TWI782033B - How to install the cutting blade - Google Patents

Abstract

[Problem] To provide a cutting blade mounting method capable of suppressing errors in reference positions at the time of mounting. [Solution] The installation method of the cutting blade includes: the installation position exploration step, using the camera unit to photograph the upper surface of the work clamp to explore the installation position on the upper surface of the undetected flaw or foreign object; the conduction detection step, which will be performed during the installation The installation position of the upper surface found in the position exploration step is positioned directly below the cutting blade, and the cutting unit is moved toward the Z-axis direction, so as to detect the electrical conduction at the moment when the cutting blade contacts the upper surface at the installation position; and In the reference position setting step, the position in the Z-axis direction of the cutting blade when electrical conduction is detected is set as the reference position.

Description

How to install the cutting blade

FIELD OF THE INVENTION The present invention relates to a method of mounting a cutting blade.

Background of the Invention There is known a dicing device which is used for dicing various plate-shaped workpieces such as wafers on which semiconductor elements are formed, package substrates, and ceramic substrates with dicing blades. The cutting device uses the position where the front end (lower end) of the cutting blade contacts the upper surface of the work chuck as a reference position to control the height position of the cutting blade (see, for example, Patent Document 1 and Patent Document 2).

The reference position is obtained by a reference position detection circuit. The reference position detection circuit is a detection circuit that can detect electrical conduction when the cutting blade touches the upper surface of the work clamp. The action of making the cutting blade contact the upper surface of the work clamp is called mounting. Since the mounting is carried out every time the chuck is replaced or the like, many scratches caused by the contact of the cutting blade may be formed on the outer periphery of the chuck. Prior Art Documents Patent Documents

Patent Document 1: Japanese Patent Laid-Open No. 09-92711 Patent Document 2: Japanese Patent Laid-Open No. 2005-142202

Summary of the Invention Problems to be Solved by the Invention If the aforementioned installation mistakenly causes the cutting blade to touch the formed scar again, the bottom of the scar that is lower than the original upper surface will be detected as the reference position, which may lead to the reference There is a possibility that the position is set a few μm below the upper surface of the work chuck. In addition, if the upper surface and the cutting blade are connected through the liquid droplets of cutting water remaining on the upper surface of the work clamp, it may cause the reference position to be set higher than the upper surface of the work clamp, which is equivalent to dripping liquid. The height and location of the risk. In this way, in the methods shown in Patent Document 1 and Patent Document 2, there is a possibility that the error in the reference position at the time of mounting becomes large.

The present invention was made in view of the above-mentioned problems, and an object of the present invention is to provide a cutting blade mounting method capable of suppressing errors in reference positions during mounting. means to solve problems

In order to solve the above problems and achieve the purpose, the installation method of the cutting blade of the present invention is to use a cutting device to set the reference position of the cutting blade's cutting and feeding direction. The cutting device is equipped with: a work clamp table, and the upper surface holds the workpiece; a cutting unit, which uses the cutting blade installed on the main shaft to cut the workpiece held on the work clamping table; a cut-in feed unit, which moves the cutting unit in a cut-in feed direction perpendicular to the upper surface; The camera unit photographs the workpiece held on the work clamp, and the method for installing the cutting blade is characterized in that it includes: an installation position searching step, in which the camera unit photographs the upper surface of the work clamp to explore future The installation position of the upper surface where unevenness or foreign matter is detected; conducting the detection step, positioning the installation position of the upper surface explored in the installation position exploration step directly below the cutting blade, and making the cutting blade The unit moves toward the cutting feed direction to detect electrical conduction at the moment when the cutting blade is brought into contact with the upper surface at the installation position; The position given the direction is set as this reference position.

In the above-mentioned installation method of the cutting blade, it may also be: the upper surface of the work clamp is composed of a perforated plate that attracts and holds the workpiece, and a metal frame surrounding the perforated plate, and the installation position is set in the metal frame.

In the aforementioned method for installing the cutting blade, it is also possible that: the upper surface of the work clamping table is formed of a flat metal material, and a suction opening and a suction groove are formed on the upper surface.

In the above-mentioned method for installing the cutting blade, in the step of searching for the installation position, when a flaw or a foreign object is detected in a predetermined range of the captured image, the work chuck may be rotated until it is within the predetermined range. up to the position where no scratches or foreign objects are detected.

In the above-mentioned method for installing the cutting blade, it may also be that: the step of searching for the installation position includes an air blowing step, and the air blowing step is to use the air blowing unit on the upper surface for photographing before photographing the upper surface with the camera unit. The range of surfaces is sprayed with air. Invention effect

The mounting method of the cutting blade of the present invention exhibits the effect that the error of the reference position at the time of mounting can be suppressed.

Modes for Carrying Out the Invention Modes for carrying out the present invention (embodiments) will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. In addition, the components described below include those that can be easily imagined by those skilled in the art or are substantially the same. In addition, the configurations described below can be appropriately combined. In addition, omissions, substitutions, or changes of various configurations can be made without departing from the gist of the present invention.

[Embodiment 1] A method of mounting a cutting blade according to Embodiment 1 of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing a configuration example of a cutting device for carrying out a method of mounting a cutting blade according to Embodiment 1. Fig. 2 is a side view showing the main parts of the cutting device shown in Fig. 1 in partial cross-section. FIG. 3 is a perspective view showing an auxiliary work clamp for trimming a plate of the cutting device shown in FIG. 1 .

The installation method of the cutting blade of Embodiment 1 is implemented by the cutting device 1 shown in FIG. 1 . The cutting device 1 is a device that cuts (processes) a workpiece 200 . In Embodiment 1, the workpiece 200 is a disc-shaped semiconductor wafer or an optical element wafer having silicon, sapphire, gallium, or the like as a base material. In the workpiece 200 , elements 202 are formed in a region partitioned into a grid pattern by a plurality of dividing lines 201 formed in a grid shape on the front surface. The workpiece 200 of the present invention may be a so-called TAIKO (registered trademark) wafer in which the central portion is thinned and a thick portion is formed in the outer peripheral portion. In addition to the wafer, it may also have a plurality of wafers sealed with resin. Rectangular packaging substrates, ceramic plates, glass plates, etc. for components. The adhesive tape 210 which is a protection member is attached to the back surface of the workpiece 200 . The adhesive tape 210 is assembled with a ring frame 211 around its periphery.

The cutting device 1 shown in FIG. 1 is a device in which a workpiece 200 is held by a work clamp 10 and cut along a planned dividing line 201 by a cutting blade 21 installed on a main shaft 22 . As shown in Figure 1, the cutting device 1 has a work clamp table 10, a cutting unit 20, a camera unit 30, and a control unit 100. The blade 21 cuts the workpiece 200 held on the work chuck 10 , and the camera unit 30 photographs the workpiece 200 held on the work chuck 10 .

Also, as shown in FIG. 1 , the cutting device 1 is provided with a processing feed unit, an index feed unit 40 and a plunging feed unit 50 not shown in the figure. The processing feed direction is the processing feed in the X-axis direction. The indexing feed unit 40 is to move the cutting unit 20 towards the indexing feed direction parallel to the horizontal direction and perpendicular to the X-axis direction, that is, the Y-axis direction. Here, the cutting and feeding unit 50 cuts and feeds the cutting unit 20 toward the cutting and feeding direction perpendicular to the upper surface 11 , that is, the Z-axis direction.

As shown in FIGS. 1 and 2 , the work holder 10 is disc-shaped, and the upper surface 11 is composed of a perforated plate 12 that attracts and holds the workpiece 200 , and an annular metal frame 13 that surrounds the perforated plate 12 . . The porous plate 12 is formed of a porous material such as porous ceramics, and has holes capable of attracting fluid. Moreover, in Embodiment 1, although the porous plate 12 was comprised with the porous material, it is not limited to a porous material in this invention. The metal frame body 13 is made of metal such as stainless steel, and includes a frame portion 14 surrounding the perforated plate 12 and a disk-shaped main body portion 15 in which the frame portion 14 is provided on the outer edge. A space 16 is formed between the body portion 15 and the perforated plate 12 . The space 16 is sealed by the main body 15 , the frame 14 and the perforated plate 12 . The work holder 10 connects the space 16 to a vacuum suction source not shown in the figure, and sucks and holds the workpiece 200 on the upper surface 11 by suctioning with the vacuum suction source. The upper surface 11 of the perforated plate 12 and the upper surface 17 of the metal frame 13 correspond to the upper surface of the work holder 10 and are arranged on the same plane. That is, the upper surface of the work holder 10 is composed of the upper surface 11 of the perforated plate 12 and the upper surface 17 of the metal frame 13 . In addition, the work clamp table 10 is arranged on the movable table 18 shown in FIG. 1 which can be moved freely in the X-axis direction by the processing feed unit, and is rotated around the axis by a rotary drive source not shown in the figure. The way to rotate freely set.

The cutting unit 20 has a main shaft 22, a main shaft housing 23 and a cutting blade 21. The main shaft 22 rotates around an axis parallel to the Y-axis direction. The main shaft housing 23 accommodates the main shaft and can be moved by indexing. The feeding unit 40 and the cutting and feeding unit 50 move in the Y-axis direction and the Z-axis direction, and the cutting blade 21 is installed on the main shaft 22 . The cutting blade 21 is a cutting grindstone formed in an extremely thin annular shape, and is held in the work chuck by being rotated by the spindle 22 around an axis parallel to the Y-axis direction while being supplied with cutting water. The workpiece 200 on the table 10 is configured to be cut. In addition, the main shaft 22 and the cutting blade 21 of the cutting unit 20 have electrical conductivity.

The camera unit 30 is arranged at a position aligned with the cutting unit 20 in the X-axis direction. In Embodiment 1, the camera unit 30 is assembled to the spindle housing 23 . The camera unit 30 is constituted by a CCD (Charge Coupled Device) camera that images the workpiece 200 held on the chuck 10 . The CCD camera photographs the workpiece 200 held on the work holder 10 to obtain images for calibration etc., and outputs the obtained images to the control unit 100, wherein the calibration is performed on the workpiece 200 and the alignment of cutting blade 21.

Moreover, in Embodiment 1, the blower unit 60 is incorporated in the camera unit 30 . The air blowing unit 60 is provided with nozzles for blowing pressurized air 700 (shown in FIG. 5 ) supplied from a pressurized gas supply source not shown to the upper surfaces 11 and 17 of the work chuck 10 . The camera unit 30 among them takes pictures within the range.

In addition, the cutting device 1 is equipped with a position detection unit in the X-axis direction not shown in the figure, a position detection unit in the Y-axis direction not shown in the figure, and a position detection unit 70 in the Z-axis direction shown in FIG. In order to detect the position of the X-axis direction of the work clamp table 10, the Y-axis direction position detection unit is used to detect the position of the Y-axis direction of the cutting unit 20, and the Z-axis direction position detection unit 70 is used to detect the position of the cutting unit 20. The position in the Z-axis direction. The position detection unit in the X-axis direction, the position detection unit in the Y-axis direction, and the position detection unit 70 in the Z-axis direction can be constituted by a linear scale 71 parallel to the X-axis direction, the Y-axis direction, or the Z-axis direction, and a reading head 72. . The linear ruler 71 of the Z-axis direction position detection unit 70 is assembled on the Y-axis moving table 41 that can move toward the Y-axis direction by the index feed unit 40 of the cutting device 1, and the reading head 72 is assembled on the cutting device 1. unit 20, and moves in the Z-axis direction with respect to the Y-axis moving table 41 together with the cutting unit 20. The position detection unit in the X-axis direction, the position detection unit in the Y-axis direction, and the position detection unit in the Z-axis direction 70 output the positions in the X-axis direction of the work clamp table 10, the Y-axis direction or the Z-axis direction of the cutting unit 20 to the control unit 100 .

In addition, as shown in FIG. 1 , the cutting device 1 is provided with a sub-work chuck (corresponding to the work chuck described in claim 1) 80 that enables the trimming plate (corresponding to the workpiece described in claim 1) 300 to be detachable. . The auxiliary chuck 80 is fixed to the moving table 18 and moves in the X-axis direction integrally with the chuck 10 . The sub table 80 is formed in a rectangular shape, and the upper surface 81 is arranged at the same height as the upper surfaces 11 and 17 of the table 10, and the upper surface 81 is made of a flat metal material. On the upper surface 81 of the sub-table 80, there is a concave-convex suction opening 82 connected to a vacuum suction source not shown in the figure, and a concave-convex suction groove 83 communicating with the suction port 82 is formed. The suction groove 83 is recessed from the upper surface 81 . The sub-chuck 80 suction-holds the trimming plate 300 placed on the upper surface 81 by suction with a vacuum suction source. The trimming plate 300 is configured to sharpen the cutting blade 21 whose cutting ability has been reduced due to clogging or blunting, and restore the cutting ability of the cutting blade 21 . The practice of sharpening the cutting blade 21 to restore the cutting ability of the cutting blade 21 is called dressing.

In addition, the cutting device 1 includes a reference position setting unit 90 shown in FIG. 2 . The reference position setting unit 90 is a unit for setting the reference position of the cutting unit 20 in the Z-axis direction of the upper surface 11, 17 of the work clamp table 10 (or on the same plane) where the front end of the cutting blade 21 is in contact with the tip of the knife. , and is to set the cutting unit 20 trimming reference position (equivalent to the reference position) on the Z-axis direction where the front end of the tip of the cutting blade 21 contacts the upper surface 81 of the auxiliary work chuck 80 (or is located on the same plane). position) unit. The reference position and the reference position for trimming are positions in the Z-axis direction of the cutting unit 20 where the lower end of the tip of the cutting blade 21 is located on the same plane as the upper surfaces 11 , 17 , and 81 . Also, in the present invention, the method of setting the reference position and the reference position for trimming is referred to as mounting.

As shown in FIG. 2 , the reference position setting unit 90 includes a power supply 91 , a conduction detection unit 92 , and a selector switch 93 . The power source 91 supplies power to the cutting blade 21 , the metal frame 13 of the work clamp 10 or the upper surface 81 of the auxiliary work clamp 80 through the spindle 22 . The selector switch 93 is a destination for supplying electric power from the power source 91 , and switches between the metal frame 13 of the table 10 and the upper surface 81 of the sub table 80 . The conduction detection unit 92 detects the current flowing when the cutting blade 21 contacts the upper surface 17 of the metal frame 13 of the work clamp 10 or the upper surface 81 of the auxiliary work clamp 80, and outputs a signal indicating the detected current to the control unit 100.

The reference position setting unit 90 supplies the power of the power source 91 to the metal frame 13 of the work chuck 10 through the switch 93 when setting the reference position. The reference position setting unit 90 makes the conduction detection unit 92 detect the current when the tip of the cutting blade 21 touches the upper surface 17 of the metal frame 13 , and outputs a signal indicating the detected current to the control unit 100 . The control unit 100 sets the detection result of the Z-axis direction position detection unit 70 when the signal indicating that the current is detected is input as a reference position.

In addition, the reference position setting unit 90 supplies the power of the power source 91 to the upper surface 81 of the sub chuck 80 through the changeover switch 93 when setting the reference position for trimming. The reference position setting unit 90 enables the conduction detection unit 92 to detect the current when the tip of the cutting blade 21 touches the upper surface 81 , and outputs a signal indicating the detected current to the control unit 100 . The control unit 100 sets the detection result of the Z-axis direction position detection unit 70 when the signal indicating that the current is detected is input as the reference position for trimming.

The control unit 100 is a unit that individually controls each of the above-mentioned constituent elements constituting the cutting device 1 and causes the cutting device 1 to perform a processing operation on the workpiece 200 . Furthermore, the control unit 100 is a computer. The control unit 100 has an arithmetic processing device, a storage device, and an input-output interface device. The arithmetic processing device has a microprocessor such as a CPU (Central Processing Unit, central processing unit), and the storage device has a ROM (read-only memory, read-only memory). only memory) or RAM (random access memory, random access memory) memory. The calculation processing device of the control unit 100 performs calculation processing according to the computer program stored in the storage device, and outputs the control signal for controlling the cutting device 1 to the above-mentioned components of the cutting device 1 through the input and output interface device.

Moreover, when the control unit 100 cuts the workpiece 200, it controls the cutting amount of the cutting blade 21 to the workpiece 200 according to the reference position, and when trimming, it controls the cutting according to the reference position for trimming. The cutting amount of the blade 21 to the trimming plate 300 . The control unit 100 is connected to a display unit not shown in the figure and an input unit not shown in the figure. The display unit is composed of a liquid crystal display device or the like that displays the state of processing operations or images, etc. The input unit is operated It is used when a person registers processing content information, etc. The input unit is constituted by at least one of external input devices such as a touch panel provided on the display unit and a keyboard.

In addition, the cutting device 1 is equipped with a cassette elevator 110, a cleaning unit 120, and a conveying unit not shown in the figure. The cassette elevator 110 is used to place the cassette 111 for accommodating the workpiece 200 before and after cutting and is positioned in the Z-axis direction. The cassette 111 is moved, the cleaning unit 120 cleans the cut workpiece 200 , and the transport unit moves the workpiece 200 in and out of the cassette 111 and transports the workpiece 200 .

Next, the processing operation of the cutting device 1 according to the first embodiment will be described. During the processing operation, the cutting device 1 is started to start the processing operation when the operator has registered the processing content information in the control unit 100 and the operator has given an instruction to start the processing operation.

During the processing operation, the control unit 100 causes the transfer unit to take out the workpiece 200 before cutting from the cassette 111 and place it on the work chuck 10 to attract and hold the workpiece 200 on the work chuck 10 . The control unit 100 moves the work clamp table 10 toward the bottom of the cutting unit 20 through the processing feed unit, and positions the workpiece 200 held on the work clamp table 10 below the camera unit 30, so that the camera unit 30 The workpiece 200 is photographed. The control unit 100 performs image processing such as pattern matching, and adjusts the relative position of the workpiece 200 held on the work clamp 10 and the cutting unit 20 , wherein the pattern matching is used to carry out holding on the work clamp 10 The alignment between the planned dividing line 201 of the workpiece 200 and the cutting blade 21 of the cutting unit 20.

Then, the control unit 100 makes the cutting blade 21 and the workpiece 200 along the planned dividing line through the processing feed unit, the index feed unit 40, the cutting feed unit 50 and the rotary drive source according to the processing content information. 201 moves relatively, and cuts the planned dividing line 201 by the cutting blade 21 while supplying cutting water.

When the control unit 100 cuts all the planned dividing lines 201 and divides the workpiece 200 into individual components 202 , it releases the work clamp 10 after retracting the work clamp 10 from below the cutting unit 20 . The attraction keeps. The control unit 100 instructs the conveying unit to convey the cut workpiece 200 to the cleaning unit 120 , and store it in the cassette 111 after being cleaned by the cleaning unit 120 .

In addition, the control unit 100 dresses the cutting blade 21 at a predetermined dressing timing during the machining operation. For example, cutting a preset number of planned dividing lines 201 is the trimming time point. In addition, the trimming time point in the present invention may be in the middle of processing one workpiece 200, or may be a time point when the workpiece 200 is replaced when a plurality of workpieces 200 are continuously processed.

Next, the installation method of the cutting blade for setting the reference position by the control unit 100 will be described according to the drawings. Fig. 4 is a flow chart showing the flow of the method of mounting the dicing blade according to the first embodiment.

The method of attaching the cutting blade of Embodiment 1 (hereinafter, simply referred to as the attaching method) is a method of setting the reference position of the cutting blade 21 in the Z-axis direction. As shown in FIG. 4 , the mounting method includes a mounting position search step ST2 , a conduction detection step ST3 , and a reference position setting step ST4 .

The control unit 100 is a flow chart of repeatedly implementing the cutting blade installation method shown in FIG. 4 at predetermined time points during the processing operation of the cutting device 1 . During the processing operation of the cutting device 1 , the control unit 100 determines whether the time point is set for the reference position (step ST1 ). When the control unit 100 determines that it is not the reference position setting time point (step ST1: NO), step ST1 will be repeated. The reference position setting time point refers to the time point when the reference position is set, for example, when the machining operation of the cutting device 1 starts after cutting a preset number of planned dividing lines 201 after the chuck 10 is replaced. When the control unit 100 determines that it is the reference position setting time point (step ST1: YES), it proceeds to the mounting position search step ST2.

(Installation position search step) FIG. 5 is a side view showing a partial cross-section of the installation position search step of the cutting blade installation method shown in FIG. 4 . Fig. 6 is a diagram showing an example of an image captured by a camera unit in a step of searching for a mounting position of the method of mounting a dicing blade shown in Fig. 4 . Fig. 7 is a diagram showing an example of an image after the table is rotated from the state shown in Fig. 6 . Fig. 8 is a diagram showing another example of an image captured by a camera unit in a step of searching for a mounting position of the method of mounting a dicing blade shown in Fig. 4 . Fig. 9 is a diagram showing an example of an image after the table is rotated from the state shown in Fig. 8 .

The installation position search step ST2 is to photograph the upper surface 17 of the metal frame 13 of the work clamping table 10 with the camera unit 30, so as to explore the installation position 501 on the upper surface 17 of the undetected unevenness, that is, the flaw 500 or the foreign object 600 (shown in FIG. 6. Steps in Fig. 7, Fig. 8 and Fig. 9). Also, the installation position 501 refers to the position where the cutting blade 21 contacts the upper surface 17 of the work holder 10 during installation. In Embodiment 1, the installation position 501 is set on the upper surface 17 of the metal frame 13 . As shown in FIG. 5 , in the installation position search step ST2, the control unit 100 makes the camera unit 30 face the metal frame 13 of the work clamp table 10 along the Z-axis direction, and then uses the camera unit 30 to photograph the work clamp. Before the upper surface 17 of the metal frame 13 of the table 10, the air blowing step ST21 is implemented. The air blowing step ST21 is to spray the pressurized air on the part of the upper surface 17 photographed by the camera unit 60, that is, within the range of the air blowing unit 60. Air 700. That is, the mounting position searching step ST2 includes an air blowing step ST21.

In the installation position searching step ST2, the control unit 100 uses the camera unit 30 to photograph the upper surface 17 of the metal frame 13 (step ST22). In the installation position search step ST2, the control unit 100 performs image processing on the captured image 400, and determines that the range 401 including the installation position 501 within the specified range of the image 400 (shown in FIG. 7. Whether a flaw 500 is detected in FIG. 8 and FIG. 9 ) (step ST23). Furthermore, the scar 500 refers to the area that is determined to be the set flaw in the image processing of the control unit 100. In Embodiment 1, when the area that has been determined to be a flaw by the control unit 100 exceeds the area with a cutting blade 21 When the scars formed cover 5% to 30% of the predetermined area, it is judged that the scars 500 are detected.

As shown in FIG. 6 , in the mounting position search step ST2, when the control unit 100 determines that a flaw 500 is detected within the range 401 of the captured image 400 (step ST23: Yes), the work chuck 10 is rotated. And the shooting position of the camera unit 30 is moved (step ST24). In the mounting position searching step ST2, when the control unit 100 determines that the flaw 500 is not detected within the range 401 of the captured image 400 as shown in FIG. After the table 10 is rotated in ST24, it is determined whether or not a foreign object 600 is detected within the range 401 of the captured image 400 (step ST25). Furthermore, in Embodiment 1, the foreign matter 600 is a drop of cutting water, but it is not limited to cutting water in the present invention.

As shown in FIG. 8 , in the mounting position search step ST2, when the control unit 100 determines that a foreign object 600 is detected within the range 401 of the captured image 400 (step ST25: Yes), the work clamping table 10 is rotated. , and move the photographing position of the camera unit 30 (step ST26), and return to the blowing step ST21. As shown in FIG. 9 , in the installation position search step ST2, when the control unit 100 determines that the foreign object 600 is not detected within the range 401 of the captured image 400 (step ST25: No), it proceeds to Conduction detection step ST3. In this way, in the installation position search step ST2, if a flaw 500 or a foreign object 600 is detected within the range 401 of the captured image 400, the air blowing step ST21 to step ST26 will be repeated, and the work clamp The table 10 rotates until a position where no flaw 500 or foreign object 600 is detected within the range 401 to search for an installation position 501 that is a part of the upper surface 17 where no flaw 500 or foreign object 600 exists.

(Continuity Test Step) FIG. 10 is a side view showing a conduction test step of the method of mounting the dicing blade shown in FIG. 4 in a partial section.

The conduction detection step ST3 is to locate the installation position 501 of the upper surface 17 found in the installation position search step ST2 directly below the cutting blade 21, and move the cutting unit 20 in the Z-axis direction to detect the cutting blade 21 A step of electrical conduction at the moment when the mounting position 501 touches the upper surface 17 . In the conduction detection step ST3, the control unit 100, as shown by the dotted line in FIG. Up to the current, when the conduction detection unit 92 detects the current, the cutting blade 21 is raised toward the Z-axis direction.

(Reference Position Setting Step) In the reference position setting step ST4, the position in the Z-axis direction of the cutting blade 21 at the time when electrical conduction is detected is set as a reference position. In the reference position setting step ST4, the control unit 100 is in the conduction detection step ST3, the detection result of the Z-axis direction position detection unit 70 when the conduction detection unit 92 detects the current, that is, the position of the Z-axis direction of the cutting blade 21, Set and store as the reference position.

As mentioned above, in the mounting method of Embodiment 1, in the mounting position searching step ST2, the camera unit 30 photographs the upper surface 17 of the work clamp 10 for bringing the cutting blade 21 into contact in advance, and checks whether there is a flaw 500 or a foreign object 600. . Therefore, in the mounting method of the first embodiment, it becomes possible to suppress mounting failures caused by the dicing blade 21 coming into contact with the flaw 500 or the foreign matter 600 . As a result, the mounting method of Embodiment 1 can suppress the error of the reference position at the time of mounting.

In addition, in the mounting method of Embodiment 1, in the mounting position search step ST2, when a flaw 500 or a foreign object 600 is detected within the range 401 of the image 400, the imaging position is moved until the flaw 500 or foreign matter 600 is not detected within the range 401. 600 foreign objects. As a result, the mounting method of Embodiment 1 can prevent the cutting blade 21 from being mounted in contact with the flaw 500 or the foreign object 600, and can suppress errors in the reference position during mounting.

In addition, the mounting method according to the first embodiment includes an air blowing step ST21. The air blowing step ST21 is to shoot the upper surface 17 with the air blowing unit 60 before the mounting position search step ST2 uses the camera unit 30 to photograph the upper surface 17. Spray with Air 700. Therefore, the mounting method of Embodiment 1 can remove the foreign matter 600 within the range 401 of the upper surface 17, and can suppress the error of the reference position during mounting.

[Embodiment 2] A method of mounting a cutting blade according to Embodiment 2 of the present invention will be described with reference to the drawings. Fig. 11 is a flow chart showing the flow of the method of mounting the dicing blade according to the second embodiment. Fig. 12 is a diagram showing an example of an image captured by a camera unit in a step of searching for a mounting position of the method of mounting a dicing blade shown in Fig. 11 . Fig. 13 is a diagram showing an example of an image obtained by relatively moving the camera unit and the sub-table from the state shown in Fig. 12 . In addition, in Fig. 11 to Fig. 13, the same parts as those in the first embodiment are given the same reference numerals, and description thereof will be omitted.

The cutting blade mounting method (hereinafter simply referred to as the mounting method) of the second embodiment is a method in which the control unit 100 sets the reference position for trimming. As shown in FIG. 11, the mounting method of the second embodiment is the same as the first embodiment, and includes a mounting position search step ST2, a conduction detection step ST3, and a reference position setting step ST4.

The control unit 100 is a flow chart of repeatedly implementing the installation method shown in FIG. 11 at a preset predetermined time point during the processing operation of the cutting device 1 . During the processing operation of the cutting device 1 , the control unit 100 determines whether or not the time point is set for the reference position for trimming (step ST1 ). When the control unit 100 determines that it is not the trimming reference position setting time point (step ST1: NO), step ST1 is repeated. The timing of setting the reference position for dressing refers to the timing of setting the reference position for dressing, for example, after the replacement of the sub chuck 80 . When the control unit 100 determines that it is the trimming reference position setting time point (step ST1: YES), it proceeds to the mounting position search step ST2.

In the step ST22 of the installation position search step ST2 of the installation method of the second embodiment, the control unit 100 photographs a part of the upper surface 81 of the sub-table 80, and in steps ST24 and 26, by processing the feed unit and The index feeding unit 40 relatively moves the camera unit 30 and the sub-table 80 .

Also, in the mounting position search step ST2 of the mounting method according to the second embodiment, when the control unit 100 determines that the foreign object 600 has not been detected within the range 401 of the captured image 400 (step ST25: NO), it will It is judged whether or not the suction port 82 or the suction groove 83 is detected as unevenness in the range 401 which is a predetermined range of the captured image 400 (step ST27 ).

As shown in FIG. 12 , in the mounting position search step ST2, when the control unit 100 determines that the suction opening 82 or the suction groove 83 is detected within the range 401 of the captured image 400 (step ST27: Yes), it will Proceed to step ST26. As shown in FIG. 13 , in the mounting position search step ST2, when the control unit 100 determines that the suction opening 82 or the suction groove 83 is not detected within the range 401 of the captured image 400 (step ST27: NO). , the process proceeds to the conduction detection step ST3. In addition, FIG. 12 shows that the suction groove 83 is detected within the range 401 .

In the mounting position search step ST2 of the mounting method according to the second embodiment, when a flaw 500, a foreign object 600, a suction port 82 or a suction groove 83 is detected within the range 401 of the captured image 400, the process from the blower to the Step ST21 proceeds to step ST27 and step ST26, and the camera unit 30 is moved relative to the auxiliary work clamp 80 until the position of the flaw 500, the foreign object 600, the suction port 82 or the suction groove 83 is not detected within the range 401, To explore the installation location 501 that is a part of the upper surface 81 of the suction port 82 or the suction groove 83 without the scar 500 , the foreign object 600 .

As above, in the mounting method of Embodiment 2, in the mounting position search step ST2, the camera unit 30 is used to photograph the upper surface 81 of the auxiliary chuck 80 for making the cutting blade 21 contact in advance, so as to confirm the flaw 500, foreign matter 600, Or the presence or absence of the suction port 82 or the suction groove 83 . Therefore, in the mounting method of the second embodiment, it becomes possible to suppress mounting failures caused by the dicing blade 21 coming into contact with the flaw 500, the foreign matter 600, or the suction port 82 or the suction groove 83. As a result, the mounting method of the second embodiment can suppress the error of the reference position at the time of mounting.

In addition, in the mounting method of Embodiment 2, in the mounting position search step ST2, when a flaw 500, a foreign object 600, a suction opening 82 or a suction groove 83 is detected within the range 401 of the image 400, the shooting position is moved until it is within the range 401. 401 until the flaw 500, the foreign object 600, the position of the suction port 82 or the suction groove 83 are not detected. As a result, the mounting method of Embodiment 2 can prevent the cutting blade 21 from being mounted in contact with the flaw 500, the foreign matter 600, the suction port 82 or the suction groove 83, and can suppress errors in the reference position during mounting.

Moreover, according to the above-mentioned method of mounting the cutting blade of the first embodiment and the second embodiment, the following cutting device can be obtained. (Additional Note 1) A cutting device characterized by comprising: a work holder holding a workpiece held on the upper surface; cutting; a cutting feed unit that moves the cutting unit in a cutting feeding direction perpendicular to the upper surface; a camera unit that photographs the workpiece held on the work clamp; and a control unit that controls each component The above-mentioned control unit implements the following steps: the installation position search step, using the camera unit to photograph the upper surface of the work clamp, so as to explore the installation position of the upper surface where no unevenness or foreign matter is detected; the conduction detection step , positioning the installation position of the upper surface explored in the installation position exploration step directly below the cutting blade, and moving the cutting unit toward the cutting feed direction, so as to detect that the installation position makes the electrical conduction at the moment when the cutting blade contacts the upper surface; and a reference position setting step, setting the position of the cutting blade in the cutting feed direction when the electrical conduction is detected as the reference position.

The above-mentioned cutting device is the same as the installation method of the cutting blade in Embodiment 1 and Embodiment 2. Since the upper surface of the work chuck for making the cutting blade contact is photographed in advance with the camera unit to confirm the presence or absence of unevenness or foreign matter, it becomes It is possible to prevent poor mounting due to unevenness or foreign matter, and to suppress errors in the reference position during mounting.

In addition, this invention is not limited to the invention of the said embodiment. That is, various deformation|transformation can be added and implemented in the range which does not deviate from the summary of this invention.

1‧‧‧Cutting device 10‧‧‧Jig table 11, 17, 81‧‧‧Upper surface 12‧‧‧perforated plate 13‧‧‧Metal frame 14‧‧‧Frame part 15‧‧‧Body part 16‧ ‧‧Space 18‧‧‧Mobile table 20‧‧‧Cutting unit 21‧‧‧Cutting blade 22‧‧‧Spindle 23‧‧‧Spindle housing 30‧‧‧Camera unit 40‧‧‧Indexing feed unit 41‧ ‧‧Y-axis moving table 50‧‧‧cutting feed unit 60‧‧‧air blowing unit 70‧‧‧Z-axis direction position detection unit 71‧‧‧linear gauge 72‧‧‧reading head 80‧‧‧pair Work clamp (work clamp) 82‧‧‧suction opening (concave-convex) 83‧‧‧suction groove (concave-convex) 90‧‧‧reference position setting unit 91‧‧‧power supply 92‧‧‧conduction detection unit 93‧‧‧ Switch 100‧‧‧control unit 110‧‧‧cassette elevator 111‧‧‧cassette 120‧‧‧cleaning unit 200‧‧‧processed object 201‧‧‧separation schedule line 202‧‧‧component 210‧‧ ‧Adhesive Tape 211‧‧‧Ring Frame 300‧‧‧Trimming Plate (Workpiece) 400‧‧‧Image 401‧‧‧Range (Specified Range)500‧‧‧Scar (Concave-Convex) 501‧‧‧Installation Position 600‧‧‧foreign matter 700‧‧‧air X, Y, Z‧‧‧direction ST1~ST4, ST21~ST27‧‧‧steps

Fig. 1 is a perspective view showing a configuration example of a cutting device for carrying out a method of mounting a cutting blade according to Embodiment 1. Fig. 2 is a side view showing the main parts of the cutting device shown in Fig. 1 in partial cross-section. FIG. 3 is a perspective view showing an auxiliary work clamp for trimming a plate of the cutting device shown in FIG. 1 . Fig. 4 is a flow chart showing the flow of the method of mounting the dicing blade according to the first embodiment. FIG. 5 is a side view showing a partial cross-section of an installation position search step of the cutting blade installation method shown in FIG. 4 . Fig. 6 is a diagram showing an example of an image captured by a camera unit in a step of searching for a mounting position of the method of mounting a dicing blade shown in Fig. 4 . Fig. 7 is a diagram showing an example of an image after the table is rotated from the state shown in Fig. 6 . Fig. 8 is a diagram showing another example of an image captured by a camera unit in a step of searching for a mounting position of the method of mounting a dicing blade shown in Fig. 4 . Fig. 9 is a diagram showing an example of an image after the table is rotated from the state shown in Fig. 8 . Fig. 10 is a side view showing the conduction detection step of the dicing blade installation method shown in Fig. 4 in a partial section. Fig. 11 is a flow chart showing the flow of the method of mounting the dicing blade according to the second embodiment. Fig. 12 is a diagram showing an example of an image captured by a camera unit in a step of searching for a mounting position of the method of mounting the dicing blade shown in Fig. 11 . Fig. 13 is a diagram showing an example of an image obtained by relatively moving the camera unit and the sub-table from the state shown in Fig. 12 .

Steps ST1~ST4, ST21~ST26‧‧‧

Claims (3)

A method for installing a cutting blade is to use a cutting device to set the reference position of the cutting blade in the cutting feed direction. The cutting blade cuts the workpiece held on the work clamp; the cutting feed unit moves the cutting unit in the cutting feed direction perpendicular to the upper surface; the camera unit maintains on the work clamp The upper surface of the work clamp table is formed of a flat metal material, and a suction port and a suction groove are formed on the upper surface. The installation method of the cutting blade includes: an installation position search step, Use the camera unit to photograph the upper surface of the work clamp to explore the installation positions of the upper surface of the suction port, the suction groove, and the undetected unevenness, flaws, foreign objects; the conduction detection step will be performed in the installation The installation position of the upper surface explored in the position searching step is positioned directly below the cutting blade, and the cutting unit is moved toward the cutting feed direction to detect that the cutting blade is brought into contact with the cutting blade at the installation position. Momentary electrical conduction of the upper surface; and a reference position setting step of setting the position in the cutting feed direction of the cutting blade when the electrical conduction is detected as the reference position. The method for installing a cutting blade according to Claim 1, wherein in the step of searching for the installation position, when the flaw or foreign object is detected within a predetermined range of the captured image, the work clamp is rotated until it is within the predetermined range. until the position where the flaw or foreign object is not detected. The method for installing a cutting blade according to claim 1 or 2, wherein the step of exploring the installation position has an air blowing step, and the air blowing step is to use an air blowing unit on the upper surface for shooting before taking pictures of the upper surface with the camera unit The range of surfaces is sprayed with air.

Images