TWI800464B - 高折射率對比的ＡｌＯＡｌｘＧａ－ｘＡｓ ＤＢＲ ＶＣＳＥＬ製作方法 - Google Patents

高折射率對比的ＡｌＯＡｌｘＧａ－ｘＡｓ ＤＢＲ ＶＣＳＥＬ製作方法 Download PDF

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TWI800464B
TWI800464B TW111138069A TW111138069A TWI800464B TW I800464 B TWI800464 B TW I800464B TW 111138069 A TW111138069 A TW 111138069A TW 111138069 A TW111138069 A TW 111138069A TW I800464 B TWI800464 B TW I800464B
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alxga
xas
refractive index
high refractive
fabrication method
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TW111138069A
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TW202322505A (zh
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潘德烈
李承遠
李佳勳
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大陸商深圳市德明利光電有限公司
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TW111138069A 2021-11-16 2022-10-06 高折射率對比的ＡｌＯＡｌｘＧａ－ｘＡｓ ＤＢＲ ＶＣＳＥＬ製作方法 TWI800464B (zh)

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CN202111356428.6A CN114268020B (zh) 2021-11-16 2021-11-16 一种高折射率对比的Al2O3 AlxGa1-xAs DBR VCSEL制作方法
CN202111356428.6 2021-11-16

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TW201921819A (zh) * 2017-08-14 2019-06-01 美商三流明公司 表面安裝相容的vcsel陣列

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CN207459396U (zh) * 2017-09-21 2018-06-05 苏州全磊光电有限公司 一种用于vcsel阵列激光器的外延结构
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TW201921819A (zh) * 2017-08-14 2019-06-01 美商三流明公司 表面安裝相容的vcsel陣列

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CN114268020B (zh) 2023-11-28
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