TWI791549B - 蒸鍍罩 - Google Patents

蒸鍍罩 Download PDF

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Publication number
TWI791549B
TWI791549B TW107123244A TW107123244A TWI791549B TW I791549 B TWI791549 B TW I791549B TW 107123244 A TW107123244 A TW 107123244A TW 107123244 A TW107123244 A TW 107123244A TW I791549 B TWI791549 B TW I791549B
Authority
TW
Taiwan
Prior art keywords
frame
vapor deposition
layer
cover
frame body
Prior art date
Application number
TW107123244A
Other languages
English (en)
Chinese (zh)
Other versions
TW201911622A (zh
Inventor
石川樹一郎
田丸裕仁
小林良弘
Original Assignee
日商麥克賽爾股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 日商麥克賽爾股份有限公司 filed Critical 日商麥克賽爾股份有限公司
Publication of TW201911622A publication Critical patent/TW201911622A/zh
Application granted granted Critical
Publication of TWI791549B publication Critical patent/TWI791549B/zh

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  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)
  • Outer Garments And Coats (AREA)
TW107123244A 2017-07-31 2018-07-05 蒸鍍罩 TWI791549B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2017148250 2017-07-31
JPJP2017-148250 2017-07-31
JP2017191494A JP7067889B2 (ja) 2017-07-31 2017-09-29 蒸着マスク
JPJP2017-191494 2017-09-29

Publications (2)

Publication Number Publication Date
TW201911622A TW201911622A (zh) 2019-03-16
TWI791549B true TWI791549B (zh) 2023-02-11

Family

ID=65477826

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107123244A TWI791549B (zh) 2017-07-31 2018-07-05 蒸鍍罩

Country Status (2)

Country Link
JP (1) JP7067889B2 (enExample)
TW (1) TWI791549B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7449485B2 (ja) * 2019-03-28 2024-03-14 大日本印刷株式会社 蒸着マスク及び蒸着マスクの製造方法
JP7473298B2 (ja) * 2019-03-29 2024-04-23 マクセル株式会社 蒸着マスク
KR102187007B1 (ko) * 2020-02-26 2020-12-04 주식회사 핌스 평탄도가 개선된 박막 증착용 마스크 조립체 및 그 제조 방법
WO2025225401A1 (ja) * 2024-04-23 2025-10-30 大日本印刷株式会社 メタルマスク及びその製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201706428A (zh) * 2015-02-10 2017-02-16 Dainippon Printing Co Ltd 蒸鍍遮罩之製造方法、欲製作蒸鍍遮罩所使用之金屬板及其製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4401040B2 (ja) * 2001-06-19 2010-01-20 株式会社オプトニクス精密 蒸着用マスク
JP4616667B2 (ja) * 2005-03-01 2011-01-19 京セラ株式会社 マスク構造体およびそれを用いた蒸着方法、並びに有機発光素子の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201706428A (zh) * 2015-02-10 2017-02-16 Dainippon Printing Co Ltd 蒸鍍遮罩之製造方法、欲製作蒸鍍遮罩所使用之金屬板及其製造方法

Also Published As

Publication number Publication date
JP2019026926A (ja) 2019-02-21
TW201911622A (zh) 2019-03-16
JP7067889B2 (ja) 2022-05-16

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