TW202140950A - Gas supply apparatus having align function and align method - Google Patents

Abstract

The object of the present invention is to provide a gas supply apparatus having the align function and an align method, which can be lifted in the vertical direction while performing alignment when transferred in the horizontal direction to prevent damage to the alignment portion. The gas supply apparatus comprises an upper module equipped with an upper plate fixedly arranged at a position spaced upward from the valve portion provided at the upper end of the container; and a lower module including a cover separating portion, a connector fastening portion and a second alignment portion and transferred in the horizontal and vertical directions relative to the upper module. The cover separating portion separates the cover covering the valve connector equipped on the valve portion. The connector fastening portion is used to connect the connection piping connector connected to the gas demand point to the valve connector. The second alignment portion is combined with the first alignment portion equipped on the valve portion to achieve the alignment with the container. If the cover is arranged to face each other in a state where the cover is not inserted into the cover separating portion, it is configured as a part of the first alignment portion and a part of the second alignment portion can be combined when aligned. One of the first alignment portion and the second alignment portion is configured as a pin-shaped alignment pin having a length in a horizontal direction, and the other is configured as an alignment pin insertion groove into which the alignment pin is inserted. The gas supply apparatus further comprises a connector fastening portion transfer mechanism for making the cover separating portion and the connector fastening portion forward and retreat integrally in the direction of the valve portion. The horizontal transfer of the second alignment portion and the transfer of the cover separating portion and the connector fastening portion according to the connector fastening portion transfer mechanism are performed independently.

Description

Gas supply device equipped with alignment function and alignment method

The present invention relates to a gas supply device equipped with an alignment function and an alignment method, in particular to a valve connector of a gas storage container and a connection pipe connector connected to a gas demand place when the gas storage container is replaced The gas supply device and the alignment method of the previous alignment of the gas storage container.

Generally, for devices that supply gas to devices that use gas (especially, to gas demand locations such as semiconductor equipment that perform precision work), types of gases suitable for various purposes are required to meet predetermined concentrations and pressures.

In order to effectively supply gas, many types of gas are stored under high pressure. In particular, gases with harmful properties such as flammability, toxicity, and corrosiveness are strictly managed in a separate space isolated from humans.

The gas storage container (hereinafter referred to as the "container") that stores the gas is connected to the gas demand location. If all the gas stored in the container is consumed, the connecting pipe connected to the gas demand location is separated from the gas container valve and the container is replaced , Then connect the connecting pipe connector connected to the gas demand point to the valve connector of the replaced container and supply gas again.

In the case of replacing the container in this way, the operator must place the container in the normal position of the container loading part, but if there is no automatic device for placing the container in the normal position, it will be difficult for the operator to accurately place the gas barrel in the normal position. The problem with the normal position.

Of course, if equipped with an automated device, the container can be placed in a normal position, but there are problems in that the structure of the device is complicated and the manufacturing cost is high.

As a prior art related to a gas supply device for semiconductor equipment, Korean Granted Patent No. 10-0242982 is disclosed.

The present invention is proposed in order to solve the above-mentioned various problems, and its object is to provide a gas supply device that can be raised and lowered in the vertical direction while being aligned when transported in the horizontal direction to prevent damage to the alignment portion.

Another object of the present invention is to provide a gas supply device capable of realizing more accurate alignment by rotating the alignment portion when the alignment portion is transferred in the horizontal direction.

Another object of the present invention is to provide a gas supply device capable of maintaining a state where the upper module and the lower module are firmly coupled to a fixing block provided on the container side.

Another object of the present invention is to provide a gas supply device that can prevent breakage when the cover is combined with the cover separation part.

The gas supply device equipped with an alignment function of the present invention for achieving the above-mentioned objects includes: an upper module including an upper plate fixedly arranged at a position spaced upward from a valve portion provided at the upper end of the container; and a lower module including a cover The separation part, the connector fastening part and the second alignment part can be moved in the horizontal direction and the vertical direction relative to the upper module, wherein the cover separation part will cover the valve connector provided in the valve part The cover of the connector is separated, the connector fastening part is used to connect the connecting pipe connector connected to the gas demand point to the valve connector, and the second alignment part is connected to the first The alignment part is combined to achieve alignment with the container. If the cover is arranged to face each other in a state where the cover is not inserted into the cover separation part, it is equipped with the first alignment when the alignment is performed. The part can be combined with a part of the second alignment part.

Either one of the first alignment portion and the second alignment portion may be configured as a pin-shaped alignment pin having a length in a horizontal direction, and the other may be configured as an alignment pin insertion groove into which the alignment pin is inserted.

It may be equipped with: a connector fastening part transfer mechanism that makes the cover separating part and the connector fastening part advance and retreat integrally in the direction of the valve part, and the horizontal transfer of the second alignment part is in accordance with the The transfer of the cover separating part and the connector fastening part of the connector fastening part transfer mechanism is performed independently.

The second alignment portion may be coupled to a housing that at least partially surrounds the cover separation portion and the connector fastening portion and advances and retreats in the direction of the valve portion according to a transfer guide provided in the upper module .

An alignment block may be combined with the housing, and the second alignment portion is provided in the alignment block on a surface facing the valve portion.

The first alignment portion may be equipped with a fixing block that is combined with the valve portion, and the lower module is equipped with a second coupling portion adjacent to the second alignment portion for coupling to the fixing block. The block is provided with a first coupling portion adjacent to the first alignment portion. If the second alignment portion is moved in the direction of the first alignment portion, the first alignment portion is aligned with the second alignment portion. When the part is changed from a partly connected state to a completely connected state, the first connecting part and the second connecting part are combined, so as to maintain the combined state of the fixing block and the lower module.

The lower module may be combined with an alignment block, and the second coupling portion is configured by using a fixing block coupling member that is provided on the alignment block and is configured to protrude toward the first coupling portion, and the first The coupling portion is configured to be formed in the fixing groove of the fixing block so that the fixing block coupling member is inserted. If the fixing block coupling member is inserted into the fixing groove, the groove and the protrusion pass through the fixing groove. The locking prevents the fixing block coupling member from detaching from the fixing groove. If air is supplied, the locking of the groove and the protrusion is released, and the fixing block coupling member can be detached from the fixing groove.

If the lower module is transferred in the direction of the valve portion while the cover separating portion is rotated, the first alignment portion and the second alignment portion can be changed from a partially coupled state to a fully coupled state, and the The shape of the cap and the groove of the cap separating part are matched with each other and inserted into the groove of the cap separating part.

The lower module can be rotated in a horizontal direction relative to the upper module.

The upper part of the lower module and the lower part of the upper module may be combined with a fixing pin, at least one guide pin is combined with any one of the lower module and the upper module, and a guide pin insertion hole is formed in the other one to make The guide pin is inserted so as to be rotatable with the fixed pin as a rotation center.

The guide pin and the guide pin insertion hole may be provided with a pair on both sides of the fixing pin, respectively.

The lower module can move linearly while rotating in a horizontal direction relative to the upper module.

The upper module may be equipped with: a first transfer guide to guide the lower module to be transferred in a first direction which is one of the horizontal directions; a second transfer guide to guide the lower module to move along The horizontal direction moves in a second direction perpendicular to the first direction.

The upper plate, the middle plate, and the lower plate may be equipped to be separated from each other from the upper part to the lower part, the first transfer guide is provided between the upper plate and the middle plate, and the second transfer guide is provided at all. Between the middle board and the lower board.

The upper module may be equipped with a third transfer guide for guiding the vertical transfer of the lower module.

It may be equipped with: a vertical direction braking portion for braking the vertical direction transfer of the lower module; a horizontal direction braking portion for braking a straight line in a first direction perpendicular to the direction toward the valve portion in the horizontal direction move.

The first aligning part may be provided in a fixed block combined with the valve part, in a state where the vertical direction transfer is braked by the vertical direction brake part, and the first direction transfer is braked by the horizontal direction brake part. The first coupling portion provided adjacent to the first alignment portion of the fixing block is combined with the second coupling portion provided adjacent to the second alignment portion of the lower module, so that the horizontal direction The transport in the second direction perpendicular to the first direction is braked.

It may be equipped with a switch for applying and releasing the braking force of the horizontal direction braking portion and the vertical direction braking portion, the braking force is released when the switch is activated, and the braking force is applied when the activation of the switch is released. The braking force.

The lower module may be equipped with: a connector fastening part transfer mechanism for integrally transferring the cover separation part and the connector fastening part relative to the valve part in the left-right direction and the front-rear direction; a rotating mechanism, It is used to rotate the cover separation part and the connector fastening part, wherein the gas supply device is equipped with a control part for controlling the transfer of the transfer mechanism and the rotation of the rotation mechanism.

The upper module may be equipped with: a third transfer guide for guiding the vertical transfer of the lower module; a valve opening and closing part for rotating a handle for opening and closing the valve of the valve part; and a valve opening and closing part The transfer mechanism is used to transfer the valve opening and closing portion in the vertical direction independently of the vertical transfer according to the third transfer guide.

It may be equipped with a switch for forward rotation, reverse rotation and stop of the connector fastening part and the cover separation part.

For the alignment method of the gas supply device according to the present invention, the gas supply device includes: an upper module including an upper plate fixedly arranged at a position spaced upward from a valve portion provided at the upper end of the container; a lower module, A cover separating part that separates a cover covering the valve connector provided in the valve part and a connector fastening part for connecting a connection pipe connector connected to a gas demand location to the valve connector, the The alignment method includes the following steps: a) transfer the lower module in the horizontal direction and the vertical direction according to a plurality of transfer guides equipped on the upper module; b) transfer in the step a) before the cover is not inserted The lower module is arranged to face each other in the state of the cover separated portion so that the first alignment portion provided on the valve portion is combined with a part of the second alignment portion provided on the lower module ; C) Move the lower module in a horizontal direction so that the first alignment portion and the second alignment portion are completely combined.

In the step b), the cover separation part may be rotated in a state where the first alignment part and a part of the second alignment part are combined, and the cover separation part may be rotated while the cover separation part is rotated. Refer to step c).

After the step c), the valve opening/closing part provided in the upper module can be lowered by means of a vertical transfer performed independently of the vertical transfer of the lower module, thereby making the handle provided in the valve part By rotating, the valve of the valve portion is opened.

According to the present invention, the lower module can be raised and lowered in the vertical direction, and at the same time, the alignment is performed when being transferred in the horizontal direction, so that the damage of the alignment portion can be prevented.

In addition, the lower module is rotatable relative to the upper module, so that more accurate alignment can be achieved.

In addition, even if the operator does not place the container in the exact position of the container loading part, the container can be accurately aligned, so the operation is convenient.

In addition, it is possible to maintain the state where the upper module and the lower module are firmly coupled to the fixing block provided on the container side.

In addition, it is possible to prevent breakage when the cover is combined with the cover separation part.

Hereinafter, the present invention will be described in detail with reference to the drawings.

Here, when naming the directions, the X-axis shown in FIG. 1 is referred to as the front-rear direction, the Y-axis is referred to as the left-right direction, and the Z-axis is referred to as the vertical direction. In addition, the horizontal direction includes the left-right direction and the front-rear direction constituted by the XY plane.

1, the gas supply device 1 equipped with an alignment function of the present invention is configured to include: an upper module 2 including an upper plate 211 fixedly arranged at a position spaced upward from a valve portion provided at the upper end of the container 10; The module 3 includes a second alignment portion 351 (Figure 7), and can be moved up and down in the vertical direction relative to the upper module 2, wherein the second alignment portion 351 (Figure 7) is equipped on the upper module 2 The lower part is combined with the first alignment part 512 (FIG. 2) provided on the side of the container 10 to realize the alignment of the container 10 when it is transferred in the horizontal direction.

The upper module 2 is equipped with a valve opening and closing part 400 that can be moved in the vertical direction independently of the vertical direction of the lower module 3, and is used to rotate the upper end of the valve part. The handle 50 (Figure 2) opens and closes the valve of the valve section.

Referring to FIG. 2, the container 10 is a structure for storing and supplying process gas supplied to gas demand locations such as semiconductor devices, and the valve portion is provided on the upper portion of the container 10.

The valve part is configured to include: a valve (not shown) for restricting the supply of gas; a valve connector 30 arranged on one side of the valve and fastened to the connector fastening part 330 of the lower module 3 ( Figure 7); cover 31, covering the valve connector 30; valve shutter (not shown), opening and closing the valve; handle 50, connected to the upper part of the valve shutter, the valve closer is lifted and lowered by rotation , Thereby opening and closing the valve.

Fixed blocks 510, 520, 530 are combined with the valve part. The fixing blocks 510, 520, and 530 are equipped with the first alignment portion 512.

The fixing blocks 510, 520, and 530 may include a first fixing block 510, a second fixing block 520, and a third fixing block 530 surrounding the valve portion.

If the valve portion is surrounded by the combination of the second fixing block 520 and the third fixing block 530, the valve connector 30 and the cover 31 in the valve portion are opposed to the fixing blocks 520, 530 It protrudes and is exposed in a lateral direction, and the handle 50 in the valve part protrudes and is exposed in an upward direction relative to the fixing blocks 520 and 530.

The first fixing block 510 is configured in a quadrangular prism shape having a length in the Y-axis direction, and the second fixing block 520 is combined on one side in the Y-axis direction, and is equipped with a side surface in the X-axis direction. The first alignment portion 512.

The first alignment portion 512 may be configured as an alignment pin insertion groove 512 that is recessed and formed on one side surface in the X-axis direction.

7, the second alignment portion 351 may be configured to project from the alignment block 350 of the lower module 3 described later in the X-axis direction, which is a direction facing the alignment pin insertion groove 512. The alignment pin 351 has a length in the horizontal direction.

The alignment of the container 10 is achieved by inserting the alignment pin 351 into the alignment pin insertion groove 512.

In this embodiment, the case where the first alignment portion 512 is configured as the alignment pin insertion groove and the second alignment portion 351 is configured as the alignment pin is described as an example. However, the first alignment portion may also be configured To align the pins, the second alignment portion is configured as an alignment pin insertion groove.

In addition, in this embodiment, the case where the alignment pin is inserted into the alignment pin insertion groove is described as an example. However, it is not limited to this. The first alignment portion and the second alignment portion may also be configured tightly. Solid or combined. The methods of inserting, fastening, and coupling the first alignment portion and the second alignment portion are collectively referred to as "combination".

The first fixing block 510 is provided with a first coupling portion 511 at a position adjacent to the first alignment portion 512, and a second coupling portion 352 that is coupled with the first coupling portion 511 is provided on the lower module 3的Alignment block 350.

The first coupling portion 511 may be formed as a fixing groove 511 formed recessed in the X-axis direction on the same surface as the first alignment portion 512 formed on the first fixing block 510.

The second coupling portion 352 may be formed as a fixed block coupling member 352 protruding toward the first coupling portion 511 at a position of the alignment block 350 adjacent to the second alignment portion 351.

A plurality of protrusions 352a are provided on the outer side surface of the fixed block coupling member 352, and the plurality of protrusions 352a are elastically supported by a spring (not shown) provided inside. A protrusion insertion groove (not shown) into which the protrusion 352a is inserted is formed in the fixing groove 511. If the fixing block coupling member 352 is inserted into the fixing groove 511, the protrusion 352a is inserted into the protrusion insertion groove, so as to prevent the fixing block coupling member 352 from being detached from the fixing groove 511, thereby enabling The state of the lower module 3 coupled to the first fixing block 510 is maintained.

When the fixed block coupling member 352 is pulled out from the fixing groove 511, if air is supplied, the protrusion 352a overcomes the elastic force of the spring and enters from the surface of the fixed block coupling member 352 to the inside. , The protrusion 352a is disengaged from the protrusion insertion groove. Therefore, the fixing block coupling part 352 can be disengaged from the fixing groove 511.

3 to 6, the upper module 2 is equipped with an upper plate 211, a middle plate 212, a lower plate 213, a first transfer guide 220, a second transfer guide 230, a third transfer guide 241, 242, Valve opening and closing part 400.

The upper plate 211 is formed in a flat plate shape and is coupled to a fixed counterpart such as a cabinet not shown in the figure.

The middle plate 212 is also configured in a flat plate shape, and is configured in a stepped shape with a higher middle portion, and is provided to be spaced apart from the lower portion of the upper plate 211.

The lower plate 213 is also configured in a flat plate shape and is equipped to be spaced apart from the lower part of the middle plate 212.

The first transfer guide 220 may be provided between the upper plate 211 and the middle plate 212, and is configured to guide the middle plate 212, the second transfer guide 230, the lower plate 213, and the third transfer guide. All components of the 241, 242, the lower module 3, and the valve opening and closing unit 400 connected to the lower portion of the intermediate plate 212 are LM guides that are transported along the Y-axis direction (first direction) that is the horizontal direction.

The second transfer guide 230 may be provided between the middle plate 212 and the lower plate 213, and is configured to guide the lower plate 213, the third transfer guides 241, 242, the lower module 3, and the valve opening and closing part. All the components of 400 connected to the lower part of the lower plate 213 are LM guides that are transported in the X-axis direction (second direction) that is the horizontal direction and perpendicular to the Y-axis.

In the lower plate 213, a pair of transfer guide coupling plates 243, 244 are coupled to both sides in the Y-axis direction, and a pair of transfer guides are provided at positions separated from the pair of transfer guide coupling plates 243, 244. Support members 251, 252.

The pair of transfer guide coupling plates 243 and 244 are provided on one side and the other side of the lower plate 213 so as to face each other, and are configured in a plate shape having a length in the vertical direction.

The transfer guide support member 251 on the one side and the transfer guide support member 252 on the other side are configured into a rectangular plate shape having a length in the vertical direction, and the transfer guide on the one side joins the plate 243 and the other The transfer guide coupling plate 244 on one side is spaced to the outside in the Y-axis direction.

A third transfer guide is provided between the transfer guide coupling plate 243 and the transfer guide support member 251 on the one side, and between the transfer guide coupling plate 244 and the transfer guide support member 252 on the other side. Pieces 241, 242.

One side surface and the other side surface of a rectangular bottom plate 253 having a length in the Y-axis direction are respectively coupled to the lower ends of the transfer guide support member 251 on the one side and the transfer guide support member 252 on the other side. The lower module 3 is combined with the lower part of the bottom plate 253.

The third transfer guides 241, 242 may be configured as an LM guide that guides the pair of transfer guide support members 251, 252, the bottom plate 253, and the lower module 3 coupled to the bottom plate 253 to be integrally transferred in the vertical direction. Pieces.

The drive mechanism is not connected to the first to third transfer guides 220, 230, 241, and 242, but only serves as a guide function for allowing the operator to manually transfer. That is, if the operator grasps the lower module 3 by hand and applies force in the X-axis, Y-axis, and Z-axis directions, the lower module 3 is transferred along the respective transfer guides in the direction of the force.

The first transfer guide 220 and the third transfer guide 241, 242 may be equipped with braking parts that perform a braking function.

It may be equipped with a horizontal direction stopper 225, wherein, in the case of being guided by the first transfer guide 220 to be transferred in the first direction, the horizontal direction stopper 225 performs braking for maintaining a stopped state at a specific position Features.

It may be equipped with a vertical direction braking portion 260, wherein, in the case of being transported in the vertical direction by means of the third transfer guides 241, 242, the vertical direction braking portion 260 performs braking for maintaining a stopped state at a specific position Features.

The horizontal direction braking portion 225 and the vertical direction braking portion 260 may be configured to hold the braking force in a state where the rail of the LM guide is held by the pressing force of a spring (not shown), and if air is supplied, When the pressing force of the spring is removed from the rail, the braking force is released.

A switch box 270 for applying operation signals of the horizontal direction braking portion 225 and the vertical direction braking portion 260 may be equipped.

The switch box 270 is equipped with: a first switch 271 for applying and releasing the braking force of the horizontal braking portion 225 and vertical braking portion 260; a second switch 272 for tightening the connector described later The rotation and stop of the fixed part 330 and the cover separating part 320. The first switch 271 and the second switch 272 may be configured to be operated manually by an operator, or may be configured to be opened/closed without manual operation like a solenoid valve.

When the operator presses the first switch 271 of the switch box 270 and is in an operating state, the braking force of the horizontal direction braking portion 225 and the vertical direction braking portion 260 can be released by supplying air, so that the lower module 3 It is guided by the first transfer guide 220 and the third transfer guides 241 and 242 to freely move in the Y-axis and Z-axis directions. When the operator removes his hand from the first switch 271 to release the operation of the switch, the switch can be automatically restored by the force of the spring, so that the braking force of the horizontal direction braking portion 225 and the vertical direction braking portion 260 is applied, thereby maintaining The lower module 3 is in a fixed state without moving.

The second switch 272 may be configured as a toggle switch. The second switch 272 is equipped to be able to rotate the connector fastening part 330 and the cover separating part 320 in the forward direction or in the reverse direction.

The upper part of the lower module 3 and the lower part of the upper module 2 may be configured to be combined by a fixing pin, at least one guide pin is combined with any one of the lower module 3 and the upper module 2, and the other is formed with The guide pin insertion hole into which the guide pin is inserted enables the lower module 3 to rotate with the fixed pin as the center of rotation. An example of the above-mentioned configuration will be described with reference to FIG. 8.

8, a fixing pin insertion hole (not shown) into which a fixing pin 254 is inserted is formed in the center of the bottom plate 253, and a pair of guide pin insertion holes 253a, 253b are formed on both sides of the fixing pin insertion hole.

The guide pin insertion holes 253a and 253b may be configured as long holes having a length in the X-axis direction. A pair of guide pins 255, 256 are inserted into the pair of guide pin insertion holes 253a, 253b, respectively.

The heads of the fixed pin 254 and the guide pins 255, 256 are exposed to the upper part of the bottom plate 253, the trunk is inserted into the fixed pin insertion hole and the guide pin insertion hole 253a, 253b, and the lower end is screwed to the lower part described later The upper housing 311 of the module 3. The fixing pin 254 is inserted through the fixing pin insertion hole so as to be able to rotate relative to the bottom plate 253.

The guide pin insertion holes 253a and 253b are configured as long holes, respectively, so that the guide pins 255 and 256 can move along the length direction of the guide pin insertion holes 253a and 253b. In addition, in order to enable the guide pins 255 and 256 to rotate around the fixed pin 254, the guide pin insertion holes 253a and 253b may be formed in a circular arc shape. Moreover, it may be comprised so that only one of a pair of guide pin insertion holes 253a, 253b may be comprised in a circular arc shape.

If configured as described above, the lower module 3 can rotate in the horizontal direction with respect to the upper module 2. That is, if the operator applies a force in the direction in which the lower module 3 is to be rotated, the lower module 3 rotates with the fixed pin 254 as the rotation center. In this case, the guide pins 255, 256 are guided in the guide pin insertion holes 253a, 253b, and the rotation angle is restricted by the length of the guide pin insertion holes 253a, 253b.

As described above, the lower module 3 can rotate in the horizontal direction relative to the upper module 2, and at the same time, it can be along the X axis by means of the first transfer guide to the third transfer guide 220, 230, 241, 242 , Y-axis, Z-axis directions are linearly moved, so the operator can easily perform alignment and can achieve accurate alignment, and therefore can prevent the first alignment portion from colliding with the second alignment portion during alignment.

The valve opening and closing unit 400 is equipped with a handle 50 that can rotate for opening and closing the valve of the valve unit.

The valve opening and closing portion 400 includes a handle coupling portion 410 for inserting the handle 50 into the internal space 411, and a handle driving portion 420 for providing a driving force for rotating the handle coupling portion 410.

A plurality of handle locking portions 412 are formed inside the handle coupling portion 410, and the plurality of handle locking portions 412 protrude inward in a manner corresponding to the shape of the handle 50 to be locked with the handle, and then rotate integrally. . If the handle drive unit 420 is driven in a state where the handle 50 is inserted into the internal space 411, the handle 50 rotates to open and close the valve of the valve portion.

A valve opening/closing part transfer mechanism (not shown) for transferring the valve opening/closing part 400 in the vertical direction is equipped. The valve opening/closing part transfer mechanism is equipped to transfer in the vertical direction independently of the third transfer guides 241 and 242. That is, the lower module 3 can be guided by the third transfer guides 241 and 242 to move in the vertical direction. Independently of the lower module 3, only the valve opening and closing part 400 can be moved along with the valve opening and closing part transfer mechanism alone. Move in the vertical direction.

To this end, the valve opening and closing part transfer mechanism may include a fourth transfer guide 430 for guiding the transfer in the vertical direction and a valve opening and closing part support member 440 combined with the fourth transfer guide 430.

The fourth transfer guide 430 may be configured as an LM guide. The valve opening/closing portion support member 440 has a plate shape having a length in a vertical direction, and is coupled to the bottom plate 253 so that it can be raised and lowered integrally with the bottom plate 253. As described above, if the valve opening/closing portion support member 440 is coupled to the bottom plate 253 as the upper module 2, only the lower module 3 is vertically transferred by the third transfer guides 241 and 242, and only the lower module 3 is transferred in the vertical direction by the fourth transfer guide 430. Only the valve opening and closing unit 400 is independently transferred. Therefore, when the operator performs the transfer in the vertical direction, since the weight of the transfer object is light, the alignment operation is easy.

The above description took the case of manually transferring the valve opening and closing part 400 as an example. However, it may also be configured to be equipped with a driving part that provides a driving force so that the valve opening and closing part 400 can be transferred along the fourth transfer guide 430, so that the valve The opening and closing part 400 automatically transfers.

Referring to Fig. 7, the lower module 3 will be described.

The lower module 3 is equipped with a plurality of housings 311, 312, 313, 314, a cover separation part 320, a connector fastening part 330, a connector fastening part transfer mechanism 340, an alignment block 350, a plug module 360, Gasket supply part 370.

The plurality of housings 311, 312, 313, and 314 include: an upper housing 311, which is provided on the upper part of the lower module 3 in a plate shape; a first side housing 312 and a second side housing 313, which are respectively combined with Both sides of the upper housing 311 in the Y-axis direction; the lower housing 314, which is spaced downward from the upper housing 311, and is connected to the first side housing 312 and the second side housing on both sides 313.

The lower ends of the fixing pins 254 and the guide pins 255 and 256 of the upper module 2 are connected to the upper housing 311. The upper housing 311, the first side housing 312, the second side housing 313, and the lower housing 314 are equipped to surround the upper part, the lower part, and both sides of the lower module 3 except for the front and rear sides.

The cap separating part 320 separates the cap 31 covering the valve connector 30 provided in the valve part from the valve connector 30.

The cover separating part 320 is formed with a groove so that the cover 31 is inserted into the inside, and if the cover 31 is inserted into the groove of the cover separating part 320, a rotating mechanism (not shown) is driven to make the When the cover separation part 320 rotates, the cover 31 is separated from the valve connector 30. In contrast to this, the rotation mechanism may be driven to couple the cover 31 separated from the cover separation part 320 to the valve connector 30.

The connector fastening portion 330 is equipped to be able to connect the connection pipe connector 331 connected to the gas demand location to the valve connector 30. If the valve (not shown) is opened in a state where the connector fastening portion 330 is connected to the valve connector 30, the gas inside the container 10 is supplied to the gas demand place through the valve connector 30 and the connection piping connector 331.

The connector fastening part transfer mechanism 340 integrally transfers the cover separation part 320 and the connector fastening part 330 in the left-right direction (Y-axis direction) and the front-rear direction (X-axis direction). The connector fastening part transfer mechanism 340 may include: a first transfer mechanism for integrally transferring the cover separating part 320 and the connector fastening part 330 in the front-to-rear direction; and a second transfer mechanism for the left-to-right direction The cover separating part 320 and the connector fastening part 330 are integrally transferred.

The first transfer mechanism may include a transfer guide for transferring in the front-rear direction and an air cylinder that applies a transfer force by supplying air. In addition, the second transfer mechanism may include a transfer guide for transferring in the left-right direction, and an air cylinder that applies a transfer force by supplying air.

The rotation mechanism rotates the cover separation part 320 and the connector fastening part 330. The rotation mechanism includes a motor and a speed reducer that generate a rotation force, and includes a rotation transmission member for transmitting the rotation force to the cover separation part 320 and the connector fastening part 330.

The rotation transmission member transmits the rotation force to the cover separation part 320 and the connector fastening part 330 respectively, and if the motor is driven, the cover separation part 320 and the connector fastening part 330 rotate at the same time. Unlike this, the rotation mechanism (not shown) may be configured to be equipped with two motors, and the two motors may be used to rotate the cover separation part 320 and the connector fastening part 330 respectively.

A control part may be provided for controlling the entire gas supply device of the present invention including the valve opening and closing part transfer mechanism, the connector fastening part transfer mechanism 340, and the rotation mechanism.

It may be equipped with an inner housing 315 that opens the front and the rear and surrounds the left and right and up and down, so as to provide the cover separation part 320 and the connector fastening part 330. The inner housing 315 may be combined with the upper part of the lower housing 314.

The alignment block 350 is combined to protrude at the front end of the inner housing 315, and is substantially formed in a polyhedron shape. On the front side of the alignment block 350, the alignment pin 351 as the second alignment portion 351 is formed in a shape protruding toward the valve portion, and on the side of the alignment pin 351, the alignment pin 351 serves as the The fixed block coupling member 352 of the second coupling portion 352 is formed in a shape protruding toward the valve portion.

The plug module 360 is configured to include a plug 361, which is coupled to the connector tightening portion in order to prevent foreign substances from entering the connector tightening portion 330 when the valve connector 30 and the connector tightening portion 330 are not tightened. 330; plug support member 362, used to support the end of the plug 361; plug support housing 363, so that the plug support member 362 is combined with the plug support housing 363 to be supported; plug transfer guide 364, used The plug 361, the plug support member 362, and the plug support housing 363 are integrally transferred in the front-to-rear direction; the plug module support stand 316, so that the plug transfer guide 364 is coupled to the plug module support stand 316 to be supported, and Combined with the first side shell 312.

The gasket supply part 370 is used to install a new gasket on the connecting pipe connector 331 when the container 10 is replaced, and is configured to include a gasket holder (not shown), and a gasket (not shown). (Shown); gasket accommodating part (not shown), accommodating a plurality of gaskets; gasket transfer mechanism, in order to install the gasket accommodated in the gasket accommodating part to the connecting pipe connector 331 and transfer . The shim transfer mechanism is equipped to move back and forth in the Y-axis direction with the shim clamped by the shim holder.

The operation of the gas supply device according to the present invention will be described with reference to FIGS. 9 to 12.

First, in order to replace the container, a new container 10 is loaded on a container loading part (not shown). In this case, since the horizontal direction braking portion 225 and the vertical direction braking portion 260 are in a braking state, the lower module 3 does not move in the Y-axis direction and the Z-axis direction and maintains a fixed state.

Next, the operator presses the first switch 271. When the first switch 271 is pressed, the braking force of the horizontal direction braking portion 225 and the vertical direction braking portion 260 is released, so that the lower module 3 can be moved by the first transfer guide 220 and the third transfer guide 241, 242. Guided to move freely in the Y-axis and Z-axis directions.

In this state, the operator applies force to the lower module 3 to move in the front-rear, left-right, and up-and-down directions, so that as shown in FIG. 9, the second alignment portion 351 faces the first alignment portion 512 Way to align. In this case, the second coupling part 352 is arranged to face the first coupling part 511.

When aligning as described above, if the operator applies force to the lower module 3 to rotate it in the horizontal direction, the pair of guide pins 255, 256 rotate with the fixed pin 254 as the center of rotation and enter the guide pin insertion holes 253a, 253b. Moving in the front-rear direction, the lower module 3 rotates on the XY plane, so that the first alignment portion 512 and the second alignment portion 351 can be accurately aligned.

In the state of FIG. 9, the operator continues to adjust the position of the lower module 3, and as shown in FIG. 10, only a part of the alignment pin 351 is inserted into the alignment pin insertion groove 512.

The state of FIG. 9 and the state of FIG. 10 can be realized by one operation due to the continuous operation of the operator.

In this way, if the operator moves the lower module 3 in the front-rear direction, the left-right direction, and the up-down direction while rotating it in the horizontal direction, the first alignment portion 512 and the second alignment portion 351 can be easily aligned.

In addition, the protruding length of the alignment pin 351 from the alignment block 350 is formed to be greater than the protruding length of the fixing block coupling member 352 as the second coupling portion 352 from the alignment block 350, so that if only the alignment pin 351 protrudes One part is inserted into the aligning pin insertion groove 512, the first coupling portion 511 and the second coupling portion 352 are in an uncoupled state, and the cover separating portion 320 and the valve connector 30 covered by the cover 31 are arranged to face each other.

If in this state, the operator removes his hand from the first switch 271. When the hand is removed from the first switch 271, the horizontal direction braking portion 225 and the vertical direction braking portion 260 are applied with braking force, so that the lower module 3 does not move in the Y-axis direction and the Z-axis direction and maintains a fixed state.

In this state, when the operator operates the second switch 272, the rotating mechanism is driven, and the cover separating portion 320 rotates. As an example, when the shape of the cover 31 is configured to be a hexagon, the groove of the cover separating portion 320 is also configured to be a hexagon in a corresponding manner.

In a state where the phase of the hexagon of the groove of the lid separating portion 320 and the hexagon of the lid 31 do not match, if the lower module 3 is advanced in order to insert the lid 31 into the groove of the lid separating portion 320, Then the cover separation part 320 collides with the cover 31.

Therefore, in the present invention, if the operator operates the second switch 272 to rotate the cover separation part 320 and advance the lower module 3, the cover can be realized at the moment when the phase of the groove of the cover separation part 320 and the cover 31 coincide with each other. The separation part 320 is matched with the cover 31 so as to realize a collision-free combination.

In addition, there is also a method of using a sensor to sense the hexagonal shape of the cover 31 to match the phase of the cover separation part 320. However, according to the present invention, there is no need to provide a sensor.

If the lower module 3 is further pushed forward in the state of FIG. 10, as shown in FIG. 11, the entire alignment pin 351 is inserted into the alignment pin insertion groove 512 and is in the first alignment portion 512 and the second alignment portion 351. The state of complete integration. In this case, the second coupling portion 352 is inserted into the first coupling portion 511 and the protrusion 352a is inserted into the protrusion insertion groove, so that the first coupling portion 511 and the second coupling portion 352 can be coupled. Furthermore, the lower module 3 does not move in the X-axis direction and maintains a fixed state. In addition, the cover 31 is inserted into the groove of the cover separation part 320.

In this state, the transfer of the lower module 3 in the Y-axis and Z-axis directions is braked by the horizontal direction stopper 225 and the vertical direction stopper 260, and the transfer in the X-axis direction passes through the first coupling part 511 and the second Since the coupling of the coupling portion 352 is braked, it can be maintained in a fixed state with respect to all directions of the X, Y, and Z axes.

In addition, if the operator grasps the valve opening and closing portion 400 by hand and applies a force downward, the valve opening and closing portion 400 is guided by the fourth transfer guide 430 to move downward in the vertical direction, and the handle 50 is inserted into the handle coupling portion 410 Internal space 411.

If it is in the state of FIG. 11, the subsequent operation is automatically performed by the control unit by the operator applying an operation signal.

When the rotation mechanism is driven by the control unit to rotate the lid separation portion 320 and the first transfer mechanism is driven to move the lid separation portion 320 backward, the lid 31 is separated from the valve connector 30.

After the cover 31 is separated from the valve connector 30, if the second transfer mechanism of the connector fastening part transfer mechanism 340 is driven, as shown in FIG. 12, the cover separation part 320 and the connector fastening part 330 are along the Y axis The direction moves integrally so that the connector fastening portion 330 and the valve connector 30 are arranged to face each other.

After that, the shim transfer mechanism is driven, and is further transferred in the Y-axis direction with the shim clamped by the shim holder, so that the shim (not shown) is located at the end of the valve connector 30. In this case, the gasket 371 may be configured not to be arranged at the end of the valve connector 30 but to be coupled to the end of the connection pipe connector 331.

Next, if the first transfer mechanism of the connector fastening portion transfer mechanism 340 is driven to transfer the connector fastening portion 330 forward, and the rotating mechanism is driven to rotate the connector fastening portion 330, the valve connector 30 is coupled to the connection When the piping connector 331 of the connector fastening portion 330 is connected and the gasket transfer mechanism is driven, the gasket holder moves to a position where it is separated from the valve connector 30.

In addition, if the handle driving portion 420 is driven with the handle 50 inserted into the handle coupling portion 410, the handle 50 rotates to open the valve of the valve portion, and the gas contained in the container 10 is supplied to the gas demand location.

According to the configuration as described above, the lower module 3 can be raised and lowered in the vertical direction, and at the same time, the alignment is achieved when being transferred in the horizontal direction, so that the damage of the first alignment portion and the second alignment portion can be prevented. In addition, the lower module 3 is rotatable relative to the upper module 2, so that the alignment can be performed more accurately. In addition, even if the operator does not place the container 10 in the exact position of the container loading part, the container can be accurately aligned, so the operation is convenient.

As described above, although the present invention has been described in detail by taking the preferred embodiment as an example, the present invention is not limited to the above-mentioned embodiment, and can be carried out within the scope of the claims, the detailed description of the present invention, and the scope of the drawings. Various modifications are implemented, and these also belong to the present invention.

1: Gas supply device 2: Upper module 3: Lower module 10: container 30: Valve connector 31: cover 50: handle 211: upper plate 212: Intermediate plate 213: Lower plate 220: The first transfer guide 225: Horizontal braking part 230: Second transfer guide 241, 242: third transfer guide 243, 244: transfer guide combination plate 251, 252: Transfer guide support parts 253: bottom plate 253a, 253b: guide pin insertion hole 254: fixed pin 255, 256: guide pin 260: Vertical braking part 270: switch box 271: First switch 272: second switch 311: upper shell 312: first side shell 313: second side shell 314: lower shell 315: inner shell 316: Plug module support table 320: Lid separation part 330: Connector fastening part 331: Connect the piping connector 340: Connector fastening part transfer mechanism 350: Alignment block 351: Second alignment part 352: second joint 352a: raised 360: plug module 361: Plug 362: Plug support part 363: plug support shell 364: Plug transfer guide 370: Gasket Supply Department 400: Valve opening and closing part 410: Handle joint 411: Internal Space 412: Handle locking part 420: Handle drive 430: The fourth transfer guide 440: Valve opening and closing part support member 510, 520, 530: fixed block 511: first joint 512: First alignment part

Fig. 1 (a) and (b) are perspective views showing the gas supply device of the present invention from one side and the other side. Fig. 2 is a perspective view showing a state in which a fixing block is coupled to a valve portion of a container in the gas supply device of the present invention. Fig. 3 is a perspective view showing an upper module of the gas supply device of the present invention. Fig. 4 is a perspective view showing the upper module of the gas supply device of the present invention from a different direction from Fig. 3. Fig. 5 is a perspective view showing a state where the upper plate is removed from the upper module of the gas supply device of the present invention. Fig. 6 is a perspective view of the upper module of the gas supply device of the present invention viewed from below. Fig. 7 is a perspective view showing a lower module of the gas supply device of the present invention. Fig. 8 is a diagram showing a bottom plate, a fixing pin, and a guide pin in the upper module of the gas supply device of the present invention. Fig. 9 is a plan view showing a state where the first alignment portion and the second alignment portion are arranged to face each other in the gas supply device of the present invention. Fig. 10 is a plan view showing a state where the lower module is advanced in the state of Fig. 9 and the first alignment portion and the second alignment portion are partially coupled. Fig. 11 is a plan view showing a state where the lower module is further advanced in the state of Fig. 10 and the first alignment portion and the second alignment portion are completely combined. FIG. 12 is a diagram showing that in the state of FIG. 11, the cover separation part is separated from the valve connector and the cover separation part and the connector fastening part are integrally transferred in the Y direction so that the connector fastening part is arranged to be opposed to the valve connector Floor plan of the state.

1: Gas supply device

2: Upper module

211: upper plate

270: switch box

3: Lower module

10: container

400: Valve opening and closing part

50: handle

510: fixed block

Claims (24)

A gas supply device includes: The upper module includes an upper plate fixedly arranged at a position spaced upward from the valve part equipped on the upper end of the container; The lower module includes a cover separation part, a connector fastening part, and a second alignment part, and can be moved horizontally and vertically relative to the upper module. The cover separation part will cover the valve connector equipped on the valve part The cover of the connector is separated, the connector fastening portion is used to connect the connection pipe connector connected to the gas demand location to the valve connector, and the second alignment portion is combined with the first alignment portion provided on the valve portion To realize the alignment with the container, if the cover is arranged to face each other in the state where the cover is not inserted into the cover separation part, it is equipped with the first alignment part and the second alignment part when the alignment is performed. One part can be combined. The gas supply device according to claim 1, wherein any one of the first alignment portion and the second alignment portion is configured as a pin-shaped alignment pin having the length in the horizontal direction, and the other is configured as The alignment pin is inserted into the alignment pin insertion groove. The gas supply device according to claim 1, which is equipped with: a connector fastening portion transfer mechanism that causes the cover separating portion and the connector fastening portion to advance and retreat integrally in the direction of the valve portion, and the second pair The horizontal transfer of the alignment part is performed independently of the transfer of the cover separating part and the connector fastening part according to the connector fastening part transfer mechanism. The gas supply device according to claim 3, wherein the second alignment portion is coupled to an outer side at least partially surrounding the cover separation portion and the connector fastening portion, and along the valve according to a transfer guide provided in the upper module The housing is moving forward and backward. The gas supply device according to claim 4, wherein an alignment block is combined with the housing, and the second alignment portion is provided on the alignment block on a surface facing the valve portion. The gas supply device according to claim 1, wherein the first alignment portion is equipped with a fixing block combined with the valve portion, and the lower module is equipped with a second coupling portion adjacent to the second alignment portion, and When coupled to the first coupling portion provided on the fixing block adjacent to the first alignment portion, if the second alignment portion is moved in the direction of the first alignment portion, the first alignment portion and the second alignment portion When the two alignment parts change from a partly combined state to a completely combined state, the first joint part is combined with the second joint part, so as to maintain the joint state of the fixing block and the lower module. The gas supply device according to claim 6, wherein an alignment block is coupled to the lower module, and the second coupling portion is configured as a fixed block coupling member protruding toward the first coupling portion by being equipped with the alignment block The first coupling portion is configured to be formed in a fixing groove of the fixing block so that the fixing block coupling member is inserted, and if the fixing block coupling member is inserted into the fixing groove, a groove and a protrusion pass through the inside of the fixing groove. The raised locking prevents the fixing block coupling member from detaching from the fixing groove. If air is supplied, the locking of the groove and the protrusion is released, and the fixing block coupling member can be detached from the fixing groove. The gas supply device according to claim 6, wherein if the lower module is transferred in the direction of the valve portion while the cover separating portion is rotated, the first alignment portion and the second alignment portion are partially combined It is in a completely coupled state, and the shape of the cap and the groove of the cap separating part are matched and inserted into the groove of the cap separating part. The gas supply device according to claim 1, wherein the lower module is capable of rotating in a horizontal direction relative to the upper module. The gas supply device according to claim 9, wherein the upper part of the lower module and the lower part of the upper module are combined by a fixing pin, at least one guide pin is combined with any one of the lower module and the upper module, and the other is formed There is a guide pin insertion hole so that the guide pin is inserted so that it can be rotated with the fixed pin as the center of rotation. The gas supply device according to claim 10, wherein the guide pin and the guide pin insertion hole are respectively provided with a pair on both sides of the fixing pin. The gas supply device according to claim 9, wherein the lower module can move linearly while rotating in a horizontal direction relative to the upper module. The gas supply device according to claim 1, wherein the upper module is equipped with: The first transfer guide is provided to guide the lower module to transfer in the first direction, which is one of the horizontal directions; and The second transfer guide is to guide the lower module to be transferred in a second direction perpendicular to the first direction in the horizontal direction. The gas supply device according to claim 13, wherein the upper plate, the middle plate, and the lower plate are provided to be separated from each other from the upper part to the lower part, the first transfer guide is provided between the upper plate and the middle plate, and the The second transfer guide is provided between the middle plate and the lower plate. The gas supply device according to claim 1, wherein the upper module is equipped with a third transfer guide for guiding the vertical transfer of the lower module. The gas supply device according to claim 1, which is equipped with: The vertical direction braking part is used to brake the vertical direction transfer of the lower module; and The horizontal direction braking portion is used for braking linear movement in a first direction perpendicular to the direction toward the valve portion in the horizontal direction. The gas supply device according to claim 16, wherein the first aligning portion is equipped with a fixed block combined with the valve portion, and the vertical direction transfer is braked by the vertical direction braking portion, and the first direction transfer is controlled by the horizontal direction. In the state of braking by the direction braking portion, the first coupling portion provided on the fixing block adjacent to the first alignment portion is combined with the second coupling portion provided on the lower module adjacent to the second alignment portion, thereby The second direction of the horizontal direction that is perpendicular to the first direction is stopped. The gas supply device according to claim 16, wherein a switch for applying and releasing the braking force of the horizontal braking portion and the vertical braking portion is provided, and the braking force is released when the switch is activated, and the braking force is released when the switch is activated. This braking force is applied when the switch is activated. The gas supply device according to claim 1, wherein the lower module is equipped with: A connector fastening part transfer mechanism for integrally transferring the cover separating part and the connector fastening part relative to the valve part in the left-right direction and the front-rear direction; and A rotating mechanism is used to rotate the cover separating part and the connector fastening part, wherein the gas supply device is equipped with a control part for controlling the transfer of the transfer mechanism and the rotation of the rotating mechanism. The gas supply device according to claim 1, wherein the upper module is equipped with: The third transfer guide is used to guide the vertical transfer of the lower module; A valve opening and closing part for rotating a handle for opening and closing the valve of the valve part; and The valve opening/closing part transfer mechanism is used to transfer the valve opening/closing part in the vertical direction independently of the vertical direction transfer according to the third transfer guide. The gas supply device according to claim 1, which is equipped with a switch for forward rotation, reverse rotation, and stop of the connector fastening portion and the cover separation portion. A method for alignment of a gas supply device includes: The upper module includes an upper plate fixedly arranged at a position spaced upward from the valve part equipped on the upper end of the container; The lower module includes a cover separating part that separates the cover covering the valve connector provided in the valve part, and a connector fastening part for connecting the connection piping connector connected to the gas demand location to the valve connector, The alignment method includes the following steps: a) The lower module is transferred in the horizontal and vertical directions according to a plurality of transfer guides equipped on the upper module; b) Through the transfer of step a), the cover is not inserted into the cover separation part to face each other, so that the first alignment part provided in the valve part and the second pair provided in the lower module Arranging the lower module in a way that a part of the standard part is combined; c) Move the lower module along the horizontal direction so that the first alignment portion and the second alignment portion are completely combined. The alignment method of the gas supply device according to claim 22, wherein in the step b), in a state where the first alignment portion is combined with a part of the second alignment portion, the cover separation portion is rotated , This step c) is carried out with the cover separating part rotating. The alignment method of the gas supply device according to claim 22, wherein after the step c), the valve opening and closing portion provided in the upper module is performed by the vertical direction independently of the vertical direction transfer of the lower module It is transferred and lowered, and the handle provided in the valve portion is rotated to open the valve of the valve portion.

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