TWI772891B - Gas supply apparatus having align function and align method - Google Patents

Abstract

An object of the present invention is to provide a gas supply device and an alignment method equipped with an alignment function that can be vertically moved while being aligned during horizontal transfer and can prevent damage to the alignment portion. The gas supply device includes: an upper module equipped with an upper plate fixedly provided at a position spaced upward from a valve portion provided at an upper end of the container; and a lower module including a cover separation portion, a connector fastening portion, and a second alignment portion and can be moved in the horizontal and vertical directions relative to the upper module, the cover separation part separates the cover covering the valve connector provided in the valve part, and the connector fastening part is used to connect the connection piping connector to the gas demand place Connected to the valve connector, the second alignment portion achieves alignment with the container by being combined with the first alignment portion provided to the valve portion, if arranged to face each other in a state where the cap is not inserted into the cap separation portion, It is then equipped so that a part of the first alignment portion and the second alignment portion can be combined when aligned.

Description

Gas supply device with alignment function and alignment method

The present invention relates to a gas supply device equipped with an aligning function and an aligning method, and more particularly, to a method that can fasten a valve connector of a gas storage container to a connecting pipe connector connected to a gas demand place when replacing a gas storage container Gas supply device and alignment method for previously aligned gas storage container.

Generally, for an apparatus for supplying gas to apparatuses utilizing gas (especially, to a gas demand place such as semiconductor equipment performing precision work), types of gases suitable for various purposes are required to satisfy predetermined concentrations, pressures, and the like.

In order to efficiently supply gas, many kinds of gases are stored under high pressure, and especially, gases with harmful properties such as flammability, toxicity, and corrosiveness are strictly managed in a separate space isolated from humans.

The gas storage container (hereinafter referred to as "container") that stores the gas is connected to the gas demand place, and when the gas stored in the container is completely consumed, the connection piping connected to the gas demand place is separated from the valve of the gas container and the container is replaced. , and then connect the connecting piping connector connected to the gas demand to the valve connector of the replaced container and supply the gas again.

In the case of replacing the container in this way, the operator has to place the container in the normal position of the container loading section, but if the automation device for placing the container in the normal position is not equipped, it is difficult for the operator to accurately place the gas drum in the normal position. Normal location problem.

Of course, if an automated device is provided, the container can be placed in a normal position, but there are problems in that the configuration of the device is complicated and the manufacturing cost is high.

As a prior art regarding a gas supply device for semiconductor equipment, Korean Granted Patent No. 10-0242982 is disclosed.

The present invention has been made in order to solve the above-mentioned various problems, and an object thereof is to provide a gas supply device that can be vertically moved and aligned while being moved in the horizontal direction, and can prevent damage to the alignment portion.

Another object of the present invention is to provide a gas supply device in which the alignment portion is rotatable when moved in the horizontal direction, thereby enabling more accurate alignment.

Another object of the present invention is to provide a gas supply device capable of maintaining a state in which an upper module and a lower module are firmly coupled to a fixing block provided on the container side.

Another object of the present invention is to provide a gas supply device capable of preventing breakage when the cover is combined with the cover separation portion.

A gas supply device equipped with an alignment function of the present invention for achieving the above object includes: an upper module including an upper plate fixedly provided at a position spaced upward from a valve portion provided at an upper end of a container; and a lower module including a cover The separation part, the connector fastening part and the second alignment part can be moved in the horizontal direction and the vertical direction with respect to the upper module, wherein the cover separation part will cover the matching part. The cover of the valve connector prepared for the valve portion is separated, the connector fastening portion is used to connect the connecting piping connector connected to the gas demand place to the valve connector, and the second alignment portion is provided by the valve connector. Alignment with the container is achieved in combination with a first alignment portion provided in the valve portion, and if the caps are arranged to face each other in a state in which the caps are not inserted into the cap separation portion, are provided when During the alignment, the first alignment portion and a part of the second alignment portion can be combined.

Either one of the first alignment portion and the second alignment portion may be configured as a pin-shaped alignment pin having a horizontal length, and the other may be configured as an alignment pin insertion groove into which the alignment pin is inserted.

A connector fastening portion transfer mechanism may be provided to move the cover separating portion and the connector fastening portion forward and backward integrally in the direction of the valve portion, and the horizontal transfer of the second alignment portion may be The transfer of the cover separating portion and the connector fastening portion of the connector fastening portion transfer mechanism is performed independently.

The second alignment portion may be coupled to a housing that at least partially surrounds the outer side of the cover separation portion and the connector fastening portion and advances and retreats in the direction of the valve portion according to a transfer guide provided in the upper module. .

An alignment block may be combined with the housing, and the second alignment portion may be provided on a surface of the alignment block facing the valve portion.

The first alignment portion may be equipped with a fixing block combined with the valve portion, and the lower module is provided with a second coupling portion adjacent to the second alignment portion for coupling to the fixing block. The block is provided with a first coupling portion adjacent to the first alignment portion, and when the second alignment portion is moved toward the first alignment portion, the first alignment portion is aligned with the second alignment portion. When the first coupling part is coupled with the second coupling part, the coupling state of the fixing block and the lower module is maintained.

An alignment block may be coupled to the lower module, the second coupling portion may be formed by a fixing block coupling member provided on the alignment block and configured to protrude toward the first coupling portion, and the first coupling portion may be The coupling portion is configured to be formed in a fixing groove of the fixing block so that the fixing block coupling member is inserted, and when the fixing block coupling member is inserted into the fixing groove, the groove and the protrusion pass through the groove and the protrusion inside the fixing groove. The locking prevents the fixing block coupling member from being detached from the fixing groove, and when air is supplied, the locking between the groove and the protrusion is released, and the fixing block coupling member can be detached from the fixing groove.

When the lower module is moved in the direction of the valve portion in a state where the cover separating portion is rotated, the first alignment portion and the second alignment portion can be changed from a partially coupled state to a fully coupled state, and the The lid is inserted into the groove of the lid separation portion according to the shape of the groove of the lid separation portion.

The lower module is rotatable in a horizontal direction relative to the upper module.

The upper part of the lower module and the lower part of the upper module can be combined by fixing pins, at least one guide pin is combined with any one of the lower module and the upper module, and a guide pin insertion hole is formed in the other one so that the The guide pin is inserted so as to be rotatable about the fixing pin as a center of rotation.

A pair of the guide pin and the guide pin insertion hole may be provided on both sides of the fixing pin, respectively.

The lower module is capable of linear movement while being rotated in the horizontal direction with respect to the upper module.

The upper module may be provided with: a first transfer guide for guiding the lower module to be transferred in a first direction which is one of the horizontal directions; and a second transfer guide for guiding the lower module along the horizontal direction The second direction of the horizontal direction, which is perpendicular to the first direction, is transferred.

The upper plate, the middle plate, and the lower plate may be provided so as to be spaced apart from each other from the upper part to the lower part, the first transfer guide is provided between the upper plate and the middle plate, and the second transfer guide is provided in each. between the middle plate and the lower plate.

The upper module may be provided with: a third transfer guide for guiding vertical transfer of the lower module.

It may be equipped with: a vertical direction braking part for braking the vertical direction transfer of the lower module; a horizontal direction braking part for braking a straight line in a first direction perpendicular to the direction toward the valve part in the horizontal direction move.

The first alignment portion may be provided with a fixed block coupled to the valve portion, and in a state where the vertical transfer is braked by the vertical direction braking portion, and the first direction transfer is braked by the horizontal direction braking portion. A first coupling portion provided adjacent to the first alignment portion of the fixing block is coupled with a second coupling portion provided in the lower module adjacent to the second alignment portion, so that in the horizontal direction The transfer in a second direction perpendicular to the first direction is braked.

A switch for applying and releasing the braking force of the horizontal braking portion and the vertical braking portion may be provided, the braking force is released when the switch is activated, and the braking force is applied when the switch is deactivated. the braking force.

The lower module may be provided with: a connector fastening portion transfer mechanism for integrally transferring the cover separating portion and the connector fastening portion with respect to the valve portion in the left-right direction and the front-rear direction; a rotation mechanism, For rotating the cover separation part and the connector fastening part, wherein the gas supply device is provided with a control part for controlling the transfer of the transfer mechanism and the rotation of the rotation mechanism.

The upper module may be provided with: a third transfer guide for guiding vertical transfer of the lower module; a valve opening and closing part for rotating a handle for opening and closing a valve of the valve part; A valve opening and closing part transfer mechanism for moving the valve opening and closing part in the vertical direction independently of the vertical transfer by the third transfer guide.

Switches for forward rotation, reverse rotation, and stop of the connector fastening portion and the cover separation portion may be provided.

For the alignment method of the gas supply device according to the present invention, the gas supply device includes: an upper module including an upper plate fixedly provided at a position spaced upward from a valve portion provided at an upper end of the container; and a lower module, including a cover separating part for separating a cover covering a valve connector equipped with the valve part, and a connector fastening part for connecting a connecting pipe connector connected to a gas demand place to the valve connector, the The alignment method includes the steps of: a) transferring the lower module in a horizontal direction and a vertical direction according to a plurality of transfer guides equipped with the upper module; b) transferring by the step a) when the cover is not inserted The lower module is arranged in such a manner that a first alignment portion provided in the valve portion and a part of a second alignment portion provided in the lower module are combined to face each other in a state of the cover separation portion. ; c) moving the lower module in the horizontal direction so that the first alignment portion and the second alignment portion are completely combined.

In the step b), the lid separation portion may be rotated in a state where the first alignment portion and a part of the second alignment portion are coupled, and the lid separation portion may be rotated in a state where the lid separation portion is rotated. Step c).

After the step c), the valve opening/closing part provided in the upper module can be lowered by the vertical transfer performed independently of the vertical transfer of the lower module, and the handle provided in the valve part can be lowered. Rotate to open the valve of the valve portion.

According to the present invention, the lower module can be raised and lowered in the vertical direction, and at the same time the alignment is performed when the lower module is moved in the horizontal direction, it is possible to prevent breakage of the alignment portion.

Also, the lower module is rotatable relative to the upper module, enabling more accurate alignment.

Furthermore, even if the operator does not place the container at the exact position of the container loading portion, accurate alignment of the container can be achieved, so that the work is convenient.

In addition, the state in which the upper module and the lower module are firmly coupled to the fixing block provided on the container side can be maintained.

Also, breakage can be prevented when the cover is combined with the cover separation portion.

1: Gas supply device

2: Upper module

3: Lower module

10: Containers

30: Valve Connector

31: Cover

50: handle

211: Upper Plate

212: Intermediate plate

213: Lower Board

220: First transfer guide

225: Horizontal braking part

230: Second transfer guide

241, 242: The third transfer guide

243, 244: Transfer guide joint plate

251, 252: Transfer guide support member

253: Bottom Plate

253a, 253b: Guide pin insertion holes

254: Fixed pin

255, 256: Guide pins

260: Vertical braking part

270: Switch Box

271: The first switch

272: Second switch

311: Upper shell

312: First side shell

313: Second side shell

314: Lower housing

315: Internal housing

316: Plug module support table

320: cover separation part

330: Connector fastening part

331: Connecting piping connector

340: Connector fastening part transfer mechanism

350: Alignment Block

351: Second alignment part (alignment pin)

352: Second Joint

352a: Raised

360: Plug Module

361: Plug

362: Plug Support Parts

363: Plug Support Housing

364: Plug Transfer Guide

370: Gasket Supply Department

400: Valve opening and closing part

410: handle joint

411: Interior Space

412: Handle locking part

420: Handle drive part

430: Fourth transfer guide

440: Valve opening and closing part support member

510, 520, 530: Fixed block

511: The first joint

512: First alignment part (alignment pin insertion slot)

(a), (b) of FIG. 1 is a perspective view which shows the gas supply apparatus of this invention from one side and the other side.

2 is a perspective view showing a state in which a fixing block is coupled to a valve portion of a container in the gas supply device of the present invention.

3 is a perspective view showing an upper module of the gas supply device of the present invention.

Fig. 4 is a perspective view showing an upper module of the gas supply device of the present invention from a direction different from that of Fig. 3 .

5 is a perspective view showing a state in which the upper plate is removed from the upper module of the gas supply device of the present invention.

Fig. 6 is a perspective view of the upper module of the gas supply device of the present invention viewed from below.

7 is a perspective view showing a lower module of the gas supply device of the present invention.

8 is a diagram showing a bottom plate, a fixing pin, and a guide pin in the upper module of the gas supply device of the present invention.

9 is a plan view showing a state in which the first alignment portion and the second alignment portion are arranged to face each other in the gas supply device of the present invention.

Fig. 10 is a plan view showing a state in which the first alignment portion and the second alignment portion are partially coupled by advancing the lower module in the state of Fig. 9 .

Fig. 11 is a plan view showing a state in which the first alignment portion and the second alignment portion are completely coupled by further advancing the lower module in the state of Fig. 10 .

12 is a view showing that the cap separation part is separated from the valve connector in the state of FIG. 11 and the cap separation part and the connector fastening part are integrally moved in the Y direction so that the connector fastening part is arranged to face the valve connector state floor plan.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

Here, when naming the directions, the X axis shown in FIG. 1 is referred to as the front-rear direction, the Y axis is referred to as the left-right direction, and the Z axis is referred to as the vertical direction. In addition, the horizontal direction includes the left-right direction and the front-rear direction constituted by the XY plane.

1 , the gas supply device 1 equipped with an alignment function of the present invention is configured to include: an upper module 2 including an upper plate 211 fixedly arranged at a position spaced upward from a valve portion provided at the upper end of the container 10; a lower portion The module 3 includes a second alignment portion 351 ( FIG. 7 ), and can be moved vertically relative to the upper module 2 , wherein the second alignment portion 351 ( FIG. 7 ) is provided on the upper module 2 . the lower part, and the alignment of the container 10 is achieved by combining with the first alignment part 512 (FIG. 2) provided on the container 10 side when the container is transferred in the horizontal direction.

The upper module 2 is provided with a valve opening and closing unit 400 which is provided so as to be able to be moved in the vertical direction independently of the vertical movement of the lower module 3 , and is provided on the upper end of the valve unit for rotation. The handle 50 (FIG. 2) is used to open and close the valve of the valve section.

Referring to FIG. 2 , the container 10 is configured to store and supply process gas to be supplied to a gas demand place such as a semiconductor device, and the valve portion is provided on the upper portion of the container 10 .

The valve portion includes a valve (not shown) for restricting the supply of gas, and a valve connector 30 provided on one side of the valve and fastened to a connector fastening portion 330 ( Fig. 7); cover 31, covering the valve connector 30; valve shutter (not shown), opening and closing the valve; handle 50, connected to the upper part of the valve shutter, and making the valve shutter lift up and down by rotating , thereby opening and closing the valve.

Fixed blocks 510 , 520 , and 530 are coupled to the valve portion. The first alignment portion 512 is provided on the fixing blocks 510 , 520 , and 530 .

The fixing blocks 510 , 520 and 530 may include a first fixing block 510 , a second fixing block 520 and a third fixing block 530 surrounding the valve portion.

If the valve part is surrounded by the combination of the second fixing block 520 and the third fixing block 530 , the valve connector 30 and the cover 31 in the valve part are separated from the fixing blocks 520 and 530 . The handle 50 in the valve portion is protruded and exposed in the upward direction relative to the fixing blocks 520 and 530 .

The first fixing block 510 is configured in a quadrangular prism shape having a length in the Y-axis direction, and the second fixing block 520 is coupled to one side face in the Y-axis direction, and is equipped with a side surface in the X-axis direction. The first alignment portion 512 is described.

The first alignment portion 512 may be configured as an alignment pin insertion groove 512 recessed on one side surface in the X-axis direction.

Referring to FIG. 7 , the second alignment portion 351 may be configured to protrude from an alignment block 350 of the lower module 3 to be described later in the X-axis direction, which is a direction facing the alignment pin insertion groove 512 . An alignment pin 351 having a length in the horizontal direction is provided.

The alignment of the container 10 is achieved by inserting the alignment pins 351 into the alignment pin insertion grooves 512 .

In this embodiment, the first alignment portion 512 is configured as an alignment pin insertion groove, and the second alignment portion 351 is configured as an alignment pin. However, the first alignment portion may be configured as an example. To align the pins, the second alignment portion is configured as an alignment pin insertion slot.

In addition, in the present embodiment, the case where the alignment pin is inserted into the alignment pin insertion groove is described as an example, but the present invention is not limited to this, and the first alignment portion and the second alignment portion may be configured to be close together. solid or combined. The manner in which the first alignment portion and the second alignment portion are inserted, fastened, and combined are collectively defined as "combination".

The first fixing block 510 is provided with a first coupling portion 511 at a position adjacent to the first alignment portion 512 , and the second coupling portion 352 combined with the first coupling portion 511 is provided in the lower module 3 of the alignment block 350.

The first coupling portion 511 may be formed as a fixing groove 511 recessed in the X-axis direction on the same surface as the first alignment portion 512 formed on the first fixing block 510 .

The second coupling portion 352 may be formed as a fixed block coupling member 352 protruding toward the first coupling portion 511 at a position of the alignment block 350 adjacent to the second alignment portion 351 .

A plurality of protrusions 352a are provided on the outer surface of the fixing block coupling member 352, and the plurality of protrusions 352a are elastically supported by a spring (not shown) provided inside. Inside the fixing groove 511, a protrusion insertion groove (not shown) into which the protrusion 352a is inserted is formed. If the fixed block is combined with the part 352 If inserted into the fixing groove 511, the protrusion 352a is inserted into the protrusion insertion groove, so as to prevent the fixing block coupling part 352 from disengaging from the fixing groove 511, thereby keeping the lower module 3 coupled to the The state of the first fixed block 510 .

When the fixing block coupling member 352 is pulled out from the fixing groove 511, if air is supplied, the protrusion 352a overcomes the elastic force of the spring and enters from the surface of the fixing block coupling member 352 to the inside , the protrusion 352a is disengaged from the protrusion insertion slot. Therefore, the fixing block coupling part 352 can be disengaged from the fixing groove 511 .

3 to 6, the upper module 2 is equipped with an upper plate 211, an intermediate plate 212, a lower plate 213, a first transfer guide 220, a second transfer guide 230, a third transfer guide 241, 242, The valve opening and closing part 400 .

The upper plate 211 is formed in the shape of a flat plate, and is coupled to an opposite object whose position is fixed, such as a cabinet (not shown).

The middle plate 212 is also formed in a flat plate shape, and is formed in a stepped shape so that the middle part is high, and is provided so as to be spaced apart from the lower part of the upper plate 211 .

The lower plate 213 is also configured in a flat plate shape, and is provided to be spaced apart from the lower portion of the intermediate plate 212 .

The first transfer guide 220 may be provided between the upper plate 211 and the intermediate plate 212, and is configured to guide the intermediate plate 212, the second transfer guide 230, the lower plate 213, and the third transfer guide. 241 , 242 , the lower module 3 , and the valve opening/closing part 400 all connected to the lower part of the intermediate plate 212 are LM guides that are transferred in the Y-axis direction (first direction), which is a horizontal direction.

The second transfer guide 230 may be provided between the middle plate 212 and the lower plate 213, and is configured to guide the lower plate 213, the third transfer guides 241 and 242, and the lower module 3. And the LM guide which transfers all the components connected to the lower part of the said lower plate 213 of the valve opening/closing part 400 in the X-axis direction (2nd direction) which is a horizontal direction perpendicular|vertical to the Y-axis.

A pair of transfer guide coupling plates 243 and 244 are coupled to both side surfaces in the Y-axis direction of the lower plate 213, and a pair of transfer guides are provided at positions spaced from the pair of transfer guide coupling plates 243 and 244. Support members 251 and 252.

The pair of transfer guide coupling plates 243 and 244 are provided on one side and the other side of the lower plate 213 so as to face each other, and are configured in a plate shape having a length in the vertical direction.

The transfer guide support member 251 on the one side and the transfer guide support member 252 on the other side are formed in rectangular plate shapes having lengths in the vertical direction, and the transfer guide on the one side connects the plate 243 and the other side. The transfer guide coupling plates 244 on one side are provided separately from each other on the outer side in the Y-axis direction.

Third transfer guides are provided between the transfer guide coupling plate 243 on the one side and the transfer guide support member 251 , and between the transfer guide coupling plate 244 on the other side and the transfer guide support member 252 , respectively. Pieces 241, 242.

One side surface and the other side surface of a rectangular bottom plate 253 having a length in the Y-axis direction are coupled to the lower ends of the one side transfer guide support member 251 and the other side transfer guide support member 252, respectively. The lower module 3 is coupled to the lower part of the bottom plate 253 .

The third transfer guides 241 and 242 may be configured as LM guides that guide the pair of transfer guide support members 251 and 252, the bottom plate 253, and the lower module 3 coupled to the bottom plate 253 to be integrally transferred in the vertical direction. pieces.

The drive mechanism is not connected to the first to third transfer guides 220 , 230 , 241 , and 242 , but only serves as a guide function that enables the operator to manually transfer. That is, if the operator When the lower module 3 is grasped and a force is applied in the X-axis, Y-axis, and Z-axis directions, the lower module 3 is transferred along the respective transfer guides in the direction in which the force is applied.

The first transfer guide 220 and the third transfer guides 241 and 242 may be provided with a braking portion that functions as a brake.

A horizontal direction braking portion 225 may be provided that performs braking for maintaining a stopped state at a specific position when being guided by the first transfer guide 220 to be transferred in the first direction Function.

A vertical direction braking portion 260 may be provided that performs braking for maintaining a stopped state at a specific position in the case of transferring in the vertical direction by means of the third transfer guides 241, 242 Function.

The horizontal braking portion 225 and the vertical braking portion 260 may be configured to maintain the braking force in a state in which the rail of the LM guide is gripped by the pressing force of a spring (not shown), and may be configured to maintain the braking force when air is supplied. When the pressing force of the spring is removed from the rail, the braking force is released.

A switch box 270 for applying operation signals of the horizontal direction braking portion 225 and the vertical direction braking portion 260 may be provided.

The switch box 270 is equipped with: a first switch 271 for applying and releasing the braking force of the horizontal braking portion 225 and the vertical braking portion 260; a second switch 272 for tightening the connector described later. The rotation and stop of the fixing part 330 and the cover separating part 320 are performed. The first switch 271 and the second switch 272 may be configured to be manually operated by an operator, or may be configured to be opened/closed without being manually operated like a solenoid valve.

In a state where the operator presses the first switch 271 of the switch box 270 and is in an operating state, the horizontal direction braking portion 225 and the vertical direction braking portion 260 can be released by supplying air (air). With the braking force, the lower module 3 is guided by the first transfer guide 220 and the third transfer guides 241 and 242 to freely move in the Y-axis and Z-axis directions. When the operator removes his hand from the first switch 271 to release the switch operation, the switch can be automatically restored by the force of the spring, so that the braking force of the horizontal braking portion 225 and the vertical braking portion 260 is applied, thereby maintaining the A state in which the lower module 3 is fixed without moving.

The second switch 272 may be configured as a toggle switch. The second switch 272 is equipped so as to be able to rotate the connector fastening part 330 and the cover separating part 320 in the forward direction or in the reverse direction.

The upper part of the lower module 3 and the lower part of the upper module 2 may be configured to be combined by fixing pins, at least one guide pin is combined with either one of the lower module 3 and the upper module 2, and the other is formed with a guide pin. The guide pin insertion hole into which the guide pin is inserted enables the lower module 3 to rotate about the fixing pin as the center of rotation. An example of the above-described configuration will be described with reference to FIG. 8 .

8, a fixing pin insertion hole (not shown) into which the fixing pin 254 is inserted is formed in the center of the bottom plate 253, and a pair of guide pin insertion holes 253a and 253b are formed on both sides of the fixing pin insertion hole.

The guide pin insertion holes 253a and 253b may be formed as long holes having a length in the X-axis direction. A pair of guide pins 255 and 256 are inserted into the pair of guide pin insertion holes 253a and 253b, respectively.

The heads of the fixing pins 254 and the guide pins 255 and 256 are exposed to the upper part of the bottom plate 253, the trunks are inserted into the fixing pin insertion holes and the guide pin insertion holes 253a and 253b, respectively, and the lower ends are screwed to the lower part described later. The upper housing 311 of the module 3 . The fixing pin 254 is inserted through the fixing pin insertion hole so as to be rotatable relative to the bottom plate 253 .

The guide pin insertion holes 253a and 253b are respectively formed as long holes so that the guide pins 255 and 256 can move in the longitudinal direction of the guide pin insertion holes 253a and 253b. In addition, in order to allow the guide pins 255 and 256 to rotate around the fixing pin 254, the guide pin insertion holes 253a and 253b may be to form an arc shape. In addition, only one of the pair of guide pin insertion holes 253a and 253b may be configured in an arc shape.

When configured as described above, the lower module 3 can be rotated in the horizontal direction with respect to the upper module 2 . That is, when the operator applies force in the direction in which the lower module 3 is to be rotated, the lower module 3 is rotated about the fixing pin 254 as the rotation center. In this case, the guide pins 255, 256 are guided in the guide pin insertion holes 253a, 253b, and the rotation angle is restricted by the length of the guide pin insertion holes 253a, 253b.

As described above, the lower module 3 can be rotated in the horizontal direction relative to the upper module 2, and at the same time, can be rotated along the X-axis by means of the first to third transfer guides 220, 230, 241, 242 , Y-axis, and Z-axis directions move linearly, so the operator can easily align, and can achieve accurate alignment, so the first alignment part and the second alignment part can be prevented from colliding when aligning.

The valve opening and closing unit 400 is provided with a handle 50 which can be rotated to open and close the valve of the valve unit.

The valve opening and closing portion 400 includes a handle coupling portion 410 for inserting the handle 50 into the inner space 411 , and a handle driving portion 420 for providing a driving force for rotating the handle coupling portion 410 .

A plurality of handle locking portions 412 are formed inside the handle coupling portion 410 . The plurality of handle locking portions 412 protrude inwardly in a manner corresponding to the shape of the handle 50 to be locked with the handle, and then rotate integrally. . When the handle driving unit 420 is driven in a state where the handle 50 is inserted into the internal space 411, the handle 50 is rotated to open and close the valve of the valve unit.

A valve opening and closing portion transfer mechanism (not shown) for transferring the valve opening and closing portion 400 in the vertical direction is provided. The valve opening/closing portion transfer mechanism is equipped to transfer in the vertical direction independently of the third transfer guides 241 and 242 . That is, the lower module 3 can be guided by the third transfer guides 241 and 242 along the In the vertical movement, independently of the lower module 3, only the valve opening and closing part 400 can be moved in the vertical direction by the valve opening and closing part transfer mechanism alone.

To this end, the valve opening and closing portion transfer mechanism may include a fourth transfer guide 430 for guiding transfer in the vertical direction, and a valve opening and closing portion support member 440 in conjunction with the fourth transfer guide 430 .

The fourth transfer guide 430 may be configured as an LM guide. The valve opening/closing part support member 440 has a plate shape having a length in the vertical direction, and is coupled to the bottom plate 253 so as to be able to move up and down integrally with the bottom plate 253 . As described above, when the valve opening/closing part supporting member 440 is coupled to the bottom plate 253 serving as the upper module 2 , only the lower module 3 is vertically transferred by the third transfer guides 241 and 242 , and only the lower module 3 is vertically transferred by the fourth transfer guide 430 . Only the valve opening/closing part 400 is independently transferred. Therefore, when the operator performs the transfer in the vertical direction, since the weight of the transfer object is light, the alignment work is easy.

In the above, the case where the valve opening and closing part 400 is manually transferred has been described as an example, however, it is also possible to include a driving part that provides a driving force so that the valve opening and closing part 400 can be moved along the fourth transfer guide 430, so that the valve The opening and closing unit 400 is automatically transferred.

7, the lower module 3 will be described.

The lower module 3 is equipped with a plurality of housings 311, 312, 313, 314, a cover separation part 320, a connector fastening part 330, a connector fastening part transfer mechanism 340, an alignment block 350, a plug module 360, Gasket supply part 370 .

The plurality of housings 311, 312, 313, and 314 include: an upper housing 311, which is provided on the upper part of the lower module 3 in a plate shape; a first side housing 312 and a second side housing 313, which are respectively combined with Both sides of the upper casing 311 in the Y-axis direction; the lower casing 314 is spaced downward from the upper casing 311, and both sides are combined with the first side casing 312 and the second side casing 313.

The lower ends of the fixing pin 254 and the guide pins 255 and 256 of the upper module 2 are coupled to the upper case 311 . The upper case 311 , the first side case 312 , the second side case 313 , and the lower case 314 are provided so as to surround the upper part, the lower part, and the both sides except the front and rear of the lower module 3 .

The cap separation part 320 separates the cap 31 covering the valve connector 30 provided in the valve part from the valve connector 30 .

The cover separating portion 320 is formed with a groove so that the cover 31 is inserted thereinto, and when the cover 31 is inserted into the groove of the cover separating portion 320, a rotating mechanism (not shown) is driven to cause the cover 31 to be inserted. When the cap separation part 320 is rotated, the cap 31 is separated from the valve connector 30 . Contrary to this, the cap 31 separated from the cap separation portion 320 can be coupled to the valve connector 30 by driving the rotation mechanism.

The connector fastening portion 330 is equipped so as to be able to connect a connection piping connector 331 to the valve connector 30 that is connected to a gas demand place. When the valve (not shown) is opened while the connector fastening portion 330 is connected to the valve connector 30 , the gas inside the container 10 is supplied to the gas demand through the valve connector 30 and the connecting piping connector 331 .

The connector fastening portion transfer mechanism 340 integrally transfers the cover separating portion 320 and the connector fastening portion 330 in the left-right direction (Y-axis direction) and the front-rear direction (X-axis direction). The connector fastening portion transfer mechanism 340 may include: a first transfer mechanism for integrally transferring the cover separation portion 320 and the connector fastening portion 330 in the front-rear direction; and a second transfer mechanism for the left-right direction The cover separating portion 320 and the connector fastening portion 330 are integrally transferred.

The first transfer mechanism may include a transfer guide for transferring in the front-rear direction, and an air cylinder for applying a transfer force by supplying air. Also, the second transfer mechanism may include a transfer guide for transferring in the left-right direction, and an air cylinder for applying a transfer force by supplying air.

The rotation mechanism rotates the cover separation part 320 and the connector fastening part 330 . The rotating mechanism includes a motor and a speed reducer that generate a rotating force, and includes a rotation transmitting member for transmitting the rotating force to the cover separating portion 320 and the connector fastening portion 330 .

The rotation transmission member transmits the rotational force to the cover separating portion 320 and the connector tightening portion 330, respectively, and when the motor is driven, the cover separating portion 320 and the connector tightening portion 330 rotate simultaneously. On the other hand, the rotation mechanism (not shown) may be provided with two motors, and the cover separation part 320 and the connector fastening part 330 may be respectively rotated by the two motors.

A control portion may be provided for controlling the entire gas supply device of the present invention including the valve opening and closing portion transfer mechanism, the connector fastening portion transfer mechanism 340, and the rotation mechanism.

The cover separation portion 320 and the connector fastening portion 330 may be provided with an inner case 315 that opens the front and rear and surrounds the left and right and up and down. The inner case 315 may be combined with the upper portion of the lower case 314 .

The alignment block 350 is combined so as to protrude at the front end of the inner housing 315, and is generally configured in a polyhedron shape. On the front side of the alignment block 350, an alignment pin 351 as the second alignment portion 351 is formed in a shape protruding toward the valve portion, and on the side of the alignment pin 351, as the alignment pin 351 The fixing block coupling part 352 of the second coupling part 352 is formed in a shape protruding toward the valve part.

The plug module 360 includes a plug 361 that is coupled to the connector fastening portion in order to prevent foreign matter from entering the connector fastening portion 330 in a state where the valve connector 30 and the connector fastening portion 330 are not fastened. 330; a plug support member 362 for supporting the end of the plug 361; a plug support case 363 for supporting the plug support member 362 by being combined with the plug support case 363; a plug transfer guide 364 for using The plug 361, the plug support member 362, and the plug are integrally transferred in the front-rear direction. The header support housing 363 ; the plug module support base 316 , the plug transfer guide 364 is supported by being combined with the plug module support base 316 , and is combined with the first side housing 312 .

The gasket supply part 370 is used for attaching a new gasket to the connecting pipe connector 331 when the container 10 is replaced, and is configured to include a gasket holder (not shown), a gasket (not shown), and a gasket holder (not shown). shown); a gasket accommodating portion (not shown) that accommodates a plurality of gaskets; and a gasket transfer mechanism that transfers the gaskets accommodated in the gasket accommodating portion to the connection piping connector 331 . The shim transfer mechanism is provided so as to reciprocate in the Y-axis direction in a state where the shim is held by the shim holder.

The operation of the gas supply device according to the present invention will be described with reference to FIGS. 9 to 12 .

First, in order to replace the container, a new container 10 is mounted on a container loading portion (not shown). In this case, since the horizontal braking portion 225 and the vertical braking portion 260 are in the braking state, the lower module 3 does not move in the Y-axis direction and the Z-axis direction and remains fixed.

Next, the operator presses the first switch 271 . When the first switch 271 is pressed, the braking force of the horizontal braking portion 225 and the vertical braking portion 260 is released, and the lower module 3 is placed in a position where the first transfer guide 220 and the third transfer guides 241 and 242 can be used. A state in which it is guided and freely movable in the Y-axis and Z-axis directions.

In this state, the operator applies force to the lower module 3 to move in the front-rear direction, the left-right direction, and the up-down direction, so that the second alignment portion 351 and the first alignment portion 512 face each other as shown in FIG. 9 . way to align. In this case, the second coupling portion 352 is arranged to face the first coupling portion 511 .

When aligned as described above, when the operator applies force to the lower module 3 to rotate it in the horizontal direction, the pair of guide pins 255 and 256 rotate around the fixing pin 254 to be inserted into the guide pin insertion holes 253 a and 253 b. By moving in the front-rear direction, the lower module 3 is rotated on the XY plane, so that accurate alignment of the first alignment portion 512 and the second alignment portion 351 can be achieved.

In the state of FIG. 9 , the operator continues to adjust the position of the lower module 3 , and as shown in FIG. 10 , only a part of the alignment pin 351 is inserted into the alignment pin insertion slot 512 .

The state of FIG. 9 and the state of FIG. 10 can be realized by one operation due to the continuous work of the operator.

In this way, when the operator rotates the lower module 3 in the horizontal direction while transferring the lower module 3 in the front-rear direction, the left-right direction, and the vertical direction, the first alignment portion 512 and the second alignment portion 351 can be easily aligned.

In addition, the protruding length of the alignment pin 351 from the alignment block 350 is formed to be larger than the protruding length of the fixed block coupling part 352 as the second coupling part 352 from the alignment block 350, so that if only the alignment pin 351 has a protruding length When a part is inserted into the alignment pin insertion groove 512 , the first coupling portion 511 and the second coupling portion 352 are not coupled, and the cap separation portion 320 and the valve connector 30 covered by the cap 31 are arranged to face each other.

In this state, the operator takes his hand away from the first switch 271 . When the hand is removed from the first switch 271, a braking force is applied to the horizontal braking portion 225 and the vertical braking portion 260, so that the lower module 3 does not move in the Y-axis direction and the Z-axis direction and remains fixed.

In this state, when the operator operates the second switch 272, the rotation mechanism is driven, and the lid separation portion 320 is rotated. As an example, when the shape of the lid 31 is configured as a hexagon, the groove of the lid separation portion 320 is also configured as a hexagon corresponding to the shape.

In a state where the hexagons of the grooves of the cover separation part 320 and the hexagons of the cover 31 are out of phase, if the lower module 3 is moved forward in order to insert the cover 31 into the grooves of the cover separation part 320 , Then the cover separation part 320 collides with the cover 31 .

Therefore, in the present invention, when the operator operates the second switch 272 to rotate the lid separation unit 320 and move the lower module 3 forward, the lid can be realized at the moment when the grooves of the lid separation unit 320 and the lid 31 are in phase with each other. The separation part 320 and the cover 31 fit together so as to be combined without collision.

In addition, there is also a method of using a sensor to sense the hexagonal shape of the cover 31 and to make the phase of the cover separation portion 320 match. However, according to the present invention, it is not necessary to provide a sensor.

If the lower module 3 is further pushed forward in the state of FIG. 10 , as shown in FIG. 11 , the entire alignment pin 351 is inserted into the alignment pin insertion groove 512 and is located in the first alignment portion 512 and the second alignment portion 351 . fully integrated state. In this case, the second coupling part 352 is inserted into the first coupling part 511 and the protrusion 352a is inserted into the protrusion insertion groove, so that the coupling of the first coupling part 511 and the second coupling part 352 can be realized, Furthermore, the lower module 3 is kept in a fixed state without moving in the X-axis direction. Then, the cover 31 is inserted into the groove of the cover separation part 320 .

In this state, the transfer of the lower module 3 in the Y-axis and Z-axis directions is stopped by the horizontal braking portion 225 and the vertical braking portion 260, and the transfer in the X-axis direction is performed by the first coupling portion 511 and the second Since the engagement of the engagement portion 352 is braked, the fixed state can be maintained in all directions of the X, Y, and Z axes.

Then, when the operator holds the valve opening and closing part 400 by hand and applies a force downward, the valve opening and closing part 400 is guided by the fourth transfer guide 430 to move downward in the vertical direction, and the handle 50 is inserted into the handle 50 of the handle coupling part 410 . Internal space 411.

In the state shown in FIG. 11 , the subsequent operations are automatically performed by the control unit when the operator applies an operation signal.

The cap 31 is separated from the valve connector 30 when the control unit drives the rotation mechanism to rotate the cap separation section 320 and simultaneously drives the first transfer mechanism to move the cap separation section 320 rearward.

After the cap 31 is separated from the valve connector 30, if the second transfer mechanism of the connector fastening portion transfer mechanism 340 is driven, as shown in FIG. 12, the cap separation portion 320 and the connector fastening portion 330 are arranged along the Y axis. The direction moves integrally so that the connector fastening portion 330 and the valve connector 30 are arranged to face each other.

Then, the gasket (not shown) is positioned at the end of the valve connector 30 by driving the gasket transfer mechanism and transferring the gasket in the Y-axis direction with the gasket held by the gasket holder. In this case, the spacer 371 may be configured not to be disposed at the end of the valve connector 30 but to be coupled to the end of the connection piping connector 331 .

Next, when the first transfer mechanism of the connector tightening portion transfer mechanism 340 is driven to move the connector tightening portion 330 forward, and the rotation mechanism is driven to rotate the connector tightening portion 330, the valve connector 30 is coupled to the connection The pipe connector 331 of the valve fastener 330 is connected, and the gasket transfer mechanism is driven, so that the gasket holder moves to the position where it is disengaged from the valve connector 30 .

When the handle 50 is inserted into the handle coupling part 410 and the handle driving part 420 is driven, the handle 50 rotates to open the valve of the valve part, and the gas contained in the container 10 is supplied to the gas demand place.

According to the configuration as described above, the lower module 3 can be raised and lowered in the vertical direction, and at the same time, the alignment can be achieved when the lower module 3 is moved in the horizontal direction, and breakage of the first alignment portion and the second alignment portion can be prevented. Also, the lower module 3 is rotatable with respect to the upper module 2, thereby enabling more accurate alignment. Also, even if the operator does not place the container 10 at the exact position of the container loading portion, accurate alignment of the container can be achieved, so the operation is convenient.

As described above, although the present invention has been described in detail by taking the preferred embodiments as examples, the present invention is not limited to the above-described embodiments, and can be implemented within the scope of the claims, the detailed description of the present invention, and the accompanying drawings. Various modifications are implemented, and these also belong to the present invention.

1: Gas supply device

2: Upper module

211: Upper Plate

270: Switch Box

3: Lower module

10: Containers

400: Valve opening and closing part

50: handle

510: Fixed block

Claims (24)

A gas supply device, comprising: an upper module including an upper plate fixedly provided at a position spaced upward from a valve portion provided at an upper end of the container; The lower module includes a cover separation part, a connector fastening part, and a second alignment part, and can be moved horizontally and vertically with respect to the upper module, the cover separation part will cover the valve connector provided in the valve part The cover is separated, the connector fastening portion is used to connect the connecting piping connector connected to the gas demand to the valve connector, the second alignment portion is provided by combining with the first alignment portion of the valve portion To achieve alignment with the container, if the lid is arranged to face each other in a state where the lid is not inserted into the lid separation portion, it is provided that the alignment of the first alignment portion and the second alignment portion when aligned. Some can be combined. The gas supply device according to claim 1, wherein either one of the first alignment portion and the second alignment portion is configured as a pin-shaped alignment pin having the length in the horizontal direction, and the other is configured to The alignment pin is inserted into the alignment pin insertion slot. The gas supply device according to claim 1, further comprising: a connector fastening portion transfer mechanism for advancing and retreating the cover separating portion and the connector fastening portion integrally in the direction of the valve portion, the second pair of The horizontal direction transfer of the alignment portion is performed independently of the transfer of the cover separation portion and the connector fastening portion by the connector fastening portion transfer mechanism. The gas supply device according to claim 3, wherein the second alignment portion is coupled to an outer side at least partially surrounding the cover separation portion and the connector fastening portion and along the valve according to a transfer guide provided with the upper module A casing that moves forward and backward in the external direction. The gas supply device according to claim 4, wherein an alignment block is combined with the housing, and the second alignment portion is provided on a surface facing the valve portion in the alignment block. The gas supply device according to claim 1, wherein the first alignment portion is provided with a fixing block combined with the valve portion, and the lower module is provided with a second coupling portion adjacent to the second alignment portion, using When coupled to the first coupling portion provided on the fixing block adjacent to the first alignment portion, if the second alignment portion is moved toward the first alignment portion, the first alignment portion and the first alignment portion are moved. When the two alignment parts change from a partially combined state to a fully combined state, the first combined part is combined with the second combined part, thereby maintaining the combined state of the fixing block and the lower module. The gas supply device according to claim 6, wherein an alignment block is coupled to the lower module, and the second coupling portion is provided with a fixed block coupling member provided on the alignment block and configured to protrude toward the first coupling portion The first engaging portion is configured as a fixing groove formed in the fixing block, so that the fixing block connecting member is inserted, and when the fixing block connecting member is inserted into the fixing groove, the groove and the protrusion pass through the inside of the fixing groove. The raised locking prevents the fixing block coupling member from disengaging from the fixing groove, and when air is supplied, the locking between the groove and the protrusion is released, and the fixing block coupling member can be detached from the fixing groove. The gas supply device according to claim 6, wherein when the lower module is moved in the direction of the valve portion in a state where the cover separation portion is rotated, the first alignment portion and the second alignment portion are partially combined from a state A fully coupled state is achieved, and the lid is inserted into the groove of the lid detaching portion according to the shape of the groove of the lid detaching portion. The gas supply device of claim 1, wherein the lower module is rotatable in a horizontal direction relative to the upper module. The gas supply device according to claim 9, wherein the upper part of the lower module and the lower part of the upper module are combined by fixing pins, at least one guide pin is combined with any one of the lower module and the upper module, and the other one is formed A guide pin insertion hole is provided so that the guide pin can be inserted so as to be able to rotate about the fixing pin. The gas supply device according to claim 10, wherein the guide pin and the guide pin insertion hole are provided with a pair on both sides of the fixing pin, respectively. The gas supply device according to claim 9, wherein the lower module is capable of linear movement while being rotated in a horizontal direction with respect to the upper module. The gas supply device according to claim 1, wherein the upper module is equipped with: a first transfer guide provided to guide the transfer of the lower module in a first direction which is one of the horizontal directions; and The second transfer guide is used to guide the transfer of the lower module in a second direction perpendicular to the first direction in the horizontal direction. The gas supply device according to claim 13, wherein the upper plate, the middle plate, the lower plate are provided to be spaced apart from each other from the upper part to the lower part, the first transfer guide is provided between the upper plate and the middle plate, the A second transfer guide is provided between the middle plate and the lower plate. The gas supply device according to claim 1, wherein the upper module is provided with a third transfer guide for guiding the vertical transfer of the lower module. The gas supply device according to claim 1, which is equipped with: a vertical direction braking portion for braking the vertical direction transfer of the lower module; and The horizontal braking portion is used for braking linear movement along a first direction perpendicular to the direction toward the valve portion in the horizontal direction. The gas supply device according to claim 16, wherein the first alignment portion is equipped with a fixing block combined with the valve portion, the vertical direction transfer is stopped by the vertical direction braking portion, and the first direction transfer is stopped by the horizontal direction In the state where the direction braking portion is braked, the first joint portion provided on the fixing block adjacent to the first alignment portion is combined with the second joint portion provided on the lower module adjacent to the second alignment portion, thereby The transfer in the second direction, which is perpendicular to the first direction, in the horizontal direction is braked. The gas supply device according to claim 16, wherein a switch for applying and releasing the braking force of the horizontal braking portion and the vertical braking portion is provided, the braking force is released when the switch is activated, and the braking force is released when the switch is activated. The braking force is applied when the switch is activated. The gas supply device according to claim 1, wherein the lower module is equipped with: a connector fastening portion transfer mechanism for integrally transferring the cover separating portion and the connector fastening portion in the left-right direction and the front-rear direction with respect to the valve portion; and A rotation mechanism for rotating the cover separation part and the connector fastening part, wherein the gas supply device is equipped with a control part for controlling the transfer of the transfer mechanism and the rotation of the rotation mechanism. The gas supply device according to claim 1, wherein the upper module is equipped with: a third transfer guide for guiding the vertical transfer of the lower module; a valve opening and closing portion for rotating a handle for opening and closing a valve of the valve portion; and A valve opening/closing portion transfer mechanism for transferring the valve opening/closing portion in the vertical direction independently of the vertical transfer by the third transfer guide. The gas supply device according to claim 1, wherein switches for forward rotation, reverse rotation, and stop of the connector fastening portion and the cover separation portion are provided. A method for aligning a gas supply device, comprising: an upper module including an upper plate fixedly provided at a position spaced upward from a valve portion provided at an upper end of the container; a lower module including a cover separating portion for separating a cover covering a valve connector provided with the valve portion, and a connector fastening portion for connecting a connection piping connector connected to a gas demand place to the valve connector, The alignment method includes the following steps: a) transferring the lower module in the horizontal and vertical directions according to a plurality of transfer guides equipped with the upper module; b) By the transfer of this step a), the caps are opposed to each other in a state in which the caps are not inserted into the cap separation portion, so that the first alignment portion provided in the valve portion and the second alignment portion provided in the lower module are paired with each other arranging the lower module in such a way that a part of the standard part is combined; c) moving the lower module along the horizontal direction to fully combine the first alignment portion with the second alignment portion. The method for aligning a gas supply device according to claim 22, wherein in the step b), the cover separation portion is rotated in a state where the first alignment portion is coupled with a part of the second alignment portion , and the step c) is performed in the state where the cover separation part is rotated. The alignment method of a gas supply device according to claim 22, wherein after the step c), the valve opening and closing portion provided in the upper module is carried out by means of the vertical direction transfer performed independently from the vertical direction transfer of the lower module It is transferred and descended, and the handle provided in the valve part is rotated to open the valve of the valve part.

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