TWI801149B - 線形掃描彩色共焦量測系統 - Google Patents
線形掃描彩色共焦量測系統 Download PDFInfo
- Publication number
- TWI801149B TWI801149B TW111106642A TW111106642A TWI801149B TW I801149 B TWI801149 B TW I801149B TW 111106642 A TW111106642 A TW 111106642A TW 111106642 A TW111106642 A TW 111106642A TW I801149 B TWI801149 B TW I801149B
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- TW
- Taiwan
- Prior art keywords
- measuring system
- linear scanning
- chromatic confocal
- confocal measuring
- scanning chromatic
- Prior art date
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Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US202163153712P | 2021-02-25 | 2021-02-25 | |
US202163153699P | 2021-02-25 | 2021-02-25 | |
US63/153,699 | 2021-02-25 | ||
US63/153,712 | 2021-02-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW202234020A TW202234020A (zh) | 2022-09-01 |
TWI801149B true TWI801149B (zh) | 2023-05-01 |
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Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW111106641A TWI807653B (zh) | 2021-02-25 | 2022-02-23 | 高深寬比微結構光學量測系統 |
TW111106645A TWI812025B (zh) | 2021-02-25 | 2022-02-23 | 全域式軸向可調色散鏡組及其彩色共焦量測系統 |
TW111106642A TWI801149B (zh) | 2021-02-25 | 2022-02-23 | 線形掃描彩色共焦量測系統 |
TW111106644A TWI788231B (zh) | 2021-02-25 | 2022-02-23 | 共軛光學模組、空間轉換光學模組以及其共軛光學之彩色共焦量測系統 |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
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TW111106641A TWI807653B (zh) | 2021-02-25 | 2022-02-23 | 高深寬比微結構光學量測系統 |
TW111106645A TWI812025B (zh) | 2021-02-25 | 2022-02-23 | 全域式軸向可調色散鏡組及其彩色共焦量測系統 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
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TW111106644A TWI788231B (zh) | 2021-02-25 | 2022-02-23 | 共軛光學模組、空間轉換光學模組以及其共軛光學之彩色共焦量測系統 |
Country Status (1)
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TW (4) | TWI807653B (zh) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104755908A (zh) * | 2012-07-27 | 2015-07-01 | 统雷有限公司 | 敏捷成像系统 |
CN111486953A (zh) * | 2020-06-02 | 2020-08-04 | 南京引创光电科技有限公司 | 光学测量系统 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4984888A (en) * | 1989-12-13 | 1991-01-15 | Imo Industries, Inc. | Two-dimensional spectrometer |
JP2008058338A (ja) * | 2006-08-04 | 2008-03-13 | Nippon Sheet Glass Co Ltd | 正立等倍レンズアレイ、正立等倍レンズアレイを用いた画像読取装置及び画像書込装置、並びに、正立等倍レンズアレイの製造方法 |
IL188029A0 (en) * | 2007-12-10 | 2008-11-03 | Nova Measuring Instr Ltd | Optical method and system |
CN101324467A (zh) * | 2008-07-03 | 2008-12-17 | 虞潜 | 一种纵向、横向分开聚焦的光谱仪聚焦成像系统 |
US8411268B2 (en) * | 2010-10-01 | 2013-04-02 | Raytheon Company | Two material achromatic prism |
ITTO20110298A1 (it) * | 2011-04-01 | 2012-10-02 | St Microelectronics Srl | Rilevatore ottico confocale, schiera di rilevatori e relativo procedimento di fabbricazione |
WO2015031988A1 (en) * | 2013-09-05 | 2015-03-12 | Mcmaster University | Apparatus and method for foci array scanning through an adjusting refractive medium |
TWI613534B (zh) * | 2016-08-25 | 2018-02-01 | 雙層微透鏡陣列光學元件 | |
US10481111B2 (en) * | 2016-10-21 | 2019-11-19 | Kla-Tencor Corporation | Calibration of a small angle X-ray scatterometry based metrology system |
US10690602B2 (en) * | 2017-02-17 | 2020-06-23 | Kla-Tencor Corporation | Methods and systems for measurement of thick films and high aspect ratio structures |
WO2018182526A1 (en) * | 2017-03-31 | 2018-10-04 | Nanyang Technological University | Apparatus for analysing a specimen |
CN111522132B (zh) * | 2020-04-29 | 2022-02-18 | 苏州埃克瑞自动化设备有限公司 | 可见光近红外宽光谱复消色差像方远心镜头及其应用 |
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2022
- 2022-02-23 TW TW111106641A patent/TWI807653B/zh active
- 2022-02-23 TW TW111106645A patent/TWI812025B/zh active
- 2022-02-23 TW TW111106642A patent/TWI801149B/zh active
- 2022-02-23 TW TW111106644A patent/TWI788231B/zh active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104755908A (zh) * | 2012-07-27 | 2015-07-01 | 统雷有限公司 | 敏捷成像系统 |
CN111486953A (zh) * | 2020-06-02 | 2020-08-04 | 南京引创光电科技有限公司 | 光学测量系统 |
Also Published As
Publication number | Publication date |
---|---|
TW202234020A (zh) | 2022-09-01 |
TWI788231B (zh) | 2022-12-21 |
TW202234127A (zh) | 2022-09-01 |
TW202311704A (zh) | 2023-03-16 |
TW202311703A (zh) | 2023-03-16 |
TWI807653B (zh) | 2023-07-01 |
TWI812025B (zh) | 2023-08-11 |
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