TWI780761B - Detergent composition and cleaning method of printed circuit board - Google Patents
Detergent composition and cleaning method of printed circuit board Download PDFInfo
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Abstract
本發明提供一種清潔劑組成物以及印刷電路板的清洗方法。其一所述清潔劑組成物包括:10 wt%的磷酸三鈉、5wt%的甲基磺酸鈉、20wt%的碳酸鉀、10wt%的表面活性劑以及55wt%的水。另一所述清潔劑組成物包括:10wt%的苯並三氮唑、5wt%的檸檬酸、10wt%的硫酸、5wt%的硫酸銅、20 wt的甲醇以及50wt%的水。The invention provides a cleaning agent composition and a cleaning method for printed circuit boards. One of the detergent compositions includes: 10 wt% trisodium phosphate, 5 wt% sodium methanesulfonate, 20 wt% potassium carbonate, 10 wt% surfactant and 55 wt% water. Another detergent composition includes: 10wt% benzotriazole, 5wt% citric acid, 10wt% sulfuric acid, 5wt% copper sulfate, 20wt% methanol and 50wt% water.
Description
本發明係一種用於電子零件的清潔劑組成物以及清洗方法,尤其係指一種用於印刷電路板的清潔劑組成物以及清洗方法。 The invention relates to a cleaning agent composition and a cleaning method for electronic parts, in particular to a cleaning agent composition and a cleaning method for printed circuit boards.
在印刷電路板的製程中,對於銅面上的汙染物,例如雜質、不純物或生產時造成之膠附著物,多半使用酸鹼蝕刻或是鹼類皂化的方式去除。但是,上述這些方法並無法去除較頑強的大面積膠附著物。 In the manufacturing process of printed circuit boards, the pollutants on the copper surface, such as impurities, impurities or adhesive deposits caused during production, are mostly removed by acid-base etching or alkali saponification. However, the above-mentioned methods cannot remove the more tenacious large-area adhesive deposits.
舉例來說,在防焊印刷步驟後,銅面上留下的汙染物若未去除,會影響後續化金步驟。在此,所謂的「化金」步驟,是一種不需要使用電鍍的方式,即可讓鎳與金附著在銅表面的表面處理方法,一般稱為化鎳浸金(Electroless Nickel Immersion Gold,ENIG)。簡單來說,ENIG使用化學置換的方法來製作出表面金層的效果。然而,在進行化金步驟前,若銅面上仍有汙染物,便會導致鎳與金在銅表面上的無法正常附著。 For example, after the solder mask printing step, if the contamination left on the copper surface is not removed, it will affect the subsequent gold plating step. Here, the so-called "gold" step is a surface treatment method that allows nickel and gold to adhere to the copper surface without using electroplating. It is generally called Electroless Nickel Immersion Gold (ENIG) . Simply put, ENIG uses chemical replacement to create the effect of a gold layer on the surface. However, before the gold plating step, if there are still pollutants on the copper surface, the normal adhesion of nickel and gold on the copper surface will be caused.
因此,在進行化金步驟前,需要將銅面上的汙染物清除。 Therefore, before carrying out the gold chemical step, it is necessary to remove the pollutants on the copper surface.
有鑑於此,本發明之目的在於提供可以清除印刷電路板之銅表面上汙染物的清潔劑組成物、以及所述組成物的使用方法。 In view of this, the object of the present invention is to provide a cleaning agent composition capable of removing pollutants on the copper surface of a printed circuit board, and a method of using the composition.
為達到上述所指稱之各目的與功效,本發明第一實施態樣提供一種清潔劑組成物,用於清除印刷電路板之成品或半成品之銅表面的殘膠,該清潔劑組成物包含下列成份:(1)5~15wt%的磷酸三鈉;(2)1~9wt%的甲基磺酸鈉;(3)15~25wt%的碳酸鉀;(4)5~15wt%的表面活性劑;以及(5)與上述成份合計為100wt%的水。 In order to achieve the above-mentioned purposes and effects, the first embodiment of the present invention provides a cleaning agent composition for removing the residual glue on the copper surface of the finished or semi-finished printed circuit board. The cleaning agent composition includes the following ingredients (1) 5~15wt% trisodium phosphate; (2) 1~9wt% sodium methanesulfonate; (3) 15~25wt% potassium carbonate; (4) 5~15wt% surfactant; And (5) water with a total of 100wt% of the above ingredients.
在本發明第二實施態樣中,前述成份之重量百分比分別為:(1)10wt%的磷酸三鈉;(2)5wt%的甲基磺酸鈉;(3)20wt%的碳酸鉀;(4)10wt%的表面活性劑;以及(5)55wt%的水。 In the second embodiment of the present invention, the percentages by weight of the aforementioned ingredients are: (1) 10wt% trisodium phosphate; (2) 5wt% sodium methanesulfonate; (3) 20wt% potassium carbonate; 4) 10 wt% surfactant; and (5) 55 wt% water.
另外,本發明第三實施態樣提供一種清潔劑組成物,用於清除印刷電路板之成品或半成品之銅表面的氧化物,該清潔劑組成物包含下列成份:(1)5~15wt%的苯並三氮唑;(2)1~9wt%的檸檬酸:(3)5~15wt%的硫酸:(4)1~9wt%的硫酸銅; (5)15~25wt%的甲醇;以及(6)與上述成份合計為100wt%的水。 In addition, the third embodiment of the present invention provides a cleaning agent composition for removing oxides on the copper surface of finished or semi-finished printed circuit boards. The cleaning agent composition includes the following ingredients: (1) 5~15wt% of Benzotriazole; (2) 1~9wt% citric acid: (3) 5~15wt% sulfuric acid: (4) 1~9wt% copper sulfate; (5) 15-25wt% methanol; and (6) 100wt% water combined with the above ingredients.
在本發明第四實施態樣中,前述成份之重量百分比分別為:(1)10wt%的苯並三氮唑;(2)5wt%的檸檬酸;(3)10wt%的硫酸;(4)5wt%的硫酸銅;(5)20wt%的甲醇;以及(6)50wt%的水。 In the fourth embodiment of the present invention, the weight percentages of the aforementioned ingredients are: (1) 10wt% benzotriazole; (2) 5wt% citric acid; (3) 10wt% sulfuric acid; (4) 5 wt% copper sulfate; (5) 20 wt% methanol; and (6) 50 wt% water.
另外,本發明第五態樣提供一種印刷電路板的清洗方法,包括:a)將該印刷電路板浸泡於如本發明第一、二實施態樣之清潔劑組成物中的步驟;b)以噴灑或浸泡方式將該印刷電路板進行水洗的步驟;c)將該印刷電路板浸泡於如本發明第三、四實施態樣之清潔劑組成物中的步驟;d)以噴灑或浸泡方式將該印刷電路板進行水洗的步驟;e)將該印刷電路板進行超音波水洗的步驟;以及f)將該印刷電路板烘乾的步驟。 In addition, the fifth aspect of the present invention provides a method for cleaning a printed circuit board, comprising: a) soaking the printed circuit board in the cleaning composition of the first and second embodiments of the present invention; b) using The step of washing the printed circuit board with water by spraying or soaking; c) the step of soaking the printed circuit board in the cleaning agent composition according to the third and fourth embodiments of the present invention; d) washing the printed circuit board by spraying or soaking The step of washing the printed circuit board with water; e) the step of washing the printed circuit board with ultrasonic water; and f) the step of drying the printed circuit board.
在本發明第六態樣中,其中,在該步驟a)中,浸泡溫度介於60~80℃,時間介於5~10分鐘。 In the sixth aspect of the present invention, wherein, in the step a), the soaking temperature is 60-80° C., and the soaking time is 5-10 minutes.
在本發明第七態樣中,其中,在該步驟c)中,浸泡溫度為室溫,時間介於15~30秒。 In the seventh aspect of the present invention, wherein, in the step c), the soaking temperature is room temperature, and the soaking time is between 15 and 30 seconds.
在本發明第八態樣中,其中,在該步驟b)、該步驟d)或該步驟e)中,水洗溫度為室溫,時間為30秒。 In the eighth aspect of the present invention, wherein, in the step b), the step d) or the step e), the washing temperature is room temperature and the washing time is 30 seconds.
為便 貴審查委員能對本發明之目的、形狀、構造裝置特徵及其功效,做更進一步之認識與瞭解,茲舉實施例詳細說明如下: In order to facilitate your review committee to further understand and understand the purpose, shape, structure, device features and effects of the present invention, the embodiments are described in detail as follows:
首先要說明的是,本發明之實施例所揭露的清潔劑組成物主要用於印刷電路板的製程中,清洗銅表面。後續實施例中,會說明不同的清潔劑組成物,以及使用這些清潔劑組成物清洗印刷電路板的方法。 First of all, it should be explained that the cleaning agent composition disclosed in the embodiments of the present invention is mainly used for cleaning the copper surface in the process of printing circuit boards. In the following embodiments, different detergent compositions and methods for cleaning printed circuit boards using these detergent compositions will be described.
本發明之實施例所揭露的清潔劑組成物除了可以用在印刷電路板之印刷製程後的銅面清潔;也可以用在印刷製程後,電鍍或化鍍等表面處理製程前的銅面清潔;甚或可以對印刷電路板成型後的銅面進行清潔。 The cleaning agent composition disclosed in the embodiments of the present invention can be used to clean the copper surface after the printing process of the printed circuit board; it can also be used to clean the copper surface before the surface treatment process such as electroplating or chemical plating after the printing process; It is even possible to clean the copper surface of the printed circuit board after molding.
以下,依序說明本發明之實施例。 Hereinafter, embodiments of the present invention will be described sequentially.
如表1所示,本發明之一實施例揭露一種印刷電路板之銅表面的清潔劑組成物,主要用於防焊印刷步驟後,在鍍金步驟前的銅表面清洗步驟。在此,表1的清潔劑組成物亦可稱為銅面優化劑,目的是要清除銅表面之膠類物質。這些銅表面之膠類物質,多是防焊印刷步驟後,殘留在銅表面的膠,殘膠未清除乾淨則會導致後續化金(即鎳與金)無法在銅表面上正常附著,最後造成漏金。因此,如表1所示,本發明之一實施例揭露一種清潔劑組成物,可以 有效去除防焊印刷步驟後殘留在印刷電路板之銅表面的膠類物質。較佳地,所述清潔劑組成物包括:10wt%的磷酸三鈉、5wt%的甲基磺酸鈉、20wt%的碳酸鉀、10wt%的表面活性劑以及55wt%的水。在其他實施例中,所述清潔劑組成物包含下列成份:5~15wt%的磷酸三鈉、1~9wt%的甲基磺酸鈉、15~25wt%的碳酸鉀、5~15wt%的表面活性劑;以及與上述成份合計為100wt%的水。 As shown in Table 1, an embodiment of the present invention discloses a cleaning agent composition for the copper surface of a printed circuit board, which is mainly used for cleaning the copper surface after the solder mask printing step and before the gold plating step. Here, the cleaning agent composition in Table 1 can also be referred to as a copper surface optimizer, and its purpose is to remove glue-like substances on the copper surface. These glue-like substances on the copper surface are mostly the glue left on the copper surface after the solder resist printing step. Leak money. Therefore, as shown in Table 1, one embodiment of the present invention discloses a cleaning agent composition, which can Effectively remove the glue-like substances remaining on the copper surface of the printed circuit board after the solder mask printing step. Preferably, the detergent composition includes: 10wt% trisodium phosphate, 5wt% sodium methanesulfonate, 20wt% potassium carbonate, 10wt% surfactant and 55wt% water. In other embodiments, the detergent composition comprises the following ingredients: 5-15wt% trisodium phosphate, 1-9wt% sodium methanesulfonate, 15-25wt% potassium carbonate, 5-15wt% surface active agent; and 100wt% water in total with the above ingredients.
以下,說明本發明另一清潔劑組成物。 Next, another detergent composition of the present invention will be described.
如表2所示,本發明另一實施例揭露一種印刷電路板之銅表面的清潔劑組成物,主要用於防焊印刷步驟後,在鍍金步驟前的銅表面清洗步驟。在此,表2之清潔劑組成物也可以稱作銅面促進劑,主要目標是去除銅表面之氧化物。由表2可知,硫酸這個成份可以去除氧化銅。較佳地,所述清潔劑組成物包括:10wt%的苯並三氮唑、5wt%的檸檬酸、10wt%的硫酸、5wt%的硫酸銅、20wt%的甲醇以及50wt%的水。在其他實施例中,所述清潔劑組成物包含下列成份:5~15wt%的苯並三氮唑、1~9wt%的檸檬酸、5~15wt%的硫酸、1~9wt%的硫酸銅、15~25wt%的甲醇;以及與上述成份合計為100wt%的水。 As shown in Table 2, another embodiment of the present invention discloses a cleaning agent composition for the copper surface of a printed circuit board, which is mainly used for cleaning the copper surface after the solder mask printing step and before the gold plating step. Here, the cleaning agent composition in Table 2 can also be referred to as a copper surface accelerator, and its main purpose is to remove oxides on the copper surface. It can be seen from Table 2 that the sulfuric acid component can remove copper oxide. Preferably, the detergent composition includes: 10wt% benzotriazole, 5wt% citric acid, 10wt% sulfuric acid, 5wt% copper sulfate, 20wt% methanol and 50wt% water. In other embodiments, the detergent composition comprises the following ingredients: 5-15wt% benzotriazole, 1-9wt% citric acid, 5-15wt% sulfuric acid, 1-9wt% copper sulfate, 15~25wt% methanol; and 100wt% water in total with the above ingredients.
以下,以本發明一實施例說明本發明表1之清潔劑組成物(銅面優化劑)與表2之清潔劑組成物(銅面促進劑)的使用方法。在此實施例中,乃是在印刷電路板的防焊印刷步驟後,在鍍金步驟前對印刷電路板進行清洗。 Hereinafter, an example of the present invention is used to illustrate the usage method of the cleaning agent composition (copper surface optimizer) in Table 1 and the cleaning agent composition (copper surface accelerator) in Table 2 of the present invention. In this embodiment, the printed circuit board is cleaned before the gold plating step after the solder mask printing step of the printed circuit board.
本發明一實施例所提供之印刷電路板的清洗方法,包括:a)將印刷電路板浸泡於如表1之清潔劑組成物中的步驟;b)以噴灑或浸泡方式將印刷電路板進行水洗的步驟;c)將印刷電路板浸泡於如表2之清潔劑組成物中的步驟;d)以噴灑或浸泡方式將印刷電路板進行水洗的步驟;e)將印刷電路板進行超音波水洗的步驟;以及f)將印刷電路板烘乾的步驟。 The method for cleaning a printed circuit board provided by an embodiment of the present invention includes: a) soaking the printed circuit board in the cleaning agent composition as shown in Table 1; b) washing the printed circuit board with water by spraying or soaking c) the step of immersing the printed circuit board in the cleaning agent composition as shown in Table 2; d) the step of washing the printed circuit board with water by spraying or soaking; e) the step of carrying out the ultrasonic water washing of the printed circuit board steps; and f) the step of drying the printed circuit board.
首先,在步驟a)中,將印刷電路板浸泡於如表1之清潔劑組成物中,而表1之清潔劑組成物的溫度介於60~80℃,浸泡時間介於5~10分鐘。由於表1之清潔劑組成物可快速滲透於頑強的附著物中,使得附著物加速裂解並與水結合,然後擴散並溶解於水中。因此,藉由此步驟可以有效清除印刷電路板之銅表面上的大面積殘膠。 First, in step a), the printed circuit board is soaked in the cleaning agent composition as shown in Table 1, and the temperature of the cleaning agent composition in Table 1 is between 60-80° C., and the soaking time is between 5-10 minutes. Since the detergent composition in Table 1 can quickly penetrate into the tenacious attachments, the attachments are rapidly disintegrated and combined with water, and then diffused and dissolved in water. Therefore, this step can effectively remove a large area of residual glue on the copper surface of the printed circuit board.
接著,在步驟b)中,針對浸泡過表1之清潔劑組成物的印刷電路板,以噴灑或浸泡方式將印刷電路板進行水洗,洗去表1之清潔劑組成物、印刷電路板之銅表面上的殘膠以及其他汙染物。在此步驟中,用於噴灑或浸泡的水溫為室溫,清洗時間為30秒。 Then, in step b), for the printed circuit board immersed in the cleaning agent composition in Table 1, the printed circuit board is washed with water by spraying or soaking, and the cleaning agent composition in Table 1 and the copper on the printed circuit board are washed away. Adhesive residue and other contaminants on the surface. In this step, the water temperature for spraying or soaking is room temperature, and the cleaning time is 30 seconds.
然後,在步驟c)中,將印刷電路板浸泡於如表2之清潔劑組成物中,其中表2之清潔劑組成物的溫度為室溫,浸泡時間介於15~30秒。藉由此步驟,可以有效清除印刷電路板之銅表面上的氧化銅等氧化物。經測試,浸泡30秒後,蝕銅量小於等於20微吋(micro-inch),且銅面產生類拋光的表面,無氧化與傷害綠漆問題。 Then, in step c), the printed circuit board is soaked in the cleaning agent composition as shown in Table 2, wherein the temperature of the cleaning agent composition in Table 2 is room temperature, and the soaking time is between 15-30 seconds. Through this step, oxides such as copper oxide on the copper surface of the printed circuit board can be effectively removed. After testing, after soaking for 30 seconds, the amount of copper corrosion is less than or equal to 20 micro-inches (micro-inch), and the copper surface has a polished surface without oxidation and damage to the green paint.
接著,在步驟d)中,針對浸泡過表2之清潔劑組成物的印刷電路板,同樣以噴灑或浸泡方式將印刷電路板進行水洗,洗去表2之清潔劑組成物、印刷電路板之銅表面上的氧化銅等氧化物以及其他汙染物。在此步驟中,用於噴灑或浸泡的水溫為室溫,清洗時間為30秒。 Then, in step d), for the printed circuit board soaked in the cleaning agent composition in Table 2, the printed circuit board is also washed with water by spraying or soaking, and the cleaning agent composition in Table 2 and the printed circuit board are washed away. Oxides such as copper oxide and other contaminants on copper surfaces. In this step, the water temperature for spraying or soaking is room temperature, and the cleaning time is 30 seconds.
之後,在步驟e)中,進一步將印刷電路板進行超音波水洗,以便完全洗淨印刷電路板的銅表面。 Afterwards, in step e), the printed circuit board is further subjected to ultrasonic water washing, so as to completely clean the copper surface of the printed circuit board.
最後,在步驟f)中,將洗淨之印刷電路板,進行後續烘乾的步驟。 Finally, in step f), the cleaned printed circuit board is subjected to a subsequent drying step.
以下,用表3說明本發明上述實施例之印刷電路板清洗方法的成效。首先說明表3中的用語,所謂「銅優」係指將銅表面優化,亦如前述以清潔、類拋光的方式,讓銅表面達到可進行後續鍍金製程的程度。「小量」與「批量」指的是印刷電路板測試的數量。 Below, Table 3 is used to illustrate the effectiveness of the printed circuit board cleaning method of the above-mentioned embodiment of the present invention. First, the terminology in Table 3 is explained. The so-called "copper excellence" refers to the optimization of the copper surface, as mentioned above, by means of cleaning and polishing, so that the copper surface can be used for the subsequent gold plating process. "Small quantities" and "batches" refer to the number of printed circuit boards tested.
從表3來看,經過上述本發明一實施例所提供之印刷電路板的清洗方法後,不論是各類殘膠、氧化異物、或其他異物,都有效地被清除。因此,經過表1之清潔劑組成物與表2之清潔劑組成物的清洗之後,印刷電路板達到可以進行後續鍍金製程的程度。當然,在其他實施例中,上述印刷電路板的清洗方法也可以用在不同製程階段後的銅表面清洗或印刷電路板成型後的銅表面清洗。 As can be seen from Table 3, after the cleaning method of the printed circuit board provided by the above-mentioned embodiment of the present invention, all kinds of residual glue, oxidized foreign matter, or other foreign matter are effectively removed. Therefore, after cleaning with the cleaning agent composition in Table 1 and the cleaning agent composition in Table 2, the printed circuit board reaches the level where subsequent gold plating process can be performed. Of course, in other embodiments, the above-mentioned method for cleaning the printed circuit board may also be used to clean the copper surface after different process stages or to clean the copper surface after the printed circuit board is formed.
[表3]
以上實施方式僅用以說明本發明的技術方案而非限制,儘管參照較佳實施方式對本發明進行了詳細說明,本領域的普通技術人員應當理解,可以對本發明的技術方案進行修改或等同替換,而不脫離本發明技術方案的精神和範圍。 The above embodiments are only used to illustrate the technical solutions of the present invention without limitation. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention can be modified or equivalently replaced. Without departing from the spirit and scope of the technical solution of the present invention.
Claims (6)
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TW110121196A TWI780761B (en) | 2021-06-10 | 2021-06-10 | Detergent composition and cleaning method of printed circuit board |
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Citations (3)
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---|---|---|---|---|
CN101368136A (en) * | 2007-08-15 | 2009-02-18 | 江苏海迅实业集团股份有限公司 | Electron device oil stain detergent |
CN102719330A (en) * | 2011-03-16 | 2012-10-10 | 达兴材料股份有限公司 | Cleaning agent for cleaning silicon wafer and method for cleaning silicon wafer |
US8426349B2 (en) * | 2009-05-26 | 2013-04-23 | Delaval Holding Ab | Chlorinated alkaline pipeline cleaner with methane sulfonic acid |
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CN101368136A (en) * | 2007-08-15 | 2009-02-18 | 江苏海迅实业集团股份有限公司 | Electron device oil stain detergent |
US8426349B2 (en) * | 2009-05-26 | 2013-04-23 | Delaval Holding Ab | Chlorinated alkaline pipeline cleaner with methane sulfonic acid |
CN102719330A (en) * | 2011-03-16 | 2012-10-10 | 达兴材料股份有限公司 | Cleaning agent for cleaning silicon wafer and method for cleaning silicon wafer |
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