TWI784112B - Separation device - Google Patents

Abstract

[Problem] The present invention provides a dividing device capable of appropriately heating the loosened portion of the expansion sheet even when either the relaxation method or the stretching method of the expansion sheet is different. [Solution] The dividing device 10 includes a frame fixing unit 40 , a sheet expanding unit 50 , and a heating unit 60 . The heating unit 60 heats the expanded annular region of the expanded sheet and shrinks the slack portion of the expanded sheet, and includes a plurality of heating units 63 , a rotating unit, and a heating position adjusting unit. The plurality of heating portions 63 are provided in the circumferential direction along the annular region. The rotating part moves the heating part 63 in the circumferential direction along the annular region of the expanding sheet. The heating position adjustment unit adjusts the position of the heating unit 63 in the radial direction of the workpiece or in the direction of distance from the expansion sheet.

Description

Separation device

The present invention relates to a dividing device.

It is known that an expansion sheet is pasted on a plate-shaped workpiece having a division starting point formed along a predetermined dividing line for dividing individual element chips, and an external force is applied to the workpiece by expanding the expansion sheet. And a method of dividing into individual element wafers along a planned dividing line from the starting point of dividing (for example, refer to Patent Document 1). [Prior art documents] [Patent documents]

[Patent Document 1] Japanese Patent No. 5791866

[Problems to be Solved by the Invention] In the above-mentioned method, the loose portion of the expanded expansion piece on the outer periphery of the workpiece may cause an obstacle in the subsequent conveying step. In addition, in this method, since the expansion sheet is loosened, the space between the adjacent element wafers pulled apart by expanding the expansion sheet is contracted, and there is a possibility of chipping due to friction between the element wafers. In the method of Patent Document 1, in order to reduce these possibilities, the slack portion of the expansion sheet is heated to shrink the slack.

However, depending on the shape and size of the device wafer, the winding state of the expansion sheet, and the like, the manner of relaxation and extension of the expansion sheet differs greatly. Furthermore, the shape region where the expansion piece protrudes in a direction perpendicular to the front surface of the workpiece due to relaxation of the expansion piece varies depending on the way the expansion piece is relaxed and extended. In the method of patent document 1, there exists a problem that it cannot fully cope with the case where the shape area|region of this expansion piece differs.

The present invention has been made in view of this problem, and an object of the present invention is to provide a dividing device capable of properly heating the slack portion of the expansion sheet even when the expansion sheet is loosened or stretched in a different manner.

[Technical means to solve the problem] In order to solve the above-mentioned problems and achieve the object, the dividing device of the present invention is a dividing device that expands the expansion sheet of the workpiece unit and divides the workpiece. Composed of a plate-shaped workpiece, the expansion sheet attached to the workpiece, and an annular frame attached to the expansion sheet, the dividing device includes: a frame fixing part, which fixes the annular frame of the workpiece unit; a sheet expansion unit, It pushes the annular region of the expansion sheet between the outer circumference of the workpiece and the inner circumference of the annular frame in a direction perpendicular to the front of the workpiece and expands the expansion sheet, and breaks the workpiece from the splitting starting point; and a heating unit, which heats the expanded annular region of the expanded sheet, and shrinks the slack part of the expanded sheet; wherein, the heating unit is provided with: a plurality of heating parts, which are arranged along the annular region Arranged in the circumferential direction; a rotating part, which moves the heating part in the circumferential direction along the annular region of the expansion piece; Adjust the position of the heating part.

A plurality of the heating units may be adjusted to different temperatures, respectively.

[Advantages of the Invention] The dividing device of the present invention exhibits the effect of being able to properly heat the relaxed portion of the expansion sheet even when either the relaxation method or the stretching method of the expansion sheet is different.

An example (embodiment mode) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. In addition, components described below include those that can be easily conceived by those skilled in the art or that are substantially the same. Furthermore, the configurations described below can be appropriately combined. In addition, various omissions, substitutions, or changes can be made in the configuration without departing from the scope of the present invention.

(Embodiment 1) FIG. 1 is a plan view showing an example of a workpiece unit 100 to be divided by a dividing device 10 (see FIG. 2 ) according to Embodiment 1. As shown in FIG. First, the workpiece unit 100 to be divided by the dividing device 10 according to Embodiment 1 of the present invention will be described based on the drawings.

The workpiece unit 100 of the dividing object of the dividing device 10 (referring to FIG. 2 ) of Embodiment 1 is as shown in FIG. The ring frame 107 of the outer peripheral portion of the expansion sheet 106 . The workpiece 101 is pasted on the central portion of the expansion sheet 106 . The expansion piece 106 forms an annular region 108 between the inner edge of the inner periphery of the annular frame 107 and the outer edge of the outer periphery of the workpiece 101 .

The workpiece 101 is a disc-shaped semiconductor wafer or an optical element wafer having silicon, sapphire, gallium arsenide, SiC (silicon carbide), or the like as a substrate. As shown in FIG. 1 , the workpiece 101 forms a square element wafer 105 in each area divided by the dividing line 103 extending on the front surface 102 and intersecting with each other in the A direction and the B direction. Modified layer 109 is formed on workpiece 101 along planned dividing line 103 .

The workpiece 101 is irradiated with a laser beam having a penetrating wavelength from the back side along the planned dividing line 103 to form the modified layer 109 . The modified layer 109 refers to a region in which the density, refractive index, mechanical strength, or other physical properties are different from those of the surrounding area, and can be exemplified by a molten processed area, a crack area, a dielectric breakdown area, a refractive index changed area, and a mixture of these areas. Area. Modified layer 109 is a division starting point for division into individual element wafers 105 .

The expansion sheet 106 is made of stretchable resin, and has heat shrinkability that shrinks when heated. The stretchability of the expansion sheet 106 is anisotropic, and has a direction in which it is easy to expand and a direction in which it is not easy to expand. The expansion sheet 106 is pasted toward the B direction in a direction that is easy to expand, and the B direction is easier to expand than the A direction, that is, it is easier to extend. Before the expansion sheet 106 is pasted on the workpiece 101, it is wound into a drum shape, which has the MD (Machine Direction, longitudinal direction) direction of the flow direction, and the TD (Transverse Direction, transverse direction) which is perpendicular to the flow direction. direction) direction. In this embodiment, although the expansion sheet 106 is easier to expand in the MD direction than in the TD direction, and is pasted in such a way that the MD direction coincides with the B direction and the TD direction coincides with the A direction, the present invention is not limited thereto, and may be It is easier to expand in the TD direction than in the MD direction, and paste in such a way that the TD direction is consistent with the B direction and the MD direction is consistent with the A direction.

FIG. 2 is a perspective view showing a configuration example of the dividing device 10 according to the first embodiment. Dividing device 10 shown in FIG. 2 is a device that expands expansion sheet 106 and divides workpiece 101 on which modified layer 109 is formed into individual element wafers 105 along planned dividing line 103 . As shown in FIG. 2 , the dividing apparatus 10 includes a chamber 20 , a holding table 30 , a frame fixing unit 40 , a sheet expanding unit 50 , a heating unit 60 , and a control unit 70 . In addition, both the X direction and the Y direction in FIG. 2 are included in the horizontal direction, and are orthogonal to each other. In addition, the Z direction in FIG. 2 is the vertical direction, which is orthogonal to the X direction and the Y direction.

The chamber 20 is formed in a box shape with an opening at the top. The chamber 20 accommodates the holding table 30 , the frame mounting plate 41 of the frame fixing portion 40 , and the sheet expanding unit 50 .

The holding table 30 has a holding surface 31 that attracts and holds the workpiece 101 of the workpiece unit 100 through the expansion sheet 106 . The holding table 30 is disc-shaped, and includes a disc-shaped frame 32 made of metal such as stainless steel, and a disc-shaped adsorption portion 33 made of a porous material such as porous ceramics and surrounded by the frame 32 . The upper surfaces of the frame body 32 and the suction part 33 are arranged on the same plane, and are configured as the holding surface 31 for suction and holding the workpiece 101 . The suction portion 33 has substantially the same diameter as the workpiece 101 . The holding table 30 places the back side of the workpiece 101 on the holding surface 31 through the expansion piece 106 of the workpiece unit 100 conveyed by the conveying unit 80 . The holding table 30 is connected to the vacuum suction source 34 through the suction unit 33 , and the suction unit 33 is sucked by the vacuum suction source 34 to suck and hold the back side of the workpiece 101 on the holding surface 31 .

The frame fixing portion 40 fixes the ring frame 107 of the workpiece unit 100 . The frame fixing unit 40 includes a frame mounting plate 41 and a frame holding plate 42 . The frame mounting plate 41 is formed in a plate shape in which an opening 43 having a circular planar shape is provided, and an upper surface 44 is formed flat and parallel to the horizontal direction. The inner diameter of the opening 43 of the frame mounting plate 41 is formed to be slightly larger than the inner diameter of the annular frame 107 . In the frame mounting plate 41 , the holding table 30 is arranged in the opening 43 , and the opening 43 is arranged coaxially with the holding table 30 . In addition, the frame mounting plate 41 is provided with piston rods 45-1 of air cylinders 45 at four corners, and is arranged so as to be able to move up and down freely when the piston rods 45-1 expand and contract. The frame mounting plate 41 is provided on the four corners of the upper surface 44 freely movable in the horizontal direction, and the position of the annular frame 107 is adjusted by moving in the horizontal direction, and is provided with an adsorption mechanism for positioning the workpiece 101 on the holding table 30 The center guide 46 is positioned coaxially with the portion 33.

The frame holding plate 42 is formed into a plate shape having substantially the same size as the frame mounting plate 41 , and a circular opening 47 having the same size as the opening 43 is provided at the center. The frame pressing plate 42 is installed on the front end of the piston rod 48-1 of the cylinder 48, and the piston rod 48-1 is stretched to move freely across the position above the frame mounting plate 41 and the position withdrawn from the frame mounting plate 41. . The frame holding plate 42 is provided with elongated holes 49 at four corners into which the center guide 46 can be inserted.

In the frame fixing part 40, the ring-shaped frame 107 of the workpiece unit 100 conveyed by the conveying unit 80 is fixed in a state where the frame holding plate 42 is positioned at a position evacuated from above the frame mounting plate 41 and the center guides 46 are separated from each other. It is placed on the upper surface 44 of the frame mounting plate 41 . The frame fixing part 40 brings the center guides 46 close to each other to position the workpiece 101 of the workpiece unit 100 . The frame fixing part 40 positions the frame pressing plate 42 above the frame mounting plate 41, extends the piston rod 45-1 of the air cylinder 45, raises the frame mounting plate 41, and clamps the annular frame 107 of the workpiece unit 100 on the frame. The mounting plate 41 is fixed to the frame pressing plate 42 .

FIG. 3 is a sectional view of the section III-III of the sheet expansion unit 50 in FIG. 2 . FIG. 4 is a cross-sectional view taken along line IV-IV of the sheet expansion unit 50 of FIG. 2 . Both the section III-III and the section IV-IV in FIG. 2 are planes parallel to the XZ plane. FIG. 3 and FIG. 4 show respective states when the holding table 30 and the frame fixing portion 40 are at different positions in the vertical direction. The sheet expanding unit 50 pushes the ring-shaped area 108 in a direction perpendicular to the front surface 102 of the workpiece 101 by moving the holding table 30 and the frame fixing portion 40 to positions separated from each other relative to the axis center in the vertical direction. The expansion piece 106 is expanded, and the workpiece 101 is broken from the modified layer 109 as the starting point of division. The sheet expanding unit 50 includes a push-up member 51 and a lifting unit 52 as shown in FIGS. 3 and 4 .

The push-up member 51 is formed in a cylindrical shape, and its outer diameter is smaller than the inner diameter of the annular frame 107 placed on the upper surface 44 of the frame mounting plate 41, and the inner diameter is smaller than that of the workpiece 101 and the The outer diameter of the holding table 30 is large. The push-up member 51 is arranged inside the holding table 30 and arranged coaxially with the holding table 30 . A roller member 53 disposed on the same plane as the holding surface 31 of the holding table 30 is rotatably attached to an upper end of the push-up member 51 . The roller member 53 eases the friction with the expansion sheet 106 when the push-up member 51 pushes up the expansion sheet 106 as shown in FIG. 4 .

The lift unit 52 includes air cylinders 54 and 55 . The holding table 30 is attached to the piston rod 54-1 of the air cylinder 54, and is arrange|positioned so that it may move up and down freely when the piston rod 54-1 expands and contracts. The push-up member 51 is attached to the piston rod 55-1 of the air cylinder 55, and is arranged so as to be able to move up and down freely when the piston rod 55-1 expands and contracts. The lifting unit 52 lifts and lowers the holding table 30 integrally with the push-up member 51 by means of air cylinders 54 and 55 .

The sheet expansion unit 50 is from the state that the roller member 53 installed on the upper end of the push-up member 51 and the holding surface 31 are located below the upper surface 44 of the frame mounting plate 41, as shown in FIG. The push member 51 rises integrally with the holding surface 30 until the roller member 53 and the holding surface 31 are located above the upper surface 44 of the frame mounting plate 41 to expand the expansion piece 106 in the planar direction. The sheet expansion unit 50 is lowered from the state where the expansion sheet 106 is expanded in the planar direction as shown in FIG. When the sheet expansion unit 50 descends until the roller member 53 and the holding surface 31 become the same plane state as the upper surface 44 of the frame fixing part 40, on the annular region 108 of the expansion sheet 106, a slack portion formed by the expansion sheet 106 being loosened is formed. 108-2 (see Figure 1, Figure 9 and Figure 11).

FIG. 5 is a top view of the heating unit 60 in FIG. 2 . FIG. 6 is a functional block diagram of the heating unit 60 in FIG. 5 . FIG. 7 is a sectional view of the section VII-VII of the heating unit 60 of FIG. 5 . FIG. 5 is a diagram in the XY plane viewing the heating unit 60 from above in the Z direction. The VII-VII section in FIG. 5 is a plane parallel to the XZ plane. The heating unit 60 heats the expanded annular region 108 of the expansion sheet 106 and shrinks the slack portion 108 - 2 (see FIGS. 1 , 9 and 11 ) of the expansion sheet 106 .

The heating unit 60 is, as shown in FIGS. 2 and 5 , equipped with a disc-shaped unit body 61, and a plurality of grips 62-1, 62-2, 62-3, and 62-4 installed in the unit body 61, respectively. There are three heating units 63-1, 63-2, 63-3 and 63-4. In the following description, it is considered to be described as the holding part 62 without distinguishing the holding parts 62-1, 62-2, 62-3 and 62-4, and the heating parts 63-1, 63-2, 63- In the case of 3 and 63-4, it is described as the heating part 63 as appropriate.

The unit body 61 is arranged above the holding table 30 and coaxially with the holding table 30 as shown in FIG. 2 . The unit body 61 is provided rotatably in a direction around an axis parallel to the vertical direction. In addition, the unit body 61 is provided so as to be able to move up and down freely by a moving unit not shown.

As shown in FIGS. 2 and 5 , the grips 62 are arranged at equal intervals in the circumferential direction on the outer edge of the unit body 61 . The gripping portion 62 is disposed at a position vertically facing the annular region 108 of the expanding piece 106 of the workpiece unit 100 held by the holding table 30 and the frame fixing portion 40 . As shown in FIG. 5 , the gripping portion 62 is movable in the radial direction and the vertical direction of the unit body 61 within the size range of the gripping portion 62, that is, in the radial direction of the workpiece 101 or in the far-near direction with the expansion piece 106. The heating part 63 is held movably. The holding portion 62 is an opening through which the heating portion 63 is inserted, as shown in FIGS. 2 and 5 . The length in the circumferential direction of the opening of the gripping portion 62 is to a degree that can be inserted therethrough, and is longer than the length in the circumferential direction of the heating portion 63 . The length in the radial direction of the opening of the holding part 62 is longer than the length in the radial direction of the heating part 63 , and the heating part 63 is held movably in the radial direction. In Embodiment 1, four gripping parts 62 are preferably provided, but in the present invention, the number is not limited to four.

As shown in FIGS. 2 and 5 , the heating parts 63 are arranged at equal intervals in the circumferential direction on the outer edge of the unit body 61 in accordance with the arrangement of the holding parts 62 . That is, the heating unit 63 is held by the holding unit 62 and arranged at a position facing the annular region 108 of the expansion piece 106 of the workpiece unit 100 held on the holding table 30 and the frame fixing unit 40 in the vertical direction. , and arranged in the circumferential direction along the annular region 108 . In Embodiment 1, four heating parts 63 are preferably provided, but in the present invention, the number is not limited to four. The heating unit 63 is in the form of irradiating infrared rays downward to heat the annular region 108 of the expansion sheet 106 , for example, an infrared ceramic heater that is heated when a voltage is applied to emit infrared rays. In addition, the heating part 63 is not limited to the form of irradiating infrared rays, and may also be a joint part having two kinds of metals, and a Peltier (Peltier) element that absorbs heat and generates heat in the two kinds of metals is controlled by a direct current. A Peltier element.

As shown in FIG. 6 , the heating unit 60 includes a plurality of first heating position adjustment parts 64 - 1 , 64 - 2 , 64 - 3 , and 64 - 4 and a rotating part 65 . A plurality of first heating position adjustment parts 64-1, 64-2, 64-3 and 64-4 are respectively connected to the heating parts 63-1, 63-2, 63-3 and 63-4, and on the workpiece 101 The positions of the heating units 63-1, 63-2, 63-3, and 63-4 are moved in the radial direction. In the following description, when not distinguishing the 1st heating position adjustment part 64-1, 64-2, 64-3, and 64-4, it will be described as the 1st heating position adjustment part 64 as appropriate. The first heating position adjustment unit 64 is configured to individually move the position of the heating unit 63 in the radial direction of the workpiece 101 , and includes, for example, a belt pulley provided for the heating unit 63 and a motor for driving the belt pulley. In addition, the 1st heating position adjustment part 64 is not limited to this structure, What has an air cylinder or a ball screw may be sufficient as it. The rotating portion 65 is connected to the unit body 61 . The rotation unit 65 includes a motor (not shown) that rotates the unit main body 61 in a direction around an axis parallel to the vertical direction by rotating the output shaft.

Because of having the above structure, the first heating position adjustment unit 64 is as shown in FIG. Direction of heating position. In addition, it may be set so that the facing heating part 63-1 and the heating part 63-3 can be moved radially inward or radially outward at the same time, and the facing heating part 63-2 and the heating part 63-4 can be simultaneously moved. to move radially inward or radially outward. In addition, as shown in FIG. 7 , the rotating part 65 can move all the heating parts 63 in the circumferential direction along the annular region 108 of the expanding sheet 106 at the same time.

As shown in FIG. 2 , the control unit 70 controls the above-mentioned components of the dividing device 10 , that is, the sheet expanding unit 50 and the heating unit 60 , so that the dividing device 10 performs processing operations on the workpiece 101 . In addition, the control unit 70 is an electronic computer. The control unit 70 is connected to a display unit (not shown) constituted by a liquid crystal display device or the like that displays the status of processing operations or a screen, and an input unit (not shown) for an operator to register, for example, processing content information. The input unit is composed of at least one of external input devices such as a touch panel and a keyboard provided on the display unit.

As shown in FIG. 6 , the control unit 70 is electrically connected to each of the first heating position adjustment parts 64 and the rotation part 65 . The control unit 70 controls the heating position of each heating unit 63 in the radial direction of the workpiece 101 through each first heating position adjustment unit 64 . The control unit 70 controls the heating position of each heating portion 63 in the circumferential direction of the workpiece 101 through the rotating portion 65 .

Next, a method for dividing the workpiece 101 as an example of the operation of the dividing device 10 according to the first embodiment will be described. FIG. 8 is a flowchart of a method for dividing a workpiece 101 as an example of the operation of the dividing device 10 according to the first embodiment. Hereinafter, the method of dividing the workpiece 101 is simply referred to as a method of dividing. The division method of Embodiment 1 is to expand the expansion piece 106 of the workpiece unit 100 shown in FIG. 105 method. The dividing method of Embodiment 1 is as shown in FIG. 8 , and includes a frame fixing step ST1 , a sheet expanding step ST2 , a sucking and holding step ST3 , and a heating step ST4 .

(Frame Fixing Step) The frame fixing step ST1 is a step of placing the workpiece 101 of the workpiece unit 100 on the holding surface 31 of the holding table 30 through the expansion piece 106 and fixing the ring frame 107 with the frame fixing portion 40 .

In the frame fixing step ST1, the control unit 70 positions the frame pressing plate 42 of the frame fixing part 40 at the evacuation position, and in the state where the piston rod 48-1 of the air cylinder 48 is shrunk, the transfer unit 80 moves the frame along the planned division. The workpiece unit 100 in which the modified layer 109 is formed on the line 103 is conveyed to the upper side of the holding table 30 . In the frame fixing step ST1, the control unit 70 places the ring-shaped frame 107 of the workpiece unit 100 on the upper surface 44 of the frame mounting plate 41 through the conveying unit 80, and the back surface of the workpiece 101 and the holding surface are connected through the expansion piece 106. 31 are opposite in the vertical direction.

In the frame fixing step ST1, in Embodiment 1, the control unit 70 uses the transfer unit 80 to align the A direction of the workpiece unit 100 in the X direction and the B direction of the workpiece unit 100 in the Y direction to place the Workpiece unit 100.

In the frame fixing step ST1, the control unit 70 brings the center guides 46 of the frame fixing part 40 close to each other, positions the workpiece 101 of the workpiece unit 100, and positions the frame pressing plate 42 above the frame mounting plate 41, and the air cylinder The piston rod 45-1 of 45 is extended to raise the frame mounting plate 41. In the frame fixing step ST1 , the control unit 70 clamps the ring-shaped frame 107 of the workpiece unit 100 between the frame mounting plate 41 and the frame pressing plate 42 to fix as shown in FIG. 3 . In the frame fixing step ST1, when the control unit 70 fixes the ring frame 107 of the work unit 100, it proceeds to the sheet expanding step ST2.

(Sheet Expanding Step) In the sheet expanding step ST2, after the frame fixing step ST1 is performed, the holding table 30 and the frame fixing part 40 are relatively moved in the axial direction perpendicular to the front surface 102 of the workpiece 101, and the outer periphery of the workpiece 101 is expanded. The step of expanding the annular region 108 of the sheet 106 between the outer edge and the inner edge of the inner periphery of the annular frame 107 .

In the sheet expanding step ST2, the control unit 70 extends the piston rods 54-1 and 55-1 of the air cylinders 54 and 55 of the lifting unit 52 of the sheet expanding unit 50 to integrally lift the push-up member 51 and the holding table 30. Thus, the frame mounting plate 41 and the holding table 30 are positioned adjacent to the upper surface 44 on the same plane as the roller member 53 mounted on the upper end of the push-up member 51 and the holding surface 31, and the rollers of the push-up member 51 The shaft member 53 abuts against the expansion piece 106 . In the sheet expanding step ST2, the control unit 70 thus further extends the piston rods 54-1 and 55-1 of the air cylinders 54 and 55 of the lifting unit 52 of the sheet expanding unit 50 so that the push-up member 51 and the holding table 30 are integrated. to rise. Then, since the expansion piece 106 abuts on the roller member 53 mounted on the upper end of the push-up member 51, the expansion piece 106 is expanded in the planar direction.

In the sheet expanding step ST2 , due to the expansion of the expanding sheet 106 , tension acts radially on the expanding sheet 106 . In this way, when the pulling force radially acts on the expansion sheet 106 pasted on the back of the workpiece 101, the workpiece 101 is formed with the modified layer 109 along the planned dividing line 103, and the modified layer 109 is used as the starting point to be moved along the At the same time as the division line 103 divides, the element wafers 105 expand in the A direction and the B direction (see FIG. 1 ), respectively, and each space 113 is formed between the element wafers 105 . In the sheet expanding step ST2, the respective spaces 113 are arranged and formed in the A direction and the B direction along the dividing line 103 as shown in FIG. 1 , so that the workpiece 101 is divided into individual element wafers 105 .

In addition, after the sheet expanding step ST2 , as shown in FIG. 4 , the expanding sheet 106 has a cross section of the annular region 108 that is linear from the lower surface of the annular frame 107 toward the upper surface of the roller member 53 . In the sheet expanding step ST2, after the control unit 70 integrally raises the push-up member 51 and the holding table 30, the process proceeds to the sucking and holding step ST3.

(Suction and holding step) The suction and holding step ST3 is a step of sucking and holding the workpiece 101 on the holding surface 31 of the holding table 30 through the expansion sheet 106 and maintaining the expansion of the expansion sheet 106 after the sheet expansion step ST2. In the suction and holding step ST3, the control unit 70 drives the vacuum suction source 34, and the suction portion 33 is sucked by the vacuum suction source 34 to suction and hold the back side of the workpiece 101 on the holding surface 31 through the expansion sheet 106, and hold the element wafer 105. The interval between 113.

In the sucking and holding step ST3, the control unit 70 makes the piston rods 54 of the air cylinders 54 and 55 of the lifting unit 52 of the sheet expanding unit 50 - 1 and 55-1 shrink, so that the push-up member 51 and the holding table 30 are integrally lowered, so that the holding surface 31 of the holding table 30 and the roller member 53 installed on the upper end of the push-up member 51 move to the position on the frame mounting plate. 41 to the adjacent position on the same plane as the upper surface 44. In the suction and holding step ST3, the control unit 70 lowers the push-up member 51 and the holding table 30 integrally to the adjacent position, whereby the annular region 108 of the expansion piece 106 is relaxed and deformed to have an ellipse toward the vertical upper side. The slack portion 108-2 has a convex shape (see Fig. 9 and Fig. 11). In the suction and holding step ST3, when the control unit 70 lowers the push-up member 51 and the holding table 30 integrally to the directly adjacent position, then the back side of the workpiece 101 is sucked and held on the holding surface 31 through the expansion piece 106. Next, proceed to heating step ST4.

(Heating Step) FIG. 9 is a cross-sectional view showing the main part of the dividing apparatus 10 when the heating step ST4 of FIG. 8 is performed. FIG. 10 is a plan view showing the heating unit 60 for heating in the heating step ST4 of FIG. 8 . FIG. 11 is an enlarged cross-sectional view showing portion XI in FIG. 9 .

In the heating step ST4, after the suction and holding step ST3 is carried out, the back side of the workpiece 101 is sucked and held on the holding surface 31 through the expansion sheet 106, and the annular region 108 of the expanded expansion sheet 106 is heated to The step of shrinking the slack part 108-2 (refer to FIG. 9 and FIG. 11 ) is in the heating step ST4. First, the control unit 70 applies a voltage to the heating part 63 of the heating unit 60, and heats to a predetermined temperature to emit infrared rays. , and the heating unit 60 is lowered by a moving unit not shown, and the heating unit 63 is brought close to the annular region 108 as shown in FIG. 9 .

Work unit 100 passes through sheet expanding step ST2 and suction holding step ST3, and as shown in FIG. In the workpiece unit 100 , the spaces 113 are grooves extending in the A direction and the B direction between the element wafers 105 .

In the sheet expanding step ST2, the expanded sheet 106 of the workpiece unit 100 is expanded more at the B direction than in the A direction. As a result, the amount of slack in the annular region 108 generated after the suction and holding step ST3 is larger in the B direction than in the A direction. Therefore, the convex top portion 108-1 whose height in the vertical direction of the convex portion of the annular region 108 becomes maximum becomes an elliptical shape extending in the B direction as shown in FIG. 1 . That is, the convex top 108-1 is located outside the central part in the radial direction of the annular region 108 in the long-axis region 115, which is the region in the long-axis direction of the oval shape in the slack portion 108-2, The short-axis region 116 is located on the inner side of the central portion in the radial direction of the annular region 108 in the short-axis region 116, which is a region in the short-axis direction of the ellipse in the slack portion 108-2. Furthermore, the boundary lines 117 and 118 defining the long-axis region 115 and the short-axis region 116 are appropriately determined according to the magnitude of tension applied to the expansion sheet 106 and the like.

In the heating step ST4, after the heating unit 60 is lowered so that the heating portion 63 is close to the annular region 108, the control unit 70 rotates the unit body 61 of the heating unit 60 in the circumferential direction as shown in FIG. 10 by using the rotating portion 65. The range of 90 degrees is used to make the heating parts 63-1, 63-2, 63-3, and 63-4 move in the circumferential direction in the areas 67-1, 67-2, 67-3, and 67-4, respectively. In addition, in the heating step ST4, the control unit 70 uses the rotating part 65 to rotate the unit body 61 only 90 degrees in the circumferential direction in one direction, so that each heating part 63 moves in a single direction in the circumferential direction in each area 67, Alternatively, the unit body 61 is rotated back and forth by 90 degrees in the circumferential direction, that is, swings, so as to make each heating part 63 reciprocate in the circumferential direction in each area 67 . Here, since the A direction of the workpiece unit 100 is aligned in the X direction and the B direction of the workpiece unit 100 is aligned in the Y direction by the frame fixing step ST1, the regions 67-1 and 67-3 are perpendicular to the minor axis region 116. They overlap in the upper direction, and the region 67 - 2 and the region 67 - 4 overlap in the vertical direction of the major axis region 115 . Thus, in the heating step ST4, the control unit 70 heats the short-axis region 116 with the heating part 63-1 and the heating part 63-3 by reciprocating in the circumferential direction in this way, and heats the short-axis region 116 with the heating part 63-2 and the heating part 63-2. The heating unit 63 - 4 heats the long-axis region 115 .

In the heating step ST4, the control unit 70 uses the first heating position adjustment parts 64-2 and 64-4, as shown in FIG. 10 and FIG. The position of 63 - 4 is shifted outward in the radial direction so as to approach the vertical upper side of the convex top 108 - 1 located outside the radial center of the annular region 108 in the major axis region 115 . Moreover, in the heating step ST4, the control unit 70 uses the first heating position adjustment parts 64-1 and 64-3, as shown in FIG. 10 and FIG. 11(B), to make the heating part 63- The positions of 1 and 63-3 are shifted inward in the radial direction, thereby approaching the vertical upper side of the convex top 108-1 located on the inner side than the central portion of the ring-shaped region 108 in the short-axis region 116 in the radial direction. Thereby, in the heating step ST4, the control unit 70 efficiently heats the convex top 108-1 in the short-axis region 116 with the heating parts 63-1 and 63-3, and efficiently heats the convex top 108-1 in the short-axis region 116 with the heating parts 63-2 and 63-4. The convex top 108 - 1 in the major axis region 115 is efficiently heated, thereby shrinking the slack portion 108 - 2 evenly and efficiently between the major axis region 115 and the minor axis region 116 .

In the heating step ST4, since four holding parts 62 and heating parts 63 are respectively provided, one of the two pairs of holding parts 62 and heating parts 63 facing each other in pairs toward the center direction of the unit body 61 can be used for the long-axis region. 115, and the other of the two pairs of holding parts 62 and heating part 63 is used for heating the short-axis region 116, so that the slack part 108-2 having the elliptical convex top 108-1 can be heated evenly and efficiently.

In the heating step ST4, when the slack portion 108-2 is sufficiently contracted and deformed so that the height of the convex top portion 108-1 becomes 0 and becomes flat, the control unit 70 stops the heating of the vacuum suction source 34 and the heating unit 63, and the The heating unit 60 rises, and the fixing of the ring frame 107 of the frame fixing part 40 is released. Therefore, even if the slack portion 108 - 2 of the workpiece unit 100 shrinks and the attraction of the suction portion 33 of the holding table 30 is released, the gap 113 between the element wafers 105 can be accurately maintained.

In the heating step ST4, in the case of dividing the workpieces 101 of the same product in the same batch, the control unit 70 uses the position control program based on the control information of the position of the heating part 63 when implementing the division method for the first workpiece 101, so as to The position of the heating part 63 is controlled.

In addition, in Embodiment 1, the A direction of the direction in which tension is applied to the expansion sheet 106 is aligned with the position direction of the planned dividing line 103, and in the frame fixing step ST1, the A direction of the workpiece unit 100 and the X direction, and the direction of the workpiece unit 100 are aligned. The B direction and the Y direction are respectively aligned, but the present invention is not limited thereto. In the present invention, at least the relationship between the direction A and the direction along which the planned dividing line 103 is known is known, and when the ring-shaped frame 107 is fixed by the frame fixing part 40 in the frame fixing step ST1, as long as the direction A can be known It doesn’t matter which direction it is facing. In this case, the long-axis region 115 and the short-axis region 116 can be determined based on the A direction and the direction along which the planned dividing line 103 follows, and the long-axis region 115 and short-axis region can be determined based on this. 116 appropriately performs the heating step ST4.

As described above, even in the case where the expansion sheet 106 relaxes differently due to the winding state of the expansion sheet 106, the dividing device 10 according to Embodiment 1 can change the radial direction according to the region. The heating position is to properly heat the slack portion 108-2 formed by the expansion sheet 106 being slack. Therefore, the dividing apparatus 10 according to Embodiment 1 can accurately maintain the space 113 between the element wafers 105 expanded by the expanding sheet 106 , and can suppress the friction between the divided element wafers 105 .

(Embodiment 2) Fig. 12 is a functional block diagram of heating unit 60-2 of dividing device 10-2 according to Embodiment 2. The dividing apparatus 10-2 of Embodiment 2 is what changed the heating unit 60 into the heating unit 60-2 in the dividing apparatus 10 of Embodiment 1. As shown in FIG. In the description of the dividing device 10 - 2 according to the second embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals and their descriptions are omitted.

In the heating unit 60-2 of Embodiment 2, in the heating unit 60 of Embodiment 1, the first heating position adjustment parts 64-1, 64-2, 64-3, and 64-4 are respectively changed into second heating position adjustment parts. 66-1, 66-2, 66-3 and 66-4. As shown in FIG. 12 , the heating unit 60 - 2 includes a plurality of second heating position adjustment parts 66 - 1 , 66 - 2 , 66 - 3 , and 66 - 4 and a rotating part 65 . A plurality of second heating position adjustment parts 66-1, 66-2, 66-3 and 66-4 are respectively connected to the heating parts 63-1, 63-2, 63-3 and 63-4, and are connected to the expansion sheet 106 moves the positions of the heating units 63-1, 63-2, 63-3, and 63-4 in the far-near direction. In the following description, when not distinguishing the 2nd heating position adjustment part 66-1, 66-2, 66-3, and 66-4, it describes as the 2nd heating position adjustment part 66 as appropriate. The second heating position adjustment unit 66 is configured to individually move the position of the heating unit 63 in the direction of distance from the expansion piece 106 , and includes, for example, a belt pulley provided for the heating unit 63 and a motor for driving the belt pulley. In addition, the 2nd heating position adjustment part 66 is not limited to this structure, What has an air cylinder or a ball screw may be sufficient as it.

Fig. 13 is a sectional view of a heating unit 60-2 according to the second embodiment. The cross-sectional view in FIG. 13 is a cross-sectional view on the same cross-sectional plane as the cross-sectional view in FIG. 7 of the first embodiment. The second heating position adjustment unit 66 is, as shown in FIG. 13 , adjusting the distance between the heating unit 63 and the workpiece 101 by individually moving the position of the heating unit 63 in the far-near direction with the expansion sheet 106 . The temperature at which the workpiece 101 is heated by the heating unit 63 . The control unit 70 controls the heating temperature of each heating unit 63 on the workpiece 101 through each second heating position adjustment unit 66 . In addition, it may be set so that the heating part 63-1 and the heating part 63-3 which face each other can simultaneously move in the far-near direction with the expansion sheet 106, and the heating part 63-2 and the heating part 63-4 which face to face can be moved simultaneously. Simultaneously move in the far-near direction with the expansion sheet 106 .

Next, a method for dividing the workpiece 101 as an example of the operation of the dividing device 10 - 2 according to the second embodiment will be described. The division method of Embodiment 2 is what changed the heating step ST4 in the division method of Embodiment 1.

As described above, in the workpiece unit 100 , the amount of slack in the annular region 108 generated after the suction and holding step ST3 is larger in the B direction than in the A direction. Accordingly, the amount of bulge of the slack portion 108 - 2 in the major axis region 115 is larger than that of the slack portion 108 - 2 in the minor axis region 116 . Here, the uplift amount of the slack portion 108-2 is represented by, for example, the uplift volume per unit area in the slack portion 108-2. Therefore, even after the suction-holding state of the workpiece unit 100 is released in the suction-holding step ST3, in order to correctly maintain the gap 113 formed in the sheet expanding step ST2, the long-axis region 115 is heated at a higher temperature than the short-axis region 116. It is necessary to make it shrink more, wherein the long-axis region 115 is in the B direction with a large amount of relaxation in the slack portion 108-2, and the short-axis region 116 is in the A direction with a small amount of slack in the slack portion 108-2. .

Fig. 14 is an enlarged cross-sectional view showing the main parts of the workpiece unit 100 and the heating unit 60-2 in the heating step ST4 of the second embodiment. The cross-sectional view in FIG. 14 is an enlarged cross-sectional view of the same area as the cross-sectional view in FIG. 11 of the first embodiment. In the heating step ST4 of Embodiment 2, the control unit 70 makes the heating parts 63-1, 63-2, 63-3, and 63-4 emit infrared rays of the same intensity, and the second heating position adjustment part 66-1 and 66-3, as shown in FIG. 14(B), adjust the positions of the ends of the heating parts 63-1 and 63-3 in the vertical direction in accordance with the bulge of the slack portion 108-2 in the short-axis region 116, and by The second heating position adjustment parts 66-2 and 66-4, as shown in FIG. 14(A), adjust the vertical direction of the heating parts 63-2 and 63-4 in accordance with the bulge of the loose part 108-2 in the long axis region 115. side end position. In the heating step ST4 of Embodiment 2, the control unit 70 adjusts the phase of the heating parts 63-2 and 63-4 because the swelling amount of the slack portion 108-2 is larger in the major axis region 115 than in the minor axis region 116. It is closer to the expansion sheet 106 than the heating parts 63-1 and 63-3. Thereby, in the heating step ST4 of Embodiment 2, the control unit 70 can heat the short-axis region 116 at the temperature T2 with the heating units 63-1 and 63-3, and can heat the short-axis region 116 at the temperature T2 with the heating units 63-2 and 63-4. The long-axis region 115 is heated at a temperature T1 higher than the temperature T2, so that the long-axis region 115 shrinks more than the short-axis region 116 .

In the heating step ST4 of Embodiment 2, the swelling amount of the slack portion 108-2 is gradually reduced by heating to shrink the slack portion 108-2. Therefore, in the heating step ST4 of Embodiment 2, the control unit 70 uses the second heating position adjustment unit 66 to adjust as needed according to the amount of swelling of the slack portion 108-2 as shown in FIGS. 14(A) and (B). The heating temperature is kept constant regardless of the positions in the far-near direction of the heating portion 63 and the expansion sheet 106 , regardless of the elapsed time in the heating step ST4 of the second embodiment. Furthermore, in the heating step ST4 of Embodiment 2, the control unit 70 maintains the heating temperature of the long-axis region 115 at the temperature T1 and the heating temperature of the short-axis region 116 at the temperature T2, respectively.

In the heating step ST4 of Embodiment 2, the control unit 70 uses the second heating position adjustment unit 66 to adjust the vertically lower end position of the heating unit 63 using the slack portion 108-2 as a reference. The present invention is not limited thereto. For example, when the raised shape of the slack portion 108-2 is gentle and smooth, the heights H1 and H2 of the convex top 108-1 in the major axis region 115 and the minor axis region 116, respectively, can also be , adjust the vertical distances h1 and h2 between the convex top 108 - 1 and the vertically lower end of the heating portion 63 .

In the heating step ST4, since four holding parts 62 and heating parts 63 are respectively provided, one of the two pairs of holding parts 62 and heating parts 63 facing each other in pairs toward the center direction of the unit body 61 can be used for the long-axis region. 115, and the other of the two pairs of gripping parts 62 and heating part 63 is used for heating the short-axis region 116, so the loose annular region 108 can be heated stably and in a balanced manner.

As described above, the dividing device 10-2 according to Embodiment 2 adjusts the position in the far-near direction between the heating unit 63 and the expanding sheet 106 according to the area of the loosened portion 108-2 formed by the expanding sheet 106 being relaxed. Each region can be adjusted to a different heating temperature, so that the slack part 108-2 can be properly heated. Therefore, like the dividing apparatus 10 of the first embodiment, the dividing apparatus 10 - 2 of the second embodiment can accurately maintain the interval 113 between the element wafers 105 expanded by the expanding sheet 106 and can suppress the separation of the element wafers after dividing. 105 rub against each other.

(Embodiment 3) Fig. 15 is a functional block diagram of a heating unit 60-3 of a dividing device 10-3 according to Embodiment 3. The dividing apparatus 10-3 of Embodiment 3 is what changed the heating unit 60-2 into the heating unit 60-3 in the dividing apparatus 10-2 of Embodiment 2. In the description of the dividing device 10 - 3 of the third embodiment, the same parts as those of the second embodiment are denoted by the same reference numerals, and descriptions thereof are omitted.

In the heating unit 60-3 of the third embodiment, in the heating unit 60-2 of the second embodiment, the second heating position adjustment parts 66-1, 66-2, 66-3, and 66-4 are respectively changed into heating temperature adjustment parts. 68-1, 68-2, 68-3 and 68-4. As shown in FIG. 15 , the heating unit 60 - 3 includes a plurality of heating temperature adjustment units 68 - 1 , 68 - 2 , 68 - 3 , and 68 - 4 and a rotating unit 65 . A plurality of heating temperature adjustment parts 68-1, 68-2, 68-3 and 68-4 are respectively connected to the heating parts 63-1, 63-2, 63-3 and 63-4, and adjust the heating part 63-1 , 63-2, 63-3 and 63-4 heating temperature. In the following description, when the heating temperature adjustment parts 68-1, 68-2, 68-3, and 68-4 are not distinguished, it is described as the heating temperature adjustment part 68 as appropriate. The heating temperature adjustment unit 68 is configured to individually change the heating temperature of the heating unit 63 , for example, includes an electronic circuit that changes the average voltage of the AC voltage supplied to the heating unit 63 by pulse amplitude modulation. in addition. The heating temperature adjustment unit 68 may include an electronic circuit for changing the applied voltage for controlling the heat absorption and heat generation of the Peltier element when the heating unit 63 has a Peltier element.

Next, a method for dividing the workpiece 101, which is an example of the operation of the dividing device 10-3 according to the third embodiment, will be described. The division method of Embodiment 3 is what changed the heating step ST4 in the division method of Embodiment 2. In the heating step ST4 of Embodiment 3, in the heating step ST4 of Embodiment 2, the control unit 70 moves the position of the heating part 63 in the far-near direction from the expansion sheet 106 through the second heating position adjustment part 66 to adjust the heating part. 63 and the workpiece 101 , instead of adjusting the heating temperature of the workpiece 101 by the heating unit 63 , the heating temperature of the heating unit 63 is adjusted through the heating temperature adjusting unit 68 .

As described above, the dividing device 10-3 of the third embodiment is based on the region of the loose part 108-2 formed by the expansion piece 106 being relaxed, and the heating temperature of the heating part 63 is adjusted by the heating temperature adjustment part 68, so that each The zones are adjusted to different heating temperatures, whereby the relaxed portion 108-2 can be properly heated. Therefore, like the dividing apparatus 10-2 of the second embodiment, the dividing apparatus 10-3 of the third embodiment can accurately maintain the interval 113 between the element wafers 105 expanded by the expanding sheet 106, and can suppress the gap between the element wafers 105 after dividing. The element wafers 105 rub against each other.

(Modification) FIG. 16 is a plan view showing a workpiece unit 200 as a modification of the division target of the division device 10 . A workpiece unit 200 of a modified example will be described based on the drawings. The splitting device 10 of the workpiece unit 200 according to the splitting modification has the same configuration as the splitting device 10 of the first embodiment. In the description of the modified example, the same parts as those in the first embodiment are given the same reference numerals and their descriptions are omitted.

The workpiece unit 200 is as shown in FIG. 16 , has a workpiece 201 , an expansion sheet 206 attached to the back side of the front surface 202 of the workpiece 201 , and an annular frame 207 attached to the outer peripheral portion of the extension sheet 206 . The workpiece 201 is pasted on the central portion of the expansion sheet 206 . The expansion piece 206 forms an annular region 208 between the inner edge of the inner periphery of the annular frame 207 and the outer edge of the outer periphery of the workpiece 201 .

The workpiece 201 is the same wafer as the workpiece 101 . As shown in FIG. 16, the workpiece 201 is formed in each area divided by the first planned dividing line 203 and the second planned dividing line 204 respectively extending on the front surface 202 in the mutually intersecting C direction and D direction. A rectangular device chip 205 with a long side in the C direction and a short side extending in the D direction. The pitch of the first planned division lines 203 is determined by the length of the short side of the element wafer 205 . The pitch of the second planned division lines 204 is determined by the length of the long side of the element wafer 205 . Therefore, the pitch of the first planned division lines 203 is smaller than the pitch of the second planned division lines 204 . On the workpiece 201 , the same modified layer 209 as the modified layer 109 formed on the workpiece 101 is formed along the first planned dividing line 203 and the second planned dividing line 204 .

The expansion sheet 206 has the same properties as the expansion sheet 106 , and the direction in which tension is applied is arranged to face the long side direction of the element wafer 205 , that is, the direction C in FIG. 16 .

Next, a method for dividing the workpiece 201 as an example of the operation of the dividing device 10 according to the modified example will be described. The division method of the modified example is one in which the workpiece 101 is changed to the workpiece 201 in the division method of the first embodiment. In the sheet expanding step ST2, since the modified layer 209 is formed along the first planned dividing line 203 and the second planned dividing line 204, the workpiece 201 is moved along the first planned dividing line with the modified layer 209 as a starting point. 203 and the second dividing line 204 divide, the element wafers 205 expand in the C direction and the D direction (refer to FIG. 16 ), respectively, and gaps are formed between the element wafers 205 . In the sheet expanding step ST2, as shown in FIG. 16 , the intervals are arranged in the C direction along the first planned dividing line 203 and arranged in the D direction along the second planned dividing line 204, so that the workpiece 201 is Divide into individual element wafers 205 .

In the workpiece unit 200, because the long side direction of the element wafer 205 faces the C direction, the length fixed by the element wafer 205 without expanding and shrinking the expansion piece 206 in the C direction is larger than that in the D direction without expanding the expansion piece 206. The length fixed by the element wafer 205 is long. Therefore, in the workpiece unit 200, the expansion sheet 206 is expanded more in the D direction than in the C direction in the sheet expansion step ST2, whereby the slack in the ring-shaped region 208 generated after the execution of the suction and holding step ST3 is absorbed and held. The amount will become larger than the C direction. In addition, in the workpiece unit 200, since the expansion sheet 206 is wound and the direction of the residual stress in the tensile direction is toward the direction C, the amount of slack in the ring-shaped region 208 generated after the suction and holding step ST3 is performed, D The magnitude of the direction will become larger than that of the C direction.

Accordingly, the convex top portion 208-1 in which the height in the vertical direction of the convex portion of the annular region 208 is maximized has an elliptical shape extending in the D direction as shown in FIG. 16 . That is, the convex top 208-1 is located outside the central part in the radial direction of the annular region 208 in the long-axis region 215, which is the region in the long-axis direction of the ellipse in the slack portion 208-2, The minor axis region 216 is located further inside than the central portion in the radial direction of the annular region 208 in the minor axis region 216, which is a region in the minor axis direction of the oval shape in the slack portion 208-2. Due to the shape and size of the element wafer 205, the elliptical shape of the convex top 208-1 has a larger major axis/short axis ratio than the elliptical shape of the convex top 108-1 of the first embodiment. Furthermore, the boundary lines 217 and 218 determining the major axis region 215 and the minor axis region 216 are determined according to the tension applied on the expansion sheet 206 and the shape and size of the device wafer 205 .

The heating step ST4 of the modified example is the same as the heating step ST4 of the first embodiment. The control unit 70 adjusts the heating part 63 in the radial direction of the workpiece 201 by the first heating position adjustment part 64 according to the position of the convex top part 208-1. location to execute.

As described above, even if the splitting device 10 of the modified example causes the expansion sheet 206 to be stretched differently due to the shape and size of the element wafer 205, by changing the heating position in the radial direction according to the area, The formed slack portion 208-2 is loosened by appropriately heating the expansion sheet 206. Therefore, like the dividing apparatus 10 of the first embodiment, the dividing apparatus 10 of the modified example can accurately maintain the respective intervals between the element wafers 205 expanded by the expanding sheet 206, and can suppress the friction between the divided element wafers 205. .

In addition, also in the dividing apparatus 10 - 2 of the second embodiment and the dividing apparatus 10 - 3 of the third embodiment, the object of dividing can be changed from the workpiece 101 to the workpiece 201 as in the above modification. Even in these cases, as in Embodiments 2 and 3, the slack portion 208-2 can be properly heated, and the intervals between the element wafers 205 formed by expanding the expansion sheet 206 can be accurately maintained, and It is possible to prevent the divided element wafers 205 from rubbing against each other.

(Embodiment 4) Fig. 17 is a functional block diagram of heating unit 60-4 of dividing device 10-4 according to Embodiment 4. The dividing device 10 - 4 of the fourth embodiment is a combination of the dividing device 10 of the first embodiment, the dividing device 10 - 2 of the second embodiment, and the dividing device 10 - 3 of the third embodiment. Specifically, the division apparatus 10-4 of Embodiment 4 is equipped with the heating unit 60-4 which combined the heating unit 60 of Embodiment 1, the heating unit 60-2 of Embodiment 2, and the heating unit 60-3 of Embodiment 3. In the description of the dividing device 10 - 4 of the fourth embodiment, the same parts as those in the first to third embodiments and the modified example are denoted by the same reference numerals and descriptions thereof are omitted.

As shown in FIG. 17 , the heating unit 60 - 4 includes a plurality of heating adjustment units 69 - 1 , 69 - 2 , 69 - 3 , and 69 - 4 and a rotating unit 65 . A plurality of heating adjustment parts 69-1, 69-2, 69-3 and 69-4 are respectively connected to the heating parts 63-1, 63-2, 63-3 and 63-4. In the following description, when not distinguishing between the heating adjustment parts 69-1, 69-2, 69-3, and 69-4, it will be described as the heating adjustment part 69 as appropriate. The heating adjustment unit 69 includes a first heating position adjustment unit 64 , a second heating position adjustment unit 66 , and a heating temperature adjustment unit 68 .

Because of the structure as above, the heating adjustment unit 69 makes the position of the heating unit 63 individually, and adjusts the heating position of the heating unit 63 in the radial direction of the workpiece 101 by moving in the radial direction of the workpiece 101. Move in the far-near direction with the expansion piece 106 to adjust the distance between the heating part 63 and the workpiece 101 , and adjust the heating temperature of the workpiece 101 by the heating part 63 by adjusting the heating temperature of the heating part 63 .

As described above, the dividing device 10 - 4 according to Embodiment 4 can exhibit various functions and effects brought about by Embodiments 1 to 3 and the modified examples at the same time.

Furthermore, according to the dividing apparatuses of Embodiment 1 and Embodiment 2 described above, the following workpiece dividing methods can be obtained. (Additional Note 1) A method of dividing a workpiece by expanding an expansion piece of a workpiece unit, the workpiece unit is composed of a plate-shaped workpiece with a starting point for division formed along a planned division line, the expansion piece on which the workpiece is pasted, and a pasted Composed of an annular frame with the expansion sheet, the workpiece division method includes: a frame fixing step, fixing the annular frame of the workpiece unit; a sheet expansion step, the The annular region of the expansion sheet pushes and expands the expansion sheet in a direction perpendicular to the front surface of the workpiece, and breaks the workpiece from the splitting starting point; and a heating step of heating the expanded annular area of the expansion sheet region, and shrink the slack part of the expansion sheet; wherein, in the heating step, adjust the radial direction of the workpiece or the direction of the distance from the expansion sheet to adjust a plurality of The position of the heating part. (Supplementary Note 2) The workpiece dividing method according to Supplementary Note 1, wherein in the heating step, the plurality of heating parts are adjusted to different temperatures, respectively.

The workpiece dividing method described above is the same as the dividing device of the embodiment, and even when either the relaxation method or the stretching method of the expansion sheet is different, the relaxed portion of the expansion sheet can be appropriately heated. Therefore, the above-mentioned workpiece dividing method can accurately maintain the respective intervals between the element wafers formed by the expansion of the expansion piece, and can suppress the friction between the divided element wafers.

In addition, this invention is not limited to the said embodiment. That is, various modifications can be made within the scope not departing from the spirit of the present invention.

10, 10-2, 10-3, 10-4‧‧‧Splitting device 20‧‧‧chamber 30‧‧holding platform 31‧‧‧holding surface 32‧‧‧frame 33‧‧‧adsorption part 34‧ ‧‧Vacuum suction source 40‧‧‧Frame fixing part 41‧‧‧Frame mounting plate 42‧‧‧Frame pressing plate 43, 47‧‧‧Opening 44‧‧‧Upper surface 45, 48, 54, 55‧‧‧ Cylinder 45-1, 48-1, 54-1, 55-1‧‧‧piston rod 46‧‧‧center guide 49‧‧‧long hole 50‧‧‧piece expansion unit 51‧‧‧push member 52 ‧‧‧Elevating unit 53‧‧‧Roller members 60, 60-2, 60-3, 60-4‧‧‧Heating unit 61‧‧‧Unit body 62, 62-1, 62-2, 62-3, 62-4‧‧‧Gripping part 63, 63-1, 63-2, 63-3, 63-4‧‧‧Heating part 64, 64-1, 64-2, 64-3, 64-4‧‧‧ 1st heating position adjustment part 65‧‧‧rotation part 66, 66-1, 66-2, 66-3, 66-4‧‧‧second heating position adjustment part 67-1, 67-2, 67-3, 67-4‧‧‧Areas 68, 68-1, 68-2, 68-3, 68-4‧‧‧Heating temperature adjustment unit 69, 69-1, 69-2, 69-3, 69-4‧‧ ‧Heating adjustment part 70‧‧‧Control unit 80‧‧‧Conveying unit 100, 200‧‧‧Workpiece unit 101, 201‧‧‧Workpiece 102, 202‧‧‧Front side 103‧‧‧Scheduled dividing line 105, 205‧‧ ‧Element chip 106, 206‧‧‧expansion piece 107, 207‧‧‧ring frame 108, 208‧‧‧ring area 108-1, 208-1‧‧‧convex top 108-2, 208-2‧‧ ‧Loose part 109, 209‧‧‧modified layer 113,213,214‧‧‧interval 115,215‧‧‧major axis area 116,216‧‧‧short axis area 117,118,217,218‧‧‧boundary Line 203‧‧‧The first planned dividing line 204‧‧‧The second planned dividing line

FIG. 1 is a plan view showing an example of a workpiece unit to be divided by the dividing device according to the first embodiment. FIG. 2 is a perspective view showing a configuration example of a dividing device according to Embodiment 1. FIG. Fig. 3 is a cross-sectional view of the section III-III of the sheet expansion unit of Fig. 2 . Fig. 4 is a cross-sectional view at section IV-IV of the sheet expansion unit of Fig. 2 . FIG. 5 is a top view of the heating unit in FIG. 2 . FIG. 6 is a functional block diagram of the heating unit in FIG. 5 . FIG. 7 is a cross-sectional view at section VII-VII of the heating unit of FIG. 5 . 8 is a flowchart of a workpiece dividing method as an example of the operation of the dividing device according to the first embodiment. Fig. 9 is a cross-sectional view showing the main part of the dividing device when the heating step of Fig. 8 is performed. Fig. 10 is a plan view showing a heating unit for heating in the heating step of Fig. 8 . FIG. 11 is an enlarged cross-sectional view of portion XI in FIG. 9 . FIG. 12 is a functional block diagram of a heating unit of a dividing device according to Embodiment 2. FIG. Fig. 13 is a sectional view of a heating unit according to Embodiment 2. 14 is an enlarged cross-sectional view showing a main part of a workpiece unit and a heating unit in a heating step of Embodiment 2. FIG. FIG. 15 is a functional block diagram of a heating unit of a dividing device according to Embodiment 3. FIG. Fig. 16 is a plan view showing a modified example of a workpiece unit to be divided by the dividing device. FIG. 17 is a functional block diagram of a heating unit of a dividing device according to Embodiment 4. FIG.

10‧‧‧Splitting device

20‧‧‧chamber

30‧‧‧Holding table

31‧‧‧Retaining surface

32‧‧‧frame

33‧‧‧Adsorption part

34‧‧‧Vacuum suction source

40‧‧‧Frame fixing part

41‧‧‧Frame mounting plate

42‧‧‧Frame pressure plate

43, 47‧‧‧opening

44‧‧‧upper surface

45, 48‧‧‧Cylinder

45-1, 48-1‧‧‧piston rod

46‧‧‧center guide

49‧‧‧long hole

50‧‧‧expansion unit

60‧‧‧heating unit

61‧‧‧unit body

62-1, 62-2, 62-3, 62-4‧‧‧Control Department

63-1, 63-2, 63-3, 63-4‧‧‧heating part

70‧‧‧control unit

80‧‧‧Conveyor unit

100‧‧‧work unit

Claims (3)

A splitting device, which expands the expansion piece of the workpiece unit and divides the workpiece. The workpiece unit is composed of a plate-shaped workpiece with a starting point of division formed along the planned division line, the expansion piece pasted with the workpiece, and the Composed of a ring-shaped frame, the dividing device has: a frame fixing part, which fixes the ring-shaped frame of the workpiece unit; a sheet expansion unit, which connects the ring of the expanded sheet between the outer circumference of the workpiece and the inner circumference of the ring-shaped frame. a shape area pushes and expands the expansion sheet in a direction perpendicular to the front surface of the workpiece, and breaks the workpiece from the dividing starting point; and a heating unit heats the expanded annular area of the expansion sheet, and contracting the slack part of the expansion sheet; wherein, the heating unit is provided with: a plurality of heating parts arranged along the circumferential direction of the annular region; a rotating part making the heating parts along the expansion sheet The annular area moves in the circumferential direction; and the heating position adjustment part adjusts the heating parts in the radial direction of the workpiece by moving the positions of the heating parts individually in the radial direction of the workpiece. The position of the portion; the dividing device further includes: a control unit, which controls the constituent elements, and the control unit uses the heating position adjustment part to make the direction A of the annular region relative to the expansion piece intersect and compare the A direction The heating portion for heating the both ends in the direction B that is easy to expand is positioned radially outward of the heating portion for heating the both ends of the annular region in the A direction of the expandable sheet. A splitting device, which expands the expansion piece of the workpiece unit and divides the workpiece. The workpiece unit is composed of a plate-shaped workpiece with a starting point of division formed along the planned division line, the expansion piece pasted with the workpiece, and the Composed of a ring-shaped frame, the dividing device has: a frame fixing part, which fixes the ring-shaped frame of the workpiece unit; a sheet expansion unit, which connects the ring of the expanded sheet between the outer circumference of the workpiece and the inner circumference of the ring-shaped frame. pushes and expands the expansion sheet in a direction perpendicular to the front of the workpiece, and breaks the workpiece from the splitting starting point; and a heating unit, which heats the expanded annular region of the expanded sheet, and shrinks the slack part of the expanded sheet; wherein, the heating unit is provided with: a plurality of heating parts along the circumference of the annular region The direction is set; the rotating part, which makes the heating parts move in the circumferential direction along the annular region of the expansion piece; and the heating position adjustment part, which makes the positions of the heating parts individually, by The expansion sheet moves in the far-near direction to adjust the positions of the heating parts in the far-near direction of the expansion sheet; the dividing device further includes: a control unit, which controls the constituent elements, and the control unit is adjusted by the heating position part, the heating part that heats the two ends of the B direction that crosses the A direction of the annular region of the expansion sheet and is easier to expand than the A direction The heating parts that are heated at both ends are closer to the expansion sheet. The dividing device according to claim 1 or 2, wherein the plurality of heating parts are respectively adjusted to different temperatures.

Images