TWI786856B - Distortion aberration correction processing device, distortion aberration correction method and program - Google Patents
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Abstract
[課題] 本發明提供一種畸變像差校正處理裝置,該畸變像差校正處理裝置即使在攝像裝置的光軸相對於測定對象物的表面傾斜之狀態下亦能夠高精度地進行畸變像差校正。 [解決手段] 在記憶部中儲存有畸變像差校正資訊,該畸變像差校正資訊針對由從攝像裝置的圖像平面上的基準點以輻射狀延伸之複數個邊界線區分之複數個區隔區的每個區隔區,表示校正圖像平面上之座標之座標校正率與距基準點的距離的關係。處理部依據校正對象處在圖像平面內之座標從複數個區隔區選擇至少1個區隔區,依據所選擇之區隔區的畸變像差校正資訊和校正對象部位距基準點的距離來決定座標校正率,並且依據所決定之座標校正率來對校正對象部位的座標進行校正。 [Problem] The present invention provides a distortion aberration correction processing device that can perform distortion aberration correction with high accuracy even when the optical axis of an imaging device is inclined with respect to the surface of an object to be measured. [Solution] The memory unit stores distortion aberration correction information for a plurality of segments separated by a plurality of boundary lines extending radially from a reference point on an image plane of the imaging device. Each division area of the area represents the relationship between the coordinate correction rate of the coordinates on the corrected image plane and the distance from the reference point. The processing unit selects at least one compartment area from the plurality of compartment areas according to the coordinates of the correction object in the image plane, and calculates the correction information based on the distortion and aberration correction information of the selected compartment area and the distance between the calibration target part and the reference point. The coordinate correction rate is determined, and the coordinates of the correction target part are corrected according to the determined coordinate correction rate.
Description
本發明有關一種畸變像差校正處理裝置、畸變像差校正方法及程式。 本申請案係主張基於2020年10月26日申請之日本專利申請第2020-178944號的優先權。該日本申請案的全部內容係藉由參閱而援用於本說明書中。 The invention relates to a distortion aberration correction processing device, a distortion aberration correction method and a program. This application claims priority based on Japanese Patent Application No. 2020-178944 filed on October 26, 2020. The entire content of this Japanese application is incorporated by reference in this specification.
在使油墨從噴墨頭彈著於對象物上來進行描繪之噴墨裝置、使雷射光束入射到對象物上來進行鑽孔加工之雷射加工裝置、使雷射光束入射到作為對象物之半導體基板上來進行退火之雷射退火裝置等中,檢測設置於對象物上之對準標記來進行對象物的定位。此時,藉由對拍攝有對準標記之圖像進行圖像處理來檢測對準標記的位置。Inkjet devices that draw ink by bouncing ink from an inkjet head onto an object, laser processing devices that impinge a laser beam on an object to perform drilling, and inject a laser beam on a semiconductor as an object In a laser annealing device that performs annealing on a substrate, etc., the alignment mark provided on the object is detected to position the object. At this time, the position of the alignment mark is detected by performing image processing on an image captured with the alignment mark.
為了高精度地檢測對準標記的位置,校正透鏡的畸變像差為較佳(例如,下述專利文獻1)。在專利文獻1中所揭示之畸變像差校正方法中,設定五維的多項校正式作為將從圖像平面的原點至畸變後的圖像的距離(像高)調整為畸變前的距離之函數。使用該多項校正式,將畸變後的距離校正為畸變前的距離。 [先前技術文獻] In order to detect the position of the alignment mark with high precision, it is preferable to correct the distortion of the lens (for example, the following patent document 1). In the distortion correction method disclosed in Patent Document 1, a five-dimensional polynomial correction formula is set as the distance between the origin of the image plane and the distorted image (image height) adjusted to the distance before distortion. function. Using this polynomial correction formula, the distance after distortion is corrected to the distance before distortion. [Prior Art Literature]
[專利文獻1] 日本特開2001-133223號公報[Patent Document 1] Japanese Patent Laid-Open No. 2001-133223
[發明所欲解決之問題][Problem to be solved by the invention]
若攝像裝置的光軸相對於測定對象物的表面傾斜,則由於應校正畸變的量依據以圖像平面的原點為中心之圓周方向的位置而發生變化。然而,在專利文獻1中所揭示之校正方法中,由於僅藉由距圖像平面的原點的距離來進行畸變的校正,因此無法在攝像裝置的光軸傾斜之狀態下高精度地進行畸變像差的校正。If the optical axis of the imaging device is inclined with respect to the surface of the object to be measured, the amount of distortion to be corrected varies depending on the position in the circumferential direction centered on the origin of the image plane. However, in the correction method disclosed in Patent Document 1, since the distortion is corrected only by the distance from the origin of the image plane, the distortion cannot be performed with high precision when the optical axis of the imaging device is tilted. Aberration correction.
本發明的目的為提供一種即使在攝像裝置的光軸相對於測定對象物的表面傾斜之狀態下亦能夠高精度地進行畸變像差校正的畸變像差校正處理裝置、畸變像差校正方法及程式。 [解決問題之技術手段] An object of the present invention is to provide a distortion aberration correction processing device, a distortion aberration correction method, and a program that can perform distortion aberration correction with high precision even when the optical axis of the imaging device is inclined relative to the surface of the object to be measured. . [Technical means to solve the problem]
依據本發明的一觀點,提供一種畸變像差校正處理裝置,其係具備: 記憶部,儲存有畸變像差校正資訊,該畸變像差校正資訊係針對由從攝像裝置的圖像平面上的基準點以輻射狀延伸之複數個邊界線區分之複數個區隔區的每個區隔區,表示校正前述圖像平面上之座標之座標校正率與距前述基準點的距離的關係;及 處理部,依據校正對象部位在前述圖像平面內之座標從前述複數個區隔區選擇至少1個區隔區,依據針對所選擇之區隔區的前述畸變像差校正資訊和前述校正對象部位距前述基準點的距離來決定座標校正率,並且依據所決定之座標校正率來校正前述校正對象部位的座標。 According to an aspect of the present invention, a distortion and aberration correction processing device is provided, which has: a memory unit storing distortion aberration correction information for each of a plurality of partitions divided by a plurality of boundary lines extending radially from a reference point on an image plane of the imaging device a segment area, indicating the relationship between the coordinate correction rate for correcting the coordinates on the aforementioned image plane and the distance from the aforementioned reference point; and The processing unit selects at least one segmental area from the plurality of segmental areas according to the coordinates of the correction target part in the aforementioned image plane, and based on the aforementioned distortion aberration correction information for the selected segmental area and the aforementioned correction target part The coordinate correction rate is determined by the distance from the reference point, and the coordinates of the calibration target part are corrected according to the determined coordinate correction rate.
依據本發明的另一觀點,提供一種畸變像差校正方法,其中, 使用畸變像差校正資訊為已知之攝像裝置來拍攝測定對象物,該畸變像差校正資訊係針對由從攝像裝置的圖像平面內的基準點以輻射狀延伸之複數個邊界線區分之複數個區隔區的每個區隔區,表示校正圖像內的座標之座標校正率與距前述基準點的距離的關係, 決定進行前述圖像平面內的座標的校正之校正對象部位, 依據前述校正對象部位在前述圖像平面內的位置從前述複數個區隔區選擇至少1個區隔區, 依據針對所選擇之區隔區的前述畸變像差校正資訊和前述校正對象部位距前述基準點的距離來決定座標校正率, 依據所決定之座標校正率來校正前述校正對象部位的座標。 According to another aspect of the present invention, a distortion aberration correction method is provided, wherein, The object to be measured is photographed using an image pickup device having known distortion aberration correction information for a plurality of borderlines separated by a plurality of boundary lines extending radially from a reference point in an image plane of the image pickup device Each segment area of the segment area represents the relationship between the coordinate correction rate of the coordinates in the corrected image and the distance from the aforementioned reference point, Determine the correction target part for correction of the coordinates in the aforementioned image plane, selecting at least one compartmental area from the plurality of compartmental areas according to the position of the correction target part in the aforementioned image plane, The coordinate correction rate is determined according to the aforementioned distortion and aberration correction information for the selected partition area and the distance between the aforementioned correction target part and the aforementioned reference point, Correct the coordinates of the aforementioned calibration target parts according to the determined coordinate calibration rate.
依據本發明的又一觀點,提供一種程式,其係使電腦執行如下步驟: 獲取使用畸變像差校正資訊為已知之攝像裝置所拍攝之測定對象物的圖像之步驟,該畸變像差校正資訊係針對由從攝像裝置的圖像平面內的基準點以輻射狀延伸之複數個邊界線區分之複數個區隔區的每個區隔區,表示校正圖像內的座標之座標校正率與距前述基準點的距離的關係; 從使用前述攝像裝置所拍攝之圖像中決定進行校正之校正對象部位之步驟; 依據前述校正對象部位在前述圖像平面內的座標從前述複數個區隔區選擇至少1個區隔區之步驟; 依據針對所選擇之區隔區的前述畸變像差校正資訊和前述校正對象部位距前述基準點的距離來決定座標校正率之步驟;及 依據所決定之座標校正率來校正前述校正對象部位的座標之步驟。 [發明之效果] According to another viewpoint of the present invention, a program is provided, which causes the computer to perform the following steps: A step of acquiring an image of a measurement object captured by a known imaging device using distortion aberration correction information for complex numbers extending radially from a reference point in an image plane of the imaging device Each of the plurality of compartments divided by a boundary line represents the relationship between the coordinate correction rate of the coordinates in the corrected image and the distance from the aforementioned reference point; Steps of determining the correction target part to be corrected from the image captured by the above-mentioned camera device; A step of selecting at least one segmented area from the plurality of segmented areas according to the coordinates of the aforementioned calibration target part in the aforementioned image plane; The step of determining the coordinate correction rate according to the aforementioned distortion and aberration correction information for the selected compartment area and the distance between the aforementioned correction target part and the aforementioned reference point; and A step of correcting the coordinates of the aforementioned correction target part according to the determined coordinate correction rate. [Effect of Invention]
將圖像平面區分為複數個區隔區,並使用針對每個區隔區所設定之畸變像差校正資訊來進行畸變的校正,從而即使在攝像裝置的光軸相對於測定對象物的表面傾斜之狀態下亦能夠高精度地進行畸變像差校正。Divide the image plane into a plurality of compartments, and use the distortion aberration correction information set for each compartment to correct the distortion even if the optical axis of the imaging device is inclined relative to the surface of the measurement object Distortion aberrations can be corrected with high precision even in this state.
參閱圖1~圖9對基於一實施例之畸變像差校正處理裝置進行說明。
圖1係基於一實施例之畸變像差校正處理裝置10的方塊圖。基於本實施例之畸變像差校正處理裝置10具備輸入/輸出介面部11、處理部12及記憶部13。在處理部12中例如可以使用電腦。在記憶部13中儲存有由電腦執行之程式14。在記憶部13中還儲存有畸變像差校正資訊15。在後面參閱圖2對畸變像差校正資訊15的內容進行說明。作為記憶部13,例如可以使用硬式磁碟機(HDD)、固態硬碟(SSD)等輔助記憶裝置。
Referring to FIG. 1 to FIG. 9, a distortion aberration correction processing device based on an embodiment will be described.
FIG. 1 is a block diagram of a distortion aberration
處理部12從攝像裝置40經由輸入/輸出介面部11獲取圖像資料。處理部12藉由進行圖像分析來檢測圖像內的對準標記的圖像的座標。該圖像的座標受到透鏡的畸變像差的影響而從表示實際對準標記的位置之實際座標偏移。處理部12使用儲存於記憶部13中之畸變像差校正資訊15來校正圖像的座標,從而減小與對準標記的實際座標的誤差。之後,將校正後之座標經由輸入/輸出介面部11傳遞至控制裝置50。控制裝置50依據對準標記的校正後的座標進行各種處理。可以使用共用的電腦來實現處理部12和控制裝置50。此時,處理部12在不經由輸入/輸出介面部11的情況下將對準標記的校正後的座標傳遞至控制裝置50。The
圖2係表示畸變像差校正資訊15的內容之圖。在攝像裝置40(圖1)的圖像平面41上定義以基準點O為原點之xy直角座標系統。攝像裝置40的像場內的物點被轉印到圖像平面41上。圖像平面41例如為正方形或長方形,基準點O為正方形或長方形的中心。x軸及y軸被定義為與圖像平面41上的任一邊平行。FIG. 2 is a diagram showing the contents of the
圖像平面41被從基準點O以輻射狀延伸之複數個邊界線BL區分為複數個區隔區Q1~Q4。在本實施例的情況下,採用連接基準點O與圖像平面41的各邊的中點之線段作為邊界線BL。4個邊界線BL對應於x軸的正的部分、負的部分及y軸的正的部分、負的部分,區隔區Q1~Q4分別對應於xy座標系統的第1象限~第4象限。The
由於透鏡的畸變像差等的影響,與某個觀測點對應之像點P
1的位置從假設透鏡沒有像差時的像點P
0的位置偏移。畸變像差校正資訊15為用於校正像點P
1的座標而獲得無像差時的像點P
0的座標的資訊,並且包含x方向的座標校正率D
x及y方向的座標校正率D
y。
Due to the influence of distortion aberration of the lens, etc., the position of the image point P 1 corresponding to a certain observation point is shifted from the position of the image point P 0 when the lens is assumed to have no aberration. The distortion and
接著,對區隔區Q1的畸變像差校正資訊15的求法進行說明。使用攝像裝置40(圖1)拍攝形成有位置已知的複數個標記之觀測對象物而獲取圖像。複數個標記例如為方格圖案的格點。使觀測對象物移動,直至成為觀測對象物的基準點之標記的圖像與圖像平面41的基準點O一致。例如,藉由分析拍攝有標記之圖像來檢測標記的圖像的位置,並依據檢測結果使觀測對象物移動,能夠使成為基準點之標記的圖像與圖像平面41的基準點O一致。為了提高兩者一致的精度,可以重複複數次該步驟。Next, a method of obtaining the
藉由分析所獲得之圖像,從複數個標記的像點提取位於以基準點O為一端之區隔區Q1的對角線上之複數個像點。將所提取之複數個像點中的1個像點表述為P 1。將與像點P 1對應之無像差時的像點表述為P 0。藉由進行圖像分析來求出像點P 1的座標。將與像點P 1對應之無像差時的像點P 0的座標表述為(x 0,y 0),將像點P 1的座標表述為(x 1,y 1)。由以下式定義x方向的座標校正率D x及y方向的座標校正率D y。 By analyzing the obtained image, a plurality of image points located on the diagonal line of the partition area Q1 with the reference point O as one end are extracted from the plurality of marked image points. One pixel among the plurality of extracted pixels is expressed as P 1 . The aberration-free image point corresponding to the image point P 1 is expressed as P 0 . The coordinates of the image point P1 are determined by image analysis. The coordinates of the image point P 0 corresponding to the image point P 1 when there is no aberration are expressed as (x 0 , y 0 ), and the coordinates of the image point P 1 are expressed as (x 1 , y 1 ). The coordinate correction rate D x in the x direction and the coordinate correction rate D y in the y direction are defined by the following equations.
x方向的座標校正率D x為從無像差時的像點P 0至實際像點P 1為止的x方向的移位量x 1-x 0與從基準點O至無像差時的像點P 0為止的x方向的長度x 0之比。y方向的座標校正率D y為從無像差時的像點P 0至實際像點P 1為止的y方向的移位量y 1-y 0與從基準點O至無像差時的像點P 0為止的y方向的長度y 0之比。通常,透鏡的畸變像差在圖像平面的中心小而在周邊部大。因此,座標校正率D x、D y依賴於距基準點O的距離r。 The coordinate correction rate D x in the x direction is the displacement amount x 1 -x 0 in the x direction from the image point P 0 to the actual image point P 1 when there is no aberration and the image from the reference point O to the image when there is no aberration The ratio of the length x 0 in the x direction up to the point P 0 . The coordinate correction rate D y in the y direction is the displacement amount y 1 -y 0 in the y direction from the image point P 0 when there is no aberration to the actual image point P 1 and the image from the reference point O to the image when there is no aberration The ratio of the length y 0 in the y direction up to the point P 0 . Generally, the distortion aberration of the lens is small at the center of the image plane and large at the peripheral portion. Therefore, the coordinate correction rates D x , D y depend on the distance r from the reference point O.
在將橫軸設為從基準點O至實際像點P
1為止的距離r且將縱軸設為x方向的座標校正率D
x之圖表上,繪製針對對角線上的複數個像點P
1的測定結果。決定近似所繪製之複數個點的分布之近似曲線。藉此,如圖2所示,針對區隔區Q1在x方向的座標校正率D
x被定義為距離r的函數。相同地,y方向的座標校正率D
y亦被定義為距離r的函數。藉此,針對區隔區Q1求出畸變像差校正資訊15。在圖2所示之針對區隔區Q1的畸變像差校正資訊15的圖表中,分別由粗實線及細實線表示x方向的座標校正率D
x及y方向的座標校正率D
y的一例。
On a graph whose horizontal axis is the distance r from the reference point O to the actual image point P1 and whose vertical axis is the coordinate correction rate Dx in the x direction, a plurality of image points P1 on the diagonal are plotted measurement results. Determines the approximation curve that approximates the distribution of the plotted complex number of points. Thereby, as shown in FIG. 2 , the coordinate correction rate D x in the x direction for the compartment Q1 is defined as a function of the distance r. Similarly, the coordinate correction rate D y in the y direction is also defined as a function of the distance r. Thereby, the distortion
針對其他區隔區Q2~Q4亦能夠以相同的方法求出畸變像差校正資訊15。所求出之畸變像差校正資訊15儲存於記憶部13(圖1)中。在畸變像差不依賴於以基準點O為中心之輻射方向的情況下,座標校正率D
x、D
y在區隔區Q1~Q4之間大致相同。然而,實際上,由於各種原因而座標校正率D
x、D
y在區隔區Q1~Q4之間產生偏差。作為產生偏差的原因,例如可以舉出攝像裝置40的光軸相對於觀測對象物的表面傾斜等。
The distortion and
接著,參閱圖3及圖4對將圖像平面41內之某個部位(以下,稱為校正對象部位。)的座標校正為無像差時的座標之方法進行說明。
圖3係用於說明對校正對象部位Pt在圖像平面41內的座標進行校正之方法的圖表。圖4係表示對校正對象部位Pt在圖像平面41內的座標進行校正之步驟之流程圖。
Next, a method of correcting the coordinates of a certain part (hereinafter referred to as a correction target part) in the
首先,決定圖像平面41內的校正對象部位Pt。校正對象部位Pt例如對應於對準標記的圖像的中心點。依據校正對象部位Pt的位置從4個區隔區Q1~Q4選擇2個區隔區(步驟S1)。例如,選擇劃分4個區隔區Q1~Q4之邊界線BL中與從基準點O朝向校正對象部位Pt之方向所形成之角度最小的邊界線BL的兩側的2個區隔區。在圖3中,y軸的正的部分對應於滿足該條件之邊界線BL。選擇y軸的正的部分的兩側的2個區隔區Q1及Q2。First, the correction target part Pt in the
接著,依據針對所選擇之2個區隔區Q1、Q2的畸變像差校正資訊15(圖1、圖2)對與從基準點O至校正對象部位Pt為止的距離r對應之區隔區Q1、Q2的座標校正率D x、D y進行加權平均,從而求出校正對象部位Pt的位置上之座標校正率D xt(r)、D yt(r)(步驟S2)。例如,依據從基準點O朝向所選擇之2個區隔區Q1、Q2的幾何中心之方向(對應於區隔區Q1、Q2的對角方向)與從基準點O朝向校正對象部位Pt之方向所形成之角度來進行加權平均。 Next, based on the distortion correction information 15 (FIGS. 1 and 2) for the two selected compartments Q1 and Q2, the compartment Q1 corresponding to the distance r from the reference point O to the correction target part Pt is corrected. The coordinate correction rates Dx , Dyt (r) of the correction target part Pt are obtained by weighted average of the coordinate correction rates Dx , Dyt (r) of the correction target part Pt (step S2). For example, according to the direction from the reference point O to the geometric centers of the two selected compartments Q1, Q2 (corresponding to the diagonal direction of the compartments Q1, Q2) and the direction from the reference point O to the calibration target part Pt The angle formed is weighted average.
在將從基準點O朝向所選擇之2個區隔區Q1、Q2的幾何中心之方向與從基準點O朝向校正對象部位Pt之方向所形成之角度分別表述為θ 1、θ 2時,校正對象部位Pt上之座標校正率D xt(r)、D yt(r)由以下式表示。 其中,D x1(r)、D y1(r)分別為針對區隔區Q1所求出之x方向及y方向的座標校正率,D x2(r)、D y2(r)分別為針對區隔區Q2所求出之x方向及y方向的座標校正率。 When the angles formed by the direction from the reference point O toward the geometric centers of the two selected compartments Q1 and Q2 and the direction from the reference point O toward the calibration target part Pt are respectively expressed as θ 1 and θ 2 , the calibration The coordinate correction ratios D xt (r) and Dyt (r) on the target site Pt are represented by the following equations. Among them, D x1 (r) and D y1 (r) are the coordinate correction rates in the x direction and y direction calculated for the compartment Q1 respectively, and D x2 (r) and Dy2 (r) are the coordinate correction rates for the compartment Q1 respectively. The coordinate correction rate in the x-direction and y-direction calculated in the area Q2.
接著,依據校正對象部位Pt上之加權平均後之座標校正率D xt、D yt來對校正對象部位Pt在圖像平面內的座標進行校正(步驟S3)。例如,在將校正對象部位Pt的座標表述為(x 1,y 1)且將校正後的座標表述為(x 0,y 0)時,使用以下式計算出校正後的座標。 Next, the coordinates of the correction target part Pt in the image plane are corrected according to the weighted average coordinate correction rates Dxt and Dyt on the correction target part Pt (step S3). For example, when the coordinates of the correction target site Pt are expressed as (x 1 , y 1 ) and the corrected coordinates are expressed as (x 0 , y 0 ), the corrected coordinates are calculated using the following equation.
接著,參閱圖5A及圖5B對本實施例的優異之效果進行說明。 圖5A係表示使用遠心透鏡拍攝以矩陣狀排列之複數個標記而獲得之圖像分布之圖。再者,在圖5A中,將從無像差時之標記的圖像至實際圖像為止的偏移量放大100倍而示出。在圖5A中,可知產生桶型畸變像差。 Next, the excellent effects of this embodiment will be described with reference to FIG. 5A and FIG. 5B . FIG. 5A is a diagram showing an image distribution obtained by photographing a plurality of marks arranged in a matrix using a telecentric lens. In addition, in FIG. 5A , the amount of shift from the image of the marker in the absence of aberration to the actual image is shown enlarged by 100 times. In FIG. 5A , it can be seen that barrel-type distortion aberration occurs.
圖5B係表示依據標記的實際圖像的座標使用基於本實施例之方法計算出之標記的圖像的校正後的座標之圖。在圖5B中,亦將從無像差時之標記的圖像至座標校正後的圖像為止的偏移量放大100倍而示出。如圖5B所示,可知畸變像差得到校正而獲得接近原始矩陣狀的配置的分布。FIG. 5B is a diagram showing the corrected coordinates of the marker image calculated using the method of this embodiment from the coordinates of the actual marker image. Also in FIG. 5B , the amount of shift from the image of the marker in the absence of aberration to the image after coordinate correction is enlarged by 100 times and shown. As shown in FIG. 5B , it can be seen that the distortion aberration is corrected to obtain a distribution close to the original matrix-like arrangement.
如此,藉由使用基於上述實施例之方法,能夠校正透鏡的畸變像差以使標記的圖像的座標接近無像差時的座標。In this way, by using the method based on the above-described embodiment, it is possible to correct the distortion aberration of the lens so that the coordinates of the image of the mark are close to the coordinates when there is no aberration.
接著,參閱圖6A~圖6C、圖7A~圖7D對即使在攝像裝置40(圖1)的光軸相對於測定對象物的表面傾斜之狀態下亦能夠高精度地校正畸變像差之理由進行說明。Next, the reason why the distortion aberration can be corrected with high precision even when the optical axis of the imaging device 40 (FIG. 1) is inclined relative to the surface of the object to be measured will be discussed with reference to FIGS. 6A to 6C and FIGS. 7A to 7D. illustrate.
圖6A及圖6B係分別表示在攝像裝置40的光軸相對於測定對象物的表面垂直之情況下假設沒有畸變像差時及假設有畸變像差時在圖像平面41內的標記的圖像之圖。圖6A及圖6B的橫軸及縱軸分別表示x方向及y方向的位置。在方格圖案的格點上配置有複數個標記。在圖6A及圖6B中,由塗成黑色之圓形標記表示標記的圖像。6A and 6B respectively show images of marks in the
在假設沒有畸變像差之情況下,如圖6A所示,複數個標記的圖像的位置與正方格子的格點一致。在假設有畸變像差之情況下,如圖6B所示,標記的圖像的位置從格點偏移。在圖6B中,假設產生明顯大於通常透鏡的畸變像差的桶型畸變像差。Assuming that there is no distortion aberration, as shown in FIG. 6A , the positions of the images of the plurality of marks coincide with the grid points of the square grid. Under the assumption of distortion aberration, the position of the marked image is shifted from the grid point as shown in FIG. 6B. In FIG. 6B , it is assumed that a barrel-type distortion aberration significantly larger than that of an ordinary lens is generated.
圖6C係在不區分4個對角方向的情況下繪製針對圖像平面的對角方向的x方向的座標校正率D x與距圖像平面的中心點的距離r的關係之圖表。由於畸變像差對以圖像平面的中心點為旋轉中心之旋轉方向之依賴性低,因此針對4個對角方向所繪製之複數個測定點能夠在1個近似曲線上精確地近似。 6C is a graph plotting the relationship between the coordinate correction rate D x in the x direction of the diagonal direction of the image plane and the distance r from the center point of the image plane without distinguishing the four diagonal directions. Since the distortion aberration has low dependence on the rotation direction with the center point of the image plane as the rotation center, a plurality of measurement points plotted for four diagonal directions can be accurately approximated on one approximate curve.
圖7A及圖7B係分別表示在攝像裝置40的光軸相對於測定對象物的表面傾斜之情況下假設沒有畸變像差時及假設有畸變像差時在圖像平面41內的標記的圖像之圖。圖7A及圖7B的橫軸及縱軸分別表示x方向及y方向的位置。在方格圖案的格點上配置有複數個標記。在圖7A及圖7B中,由塗成黑色之圓形標記表示標記的圖像。7A and 7B show images of marks in the
由於攝像裝置40的光軸傾斜,因此如圖7A所示,即使在假設沒有畸變像差之情況下,標記的圖像的位置從格點偏移。由於沒有畸變像差,因此測定對象物上的直線的圖像即使在圖像平面內亦成為直線。例如,在複數個標記所分布之區域的外周線為正方形之情況下,在圖像平面41內標記的圖像所分布之區域的外周線成為梯形。Since the optical axis of the
若假設相對於圖7A所示之標記的圖像分布產生與圖6B所示之畸變像差相同的像差,則如圖7B所示,假設有畸變像差時的標記的圖像所分布之區域成為如合成了梯形和桶型的形狀。If it is assumed that the same aberration as the distortion aberration shown in FIG. 6B occurs with respect to the image distribution of the mark shown in FIG. 7A, then as shown in FIG. The area becomes a shape such as a combination of a trapezoid and a barrel.
圖7C係在不區分圖像平面41的4個對角方向的情況下繪製針對圖像平面41的對角方向的x方向的座標校正率D
x與距圖像平面41的中心點的距離r的關係之圖表。畸變像差的大小或朝向在對角方向之間不同,因此與圖6C所示之情況相比,所繪製之測定點分布在縱軸方向上的寬範圍內。即使相對於該分布設定了1個近似曲線,從近似曲線求出之座標校正率與各測定點上之座標校正率的誤差亦大。
FIG. 7C plots the coordinate correction rate D x in the x direction of the diagonal direction of the
圖7D係區分區隔區Q1~Q4各自並繪製針對圖像平面41的對角方向的x方向的座標校正率D
x與距圖像平面的中心點的距離r的關係之圖表。圖表中的四角標記、三角標記及圓形標記分別對位於區隔區Q2、Q3、Q4的對角線上之測定點進行繪製。再者,針對區隔區Q1的複數個測定點亦計算出座標校正率,但是在圖7D中未示出測定點。
FIG. 7D is a diagram of the relationship between the coordinate correction rate D x in the x direction of the diagonal direction of the
圖7D的圖表中的細虛線、細實線、粗虛線及粗實線分別為近似針對區隔區Q1~Q4的x方向的座標校正率的測定點的分布之近似曲線。若著眼於1個區隔區,則從近似曲線求出之座標校正率與複數個測定點上之座標校正率的誤差小。The thin dotted line, thin solid line, thick dotted line, and thick solid line in the graph of FIG. 7D are approximate curves that approximate the distribution of measurement points for the coordinate correction rate in the x direction of the compartments Q1 to Q4 . If we focus on one compartment, the error between the coordinate correction rate obtained from the approximate curve and the coordinate correction rate at a plurality of measurement points is small.
在攝像裝置40的光軸相對於測定對象物的表面傾斜之情況下,若依據圖7C所示之1個近似曲線來進行校正對象部位的座標的校正,則校正後的座標與無像差時的座標的誤差依據校正對象部位的位置而變大。相對於此,在本實施例中,在步驟S1(圖4)中,選擇圖7D所示之4個近似曲線中更準確地反映校正對象部位上之座標校正率之2個近似曲線。When the optical axis of the
進而,在步驟S2(圖4)中,依據反映校正對象部位上之座標校正率之程度對從2個近似曲線求出之座標校正率進行加權平均。因此,即使在攝像裝置40的光軸相對於測定對象物的表面傾斜之情況下,亦能夠使用接近校正對象部位上之實際座標校正率的座標校正率進行座標的校正。因此,能夠提高座標的校正精度。Furthermore, in step S2 (FIG. 4), the coordinate correction ratios obtained from the two approximate curves are weighted and averaged according to the extent to which the coordinate correction ratios on the correction target site are reflected. Therefore, even when the optical axis of the
接著,對上述實施例的變形例進行說明。 在上述實施例中,將圖像平面41(圖2)區分為4個區隔區Q1~Q4,但是區隔區的個數並不限於4個。區隔區的個數只要為2個以上即可。例如,在圖7D所示之例中,區隔區Q1與區隔區Q4的近似曲線相互近似,區隔區Q2與區隔區Q3的近似曲線相互近似。因此,即使將區隔區Q1和區隔區Q4歸納為1個區隔區且將區隔區Q2和區隔區Q3歸納為1個區隔區,亦能夠一定程度上維持高的座標的校正精度。 Next, modifications of the above-described embodiment will be described. In the above embodiment, the image plane 41 ( FIG. 2 ) is divided into four partitions Q1 - Q4 , but the number of partitions is not limited to four. The number of compartments may be two or more. For example, in the example shown in FIG. 7D , the approximate curves of the partitioned region Q1 and the partitioned region Q4 are similar to each other, and the approximate curves of the partitioned region Q2 and Q3 are similar to each other. Therefore, even if the compartment Q1 and the compartment Q4 are combined into one compartment and the compartment Q2 and the compartment Q3 are combined into one compartment, high coordinate correction can be maintained to a certain extent. precision.
又,在上述實施例中,針對4個區隔區Q1~Q4各自在對角線上的複數個像點P 1(圖2)求出座標校正率,並且依據該座標校正率來設定1個近似曲線。作為成為用於設定近似曲線的依據之複數個像點P 1,並不限於對角線上,可以考慮區隔區內的其他像點P 1中之座標校正率來設定1個近似曲線。 Also, in the above-mentioned embodiment, the coordinate correction rate is obtained for the plurality of image points P1 (FIG. 2 ) on the diagonal line of each of the four compartmental areas Q1~Q4, and an approximation is set based on the coordinate correction rate. curve. The plurality of pixel points P 1 used as the basis for setting the approximate curve is not limited to the diagonal line, and one approximate curve can be set in consideration of the coordinate correction ratios of other pixel points P 1 in the segmented area.
例如,針對被從基準點O朝向1個區隔區內之2個輻射方向夾著之區域內的複數個像點P 1,可以求出座標校正率。此時,為了設定強烈反映區隔區內的複數個像點P 1中之座標校正率之1個近似曲線,以被2個輻射方向夾著之區域包含區隔區的幾何中心的方式設定2個輻射方向即可。 For example, the coordinate correction rate can be obtained for a plurality of image points P 1 in an area sandwiched by two radiation directions from the reference point O to one compartment. At this time, in order to set an approximate curve that strongly reflects the coordinate correction rate in the plurality of image points P1 in the compartment, set 2 in such a way that the area sandwiched by the two radiation directions includes the geometric center of the compartment. a radiation direction.
又,在上述實施例中,在步驟S1(圖4)中選擇2個區隔區時,選擇4個邊界線BL中與從基準點O朝向校正對象部位Pt之方向所形成之角度最小的邊界線BL的兩側的2個區隔區。另外,可以選擇高精度地近似校正對象部位Pt上之座標校正率之2個區隔區。Also, in the above-mentioned embodiment, when two compartments are selected in step S1 (FIG. 4), the boundary with the smallest angle formed with the direction from the reference point O toward the correction target part Pt among the four boundary lines BL is selected. 2 partitions on either side of the line BL. In addition, it is possible to select two divisional areas that approximate the coordinate correction rate on the correction target portion Pt with high accuracy.
例如,在圖7D所示之例中,區隔區Q1的近似曲線與區隔區Q4的近似曲線相對於距離r的變化呈現出相同的傾向。這意味著在校正對象部位Pt位於區隔區Q1或區隔區Q4內之情況下,校正對象部位Pt上之座標校正率在區隔區Q1及區隔區Q4中高精度地近似。因此,在校正對象部位Pt位於區隔區Q1或區隔區Q4之情況下,在步驟S1(圖4)中,選擇區隔區Q1及區隔區Q4作為2個區隔區即可。從相同的理由考慮,在校正對象部位Pt位於區隔區Q2或區隔區Q3之情況下,在步驟S1(圖4)中,選擇區隔區Q2及區隔區Q3作為2個區隔區即可。For example, in the example shown in FIG. 7D , the approximate curve of the compartmentalized region Q1 and the approximated curve of the compartmentalized region Q4 show the same tendency with respect to the change of the distance r. This means that when the correction target part Pt is located in the compartment Q1 or the compartment Q4, the coordinate correction rate on the correction target part Pt is approximated with high precision in the compartment Q1 and the compartment Q4. Therefore, when the correction target part Pt is located in the segmented area Q1 or the segmented area Q4, in step S1 (FIG. 4), the segmented area Q1 and the segmented area Q4 may be selected as two segmented areas. Considering the same reason, when the correction target part Pt is located in the compartment Q2 or the compartment Q3, in step S1 (FIG. 4), the compartment Q2 and the compartment Q3 are selected as two compartments. That's it.
又,在上述實施例中,在步驟S1(圖4)中選擇2個區隔區,但是可以選擇1個區隔區。例如,在角度θ 1(圖3)為0°或足夠小的情況下,可以僅選擇區隔區Q1。依據角度θ 1的大小決定選擇1個區隔區還是選擇2個區隔區即可。 Also, in the above-mentioned embodiment, two compartments are selected in step S1 (FIG. 4), but one compartment may be selected. For example, in the case where the angle θ 1 ( FIG. 3 ) is 0° or sufficiently small, only the compartmental region Q1 can be selected. Depending on the size of the angle θ 1 , it is sufficient to select one compartment or two compartments.
接著,參閱圖8A、圖8B及圖9對基於其他實施例之噴墨描繪裝置進行說明。基於本實施例之噴墨描繪裝置搭載有基於圖1~圖4所示之實施例之畸變像差校正裝置。Next, an inkjet drawing device based on other embodiments will be described with reference to FIGS. 8A , 8B and 9 . The inkjet drawing device based on this embodiment is equipped with the distortion aberration correction device based on the embodiment shown in FIGS. 1 to 4 .
圖8A係噴墨描繪裝置20的概略前視圖。在基座22上藉由移動機構24支撐有可動載台25。定義x軸及y軸朝向水平方向且z軸朝向垂直下方的xyz直角座標系統。移動機構24由控制裝置50控制,以使可動載台25在x方向及y方向這兩個方向上移動。作為移動機構24,例如能夠使用包括X方向移動機構24X及Y方向移動機構24Y之XY工作台。FIG. 8A is a schematic front view of the
在可動載台25的上表面上保持作為描繪對象之基板80。基板80例如藉由真空吸盤而固定於可動載台25上。在可動載台25的上方例如由門型支撐構件23支撐有油墨吐出單元30及攝像裝置40。A
攝像裝置40拍攝基板80的上表面。更具體而言,拍攝基板80的上表面中攝像裝置40的像場內的區域。由攝像裝置40獲得之圖像被輸入至畸變像差校正處理裝置10。The
控制裝置50從畸變像差校正處理裝置10接收基板80的位置資訊。依據該位置資訊來控制移動機構24及油墨吐出單元30,從而使油墨彈著於基板80的表面的預定位置上。藉此,在基板80的表面上形成預定形狀的油墨的膜。The
圖8B係表示可動載台25、油墨吐出單元30及攝像裝置40在俯視觀察時之位置關係之圖。在可動載台25的上表面上保持基板80。在基板80的上方支撐有油墨吐出單元30及攝像裝置40。在油墨吐出單元30的與基板80對向之表面上設置有複數個噴嘴32。控制裝置50控制移動機構24以使可動載台25在x方向及y方向上移動,並且控制從油墨吐出單元30的各噴嘴32的油墨的吐出。FIG. 8B is a diagram showing the positional relationship among the
在基板80的四個角上分別形成有對準標記81。控制裝置50藉由使移動機構24動作以將對準標記81的各自配置於攝像裝置40的像場內,從而能夠由攝像裝置40拍攝對準標記81。Alignment marks 81 are respectively formed on the four corners of the
圖9係表示使用噴墨描繪裝置進行描繪之步驟之流程圖。首先,控制裝置50使移動機構24動作,以使1個對準標記81在攝像裝置40的像場內移動(步驟S11)。之後,攝像裝置40拍攝對準標記81(步驟S12)。所拍攝之圖像資料被輸入至畸變像差校正處理裝置10。畸變像差校正處理裝置10藉由分析對準標記81的圖像來檢測對準標記81的圖像在圖像平面內的座標(步驟S13)。在對準標記81的圖像的座標的檢測中,能夠使用模式匹配等公知的算法。Fig. 9 is a flow chart showing the steps of drawing using the inkjet drawing device. First, the
畸變像差校正處理裝置10藉由執行基於圖4所示之實施例之步驟來校正對準標記81的圖像的座標(步驟S14)。重複步驟S11至步驟S14的步驟,直至針對所有對準標記81進行座標的校正(步驟S15)。The distortion aberration
若針對所有對準標記81完成座標的校正,則畸變像差校正處理裝置10向控制裝置50(圖8A、圖8B)傳遞對準標記81的圖像的校正後的座標(步驟S16)。控制裝置50依據對準標記81的圖像的校正後的座標來執行描繪處理(步驟S17)。When the correction of the coordinates of all the alignment marks 81 is completed, the distortion
接著,對本實施例的優異之效果進行說明。
由於基於本實施例之噴墨描繪裝置搭載有圖1~圖4所示之畸變像差校正處理裝置10,因此能夠高精度地測量對準標記81的位置。尤其,即使在攝像裝置40的光軸相對於基板80的表面傾斜之情況下,亦能夠抑制對準標記81的位置的測量精度的降低。
Next, the excellent effect of this embodiment will be described.
Since the inkjet drawing device according to this embodiment is equipped with the distortion
接著,對圖8A~圖9所示之實施例的變形例進行說明。在圖8A~圖9所示之實施例中,將基於圖1~圖4所示之實施例之畸變像差校正處理裝置10搭載於噴墨描繪裝置上,但是基於圖1~圖4所示之實施例之畸變像差校正處理裝置10亦能夠搭載於其他裝置上。例如,亦能夠搭載於使雷射光束入射到對象物上來進行鑽孔加工之雷射加工裝置、使雷射光束入射到作為對象物之半導體基板上來進行退火之雷射退火裝置等上。Next, modifications of the embodiment shown in FIGS. 8A to 9 will be described. In the embodiment shown in FIGS. 8A to 9 , the distortion aberration
上述各實施例為例示,並且能夠對在不同之實施例中所示出之結構進行局部取代或組合,這是不言而喻的。關於基於複數個實施例的相同結構之相同的作用效果,不在每個實施例中逐一提及。進而,本發明並不限於上述實施例。例如,能夠進行各種變更、改進、組合等對本領域的技術人員來說是顯而易見的。The above-described embodiments are examples, and it goes without saying that partial substitution or combination of structures shown in different embodiments is possible. Regarding the same function and effect based on the same structure of multiple embodiments, it is not mentioned one by one in each embodiment. Furthermore, the present invention is not limited to the above-described embodiments. For example, it is obvious to those skilled in the art that various changes, improvements, combinations, etc. can be made.
10:畸變像差校正處理裝置
11:輸入/輸出介面部
12:處理部
13:記憶部
14:程式
15:畸變像差校正資訊
20:噴墨描繪裝置
22:基座
23:支撐構件
24:移動機構
24X:X方向移動機構
24Y:Y方向移動機構
25:可動載台
30:油墨吐出單元
32:噴嘴
40:攝像裝置
41:攝像裝置的圖像平面
50:控制裝置
80:基板
81:對準標記
10: Distortion aberration correction processing device
11: Input/output interface section
12: Processing Department
13: Memory Department
14: Program
15: Distortion and aberration correction information
20: Inkjet drawing device
22: base
23: Support member
24:
[圖1]係基於實施例之畸變像差校正處理裝置的方塊圖。 [圖2]係表示畸變像差校正資訊的內容之圖。 [圖3]係用於說明對校正對象部位在圖像平面內的座標進行校正之方法的圖表。 [圖4]係表示對校正對象部位在圖像平面內的座標進行校正之步驟之流程圖。 [圖5A]係表示使用遠心透鏡拍攝以矩陣狀排列之複數個標記而獲得之圖像分布之圖,[圖5B]係表示依據標記的圖像的座標使用基於本實施例之方法計算出之標記的校正後的座標之圖。 [圖6A及圖6B]係分別表示在攝像裝置的光軸相對於測定對象物的表面垂直之情況下假設沒有畸變像差時及假設有畸變像差時在圖像平面內的標記的圖像之圖,[圖6C]係繪製針對圖像平面的對角方向的x方向的座標校正率D x與距圖像平面的中心點的距離r的關係之圖表。 [圖7A及圖7B]係分別表示在攝像裝置的光軸相對於測定對象物的表面能夠傾斜之情況下假設沒有畸變像差時及假設有畸變像差時在圖像平面內的標記的圖像之圖,[圖7C]係在不區分圖像平面的4個對角方向的情況下繪製針對圖像平面的對角方向的x方向的座標校正率D x與距圖像平面的中心點的距離r的關係之圖表,[圖7D]係區分區隔區Q1~Q4各自並繪製針對圖像平面的對角方向的x方向的座標校正率D x與距圖像平面的中心點的距離r的關係之圖表。 [圖8A]係基於其他實施例之噴墨描繪裝置的概略前視圖,[圖8B]係表示可動載台、油墨吐出單元及攝像裝置在俯視觀察時之位置關係之圖。 [圖9]係表示使用噴墨描繪裝置進行描繪之步驟之流程圖。 [ Fig. 1 ] is a block diagram of a distortion aberration correction processing device based on an embodiment. [ Fig. 2 ] is a diagram showing contents of distortion aberration correction information. [FIG. 3] It is a graph for explaining the method of correcting the coordinates of the correction target part in an image plane. [FIG. 4] It is a flowchart which shows the procedure of correcting the coordinate of the correction target part in an image plane. [FIG. 5A] is a diagram showing the distribution of images obtained by photographing a plurality of marks arranged in a matrix using a telecentric lens, and [FIG. 5B] shows the coordinates of the images based on the marks calculated using the method based on this embodiment. Map of the corrected coordinates of the markers. [FIG. 6A and FIG. 6B] are images showing marks in the image plane when the optical axis of the imaging device is perpendicular to the surface of the object to be measured assuming that there is no distortion aberration and when there is distortion aberration, respectively. The figure, [FIG. 6C] is a graph plotting the relationship between the coordinate correction rate D x in the x direction of the diagonal direction of the image plane and the distance r from the center point of the image plane. [FIG. 7A and FIG. 7B] are diagrams showing marks in the image plane when there is no distortion aberration and when there is distortion aberration under the condition that the optical axis of the imaging device can be inclined relative to the surface of the object to be measured. The graph of the image, [Fig. 7C] is to plot the coordinate correction rate D x in the x direction of the diagonal direction of the image plane and the distance from the center point of the image plane without distinguishing the 4 diagonal directions of the image plane The graph of the relationship between the distance r, [Figure 7D] is to distinguish the partition areas Q1~Q4 and plot the coordinate correction rate D x in the x direction for the diagonal direction of the image plane and the distance from the center point of the image plane A graph of the relationship of r. [FIG. 8A] is a schematic front view of an inkjet drawing device according to another embodiment, and [FIG. 8B] is a diagram showing a positional relationship among a movable stage, an ink discharge unit, and an imaging device when viewed from above. [ Fig. 9 ] is a flow chart showing the steps of drawing using the inkjet drawing device.
41:圖像平面 41: Image plane
BL:邊界線 BL: Borderline
Dx:座標校正率 D x : Coordinate correction rate
Dy:座標校正率 D y : Coordinate correction rate
O:基準點 O: reference point
P0:像點 P 0 : pixel
P1:像點 P 1 : pixel
Q1:區隔區 Q1: Partition area
Q2:區隔區 Q2: Partition area
Q3:區隔區 Q3: Partition area
Q4:區隔區 Q4: Partition area
r:距離 r: distance
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