TWI787551B - Coating device and coating method - Google Patents

Abstract

In a coating device of this invention, on a traveling member 23 travels on an object to be coated 10 in which a plate-shaped upper portion 12 smaller than a lower portion 11 is provided on the plate-shaped lower portion 11, a coating nozzle 24 having a slit-shaped discharge port 24a at a tip portion thereof in a direction intersecting the traveling direction is provided, and a straw-shaped nozzle 25 having straw-shaped discharge port 25a at a tip portion thereof is provided so as to be movable in a direction intersecting the traveling direction of traveling member.

Description

Coating device and coating method

The present invention relates to a coating device, which is a traveling member that travels back and forth on the object to be coated in a fixed direction, and is provided with a slit-like spout extending in a direction intersecting the traveling direction at the front end. The coating nozzle of the outlet, and the aforementioned slit-shaped discharge port in the coating nozzle is advanced on the object to be coated in a manner opposite to the object to be coated by a traveling member, and the coating liquid is flowed from the aforementioned slit-shaped The discharge port discharges to the object to be coated, so that the coating liquid is applied to the object to be coated. In particular, it is characterized in that it can be carried out simply and in a short time: using the above-mentioned coating device, the coating liquid is applied to the plate-shaped upper section formed on the plate-shaped lower section, which is formed smaller than the lower section. The upper surface of the upper section of the body to be coated, and the upper surface of the lower section from the end surface of the upper section in the step difference between the upper section and the lower section.

Conventionally, an operation of applying a coating liquid to a body to be coated made of a glass plate or the like has been performed by a coating device such as a table coater (registered trademark).

Here, in this type of coating device, as shown in Patent Document 1, etc., the object to be coated made of a glass plate or the like is placed on a platform, and the object placed in the above-mentioned manner is reciprocated in a fixed direction. The traveling member on the object to be coated is provided with a coating nozzle having a slit-shaped discharge port extending in a direction intersecting with the traveling direction at the front end, and the coating nozzle is lifted up. The slit-shaped discharge port provided at the front end and the object to be coated are lowered to an appropriate distance, and in this state, the coating nozzle is advanced on the object to be coated by the moving member, and the coating is applied. The liquid is applied onto the object to be coated placed on the table from the slit-shaped discharge port extending in a direction intersecting the advancing direction.

In addition, what is disclosed in Patent Document 2 is to increase the film thickness of the coating liquid by reducing the swelling of the coating liquid that occurs near the outer periphery of the object to be coated such as a glass substrate held on the substrate suction table. The uniformity of the coating is to install a thinner supply nozzle that can be moved on the outer periphery of the object to be coated held on the substrate adsorption platform, and to apply the thinner along the outer periphery of the object to be coated by the thinner supply nozzle. After the diluent with a lower viscosity than the resist liquid, the resist liquid supply nozzle is supplied with the resist liquid by moving the resist liquid on the object to be coated in the vertical and horizontal direction or the circumferential direction, so as to reduce the outer circumference of the object to be coated. The bulge of the resist solution in the part.

On the other hand, in recent years, it has been carried out to use, for example, a glass substrate or a resin substrate of a different size to laminate a plate-shaped upper section formed smaller than the lower section above the plate-shaped lower section. Integrate, and the step part is formed around the upper part on the lower part, this is used as the object to be coated, and the coating liquid is not only applied to the upper surface of the upper part of the object to be coated , and also apply the coating liquid from the end surface of the upper section to the upper surface of the lower section in the step difference between the upper section and the lower section around the upper section, so as to cover the upper section around the aforementioned step difference together with the upper surface of the upper section. The end face of the upper part to the upper surface of the lower part is protected by a coating film.

Here, using the coating device shown in the aforementioned Patent Document 1, as described above, not only the coating liquid is applied to the upper surface of the upper section, but also to the step portion between the upper section and the lower section around the upper section. Applying the coating liquid from the end surface (side surface) of the upper section to the upper surface of the lower section In this case, when the length of the long slit-shaped discharge port provided in the front end of the coating nozzle in the width direction is set to be larger than the width of the upper surface of the upper section, and the coating nozzle is moved to the upper section When it is above the upper part, it can be considered that the length of the coating nozzle to travel is set to be longer than the length of the travel direction of the upper part, and the area to be coated with the coating liquid from the slit-shaped discharge port in the front end of the coating nozzle is set to be In order to be larger than the upper surface of the upper section, the coating liquid is also supplied to the step portion around the upper surface of the upper section.

However, in this way, the area over which the coating liquid is to be applied from the slit-shaped outlet in the front end of the coating nozzle is made larger than the upper surface of the upper portion so that the coating liquid is also supplied around the upper surface of the upper portion. Generally speaking, the thickness of the coating on the upper surface of the upper section is thinner, and the amount of coating liquid applied is less. On the other hand, the distance between the upper section and the lower section It will be larger than the applied thickness, so it is impossible to supply a sufficient amount of coating liquid to the level difference around the upper section, even if the end surface of the upper section in the level difference between the upper section and the lower section is to be above the lower section If the surface is properly coated with the coating liquid, the adhesion of the coating liquid will also be interrupted at the end surface of the upper section, and it is extremely difficult to cover the entire upper surface and end surface of the upper section with the coating liquid. In particular, when using a generally used coating liquid with high viscosity, the coating liquid cannot be applied from the end surface of the upper section to the upper surface of the lower section in the step portion.

In addition, what is disclosed in Patent Document 2 is to provide a diluent supply nozzle that can move on the outer peripheral portion of the object to be coated held on the substrate adsorption platform as described above, and the diluent supply nozzle moves along the After the outer periphery of the object to be coated is coated with a diluent with a lower viscosity than the resist solution, the resist liquid supply nozzle is moved on the object to be coated in a vertical and horizontal direction or a circumferential direction to supply the resist liquid to reduce the The bulge of the resist solution in the outer peripheral portion of the coated body does not exist in Patent Document 2, which does not only apply the coating solution to the upper surface of the upper portion as described above, but also Also for the purpose of coating the coating liquid from the end surface of the upper section to the upper surface of the lower section in the step between the upper section and the lower section around the upper section, and since the resist liquid is supplied to the nozzle in the vertical and horizontal or circumferential direction Therefore, in order to apply the coating liquid not only to the upper surface of the upper section, but also to the level difference between the upper section and the lower section around the upper section There is a problem that it takes a very long time to apply the coating liquid from the end surface of the upper section to the upper surface of the lower section.

[Prior Art Literature]

[Patent Document]

Patent Document 1: Japanese Patent Laid-Open No. 2002-200450

Patent Document 2: Japanese Patent Laid-Open No. 2000-237668

The object of the present invention is to solve the problem of "using a coating device, and in an object to be coated formed with a plate-shaped upper section formed on the lower section formed into a plate shape smaller than the lower section, in addition to applying the liquid on the In addition to the above upper surface of the upper section, but also coating from the end surface of the upper section to the upper surface of the lower section in the step difference between the upper section and the lower section", the problem as mentioned above, wherein the coating device is The traveling member that travels back and forth on the object to be coated in a fixed direction is provided with a coating nozzle having a slit-shaped discharge port extending in a direction intersecting the traveling direction at the front end, and the coating nozzle is provided by the traveling member. The aforementioned slit-shaped outlet in the nozzle It travels on the object to be coated so as to face the object to be coated, and discharges the coating liquid from the slit-shaped discharge port to the object to be coated, so that the coating liquid is applied to the object to be coated.

That is, the problem in the present invention is to improve the coating device as described above, which can be carried out simply and in a short time: as described above, the coating liquid is properly coated on the bottom part formed in a plate shape. The upper surface of the upper portion of the object to be coated formed as a plate-shaped upper portion smaller than the lower portion, and the upper surface of the lower portion from the end surface of the upper portion in the step difference between the upper portion and the lower portion.

In order to solve the above-mentioned problems, in the coating device of the present invention, a coating nozzle is provided on the traveling member that travels back and forth on the object to be coated in a predetermined direction, and the coating nozzle has a front end portion facing The slit-shaped discharge port extending in a direction intersecting with the traveling direction is guided to a position facing the object to be coated by the travel member guiding the slit-shaped discharge port in the coating nozzle, and the travel member guides the slit-shaped discharge port for coating by the travel member The nozzle moves on the object to be coated, and the coating liquid is discharged from the aforementioned slit-shaped outlet to the object to be coated, so that the coating liquid is applied to the object to be coated; A straw-shaped nozzle is provided so as to move in a direction intersecting with the traveling direction, and the aforementioned straw-shaped nozzle has a straw-shaped discharge port at the front end.

Here, in the coating device of the present invention, the coating nozzle and the straw-shaped nozzle may be provided so as to be movable in the vertical direction with respect to the traveling member.

In addition, the coating liquid and/or the solvent to be used in the coating liquid may be discharged from the straw-shaped outlet of the straw-shaped nozzle.

In addition, in the coating method of the present invention, in order to solve the above-mentioned problems, it is set to use a coating device to apply the coating liquid on the upper surface of the upper section of the object to be coated, and from the upper surface of the upper section to the lower section. In the level difference part, the end surface of the upper section reaches the upper surface of the lower section, wherein the above-mentioned coated system is formed by providing the above-mentioned upper section formed in a plate shape smaller than the lower section on the above-mentioned lower section formed in a plate shape, The coating device is provided with a coating nozzle on a traveling member that travels back and forth on the object to be coated in a predetermined direction, and a suction pipe-shaped nozzle is provided on the traveling member in a manner that can move in a direction intersecting with the traveling direction of the traveling member. Nozzle, the above-mentioned coating nozzle has a slit-shaped discharge port extending in a direction intersecting with its advancing direction at the front end, and the aforementioned straw-shaped nozzle has a straw-shaped discharge port at the front end; Combining the action of the member traveling on the aforementioned object to be coated and the action of moving the aforementioned straw-shaped nozzle in a direction intersecting with the advancing direction of the advancing member, so that the aforementioned straw-shaped nozzle is moved along the upper section of the aforementioned object to be coated and The step portion of the lower portion moves, and the coating liquid and/or the solvent to be used in the coating liquid is supplied onto the lower portion along the end surface of the upper portion of the aforementioned step portion from the straw-shaped discharge port of the straw-shaped nozzle. After the surface, the aforementioned traveling member is advanced, and the coating liquid is applied to the upper surface of the upper section of the object to be coated and the coating that has been supplied to the aforementioned step section from the slit-shaped discharge port of the aforementioned coating nozzle. liquid and/or to be used on the solvent of the coating liquid.

In this way, the coating liquid will be applied to the upper surface of the upper part of the object to be coated from the slit-shaped discharge port in the coating nozzle, and the coating liquid will be applied to the area where the coating liquid has already been supplied and/or the coating liquid is to be used. The coating liquid in the step part of the solvent is applied from the end surface of the upper part to the upper surface of the lower part in the state of mixing with the coating liquid in the step part and/or the solvent to be used in the coating liquid.

Here, when the solvent to be used for the aforementioned coating solution has been supplied from the end surface of the upper stage portion to the upper surface of the lower stage portion of the step portion from the straw-shaped discharge port of the straw-shaped nozzle as described above, , and when the coating liquid is applied from the slit-shaped discharge port in the coating nozzle as described above, the coating liquid applied in this way is dissolved in the solvent that has been supplied from the end surface of the upper section to the upper surface of the lower section. , and the coating solution is applied in a diluted state from the end surface of the upper section to the upper surface of the lower section.

In the coating device of the present invention, as described above, the travel member that travels back and forth on the object to be coated in a predetermined direction is provided with a slit-shaped discharge port extending in a direction intersecting the travel direction at the front end. The nozzle for coating is provided with a straw-shaped nozzle having a straw-shaped discharge port at the front end so as to be movable in a direction intersecting with the traveling direction of the traveling member.

Furthermore, in the coating method of the present invention, it is assumed that the coated body is formed by applying the coating liquid to the plate-shaped upper section formed on the plate-shaped lower section. When the upper surface of the middle and upper section, and from the end surface of the upper section to the upper surface of the lower section of the step difference between the upper section and the lower section, use the coating device as described above to make the traveling member The action of traveling on the object to be coated is combined with the action of moving the straw-shaped nozzle in a direction intersecting the advancing direction of the traveling member, so that the straw-shaped nozzle follows the level difference between the upper section and the lower section of the object to be coated. Move, and after the coating solution to be used in the coating nozzle and/or the solvent to be used in the coating solution are supplied to the lower section along the end surface of the upper section in the step section from the straw-shaped discharge port of the straw-shaped nozzle, the aforementioned The traveling member advances, and from the slit-shaped discharge port in the aforementioned coating nozzle, the coating liquid is applied to the upper surface of the upper section of the object to be coated, and the surface that has been supplied. The above-mentioned coating liquid and/or the solvent to be used for the coating liquid are given from the end surface of the upper stage part to the upper surface of the lower stage part in the step difference part.

In this way, in the coating method of the present invention, as described above, it can be carried out simply and in a short time: Appropriately coating the coating liquid on the lower section formed in a plate shape with a plate formed smaller than the lower section The upper surface of the upper section of the coated body formed from the upper section, and from the end surface of the upper section to the upper surface of the lower section in the step difference between the upper section and the lower section; and can be simply carried out: not only in The coating film is formed on the upper surface of the upper section of the object to be coated, and the portion from the end surface of the upper section to the upper surface of the lower section in the step difference between the upper section and the lower section around the upper section also makes the A coating film is formed in such a way that the adhesion of the coating liquid is not interrupted for protection.

10: Coated body

11: lower section

11a: upper surface

12: Upper part

12a: upper surface

12b: end face

20: Coating device

21: Platform

22: Traveling rails

23: Marching components

24: Nozzle for coating

24a: slit-shaped outlet

25: Straw nozzle

25a: straw-shaped outlet

26: Straw-shaped nozzle travel rail

x: coating liquid

xa: solvent

Fig. 1 shows an object to be coated on which a coating liquid is applied by a coating device according to an embodiment of the present invention. The object to be coated is provided with a plate-shaped upper stage formed smaller than the lower stage on the plate-shaped lower stage. , Fig. 1 (A) is a schematic top view, and Fig. 1 (B) is a schematic side view.

Fig. 2 is a schematic plan view showing the following state: In the coating device of the aforementioned embodiment, the aforementioned object to be coated is placed on a platform, and guides are provided on both sides of the platform in the width direction of the object to be coated. The guide rail of the traveling member above the object to be coated, and for this traveling member, is provided with a coating nozzle having a slit-shaped discharge port extending in a direction intersecting the traveling direction at the front end, and can travel toward and A straw-shaped nozzle having a straw-shaped discharge port at the front end is provided so as to move in a direction intersecting the traveling direction of the member.

Fig. 3 is a schematic explanatory view of a state in which the object to be coated is placed on the platform as viewed from the side where the straw-shaped nozzle is provided in the coating device of the aforementioned embodiment.

Fig. 4 is a schematic explanatory view of the state in which the object to be coated is placed on the table viewed from the side intersecting the direction in which the traveling member travels in the coating device of the above-mentioned embodiment.

Fig. 5 is an enlarged explanatory view showing the following state: In the coating device of the aforementioned embodiment, the coating liquid is supplied from the end surface of the upper stage to the upper surface of the lower stage in the step difference from the straw-shaped discharge port of the straw-shaped nozzle. .

Fig. 6 is a schematic plan view showing the following state: in the coating device of the aforementioned embodiment, the action of making the aforementioned traveling member travel on the object to be coated and making the aforementioned straw-shaped nozzle intersect with the traveling direction of the traveling member Direction movement is combined, so that the straw-shaped nozzle moves along the step difference between the upper section and the lower section of the object to be coated, and from the straw-shaped discharge port of the straw-shaped nozzle, along the entire circumference of the aforementioned step difference. The end surface of the upper section supplies the coating liquid to the upper surface of the lower section.

Fig. 7 is a partially enlarged explanatory view showing the following state: in the coating device of the aforementioned embodiment, after the coating liquid is supplied to the upper surface of the lower section along the end surface of the upper section in the step difference section by the straw-shaped nozzle , the coating liquid is supplied from the slit-shaped outlet of the coating nozzle, and the coating liquid is applied to the upper surface of the upper section of the object to be coated, and the upper section of the step portion that has been supplied with the coating liquid as described above. The end surface of the lower section starts from the upper surface of the lower section.

Fig. 8 is a schematic plan view showing the following state: in the coating device of the aforementioned embodiment, as shown in Fig. 6, the coating is supplied to the end surface of the upper section along the entire circumference of the step portion by the straw-shaped nozzle. After the liquid reaches the upper surface of the lower section, the aforementioned coating nozzles provided on the traveling One end side of the direction of travel advances on the object to be coated toward the other end side, and at the same time, the coating liquid is supplied from the slit-shaped discharge port of the coating nozzle to be coated on the upper surface of the upper part of the object to be coated, and the already supplied Part of the coating liquid coated on the whole is removed from the end surface of the upper section to the upper surface of the lower section in the step difference of the coating liquid.

Fig. 9 shows a modified example of the situation in which the coating device of the above-mentioned embodiment is used. Fig. 9 (A) shows the solvent to be used in the coating liquid through the straw-shaped nozzle, from the upper stage of the aforementioned step portion Partially enlarged explanatory diagram of the state of supplying to the upper surface of the lower section from the end surface of the part. Fig. 9 (B) is a partially enlarged explanatory diagram showing the following state: Coating solution, and coating the coating solution on the upper surface of the upper section of the object to be coated, and the portion to which the solvent to be used for the coating solution has been supplied from the end surface of the upper section to the upper surface of the lower section of the step difference.

Hereinafter, the coating device and the coating method of the embodiment of the present invention will be specifically described based on the attached drawings. In addition, the coating apparatus and coating method of this invention are not limited to what is shown in the following embodiment, It can change suitably and implement in the range which does not change the gist of invention.

Here, in this embodiment, as shown in Fig. 1 (A) and (B), a plate-shaped lower section 11 made of a glass plate or the like is used to install a lower section 11 with a smaller area than the lower section 11. The plate-shaped upper section 12 formed of a small synthetic resin or the like is used as the object to be coated 10 to be coated with the coating liquid x. In this object to be coated 10, it is formed in the following state: The step portion between the edge of the upper surface 12a of the upper section 12 in the coating body 10 and the upper surface 11a of the lower section 11 is exposed along the upper surface 12a of the upper section 12 throughout the entire circumference of the lower section 11. Of The edge portion forms the end surface 12b of the upper section 12 . In addition, in the figure, although the thickness is shown as large for the sake of convenience, the actual thickness of the upper stage part 12 is about 0.5 mm.

In addition, in the coating device 20 of this embodiment mode, as shown in Fig. 2 to Fig. 4, it is set that the lower section 11 of the aforementioned object to be coated 10 faces downward, and the object to be coated 10 is placed on the Central part of platform 21 .

Furthermore, in the coating device 20 of this embodiment, it is set as follows: the traveling member 23 is provided in a manner of erecting the traveling rails 22 on both sides of the platform 21 on which the object to be coated 10 is placed as described above. , and the traveling member 23 is made to travel on the object to be coated 10 along the traveling rail 22 .

In addition, in this coating device 20, on one side of the advancing direction of the aforementioned advancing member 23, a slit-like slit extending in a direction intersecting the advancing direction is provided at the front end facing the object 10 to be coated. The coating nozzle 24 of the discharge port 24a, on the other hand, is on the one-sided side of the traveling member 23 on the opposite side to the coating nozzle 24 so as to be able to advance toward the traveling member 23 along the suction pipe-shaped nozzle traveling rail 26. The way of moving in the direction crossing the direction is provided with a straw-shaped nozzle 25 with a straw-shaped discharge port 25a at the front end opposite to the object to be coated 10, and a nozzle lifting mechanism (not shown) is provided to make the aforementioned coating The use nozzle 24 and the straw-shaped nozzle 25 can approach/leave respectively with respect to the object to be coated 10 installed on the platform 21 , and can move in the up and down direction with respect to the aforementioned traveling member 23 .

Next, the following situation will be described: using the coating device 20 of this embodiment, the coating liquid x is applied to the upper surface 12a of the upper section 12 of the object to be coated 10 placed on the platform 21 as described above, and the upper section 12 The step difference between the upper surface 12a and the upper surface 11a of the lower section 11 The upper section 12 is formed from the end surface 12b of the upper section 12 along the edge of the upper section 12 to the upper surface 11a of the lower section 11 .

Here, in the coating device 20 of this embodiment, it is set as follows: first, as shown in FIG. 12 and the lower section 11 above the position of the level difference, and the aforementioned straw-shaped nozzle 25 is moved downward so that the straw-shaped discharge port 25a in the straw-shaped nozzle 25 is close to the level difference between the upper section 12 and the lower section 11. In this state, the coating liquid x is discharged from the straw-shaped discharge port 25a, and the coating liquid x is supplied to the upper surface of the lower portion 11 from the end surface 12b of the upper portion 12 in the edge portion of the upper surface 12a of the upper portion 12. 11a.

Furthermore, it is also assumed that the coating liquid x is discharged from the straw-shaped discharge port 25a of the straw-shaped nozzle 25 in this way, and the coating liquid x is discharged from the end surface of the upper stage portion 12 in the edge portion of the upper surface 12a of the upper stage portion 12. 12b is supplied to the upper surface 11a of the lower section 11, while as shown in FIG. In such a way that one end of the upper section 12 is guided to the other end, the coating liquid x is drawn from the upper surface 11a of the lower section 11 from the end surface 12b of the upper section 12 of the object 10 to be coated. 12 from one end of the coating to the other end, in addition, as mentioned above, the coating liquid x is discharged from the straw-shaped discharge port 25a of the straw-shaped nozzle 25, and the coating liquid x is sprayed from the upper surface of the upper section 12 In the edge portion of 12a, the end surface 12b of the upper section 12 is supplied to the upper surface 11a of the lower section 11, and at the same time, the aforementioned suction pipe-shaped nozzle 25 is moved from one end side to the other end side in a direction perpendicular to the traveling direction of the traveling member 23. , and in the direction perpendicular to the direction of travel of the traveling member 23, the coating liquid x is applied from the end surface 12b of the upper section 12 of the object to be coated 10 to the upper surface 11a of the lower section 11, and such operations are performed in combination, And above the upper section 12 The coating liquid x is applied from the end surface 12 b of the upper stage part 12 to the upper surface 11 a of the lower stage part 11 in the entire stepped part in the edge part of the surface 12 a.

In addition, after the coating liquid x is applied from the end surface 12b of the upper section 12 to the upper surface 11a of the lower section 11 in the entire step portion in the edge part of the upper surface 12a of the upper section 12 as described above, it is stopped. The straw-shaped discharge port 25a in the straw-shaped nozzle 25 discharges the coating liquid x, and the straw-shaped nozzle 25 is moved upward to the top of the object 10 to be coated. The nozzle 25 is the slit-shaped discharge port at the front end of the coating nozzle 24 extending in a direction intersecting the traveling direction of the traveling member 23 by moving the coating nozzle 24 on the side opposite to the traveling direction. 24a is placed at a position facing the upper surface 12a of the upper section 12 of the object to be coated 10 with a predetermined coating interval therebetween.

Next, it is also assumed that the coating nozzle is installed so that the slit-shaped discharge port 24a of the coating nozzle 24 and the upper surface 12a of the upper section 12 of the object to be coated 10 face each other with a predetermined interval therebetween. 24, as shown in FIG. 7, the coating solution x is supplied to the upper surface 12a of the upper section 12 in the object to be coated 10 from the slit-shaped discharge port 24a in the coating nozzle 24, and to the upper surface 12a of the upper section 12 in the object to be coated 10, and to the upper surface 12a of the upper section 12 that has been drawn by the suction pipe. The overcoating liquid x is supplied from the upper surface 11a of the lower section 11 to the end surface 12b of the upper section 12 from the nozzle 25 of the shape.

Furthermore, it is also assumed that the coating liquid x is supplied to the upper surface 12a of the upper section 12 in the object to be coated 10 from the slit-shaped discharge port 24a in the coating nozzle 24 in this way, and the coating liquid x has been fed by the straw-shaped nozzle. 25. The way of supplying the part of the overcoating liquid x from the upper surface 11a of the lower section 11 to the end surface 12b of the upper section 12 is to make the aforementioned traveling member 23 advance from one end side to the other end side of the advancing direction, and as shown in FIG. 8 As shown, the coating solution x is applied to the upper part of the object to be coated 10 The upper surface 12a of 12 and the entire portion from the upper surface 11a of the lower section 11 to the end surface 12b of the upper section 12 to which the overcoating liquid x has been supplied from the straw-shaped nozzle 25.

In this way, it can be carried out simply and in a short time as described above: Appropriately apply the coating liquid x to the plate-shaped upper stage portion formed on the lower stage portion 11 formed in a plate shape smaller than the lower stage portion 11. 12 and the upper surface 12a of the upper section 12 in the coated body 10 formed, and from the end surface 12b of the upper section 12 in the step difference between the upper section 12 and the lower section 11 to the upper surface 11a of the lower section 11; and can Simply and properly performed: not only forming a coating film on the upper surface 12a of the upper section 12 in the object to be coated 10, but also forming a coating film from the end surface 12b of the upper section 12 to the lower section in the step portion from the edge of the upper section 12 The part of the upper surface 11a of 11 is also protected by forming a coating film.

In addition, in the coating device 20 of this embodiment, although the coating liquid x is discharged from the suction pipe-shaped discharge port 25a of the aforementioned suction pipe-shaped nozzle 25, and the coating liquid x is discharged from the step portion of the edge of the upper section 12 From the end surface 12b of the middle upper section 12 to the upper surface 11a of the lower section 11, as shown in FIG. Instead of the coating solution x, the solvent xa is supplied from the end face 12b of the upper portion 12 to the upper surface 11a of the lower portion 11 from the step portion of the edge of the upper portion 12, and then, as shown in FIG. 9(B) As shown, from the slit-shaped discharge port 24a in the coating nozzle 24, the coating liquid x is supplied to the upper surface 12a of the upper stage part 12 of the object 10 and the lower stage where the solvent xa has been supplied from the straw-shaped nozzle 25. The portion from the upper surface 11 a of the portion 11 to the end surface 12 b of the upper portion 12 . In addition, when constituted in this way, the coating liquid x supplied from the slit-shaped discharge port 24a in the coating nozzle 24 is applied to the portion from the upper surface 11a of the lower section 11 to the end surface 12b of the upper section 12. , dissolved in the upper surface 11a of the lower section 11 and supplied to the upper section 12 The portion from the upper surface 11a of the lower section 11 to the end surface 12b of the upper section 12 is simply formed and protected by a coating film containing the coating solution x.

10: Coated body

11: lower section

11a: upper surface

12: Upper part

12a: upper surface

12b: end face

20: Coating device

21: Platform

22: Traveling rails

23: Marching components

24: Nozzle for coating

24a: slit-shaped outlet

25: Straw nozzle

25a: straw-shaped outlet

26: Straw-shaped nozzle travel rail

Claims (2)

A coating device in which a coating nozzle is provided on a traveling member that travels back and forth on an object to be coated in a predetermined direction, and the coating nozzle has a slit-shaped discharge port extending in a direction intersecting the traveling direction at the front end thereof, The slit-shaped discharge port in the coating nozzle is guided to a position facing the object to be coated by the traveling member, and the coating nozzle is moved on the object to be coated by the traveling member, and the coating liquid flows from The slit-shaped discharge port is discharged to the object to be coated, so that the coating liquid is applied to the object to be coated; wherein, the aforementioned traveling member is provided with a straw-shaped nozzle in a manner that can move in a direction intersecting with the traveling direction of the traveling member, The straw-shaped nozzle has a straw-shaped discharge port at the front end, and the coating nozzle and the straw-shaped nozzle are provided in a manner that can move up and down. And when starting from the end surface of the upper section in the step difference between the upper section and the lower section to the upper surface of the lower section, the movement of moving the traveling member over the object to be coated, and the movement of the suction pipe-shaped nozzle toward the traveling member The action of moving in the direction intersecting the traveling direction of the above-mentioned coating liquid is combined, so that the aforementioned straw-shaped nozzle moves along the step difference between the upper section and the lower section of the aforementioned object to be coated, and the aforementioned coating liquid and/or the part to be used in the coating liquid The solvent is supplied from the straw-shaped outlet of the straw-shaped nozzle to the upper surface of the lower section along the end surface of the upper section of the step-difference section, and the moving member is advanced, and is discharged from the slit-shaped outlet of the coating nozzle. , coating the coating solution on the upper surface of the upper section of the object to be coated and the coating solution that has been supplied to the aforementioned step difference portion and/or on the solvent to be used in the coating solution; wherein the aforementioned coated system is formed The plate-shaped upper section formed smaller than the lower section is provided on the plate-shaped lower section. A coating method that uses a coating device to apply a coating solution to the upper surface of an upper section of an object to be coated, and from the end surface of the upper section to the upper surface of the lower section in a step difference between the upper section and the lower section, wherein The above-mentioned coated system is provided on the above-mentioned lower section formed into a plate shape. If the above-mentioned upper section is formed in a plate shape smaller than the lower section, the coating device is provided with a coating nozzle on a traveling member that travels back and forth on the object to be coated in a predetermined direction, and the aforementioned traveling member can be directed toward A straw-shaped nozzle is provided to move in a direction intersecting with the traveling direction of the traveling member. It has a straw-shaped discharge port; in this coating method, the action of moving the aforementioned traveling member over the aforementioned object to be coated is combined with the action of moving the aforementioned straw-shaped nozzle in a direction intersecting the advancing direction of the advancing member, and The aforementioned straw-shaped nozzle is moved along the level difference between the upper section and the lower section of the aforementioned object to be coated, and the aforementioned coating liquid and/or the solvent to be used in the coating liquid are moved along the suction pipe-shaped discharge port of the straw-shaped nozzle. After the end surface of the upper section of the above-mentioned level difference is supplied to the upper surface of the lower section, the aforementioned traveling member is advanced, and the coating liquid is collectively applied to the object to be coated from the slit-shaped discharge port of the aforementioned coating nozzle. The upper surface of the upper section is on top of the coating liquid that has been supplied to the aforementioned level difference section and/or the solvent to be used for the coating liquid.

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