, in the above-mentioned embodiment, although the outlet gas supply part formed in the cylindrical shape was illustrated, the shape of the outlet gas supply part does not need to be as it is, and may be implemented with various changes. For example, the form in which the outlet gas supply part was formed in various shapes, such as a box shape, a square cylinder shape, or a shape connected in the state in which several cylindrical-shaped parts communicated inside them, may be implemented. In addition, in the above-mentioned embodiment, in the outlet side gas supply part, although the some nozzle hole was provided so that gas might be blown out downward, although the form was illustrated, it does not need to be as it is and another form may be implemented. For example, the nozzle part WHEREIN: The form provided so that a some nozzle hole may take out gas toward the direction other than downward may be implemented.

The present invention relates to a heat treatment apparatus that heats an object with superheated steam to heat the object, and can be widely applied.

1 Heat treatment unit
10 object to be treated
11 Heat treatment room
13 water vapor supply
15, 15a, 15b Water vapor outlet
17 gas supply
19 Inlet side exhaust
20 outlet side exhaust
31 entrance
32 exit
36a, 36b Inlet side gas supply (gas supply)
37a, 37b Outlet side gas supply (gas supply)
HR heating zone

Claims (8)

A heat treatment apparatus for heating an object to be treated with superheated steam to heat the object to be treated, comprising:
a heat treatment chamber provided with an inlet into which the to-be-processed object is carried in and an outlet through which the to-be-processed object is taken out, wherein the heat treatment of the to-be-processed object conveyed from the inlet toward the outlet is performed;
a water vapor supply unit provided in a heating region that is a region in which the object to be processed is heated in the heat treatment chamber and supplying superheated water vapor into the heat treatment chamber;
In the heat treatment chamber, a water vapor discharge unit provided on the inlet side and the outlet side with respect to the water vapor supply unit, respectively, for discharging superheated water vapor in the heat treatment chamber to the outside of the heat treatment chamber is provided. The method according to claim 1,
A gas supply unit for supplying at least one of an inert gas and air into the heat treatment chamber is further provided,
The inlet is open to the outside of the heat treatment chamber,
and an inlet gas supply part provided on the inlet side further than the steam discharge part provided on the inlet side with respect to the steam supply part in the heat treatment chamber as the gas supply part. 3. The method according to claim 2,
The inlet side gas supply unit is installed in a pair,
In the heat treatment chamber, an inlet exhaust portion for exhausting gas in the heat treatment chamber to the outside of the heat treatment chamber is provided between a pair of the inlet gas supply portions. The method according to claim 1,
A gas supply unit for supplying at least one of an inert gas and air into the heat treatment chamber is further provided,
The outlet is open to the outside of the heat treatment chamber,
and an outlet gas supply part provided on the outlet side of the heat treatment chamber as the gas supply part further than the steam discharge part installed on the outlet side with respect to the steam supply part in the heat treatment chamber. 5. The method according to claim 4,
The outlet side gas supply unit is installed in a pair,
In the heat treatment chamber, an outlet side exhaust portion for exhausting gas in the heat treatment chamber to the outside of the heat treatment chamber is provided between a pair of the outlet gas supply portions. 6. The method according to any one of claims 1 to 5,
The water vapor supply unit includes a pair of nozzle units disposed to face each other in a conveyance direction of the object to be processed;
The heat treatment apparatus according to claim 1, wherein each of the pair of nozzle portions is configured to take out superheated water vapor toward an intermediate position side of the pair of nozzle portions that are opposed to each other. 4. The method according to claim 3,
Between each of the pair of inlet-side gas supply units and the inlet-side exhaust unit, an inlet-side partition plate is installed, respectively;
The inlet-side partition plate is configured to partially regulate a flow of gas in a direction parallel to a conveyance direction of the object to be processed in the heat treatment chamber. 6. The method of claim 5,
Between each of the pair of the outlet-side gas supply unit and the outlet-side exhaust unit, an outlet-side partition plate is installed,
The exit-side partition plate is configured to partially regulate a flow of gas in a direction parallel to a conveyance direction of the object to be processed in the heat treatment chamber.

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