TWI801149B - 線形掃描彩色共焦量測系統 - Google Patents

線形掃描彩色共焦量測系統 Download PDF

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Publication number
TWI801149B
TWI801149B TW111106642A TW111106642A TWI801149B TW I801149 B TWI801149 B TW I801149B TW 111106642 A TW111106642 A TW 111106642A TW 111106642 A TW111106642 A TW 111106642A TW I801149 B TWI801149 B TW I801149B
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TW
Taiwan
Prior art keywords
measuring system
linear scanning
chromatic confocal
confocal measuring
scanning chromatic
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TW111106642A
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English (en)
Other versions
TW202234020A (zh
Inventor
陳亮嘉
伍國瑋
陳泓叡
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國立臺灣大學
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Publication of TW202234020A publication Critical patent/TW202234020A/zh
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Publication of TWI801149B publication Critical patent/TWI801149B/zh

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TW111106642A 2021-02-25 2022-02-23 線形掃描彩色共焦量測系統 TWI801149B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US202163153712P 2021-02-25 2021-02-25
US202163153699P 2021-02-25 2021-02-25
US63/153,699 2021-02-25
US63/153,712 2021-02-25

Publications (2)

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TW202234020A TW202234020A (zh) 2022-09-01
TWI801149B true TWI801149B (zh) 2023-05-01

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Family Applications (4)

Application Number Title Priority Date Filing Date
TW111106641A TWI807653B (zh) 2021-02-25 2022-02-23 高深寬比微結構光學量測系統
TW111106645A TWI812025B (zh) 2021-02-25 2022-02-23 全域式軸向可調色散鏡組及其彩色共焦量測系統
TW111106642A TWI801149B (zh) 2021-02-25 2022-02-23 線形掃描彩色共焦量測系統
TW111106644A TWI788231B (zh) 2021-02-25 2022-02-23 共軛光學模組、空間轉換光學模組以及其共軛光學之彩色共焦量測系統

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TW111106641A TWI807653B (zh) 2021-02-25 2022-02-23 高深寬比微結構光學量測系統
TW111106645A TWI812025B (zh) 2021-02-25 2022-02-23 全域式軸向可調色散鏡組及其彩色共焦量測系統

Family Applications After (1)

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TW111106644A TWI788231B (zh) 2021-02-25 2022-02-23 共軛光學模組、空間轉換光學模組以及其共軛光學之彩色共焦量測系統

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TW (4) TWI807653B (zh)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104755908A (zh) * 2012-07-27 2015-07-01 统雷有限公司 敏捷成像系统
CN111486953A (zh) * 2020-06-02 2020-08-04 南京引创光电科技有限公司 光学测量系统

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US4984888A (en) * 1989-12-13 1991-01-15 Imo Industries, Inc. Two-dimensional spectrometer
JP2008058338A (ja) * 2006-08-04 2008-03-13 Nippon Sheet Glass Co Ltd 正立等倍レンズアレイ、正立等倍レンズアレイを用いた画像読取装置及び画像書込装置、並びに、正立等倍レンズアレイの製造方法
IL188029A0 (en) * 2007-12-10 2008-11-03 Nova Measuring Instr Ltd Optical method and system
CN101324467A (zh) * 2008-07-03 2008-12-17 虞潜 一种纵向、横向分开聚焦的光谱仪聚焦成像系统
US8411268B2 (en) * 2010-10-01 2013-04-02 Raytheon Company Two material achromatic prism
ITTO20110298A1 (it) * 2011-04-01 2012-10-02 St Microelectronics Srl Rilevatore ottico confocale, schiera di rilevatori e relativo procedimento di fabbricazione
WO2015031988A1 (en) * 2013-09-05 2015-03-12 Mcmaster University Apparatus and method for foci array scanning through an adjusting refractive medium
TWI613534B (zh) * 2016-08-25 2018-02-01 雙層微透鏡陣列光學元件
US10481111B2 (en) * 2016-10-21 2019-11-19 Kla-Tencor Corporation Calibration of a small angle X-ray scatterometry based metrology system
US10690602B2 (en) * 2017-02-17 2020-06-23 Kla-Tencor Corporation Methods and systems for measurement of thick films and high aspect ratio structures
WO2018182526A1 (en) * 2017-03-31 2018-10-04 Nanyang Technological University Apparatus for analysing a specimen
CN111522132B (zh) * 2020-04-29 2022-02-18 苏州埃克瑞自动化设备有限公司 可见光近红外宽光谱复消色差像方远心镜头及其应用

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104755908A (zh) * 2012-07-27 2015-07-01 统雷有限公司 敏捷成像系统
CN111486953A (zh) * 2020-06-02 2020-08-04 南京引创光电科技有限公司 光学测量系统

Also Published As

Publication number Publication date
TW202234020A (zh) 2022-09-01
TWI788231B (zh) 2022-12-21
TW202234127A (zh) 2022-09-01
TW202311704A (zh) 2023-03-16
TW202311703A (zh) 2023-03-16
TWI807653B (zh) 2023-07-01
TWI812025B (zh) 2023-08-11

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