TWI799664B - 清掃裝置 - Google Patents

清掃裝置 Download PDF

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Publication number
TWI799664B
TWI799664B TW108141919A TW108141919A TWI799664B TW I799664 B TWI799664 B TW I799664B TW 108141919 A TW108141919 A TW 108141919A TW 108141919 A TW108141919 A TW 108141919A TW I799664 B TWI799664 B TW I799664B
Authority
TW
Taiwan
Prior art keywords
cleaning device
cleaning
Prior art date
Application number
TW108141919A
Other languages
English (en)
Chinese (zh)
Other versions
TW202031365A (zh
Inventor
鈴木暁雄
岡本俊一
Original Assignee
日商東麗工程股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商東麗工程股份有限公司 filed Critical 日商東麗工程股份有限公司
Publication of TW202031365A publication Critical patent/TW202031365A/zh
Application granted granted Critical
Publication of TWI799664B publication Critical patent/TWI799664B/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
TW108141919A 2018-11-28 2019-11-19 清掃裝置 TWI799664B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018222458A JP7094635B2 (ja) 2018-11-28 2018-11-28 清掃装置
JP2018-222458 2018-11-28

Publications (2)

Publication Number Publication Date
TW202031365A TW202031365A (zh) 2020-09-01
TWI799664B true TWI799664B (zh) 2023-04-21

Family

ID=70854269

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108141919A TWI799664B (zh) 2018-11-28 2019-11-19 清掃裝置

Country Status (3)

Country Link
JP (1) JP7094635B2 (ja)
TW (1) TWI799664B (ja)
WO (1) WO2020110648A1 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002177848A (ja) * 2000-12-15 2002-06-25 Toray Ind Inc 塗布用ダイの清掃装置および清掃方法並びにこれを用いたカラーフィルターの製造装置および製造方法
JP2017209633A (ja) * 2016-05-26 2017-11-30 株式会社Ｓｃｒｅｅｎホールディングス ノズル清掃装置、塗布装置およびノズル清掃方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3757992B2 (ja) * 1996-01-18 2006-03-22 東レ株式会社 塗布装置および塗布方法並びにカラーフィルタの製造方法および製造装置
JPH10216598A (ja) * 1997-02-04 1998-08-18 Toray Ind Inc 塗布方法および塗布装置並びにカラーフィルターの製造方法および製造装置
JP4850680B2 (ja) * 2006-12-15 2012-01-11 中外炉工業株式会社 吐出ノズルの清掃装置
JP5766990B2 (ja) * 2011-03-23 2015-08-19 東レエンジニアリング株式会社 塗布装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002177848A (ja) * 2000-12-15 2002-06-25 Toray Ind Inc 塗布用ダイの清掃装置および清掃方法並びにこれを用いたカラーフィルターの製造装置および製造方法
JP2017209633A (ja) * 2016-05-26 2017-11-30 株式会社Ｓｃｒｅｅｎホールディングス ノズル清掃装置、塗布装置およびノズル清掃方法

Also Published As

Publication number Publication date
WO2020110648A1 (ja) 2020-06-04
JP7094635B2 (ja) 2022-07-04
JP2020081994A (ja) 2020-06-04
TW202031365A (zh) 2020-09-01

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