TWI775509B - Probe head and probe card - Google Patents

Abstract

A probe head includes an upper guide plate, a lower guide plate and multiple probes. The upper guide plate has a bump, an upper surface, lower surface and multiple probe holes penetrate through the upper surface and the lower surface. The bump is provided with a supporting surface. In the first direction, the upper surface is located between the supporting surface and the lower surface. The lower guide plate is disposed on the upper guide plate and located on a side of the lower surface. The probes are disposed in the probe holes and surround the bump. In the first direction, an end portion of a probe tail of each probe is located between the supporting surface and the upper surface. The probe tail of each probe cannot penetrate the probe holes and is kept on the side of the upper guide plate. A height of the bump in the first direction is greater than a length of the probe tail of each probe.

Description

Probe Heads and Probe Cards

The embodiments of the present invention are related to the probe head and the probe card.

Semiconductor ICs are usually tested electrically using probe cards. The probe card includes a printed circuit board, a space transformer (Space Transformer, ST) and a probe head (Probe Head, PH). The probe head mainly includes an upper guide plate, a lower guide plate and a plurality of probes. Each probe comprises a needle tail, a needle body and a needle tip which are connected in sequence. The probe passes through the upper guide plate and the lower guide plate, the needle tail of the probe passes through the upper guide plate to contact with the space transformer to form an electrical connection, and the needle tip of the probe passes through the lower guide plate to contact the object to be tested. Make electrical connections.

As the application area of the probe head becomes larger and larger, the parallelism of the upper guide plate of the probe head also varies. Therefore, when the probe head is set on the space transformer, due to the difference in the parallelism of the upper guide plate, the pressure between the needle tail of each probe and the space transformer also changes, and some probes may be assembled during the assembly process. subject to overpressure. When the probes are over-pressed, cracks may occur where the probes pass through the upper guide plate, and even the probes may sink into the upper guide plate to form stuck pins. All of this will result in the failure of the probe card in subsequent use that the test yield is not as expected.

The present application discloses a probe head including an upper guide plate, a lower guide plate and a plurality of probes. The upper guide plate includes a bump, and the upper guide plate has an opposite upper surface, a lower surface, and a plurality of pinholes vertically penetrating the upper surface and the lower surface along the first direction, the bump is arranged on the upper surface, and the bump has a supporting surface, which is In the first direction, the upper surface is located between the support surface and the lower surface. The lower guide plate is arranged on the upper guide plate and is located on one side of the lower surface. The probe has a needle tail, a needle body and a needle tip that are connected in sequence. The probe is arranged in the pinhole and surrounds the bump or is arranged in an array in the range surrounded by the bump, and in the first direction, the end of the needle tail is located on the supporting surface. between the upper surface.

The present application further discloses a probe card including a circuit board, a space converter and the aforementioned probe head. The space transformer has a plurality of electrical contacts and is arranged on the circuit board. The probe head is arranged on the space transformer, the needle tails of the probes of the probe head respectively face the electrical contact points, the supporting surface is abutted against the space transformer, and the electrical contact point and the end of the needle tail have a gap in the first direction.

Referring to FIG. 1 , FIG. 1 is a schematic diagram of an embodiment of a probe card of the present invention. The probe card of this embodiment is a vertical probe card. The probe card shown in the embodiment of FIG. 1 is assembled from a circuit board PCB, a space transformer ST (Space Transformer) and a probe head PH (Probe Head). Thereby, the probe head PH can be electrically connected to the device under test for electrical testing. Among them, the circuit board PCB and the space converter ST are reflowed by solder balls (not shown in the figure), or using anisotropic conductive glue, elastic contact elements, etc. (not shown in the figure) as the circuit board PCB and the space converter. The intermediate conductor of the transformer ST electrically connects the internal circuit of the circuit board PCB with the internal circuit of the space transformer ST.

Continuing to refer to FIG. 1 , the probe head PH mainly includes an upper guide plate 10 , a lower guide plate 20 and a plurality of probes 30 . The probe 30 has a needle tail 31 , a needle body 32 and a needle tip 33 . The probe 30 passes through the upper guide plate 10 and the lower guide plate 20 , the needle tail 31 of the probe 30 is located on one side of the upper guide plate 10 , and the needle tip 33 passes through the lower guide plate 20 . The probe head PH is suitable for being assembled on the space transformer ST or the circuit board PCB, so that the probe head PH is arranged on the space transformer ST. After the probe head PH of the present invention is arranged on the space transformer ST, the The end of the needle tail 31 can maintain a gap F (or floating gap, Floating Gap) with the space transformer ST. During the needle testing process, the probe 30 of the probe head PH and the space transformer ST have a gap. During pressing, the needle tail 31 of the probe 30 can be prevented from falling into the pinhole 13 of the upper guide plate 10 abnormally or causing the pinhole 13 to be damaged.

Further, since the probe 30 moves toward the direction of the space transformer ST during the needle measurement, in this embodiment, the needle body 32 of the probe 30 is bucking, so that the probe 30 The region can have bending deformation, that is, the needle tail 31 and the needle tip 33 of the probe 30 are not located in the same linear extending direction. Besides, the direction of the bending deformation of each probe 30 can be controlled.

In order to maintain the gap F after the probe head PH is arranged on the space transformer ST, it can be achieved through the following specific embodiments.

Referring to FIG. 1 , in one embodiment, the upper guide plate 10 of the probe head PH shown in FIG. 1 includes bumps B. As shown in FIG. Here, the upper guide plate 10 has a plate-like structure and has an upper surface 11 and a lower surface 12 that are parallel and opposite. The upper guide plate 10 vertically penetrates the upper surface 11 and the lower surface 12 along the first direction D1 to form a plurality of pin holes 13 , and the bump B has a supporting surface S1 and is arranged on the upper surface 11 . In the first direction D1 , the upper surface 11 is located between the support surface S1 and the lower surface 12 . Here, the lower guide plate 20 is disposed on the upper guide plate 10 and located on one side of the lower surface 12 .

Continuing to refer to FIG. 1 in conjunction with FIG. 2 , in this embodiment, the pinholes 13 of the upper guide plate 10 are arranged around the bump B, whereby the probes 30 are also arranged around the bump B when the probes 30 are arranged in the pinhole 13 state. In a specific embodiment, for example, when the bump B is a solid rectangular block, the probes 30 can be arranged in a surrounding manner to form a rectangle along the rectangular outer contour shape of the bump B. However, the arrangement of the probes 30 is not limited thereto, and may be determined according to the arrangement shape or position of the test contacts of the object to be tested.

In addition, in the first direction D1, the end of the needle tail 31 of each probe 30 is located between the support surface S1 and the upper surface 11, that is, the height of the bump B in the first direction D1 is greater than that of each probe 30 The length of the needle tail is 31. Here, the end of the needle tail 31 of each probe 30 is the end of the needle tail 31 away from the needle tip 33 . Therefore, when the probes 30 are arranged on the upper guide plate 10 , the ends of the needle tails 31 of the probes 30 do not protrude from the bump B. That is to say, when the upper guide plate 10 of the probe head PH is disposed on the space transformer ST, it can ensure that the upper guide plate 10 of the probe head PH can contact the space transformer ST, so as to avoid unintended contact with various parts during the assembly process. The needle tails 31 of the probes 30 prevent the needle tails 31 of the probes 30 from being over-pressured and abnormally sinking into the pinhole 13 or causing the pinhole 13 to be damaged.

Further, referring to FIG. 1 , in an embodiment, since the side of the space transformer ST facing the probe 30 has an electrical contact point P to contact the probe 30 to form an electrical connection during the needle test, therefore, in order to make the A gap F can be maintained between the end of the needle tail 31 of each probe 30 and the space transformer ST. The distance between the upper surface 11 of the probe head PH and the supporting surface S1 of the bump B in the first direction D1 is greater than the sum of the lengths of the end of the needle tail 31 and the electrical contact point P in the first direction D1. In this way, when the probe head PH is set on the space transformer ST and has not yet been probed, the space transformer ST can still keep abutting against the supporting surface S1 of each bump B, and the electrical contact point of the space transformer ST is There is a gap F between P and the end of the needle tail 31 of the probe 30 in the first direction D1. The electrical contacts P are respectively connected to the internal lines of the space transformer ST.

It can be seen from this that when the probe head PH is installed in the space transformer ST, the support surface S1 of the bump B on the large-area upper guide plate 10 is in contact with the space transformer ST. The contact area between the upper guide plate 10 and the space transformer ST is increased, thereby reducing the possibility of deformation of the upper guide plate 10 during the assembly process. In this way, in addition to ensuring the parallelism of the space transformer ST after the probe head PH is installed, it can also ensure that the needle tails 31 of the probes 30 are not pressed and damaged due to the deformation of the upper guide plate 10 . In addition, a gap F is maintained between the needle tail 31 of the probe 30 of the probe head PH, so that the probe 30 of the probe head PH can be prevented from colliding with the space transformer ST during the assembly process or the needle testing process. and damaged.

Further, referring to FIG. 4 , in an embodiment, in order to avoid random displacement of the probes 30 in the direction of the first direction D1 toward the lower guide plate 20 , the needle tails 31 of the probes 30 are limited to be located at different positions from the upper guide plate 10 . on one side of the lower guide plate 20 . Here, the cross-sectional shape of the needle tail 31 of each probe 30 is non-circular, and the cross-sectional shape of the needle body 32 of each probe 30 is circular. The needle tail 31 of the needle 30 cannot pass through the needle hole 13 and is kept on one side of the upper guide plate 10. In this state, the needle tail 31 of each probe 30 becomes a restraining portion that can limit the displacement of the probe 30 in the first direction D1. (Stopper), the stopper formed by the needle tail 31 can prevent the probe 30 from falling out of the probe head PH from the pinhole 13 of the upper guide plate 10 and the pinhole of the lower guide plate 20 . Specifically, the needle tail 31 of each probe 30 may be formed by, but is not limited to, one end of the needle body 32 protruding from the upper guide plate 10 is pressed and deformed, so that the width of the needle tail 31 is greater than the outer diameter of the needle hole 13 . flat shape.

In some embodiments, the upper guide plate 10 may be composed of a single material, different materials, one-piece molding, or a separate combination. Referring to FIGS. 1 and 2 , the embodiment shown in FIGS. 1 and 2 shows that the upper guide plate 10 and the bump B are integrally formed from a single material. In this embodiment, the upper guide plate 10 and the bump B are integrally formed by a ceramic material.

Further, in order to avoid the problem of interference of the probes 30 caused by the rotation of the probes 30 on the upper guide plate 10, the probe head PH further includes a rotation-stop structure A, and the rotation-stop structure A has a plurality of non-circular holes H1 , each non-circular hole H1 communicates with each pin hole 13 respectively. Here, the cross section of the needle tail 31 of the probe 30 is non-circular, and the needle tails 31 of the probe 30 are respectively accommodated in the non-circular holes H1. The hole H1 can limit the rotation of the probe 30 relative to the upper guide plate 10 , that is, the probe 30 cannot rotate relative to the upper guide plate 10 and the lower guide plate 20 .

Further, referring to FIG. 3 , the embodiment of FIG. 3 is further provided with an anti-rotation structure A based on the structural basis of the embodiment of FIG. 2 . Here, the upper guide plate 10 and the bump B are integrally formed from a single material, and the upper guide plate 10 includes the anti-rotation structure A. In addition, in this embodiment, the anti-rotation structure A and the bump B on the upper guide plate 10 are the anti-rotation block 14 formed integrally, and the anti-rotation block 14 is provided with a plurality of non-circular holes H1 to limit the probe 30 rotation. Here, the cross-sectional shape of the needle tail 31 of the probe 30 is non-circular. When the needle tail 31 of the probe 30 is accommodated in the non-circular hole H1, the rotational momentum of the needle tail 31 of the probe 30 will be affected by the non-circular hole H1. Restricted and stopped. For example, the cross section of the needle tail 31 of the probe 30 can be, but not limited to, a square circle, that is, two corresponding sides are flat with each other and the other two corresponding sides are arc-shaped, and the non-circular hole H1 is a rectangular hole, then the needle tail 31 accommodates In the non-circular hole H1, the rotation can be stopped by the non-circular hole H1. In other embodiments, the cross-sectional shape of the needle tail 31 of the probe 30 is a square circle, and the non-circular hole H1 can be a square circular hole or an oval hole. The shape is not particularly limited, as long as the size is properly configured (for example, the non-circular hole H1 should not be too large compared to the needle tail 31 ), when the needle tail 31 of the probe 30 is accommodated in the non-circular hole H1, the needle tail 31 of the probe 30 will not be too large. Can receive the anti-rotation of the non-circular hole H1.

Specifically, the anti-rotation block 14 is disposed on the upper surface 11 . In one embodiment, the anti-rotation structure A further has a stepped surface S2 , and the stepped surface S2 and the supporting surface S1 are not coplanar and are stepped. In this embodiment, the anti-rotation block 14 has a stepped surface S2 adjacent to the non-circular hole H1 and the bump B. In the first direction, the stepped surface S2 is located between the support surface S1 and the upper surface 11 . In this way, the arrangement of the step surface S2 can be more suitable for the arrangement of the bumps B and the pinholes 13 having various relative positions.

In this embodiment, when each probe 30 passes through the upper guide plate 10 to the lower guide plate 20, the needle tip 33 of each probe 30 can pass through the non-circular hole H1 and the needle hole 13 and then pass through the lower guide plate 20, The needle body 32 of each probe 30 passes through the non-circular hole H1 and the pin hole 13 and can be accommodated in the pin hole 13 and the accommodating space between the upper guide plate 10 and the lower guide plate 20 , and each probe 30 The needle tails 31 are accommodated in the non-circular holes H1 , whereby the needle tails 31 of the probes 30 can be restricted by the non-circular holes H1 to limit the rotation of the probes 30 .

In the embodiment in which the rotation stop structure A is provided to limit the rotation of the probe 30, it may also be a split structure configuration using different materials. Specifically, referring to FIG. 5 , the embodiment of FIG. 5 is also based on the structural basis of the embodiment of FIG. 2 and further provides the anti-rotation structure A. In this embodiment, the upper guide plate 10 and the bump B are integrally made of ceramic material, and the anti-rotation structure A is the anti-rotation member 40 that can be separated from the upper guide plate 10 and the bump B. Here, the anti-rotation member 40 may be a thin film material disposed on the upper guide plate 10 , and the anti-rotation member 40 is provided with a plurality of non-circular holes H1 . In this embodiment, the anti-rotation member 40 is disposed on the upper surface 11 , and the non-circular hole H1 of the anti-rotation member 40 communicates with the pin hole 13 of the upper guide plate 10 . In this way, when each probe 30 passes through the upper guide plate 10 to the lower guide plate 20, the needle tip 33 of each probe 30 can pass through the non-circular hole H1 and the needle hole 13 and then pass through the lower guide plate 20, and each probe The needle body 32 of the needle 30 passes through the non-circular hole H1 and the needle hole 13 and can be accommodated in the needle hole 13 , and the needle tail 31 of each probe 30 is accommodated in the non-circular hole H1 . The needle tail 31 of the probe 30 can be restricted by the non-circular hole H1 to limit the rotation of the probe 30 . In one embodiment, the anti-rotation member 40 may also have a stepped surface S2 , and the stepped surface S2 is adjacent to the non-circular hole H1 and the bump B.

Further, in some embodiments, the anti-rotation member 40 may be a single piece of film material. Also referring to FIG. 5 , the anti-rotation member 40 has a stepped surface S2 and a non-circular hole H1 , and the anti-rotation member 40 corresponds to A through hole H2 is provided at the position where the bump B is arranged on the upper guide plate 10 , and the shape of the through hole H2 corresponds to the shape of the outer contour of the bump B. Here, the positional configuration of the non-circular hole H1 relative to the through hole H2 corresponds to the position configuration of the probe 30 relative to the bump B. In this embodiment, the through hole H2 surrounds the non-circular hole H1 . In this way, the anti-rotation member 40 is disposed on the upper surface 11 of the upper guide plate 10 , and the through hole H2 passes through the bump B, and the non-circular hole H1 communicates with the pin hole 13 , that is, the bump formed by the anti-rotation member 40 B is arranged on the hole H2 and placed on the upper surface 11 of the upper guide plate 10 . Here, each probe 30 first passes through the anti-rotation member 40 and then passes through the upper guide plate 10, and the needle tail 31 of the probe 30 is accommodated in the non-circular hole H1 of the anti-rotation member 40 and is received by the non-circular hole H1. stop rotation. The anti-rotation member 40 can arrange the plurality of pattern structures on the upper surface 11 of the upper guide plate 10 by cutting a plurality of pattern structures on the film in a collage manner, and accordingly provide a rotational stop of each probe 30. Function.

In other embodiments, referring to FIG. 6 , the embodiment in FIG. 6 is also the structural basis based on the embodiment in FIG. 2 , that is, the embodiment in FIG. In this embodiment, the upper guide plate 10 is a three-piece split structure of different materials. Specifically, the bump B of the upper guide plate 10 can be separated from the upper guide plate 10, and the bump B can be divided into two separable parts. In this embodiment, the bump B includes the anti-rotation structure A and the height setting layer B2, and the anti-rotation structure A is the anti-rotation layer B1 which can be separated from the height setting layer B2. In this embodiment, the anti-rotation layer B1 is disposed on the upper surface 11 and has an intermediate surface S3 and a plurality of non-circular holes H1, and the height setting layer B2 is disposed on a part of the intermediate surface S3 and has a supporting surface S1, in the first direction The upper intermediate surface S3 on D1 is located between the supporting surface S1 and the upper surface 11 . Here, since the height setting layer B2 is disposed on a part of the intermediate surface S3, the rest of the intermediate surface S3 is exposed, so that the anti-rotation layer B1 and the height setting layer B2 have a stepped structure, and the rest of the aforementioned intermediate surface S3 (The exposed part of the intermediate surface S3 ) becomes the step surface S2 corresponding to the foregoing embodiments.

Likewise, in this embodiment, the non-circular hole H1 of the anti-rotation layer B1 communicates with the pinhole 13 . When each probe 30 passes through the upper guide plate 10 to the lower guide plate 20, the needle tip 33 of each probe 30 can pass through the non-circular hole H1 and the needle hole 13 and then pass through the lower guide plate 20. The body 32 passes through the non-circular hole H1 and the pinhole 13 and can be accommodated in the pinhole 13, while the needle tail 31 of each probe 30 is accommodated in the non-circular hole H1, whereby the The needle tail 31 can be restricted by the non-circular hole H1 to restrict the rotation of the probe 30 .

In this embodiment, the anti-rotation layer B1 and the height setting layer B2 can be respectively made of ceramic material or thin film material. Here, the three-piece split structure in which the upper guide plate 10, the anti-rotation layer B1 and the height setting layer B2 are three-piece structures refers to the three-piece structure in the processing stage. After B2 are processed separately, they are combined into an inseparable single structure. Since the upper guide plate 10 , the anti-rotation layer B1 and the height setting layer B2 are three-piece separate structures in the processing stage, the upper guide plate 10 , the anti-rotation layer B1 and the height setting layer B2 can be processed in different places at the same time. Thus, the time required for processing is shortened. In addition, since the upper guide plate 10, the anti-rotation layer B1 and the height setting layer B2 are processed separately and then combined, when the probe 30 of the probe head PH has a different form, the needle body based on the probe 30 32 or the size and shape of the pin tail 31 are different, in this embodiment, the form of the pinhole 13 of the upper guide plate 10 and the size of the The non-circular hole H1 form is then combined, which can be more convenient to apply different probe 30 forms.

In addition, in the foregoing embodiments, the larger the ratio of the area of the support surface S1 to the cross-sectional area of the upper guide plate 10 in the direction perpendicular to the first direction D1, the better. In this embodiment, the ratio of the area of the support surface S1 to the cross-sectional area of the upper guide plate 10 in the second direction D2 is preferably greater than 50%. This ensures that when the probe head PH is disposed on the space transformer ST, the upper guide plate 10 can be stably supported by the space transformer ST without being deformed, and the parallelism between the upper guide plate 10 and the space transformer ST can be maintained. Therefore, it can further ensure that each probe 30 does not fall into the pinhole 13 abnormally or break the pinhole 13 .

In another embodiment, please refer to FIG. 7 and FIG. 8 . FIG. 7 and FIG. 8 show the structure of the upper guide plate 10 including the groove 15 . In this embodiment, the groove 15 is recessed from the upper surface 11 , and the groove 15 has a groove bottom surface 151 . The groove bottom surface 151 is located between the top surface 11 and the bottom surface 12 in the first direction D1 . In this embodiment, the probes 30 are disposed in the grooves 15 , and the probes 30 may be arranged in the grooves 15 in an array or peripheral manner, but not limited to. When each probe 30 is disposed in the groove 15, in the first direction D1, the end of the needle tail 31 of each probe 30 is located between the groove bottom surface 151 and the upper surface 11, and the length of the needle tail 31 is smaller than that of the groove 15. high.

Further, in this embodiment, the arrangement of the probes 30 in the grooves 15 may vary depending on the shapes of the grooves 15 . In one embodiment, the groove 15 of the upper guide plate 10 may be, but not limited to, a rectangle or a circle (not shown in the figure). Here, based on the shape of the grooves 15 of the upper guide plate 10 , the groove bottom surface 151 is a flat plane, so the probes 30 can be arranged in the grooves 15 in a matrix. For example, when the shape of the grooves 15 of the upper guide plate 10 is rectangular, the probes 30 can be arranged in the grooves 15 in a matrix.

In one embodiment, referring to FIG. 7 , the grooves 15 of the upper guide plate 10 may also be grid-shaped. Here, since the shape of the groove 15 is a grid shape, the bottom surface 151 of the groove is correspondingly a grid shape. In this way, the probes 30 can be arranged along the grid-shaped grooves 15 , thereby forming a peripheral arrangement.

Further, referring to FIG. 9 , the embodiment of FIG. 9 is the same as the embodiment of FIG. 7 and FIG. 8 . The upper guide plate 10 is provided with grooves 15 and the probes 30 are arranged around the same structural basis. In this embodiment, the probe 30 is disposed in the groove 15 , and the upper guide plate 10 further includes a rotation-stopping structure A. As shown in FIG. And in this embodiment, the anti-rotation structure A is the anti-rotation block 14 made of the same material as the upper guide plate 10 , and the structure of the anti-rotation block 14 is the same as that of the previous embodiment and has a connecting pin hole 13 . The non-circular hole H1 may have a stepped surface S2. The difference is that the anti-rotation block 14 in this embodiment is disposed on the groove bottom surface 151 of the groove 15 . Therefore, in this embodiment, the stepped surface S2 of the anti-rotation block 14 is adjacent to the non-circular hole H1 and the upper guide plate 10 , and the stepped surface S2 of the anti-rotation block 14 is not coplanar with the upper surface 11 and becomes a step and the stepped surface S2 is located between the upper surface 11 and the groove bottom surface 151 . The needle tail 31 of the probe 30 can also be accommodated in the non-circular hole H1 to be prevented from rotating by the non-circular hole H1.

In addition, referring to FIG. 10 , the embodiment of FIG. 10 is the same as the embodiment of FIG. 7 and FIG. 8 . The upper guide plate 10 is provided with grooves 15 and the probes 30 are arranged around the same structural basis. In this embodiment, the upper guide plate 10 is further provided with a rotation-stopping structure A, and the rotation-stopping structure A has a rotation-stopping member 40 . In this embodiment, the anti-rotation member 40 is disposed on the bottom surface 151 of the groove. In addition, when the probes 30 in the groove 15 are arranged in an array, the anti-rotation member 40 without the through hole H2 is provided. When the shape of the grooves 15 is grid-shaped, the anti-rotation member 40 with the through holes H2 is provided, and the through-holes H2 of the anti-rotation member 40 are inserted into the protrusions between the grooves 15 in the grid shape.

Furthermore, in each embodiment in which the probe 30 is disposed in the groove 15 , as shown in FIGS. 7 to 10 , since the anti-rotation block 14 or the anti-rotation member 40 is disposed on the bottom surface 151 of the groove lower than the upper surface 11 , Therefore, the end of the needle tail 31 of the probe 30 is located between the upper surface 11 and the groove bottom surface 151 . That is, when the probe head PH is disposed on the space transformer ST, the probe head PH is such that the upper surface 11 of the above guide plate 10 contacts the space transformer ST. Therefore, in each embodiment in which the probes 30 are disposed in the grooves 15, the larger the ratio of the area of the upper surface 11 to the cross-sectional area of the upper guide plate 10 in the second direction D2, the better. Here, the ratio of the area of the upper surface 11 to the cross-sectional area of the upper guide plate 10 in the second direction D2 is greater than 50%. In this way, in each embodiment in which the probe 30 is disposed in the groove 15, it is ensured that when the probe head PH is disposed in the space transformer ST, the upper guide plate 10 can be stably supported by the space transformer ST without being deformed. Therefore, the parallelism between the upper guide plate 10 and the space transformer ST can be maintained, and it can further ensure that the probes 30 do not fall into the pinhole 13 abnormally or break the pinhole 13 .

Referring to FIG. 11 , in an embodiment, the same as the embodiment of FIG. 1 , the upper guide plate 10 also includes a bump B, and the end of the needle tail 31 of the probe 30 is also located between the support surface S1 and the upper surface 11 . The difference is that the probes 30 of the present embodiment are arranged in an array in a range surrounded by the bumps B. As shown in FIG. In a specific embodiment, the bump B on the upper guide plate 10 may be, but not limited to, a closed contour shape, such as a hollow square. In this way, after the probe head PH is disposed on the space transformer ST, a gap F can also be maintained between the end of the needle tail 31 of the probe 30 and the space transformer ST.

Of course, the upper guide plate 10 can be integrally formed with the same material as the bump B and the anti-rotation block 14 , as in the aforementioned embodiment of FIG. 1 in which the upper guide plate 10 includes the bump B. It is also possible that the upper guide plate 10 and the bump B are integrally formed with the same material, and the anti-rotation members 40 of different materials are provided separately. Alternatively, the upper guide plate 10 may be made of a single material, and the bumps B including the anti-rotation layer B1 and the height setting layer B2 may be made of different materials separately.

In summary, when the probe head PH of the aforementioned embodiments of the present application is disposed on the space transformer ST, the support surface S1 or the upper surface 11 can always abut against the space transformer ST, thereby enabling the upper guide plate 10 to be supported and reduce deformation. Further, since the upper guide plate 10 can maintain a stable and non-deformed state, each probe 30 provided on the upper guide plate 10 can maintain the parallelism with the space transformer ST and the gap F, thereby reducing the Damage to the probe 30 and the upper guide plate 10 can be avoided during the needle test.

Although the present disclosure has been disclosed above with some embodiments, it is not intended to limit the present disclosure. Anyone with ordinary knowledge in the technical field can make some changes and modifications without departing from the spirit and scope of the present disclosure. Therefore, the scope of patent protection of the present invention shall be determined by the scope of the patent application attached to this specification.

PH: Probe head ST: Space Transformer PCB: circuit board 10: Upper guide plate 11: Upper surface 12: Lower surface 13: pinhole 14: Stop block 15: Groove 151: Bottom of groove 20: Lower guide plate 30: Probe 31: pin tail 32: Needle body 33: Needle Tip 40: Anti-rotation parts A: Anti-rotation structure F: Clearance B: bump B1: anti-rotation layer B2: Height setting layer P: electrical contact point S1: Support surface S2: Step surface S3: Intermediate Surface H1: non-circular hole H2: perforated D1: first direction D2: Second direction

FIG. 1 is a schematic diagram of an embodiment of a probe card of the present invention. 2 is a schematic diagram of an embodiment of the present invention in which the upper guide plate of the probe head has bumps and the probes are arranged around the probe. FIG. 3 is a schematic diagram of an embodiment in which the upper guide plate, the bump and the anti-rotation block are integrally formed on the probe card according to the present invention. FIG. 4 is a schematic diagram of a rotation-stop member disposed on the probe head of the present invention. FIG. 5 is a schematic diagram of an embodiment of the present invention in which the upper guide plate and the protruding block of the probe card are integrally formed and an anti-rotation member is additionally provided. FIG. 6 is a schematic diagram of an embodiment in which the upper guide plate of the probe card is three-piece according to the present invention. FIG. 7 is a schematic diagram of an embodiment in which the upper guide plate of the probe head of the present invention has grid-shaped grooves. FIG. 8 is a schematic diagram of an embodiment in which the upper guide plate of the probe head of the present invention has grooves. FIG. 9 is a schematic diagram of an embodiment in which the upper guide plate of the probe card of the present invention has grooves and anti-rotation blocks. FIG. 10 is a schematic diagram of an embodiment in which the upper guide plate of the probe card of the present invention has a groove and is provided with a rotation preventing member. FIG. 11 is a schematic diagram of an embodiment of the present invention in which the probe card has bumps and the probe array is disposed in the bumps.

PH: Probe head

ST: Space Transformer

PCB: circuit board

10: Upper guide plate

11: Upper surface

12: Lower surface

13: pinhole

15: Groove

151: Bottom of groove

20: Lower guide plate

30: Probe

31: pin tail

32: Needle body

33: Needle Tip

F: Clearance

P: electrical contact point

D1: first direction

D2: Second direction

Claims (9)

A probe head comprising: An upper guide plate includes a bump, and the upper guide plate has an opposite upper surface, a lower surface, and a plurality of pinholes perpendicularly penetrating the upper surface and the lower surface along a first direction, the bump is formed by the upper surface and the lower surface. The surface is protruding, the bump has a supporting surface, and in the first direction, the upper surface is located between the supporting surface and the lower surface; a lower guide plate, disposed on the upper guide plate and located on one side of the lower surface; and A plurality of probes, with a needle tail, a needle body and a needle tip connected in sequence, the plurality of probes are arranged in a peripheral or matrix manner, the plurality of probes are arranged in the plurality of pinholes and surround the bump, and In the first direction, the end of the needle tail is located between the support surface and the upper surface, the needle tail cannot pass through the needle hole of the upper guide plate and is kept on the upper surface side of the upper guide plate, and The height of the bump in the first direction is greater than the length of the needle tail. The probe head as claimed in claim 1, further comprising an anti-rotation structure, the anti-rotation structure is disposed on the upper surface and has a plurality of non-circular holes, each of the non-circular holes is communicated with each of the pin holes respectively, the plurality of The cross section of the needle tail of the probe is non-circular, and the needle tails of the plurality of probes are respectively accommodated in the non-circular holes and are prevented from rotating by the non-circular holes. The probe head according to claim 2, wherein the anti-rotation structure further comprises a stepped surface, the stepped surface is adjacent to the plurality of non-circular holes and the protruding block, and the stepped surface and the supporting surface are not coplanar. In the first direction, the stepped surface is located between the support surface and the upper surface. The probe head as claimed in claim 2 or 3, wherein the upper guide plate includes the anti-rotation structure, and the anti-rotation structure is integrally formed with the protrusion. The probe head according to claim 2 or 3, wherein the anti-rotation structure can be separated from the upper guide plate and the bump. The probe head according to claim 2 or 3, wherein the anti-rotation structure is a anti-rotation member that can be separated from the upper guide plate and the protruding block, the anti-rotation member further has a through hole, and the plurality of non-circular shapes The hole is located around the through hole, and the through hole is sleeved on the bump. The probe head as claimed in claim 3, wherein the bump includes the anti-rotation structure and a height setting layer, the anti-rotation structure is an anti-rotation layer that can be separated from the height setting layer, and the anti-rotation layer further has an intermediate surface, the height setting layer is disposed on a part of the intermediate surface and has the supporting surface, and the rest of the intermediate surface becomes the step surface. The probe head according to claim 1, wherein the area of the support surface accounts for more than 50% of the cross-sectional area of the upper guide plate in a direction perpendicular to the first direction. A probe card containing: a circuit board; a space transformer disposed on the circuit board, the space transformer has a plurality of electrical contacts; and The probe head according to any one of claims 1 to 8 is disposed in the space transformer, the needle tails of the plurality of probes of the probe head respectively face the plurality of electrical contact points, and the supporting surface is abutted against the plurality of electrical contact points. In the space transformer, the electrical contact point and the end of the needle tail have a gap in the first direction.

Images