JP7067889B2 - 蒸着マスク - Google Patents

蒸着マスク Download PDF

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Publication number
JP7067889B2
JP7067889B2 JP2017191494A JP2017191494A JP7067889B2 JP 7067889 B2 JP7067889 B2 JP 7067889B2 JP 2017191494 A JP2017191494 A JP 2017191494A JP 2017191494 A JP2017191494 A JP 2017191494A JP 7067889 B2 JP7067889 B2 JP 7067889B2
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Japan
Prior art keywords
frame
mask
vapor deposition
layer
frame body
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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JP2017191494A
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English (en)
Japanese (ja)
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JP2019026926A5 (enExample
JP2019026926A (ja
Inventor
樹一郎 石川
裕仁 田丸
良弘 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maxell Ltd
Original Assignee
Maxell Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Maxell Ltd filed Critical Maxell Ltd
Priority to TW107123244A priority Critical patent/TWI791549B/zh
Priority to KR1020180085784A priority patent/KR102702151B1/ko
Priority to CN201810834458.5A priority patent/CN109321879B/zh
Publication of JP2019026926A publication Critical patent/JP2019026926A/ja
Publication of JP2019026926A5 publication Critical patent/JP2019026926A5/ja
Priority to JP2022073416A priority patent/JP7470734B2/ja
Application granted granted Critical
Publication of JP7067889B2 publication Critical patent/JP7067889B2/ja
Priority to JP2023110688A priority patent/JP2023126306A/ja
Priority to JP2024069672A priority patent/JP2024097027A/ja
Priority to JP2024211704A priority patent/JP2025023270A/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)
  • Outer Garments And Coats (AREA)
JP2017191494A 2017-07-31 2017-09-29 蒸着マスク Active JP7067889B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
TW107123244A TWI791549B (zh) 2017-07-31 2018-07-05 蒸鍍罩
KR1020180085784A KR102702151B1 (ko) 2017-07-31 2018-07-24 증착 마스크
CN201810834458.5A CN109321879B (zh) 2017-07-31 2018-07-26 蒸镀掩模
JP2022073416A JP7470734B2 (ja) 2017-07-31 2022-04-27 枠体および蒸着マスク
JP2023110688A JP2023126306A (ja) 2017-07-31 2023-07-05 枠体および蒸着マスク
JP2024069672A JP2024097027A (ja) 2017-07-31 2024-04-23 蒸着マスク
JP2024211704A JP2025023270A (ja) 2017-07-31 2024-12-04 枠体及び蒸着マスク

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017148250 2017-07-31
JP2017148250 2017-07-31

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2022073416A Division JP7470734B2 (ja) 2017-07-31 2022-04-27 枠体および蒸着マスク

Publications (3)

Publication Number Publication Date
JP2019026926A JP2019026926A (ja) 2019-02-21
JP2019026926A5 JP2019026926A5 (enExample) 2020-08-13
JP7067889B2 true JP7067889B2 (ja) 2022-05-16

Family

ID=65477826

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017191494A Active JP7067889B2 (ja) 2017-07-31 2017-09-29 蒸着マスク

Country Status (2)

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JP (1) JP7067889B2 (enExample)
TW (1) TWI791549B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7449485B2 (ja) * 2019-03-28 2024-03-14 大日本印刷株式会社 蒸着マスク及び蒸着マスクの製造方法
JP7473298B2 (ja) * 2019-03-29 2024-04-23 マクセル株式会社 蒸着マスク
KR102187007B1 (ko) * 2020-02-26 2020-12-04 주식회사 핌스 평탄도가 개선된 박막 증착용 마스크 조립체 및 그 제조 방법
WO2025225401A1 (ja) * 2024-04-23 2025-10-30 大日本印刷株式会社 メタルマスク及びその製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002371349A (ja) 2001-06-19 2002-12-26 Optonix Seimitsu:Kk 蒸着用マスク
JP2006244746A (ja) 2005-03-01 2006-09-14 Kyocera Corp マスク構造体およびそれを用いた蒸着方法、並びに有機発光素子の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202016008840U1 (de) * 2015-02-10 2020-02-11 Dai Nippon Printing Co., Ltd. Metallblech

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002371349A (ja) 2001-06-19 2002-12-26 Optonix Seimitsu:Kk 蒸着用マスク
JP2006244746A (ja) 2005-03-01 2006-09-14 Kyocera Corp マスク構造体およびそれを用いた蒸着方法、並びに有機発光素子の製造方法

Also Published As

Publication number Publication date
JP2019026926A (ja) 2019-02-21
TWI791549B (zh) 2023-02-11
TW201911622A (zh) 2019-03-16

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