TWI787319B - Processing device - Google Patents

Abstract

[Problem] Touch the drive stop button on the touch panel easily without pressing the wrong button. [Solution] The cutting device of the present invention is a cutting device (1) in which the drive of the unit is controlled by the control means according to the operation of the touch panel (75). The stopped driving stop button (81) is fully displayed on the configuration of the touch panel. With this configuration, there is no case of pressing the driving stop button by mistake, and the driving stop button on the touch panel can be easily touched.

Description

Processing device

The present invention relates to a machining device for machining workpieces.

Conventionally, various processing apparatuses such as cutting apparatuses, grinding apparatuses, lapping apparatuses, and laser processing apparatuses are known as processing apparatuses for processing semiconductor wafers. These processing devices are generally equipped with a touch panel type display monitor that accepts input of operation commands such as processing conditions, and the display monitor doubles as an input device and a display device. The display monitor of the processing device displays a drive stop button. As a safety measure, when the operator manually operates each part of the device during maintenance, the drive stop button is touched to make each part of the device emergency stop (see for example the patent document 1). [Prior Art Document] [Patent Document]

[Patent Document 1] Japanese Patent Laid-Open No. 2014-113669

(Problem to be solved by the invention)

However, if a drive stop button is displayed on a part of the touch panel, during maintenance or installation, etc., while the operator is monitoring the operation of the device, the operator's line of sight is in the device and cannot see the touch panel. Therefore, when an emergency stop is desired, there is a problem of pressing a wrong button on the touch panel or pressing a drive stop button which takes time. If it is an EMO (Emergency Off) switch installed on the frame of the processing device, it can reduce mis-pressing, etc., but all functions of the processing device will stop, so it must be restarted or initialized, and it will take time to restore.

The present invention has been made in view of this situation, and one of the objects is to provide a processing device that can easily touch a drive stop button on a touch panel without making a mistake in pressing it. (means to solve the problem)

A processing device according to an aspect of the present invention is provided with: a driveable unit; a touch panel displaying an operation screen of the unit; and a control means for controlling the drive of the unit according to the operation of the touch panel. The device is characterized in that a driving stop button for stopping the driving of the unit at a predetermined timing after starting the driving of the unit is fully displayed on the touch panel.

With this configuration, since the drive stop button is displayed on the entire touch panel, even if any position on the touch panel is touched, the drive of the unit can be stopped. Therefore, even in the state where the operator cannot see the touch panel, there is no situation of pressing the driving stop button by mistake, and the unit can be correctly stopped in an emergency. (Effect of Invention)

With the present invention, since the drive stop button is displayed on the entire touch panel, there is no situation of pressing the drive stop button by mistake, and the drive stop button on the touch panel can be easily touched.

The cutting device of this embodiment will be described below with reference to the attached drawings. Fig. 1 is an external perspective view of a cutting device according to this embodiment. Fig. 2 is a perspective view of the inside of the cutting device of the present embodiment. FIG. 3 is a diagram showing a display example of an operation screen of a comparative example. In addition, in this embodiment, although the cutting apparatus was demonstrated as an example and demonstrated as a processing apparatus, if a processing apparatus is equipped with a touch panel, it will not specifically limit.

The cutting device 1 is provided with a touch panel 75 that accepts an operator's operation, and various processing conditions are set on the touch panel 75 . The cutting device 1 is configured to move the cutting blade 71 (see FIG. 2 ) relative to the workpiece W held on the chuck table 14 according to the setting conditions set on the touch panel 75, and move the workpiece W on the chuck table 14 along the Divide the planned line for cutting. The surface of the workpiece W is divided into a plurality of regions by grid-shaped dividing lines, and various elements are formed in each divided region.

A dicing tape T is attached to the back of the workpiece W, and an annular frame F is attached to the outer periphery of the dicing tape T. As shown in FIG. The workpiece W is carried into the cutting device 1 while being supported by the ring frame F through the dicing tape T. As shown in FIG. Here, the workpiece W may be any object to be processed, and may be, for example, a semiconductor wafer or an optical element wafer on which elements have been formed. In addition, the dicing tape T may be a DAF (Die Attach Film) tape in which DAF is attached to the tape base, in addition to a general adhesive tape in which an adhesive layer is coated on the tape base.

The cutting device 1 includes a cuboid frame 10 covering a machining space for cutting, and a support table 13 adjacent to the frame 10 to form a waiting space or a cleaning space. An opening is formed in the center of the upper surface of the supporting platform 13 to extend toward the inside of the frame body 10 , and the opening is covered by a moving plate 15 that can move together with the suction cup platform 14 and a bellows-shaped waterproof cover 16 . Below the waterproof cover 16 is provided an X-axis moving mechanism 50 (see FIG. 2 ) for moving the suction cup table 14 in the X-axis direction. In FIG. 1 , the chuck table 14 is moved to the outside of the housing 10 and is on standby on the support table 13 .

The chuck platform 14 is formed with a holding surface 17 by porous ceramic material, and the workpiece W is sucked and held by negative pressure generated on the holding surface 17 . Four air-driven clamps 18 are provided around the chuck table 14 , and the annular frame F around the workpiece W is clamped and fixed from four sides by each clamp 18 . A pair of centering guides 21 extending in the Y-axis direction are arranged above the suction cup platform 14 . By the separation and approach of the pair of centering guides 21 in the X-axis direction, the workpiece W is positioned in the X-axis direction relative to the chuck table 14 .

Adjacent to the suction cup platform 14 on the support table 13 is an elevator unit 22 for loading the cassettes. In the elevator unit 22 , the stage 23 on which the cassette is placed is raised and lowered, and the loading and unloading position of the workpiece W in the cassette is adjusted in the height direction. On the side surface 11 of the frame body 10 is provided a push-pull arm 24 for taking out and placing the workpiece W in the magazine while guiding the ring frame F to the pair of centering guides 21 . In addition, a carry-in arm 31 and a carry-out arm 41 for transporting the workpiece W between the pair of centering guides 21 and the chuck table 14 are provided on the side surface 11 of the housing 10 .

The push-pull arm 24 is driven by a horizontal movement mechanism 25 disposed on the side surface 11 of the frame body 10 . The horizontal movement mechanism 25 includes: a pair of guide rails 26 parallel to the Y-axis direction arranged on the side surface 11 of the housing 10 ; and a motor-driven slider 27 slidably provided on the pair of guide rails 26 . A nut portion (not shown) is formed on the back side of the slider 27 , and the ball screw 28 is screwed to the nut portion. The drive motor 29 connected to one end of the ball screw 28 is rotationally driven, whereby the push-pull arm 24 performs a push-pull motion in the Y-axis direction along the pair of guide rails 26 .

The carry-in arm 31 and the carry-out arm 41 are driven by the horizontal movement mechanisms 32 and 42 arranged on the side surface 11 of the housing 10 . The horizontal movement mechanism 32, 42 has: a pair of guide rails 33, 43 arranged on the side 11 of the frame body 10 parallel to the Y-axis direction; The sliders 34,44. A nut portion (not shown) is formed on the back side of the slider 34 , 44 , and the ball screw 35 , 45 is screwed to the nut portion. The drive motors 36 , 46 connected to one ends of the ball screws 35 , 45 are rotationally driven, whereby the carry-in arm 31 and the carry-out arm 41 are conveyed in the Y-axis direction along the pair of guide rails 33 , 43 .

As shown in FIG. 2 , an X-axis moving mechanism 50 for moving the chuck table 14 in the X-axis direction is provided on the base 19 inside the frame body 10 and the support table 13 (see FIG. 1 ). The X-axis moving mechanism 50 includes: a pair of guide rails 51 parallel to the X-axis direction arranged on the base 19 , and a motor-driven X-axis stage 52 provided to slide on the pair of guide rails 51 . A nut portion (not shown) is formed on the back side of the X-axis table 52 , and the ball screw 53 is screwed to the nut portion. The drive motor 54 connected to one end of the ball screw 53 is rotationally driven, whereby the chuck table 14 moves in the X-axis direction along the pair of guide rails 51 .

A door-shaped vertical wall portion 20 is provided on the base 19 so as to straddle the moving path of the chuck table 14 . The vertical wall portion 20 is provided with: a Y-axis moving mechanism 60 for moving the cutting means 70 in the Y-axis direction; and a Z-axis moving mechanism 65 for moving the cutting means 70 in the Z-axis direction. The Y-axis moving mechanism 60 has: a pair of guide rails 61 parallel to the Y-axis direction arranged in front of the vertical wall portion 20 ; and a Y-axis platform 62 that can slide on the pair of guide rails 61 . The Z-axis moving mechanism 65 has: a pair of guide rails 66 arranged on the Y-axis platform 62 parallel to the Z-axis direction; and a Z-axis platform 67 slidable on the pair of guide rails 66 .

A cutting means 70 for cutting the workpiece W is provided below each Z-axis stage 67 . Nut portions are respectively formed on the back sides of the Y-axis stage 62 and the Z-axis stage 67 , and ball screws 63 , 68 are screwed to these nut portions. Drive motors 64 and 69 are respectively connected to one ends of the ball screw 63 for the Y-axis stage 62 and the ball screw 68 for the Z-axis stage 67 . By driving the motors 64 , 69 , the respective ball screws 63 , 68 are rotationally driven, whereby each cutting means 70 moves along the guide rail 61 in the Y-axis direction, and each cutting means 70 moves along the guide rail 66 in the Z-axis direction.

A cutting blade 71 for cutting the workpiece W held on the chuck table 14 is rotatably mounted on the spindle system of each cutting means 70 . Each cutting blade 71 is formed into a disc shape by fixing, for example, diamond abrasive grains with a bonding agent. In addition, a microscope (not shown) for alignment is provided on the spindle housing of the cutting means 70 . Returning to FIG. 1 , a touch panel 75 is provided on the front surface 12 of the housing 10 . In addition to the setting screen of various processing conditions, the touch panel 75 displays the operation screen of each unit, such as the chuck table 14 and the cutting means 70, etc. FIG. In addition, as will be described in detail later, a drive stop button 81 (see FIG. 6 ) for stopping each unit at the time of maintenance or installation is displayed on the touch panel 75 .

However, as shown in the comparative example of FIG. 3 , on a general operation screen, in order to manually stop units such as cutting means during maintenance or installation, a drive stop button 91 is displayed in a small size at the corner of the screen. At the time of maintenance or installation, since the operator has to watch the drive of the unit, it is impossible to check the drive of the unit while looking at the operation screen of the touch panel. Therefore, when the unit is to be stopped in an emergency, it is necessary to turn the line of sight back from the unit to the operation screen and touch the driving stop button 91 , but it is difficult to touch the driving stop button 91 instantaneously.

The drive stop button 91 is small and displayed at the corner of the screen, so it is difficult to find the drive stop button 91 on the operation screen, and there is a risk of pressing the drive stop button 91 as another button by mistake. In this regard, if it is the EMO switch 74 (refer to FIG. 1 ), it is protruded from the frame body 10 and is formed in a sufficient size with a clear color, so the operator can press the EMO switch 74 instantaneously in case of emergency. Since there is no similar switch around the EMO switch 74, the unit can be reliably stopped without pressing it by mistake, but it takes time to restart because all functions of the device are stopped.

Therefore, in the present embodiment, the driving stop button 81 (see FIG. 6 ) is displayed on the entire touch panel 75 (see FIG. 1 ), so that even when the unit is driven during maintenance or installation, it is possible to The momentary touch drives the stop button 81 . No other functions are disabled like the EMO switch 74 (see FIG. 1 ), but only the required units are disabled. In addition, since the drive stop button 81 is displayed on the entire surface of the touch panel 75, there is no chance of pressing other buttons by mistake. As shown above, by driving the stop button 81, it is easy to stop the unit, and it is possible to surely prevent erroneous actions caused by pressing other buttons.

The operation control of the unit will be described below with reference to FIG. 4 and FIG. 5 . Fig. 4 is a schematic cross-sectional view of the touch panel of the present embodiment. Fig. 5 is a block diagram showing the operation control of the unit of this embodiment. Among them, the units of this embodiment represent, for example, a suction cup platform, a cutting means, a push-pull arm, a carrying-in arm, a carrying-out arm, and a microscope. In addition, the driving shaft system of the present embodiment represents, for example: X-axis moving mechanism, Y-axis moving mechanism, Z-axis moving mechanism, horizontal moving mechanism of each arm, rotation axis of the suction cup platform, rotation axis of the mandrel, microscope vertical movement axis .

As shown in FIG. 4 , the touch panel 75 is a so-called capacitive touch panel, and is configured by laminating a glass substrate 77 , a transparent electrode film 78 , and a protective film 79 on a liquid crystal panel 76 . An operation screen is displayed on the liquid crystal panel 76, and various information can be input on the operation screen by touching the panel with a fingertip. At this time, electrodes (not shown) are provided on the four corners of the glass substrate 77, and a voltage is applied to each electrode to generate a uniform electric field on the entire touch panel, and the static electricity generated when the screen of the touch panel 75 is touched by a fingertip Changes in capacitance to detect the coordinates of the fingertip.

As shown in FIG. 5 , the touch panel 75 displays an operation screen S1 for accepting various operations on each unit 88 during manual operation. When the unit 88 is driven on the operation screen S1, the operation screen S1 is switched to a stop screen S2 in which the driving stop button 81 (see FIG. 6 ) is fully displayed. The touch panel 75 is connected with a control means 85 for controlling the drive of the unit 88 according to the panel operation. The control means 85 is provided with: a drive control unit 86 that drives the drive shaft 89 according to the drive keys displayed on the touch panel 75; The display control unit 87.

The drive control unit 86 controls the drive and stop of the drive shaft 89 of each unit 88 in accordance with the operation of the touch panel 75 . For example, if the driving button is pressed while the touch panel 75 is displaying the operation screen S1 , the unit 88 is driven by the driving control unit 86 through the driving shaft 89 . In addition, if the drive stop button 81 is pressed in the state where the stop screen S2 is displayed on the touch panel 75 , the unit 88 is stopped by the drive control unit 86 through the drive shaft 89 . The display control unit 87 displays the operation screen S1 on the touch panel 75 during manual operation, and switches to the stop screen S2 at a predetermined timing after the unit 88 starts driving to display the drive stop button 81 on the entire panel.

When the drive stop button 81 is displayed on the entire touch panel 75 , the entire screen of the touch panel 75 functions as a sensing area. Therefore, regardless of the touch position of the touch panel 75, the drive of the unit 88 is stopped. Wherein, the driving stop button 81 can be automatically displayed after the unit 88 starts driving, and can also be displayed manually by pressing a switching button or the like after the unit 88 starts driving. Therefore, the predetermined timing refers to the timing after the drive of the unit 88 is started, and includes the timing of manually displaying the drive stop button 81 in addition to the timing of the start of the drive of the unit 88 .

As described above, since the drive stop button 81 of the touch panel 75 is fully displayed, the unit 88 being driven can be easily stopped in an emergency. Among them, each part of the control means 85 is constituted by a processor, a memory, etc. that execute various processes. The memory system is composed of one or more memory media such as ROM (Read Only Memory) and RAM (Random Access Memory) depending on the application. In the memory system, for example, a drive control program or a display control program for each part of the device is stored. In addition, the control means 85 may be used exclusively for the touch panel 75 separately from the overall control of the cutting device 1 .

Referring to FIG. 6 , the stop screen displaying the drive stop button will be described. Fig. 6 is a diagram showing a display example of a stop screen in this embodiment. In addition, in FIG. 6, the code|symbol of FIG. 5 is used suitably for description.

As shown in FIG. 6A, during maintenance or installation, the drive stop button 81 is displayed on the entire stop screen S2 of the touch panel 75, and the end of returning to the operation screen S1 from the stop screen S2 is displayed on a corner of the drive stop button 81. Button 82. Therefore, in this embodiment, strictly speaking, not the entire screen of the touch panel 75 becomes the drive stop button 81 , but the remaining area except the display area of the end button 82 becomes the drive stop button 81 . That is, the display of the drive stop button 81 on the entire touch panel 75 is not necessarily limited to a configuration in which the drive stop button 81 is displayed on the entire screen, and includes a configuration in which the drive stop button 81 is displayed on substantially the entire screen.

In addition, the end button 82 is displayed on the corner of the drive stop button 81 so that the operator will not accidentally touch it. Therefore, even in a state where the operator's line of sight is away from the touch panel 75 , the end button 82 is prevented from being accidentally touched. In addition, only two types of buttons, namely, the drive stop button 81 and the end button 82 , are displayed on the stop screen, so the position of the end button 82 can be easily identified by visually viewing the touch panel 75 . As shown above, when the line of sight is away from the touch panel 75 , it is easy to touch and drive the stop button 81 , and it is easy to touch the end button 82 when looking at the touch panel 75 .

In addition, as shown in FIG. 6B , only the drive stop button 81 may be displayed on the touch panel 75 at the time of maintenance or installation. In addition, the driving stop button 81 not only stops the driving of the unit 88, but also returns the unit 88 to the original point after the driving of the unit 88 stops. For example, if the touch drive stop button 81 is touched during the contact installation of the cutting blade 71 (refer to FIG. 1 ), not only the descending action of the cutting blade 71 is stopped, but also the cutting blade 71 returns to the original position and is controlled by the contact with the suction cup platform 14. location separation.

Referring to FIG. 7 , a method of stopping the unit using the touch panel will be described. Fig. 7 is a diagram showing an example of the method of stopping the unit of this embodiment.

As shown in FIG. 7A , if the unit 88 (refer to FIG. 2 ) is driven for maintenance, etc., the touch panel 75 of the cutting device 1 switches from the operation screen to the stop screen, and the driving stop button 81 is displayed on the entire touch panel 75. . The operator has to monitor the action of the unit 88 of the cutting device 1 , so as indicated by the arrow, the operator's line of sight is toward the inside of the cutting device 1 , not the touch panel 75 outside the device. At this time, since the entire touch panel 75 functions as the drive stop button 81 , the operator can respond in case of emergency only by recognizing the installation position of the touch panel 75 .

As shown in FIG. 7B , if a problem occurs in the driving of the unit 88 , the screen of the touch panel 75 is touched by the operator. Since the drive stop button 81 is displayed on the entire surface of the touch panel 75 , the unit 88 is stopped by touching a part of the screen of the touch panel 75 . As shown by the arrow, even if the operator's sight is away from the screen of the touch panel 75, as long as he knows the installation position of the touch panel 75, he can touch and drive the stop button 81, and there will be no situation of pressing the wrong button. Therefore, the unit 88 can be stopped by touching and driving the stop button 81 instantaneously and correctly.

As mentioned above, with the cutting device 1 of this embodiment, since the drive stop button 81 is displayed on the entire surface of the touch panel 75, the drive of the unit 88 can be stopped by touching any position of the touch panel 75. Therefore, even in the state where the operator cannot see the touch panel 75, the unit 88 can be correctly stopped in an emergency without pressing the driving stop button 81 by mistake.

In addition, in this embodiment, although the touch panel of the capacitance type (surface type capacitance type) was illustrated, it is not limited to this structure. As long as the touch panel can display the operation screen of the unit, any touch panel of a resistive film type, a projected electrostatic type, an ultrasonic surface elastic wave type, an optical type, or an electromagnetic induction type can also be used.

In addition, in this embodiment, although the cutting apparatus which cuts a workpiece|work was illustrated and demonstrated as a processing apparatus, it is not limited to this structure. The present invention is applicable to other processing devices equipped with touch panels. For example, if it is a processing device equipped with a touch panel, it can also be applied to cutting devices, grinding devices, grinding devices, laser processing devices, plasma etching devices, edge trimming devices, expansion devices, brake devices, and the Combined cluster devices and other processing devices.

Therefore, in this embodiment, a suction table, a cutting means, a push-pull arm, a carrying-in arm, a carrying-out arm, and a microscope are exemplified as units, but the structure is not limited thereto. As long as the unit can be driven, it can also be used for various processing methods such as grinding equipment, grinding equipment, laser processing equipment, plasma etching equipment, edge trimming equipment, expansion equipment, braking equipment, and clustering equipment. , platform, transport means, microscope and other units.

In addition, in this embodiment, the X-axis moving mechanism, the Y-axis moving mechanism, the Z-axis moving mechanism, the horizontal moving mechanism of each arm, the rotation axis of the chuck stage, the rotation axis of the spindle, and the vertical drive axis of the microscope are exemplified as The drive shaft is not limited to this configuration. As long as the drive shaft is configured to drive it, it can also be used in grinding devices, grinding devices, laser processing devices, plasma etching devices, edge trimming devices, expansion devices, brake devices, and cluster devices. Axis direction, Y-axis direction, Z-axis direction, θ-axis direction drive the drive shaft.

In addition, in terms of processing objects, according to the type of processing, for example: semiconductor element wafers, optical element wafers, package substrates, semiconductor substrates, inorganic material substrates, oxide wafers, raw ceramic substrates, piezoelectric Various workpieces such as substrates. In terms of semiconductor device wafers, silicon wafers or compound semiconductor wafers after device formation can also be used. In terms of optical element wafers, sapphire wafers or silicon carbide wafers after element formation can also be used. In addition, in terms of package substrates, CSP (Chip Size Package) substrates can also be used, in terms of semiconductor substrates, silicon or gallium arsenide can also be used, and in terms of inorganic material substrates, sapphire, ceramics, glass etc. In addition, as an oxide wafer, lithium tantalate and lithium niobate after element formation or before element formation can also be used.

In addition, although the embodiment of the present invention was described above, a combination of all or part of the above-described embodiment and modified examples may be used as another embodiment of the present invention.

In addition, the embodiments of the present invention are not limited to the above-mentioned embodiments and modified examples, and various changes, substitutions, and modifications can be made without departing from the technical idea of the present invention. Furthermore, if the technical idea of the present invention can be realized in other ways through technological progress or other derived technologies, this method can also be used for implementation. Therefore, the scope of the patent application covers all the implementation forms that may be included in the scope of the technical thought of the present invention.

In addition, in this embodiment, although the structure which applied this invention to the cutting apparatus was demonstrated, it can also be applied to other apparatus which drives it with a touch panel. [industrial availability]

As described above, the present invention has the effect of being able to easily touch the driving stop button on the touch panel, and is useful as a cutting device for cutting workpieces.

1‧‧‧cutting device (processing device) 10‧‧‧frame body 11‧‧‧side 12‧‧‧front 13‧‧‧support table 14‧‧‧suction cup platform (unit) 15‧‧‧moving plate 16‧‧ ‧Waterproof cover 17‧‧‧Retaining surface 18‧‧‧Clamp 19‧‧‧Abutment 21‧‧‧Centering guide 22‧‧‧Elevator unit 23‧‧‧Stand 24‧‧‧Push-pull arm (unit) 25‧‧‧horizontal moving mechanism 26‧‧‧guide rail 27‧‧‧slider 28‧‧‧ball screw 31‧‧‧loading arm (unit) 32, 42‧‧‧horizontal moving mechanism 33, 43‧‧‧guide rail 34 . Axis platform 53‧‧‧ball screw 54‧‧‧drive motor 60‧‧‧Y-axis moving mechanism 61‧‧‧guide rail 62‧‧‧Y-axis platform 63, 68‧‧‧ball screw 64,69‧‧‧drive motor 65‧‧‧Z-axis moving mechanism 66‧‧‧guide rail 67‧‧‧Z-axis platform 70‧‧‧cutting means (unit)71‧‧‧cutter 74‧‧‧EMO switch 75‧‧‧touch panel76‧ ‧‧LCD Panel 77‧‧‧Glass Substrate 78‧‧‧Transparent Electrode Film 79‧‧‧Protective Film 81‧‧‧Drive Stop Button 82‧‧‧End Button 85‧‧‧Control Means 86‧‧‧Drive Control Unit 87 ‧‧‧Display control unit 88‧‧‧Unit 89‧‧‧Drive shaft 91‧‧‧Drive stop button F‧‧‧ring frame S1‧‧‧operation screen S2‧‧‧stop screen T‧‧‧cutting belt W ‧‧‧Workpiece

Fig. 1 is an external perspective view of a cutting device according to this embodiment. Fig. 2 is a perspective view of the inside of the cutting device of this embodiment. Fig. 3 is a diagram showing a display example of an axis operation screen in a comparative example. Fig. 4 is a schematic cross-sectional view of the touch panel of this embodiment. Fig. 5 is a block diagram showing the operation control of the unit of this embodiment. Fig. 6 is a diagram showing a display example of a stop screen in this embodiment. Fig. 7 is a diagram showing an example of the method of stopping the unit of this embodiment.

1‧‧‧Cutting device (processing device)

75‧‧‧Touch panel

81‧‧‧Drive stop button

Claims (2)

A processing device, which is equipped with: a driveable unit; a touch panel displaying the operation screen of the unit; and a control means for controlling the drive of the unit according to the operation of the touch panel, the processing device is characterized by : the control means has: a drive control unit, which controls the drive and stop of the unit according to the operation of the touch panel; and a display control unit, which controls the display screen of the touch panel, and the drive control unit is If the driving button displayed on the operation screen of the touch panel is pressed, the unit is driven, and the display control part changes the display screen of the touch panel from the display screen of the touch panel at a predetermined timing when the unit starts to be driven. When the operation screen is switched to a stop screen, on the stop screen, a drive stop button that has formed the entire screen of the touch panel as a sensing area that can accept operations is displayed. If the drive control unit displays on the touch panel When the drive stop button on the stop screen is pressed, the drive of the unit is stopped. The processing device according to claim 1, wherein the display control unit switches the display screen of the touch panel from the operation screen to the stop screen at a timing after the unit starts driving.

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