TWI799724B - Wafer notch leveling device - Google Patents

Wafer notch leveling device Download PDF

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Publication number
TWI799724B
TWI799724B TW109124917A TW109124917A TWI799724B TW I799724 B TWI799724 B TW I799724B TW 109124917 A TW109124917 A TW 109124917A TW 109124917 A TW109124917 A TW 109124917A TW I799724 B TWI799724 B TW I799724B
Authority
TW
Taiwan
Prior art keywords
leveling device
wafer notch
wafer
notch
leveling
Prior art date
Application number
TW109124917A
Other languages
Chinese (zh)
Other versions
TW202205473A (en
Inventor
曾敏智
蕭擎宇
Original Assignee
三和技研股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三和技研股份有限公司 filed Critical 三和技研股份有限公司
Priority to TW109124917A priority Critical patent/TWI799724B/en
Publication of TW202205473A publication Critical patent/TW202205473A/en
Application granted granted Critical
Publication of TWI799724B publication Critical patent/TWI799724B/en

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TW109124917A 2020-07-23 2020-07-23 Wafer notch leveling device TWI799724B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW109124917A TWI799724B (en) 2020-07-23 2020-07-23 Wafer notch leveling device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW109124917A TWI799724B (en) 2020-07-23 2020-07-23 Wafer notch leveling device

Publications (2)

Publication Number Publication Date
TW202205473A TW202205473A (en) 2022-02-01
TWI799724B true TWI799724B (en) 2023-04-21

Family

ID=81323731

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109124917A TWI799724B (en) 2020-07-23 2020-07-23 Wafer notch leveling device

Country Status (1)

Country Link
TW (1) TWI799724B (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010038791A1 (en) * 1999-01-25 2001-11-08 Chartered Semiconductor Manufacturing Ltd. Method for aligning wafers in a cassette
JP2004247480A (en) * 2003-02-13 2004-09-02 Tamagawa Machinery Co Ltd Wafer turning device
TW201433786A (en) * 2013-02-21 2014-09-01 Kai Plus Electronic Co Ltd Wafer inspection apparatus
TW201913788A (en) * 2017-09-07 2019-04-01 大陸商上海新昇半導體科技有限公司 Wafer edge finding device
TWM605382U (en) * 2020-07-23 2020-12-11 三和技研股份有限公司 Wafer notch finder device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010038791A1 (en) * 1999-01-25 2001-11-08 Chartered Semiconductor Manufacturing Ltd. Method for aligning wafers in a cassette
JP2004247480A (en) * 2003-02-13 2004-09-02 Tamagawa Machinery Co Ltd Wafer turning device
TW201433786A (en) * 2013-02-21 2014-09-01 Kai Plus Electronic Co Ltd Wafer inspection apparatus
TW201913788A (en) * 2017-09-07 2019-04-01 大陸商上海新昇半導體科技有限公司 Wafer edge finding device
TWM605382U (en) * 2020-07-23 2020-12-11 三和技研股份有限公司 Wafer notch finder device

Also Published As

Publication number Publication date
TW202205473A (en) 2022-02-01

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