TWI797479B - Gas supply apparatus having transference portion and assembling method of connector of gas supply apparatus - Google Patents

Abstract

An object of the present invention is to provide a gas supply device equipped with a connector transfer part capable of minimizing wear of threads and improving durability of components when a valve connector and a connecting pipe connector are combined, and a connector coupling method of the gas supply device . In order to realize the gas supply device, it includes: a connector fastening part including a connection pipe connector and a connection pipe connector housing, one side and the other side of the connection pipe connector are respectively connected to the valve equipped in the container connected to the gas demand place, the connecting pipe connector housing surrounds the outside of the connecting pipe connector and is equipped to rotate together with the connecting pipe connector; the first transfer mechanism is used to move the entire connecting pipe connector The device fastening part is used to transfer the direction of the valve connector; the connector transfer part is used to transfer the connecting pipe connector to the direction of the valve connector.

Description

Gas Supply Device Equipped with Connector Transfer Unit and Connector Bonding Method

The present invention relates to a gas supply device equipped with a connector transfer unit and a connector coupling method of the gas supply device, and more specifically, to a connector transfer unit equipped with a connecting pipe connector for transferring a valve connector coupled to a container side The gas supply device and the connector combination method of the gas supply device.

In general, for a device that supplies gas to a device using gas (particularly, where gas is demanded for fine operations such as semiconductor equipment), various types of gas suitable for various purposes are required to satisfy predetermined concentrations, pressures, and the like.

In order to efficiently supply such gases, many kinds of gases are kept under high pressure. In particular, gases with harmful properties such as flammability, toxicity, and corrosion are strictly managed in separate spaces separated from humans.

The gas storage container for storing gas (hereinafter referred to as "container") is connected to the gas demand point. If the gas stored in the container is completely exhausted, the connecting pipe connected to the gas demand point is separated from the valve of the gas container and the container is replaced. , and then re-supply the gas by coupling the connector fastening portion including the connecting pipe connector connected at the gas demand to the valve connector of the replaced container.

A lid separation portion for separating a lid covering an end portion of the valve portion connector of the container is provided on a side portion of the connector fastening portion.

And, a rotation mechanism for rotating the cover separation part and the connector fastening part and a plurality of plates and housings for fixing these parts may be equipped. Driving the rotary mechanism couples the connector fastening portion to the valve connector.

In addition, in order to couple the connector fastening portion to the valve connector of the container, it is necessary to provide a transfer mechanism for transferring the connector fastening portion toward the valve connector.

While the connector fastening part is being transferred by the transfer mechanism, the connector fastening part is rotated by the rotation of the rotation mechanism, whereby the screw connection of the valve connector and the connecting pipe connector is achieved.

In this case, the transfer mechanism is equipped to integrally transfer the cap separating portion and the connector fastening portion, and the plate and the case for fixing them toward the valve connector of the container. In this case, if the valve connectors and the piping connectors are integrally transferred when they are joined, due to the excessive weight of the transferred parts, it may occur due to contact shock when the connecting piping connectors are joined to the valve connectors. Thread wear.

As a prior art related to a gas supply device for a semiconductor device, Korean Patent No. 10-0242982 is disclosed.

The present invention was conceived to solve the above-mentioned problems, and its object is to provide a connector transfer unit that can minimize the wear of the thread and improve the durability of the parts when the valve connector and the connecting pipe connector are combined. The gas supply device and the connector combination method of the gas supply device.

Another object of the present invention is to provide a gas supply device equipped with a connector transfer portion capable of minimizing friction between components when connecting a pipe connector and a valve connector, and a connector coupling method of the gas supply device.

In order to achieve the above object, the gas supply device of the present invention includes: a connector fastening part including a connection pipe connector and a connection pipe connector housing, one side and the other side of the connection pipe connector are respectively connected to Equipped to connect at the valve connector of the container and the gas demand, the connecting pipe connector housing surrounds the outside of the connecting pipe connector and is equipped to rotate together with the connecting pipe connector; the first transfer mechanism, with For transferring the entire connector fastening part toward the direction of the valve connector; the connector transfer part is used for transferring the connecting pipe connector toward the direction of the valve connector.

The connector moving part may include a connector clamping part for clamping with the connecting pipe connector; a connector moving drive part for moving the connector clamping part toward the valve connector. transfer.

A guide shaft for guiding the movement of the connector engagement member by the drive of the connector movement drive unit may be provided.

The connector movement driving part may be implemented as an air cylinder or a motor that moves the connector engaging member by supplying air.

The air cylinder may be equipped with a regulator for adjusting the pressure of the air being supplied.

The connecting pipe connector can be rotated by the driving of the rotating mechanism so as to be screwed with the valve connector, and the pressure adjustable by the regulator is set to be consistent with the pressure of the connecting pipe connector and the valve connector. Corresponds to the linear feed distance of the screw connection.

A recessed engagement groove may be formed on the outer peripheral surface of the connection pipe connector, and the connector engagement member is inserted into the engagement groove and passes through the engagement with the connection pipe connector when moving linearly. were then transferred together.

The connecting pipe connector can be rotated by the drive of the rotating mechanism, and an arc-shaped notch can be formed on the connector engaging member, and a part of the main body of the connector engaging member surrounding the notch can be is snapped into the connection piping connector.

A snapping part may be formed on the connector snapping part, and the snapping part is formed on both sides of the cutout part and snapped into the connecting pipe connector inside the snapping groove, as the The upper end of the cutout portion of the connector engaging component on the upper side of the cutout portion may be spaced apart from the engaging groove on the upper side so as not to constitute engaging engagement.

When the connector engaging member is moved toward the valve connector, a side surface in the direction of the valve connector may be in contact with the connecting pipe connector, and a side in the direction opposite to the direction of the valve connector may be in contact with the connecting pipe connector. The other side is separated from the connecting pipe connector.

It may be equipped with an operating part that is connected to the connector moving driving part on one side and connected to the connector snapping part on the other side, and the operating part may be configured to include: a first snapping part and a second snapping part , are separated from each other to form a clamping connection with the connector clamping part, and one side of the operation shaft is combined with the first clamping part and the second clamping part, and the other side is connected with the cylinder.

A rotation mechanism that integrally rotates the connection pipe connector and the connection pipe connector housing may be provided, and a control unit may be provided that controls the connection by transferring the connection pipe through the connector transfer unit. In the case of a pipe connector, the connection pipe connector and the connection pipe connector housing are integrally rotated by the rotation mechanism.

A cover separation part for separating a cover covering the valve connector may be provided on the side of the connector fastening part, and the connector fastening part and the cover may be transferred integrally by the first transfer mechanism. body separation.

A rotating mechanism for rotating the connector fastening part in conjunction with the connector fastening part and the valve connector may be equipped, and by driving the rotating mechanism, the cover separation part and the connector fastening part can be Rotating integrally, a gearbox equipped with a plurality of gears for transmitting the drive of the rotation mechanism is transferred integrally with the connector fastening portion by the first transfer mechanism.

The connector coupling method of the gas supply device of the present invention includes the following steps: using the first transfer mechanism to transfer the connector fastening part including the connection pipe connector and the connection pipe connector housing to the pair adjacent to the valve connector. oriented position, one side and the other side of the connecting pipe connector are respectively connected to the valve connector and the gas demand equipped on the container, and the connecting pipe connecting housing surrounds the connecting pipe connector outside and is equipped to rotate together with the connecting pipe connector; in the state where the first transfer mechanism is stopped, the connector transfer part is driven to transfer the connecting piping connector to the direction of the valve connector to combine the Connect the piping connector and valve connector.

Air can be supplied to an air cylinder constituting the connector moving drive unit to move the connector engaging member and the connecting pipe connector toward the valve connector.

The air supplied to the cylinders may be regulated by a regulator to supply pressure.

The connection pipe connector can be screwed with the valve connector by the driving rotation of the rotation mechanism, and the pressure adjusted by the regulator can be set so that when the connection pipe connector is driven and rotated by the rotation mechanism In the case of screwing with the valve connector, it corresponds to the linear transfer distance of the connecting pipe connector by the screwing.

According to the present invention, the durability of parts can be improved by minimizing the wear of the thread when the valve connector and the connecting pipe connector are combined.

In addition, friction between parts can be minimized when connecting the pipe connector and the valve connector.

The present invention will be described in detail below with reference to the accompanying drawings.

Here, when referring to directions, the X-axis shown in FIG. 1 is called the front-back direction, the Y-axis is called the left-right direction, and the Z-axis is called the vertical direction. In addition, the horizontal direction includes the above-mentioned left-right direction and front-back direction constituted by the XY plane. In addition, when distinguishing the front and rear directions, the side where the container 10 is arranged is called the front, and the side where the lower module 3 is arranged is called the rear. And, when distinguishing the left and right directions based on the cover separation part 320 and the connector fastening part 330, the side where the cover separation part 320 is arranged is defined as the right side, and the side where the connector fastening part 330 is arranged is defined as the right side. Side is defined as the left side.

Referring to FIGS. 1 to 3 , the gas supply device 1 of the present invention may include: an upper module 2 including an upper plate 211 arranged to be fixed at a position spaced upward from the valve portion provided on the upper end of the container 10; 3. Equipped at the lower part of the upper module 2, equipped with a cover separation part 320 and a connector fastening part 330, the cover separation part 320 separates the cover body 31 covering the valve connector 30, the valve connector 30 is equipped on the valve part, and the connector fastening part 330 is used to connect the connecting pipe connector 331 connected to the gas demand place to the valve connector 30; the valve opening and closing module 4 is used to open and close the The valve of the valve department.

The container 10 is configured to store and supply process gas supplied to a gas demand place such as a semiconductor device, and the valve unit is provided on the upper portion of the container 10 .

The valve section is constituted to include: a valve (not shown) for controlling the supply of gas; a valve connector 30 provided on one side of the valve and fastened to a connector fastened to the lower module 3 part 330; cover 31, covering the valve connector 30; a valve shutter (not shown) to open and close the valve; a handle 50, connected to the upper part of the valve shutter, and the valve shutter is lifted and lowered as it rotates , thereby opening and closing the valve.

Fixing blocks 510, 520, 530 are coupled to the valve portion. The fixing blocks 510 , 520 , 530 are equipped with a first alignment part 512 .

The fixing blocks 510, 520, 530 may be formed by using a first fixing block 510, a second fixing block 520 and a third fixing block 530 surrounding the valve part.

If the valve part is surrounded by the combination of the second fixing block 520 and the third fixing block 530, the valve connector 30 and the cover body 31 in the valve part will The side direction protrudes and is exposed, and the handle 50 in the valve portion protrudes upward relative to the fixing blocks 520 , 530 and is exposed.

The first fixing block 510 is formed into a square barrel shape with a length along the Y-axis direction, the second fixing block 520 is combined on one side of the Y-axis direction, and the second fixing block 520 is equipped on one side of the X-axis direction. A pair of alignment parts 512 .

The first alignment portion 512 may be formed by an alignment pin insertion groove 512 formed in a concave manner on one side in the X-axis direction.

The lower die set 3 is formed so as to be capable of horizontal transfer and vertical lift transfer with respect to the upper die set 2 .

The first aligning part 512 is configured to align the container 10 by combining with the second aligning part 351 equipped on the lower die set 3 when the lower die set 3 is transferring in the horizontal direction.

The second alignment part 351 may be formed by protruding from the alignment block 350 of the lower module 3 described later in the X-axis direction, which is a direction opposite to the alignment pin insertion groove 512, and has a length in the horizontal direction. Standard pin 351 constitutes.

The alignment of the container 10 is achieved by inserting the alignment pin 351 into the alignment pin insertion groove 512 .

In the first fixing block 510, a first coupling portion 511 is provided at a position adjacent to the first alignment portion 512, and the alignment block 350 of the lower module 3 is equipped with a A joint part 511 realizes the joint second joint part 352 .

The first coupling portion 511 may be formed by a fixing groove 511 formed in a concave manner along the X-axis direction on the same surface as the first alignment portion 512 in the first fixing block 510 .

The second combining part 352 may be composed of a fixing block combining part 352 protruding toward the first combining part 511 from the alignment block 350 adjacent to the second aligning part 351 .

A plurality of protrusions 352a are provided on the outer surface of the fixing block coupling part 352, and the plurality of protrusions 352a are elastically supported by springs (not shown) provided inside. A protrusion insertion groove (not shown) into which the protrusion 352 a is inserted is formed inside the fixing groove 511 . If the fixing block coupling part 352 is inserted into the fixing groove 511, the protrusion 352a is inserted into the protrusion insertion groove, thereby preventing the fixing block coupling part 352 from disengaging from the fixing groove 511, Furthermore, the lower module 3 is maintained in a state of being combined with the first fixing block 510 .

In the case where the fixing block coupling part 352 is pulled out from the fixing groove 511, if air is supplied so that the protrusion 352a overcomes the elastic force of the spring and moves from the surface of the fixing block coupling part 352 toward the When the inner side moves, the protrusion 352a is disengaged from the protrusion insertion groove. Therefore, the fixing block coupling part 352 can disengage from the fixing groove 511 .

The upper module 2 may be equipped with transfer guides (not shown), so as to be able to transfer the lower module 3 in directions of the X-axis, Y-axis and Z-axis respectively. If the operator grasps the lower die set 3 with his hands and applies a force along the axial direction, the lower die set 3 can be moved to one of the X-axis, Y-axis and Z-axis directions. Moreover, the combination of the first alignment part 512 and the second alignment part 351 can be realized through the transfer of the lower die set 3 , and the alignment of the container 10 can be realized through this combination.

The lower module 3 is equipped with: a plurality of housings 311, 312, 313, 314; a cover separation part 320; a connector fastening part 330, a connector transfer part 335, a submodule transfer mechanism 340, an Block 350 , plug module 360 , gasket supply unit 370 , and gasket transfer unit 380 .

The plurality of housings 311, 312, 313, 314 are configured to include: an upper housing 311 configured as a plate on the upper part of the lower module 3; a first side housing 312, a second side housing 313, Respectively combined on both sides of the Y-axis direction of the upper casing 311; the lower casing 314 is separated from the upper casing 311 to the lower side, and the two sides are connected to the first side casing 312 and the second side casing 313 combined.

The upper case 311 , the first side case 312 , the second side case 313 , and the lower case 314 are configured to surround the upper, lower, and side portions of the lower module 3 other than the front and rear.

The cover separating part 320 separates the cover 31 covering the valve connector 30 provided to the valve part from the valve connector 30 .

The cover separation part 320 is formed with a groove so that the cover body 31 is inserted inside, and if the rotation mechanism is driven under the condition that the cover body 31 is inserted into the groove of the cover body separation part 320 shown) and rotate the cover separation part 320 , the cover 31 is separated from the valve connector 30 . On the contrary, the rotation mechanism may be driven to couple the cap 31 separated from the cap separating part 320 to the valve connector 30 .

The connector fastening part 330 includes: a connecting pipe connector 331 connected to a gas demand place; a connecting pipe connector housing 332 ( FIG. 7 ) surrounding the outer side of the connecting pipe connector 331 . The connector fastening portion 330 is provided to be able to connect the connecting pipe connector 331 to the valve connector 30 . When the handle 50 is turned to open the valve while the connector fastening part 330 is connected to the valve connector 30 , the gas inside the container 10 is supplied to the gas demand place through the valve connector 30 and the connecting pipe connector 331 . The connection pipe connector 331 and the connection pipe connector housing 332 are rotated together by the driving of the rotation mechanism.

The submodule transfer mechanism 340 integrally transfers the submodule including the cover separating part 320 and the connector fastening part 330 in the left-right direction (Y-axis direction) and front-rear direction (X-axis direction). The sub-module transfer mechanism 340 may be configured to include: a first transfer mechanism 340a for transferring the cover separation part 320 and the connector fastening part 330 integrally forward and backward; a second transfer mechanism 340b for The cover separation part 320 and the connector fastening part 330 are integrally transferred to the left and right.

The first transfer mechanism 340a may be configured using a transfer guide for transferring in the front-rear direction and an air cylinder for applying transfer force by supplying air (air). Moreover, the said 2nd transfer mechanism 340b can be comprised using the transfer guide for transferring in the left-right direction, and the air cylinder for applying transfer force by supplying air (air).

The rotation mechanism rotates the cover separation part 320 and the connector fastening part 330 . The rotation mechanism includes a motor and a speed reducer that generate a rotation force, and includes a rotation transmission member for transmitting the rotation force to the cover separation part 320 and the connector fastening part 330 .

The rotation transmission part transmits the rotational force to the cover separation part 320 and the connector fastening part 330 respectively, and if the motor is driven, the cover separation part 320 and the connector fastening part 330 will rotate simultaneously . On the other hand, the rotation mechanism may be equipped with two motors, and the cover separation part 320 and the connector fastening part 330 are respectively rotated by the two motors.

An inner case 315 which is opened at the front and rear and surrounds left and right and up and down may be provided so that the cover separation part 320 and the connector fastening part 330 can be provided. The inner case 315 can be combined with an upper portion of the lower case 314 .

The alignment block 350 is coupled so as to protrude from the front end portion of the inner case 315 and has a substantially polyhedron shape. On the front surface of the alignment block 350, an alignment pin 351 as a second alignment portion 351 is formed in a shape protruding toward the valve portion. The protruding shape is formed with a fixing block coupling part 352 as the second coupling part 352 .

The gasket supply unit 370 will be described with reference to FIGS. 3 and 5 .

The gasket supply part 370 is a part for supplying a new gasket (gasket) to be installed between the connecting pipe connector 331 and the valve connector 30 when the container 10 is replaced, and includes: a storage part 372 for storing more a gasket 371; a gasket receiving part transfer mechanism 373, which is used to transfer the gasket receiving part 372 forward and backward.

The gasket storage unit transfer mechanism 373 may be configured to include: a transfer guide that guides transfer in the front-rear direction; and a drive unit that provides a driving force so that it can be transferred along with the transfer guide.

A plurality of gaskets 371a are provided in an upright state in the gasket storage portion 372, and are configured so that after a gasket holder 381 to be described later picks up a gasket located on one side edge, it can pass through as a gasket formed on the gasket. The gasket discharge portion 372a of the opening of the housing portion 372 is detached.

The gasket transfer unit 380 will be described with reference to FIGS. 3 and 6 .

The gasket transfer unit 380 is configured to include: a gasket gripper 381 composed of a pair of gasket gripper parts 381a, 381b for picking up a gasket; a gasket gripper operating mechanism 382 for making the gasket The pair of gasket holder parts 381a, 381b are operated in a manner of approaching each other or moving away from each other; the first gasket holder transfer mechanism 383 is used to move the gasket holder 381 and the gasket holder The operating mechanism 382 is integrally transferred forward and backward; the second gasket holder transfer mechanism 384 is used to transfer the gasket holder 381, the gasket holder operating mechanism 382 and the first gasket holder Mechanism 383 integrally moves to the left and right.

The first gasket holder transfer mechanism 383 and the second gasket holder transfer mechanism 384 can utilize transfer guides for guiding the transfer in the front-rear direction and the left-right direction and provide a driving force to be able to follow the transfer. The drive unit to which the guide is transferred is constituted.

The connector transfer unit 335 will be described with reference to FIGS. 4 , 7 to 13 .

The cover separation part 320 and the connector fastening part 330 can be moved forward and backward in a straight line through the first transfer mechanism 340a. As shown in FIG. 7 , the cover separation part 320 and the connector fastening part 330 are integrally combined with the gear case 345 . A plurality of gears constituting a rotation transmission member of the rotation mechanism are provided inside the gear box 345 . The plurality of gears may be configured to simultaneously rotate the cover separation part 320 and the connector fastening part 330 by receiving a rotational force from one motor.

Although it is also possible to drive the first transfer mechanism 340a so that the cover separating part 320, the connector fastening part 330 and the gear box 345 are linearly transferred integrally, so that the connecting pipe connector 331 is coupled to the valve. Connector 30, but in this case, there are many components to be transferred by driving the first transfer mechanism 340a, and the weight is heavy, so shock may occur when connecting the connecting pipe connector 331 to the valve connector 30.

In order to prevent such a problem, a connector transfer part 335 is equipped independently of the first transfer mechanism 340a, so that when the connection pipe connector 331 is coupled to the valve connector 30, the first transfer mechanism 340a is not driven, but The connector transfer unit 335 is driven to transfer only the connection pipe connector 331 in the front-rear direction.

The connector transfer part 335 may include: a connector locking part 335-1, a part of the lower part is inserted into the locking groove 331b formed at the end of the connecting pipe connector 331, so as to realize the connection with the connecting pipe connector 331. Clamping; the operating part 335-2 is connected to the upper part of the connector clamping part 335-1 and is equipped to be able to be moved in a straight line in the front and rear direction; the connector moving drive part 335-4 provides a driving force to make the operation The member 335-2 can be moved linearly in the front-rear direction; the guide shaft 335-3 serves as a guide when the operation member 335-2 is moved linearly.

The connector engaging member 335-1 is formed in a substantially rectangular plate shape with a length in the vertical direction, and includes: an upper body 335-1a; a lower body 335-1b, which is stepped from the upper body 335-1a Extend down.

An insertion groove 335-1c is formed in the center of the upper end of the upper body 335-1a, and the front end of the guide shaft 335-3 is formed on the left and right sides of the insertion groove 335-1c. The partially inserted guide shaft is inserted into the hole 335-1d.

The lower main body 335-1b is formed with a notch 335-1e that is cut upward from the center of the lower end in an arc shape, and a part of the notch 335-1e that surrounds the notch 335-1e is formed. Both sides have snap-in portions 335-1f with a length in the up-down direction.

The connecting pipe connector 331 is composed of: a connector main body portion 331a having a cylindrical shape; an engagement groove 331b formed in a concave manner along the outer peripheral surface of the connector main body portion 331a; a nut portion 331c formed from the The connector main body portion 331 is formed in the shape of a hexagon nut extending rearward.

The connector main body part 331a and the nut part 331c are formed so that the inside is penetrated along the front and back, and threads are formed on the inner surface of the penetrated inside of the connector main body part 331a, so as to realize the connection with the valve connector 30. Simultaneously with the screwing of the outer peripheral surface, the valve connector 30 is inserted into the inside of the connector main body portion 331a.

The engaging portion 335-1f, which is a part of the lower body 335-1b of the connector engaging member 335-1, is inserted into the engaging groove 331b, so that the connector engaging member 335 is moved forward and backward. In the case of -1, the connection pipe connector 331 is also transferred in the front-rear direction due to the engagement between the connector engagement member 335-1 and the connection pipe connector 331.

That is, referring to FIG. 9 , FIG. 10 and FIG. 13 , in the connector locking part 335-1, a pair of locking parts 335-1f constituting both sides of the lower body 335-1b are inserted into the inner side of the locking groove 331b. , so as to realize the clamping between the connecting pipe connector 331 and the connector clamping part 335-1.

9, FIG. 10 and FIG. 12, since the upper end portion 331d, which is a part of the connector main body portion 331a of the connection pipe connector 331, is located at a position detached from the upper side of the engaging groove 331b, the lower body 335-1b The upper end 335-1g of the notch is located radially outside of the engagement groove 331b. Therefore, the engagement between the connection pipe connector 331 and the connector engagement member 335-1 is not achieved in this portion.

Like this, if a part of the connector snap part 335-1 is snapped into the snap groove 331b of the connection pipe connector 331, the friction between the parts when the connection pipe connector 331 and the valve connector 30 are combined can be minimized. .

This will be described in more detail as follows. In order to connect the connecting pipe connector 331 to the valve connector 30, it is necessary to drive the rotating mechanism to rotate the connecting pipe connector 331 and simultaneously drive the connector moving drive part 335-4 to move the connecting pipe connector 331 forward. The clamping member 335-1 and the connecting pipe connector 331 clamped thereto. In this case, the connection pipe connector 331 is in a rotating state due to the driving of the rotation mechanism, so it is engaged with the connector engaging member 335 - 1 inserted into the engagement groove 331 b of the connection pipe connector 331 . The portion 335-1f is in contact with the connector main body portion 331a of the rotating connection pipe connector 331 to generate friction. On the contrary, the upper end 335-1g of the cutout portion of the lower body 335-1b of the connector engaging member 335-1 does not contact the connector body portion 331a of the connecting pipe connector 331, and friction does not occur. Therefore, generation of friction due to contact between the connector engaging member 335 - 1 and the connection pipe connector 331 can be minimized.

In addition, when the connector engaging member 335-1 is linearly moved in the direction of the valve connector 30, the engagement between the front side surface of the engaging portion 335-1f and the connecting pipe connector 331 may be performed. The front side surface 331e inside the groove 331b contacts, and the rear side surface of the engagement portion 335-1f contacts the rear side surface 331f inside the engagement groove 331b where the pipe connector 331 is connected. Although FIG. 13 shows a situation where the rear side surface 331f is in contact with the engaging portion 335-1f, it may be configured to be separated by a small distance. With such a configuration, it is possible to minimize the generation of friction due to the contact between the connector engaging member 335 - 1 and the connecting pipe connector 331 .

One side of the operation part 335-2 is connected to the upper part of the connector clamping part 335-1, and the other side is connected to the connector moving driving part 335-4. The operating member 335-2 is configured to include: a first engaging portion 335-2a and a second engaging portion 335-2b, which are located in front of and behind the insertion groove 335-1c of the upper body 335-1a, and are formed as Disc shape with a diameter larger than the width of the insertion groove 335-1c in the left-right direction; the operation shaft 335-2c is equipped to pass through the first engaging part 335-2a and the second engaging part 335-2b combined in the center and have a length in the fore-and-aft direction.

The first clamping part 335-2a and the second clamping part 335-2b are configured to be spaced apart along the front-rear direction, and are configured so that the upper body 335-1a located on the side of the insertion groove 335-1c is located on the side of the insertion groove 335-1c. Space apart.

The guide shaft 335-3 may be provided as a pair on both sides with the operation shaft 335-2c interposed therebetween. The rear end of the guide shaft 335-3 is provided to be inserted into the connector moving driving part 335-4 so as to be able to move forward and backward inside the connector moving driving part 335-4, and the front end is inserted into the guide shaft insertion hole 335. - 1d, so that when the connector movement driving part 335-4 is driven, the connector locking member 335-1 is guided by the guide shaft 335-3 and moved to the front or the rear.

A connector movement drive unit 335-4 is connected to the operation shaft 335-2c.

The connector moving driving part 335-4 provides a driving force for moving the connector engaging part 335-1 forward or backward. For example, the connector movement driving unit linearly moves the connector locking member 335 - 1 forward and backward by supplying air.

The air cylinder may be equipped with a regulator (not shown) for adjusting the pressure of the supplied air (air).

In addition, the connector moving drive unit may be configured by a motor driven by electricity. In the case where the connector movement driving part is constituted by a motor, a power transmission part may be provided so that the connector engaging part 335-1 linearly moves by the rotational movement of the motor. Since the motor can be controlled to adjust the rotational force, it can perform the function of the regulator of the air cylinder.

In addition, other than the examples described above, the connector moving drive unit can be applied as long as it can linearly move the connector engaging member 335 - 1 .

The connection pipe connector 331 is moved forward by the drive of the connector moving drive part 335 - 4 while being rotated by the drive of the rotation mechanism, and coupled with the valve connector 30 accordingly. In this case, since the connecting pipe connector 331 and the valve connector 30 are screwed together, the linear distance to be moved during screwing is determined by the pitch and the rotational speed.

Therefore, the driving force of the connector movement driving part 335-4 is realized by adjusting the pressure of the regulator, and the adjusted pressure can be set to be the same as that performed by the rotation of the connecting pipe connector 331. Corresponds to the straight-line distance that is moved when the thread is engaged.

A method of combining the valve connector 30 and the connecting pipe connector 331 will be described with reference to FIGS. 14 and 15 .

As shown in FIG. 14, if the first transfer mechanism 340a is driven to move the cover separating part 320 and the connector fastening part 330 forward in a state where the valve connector 30 and the connecting pipe connector 331 are spaced apart, the connecting The pipe connector 331 is located close to the valve connector 30 .

Then, in the state where the drive of the first transfer mechanism 340a is stopped, the connector moving drive part 335-4 is driven to move the connector locking member 335-1 and the connecting pipe connector 331 locked thereto forward, When the rotating mechanism is driven to rotate the connection pipe connector 331 and the connection pipe connector housing 332, as shown in FIG. .

At this time, in the case where the connector movement driving part 335-4 is constituted by an air cylinder, the air supplied to the air cylinder is adjusted by a regulator to adjust the supply pressure so that the connector snapping part 335 can be properly adjusted. -1 and the transfer speed of the connecting pipe connector 331 engaged with it.

According to the configuration as described above, it is possible to minimize the shock when connecting the connection pipe connector 331 to the valve connector 30 by separately providing the first transfer mechanism 340a and the connector moving drive part 335-4. A transfer mechanism 340a can transfer the connector fastening part 330 including the connecting pipe connector housing 332, the cover separation part 320 and the gear box 345 integrally to the front or rear, and the connector moving drive part 335-4 only The transfer connection pipe connector 331 is transferred forward or backward.

Although the structure of the gas supply device using the upper module 2 and the lower module 3 has been described above as an example, it is not limited thereto and can be applied to various structures.

In addition, although the gas supply device for manually aligning the container 10 has been described as an example, the present invention is not limited thereto, and may be applied to a gas supply device for automatically aligning the container 10 .

As mentioned above, although the present invention has been described in detail by taking the preferred embodiment as an example, the present invention is not limited to the foregoing embodiment, and can be implemented with various modifications within the scope of the claims, the detailed description of the invention, and the accompanying drawings. , and these also belong to the present invention.

2: Upper module 3: Lower module 4: Valve opening and closing module 10: container 30: Valve connector 31: cover body 50: handle 211: upper plate 311: upper shell 312: first side shell 313: second side shell 314: lower shell 315: inner shell 320: Cover separation part 330: connector fastening part 331: Connect the piping connector 331a: Connector body 331b: snap-in slot 331c: nut part 331d: upper end 331e: front side 331f: rear side 332: Connect the piping connector housing 335: Connector transfer part 335-1: Connector Snap-in Parts 335-1a: Upper Body 335-1b: Lower body 335-1c: insertion slot 335-1d: Guide shaft insertion hole 335-1e: Incision 335-1f: Snap-in part 335-1g: the upper end of the incision 335-2: Operating parts 335-2a: the first clamping part 335-2b: The second clamping part 335-2c: Operating shaft 335-3: Guide shaft 335-4: Connector moving drive unit 340: Sub-module transfer mechanism 340a: the first transfer mechanism 340b: the second transfer mechanism 345: gear box 350: alignment block 351:Second alignment part 352: the second junction 352a: Raised 360: plug module 370: Gasket supply department 371, 371a: Gasket 372: Gasket storage part 372a gasket discharge part 373: Gasket storage part transfer mechanism 380:Seal transfer part 381: Gasket Holder 381a: Gasket Holder Parts 381b: Gasket Holder Parts 382: Gasket holder operating mechanism 383: The first gasket holder transfer mechanism 384: Second gasket holder transfer mechanism 510, 520, 530: fixed block 511: the first junction 512: The first alignment department

FIG. 1 is a perspective view showing a gas supply device of the present invention. Fig. 2 is a perspective view showing a state in which a fixing block is coupled to a valve portion of a container in the gas supply device of the present invention. 3 is a perspective view showing a lower module of the gas supply device according to the present invention. Fig. 4 is a perspective view showing a part of the lower module in the gas supply device of the present invention at a different angle from Fig. 3 . Fig. 5 is a perspective view showing a gasket supply part in the gas supply device of the present invention. 6 is a perspective view showing a gasket transfer unit in the gas supply device of the present invention. Fig. 7 is a perspective view showing elements in which a gear case, a cover separation part, a connector fastening part, and a connection pipe connector transfer mechanism are combined in the gas supply device of the present invention. Fig. 8 is a perspective view showing the connecting pipe connector transfer mechanism of the present invention. Fig. 9 is a perspective view showing a state in which the connector engaging member and the connecting pipe connector of the present invention are coupled. Fig. 10 is a perspective view showing a state where the connector engaging member and the connecting pipe connector of the present invention are separated. Fig. 11 is a front view showing the connecting pipe connector transfer mechanism of the present invention. Fig. 12 is an A-A sectional view of Fig. 11 . Fig. 13 is a B-B sectional view of Fig. 12 . Fig. 14 is a perspective view showing a state before the connector fastening portion of the present invention is combined with the valve connector of the container. Fig. 15 is a cross-sectional view showing a state where the connector fastening portion of the present invention and the valve connector of the container are coupled.

2: Upper module

3: Lower module

4: Valve opening and closing module

10: container

50: handle

510: fixed block

211: upper plate

Claims (18)

A gas supply device comprising: a connector fastening portion including a connection pipe connector and a connection pipe connector housing, one side and the other side of the connection pipe connector are respectively connected to a valve connector equipped in a container and a gas demand The connection pipe connector housing surrounds the outside of the connection pipe connector and is equipped to rotate together with the connection pipe connector; the first transfer mechanism is used to connect the entire connector fastening part to the valve and a connector transfer part for transferring only the connection pipe connector to the valve connector in the connector fastening part including the connection pipe connector and the connection pipe connector housing . The gas supply device according to claim 1, wherein the connector transfer part includes: a connector snap-fitting part for snap-fitting the connector of the connecting pipe; and a connector moving drive part for providing the connector The driving force that the snap-fit part moves in the direction of the valve connector. The gas supply device according to claim 2, wherein a guide shaft is provided for guiding the movement of the connector engaging member driven by the connector movement driving part. The gas supply device according to claim 2, wherein the connector moving drive part is constituted by an air cylinder or a motor that moves the connector engaging member by supplying air. The gas supply device according to claim 4, wherein the air cylinder is equipped with a regulator for adjusting the pressure of the air to be supplied. The gas supply device as described in claim 5, wherein the connecting pipe connector is rotated by the driving of the rotating mechanism, thereby threadedly coupled with the valve connector, and adjusted by the regulator The pressure is set to correspond to the linear transfer distance according to the threaded engagement of the connecting pipe connector and the valve connector. The gas supply device according to claim 2, wherein a recessed engagement groove is formed on the outer peripheral surface of the connecting pipe connector, and when the connector engagement member is inserted into the engagement groove and moves linearly It is transferred together with the connecting pipe connector by engaging with the connecting pipe connector. The gas supply device as claimed in item 7, wherein the connecting pipe connector is rotated by the driving of the rotating mechanism, and the connector engaging member is formed with an arc-shaped cutout, and the connector around the cutout is engaged A part of the main body of the component is snapped onto the connecting pipe connector. The gas supply device as claimed in claim 8, wherein a snapping part is formed on the connector snapping part, and the snapping part is formed on both sides of the cutout part and snapped to the connecting pipe inside the snapping groove For the connector, the upper end of the notch part of the connector snap-fitting part on the upper side of the notch part is separated from the snap-fit groove toward the upper side, so as not to form a snap-fit. The gas supply device according to claim 2, wherein when the connector clamping member is moved toward the valve connector, a side surface located in the direction of the valve connector is in contact with the connecting pipe connector, and is located in a position connected to the valve. The other side in the direction opposite to the connector direction is separated from the connecting pipe connector. The gas supply device according to claim 2, wherein an operating part is provided with one side connected to the connector moving drive part and the other side connected to the connector snapping part, and the operating part is configured to include a first snapping part and the second clamping part are separated from each other to form clamping connection with the connector clamping part, and the operation shaft is combined with the first clamping part and the second clamping part on one side, and connected with the cylinder on the other side. The gas supply device according to claim 1, wherein a rotating mechanism for integrally rotating the connection pipe connector and the connection pipe connector housing is provided, and a control unit is provided, and the control unit uses Control is performed such that the connection pipe connector and the connection pipe connector housing are integrally rotated by the rotation mechanism when the connection pipe connector is transferred by the connector transfer unit. The gas supply device according to claim 1, wherein a cover separation part for separating the cover is provided on the side of the connector fastening part, wherein the cover covers the valve connector, and is integrated by the first transfer mechanism. The connector fastening part and the cover separation part are moved smoothly. The gas supply device according to claim 13, which is equipped with a rotation mechanism that rotates the connector fastening portion in order to connect the connector fastening portion and the valve connector, and the cover is separated by driving the rotation mechanism. The connector fastening part rotates integrally with the connector fastening part, and a gear box equipped with a plurality of gears for transmitting the drive of the rotating mechanism is transferred integrally with the connector fastening part by the first transfer mechanism. A method for connecting connectors of a gas supply device, comprising the following steps: using a first transfer mechanism to transfer a connector fastening portion including a connecting pipe connector and a connecting pipe connector housing to a valve connector opposite to and adjacent to the valve connector. Position, one side and the other side of the connecting pipe connector are respectively connected to the valve connector and the gas demand place equipped on the container, the connecting pipe connecting housing surrounds the outside of the connecting pipe connector and is equipped to connect with the the pipe connectors are rotated together; and in the state where the first transfer mechanism is stopped, the drive connector transfer part only puts the The connection pipe connector is moved toward the valve connector to join the connection pipe connector and the valve connector. The connector joining method of the gas supply device as described in claim 15, wherein supplying air to a cylinder constituting the connector moving drive part or driving a motor constituting the connector moving drive part to move the connector toward the valve connector Snap parts and the connecting pipe connector. The connector coupling method of a gas supply device as claimed in claim 16, wherein the air supplied to the air cylinder is regulated by a supply pressure through a regulator. The connector coupling method of the gas supply device as described in claim 17, wherein the connecting pipe connector is rotated by the driving of the rotating mechanism, and then screwed with the valve connector, and the pressure regulated by the regulator is set This is to correspond to the linear transfer distance of the connection pipe connector by the screw connection when the connection pipe connector is rotated by the drive of the rotation mechanism and screwed to the valve connector.

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