TWI774679B - Curable composition, cured film, color filter, light-shielding film, solid-state imaging element, image display device, manufacturing method of cured film, and polyfunctional thiol compound - Google Patents

Curable composition, cured film, color filter, light-shielding film, solid-state imaging element, image display device, manufacturing method of cured film, and polyfunctional thiol compound Download PDF

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TWI774679B
TWI774679B TW106118513A TW106118513A TWI774679B TW I774679 B TWI774679 B TW I774679B TW 106118513 A TW106118513 A TW 106118513A TW 106118513 A TW106118513 A TW 106118513A TW I774679 B TWI774679 B TW I774679B
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水野明夫
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Abstract

本發明提供一種能夠獲得具有優異之曝光靈敏度且具有與支撐體的優異之黏附性之硬化膜之硬化性組成物、硬化膜、濾色器、遮光膜、固體攝像元件、圖像顯示裝置、硬化膜的製造方法及多官能硫醇化合物。硬化性組成物含有多官能硫醇化合物、聚合性化合物及光聚合起始劑,多官能硫醇化合物含有2個以上的硫醇基及與硫醇基不同之相互作用性基團。The present invention provides a curable composition, a cured film, a color filter, a light-shielding film, a solid-state imaging element, an image display device, and a cured film capable of obtaining a cured film having excellent exposure sensitivity and excellent adhesion to a support. A method for producing a film and a polyfunctional thiol compound. The curable composition contains a polyfunctional thiol compound, a polymerizable compound, and a photopolymerization initiator, and the polyfunctional thiol compound contains two or more thiol groups and interactive groups different from the thiol groups.

Description

硬化性組成物、硬化膜、濾色器、遮光膜、固體攝像元件、圖像顯示裝置、硬化膜的製造方法及多官能硫醇化合物Curable composition, cured film, color filter, light-shielding film, solid-state imaging element, image display device, manufacturing method of cured film, and polyfunctional thiol compound

本發明係有關一種硬化性組成物、硬化膜、濾色器、遮光膜、固體攝像元件、圖像顯示裝置、硬化膜的製造方法及多官能硫醇化合物。The present invention relates to a curable composition, a cured film, a color filter, a light-shielding film, a solid-state imaging element, an image display device, a method for producing a cured film, and a polyfunctional thiol compound.

圖像顯示裝置中使用之濾色器中,為了遮蔽著色像素之間的光,並提高對比度等,具備有被稱為黑矩陣之遮光膜。 並且,固體攝像元件中,以為了防止產生噪音及提高畫質等而設置有遮光膜。當前,行動電話及PDA(個人數位助理(Personal Digital Assistant))等電子設備的便攜終端上搭載有小型且薄型的攝像單元。該等攝像單元通常具備CCD(電荷耦合元件(Charge Coupled Device))影像感測器及CMOS(互補性金屬氧化半導體(Complementary Metal-Oxide Semiconductor))影像感測器等固體攝像元件及用於在固體攝像元件上形成被攝體像的透鏡。A color filter used in an image display device is provided with a light-shielding film called a black matrix for the purpose of shielding light between colored pixels, improving contrast, and the like. In addition, in the solid-state imaging element, a light shielding film is provided in order to prevent noise generation, improve image quality, and the like. Currently, small and thin imaging units are mounted on portable terminals of electronic devices such as cellular phones and PDAs (Personal Digital Assistants). These imaging units usually include solid-state imaging elements such as CCD (Charge Coupled Device) image sensors and CMOS (Complementary Metal-Oxide Semiconductor) image sensors, and are used for solid-state imaging. A lens for forming a subject image on the imaging element.

專利文獻1中記載有:“一種感光性樹脂組成物,其用於形成將圖像顯示裝置中的像素進行分離之隔壁,感光性樹脂組成物含有:(A)作為成分而在分子內具有羧基之黏結劑聚合物;(B)作為成分之光聚合性化合物;(C)作為成分之光聚合起始劑;(D)作為成分而具有巰基之化合物;及(E)作為成分之黑色顏料。”。 [先前技術文獻] [專利文獻]Patent Document 1 describes: "A photosensitive resin composition for forming partition walls separating pixels in an image display device, the photosensitive resin composition containing: (A) as a component, a carboxyl group in the molecule. (B) a photopolymerizable compound as an ingredient; (C) a photopolymerization initiator as an ingredient; (D) a compound having a mercapto group as an ingredient; and (E) a black pigment as an ingredient. ". [Prior Art Literature] [Patent Literature]

[專利文獻1]:日本特開2014-41188號公報[Patent Document 1]: Japanese Patent Laid-Open No. 2014-41188

本發明人在支撐體上塗佈專利文獻1中記載之感光性樹脂組成物,並對所得之感光性樹脂組成物層進行曝光而製作出硬化膜,其結果,發現存在進一步改善曝光靈敏度的餘地。具體而言,發現專利文獻1中記載之感光性樹脂組成物中存在若想要獲得更微細的圖案形狀,則曝光中所需的能量變大的問題。 並且,本發明人對藉由上述方法獲得之硬化膜進行研究的結果,發現存在進一步改善與支撐體(以下還稱為“基板”。)之間的黏附性的餘地。The inventors of the present invention applied the photosensitive resin composition described in Patent Document 1 on a support, and exposed the obtained photosensitive resin composition layer to produce a cured film. As a result, they found that there is room for further improvement in exposure sensitivity. . Specifically, in the photosensitive resin composition described in Patent Document 1, it has been found that if a finer pattern shape is to be obtained, the energy required for exposure becomes large. And as a result of examining the cured film obtained by the said method, this inventor discovered that there exists room for further improvement of the adhesiveness with a support body (henceforth a "substrate").

本發明的課題為提供一種能夠獲得具有優異之曝光靈敏度且具有與支撐體的優異之黏附性之硬化膜之硬化性組成物。 並且,本發明的課題為提供一種硬化膜、濾色器、遮光膜、固體攝像元件、圖像顯示裝置、硬化膜的製造方法及多官能硫醇化合物。The subject of this invention is to provide the curable composition which can obtain the cured film which has the outstanding exposure sensitivity and the outstanding adhesiveness with a support. Moreover, the subject of this invention is to provide the manufacturing method of a cured film, a color filter, a light-shielding film, a solid-state imaging element, an image display device, a cured film, and a polyfunctional thiol compound.

本發明人為了實現上述課題而進行了深入研究的結果,發現含有規定的多官能硫醇化合物之硬化性組成物能夠解決上述課題,從而完成了本發明。 亦即,發現藉由以下構成能夠實現上述課題。As a result of earnestly examining in order to achieve the above-mentioned problem, the present inventors found that a curable composition containing a predetermined polyfunctional thiol compound can solve the above-mentioned problem, and completed the present invention. That is, it was found that the above-mentioned subject can be achieved by the following configuration.

[1]一種硬化性組成物,其含有多官能硫醇化合物、聚合性化合物及光聚合起始劑,其中多官能硫醇化合物含有2個以上的硫醇基及與硫醇基不同之相互作用性基團。 [2]如[1]所述之硬化性組成物,其中多官能硫醇化合物為以式(1)表示之化合物。 [3]如[1]或[2]所述之硬化性組成物,其中多官能硫醇化合物為以式(2)表示之化合物。 [4]如[2]或[3]所述之硬化性組成物,其中m為3~14的整數。 [5]如[1]~[4]中任一項所述之硬化性組成物,其中與硫醇基不同之相互作用性基團係選自包括羥基、胺基、吡啶基、吡啶鎓基、銨基、鏻基、羧酸基或其鹽、磷酸基或其鹽、磺酸基或其鹽、芳基、-Si(RXp (RY3-p 及-(ORAq -RZ 之群組之至少1種。 另外,p表示1~3的整數,RX 表示水解性基團,RY 表示除水解性基團之1價的有機基,p個RX 及3-p個RY 可分別相同,亦可不同。並且,RZ 表示氫原子、烷基或烷氧基,q表示1~4的整數,RA 表示碳數1~15的伸烷基。 [6]如[1]~[5]中任一項所述之硬化性組成物,其中與硫醇基不同之相互作用性基團係選自包括羥基、胺基、吡啶基、吡啶鎓基、銨基、鏻基、羧酸基或其鹽、磷酸基或其鹽及磺酸基或其鹽之群組之至少1種。 [7]如[1]~[6]中任一項所述之硬化性組成物,其中與硫醇基不同之相互作用性基團係選自包括羥基、胺基、吡啶基、羧酸基或其鹽、磷酸基或其鹽及磺酸基或其鹽之群組之至少1種。 [8]如[1]~[7]中任一項所述之硬化性組成物,其還含有著色劑。 [9]如[8]所述之硬化性組成物,其中著色劑含有黑色顏料。 [10]如[1]~[9]中任一項所述之硬化性組成物,其中光聚合起始劑為肟化合物。 [11]一種硬化膜,其使[1]~[10]中任一項所述之硬化性組成物硬化來獲得。 [12]一種濾色器,其含有[11]所述之硬化膜。 [13]一種遮光膜,其含有[11]所述之硬化膜。 [14]一種固體攝像元件,其含有[11]所述之硬化膜。 [15]一種圖像顯示裝置,其含有[11]所述之硬化膜。 [16]一種硬化膜的製造方法,其含有:硬化性組成物層形成製程,使用[1]~[10]中任一項所述之硬化性組成物,在支撐體上形成硬化性組成物層;及曝光製程,對硬化性組成物層進行曝光。 [17]如[16]所述之硬化膜的製造方法,其中硬化性組成物層形成製程包含在支撐體上直接塗佈硬化性組成物,從而在支撐體上形成硬化性組成物層之製程。 [18]如[16]或[17]所述之硬化膜的製造方法,其還含有:顯影製程,對所曝光之硬化性組成物層進行顯影;及清洗製程,對所顯影之硬化性組成物層進行清洗。 [19]一種多官能硫醇化合物,其含有2個以上的硫醇基及與硫醇基不同之相互作用性基團。 [20]如[19]所述之多官能硫醇化合物,其為以式(1)表示之化合物。 [21]如[19]或[20]所述之多官能硫醇化合物,其為以式(2)表示之化合物。 [22]如[20]或[21]所述之多官能硫醇化合物,其中m為3~14的整數。 [23]如[19]~[22]中任一項所述之多官能硫醇化合物,其中與硫醇基不同之相互作用性基團係選自包括羥基、胺基、吡啶基、吡啶鎓基、銨基、鏻基、羧酸基或其鹽、磷酸基或其鹽、磺酸基或其鹽、芳基、-Si(RXp (RY3-p 及-(ORAq -RZ 之群組之至少1種。 另外,p表示1~3的整數,RX 表示水解性基團,RY 表示除水解性基團之1價的有機基,p個RX 及3-p個RY 可分別相同,亦可不同。並且,RZ 表示氫原子、烷基或烷氧基,q表示1~4的整數,RA 表示碳數1~15的伸烷基。 [24]如[19]~[23]中任一項所述之多官能硫醇化合物,其中與硫醇基不同之相互作用性基團係選自包括羥基、胺基、吡啶基、吡啶鎓基、銨基、鏻基、羧酸基或其鹽、磷酸基或其鹽及磺酸基或其鹽之群組之至少1種。 [發明效果][1] A curable composition containing a polyfunctional thiol compound, a polymerizable compound, and a photopolymerization initiator, wherein the polyfunctional thiol compound contains two or more thiol groups and different interactions with the thiol groups sex group. [2] The curable composition according to [1], wherein the polyfunctional thiol compound is a compound represented by formula (1). [3] The curable composition according to [1] or [2], wherein the polyfunctional thiol compound is a compound represented by formula (2). [4] The curable composition according to [2] or [3], wherein m is an integer of 3-14. [5] The curable composition according to any one of [1] to [4], wherein the interactive group different from the thiol group is selected from the group consisting of a hydroxyl group, an amino group, a pyridyl group, and a pyridinium group , ammonium group, phosphonium group, carboxylic acid group or its salt, phosphoric acid group or its salt, sulfonic acid group or its salt, aryl group, -Si(R X ) p (R Y ) 3-p and -(OR A ) At least one of the group q - RZ . In addition, p represents an integer of 1 to 3, R X represents a hydrolyzable group, and R Y represents a monovalent organic group other than a hydrolyzable group. The p pieces of R X and the 3-p pieces of R Y may be respectively the same or may be the same. different. In addition, R Z represents a hydrogen atom, an alkyl group or an alkoxy group, q represents an integer of 1 to 4, and R A represents an alkylene group having 1 to 15 carbon atoms. [6] The curable composition according to any one of [1] to [5], wherein the interactive group different from the thiol group is selected from the group consisting of a hydroxyl group, an amino group, a pyridyl group, and a pyridinium group , at least one of the group of ammonium group, phosphonium group, carboxylic acid group or its salt, phosphoric acid group or its salt, and sulfonic acid group or its salt. [7] The curable composition according to any one of [1] to [6], wherein the interactive group different from the thiol group is selected from the group consisting of a hydroxyl group, an amino group, a pyridyl group, and a carboxylic acid group or at least one of the group of a salt thereof, a phosphoric acid group or a salt thereof, and a sulfonic acid group or a salt thereof. [8] The curable composition according to any one of [1] to [7], which further contains a colorant. [9] The curable composition according to [8], wherein the colorant contains a black pigment. [10] The curable composition according to any one of [1] to [9], wherein the photopolymerization initiator is an oxime compound. [11] A cured film obtained by curing the curable composition according to any one of [1] to [10]. [12] A color filter comprising the cured film described in [11]. [13] A light-shielding film comprising the cured film described in [11]. [14] A solid-state imaging element comprising the cured film described in [11]. [15] An image display device comprising the cured film described in [11]. [16] A method for producing a cured film, comprising: a process for forming a curable composition layer, wherein the curable composition is formed on a support using the curable composition according to any one of [1] to [10] layer; and an exposure process for exposing the curable composition layer. [17] The method for producing a cured film as described in [16], wherein the process of forming the curable composition layer comprises the process of directly coating the curable composition on the support, thereby forming the curable composition layer on the support . [18] The method for producing a cured film according to [16] or [17], further comprising: a developing process for developing the exposed curable composition layer; and a cleaning process for developing the developed curable composition The material layer is cleaned. [19] A polyfunctional thiol compound containing two or more thiol groups and an interactive group different from the thiol group. [20] The polyfunctional thiol compound according to [19], which is a compound represented by formula (1). [21] The polyfunctional thiol compound according to [19] or [20], which is a compound represented by formula (2). [22] The polyfunctional thiol compound according to [20] or [21], wherein m is an integer of 3-14. [23] The polyfunctional thiol compound according to any one of [19] to [22], wherein the interactive group different from the thiol group is selected from the group consisting of hydroxyl group, amino group, pyridyl group, pyridinium group group, ammonium group, phosphonium group, carboxylic acid group or its salt, phosphoric acid group or its salt, sulfonic acid group or its salt, aryl group, -Si(R X ) p (R Y ) 3-p and -(OR A ) at least one of the group q - RZ . In addition, p represents an integer of 1 to 3, R X represents a hydrolyzable group, and R Y represents a monovalent organic group other than a hydrolyzable group. The p pieces of R X and the 3-p pieces of R Y may be respectively the same or may be the same. different. In addition, R Z represents a hydrogen atom, an alkyl group or an alkoxy group, q represents an integer of 1 to 4, and R A represents an alkylene group having 1 to 15 carbon atoms. [24] The polyfunctional thiol compound according to any one of [19] to [23], wherein the interactive group different from the thiol group is selected from the group consisting of hydroxyl group, amino group, pyridyl group, pyridinium group at least one of the group consisting of a group, an ammonium group, a phosphonium group, a carboxylic acid group or a salt thereof, a phosphoric acid group or a salt thereof, and a sulfonic acid group or a salt thereof. [Inventive effect]

依本發明,能夠提供一種能夠獲得具有優異之曝光靈敏度且具有與支撐體的優異之黏附性之硬化膜之硬化性組成物。 並且,本發明能夠提供一種硬化膜、濾色器、遮光膜、固體攝像元件、圖像顯示裝置、硬化膜的製造方法及多官能硫醇化合物。According to the present invention, it is possible to provide a curable composition capable of obtaining a cured film having excellent exposure sensitivity and excellent adhesion to a support. Moreover, this invention can provide the manufacturing method of a cured film, a color filter, a light-shielding film, a solid-state imaging element, an image display device, a cured film, and a polyfunctional thiol compound.

以下,對本發明進行詳細說明。 以下說明有時基於本發明的代表性實施態樣進行,但本發明並不限定於該種實施態樣。 本說明書中,利用“~”表示之數值範圍表示將記載於“~”前後之數值作為下限值及上限值而包含之範圍。 本說明書中的基團(原子團)的標記中,未標有取代及未取代的標記包含不含有取代基者和含有取代基者。例如,“烷基”不僅包含不含有取代基之烷基(未取代烷基),還包含含有取代基之烷基(取代烷基)。 本說明書中的“光化射線”或“放射線”表示例如水銀燈的明線光譜及以準分子雷射為代表之遠紫外線、極紫外線(EUV:Extreme ultraviolet lithography光)、X射線以及電子束等。並且,本說明書中,“光”表示光化射線及放射線。本說明書中的“曝光”除非另有說明,否則不僅包括利用水銀燈的明顯光譜及以準分子雷射為代表之遠紫外線、X射線以及EUV光等進行之曝光,還包含利用電子束及離子束等粒子束進行之描繪。 本說明書中,“(甲基)丙烯酸酯”表示丙烯酸酯及甲基丙烯酸酯。本說明書中,“(甲基)丙烯酸”表示丙烯酸及甲基丙烯酸。本說明書中,“(甲基)丙烯醯基”表示丙烯醯基及甲基丙烯醯基。本說明書中,“(甲基)丙烯醯胺”表示丙烯醯胺及甲基丙烯醯胺。 本說明書中,“單體”與“單體(monomer)”的含義相同。單體與低聚物及聚合物有所區別,係指重量平均分子量為2,000以下的化合物。本說明書中,聚合性化合物係指含有聚合性基團之化合物,可以為單體,亦可以為聚合物。聚合性基團係指參與聚合反應之基團。 [硬化性組成物] 硬化性組成物含有多官能硫醇化合物、聚合性化合物及光聚合起始劑,其中多官能硫醇化合物含有2個以上的硫醇基及與硫醇基不同之相互作用性基團。Hereinafter, the present invention will be described in detail. The following description may be based on representative embodiments of the present invention, but the present invention is not limited to such embodiments. In this specification, the numerical range represented by "-" shows the range which includes the numerical value described before and after "-" as a lower limit and an upper limit. In the notation of groups (atomic groups) in the present specification, the notation that is not substituted and unsubstituted includes those that do not contain a substituent and those that contain a substituent. For example, "alkyl" includes not only unsubstituted alkyl groups (unsubstituted alkyl groups), but also substituted alkyl groups (substituted alkyl groups). The "actinic ray" or "radiation" in this specification refers to, for example, the bright line spectrum of a mercury lamp, extreme ultraviolet rays represented by excimer lasers, extreme ultraviolet rays (EUV: Extreme ultraviolet lithography light), X-rays, and electron beams. In addition, in this specification, "light" means actinic rays and radiation. Unless otherwise specified, the term "exposure" in this specification includes not only exposure using the apparent spectrum of mercury lamps and far-ultraviolet rays represented by excimer lasers, X-rays, and EUV light, but also exposure using electron beams and ion beams. Depiction by particle beam. In this specification, "(meth)acrylate" means acrylate and methacrylate. In this specification, "(meth)acrylic acid" means acrylic acid and methacrylic acid. In this specification, "(meth)acryloyl group" means an acryl group and a methacryloyl group. In this specification, "(meth)acrylamide" means acrylamide and methacrylamide. In this specification, "monomer" and "monomer" have the same meaning. Monomers are distinguished from oligomers and polymers, and refer to compounds having a weight average molecular weight of 2,000 or less. In this specification, a polymerizable compound means a compound containing a polymerizable group, and may be a monomer or a polymer. A polymerizable group refers to a group that participates in a polymerization reaction. [Curable composition] The curable composition contains a polyfunctional thiol compound, a polymerizable compound and a photopolymerization initiator, wherein the polyfunctional thiol compound contains two or more thiol groups and different interactions with the thiol groups sex group.

本發明人發現,若想使用專利文獻1中記載之含有硫醇化合物之硬化性組成物在支撐體上形成硬化性組成物層,並對該硬化性組成物層進行曝光,從而製作具有微細的圖案形狀之硬化膜,則存在不得不增加曝光量的問題。 推測這是因為,若想將圖案形狀進行微細化,則光罩的開口部變得狹窄,結果照射於硬化性組成物層之光量更加減少。亦即,推測係由於到達硬化性組成物的底部之光量變少,因此硬化性組成物層的底部變得不易硬化者。 該種情況下,藉由增加曝光量,能夠增加到達至硬化性組成物層的底部之光量。 另一方面,若增加曝光量,則在遮罩開口部進行了衍射之光亦即所謂“漏光”亦容易變多,有時在硬化性組成物層的上部(亦即,更靠近光罩的部分),本應被遮蔽之部分被進行曝光,從而導致圖案形狀惡化。The inventors of the present invention found that, by forming a curable composition layer on a support using the curable composition containing a thiol compound described in Patent Document 1, and exposing the curable composition layer to light, a fine In the cured film of the pattern shape, there is a problem that the exposure amount has to be increased. This is presumably because, if the pattern shape is to be made finer, the opening of the mask becomes narrow, and as a result, the amount of light irradiated to the curable composition layer is further reduced. That is, since the amount of light reaching the bottom of the curable composition decreases, it is presumed that the bottom of the curable composition layer is less likely to be cured. In this case, by increasing the exposure amount, the amount of light reaching the bottom of the curable composition layer can be increased. On the other hand, when the exposure amount is increased, the light diffracted at the opening of the mask, that is, so-called "leakage" tends to increase. part), the part that should be masked is exposed, resulting in the deterioration of the pattern shape.

通常,若使用含有光聚合起始劑之硬化性組成物在支撐體上形成硬化性組成物層,並對該硬化性組成物層進行曝光,則藉由光聚合起始劑而引發自由基反應。該情況下,有時藉由光聚合起始劑而產生之自由基與硬化性組成物層內的氧進行反應,從而產生過氧自由基。由於過氧自由基不具有進行反應之作用,因此有時導致聚合反應停止。Generally, when a curable composition layer is formed on a support using a curable composition containing a photopolymerization initiator, and the curable composition layer is exposed to light, a radical reaction is initiated by the photopolymerization initiator . In this case, radicals generated by the photopolymerization initiator may react with oxygen in the curable composition layer, thereby generating peroxy radicals. Since the peroxy radical does not have the effect of advancing the reaction, the polymerization reaction may be stopped in some cases.

本發明的一態様中,硬化性組成物包含含有2個以上的硫醇基之多官能硫醇化合物。由於硫醇基藉由向過氧自由基供給氫而生成不易受聚合失活之硫自由基,因此持續進行聚合反應。 而且,多官能硫醇化合物含有與硫醇基不同之相互作用性基團。相互作用性基團與支撐體(或當支撐體具備外塗層時,與構成外塗層之分子)進行相互作用。故,推測多官能硫醇化合物係在使用上述硬化性組成物形成之硬化性組成物層上容易偏在於更靠近支撐體的部分(亦即,底部)者。推測為若多官能硫醇化合物在上述硬化性組成物層上偏在於曝光時所到達之光量相對較少的硬化性組成物層的底部,則更有效地發揮出上述硫醇基的作用。 亦即,推測為,若為更少的曝光量,則到達硬化性組成物層的底部之光量較少,但由於多官能硫醇化合物容易偏在於底部,因此在硬化性組成物層的底部容易生成硫自由基,從而即使光量較少,亦會充分地進行硬化直至底部。 而且,推測為,在硬化膜中,由於相互作用性基團偏在於更靠近支撐體的部分(亦即,底部),因此與支撐體的相互作用變得更強,從而具有與支撐體的優異之黏附性者。 以下,對本發明的一態様之硬化性組成物中所含之成分進行說明。In one aspect of the present invention, the curable composition contains a polyfunctional thiol compound containing two or more thiol groups. Since the thiol group generates sulfur radicals that are not easily deactivated by polymerization by supplying hydrogen to the peroxy radicals, the polymerization reaction continues. Furthermore, the polyfunctional thiol compound contains an interactive group different from the thiol group. The interactive group interacts with the support (or, when the support is provided with an overcoat, with the molecules that make up the overcoat). Therefore, it is presumed that the polyfunctional thiol compound tends to be concentrated in the portion (ie, the bottom) closer to the support in the curable composition layer formed using the above curable composition. It is presumed that if the polyfunctional thiol compound is concentrated on the bottom of the curable composition layer with a relatively small amount of light reaching the curable composition layer on the curable composition layer, the function of the thiol group is more effectively exerted. That is, it is presumed that with a smaller exposure amount, the amount of light reaching the bottom of the curable composition layer is small, but since the polyfunctional thiol compound tends to be concentrated at the bottom, it is easy to reach the bottom of the curable composition layer. Sulfur radicals are generated, so that even if the amount of light is low, hardening is sufficiently advanced to the bottom. Furthermore, it is presumed that in the cured film, the interaction with the support becomes stronger because the interactive group is concentrated in the part (that is, the bottom) closer to the support, and thus it has excellent performance with the support. The adhesive ones. Hereinafter, components contained in the curable composition of the present invention will be described.

〔多官能硫醇化合物〕 硬化性組成物含有規定的多官能硫醇化合物。 多官能硫醇化合物只要含有2個以上的硫醇基(以-SH表示之基團)及與硫醇基不同之相互作用性基團,則並無特別限制,能夠使用公知的多官能硫醇化合物。[Polyfunctional Thiol Compound] The curable composition contains a predetermined polyfunctional thiol compound. The polyfunctional thiol compound is not particularly limited as long as it contains two or more thiol groups (groups represented by -SH) and an interactive group different from the thiol group, and known polyfunctional thiol compounds can be used. compound.

多官能硫醇化合物所含之硫醇基的數量為2個以上,3個以上為較佳,4個以上為更佳。 多官能硫醇化合物所含之硫醇基的數量的上限並無特別限制,但通常30個以下為較佳,20個以下為更佳,14個以下為進一步較佳。The number of thiol groups contained in the polyfunctional thiol compound is 2 or more, preferably 3 or more, and more preferably 4 or more. The upper limit of the number of thiol groups contained in the polyfunctional thiol compound is not particularly limited, but is generally preferably 30 or less, more preferably 20 or less, and further preferably 14 or less.

多官能硫醇化合物所含之與硫醇基不同之相互作用性基團的數量為1個以上,2個以上為較佳。 多官能硫醇化合物所含之與硫醇基不同之相互作用性基團的上限並無特別限制,但通常30個以下為較佳,20個以下為更佳,15個以下為進一步較佳。The number of interactive groups different from the thiol group contained in the polyfunctional thiol compound is one or more, preferably two or more. The upper limit of the interactive group different from the thiol group contained in the polyfunctional thiol compound is not particularly limited, but generally 30 or less is preferable, 20 or less is more preferable, and 15 or less is still more preferable.

另外,本說明書中,相互作用性基團係表示能夠與其他分子進行相互作用之基團。相互作用性基團可舉出能夠以分子間力、分子締合、靜電引力、離子鍵結和/或氫鍵結等任意的態様進行相互作用之基團。 其中,作為相互作用性基團,能夠與形成後述之支撐體和/或底塗層之分子進行相互作用之基團為較佳。相互作用性基團的具體例將在後段進行詳述。In addition, in this specification, an interactive group means the group which can interact with another molecule. The interacting group includes a group capable of interacting in any state such as intermolecular force, molecular association, electrostatic attraction, ionic bonding, and/or hydrogen bonding. Among them, as the interactive group, a group capable of interacting with a molecule forming a support and/or an undercoat layer described later is preferable. Specific examples of the interactive group will be described in detail later.

作為多官能硫醇化合物的含量,相對於硬化性組成物的總固體成分,係0.5~10質量%為較佳。 藉由多官能硫醇化合物的含量為0.5~10質量%,從而曝光靈敏度更加優異。 多官能硫醇化合物可單獨使用1種,亦可同時使用2種以上。當同時使用2種以上的多官能硫醇化合物時,其合計量在上述範圍內為較佳。As content of a polyfunctional thiol compound, 0.5-10 mass % is preferable with respect to the total solid content of a curable composition. When the content of the polyfunctional thiol compound is 0.5 to 10% by mass, the exposure sensitivity is further excellent. A polyfunctional thiol compound may be used individually by 1 type, and may use 2 or more types together. When two or more types of polyfunctional thiol compounds are used at the same time, the total amount thereof is preferably within the above-mentioned range.

<多官能硫醇化合物的較佳態様1> 作為多官能硫醇化合物,以下式(1)表示之化合物為較佳。 [化學式1]

Figure 02_image001
<Preferable state 1 of the polyfunctional thiol compound> As the polyfunctional thiol compound, a compound represented by the following formula (1) is preferable. [Chemical formula 1]
Figure 02_image001

式(1)中,L1 及L2 分別獨立地表示2價的連結基。m表示2~14的整數,3~14的整數為較佳,3~6為更佳。若m為3以上的整數,則硬化性組成物具有更優異之曝光靈敏度。n表示1~15的整數。L3 表示m+n價的連結基,R1 表示與硫醇基不同之相互作用性基團。 另外,L1 及L2 可彼此相同,亦可不同,m個L1 、n個L2 及n個R1 可分別相同,亦可不同。In formula (1), L 1 and L 2 each independently represent a divalent linking group. m represents an integer of 2 to 14, preferably an integer of 3 to 14, more preferably 3 to 6. When m is an integer of 3 or more, the curable composition has more excellent exposure sensitivity. n represents an integer of 1-15. L 3 represents an m+n-valent linking group, and R 1 represents an interactive group different from a thiol group. In addition, L 1 and L 2 may be the same or different from each other, and the m pieces of L 1 , the n pieces of L 2 , and the n pieces of R 1 may be respectively the same or different.

作為L1 的2價的連結基,例如可舉出2價的脂肪族烴基(較佳為碳數1~8)、2價的芳香族烴基(較佳為碳數6~12)、-O-、-S-、-N(R4 )-(R4 :1價的有機基)、-C(=O)-、-C(=O)-O-、-O-C(=O)-O-、-C(=O)-NH-、-O-C(=O)-NH-、-S(=O)-、-S(=O)-O-、-S(=O)2 -、-S(=O)2 -O-、-CH=N-、-N(R)-(R:烷基)或組合該些而得之基團(例如,伸烷氧基、伸烷氧基羰基及伸烷基羰基氧基等)等。Examples of the divalent linking group of L 1 include a divalent aliphatic hydrocarbon group (preferably having 1 to 8 carbon atoms), a divalent aromatic hydrocarbon group (preferably having 6 to 12 carbon atoms), -O -, -S-, -N(R 4 )-(R 4 : monovalent organic group), -C(=O)-, -C(=O)-O-, -OC(=O)-O -, -C(=O)-NH-, -OC(=O)-NH-, -S(=O)-, -S(=O)-O-, -S(=O) 2 -,- S(=O) 2 -O-, -CH=N-, -N(R)-(R: alkyl) or groups obtained by combining these (for example, alkyleneoxy, alkyleneoxycarbonyl and alkylene carbonyloxy, etc.), etc.

作為L2 的2價的連結基,與上述L1 的態様相同。另外,L1 及L2 可彼此相同,亦可不同。並且,多官能硫醇化合物的1個分子內的m個L1 及n個L2 可分別相同,亦可不同。The divalent linking group of L 2 is the same as the state of L 1 described above. In addition, L 1 and L 2 may be the same or different from each other. In addition, m pieces of L 1 and n pieces of L 2 in one molecule of the polyfunctional thiol compound may be the same or different, respectively.

作為L3 的m+n價的連結基,例如可舉出具有3個三羥甲基丙烷殘基、-(CH2k -(k表示例如2~6的整數。)之異氰脲環等3價的連結基;新戊四醇殘基等4價的連結基或5價的連結基;二新戊四醇殘基等6價的連結基及它們的組合等。 m+n為3以上,4以上為較佳。 m+n為29以下,10以下為較佳。Examples of the m+n-valent linking group of L 3 include an isocyanuric ring having three trimethylolpropane residues, -(CH 2 ) k - (k represents, for example, an integer of 2 to 6.) Trivalent linking groups such as neopentaerythritol residues; tetravalent linking groups or pentavalent linking groups such as neopentaerythritol residues; m+n is 3 or more, preferably 4 or more. m+n is 29 or less, preferably 10 or less.

作為L3 的m+n價的連結基,例如可舉出以下式(A)~(D)中的任一個表示之基團或組合該些而得之基團。 [化學式2]

Figure 02_image003
Examples of the m+n-valent linking group of L 3 include a group represented by any one of the following formulae (A) to (D) or a group obtained by combining these. [Chemical formula 2]
Figure 02_image003

式(A)~(D)中, L4 表示3價的基團。T3 表示單鍵或2價的連結基,3個T3 可彼此相同,亦可不同。 L5 表示4價的基團。T4 表示單鍵或2價的連結基,4個T4 可彼此相同,亦可不同。 L6 表示5價的基團。T5 表示單鍵或2價的連結基,5個T5 可彼此相同,亦可不同。 L7 表示6價的基團。T6 表示單鍵或2價的連結基,6個T6 可彼此相同,亦可不同。 另外,以T3 、T4 、T5 及T6 表示之2價的連結基的定義係與以上述之L1 表示之2價的連結基的定義含義相同。In formulas (A) to (D), L 4 represents a trivalent group. T 3 represents a single bond or a divalent linking group, and three T 3s may be the same or different from each other. L 5 represents a tetravalent group. T 4 represents a single bond or a divalent linking group, and four T 4s may be the same or different from each other. L 6 represents a pentavalent group. T 5 represents a single bond or a divalent linking group, and five T 5s may be the same or different from each other. L 7 represents a hexavalent group. T 6 represents a single bond or a divalent linking group, and six T 6s may be the same or different from each other. In addition, the definition of the divalent linking group represented by T 3 , T 4 , T 5 and T 6 is the same as the definition of the divalent linking group represented by the above-mentioned L 1 .

作為L3 的m+n價的連結基,例如,以下式(E)~(J)表示之基團或組合該些而得之基團為較佳。 [化學式3]

Figure 02_image005
As the m+n-valent linking group of L 3 , for example, groups represented by the following formulae (E) to (J) or groups obtained by combining these are preferable. [Chemical formula 3]
Figure 02_image005

式(E)~(J)中, R表示氫原子或1價的有機基。作為1價的有機基,烷基為較佳。*表示鍵結位置。t表示2~11的整數。In formulae (E) to (J), R represents a hydrogen atom or a monovalent organic group. As the monovalent organic group, an alkyl group is preferable. * indicates bond position. t represents an integer of 2 to 11.

L3 亦可以為以下式(K)~(O)表示之基團或組合該些而得之基團。式中,*表示鍵結位置。 [化學式4]

Figure 02_image007
L 3 may be a group represented by the following formulae (K) to (O) or a group obtained by combining these. In the formula, * represents the bonding position. [Chemical formula 4]
Figure 02_image007

式(1)中,R1 與已經說明之不同於硫醇基之相互作用性基團的態様相同。 其中,從硬化膜具有與支撐體的更優異之黏附性之觀點考慮,作為與硫醇基不同之相互作用性基團,係選自包括羥基、胺基、吡啶基、吡啶鎓基、銨基、鏻基、羧酸基或其鹽、磷酸基或其鹽、磺酸基或其鹽、芳基、-Si(RXp (RY3-p (以下,本說明書中還稱為“Si基”。)及-(ORAq -RZ 之群組之至少1種為較佳,係選自包括羥基、胺基、吡啶基、吡啶鎓基、銨基、鏻基、羧酸基或其鹽、磷酸基或其鹽及磺酸基或其鹽之群組之至少1種為更佳,係選自包括羥基、胺基、吡啶基、羧酸基或其鹽、磷酸基或其鹽及磺酸基或其鹽之群組之至少1種為進一步較佳。 藉由與硫醇基不同之相互作用性基團為上述官能基,從而硬化膜具有與支撐體的更優異之黏附性之機理雖不明確,但本發明人推測如下。亦即,推測為,相互作用(非鍵結性的分子間力)可大致分類為凡得瓦(van der Waals)相互作用、π-π堆積(stacking)、氫-π鍵結、靜電相互作用或氫鍵結,大致以該順序增強,“氫鍵結”最強,其次“靜電相互作用”較強。其中,認為例如作為苯基的π電子與O-H的氫的鍵結之氫-π鍵結,與上述二者相比較弱,推測為可獲得上述效果者。另外,獲得本發明的效果之機理並不限於上述推測。 另外,上述胺基中包含一級胺基(NH2 -)、二級胺基(NRa H-)及三級胺基(NRa Ra -)。二級胺基及三級胺基中所含之Ra 只要是1價的有機基,則並無特別限制,但例如可舉出烴基(例如,烷基)。In the formula (1), R 1 is the same as the state of the interacting group other than the thiol group already explained. Among them, from the viewpoint that the cured film has more excellent adhesion to the support, the interactive group different from the thiol group is selected from the group consisting of a hydroxyl group, an amino group, a pyridyl group, a pyridinium group, an ammonium group , phosphonium group, carboxylic acid group or its salt, phosphoric acid group or its salt, sulfonic acid group or its salt, aryl group, -Si(R X ) p (R Y ) 3-p (hereinafter, also referred to as "Si group".) and -(OR A ) q -R Z is preferably at least one kind selected from the group consisting of hydroxyl group, amino group, pyridyl group, pyridinium group, ammonium group, phosphonium group, carboxyl group More preferably, at least one of the group of acid group or its salt, phosphoric acid group or its salt, and sulfonic acid group or its salt is selected from the group consisting of hydroxyl group, amine group, pyridyl group, carboxylic acid group or its salt, phosphoric acid group At least one kind selected from the group of a salt thereof and a sulfonic acid group or a salt thereof is further preferable. Although the mechanism by which the interactive group different from the thiol group is the above-mentioned functional group, the cured film has more excellent adhesion to the support is not clear, but the present inventors speculate as follows. That is, it is assumed that interactions (non-bonding intermolecular forces) can be roughly classified into van der Waals interactions, π-π stacking, hydrogen-π bonding, and electrostatic interactions. Or hydrogen bonding, roughly in this order, with "hydrogen bonding" being the strongest, followed by "electrostatic interactions" being stronger. Among them, for example, the hydrogen-π bond, which is the bond between the π electron of the phenyl group and the hydrogen of the OH, is considered to be weaker than the above two, and it is presumed that the above effect can be obtained. In addition, the mechanism for obtaining the effect of the present invention is not limited to the above-mentioned speculation. In addition, the above-mentioned amine group includes a primary amine group (NH 2 -), a secondary amine group (NR a H-), and a tertiary amine group (NR a R a -). R a contained in the secondary amino group and the tertiary amino group is not particularly limited as long as it is a monovalent organic group, and examples thereof include hydrocarbon groups (eg, alkyl groups).

上述-Si(RXp (RY3-p 中,RX 表示水解性基團。 本說明書中,水解性基團表示與矽原子(Si)直接鍵結並能夠進行水解反應之基團,例如可興出烷氧基、鹵素原子、醯氧基、烯氧基及異氰酸酯基等。In the above -Si(R X ) p (R Y ) 3-p , R X represents a hydrolyzable group. In this specification, the hydrolyzable group refers to a group which is directly bonded to a silicon atom (Si) and can undergo a hydrolysis reaction.

RY 表示1價的有機基。其中,從上述有機基去除上述水解性基團。 作為上述1價的有機基,為除水解性基團以外的有機基即可,例如可舉出烷基、烯基、芳基、烷基羰基、環烷基羰基、芳基羰基、烷氧基羰基、環烷氧基羰基、芳氧基羰基、烷基胺基羰基、環烷基胺基羰基、芳基胺基羰基及組合該些而得之基團等。其中,烷基、芳基、烯基或組合該些而得之基團為較佳。R Y represents a monovalent organic group. However, the above-mentioned hydrolyzable group is removed from the above-mentioned organic group. The monovalent organic group may be any organic group other than a hydrolyzable group, and examples thereof include an alkyl group, an alkenyl group, an aryl group, an alkylcarbonyl group, a cycloalkylcarbonyl group, an arylcarbonyl group, and an alkoxy group. A carbonyl group, a cycloalkoxycarbonyl group, an aryloxycarbonyl group, an alkylaminocarbonyl group, a cycloalkylaminocarbonyl group, an arylaminocarbonyl group, a group obtained by combining these, and the like. Among them, alkyl groups, aryl groups, alkenyl groups or groups obtained by combining these are preferred.

上述烷基中所含之碳數為1~6為較佳,亦可以為直鏈狀、支鏈狀及環狀中的任一者。並且,上述芳基中所含之碳數為6~10為較佳。並且,上述烯基中所含之碳數為2~12為較佳。The number of carbon atoms contained in the alkyl group is preferably 1 to 6, and any of linear, branched, and cyclic may be used. In addition, the number of carbon atoms contained in the aryl group is preferably 6 to 10. Moreover, it is preferable that the carbon number contained in the said alkenyl group is 2-12.

P為1~3的整數。其中,從硬化膜具有與支撐體的更優異之黏附性之觀點考慮,p為3為較佳。 並且,p個RX 及3-p個RY 可分別相同,亦可不同。P is an integer of 1-3. Among them, it is preferable that p is 3 from the viewpoint that the cured film has more excellent adhesion to the support. In addition, the p pieces of R X and the 3-p pieces of R Y may be the same or different.

上述-(ORAq -RZ 中,RZ 表示氫原子、烷基或烷氧基,烷基及烷氧基中的烷基的碳數為1~6為較佳,亦可以為直鏈狀、分支狀或環狀中的任一者。In the above -(OR A ) q -R Z , R Z represents a hydrogen atom, an alkyl group or an alkoxy group, and the number of carbon atoms in the alkyl group and the alkyl group in the alkoxy group is preferably 1 to 6, and may also be straight Any of chain, branch or cyclic.

RA 表示碳數1~15的伸烷基,碳數1~10的伸烷基為更佳,碳數1~6的伸烷基為進一步較佳。q表示1~4的整數,2~4的整數為更佳,3~4的整數為進一步較佳。R A represents an alkylene group having 1 to 15 carbon atoms, more preferably an alkylene group having 1 to 10 carbon atoms, and even more preferably an alkylene group having 1 to 6 carbon atoms. q represents an integer of 1 to 4, more preferably an integer of 2 to 4, and even more preferably an integer of 3 to 4.

<多官能硫醇化合物的較佳態様2> 作為上述多官能硫醇化合物,以下式(2)表示之化合物為更佳。 [化學式5]

Figure 02_image009
<Preferable state 2 of the polyfunctional thiol compound> As the polyfunctional thiol compound, the compound represented by the following formula (2) is more preferable. [Chemical formula 5]
Figure 02_image009

式(2)中,R2 及R3 分別獨立地表示碳數1以上的2價的連結基。 作為碳數1以上的2價的連結基,並無特別限制,例如可舉出2價的脂肪族烴基(較佳為碳數1~8)、2價的芳香族烴基(較佳為碳數6~12)、-C(=O)-、-C(=O)-O-、-O-C(=O)-O-、-C(=O)-NH-、-O-C(=O)、-CH=N-、-N(R)-(R:烷基)或將該些與作為上述式(1)中的L1 而說明之基團等進行組合而得之基團等。 另外,R2 及R3 可彼此相同,亦可不同,m個R2 、n個R2 及n個R3 可分別相同,亦可不同。In formula (2), R 2 and R 3 each independently represent a divalent linking group having 1 or more carbon atoms. The divalent linking group having 1 or more carbon atoms is not particularly limited, and examples thereof include a divalent aliphatic hydrocarbon group (preferably having 1 to 8 carbon atoms) and a divalent aromatic hydrocarbon group (preferably having a carbon number of 8). 6~12), -C(=O)-, -C(=O)-O-, -OC(=O)-O-, -C(=O)-NH-, -OC(=O), -CH=N-, -N(R)-(R: alkyl group), or a group obtained by combining these with the group or the like described as L 1 in the above formula (1). In addition, R 2 and R 3 may be the same or different from each other, and m pieces of R 2 , n pieces of R 2 , and n pieces of R 3 may be respectively the same or different.

式(2)中,m表示2~14的整數,3~14的整數為較佳,3~6為更佳。若m為3以上的整數,則硬化性組成物具有更優異之曝光靈敏度。 n表示1~15的整數,1~4為較佳。 m相對於n的值(m/n)並無特別限制,但0.13~14為較佳,1~5為更佳,2~5為進一步較佳。 若m/n在1~5的範圍內,則使用硬化性組成物在支撐體上形成之硬化膜與支撐體的黏附性更優異。 當m+n相同時,m/n越小的多官能硫醇化合物,將硬化性組成物進行硬化而得之圖案形狀越優異,並且使用硬化性組成物在支撐體上形成之硬化膜與支撐體的黏附性更優異。In formula (2), m represents an integer of 2 to 14, an integer of 3 to 14 is preferable, and an integer of 3 to 6 is more preferable. When m is an integer of 3 or more, the curable composition has more excellent exposure sensitivity. n represents an integer of 1 to 15, preferably 1 to 4. The value of m with respect to n (m/n) is not particularly limited, but is preferably 0.13 to 14, more preferably 1 to 5, and even more preferably 2 to 5. When m/n is in the range of 1 to 5, the cured film formed on the support using the curable composition has more excellent adhesion to the support. When m+n is the same, the smaller the m/n of the polyfunctional thiol compound, the better the pattern shape obtained by curing the curable composition, and the cured film and support formed on the support using the curable composition. Body adhesion is better.

上述式(2)中,M1 分別獨立地表示單鍵、-O-、-S-、-N(R4 )-(R4 :1價的有機基)、-C(=O)-、-C(=O)-O-、-O-C(=O)-O-、-C(=O)-NH-、-O-C(=O)-NH-、-S(=O)-、-S(=O)-O-、-S(=O)2 -、-S(=O)2 -O-或-CH=N-。 另外,m個M1 及n個M1 可分別相同,亦可不同。In the above formula (2), M 1 independently represents a single bond, -O-, -S-, -N(R 4 )-(R 4 : monovalent organic group), -C(=O)-, -C(=O)-O-, -OC(=O)-O-, -C(=O)-NH-, -OC(=O)-NH-, -S(=O)-, -S (=O)-O-, -S(=O) 2 -, -S(=O) 2 -O- or -CH=N-. In addition, the m pieces of M 1 and the n pieces of M 1 may be the same or different.

L3 表示m+n價的連結基,其態様如同已進行之說明。並且,R1 表示與硫醇基不同之相互作用性基團,其態様可舉出與上述之式(1)中的態樣相同者。 另外,n個R1 可分別相同,亦可不同。L 3 represents an m+n-valent linking group, and its state is as described above. In addition, R 1 represents an interactive group different from a thiol group, and the form thereof is the same as that in the above-mentioned formula (1). In addition, n pieces of R 1 may be the same or different, respectively.

多官能硫醇化合物的合成方法並無特別限制,能夠藉由組合公知的方法來進行合成。 例如,藉由使具有複數個硫醇基之原料化合物與具有規定的相互作用性基團且具有能夠與上述硫醇基發生反應之基團之化合物進行反應,能夠合成所希望的多官能硫醇化合物。另外,作為能夠與硫醇基發生反應之基團,可舉出碳-碳雙鍵的基團、碳-碳三鍵的基團、環氧基、羧基、鹵素原子、烷基磺酸酯基、芳基磺酸酯基等。 更具體而言,使具有規定的相互作用性基團之(甲基)丙烯酸酯化合物與具有複數個硫醇基之原料化合物藉由麥可加成(Michael addition)而進行反應,從而能夠合成所希望的多官能硫醇化合物。The synthesis method of a polyfunctional thiol compound is not specifically limited, It can synthesize|combine by combining well-known methods. For example, a desired polyfunctional thiol can be synthesized by reacting a raw material compound having a plurality of thiol groups with a compound having a predetermined interactive group and a group capable of reacting with the above-mentioned thiol group. compound. In addition, as a group which can react with a thiol group, a carbon-carbon double bond group, a carbon-carbon triple bond group, an epoxy group, a carboxyl group, a halogen atom, an alkylsulfonate group can be mentioned. , aryl sulfonate, etc. More specifically, by reacting a (meth)acrylate compound having a predetermined interacting group with a raw material compound having a plurality of thiol groups by Michael addition, all the compounds can be synthesized. Desirable polyfunctional thiol compounds.

以下表1示出多官能硫醇化合物的具體例。其中,多官能硫醇化合物並不限定於該些。Table 1 below shows specific examples of the polyfunctional thiol compound. However, the polyfunctional thiol compound is not limited to these.

[表1-1]

Figure AA101
[Table 1-1]
Figure AA101

[表1-2]

Figure AA102
Figure AA102-1
[Table 1-2]
Figure AA102
Figure AA102-1

[表1-3]

Figure AA103
Figure AA103-1
Figure AA103-2
[Table 1-3]
Figure AA103
Figure AA103-1
Figure AA103-2

[表1-4]

Figure AA104-2.
Figure AA104-1
[Table 1-4]
Figure AA104-2.
Figure AA104-1

[表1-5]

Figure AA105
Figure AA105-1
Figure AA105-2
[Table 1-5]
Figure AA105
Figure AA105-1
Figure AA105-2

[表1-6]

Figure AA106
Figure AA106-1
Figure AA106-2
[Table 1-6]
Figure AA106
Figure AA106-1
Figure AA106-2

表1-1~1-6中,“Me”表示甲基(-CH3 )。“OTs”表示甲苯磺醯基。 表1-1~1-6中,R1 ~R3 、L3 及M1 為對應於式(2)中的各部之基團,m及n為對應於式(2)中的m及n之數。In Tables 1-1 to 1-6, "Me" represents a methyl group (-CH 3 ). "OTs" means tosylate. In Tables 1-1 to 1-6, R 1 to R 3 , L 3 and M 1 are groups corresponding to the respective moieties in formula (2), and m and n are groups corresponding to m and n in formula (2) number.

[化學式6]

Figure 02_image478
[Chemical formula 6]
Figure 02_image478

表1-1~1-6中的記號表示以下內容。 *:表示L3 與M1 的連結部位。 ●:在M1 及R2 的列中,表示M1 與R2 的連結部位。並且,在R3 的列中,表示R3 與-S-基的連結部位。 ○:表示與硫醇(-SH)基或-S-基的連結部位。 R3 、R1 的波浪線:表示R3 與R1 的連結部位。 上箭頭:表示與緊上的欄相同的含義。The symbols in Tables 1-1 to 1-6 indicate the following. *: Indicates the connection site of L 3 and M 1 . ●: In the column of M1 and R2 , the connection site of M1 and R2 is shown. In addition, in the row of R 3 , the linking site of R 3 and the -S- group is shown. ○: Indicates a linking site to a thiol (-SH) group or an -S- group. The wavy lines of R 3 and R 1 : indicate the connection site of R 3 and R 1 . Up Arrow: Indicates the same meaning as the column immediately above.

〔光聚合起始劑〕 硬化性組成物含有光聚合起始劑。 作為光聚合起始劑,只要能夠引發聚合性化合物的聚合,則並無特別限制,能夠使用公知的光聚合起始劑。作為光聚合起始劑,例如,對紫外線區域至可見光線區域具有感光性者為較佳。光聚合起始劑可以為與被光激發之敏化劑產生某些作用並生成活性自由基之活性劑,亦可以為依據聚合性化合物的種類而引發陽離子聚合之起始劑。 光聚合起始劑含有至少1種於約300nm~800nm(330nm~500nm為更佳。)的波長區域內具有至少約50莫耳吸光係數之化合物為較佳。[Photopolymerization Initiator] The curable composition contains a photopolymerization initiator. The photopolymerization initiator is not particularly limited as long as it can initiate the polymerization of the polymerizable compound, and known photopolymerization initiators can be used. As the photopolymerization initiator, for example, one having photosensitivity in the ultraviolet region to the visible light region is preferred. The photopolymerization initiator may be an activator that interacts with a sensitizer excited by light to generate active radicals, or may be an initiator that initiates cationic polymerization depending on the type of polymerizable compound. Preferably, the photopolymerization initiator contains at least one compound having a molar absorption coefficient of at least about 50 in a wavelength region of about 300 nm to 800 nm (more preferably, 330 nm to 500 nm).

作為光聚合起始劑的含量,相對於硬化性組成物的總固體成分,1~9質量%為較佳。 若光聚合起始劑的含量相對於硬化性組成物的總固體成分,為1~9質量%,則將硬化性組成物進行硬化而得之硬化膜的圖案形狀更優異。 光聚合起始劑可單獨使用1種,亦可同時使用2種以上。當同時使用2種以上的光聚合起始劑時,其合計量在上述範圍內為較佳。As content of a photoinitiator, 1-9 mass % is preferable with respect to the total solid content of a curable composition. When content of a photoinitiator is 1-9 mass % with respect to the total solid content of a curable composition, the pattern shape of the cured film obtained by hardening a curable composition is more excellent. A photopolymerization initiator may be used individually by 1 type, and may use 2 or more types together. When two or more photopolymerization initiators are used at the same time, the total amount thereof is preferably within the above-mentioned range.

作為光聚合起始劑,例如可舉出鹵代烴衍生物(例如,含有三嗪骨架者,具有噁二唑骨架者等)、醯基膦氧化物等醯基膦化合物、六芳基雙咪唑(hexaarylbiimidazole)、肟衍生物等肟化合物、有機過氧化物、硫化合物、酮化合物、芳香族鎓鹽、酮肟醚、胺基苯乙酮化合物及羥基苯乙酮等。 作為含有上述三嗪骨架之鹵代烴化合物,例如可舉出,若林等人著、Bull.Chem.Soc.Japan,42、2924(1969)中記載之化合物、英國專利1388492號說明書中記載之化合物、日本特開昭53-133428號公報中記載之化合物、德國專利3337024號說明書中記載之化合物、基於F.C.Schaefer等之J.Org.Chem.;29、1527(1964)中記載之化合物、日本特開昭62-58241號公報中記載之化合物、日本特開平5-281728號公報中記載之化合物、日本特開平5-34920號公報中記載之化合物、美國專利第4212976號說明書中記載之化合物等。Examples of the photopolymerization initiator include halogenated hydrocarbon derivatives (for example, those containing a triazine skeleton, those having an oxadiazole skeleton, etc.), acylphosphine compounds such as acylphosphine oxide, and hexaarylbisimidazole. (hexaarylbiimidazole), oxime compounds such as oxime derivatives, organic peroxides, sulfur compounds, ketone compounds, aromatic onium salts, ketoxime ethers, aminoacetophenone compounds, and hydroxyacetophenone. Examples of the halogenated hydrocarbon compound containing the triazine skeleton include the compounds described in Wakabayashi et al., Bull. Chem. Soc. Japan, 42, 2924 (1969), and the compounds described in the specification of British Patent No. 1388492. , the compound described in Japanese Patent Laid-Open No. 53-133428, the compound described in the specification of German Patent No. 3337024, the compound described in J.Org.Chem.; 29, 1527 (1964) based on F.C.Schaefer et al. The compound described in Kokai Sho 62-58241, the compound described in JP 5-281728, the compound described in JP 5-34920, the compound described in the specification of US Pat. No. 4,212,976, etc.

從曝光靈敏度的觀點考慮,係選自包括三鹵代甲基三嗪化合物、苄基二甲基縮酮化合物、α-羥基酮化合物、α-胺基酮化合物、醯基膦化合物、氧化膦化合物、茂金屬化合物、肟化合物、三烯丙基咪唑二聚體、鎓化合物、苯并噻唑化合物、二苯甲酮化合物、苯乙酮化合物及其衍生物、環戊二烯-苯-鐵錯合物及其鹽、鹵代甲基噁二唑化合物以及3-芳基取代香豆素化合物之群組之化合物為較佳。From the viewpoint of exposure sensitivity, it is selected from the group consisting of trihalomethyltriazine compounds, benzyldimethylketal compounds, α-hydroxyketone compounds, α-amino ketone compounds, acylphosphine compounds, and phosphine oxide compounds , metallocene compounds, oxime compounds, triallyl imidazole dimers, onium compounds, benzothiazole compounds, benzophenone compounds, acetophenone compounds and their derivatives, cyclopentadiene-benzene-iron complex Compounds of the group of compounds and their salts, halomethyloxadiazole compounds and 3-aryl-substituted coumarin compounds are preferred.

其中,三鹵代甲基三嗪化合物、α-胺基酮化合物、醯基膦化合物、氧化膦化合物、肟化合物、三烯丙基咪唑二聚體、鎓化合物、二苯甲酮化合物或苯乙酮化合物為更佳,選自包括三鹵代甲基三嗪化合物、α-胺基酮化合物、肟化合物、三烯丙基咪唑二聚體及二苯甲酮化合物之群組之至少1種化合物為進一步較佳。Among them, trihalogenated methyl triazine compound, α-amino ketone compound, acylphosphine compound, phosphine oxide compound, oxime compound, triallyl imidazole dimer, onium compound, benzophenone compound or phenethyl compound The ketone compound is more preferably, at least one compound selected from the group consisting of trihalomethyltriazine compound, α-amino ketone compound, oxime compound, triallylimidazole dimer and benzophenone compound for further better.

尤其,在遮光膜的製作中使用硬化性組成物時,由於需要以清晰的形狀形成微細的圖案,因此硬化性以及在未曝光部不留殘渣地進行顯影至關重要。從該種觀點考慮,作為光聚合起始劑,使用肟化合物為特佳。尤其,當形成微細的圖案時,在硬化用曝光中使用步進機曝光,但該曝光機有時因鹵素而受到損傷,還需要將光聚合起始劑的添加量抑制得較低。若考慮該些方面,則在形成微細圖案時,作為光聚合起始劑使用肟化合物為特佳。 作為光聚合起始劑的具體例,例如能夠參閱日本特開2013-29760號公報的0265~0268段,該內容編入本說明書中。In particular, when a curable composition is used in the production of a light-shielding film, since it is necessary to form a fine pattern in a clear shape, curability and development without leaving a residue in an unexposed part are important. From such a viewpoint, it is particularly preferable to use an oxime compound as a photopolymerization initiator. In particular, when a fine pattern is formed, a stepper is used for exposure for curing, but the exposure may be damaged by halogen, and it is necessary to keep the amount of the photopolymerization initiator added low. Taking these points into consideration, it is particularly preferable to use an oxime compound as a photopolymerization initiator when forming a fine pattern. Specific examples of the photopolymerization initiator can be referred to, for example, paragraphs 0265 to 0268 of JP 2013-29760 A, the contents of which are incorporated in the present specification.

作為光聚合起始劑,亦能夠較佳地使用羥基苯乙酮化合物、胺基苯乙酮化合物及醯基膦化合物。更具體而言,例如亦能夠使用日本特開平10-291969號公報中記載之胺基苯乙酮系起始劑及日本專利第4225898號公報中記載之醯基膦系起始劑。 作為羥基苯乙酮化合物,可舉出IRGACURE-184、DAROCUR-1173、IRGACURE-500、IRGACURE-2959及IRGACURE-127(商品名,均為BASF公司製造)。 作為胺基苯乙酮化合物,可舉出作為市售品之IRGACURE-907、IRGACURE-369及IRGACURE-379EG(商品名,均為BASF公司製造)。作為胺基苯乙酮化合物,亦可舉出吸收波長與365nm或405nm等的長波光源匹配之日本特開2009-191179公報中記載之化合物。 作為醯基膦化合物,可舉出作為市售品之IRGACURE-819及DAROCUR-TPO(商品名,均為BASF公司製造)。As a photopolymerization initiator, a hydroxyacetophenone compound, an aminoacetophenone compound, and an acylphosphine compound can also be preferably used. More specifically, for example, the aminoacetophenone-based initiator described in Japanese Patent Laid-Open No. 10-291969 and the acylphosphine-based initiator described in Japanese Patent No. 4225898 can also be used. Examples of the hydroxyacetophenone compound include IRGACURE-184, DAROCUR-1173, IRGACURE-500, IRGACURE-2959, and IRGACURE-127 (trade names, all of which are manufactured by BASF). As the aminoacetophenone compound, commercially available IRGACURE-907, IRGACURE-369, and IRGACURE-379EG (trade names, all of which are manufactured by BASF Corporation) can be mentioned. As an aminoacetophenone compound, the compound described in Unexamined-Japanese-Patent No. 2009-191179 whose absorption wavelength is matched with the long-wavelength light source, such as 365 nm or 405 nm, can also be mentioned. As the acylphosphine compound, commercially available IRGACURE-819 and DAROCUR-TPO (trade names, both of which are manufactured by BASF Corporation) can be mentioned.

<肟化合物> 作為光聚合起始劑,可更佳地舉出肟化合物(肟系起始劑)。 光聚合起始劑為肟化合物之上述硬化性組成物具有更優異之曝光靈敏度。並且,肟化合物為高靈敏度且聚合效率高,能夠與著色劑濃度無關地進行硬化性組成物層的硬化,容易將著色劑的濃度設計為較高,故較佳。 作為肟化合物的具體例,可舉出日本特開2001-233842號公報中記載之化合物、日本特開2000-80068號公報中記載之化合物及日本特開2006-342166號公報中記載之化合物。 作為肟化合物,可舉出3-苯甲醯氧基亞胺基丁烷-2-酮、3-乙醯氧基亞胺基丁烷-2-酮、3-丙醯氧基亞胺基丁烷-2-酮、2-乙醯氧基亞胺基戊烷-3-酮、2-乙醯氧基亞胺基-1-苯基丙烷-1-酮、2-苯甲醯氧基亞胺基-1-苯基丙烷-1-酮、3-(4-甲苯磺醯氧基)亞胺基丁烷-2-酮及2-乙氧基羰基氧基亞胺基-1-苯基丙烷-1-酮等。 並且,亦可舉出J.C.S.Perkin II(1979年)pp.1653-1660、J.C.S.Perkin II(1979年)pp.156-162、Journal of Photopolymer Science and Technology(1995年)pp.202-232中記載之化合物、日本特開2000-66385號公報中記載之化合物、日本特開2000-80068號公報、日本特表2004-534797號公報及日本特開2006-342166號公報的各公報中記載之化合物等。 市售品亦可較佳地使用IRGACURE-OXE01(BASF公司製造)、IRGACURE-OXE02(BASF公司製造)、IRGACURE-OXE03(BASF公司製造)或IRGACURE-OXE04(BASF公司製造)。並且,亦能夠使用TR-PBG-304(常州強力電子新材料有限公司製造)、ADEKA ARKLS NCI-831及ADEKA ARKLS NCI-930(ADEKA CORPORATION製造)或N-1919(含有咔唑・肟酯骨架之光起始劑(ADEKA CORPORATION製造))。<Oxime compound> As a photopolymerization initiator, an oxime compound (oxime-type initiator) is mentioned more preferably. The above-mentioned curable composition in which the photopolymerization initiator is an oxime compound has more excellent exposure sensitivity. In addition, the oxime compound has high sensitivity and high polymerization efficiency, can cure the curable composition layer regardless of the colorant concentration, and is easy to design the high colorant concentration, so it is preferable. Specific examples of the oxime compound include the compounds described in JP 2001-233842 A, the compounds described in JP 2000-80068 A, and the compounds described in JP 2006-342166 A. Examples of the oxime compound include 3-benzyloxyiminobutan-2-one, 3-acetoxyiminobutan-2-one, and 3-propionoxyiminobutane Alk-2-one, 2-acetoxyiminopentan-3-one, 2-acetoxyimino-1-phenylpropan-1-one, 2-benzyloxyimide Amino-1-phenylpropan-1-one, 3-(4-toluenesulfonyloxy)iminobutan-2-one and 2-ethoxycarbonyloxyimino-1-phenyl Propane-1-one, etc. In addition, those described in J.C.S.Perkin II (1979) pp.1653-1660, J.C.S.Perkin II (1979) pp.156-162, and Journal of Photopolymer Science and Technology (1995) pp.202-232 can also be cited. Compounds, compounds described in JP 2000-66385 A, compounds described in JP 2000-80068 A, JP 2004-534797 A, and JP 2006-342166 A. Commercially available products can also preferably use IRGACURE-OXE01 (manufactured by BASF), IRGACURE-OXE02 (manufactured by BASF), IRGACURE-OXE03 (manufactured by BASF), or IRGACURE-OXE04 (manufactured by BASF). In addition, TR-PBG-304 (manufactured by Changzhou Qiangli Electronic New Materials Co., Ltd.), ADEKA ARKLS NCI-831, ADEKA ARKLS NCI-930 (manufactured by ADEKA CORPORATION), or N-1919 (containing a carbazole-oxime ester skeleton) can also be used. Photoinitiator (manufactured by ADEKA CORPORATION)).

作為上述記載以外的肟化合物,亦可使用咔唑N位上連結有肟之日本特表2009-519904號公報中記載之化合物;二苯甲酮部位上導入有雜取代基之美國專利第7626957號公報中記載之化合物;色素部位上導入有硝基之日本特開2010-15025號公報及美國專利公開2009-292039號中記載之化合物;國際公開專利2009-131189號公報中記載之酮肟化合物;同一分子內含有三嗪骨架和肟骨架之美國專利7556910號公報中記載之化合物;在405nm下具有極大吸收且相對於g射線光源具有良好的靈敏度之日本特開2009-221114號公報中記載之化合物;等。 較佳為,例如能夠參閱日本特開2013-29760號公報的0274~0275段,該內容編入本說明書中。 具體而言,作為肟化合物,以下述式(OX-1)表示之化合物為較佳。另外,可以為肟化合物的N-O鍵結為(E)體的肟化合物,亦可以為(Z)體的肟化合物,還可以為(E)體和(Z)體的混合物。As oxime compounds other than those described above, compounds described in JP-A No. 2009-519904 in which an oxime is linked to the N-position of carbazole; and US Pat. No. 7,626,957 in which a heterosubstituent is introduced into the benzophenone moiety can also be used. Compounds described in the official gazette; compounds described in Japanese Patent Laid-Open No. 2010-15025 and U.S. Patent Publication No. 2009-292039 with a nitro group introduced into the pigment site; ketoxime compounds described in International Publication No. 2009-131189; Compounds described in U.S. Patent No. 7,556,910 containing a triazine skeleton and an oxime skeleton in the same molecule; compounds described in Japanese Patent Laid-Open No. 2009-221114 having maximum absorption at 405 nm and good sensitivity to g-ray light sources ;Wait. Preferably, for example, paragraphs 0274 to 0275 of JP 2013-29760 A can be referred to, the contents of which are incorporated in the present specification. Specifically, as the oxime compound, a compound represented by the following formula (OX-1) is preferable. In addition, the oxime compound may be an oxime compound in which the N-O bond of the oxime compound is (E) form, an oxime compound in (Z) form, or a mixture of (E) form and (Z) form.

[化學式7]

Figure 02_image480
[Chemical formula 7]
Figure 02_image480

式(OX-1)中,R及B分別獨立地表示1價的取代基,A表示2價的有機基,Ar表示芳基。 式(OX-1)中,作為R所表示之1價的取代基,係1價的非金屬原子團為較佳。 作為1價的非金屬原子團,可舉出烷基、芳基、醯基、烷氧基羰基、芳氧基羰基、雜環基、烷硫基羰基及芳硫基羰基等。該些基團可具有1個以上的取代基。並且,前述之取代基可進一步被其他取代基取代。 作為取代基,可舉出鹵素原子、芳氧基、烷氧基羰基或芳氧基羰基、醯氧基、醯基、烷基及芳基等。 式(OX-1)中,作為B所表示之1價的取代基,芳基、雜環基、芳基羰基或雜環羰基為較佳。該些基團可具有1個以上的取代基。作為取代基,可舉出前述取代基。 式(OX-1)中,作為A所表示之2價的有機基,碳數1~12的伸烷基、環伸烷基或伸炔基為較佳。該些基團可具有1以上的取代基。作為取代基,可舉出前述取代基。In formula (OX-1), R and B each independently represent a monovalent substituent, A represents a divalent organic group, and Ar represents an aryl group. In the formula (OX-1), the monovalent substituent represented by R is preferably a monovalent non-metallic atomic group. Examples of the monovalent non-metal atomic group include an alkyl group, an aryl group, an aryl group, an alkoxycarbonyl group, an aryloxycarbonyl group, a heterocyclic group, an alkylthiocarbonyl group, and an arylthiocarbonyl group. These groups may have one or more substituents. Also, the aforementioned substituents may be further substituted with other substituents. As a substituent, a halogen atom, an aryloxy group, an alkoxycarbonyl group, an aryloxycarbonyl group, an aryloxy group, an aryl group, an alkyl group, an aryl group, etc. are mentioned. In the formula (OX-1), the monovalent substituent represented by B is preferably an aryl group, a heterocyclic group, an arylcarbonyl group or a heterocyclic carbonyl group. These groups may have one or more substituents. Examples of the substituent include the aforementioned substituents. In the formula (OX-1), the divalent organic group represented by A is preferably an alkylene group, a cycloalkylene group or an alkynylene group having 1 to 12 carbon atoms. These groups may have one or more substituents. Examples of the substituent include the aforementioned substituents.

作為光聚合起始劑,還能夠使用含有氟原子之肟化合物。作為含有氟原子之肟化合物的具體例,可舉出日本特開2010-262028號公報中記載之化合物;日本特表2014-500852號公報中記載之化合物24、36~40;日本特開2013-164471號公報中記載之化合物(C-3);等。該內容編入本說明書中。As the photopolymerization initiator, an oxime compound containing a fluorine atom can also be used. Specific examples of the fluorine atom-containing oxime compound include compounds described in JP 2010-262028 A; compounds 24, 36 to 40 described in JP 2014-500852 A; JP 2013-A Compound (C-3) described in Gazette No. 164471; etc. This content is incorporated into this manual.

作為光聚合起始劑,還能夠使用以下述通式(1)~(4)表示之化合物。As the photopolymerization initiator, compounds represented by the following general formulae (1) to (4) can also be used.

[化學式8]

Figure 02_image482
[Chemical formula 8]
Figure 02_image482

[化學式9]

Figure 02_image484
[Chemical formula 9]
Figure 02_image484

式(1)中,R1 及R2 分別獨立地表示碳數1~20的烷基、碳數4~20的脂環式烴基、碳數6~30的芳基或碳數7~30的芳烷基,當R1 及R2 為苯基時,苯基彼此可鍵結而形成茀基,R3 及R4 分別獨立地表示氫原子、碳數1~20的烷基、碳數6~30的芳基、碳數7~30的芳烷基或碳數4~20的雜環基,X表示直接鍵結或羰基。In formula (1), R 1 and R 2 each independently represent an alkyl group having 1 to 20 carbon atoms, an alicyclic hydrocarbon group having 4 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, or an alkyl group having 7 to 30 carbon atoms. Aralkyl, when R 1 and R 2 are phenyl groups, the phenyl groups can be bonded to each other to form a perylene group, and R 3 and R 4 independently represent a hydrogen atom, an alkyl group with 1 to 20 carbon atoms, and a carbon number with 6 An aryl group of ~30, an aralkyl group of 7 to 30 carbon atoms, or a heterocyclic group of 4 to 20 carbon atoms, X represents a direct bond or a carbonyl group.

式(2)中,R1 、R2 、R3 及R4 的含義與式(1)中的R1 、R2 、R3 及R4 相同,R5 表示-R6 、-OR6 、-SR6 、-COR6 、-CONR6 R6 、-NR6 COR6 、-OCOR6 、-COOR6 、-SCOR6 、-OCSR6 、-COSR6 、-CSOR6 、-CN、鹵素原子或羥基,R6 表示碳數1~20的烷基、碳數6~30的芳基、碳數7~30的芳烷基或碳數4~20的雜環基,X表示直接鍵結或羰基,a表示0~4的整數。In formula (2), R 1 , R 2 , R 3 and R 4 have the same meanings as R 1 , R 2 , R 3 and R 4 in formula (1), and R 5 represents -R 6 , -OR 6 , -SR 6 , -COR 6 , -CONR 6 R 6 , -NR 6 COR 6 , -OCOR 6 , -COOR 6 , -SCOR 6 , -OCSR 6 , -COSR 6 , -CSOR 6 , -CN, halogen atom or Hydroxyl, R 6 represents an alkyl group with 1 to 20 carbon atoms, an aryl group with 6 to 30 carbon atoms, an aralkyl group with 7 to 30 carbon atoms or a heterocyclic group with 4 to 20 carbon atoms, and X represents a direct bond or carbonyl group , a represents an integer from 0 to 4.

式(3)中,R1 表示碳數1~20的烷基、碳數4~20的脂環式烴基、碳數6~30的芳基或碳數7~30的芳烷基,R3 及R4 分別獨立地表示氫原子、碳數1~20的烷基、碳數6~30的芳基、碳數7~30的芳烷基或碳數4~20的雜環基,X表示直接鍵結或羰基。In formula (3), R 1 represents an alkyl group having 1 to 20 carbon atoms, an alicyclic hydrocarbon group having 4 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms or an aralkyl group having 7 to 30 carbon atoms, and R 3 and R 4 each independently represent a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, an aralkyl group having 7 to 30 carbon atoms or a heterocyclic group having 4 to 20 carbon atoms, and X represents Direct bond or carbonyl.

式(4)中,R1 、R3 及R4 的含義與式(3)中的R1 、R3 及R4 相同,R5 表示-R6 、-OR6 、-SR6 、-COR6 、-CONR6 R6 、-NR6 COR6 、-OCOR6 、-COOR6 、-SCOR6 、-OCSR6 、-COSR6 、-CSOR6 、-CN、鹵素原子或羥基,R6 表示碳數1~20的烷基、碳數6~30的芳基、碳數7~30的芳烷基或碳數4~20的雜環基,X表示直接鍵結或羰基,a表示0~4的整數。In formula (4), R 1 , R 3 and R 4 have the same meanings as R 1 , R 3 and R 4 in formula (3), and R 5 represents -R 6 , -OR 6 , -SR 6 , -COR 6 , -CONR 6 R 6 , -NR 6 COR 6 , -OCOR 6 , -COOR 6 , -SCOR 6 , -OCSR 6 , -COSR 6 , -CSOR 6 , -CN, halogen atom or hydroxyl group, R 6 represents carbon Alkyl with 1-20 carbons, aryl with 6-30 carbons, aralkyl with 7-30 carbons or heterocyclic group with 4-20 carbons, X represents a direct bond or carbonyl, a represents 0-4 the integer.

上述式(1)及式(2)中,R1 及R2 分別獨立地表示甲基、乙基、正丙基、異丙基、環己基或苯基為較佳。R3 為甲基、乙基、苯基、甲苯基或二甲苯基為較佳。R4 為碳數1~6的烷基或苯基為較佳。R5 為甲基、乙基、苯基、甲苯基或萘基為較佳。X為直接鍵結為較佳。 上述式(3)及(4)中,R1 分別獨立地為甲基、乙基、正丙基、異丙基、環己基或苯基為較佳。R3 為甲基、乙基、苯基、甲苯基或二甲苯基為較佳。R4 為碳數1~6的烷基或苯基為較佳。R5 為甲基、乙基、苯基、甲苯基或萘基為較佳。X為直接鍵結為較佳。 作為以式(1)及式(2)表示之化合物的具體例,例如可舉出日本特開2014-137466號公報的段落號0076~0079中記載之化合物。該內容編入本說明書中。In the above formulas (1) and (2), it is preferable that R 1 and R 2 each independently represent a methyl group, an ethyl group, an n-propyl group, an isopropyl group, a cyclohexyl group or a phenyl group. R 3 is preferably methyl, ethyl, phenyl, tolyl or xylyl. R 4 is preferably an alkyl group or a phenyl group having 1 to 6 carbon atoms. R 5 is preferably methyl, ethyl, phenyl, tolyl or naphthyl. X is preferably a direct bond. In the above formulae (3) and (4), R 1 is preferably methyl, ethyl, n-propyl, isopropyl, cyclohexyl or phenyl, each independently. R 3 is preferably methyl, ethyl, phenyl, tolyl or xylyl. R 4 is preferably an alkyl group or a phenyl group having 1 to 6 carbon atoms. R 5 is preferably methyl, ethyl, phenyl, tolyl or naphthyl. X is preferably a direct bond. Specific examples of the compounds represented by the formula (1) and the formula (2) include the compounds described in paragraphs 0076 to 0079 of JP-A-2014-137466, for example. This content is incorporated into this manual.

以下示出可在硬化性組成物中較佳地使用之肟化合物的具體例。Specific examples of the oxime compound that can be preferably used in the curable composition are shown below.

[化學式10]

Figure 02_image486
[Chemical formula 10]
Figure 02_image486

肟化合物係在350nm~500nm的波長區域具有極大吸收波長者為較佳,係在360nm~480nm的波長區域具有極大吸收波長者為更佳,係365nm及405nm的吸光度較高者為進一步較佳。 從靈敏度的觀點考慮,肟化合物的365nm或405nm下的莫耳吸光係數為1,000~300,000為較佳,2,000~300,000為更佳,5,000~200,000為進一步較佳。 化合物的莫耳吸光係數能夠使用公知的方法,例如,使用紫外可見分光光度計(Varian公司製造Cary-5 spctrophotometer)並利用乙酸乙酯溶劑,以0.01g/L的濃度進行測定為較佳。 光聚合起始劑可依據需要組合2種以上來使用。The oxime compound is preferably the one with the maximum absorption wavelength in the wavelength region of 350nm-500nm, more preferably the one with the maximum absorption wavelength in the wavelength region of 360nm-480nm, and the one with higher absorbance at 365nm and 405nm is further preferred. From the viewpoint of sensitivity, the molar absorption coefficient at 365 nm or 405 nm of the oxime compound is preferably 1,000 to 300,000, more preferably 2,000 to 300,000, and even more preferably 5,000 to 200,000. The molar absorptivity of the compound can be measured by a known method, for example, using an ultraviolet-visible spectrophotometer (Cary-5 spctrophotometer manufactured by Varian) and using an ethyl acetate solvent, preferably at a concentration of 0.01 g/L. A photopolymerization initiator can be used in combination of 2 or more types as needed.

〔聚合性化合物〕 硬化性組成物含有聚合性化合物。 聚合性化合物的含量相對於硬化性組成物的總固體成分,為1~40質量%為較佳,10~40質量%為更佳。 若聚合性化合物的含量相對於硬化性組成物的總固體成分為10~40質量%,則硬化性組成物具有更優異之曝光靈敏度。另外,聚合性化合物可單獨使用1種,亦可同時使用2種以上。當同時使用2種以上聚合性化合物時,其合計量在上述範圍內為較佳。[Polymerizable compound] The curable composition contains a polymerizable compound. The content of the polymerizable compound is preferably 1 to 40 mass %, more preferably 10 to 40 mass %, relative to the total solid content of the curable composition. When the content of the polymerizable compound is 10 to 40 mass % with respect to the total solid content of the curable composition, the curable composition has more excellent exposure sensitivity. In addition, a polymerizable compound may be used individually by 1 type, and may use 2 or more types together. When two or more types of polymerizable compounds are used simultaneously, the total amount thereof is preferably within the above-mentioned range.

聚合性化合物係包含1個以上的含有烯屬不飽和鍵之基團之化合物為較佳,含有2個以上之化合物為更佳,含有3個以上為進一步較佳,含有5個以上為特佳。上限例如為15個以下。作為含有烯屬不飽和鍵之基團,例如可舉出乙烯基、(甲基)烯丙基及(甲基)丙烯醯基等。The polymerizable compound is preferably a compound containing one or more ethylenically unsaturated bond-containing groups, more preferably two or more, more preferably three or more, and particularly preferably five or more . The upper limit is, for example, 15 or less. As a group containing an ethylenically unsaturated bond, a vinyl group, a (meth)allyl group, a (meth)acryloyl group, etc. are mentioned, for example.

聚合性化合物例如可以為單體、預聚物、低聚物及它們的混合物、以及它們的多聚體等化學形態中的任一種,單體為較佳。 聚合性化合物的分子量為100~3,000為較佳,250~1,500為更佳。 聚合性化合物為3~15官能的(甲基)丙烯酸酯化合物為較佳,3~6官能的(甲基)丙烯酸酯化合為更佳。 作為單體、預聚物的例子,可舉出不飽和羧酸(例如,丙烯酸、甲基丙烯酸、衣康酸、巴豆酸、異巴豆酸、順丁烯二酸等)或其酯類、醯胺類以及它們的多聚體,較佳為不飽和羧酸與脂肪族多元醇化合物的酯及不飽和羧酸與脂肪族多元胺化合物的醯胺類以及它們的多聚體。並且,亦可較佳地使用含有羥基、胺基、巰基等親核性取代基之不飽和羧酸酯或醯胺類與單官能或多官能異氰酸酯類或環氧類的加成反應物、及上述不飽和羧酸酯或醯胺類與單官能或多官能的羧酸的脫水縮合反應物等。並且,含有異氰酸酯基、環氧基等親電子性取代基之不飽和羧酸酯或醯胺類與單官能或多官能的醇類、胺類或硫醇類的反應物、含有鹵代基或甲苯磺醯氧基等脫離性取代基之不飽和羧酸酯或醯胺類與單官能或多官能的醇類、胺類或硫醇類的反應物亦較佳。並且,亦可使用取代為不飽和膦酸、苯乙烯等乙烯苯衍生物、乙烯基醚、烯丙基醚等之化合物群組,以代替上述不飽和羧酸。 作為它們的具體化合物,亦能夠將日本特開2009-288705號公報的0095~0108段中記載之化合物較佳地使用於本發明中。The polymerizable compound may be, for example, any of chemical forms such as monomers, prepolymers, oligomers, mixtures thereof, and multimers thereof, and monomers are preferred. The molecular weight of the polymerizable compound is preferably 100 to 3,000, more preferably 250 to 1,500. The polymerizable compound is preferably a 3- to 15-functional (meth)acrylate compound, and more preferably a 3- to 6-functional (meth)acrylate compound. Examples of monomers and prepolymers include unsaturated carboxylic acids (for example, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid, etc.) The amines and their multimers are preferably esters of unsaturated carboxylic acids and aliphatic polyol compounds, and amides of unsaturated carboxylic acids and aliphatic polyamine compounds, and their multimers. In addition, the addition reaction products of unsaturated carboxylates or amides containing nucleophilic substituents such as hydroxyl groups, amine groups, and mercapto groups and monofunctional or polyfunctional isocyanates or epoxides, and Dehydration-condensation reaction products of the above-mentioned unsaturated carboxylic acid esters or amides and monofunctional or polyfunctional carboxylic acids, and the like. In addition, the reaction products of unsaturated carboxylic acid esters or amides containing electrophilic substituents such as isocyanate groups and epoxy groups and monofunctional or polyfunctional alcohols, amines or thiols, halogenated or Reactants of unsaturated carboxylic acid esters or amides with a leaving substituent such as tosyloxy and monofunctional or polyfunctional alcohols, amines or thiols are also preferred. In addition, in place of the above-mentioned unsaturated carboxylic acid, a group of compounds substituted with vinylbenzene derivatives such as unsaturated phosphonic acid and styrene, vinyl ether, and allyl ether can also be used. As these specific compounds, the compounds described in paragraphs 0095 to 0108 of JP-A No. 2009-288705 can also be preferably used in the present invention.

聚合性化合物包含1個以上的含有烯屬不飽和鍵之基團且在常壓下具有100℃以上的沸點之化合物亦較佳。例如,能夠參閱日本特開2013-29760號公報的0227段、日本特開2008-292970號公報的0254~0257段中記載之化合物,該內容編入本說明書中。The polymerizable compound contains one or more groups containing an ethylenically unsaturated bond and has a boiling point of 100° C. or higher under normal pressure. For example, reference can be made to the compounds described in paragraph 0227 of JP-A-2013-29760 and paragraphs 0254-0257 of JP-A-2008-292970, the contents of which are incorporated in the present specification.

聚合性化合物為二新戊四醇三丙烯酸酯(作為市售品,為KAYARAD D-330、PET-30,Nippon Kayaku Co., Ltd.製造)、二新戊四醇四丙烯酸酯(作為市售品,為KAYARAD D-320,Nippon Kayaku Co., Ltd.製造)、二新戊四醇五(甲基)丙烯酸酯(作為市售品,為KAYARAD D-310,Nippon Kayaku Co., Ltd.製造)、二新戊四醇六(甲基)丙烯酸酯(作為市售品,為KAYARAD DPHA,Nippon Kayaku Co., Ltd.製造;A-DPH-12E,Shin-Nakamura Chemical Co., Ltd.製造)及該些(甲基)丙烯醯基經由乙二醇殘基或丙二醇殘基之結構(例如,由Sartomer Company市售之SR454、SR499)為較佳。亦能夠使用它們的低聚物類型。並且,亦能夠使用NK Ester A-TMMT(新戊四醇四丙烯酸酯,Shin-Nakamura Chemical Co., Ltd.製造)及KAYARAD RP-1040(Nippon Kayaku Co., Ltd.製造)等。 以下示出較佳的聚合性化合物的態様。The polymerizable compounds are dipeptaerythritol triacrylate (commercially available as KAYARAD D-330, PET-30, manufactured by Nippon Kayaku Co., Ltd.), dipivalerythritol tetraacrylate (commercially available as product, KAYARAD D-320, manufactured by Nippon Kayaku Co., Ltd.), dipivaloerythritol penta(meth)acrylate (as a commercial item, KAYARAD D-310, manufactured by Nippon Kayaku Co., Ltd. ), Dipionaerythritol hexa(meth)acrylate (as a commercial item, KAYARAD DPHA, manufactured by Nippon Kayaku Co., Ltd.; A-DPH-12E, manufactured by Shin-Nakamura Chemical Co., Ltd.) And the structure of these (meth)acryloyl groups via ethylene glycol residues or propylene glycol residues (eg, SR454, SR499 commercially available from Sartomer Company) is preferred. Their oligomeric versions can also be used. In addition, NK Ester A-TMMT (neopentaerythritol tetraacrylate, manufactured by Shin-Nakamura Chemical Co., Ltd.), KAYARAD RP-1040 (manufactured by Nippon Kayaku Co., Ltd.), and the like can also be used. The state of a preferable polymerizable compound is shown below.

聚合性化合物亦可具有羧酸基、磺酸基或磷酸基等酸基。作為含有酸基之聚合性化合物,脂肪族聚羥基化合物與不飽和羧酸的酯為較佳,脂肪族聚羥基化合物的未反應的羥基與非芳香族羧酸酐進行反應而具有酸基之聚合性化合物為更佳,在該酯中,脂肪族聚羥基化合物為新戊四醇和/或二新戊四醇為進一步較佳。作為市售品,例如可舉出Toagosei Co., Ltd.製造的ARONIX TO-2349、M-305、M-510及M-520等。The polymerizable compound may have an acid group such as a carboxylic acid group, a sulfonic acid group, or a phosphoric acid group. The acid group-containing polymerizable compound is preferably an ester of an aliphatic polyhydroxy compound and an unsaturated carboxylic acid, and the unreacted hydroxyl group of the aliphatic polyhydroxy compound reacts with a non-aromatic carboxylic acid anhydride to have acid group polymerizability The compound is more preferable, and in the ester, it is further preferable that the aliphatic polyhydroxy compound is neotaerythritol and/or dipeoerythritol. As a commercial item, ARONIX TO-2349 by Toagosei Co., Ltd., M-305, M-510, and M-520 etc. are mentioned, for example.

作為含有酸基之聚合性化合物的較佳的酸值,為0.1~40mgKOH/g,更佳為5~30mgKOH/g。若聚合性化合物的酸值為0.1mgKOH/g以上,則顯影溶解特性良好,若為40mgKOH/g以下,則有利於製造和/或處理。而且,藉由在上述範圍內,光聚合性能良好且硬化性優異。As a preferable acid value of the polymerizable compound containing an acid group, it is 0.1-40 mgKOH/g, More preferably, it is 5-30 mgKOH/g. When the acid value of the polymerizable compound is 0.1 mgKOH/g or more, the development and dissolution properties are favorable, and when it is 40 mgKOH/g or less, the production and/or handling are advantageous. And by being in the said range, photopolymerization performance is favorable and it is excellent in curability.

含有己內酯結構之化合物亦為聚合性化合物的較佳態様。 作為含有己內酯結構之化合物,只要在分子內含有己內酯結構,則並無特別限定,例如能夠舉出藉由將三羥甲基乙烷、二三羥甲基乙烷、三羥甲基丙烷、二三羥甲基丙烷、新戊四醇、二新戊四醇、三新戊四醇、甘油、二甘油、三羥甲基三聚氰胺等多元醇與(甲基)丙烯酸及ε-己內酯進行酯化而獲得之ε-己內酯改質多官能(甲基)丙烯酸酯。其中,含有以下述式(Z-1)表示之己內酯結構之化合物為較佳。Compounds containing caprolactone structures are also preferred forms of polymeric compounds. The compound containing a caprolactone structure is not particularly limited as long as it contains a caprolactone structure in the molecule, and examples thereof include trimethylolethane, ditrimethylolethane, trimethylol Polyhydric alcohols such as methylolpropane, ditrimethylolpropane, neopentaerythritol, dipepaerythritol, trinepentaerythritol, glycerol, diglycerol, trimethylol melamine, and (meth)acrylic acid and ε-hexyl ε-caprolactone modified polyfunctional (meth)acrylate obtained by esterification of lactone. Among them, a compound containing a caprolactone structure represented by the following formula (Z-1) is preferable.

[化學式11]

Figure 02_image488
[Chemical formula 11]
Figure 02_image488

式(Z-1)中,6個R均為以下述式(Z-2)表示之基團或6個R中1~5個為以下述式(Z-2)表示之基團,剩餘為以下述式(Z-3)表示之基團。In formula (Z-1), 6 Rs are all groups represented by the following formula (Z-2) or 1 to 5 of the 6 Rs are groups represented by the following formula (Z-2), and the rest are A group represented by the following formula (Z-3).

[化學式12]

Figure 02_image490
[Chemical formula 12]
Figure 02_image490

式(Z-2)中,R1 表示氫原子或甲基,m表示1或2的數,*表示鍵結鍵。In formula (Z-2), R 1 represents a hydrogen atom or a methyl group, m represents a number of 1 or 2, and * represents a bond.

[化學式13]

Figure 02_image492
[Chemical formula 13]
Figure 02_image492

式(Z-3)中,R1 表示氫原子或甲基,*表示鍵結鍵。In formula (Z-3), R 1 represents a hydrogen atom or a methyl group, and * represents a bond.

含有己內酯結構之聚合性化合物例如由Nippon Kayaku Co., Ltd.作為KAYARAD DPCA系列而市售,可舉出DPCA-20(式(Z-1)~(Z-3)中,m為1、以式(Z-2)表示之基團的數為2、R1 均為氫原子之化合物)、DPCA-30(式(Z-1)~(Z-3)中,m為1、以式(Z-2)表示之基團的數為3、R1 均為氫原子之化合物)、DPCA-60(式(Z-1)~(Z-3)中,m為1、以式(Z-2)表示之基團的數為6、R1 均為氫原子之化合物)、DPCA-120(式(Z-1)~(Z-3)中,m為2、以式(Z-2)表示之基團的數為6、R1 均為氫原子之化合物)等。The polymerizable compound containing a caprolactone structure is marketed as KAYARAD DPCA series from, for example, Nippon Kayaku Co., Ltd., and examples thereof include DPCA-20 (in formulae (Z-1) to (Z-3), m is 1) , the number of groups represented by formula (Z-2) is 2, and R 1 is a compound of hydrogen atom), DPCA-30 (in formulas (Z-1) to (Z-3), m is 1, with The number of groups represented by formula (Z-2) is 3, and R 1 is a compound of hydrogen atom), DPCA-60 (in formulas (Z-1) to (Z-3), m is 1, with formula ( The number of groups represented by Z-2) is 6, and R 1 is a compound of hydrogen atoms), DPCA-120 (in formulas (Z-1) to (Z-3), m is 2, with formula (Z- 2) The number of groups represented is 6, and R 1 is a compound of hydrogen atoms) and the like.

聚合性化合物亦能夠使用以下述式(Z-4)或(Z-5)表示之化合物。As the polymerizable compound, a compound represented by the following formula (Z-4) or (Z-5) can also be used.

[化學式14]

Figure 02_image494
[Chemical formula 14]
Figure 02_image494

式(Z-4)及(Z-5)中,E分別獨立地表示-((CH2y CH2 O)-或((CH2y CH(CH3 )O)-,y分別獨立日地表示0~10的整數, X分別獨立地表示(甲基)丙烯醯基、氫原子或羧酸基。 式(Z-4)中,(甲基)丙烯醯基的合計為3個或4個,m分別獨立地表示0~10的整數,各m的合計為0~40的整數。 式(Z-5)中,(甲基)丙烯醯基的合計為5個或6個,n分別獨立地表示0~10的整數,各n的合計為0~60的整數。In formulas (Z-4) and (Z-5), E each independently represents -((CH 2 ) y CH 2 O)- or ((CH 2 ) y CH(CH 3 )O)-, and y is each independently Day and day represent an integer of 0 to 10, and X each independently represents a (meth)acryloyl group, a hydrogen atom, or a carboxylic acid group. In formula (Z-4), the total number of (meth)acryloyl groups is 3 or 4, m each independently represents an integer of 0 to 10, and the total of each m is an integer of 0 to 40. In formula (Z-5), the total number of (meth)acryloyl groups is 5 or 6, n each independently represents an integer of 0 to 10, and the total of each n is an integer of 0 to 60.

式(Z-4)中,m為0~6的整數為較佳,0~4的整數為更佳。 各m的合計為2~40的整數為較佳,2~16的整數為更佳,4~8的整數為進一步較佳。 式(Z-5)中,n為0~6的整數為較佳,0~4的整數為更佳。 各n的合計為3~60的整數為較佳,3~24的整數為更佳,6~12的整數為進一步較佳。 式(Z-4)或式(Z-5)中的-((CH2y CH2 O)-或((CH2y CH(CH3 )O)-係氧原子側的末端與X鍵結之形態為較佳。In formula (Z-4), m is preferably an integer of 0 to 6, more preferably an integer of 0 to 4. The total of each m is preferably an integer of 2 to 40, more preferably an integer of 2 to 16, and even more preferably an integer of 4 to 8. In formula (Z-5), n is preferably an integer of 0 to 6, more preferably an integer of 0 to 4. The total of each n is preferably an integer of 3 to 60, more preferably an integer of 3 to 24, and even more preferably an integer of 6 to 12. -((CH 2 ) y CH 2 O)- or ((CH 2 ) y CH(CH 3 )O)- in formula (Z-4) or formula (Z-5) is the terminal on the oxygen atom side and X The form of the bond is preferable.

以式(Z-4)或式(Z-5)表示之化合物可單獨使用1種,亦可同時使用2種以上。尤其,係式(Z-5)中6個X均為丙烯醯基之形態、式(Z-5)中6個X均為丙烯醯基之化合物與6個X中至少1個為氫原子之化合物的混合物之態様為較佳。藉由設為該種構成,能夠更加提高顯影性。The compound represented by formula (Z-4) or formula (Z-5) may be used alone or in combination of two or more. In particular, a compound in which 6 Xs in formula (Z-5) are all acryl groups, a compound in which 6 Xs in formula (Z-5) are all acryl groups, and at least one of 6 Xs is a hydrogen atom. The state of the mixture of compounds is preferred. By setting it as such a structure, developability can be improved more.

以式(Z-4)或式(Z-5)表示之化合物的聚合性化合物中的總含量為20質量%以上為較佳,50質量%以上為更佳。The total content in the polymerizable compound of the compound represented by formula (Z-4) or formula (Z-5) is preferably 20 mass % or more, more preferably 50 mass % or more.

以式(Z-4)或式(Z-5)表示之化合物能夠藉由先前公知的製程亦即以下製程來合成:藉由使新戊四醇或二新戊四醇與環氧乙烷或環氧丙烷進行開環加成反應,從而將開環骨架鍵結之製程;及使開環骨架的末端羥基與例如(甲基)丙烯醯氯進行反應而導入(甲基)丙烯醯基之製程。各製程為眾所周知的製程,所屬技術領域中具有通常知識者能夠輕鬆地合成以通式(Z-4)或(Z-5)表示之化合物。The compound represented by the formula (Z-4) or the formula (Z-5) can be synthesized by a previously known process, that is, the following process: Propylene oxide undergoes a ring-opening addition reaction to bond the ring-opening skeleton; and the terminal hydroxyl group of the ring-opening skeleton reacts with, for example, (meth)acryloyl chloride to introduce a (meth)acryloyl group . Each process is a well-known process, and those with ordinary knowledge in the art can easily synthesize the compound represented by the general formula (Z-4) or (Z-5).

以式(Z-4)或式(Z-5)表示之化合物的中,新戊四醇衍生物和/或二新戊四醇衍生物為更佳。 具體而言,可舉出以下述式(a)~(f)表示之化合物(以下,亦稱為“例示化合物(a)~(f)”。),其中,例示化合物(a)、(b)、(e)、(f)為較佳。Among the compounds represented by the formula (Z-4) or the formula (Z-5), a neopentaerythritol derivative and/or a dipuetaerythritol derivative are more preferable. Specifically, compounds represented by the following formulae (a) to (f) (hereinafter, also referred to as "exemplary compounds (a) to (f)") are exemplified, and among them, compounds (a) and (b) are exemplified. ), (e), (f) are preferred.

[化學式15]

Figure 02_image496
[Chemical formula 15]
Figure 02_image496

[化學式16]

Figure 02_image498
[Chemical formula 16]
Figure 02_image498

作為以式(Z-4)及(Z-5)表示之聚合性化合物的市售品,例如可舉出Sartomer Company製造的含有4個伸乙氧基鏈之4官能丙烯酸酯亦即SR-494、Nippon Kayaku Co., Ltd.製造的含有6個伸戊氧基鏈之6官能丙烯酸酯亦即DPCA-60、含有3個異伸丁氧基鏈之官能丙烯酸酯亦即TPA-330等。As a commercial item of the polymerizable compound represented by formulae (Z-4) and (Z-5), for example, SR-494, which is a tetrafunctional acrylate containing four ethoxy-extended chains manufactured by Sartomer Company, is mentioned. , Nippon Kayaku Co., Ltd. manufactured by Nippon Kayaku Co., Ltd. containing 6 pentyloxy chain 6-functional acrylate, namely DPCA-60, containing 3 isobutoxy chains of functional acrylate, namely TPA-330 and the like.

作為聚合性化合物,日本特公昭48-41708號公報、日本特開昭51-37193號公報、日本特公平2-32293號公報、日本特公平2-16765號公報中記載之胺基甲酸酯丙烯酸酯類;日本特公昭58-49860號公報、日本特公昭56-17654號公報、日本特公昭62-39417號公報及日本特公昭62-39418號公報中記載之含有環氧乙烷系骨架之胺基甲酸酯化合物類亦較佳。並且,藉由使用日本特開昭63-277653號公報、日本特開昭63-260909號公報及日本特開平1-105238號公報中記載之、分子內含有胺基結構和/或硫醚結構之加成聚合性化合物類,能夠獲得感光速度非常優異之硬化性組成物。 作為市售品,可舉出胺基甲酸酯低聚物UAS-10、UAB-140(Sanyo Kokusaku Pulp Co., Ltd.製造)、UA-7200(Shin-Nakamura Chemical Co., Ltd.製造)、DPHA-40H(Nippon Kayaku Co., Ltd.製造)、UA-306H、UA-306T、UA-306I、AH-600、T-600及AI-600(Kyoeisha Chemical Co., Ltd.製造)等。As the polymerizable compound, urethane acrylic acid described in Japanese Patent Publication No. 48-41708, Japanese Patent Publication No. 51-37193, Japanese Patent Publication No. 2-32293, and Japanese Patent Publication No. 2-16765 Esters; amines containing ethylene oxide skeletons described in Japanese Patent Publication No. 58-49860, Japanese Patent Publication No. 56-17654, Japanese Patent Publication No. 62-39417 and Japanese Patent Publication No. 62-39418 Carbamate compounds are also preferred. In addition, by using Japanese Patent Laid-Open No. 63-277653, Japanese Patent Laid-Open No. 63-260909, and Japanese Patent Laid-Open No. Hei 1-105238, the molecules containing an amine group structure and/or a thioether structure are used. Addition polymerizable compounds can obtain curable compositions with very excellent photospeed. Commercially available products include urethane oligomers UAS-10, UAB-140 (manufactured by Sanyo Kokusaku Pulp Co., Ltd.), and UA-7200 (manufactured by Shin-Nakamura Chemical Co., Ltd.) , DPHA-40H (manufactured by Nippon Kayaku Co., Ltd.), UA-306H, UA-306T, UA-306I, AH-600, T-600 and AI-600 (manufactured by Kyoeisha Chemical Co., Ltd.), etc.

聚合性化合物的SP(Solubility Parameter:溶解度參數)值為9.50以上為較佳,10.40以上為更佳,10.60以上為進一步較佳。 本說明書中,關於SP值,除非另有指明,否則藉由Hoy法求出(H.L.Hoy Journal of Painting,1970,Vol.42,76-118)。關於SP值,省略單位而示出,但其單位為cal1/2 cm-3/2The SP (Solubility Parameter) value of the polymerizable compound is preferably 9.50 or more, more preferably 10.40 or more, and even more preferably 10.60 or more. In this specification, the SP value is determined by the Hoy method unless otherwise specified (HL Hoy Journal of Painting, 1970, Vol. 42, 76-118). The SP value is shown without the unit, but the unit is cal 1/2 cm -3/2 .

從改善顯影殘渣的觀點考慮,硬化性組成物包含含有卡多(Cardo)骨架之聚合性化合物亦較佳。 作為含有卡多骨架之聚合性化合物,具有含有9,9-雙芳基茀骨架之聚合性化合物為較佳,以下述式(Q3)表示之化合物為更佳。From the viewpoint of improving the development residue, it is also preferable that the curable composition contains a polymerizable compound containing a Cardo skeleton. As the polymerizable compound containing a cardo skeleton, a polymerizable compound containing a 9,9-bisaryl pyrene skeleton is preferable, and a compound represented by the following formula (Q3) is more preferable.

式(Q3) [化學式17]

Figure 02_image500
Formula (Q3) [Chemical Formula 17]
Figure 02_image500

上述式(Q3)中,Ar11 ~Ar14 分別獨立地表示含有以虛線包圍之苯環之芳基。X1 ~X4 分別獨立地表示含有聚合性基團之取代基,上述取代基中的碳原子可被雜原子取代。a及b分別獨立地表示1~5的整數,c及d分別獨立地表示0~5的整數。R1 ~R4 分別獨立地表示取代基,e、f、g及h分別獨立地表示0以上的整數,e、f、g及h的上限值分別為從Ar11 ~Ar14 能夠含有之取代基的數分別減去a、b、c或d而得之值。其中,當Ar11 ~Ar14 分別獨立地為作為稠環之一而含有以虛線包圍之苯環之多環芳香族烴基時,X1 ~X4 及R1 ~R4 可分別獨立地取代為以虛線包圍之苯環,亦可取代為除以虛線包圍之苯環以外的環。In the above formula (Q3), Ar 11 to Ar 14 each independently represent an aryl group containing a benzene ring surrounded by a dotted line. X 1 to X 4 each independently represent a polymerizable group-containing substituent, and carbon atoms in the substituent may be substituted with a hetero atom. a and b each independently represent an integer of 1 to 5, and c and d each independently represent an integer of 0 to 5. R 1 to R 4 each independently represent a substituent, e, f, g, and h each independently represent an integer of 0 or more, and the upper limit of e, f, g, and h is a value that can be contained in Ar 11 to Ar 14 , respectively. The number of substituents is obtained by subtracting a, b, c or d, respectively. Wherein, when Ar 11 to Ar 14 are each independently a polycyclic aromatic hydrocarbon group containing a benzene ring surrounded by a dotted line as one of the fused rings, X 1 to X 4 and R 1 to R 4 may be independently substituted with The benzene ring surrounded by the dotted line may be substituted with a ring other than the benzene ring surrounded by the dotted line.

式(Q3)中,Ar11 ~Ar14 所表示之含有以虛線包圍之苯環之芳基為碳數6~14的芳基為較佳,碳數6~10的芳基(例如,苯基、萘基)為更佳,苯基(僅限以虛線包圍之苯環)為進一步較佳。In the formula (Q3), the aryl group represented by Ar 11 to Ar 14 and containing a benzene ring surrounded by a dotted line is preferably an aryl group having 6 to 14 carbon atoms, and an aryl group having 6 to 10 carbon atoms (for example, a phenyl group). , naphthyl) is more preferred, and phenyl (limited to the benzene ring surrounded by dotted lines) is further preferred.

式(Q3)中,X1 ~X4 分別獨立地表示含有聚合性基團之取代基,上述取代基中的碳原子可被雜原子取代。作為X1 ~X4 所表示之含有聚合性基團之取代基,並無特別限制,但為含有聚合性基團之脂肪族基為較佳。 作為X1 ~X4 所表示之含有聚合性基團之脂肪族基,並無特別限制,但為除聚合性基團以外的碳數1~12的伸烷基為較佳,碳數2~10的伸烷基為更佳,碳數2~5的伸烷基為進一步較佳。 X1 ~X4 所表示之含有聚合性基團之脂肪族基中,當上述脂肪族基被雜原子取代時,係被-NR-(R為取代基)、氧原子、硫原子取代為較佳,上述脂肪族基中的不相鄰的-CH2 -被氧原子或硫原子取代為更佳,上述脂肪族基中的不相鄰的-CH2 -被氧原子取代為進一步較佳。X1 ~X4 所表示之含有聚合性基團之脂肪族基被雜原子取代1~2處為較佳,被雜原子取代1處為更佳,Ar11 ~Ar14 所表示之含有以虛線包圍之苯環之與芳基相鄰之1處被雜原子取代為進一步較佳。 作為X1 ~X4 所表示之含有聚合性基團之脂肪族基中所含之聚合性基團,能夠進行自由基聚合或陽離子聚合的聚合性基團(以下,還分別稱為自由基聚合性基團及陽離子聚合性基團)為較佳。 作為自由基聚合性基團,能夠使用通常周知之自由基聚合性基團,作為較佳者,能夠舉出能夠進行自由基聚合的含有烯屬不飽和鍵之聚合性基團,具體而言,能夠舉出乙烯基、(甲基)丙烯醯氧基等。其中,(甲基)丙烯醯氧基為較佳,丙烯醯氧基為更佳。 作為陽離子聚合性基團,能夠使用通常周知之陽離子聚合性基團,具體而言,能夠舉出脂環式醚基、環狀縮醛基、環狀內酯基、環狀硫醚基、螺環原酸酯基、乙烯氧基等。其中,脂環式醚基、乙烯氧基為較佳,環氧基、氧雜環丁烷(Oxetanyl)基、乙烯氧基為特佳。 Ar11 ~Ar14 所含之取代基含有之上述聚合性基團為自由基聚合性基團為較佳。 Ar11 ~Ar14 中2個以上包含含有聚合性基團之取代基,Ar11 ~Ar14 中2~4個包含含有聚合性基團之取代基為較佳,Ar11 ~Ar14 中2或3個包含含有聚合性基團之取代基為更佳,Ar11 ~Ar14 中2個包含含有聚合性基團之取代基為進一步較佳。 當Ar11 ~Ar14 分別獨立地為作為稠環之一而含有以虛線包圍之苯環之多環芳香族烴基時,X1 ~X4 可分別獨立地取代為以虛線包圍之苯環,亦可取代為除以虛線包圍之苯環以外的環。In the formula (Q3), X 1 to X 4 each independently represent a polymerizable group-containing substituent, and carbon atoms in the substituent may be substituted with a hetero atom. The polymerizable group-containing substituent represented by X 1 to X 4 is not particularly limited, but is preferably a polymerizable group-containing aliphatic group. The polymerizable group-containing aliphatic group represented by X 1 to X 4 is not particularly limited, but is preferably an alkylene group having 1 to 12 carbon atoms other than the polymerizable group, and has 2 to 2 carbon atoms. An alkylene group of 10 is more preferable, and an alkylene group having 2 to 5 carbon atoms is further preferable. In the polymerizable group-containing aliphatic groups represented by X 1 to X 4 , when the aliphatic group is substituted by a hetero atom, it is substituted by -NR- (R is a substituent), an oxygen atom, and a sulfur atom. Preferably, the non-adjacent -CH 2 - in the aliphatic group is substituted by an oxygen atom or a sulfur atom, and it is more preferred that the non-adjacent -CH 2 - in the aliphatic group is substituted by an oxygen atom. Preferably, the aliphatic group containing a polymerizable group represented by X 1 to X 4 is substituted by a heteroatom at 1 to 2 places, more preferably at 1 place by a hetero atom. It is further preferable that one of the surrounding benzene rings adjacent to the aryl group is substituted with a heteroatom. The polymerizable group contained in the polymerizable group-containing aliphatic group represented by X 1 to X 4 is a polymerizable group capable of radical polymerization or cationic polymerization (hereinafter, also referred to as radical polymerization, respectively). and cationic polymerizable groups) are preferred. As the radically polymerizable group, generally known radically polymerizable groups can be used, and preferred ones include ethylenically unsaturated bond-containing polymerizable groups capable of radical polymerization. Specifically, A vinyl group, a (meth)acryloyloxy group, etc. are mentioned. Among them, (meth)acryloyloxy is preferable, and acryloxy is more preferable. As the cationically polymerizable group, generally known cationically polymerizable groups can be used, and specific examples thereof include alicyclic ether groups, cyclic acetal groups, cyclic lactone groups, cyclic thioether groups, spiro Cyclic orthoester group, vinyloxy group, etc. Among them, an alicyclic ether group and a vinyloxy group are preferable, and an epoxy group, an oxetanyl group, and a vinyloxy group are particularly preferable. It is preferable that the above-mentioned polymerizable group contained in the substituent contained in Ar 11 to Ar 14 is a radically polymerizable group. Two or more of Ar 11 to Ar 14 contain a polymerizable group-containing substituent, preferably 2 to 4 of Ar 11 to Ar 14 contain a polymerizable group-containing substituent, and 2 or more of Ar 11 to Ar 14 It is more preferable that 3 substituents contain a polymerizable group, and it is more preferable that 2 of Ar 11 to Ar 14 contain a substituent containing a polymerizable group. When Ar 11 to Ar 14 are each independently a polycyclic aromatic hydrocarbon group containing a benzene ring surrounded by a dotted line as one of the fused rings, X 1 to X 4 may be independently substituted with a benzene ring surrounded by a dotted line, or It may be substituted with a ring other than the benzene ring surrounded by the dotted line.

式(Q3)中,a及b分別獨立地表示1~5的整數,1或2為較佳,a及b均為1為更佳。 式(Q3)中,c及d分別獨立地表示0~5的整數,0或1為較佳,c及d均為0為更佳。In formula (Q3), a and b each independently represent an integer of 1 to 5, preferably 1 or 2, and more preferably both a and b. In formula (Q3), c and d each independently represent an integer of 0 to 5, preferably 0 or 1, and more preferably both c and d.

式(Q3)中,R1 ~R4 分別獨立地表示取代基。作為R1 ~R4 所表示之取代基,並無特別限制,例如,能夠舉出鹵素原子、鹵代烷基、烷基、烯基、醯基、羥基、羥基烷基、烷氧基、芳基、雜芳基及脂環基等。R1 ~R4 所表示之取代基為烷基、烷氧基或芳基為較佳,碳數1~5的烷基、碳數1~5的烷氧基或苯基為更佳,甲基、甲氧基或苯基為進一步較佳。 式(Q3)中,當Ar11 ~Ar14 分別獨立地為作為稠環之一而含有以虛線包圍之苯環之多環芳香族烴基時,R1 ~R4 可分別獨立地取代為以虛線包圍之苯環,亦可取代為除以虛線包圍之苯環以外的環。In formula (Q3), R 1 to R 4 each independently represent a substituent. The substituents represented by R 1 to R 4 are not particularly limited, and examples thereof include halogen atoms, haloalkyl groups, alkyl groups, alkenyl groups, acyl groups, hydroxyl groups, hydroxyalkyl groups, alkoxy groups, aryl groups, Heteroaryl and alicyclic groups, etc. Preferably, the substituent represented by R 1 to R 4 is an alkyl group, an alkoxy group or an aryl group, preferably an alkyl group having 1 to 5 carbon atoms, an alkoxy group having 1 to 5 carbon atoms or a phenyl group. , methoxy or phenyl is further preferred. In formula (Q3), when Ar 11 to Ar 14 are each independently a polycyclic aromatic hydrocarbon group containing a benzene ring surrounded by a dotted line as one of the fused rings, R 1 to R 4 may be independently substituted with a dotted line. The surrounded benzene ring may be substituted with a ring other than the benzene ring surrounded by the dotted line.

式(Q3)中,e、f、g及h分別獨立地表示0以上的整數,e、f、g及h的上限值分別為從Ar11 ~Ar14 能夠含有之取代基的數分別減去a、b、c或d而得之值。 e、f、g及h分別獨立地為0~8為較佳,0~2為更佳,0為進一步較佳。 當Ar11 ~Ar14 分別獨立地為作為稠環之一而含有以虛線包圍之苯環之多環芳香族烴基時,e、f、g及h為0或1為較佳,0為更佳。In the formula (Q3), e, f, g, and h each independently represent an integer of 0 or more, and the upper limit of e, f, g, and h are respectively subtracted from the number of substituents that can be contained in Ar 11 to Ar 14 . The value obtained by going to a, b, c or d. Preferably, e, f, g, and h are independently 0 to 8, more preferably 0 to 2, and even more preferably 0. When Ar 11 to Ar 14 are each independently a polycyclic aromatic hydrocarbon group containing a benzene ring surrounded by a dotted line as one of the fused rings, e, f, g and h are preferably 0 or 1, and 0 is more preferably .

作為以式(Q3)表示之化合物,例如可舉出9,9雙[4-(2-丙烯醯氧基乙氧基)苯基]茀等。作為含有9,9-雙芳基茀骨架之聚合性化合物,還能夠較佳地使用日本特開2010-254732號公報中記載之化合物類。As a compound represented by formula (Q3), 9,9 bis[4-(2-propenyloxyethoxy)phenyl] pyrene etc. are mentioned, for example. As the polymerizable compound containing a 9,9-bisaryl perylene skeleton, compounds described in Japanese Patent Laid-Open No. 2010-254732 can also be preferably used.

作為該種含有卡多骨架之聚合性化合物,並無限定,例如可舉出Oncoat EX系列( NAGASE & CO., LTD製造)及 Ogsol(Osaka Gas Chemicals Co., Ltd.製造)等。The polymerizable compound containing the cardo skeleton is not limited, and examples thereof include Oncoat EX series (manufactured by NAGASE & CO., LTD.) and Ogsol (manufactured by Osaka Gas Chemicals Co., Ltd.).

〔任意成分〕 <著色劑> 硬化性組成物含有著色劑為較佳。著色劑為選自包括顏料及染料之群組之至少1種,可以為彩色著色劑,亦可以為黑色著色劑,但含有黑色顏料為較佳。 硬化性組成物中的著色劑的含量並無特別限制,但在將藉由上述硬化性組成物而獲得之硬化膜用作遮光膜時,從獲得更優異之遮光性的觀點考慮,相對於硬化性組成物的總固體成分,為50質量%以上為較佳。 著色劑的含量的上限值並無特別限制,但通常相對於硬化性組成物的總固體成分,為70質量%以下為較佳。若著色劑的含量在上限值以下,則硬化性組成物具有更優異之塗佈性。[Optional Components] <Colorant> It is preferable that the curable composition contains a colorant. The colorant is at least one selected from the group consisting of pigments and dyes, and may be a color colorant or a black colorant, but it is preferable to contain a black pigment. The content of the colorant in the curable composition is not particularly limited, but when the cured film obtained from the curable composition is used as a light-shielding film, from the viewpoint of obtaining more excellent light-shielding properties, the cured film is relatively The total solid content of the synthetic composition is preferably 50% by mass or more. The upper limit value of the content of the colorant is not particularly limited, but is usually preferably 70% by mass or less with respect to the total solid content of the curable composition. When the content of the colorant is below the upper limit value, the curable composition has more excellent coatability.

(顏料) 作為顏料,並無特別限制,能夠使用公知的無機顏料和/或有機顏料。(Pigment) The pigment is not particularly limited, and known inorganic pigments and/or organic pigments can be used.

・無機顏料 作為上述無機顏料,並無特別限制,能夠使用公知的無機顏料。 作為無機顏料,例如可舉出鋅白、鉛白、鋅鋇白、氧化鈦、氧化鉻、氧化鐵、沉降性硫酸鋇及重晶石粉、鉛紅、氧化鐵紅、鉻黃、鋅黃(鋅黃1種、鋅黃2種)、群青藍、普魯士藍(亞鐵氰化鐵鉀)鋯石灰色、鐠黃、鉻鈦黃、鉻綠、孔雀色、維多利亞綠、鐵藍(與普魯士藍無關)、釩鋯藍、鉻錫紅、錳紅以及橙紅等。並且,作為黑色的無機顏料,可舉出包含選自包括Co、Cr、Cu、Mn,Ru、Fe、Ni、Sn、Ti及Ag之群組之1種或2種以上的金屬元素之金屬氧化物、金屬氮化物及金屬氮氧化物等。・Inorganic pigments The inorganic pigments are not particularly limited, and known inorganic pigments can be used. Examples of inorganic pigments include zinc white, lead white, zinc white, titanium oxide, chromium oxide, iron oxide, precipitated barium sulfate and barite powder, lead red, iron oxide red, chrome yellow, and zinc yellow (zinc yellow). 1 yellow, 2 zinc yellows), ultramarine blue, Prussian blue (potassium ferrocyanide) zircon gray, yellow, chrome titanium yellow, chrome green, peacock, Victoria green, iron blue (not related to Prussian blue) ), vanadium zirconium blue, chrome tin red, manganese red and orange red, etc. In addition, examples of black inorganic pigments include metal oxides containing one or two or more metal elements selected from the group consisting of Co, Cr, Cu, Mn, Ru, Fe, Ni, Sn, Ti, and Ag. compounds, metal nitrides and metal oxynitrides.

作為無機顏料,從即使含量較少但亦可獲得能夠形成具有高光學濃度之硬化膜之硬化性組成物之角度考慮,碳黑、鈦黑及金屬顏料等(以下,還稱為“黑色顏料”。)為較佳。作為金屬顏料,例如可舉出包含選自包括Nb、V、Co、Cr、Cu、Mn、Ru、Fe、Ni、Sn、Ti及Ag之群組之1種或2種以上的金屬元素之金屬氧化物及金屬氮化物。 作為無機顏料,含有選自包括氮化鈦、氮氧化鈦、氮化鈮、氮化釩、含有銀或錫之金屬顔料以及含有銀及錫之金屬顔料之群組之至少1種為較佳,含有選自包括氮化鈦、氮氧化鈦、氮化鈮及氮化釩之群組之至少1種為更佳。氮化鈮及氮化釩亦可以為氮氧化鈮及氮氧化釩。 另外,作為無機顏料,還能夠使用碳黑。作為碳黑的具體例,可舉出作為市售品之C.I.顏料黑 1等有機顔料與C.I.顏料黑 7等無機顏料,但並不限定於該些。As inorganic pigments, carbon black, titanium black, metallic pigments, etc. (hereinafter, also referred to as "black pigments") can be obtained from the viewpoint of obtaining a curable composition capable of forming a cured film having a high optical density even if the content is small. .) is preferred. Examples of metal pigments include metals containing one or two or more metal elements selected from the group consisting of Nb, V, Co, Cr, Cu, Mn, Ru, Fe, Ni, Sn, Ti, and Ag. oxides and metal nitrides. The inorganic pigment preferably contains at least one selected from the group consisting of titanium nitride, titanium oxynitride, niobium nitride, vanadium nitride, metallic pigments containing silver or tin, and metallic pigments containing silver and tin, More preferably, it contains at least one selected from the group consisting of titanium nitride, titanium oxynitride, niobium nitride and vanadium nitride. Niobium nitride and vanadium nitride may also be niobium oxynitride and vanadium oxynitride. Moreover, as an inorganic pigment, carbon black can also be used. Specific examples of carbon black include organic pigments such as C.I. Pigment Black 1 and other commercially available organic pigments and inorganic pigments such as C.I. Pigment Black 7, but are not limited to these.

硬化性組成物中,除了記載為黑色顏料之顏料以外,還能夠使用具有紅外線吸收性之顏料。 作為具有紅外線吸收性之顏料,鎢化合物及金屬硼化物等為較佳,其中,從紅外區域的波長中的遮光性優異之角度考慮,鎢化合物為較佳。尤其,從與基於曝光之硬化效率相關之光聚合起始劑的光吸收波長區域與可見光區域的透光性優異之觀點考慮,鎢化合物為較佳。In the curable composition, in addition to the pigments described as black pigments, pigments having infrared absorption properties can be used. As pigments having infrared absorption properties, tungsten compounds, metal borides, and the like are preferred, and among them, tungsten compounds are preferred because they are excellent in light-shielding properties at wavelengths in the infrared region. In particular, a tungsten compound is preferable from the viewpoint of excellent light transmittance in the light absorption wavelength region and visible light region of the photopolymerization initiator related to the curing efficiency by exposure.

該些顏料可同時使用2種以上,並且,亦可與後述之染料同時使用。為了調整色調及為了提高所希望的波長區域的遮光性,例如可舉出向黑色顏料或具有紅外線遮光性之顏料中混合紅色、綠色、黃色、橙色、紫色及藍色等彩色顏料或者後述之染料之態樣。向黑色顏料或具有紅外線遮光性之顏料中混合紅色顏料或者染料、或紫色顏料或者染料為較佳,向黑色顏料或具有紅外線遮光性之顏料中混合紅色顏料為更佳。 而且,亦可添加後述之近紅外線吸收劑、紅外線吸收劑。Two or more of these pigments may be used simultaneously, and may be used together with the dyes described later. In order to adjust the color tone and improve the light-shielding properties in a desired wavelength region, for example, black pigments or pigments having infrared light-shielding properties are mixed with color pigments such as red, green, yellow, orange, violet, and blue, or dyes described later. state. It is preferable to mix a red pigment or dye, or a purple pigment or dye with a black pigment or a pigment with infrared light-shielding property, and it is more preferable to mix a red pigment with a black pigment or a pigment with infrared light-shielding property. Moreover, a near-infrared absorber and an infrared absorber to be described later may be added.

黑色顏料含有鈦黑和/或氮氧化鈮為較佳。鈦黑係含有鈦原子之黑色粒子。低次氧化鈦、氮氧化鈦或氮化鈦等為較佳。鈦黑粒子能夠為了提高分散性、抑制凝聚性等而依據需要對表面進行修飾。能夠藉由氧化矽、氧化鈦、氧化鍺、氧化鋁、氧化鎂或氧化鋯包覆,並且,還能夠藉由如日本特開2007-302836號公報中表示之撥水性物質進行處理。 鈦黑典型地為鈦黑粒子,各個粒子的一次粒徑及平均一次粒徑均較小者為較佳。氮氧化鈮亦相同。 具體而言,平均一次粒徑在10nm~45nm的範圍者為較佳。The black pigment preferably contains titanium black and/or niobium oxynitride. Titanium black is a black particle containing titanium atoms. Subsequent titanium oxide, titanium oxynitride or titanium nitride are preferred. The surface of the titanium black particles can be modified as necessary in order to improve dispersibility, suppress aggregation, and the like. It can be coated with silicon oxide, titanium oxide, germanium oxide, aluminum oxide, magnesium oxide, or zirconium oxide, and can also be treated with a water-repellent substance as shown in Japanese Patent Laid-Open No. 2007-302836. The titanium black is typically titanium black particles, and the primary particle diameter and the average primary particle diameter of each particle are both smaller, which is preferable. The same applies to niobium oxynitride. Specifically, it is preferable that the average primary particle diameter is in the range of 10 nm to 45 nm.

另外,顏料的平均一次粒徑能夠利用穿透式電子顯微鏡(Transmission Electron Microscope、TEM)測定。作為穿透式電子顯微鏡,例如能夠利用Hitachi High-Technologies CORPORATION製造的穿透式顯微鏡HT7700。 本說明書中,關於顏料的平均一次粒徑,測定利用穿透式電子顯微鏡獲得之粒子圖像的最大長度(Dmax:粒子圖像的輪廓上的2點中的最大長度)及最大長度垂直長度(DV-max:用與最大長度平行之2條直線夾住圖像時,垂直地連結2條直線之間之最短長度),將其幾何平均值(Dmax×DV-max)1/2 作為粒徑。藉由該方法測定100個粒子的粒徑,顏料的平均一次粒徑表示其算術平均值。In addition, the average primary particle diameter of a pigment can be measured by a transmission electron microscope (Transmission Electron Microscope, TEM). As a transmission electron microscope, for example, a transmission microscope HT7700 manufactured by Hitachi High-Technologies CORPORATION can be used. In this specification, regarding the average primary particle size of the pigment, the maximum length (Dmax: the maximum length among 2 points on the outline of the particle image) and the maximum vertical length ( DV-max: When the image is sandwiched by two straight lines parallel to the maximum length, the shortest length between the two straight lines is connected vertically), and the geometric mean (Dmax×DV-max) 1/2 is used as the particle size . The particle diameter of 100 particles is measured by this method, and the average primary particle diameter of the pigment represents the arithmetic mean value thereof.

鈦黑及氮氧化鈮的比表面積並無特別限制,但為了使藉由撥水劑對鈦黑及氮氧化鈮進行表面處理之後的撥水性成為規定的性能,藉由BET(布魯梭-厄米特-泰勒(Brunauer, Emmett, Teller))法測定之值為5m2 /g以上且150m2 /g以下為較佳,20m2 /g以上且120m2 /g以下為更佳。 作為鈦黑的市售品的例子,可舉出鈦黑10S、12S、13R、13M、13M-C、13R、13R-N、13M-T(商品名,Mitsubishi Materials Corporation製造)、Tilack D(商品名,Ako Kasei Co., Ltd.製造)、氮化鈦50nm(商品名,Wako Pure Chemical Industries, Ltd.製造)等。The specific surface area of titanium black and niobium oxynitride is not particularly limited, but in order to make the water repellency after the surface treatment of titanium black and niobium oxynitride with a water repellent becomes a predetermined performance, BET (Bruceau-Ethr. The value measured by the Brunauer, Emmett, Teller) method is preferably 5 m 2 /g or more and 150 m 2 /g or less, and more preferably 20 m 2 /g or more and 120 m 2 /g or less. Examples of commercially available titanium blacks include titanium blacks 10S, 12S, 13R, 13M, 13M-C, 13R, 13R-N, 13M-T (trade names, manufactured by Mitsubishi Materials Corporation), and Tilack D (trade names, manufactured by Mitsubishi Materials Corporation). name, manufactured by Ako Kasei Co., Ltd.), titanium nitride 50nm (trade name, manufactured by Wako Pure Chemical Industries, Ltd.), and the like.

作為著色劑,使用氮氧化鈦、氮化鈦或氮氧化鈮為較佳,從所得之硬化膜的耐濕性更優異之理由考慮,氮化鈦或氮氧化鈮為更佳,氮氧化鈮為進一步較佳。認為這是因為該些著色劑為疏水性。As the colorant, titanium oxynitride, titanium nitride or niobium oxynitride is preferably used, and titanium nitride or niobium oxynitride is more preferable for the reason that the obtained cured film has better moisture resistance, and niobium oxynitride is Further preferred. This is considered to be because these colorants are hydrophobic.

而且,含有鈦黑作為包含鈦黑及Si原子之被分散體亦較佳。 該形態中,鈦黑係在硬化性組成物中作為被分散體而含有者,被分散體中的Si原子與Ti原子的含有比(Si/Ti)以質量換算計,0.05以上為較佳,0.05~0.5為更佳,0.07~0.4為進一步較佳。 在此,上述被分散體包含鈦黑為一次粒子的狀態者與凝聚體(二次粒子)的狀態者這雙方。 為了變更被分散體的含有比(Si/Ti)(例如,設為0.05以上),能夠使用如下方法。 首先,藉由利用分散劑分散氧化鈦與二氧化矽粒子來獲得分散物,在高溫(例如,850~1,000℃)下對該分散物進行還元處理,藉此能夠獲得以鈦黑粒子為主成分且含有Si與Ti之被分散體。上述還元處理還能夠在氨等還元性氣體的環境下進行。 作為氧化鈦,可舉出TTO-51N(商品名,Ishihara Sangyo Kaisha, Ltd.製造)等。 作為二氧化矽粒子的市售品,可舉出AEROSIL(註冊商標)90、130、150、200、255、300、380(商品名,Evonik製造)等。 可利用分散劑分散氧化鈦與二氧化矽粒子。作為分散劑,可舉出後述之分散劑一欄中說明者。 上述分散亦可在溶劑中進行。作為溶劑,可舉出水、有機溶劑。可舉出後述之有機溶劑一欄中說明者。 含有比(Si/Ti)例如調整為0.05以上等之鈦黑例如能夠藉由日本特開2008-266045公報的段落號〔0005〕及段落號〔0016〕~〔0021〕中記載之方法來製作。Moreover, it is also preferable to contain titanium black as the to-be-dispersed body containing titanium black and Si atoms. In this form, titanium black is contained in the curable composition as a to-be-dispersed body, and the content ratio (Si/Ti) of Si atoms to Ti atoms in the to-be-dispersed body is preferably 0.05 or more in terms of mass, 0.05-0.5 is more preferable, and 0.07-0.4 is more preferable. Here, the said to-be-dispersed body contains both the state which titanium black is in the state of a primary particle, and the state which is agglomerate (secondary particle). In order to change the content ratio (Si/Ti) of the to-be-dispersed body (for example, to be 0.05 or more), the following method can be used. First, a dispersion is obtained by dispersing titanium oxide and silica particles with a dispersant, and the dispersion is subjected to reduction treatment at a high temperature (for example, 850 to 1,000° C.), whereby titanium black particles as the main component can be obtained. And contains the dispersion of Si and Ti. The above reduction treatment can also be performed in an atmosphere of a reducing gas such as ammonia. As titanium oxide, TTO-51N (trade name, manufactured by Ishihara Sangyo Kaisha, Ltd.) etc. are mentioned. As a commercial item of silica particle, AEROSIL (registered trademark) 90, 130, 150, 200, 255, 300, 380 (trade name, manufactured by Evonik) etc. are mentioned. Titanium oxide and silica particles can be dispersed with a dispersant. As a dispersing agent, what was demonstrated in the column of the dispersing agent mentioned later is mentioned. The above dispersion can also be carried out in a solvent. As a solvent, water and an organic solvent are mentioned. Those described in the column of the organic solvent mentioned later can be mentioned. Titanium black whose content ratio (Si/Ti) is adjusted to, for example, 0.05 or more can be produced by, for example, the methods described in paragraphs [0005] and [0016] to [0021] of JP-A-2008-266045.

藉由將包含鈦黑及Si原子之被分散體中的Si原子與Ti原子的含有比(Si/Ti)調整為較佳範圍(例如0.05以上),在使用包含該被分散體之硬化性組成物來形成硬化膜時,硬化膜的形成區域外的源自硬化性組成物的殘渣物減少。另外,殘渣物係包含源自鈦黑粒子、樹脂成分等硬化性組成物之成分者。 雖然殘渣物減少之理由雖尚不明確,但如上所述的被分散體具有粒徑減小之趨勢(例如,粒徑30nm以下),而且該被分散體的包含Si原子之成分增加,藉此整個膜與基底的吸附性降低。推測此現象有助於提高形成硬化膜時的未硬化的硬化性組成物(尤其鈦黑)的顯影去除性。 鈦黑對遍及紫外光至紅外光的廣範圍之波長區域的光之遮光性優異,故使用上述包含鈦黑及Si原子之被分散體(含有比(Si/Ti)以質量換算計,0.05以上者為較佳)來形成之硬化膜發揮優異之遮光性。 另外,被分散體中的Si原子與Ti原子的含有比(Si/Ti)例如能夠利用日本特開2013-249417號公報的0033段中記載之方法(1-1)或方法(1-2)進行測定。 對於使硬化性組成物硬化來獲得之硬化膜中所含之被分散體,判斷該被分散體中的Si原子與Ti原子的含有比(Si/Ti)是否為0.05以上時,能夠利用日本特開2013-249417號公報的0035段中記載之方法(2)。By adjusting the content ratio (Si/Ti) of Si atoms and Ti atoms in the dispersion containing titanium black and Si atoms to a preferable range (for example, 0.05 or more), the sclerosing composition containing the dispersion is used. When the cured film is formed from the cured film, the residues derived from the curable composition outside the formation region of the cured film are reduced. In addition, the residue contains components derived from curable compositions such as titanium black particles and resin components. Although the reason for the decrease in the residues is not clear, the particle size of the dispersion object as described above tends to decrease (for example, the particle size is 30 nm or less), and the Si atom-containing component of the dispersion object increases, thereby The adsorption of the entire membrane to the substrate is reduced. It is presumed that this phenomenon contributes to the improvement of the development removability of the uncured curable composition (especially titanium black) when forming the cured film. Titanium black has excellent light shielding properties for light in a wide wavelength range from ultraviolet light to infrared light, so the above-mentioned dispersion containing titanium black and Si atoms is used (the content ratio (Si/Ti) is 0.05 or more in terms of mass. which is preferred) to form a cured film that exhibits excellent light-shielding properties. In addition, the content ratio (Si/Ti) of Si atoms and Ti atoms in the to-be-dispersed body can be, for example, the method (1-1) or the method (1-2) described in the paragraph 0033 of Japanese Patent Laid-Open No. 2013-249417. to measure. When determining whether or not the content ratio (Si/Ti) of Si atoms to Ti atoms in the dispersed body contained in the cured film obtained by curing the curable composition is 0.05 or more, the Japanese special The method (2) described in paragraph 0035 of the Publication No. 2013-249417.

包含鈦黑及Si原子之被分散體中,鈦黑能夠使用上述者。 該被分散體中,為了調整分散性、著色性等,可與鈦黑一同組合1種或2種以上的包括Cu、Fe、Mn、V、Ni等複合氧化物、氧化鈷、氧化鐵、碳黑、苯胺黑等之黑色顏料來使用。此時,包含鈦黑之被分散體佔所有被分散體中的50質量%以上為較佳。 該被分散體中,為了調整遮光性等,可在無損於本發明的效果之範圍內,依據需要,與鈦黑同時使用其他著色劑(有機顏料和/或染料等)。 以下,對向被分散體導入Si原子時使用之材料進行敘述。向被分散體導入Si原子時,使用二氧化矽等含Si物質即可。 作為可使用之二氧化矽,能夠舉出沉降二氧化矽、煙霧狀二氧化矽、膠體二氧化矽、合成二氧化矽等,適當選擇該些來使用即可。 而且,若二氧化矽粒子的粒徑為在形成硬化膜時小於膜厚之粒徑,則遮光性更優異,故使用微粒類型的二氧化矽為較佳。另外,作為微粒類型的二氧化矽的例子,例如可舉出日本特開2013-249417號公報的0039段中記載之二氧化矽,該些內容編入本說明書中。In the to-be-dispersed body containing titanium black and Si atoms, the above-mentioned titanium black can be used. In the dispersion, in order to adjust dispersibility, colorability, etc., one or two or more kinds of complex oxides including Cu, Fe, Mn, V, Ni, etc., cobalt oxide, iron oxide, carbon, etc., can be combined together with titanium black. Black, aniline black and other black pigments are used. At this time, it is preferable that the to-be-dispersed body containing titanium black accounts for 50 mass % or more of all the to-be-dispersed bodies. In the dispersion, other colorants (organic pigments and/or dyes, etc.) may be used together with titanium black as necessary in order to adjust light-shielding properties, etc., within a range that does not impair the effects of the present invention. Hereinafter, the material used for introducing Si atoms into the dispersion will be described. When introducing Si atoms into the dispersion object, a Si-containing substance such as silicon dioxide may be used. As the silica that can be used, precipitated silica, fumed silica, colloidal silica, synthetic silica, etc. can be mentioned, and these can be appropriately selected and used. Furthermore, when the particle size of the silica particles is smaller than the film thickness when forming the cured film, the light-shielding property is more excellent, so it is preferable to use the silica of the particle type. In addition, as an example of the fine particle type silica, for example, the silica described in paragraph 0039 of JP-A No. 2013-249417 can be mentioned, and these contents are incorporated in this specification.

硬化性組成物能夠使用鎢化合物和/或金屬硼化物作為顏料。 鎢化合物及金屬硼化物為相對於紅外線(波長約為800~1,200nm的光),吸收較高(亦即,相對於紅外線之遮光性(遮蔽性)較高),且相對於可見光吸收較低之紅外線遮蔽材。故,硬化性組成物藉由含有鎢化合物和/或金屬硼化物,能夠形成紅外區域中的遮光性較高、可見光區域中的透光性較高之圖案。 針對波長比用於形成圖像之高壓水銀燈、KrF、ArF等的曝光中使用之可見區域短的光,鎢化合物及金屬硼化物對前述光的吸收亦較小。故,藉由與前述聚合性化合物、光聚合起始劑及後述之鹼可溶性樹脂進行組合,可獲得優異之圖案,並且形成圖案時,能夠更加抑制顯影殘渣。The curable composition can use a tungsten compound and/or a metal boride as a pigment. Tungsten compounds and metal borides have higher absorption relative to infrared rays (light with a wavelength of about 800 to 1,200 nm) (that is, higher light-shielding properties (shielding properties) relative to infrared rays) and lower absorption relative to visible light The infrared shielding material. Therefore, when the curable composition contains a tungsten compound and/or a metal boride, a pattern with high light shielding properties in the infrared region and high light transmittance in the visible light region can be formed. Tungsten compounds and metal borides also absorb less light with wavelengths shorter than the visible region used in exposure of high-pressure mercury lamps, KrF, ArF, etc. for image formation. Therefore, by combining with the polymerizable compound, the photopolymerization initiator, and the alkali-soluble resin described later, an excellent pattern can be obtained, and when a pattern is formed, the development residue can be further suppressed.

作為鎢化合物,能夠舉出氧化鎢系化合物、硼化鎢系化合物、硫化鎢系化合物等,以下述通式(組成式)(I)表示之氧化鎢系化合物為較佳。 Mx Wy Oz ・・・(I) M表示金屬,W表示鎢,O表示氧。 0.001≤x/y≤1.1 2.2≤z/y≤3.0Examples of the tungsten compound include tungsten oxide-based compounds, tungsten boride-based compounds, and tungsten sulfide-based compounds, and tungsten oxide-based compounds represented by the following general formula (composition formula) (I) are preferred. M x W y O z ・・・(I) M stands for metal, W stands for tungsten, and O stands for oxygen. 0.001≤x/y≤1.1 2.2≤z/y≤3.0

作為M的金屬,例如可舉出鹼金屬、鹼土類金屬、Mg、Zr、Cr、Mn、Fe、Ru、Co、Rh、Ir、Ni、Pd、Pt、Cu、Ag、Au、Zn、Cd、Al、Ga、In、Tl、Sn、Pb、Ti、Nb、V、Mo、Ta、Re、Be、Hf、Os、Bi、Rb、Cs等,鹼金屬為較佳。M的金屬可以為1種亦可以為2種以上。Examples of the metal of M include alkali metals, alkaline earth metals, Mg, Zr, Cr, Mn, Fe, Ru, Co, Rh, Ir, Ni, Pd, Pt, Cu, Ag, Au, Zn, Cd, Al, Ga, In, Tl, Sn, Pb, Ti, Nb, V, Mo, Ta, Re, Be, Hf, Os, Bi, Rb, Cs, etc., preferably alkali metals. The metal of M may be one type or two or more types.

M為鹼金屬為較佳,Rb或Cs為更佳,Cs為進一步較佳。M is preferably an alkali metal, more preferably Rb or Cs, and even more preferably Cs.

藉由x/y為0.001以上,能夠充分遮蔽紅外線,藉由x/y為1.1以下,能夠更加確實地避免鎢化合物中生成雜質相。 藉由z/y為2.2以上,能夠更加提高作為材料的化學穩定性,藉由z/y為3.0以下,能夠充分遮蔽紅外線。When x/y is 0.001 or more, infrared rays can be sufficiently shielded, and when x/y is 1.1 or less, generation of an impurity phase in the tungsten compound can be more reliably avoided. When z/y is 2.2 or more, the chemical stability as a material can be further improved, and when z/y is 3.0 or less, infrared rays can be sufficiently shielded.

作為以通式(I)表示之氧化鎢系化合物的具體例,能夠舉出Cs0.33 WO3 、Rb0.33 WO3 、K0.33 WO3 、Ba0.33 WO3 等,Cs0.33 WO3 或Rb0.33 WO3 為較佳,Cs0.33 WO3 為更佳。Specific examples of the tungsten oxide-based compound represented by the general formula (I) include Cs 0.33 WO 3 , Rb 0.33 WO 3 , K 0.33 WO 3 , Ba 0.33 WO 3 , Cs 0.33 WO 3 or Rb 0.33 WO 3 , etc. More preferably, Cs 0.33 WO 3 is more preferable.

鎢化合物為微粒為較佳。鎢微粒的平均一次粒徑為800nm以下為較佳,400nm以下為更佳,200nm以下為進一步較佳。藉由平均一次粒徑在該種範圍,鎢微粒由於光散射而變得不易遮斷可見光,故能夠使可見光區域內的透光性更加確實。從避免光散射之觀點考慮,平均一次粒徑越小越佳,但從製造時的易操作性等理由考慮,鎢微粒的平均一次粒徑通常為1nm以上。Preferably, the tungsten compound is microparticles. The average primary particle size of the tungsten fine particles is preferably 800 nm or less, more preferably 400 nm or less, and even more preferably 200 nm or less. When the average primary particle size is in this range, the tungsten fine particles are less likely to block visible light due to light scattering, so that the light transmittance in the visible light region can be made more reliable. From the viewpoint of avoiding light scattering, the smaller the average primary particle size is, the better. However, the average primary particle size of the tungsten fine particles is usually 1 nm or more for reasons such as ease of handling during production.

鎢化合物能夠使用2種以上。Two or more types of tungsten compounds can be used.

鎢化合物能夠作為市售品來獲得。當鎢化合物例如為氧化鎢系化合物時,氧化鎢系化合物能夠藉由在惰性氣體環境或還原性氣體環境中對鎢化合物進行熱處理之方法獲得(參閱日本專利第4096205號公報)。 氧化鎢系化合物例如還能夠作為Sumitomo Metal Mining Co., Ltd.製造的YMF-02等鎢微粒的分散物來獲得。A tungsten compound is available as a commercial item. When the tungsten compound is, for example, a tungsten oxide-based compound, the tungsten oxide-based compound can be obtained by heat-treating the tungsten compound in an inert gas atmosphere or a reducing gas atmosphere (see Japanese Patent No. 4096205). The tungsten oxide-based compound can also be obtained as a dispersion of tungsten fine particles such as YMF-02 manufactured by Sumitomo Metal Mining Co., Ltd., for example.

作為金屬硼化物,能夠舉出硼化鑭(LaB6 )、硼化鐠(PrB6 )、硼化釹(NdB6 )、硼化鈰(CeB6 )、硼化釔(YB6 )、硼化鈦(TiB2 )、硼化鋯(ZrB2 )、硼化鉿(HfB2 )、硼化釩(VB2 )、硼化鉭(TaB2 )、硼化鉻(CrB、CrB2 )、硼化鉬(MoB2 、Mo2 B5 、MoB)、硼化鎢(W2 B5 )等的1種或2種以上,硼化鑭(LaB6 )為較佳。Examples of the metal boride include lanthanum boride (LaB 6 ), ammonium boride (PrB 6 ), neodymium boride (NdB 6 ), cerium boride (CeB 6 ), yttrium boride (YB 6 ), boride Titanium (TiB 2 ), zirconium boride (ZrB 2 ), hafnium boride (HfB 2 ), vanadium boride (VB 2 ), tantalum boride (TaB 2 ), chromium boride (CrB, CrB 2 ), boride One or more of molybdenum (MoB 2 , Mo 2 B 5 , MoB), tungsten boride (W 2 B 5 ), etc., and lanthanum boride (LaB 6 ) is preferred.

金屬硼化物為微粒為較佳。金屬硼化物微粒的平均一次粒徑為800nm以下為較佳,300nm以下為更佳,100nm以下為進一步較佳。藉由平均一次粒徑在該種範圍,金屬硼化物微粒由於光散射而變得不易遮斷可見光,故能夠使可見光區域中的透光性更加確實。從避免光散射之觀點考慮,平均一次粒徑越小越佳,但從製造時的易操作性等理由考慮,金屬硼化物微粒的平均一次粒徑通常為1nm以上。Preferably, the metal boride is fine particles. The average primary particle diameter of the metal boride fine particles is preferably 800 nm or less, more preferably 300 nm or less, and even more preferably 100 nm or less. When the average primary particle size is in this range, the metal boride fine particles are less likely to block visible light due to light scattering, so that the light transmittance in the visible light region can be made more reliable. From the viewpoint of avoiding light scattering, the smaller the average primary particle size is, the better. However, the average primary particle size of the metal boride fine particles is usually 1 nm or more for reasons such as ease of handling during production.

金屬硼化物可使用2種以上。Two or more types of metal borides can be used.

金屬硼化物能夠作為市售品來獲得,例如還能夠作為Sumitomo Metal Mining Co., Ltd.製造的KHF-7等金屬硼化物微粒的分散物來獲得。The metal boride can be obtained as a commercial item, and can also be obtained as a dispersion of metal boride fine particles such as KHF-7 manufactured by Sumitomo Metal Mining Co., Ltd., for example.

・・含氮化鈦粒子 作為無機顏料,還能夠使用包含Fe原子之含氮化鈦粒子。製造含氮化鈦粒子時,通常利用氣相反應法,具體而言,可舉出電爐法及熱電漿法等。該些製法中,從雜質的混入較少之角度、粒徑容易一致之角度及生產性較高之角度等理由考慮,熱電漿法為較佳。 作為熱電漿的產生方法,可舉出直流電弧放電、多相電弧放電、高頻(RF)電漿及混合式電漿等,來自電極的雜質的混入較少之高頻電漿為較佳。作為基於熱電漿法之含氮化鈦微粒的具體製造方法,例如可舉出藉由高頻熱電漿使鈦粉末蒸發,將氮作為載氣導入裝置內,藉由冷卻過程使鈦粉末氮化,從而合成含氮化鈦粒子之方法等。另外,熱電漿法並不限定於上述。・・Titanium nitride-containing particles As inorganic pigments, titanium nitride-containing particles containing Fe atoms can also be used. When producing titanium nitride-containing particles, a gas-phase reaction method is usually used, and specific examples thereof include an electric furnace method, a thermoplasma method, and the like. Among these production methods, the thermoplasma method is preferable from the viewpoints of less contamination of impurities, easy uniformity of particle sizes, and high productivity. As a method of generating the thermoplasma, direct current arc discharge, multiphase arc discharge, high frequency (RF) plasma, hybrid plasma, etc. are mentioned, and a high frequency plasma with less contamination of impurities from electrodes is preferred. As a specific method for producing the titanium nitride-containing fine particles by the thermoplasma method, for example, titanium powder is evaporated by high-frequency thermoplasma, nitrogen is introduced into the device as a carrier gas, and the titanium powder is nitrided by a cooling process. Thereby, a method for synthesizing titanium nitride-containing particles and the like. In addition, the thermoplasma method is not limited to the above.

作為含氮化鈦粒子的製造方法,並無特別限定,可參閱國際公開第2010/147098號的<0037>~<0089>段中記載之製造方法。例如,能夠如下製造,亦即,代替國際公開第2010/147098號的Ag粉末,使用後述之包含Fe之成分和/或包含Si之成分,並將混合該成分與鈦粉末材料(鈦粒子)者作為原料,從而製造本發明的組成物中所含之含氮化鈦粒子。The production method of the titanium nitride-containing particles is not particularly limited, and the production methods described in paragraphs <0037> to <0089> of International Publication No. WO 2010/147098 can be referred to. For example, it can be produced by using a component containing Fe and/or a component containing Si described later in place of the Ag powder of International Publication No. WO 2010/147098, and mixing the component with a titanium powder material (titanium particles) As a raw material, the titanium nitride-containing particles contained in the composition of the present invention are produced.

含氮化鈦粒子的製造中使用之鈦粉末材料(鈦粒子)係高純度者為較佳。鈦粉末材料並無特別限定,使用鈦元素的純度為99.99%以上者為較佳,使用99.999%以上者為更佳。It is preferable that the titanium powder material (titanium particles) used in the production of the titanium nitride-containing particles is of high purity. The titanium powder material is not particularly limited, and it is preferable to use a titanium element with a purity of 99.99% or more, and it is more preferable to use a titanium powder of 99.999% or more.

含氮化鈦粒子的製造中使用之鈦粉末材料(鈦粒子)有時含有鈦原子以外的原子。作為鈦粉末材料中可包含之其他原子,例如可舉出Fe原子及Si原子等。 當鈦粉末材料含有Fe原子時,Fe原子的含量相對於鈦粉末材料的總質量,超過0.001質量%為較佳。 當鈦粉末材料含有Si原子時,Si原子的含量相對於鈦粉末材料總質量,超過0.002質量%且小於0.3質量%為較佳,0.01~0.15質量%為更佳,0.02~0.1質量%為進一步較佳。藉由Si原子的含量超過0.002質量%,硬化膜的圖案形成性更加提高。藉由Si原子的含量小於0.3質量%,所得之含氮化鈦粒子的最表層的極性更加穩定化。藉此認為,使含氮化鈦粒子分散時的分散劑向含氮化鈦粒子的吸附性得到優化,含氮化鈦粒子的未分散物減少,能夠抑制產生顆粒。 含氮化鈦粒子的製造中使用之鈦粉末材料(鈦粒子)中的水分相對於鈦粉末材料的總質量,小於1質量%為較佳,小於0.1質量%為更佳,實質上不包含為進一步較佳。Titanium powder materials (titanium particles) used in the production of titanium nitride-containing particles may contain atoms other than titanium atoms. Examples of other atoms that can be included in the titanium powder material include Fe atoms, Si atoms, and the like. When the titanium powder material contains Fe atoms, it is preferable that the content of Fe atoms exceeds 0.001 mass % with respect to the total mass of the titanium powder material. When the titanium powder material contains Si atoms, the content of Si atoms relative to the total mass of the titanium powder material is preferably more than 0.002 mass % and less than 0.3 mass %, more preferably 0.01-0.15 mass %, and further 0.02-0.1 mass % better. When the content of Si atoms exceeds 0.002 mass %, the pattern formability of the cured film is further improved. When the content of Si atoms is less than 0.3 mass %, the polarity of the outermost layer of the obtained titanium nitride-containing particle is further stabilized. Therefore, it is considered that the adsorption of the dispersing agent to the titanium nitride-containing particles when the titanium nitride-containing particles are dispersed is optimized, the undispersed matter of the titanium nitride-containing particles is reduced, and the generation of particles can be suppressed. The moisture in the titanium powder material (titanium particles) used in the production of the titanium nitride-containing particles is preferably less than 1% by mass, more preferably less than 0.1% by mass relative to the total mass of the titanium powder material, and does not substantially contain as Further preferred.

藉由利用熱電漿法來獲得含氮化鈦粒子,可容易將CuKα射線作為X射線源時的源自(200)面之峰的衍射角2θ(詳細內容將進行後述)調整為超過42.6°且43.5°以下的範圍。By obtaining the titanium nitride-containing particles by the thermoplasma method, the diffraction angle 2θ (details will be described later) of the peak derived from the (200) plane when CuKα rays are used as the X-ray source can be easily adjusted to exceed 42.6° and range below 43.5°.

作為使含氮化鈦粒子含有Fe原子之方法,並無特別限定,例如可舉出在獲得用作上述含氮化鈦粒子的原料之鈦粒子(鈦粉末)之階段導入Fe原子之方法等。更詳細而言,藉由還原(Kroll )法等製造鈦時,作為反應容器,使用由不鏽鋼等含有Fe原子之材料構成者,或者作為破碎鈦時的沖壓機及粉碎機的材料而使用含有Fe原子者,藉此能夠使Fe原子附著於鈦粒子的表面。 當含氮化鈦粒子的製造中利用熱電漿法時,除了作為原料之鈦粒子以外,還添加Fe粒子、Fe氧化物等成分,並藉由熱電漿法使該些氮化,藉此能夠使含氮化鈦粒子含有Fe原子。 含氮化鈦粒子中所含之Fe原子可以以離子、金屬化合物(亦包含錯合物)、金屬間化合物、合金、氧化物、複合氧化物、氮化物、氧氮化物、硫化物及硫氧化物等任意形態包含。含氮化鈦粒子中所含之Fe原子可作為晶格間位置的雜質而存在,亦可在晶界以非晶狀態作為雜質而存在。The method for including Fe atoms in the titanium nitride-containing particles is not particularly limited, and examples thereof include a method of introducing Fe atoms at the stage of obtaining titanium particles (titanium powder) used as a raw material of the above-mentioned titanium nitride-containing particles. In more detail, when producing titanium by a reduction (Kroll) method or the like, as a reaction vessel, a material containing Fe atoms such as stainless steel is used, or a material containing Fe atoms is used as a material for a punch and a pulverizer when crushing titanium. In this way, Fe atoms can be attached to the surface of the titanium particles. In the production of the titanium nitride-containing particles by the thermoplasma method, components such as Fe particles and Fe oxides are added in addition to the titanium particles as the raw material, and these are nitrided by the thermoplasma method. The titanium nitride-containing particles contain Fe atoms. The Fe atoms contained in the titanium nitride-containing particles can be oxidized as ions, metal compounds (including complexes), intermetallic compounds, alloys, oxides, composite oxides, nitrides, oxynitrides, sulfides and sulfur. Any form, such as things, is included. Fe atoms contained in the titanium nitride-containing particles may exist as impurities in the inter-lattice position, or may exist as impurities in an amorphous state at grain boundaries.

本發明人進行深入研究的結果,發現含氮化鈦粒子中的Fe原子的含量與圖案形成性及電極的防腐性相關。含氮化鈦粒子中所含之Fe原子相對於電極及基板之黏附性優異,認為含氮化鈦粒子中的氮化鈦經由Fe原子而附著於電極及基板。認為在顯影處理等硬化膜的圖案形成之後,Fe原子殘留在電極及基板上,容易去除氮化鈦。故,推測為藉由將含氮化鈦粒子中的Fe原子的含量設為規定量以上,硬化膜的圖案形成性得到提高。另一方面,若含氮化鈦粒子中所含之Fe原子的含量過多,則殘留在電極及基板上之Fe原子的量增加,認為會成為電極腐蝕的原因。故,推測為藉由將含氮化鈦粒子中的Fe原子的含量設為規定量以下,電極的防腐性得到提高。 含氮化鈦粒子中的Fe原子的含量相對於含氮化鈦粒子總質量,超過0.001質量%且小於0.4質量%為較佳。其中,0.01~0.2質量%為更佳,0.02~0.1質量%為進一步較佳。藉由Fe原子的含量超過0.001質量%,硬化膜的圖案形成性更加提高。藉由Fe原子的含量小於0.4質量%,基於硬化膜之電極的防腐性更加提高(能夠抑制硬化膜腐蝕電極)。亦即,藉由含氮化鈦粒子中的Fe原子的含量在上述範圍內,能夠獲得優異之硬化膜的圖案形成性及電極的防腐性。 含氮化鈦粒子中的Fe原子的含量能夠藉由ICP(Inductively Coupled Plasma;高頻電感耦合電漿)發光分光分析法進行測定。As a result of intensive research, the present inventors have found that the content of Fe atoms in the titanium nitride-containing particles is related to pattern formability and corrosion resistance of electrodes. Fe atoms contained in the titanium nitride-containing particles are excellent in adhesion to electrodes and substrates, and it is considered that titanium nitride in the titanium nitride-containing particles adheres to electrodes and substrates via Fe atoms. It is considered that Fe atoms remain on the electrode and the substrate after pattern formation of the cured film such as development treatment, and titanium nitride is easily removed. Therefore, it is presumed that the pattern formability of the cured film is improved by setting the content of Fe atoms in the titanium nitride-containing particles to a predetermined amount or more. On the other hand, when the content of Fe atoms contained in the titanium nitride-containing particles is too large, the amount of Fe atoms remaining on the electrode and the substrate increases, which is considered to be a cause of electrode corrosion. Therefore, it is presumed that the corrosion resistance of the electrode is improved by setting the content of Fe atoms in the titanium nitride-containing particles to a predetermined amount or less. The content of Fe atoms in the titanium nitride-containing particles is preferably more than 0.001 mass % and less than 0.4 mass % with respect to the total mass of the titanium nitride-containing particles. Among them, 0.01 to 0.2 mass % is more preferable, and 0.02 to 0.1 mass % is further preferable. When the content of Fe atoms exceeds 0.001 mass %, the pattern formability of the cured film is further improved. Since the content of Fe atoms is less than 0.4 mass %, the corrosion resistance of the electrode based on the cured film is further improved (the corrosion of the electrode by the cured film can be suppressed). That is, when the content of Fe atoms in the titanium nitride-containing particles is within the above-mentioned range, excellent patterning properties of the cured film and corrosion resistance of the electrodes can be obtained. The content of Fe atoms in the titanium nitride-containing particles can be measured by ICP (Inductively Coupled Plasma; high-frequency inductively coupled plasma) emission spectrometry.

含氮化鈦粒子還含有Si原子(矽原子)為較佳。藉此,硬化膜的圖案形成性更加提高。作為藉由含有Si原子而圖案形成性得到提高之理由,認為與上述之Fe原子相同。 含氮化鈦粒子中的Si原子的含量相對於含氮化鈦粒子總質量,超過0.002質量%且小於0.3質量%為較佳,0.01~0.15質量%為更佳,0.02~0.1質量%為進一步較佳。藉由Si原子的含量超過0.002質量%,硬化膜的圖案形成性更加提高。藉由Si原子的含量小於0.3質量%,含氮化鈦粒子的最表層的極性更加穩定化。藉此,認為使含氮化鈦粒子分散時的分散劑向含氮化鈦粒子的吸附性得到優化,含氮化鈦粒子的未分散物減少,能夠抑制產生顆粒。 含氮化鈦粒子中的Si原子的含量能夠藉由與上述Fe原子相同的方法進行測定。It is preferable that the titanium nitride-containing particles further contain Si atoms (silicon atoms). Thereby, the pattern formability of a cured film is further improved. The reason why the pattern formability is improved by containing Si atoms is considered to be the same as that of Fe atoms described above. The content of Si atoms in the titanium nitride-containing particles relative to the total mass of the titanium nitride-containing particles is preferably more than 0.002 mass % and less than 0.3 mass %, more preferably 0.01 to 0.15 mass %, and further 0.02 to 0.1 mass % better. When the content of Si atoms exceeds 0.002 mass %, the pattern formability of the cured film is further improved. When the content of Si atoms is less than 0.3 mass %, the polarity of the outermost layer of the titanium nitride-containing particles is further stabilized. Thereby, it is considered that when the titanium nitride-containing particles are dispersed, the adsorption properties of the dispersing agent to the titanium nitride-containing particles are optimized, the undispersed matter of the titanium nitride-containing particles is reduced, and the generation of particles can be suppressed. The content of Si atoms in the titanium nitride-containing particles can be measured by the same method as that of Fe atoms described above.

作為使含氮化鈦粒子含有Si原子之方法,並無特別限定,例如可舉出在獲得上述用作含氮化鈦粒子的原料之鈦粒子(鈦粉末)之階段導入Si原子之方法等。更詳細而言,藉由還原法等製造鈦時,作為反應容器,使用由含有Si原子之材料構成者,或者作為破碎鈦時的沖壓機及粉碎機的材料而使用含有Si原子者,藉此能夠使Si原子附著於鈦粒子的表面。 當含氮化鈦粒子的製造中利用熱電漿法時,除了作為原料之鈦粒子以外,還添加Si粒子、Si氧化物等成分,並藉由熱電漿法使該些氮化,藉此能夠使含氮化鈦粒子含有Si原子。 含氮化鈦粒子中所含之Si原子可以以離子、金屬化合物(亦包含錯合物)、金屬間化合物、合金、氧化物、複合氧化物、氮化物、氧氮化物、硫化物及硫氧化物等任意形態包含。並且,含氮化鈦粒子中所含之Si原子可以作為晶格間位置的雜質而存在,亦可在晶界以非晶狀態作為雜質而存在。The method of making the titanium nitride-containing particles contain Si atoms is not particularly limited, and examples thereof include a method of introducing Si atoms at the stage of obtaining the titanium particles (titanium powder) used as the raw material of the titanium nitride-containing particles. In more detail, when producing titanium by a reduction method or the like, a material containing Si atoms is used as a reaction vessel, or a material containing Si atoms is used as a material for a punch and a pulverizer when crushing titanium, thereby Si atoms can be attached to the surface of titanium particles. When the thermoplasma method is used for the production of the titanium nitride-containing particles, components such as Si particles and Si oxides are added in addition to the titanium particles as the raw material, and these are nitrided by the thermoplasma method. The titanium nitride-containing particles contain Si atoms. The Si atoms contained in the titanium nitride-containing particles can be oxidized as ions, metal compounds (including complexes), intermetallic compounds, alloys, oxides, composite oxides, nitrides, oxynitrides, sulfides and sulfur oxides. Any form, such as things, is included. In addition, the Si atoms contained in the titanium nitride-containing particles may exist as impurities at inter-lattice positions, or may exist as impurities in an amorphous state at grain boundaries.

含氮化鈦粒子中的鈦原子(Ti原子)的含量相對於含氮化鈦粒子的總質量,為10~85質量%為較佳,15~75質量%為更佳,20~70質量%為進一步較佳。含氮化鈦粒子中的Ti原子的含量能夠藉由ICP發光分光分析法進行測定。 含氮化鈦粒子中的氮原子(N原子)的含量相對於含氮化鈦粒子的總質量,為3~60質量%為較佳,5~50質量%為更佳,10~40質量%為進一步較佳。氮原子的含量能夠藉由惰性氣體熔融熱導法進行分析。 含氮化鈦粒子作為主成分而包含氮化鈦(TiN),通常在其合成時混入氧之情況及粒徑較小之情況等時變得顯著,但亦可藉由粒子表面的氧化等而含有一部分氧原子。 含氮化鈦粒子中的氧原子的含量相對於含氮化鈦粒子的總質量,為1~40質量%為較佳,1~35質量%為更佳,5~30質量%為進一步較佳。氧原子的含量能夠藉由惰性氣體熔融紅外線吸收法進行分析。The content of titanium atoms (Ti atoms) in the titanium nitride-containing particles relative to the total mass of the titanium nitride-containing particles is preferably 10 to 85 mass %, more preferably 15 to 75 mass %, and 20 to 70 mass % for further better. The content of Ti atoms in the titanium nitride-containing particles can be measured by ICP emission spectrometry. The content of nitrogen atoms (N atoms) in the titanium nitride-containing particles relative to the total mass of the titanium nitride-containing particles is preferably 3 to 60 mass %, more preferably 5 to 50 mass %, and 10 to 40 mass % for further better. The content of nitrogen atoms can be analyzed by an inert gas fusion thermal conductivity method. The titanium nitride-containing particles contain titanium nitride (TiN) as the main component, which usually becomes conspicuous when oxygen is mixed during its synthesis, when the particle size is small, etc., but it can also be caused by oxidation of the particle surface. contains some oxygen atoms. The content of oxygen atoms in the titanium nitride-containing particles relative to the total mass of the titanium nitride-containing particles is preferably 1 to 40% by mass, more preferably 1 to 35% by mass, and even more preferably 5 to 30% by mass . The content of oxygen atoms can be analyzed by an inert gas fusion infrared absorption method.

從分散穩定性及遮光性的觀點考慮,含氮化鈦粒子的比表面積為5m2 /g以上且100m2 /g以下為較佳,10m2 /g以上且60m2 /g以下為更佳。比表面積能夠藉由BET(Brunauer,Emmett,Teller)法求出。From the viewpoints of dispersion stability and light-shielding properties, the specific surface area of the titanium nitride-containing particles is preferably 5 m 2 /g or more and 100 m 2 /g or less, and more preferably 10 m 2 /g or more and 60 m 2 /g or less. The specific surface area can be determined by the BET (Brunauer, Emmett, Teller) method.

含氮化鈦粒子可以為包含氮化鈦粒子與金屬微粒之複合微粒。 複合微粒係指,氮化鈦粒子與金屬微粒複合化或處於高度分散之狀態之粒子。其中,“複合化”表示,粒子由氮化鈦與金屬這兩種成分構成,“高度分散之狀態”表示,氮化鈦粒子與金屬粒子分別個別地存在,且少量成分的粒子未凝聚而均勻並以相同方式分散。 作為金屬微粒,並無特別限定,例如可舉出選自銅、銀、金、鉑、釩、鎳、錫、鈷、銠、銥、釕、鋨、錳、鉬、鎢、鈮、鉭、鈣、鈦、鉍、銻及鉛、以及它們的合金之至少1種。其中,選自銅、銀、金、鉑、鈀、鎳、錫、鈷、銠及銥、以及它們的合金之至少1種為較佳,選自銅、銀、金、鉑及錫、以及它們的合金之至少1種為更佳。從耐濕性更優異之觀點考慮,銀為較佳。 作為含氮化鈦粒子中的金屬微粒的含量,相對於含氮化鈦粒子的總質量,為5質量%以上且50質量%以下為較佳,10質量%以上且30質量%以下為更佳。The titanium nitride-containing particles may be composite particles comprising titanium nitride particles and metal particles. The composite particles refer to particles in which titanium nitride particles and metal particles are composited or in a highly dispersed state. Among them, "complexed" means that the particles are composed of two components, titanium nitride and metal, and "highly dispersed state" means that titanium nitride particles and metal particles exist individually, and the particles of a small amount of components are not aggregated and are uniform and disperse in the same way. The metal fine particles are not particularly limited, and examples thereof include copper, silver, gold, platinum, vanadium, nickel, tin, cobalt, rhodium, iridium, ruthenium, osmium, manganese, molybdenum, tungsten, niobium, tantalum, and calcium. , at least one of titanium, bismuth, antimony and lead, and their alloys. Among them, at least one selected from copper, silver, gold, platinum, palladium, nickel, tin, cobalt, rhodium and iridium, and their alloys is preferred, and is selected from copper, silver, gold, platinum and tin, and their At least one of the alloys is more preferred. From the viewpoint of being more excellent in moisture resistance, silver is preferable. The content of the metal fine particles in the titanium nitride-containing particles is preferably 5% by mass or more and 50% by mass or less, and more preferably 10% by mass or more and 30% by mass or less, relative to the total mass of the titanium nitride-containing particles. .

將CuKα射線作為X射線源時,含氮化鈦粒子的源自(200)面之峰的衍射角2θ超過42.6°且43.5°以下為較佳。使用含有具有該種特徵之含氮化鈦粒子之硬化性組成物來獲得之硬化膜(例如,黑矩陣等)能夠實現較高之OD(光密度(optical density))值。When CuKα rays are used as the X-ray source, the diffraction angle 2θ of the peak derived from the (200) plane of the titanium nitride-containing particles is preferably more than 42.6° and 43.5° or less. A cured film (eg, black matrix, etc.) obtained using a curable composition containing titanium nitride-containing particles having such characteristics can achieve a higher OD (optical density) value.

將CuKα射線作為X射線源來測定鈦化合物的X射線衍射光譜時,作為強度最強之峰,關於TiN,源自(200)面之峰出現在2θ=42.5°附近,關於TiO,源自(200)面之峰出現在2θ=43.4°附近。另一方面,雖然不是強度最強之峰,但關於銳鈦型TiO2 ,在2θ=48.1°附近觀測到源自(200)面之峰,關於金紅石型TiO2 ,在2θ=39.2°附近觀測到源自(200)面之峰。藉此,越是含有大量氧原子之晶體狀態,峰位置相對於42.5°越向高角度側位移。When the X-ray diffraction spectrum of the titanium compound is measured using CuKα rays as the X-ray source, the peak with the strongest intensity is the peak originating from the (200) plane for TiN, which appears in the vicinity of 2θ=42.5°, and the peak originating from (200) for TiO. ) surface peak appears around 2θ=43.4°. On the other hand, although it is not the peak with the strongest intensity, a peak originating from the (200) plane is observed in the vicinity of 2θ=48.1° for anatase-type TiO 2 , and a peak originating from the (200) plane is observed in the vicinity of 2θ=39.2° for rutile-type TiO 2 . to the peak originating from the (200) plane. Thereby, the more the crystal state containing many oxygen atoms, the more the peak position is shifted to the higher angle side with respect to 42.5°.

從粒子的經時穩定性的觀點考慮,含氮化鈦粒子的源自(200)面之峰的衍射角2θ超過42.6°且小於43.5°為較佳,而且,從製造時的處理(process)餘量優異之觀點考慮,42.7°以上且小於43.5°為更佳,而且,從粒子性能的再現性優異之觀點考慮,42.7°以上且小於43.4°為進一步較佳。當作為副成分而含有氧化鈦TiO2 時,作為強度最強之峰,源自銳鈦礦型TiO2 (101)之峰出現在2θ=25.3°附近,源自金紅石型TiO2 (110)之峰出現在2θ=27.4°附近。但是,TiO2 為白色,會成為降低黑矩陣的遮光性之主要原因,因此降低至不會作為峰而被觀察之程度為較佳。From the viewpoint of the stability over time of the particles, the diffraction angle 2θ of the peak derived from the (200) plane of the titanium nitride-containing particles is preferably more than 42.6° and less than 43.5°. From the viewpoint of excellent margin, 42.7° or more and less than 43.5° are more preferable, and from the viewpoint of excellent reproducibility of particle performance, 42.7° or more and less than 43.4° are more preferable. When titanium oxide TiO 2 is contained as a sub-component, as the peak with the strongest intensity, a peak derived from anatase-type TiO 2 (101) appears in the vicinity of 2θ=25.3°, and a peak derived from rutile-type TiO 2 (110) appears in the vicinity of 2θ=25.3°. The peak appears around 2θ=27.4°. However, TiO 2 is white, and it is a factor that reduces the light-shielding properties of the black matrix, so it is preferable to reduce it to such an extent that it is not observed as a peak.

能夠藉由X射線衍射峰的半寬度求出構成含氮化鈦粒子之微晶尺寸,利用謝勒(Scherrer)公式進行計算。The crystallite size constituting the titanium nitride-containing particle can be obtained from the half width of the X-ray diffraction peak, and it can be calculated using the Scherrer formula.

作為微晶尺寸,為20nm以上為較佳,20~50nm為更佳。藉由利用微晶尺寸為20nm以上的含氮化鈦粒子形成黑矩陣,硬化膜的透射光呈如其峰波長為475nm以下的藍色至藍紫色,能夠獲得兼具較高之遮光性與紫外線靈敏度之黑矩陣。藉由微晶尺寸為20nm以上,具有活性之粒子表面佔粒子體積之比例變小,成為良好的平衡,成為含氮化鈦粒子的耐熱性和/或耐久性更優異者。The crystallite size is preferably 20 nm or more, and more preferably 20 to 50 nm. By using titanium nitride-containing particles with a crystallite size of 20 nm or more to form a black matrix, the transmitted light of the cured film is blue to blue-violet with a peak wavelength of 475 nm or less, and high light-shielding properties and ultraviolet sensitivity can be obtained. The black matrix. When the crystallite size is 20 nm or more, the ratio of the active particle surface to the particle volume is reduced, and a good balance is achieved, and the titanium nitride-containing particles are more excellent in heat resistance and/or durability.

・・含有原子A之含金屬氮化物粒子原子 並且,作為無機顏料,還能夠使用含金屬氮化物粒子,且在上述含金屬氮化物粒子中含有規定的原子A。 作為含金屬氮化物粒子中的金屬,例如可舉出Nb、V、Cr、Y、Zr、Nb、Hf、Ta、W及Re等,Nb或V為更佳。 作為上述原子A,例如可舉出B、Al、Si、Mn、Fe、Ni及Ag等。 當含金屬氮化物粒子含有上述原子A時,作為其含量,並無特別限制,含金屬氮化物粒子中的原子A的含量為0.00005~10質量%為較佳。・・Atoms of metal-containing nitride particles containing atom A In addition, metal-containing nitride particles can also be used as inorganic pigments, and a predetermined atom A is contained in the above-mentioned metal-containing nitride particles. Examples of metals in the metal-containing nitride particles include Nb, V, Cr, Y, Zr, Nb, Hf, Ta, W, and Re, and Nb or V is more preferred. As said atom A, B, Al, Si, Mn, Fe, Ni, Ag, etc. are mentioned, for example. When the metal-containing nitride particles contain the atom A, the content thereof is not particularly limited, but the content of the atom A in the metal-containing nitride particles is preferably 0.00005 to 10% by mass.

作為含有上述原子A之含金屬氮化物粒子的製造方法,並無特別限制,能夠利用公知的方法。 製造含金屬氮化物粒子時,通常利用氣相反應法,具體而言,可舉出電爐法及熱電漿法等。該些製法中,從雜質的混入較少之角度、粒徑容易一致之角度及生產性較高之角度等理由考慮,熱電漿法為較佳。 作為基於熱電漿法之含金屬氮化物粒子的具體製造方法,例如可舉出利用金屬微粒製造裝置(與後述之“黑色複合微粒製造裝置”相同的裝置)者。金屬微粒製造裝置例如由產生熱電漿之電漿炬、向電漿炬內供給金屬原料粉末之材料供給裝置、含有冷卻功能之腔室、對所生成之金屬微粒進行分級之旋風分離器及回收金屬微粒之回收部構成。 本說明書中,金屬微粒表示含有金屬元素之粒子的一次粒徑為20nm~40μm的粒子。There is no restriction|limiting in particular as a manufacturing method of the metal-containing nitride particle containing the said atom A, A well-known method can be utilized. When metal-containing nitride particles are produced, a gas phase reaction method is usually used, and specific examples thereof include an electric furnace method, a thermoplasma method, and the like. Among these production methods, the thermoplasma method is preferable from the viewpoints of less contamination of impurities, easy uniformity of particle sizes, and high productivity. As a specific manufacturing method of the metal-containing nitride particle|grains by a thermoplasma method, the thing which uses a metal microparticle manufacturing apparatus (the same apparatus as the "black composite particle|grain manufacturing apparatus" mentioned later) is mentioned, for example. The metal particle production device includes, for example, a plasma torch that generates thermal plasma, a material supply device that supplies metal raw material powder into the plasma torch, a chamber including a cooling function, a cyclone that classifies the generated metal particles, and metal recovery. The recovery part of the particles is constituted. In the present specification, the metal fine particles refer to particles containing a metal element having a primary particle diameter of 20 nm to 40 μm.

作為利用金屬微粒製造裝置之含金屬氮化物粒子的製造方法,並無特別限定,能夠利用公知的方法。其中,從下述的規定平均一次粒徑的含金屬氮化物粒子的產率提高之角度考慮,利用金屬微粒製造裝置製造含金屬氮化物粒子之方法含有以下所示之製程為較佳。 製程A:向電漿炬內供給不含有氮氣之惰性氣體作為電漿氣體來產生熱電漿火焰之製程。 製程B:向電漿炬內的熱電漿火焰供給含有過渡金屬之金屬原料粉末來使上述金屬原料粉末蒸發,從而獲得氣相原料金屬之製程。 製程C:冷卻上述氣相原料金屬來獲得含有過渡金屬之金屬微粒之製程。 製程D:向電漿炬內供給含有氮氣之惰性氣體作為電漿氣體來產生熱電漿火焰之製程。 製程E:向電漿炬內的熱電漿火焰供給含有過渡金屬之金屬微粒來使上述金屬微粒蒸發,從而獲得氣相原料金屬之製程。 製程F:冷卻上述氣相原料金屬來獲得含金屬氮化物粒子之製程。 含金屬氮化物粒子的製造方法在製程C和/或製程F之後,還可依據需要而含有下述製程G。 製程G:對所得之粒子進行分級之製程。 而且,可以在製程A之前、製程A與製程B之間、製程C與製程D之間或製程D與製程E之間含有以下製程A2。 製程A2:向含有過渡金屬之金屬原料粉末中混合原子A之製程。 而且,可以在製程A2之前含有以下製程A3-1~A3-3。 製程A3-1:向電漿炬內供給不含有氮氣之惰性氣體作為電漿氣體來產生熱電漿火焰之製程。 製程A3-2:向電漿炬內的熱電漿火焰供給含有原子A之原料粉末來使上述原料粉末蒸發,從而獲得氣相原子A之製程。 製程A3-3:冷卻上述氣相原子A來獲得微粒化之原子A之製程。 可以在製程A3-3之後還含有製程G。 本說明書中,微粒化之原子A表示含有原子A之一次粒徑係20nm~40μm的粒子。It does not specifically limit as a manufacturing method of the metal-containing nitride particle|grains using a metal microparticle manufacturing apparatus, A well-known method can be utilized. Among them, from the viewpoint of improving the yield of metal-containing nitride particles having a predetermined average primary particle diameter described below, the method for producing metal-containing nitride particles using a metal fine particle production apparatus preferably includes the following process. Process A: A process in which an inert gas without nitrogen is supplied into the plasma torch as a plasma gas to generate a thermoplasma flame. Process B: The process of supplying the metal raw material powder containing transition metal to the thermal plasma flame in the plasma torch to evaporate the above-mentioned metal raw material powder, thereby obtaining the gas phase raw material metal. Process C: The process of cooling the above-mentioned gas phase raw material metal to obtain metal particles containing transition metal. Process D: a process in which an inert gas containing nitrogen is supplied into a plasma torch as a plasma gas to generate a thermoplasma flame. Process E: A process of supplying metal particles containing transition metals to a thermal plasma flame in a plasma torch to evaporate the metal particles, thereby obtaining a gas phase raw metal. Process F: a process for obtaining metal-containing nitride particles by cooling the above-mentioned gas-phase raw material metal. After the process C and/or the process F, the manufacturing method of the metal-containing nitride particles may further include the following process G as required. Process G: The process of classifying the obtained particles. Furthermore, the following process A2 may be included before process A, between process A and process B, between process C and process D, or between process D and process E. Process A2: A process of mixing atom A with transition metal-containing metal raw material powder. Also, the following processes A3-1 to A3-3 may be included before the process A2. Process A3-1: A process of supplying an inert gas that does not contain nitrogen as a plasma gas to a plasma torch to generate a thermoplasma flame. Process A3-2: A process of supplying the raw material powder containing atoms A to the thermal plasma flame in the plasma torch to evaporate the raw material powder, thereby obtaining the gas-phase atoms A. Process A3-3: A process of cooling the gas phase atoms A to obtain atomized atoms A. Process G may also be included after process A3-3. In the present specification, the atomized atom A refers to a particle containing the atom A and having a primary particle diameter of 20 nm to 40 μm.

而且,上述含金屬氮化物粒子的製造方法在製程F之後(含有製程G時,在製程F之後的製程G之後)還含有下述的製程H為較佳。 製程H:將在製程F(或製程G)中獲得之含金屬氮化物粒子暴露於水蒸氣及氮氣的混合環境來進行氮化處理之製程。 依據需要,上述含金屬氮化物粒子的製造方法亦可以在製程H之後還含有製程G。以下,對各製程的較佳態様進行詳細說明。Moreover, it is preferable that the above-mentioned method for producing metal-containing nitride particles further includes the following process H after the process F (if the process G is included, after the process G after the process F). Process H: a process in which the metal-containing nitride particles obtained in Process F (or Process G) are exposed to a mixed environment of water vapor and nitrogen to perform nitridation treatment. According to needs, the above-mentioned method for manufacturing metal nitride particles may further include a process G after the process H. As shown in FIG. Hereinafter, the preferred state of each process will be described in detail.

製程A 製程A係向電漿炬內供給不含有氮氣之惰性氣體作為電漿氣體來產生熱電漿火焰之製程。作為熱電漿火焰的產生方法,並無特別限定,可舉出直流電弧放電法、多相電弧放電法、高頻電漿法及混合電漿法等,來自電極的雜質的混入較少之高頻電漿法為較佳。 作為基於高頻電漿法之熱電漿火焰的產生方法,並無特別限制,例如可舉出向含有高頻振蕩用線圈與石英管之電漿炬內供給電漿氣體,對上述高頻振蕩用線圈施加高頻電流,藉此獲得熱電漿火焰之方法。 作為製程A中的電漿氣體,可舉出不含有氮氣之惰性氣體。作為不含有氮氣之惰性氣體,可舉出氬氣及氫氣等。不含有氮氣之惰性氣體可單獨使用1種,亦可同時使用2種以上。Process A Process A is a process in which an inert gas without nitrogen is supplied into the plasma torch as a plasma gas to generate a thermoplasma flame. The method for generating the thermoplasma flame is not particularly limited, and examples include a DC arc discharge method, a multiphase arc discharge method, a high-frequency plasma method, and a mixed plasma method. The plasma method is preferred. The method for generating the thermoplasma flame by the high-frequency plasma method is not particularly limited. For example, supplying plasma gas into a plasma torch including a high-frequency oscillation coil and a quartz A method of obtaining a thermoplasmic flame by applying a high-frequency current to the coil. As the plasma gas in the process A, an inert gas that does not contain nitrogen gas can be used. Argon gas, hydrogen gas, etc. are mentioned as an inert gas which does not contain nitrogen. The inert gas that does not contain nitrogen gas may be used alone or in combination of two or more.

製程A2 製程A2係向含有過渡金屬之金屬原料粉末中混合原子A之製程。作為原料金屬粉末及原子A的混合方法,並無特別限制,能夠利用公知的方法。例如,向電漿炬內供給金屬原料粉末之上述材料供給裝置可含有混合及分散功能。具體而言,能夠利用國際公開第2010/147098號公報的0047~0058段中記載之材料供給裝置,該內容編入本說明書中。含金屬氮化物粒子的製造方法亦可在製程A2之前還含有以下的製程A3-1~A3-3。Process A2 Process A2 is a process in which atoms A are mixed into transition metal-containing metal raw material powders. The mixing method of the raw material metal powder and atom A is not particularly limited, and a known method can be used. For example, the above-described material supply device for supplying the metal raw material powder into the plasma torch may include mixing and dispersing functions. Specifically, the material supply device described in paragraphs 0047 to 0058 of International Publication No. WO 2010/147098 can be used, and the contents are incorporated in this specification. The manufacturing method of metal-containing nitride particles may further include the following processes A3-1 to A3-3 before the process A2.

製程B 製程B係向電漿炬內的熱電漿火焰供給含有過渡金屬之金屬原料粉末來使上述金屬原料粉末蒸發,從而獲得氣相的原料金屬之製程。作為向電漿炬內的熱電漿火焰供給金屬原料粉末之方法,並無特別限制,從所得之氣相的原料金屬成為更均勻之狀態之角度考慮,利用載氣噴霧為較佳。作為載氣,利用不含有氮氣之惰性氣體為較佳。不含有氮氣之惰性氣體的態様如上所述。 當製造含金屬氮化物粒子之方法含有上述製程A2時,在將金屬原料粉末供給至電漿炬內之前,金屬原料粉末維持均勻的分散狀態為較佳。Process B Process B is a process of supplying transition metal-containing metal raw material powder to a thermoplasma flame in a plasma torch to evaporate the metal raw material powder, thereby obtaining a gas-phase raw metal. The method of supplying the metal raw material powder to the thermoplasma flame in the plasma torch is not particularly limited, but it is preferable to use a carrier gas spray from the viewpoint that the obtained raw material metal in the gas phase is in a more uniform state. As the carrier gas, it is preferable to use an inert gas that does not contain nitrogen. The state of the inert gas not containing nitrogen is as described above. When the method for producing metal-containing nitride particles includes the above-mentioned process A2, it is preferable that the metal raw material powder is maintained in a uniformly dispersed state before the metal raw material powder is supplied into the plasma torch.

製程C 製程C係冷卻氣相的原料金屬來獲得含有過渡金屬之金屬微粒之製程。作為冷卻方法,並無特別限制,利用含有冷卻功能之腔室為較佳。將在製程B中獲得之氣相的原料金屬導入含有上述冷卻功能之腔室,在腔室內快速冷卻,藉此能夠生成下述的所希望的粒徑的金屬微粒。所生成之金屬微粒例如藉由回收部被回收。作為腔室內的環境,不含有氮氣之惰性氣體為較佳。不含有氮氣之惰性氣體的態様如上所述。 另外,藉由經過上述製程A~C,可獲得含有過渡金屬之金屬微粒。含有過渡金屬之金屬微粒在製程E中容易蒸發。在金屬原料粉末含有雜質時,亦能夠藉由經過上述製程A~C來去除上述雜質。Process C Process C is a process of cooling the raw metal in the gas phase to obtain metal particles containing transition metals. It does not specifically limit as a cooling method, It is preferable to use the chamber which has a cooling function. By introducing the raw material metal in the gas phase obtained in the process B into a chamber having the above-mentioned cooling function, and rapidly cooling in the chamber, metal fine particles of the desired particle size described below can be generated. The generated metal particles are recovered by, for example, a recovery unit. As the environment in the chamber, an inert gas that does not contain nitrogen is preferred. The state of the inert gas not containing nitrogen is as described above. In addition, by going through the above-mentioned processes A to C, metal particles containing a transition metal can be obtained. Metal particles containing transition metals are easily evaporated in process E. When the metal raw material powder contains impurities, the above-mentioned impurities can also be removed by going through the above-mentioned processes A to C.

製程D 製程D係向電漿炬內供給含有氮氣之惰性氣體作為電漿氣體來產生熱電漿火焰之製程。作為含有氮之惰性氣體,可舉出氮氣及含有惰性氣體之氮氣。作為惰性氣體,可舉出氬氣及氫氣等。含有惰性氣體之氮氣並無特別限制,氮氣的含量通常為10~90莫耳%左右,30~60莫耳%左右為較佳。其他態様與製程A相同。Process D Process D is a process in which an inert gas containing nitrogen is supplied into a plasma torch as a plasma gas to generate a thermoplasma flame. As an inert gas containing nitrogen, nitrogen gas and nitrogen containing an inert gas are mentioned. Argon gas, hydrogen gas, etc. are mentioned as an inert gas. The nitrogen containing the inert gas is not particularly limited, and the nitrogen content is usually about 10-90 mol%, preferably about 30-60 mol%. Other states are the same as process A.

製程E 製程E係向電漿炬內的熱電漿火焰供給含有過渡金屬之金屬微粒來使上述金屬微粒蒸發,從而獲得氣相的原料金屬之製程。作為向電漿炬內的熱電漿火焰供給金屬微粒之方法,如上所述,作為載氣,含有氮之惰性氣體為較佳。含有氮之惰性氣體的態様如上所述。 製程E中,向熱電漿火焰供給藉由製程A~製程C而成為金屬微粒之原料金屬,故容易獲得氣相的原料金屬,氣相的原料金屬的狀態亦變得更均勻。Process E Process E is a process in which metal particles containing transition metals are supplied to a thermal plasma flame in a plasma torch to vaporize the metal particles, thereby obtaining raw metal in gas phase. As a method of supplying the metal particles to the thermoplasma flame in the plasma torch, as described above, as the carrier gas, an inert gas containing nitrogen is preferable. The state of the inert gas containing nitrogen is as described above. In the process E, the raw metal that becomes the metal particles in the process A to the process C is supplied to the thermoplasma flame, so that the raw metal in the gas phase is easily obtained, and the state of the raw metal in the gas phase becomes more uniform.

製程F 製程F係冷卻氣相的原料金屬來獲得含有過渡金屬的氮化物之含金屬氮化物粒子之製程。冷卻方法的較佳態樣如上所述,但作為腔室內的環境,含有氮氣之惰性氣體為較佳。含有氮氣之惰性氣體的較佳態樣如上所述。Process F Process F is a process for obtaining metal-containing nitride particles of transition metal-containing nitride by cooling the raw metal in the gas phase. The preferred aspect of the cooling method is as described above, but as the environment in the chamber, an inert gas containing nitrogen is preferred. Preferred aspects of the inert gas containing nitrogen are as described above.

製程G 製程G係對所得之金屬微粒和/或含金屬氮化物粒子進行分級之製程。作為分級方法,並無特別限制,例如,能夠利用旋風分離器。旋風分離器具有圓錐形的容器,具有在容器內產生迴旋流並利用離心力對粒子進行分級之功能。分級在惰性氣體的環境下進行為較佳。惰性氣體的態樣如上所述。Process G Process G is a process of classifying the obtained metal particles and/or metal-containing nitride particles. It does not specifically limit as a classification method, For example, a cyclone can be used. The cyclone has a conical container, and has the function of generating a swirling flow in the container and classifying particles by centrifugal force. The classification is preferably carried out in an atmosphere of inert gas. The state of the inert gas is as described above.

製程H 製程H係將含金屬氮化物粒子暴露於水蒸氣及氮氣的混合環境來進行氮化處理之製程。藉由經過該製程,能夠使含金屬氮化物粒子中的金屬氮化物的含量更多。對於將含金屬氮化物粒子暴露於水蒸氣及氮氣的混合環境之方法,並無特別限制,例如可舉出將含金屬氮化物粒子導入充滿混合有水蒸氣及氮氣之氣體之恆溫槽中,並靜置或攪拌規定時間之方法,從含金屬氮化物粒子的表面及晶界更穩定化之角度考慮,靜置為更佳。 關於水蒸氣及氮氣的混合比例,若在大氣中,則相對濕度成為25~95%之條件為較佳。靜置或攪拌之時間為0.5~72小時為較佳,此時的溫度為10~40℃為較佳。Process H Process H is a process in which metal-containing nitride particles are exposed to a mixed environment of water vapor and nitrogen to perform nitridation treatment. By going through this process, the content of the metal nitride in the metal nitride-containing particles can be increased. The method of exposing the metal-containing nitride particles to a mixed environment of water vapor and nitrogen is not particularly limited. The method of standing or stirring for a predetermined time is more preferable from the viewpoint of stabilizing the surface and grain boundaries of the metal nitride particles. Regarding the mixing ratio of water vapor and nitrogen, in the atmosphere, the relative humidity is preferably 25 to 95%. The time of standing or stirring is preferably 0.5 to 72 hours, and the temperature at this time is preferably 10 to 40°C.

製程A3-1~A3-3 製程A3-1~A3-3係向電漿炬內供給不含有氮氣之惰性氣體作為電漿氣體來產生熱電漿火焰之製程(A3-1)、向電漿炬內的熱電漿火焰供給含有原子A之原料粉末來使上述原料粉末蒸發從而獲得氣相的原子A之製程(A3-2)、及冷卻上述氣相原子A來獲得包含原子A之微粒之製程(A3-3)。各個製程中的態様如在上述製程A、製程B(代替含有過渡金屬之金屬原料粉末,使用含有原子A之原料粉末)及製程C(代替含有過渡金屬之金屬微粒,獲得被微粒化之原子A。)中已說明的內容。 藉由經過上述製程,原子A被微粒化,於製程E中原子A變得容易蒸發。並且,藉由經過上述製程,能夠去除含有原子A之原料粉末所含之雜質(除原子A以外的金屬成分等)。Processes A3-1 to A3-3 Processes A3-1 to A3-3 are processes (A3-1) in which an inert gas without nitrogen is supplied into the plasma torch as a plasma gas to generate a thermal plasma flame. A process (A3-2) of supplying raw material powder containing atom A in a thermoplasma flame to vaporize the above raw material powder to obtain atomic A in the gas phase (A3-2), and cooling the gas phase atom A to obtain particles containing atom A (A3-2) A3-3). The states in each process are as in the above-mentioned process A, process B (instead of metal powder containing transition metal, use raw material powder containing atom A) and process C (instead of metal particles containing transition metal, obtain atomized atom A) .) has been described in. By going through the above-mentioned process, the atom A is atomized, and in the process E, the atom A becomes easy to evaporate. In addition, by going through the above-mentioned process, impurities (metal components other than atom A, etc.) contained in the raw material powder containing atom A can be removed.

含有原子A之含金屬氮化物粒子的製造方法的較佳態樣 作為含有原子A之含金屬氮化物粒子的製造方法的較佳態樣,可舉出依次具有以下的製程之方法。 製程A:向電漿炬內供給不含有氮氣之惰性氣體作為電漿氣體來產生電漿火焰之製程。 製程B:向電漿炬內的熱電漿火焰供給含有過渡金屬之金屬原料粉末來使上述原料金屬粉末蒸發,從而獲得氣相的原料金屬之製程。 製程C:冷卻上述氣相的原料金屬來獲得含有過渡金屬之金屬微粒之製程。 製程G:對所得之粒子進行分級之製程。 製程A3-1:向電漿炬內供給不含有氮氣之惰性氣體作為電漿氣體來產生熱電漿火焰之製程。 製程A3-2:向電漿炬內的熱電漿火焰供給含有原子A之原料粉末來使上述原料粉末蒸發,從而獲得氣相的原子A之製程。 製程A3-3:冷卻上述氣相的原子A來獲得被微粒化之原子A之製程。 製程G:對所得之粒子進行分級之製程。 製程A2:向含有過渡金屬之金屬原料粉末(此時,為金屬微粒)中混合原子A(此時,為被微粒化之原子A)之製程。 製程D:向電漿炬內供給含有氮氣之惰性氣體作為電漿氣體來產生熱電漿火焰之製程。 製程E:向電漿炬內的熱電漿火焰供給含有過渡金屬之金屬微粒來使上述金屬微粒蒸發,從而獲得氣相的原料金屬之製程。 製程F:冷卻上述氣相原料金屬來獲得含金屬氮化物粒子之製程。 製程G:對所得之粒子進行分級之製程。 製程H:將在製程G中獲得之含金屬氮化物粒子暴露於水蒸氣及氮氣的混合環境來進行氮化處理之製程。 上述一系列製程中,可替換製程A~C及製程A3-1~A3-3的順序。亦即,可在製程A3-1~A3-3之後實施製程A~C。Preferred aspect of the method for producing metal-containing nitride particles containing atom A As a preferred aspect of the method for producing metal-containing nitride particles containing atom A, a method having the following processes in order is exemplified. Process A: A process in which an inert gas without nitrogen is supplied into the plasma torch as a plasma gas to generate a plasma flame. Process B: The process of supplying the metal raw material powder containing transition metal to the thermal plasma flame in the plasma torch to evaporate the above-mentioned raw metal powder, thereby obtaining the raw material metal in the gas phase. Process C: a process for obtaining metal particles containing transition metals by cooling the raw metal in the gas phase. Process G: The process of classifying the obtained particles. Process A3-1: A process of supplying an inert gas that does not contain nitrogen as a plasma gas to a plasma torch to generate a thermoplasma flame. Process A3-2: A process for obtaining atomic A in the gas phase by supplying the raw material powder containing atom A to the thermal plasma flame in the plasma torch to evaporate the raw material powder. Process A3-3: A process of cooling the atoms A in the gas phase to obtain atomized atoms A. Process G: The process of classifying the obtained particles. Process A2: A process in which atoms A (in this case, atomized atoms A) are mixed into metal raw material powder (in this case, metal particles) containing a transition metal. Process D: a process in which an inert gas containing nitrogen is supplied into a plasma torch as a plasma gas to generate a thermoplasma flame. Process E: The process of supplying metal particles containing transition metals to the thermal plasma flame in the plasma torch to evaporate the metal particles, thereby obtaining the raw metal in the gas phase. Process F: a process for obtaining metal-containing nitride particles by cooling the above-mentioned gas-phase raw material metal. Process G: The process of classifying the obtained particles. Process H: a process in which the metal-containing nitride particles obtained in the process G are exposed to a mixed environment of water vapor and nitrogen to perform nitridation treatment. In the above series of processes, the order of the processes A to C and the processes A3-1 to A3-3 can be replaced. That is, the processes A to C may be performed after the processes A3-1 to A3-3.

依上述含有原子A之含金屬氮化物粒子的製造方法的較佳態樣,能夠去除金屬原料粉末及原料粒子所含之雜質,且能夠製造具有所希望的平均一次粒徑之含金屬氮化物粒子。作為其理由,推測為過渡金屬和/或原子A藉由電漿處理被離子化,上述離子被冷卻時,過渡金屬、原子A及雜質分別反應熔點而被微粒化。此時,熔點較低之原子的粒子化較快,熔點較高之原子的粒子化較慢。故,如上所述,推測經過一次電漿處理之微粒(製程B及C、以及製程A3-2及A3-3)為容易成為單一成分(單結晶)者。若對藉由上述來獲得之單一成分的粒子進行分級,則能夠藉由過渡金屬的粒子和/或原子A的粒子與雜質的粒子的密度和/或粒徑的不同來去除雜質的粒子。上述分級例如能夠利用旋風分離器等並適當設定分級條件來進行。According to a preferred aspect of the method for producing metal-containing nitride particles containing atoms A, impurities contained in the metal raw material powder and raw material particles can be removed, and metal-containing nitride particles having a desired average primary particle diameter can be produced . The reason for this is presumed that the transition metal and/or atom A are ionized by plasma treatment, and when the ions are cooled, the transition metal, atom A, and impurities are each reacted with melting points to be atomized. At this time, the atomization of atoms with a lower melting point is faster, and the atomization of atoms with a higher melting point is slower. Therefore, as described above, it is presumed that the particles (processes B and C, and processes A3-2 and A3-3) that have undergone a single plasma treatment are likely to be single-component (single-crystal). By classifying the single-component particles obtained as described above, the impurity particles can be removed due to the difference in density and/or particle size of the transition metal particles and/or atomic A particles and the impurity particles. The above-mentioned classification can be performed, for example, by using a cyclone separator or the like and appropriately setting classification conditions.

金屬原料粉末及原料粉末的純化 作為能夠在上述製程B中使用之含有過渡金屬之金屬原料粉末(以下,簡單稱為“金屬原料粉末”。)及含有原子A之原料粉末(以下,簡單稱為“原料粉末”。),並無特別限制,高純度者為較佳。金屬原料粉末中的過渡金屬的含量並無特別限定,99.99%以上為較佳,99.999%以上為更佳。原料粉末中的原子A的含量亦相同。The metal raw material powder and the purification of the raw material powder can be used in the above-mentioned process B as the transition metal-containing metal raw material powder (hereinafter, simply referred to as "metal raw material powder".) and the atom A-containing raw material powder (hereinafter, simply referred to as "metal raw material powder". "raw material powder"), there is no particular limitation, high-purity ones are preferred. The content of the transition metal in the metal raw material powder is not particularly limited, but is preferably 99.99% or more, and more preferably 99.999% or more. The content of atom A in the raw material powder is also the same.

金屬原料粉末和/或原料粉末有時作為雜質而含有除所希望的過渡金屬和/或原子A以外的原子。作為金屬原料粉末中所含之雜質,可舉出硼、鋁、矽、錳、鐵、鎳及銀等。並且,作為原料粉末中所含之雜質,可舉出金屬元素等。The metal raw material powder and/or the raw material powder may contain atoms other than the desired transition metal and/or atom A as impurities. Examples of impurities contained in the metal raw material powder include boron, aluminum, silicon, manganese, iron, nickel, and silver. Moreover, as an impurity contained in a raw material powder, a metal element etc. are mentioned.

含金屬氮化物粒子的製造方法可在製程B之前(含有製程A2時,為製程A2之前)還含有以下的製程A0。 製程A0:從金屬原料粉末和/或原料粉末去除雜質之製程。The method for producing metal-containing nitride particles may further include the following process A0 before the process B (when the process A2 is included, it is before the process A2). Process A0: Process for removing impurities from metal raw material powder and/or raw material powder.

製程A0 製程A0中,作為從原料金屬粉末和/或原料粉末去除雜質之方法(分離純化方法),並無特別限定,例如,對於鈮,能夠利用日本特開2012-211048號公報的0013~0030段中記載之方法,對於其他原料金屬粉末和/或原料粉末,亦能夠利用依據該內容之方法。Process A0 In process A0, the method (separation and purification method) for removing impurities from the raw metal powder and/or raw material powder is not particularly limited. The method described in the paragraph can also be used for other raw metal powders and/or raw material powders according to the method.

含金屬氮化物粒子的包覆 含金屬氮化物粒子可以係被無機化合物包覆之含金屬氮化物粒子。亦即,可以係具有含金屬氮化物粒子及包覆含金屬氮化物粒子之使用無機化合物形成之包覆層之包覆含金屬氮化物粒子。含有被無機化合物包覆之含金屬氮化物粒子之硬化性組成物具有更優異之分散穩定性。 作為無機化合物,並無特別限定,可舉出SiO2 、ZrO2 、TiO2 、GeO2 、Al2 O3 、Y2 O3 及P2 O5 等氧化物、以及氫氧化鋁及氫氧化鋯等氫氧化物。其中,從容易形成更薄的被膜且容易形成包覆率更高之被膜之角度考慮,氫氧化鋁為較佳。 當意圖控制含金屬氮化物粒子的折射率時,作為低折射率被膜,氧化矽為較佳,作為高折射率被膜,氫氧化鋯為較佳。 對於藉由無機化合物包覆含金屬氮化物粒子之方法,並無特別限制,含金屬氮化物粒子的製造方法含有下述無機化合物包覆製程為較佳。Coating of Metal-Nitride-Containing Particles The metal-nitride-containing particles may be metal-nitride-containing particles coated with an inorganic compound. That is, the metal-containing nitride particles may be coated metal-containing nitride particles having metal-containing nitride particles and a coating layer formed using an inorganic compound to coat the metal-containing nitride particles. The curable composition containing metal nitride-containing particles coated with an inorganic compound has more excellent dispersion stability. The inorganic compound is not particularly limited, and examples thereof include oxides such as SiO 2 , ZrO 2 , TiO 2 , GeO 2 , Al 2 O 3 , Y 2 O 3 , and P 2 O 5 , as well as aluminum hydroxide and zirconium hydroxide. and other hydroxides. Among them, aluminum hydroxide is preferable from the viewpoint of being easy to form a thinner film and easy to form a film with a higher coverage. When it is intended to control the refractive index of the metal-containing nitride particles, silicon oxide is preferred as the low-refractive index coating, and zirconium hydroxide is preferred as the high-refractive index coating. The method for coating the metal-containing nitride particles with an inorganic compound is not particularly limited, and the method for producing the metal-containing nitride particles preferably includes the following inorganic compound coating process.

無機化合物包覆製程 無機化合物包覆製程係藉由氧化物和/或氫氧化物包覆上述含金屬氮化物粒子之製程。作為包覆方法,並無特別限制,例如可舉出以下的濕式塗佈法等。Inorganic compound coating process The inorganic compound coating process is a process of coating the above-mentioned metal nitride-containing particles with oxides and/or hydroxides. It does not specifically limit as a coating method, For example, the following wet coating method etc. are mentioned.

作為第1濕式塗佈法,首先,混合上述含金屬氮化物粒子與水來製作漿料。接著,使上述漿料與含有選自包括Si、Zr、Ti、Ge、Al、Y及P之群組之至少1種之水溶性化合物(例如,矽酸鈉)反應,藉由傾析法和/或離子交換樹脂等去除多餘的鹼離子。之後,使上述漿料乾燥來獲得被氧化物包覆之含金屬氮化物粒子。As the first wet coating method, first, the metal-containing nitride particles described above and water are mixed to prepare a slurry. Next, the above slurry is reacted with a water-soluble compound (eg, sodium silicate) containing at least one selected from the group consisting of Si, Zr, Ti, Ge, Al, Y, and P, by decantation and / or ion exchange resin, etc. to remove excess alkali ions. Then, the above-mentioned slurry is dried to obtain oxide-coated metal-containing nitride particles.

作為第2濕式塗佈法,首先,混合上述含金屬氮化物粒子與醇等有機溶劑來製作漿料。接著,在上述漿料中生成含有選自包括Si、Zr、Ti、Ge、Al、Y及P之群組之至少1種之醇鹽等有機金屬化合物,以高溫燒成上述漿料。若以高溫燒成上述漿料,則進行溶膠凝膠反應,可獲得被氧化物包覆之含金屬氮化物粒子。As the second wet coating method, first, the metal-containing nitride particles described above and an organic solvent such as alcohol are mixed to prepare a slurry. Next, an organometallic compound such as an alkoxide containing at least one selected from the group consisting of Si, Zr, Ti, Ge, Al, Y, and P is produced in the slurry, and the slurry is fired at high temperature. When the above-mentioned slurry is fired at a high temperature, a sol-gel reaction proceeds, and metal-containing nitride particles coated with an oxide can be obtained.

作為第3濕式塗佈法,在含金屬氮化物粒子的存在下,利用尿素與氯化鋁,製作含有離子液體之漿料。從該漿料取出含金屬氮化物粒子並使其乾燥之後,燒成上述含金屬氮化物粒子,藉此可獲得被含有氫氧化鋁之氫氧化物包覆之含金屬氮化物粒子。As a third wet coating method, in the presence of metal nitride particles, a slurry containing an ionic liquid is prepared using urea and aluminum chloride. After the metal-containing nitride particles are taken out from the slurry and dried, the metal-containing nitride particles are fired, whereby metal-containing nitride particles coated with hydroxide containing aluminum hydroxide can be obtained.

・有機顏料 作為有機顏料,例如可舉出以下:比色指數(C.I.)顏料黃1,2,3,4,5,6,10,11,12,13,14,15,16,17,18,20,24,31,32,34,35,35:1,36,36:1,37,37:1,40,42,43,53,55,60,61,62,63,65,73,74,77,81,83,86,93,94,95,97,98,100,101,104,106,108,109,110,113,114,115,116,117,118,119,120,123,125,126,127,128,129,137,138,139,147,148,150,151,152,153,154,155,156,161,162,164,166,167,168,169,170,171,172,173,174,175,176,177,179,180,181,182,185,187,188,193,194,199,213,214等; C.I.顏料橙 2,5,13,16,17:1,31,34,36,38,43,46,48,49,51,52,55,59,60,61,62,64,71,73等; C.I.顏料紅 1,2,3,4,5,6,7,9,10,14,17,22,23,31,38,41,48:1,48:2,48:3,48:4,49,49:1,49:2,52:1,52:2,53:1,57:1,60:1,63:1,66,67,81:1,81:2,81:3,83,88,90,105,112,119,122,123,144,146,149,150,155,166,168,169,170,171,172,175,176,177,178,179,184,185,187,188,190,200,202,206,207,208,209,210,216,220,224,226,242,246,254,255,264,270,272,279等; C.I.顏料綠 7,10,36,37,58,59等; C.I.顏料紫 1,19,23,27,32,37,42等;及 C.I.顏料藍 1,2,15,15:1,15:2,15:3,15:4,15:6,16,22,60,64,66,79,80等。 另外,顏料可單獨使用1種,亦可同時使用2種以上。・Organic pigments Examples of organic pigments include the following: Color Index (C.I.) Pigment Yellow 1, 2, 3, 4, 5, 6, 10, 11, 12, 13, 14, 15, 16, 17, 18 , 20, 24, 31, 32, 34, 35, 35:1, 36, 36:1, 37, 37:1, 40, 42, 43, 53, 55, 60, 61, 62, 63, 65, 73 , 74, 77, 81, 83, 86, 93, 94, 95, 97, 98, 100, 101, 104, 106, 108, 109, 110, 113, 114, 115, 116, 117, 118, 119, 120 , 123, 125, 126, 127, 128, 129, 137, 138, 139, 147, 148, 150, 151, 152, 153, 154, 155, 156, 161, 162, 164, 166, 167, 168, 169 , 170, 171, 172, 173, 174, 175, 176, 177, 179, 180, 181, 182, 185, 187, 188, 193, 194, 199, 213, 214, etc.; C.I. Pigment Orange 2, 5, 13 , 16, 17: 1, 31, 34, 36, 38, 43, 46, 48, 49, 51, 52, 55, 59, 60, 61, 62, 64, 71, 73, etc.; C.I. Pigment Red 1, 2 , 3, 4, 5, 6, 7, 9, 10, 14, 17, 22, 23, 31, 38, 41, 48:1, 48:2, 48:3, 48:4, 49, 49:1 , 49:2, 52:1, 52:2, 53:1, 57:1, 60:1, 63:1, 66, 67, 81:1, 81:2, 81:3, 83, 88, 90 , 105, 112, 119, 122, 123, 144, 146, 149, 150, 155, 166, 168, 169, 170, 171, 172, 175, 176, 177, 178, 179, 184, 185, 187, 188 , 190, 200, 202, 206, 207, 208, 209, 210, 216, 220, 224, 226, 242, 246, 254, 255, 264, 270, 272, 279, etc.; C.I. Pigment Green 7, 10, 36 , 37, 58, 59, etc.; C.I. Pigment Violet 1, 19, 23, 27, 32, 37, 42, etc.; and C.I. Pigment Blue 1, 2, 15, 15:1, 15:2, 15:3, 15: 4, 15:6, 16, 22, 60, 64, 66, 79, 80, etc. In addition, a pigment may be used individually by 1 type, and may use 2 or more types together.

(染料) 作為染料,例如能夠使用日本特開昭64-90403號公報、日本特開昭64-91102號公報、日本特開平1-94301號公報、日本特開平6-11614號公報、日本特登2592207號、美國專利第4808501號說明書、美國專利第5667920號說明書、美國專利第505950號說明書、日本特開平5-333207號公報、日本特開平6-35183號公報、日本特開平6-51115號公報、日本特開平6-194828號公報等中公開之色素。若以化學結構予以區分,則能夠使用吡唑偶氮化合物、吡咯亞甲基化合物、苯胺偶氮化合物、三苯甲烷化合物、蒽醌化合物、亞苄基化合物、氧雜菁化合物、吡唑并三唑偶氮化合物、吡啶酮偶氮化合物、花青化合物、啡噻嗪化合物、吡咯并吡唑甲亞胺化合物等。作為染料,還可使用色素多聚體。作為色素多聚體,可舉出日本特開2011-213925號公報、日本特開2013-041097號公報中記載之化合物。可使用分子內具有聚合性之聚合性染料,作為市售品,例如可舉出Wako Pure Chemical Industries, Ltd.製造的RDW系列。(Dye) As the dye, for example, JP 64-90403 A, JP 64-91102 A, JP 1-94301 A, JP 6-11614 A, JP 6-11614 A can be used. No. 2,592,207, US Patent No. 4,808,501, US Patent No. 5,667,920, US Patent No. 5,059,50, JP 5-333207, JP 6-35183, JP 6-51115 , the pigment disclosed in Japanese Patent Laid-Open No. 6-194828, etc. In terms of chemical structures, pyrazole azo compounds, pyrromethylene compounds, aniline azo compounds, triphenylmethane compounds, anthraquinone compounds, benzylidene compounds, oxocyanine compounds, pyrazolotrims can be used azole azo compounds, pyridone azo compounds, cyanine compounds, phenothiazine compounds, pyrrolopyrazole methimine compounds, etc. As dyes, dye polymers can also be used. Examples of the dye multimer include compounds described in JP 2011-213925 A and JP 2013-041097 A. A polymerizable dye having polymerizability in the molecule can be used, and as a commercial item, for example, RDW series manufactured by Wako Pure Chemical Industries, Ltd. can be mentioned.

(紅外線吸收劑) 著色劑可還含有紅外線吸收劑。 紅外線吸收劑表示在紅外區域(波長650~1,300nm為較佳)的波長區域具有吸收之化合物。紅外線吸收劑為在波長675~900nm的波長區域具有極大吸收波長之化合物為較佳。 作為具有該種分光特性之著色劑,例如可舉出吡咯并吡咯化合物、銅化合物、花青化合物、酞菁化合物、亞胺化合物、硫醇錯合物系化合物、過渡金屬氧化物系化合物、方酸菁化合物、萘酞菁化合物、夸特銳烯化合物、二硫醇金屬錯合物系化合物、克酮鎓化合物等。 酞菁化合物、萘酞菁化合物、亞銨化合物、花青化合物、方酸菁化合物及克酮鎓化合物可使用日本特開2010-111750號公報的0010~0081段中公開之化合物,該內容編入本說明書中。花青化合物例如能夠參閱“功能性色素、大河原信/松崗賢/北尾悌次郎/平嶋恆亮編著,kodansha Scientific Ltd.”,該內容編入本說明書中。(Infrared Absorber) The colorant may further contain an infrared absorber. The infrared absorber refers to a compound having absorption in the wavelength region of the infrared region (preferably a wavelength of 650 to 1,300 nm). The infrared absorber is preferably a compound having a maximum absorption wavelength in the wavelength region of 675 to 900 nm. Examples of colorants having such spectroscopic properties include pyrrolopyrrole compounds, copper compounds, cyanine compounds, phthalocyanine compounds, imine compounds, thiol complex compounds, transition metal oxide compounds, and Acid cyanine compounds, naphthalocyanine compounds, quartane compounds, dithiol metal complex compounds, ketonium compounds, and the like. As the phthalocyanine compound, naphthalocyanine compound, imino compound, cyanine compound, squaraine compound, and ketonium compound, compounds disclosed in paragraphs 0010 to 0081 of JP 2010-111750 A can be used, the contents of which are incorporated herein. in the manual. The cyanine compound can be referred to, for example, "Functional Pigment, Nobu Ogawara / Ken Matsuoka / Tejiro Kitao / Kodansha Scientific Ltd.", which is incorporated in this specification.

作為具有上述分光特性之著色劑,還能夠使用日本特開平07-164729號公報的0004~0016段中公開之化合物和/或日本特開2002-146254號公報的0027~0062段中公開之化合物、日本特開2011-164583號公報的0034~0067段中公開之包含含有Cu和/或P之氧化物的微晶且數量平均凝聚粒徑為5~200nm之近紅外線吸收粒子。As the coloring agent having the above-mentioned spectroscopic properties, the compounds disclosed in paragraphs 0004 to 0016 of JP 07-164729 A and/or the compounds disclosed in paragraphs 0027 to 0062 of JP 2002-146254 A can also be used, The near-infrared absorbing particles disclosed in paragraphs 0034 to 0067 of Japanese Patent Laid-Open No. 2011-164583 include crystallites of oxides containing Cu and/or P and have a number-average aggregated particle diameter of 5 to 200 nm.

作為在波長675~900nm的波長區域具有極大吸收波長之化合物,選自包括花青化合物、吡咯并吡咯化合物、方酸菁化合物、酞菁化合物及萘酞菁化合物之群組之至少1種為較佳。 紅外線吸收劑係在25℃的水中溶解1質量%以上之化合物為較佳,在25℃的水中溶解10質量%以上之化合物為更佳。藉由使用該種化合物,耐溶劑性得到優化。 吡咯并吡咯化合物能夠參閱日本特開2010-222557號公報的段落號0049~0062,該內容編入本說明書中。花青化合物及方酸菁化合物能夠參閱國際公開2014/088063號公報的段落號0022~0063、國際公開2014/030628號公報的段落號0053~0118、日本特開2014-59550號公報的段落號0028~0074、國際公開2012/169447號公報的段落號0013~0091、日本特開2015-176046號公報的段落號0019~0033、日本特開2014-63144號公報的段落號0053~0099、日本特開2014-52431號公報的段落號0085~0150、日本特開2014-44301號公報的段落號0076~0124、日本特開2012-8532號公報的段落號0045~0078、日本特開2015-172102號公報的段落號0027~0067、日本特開2015-172004號公報的段落號0029~0067、日本特開2015-40895號公報的段落號0029~0085、日本特開2014-126642號公報的段落號0022~0036、日本特開2014-148567號公報的段落號0011~0017、日本特開2015-157893號公報的段落號0010~0025、日本特開2014-095007號公報的段落號0013~0026、日本特開2014-80487號公報的段落號0013~0047及日本特開2013-227403號公報的段落號0007~0028等,該內容編入本說明書中。As the compound having a maximum absorption wavelength in the wavelength region of 675 to 900 nm, at least one selected from the group consisting of cyanine compounds, pyrrolopyrrole compounds, squaraine compounds, phthalocyanine compounds and naphthalocyanine compounds is preferred good. The infrared absorber is preferably a compound in which 1% by mass or more is dissolved in water at 25°C, and a compound in which 10% by mass or more is dissolved in water at 25°C is more preferable. By using this compound, solvent resistance is optimized. For the pyrrolopyrrole compound, reference can be made to paragraph numbers 0049 to 0062 of JP 2010-222557 A, the contents of which are incorporated in the present specification. For cyanine compounds and squaraine compounds, refer to Paragraph Nos. 0022 to 0063 of International Publication No. WO 2014/088063, Paragraph Nos. 0053 to 0118 of International Publication No. 2014/030628, and Paragraph No. 0028 of JP-A No. 2014-59550 ~0074, Paragraph Nos. 0013 to 0091 of International Publication No. 2012/169447, Paragraph Nos. 0019 to 0033 of Japanese Patent Laid-Open No. 2015-176046, Paragraph Nos. 0053 to 0099 of Japanese Patent Laid-Open No. 2014-63144, Japanese Patent Laid-Open Publication No. 0053-0099 Paragraph Nos. 0085 to 0150 of Japanese Patent Application Laid-Open No. 2014-52431, Paragraph Nos. 0076 to 0124 of Japanese Patent Application Laid-Open No. 2014-44301, Paragraph Nos. 0045 to 0078 of Japanese Patent Application Laid-Open No. 2012-8532, Japanese Patent Application Laid-Open No. 2015-172102 Paragraph Nos. 0027 to 0067 of Japanese Patent Application Laid-Open No. 2015-172004, Paragraph Nos. 0029 to 0067 of Japanese Patent Application Laid-Open No. 2015-172004, Paragraph Nos. 0029 to 0085 of Japanese Patent Application Laid-Open No. 2015-40895, Paragraph Nos. 0022 to Japanese Patent Application Laid-Open No. 2014-126642 0036, Paragraph Nos. 0011 to 0017 of Japanese Patent Laid-Open Publication No. 2014-148567, Paragraph Nos. 0010 to 0025 of Japanese Patent Laid-Open Publication No. 2015-157893, Paragraph Nos. 0013 to 0026 of Japanese Patent Laid-Open Publication No. 2014-095007, Paragraph Nos. 0013 to 0047 of Japanese Patent Application Laid-Open No. 2014-80487 and Paragraph Nos. 0007 to 0028 of Japanese Patent Application Laid-Open No. 2013-227403 are incorporated herein by reference.

紅外線吸收劑係選自包括以下述通式1~3表示之化合物之群組之至少1種為較佳。 通式1 [化學式18]

Figure 02_image502
通式1中,A1 及A2 分別獨立地表示芳基、雜芳基或以下述通式1-A表示之基團。 通式1-A [化學式19]
Figure 02_image504
通式1-A中,Z1A 表示形成含氮雜環之非金屬原子團,R2A 表示烷基、烯基或芳烷基,d表示0或1,波浪線表示連結鍵。 通式2 [化學式20]
Figure 02_image506
通式2中,R1a 及R1b 分別獨立地表示烷基、芳基或雜芳基, R2 ~R5 分別獨立地表示氫原子或取代基,R2 與R3 、R4 與R5 可分別鍵結而形成環, R6 及R7 分別獨立地表示氫原子、烷基、芳基、雜芳基、-BRA RB 或金屬原子,RA 及RB 分別獨立地表示氫原子或取代基, R6 可與R1a 或R3 共價鍵結或配位鍵結, R7 可與R1b 或R5 共價鍵結或配位鍵結。 通式3 [化學式21]
Figure 02_image508
通式3中,Z1 及Z2 分別獨立地為形成可以稠合之5員或6員的含氮雜環之非金屬原子團, R101 及R102 分別獨立地表示烷基、烯基、炔基、芳烷基或芳基, L1 表示包含奇數個次甲基之次甲基鏈, a及b分別獨立地為0或1, a為0時,碳原子與氮原子以雙鍵鍵結,b為0時,碳原子與氮原子以單鍵鍵結, 式中以Cy表示之部位為陽離子部時,X1 表示陰離子,c表示為了維持電荷的平衡而所需之數,式中以Cy表示之部位為陰離子部時,X1 表示陽離子,c表示為了維持電荷的平衡而所需之數,式中以Cy表示之部位的電荷在分子內被中和時,c為0。The infrared absorber is preferably at least one selected from the group consisting of compounds represented by the following general formulas 1 to 3. Formula 1 [Chemical Formula 18]
Figure 02_image502
In the general formula 1, A 1 and A 2 each independently represent an aryl group, a heteroaryl group, or a group represented by the following general formula 1-A. General formula 1-A [Chemical formula 19]
Figure 02_image504
In the general formula 1-A, Z 1A represents a non-metallic atomic group forming a nitrogen-containing heterocycle, R 2A represents an alkyl group, an alkenyl group or an aralkyl group, d represents 0 or 1, and a wavy line represents a connecting bond. Formula 2 [Chemical Formula 20]
Figure 02_image506
In general formula 2, R 1a and R 1b each independently represent an alkyl group, an aryl group or a heteroaryl group, R 2 to R 5 each independently represent a hydrogen atom or a substituent, R 2 and R 3 , R 4 and R 5 Can be bonded to form a ring, R 6 and R 7 each independently represent a hydrogen atom, an alkyl group, an aryl group, a heteroaryl group, -BR A R B or a metal atom, and R A and R B each independently represent a hydrogen atom Or a substituent, R 6 can be covalently or coordinately bound to R 1a or R 3 , and R 7 can be covalently or coordinately bound to R 1b or R 5 . Formula 3 [Chemical Formula 21]
Figure 02_image508
In the general formula 3, Z 1 and Z 2 are each independently a non-metallic atomic group that forms a 5- or 6-membered nitrogen-containing heterocycle that can be fused, and R 101 and R 102 are each independently an alkyl group, an alkenyl group, and an alkyne. group, aralkyl group or aryl group, L 1 represents a methine chain containing an odd number of methine groups, a and b are independently 0 or 1, when a is 0, a carbon atom and a nitrogen atom are bonded by a double bond , when b is 0, the carbon atom and the nitrogen atom are bonded by a single bond. In the formula, when the part represented by Cy is the cation part, X 1 represents the anion, and c represents the number required to maintain the balance of electric charges. When the part represented by Cy is an anion part, X 1 represents a cation, and c represents the number required to maintain the balance of charges. In the formula, when the charge of the part represented by Cy is neutralized in the molecule, c is 0.

(顏料衍生物) 硬化性組成物可含有顏料衍生物。顏料衍生物係具有藉由酸性基、鹼性基或鄰苯二甲酸亞胺甲基取代有機顏料的一部分之結構之化合物為較佳。作為顏料衍生物,從著色劑A的分散性及分散穩定性的觀點考慮,具有酸性基或鹼性基之顏料衍生物為較佳。顏料衍生物具有鹼性基為特佳。上述樹脂(分散劑)與顏料衍生物的組合係分散劑為酸性分散劑且顏料衍生物具有鹼性基之組合為較佳。(Pigment Derivative) The curable composition may contain a pigment derivative. The pigment derivative is preferably a compound having a structure in which a part of the organic pigment is substituted with an acidic group, a basic group, or an imidomethyl phthalate group. As the pigment derivative, from the viewpoint of the dispersibility and dispersion stability of the colorant A, a pigment derivative having an acidic group or a basic group is preferable. It is particularly preferred that the pigment derivative has a basic group. The combination of the resin (dispersant) and the pigment derivative is preferably an acidic dispersant and the pigment derivative has a basic group.

作為用於構成顏料衍生物之有機顏料,可舉出二氧代吡咯并吡咯系顏料、偶氮系顏料、酞菁系顏料、蒽醌系顏料、喹吖啶酮系顏料、二噁嗪系顏料、紫環酮系顏料、苝系顏料、硫靛系顏料、異吲哚啉系顏料、異吲哚啉酮系顏料、喹酞酮系顏料、士林系顏料及金屬絡合物系顏料等。 作為顏料衍生物所具有之酸性基,磺酸基、羧酸基及其鹽為較佳,羧酸基及磺酸基為更佳,磺酸基為進一步較佳。作為顏料衍生物所具有之鹼性基,胺基為較佳,三級胺基為更佳。Examples of organic pigments for constituting pigment derivatives include dioxopyrrolopyrrole-based pigments, azo-based pigments, phthalocyanine-based pigments, anthraquinone-based pigments, quinacridone-based pigments, and dioxazine-based pigments , Perone-based pigments, perylene-based pigments, thioindigo-based pigments, isoindoline-based pigments, isoindolinone-based pigments, quinophthalone-based pigments, Shihlin-based pigments, and metal complex-based pigments. As the acidic group of the pigment derivative, a sulfonic acid group, a carboxylic acid group and a salt thereof are preferable, a carboxylic acid group and a sulfonic acid group are more preferable, and a sulfonic acid group is further preferable. As the basic group of the pigment derivative, an amine group is preferable, and a tertiary amine group is more preferable.

當硬化性組成物含有顏料衍生物時,顏料衍生物的含量相對於顏料的質量,為1~30質量%為較佳,3~20質量%為更佳。顏料衍生物可僅使用1種,亦可同時使用2種以上。When the curable composition contains a pigment derivative, the content of the pigment derivative is preferably 1 to 30% by mass, more preferably 3 to 20% by mass, based on the mass of the pigment. Only one type of pigment derivatives may be used, or two or more types may be used simultaneously.

<聚合抑制劑> 硬化性組成物可含有聚合抑制劑。藉由含有聚合抑制劑,硬化性組成物具有更優異之經時穩定性。另外,本說明書中,經時穩定性表示,即使在製備硬化性組成物之後保管規定期間時,亦能夠獲得具有優異之圖案形狀之硬化膜。 聚合抑制劑具有抑制在保管中的硬化性組成物中,並進行多官能硫醇化合物與聚合性化合物的反應之作用,推測為可獲得上述效果。 聚合抑制劑的含量相對於硬化性組成物的總固體成分,為0.001~1質量%為較佳,0.005~1質量%為更佳,0.05~1質量%為進一步較佳。 若聚合抑制劑的含量在上述範圍內,則硬化性組成物具有更優異之經時穩定性。<Polymerization inhibitor> The curable composition may contain a polymerization inhibitor. By containing the polymerization inhibitor, the curable composition has more excellent stability over time. In addition, in this specification, time-dependent stability means that the cured film having an excellent pattern shape can be obtained even when the curable composition is stored for a predetermined period of time after the preparation of the curable composition. The polymerization inhibitor has the effect of suppressing the reaction between the polyfunctional thiol compound and the polymerizable compound in the curable composition during storage, and it is presumed that the above-mentioned effects can be obtained. The content of the polymerization inhibitor is preferably 0.001 to 1% by mass, more preferably 0.005 to 1% by mass, and even more preferably 0.05 to 1% by mass relative to the total solid content of the curable composition. When the content of the polymerization inhibitor is within the above range, the curable composition has more excellent stability over time.

作為聚合抑制劑,並無特別限制,能夠使用用作聚合抑制劑之公知的化合物。作為用作聚合抑制劑之化合物,例如可舉出酚系化合物、醌系化合物、受阻胺系化合物、吩噻嗪系化合物及硝基苯系化合物等。上述化合物可單獨使用1種,亦可同時使用2種以上。The polymerization inhibitor is not particularly limited, and known compounds used as polymerization inhibitors can be used. As a compound used as a polymerization inhibitor, a phenol type compound, a quinone type compound, a hindered amine type compound, a phenothiazine type compound, a nitrobenzene type compound, etc. are mentioned, for example. The above-mentioned compounds may be used alone or in combination of two or more.

作為酚系化合物,例如可舉出苯酚、4-甲氧基苯酚、氫醌、2-三級丁基氫醌、鄰苯二酚、4-三級丁基鄰苯二酚、2,6-二-三級丁基苯酚、2,6-二-三級丁基4-甲基苯酚、2,6-二-三級丁基4-乙基苯酚、4-羥基甲基-2,6-二-三級丁基苯酚、新戊四醇四(3,5-二-三級丁基4-羥基氫化肉桂酸酯(hydroxyhydrocinnamate))、4-甲氧基-1-萘酚及1,4-二羥基萘等。Examples of the phenolic compound include phenol, 4-methoxyphenol, hydroquinone, 2-tertiary butylhydroquinone, catechol, 4-tertiary butylcatechol, 2,6- Di-tertiary butylphenol, 2,6-di-tertiary butyl 4-methylphenol, 2,6-di-tertiary butyl 4-ethylphenol, 4-hydroxymethyl-2,6- Di-tertiary butylphenol, neotaerythritol tetrakis (3,5-di-tertiary butyl 4-hydroxyhydrocinnamate), 4-methoxy-1-naphthol and 1,4 - Dihydroxynaphthalene, etc.

作為酚系化合物,以式(IH-1)表示之酚系化合物為較佳。As a phenolic compound, the phenolic compound represented by formula (IH-1) is preferable.

[化學式22]

Figure 02_image510
[Chemical formula 22]
Figure 02_image510

式(IH-1)中,R1 ~R5 分別獨立地表示氫原子、烷基、烯基、羥基、胺基、芳基、烷氧基、羧基、烷氧羰基或醯基。R1 ~R5 可分別連結而形成環。In formula (IH-1), R 1 to R 5 each independently represent a hydrogen atom, an alkyl group, an alkenyl group, a hydroxyl group, an amino group, an aryl group, an alkoxy group, a carboxyl group, an alkoxycarbonyl group or an acyl group. R 1 to R 5 may be connected to each other to form a ring.

作為式(IH-1)中的R1 ~R5 ,氫原子、碳數1~5的烷基(例如,甲基及乙基等)、碳數1~5的烷氧基(例如,甲氧基及乙氧基等)、碳數2~4的烯基(例如,乙烯基等)或苯基為較佳。 其中,R1 及R5 分別獨立地為氫原子或三級丁基為更佳,R2 及R4 為氫原子為更佳,R3 為氫原子、碳數1~5的烷基或碳數1~5的烷氧基為更佳。As R 1 to R 5 in the formula (IH-1), a hydrogen atom, an alkyl group having 1 to 5 carbon atoms (eg, methyl group and ethyl group, etc.), an alkoxy group having 1 to 5 carbon atoms (eg, methyl group) An oxy group, an ethoxy group, etc.), an alkenyl group having 2 to 4 carbon atoms (eg, a vinyl group, etc.), or a phenyl group are preferable. Among them, it is more preferable that R 1 and R 5 are independently hydrogen atoms or tertiary butyl groups, R 2 and R 4 are more preferably hydrogen atoms, and R 3 is hydrogen atoms, alkyl groups with 1 to 5 carbon atoms or carbon atoms. An alkoxy group of numbers 1 to 5 is more preferable.

作為醌系化合物,例如可舉出1,4-苯醌、1,2-苯醌及1,4-萘醌等。As a quinone type compound, 1, 4- benzoquinone, 1, 2- benzoquinone, 1, 4- naphthoquinone etc. are mentioned, for example.

作為受阻胺系化合物,例如可舉出以下述式(IH-2)表示之聚合抑制劑。As a hindered amine compound, the polymerization inhibitor represented by following formula (IH-2) is mentioned, for example.

[化學式23]

Figure 02_image512
[Chemical formula 23]
Figure 02_image512

式(IH-2)中的R6 表示氫原子、羥基、胺基、烷氧基、烷氧羰基或醯基。其中,氫原子或羥基為較佳,羥基為更佳。 式(IH-2)中的R7 ~R10 分別獨立地表示氫原子或烷基。作為R7 ~R10 所表示之烷基,碳數1~5的烷基為較佳,甲基或乙基為更佳。R 6 in the formula (IH-2) represents a hydrogen atom, a hydroxyl group, an amino group, an alkoxy group, an alkoxycarbonyl group or an acyl group. Among them, a hydrogen atom or a hydroxyl group is preferable, and a hydroxyl group is more preferable. R 7 to R 10 in formula (IH-2) each independently represent a hydrogen atom or an alkyl group. As the alkyl group represented by R 7 to R 10 , an alkyl group having 1 to 5 carbon atoms is preferable, and a methyl group or an ethyl group is more preferable.

作為聚合抑制劑,可將上述各化合物單獨使用1種,亦可同時使用2種,還可同時使用3種以上。 聚合抑制劑含有酚系化合物為較佳。其中,聚合抑制劑含有2種以上的酚系化合物為更佳。含有不同酚系化合物之硬化性組成物具有更優異之本發明的效果。 聚合抑制劑含有酚系化合物及受阻胺系化合物為較佳。含有酚系化合物及受阻胺系化合物之硬化性組成物具有更優異之本發明的效果。As the polymerization inhibitor, each of the above-mentioned compounds may be used alone, or two or more of them may be used simultaneously, or three or more of them may be used simultaneously. The polymerization inhibitor preferably contains a phenolic compound. Among them, it is more preferable that the polymerization inhibitor contains two or more phenolic compounds. Curable compositions containing different phenolic compounds have more excellent effects of the present invention. The polymerization inhibitor preferably contains a phenol-based compound and a hindered amine-based compound. The curable composition containing the phenol-based compound and the hindered amine-based compound has more excellent effects of the present invention.

<溶劑> 硬化性組成物含有溶劑為較佳。作為溶劑,可舉出水及有機溶劑。硬化性組成物含有有機溶劑為較佳。 硬化性組成物含有溶劑時,硬化性組成物的固體成分為10~30質量%為較佳。若硬化性組成物的固體成分為下限值以上,則黏度較低,塗佈性得到優化。而且,藉由反應性較高之化合物的濃度變低,經時穩定性得到優化。若硬化性組成物的固體成分為上限值以下,則黏度保持為較低溫度,塗佈性得到優化。而且,比重較重之著色劑不易沉降,經時穩定性得到優化。<Solvent> It is preferable that the curable composition contains a solvent. As a solvent, water and an organic solvent are mentioned. The curable composition preferably contains an organic solvent. When the curable composition contains a solvent, the solid content of the curable composition is preferably 10 to 30% by mass. When the solid content of the curable composition is equal to or more than the lower limit value, the viscosity is low, and the coatability is optimized. Furthermore, by reducing the concentration of the more reactive compound, the stability over time is optimized. When the solid content of the curable composition is equal to or less than the upper limit value, the viscosity is maintained at a low temperature, and the coatability is optimized. Moreover, the colorant with heavier specific gravity is not easy to settle, and the stability over time is optimized.

(有機溶劑) 當硬化性組成物含有有機溶劑時,作為有機溶劑的含量,相對於硬化性組成物的總質量,70~90質量%為較佳。 另外,有機溶劑可單獨使用1種,亦可同時使用2種以上。當同時使用2種以上的有機溶劑時,其合計量成為上述範圍為較佳。(Organic Solvent) When the curable composition contains an organic solvent, the content of the organic solvent is preferably 70 to 90% by mass relative to the total mass of the curable composition. Moreover, an organic solvent may be used individually by 1 type, and may use 2 or more types together. When two or more kinds of organic solvents are used at the same time, the total amount thereof is preferably in the above-mentioned range.

作為有機溶劑,並無特別限制,例如可舉出丙酮、甲乙酮、環己烷、二氯乙烷、四氫呋喃、甲苯、乙二醇單甲醚、乙二醇單乙醚、乙二醇二甲醚、丙二醇單甲醚、丙二醇單乙醚、乙醯丙酮、環己酮、環戊酮、二丙酮醇、乙二醇單甲醚乙酸酯、乙二醇乙醚乙酸酯、乙二醇單異丙醚、乙二醇單丁醚乙酸酯、3-甲氧基丙醇、甲氧基乙氧基乙醇、二乙二醇單甲醚、二乙二醇單乙醚、二乙二醇二甲醚、二乙二醇二乙醚、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯、3-甲氧基乙酸丙酯、N,N-二甲基甲醯胺、二甲基亞碸、γ-丁內酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、乙基溶纖劑乙酸酯、3-甲氧基丙酸甲酯、2-庚酮、乙基卡必醇乙酸酯、丁基卡必醇乙酸酯、乙酸乙酯、乙酸丁酯、乳酸甲酯及乳酸乙酯等。The organic solvent is not particularly limited, and examples thereof include acetone, methyl ethyl ketone, cyclohexane, dichloroethane, tetrahydrofuran, toluene, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol dimethyl ether, Propylene glycol monomethyl ether, propylene glycol monoethyl ether, acetone acetone, cyclohexanone, cyclopentanone, diacetone alcohol, ethylene glycol monomethyl ether acetate, ethylene glycol ethyl ether acetate, ethylene glycol monoisopropyl ether , ethylene glycol monobutyl ether acetate, 3-methoxypropanol, methoxyethoxyethanol, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol dimethyl ether, Diethylene glycol diethyl ether, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, 3-methoxypropyl acetate, N,N-dimethylformamide, dimethylsulfoxide, γ- Butyrolactone, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl cellosolve acetate, methyl 3-methoxypropionate, 2-heptanone, ethyl Carbitol acetate, butyl carbitol acetate, ethyl acetate, butyl acetate, methyl lactate and ethyl lactate, etc.

當含有2種以上的有機溶劑時,由選自包括上述3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、乙基溶纖劑乙酸酯、乳酸乙酯、二乙二醇二甲醚、乙酸丁酯、3-甲氧基丙酸甲酯、2-庚酮、環己酮、環戊酮、乙基卡必醇乙酸酯、丁基卡必醇乙酸酯、丙二醇單甲醚及丙二醇單甲醚乙酸酯之群組中的2種以上構成為較佳。When two or more organic solvents are contained, they are selected from the group consisting of the above-mentioned methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl cellosolve acetate, ethyl lactate, diethyl acetate Glycol dimethyl ether, butyl acetate, methyl 3-methoxypropionate, 2-heptanone, cyclohexanone, cyclopentanone, ethyl carbitol acetate, butyl carbitol acetate , propylene glycol monomethyl ether and propylene glycol monomethyl ether acetate are preferably constituted by two or more of the group.

(水) 硬化性組成物可含有水。水可以係有意添加者,亦可以係藉由添加硬化性組成物中所含之各成分而在硬化性組成物中不可避免地含有者。 水的含量相對於硬化性組成物的總質量,0.01~1質量%為較佳。若水的含量在上述範圍內,則製作硬化膜時抑制產生針孔,而且硬化膜的耐濕性得到提高。(Water) The curable composition may contain water. Water may be intentionally added, or may be unavoidably contained in the curable composition by adding each component contained in the curable composition. The content of water is preferably 0.01 to 1 mass % with respect to the total mass of the curable composition. When content of water is in the said range, generation|occurence|production of a pinhole at the time of manufacture of a cured film will be suppressed, and the moisture resistance of a cured film will be improved.

<分散劑> 硬化性組成物含有分散劑為較佳。分散劑有助於提高著色劑的分散性。本說明書中,分散劑為與後述之黏結樹脂不同之成分。<Dispersant> It is preferable that the curable composition contains a dispersant. The dispersant helps to improve the dispersibility of the colorant. In this specification, a dispersing agent is a component different from the binder resin mentioned later.

當硬化性組成物含有分散劑時,分散劑的含量相對於硬化性組成物的總固體成分,0.05~50質量%為較佳,0.05~30質量%為更佳。 若分散劑的含量相對於硬化性組成物的總固體成分為0.05~30質量%,則使硬化性組成物硬化來獲得之硬化膜的圖案形狀更優異。 分散劑可單獨使用1種,亦可同時使用2種以上。當同時使用2種以上的分散劑時,合計量在上述範圍內為較佳。When the curable composition contains a dispersant, the content of the dispersant is preferably 0.05 to 50% by mass, more preferably 0.05 to 30% by mass, based on the total solid content of the curable composition. When content of a dispersing agent is 0.05-30 mass % with respect to the total solid content of a curable composition, the pattern shape of the cured film obtained by hardening a curable composition is more excellent. A dispersing agent may be used individually by 1 type, and may use 2 or more types together. When two or more dispersants are used at the same time, the total amount is preferably within the above range.

作為分散劑,例如能夠適當選擇公知的顏料分散劑來使用。其中,高分子化合物為較佳。 作為分散劑,可舉出高分子分散劑〔例如,聚醯胺胺及其鹽、多羧酸及其鹽、高分子量不飽和酸酯、改質聚胺基甲酸酯、改質聚酯、改質聚(甲基)丙烯酸酯、(甲基)丙烯酸系共聚物、萘磺酸甲醛縮合物〕、聚氧乙烯烷基磷酸酯、聚氧乙烯烷基胺及顏料衍生物等。 高分子化合物依其結構,可進一步分類為直鏈狀高分子、末端改質型高分子、接枝型高分子及嵌段型高分子。As the dispersant, for example, a known pigment dispersant can be appropriately selected and used. Among them, polymer compounds are preferred. As the dispersing agent, polymer dispersing agents [for example, polyamide amine and its salt, polycarboxylic acid and its salt, high molecular weight unsaturated acid ester, modified polyurethane, modified polyester, Modified poly(meth)acrylate, (meth)acrylic copolymer, naphthalenesulfonic acid formaldehyde condensate], polyoxyethylene alkyl phosphate, polyoxyethylene alkyl amine and pigment derivatives, etc. Polymer compounds can be further classified into linear polymers, terminal-modified polymers, graft-type polymers and block-type polymers according to their structures.

(高分子化合物) 高分子化合物吸附於著色劑(例如,無機顏料)等被分散體的表面,發揮防止被分散體的再凝聚之作用。故,含有針對顏料表面的固定部位之末端改質型高分子、接枝型高分子及嵌段型高分子為較佳。(Polymer compound) The polymer compound is adsorbed on the surface of the to-be-dispersed body such as colorants (for example, inorganic pigments), and plays a role of preventing the re-agglomeration of the to-be-dispersed body. Therefore, it is preferable to contain a terminal-modified polymer, a graft-type polymer, and a block-type polymer that are fixed to the surface of the pigment.

高分子化合物含有包含接枝鏈之結構單元為較佳。本說明書中,“結構單元”的含義與“重複單元”相同。 該種含有包含接枝鏈之結構單元之高分子化合物藉由接枝鏈具有與溶劑的親和性,故係黑色顏料等著色劑的分散性及經時之後的分散穩定性(經時穩定性)優異者。含有包含接枝鏈之結構單元之高分子化合物藉由接枝鏈的存在,與聚合性化合物或其他能夠同時使用之樹脂等具有親和性。其結果,在鹼顯影中不易生成殘渣。 若接枝鏈變長,則立體排斥效果提高而黑色顏料等的分散性得到提高。另一方面,若接枝鏈過長,則向黑色顏料等著色顏料的吸附力下降,黑色顏料等的分散性處於下降的趨勢。故,接枝鏈為除氫原子以外的原子數為40~10,000者為較佳,除氫原子以外的原子數為50~2,000者為更佳,除氫原子以外的原子數為60~500者為進一步較佳。 其中,接枝鏈表示共聚物的主鏈的根部(從主鏈分支化之基團中與主鏈鍵結之原子)至從主鏈分支化之基團的末端。Preferably, the polymer compound contains a structural unit including a graft chain. In the present specification, the "structural unit" has the same meaning as the "repeating unit". This polymer compound containing a structural unit including a graft chain has affinity with a solvent due to the graft chain, so it is the dispersibility of colorants such as black pigments and the dispersion stability after time (time stability) Excellent. The polymer compound containing a structural unit including a graft chain has affinity with a polymerizable compound or other resins that can be used together due to the presence of the graft chain. As a result, residues are less likely to be generated during alkali development. When the graft chain becomes longer, the steric repulsion effect is improved, and the dispersibility of black pigments and the like is improved. On the other hand, when the graft chain is too long, the adsorption force to color pigments such as black pigments decreases, and the dispersibility of black pigments and the like tends to decrease. Therefore, the graft chains are preferably those having 40 to 10,000 atoms other than hydrogen atoms, more preferably those having 50 to 2,000 atoms other than hydrogen atoms, and those having 60 to 500 atoms other than hydrogen atoms. for further better. Here, the graft chain means the root of the main chain of the copolymer (the atom bonded to the main chain in the group branched from the main chain) to the end of the group branched from the main chain.

接枝鏈含有聚合物結構為較佳,作為該種聚合物結構,例如能夠舉出聚(甲基)丙烯酸酯結構(例如,聚(甲基)丙烯酸結構)、聚酯結構、聚胺基甲酸酯結構、聚脲結構、聚醯胺結構及聚醚結構。 為了提高接枝鏈與溶劑的相互作用性,並藉此提高黑色顏料等的分散性,接枝鏈係含有選自包括聚酯結構、聚醚結構及聚(甲基)丙烯酸酯結構之群組之至少1種之接枝鏈為較佳,含有聚酯結構或聚醚結構的至少任一個之接枝鏈為更佳。It is preferable that the graft chain contains a polymer structure. Examples of such a polymer structure include a poly(meth)acrylate structure (for example, a poly(meth)acrylic structure), a polyester structure, and a polyurethane structure. Ester structure, polyurea structure, polyamide structure and polyether structure. In order to improve the interaction between the graft chain and the solvent, and thereby improve the dispersibility of black pigments, etc., the graft chain contains a structure selected from the group consisting of polyester structure, polyether structure and poly(meth)acrylate structure The graft chain of at least one kind is preferred, and the graft chain containing at least any one of a polyester structure or a polyether structure is more preferred.

作為該種含有接枝鏈之巨單體,並無特別限定,能夠適當使用含有反應性雙鍵性基之巨單體。The graft chain-containing macromonomer is not particularly limited, and a reactive double-bonding group-containing macromonomer can be appropriately used.

作為與高分子化合物所含之包含接枝鏈之結構單元對應,且較佳地用於合成高分子化合物之市售的巨單體,可舉出AA-6(商品名,Toagosei Company, Limited.製造)、AA-10(商品名,Toagosei Company, Limited.製造)、AB-6(商品名,Toagosei Company, Limited.製造)、AS-6(商品名,Toagosei Company, Limited.製造)、AN-6(商品名,Toagosei Company, Limited.製造)、AW-6(商品名,Toagosei Company, Limited.製造)、AA-714(商品名,Toagosei Company, Limited.製造)、AY-707(商品名,Toagosei Company, Limited.製造)、AY-714(商品名,Toagosei Company, Limited.製造)、AK-5(商品名,Toagosei Company, Limited.製造)、AK-30(商品名,Toagosei Company, Limited.製造)、AK-32(商品名,Toagosei Company, Limited.製造)、Blemmer PP-100(商品名,NOF CORPORATION製造)、Blemmer PP-500(商品名,NOF CORPORATION製造)、Blemmer PP-800(商品名,NOF CORPORATION製造)、Blemmer PP-1000(商品名,NOF CORPORATION製造)、Blemmer 55-PET-800(商品名,NOF CORPORATION製造)、Blemmer PME-4000(商品名,NOF CORPORATION製造)、Blemmer PSE-400(商品名,NOF CORPORATION製造)、Blemmer PSE-1300(商品名,NOF CORPORATION製造)、Blemmer 43PAPE-600B(商品名,NOF CORPORATION製造)等。其中,使用AA-6(商品名,Toagosei.Company, Limited.製造)、AA-10(商品名,Toagosei Company, Limited. 製造 )、AB-6(商品名,Toagosei Company, Limited.製造)、AS-6(商品名,Toagosei Company, Limited.製造)、AN-6(商品名,Toagosei Company, Limited.製造)及Blemmer PME-4000(商品名,NOF CORPORATION製造)等為較佳。AA-6 (trade name, Toagosei Company, Limited. manufactured), AA-10 (trade name, manufactured by Toagosei Company, Limited.), AB-6 (trade name, manufactured by Toagosei Company, Limited.), AS-6 (trade name, manufactured by Toagosei Company, Limited.), AN- 6 (trade name, manufactured by Toagosei Company, Limited.), AW-6 (trade name, manufactured by Toagosei Company, Limited.), AA-714 (trade name, manufactured by Toagosei Company, Limited.), AY-707 (trade name, manufactured by Toagosei Company, Limited. Manufactured by Toagosei Company, Limited.), AY-714 (trade name, manufactured by Toagosei Company, Limited.), AK-5 (trade name, manufactured by Toagosei Company, Limited.), AK-30 (trade name, manufactured by Toagosei Company, Limited. manufactured), AK-32 (trade name, manufactured by Toagosei Company, Limited.), Blemmer PP-100 (trade name, manufactured by NOF CORPORATION), Blemmer PP-500 (trade name, manufactured by NOF CORPORATION), Blemmer PP-800 (trade name, manufactured by NOF CORPORATION) name, manufactured by NOF CORPORATION), Blemmer PP-1000 (trade name, manufactured by NOF CORPORATION), Blemmer 55-PET-800 (trade name, manufactured by NOF CORPORATION), Blemmer PME-4000 (trade name, manufactured by NOF CORPORATION), Blemmer PSE -400 (trade name, manufactured by NOF CORPORATION), Blemmer PSE-1300 (trade name, manufactured by NOF CORPORATION), Blemmer 43PAPE-600B (trade name, manufactured by NOF CORPORATION), and the like. Among them, AA-6 (trade name, manufactured by Toagosei Company, Limited.), AA-10 (trade name, manufactured by Toagosei Company, Limited.), AB-6 (trade name, manufactured by Toagosei Company, Limited.), AS -6 (trade name, manufactured by Toagosei Company, Limited.), AN-6 (trade name, manufactured by Toagosei Company, Limited.), Blemmer PME-4000 (trade name, manufactured by NOF CORPORATION) and the like are preferable.

分散劑含有選自包括聚丙烯酸甲酯、聚甲基丙烯酸甲酯及環狀或鏈狀的聚酯之群組之至少1種結構為較佳。分散劑含有選自包括聚丙烯酸甲酯、聚甲基丙烯酸甲酯及鏈狀的聚酯之群組之至少1種結構為更佳。分散劑含有選自包括聚丙烯酸甲酯結構、聚甲基丙烯酸甲酯結構、聚己內酯結構及聚戊內酯結構之群組之至少1種結構為進一步較佳。分散劑可以係在1個分散劑中單獨含有上述結構者,亦可以係在1個分散劑中含有複數個該種結構者。 其中,聚己內酯結構係指作為重複單元含有對ε-己內酯進行開環之結構者。聚戊內酯結構係指作為重複單元含有對δ-戊內酯進行開環之結構者。 作為含有聚己內酯結構之分散劑的具體例,可舉出下述式(1)及下述式(2)中的j及k為5者。並且,作為含有聚戊內酯結構之分散劑的具體例,可舉出下述式(1)及下述式(2)中的j及k為4者。 作為含有聚丙烯酸甲酯結構之分散劑的具體例,可舉出下述式(4)中的X5 為氫原子且R4 為甲基者。並且,作為含有聚甲基丙烯酸甲酯結構之分散劑的具體例,可舉出下述式(4)中的X5 為甲基且R4 為甲基者。Preferably, the dispersant contains at least one structure selected from the group consisting of polymethyl acrylate, polymethyl methacrylate, and cyclic or chain polyester. More preferably, the dispersant contains at least one structure selected from the group consisting of polymethyl acrylate, polymethyl methacrylate and chain polyester. It is further preferable that the dispersant contains at least one structure selected from the group consisting of a polymethyl acrylate structure, a polymethyl methacrylate structure, a polycaprolactone structure and a polyvalerolactone structure. The dispersing agent may contain the above-mentioned structure alone in one dispersing agent, or may contain a plurality of such structures in one dispersing agent. Here, the polycaprolactone structure refers to what contains a structure in which ε-caprolactone is ring-opened as a repeating unit. The polyvalerolactone structure refers to a structure containing ring-opening of δ-valerolactone as a repeating unit. As a specific example of the dispersing agent containing a polycaprolactone structure, the thing in which j and k in following formula (1) and following formula (2) are 5 is mentioned. Moreover, as a specific example of the dispersing agent containing a polyvalerolactone structure, the thing in which j and k in following formula (1) and following formula (2) are 4 is mentioned. As a specific example of the dispersing agent containing a polymethyl acrylate structure, X 5 in the following formula (4) is a hydrogen atom, and R 4 is a methyl group. Moreover, as a specific example of the dispersing agent containing a polymethyl methacrylate structure, X 5 in following formula (4) is a methyl group, and R 4 is a methyl group.

・含有接枝鏈之結構單元 高分子化合物作為含有接枝鏈之結構單元,含有以下述式(1)~式(4)中的任一個表示之結構單元為較佳,含有以下述式(1A)、下述式(2A)、下述式(3A)、下述式(3B)及下述(4)中的任一個表示之結構單元為更佳。・Structural unit containing a graft chain The polymer compound preferably contains a structural unit represented by any one of the following formulae (1) to (4) as a structural unit containing a graft chain, and contains a structural unit represented by the following formula (1A) ), the structural unit represented by any one of the following formula (2A), the following formula (3A), the following formula (3B), and the following formula (4) is more preferable.

[化學式24]

Figure 02_image514
[Chemical formula 24]
Figure 02_image514

式(1)~式(4)中,W1 、W2 、W3 及W4 分別獨立地表示氧原子或NH。W1 、W2 、W3 及W4 為氧原子為較佳。 式(1)~式(4)中,X1 、X2 、X3 、X4 及X5 分別獨立地表示氫原子或1價的有機基。從合成方面的限制的觀點考慮,X1 、X2 、X3 、X4 及X5 分別獨立地為氫原子或碳數(碳原子數)1~12的烷基為較佳,分別獨立地為氫原子或甲基為更佳,甲基為進一步較佳。In Formulas (1) to (4), W 1 , W 2 , W 3 and W 4 each independently represent an oxygen atom or NH. Preferably, W 1 , W 2 , W 3 and W 4 are oxygen atoms. In formulas (1) to (4), X 1 , X 2 , X 3 , X 4 and X 5 each independently represent a hydrogen atom or a monovalent organic group. From the viewpoint of limitations in synthesis, it is preferable that X 1 , X 2 , X 3 , X 4 and X 5 are each independently a hydrogen atom or an alkyl group having 1 to 12 carbon atoms (number of carbon atoms), and each independently It is more preferably a hydrogen atom or a methyl group, and even more preferably a methyl group.

式(1)~式(4)中,Y1 、Y2 、Y3 及Y4 分別獨立地表示2價的連結基,連結基的結構方面並無特別的限制。作為以Y1 、Y2 、Y3 及Y4 表示之2價的連結基,具體而言,可舉出下述(Y-1)~(Y-21)的連結基等為例。下述所示之結構中,A、B分別表示鍵結部位。下述所示之結構中,從合成的簡便性考慮,(Y-2)或(Y-13)為更佳。In Formulas (1) to (4), Y 1 , Y 2 , Y 3 and Y 4 each independently represent a divalent linking group, and the structure of the linking group is not particularly limited. Specific examples of the divalent linking group represented by Y 1 , Y 2 , Y 3 and Y 4 include the following (Y-1) to (Y-21). In the structures shown below, A and B respectively represent bonding sites. Among the structures shown below, (Y-2) or (Y-13) are more preferable in view of the simplicity of synthesis.

[化學式25]

Figure 02_image516
[Chemical formula 25]
Figure 02_image516

式(1)~式(4)中,Z1 、Z2 、Z3 及Z4 分別獨立地表示1價的有機基。有機基的結構並無特別限定,具體而言,可舉出烷基、羥基、烷氧基、芳氧基、雜芳氧基、烷硫醚基、芳硫醚基、雜芳硫醚基及胺基等。該些中,作為以Z1 、Z2 、Z3 及Z4 表示之有機基,尤其從提高分散性的觀點考慮,含有立體排斥效果者為較佳,分別獨立地為碳數5至24的烷基或烷氧基為更佳,其中,分別獨立地為碳數5至24的分支烷基、碳數5至24的環狀烷基或碳數5至24的烷氧基為進一步較佳。另外,烷氧基中所含之烷基可以係直鏈狀、支鏈狀及環狀中的任一個。In Formulas (1) to (4), Z 1 , Z 2 , Z 3 and Z 4 each independently represent a monovalent organic group. The structure of the organic group is not particularly limited, and specifically, an alkyl group, a hydroxyl group, an alkoxy group, an aryloxy group, a heteroaryloxy group, an alkylsulfide group, an arylsulfide group, a heteroarylsulfide group, and Amines, etc. Among these, as the organic groups represented by Z 1 , Z 2 , Z 3 and Z 4 , those having a steric repulsion effect are preferred from the viewpoint of improving dispersibility, and each independently has 5 to 24 carbon atoms. Alkyl group or alkoxy group is more preferable, wherein, branched alkyl group with carbon number of 5 to 24, cyclic alkyl group with carbon number of 5 to 24 or alkoxy group with carbon number of 5 to 24 is more preferable. . In addition, the alkyl group contained in the alkoxy group may be linear, branched, or cyclic.

式(1)~式(4)中,n、m、p及q分別獨立地為1至500的整數。 式(1)及式(2)中,j及k分別獨立地表示2~8的整數。從硬化性組成物的經時穩定性及顯影性的觀點考慮,式(1)及式(2)中的j及k為4~6的整數為較佳,5為最佳。In Formulas (1) to (4), n, m, p, and q are each independently an integer of 1 to 500. In Formula (1) and Formula (2), j and k each independently represent an integer of 2 to 8. From the viewpoint of the stability over time and developability of the curable composition, j and k in the formulas (1) and (2) are preferably integers of 4 to 6, and 5 is the most optimal.

式(3)中,R3 表示分支或直鏈的伸烷基,碳數1~10的伸烷基為較佳,碳數2或3的伸烷基為更佳。p為2~500時,存在複數個之R3 可彼此相同亦可不同。 式(4)中,R4 表示氫原子或1價的有機基,作為該1價的有機基,結構上並無特別限定。R4 為氫原子、烷基、芳基或雜芳基為較佳,為氫原子或烷基為更佳。R4 為烷基時,碳數1~20的直鏈狀烷基、碳數3~20的分支狀烷基或碳數5~20的環狀烷基為較佳,碳數1~20的直鏈狀烷基為更佳,碳數1~6的直鏈狀烷基為進一步較佳。式(4)中,q為2~500時,接枝共聚物中存在複數個之X5 及R4 可彼此相同亦可不同。In formula (3), R 3 represents a branched or straight-chain alkylene group, preferably an alkylene group having 1 to 10 carbon atoms, and more preferably an alkylene group having 2 or 3 carbon atoms. When p is 2 to 500, the plural R 3s present may be the same or different from each other. In formula (4), R 4 represents a hydrogen atom or a monovalent organic group, and the monovalent organic group is not particularly limited in structure. R 4 is preferably a hydrogen atom, an alkyl group, an aryl group or a heteroaryl group, more preferably a hydrogen atom or an alkyl group. When R 4 is an alkyl group, a straight-chain alkyl group having 1 to 20 carbon atoms, a branched alkyl group having 3 to 20 carbon atoms, or a cyclic alkyl group having 5 to 20 carbon atoms are preferred, and those having 1 to 20 carbon atoms are preferred. A straight-chain alkyl group is more preferable, and a straight-chain alkyl group having 1 to 6 carbon atoms is further preferable. In formula (4), when q is 2 to 500, X 5 and R 4 present in plural in the graft copolymer may be the same or different from each other.

高分子化合物可含有2種以上的不同結構且含有接枝鏈之結構單元。亦即,高分子化合物的分子中可以包含結構互不相同之以式(1)~式(4)表示之結構單元,式(1)~式(4)中,n、m、p及q分別表示2以上的整數時,式(1)及式(2)中,可在側鏈中包含j及k互不相同之結構,式(3)及式(4)中,分子內存在複數個之R3 、R4 及X5 可彼此相同亦可不同。The polymer compound may contain two or more different structures and a structural unit of a graft chain. That is, the molecule of the polymer compound may contain structural units represented by formulae (1) to (4) having different structures from each other. In formulae (1) to (4), n, m, p, and q are respectively When representing an integer of 2 or more, in the formula (1) and the formula (2), a structure in which j and k are different from each other may be included in the side chain, and in the formula (3) and the formula (4), there are plural ones in the molecule. R 3 , R 4 and X 5 may be the same or different from each other.

作為以式(1)表示之結構單元,從硬化性組成物的經時穩定性及顯影性的觀點考慮,以下述式(1A)表示之結構單元為更佳。 作為以式(2)表示之結構單元,從硬化性組成物的經時穩定性及顯影性的觀點考慮,以下述式(2A)表示之結構單元為更佳。As the structural unit represented by the formula (1), the structural unit represented by the following formula (1A) is more preferable from the viewpoint of the stability over time and developability of the curable composition. As the structural unit represented by the formula (2), the structural unit represented by the following formula (2A) is more preferable from the viewpoint of the stability over time and developability of the curable composition.

[化學式26]

Figure 02_image518
[Chemical formula 26]
Figure 02_image518

式(1A)中,X1 、Y1 、Z1 及n的含義與式(1)中的X1 、Y1 、Z1 及n相同,較佳範圍亦相同。式(2A)中,X2 、Y2 、Z2 及m的含義與式(2)中的X2 、Y2 、Z2 及m相同,較佳範圍亦相同。In formula (1A), X 1 , Y 1 , Z 1 and n have the same meanings as X 1 , Y 1 , Z 1 and n in formula (1), and the preferred ranges are also the same. In formula (2A), X 2 , Y 2 , Z 2 and m have the same meanings as X 2 , Y 2 , Z 2 and m in formula (2), and the preferred ranges are also the same.

作為以式(3)表示之結構單元,從硬化性組成物的經時穩定性及顯影性的觀點考慮,以下述式(3A)或式(3B)表示之結構單元為更佳。As the structural unit represented by the formula (3), the structural unit represented by the following formula (3A) or formula (3B) is more preferable from the viewpoint of the stability over time and developability of the curable composition.

[化學式27]

Figure 02_image520
[Chemical formula 27]
Figure 02_image520

式(3A)或(3B)中,X3 、Y3 、Z3 及p的含義與式(3)中的X3 、Y3 、Z3 及p相同,較佳範圍亦相同。In formula (3A) or (3B), X 3 , Y 3 , Z 3 and p have the same meanings as X 3 , Y 3 , Z 3 and p in formula (3), and the preferred ranges are also the same.

高分子化合物作為含有接枝鏈之結構單元,含有以式(1A)表示之結構單元為更佳。As a structural unit containing a graft chain, the polymer compound preferably contains a structural unit represented by formula (1A).

高分子化合物中,含有接枝鏈之結構單元(例如,以上述式(1)~式(4)表示之結構單元)以質量換算,相對於高分子化合物的總質量,以2~90%的範圍包含為較佳,以5~30%的範圍包含為更佳。若在該範圍內包含含有接枝鏈之結構單元,則黑色顏料的分散性較高,形成硬化膜時的顯影性良好。In the polymer compound, the structural unit containing the graft chain (for example, the structural unit represented by the above-mentioned formula (1) to formula (4)) is 2 to 90% of the total mass of the polymer compound in terms of mass. It is preferable to be included in the range, and it is more preferable to be included in the range of 5 to 30%. When the structural unit containing a graft chain is included in this range, the dispersibility of the black pigment is high, and the developability at the time of forming a cured film is favorable.

・疏水性結構單元 高分子化合物含有與含有接枝鏈之結構單元不同(亦即,並不相當於含有接枝鏈之結構單元)之疏水性結構單元為較佳。其中,本說明書中,疏水性結構單元係不具有酸基(例如,羧酸基、磺酸基、磷酸基、酚性羥基等)之結構單元。・Hydrophobic structural unit It is preferable for the polymer compound to contain a hydrophobic structural unit different from the structural unit containing the graft chain (that is, not equivalent to the structural unit containing the graft chain). However, in this specification, the hydrophobic structural unit is a structural unit which does not have an acid group (for example, a carboxylic acid group, a sulfonic acid group, a phosphoric acid group, a phenolic hydroxyl group, etc.).

疏水性結構單元係源自(對應)ClogP值為1.2以上的化合物(單體)之結構單元為較佳,係源自ClogP值為1.2~8的化合物之結構單元為更佳。藉此,能夠更確實地顯現本發明的效果。The hydrophobic structural unit is preferably a structural unit derived from (corresponding to) a compound (monomer) having a ClogP value of 1.2 or more, and more preferably a structural unit derived from a compound having a ClogP value of 1.2 to 8. Thereby, the effect of this invention can be exhibited more reliably.

ClogP值係藉由能夠從Daylight Chemical Information System, Inc.獲得之程序“CLOGP”計算出之值。該程序提供藉由Hansch, Leo的片段方法(Fragment Approach)(參閱下述文獻)計算出之“計算logP”的值。片段方法依據化合物的化學結構,將化學結構分割為部分結構(片段),合計分配於該片段之logP貢獻量,藉此推算化合物的logP值。其詳細內容記載於以下文獻中。本說明書中,ClogP值表示使用藉由程序CLOGP v4.82計算出之值。 A. J. Leo, Comprehensive Medicinal Chemistry, Vol.4, C. Hansch, P. G. Sammnens, J. B. Taylor and C. A. Ramsden, Eds., p.295, Pergamon Press, 1990 C. Hansch & A. J. Leo. SUbstituent Constants For Correlation Analysis in Chemistry and Biology. John Wiley & Sons. A.J. Leo. Calculating logPoct from structure. Chem. Rev., 93, 1281-1306, 1993.The ClogP value is the value calculated by the program "CLOGP" available from Daylight Chemical Information System, Inc. This program provides the "calculated logP" value calculated by the Fragment Approach of Hansch, Leo (see below). The fragment method divides the chemical structure into partial structures (fragments) based on the chemical structure of the compound, and totals the logP contribution allocated to the fragment to calculate the logP value of the compound. The details are described in the following documents. In this specification, the ClogP value means using the value calculated by the program CLOGP v4.82. A. J. Leo, Comprehensive Medicinal Chemistry, Vol.4, C. Hansch, P. G. Sammnens, J. B. Taylor and C. A. Ramsden, Eds., p.295, Pergamon Press, 1990 C. Hansch & A. J. Leo. SUbstituent Constants For Correlation Analysis in Chemistry and Biology. John Wiley & Sons. A.J. Leo. Calculating logPoct from structure. Chem. Rev., 93, 1281-1306, 1993.

logP表示分配係數P(Partition Coefficient)的常用對數,係以定量的數值表示某一有機化合物在油(通常為1-辛醇)與水的2相系的平衡中如何分配之物理性質值,由以下式表示。 logP=log(Coil/Cwater) 式中,Coil表示油相中的化合物的莫耳濃度,Cwater表示水相中的化合物的莫耳濃度。 若logP的值夾著0而正向(plus)增大,則表示油溶性增加,若絕對值負向(minus)增大,則表示水溶性增加,與有機化合物的水溶性有負相關,作為估計有機化合物的親疏水性之參數而廣泛利用。logP represents the common logarithm of the partition coefficient P (Partition Coefficient), which is a quantitative value that expresses how an organic compound is distributed in the equilibrium of the two-phase system of oil (usually 1-octanol) and water. It is represented by the following formula. logP=log(Coil/Cwater) In the formula, Coil represents the molar concentration of the compound in the oil phase, and Cwater represents the molar concentration of the compound in the water phase. If the value of logP increases in the positive direction (plus) between 0, it means that the oil solubility increases, and if the absolute value increases in the negative direction (minus), it means that the water solubility increases, which has a negative correlation with the water solubility of organic compounds, as It is widely used as a parameter to estimate the hydrophilicity and hydrophobicity of organic compounds.

高分子化合物作為疏水性結構單元,含有選自源自以下述式(i)~(iii)表示之單體的結構單元之1種以上的結構單元為較佳。The polymer compound preferably contains, as a hydrophobic structural unit, one or more structural units selected from structural units derived from monomers represented by the following formulae (i) to (iii).

[化學式28]

Figure 02_image522
[Chemical formula 28]
Figure 02_image522

式(i)~(iii)中,R1 、R2 及R3 分別獨立地表示氫原子、鹵素原子(例如,氟原子、氯原子、溴原子等)或碳數為1~6的烷基(例如,甲基、乙基、丙基等)。 R1 、R2 及R3 較佳為氫原子或碳數為1~3的烷基為較佳,更佳為氫原子或甲基為更佳。R2 及R3 為氫原子為進一步較佳。 X表示氧原子(-O-)或亞胺基(-NH-),氧原子為較佳。In formulae (i) to (iii), R 1 , R 2 and R 3 each independently represent a hydrogen atom, a halogen atom (for example, a fluorine atom, a chlorine atom, a bromine atom, etc.) or an alkyl group having 1 to 6 carbon atoms (eg methyl, ethyl, propyl, etc.). R 1 , R 2 and R 3 are preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, more preferably a hydrogen atom or a methyl group. It is more preferable that R 2 and R 3 are hydrogen atoms. X represents an oxygen atom (-O-) or an imino group (-NH-), and an oxygen atom is preferred.

L為單鍵或2價的連結基。作為2價的連結基,可舉出2價的脂肪族基(例如,伸烷基、取代伸烷基、伸烯基、取代伸烯基、伸炔基、取代伸炔基)、2價的芳香族基(例如,伸芳基、取代伸芳基)、2價的雜環基、氧原子(-O-)、硫原子(-S-)、亞胺基(-NH-)、取代亞胺基(-NR31 -,其中,R31 為脂肪族基、芳香族基或雜環基)、羰基(-CO-)及它們的組合等。L is a single bond or a divalent linking group. The divalent linking group includes a divalent aliphatic group (eg, an alkylene group, a substituted alkylene group, an alkenylene group, a substituted alkenylene group, an alkynylene group, a substituted alkynylene group), a divalent Aromatic group (for example, aryl-extended group, substituted aryl-extended group), divalent heterocyclic group, oxygen atom (-O-), sulfur atom (-S-), imino group (-NH-), substituted alkylene An amine group (-NR 31 -, wherein R 31 is an aliphatic group, an aromatic group or a heterocyclic group), a carbonyl group (-CO-), a combination thereof, and the like.

2價的脂肪族基可具有環狀結構或分支結構。脂肪族基的碳數為1~20為較佳,1~15為更佳,1~10為進一步較佳。脂肪族基可以是不飽和脂肪族基,亦可以是飽和脂肪族基,飽和脂肪族基為較佳。並且,脂肪族基可具有取代基。取代基的例子可舉出鹵素原子、芳香族基及雜環基等。The divalent aliphatic group may have a cyclic structure or a branched structure. The carbon number of the aliphatic group is preferably 1 to 20, more preferably 1 to 15, and even more preferably 1 to 10. The aliphatic group may be an unsaturated aliphatic group or a saturated aliphatic group, and a saturated aliphatic group is preferred. Also, the aliphatic group may have a substituent. As an example of a substituent, a halogen atom, an aromatic group, a heterocyclic group, etc. are mentioned.

2價的芳香族基的碳數為6~20為較佳,6~15為更佳,6~10為進一步較佳。芳香族基可具有取代基。取代基的例子可舉出鹵素原子、脂肪族基、芳香族基及雜環基等。The number of carbon atoms of the divalent aromatic group is preferably 6 to 20, more preferably 6 to 15, and even more preferably 6 to 10. The aromatic group may have a substituent. Examples of the substituent include a halogen atom, an aliphatic group, an aromatic group, a heterocyclic group, and the like.

2價的雜環基作為雜環含有5員環或6員環為較佳。雜環上可稠合有其他雜環、脂肪族環或芳香族環。雜環基可具有取代基。作為取代基的例子,可舉出鹵素原子、羥基、氧代基(=O)、硫代基(=S)、亞胺基(=NH)、取代亞胺基(=N-R32 ,其中,R32 為脂肪族基、芳香族基或雜環基)、脂肪族基、芳香族基或雜環基。The divalent heterocyclic group preferably contains a 5-membered ring or a 6-membered ring as a heterocyclic ring. The heterocycle may be condensed with other heterocycles, aliphatic rings or aromatic rings. The heterocyclic group may have a substituent. Examples of the substituent include a halogen atom, a hydroxyl group, an oxo group (=O), a thio group (=S), an imino group (=NH), a substituted imino group (=NR 32 , wherein R 32 is aliphatic, aromatic or heterocyclic), aliphatic, aromatic or heterocyclic.

L為單鍵、伸烷基或含有氧化烯結構之2價的連結基為較佳。氧化烯結構為氧乙烯結構或氧丙烯結構為更佳。L可包含重複含有2個以上的氧化烯結構之聚氧化烯結構。作為聚氧化烯結構,聚氧乙烯結構或聚氧丙烯結構為較佳。聚氧乙烯結構以-(OCH2 CH2 )n-表示,n為2以上的整數為較佳,2~10的整數為更佳。Preferably, L is a single bond, an alkylene group, or a divalent linking group containing an oxyalkylene structure. More preferably, the oxyalkylene structure is an oxyethylene structure or an oxypropylene structure. L may contain a polyoxyalkylene structure repeatedly containing two or more oxyalkylene structures. As the polyoxyalkylene structure, a polyoxyethylene structure or a polyoxypropylene structure is preferable. The polyoxyethylene structure is represented by -(OCH 2 CH 2 )n-, and n is preferably an integer of 2 or more, and more preferably an integer of 2 to 10.

Z可舉出脂肪族基(例如,烷基、取代烷基、不飽和烷基、取代不飽和烷基)、芳香族基(例如,芳基、取代芳基、伸芳基、取代伸芳基)、雜環基或它們的組合。該些基團中可包含氧原子(-O-)、硫原子(-S-)、亞胺基(-NH-)、取代亞胺基(-NR31 -,其中,R31 為脂肪族基、芳香族基或雜環基)、羰基(-CO-)。Z includes aliphatic groups (for example, alkyl groups, substituted alkyl groups, unsaturated alkyl groups, substituted unsaturated alkyl groups), aromatic groups (for example, aryl groups, substituted aryl groups, aryl groups, substituted aryl groups) ), heterocyclyl, or a combination thereof. These groups may contain oxygen atom (-O-), sulfur atom (-S-), imino group (-NH-), substituted imino group (-NR 31 -, wherein R 31 is an aliphatic group , aromatic or heterocyclic group), carbonyl group (-CO-).

脂肪族基可具有環狀結構或分支結構。脂肪族基的碳數為1~20為較佳,1~15為更佳,1~10為進一步較佳。脂肪族基中還包含環集合烴基、交聯環式烴基,作為環集合烴基的例子,包含雙環己基、全氫萘基、聯苯基及4-環己基苯基等。作為交聯環式烴環,例如可舉出蒎烷(pinane)、莰烷(bornane)、降蒎烷(norpinane)、降莰烷(norbornane)、雙環辛烷環(雙環[2.2.2]辛烷環及雙環[3.2.1]辛烷環等)等2環式烴環、高布雷烷(homobledane)、金剛烷、三環[5.2.1.02,6 ]癸烷及三環[4.3.1.12,5 ]十一烷環等3環式烴環、以及四環[4.4.0.12,5 .17,10 ]十二烷及全氫-1,4-亞甲基-5,8-亞甲基萘環等4環式烴環等。交聯環式烴環中還包含稠環式烴環,例如,全氫萘(十氫萘)、全氫蒽、全氫菲、全氫苊、全氫茀、全氫茚及全氫葩環等稠合有複數個5~8員環烷烴環之稠環。 與不飽和脂肪族基相比,脂肪族基為飽和脂肪族基為較佳。脂肪族基可具有取代基。取代基的例子可舉出鹵素原子、芳香族基及雜環基。其中,脂肪族基作為取代基不具有酸基。The aliphatic group may have a cyclic structure or a branched structure. The carbon number of the aliphatic group is preferably 1 to 20, more preferably 1 to 15, and even more preferably 1 to 10. The aliphatic group also includes a ring-assembled hydrocarbon group and a cross-linked cyclic hydrocarbon group, and examples of the ring-assembled hydrocarbon group include a bicyclohexyl group, a perhydronaphthyl group, a biphenyl group, and a 4-cyclohexylphenyl group. Examples of the cross-linked cyclic hydrocarbon ring include pinane, bornane, norpinane, norbornane, bicyclooctane (bicyclo[2.2.2]octane) 2-cyclic hydrocarbon rings such as alkane ring and bicyclo[3.2.1]octane ring, etc.), homobledane, adamantane, tricyclo[5.2.1.0 2,6 ]decane and tricyclo[4.3.1.1 2,5 ] 3-cyclic hydrocarbon rings such as undecane ring, and tetracyclo[4.4.0.1 2,5.1 7,10 ] dodecane and perhydro-1,4-methylene-5,8- 4-cyclic hydrocarbon rings such as methylene naphthalene ring, etc. The cross-linked cyclic hydrocarbon ring also includes fused cyclic hydrocarbon rings, for example, perhydronaphthalene (decahydronaphthalene), perhydroanthracene, perhydrophenanthrene, perhydroacenaphthene, perhydroindene, perhydroindene and perhydropyridine It is a fused ring with a plurality of 5-8 membered cycloalkane rings. The aliphatic group is preferably a saturated aliphatic group rather than an unsaturated aliphatic group. The aliphatic group may have a substituent. Examples of the substituent include a halogen atom, an aromatic group, and a heterocyclic group. However, an aliphatic group does not have an acid group as a substituent.

芳香族基的碳數為6~20為較佳,6~15為更佳,6~10為進一步較佳。芳香族基可具有取代基。取代基的例子可舉出鹵素原子、脂肪族基、芳香族基及雜環基。其中,芳香族基作為取代基不具有酸基。The number of carbon atoms of the aromatic group is preferably 6 to 20, more preferably 6 to 15, and even more preferably 6 to 10. The aromatic group may have a substituent. Examples of the substituent include halogen atoms, aliphatic groups, aromatic groups, and heterocyclic groups. However, an aromatic group does not have an acid group as a substituent.

雜環基作為雜環含有5員環或6員環為較佳。雜環上可稠合有其他雜環、脂肪族環或芳香族環。雜環基可具有取代基。作為取代基的例子,可舉出鹵素原子、羥基、氧代基(=O)、硫代基(=S)、亞胺基(=NH)、取代亞胺基(=N-R32 ,其中,R32 為脂肪族基、芳香族基或雜環基)、脂肪族基、芳香族基及雜環基。其中,雜環基作為取代基不具有酸基。The heterocyclic group preferably contains a 5-membered ring or a 6-membered ring as a heterocyclic ring. The heterocycle may be condensed with other heterocycles, aliphatic rings or aromatic rings. The heterocyclic group may have a substituent. Examples of the substituent include a halogen atom, a hydroxyl group, an oxo group (=O), a thio group (=S), an imino group (=NH), a substituted imino group (=NR 32 , wherein R 32 is aliphatic group, aromatic group or heterocyclic group), aliphatic group, aromatic group and heterocyclic group. However, the heterocyclic group does not have an acid group as a substituent.

式(iii)中,R4 、R5 及R6 分別獨立地表示氫原子、鹵素原子(例如,氟原子、氯原子及溴原子等)、碳數為1~6的烷基(例如,甲基、乙基、丙基等)、Z或L-Z。其中,L及Z的含義與上述中的L及Z相同。作為R4 、R5 及R6 ,氫原子或碳數為1~3的烷基為較佳,氫原子為更佳。In formula (iii), R 4 , R 5 and R 6 each independently represent a hydrogen atom, a halogen atom (for example, a fluorine atom, a chlorine atom, a bromine atom, etc.), an alkyl group having 1 to 6 carbon atoms (for example, a methyl group). group, ethyl, propyl, etc.), Z or LZ. Here, L and Z have the same meanings as L and Z described above. As R 4 , R 5 and R 6 , a hydrogen atom or an alkyl group having 1 to 3 carbon atoms is preferable, and a hydrogen atom is more preferable.

本發明中,作為以上述通式(i)表示之單體,係R1 、R2 及R3 為氫原子或甲基、L為單鍵或伸烷基或者包含氧化烯結構之2價的連結基、X為氧原子或亞胺基、Z為脂肪族基、雜環基或芳香族基之化合物為較佳。 作為以式(ii)表示之單體,係R1 為氫原子或甲基、L為伸烷基、Z為脂肪族基、雜環基或芳香族基之化合物為較佳。 作為以式(iii)表示之單體,係R4 、R5 及R6 為氫原子或甲基、Z為脂肪族基、雜環基或芳香族基之化合物為較佳。In the present invention, as the monomer represented by the above-mentioned general formula (i), R 1 , R 2 and R 3 are hydrogen atoms or methyl groups, L is a single bond or an alkylene group, or a divalent monomer including an oxyalkylene structure. A compound in which a linking group, X is an oxygen atom or an imino group, and Z is an aliphatic group, a heterocyclic group or an aromatic group is preferable. The monomer represented by the formula (ii) is preferably a compound in which R 1 is a hydrogen atom or a methyl group, L is an alkylene group, and Z is an aliphatic group, a heterocyclic group or an aromatic group. The monomer represented by the formula (iii) is preferably a compound in which R 4 , R 5 and R 6 are hydrogen atoms or methyl groups, and Z is an aliphatic group, a heterocyclic group or an aromatic group.

作為以式(i)~(iii)表示之代表性化合物的例子,可舉出選自丙烯酸酯類、甲基丙烯酸酯類及苯乙烯類等之自由基聚合性化合物。 作為以式(i)~(iii)表示之代表性化合物的例子,能夠參閱日本特開2013-249417號公報的0089~0093段中記載之化合物,該些內容編入本說明書中。Examples of representative compounds represented by formulae (i) to (iii) include radically polymerizable compounds selected from the group consisting of acrylates, methacrylates, and styrenes. As examples of the representative compounds represented by the formulae (i) to (iii), the compounds described in paragraphs 0089 to 0093 of JP-A No. 2013-249417 can be referred to, the contents of which are incorporated in the present specification.

高分子化合物中,疏水性結構單元以質量換算,相對於高分子化合物的總質量,以10~90%的範圍包含為較佳,以20~80%的範圍包含為更佳。藉由含量在上述範圍內,可實現良好的圖案形成。In the polymer compound, the hydrophobic structural unit is preferably contained in the range of 10 to 90%, and more preferably contained in the range of 20 to 80%, in terms of mass, relative to the total mass of the polymer compound. When the content is within the above range, favorable pattern formation can be achieved.

・可與黑色顏料等著色劑形成相互作用之官能基 高分子化合物能夠導入可與黑色顏料等著色劑形成相互作用之官能基。其中,高分子化合物還包含含有可與黑色顏料等著色劑形成相互作用之官能基之結構單元為較佳。 作為可與該黑色顏料等著色劑形成相互作用之官能基,例如可舉出酸基、鹼性基、配位性基及具有反應性之官能基等。 當高分子化合物含有酸基、鹼性基、配位性基或具有反應性之官能基時,分別含有包含酸基之結構單元、含有鹼性基之結構單元、含有配位性基之結構單元或含有反應性之結構單元為較佳。 尤其,高分子化合物進一步含有羧酸基等鹼可溶性基作為酸基,藉此能夠對高分子化合物賦予用於基於鹼顯影之圖案形成的顯影性。 亦即,藉由向高分子化合物導入鹼可溶性基,硬化性組成物中,作為有助於黑色顏料等著色劑的分散之分散劑的高分子化合物具有鹼可溶性。含有該種高分子化合物之硬化性組成物成為曝光部的遮光性優異者,且未曝光部的鹼顯影性得到提高。 藉由高分子化合物具有含有酸基之結構單元,高分子化合物成為容易與溶劑整合且塗佈性亦提高之趨勢。 推測這是因為,含有酸基之結構單元中的酸基容易與黑色顏料等著色劑相互作用,高分子化合物使黑色顏料等著色劑穩定地分散,並且使黑色顏料等著色劑分散之高分子化合物的黏度變低,從而高分子化合物本身亦容易穩定地分散。・Functional groups that can interact with colorants such as black pigments The polymer compounds can introduce functional groups that can interact with colorants such as black pigments. Among them, it is preferable that the polymer compound further contains a structural unit containing a functional group that can interact with colorants such as black pigments. As a functional group which can interact with coloring agents, such as this black pigment, an acid group, a basic group, a coordinating group, a reactive functional group, etc. are mentioned, for example. When the polymer compound contains an acid group, a basic group, a coordinating group or a reactive functional group, it contains a structural unit containing an acid group, a structural unit containing a basic group, and a structural unit containing a coordinating group, respectively. Or it is preferable to contain a reactive structural unit. In particular, when the polymer compound further contains an alkali-soluble group such as a carboxylic acid group as an acid group, developability for pattern formation by alkali development can be imparted to the polymer compound. That is, by introducing an alkali-soluble group into the polymer compound, in the curable composition, the polymer compound serving as a dispersant that contributes to the dispersion of colorants such as black pigments has alkali solubility. The curable composition containing such a polymer compound is excellent in the light-shielding property of the exposed part, and the alkali developability of the unexposed part is improved. Since the polymer compound has a structural unit containing an acid group, the polymer compound tends to be easily integrated with a solvent and the applicability is also improved. It is presumed that this is because the acid group in the structural unit containing the acid group easily interacts with colorants such as black pigments, the polymer compound stably disperses colorants such as black pigments, and the polymer compounds that disperse colorants such as black pigments The viscosity becomes lower, so that the polymer compound itself is easily and stably dispersed.

含有作為酸基的鹼可溶性基之結構單元可以為與含有上述接枝鏈之結構單元相同的結構單元,亦可以為不同的結構單元,但為與上述疏水性結構單元不同的結構單元(亦即,並不相當於上述疏水性結構單元)。The structural unit containing the alkali-soluble group as an acid group may be the same structural unit as the structural unit containing the above-mentioned graft chain, or may be a different structural unit, but is a structural unit different from the above-mentioned hydrophobic structural unit (ie. , not equivalent to the above hydrophobic structural units).

作為可與黑色顏料等著色劑形成相互作用之官能基亦即酸基,例如有羧酸基、磺酸基、磷酸基或酚性羥基等,羧酸基、磺酸基及磷酸基中的至少1種為較佳,從針對黑色顏料等著色劑的吸附力良好且著色劑的分散性較高之角度考慮,羧酸基為更佳。 亦即,高分子化合物還具有含有羧酸基、磺酸基及磷酸基中的至少1種之結構單元為較佳。Examples of functional groups that can interact with colorants such as black pigments, that is, acid groups, include carboxylic acid groups, sulfonic acid groups, phosphoric acid groups, or phenolic hydroxyl groups. At least one of carboxylic acid groups, sulfonic acid groups, and phosphoric acid groups One type is preferable, and the carboxylic acid group is more preferable from the viewpoints of good adsorption force for colorants such as black pigments and high dispersibility of the colorant. That is, it is preferable that the polymer compound further has a structural unit containing at least one of a carboxylic acid group, a sulfonic acid group, and a phosphoric acid group.

高分子化合物可具有1種或2種以上的含有酸基之結構單元。 高分子化合物可含有具有酸基之結構單元,亦可不含有前述結構單元,當含有時,具有酸基之結構單元的含量以質量換算,相對於高分子化合物的總質量,為5~80%為較佳,從抑制基於鹼顯影之圖像強度的損傷之觀點考慮,更佳為10~60%。The polymer compound may have one or two or more structural units containing an acid group. The polymer compound may contain a structural unit with an acid group, or may not contain the aforementioned structural unit. When it does, the content of the structural unit with an acid group is converted by mass relative to the total mass of the polymer compound. Preferably, it is 10 to 60% from a viewpoint of suppressing the damage of the image intensity by alkali development.

作為可與黑色顏料等著色劑形成相互作用之官能基亦即鹼性基,例如有一級胺基、二級胺基、三級胺基、含有N原子之雜環及醯胺基等,從針對黑色顏料等著色劑的吸附力良好且顏料的分散性較高之角度考慮,三級胺基為較佳。高分子化合物能夠含有1種或2種以上的該些鹼性基。 高分子化合物可含有具有鹼性基之結構單元,亦可不含有前述結構單元,當含有時,具有鹼性基之結構單元的含量以質量換算,相對於高分子化合物的總質量,0.01%以上且50%以下為較佳,從抑制阻礙顯影性之觀點考慮,0.01%以上且30%以下為更佳。As functional groups that can interact with colorants such as black pigments, that is, basic groups, there are, for example, primary amine groups, secondary amine groups, tertiary amine groups, heterocycles containing N atoms, and amide groups. The tertiary amine group is preferred from the viewpoint of good adsorption force of colorants such as black pigments and high dispersibility of the pigment. The polymer compound can contain one or more of these basic groups. The polymer compound may contain a structural unit with a basic group, or may not contain the aforementioned structural unit. When it contains, the content of the structural unit with a basic group is converted by mass, relative to the total mass of the polymer compound, 0.01% or more and 50% or less is preferable, and from the viewpoint of suppressing inhibition of developability, 0.01% or more and 30% or less are more preferable.

作為可與黑色顏料等著色劑形成相互作用之官能基亦即配位性基及具有反應性之官能基,例如可舉出乙醯基乙醯氧基、三烷氧基矽基、異氰酸酯基、酸酐及醯氯等。從針對黑色顏料等著色劑的吸附力良好且顏料的分散性較高之角度考慮,乙醯基乙醯氧基為較佳。高分子化合物可具有1種或2種以上的該些基團。 高分子化合物可含有如下結構單元,亦可不含有前述結構單元,其中前述結構單元含有配位性基或含有具有反應性之官能基,當含有時,該些結構單元的含量以質量換算,相對於高分子化合物的總質量,10%以上且80%以下為較佳,從抑制阻礙顯影性之觀點考慮,20%以上且60%以下為更佳。Examples of functional groups that can interact with colorants such as black pigments, that is, coordinating groups and functional groups having reactivity include acetylacetoxyl, trialkoxysilyl, isocyanate, Acid anhydride and acyl chloride, etc. Acetylacetoxy is preferred from the viewpoints of good adsorption force for colorants such as black pigments and high dispersibility of the pigment. The polymer compound may have one kind or two or more kinds of these groups. The polymer compound may contain the following structural units, or may not contain the aforementioned structural units, wherein the aforementioned structural units contain a coordinating group or contain a reactive functional group. The total mass of the polymer compound is preferably 10% or more and 80% or less, and more preferably 20% or more and 60% or less from the viewpoint of suppressing inhibition of developability.

當高分子化合物除了接枝鏈以外還含有可與黑色顏料等著色劑形成相互作用之官能基時,含有上述可與各種黑色顏料等著色劑形成相互作用之官能基即可,並不特別限定該些官能基如何被導入,高分子化合物含有選自源自以下述通式(iv)~(vi)表示之單體的結構單元之1種以上的結構單元為較佳。When the polymer compound contains, in addition to the graft chain, a functional group that can interact with colorants such as black pigments, the functional group that can interact with various colorants such as black pigments may be contained, and the functional group is not particularly limited. How these functional groups are introduced, it is preferable that the polymer compound contains one or more structural units selected from structural units derived from monomers represented by the following general formulae (iv) to (vi).

[化學式29]

Figure 02_image524
[Chemical formula 29]
Figure 02_image524

式(iv)~式(vi)中,R11 、R12 及R13 分別獨立地表示氫原子、鹵素原子(例如,氟原子、氯原子、溴原子等)或碳數為1~6的烷基(例如,甲基、乙基、丙基等)。 式(iv)~式(vi)中,R11 、R12 及R13 較佳為分別獨立地為氫原子或碳數為1~3的烷基,更佳為分別獨立地為氫原子或甲基。通式(iv)中,R12 及R13 分別為氫原子為特佳。In formulas (iv) to (vi), R 11 , R 12 and R 13 each independently represent a hydrogen atom, a halogen atom (for example, a fluorine atom, a chlorine atom, a bromine atom, etc.) or an alkane having 1 to 6 carbon atoms. group (eg, methyl, ethyl, propyl, etc.). In formulas (iv) to (vi), R 11 , R 12 and R 13 are preferably each independently a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, more preferably each independently a hydrogen atom or a methyl group. base. In the general formula (iv), each of R 12 and R 13 is preferably a hydrogen atom.

式(iv)中的X1 表示氧原子(-O-)或亞胺基(-NH-),氧原子為較佳。 式(v)中的Y表示次甲基或氮原子。X 1 in the formula (iv) represents an oxygen atom (-O-) or an imino group (-NH-), and an oxygen atom is preferable. Y in formula (v) represents a methine group or a nitrogen atom.

式(iv)~式(v)中的L1 表示單鍵或2價的連結基。作為2價的連結基的例子,可舉出2價的脂肪族基(例如,伸烷基、取代伸烷基、伸烯基、取代伸烯基、伸炔基及取代伸炔基)、2價的芳香族基(例如,伸芳基及取代伸芳基)、2價的雜環基、氧原子(-O-)、硫原子(-S-)、亞胺基(-NH-)、取代亞胺鍵(-NR31 ’-,其中,R31 ’為脂肪族基、芳香族基或雜環基)、羰基鍵(-CO-)及它們的組合等。L 1 in formulas (iv) to (v) represents a single bond or a divalent linking group. Examples of the divalent linking group include divalent aliphatic groups (eg, alkylene, substituted alkylene, alkenylene, substituted alkenylene, alkynylene, and substituted alkynylene), 2 valent aromatic groups (for example, aryl-extended and substituted aryl-extended groups), divalent heterocyclic groups, oxygen atoms (-O-), sulfur atoms (-S-), imino groups (-NH-), A substituted imine bond (-NR 31 '-, wherein R 31 ' is an aliphatic group, an aromatic group or a heterocyclic group), a carbonyl bond (-CO-), a combination thereof, and the like.

2價的脂肪族基可具有環狀結構或分支結構。脂肪族基的碳數為1~20為較佳,1~15為更佳,1~10為進一步較佳。與不飽和脂肪族基相比,脂肪族基為飽和脂肪族基為較佳。脂肪族基可具有取代基。作為取代基的例子,可舉出鹵素原子、羥基、芳香族基及雜環基。The divalent aliphatic group may have a cyclic structure or a branched structure. The carbon number of the aliphatic group is preferably 1 to 20, more preferably 1 to 15, and even more preferably 1 to 10. The aliphatic group is preferably a saturated aliphatic group rather than an unsaturated aliphatic group. The aliphatic group may have a substituent. As an example of a substituent, a halogen atom, a hydroxyl group, an aromatic group, and a heterocyclic group are mentioned.

2價的芳香族基的碳數為6~20為較佳,6~15為更佳,6~10為進一步較佳。芳香族基可具有取代基。取代基的例子可舉出鹵素原子、羥基、脂肪族基、芳香族基及雜環基。The number of carbon atoms of the divalent aromatic group is preferably 6 to 20, more preferably 6 to 15, and even more preferably 6 to 10. The aromatic group may have a substituent. Examples of the substituent include a halogen atom, a hydroxyl group, an aliphatic group, an aromatic group, and a heterocyclic group.

2價的雜環基作為雜環含有5員環或6員環為較佳。雜環中可稠合有其他雜環、脂肪族環或芳香族環中的1個以上。雜環基可具有取代基。作為取代基的例子,可舉出鹵素原子、羥基、氧代基(=O)、硫代基(=S)、亞胺基(=NH)、取代亞胺基(=N-R32 ,其中,R32 為脂肪族基、芳香族基或雜環基)、脂肪族基、芳香族基及雜環基。The divalent heterocyclic group preferably contains a 5-membered ring or a 6-membered ring as a heterocyclic ring. One or more of other heterocycles, aliphatic rings, or aromatic rings may be condensed into the heterocycle. The heterocyclic group may have a substituent. Examples of the substituent include a halogen atom, a hydroxyl group, an oxo group (=O), a thio group (=S), an imino group (=NH), a substituted imino group (=NR 32 , wherein R 32 is aliphatic group, aromatic group or heterocyclic group), aliphatic group, aromatic group and heterocyclic group.

L1 為單鍵、伸烷基或含有氧化烯結構之2價的連結基為較佳。氧化烯結構為氧乙烯結構或氧丙烯結構為更佳。L1 可包含重複含有2個以上的氧化烯結構之聚氧化烯結構。作為聚氧化烯結構,聚氧乙烯結構或聚氧丙烯結構為較佳。聚氧乙烯結構以-(OCH2 CH2 )n-表示,n為2以上的整數為較佳,2~10的整數為更佳。L 1 is preferably a single bond, an alkylene group or a divalent linking group containing an oxyalkylene structure. More preferably, the oxyalkylene structure is an oxyethylene structure or an oxypropylene structure. L 1 may contain a polyoxyalkylene structure repeatedly containing two or more oxyalkylene structures. As the polyoxyalkylene structure, a polyoxyethylene structure or a polyoxypropylene structure is preferable. The polyoxyethylene structure is represented by -(OCH 2 CH 2 )n-, and n is preferably an integer of 2 or more, and more preferably an integer of 2 to 10.

式(iv)~式(vi)中,Z1 表示除接枝鏈以外可與黑色顏料等著色劑形成相互作用之官能基,羧酸基及三級胺基為較佳,羧酸基為更佳。In formulas (iv) to (vi), Z 1 represents a functional group that can interact with colorants such as black pigments in addition to the graft chain, carboxylic acid groups and tertiary amine groups are preferred, and carboxylic acid groups are more preferred. good.

式(vi)中,R14 、R15 及R16 分別獨立地表示氫原子、鹵素原子(例如,氟原子、氯原子、溴原子等)、碳數為1~6的烷基(例如,甲基、乙基及丙基等)、-Z1 或L1 -Z1 。其中,L1 及Z1 的含義與上述中的L1 及Z1 相同,較佳例亦相同。作為R14 、R15 及R16 ,分別獨立地為氫原子或碳數為1~3的烷基為較佳,氫原子為更佳。In formula (vi), R 14 , R 15 and R 16 each independently represent a hydrogen atom, a halogen atom (for example, a fluorine atom, a chlorine atom, a bromine atom, etc.), an alkyl group having 1 to 6 carbon atoms (for example, a methyl group). group, ethyl group and propyl group, etc.), -Z 1 or L 1 -Z 1 . The meanings of L 1 and Z 1 are the same as those of L 1 and Z 1 in the above, and the preferred examples are also the same. As R 14 , R 15 and R 16 , each independently is preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, more preferably a hydrogen atom.

作為以式(iv)表示之單體,係R11 、R12 及R13 分別獨立地為氫原子或甲基、L1 為伸烷基或含有氧化烯結構之2價的連結基、X1 為氧原子或亞胺基、Z1 為羧酸基之化合物為較佳。 作為以式(v)表示之單體,係R11 為氫原子或甲基、L1 為伸烷基、Z1 為羧酸基、Y為次甲基之化合物為較佳。 而且,作為以式(vi)表示之單體,係R14 、R15 及R16 分別獨立地為氫原子或甲基、L1 為單鍵或伸烷基、Z1 為羧酸基之化合物為較佳。As the monomer represented by the formula (iv), R 11 , R 12 and R 13 are each independently a hydrogen atom or a methyl group, L 1 is an alkylene group or a divalent linking group containing an oxyalkylene structure, X 1 Preferably, the compound is an oxygen atom or an imino group, and Z 1 is a carboxylic acid group. The monomer represented by the formula (v) is preferably a compound in which R 11 is a hydrogen atom or a methyl group, L 1 is an alkylene group, Z 1 is a carboxylic acid group, and Y is a methine group. Furthermore, as the monomer represented by the formula (vi), R 14 , R 15 and R 16 are each independently a hydrogen atom or a methyl group, L 1 is a single bond or an alkylene group, and Z 1 is a carboxylic acid group. is better.

以下,示出以式(iv)~式(vi)表示之單體(化合物)的代表例。 作為單體的例子,可舉出甲基丙烯酸、巴豆酸、異巴豆酸、分子內含有加成聚合性雙鍵及羥基之化合物(例如,甲基丙烯酸2-羥乙酯)與琥珀酸酐的反應物、分子內含有加成聚合性雙鍵及羥基之化合物與鄰苯二甲酸酐的反應物、分子內含有加成聚合性雙鍵及羥基之化合物與四羥基鄰苯二甲酸酐的反應物、分子內含有加成聚合性雙鍵及羥基之化合物與偏苯三酸酐的反應物、分子內含有加成聚合性雙鍵及羥基之化合物與均苯四甲酸酐的反應物、丙烯酸、丙烯酸二聚物、丙烯酸低聚物、順丁烯二酸、衣康酸、反丁烯二酸、4-乙烯基安息香酸、乙烯基苯酚及4-羥基苯甲基丙烯醯胺等。Hereinafter, representative examples of the monomers (compounds) represented by the formulae (iv) to (vi) are shown. Examples of the monomers include the reaction of methacrylic acid, crotonic acid, isocrotonic acid, a compound containing an addition polymerizable double bond and a hydroxyl group in the molecule (for example, 2-hydroxyethyl methacrylate) and succinic anhydride compound, reaction product of compound containing addition polymerizable double bond and hydroxyl group in molecule and phthalic anhydride, reaction product of compound containing addition polymerizable double bond and hydroxyl group in molecule and tetrahydroxyphthalic anhydride, Reaction product of compound containing addition polymerizable double bond and hydroxyl group in molecule and trimellitic anhydride, reaction product of compound containing addition polymerizable double bond and hydroxyl group and pyromellitic anhydride, acrylic acid, acrylic acid dimer, acrylic acid Oligomers, maleic acid, itaconic acid, fumaric acid, 4-vinyl benzoic acid, vinyl phenol and 4-hydroxybenzyl acrylamide, etc.

從與黑色顏料等著色劑的相互作用、分散穩定性及向顯影液的浸透性的觀點考慮,含有可與黑色顏料等著色劑形成相互作用之官能基之結構單元的含量相對於高分子化合物的總質量,0.05質量%~90質量%為較佳,1.0質量%~80質量%為更佳,10質量%~70質量%為進一步較佳。From the viewpoints of interaction with colorants such as black pigments, dispersion stability, and permeability to developing solutions, the content of structural units containing functional groups capable of interacting with colorants such as black pigments is relative to the amount of the polymer compound. The total mass is preferably 0.05% by mass to 90% by mass, more preferably 1.0% by mass to 80% by mass, and even more preferably 10% by mass to 70% by mass.

・其他結構單元 而且,為了提高圖像強度等各種性能,高分子化合物可在無損於本發明的效果之前提下,進一步含有與含有接枝鏈之結構單元、疏水性結構單元及含有可與黑色顏料等著色劑形成相互作用之官能基之結構單元不同之、具有各種功能之其他結構單元(例如,含有如下官能基等之結構單元,前述官能基與用於分散物之分散介質具有親和性)。 作為該種其他結構單元,例如可舉出源自選自丙烯腈類及甲基丙烯腈類等之自由基聚合性化合物的結構單元。 高分子化合物能夠使用1種或者2種以上的該些其他結構單元,其含量以質量換算,相對於高分子化合物的總質量,0%以上且80%以下為較佳,10%以上且60%以下為更佳。含量在上述範圍內可維持充分的圖案形成性。・Other Structural Units Furthermore, in order to improve various properties such as image strength, the polymer compound may further contain a graft chain structural unit, a hydrophobic structural unit, and a black Colorants such as pigments have different structural units of functional groups that interact with each other and have other structural units with various functions (for example, structural units containing the following functional groups, etc., the above-mentioned functional groups have affinity with the dispersion medium used for dispersion) . As such other structural unit, the structural unit derived from radical polymerizable compounds, such as acrylonitrile and methacrylonitrile, is mentioned, for example. The polymer compound can use one or more of these other structural units, and the content of these other structural units, in terms of mass, is preferably 0% or more and 80% or less, preferably 10% or more and 60%, relative to the total mass of the polymer compound. The following is better. When the content is within the above range, sufficient pattern formability can be maintained.

・高分子化合物的物理性質 高分子化合物的酸值為0mgKOH/g以上且250mgKOH/g以下的範圍為較佳,10mgKOH/g以上且200mgKOH/g以下的範圍為更佳,20mgKOH/g以上且120mgKOH/g以下的範圍為進一步較佳。 若高分子化合物的酸值為160mgKOH/g以下,則更有效地抑制形成硬化膜時的顯影中的圖案剝離。若高分子化合物的酸值為10mgKOH/g以上,則鹼顯影性更加良好。並且,若高分子化合物的酸值為20mgKOH/g以上,則能夠更加抑制黑色顏料等著色劑的沉降,能夠使粗大粒子數更少,從而能夠更加提高硬化性組成物的經時穩定性。・Physical properties of the polymer compound The acid value of the polymer compound is preferably in the range of 0 mgKOH/g or more and 250 mgKOH/g or less, more preferably in the range of 10 mgKOH/g or more and 200 mgKOH/g or less, and 20 mgKOH/g or more and 120 mgKOH The range below /g is more preferable. When the acid value of the polymer compound is 160 mgKOH/g or less, pattern peeling in image development at the time of forming a cured film is more effectively suppressed. When the acid value of the polymer compound is 10 mgKOH/g or more, the alkali developability is more favorable. In addition, when the acid value of the polymer compound is 20 mgKOH/g or more, precipitation of colorants such as black pigments can be further suppressed, the number of coarse particles can be reduced, and the temporal stability of the curable composition can be further improved.

高分子化合物的酸值例如能夠由高分子化合物中的酸基的平均含量計算。並且,能夠藉由改變含有高分子化合物的構成成分亦即酸基之結構單元的含量來獲得具有所希望的酸值之樹脂。The acid value of the polymer compound can be calculated from, for example, the average content of acid groups in the polymer compound. And resin which has a desired acid value can be obtained by changing content of the structural unit containing an acid group which is a structural component of a polymer compound.

在形成硬化膜時,從顯影時的圖案剝離的抑制和顯影性的觀點考慮,高分子化合物的重量平均分子量作為藉由GPC(Gel Permeation Chromatography:凝膠滲透層析術)法之聚苯乙烯換算值,為4,000以上且300,000以下為較佳,5,000以上且200,000以下為更佳,6,000以上且100,000以下進一步較佳,10,000以上且50,000以下為特佳。 GPC法基於如下方法,亦即,利用HLC-8020GPC(TOSOH CORPORATION製造),作為管柱使用TSKgel SuperHZM-H、TSKgel SuperHZ4000、TSKgel SuperHZ2000(TOSOH CORPORATION製造,4.6mmID×15cm),作為洗提液使用THF(四氫呋喃)。When forming a cured film, the weight average molecular weight of the polymer compound is calculated as polystyrene conversion by GPC (Gel Permeation Chromatography) method from the viewpoint of suppression of pattern peeling during development and developability. The value is preferably 4,000 or more and 300,000 or less, more preferably 5,000 or more and 200,000 or less, more preferably 6,000 or more and 100,000 or less, and particularly preferably 10,000 or more and 50,000 or less. The GPC method is based on a method using HLC-8020GPC (manufactured by TOSOH CORPORATION), TSKgel SuperHZM-H, TSKgel SuperHZ4000, TSKgel SuperHZ2000 (manufactured by TOSOH CORPORATION, 4.6 mmID×15 cm) as a column, and THF as an eluent (tetrahydrofuran).

高分子化合物能夠依公知的方法合成,作為合成高分子化合物時使用之溶劑,例如可舉出二氯乙烷、環己酮、甲乙酮、丙酮、甲醇、乙醇、丙醇、丁醇、乙二醇單甲醚、乙二醇單乙醚、2-甲氧基乙基乙酸酯、1-甲氧基-2-丙醇、1-甲氧基-2-乙酸丙酯、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、二甲基亞碸、甲苯、乙酸乙酯、乳酸甲酯及乳酸乙酯等。該些溶劑可單獨使用,亦可混合2種以上來使用。The polymer compound can be synthesized by a known method, and as a solvent used for synthesizing the polymer compound, for example, dichloroethane, cyclohexanone, methyl ethyl ketone, acetone, methanol, ethanol, propanol, butanol, and ethylene glycol can be mentioned. Monomethyl ether, ethylene glycol monoethyl ether, 2-methoxyethyl acetate, 1-methoxy-2-propanol, 1-methoxy-2-propyl acetate, N,N-dimethyl acetate Ethyl formamide, N,N-dimethylacetamide, dimethyl sulfoxide, toluene, ethyl acetate, methyl lactate and ethyl lactate, etc. These solvents may be used alone or in combination of two or more.

作為高分子化合物的具體例,可舉出Kusumoto Chemicals, Ltd.製造的“DA-7301”、BYK Chemie公司製造的“Disperbyk-101(聚醯胺胺磷酸鹽)、107(羧酸酯)、110(含有酸基之共聚物)、111(磷酸系分散劑)、130(聚醯胺)、161、162、163、164、165、166、170、190(高分子共聚物)”、“BYK-P104、P105(高分子量不飽和聚羧酸)”、EFKA公司製造的“EFKA4047、4050~4010~4165(聚胺基甲酸酯系)、EFKA4330~4340(嵌段共聚物)、4400~4402(改質聚丙烯酸酯)、5010(聚酯醯胺)、5765(高分子量聚羧酸鹽)、6220(脂肪酸聚酯)、6745(酞菁衍生物)、6750(偶氮顏料衍生物)”、Ajinomoto Fine-Techno Co.,Inc.製造的“AJISPER PB821、PB822、PB880、PB881”、Kyoeisha Chemical Co., Ltd.製造的“Flowlen TG-710(胺基甲酸酯低聚物)”、“polyflow No.50E、No.300(丙烯酸系共聚物)”、Kusumoto Chemicals, Ltd.製造的“disparon KS-860、873SN、874、#2150(脂肪族多價羧酸)、#7004(聚醚酯)、DA-703-50、DA-705、DA-725”、Kao Corporation製造的“DEMOL RN、N(萘磺酸福馬林縮聚物)、MS、C、SN-B(芳香族磺酸福馬林縮聚物)”、“HOMOGENOL L-18(高分子聚羧酸)”、“EMULGEN920、930、935、985(聚氧乙烯壬基苯基醚)”、“ACETAMIN86(硬脂胺乙酸鹽)”、Lubrizol Japan Limited製造的“Solsperse 5000(酞菁衍生物)、22000(偶氮顏料衍生物)、13240(聚酯胺)、3000、12000、17000、20000、27000(在末端部具有功能部之高分子)、24000、28000、32000、38500(接枝型共聚物)」、Nikko Chemicals Co., Ltd.製造的“NIKKOL T106(聚氧乙烯脫水山梨糖醇單油酸酯)、MYS-IEX(聚氧乙烯硬脂酸酯)”、Kawaken Fine Chemicals Co., Ltd.製造的“HINOACT T-8000E”等、Shin-Etsu Chemical Co., Ltd.製造的“有機有機基矽氧烷聚合物KP341”、Yusho Co.,Ltd.製造的“W001:陽離子系界面活性劑”、聚氧乙烯月桂醚、聚氧乙烯硬脂基醚、聚氧乙烯油基醚、聚氧乙烯辛基苯基醚、聚氧乙烯壬基苯基醚、聚乙二醇月桂酸酯、聚乙二醇二硬脂酸酯、脫水山梨糖醇脂肪酸酯等非離子系界面活性劑、“W004、W005、W017”等陰離子系界面活性劑、Morishita Sangyo Co., Ltd.製造的“EFKA-46、EFKA-47、EFKA-47EA、EFKA聚合物100、EFKA聚合物400、EFKA聚合物401、EFKA聚合物450”、SAN NOPCO LIMITED製造的“Disperse Aid 6、Disperse Aid 8、Disperse Aid 15、Disperse Aid 9100”等高分子分散劑、ADEKA CORPORATION製造的“ADEKA Pluronic L31、F38、L42、L44、L61、L64、F68、L72、P95、F77、P84、F87、P94、L101、P103、F108、L121、P-123”、及Sanyo Chemical Industries, Ltd.製造的“Ionet(商品名) S-20”等。並且,還能夠使用Acrylic base FFS-6752、Acrylic base FFS-187、Akurikyua-RD-F8及Cyclomer P。 作為兩性樹脂的市售品,例如可舉出BYK公司製造的DISPERBYK-130、DISPERBYK-140、DISPERBYK-142、DISPERBYK-145、DISPERBYK-180、DISPERBYK-187、DISPERBYK-191、DISPERBYK-2001、DISPERBYK-2010、DISPERBYK-2012、DISPERBYK-2025、BYK-9076、Ajinomoto Fine-Techno Co.,Inc.製造的AJISPER PB821、AJISPER PB822及AJISPER PB881等。 該些高分子化合物可單獨使用1種,亦可同時使用2種以上。Specific examples of the polymer compound include "DA-7301" manufactured by Kusumoto Chemicals, Ltd., "Disperbyk-101 (polyamidoamine phosphate) manufactured by BYK Chemie, Inc., 107 (carboxylate), 110 (acid group-containing copolymer), 111 (phosphoric acid-based dispersant), 130 (polyamide), 161, 162, 163, 164, 165, 166, 170, 190 (polymer copolymer)", "BYK- P104, P105 (high molecular weight unsaturated polycarboxylic acid)", "EFKA4047, 4050~4010~4165 (urethane type), EFKA4330~4340 (block copolymer), 4400~4402 ( Modified polyacrylate), 5010 (polyester amide), 5765 (high molecular weight polycarboxylate), 6220 (fatty acid polyester), 6745 (phthalocyanine derivative), 6750 (azo pigment derivative)”, "AJISPER PB821, PB822, PB880, PB881" manufactured by Ajinomoto Fine-Techno Co., Inc., "Flowlen TG-710 (urethane oligomer)" manufactured by Kyoeisha Chemical Co., Ltd., "polyflow" No.50E, No.300 (acrylic copolymer)", "disparon KS-860, 873SN, 874, #2150 (aliphatic polyvalent carboxylic acid), #7004 (polyetherester) manufactured by Kusumoto Chemicals, Ltd. , DA-703-50, DA-705, DA-725", "DEMOL RN, N (formalin naphthalene sulfonate condensation polymer), MS, C, SN-B (formalin aromatic sulfonate condensation polymer) manufactured by Kao Corporation compound)", "HOMOGENOL L-18 (polymer polycarboxylic acid)", "EMULGEN920, 930, 935, 985 (polyoxyethylene nonyl phenyl ether)", "ACETAMIN86 (stearylamine acetate)", Lubrizol "Solsperse 5000 (phthalocyanine derivatives), 22000 (azo pigment derivatives), 13240 (polyesteramine), 3000, 12000, 17000, 20000, 27000 (polymers with functional parts at the terminal)" manufactured by Japan Limited , 24000, 28000, 32000, 38500 (graft copolymer)", "NIKKOL T106 (polyoxyethylene sorbitan monooleate)" manufactured by Nikko Chemicals Co., Ltd., MYS-IEX (polyoxyethylene sorbitan monooleate) stearate)”, Kawaken Fi "HINOACT T-8000E" manufactured by ne Chemicals Co., Ltd., etc., "Organoorganosiloxane polymer KP341" manufactured by Shin-Etsu Chemical Co., Ltd., "W001" manufactured by Yusho Co., Ltd. : Cationic surfactant", polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene oleyl ether, polyoxyethylene octyl phenyl ether, polyoxyethylene nonyl phenyl ether, polyethylene glycol Nonionic surfactants such as alcohol laurate, polyethylene glycol distearate, sorbitan fatty acid ester, anionic surfactants such as "W004, W005, W017", Morishita Sangyo Co., Ltd .Manufactured "EFKA-46, EFKA-47, EFKA-47EA, EFKA Polymer 100, EFKA Polymer 400, EFKA Polymer 401, EFKA Polymer 450", "Disperse Aid 6, Disperse Aid 8" manufactured by SAN NOPCO LIMITED , Disperse Aid 15, Disperse Aid 9100" and other polymer dispersants, "ADEKA Pluronic L31, F38, L42, L44, L61, L64, F68, L72, P95, F77, P84, F87, P94, L101, P103, F108, L121, P-123", and "Ionet (trade name) S-20" manufactured by Sanyo Chemical Industries, Ltd., and the like. In addition, Acrylic base FFS-6752, Acrylic base FFS-187, Akurikyua-RD-F8, and Cyclomer P can also be used. Examples of commercially available amphoteric resins include DISPERBYK-130, DISPERBYK-140, DISPERBYK-142, DISPERBYK-145, DISPERBYK-180, DISPERBYK-187, DISPERBYK-191, DISPERBYK-2001, DISPERBYK- 2010, DISPERBYK-2012, DISPERBYK-2025, BYK-9076, AJISPER PB821, AJISPER PB822 and AJISPER PB881 manufactured by Ajinomoto Fine-Techno Co., Inc., etc. These polymer compounds may be used alone or in combination of two or more.

作為高分子化合物的具體例,可參閱日本特開2013-249417號公報的0127~0129段中記載之高分子化合物,該些內容編入本說明書中。As specific examples of the polymer compound, reference can be made to the polymer compounds described in paragraphs 0127 to 0129 of JP 2013-249417 A, the contents of which are incorporated in the present specification.

作為分散劑,除了上述的高分子化合物以外,還能夠使用日本特開2010-106268號公報的0037~0115段(對應之US2011/0124824的0075~0133段一欄)的接枝共聚物,該些內容可援用並編入本說明書中。 除上述以外,還能夠使用日本特開2011-153283號公報的0028~0084段(對應之US2011/0279759的0075~0133段一欄)的包含如下構成成分之高分子化合物,前述構成成分含有酸性基經由連結基鍵結而成之側鏈結構,該些內容可援用並編入本說明書中。As the dispersing agent, in addition to the above-mentioned polymer compounds, graft copolymers of paragraphs 0037 to 0115 of JP-A No. 2010-106268 (corresponding to the columns of paragraphs 0075 to 0133 of US 2011/0124824 ) can also be used. The contents can be cited and incorporated into this manual. In addition to the above, it is also possible to use the polymer compounds of paragraphs 0028 to 0084 of JP 2011-153283 A (corresponding to the columns of paragraphs 0075 to 0133 of US 2011/0279759 ) including the following constituents, the constituents containing an acidic group The content of the side chain structure bonded through the linking group can be cited and incorporated in this specification.

<黏結樹脂> 硬化性組成物含有黏結樹脂為較佳。 黏結樹脂的含量相對於硬化性組成物的總固體成分,0.1~30質量%為較佳。 若黏結樹脂的含量相對於硬化性組成物的總固體成分為0.3~25質量%,則使硬化性組成物硬化來獲得之硬化膜的圖案形狀更優異。 黏結樹脂可單獨使用1種,亦可同時使用2種以上。當同時使用2種以上的黏結樹脂時,其合計量在上述範圍內為較佳。<Binder resin> It is preferable that the curable composition contains a binder resin. The content of the binder resin is preferably 0.1 to 30% by mass relative to the total solid content of the curable composition. When the content of the binder resin is 0.3 to 25 mass % with respect to the total solid content of the curable composition, the pattern shape of the cured film obtained by curing the curable composition is more excellent. One type of binder resin may be used alone, or two or more types may be used simultaneously. When two or more kinds of binder resins are used at the same time, it is preferable that the total amount thereof is within the above-mentioned range.

作為黏結樹脂,使用線狀有機聚合物為較佳。作為該種線狀有機聚合物,能夠任意地使用公知者。為了實現水顯影或弱鹼性水顯影,選擇對水或弱鹼性水為可溶性或膨潤性之線狀有機聚合物為更佳。其中,作為黏結樹脂,鹼可溶性樹脂(含有促進鹼可溶性之基團之樹脂)為特佳。 作為黏結樹脂,能夠從線狀有機聚合物且分子(較佳地為以(甲基)丙烯酸系共聚物或苯乙烯系共聚物為主鏈之分子)中含有至少1個促進鹼可溶性之基團之鹼可溶性樹脂中適當選擇。從耐熱性的觀點考慮,聚羥基苯乙烯系樹脂、聚矽氧烷系樹脂、(甲基)丙烯酸樹脂、(甲基)丙烯醯胺系樹脂、(甲基)丙烯酸/(甲基)丙烯醯胺共聚物樹脂、環氧系樹脂及聚醯亞胺系樹脂為較佳,從控制顯影性的觀點考慮,(甲基)丙烯酸樹脂、(甲基)丙烯醯胺系樹脂、(甲基)丙烯酸/(甲基)丙烯醯胺共聚物樹脂或聚醯亞胺系樹脂為更佳。 作為促進鹼可溶性之基團(以下,還稱為酸基),例如可舉出羧酸基、磷酸基、磺酸基及酚性羥基等。其中,可溶於有機溶劑且能夠藉由弱鹼性水溶液顯影者為較佳,作為更佳者,可舉出含有源自(甲基)丙烯酸的結構單元之鹼可溶性樹脂。該些酸基可以僅為1種,亦可以為2種以上。As the binder resin, a linear organic polymer is preferably used. As such a linear organic polymer, a well-known thing can be used arbitrarily. In order to realize water development or weak alkaline water development, it is better to choose a linear organic polymer that is soluble or swellable in water or weak alkaline water. Among them, as the binder resin, alkali-soluble resins (resins containing groups that promote alkali-solubility) are particularly preferred. As the binder resin, at least one group that promotes alkali solubility can be contained in the molecule of a linear organic polymer (preferably a molecule with a (meth)acrylic copolymer or a styrene copolymer as the main chain) Appropriate selection of alkali-soluble resins. From the viewpoint of heat resistance, polyhydroxystyrene-based resins, polysiloxane-based resins, (meth)acrylic resins, (meth)acrylamide-based resins, (meth)acrylic acid/(meth)acrylamide Amine copolymer resins, epoxy resins, and polyimide resins are preferred, and from the viewpoint of controlling developability, (meth)acrylic resins, (meth)acrylamide resins, and (meth)acrylic resins are preferred. /(meth)acrylamide copolymer resin or polyimide resin is more preferable. As a group which promotes alkali solubility (henceforth, an acid group is also called), a carboxylic acid group, a phosphoric acid group, a sulfonic acid group, a phenolic hydroxyl group, etc. are mentioned, for example. Among them, what is soluble in an organic solvent and can be developed by a weak alkaline aqueous solution is preferable, and an alkali-soluble resin containing a structural unit derived from (meth)acrylic acid is mentioned as a more preferable one. Only one kind of these acid groups may be sufficient, or two or more kinds may be sufficient as them.

作為黏結樹脂,例如可舉出在側鏈含有羧酸基之自由基聚合物。作為在側鏈含有羧酸基之自由基聚合物,例如可舉出日本特開昭59-44615號、日本特公昭54-34327號、日本特公昭58-12577號、日本特公昭54-25957號、日本特開昭54-92723號、日本特開昭59-53836號及日本特開昭59-71048號中記載者。作為在側鏈含有羧酸基之自由基聚合物,可舉出將含有羧酸基之單體單獨或使其共聚之樹脂、對含有酸酐之單體單獨或使其共聚而獲得之酸酐單元進行水解、半酯化或半醯胺化之樹脂、以及藉由不飽和單羧酸及酸酐對環氧樹脂進行改質之環氧丙烯酸酯等。 作為含有羧酸基之單體,可舉出丙烯酸、甲基丙烯酸、衣康酸、巴豆酸、順丁烯二酸、富马酸及4-羧基苯乙烯等。亦可舉出在側鏈含有羧酸基之酸性纖維素衍生物為例。 作為含有酸酐之單體,可舉出順丁烯二酸酐等。此外,對含有羥基之聚合物加成環狀酸酐者等係有用。 並且,含有酸基之縮醛改質聚乙烯醇類黏結樹脂記載於歐洲專利第993966號、歐洲專利第1204000號及日本特開2001-318463號等各公報中。含有酸基之縮醛改質聚乙烯醇類黏結樹脂的膜強度及顯影性的平衡優異,為較佳。 而且,作為水溶性線狀有機聚合物,聚乙烯吡咯烷酮或聚環氧乙烷等係有用。並且,為了提高硬化皮膜的強度,醇溶性尼龍及2,2-雙-(4-羥苯基)-丙烷與環氧氯丙烷的反應物亦即聚醚等亦有用。 國際公開第2008/123097號中記載之聚醯亞胺樹脂亦有用。As a binder resin, the radical polymer containing a carboxylic acid group in a side chain is mentioned, for example. As a radical polymer containing a carboxylic acid group in a side chain, for example, Japanese Unexamined Patent Publication No. 59-44615, Japanese Unexamined Patent Publication No. 54-34327, Japanese Unexamined Patent Publication No. 58-12577, and Japanese Unexamined Patent Publication No. 54-25957 , Japanese Patent Laid-Open No. 54-92723, Japanese Patent Laid-Open No. 59-53836 and Japanese Patent Laid-Open No. 59-71048. Examples of the radical polymer containing a carboxylic acid group in a side chain include a resin obtained by copolymerizing a carboxylic acid group-containing monomer alone or by copolymerizing an acid anhydride unit obtained by copolymerizing an acid anhydride-containing monomer alone or by copolymerizing it. Hydrolyzed, half-esterified or half-amidated resin, and epoxy acrylate modified by unsaturated monocarboxylic acid and acid anhydride, etc. Examples of the carboxylic acid group-containing monomer include acrylic acid, methacrylic acid, itaconic acid, crotonic acid, maleic acid, fumaric acid, and 4-carboxystyrene. An acidic cellulose derivative containing a carboxylic acid group in a side chain can also be mentioned as an example. As an acid anhydride containing monomer, maleic anhydride etc. are mentioned. In addition, it is useful to add a cyclic acid anhydride to a hydroxyl group-containing polymer. In addition, the acetal-modified polyvinyl alcohol-based binder resin containing an acid group is described in European Patent No. 993966, European Patent No. 1204000, and Japanese Patent Laid-Open No. 2001-318463. The acetal-modified polyvinyl alcohol-based binder resin containing an acid group has an excellent balance of film strength and developability, which is preferable. Furthermore, as the water-soluble linear organic polymer, polyvinylpyrrolidone, polyethylene oxide, and the like are useful. In addition, in order to increase the strength of the cured film, alcohol-soluble nylon and polyether, which is a reaction product of 2,2-bis-(4-hydroxyphenyl)-propane and epichlorohydrin, are also useful. The polyimide resin described in International Publication No. 2008/123097 is also useful.

該些中,〔苄基(甲基)丙烯酸酯/(甲基)丙烯酸/依據需要之其他加成聚合性乙烯單體〕共聚物及〔(甲基)丙烯酸烯丙酯/(甲基)丙烯酸/依據需要之其他加成聚合性乙烯單體〕共聚物的膜強度、靈敏度及顯影性的平衡優異,為較佳。 作為市售品,例如可舉出Acrylic base FF-187、FF-426(FUJIKURA KASEI CO.,LTD.製造)、Akurikyua-RD-F8(NIPPON SHOKUBAI CO., LTD.製造)及DAICEL-ALLNEX LTD.製造的Cyclomer P(ACA)230AA等。Among these, [benzyl (meth)acrylate/(meth)acrylic acid/other addition polymerizable vinyl monomers as needed] copolymer and [(meth)acrylate/(meth)acrylic acid] /Other addition polymerizable vinyl monomers as needed] The copolymer is preferable because it is excellent in the balance of film strength, sensitivity, and developability. Examples of commercially available products include Acrylic base FF-187, FF-426 (manufactured by FUJIKURA KASEI CO., LTD.), Akurikyua-RD-F8 (manufactured by NIPPON SHOKUBAI CO., LTD.), and DAICEL-ALLNEX LTD. Manufactured Cyclomer P (ACA) 230AA et al.

黏結樹脂的製造中,例如,能夠適用基於公知的自由基聚合法之方法。所屬技術領域中具有通常知識者能夠輕鬆設定藉由自由基聚合法製造黏結樹脂時的溫度、壓力、自由基起始劑的種類及其量以及溶劑的種類等聚合條件。For the production of the binder resin, for example, a method based on a known radical polymerization method can be applied. Those skilled in the art can easily set polymerization conditions such as temperature, pressure, type and amount of radical initiator, and type of solvent when producing a binder resin by radical polymerization.

作為黏結樹脂,使用包含含有接枝鏈之結構單元及含有酸基(鹼可溶性基)之結構單元之聚合物亦較佳。 含有接枝鏈之結構單元的定義與上述之分散劑所含之含有接枝鏈之結構單元相同,並且較佳範圍亦相同。 作為酸基,例如可舉出羧酸基、磺酸基、磷酸基或苯酚性羥基等,羧酸基、磺酸基及磷酸基中的至少1種為較佳,羧酸基為更佳。As a binder resin, it is also preferable to use a polymer containing a structural unit containing a graft chain and a structural unit containing an acid group (alkali-soluble group). The definition of the structural unit containing a graft chain is the same as that of the structural unit containing a graft chain contained in the above-mentioned dispersant, and the preferred range is also the same. Examples of the acid group include a carboxylic acid group, a sulfonic acid group, a phosphoric acid group, or a phenolic hydroxyl group, and at least one of a carboxylic acid group, a sulfonic acid group, and a phosphoric acid group is preferable, and a carboxylic acid group is more preferable.

(含有酸基之結構單元) 作為含有酸基之結構單元,含有選自源自以下述式(vii)~式(ix)表示之單體的結構單元之1種以上的結構單元為較佳。(Acid group-containing structural unit) As the acid group-containing structural unit, it is preferable to contain one or more structural units selected from structural units derived from monomers represented by the following formulae (vii) to (ix).

[化學式30]

Figure 02_image526
[Chemical formula 30]
Figure 02_image526

式(vii)~式(ix)中,R21 、R22 及R23 分別獨立地表示氫原子、鹵素原子(例如,氟原子、氯原子、溴原子等)或碳數為1~6的烷基(例如,甲基、乙基、丙基等)。 式(vii)~式(ix)中,R21 、R22 及R23 分別獨立地為氫原子或碳數為1~3的烷基為較佳,分別獨立地為氫原子或甲基為更佳。式(vii)中,R21 及R23 分別為氫原子為特佳。In formulas (vii) to (ix), R 21 , R 22 and R 23 each independently represent a hydrogen atom, a halogen atom (for example, a fluorine atom, a chlorine atom, a bromine atom, etc.) or an alkane having 1 to 6 carbon atoms group (eg, methyl, ethyl, propyl, etc.). In formula (vii) to formula (ix), R 21 , R 22 and R 23 are preferably each independently a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, and are more preferably a hydrogen atom or a methyl group each independently. good. In the formula (vii), it is particularly preferable that R 21 and R 23 are each a hydrogen atom.

式(vii)中的X2 表示氧原子(-O-)或亞胺基(-NH-),氧原子為較佳。 並且,式(viii)中的Y表示次甲基或氮原子。X 2 in the formula (vii) represents an oxygen atom (-O-) or an imino group (-NH-), and an oxygen atom is preferred. In addition, Y in formula (viii) represents a methine group or a nitrogen atom.

式(vii)~式(ix)中的L2 表示單鍵或2價的連結基。作為2價的連結基的例子,可舉出2價的脂肪族基(例如,伸烷基、取代伸烷基、伸烯基、取代伸烯基、伸炔基及取代伸炔基)、2價的芳香族基(例如,伸芳基及取代伸芳基)、2價的雜環基、氧原子(-O-)、硫原子(-S-)、亞胺基(-NH-)、取代亞胺鍵(-NR41 ’-,其中,R41 ’為脂肪族基、芳香族基或雜環基)、羰基鍵(-CO-)及它們的組合等。L 2 in formulas (vii) to (ix) represents a single bond or a divalent linking group. Examples of the divalent linking group include divalent aliphatic groups (eg, alkylene, substituted alkylene, alkenylene, substituted alkenylene, alkynylene, and substituted alkynylene), 2 valent aromatic groups (for example, aryl-extended and substituted aryl-extended groups), divalent heterocyclic groups, oxygen atoms (-O-), sulfur atoms (-S-), imino groups (-NH-), A substituted imine bond (-NR 41 '-, wherein R 41 ' is an aliphatic group, an aromatic group or a heterocyclic group), a carbonyl bond (-CO-), a combination thereof, and the like.

2價的脂肪族基可具有環狀結構或分支結構。脂肪族基的碳數為1~20為較佳,1~15為更佳,1~10為進一步較佳。與不飽和脂肪族基相比,脂肪族基為飽和脂肪族基為較佳。脂肪族基可具有取代基。作為取代基的例子,可舉出鹵素原子、羥基、芳香族基及雜環基。The divalent aliphatic group may have a cyclic structure or a branched structure. The carbon number of the aliphatic group is preferably 1 to 20, more preferably 1 to 15, and even more preferably 1 to 10. The aliphatic group is preferably a saturated aliphatic group rather than an unsaturated aliphatic group. The aliphatic group may have a substituent. As an example of a substituent, a halogen atom, a hydroxyl group, an aromatic group, and a heterocyclic group are mentioned.

2價的芳香族基的碳數為6~20為較佳,6~15為更佳,6~10為進一步較佳。芳香族基可具有取代基。取代基的例子可舉出鹵素原子、羥基、脂肪族基、芳香族基及雜環基。The number of carbon atoms of the divalent aromatic group is preferably 6 to 20, more preferably 6 to 15, and even more preferably 6 to 10. The aromatic group may have a substituent. Examples of the substituent include a halogen atom, a hydroxyl group, an aliphatic group, an aromatic group, and a heterocyclic group.

2價的雜環基作為雜環含有5員環或6員環為較佳。雜環中可稠合有其他雜環、脂肪族環或芳香族環中的一個以上。雜環基可具有取代基。作為取代基的例子,可舉出鹵素原子、羥基、氧代基(=O)、硫代基(=S)、亞胺基(=NH)、取代亞胺基(=N-R42 ,其中,R42 為脂肪族基、芳香族基或雜環基)、脂肪族基、芳香族基及雜環基。The divalent heterocyclic group preferably contains a 5-membered ring or a 6-membered ring as a heterocyclic ring. One or more of other heterocycles, aliphatic rings or aromatic rings may be condensed into the heterocycle. The heterocyclic group may have a substituent. Examples of the substituent include a halogen atom, a hydroxyl group, an oxo group (=O), a thio group (=S), an imino group (=NH), a substituted imino group (=NR 42 , wherein R 42 is aliphatic group, aromatic group or heterocyclic group), aliphatic group, aromatic group and heterocyclic group.

L2 為含有單鍵、伸烷基或氧化烯結構之2價的連結基為較佳。氧化烯結構係氧乙烯結構或氧丙烯結構為更佳。L2 可包含重複含有2個以上的氧化烯結構之聚氧化烯結構。作為聚氧化烯結構,聚氧乙烯結構或聚氧丙烯結構為較佳。聚氧乙烯結構以-(OCH2 CH2 )n-表示,n為2以上的整數為較佳,2~10的整數為更佳。L 2 is preferably a divalent linking group containing a single bond, an alkylene group or an oxyalkylene structure. More preferably, the oxyalkylene structure is an oxyethylene structure or an oxypropylene structure. L 2 may contain a polyoxyalkylene structure repeatedly containing two or more oxyalkylene structures. As the polyoxyalkylene structure, a polyoxyethylene structure or a polyoxypropylene structure is preferable. The polyoxyethylene structure is represented by -(OCH 2 CH 2 )n-, and n is preferably an integer of 2 or more, and more preferably an integer of 2 to 10.

式(vii)~式(ix)中,Z2 為酸基,羧酸基為較佳。In formula (vii) to formula (ix), Z 2 is an acid group, preferably a carboxylic acid group.

式(ix)中,R24 、R25 及R26 分別獨立地表示氫原子、鹵素原子(例如,氟、氯、溴等)、碳數為1~6的烷基(例如,甲基、乙基、丙基等)、-Z2 或L2 -Z2 。其中,L2 及Z2 的含義與上述中的L2 及Z2 相同,較佳例亦相同。作為R24 、R25 及R26 ,分別獨立地為氫原子或碳數為1~3的烷基為較佳,氫原子為更佳。In formula (ix), R 24 , R 25 and R 26 each independently represent a hydrogen atom, a halogen atom (for example, fluorine, chlorine, bromine, etc.), an alkyl group having 1 to 6 carbon atoms (for example, methyl, ethyl, etc.). group, propyl group, etc.), -Z 2 or L 2 -Z 2 . Wherein, the meanings of L 2 and Z 2 are the same as those of L 2 and Z 2 in the above, and the preferred examples are also the same. As R 24 , R 25 and R 26 , each independently is preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, more preferably a hydrogen atom.

作為以式(vii)表示之單體,係R21 、R22 及R23 分別獨立地為氫原子或甲基、L2 為伸烷基或含有氧化烯結構之2價的連結基、X2 為氧原子或亞胺基、Z2 為羧酸基之化合物為較佳。 作為以式(vii)表示之單體,係R21 為氫原子或甲基、L2 為伸烷基、Z2 為羧酸基、Y為次甲基之化合物為較佳。 而且,作為以式(ix)表示之單體,係R24 、R25 及R26 分別獨立地為氫原子或甲基、Z2 為羧酸基之化合物為較佳。As the monomer represented by the formula (vii), R 21 , R 22 and R 23 are each independently a hydrogen atom or a methyl group, L 2 is an alkylene group or a divalent linking group containing an oxyalkylene structure, X 2 Preferably, the compound is an oxygen atom or an imino group, and Z 2 is a carboxylic acid group. The monomer represented by the formula (vii) is preferably a compound in which R 21 is a hydrogen atom or a methyl group, L 2 is an alkylene group, Z 2 is a carboxylic acid group, and Y is a methine group. Furthermore, as the monomer represented by the formula (ix), a compound in which R 24 , R 25 and R 26 are each independently a hydrogen atom or a methyl group, and Z 2 is a carboxylic acid group is preferable.

黏結樹脂能夠藉由與含有上述含有接枝鏈之結構單元之分散劑相同的方法合成,其較佳酸值、重量平均分子量亦相同。The binder resin can be synthesized by the same method as the dispersant containing the above-mentioned structural unit containing the graft chain, and the preferable acid value and weight average molecular weight thereof are also the same.

黏結樹脂可具有1種或2種以上的含有酸基之結構單元。 含有酸基之結構單元的含量以質量換算,相對於黏結樹脂的總質量,5~95%為較佳,從抑制鹼顯影引起之圖像強度的損傷之觀點考慮,10~90%為更佳。The binder resin may have one or two or more structural units containing an acid group. The content of the structural unit containing an acid group is preferably 5 to 95% in terms of mass, relative to the total mass of the binder resin, and is more preferably 10 to 90% from the viewpoint of suppressing damage to image strength caused by alkali development .

<界面活性劑> 硬化性組成物含有界面活性劑為較佳。界面活性劑有助於提高硬化性組成物的塗佈性。<Surfactant> It is preferable that the curable composition contains a surfactant. The surfactant contributes to improving the coatability of the curable composition.

當硬化性組成物含有界面活性劑時,作為界面活性劑的含量,相對於硬化性組成物的總固體成分,0.001~2.0質量%為較佳。 界面活性劑可單獨使用1種,亦可同時使用2種以上。當同時使用2種以上的界面活性劑時,合計量在上述範圍內為較佳。When the curable composition contains a surfactant, the content of the surfactant is preferably 0.001 to 2.0% by mass relative to the total solid content of the curable composition. Surfactant may be used individually by 1 type, and may use 2 or more types together. When two or more types of surfactants are used at the same time, the total amount is preferably within the above range.

作為界面活性劑,例如可舉出氟系界面活性劑、非離子系界面活性劑、陽離子系界面活性劑、陰離子系界面活性劑及矽酮系界面活性劑等。As a surfactant, a fluorine type surfactant, a nonionic type surfactant, a cation type surfactant, an anion type surfactant, a silicone type surfactant, etc. are mentioned, for example.

例如,藉由硬化性組成物含有氟系界面活性劑,硬化性組成物的液體特性(尤其,流動性)更加提高。亦即,當使用含有氟系界面活性劑之硬化性組成物形成膜時,藉由降低被塗佈面與塗佈液之間的界面張力,向被塗佈面的潤濕性得到改善,向被塗佈面的塗佈性得到提高。故,即使在以少量的液量形成數μm左右的薄膜時,亦可更佳地形成厚度不均較小之均勻的膜,在這一點上行係有效。For example, when the curable composition contains a fluorine-based surfactant, the liquid properties (especially, fluidity) of the curable composition are further improved. That is, when a film is formed using a curable composition containing a fluorine-based surfactant, by reducing the interfacial tension between the surface to be coated and the coating liquid, the wettability to the surface to be coated is improved, and the The coatability of the surface to be coated is improved. Therefore, even when a thin film of about several μm is formed with a small amount of liquid, a uniform film with less uneven thickness can be formed more preferably, which is effective in this respect.

氟系界面活性劑中的氟含有率為3~40質量%為較佳,5~30質量%為更佳,7~25質量%為進一步較佳。氟含有率為該範圍內之氟系界面活性劑在塗佈膜的厚度的均勻性和/或省液性方面係有效,且硬化性組成物中的溶解性亦良好。The fluorine content in the fluorine-based surfactant is preferably 3 to 40% by mass, more preferably 5 to 30% by mass, and even more preferably 7 to 25% by mass. The fluorine-based surfactant having the fluorine content within this range is effective in the uniformity of the thickness of the coating film and/or the liquid saving property, and the solubility in the curable composition is also good.

作為氟系界面活性劑,例如可舉出Megafac F171、Megafac F172、Megafac F173、Megafac F176、Megafac F177、Megafac F141、Megafac F142、Megafac F143、Megafac F144、Megafac R30、Megafac F437、Megafac F475、Megafac F479、Megafac F482、Megafac F554、Megafac F780(以上,DIC CORPORATION製造)、Fluorad FC430、Fluorad FC431、Fluorad FC171(以上,Sumitomo 3M Limited製造)、Surflon S-382、Surflon SC-101、Surflon SC-103、Surflon SC-104、Surflon SC-105、Surflon SC-1068、Surflon SC-381、Surflon SC-383、Surflon S-393、Surflon KH-40(以上,ASAHI GLASS CO.,LTD.製造)、PF636、PF656、PF6320、PF6520、PF7002(OMNOVA公司製造)等。 作為氟系界面活性劑,還能夠使用嵌段聚合物,作為具體例,例如可舉出日本特開2011-89090號公報中記載之化合物。作為氟系界面活性劑,還可舉出以下述式表示之化合物(F-1)。化合物(F-1)中,式中以(A)及(B)表示之結構單元分別為62莫耳%、38莫耳%。以式(B)表示之結構單元中,a、b、c分別滿足a+c=14、b=17的關係。另外,下述化合物的重量平均分子量例如為15,311。Examples of fluorine-based surfactants include Megafac F171, Megafac F172, Megafac F173, Megafac F176, Megafac F177, Megafac F141, Megafac F142, Megafac F143, Megafac F144, Megafac R30, Megafac F437, Megafac F475, Megafac F479, Megafac F482, Megafac F554, Megafac F780 (above, manufactured by DIC CORPORATION), Fluorad FC430, Fluorad FC431, Fluorad FC171 (above, manufactured by Sumitomo 3M Limited), Surflon S-382, Surflon SC-101, Surflon SC-103, Surflon SC -104, Surflon SC-105, Surflon SC-1068, Surflon SC-381, Surflon SC-383, Surflon S-393, Surflon KH-40 (above, manufactured by ASAHI GLASS CO., LTD.), PF636, PF656, PF6320 , PF6520, PF7002 (manufactured by OMNOVA), etc. As the fluorine-based surfactant, a block polymer can also be used, and specific examples thereof include compounds described in JP-A-2011-89090. As a fluorine-type surfactant, the compound (F-1) represented by the following formula can also be mentioned. In the compound (F-1), the structural units represented by (A) and (B) in the formula are 62 mol% and 38 mol%, respectively. In the structural unit represented by formula (B), a, b, and c satisfy the relationship of a+c=14 and b=17, respectively. In addition, the weight average molecular weight of the following compound is, for example, 15,311.

[化學式31]

Figure 02_image528
[Chemical formula 31]
Figure 02_image528

作為非離子系界面活性劑,具體而言可舉出甘油、三羥甲基丙烷、三羥甲基乙烷以及該等的乙氧基化物及丙氧基化物(例如甘油丙氧基化物、甘油乙氧基化物等)、聚氧乙烯月桂醚、聚氧乙烯硬脂基醚、聚氧乙烯油基醚、聚氧乙烯辛基苯基醚、聚氧乙烯壬基苯基醚、聚乙二醇二月桂酸酯、聚乙二醇二硬脂酸酯、脫水山梨糖醇脂肪酸酯(BASF公司製造的Pluronic L10、L31、L61、L62、10R5、17R2、25R2,Tetronic 304、701、704、901、904、150R1),Solsperse20000(Japan Lubrizol Corporation製造)等。並且,亦能夠使用TAKEMOTO OIL & FAT CO.,LTD製造的Pionin D-6112-W、Wako Pure Chemical Industries, Ltd.製造的NCW-101、NCW-1001、NCW-1002。Specific examples of nonionic surfactants include glycerin, trimethylolpropane, trimethylolethane, and ethoxylates and propoxylates thereof (eg, glycerol propoxylate, glycerin ethoxylates, etc.), polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene oleyl ether, polyoxyethylene octyl phenyl ether, polyoxyethylene nonyl phenyl ether, polyethylene glycol Dilaurate, polyethylene glycol distearate, sorbitan fatty acid ester (Pluronic L10, L31, L61, L62, 10R5, 17R2, 25R2, Tetronic 304, 701, 704, 901 manufactured by BASF , 904, 150R1), Solsperse20000 (manufactured by Japan Lubrizol Corporation), etc. In addition, Pionin D-6112-W manufactured by TAKEMOTO OIL & FAT CO., LTD, and NCW-101, NCW-1001, and NCW-1002 manufactured by Wako Pure Chemical Industries, Ltd. can also be used.

作為陽離子系界面活性劑,具體而言可舉出酞菁衍生物(商品名,EFKA-745、MORISHITA&CO., LTD.製造)、有幾基矽氧烷聚合物KP341(Shin-Etsu Chemical Co., Ltd.製造)、(甲基)丙烯酸系(共)聚合體polyflow No.75、No.90、No.95(Kyoeisha Chemical Co., Ltd.製造)、W001(Yusho Co.,Ltd.)等。Specific examples of the cationic surfactant include phthalocyanine derivatives (trade name, EFKA-745, manufactured by MORISSHITA & CO., LTD.), chitosiloxane polymer KP341 (Shin-Etsu Chemical Co., Ltd.), (meth)acrylic (co)polymer polyflow No.75, No.90, No.95 (Kyoeisha Chemical Co., Ltd.), W001 (Yusho Co., Ltd.), and the like.

作為陰離子系界面活性劑,具體而言可舉出W004、W005、W017(Yusho Co.,Ltd.)等。As an anionic surfactant, W004, W005, W017 (Yusho Co., Ltd.) etc. are mentioned specifically,.

作為矽酮系界面活性劑,例如可舉出Dow Corning Toray Co.,Ltd.製造的“Toray Silicone DC3PA”、“Toray Silicone SH7PA”、“Toray Silicone DC11PA”、“Toray Silicone SH21PA”、“Toray Silicone SH28PA”、“Toray Silicone SH29PA”、“Toray Silicone SH30PA”、“Toray Silicone SH8400”、Momentive Performance Materials Inc.製造的“TSF-4440”、“TSF-4300”、“TSF-4445”、“TSF-4460”、“TSF-4452”、Shin-Etsu Chemical Co., Ltd.製造的“KP341”、“KF6001”、“KF6002”、BYK公司製造的“BYK307”、“BYK323”、“BYK330”等。Examples of silicone-based surfactants include "Toray Silicone DC3PA", "Toray Silicone SH7PA", "Toray Silicone DC11PA", "Toray Silicone SH21PA", and "Toray Silicone SH28PA" manufactured by Dow Corning Toray Co., Ltd. ", "Toray Silicone SH29PA", "Toray Silicone SH30PA", "Toray Silicone SH8400", "TSF-4440", "TSF-4300", "TSF-4445", "TSF-4460" manufactured by Momentive Performance Materials Inc. , "TSF-4452", "KP341", "KF6001", "KF6002" manufactured by Shin-Etsu Chemical Co., Ltd., "BYK307", "BYK323", "BYK330" manufactured by BYK Corporation, etc.

<矽烷偶合劑> 矽烷偶合劑係指在分子中含有水解性基團及其以外的官能基之化合物。另外,烷氧基等水解性基團與矽原子鍵結。 水解性基團係指,與矽原子直接鍵結,並且可藉由水解反應和/或縮合反應生成矽氧烷鍵之取代基。作為水解性基團,例如可舉出鹵素原子、烷氧基、醯氧基及烯氧基。水解性基團含有碳原子時,其碳數為6以下為較佳,4以下為更佳。碳數4以下的烷氧基或碳數4以下的烯氧基為特佳。 在基板上形成硬化膜時,為了提高基板與硬化膜之間的黏附性,矽烷偶合劑不包含氟原子及矽原子(其中,水解性基團所鍵結之矽原子除外)為較佳,不包含氟原子、矽原子(其中,水解性基團所鍵結之矽原子除外)、被矽原子取代之伸烷基、碳數8以上的直鏈烷基及碳數3以上的支鏈烷基為較佳。<Silane coupling agent> A silane coupling agent means a compound containing a hydrolyzable group and other functional groups in the molecule. In addition, a hydrolyzable group such as an alkoxy group is bonded to a silicon atom. The hydrolyzable group refers to a substituent which is directly bonded to a silicon atom and can generate a siloxane bond by a hydrolysis reaction and/or a condensation reaction. As a hydrolyzable group, a halogen atom, an alkoxy group, an alkenyloxy group, and an alkenyloxy group are mentioned, for example. When the hydrolyzable group contains carbon atoms, the number of carbon atoms is preferably 6 or less, more preferably 4 or less. An alkoxy group having 4 or less carbon atoms or an alkenyloxy group having 4 or less carbon atoms is particularly preferred. When forming a cured film on a substrate, in order to improve the adhesion between the substrate and the cured film, it is preferable that the silane coupling agent does not contain fluorine atoms and silicon atoms (except for the silicon atoms bound by the hydrolyzable groups). Contains fluorine atom, silicon atom (excluding the silicon atom to which the hydrolyzable group is bonded), an extended alkyl group substituted by a silicon atom, a straight-chain alkyl group having 8 or more carbon atoms, and a branched-chain alkyl group having 3 or more carbon atoms is better.

矽烷偶合劑含有以以下的式(Z)表示之基團為較佳。*表示鍵結位置。 式(Z)*-Si-(RZ13 式(Z)中,RZ1 表示水解性基團,其定義如上述。The silane coupling agent preferably contains a group represented by the following formula (Z). * indicates bond position. Formula (Z)*-Si-(R Z1 ) 3 In the formula (Z), R Z1 represents a hydrolyzable group, which is as defined above.

矽烷偶合劑含有選自包括(甲基)丙烯醯氧基、環氧基及氧雜環丁基之群組之1種以上的硬化性官能基為較佳。硬化性官能基可直接與矽原子鍵結,亦可經由連結基與矽原子鍵結。 另外,作為上述矽烷偶合劑中所含之硬化性官能基的較佳態樣,還可舉出自由基聚合性基團。The silane coupling agent preferably contains at least one curable functional group selected from the group consisting of (meth)acryloyloxy, epoxy, and oxetanyl. The sclerosing functional group can be directly bonded to the silicon atom, or can also be bonded to the silicon atom through a linking group. Moreover, a radical polymerizable group is also mentioned as a preferable aspect of the curable functional group contained in the said silane coupling agent.

矽烷偶合劑的分子量並無特別限制,從操作性的角度考慮,多為100~1,000的情況,270以上為較佳,270~1,000為更佳。The molecular weight of the silane coupling agent is not particularly limited, but from the viewpoint of handleability, it is often 100 to 1,000, preferably 270 or more, and more preferably 270 to 1,000.

作為矽烷偶合劑的較佳態樣之一,可舉出以式(W)表示之矽烷偶合劑X。 式(W) RZ2 -Lz-Si-(RZ13 Rz1 表示水解性基團,定義如上述。 Rz2 表示硬化性官能基,定義如上述,較佳範圍亦如上述。 Lz表示單鍵或2價的連結基。當Lz表示2價的連結基時,作為2價的連結基,可舉出鹵素原子可取代之伸烷基、鹵素原子可取代之伸芳基、-NR12 -、-CONR12 -、-CO-、-CO2 -、SO2 NR12 -、-O-、-S-、-SO2 -或它們的組合。其中,選自包括碳數2~10的鹵素原子可取代之伸烷基及碳數6~12的鹵素原子可取代之伸芳基之群組之至少1種、或包括該些基團與選自包括-NR12 -、-CONR12 -、-CO-、-CO2 -、SO2 NR12 -、-O-、-S-及SO2 -之群組之至少1種基團的組合之基團為較佳,包括碳數2~10的鹵素原子可取代之伸烷基、-CO2 -、-O-、-CO-、-CONR12 -或該些基團的組合之基團為更佳。其中,上述R12 表示氫原子或甲基。As one of the preferable aspects of the silane coupling agent, the silane coupling agent X represented by the formula (W) can be mentioned. The formula (W) R Z2 -Lz-Si-(R Z1 ) 3 R z1 represents a hydrolyzable group, and is as defined above. R z2 represents a hardenable functional group, and is defined as above, and the preferred range is also as above. Lz represents a single bond or a divalent linking group. When Lz represents a divalent linking group, examples of the divalent linking group include an alkylene group which can be substituted by a halogen atom, an aryl group which can be substituted by a halogen atom, -NR 12 -, -CONR 12 -, -CO - , -CO2- , SO2NR12- , -O-, -S-, -SO2- , or a combination thereof. Among them, at least one selected from the group consisting of an alkylene group that can be substituted by a halogen atom of 2 to 10 carbon atoms and an aryl group that can be substituted by a halogen atom of 6 to 12 carbon atoms, or a combination of these groups. Combination of at least one group selected from the group consisting of -NR 12 -, -CONR 12 -, -CO-, -CO 2 -, SO 2 NR 12 -, -O-, -S- and SO 2 - The group is preferably, the group including the alkylene group, -CO 2 -, -O-, -CO-, -CONR 12 - or the combination of these groups which can be substituted by the halogen atom of carbon number 2-10 is better. Here, the above R 12 represents a hydrogen atom or a methyl group.

作為矽烷偶合劑X,可舉出N-β-胺乙基-γ-胺丙基-甲基二甲氧基矽烷(Shin-Etsu Chemical Co., Ltd.製造,商品名 KBM-602)、N-β-胺乙基-γ-胺丙基-三甲氧基矽烷(Shin-Etsu Chemical Co., Ltd.製造,商品名 KBM-603)、N-β-胺乙基-γ-胺丙基-三乙氧基矽烷(Shin-Etsu Chemical Co., Ltd.製造,商品名 KBE-602)、γ-胺丙基-三甲氧基矽烷(Shin-Etsu Chemical Co., Ltd.製造,商品名 KBM-903)、γ-胺丙基-三乙氧基矽烷(Shin-Etsu Chemical Co., Ltd.製造,商品名 KBE-903)、3-甲基丙烯醯氧基丙基三甲氧基矽烷(Shin-Etsu Chemical Co., Ltd.製造,商品名 KBM-503)及環氧丙氧基辛基三甲氧基矽烷(Shin-Etsu Chemical Co., Ltd.製造,商品名 KBM-4803)等。Examples of the silane coupling agent X include N-β-aminoethyl-γ-aminopropyl-methyldimethoxysilane (manufactured by Shin-Etsu Chemical Co., Ltd., trade name KBM-602), N-β-aminoethyl-γ-aminopropyl-methyldimethoxysilane (manufactured by Shin-Etsu Chemical Co., Ltd., trade name KBM-602), -β-Aminoethyl-γ-aminopropyl-trimethoxysilane (manufactured by Shin-Etsu Chemical Co., Ltd., trade name KBM-603), N-β-aminoethyl-γ-aminopropyl- Triethoxysilane (manufactured by Shin-Etsu Chemical Co., Ltd., trade name KBE-602), γ-aminopropyl-trimethoxysilane (manufactured by Shin-Etsu Chemical Co., Ltd., trade name KBM- 903), γ-aminopropyl-triethoxysilane (manufactured by Shin-Etsu Chemical Co., Ltd., trade name KBE-903), 3-methacryloyloxypropyltrimethoxysilane (Shin- manufactured by Etsu Chemical Co., Ltd., trade name KBM-503) and glycidoxyoctyltrimethoxysilane (manufactured by Shin-Etsu Chemical Co., Ltd., trade name KBM-4803) and the like.

作為矽烷偶合劑的其他較佳態樣,可舉出在分子內至少具有矽原子、氮原子、硬化性官能基,且含有與矽原子鍵結之水解性基團之矽烷偶合劑Y。 該矽烷偶合劑Y在分子內具有至少1個矽原子即可,矽原子能夠與以下的原子、取代基鍵結。該些可以係相同的原子、取代基,亦可不同。可鍵結之原子、取代基可舉出氫原子、鹵素原子、羥基、碳數1至20的烷基、烯基、炔基、芳基、可用烷基和/或芳基取代之胺基、矽烷基、碳數1至20的烷氧基、芳氧基等。該些取代基可進一步被矽基、烯基、炔基、芳基、烷氧基、芳氧基、硫代烷氧基、可用烷基和/或芳基取代之胺基、鹵素原子、磺醯胺基、烷氧基羰基、醯胺基、尿素基、銨基、烷基銨基、羧酸基或其鹽、磺基或其鹽等取代。 另外,矽原子上鍵結有至少1個水解性基團。水解性基團的定義如上述。 矽烷偶合劑Y中可包含以式(Z)表示之基團。As another preferable aspect of a silane coupling agent, the silane coupling agent Y which has at least a silicon atom, a nitrogen atom, and a hardenable functional group in a molecule|numerator, and contains the hydrolyzable group which couple|bonded with a silicon atom is mentioned. The silane coupling agent Y only needs to have at least one silicon atom in the molecule, and the silicon atom can bond with the following atoms and substituents. These may be the same atom and substituent, or may be different. The atoms and substituents that can be bonded include hydrogen atoms, halogen atoms, hydroxyl groups, alkyl groups having 1 to 20 carbon atoms, alkenyl groups, alkynyl groups, aryl groups, amine groups that may be substituted with alkyl groups and/or aryl groups, Silyl group, alkoxy group having 1 to 20 carbon atoms, aryloxy group, etc. These substituents may be further substituted by silyl groups, alkenyl groups, alkynyl groups, aryl groups, alkoxy groups, aryloxy groups, thioalkoxy groups, amine groups substituted with alkyl and/or aryl groups, halogen atoms, sulfonic groups amide group, alkoxycarbonyl group, amide group, urea group, ammonium group, alkylammonium group, carboxylic acid group or its salt, sulfo group or its salt, etc. are substituted. In addition, at least one hydrolyzable group is bonded to the silicon atom. The definition of the hydrolyzable group is as described above. The silane coupling agent Y may contain a group represented by the formula (Z).

矽烷偶合劑Y在分子內具有至少1個以上的氮原子,氮原子以二級胺基或者三級胺基的形態存在為較佳,亦即,氮原子作為取代基含有至少1個有機基為較佳。另外,作為胺基的結構,可以以含氮雜環的部分結構的形態存在於分子內,亦可作為苯胺等取代胺基存在。 其中,作為有機基,可舉出烷基、烯基、炔基、芳基或它們的組合。該些可進一步具有取代基,作為可導入之取代基,可舉出矽基、烯基、炔基、芳基、烷氧基、芳氧基、硫代烷氧基、胺基、鹵素原子、磺醯胺基、烷氧基羰基、羰基氧基、醯胺基、尿素基、伸烷氧基銨基、烷基銨基、羧酸基或其鹽、磺基等。 氮原子經由任意的有機連結基與硬化性官能基鍵結為較佳。作為較佳之有機連結基,能夠舉出可導入上述氮原子及與其鍵結之有機基之取代基。The silane coupling agent Y has at least one nitrogen atom in the molecule, and the nitrogen atom preferably exists in the form of a secondary amino group or a tertiary amino group, that is, the nitrogen atom contains at least one organic group as a substituent. better. Moreover, as a structure of an amino group, it may exist in a molecule|numerator in the form of the partial structure of a nitrogen-containing heterocyclic ring, and may exist as a substituted amino group, such as aniline. Among them, the organic group includes an alkyl group, an alkenyl group, an alkynyl group, an aryl group, or a combination thereof. These may further have a substituent, and examples of the substituent which can be introduced include a silyl group, an alkenyl group, an alkynyl group, an aryl group, an alkoxy group, an aryloxy group, a thioalkoxy group, an amino group, a halogen atom, Sulfonamide group, alkoxycarbonyl group, carbonyloxy group, amide group, urea group, alkoxyammonium group, alkylammonium group, carboxylic acid group or its salt, sulfo group and the like. The nitrogen atom is preferably bonded to the sclerosing functional group via an arbitrary organic linking group. As a preferable organic linking group, the substituent which can introduce|transduce the said nitrogen atom and the organic group which couple|bonded with it can be mentioned.

矽烷偶合劑Y中所含之硬化性官能基的定義如上述,較佳範圍亦如上述。 矽烷偶合劑Y中,在一個分子中可以具有至少1個以上的硬化性官能基,但亦可含有2個以上的硬化性官能基。從靈敏度、穩定性的觀點考慮,在分子內含有2~20個硬化性官能基為較佳,含有4~15個為更佳,含有6~10個為進一步較佳。The definition of the curable functional group contained in the silane coupling agent Y is as described above, and the preferred range is also as described above. The silane coupling agent Y may have at least one or more curable functional groups in one molecule, but may contain two or more curable functional groups. From the viewpoint of sensitivity and stability, it is preferable to contain 2 to 20 sclerosing functional groups in the molecule, more preferably 4 to 15, and even more preferably 6 to 10.

矽烷偶合劑X及矽烷偶合劑Y的分子量並無特別限制,可舉出上述範圍(270以上為較佳)。The molecular weights of the silane coupling agent X and the silane coupling agent Y are not particularly limited, and the above-mentioned range is exemplified (preferably 270 or more).

硬化性組成物中的矽烷偶合劑的含量相對於硬化性組成物中的總固體成分,0.1~10質量%為較佳,0.5~8質量%為更佳,1.0~6質量%為進一步較佳。The content of the silane coupling agent in the curable composition is preferably 0.1 to 10% by mass, more preferably 0.5 to 8% by mass, and even more preferably 1.0 to 6% by mass relative to the total solid content in the curable composition .

硬化性組成物可單獨含有1種矽烷偶合劑,亦可含有2種以上。當硬化性組成物含有2種以上的矽烷偶合劑時,其合計在上述範圍內即可。The curable composition may contain one type of silane coupling agent alone, or may contain two or more types. When the curable composition contains two or more types of silane coupling agents, the total of the silane coupling agents may be within the above range.

<紫外線吸收劑> 硬化性組成物可含有紫外線吸收劑。藉此,能夠將硬化膜的圖案形狀設為更優異(精細)者。 作為紫外線吸收劑,能夠使用水楊酸系、二苯甲酮系、苯并三唑系、取代丙烯腈系及三嗪系的紫外線吸收劑。作為該些的具體例,能夠使用日本特開2012-068418號公報的0137~0142段(所對應之US2012/0068292的0251~0254段)之化合物,能夠援用該些內容,將其編入本說明書中。 此外,二乙基胺基-苯基磺醯基系紫外線吸收劑(DAITO CHEMICAL CO.,LTD.製造,商品名:UV-503)等亦可較佳地被使用。 作為紫外線吸收劑,可舉出日本特開2012-32556號公報的0134~0148段中例示之化合物。 紫外線吸收劑的含量相對於硬化性組成物的總固體成分,0.001~15質量%為較佳,0.01~10質量%為更佳,0.1~5質量%為進一步較佳。<Ultraviolet absorber> The curable composition may contain an ultraviolet absorber. Thereby, the pattern shape of a cured film can be made into a more excellent (fine) one. As the ultraviolet absorber, salicylic acid-based, benzophenone-based, benzotriazole-based, substituted acrylonitrile-based, and triazine-based ultraviolet absorbers can be used. As specific examples of these, compounds in paragraphs 0137 to 0142 of JP 2012-068418 A (corresponding to paragraphs 0251 to 0254 of US 2012/0068292 ) can be used, and these contents can be cited and incorporated into the present specification . In addition, a diethylamino-phenylsulfonyl-based ultraviolet absorber (manufactured by DAITO CHEMICAL CO., LTD., trade name: UV-503) or the like can also be preferably used. As the ultraviolet absorber, the compounds exemplified in paragraphs 0134 to 0148 of Japanese Unexamined Patent Application Publication No. 2012-32556 can be mentioned. The content of the ultraviolet absorber is preferably 0.001 to 15% by mass, more preferably 0.01 to 10% by mass, and even more preferably 0.1 to 5% by mass relative to the total solid content of the curable composition.

<熱聚合起始劑> 硬化性組成物可含有熱聚合起始劑。 從感光性樹脂組成物的穩定性及硬化性的觀點考慮,熱聚合起始劑的1分鐘半衰期溫度為120~300℃為較佳,150~250℃為更佳,150~230℃為進一步較佳,170~200℃為特佳。只要熱聚合起始劑的1分鐘半衰期溫度在上述下限值以上,則在塗膜乾燥時不會過度硬化,顯影性良好。若熱聚合起始劑的1分鐘半衰期溫度在上述下限值以下,則硬化性良好。 從揮發性的觀點考慮,熱聚合起始劑的分子量為100以上為較佳,150以上為更佳,200以上為進一步較佳,250以上為特佳。上限例如為1,000以下為較佳,500以下為更佳。若熱聚合起始劑的分子量在上述下限值以上,則能夠有效地抑制在塗膜乾燥時的熱聚合起始劑的揮發,硬化性良好。<Thermal polymerization initiator> The curable composition may contain a thermal polymerization initiator. From the viewpoints of the stability and curability of the photosensitive resin composition, the half-life temperature for one minute of the thermal polymerization initiator is preferably 120 to 300°C, more preferably 150 to 250°C, and even more preferably 150 to 230°C Best, 170~200℃ is particularly good. As long as the 1-minute half-life temperature of the thermal polymerization initiator is equal to or higher than the above lower limit value, the coating film will not be hardened excessively at the time of drying, and developability will be favorable. Curability is favorable as the 1-minute half-life temperature of a thermal polymerization initiator is below the said lower limit. From the viewpoint of volatility, the molecular weight of the thermal polymerization initiator is preferably 100 or more, more preferably 150 or more, further more preferably 200 or more, and particularly preferably 250 or more. For example, the upper limit is preferably 1,000 or less, and more preferably 500 or less. When the molecular weight of the thermal polymerization initiator is at least the above lower limit value, the volatilization of the thermal polymerization initiator at the time of drying of the coating film can be effectively suppressed, and the curability is good.

熱聚合起始劑能夠使用藉由熱而產生自由基之化合物(以下,還簡稱為熱自由基產生劑)或藉由熱而產生酸之化合物(以下,還簡稱為熱酸產生劑)。尤其,熱自由基產生劑為較佳。熱自由基產生劑能夠促進烯屬不飽和基的自由基聚合,因此,在作為交聯劑而使用了包含含有烯屬不飽和鍵之基團之化合物時,能夠更有效地促進交聯劑的聚合反應,能夠以更短的時間硬化。另外,藉由熱酸產生劑來引發及促進聚合反應之反應為環氧的開環聚合。由於環氧的開環聚合與自由基聚合相比聚合速度緩慢,因此有時無法充分地促進硬化性。As the thermal polymerization initiator, a compound which generates a radical by heat (hereinafter, also simply referred to as a thermal radical generator) or a compound which generates an acid by heat (hereinafter, also abbreviated as a thermal acid generator) can be used. In particular, a thermal radical generator is preferable. The thermal radical generator can promote the radical polymerization of ethylenically unsaturated groups, so when a compound containing an ethylenically unsaturated bond-containing group is used as the crosslinking agent, it can more effectively promote the crosslinking agent. Polymerization, can harden in a shorter time. In addition, the reaction in which the polymerization reaction is initiated and accelerated by the thermal acid generator is the ring-opening polymerization of epoxy. Since the polymerization rate of epoxy ring-opening polymerization is slow compared with radical polymerization, hardenability may not be fully accelerated|stimulated.

(熱自由基產生劑) 作為熱自由基產生劑,能夠使用公知的熱自由基產生劑。熱自由基產生劑藉由熱能而產生自由基,為引發或促進交聯劑的聚合反應之化合物。 作為熱自由基產生劑,可舉出芳香族酮類、鎓鹽化合物、有機過氧化物、硫化合物、六芳基雙咪唑化合物、酮肟酯化合物、硼酸鹽化合物、吖嗪鎓(adinium)化合物、茂金屬化合物、活性酯化合物、具有碳-鹵鍵之化合物及偶氮系化合物等。其中,偶氮系化合物為更佳。(Thermal radical generator) As a thermal radical generator, a well-known thermal radical generator can be used. The thermal free radical generator generates free radicals by thermal energy, and is a compound that initiates or promotes the polymerization reaction of the crosslinking agent. Examples of thermal radical generators include aromatic ketones, onium salt compounds, organic peroxides, sulfur compounds, hexaarylbisimidazole compounds, ketoxime ester compounds, borate compounds, and adinium compounds , metallocene compounds, active ester compounds, compounds with carbon-halogen bonds and azo compounds. Among them, azo-based compounds are more preferable.

[硬化性組成物的製造方法] 硬化性組成物的製造方法含有以下的混合及分散製程。含有靜置製程和/或過濾製程為較佳。以下,詳細說明各製程的較佳態樣。[Manufacturing method of curable composition] The manufacturing method of a curable composition includes the following mixing and dispersion processes. It is preferable to include a static process and/or a filtration process. Hereinafter, preferred aspects of each process will be described in detail.

〔混合及分散製程〕 混合及分散製程係藉由公知的混合方法(例如,攪拌機、均質器、高壓乳化裝置、濕式粉碎機及濕式分散機)混合上述成分來獲得硬化性組成物之製程。混合及分散製程中,可一次性配合構成硬化性組成物之各成分,亦可在將各成分溶解或分散於有機溶劑之後依次配合。配合時的投入順序及作業條件並不特別受限。混合及分散製程可含有製作分散液之製程。[Mixing and Dispersing Process] The mixing and dispersing process is a process for obtaining a curable composition by mixing the above-mentioned components by well-known mixing methods (eg, mixer, homogenizer, high-pressure emulsifier, wet pulverizer, and wet disperser). . In the mixing and dispersing process, the components constituting the curable composition may be blended at one time, or the components may be blended sequentially after being dissolved or dispersed in an organic solvent. The input sequence and operating conditions at the time of cooperation are not particularly limited. The mixing and dispersing process may include the process of making the dispersion.

(製作分散液之製程) 製作分散液之製程係混合著色劑、分散劑及溶劑,並藉由上述方法分散著色劑來製作分散液之製程。能夠向所製作之分散液中混合其他成分來製造硬化性組成物。 製造分散液之製程中,作為用於顏料的分散之機械力,可舉出壓縮、壓榨、衝擊、裁斷或孔蝕等。作為該些處理的具體例,可舉出珠磨、混砂、輥磨、高速葉輪、砂磨、噴射流混合、高壓濕式微粒化及超聲波分散等。並且,能夠較佳地使用“分散技術大全,株式會社資訊機構發行,2005年7月15日”及“以懸浮液(suspension)(固/液分散系統)為中心之分散技術與工業應用的實際綜合資料集,經營開發中心出版部發行,1978年10月10日”中記載之處理及分散機。 在製作分散液之製程中,可進行基於鹽磨製程之顏料的微細化處理。用於鹽磨製程之原材料、設備及處理條件等例如能夠使用日本特開2015-194521號及日本特開2012-046629號中記載者。 硬化性組成物的製造方法含有藉由熱電漿法獲得上述著色劑之製程為較佳。獲得著色劑之製程在混合上述各成分之前實施。基於熱電漿法之著色劑的具體製造製程的態様如上述。(Process of Making Dispersion Liquid) The process of making dispersion liquid is a process of mixing colorant, dispersant and solvent, and dispersing colorant by the above method to make dispersion liquid. A curable composition can be produced by mixing other components with the produced dispersion. In the process of producing the dispersion liquid, as the mechanical force for dispersing the pigment, compression, pressing, impact, cutting, pitting, etc. can be mentioned. Specific examples of these treatments include bead milling, sand mixing, roll milling, high-speed impeller, sand milling, jet mixing, high-pressure wet micronization, and ultrasonic dispersion. In addition, the "Encyclopedia of Dispersion Technology, issued by Information Corporation, July 15, 2005" and "Suspension (Solid/Liquid Dispersion System)-Centered Dispersion Technology and Practical Application in Industry" can be preferably used. A comprehensive collection of documents, issued by the Publishing Department of the Management Development Center, on October 10, 1978" for processing and dispersing machines. In the process of making the dispersion, the micronization of the pigment based on the salt milling process can be performed. The raw materials, equipment, processing conditions, etc. used in the salt grinding process can be used, for example, those described in Japanese Patent Application Laid-Open No. 2015-194521 and Japanese Patent Application Laid-Open No. 2012-046629. It is preferable that the manufacturing method of a curable composition contains the process of obtaining the said coloring agent by the thermoplasma method. The process of obtaining the colorant is carried out before mixing the above-mentioned ingredients. The state of the specific manufacturing process of the colorant based on the thermoplasma method is as described above.

<靜置製程> 著色劑可在供給至混合及分散製程或製作分散液之製程之前經過以下的靜置製程。 靜置製程係將藉由熱電漿法獲得之著色劑在其製造之後並不暴露於大氣,而是在氧濃度得到控制之密封容器內靜置規定時間(12~72小時為較佳,12~48小時為更佳,12~24小時為進一步較佳)之製程。此時,密封容器內的水分的含量得到控制為較佳。<Standing process> The colorant can be subjected to the following resting process before being supplied to the mixing and dispersing process or the process of preparing the dispersion liquid. The standing process is that the colorant obtained by the thermoplasma method is not exposed to the atmosphere after its manufacture, but is left standing in a sealed container with controlled oxygen concentration for a specified time (12-72 hours is preferred, 12- 48 hours is more preferable, and 12-24 hours is further preferable). At this time, it is preferable that the content of moisture in the sealed container is controlled.

此時,密封容器內的氧(O2 )濃度及水分的含量分別為100ppm以下為較佳,10ppm以下為更佳,1ppm以下為進一步較佳。 密封容器內的氧(O2 )濃度及水分的含量能夠藉由調整供給至密封容器內之惰性氣體中的氧濃度及水分量來進行調整。作為惰性氣體,使用氮氣及氬氣為較佳,其中,使用氮氣為更佳。 若經過上述靜置製程,則著色劑的表面及晶界變得穩定。藉此,能夠抑制使硬化性組成物硬化來獲得之硬化膜的針孔的產生。 另外,上述靜置製程能夠被在著色劑的製造方法中說明之製程H代替,從硬化性組成物具有更優異之本發明的效果之角度考慮,藉由製程H代替為較佳。In this case, the oxygen (O 2 ) concentration and the moisture content in the sealed container are preferably 100 ppm or less, more preferably 10 ppm or less, and even more preferably 1 ppm or less. The oxygen (O 2 ) concentration and the moisture content in the sealed container can be adjusted by adjusting the oxygen concentration and the moisture content in the inert gas supplied into the sealed container. As the inert gas, nitrogen gas and argon gas are preferably used, and among them, nitrogen gas is more preferably used. The surface and grain boundaries of the colorant become stable after the above-mentioned standing process. Thereby, generation|occurrence|production of the pinhole of the cured film obtained by hardening a curable composition can be suppressed. In addition, the above-mentioned resting process can be replaced by the process H described in the manufacturing method of the colorant, and it is preferable to replace by the process H from the viewpoint that the curable composition has more excellent effects of the present invention.

<過濾製程> 過濾製程係藉由過濾器對藉由上述混合及分散製程製造之硬化性組成物進行過濾之製程。過濾製程中,能夠從硬化性組成物去除異物和/或減少缺陷。 作為過濾器,只要是一直以來用於過濾用途等者,則能夠不特別受限地使用。例如可舉出基於PTFE(polytetrafluoroethylene:聚四氟乙烯)等氟樹脂、尼龍等聚醯胺系樹脂、聚乙烯及聚丙烯(PP)等聚烯烃樹脂(含有高密度、超高分子量)等之過濾器。該些原材料中,聚丙烯(含有高密度聚丙烯)、尼龍為較佳。 過濾器的適當的孔徑為0.1~7.0μm左右,0.2~2.5μm左右為較佳,0.2~1.5μm左右為更佳,0.3~0.7μm為進一步較佳。藉由設為該範圍,能夠抑制顏料的過濾堵塞,並且能夠確實地去除顏料中所含之雜質及凝聚物等微細的異物。 使用過濾器時,亦可組合不同的過濾器。此時,藉由第1過濾器的過濾可以僅進行1次,亦可進行2次以上。組合不同的過濾器來進行2次以上過濾時,第2次之後的孔徑與第1次過濾的孔徑相同或大於第1次過濾的孔徑為較佳。亦可組合於上述範圍內不同孔徑的第1過濾器。此處的孔徑能夠參閱過濾器製造商的標稱值。作為市售的過濾器,例如,可從由NIHON PALL LTD.、ADVANTEC TOYO KAISHA, LTD.、Nihon Entegris K.K.(舊Mykrolis Corpration)或KITZ MICRO FILTER CORPORATION等提供之各種過濾器中選擇。 第2過濾器能夠使用以與上述第1過濾器相同的材料等形成者。第2過濾器的適當的孔徑為0.2~10.0μm左右,0.2~7.0μm左右為較佳,0.3~6.0μm左右為更佳。<Filtering process> The filtering process is a process of filtering the curable composition produced by the above-mentioned mixing and dispersing process through a filter. In the filtration process, foreign matter and/or defects can be removed from the hardening composition. As a filter, as long as it is conventionally used for filtering purposes, it can be used without particular limitation. For example, filtration based on fluorine resins such as PTFE (polytetrafluoroethylene), polyamide resins such as nylon, and polyolefin resins (including high density and ultra-high molecular weight) such as polyethylene and polypropylene (PP) can be mentioned. device. Among these raw materials, polypropylene (containing high-density polypropylene) and nylon are preferred. The appropriate pore size of the filter is about 0.1 to 7.0 μm, preferably about 0.2 to 2.5 μm, more preferably about 0.2 to 1.5 μm, and even more preferably about 0.3 to 0.7 μm. By setting it as this range, the filter clogging of the pigment can be suppressed, and fine foreign matter such as impurities and aggregates contained in the pigment can be surely removed. When using filters, it is also possible to combine different filters. In this case, the filtration by the first filter may be performed only once, or may be performed twice or more. When filtration is performed two or more times by combining different filters, it is preferable that the pore diameter after the second filtration is the same as or larger than the pore diameter of the first filtration. It is also possible to combine the first filters with different pore sizes within the above range. The pore size here can be found in the filter manufacturer's nominal value. As a commercially available filter, for example, it is possible to select from various filters provided by NIHON PALL LTD., ADVANTEC TOYO KAISHA, LTD., Nihon Entegris K.K. (former Mykrolis Corpration), KITZ MICRO FILTER CORPORATION, and the like. The second filter can be formed of the same material or the like as the first filter described above. The suitable pore diameter of the second filter is about 0.2 to 10.0 μm, preferably about 0.2 to 7.0 μm, and more preferably about 0.3 to 6.0 μm.

[硬化膜(遮光膜)] 硬化膜使上述硬化性組成物硬化來獲得。硬化膜中包含著色劑。硬化膜較佳地用作遮光膜,具體而言,較佳地用作影像感測器的受光部周邊部分的遮光。 以下,作為一例,對硬化膜用作影像感測器的受光部周邊部分的遮光膜之情況進行說明。[Curing film (light-shielding film)] A cured film is obtained by curing the above-mentioned curable composition. The cured film contains a colorant. The cured film is preferably used as a light-shielding film, and specifically, it is preferably used as a light-shielding film for a peripheral portion of a light-receiving portion of an image sensor. Hereinafter, the case where a cured film is used as a light-shielding film of the peripheral part of the light-receiving part of an image sensor is demonstrated as an example.

作為遮光膜的膜厚,並無特別限定,從遮光膜具有更優異之本發明的效果之角度考慮,以乾燥後的膜厚計,0.2μm以上且50μm以下為較佳,0.3μm以上且10μm以下為更佳,0.3μm以上且5μm以下為進一步較佳。上述硬化性組成物的每單位體積的光學濃度較高(遮光性較高),故與先前使用黑色顏料之硬化性組成物相比,還能夠更加減小膜厚。 作為遮光膜的尺寸(設置於感測器受光部周邊之遮光膜的一邊的長度),從遮光膜具有更優異之本發明的效果之角度考慮,0.001mm以上10mm以下為較佳,0.05mm以上7mm以下為更佳,0.1mm以上3.5mm以下為進一步較佳。The film thickness of the light-shielding film is not particularly limited, but from the viewpoint that the light-shielding film has more excellent effects of the present invention, the film thickness after drying is preferably 0.2 μm or more and 50 μm or less, and 0.3 μm or more and 10 μm. It is more preferably not more than 0.3 μm and not more than 5 μm. The above-mentioned curable composition has a high optical density per unit volume (high light-shielding property), so that the film thickness can be further reduced as compared with a conventional curable composition using a black pigment. The size of the light-shielding film (the length of one side of the light-shielding film provided around the light-receiving portion of the sensor) is preferably 0.001 mm or more and 10 mm or less, and 0.05 mm or more, from the viewpoint that the light-shielding film has more excellent effects of the present invention. 7 mm or less is more preferable, and 0.1 mm or more and 3.5 mm or less are more preferable.

〔硬化膜的製造方法〕 接著,對硬化膜(遮光膜)的製造方法進行說明。 以下,按每個製程對製造方法進行詳細說明。THE MANUFACTURING METHOD OF A CURED FILM Next, the manufacturing method of a cured film (light-shielding film) is demonstrated. Hereinafter, the manufacturing method will be described in detail for each process.

硬化膜的製造方法含有以下的硬化性組成物層形成製程及曝光製程。硬化膜的製造方法還含有顯影製程為較佳。 硬化性組成物層形成製程:在支撐體上形成硬化性組成物層之製程。 曝光製程:對上述硬化性組成物層進行曝光之製程。 顯影製程:對曝光後的硬化性組成物層進行顯影來形成圖案狀的硬化膜(遮光膜)之製程。The manufacturing method of a cured film includes the following curable composition layer formation process and exposure process. Preferably, the manufacturing method of the cured film further includes a developing process. Curable composition layer forming process: a process of forming a curable composition layer on a support. Exposure process: the process of exposing the above-mentioned curable composition layer. Development process: The process of developing the cured composition layer after exposure to form a patterned cured film (light-shielding film).

具體而言,將上述硬化性組成物直接或經由其他層塗佈於基板上來形成硬化性組成物層(硬化性組成物層形成製程),經由規定的遮罩圖案進行曝光,並僅使被光照射之塗佈膜部分硬化(曝光製程),利用顯影液進行顯影(顯影製程),藉此能夠製造上述硬化膜。 以下,對上述各製程進行說明。Specifically, the above-mentioned curable composition is applied directly or through another layer on a substrate to form a curable composition layer (curable composition layer forming process), exposed through a predetermined mask pattern, and only exposed to light The irradiated coating film is partially cured (exposure process) and developed with a developer (development process), whereby the above-mentioned cured film can be produced. Hereinafter, each of the above-mentioned processes will be described.

<硬化性組成物層形成製程> 硬化性組成物層形成製程係在支撐體(以下,還稱為“基板”。)上形成硬化性組成物層之製程。其中,包含在支撐體上塗佈硬化性組成物來形成硬化性組成物層之塗佈製程為較佳,包含在支撐體上直接塗佈硬化性組成物,從而在支撐體上形成硬化性組成物層之塗佈製程為更佳。 作為基板,例如可舉出用於液晶顯示裝置等之無鹼玻璃、鈉玻璃、Pyrex(註冊商標)玻璃、石英玻璃及對該些附著透明導電膜者、用於固體攝像元件等之光電轉換元件基板(例如,矽基板等)、CCD(電荷耦合元件(Charge Coupled Device))基板、以及CMOS(互補型金屬氧化物半導體(Complementary Metal-Oxide Semiconductor))基板等。 為了改善與上部層的黏附、防止物質的擴散或者基板表面的平坦化,支撐體可具備底塗層(以下,還稱為“附帶底塗層之支撐體”)。<The curable composition layer formation process> The curable composition layer formation process is a process of forming a curable composition layer on a support body (henceforth a "substrate"). Among them, the coating process including coating the curable composition on the support to form the curable composition layer is preferably, including directly coating the curable composition on the support, so as to form the curable composition on the support The coating process of the material layer is better. Examples of the substrate include alkali-free glass, soda glass, Pyrex (registered trademark) glass, and quartz glass used in liquid crystal display devices, and photoelectric conversion elements used in solid-state imaging elements to which transparent conductive films are attached. Substrates (eg, silicon substrates, etc.), CCD (Charge Coupled Device) substrates, and CMOS (Complementary Metal-Oxide Semiconductor) substrates, etc. In order to improve adhesion to the upper layer, prevent diffusion of substances, or planarize the surface of the substrate, the support may be provided with an undercoat layer (hereinafter, also referred to as "support with undercoat layer").

作為向基板上塗佈硬化性組成物的方法,能夠適用狹縫塗佈法、噴墨法、旋塗法、流延塗佈法、輥塗法及網版印刷法等各種塗佈方法。As a method of applying the curable composition to the substrate, various application methods such as a slit coating method, an ink jet method, a spin coating method, a casting coating method, a roll coating method, and a screen printing method can be applied.

在製造固體攝像元件用的含有黑矩陣之濾色器時,作為硬化性組成物的塗佈膜厚,從解析度的觀點考慮,0.35μm以上且1.5μm以下為較佳,0.40μm以上且1.0μm以下為更佳。When manufacturing a color filter containing a black matrix for a solid-state imaging element, the coating film thickness of the curable composition is preferably 0.35 μm or more and 1.5 μm or less, and 0.40 μm or more and 1.0 μm from the viewpoint of resolution. More preferably, it is below μm.

塗佈於基板上之硬化性組成物通常在70℃以上且110℃以下,2分鐘以上且4分鐘以下的程度的條件下進行乾燥。藉此,能夠形成硬化性組成物層。The curable composition applied on the substrate is usually dried under the conditions of 70° C. or more and 110° C. or less and about 2 minutes or more and 4 minutes or less. Thereby, a curable composition layer can be formed.

<曝光製程> 曝光製程係經由遮罩對在硬化性組成物層形成製程中形成之硬化性組成物層(塗佈膜)進行曝光,並僅使被光照射之塗佈膜部分硬化之製程。 曝光藉由光化射線或放射線的照射來進行為較佳,尤其,g射線、h射線及i射線等紫外線為較佳,高壓水銀燈為更佳。曝光量並無特別限制,能夠藉由所使用之顏料的種類和/或遮罩圖案形狀來適當選擇。例如,對於藉由含有實施例中所記載之黑色顏料之硬化性組成物而形成之塗佈膜,曝光量的下限值為50mJ/cm2 以上為較佳,80mJ/cm2 以上為更佳。曝光量的上限值為1,500mJ/cm2 以下為較佳,小於500mJ/cm2 為更佳。若曝光量為80mJ/cm2 以上且小於500mJ/cm2 ,則硬化膜(遮光膜)的製造方法具有更優異之穩定性及生產性。 並且,對於藉由含有實施例中所記載之彩色顏料之硬化性組成物而形成之塗佈膜,曝光量的下限值為50mJ/cm2 以上為較佳,80mJ/cm2 以上為更佳。曝光量的上限值為1,500mJ/cm2 以下為較佳,小於500mJ/cm2 為更佳,小於400mJ/cm2 為進一步較佳,小於300mJ/cm2 為特佳。若曝光量在80~小於300mJ/cm2 ,則硬化膜的製造方法具有更優異之穩定性及生產性。 從提高解析度的觀點考慮,固體攝像元件用的遮光膜形成中,基於i射線步進機之曝光為較佳。<Exposure process> The exposure process is a process of exposing the curable composition layer (coating film) formed in the curable composition layer forming process through a mask, and only partially curing the light-irradiated coating film. The exposure is preferably performed by irradiation with actinic rays or radiation, especially ultraviolet rays such as g rays, h rays, and i rays, and more preferably a high-pressure mercury lamp. The exposure amount is not particularly limited, and can be appropriately selected depending on the type of pigment used and/or the shape of the mask pattern. For example, for the coating film formed from the curable composition containing the black pigment described in the examples, the lower limit of the exposure amount is preferably 50 mJ/cm 2 or more, more preferably 80 mJ/cm 2 or more . The upper limit of the exposure amount is preferably 1,500 mJ/cm 2 or less, and more preferably less than 500 mJ/cm 2 . If the exposure amount is 80 mJ/cm 2 or more and less than 500 mJ/cm 2 , the manufacturing method of the cured film (light-shielding film) has more excellent stability and productivity. In addition, the lower limit of the exposure amount is preferably 50 mJ/cm 2 or more, more preferably 80 mJ/cm 2 or more, for the coating films formed from the curable compositions containing the color pigments described in the examples. . The upper limit of the exposure amount is preferably 1,500 mJ/cm 2 or less, more preferably less than 500 mJ/cm 2 , further preferably less than 400 mJ/cm 2 , and particularly preferably less than 300 mJ/cm 2 . If the exposure amount is 80 to less than 300 mJ/cm 2 , the method for producing a cured film has more excellent stability and productivity. From the viewpoint of improving the resolution, exposure by an i-ray stepper is preferable in the formation of a light shielding film for a solid-state imaging element.

<顯影製程> 顯影製程係對已曝光之硬化性組成物層進行顯影之製程。藉由顯影製程,能夠獲得圖案狀的硬化膜。 上述硬化膜的製造方法含有顯影製程及下述清洗製程為較佳。顯影製程中,進行鹼顯影處理(顯影製程),使曝光製程中的光未照射部分溶出於鹼水溶液。藉此,僅殘留已光硬化之部分(被光照射之塗佈膜部分)。 當作為顯影液,製作固體攝像元件用的含有黑矩陣之遮光性濾色器時,不會損傷基底的電路等之有機鹼顯影液為較佳。顯影溫度通常為20~30℃為較佳,顯影時間為20~90秒為較佳。<Development process> The development process is a process of developing the exposed curable composition layer. Through the development process, a patterned cured film can be obtained. Preferably, the manufacturing method of the above-mentioned cured film includes a developing process and the following cleaning process. In the development process, an alkali development treatment (development process) is performed, so that the unirradiated part of the light in the exposure process is dissolved in the alkali aqueous solution. Thereby, only the photohardened portion (the portion of the coating film irradiated with light) remains. When producing a light-shielding color filter containing a black matrix for a solid-state imaging element as a developing solution, an organic alkali developing solution that does not damage the circuit of the substrate and the like is preferable. The development temperature is usually preferably 20 to 30°C, and the development time is preferably 20 to 90 seconds.

作為鹼性水溶液,例如可舉出無機系顯影液及有機系顯影液。作為無機系顯影液,可舉出將氫氧化鈉、氫氧化鉀、碳酸鈉、碳酸氫鈉、矽酸鈉或偏矽酸鈉,溶解成濃度為0.001~10質量%,較佳地為0.01~1質量%之鹼性水溶液。作為有機系顯影液,可舉出將氨水、乙胺、二乙胺、二甲基乙醇胺、四甲基氫氧化銨、四乙基氫氧化銨、膽鹼、吡咯、哌啶或1,8-二氮雜雙環-[5.4.0]-7-十一碳烯等有機鹼性化合物,溶解成濃度為0.001~10質量%,較佳地為0.01~1質量%之鹼性水溶液。鹼性水溶液中,例如還能夠添加適量的甲醇及乙醇等水溶性有機溶劑和/或界面活性劑等。另外,作為顯影方法,例如,能夠利用旋覆浸沒顯影及噴淋顯影方法等。As an alkaline aqueous solution, an inorganic type developing solution and an organic type developing solution are mentioned, for example. Examples of the inorganic developer include sodium hydroxide, potassium hydroxide, sodium carbonate, sodium bicarbonate, sodium silicate, or sodium metasilicate dissolved in a concentration of 0.001 to 10% by mass, preferably 0.01 to 10% by mass. 1 mass % alkaline aqueous solution. Examples of the organic developer include aqueous ammonia, ethylamine, diethylamine, dimethylethanolamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide, choline, pyrrole, piperidine, or 1,8- Organic basic compounds such as diazabicyclo-[5.4.0]-7-undecene are dissolved in an alkaline aqueous solution having a concentration of 0.001 to 10% by mass, preferably 0.01 to 1% by mass. To the alkaline aqueous solution, for example, an appropriate amount of a water-soluble organic solvent such as methanol and ethanol and/or a surfactant can be added. In addition, as a development method, for example, a spin-on immersion development method, a shower development method, or the like can be used.

<清洗製程> 清洗製程係藉由純水等對已顯影之硬化性組成物層進行清洗(沖洗)之製程。作為清洗方法,並無特別限制,能夠利用公知的清洗方法。<Cleaning process> The cleaning process is a process of cleaning (rinsing) the developed curable composition layer with pure water or the like. There is no restriction|limiting in particular as a cleaning method, A well-known cleaning method can be utilized.

另外,上述硬化膜的製造方法可在上述顯影製程之後含有加熱硬化膜之後烘烤製程和/或對硬化膜進行整面曝光之硬化製程。In addition, the manufacturing method of the said cured film may include a baking process after heating the cured film and/or a curing process of exposing the whole surface of the cured film after the development process.

含有硬化膜(黑矩陣)之濾色器適於CCD影像感測器和/或CMOS影像感測器等固體攝像元件。尤其適於超過100万像素之高解析度的CCD影像感測器和/或CMOS影像感測器等。亦即,含有上述硬化膜之濾色器適於固體攝像元件。濾色器可含有如下結構,亦即,在藉由隔壁例如分割成格子狀之空間,埋入有形成各顏色像素之硬化膜。 上述硬化膜(黑矩陣)例如配置於構成CCD影像感測器和/或CMOS影像感測器等之各像素的受光部與用於聚光的微透鏡之間。Color filters containing a hardened film (black matrix) are suitable for solid-state imaging devices such as CCD image sensors and/or CMOS image sensors. It is especially suitable for high-resolution CCD image sensors and/or CMOS image sensors of more than 1 million pixels. That is, the color filter containing the said cured film is suitable for a solid-state imaging element. The color filter may include a structure in which a cured film for forming each color pixel is embedded in a space divided into a lattice shape by a partition wall, for example. The said cured film (black matrix) is arrange|positioned between the light-receiving part of each pixel which comprises a CCD image sensor and/or a CMOS image sensor, etc., and the microlens for condensing light, for example.

[固體攝像元件] 上述固體攝像元件含有上述硬化膜(黑矩陣)。固體攝像元件含有黑矩陣,而且,依據需要含有包含其他顏色(3色或者4色)的像素之圖案狀皮膜之濾色器為較佳。 固體攝像元件只要含有上述黑矩陣且作為固體攝像元件發揮作用,則並無特別限制,例如可舉出在基板上含有包含構成固體攝像元件(CCD影像感測器及CMOS影像感測器等)的受光區之複數個光電二極體及多晶矽等之受光元件,在基板的受光元件形成面的相反側的面含有上述黑矩陣之固體攝像元件。 濾色器亦可具有如下結構,亦即,在藉由隔壁例如分割成格子狀之空間,埋入有形成各顏色像素之硬化膜。此時的隔壁相對於各顏色像素為低折射率為較佳。作為含有該種結構之攝像元件的例子,可舉出日本特開2012-227478號公報及日本特開2014-179577號公報中記載之固體攝像元件。[Solid-State Imaging Device] The solid-state imaging device includes the above-described cured film (black matrix). The solid-state imaging element includes a black matrix, and it is preferable to include a color filter including a patterned film including pixels of other colors (three colors or four colors) as required. The solid-state imaging element is not particularly limited as long as it includes the above-mentioned black matrix and functions as a solid-state imaging element. A plurality of photodiodes in the light-receiving region and light-receiving elements such as polysilicon include the solid-state imaging element of the black matrix on the surface opposite to the light-receiving element-forming surface of the substrate. The color filter may have a structure in which a cured film forming each color pixel is embedded in a space divided into a lattice shape by a partition wall, for example. In this case, it is preferable that the partition wall has a low refractive index with respect to each color pixel. As an example of an imaging element having such a structure, the solid-state imaging element described in Japanese Patent Application Laid-Open No. 2012-227478 and Japanese Patent Application Laid-Open No. 2014-179577 can be mentioned.

[圖像顯示裝置] 上述硬化膜能夠較佳地使用於圖像顯示裝置(例如液晶顯示裝置及有機電致發光顯示裝置等)。[Image Display Device] The cured film described above can be preferably used for an image display device (eg, a liquid crystal display device, an organic electroluminescence display device, and the like).

對於圖像顯示裝置的定義及各圖像顯示裝置的詳細內容,例如記載於“電子顯示裝置(佐佐木 昭夫著、Kogyo Chosakai Publishing Co.,Ltd. 1990年發行)”及“顯示裝置(伊吹 順章著、產業圖書株式會社平成元年發行)”等中。對於液晶顯示裝置,例如記載於“第二代液晶顯示器技術(內田 龍男編輯、Kogyo Chosakai Publishing Co.,Ltd. 1994年發行)”。上述硬化膜例如適於上述“第二代液晶顯示器技術”中記載之方式的液晶顯示裝置。The definition of an image display device and the details of each image display device are described in, for example, "Electronic Display Device (Akio Sasaki, published by Kogyo Chosakai Publishing Co., Ltd. in 1990)" and "Display Device (Ibuki Junsho). published by Sangyo Book Co., Ltd. in Heisei 1)" etc. The liquid crystal display device is described, for example, in "Second Generation Liquid Crystal Display Technology (Edited by Tatsuo Uchida, published in 1994 by Kogyo Chosakai Publishing Co., Ltd.)." The said cured film is suitable for the liquid crystal display device of the aspect of the said "2nd generation liquid crystal display technology", for example.

作為含有上述硬化膜之液晶顯示裝置的一態様,例如可舉出至少1個在光透射性的一對基板之間至少含有濾色器、液晶層及液晶驅動機構(含有單純矩陣驅動方式及有源矩陣驅動方式)之液晶顯示裝置。上述液晶顯示裝置含有複數個像素組,構成該像素組之各像素含有彼此藉由上述硬化膜(黑矩陣)分離之濾色器。As one aspect of the liquid crystal display device containing the above-mentioned cured film, for example, at least one color filter, a liquid crystal layer, and a liquid crystal drive mechanism (including a simple matrix drive method and a liquid crystal drive mechanism including a simple matrix drive method and a source matrix drive mode) liquid crystal display device. The above-mentioned liquid crystal display device includes a plurality of pixel groups, and each pixel constituting the pixel group includes a color filter separated from each other by the above-mentioned cured film (black matrix).

作為液晶顯示裝置的其他態様,至少1個在光透射性的一對基板之間至少含有濾色器、液晶層及液晶驅動機構,液晶驅動機構含有有源元件(例如,TFT(薄膜晶體管(Thin Film Transistor))),且各有源元件之間包含含有上述硬化膜(黑矩陣)之濾色器。As another aspect of the liquid crystal display device, at least one of the light-transmitting pair of substrates includes at least a color filter, a liquid crystal layer, and a liquid crystal driving mechanism, and the liquid crystal driving mechanism includes an active element (for example, a TFT (Thin Film Transistor) Film Transistor))), and a color filter containing the above-mentioned cured film (black matrix) is included between each active element.

含有上述硬化膜之濾色器適於彩色TFT(Thin Film Transistor)方式的液晶顯示裝置。對於彩色TFT方式的液晶顯示裝置,例如記載於“彩色TFT液晶顯示器(KYORITSU SHUPPAN CO., LTD. 1996年發行)”。而且,上述濾色器還適於IPS(平面內切換(In Plane Switching))等橫向電場驅動方式;MVA(多域垂直配向型(Multi-domain Vertical Alignment))等像素分割方式;等視角被擴大之液晶顯示裝置、STN(超扭曲向列(Super-Twist Nematic))、TN(扭曲向列(Twisted Nematic))、VA(垂直對齊(Vertical Alignment))、OCS(片上間隔(on-chip spacer))、FFS(邊緣場切換(fringe field switching))及R-OCB(反射光學補償彎曲(Reflective Optically Compensated Bend))等。The color filter containing the said cured film is suitable for the liquid crystal display device of a color TFT (Thin Film Transistor) system. The liquid crystal display device of the color TFT method is described in, for example, "Color TFT Liquid Crystal Display (published by KYORITSU SHUPPAN CO., LTD., 1996)". Moreover, the above-mentioned color filter is also suitable for horizontal electric field driving methods such as IPS (In Plane Switching); pixel division methods such as MVA (Multi-domain Vertical Alignment); etc. The viewing angle is enlarged The liquid crystal display device, STN (Super-Twist Nematic), TN (Twisted Nematic), VA (Vertical Alignment), OCS (on-chip spacer) ), FFS (fringe field switching), and R-OCB (Reflective Optically Compensated Bend).

上述濾色器適於明亮且高精細的COA(濾色器陣列(Color-filter On Array))方式的液晶顯示裝置。關於COA方式的液晶顯示裝置,對於濾色器之要求特性除了通常的要求特性以外,有時還要求對於層間絶縁膜之要求特性,亦即,低介電常數及剝離液耐性。含有上述濾色器之COA方式的液晶顯示裝置具有更優異之解析度,或具有更優異之耐久性。另外,為了滿足低介電常數的要求特性,可在濾色器層上進一步含有樹脂被膜。The above-described color filter is suitable for a bright and high-definition COA (Color-filter On Array) type liquid crystal display device. For COA-type liquid crystal display devices, in addition to the usual required properties for color filters, properties required for interlayer insulating films, ie, low dielectric constant and peeling solution resistance, are sometimes required. The COA-type liquid crystal display device including the above-mentioned color filter has more excellent resolution or more excellent durability. In addition, in order to satisfy the required characteristics of low dielectric constant, a resin coating film may be further contained on the color filter layer.

對於該些圖像顯示方式,例如記載於“EL、PDP、LCD顯示器-技術與市場的最新動向-(TORAY Research Center,Inc.調查研究部門2001年發行)”的43頁等。另外,上述中,EL表示Electroluminescence(電致發光)的簡稱,PDP表示Plasma Display Panel(電漿顯示面板)的簡稱,LCD表示liquid crystal display(液晶顯示器)的簡稱。These image display methods are described, for example, on page 43 of "EL, PDP, and LCD Displays - Latest Trends in Technology and Markets - (Published by TORAY Research Center, Inc., 2001)". In addition, in the above, EL is an abbreviation for Electroluminescence, PDP is an abbreviation for Plasma Display Panel, and LCD is an abbreviation for liquid crystal display.

上述液晶顯示裝置除了上述濾色器以外,還由電極基板、偏光膜、相位差膜、背光、間隔物及視角保護膜等各種構件構成。上述濾色器能夠適用於由該些公知構件構成之液晶顯示裝置。對於該些構件,例如記載於“’94液晶顯示器周邊材料・化學製品市場(島 健太郎CMC-Group. 1994年發行)”及“2003液晶関連市場的現狀與未來展望(下卷)(表良吉Fuji Chimera Research Institute, Inc.,2003年發行)”。 關於背光,記載於SID meeting Digest 1380(2005)(A.Konno et.al)和/或月刊顯示器2005年12月號的18~24頁(島 康裕)、SID meeting Digest 1380(2005)25~30頁(八木隆明)等。The said liquid crystal display device consists of various members, such as an electrode substrate, a polarizing film, a retardation film, a backlight, a spacer, and a viewing angle protection film, in addition to the said color filter. The above-described color filter can be applied to a liquid crystal display device composed of these known members. These components are described in, for example, "'94 Liquid Crystal Display Peripheral Materials and Chemicals Market (Issued by Kentaro Shima CMC-Group. 1994)" and "2003 Current Situation and Future Prospects of Liquid Crystal Related Markets (Volume 2) (Fuji Omorayoshi). Chimera Research Institute, Inc., issued in 2003)". The backlight is described in SID meeting Digest 1380 (2005) (A. Konno et.al) and/or Monthly Display December 2005 issue, pages 18 to 24 (Yoshihiro Shima), SID meeting Digest 1380 (2005) 25 to 30 Page (Takaaki Yagi) et al.

上述硬化膜適於個人計算機、平板電腦、行動電話、智能手機及數位相機等便攜式設備;多功能打印機及掃描儀等OA(辦公室自動化(Office Automation))設備;監視攝影機、條碼讀取器及自動存提款機(ATM:automated teller machine)、高速相機及使用人臉圖像認證之本人認證等產業用設備;車載用相機設備;內窺鏡、膠囊內窺鏡及導管等醫療用相機設備;生物體感測器、生物感測器(Biosensor)、軍事偵查用相機、立體地圖用相機、氣象及海洋觀測相機、陸地資源偵查相機、以及宇宙的天文及深空目標用勘探相機等航天設備等中使用之光學濾波器及模組的遮光構件及遮光層,進一步適於防反射構件以及防反射層。The above cured film is suitable for portable devices such as personal computers, tablet computers, mobile phones, smart phones and digital cameras; OA (Office Automation) devices such as multi-function printers and scanners; surveillance cameras, barcode readers and automatic Industrial equipment such as ATM (automated teller machine), high-speed cameras, and identity authentication using face image authentication; vehicle-mounted camera equipment; medical camera equipment such as endoscopes, capsule endoscopes, and catheters; Biosensors, biosensors, cameras for military reconnaissance, cameras for stereo maps, meteorological and oceanographic observation cameras, terrestrial resource reconnaissance cameras, and astronomical and deep space target exploration cameras and other aerospace equipment The light-shielding member and light-shielding layer of the optical filter and module used in the invention are further suitable for the anti-reflection member and the anti-reflection layer.

上述硬化膜還能夠使用於微型LED(發光二極體(Light Emitting Diode))及微型OLED(有機發光二極體(Organic Light Emitting Diode))等用途。上述硬化膜除了微型LED及微型OLED中使用之光學濾波器及光學薄膜以外,還適於賦予遮光功能或防反射功能之構件。 作為微型LED及微型OLED的例子,可舉出日本特表2015-500562號及日本特表2014-533890中記載者。The above cured film can also be used for applications such as micro LED (Light Emitting Diode) and micro OLED (Organic Light Emitting Diode). In addition to the optical filter and optical film used in micro LED and micro OLED, the said cured film is suitable for the member which provides a light-shielding function or an antireflection function. Examples of micro LEDs and micro OLEDs include those described in JP 2015-500562 and JP 2014-533890.

上述硬化膜適合作為量子點顯示器中使用之光學濾波器及光學薄膜。並且,上述硬化膜適合作為賦予遮光功能及防反射功能之構件。 作為量子點顯示器的例子,可舉出美國專利申請公開第2013/0335677號、美國專利申請公開第2014/0036536號、美國專利申請公開第2014/0036203號及美國專利申請公開第2014/0035960號中記載者。 [實施例]The above cured film is suitable as an optical filter and an optical film used in a quantum dot display. Moreover, the said cured film is suitable as a member which provides a light-shielding function and an antireflection function. Examples of quantum dot displays include US Patent Application Publication No. 2013/0335677, US Patent Application Publication No. 2014/0036536, US Patent Application Publication No. 2014/0036203, and US Patent Application Publication No. 2014/0035960 recorder. [Example]

以下,依據實施例對本發明進行更詳細說明。以下實施例所示之材料、使用量、比例、處理內容、處理步驟等,能夠在不脫離本發明的宗旨之範圍內進行適當變更。故,並不藉由以下所示之實施例而限定性地解釋本發明的範圍。Hereinafter, the present invention will be described in more detail based on examples. The materials, usage amounts, ratios, processing contents, processing steps, etc. shown in the following examples can be appropriately changed within the scope of not departing from the gist of the present invention. Therefore, the scope of the present invention is not limitedly construed by the embodiments shown below.

[多官能硫醇化合物S-15的合成] 以下式表示之多官能硫醇化合物S-15藉由如下方法來合成。 [化學式32]

Figure 02_image530
另外,上述式中,“Et”表示乙基(-CH2 CH3 ),以下相同。[Synthesis of Polyfunctional Thiol Compound S-15] The polyfunctional thiol compound S-15 represented by the following formula was synthesized by the following method. [Chemical formula 32]
Figure 02_image530
In addition, in the said formula , "Et" represents an ethyl group (-CH2CH3), and it is the same below.

在氮環境下,將新戊四醇四(3-巰基丙酸酯)(TCI公司製造)(2.00g)和丙烯酸(0.295g)溶解於四氫呋喃(THF)(10.0g)中(以下,將所得之液體稱為“反應液”。)。接著,上述反應液的內溫冷卻至5℃以下。向冷卻後的反應液中添加了三乙胺(0.450g)。之後,將反應液的液溫升溫至50℃。升溫後,將反應液攪拌3小時。向攪拌後的反應液中添加了乙酸乙酯(50g)和1N鹽酸(50g)。之後,將反應液進行分液為水相和有機相。接著,用水(50g)清洗有機相並向所得之有機相中加入硫酸鈉之後,從有機相中過濾固體物質,並將所得之濾液進行減壓濃縮,從而獲得S-15(2.01g)(產率87.6%)。所得之S-15的結構藉由1 H-NMR(核磁共振(nuclear magnetic resonance))進行了鑑定。以下示出鑑定結果。Under a nitrogen atmosphere, neotaerythritol tetrakis(3-mercaptopropionate) (manufactured by TCI Corporation) (2.00 g) and acrylic acid (0.295 g) were dissolved in tetrahydrofuran (THF) (10.0 g) (hereinafter, the obtained The liquid is called "reaction liquid"). Next, the internal temperature of the said reaction liquid was cooled to 5 degreeC or less. Triethylamine (0.450 g) was added to the cooled reaction liquid. Then, the liquid temperature of the reaction liquid was heated up to 50 degreeC. After the temperature was raised, the reaction solution was stirred for 3 hours. Ethyl acetate (50 g) and 1N hydrochloric acid (50 g) were added to the stirred reaction solution. Then, the reaction liquid was liquid-separated into an aqueous phase and an organic phase. Next, after washing the organic phase with water (50 g) and adding sodium sulfate to the resulting organic phase, solid matter was filtered from the organic phase, and the resulting filtrate was concentrated under reduced pressure to obtain S-15 (2.01 g) (product rate 87.6%). The structure of the obtained S-15 was identified by 1 H-NMR (nuclear magnetic resonance). The identification results are shown below.

1 H-NMR 300MHz 氘代氯仿):1.35(t、3H)、2.53(t、2H)、2.66-2.71(m、8H)、2.73-2.80(m、10H)、4.09(s、8H)。( 1 H-NMR 300 MHz deuterated chloroform): 1.35 (t, 3H), 2.53 (t, 2H), 2.66-2.71 (m, 8H), 2.73-2.80 (m, 10H), 4.09 (s, 8H).

[多官能硫醇化合物S-16的合成] 以下式表示之多官能硫醇化合物S-16藉由如下方法來合成。 [化學式33]

Figure 02_image532
[Synthesis of polyfunctional thiol compound S-16] The polyfunctional thiol compound S-16 represented by the following formula was synthesized by the following method. [Chemical formula 33]
Figure 02_image532

在氮環境下,將新戊四醇四(3-巰基丙酸酯)(TCI公司製造)(2.00g)和丙烯酸2-羥乙酯(0.475g)溶解於四氫呋喃(10.0g)中,從而獲得反應液。接著將上述反應液的內溫冷卻至5℃以下。向冷卻後的反應液中添加了三乙胺(0.450g)。之後,將反應液的液溫升溫至50℃。升溫後,將反應液攪拌3小時。之後,向反應液中添加己烷(50g)並去除了添加己烷後的反應液的上清液成分。向去除上清液成分後的反應液中再添加己烷(50g),並去除了再添加己烷後的反應液的上清液成分。之後,利用減壓蒸餾來去除反應液中殘留之溶劑,從而獲得S-16(2.01g)(產率88.8%)。所得之S-16的結構藉由1 H-NMR進行了鑑定。以下示出鑑定結果。Under a nitrogen atmosphere, neotaerythritol tetrakis(3-mercaptopropionate) (manufactured by TCI Corporation) (2.00 g) and 2-hydroxyethyl acrylate (0.475 g) were dissolved in tetrahydrofuran (10.0 g) to obtain The reaction solution. Next, the internal temperature of the said reaction liquid was cooled to 5 degreeC or less. Triethylamine (0.450 g) was added to the cooled reaction liquid. Then, the liquid temperature of the reaction liquid was heated up to 50 degreeC. After the temperature was raised, the reaction solution was stirred for 3 hours. Then, hexane (50 g) was added to the reaction liquid, and the supernatant liquid component of the reaction liquid after adding hexane was removed. Hexane (50 g) was further added to the reaction liquid from which the supernatant liquid component was removed, and the supernatant liquid component of the reaction liquid after further addition of hexane was removed. Then, the solvent remaining in the reaction liquid was removed by distillation under reduced pressure to obtain S-16 (2.01 g) (yield: 88.8%). The structure of the obtained S-16 was identified by 1 H-NMR. The identification results are shown below.

1 H-NMR 300MHz 氘代氯仿):1.35(t、3H)、2.64-2.71(m、10H)、2.73-2.82(m、10H)、3.79-3.87(m、2H)、4.09(s、8H)、4.22-4.29(m、2H)。( 1 H-NMR 300MHz deuterated chloroform): 1.35 (t, 3H), 2.64-2.71 (m, 10H), 2.73-2.82 (m, 10H), 3.79-3.87 (m, 2H), 4.09 (s, 8H) ), 4.22-4.29 (m, 2H).

[多官能硫醇化合物S-17的合成] 以下式表示之多官能硫醇化合物S-17藉由如下方法來合成。 [化學式34]

Figure 02_image534
另外,上述式中“Me”表示甲基(-CH3 ),以下相同。[Synthesis of Polyfunctional Thiol Compound S-17] The polyfunctional thiol compound S-17 represented by the following formula was synthesized by the following method. [Chemical formula 34]
Figure 02_image534
In addition, in the said formula, "Me" represents a methyl group ( -CH3 ), and it is the same below.

在氮環境下,將新戊四醇四(3-巰基丙酸酯)(TCI公司製造)(2.00g)和丙烯酸2-(二甲基胺基)乙酯(0.586g)溶解於四氫呋喃(10.0g)中,從而獲得反應液。接著將上述反應液的內溫冷卻至5℃以下。向冷卻後的反應液中添加三乙胺(0.450g)。之後,將反應液的液溫升溫至50℃。升溫後,將反應液攪拌3小時。之後,向反應液中添加己烷(50g)並去除了添加己烷後的反應液的上清液成分。向去除上清液成分後的反應液中再添加己烷(50g),並去除了再添加己烷後的反應液的上清液成分。之後,利用減壓蒸餾來去除反應液中殘留之溶劑,從而獲得S-17(2.15g)(產率83.1%)。所得之S-17的結構藉由1 H-NMR進行了鑑定。以下示出鑑定結果。Under a nitrogen atmosphere, neotaerythritol tetrakis(3-mercaptopropionate) (manufactured by TCI) (2.00 g) and 2-(dimethylamino)ethyl acrylate (0.586 g) were dissolved in tetrahydrofuran (10.0 g) g) to obtain a reaction solution. Next, the internal temperature of the said reaction liquid was cooled to 5 degreeC or less. Triethylamine (0.450 g) was added to the cooled reaction liquid. Then, the liquid temperature of the reaction liquid was heated up to 50 degreeC. After the temperature was raised, the reaction solution was stirred for 3 hours. Then, hexane (50 g) was added to the reaction liquid, and the supernatant liquid component of the reaction liquid after adding hexane was removed. Hexane (50 g) was further added to the reaction liquid from which the supernatant liquid component was removed, and the supernatant liquid component of the reaction liquid after further addition of hexane was removed. Then, the solvent remaining in the reaction liquid was removed by distillation under reduced pressure to obtain S-17 (2.15 g) (yield: 83.1%). The structure of the obtained S-17 was identified by 1 H-NMR. The identification results are shown below.

1 H-NMR 300MHz 氘代氯仿):0.62-0.711(m、2H)、1.70-1.85(m、2H)、1.36(t、3H)、2.57(t、2H)、2.62-2.70(m、10H)、2.73-2.85(m、10H)、3.79-3.87(m、2H)、4.08(s、8H)、4.19(t、2H)。( 1 H-NMR 300MHz deuterated chloroform): 0.62-0.711 (m, 2H), 1.70-1.85 (m, 2H), 1.36 (t, 3H), 2.57 (t, 2H), 2.62-2.70 (m, 10H) ), 2.73-2.85 (m, 10H), 3.79-3.87 (m, 2H), 4.08 (s, 8H), 4.19 (t, 2H).

[多官能硫醇化合物S-26的合成] 以下式表示之多官能硫醇化合物S-26藉由如下方法來合成。 [化學式35]

Figure 02_image536
[Synthesis of polyfunctional thiol compound S-26] The polyfunctional thiol compound S-26 represented by the following formula was synthesized by the following method. [Chemical formula 35]
Figure 02_image536

在氮環境下,將新戊四醇四(3-巰基丙酸酯)(TCI公司製造)(2.00g)和丙烯酸3-(三甲氧基矽基)丙酯(1.92g)溶解於四氫呋喃(10.0g)中,從而獲得反應液。接著將上述反應液的內溫冷卻至5℃以下。向冷卻後的反應液中添加三乙胺(0.450g)。之後,將反應液的液溫升溫至50℃。升溫後,將反應液攪拌3小時。之後,向反應液中添加己烷(50g)並去除了添加己烷後的反應液的上清液成分。向去除上清液成分後的反應液中再添加己烷(50g),並去除了再添加己烷後的反應液的上清液成分。之後,利用減壓蒸餾來去除反應液中殘留之溶劑,從而獲得S-26(2.23g)(產率75.4%)。所得之S-26的結構藉由1 H-NMR進行了鑑定。以下示出鑑定結果。Under a nitrogen atmosphere, neotaerythritol tetrakis(3-mercaptopropionate) (manufactured by TCI) (2.00 g) and 3-(trimethoxysilyl)propyl acrylate (1.92 g) were dissolved in tetrahydrofuran (10.0 g) g) to obtain a reaction solution. Next, the internal temperature of the said reaction liquid was cooled to 5 degreeC or less. Triethylamine (0.450 g) was added to the cooled reaction liquid. Then, the liquid temperature of the reaction liquid was heated up to 50 degreeC. After the temperature was raised, the reaction solution was stirred for 3 hours. Then, hexane (50 g) was added to the reaction liquid, and the supernatant liquid component of the reaction liquid after adding hexane was removed. Hexane (50 g) was further added to the reaction liquid from which the supernatant liquid component was removed, and the supernatant liquid component of the reaction liquid after further addition of hexane was removed. Then, the solvent remaining in the reaction liquid was removed by distillation under reduced pressure to obtain S-26 (2.23 g) (yield: 75.4%). The structure of the obtained S-26 was identified by 1 H-NMR. The identification results are shown below.

1 H-NMR 300MHz 氘代氯仿):1.35(t、3H)、2.59(t、2H)、2.64-2.71(m、8H)、2.73-2.82(m、10H)、3.58(s、9H)、4.02-4.11(s、10H)。( 1 H-NMR 300MHz deuterated chloroform): 1.35 (t, 3H), 2.59 (t, 2H), 2.64-2.71 (m, 8H), 2.73-2.82 (m, 10H), 3.58 (s, 9H), 4.02-4.11 (s, 10H).

[多官能硫醇化合物S-8、20、22、24、25、64~66、69、71、73~75、88~90及112~114的合成] 除適當變更了原料以外,藉由與上述相同的方法合成了多官能硫醇化合物S-8、20、22、24、25、64~66、69、71、73~75、88~90及112~114。 另外,藉由1 H-NMR進行了鑑定之各多官能硫醇化合物的結構如表1-1~1-6所示。[Synthesis of polyfunctional thiol compounds S-8, 20, 22, 24, 25, 64 to 66, 69, 71, 73 to 75, 88 to 90, and 112 to 114] The polyfunctional thiol compounds S-8, 20, 22, 24, 25, 64-66, 69, 71, 73-75, 88-90, and 112-114 were synthesized by the same method as above. In addition, the structures of the respective polyfunctional thiol compounds identified by 1 H-NMR are shown in Tables 1-1 to 1-6.

[實施例1~23及比較例2、3的硬化性組成物的製備] 將表2的各欄所示之多官能硫醇化合物和以下各成分進行混合,從而製備了實施例1~23及比較例2、3的硬化性組成物。[Preparation of Curable Compositions of Examples 1 to 23 and Comparative Examples 2 and 3] The polyfunctional thiol compounds shown in the columns of Table 2 and the following components were mixed to prepare Examples 1 to 23 and The curable compositions of Comparative Examples 2 and 3.

<組成> 有機溶劑1(環己酮)・・・17.12質量份 鹼可溶性樹脂1(甲基丙烯酸芐酯/甲基丙烯酸(47/53[質量比])、30質量%丙二醇單甲醚溶液、Mw=11,000)・・・1.23質量份 鹼可溶性樹脂2(ACRYCURE RD-F8(NIPPON SHOKUBAI CO., LTD.製造)) 0.23質量份聚合性化合物(自由基聚合性化合物,Shin-Nakamura Chemical Co., Ltd.製造,NK Ester A-DPH-12E)・・・1.96質量份 聚合抑制劑(對甲氧基苯酚)・・・0.0007質量份 光聚合起始劑(IRGACURE OXE02)・・・0.975質量份 多官能硫醇化合物(下述表2中記載之多官能硫醇化合物)・・・0.35質量份 氟系界面活性劑(DIC CORPORATION製造,商品名:Megafac F-475、1質量%丙二醇單甲醚乙酸酯溶液)・・・2.50質量份 彩色著色劑1:染料溶液1(藉由下述方法製備之染料溶液)・・・24.57質量份 彩色著色劑2:顏料分散液P1(藉由下述方法製備之C.I.Pigment Blue 15:6分散液,固體成分濃度11.8質量%)・・・51.40質量份<Composition> Organic solvent 1 (cyclohexanone)・・・17.12 parts by mass of alkali-soluble resin 1 (benzyl methacrylate/methacrylic acid (47/53 [mass ratio]), 30 mass % propylene glycol monomethyl ether solution, Mw=11,000)・・・1.23 parts by mass of alkali-soluble resin 2 (ACRYCURE RD-F8 (manufactured by NIPPON SHOKUBAI CO., LTD.)) 0.23 parts by mass of polymerizable compound (radical polymerizable compound, Shin-Nakamura Chemical Co., Ltd., NK Ester A-DPH-12E)・・・1.96 parts by mass of a polymerization inhibitor (p-methoxyphenol)・・・0.0007 parts by mass of a photopolymerization initiator (IRGACURE OXE02)・・・0.975 parts by mass Functional thiol compound (polyfunctional thiol compound described in Table 2 below)・・・0.35 parts by mass of fluorine-based surfactant (manufactured by DIC CORPORATION, trade name: Megafac F-475, 1 mass % propylene glycol monomethyl ether ethyl Acid acid solution)・・・2.50 parts by mass Color colorant 1: Dye solution 1 (dye solution prepared by the following method)・・・24.57 parts by mass Color colorant 2: Pigment dispersion liquid P1 (by the following method Prepared C.I. Pigment Blue 15:6 dispersion, solid content concentration 11.8% by mass)・・・51.40 parts by mass

另外,表2中,T-1及T-2表示以下多官能硫醇化合物(不具有相互作用性基團之多官能硫醇化合物)。In addition, in Table 2, T-1 and T-2 represent the following polyfunctional thiol compounds (polyfunctional thiol compounds which do not have an interactive group).

[化學式36]

Figure 02_image538
[Chemical formula 36]
Figure 02_image538

〔染料溶液1的製備〕 染料溶液1藉由將下述各成分進行混合來製備。 有機溶劑(環己酮)・・・21.55質量份 染料(下述結構A-1)・・・3.02質量份 [化學式37]

Figure 02_image540
[Preparation of Dye Solution 1] The dye solution 1 was prepared by mixing the following components. Organic solvent (cyclohexanone)・・・21.55 parts by mass of dye (Structure A-1 below)・・・3.02 parts by mass [Chemical formula 37]
Figure 02_image540

〔顏料分散液P1的製備〕 藉由以下步驟製備了顏料分散液P1。 將包括C.I.Pigment Blue15:6(藍色顏料,以下還稱為“PB15:6”)19.4質量份(平均一次粒徑55nm)、顏料分散劑DISPERBYK-161(固體成分濃度30質量%、BYK製造)2.95質量份、鹼可溶性樹脂1(甲基丙烯酸芐酯/甲基丙烯酸(47/53[質量比]),30質量%的丙二醇單甲醚溶液,Mw=11,000)以固體成分換算計2.95質量份(溶液9.93質量份)、丙二醇單甲醚165.3質量份之混合液,藉由珠磨機(beads mill)(氧化鋯珠直徑0.3mm)混合3小時並進行了分散。之後,進一步使用附帶減壓機構之高壓分散機NANO-3000-10(Beryu Co., Ltd.製造),在2000kg/cm3 的壓力下,以500g/分的流量進行了分散處理。重複進行10次該分散處理,從而獲得作為顏料分散液P1之C.I.Pigment Blue15:6分散液。關於所得之顏料分散液P1,利用動態光散射法(Microtrac Nanotrac UPA-EX150(日機裝株式會社(Nikkiso Co.,ltd.製造))測定了顏料的平均一次粒徑,結果為24nm。[Preparation of Pigment Dispersion Liquid P1] Pigment dispersion liquid P1 was prepared by the following procedure. Will include CI Pigment Blue 15:6 (blue pigment, hereinafter also referred to as "PB15:6") 19.4 parts by mass (average primary particle size 55 nm), pigment dispersant DISPERBYK-161 (solid content concentration 30 mass %, manufactured by BYK) 2.95 Parts by mass, Alkali-soluble resin 1 (benzyl methacrylate/methacrylic acid (47/53 [mass ratio]), 30 mass % propylene glycol monomethyl ether solution, Mw=11,000) 2.95 parts by mass in terms of solid content ( A mixed solution of 9.93 parts by mass of the solution) and 165.3 parts by mass of propylene glycol monomethyl ether was mixed with a beads mill (zirconia bead diameter: 0.3 mm) for 3 hours and dispersed. After that, further dispersion treatment was performed at a flow rate of 500 g/min under a pressure of 2000 kg/cm 3 using a high-pressure disperser NANO-3000-10 (manufactured by Beryu Co., Ltd.) with a decompression mechanism. This dispersion treatment was repeated 10 times to obtain a CI Pigment Blue 15:6 dispersion liquid as the pigment dispersion liquid P1. About the obtained pigment dispersion liquid P1, the average primary particle diameter of the pigment was measured by the dynamic light scattering method (Microtrac Nanotrac UPA-EX150 (made by Nikkiso Co., Ltd.)), and it was 24 nm.

[比較例1的硬化性組成物的製備] 除了不添加多官能硫醇化合物以外,以與實施例1相同的方法製備了硬化性組成物。[Preparation of Curable Composition of Comparative Example 1] A curable composition was prepared in the same manner as in Example 1, except that the polyfunctional thiol compound was not added.

[性能評價] 關於各實施例及比較例的硬化性組成物,藉由下述方法評價了曝光靈敏度。並且,利用上述硬化性組成物,藉由下述方法評價了在玻璃基材上藉由下述方法形成之圖案對玻璃基材的黏附性。將評價結果綜合示於下述表2。[PERFORMANCE EVALUATION] The exposure sensitivity was evaluated by the following method about the curable composition of each Example and a comparative example. And the adhesiveness to the glass base material of the pattern formed by the following method on the glass base material was evaluated by the following method using the said curable composition. The evaluation results are collectively shown in Table 2 below.

〔曝光靈敏度〕 將各實施例及比較例的硬化性組成物旋塗塗佈於玻璃基材上之後,進行乾燥從而在玻璃基材上形成了膜厚1.0μm的塗膜(硬化性組成物層)。旋塗條件設為以300rpm塗佈5秒鐘之後以800rpm塗佈20秒鐘,乾燥條件設為在100℃下乾燥80秒鐘。接著,使用線寬2.0μm的測試用光罩,並利用具有超高壓水銀燈之接近式曝光機(Hitachi High-Technologies Corporation製造),以10mJ/cm2 ~2,000mJ/cm2 之各種曝光量將所得之塗膜(硬化性組成物層)進行曝光,從而使硬化性組成物層硬化成圖案狀。接著,使用60質量%CD-2000(FUJIFILM Electronic Materials Co.,Ltd.製造)顯影液,將曝光後的硬化膜在25℃、60秒鐘的條件下進行顯影,從而獲得圖案狀的硬化膜。之後,利用流水將所得之圖案狀的硬化膜沖洗了20秒鐘之後進行了空氣乾燥。 藉由在曝光製程中照射有光之區域的顯影後的圖案線寬成為1μm以上之最小的曝光量評價了曝光靈敏度。曝光靈敏度的值越小,硬化性組成物的曝光靈敏度越良好。另外,作為曝光靈敏度,在上述試驗條件下,實際使用上小於300mJ/cm2 為較佳。結果綜合示於表2。[Exposure Sensitivity] After spin-coating the curable compositions of the respective Examples and Comparative Examples on a glass substrate, it was dried to form a coating film (curable composition layer) having a thickness of 1.0 μm on the glass substrate. ). The spin coating conditions were applied at 300 rpm for 5 seconds, followed by the application at 800 rpm for 20 seconds, and the drying conditions were dried at 100° C. for 80 seconds. Next, using a test mask with a line width of 2.0 μm, a proximity exposure machine equipped with an ultra-high pressure mercury lamp (manufactured by Hitachi High-Technologies Corporation) was used to expose the obtained samples at various exposure amounts of 10 mJ/cm 2 to 2,000 mJ/cm 2 . The coating film (curable composition layer) is exposed to light to harden the curable composition layer in a pattern. Next, using a 60 mass % CD-2000 (manufactured by FUJIFILM Electronic Materials Co., Ltd.) developer, the cured film after exposure was developed under the conditions of 25° C. and 60 seconds to obtain a patterned cured film. After that, the obtained patterned cured film was rinsed with running water for 20 seconds, and then air-dried. The exposure sensitivity was evaluated by the exposure amount at which the pattern line width after development of the region irradiated with light in the exposure process became the minimum of 1 μm or more. The smaller the value of the exposure sensitivity, the better the exposure sensitivity of the curable composition. In addition, the exposure sensitivity is preferably less than 300 mJ/cm 2 in practical use under the above test conditions. The results are collectively shown in Table 2.

〔黏附性〕 利用SEM(掃描電子顯微鏡(Scanning Electron Microscope))觀察了在藉由上述曝光靈敏度的試驗製作之圖案狀的硬化膜中是否產生圖案缺損,並依據下述基準進行了評價。結果綜合示於表2。[Adhesion] Whether or not a pattern defect occurred in the patterned cured film produced by the above-mentioned exposure sensitivity test was observed by SEM (Scanning Electron Microscope), and evaluated based on the following criteria. The results are collectively shown in Table 2.

-評價基準- A:完全未觀察到圖案缺損。 B:每1.0μm見方的圖案上存在1~3個圖案缺損。 C:每1.0μm見方的圖案上存在4個以上且10個以下的圖案缺損。 D:每1.0μm見方的圖案上存在11個以上的圖案缺損。 另外,評價“B”以上為實際使用範圍。- Evaluation Criteria - A: No pattern defect was observed at all. B: There are 1 to 3 pattern defects per 1.0 μm square pattern. C: There are 4 or more and 10 or less pattern defects per 1.0 μm square pattern. D: There are 11 or more pattern defects per 1.0 μm square pattern. In addition, the evaluation "B" or more is the actual use range.

[表2]

Figure 106118513-A0304-0001
[Table 2]
Figure 106118513-A0304-0001

從表2所示之結果得知,含有規定的多官能硫醇化合物之實施例1~23的硬化性組成物(含有彩色著色劑之硬化性組成物)具有優異之曝光靈敏度且具有與支撐體的優異之黏附性。 另一方面,不含有多官能硫醇化合物之比較例1的硬化性組成物未得到上述效果。含有不具有相互作用性基團之多官能硫醇化合物之比較例2及比較例3的多官能硫醇化合物未得到上述效果。 以式(2)表示之多官能硫醇化合物的m為3以上之實施例2、10、18、21的硬化性組成物與實施例1的硬化性組成物相比,具有更優異之曝光靈敏度。 實施例10的硬化性組成物與m+n相等且m/n更大之實施例18的硬化性組成物相比,所得之硬化膜具有對支撐體的更優異之黏附性。 與硫醇基不同之相互作用性基團為羧酸基或其鹽、羥基、胺基、吡啶基、磷酸基或其鹽、磺酸基或其鹽、或-Si(RXp (RY3-p 之實施例2~6、8及9的硬化性組成物與相互作用性基團為苯基之實施例7相比,所得之硬化膜具有對支撐體的更優異之黏附性。From the results shown in Table 2, it was found that the curable compositions of Examples 1 to 23 (curable compositions containing color colorants) containing the prescribed polyfunctional thiol compounds had excellent exposure sensitivity, and had excellent contact with the support. excellent adhesion. On the other hand, the curable composition of Comparative Example 1 containing no polyfunctional thiol compound did not obtain the above-mentioned effects. The polyfunctional thiol compounds of Comparative Example 2 and Comparative Example 3 containing a polyfunctional thiol compound having no interactive group did not obtain the above-mentioned effects. Compared with the curable composition of Example 1, the curable compositions of Examples 2, 10, 18, and 21 in which m of the polyfunctional thiol compound represented by the formula (2) is 3 or more have more excellent exposure sensitivity . Compared with the curable composition of Example 10 in which m+n is equal and m/n is larger than that of Example 18, the obtained cured film has more excellent adhesion to the support. The interacting group different from the thiol group is a carboxylic acid group or a salt thereof, a hydroxyl group, an amino group, a pyridyl group, a phosphoric acid group or a salt thereof, a sulfonic acid group or a salt thereof, or -Si(R X ) p (R Y ) Compared with the curable compositions of Examples 2 to 6, 8 and 9 of 3-p , the cured films obtained have better adhesion to the support than those of Example 7 in which the interacting group is a phenyl group .

[實施例55及56] 在實施例1的硬化性組成物的製備中,將多官能硫醇化合物的含量從0.35質量份變更為0.17質量份(實施例55)及0.70質量份(實施例56),並與上述相同地進行了評價的結果,得到與實施例1相同的結果。[Examples 55 and 56] In the preparation of the curable composition of Example 1, the content of the polyfunctional thiol compound was changed from 0.35 parts by mass to 0.17 parts by mass (Example 55) and 0.70 parts by mass (Example 56 ), and evaluated in the same manner as above, and obtained the same results as Example 1.

[實施例57及58] 在實施例1的硬化性組成物的製備中,將聚合性化合物的含量從1.96質量份變更為1.5質量份(實施例57)及3.0質量份(實施例58),並與上述相同地進行了評價的結果,得到與實施例1相同的結果。[Examples 57 and 58] In the preparation of the curable composition of Example 1, the content of the polymerizable compound was changed from 1.96 parts by mass to 1.5 parts by mass (Example 57) and 3.0 parts by mass (Example 58), As a result of evaluating in the same manner as described above, the same results as in Example 1 were obtained.

[實施例24~54、59及比較例4~6的硬化性組成物的製備] 將表4的各欄所示之多官能硫醇化合物和各成分以表3中記載之群組成進行混合,從而製備了實施例24~54、59及比較例5、6的硬化性組成物。除了未添加多官能硫醇化合物以外,與實施例24相同地製備了比較例4的硬化性組成物。 以各硬化性組成物的最終固體成分成為28質量%之方式,利用有機溶劑進行了調整。並且,以各硬化性組成物中的質量比成為PGMEA(丙二醇單甲醚乙酸酯)/乙酸丁酯/環己酮=27/18/27之方式,同時使用了有機溶劑。[Preparation of Curable Compositions of Examples 24 to 54, 59 and Comparative Examples 4 to 6] The polyfunctional thiol compounds shown in the columns of Table 4 and the respective components were mixed in the group compositions described in Table 3 , the curable compositions of Examples 24 to 54 and 59 and Comparative Examples 5 and 6 were prepared. The curable composition of Comparative Example 4 was prepared in the same manner as in Example 24 except that the polyfunctional thiol compound was not added. It adjusted with an organic solvent so that the final solid content of each curable composition might become 28 mass %. In addition, an organic solvent was used so that the mass ratio in each curable composition was PGMEA (propylene glycol monomethyl ether acetate)/butyl acetate/cyclohexanone=27/18/27.

[表3]

Figure 106118513-A0304-0002
[table 3]
Figure 106118513-A0304-0002

<著色劑> 藉由以下方法製作了各著色劑。<Colorant> Each colorant was produced by the following method.

(含氮化鈦粒子(TiN-1)) 首先,將Ti粒子(TC-200,TOHO TECHNICAL SERVICE CO., LTD.製造)在Ar氣中進行電漿處理,藉此進行了Ti奈米粒子化。將電漿處理之後的Ti奈米粒子在Ar氣環境下,在O2 濃度50ppm以下、30℃的條件下靜置了24小時。之後,以O2 濃度成為100ppm之方式,在Ar環境中導入了O2 氣之狀態下,在30℃下靜置了24小時(Ti粒子的前處理)。 之後,利用Hosokawa Micron Corporation製造的TTSP分離器,在產率成為10%之條件下,對所得之Ti奈米粒子進行分級,從而獲得Ti粒子粉末。對於所得之粉末的一次粒徑,藉由TEM觀察,並藉由算術平均求出了100個粒子的平均粒徑,其結果為120nm。 利用依據國際公開第2010/147098的圖1中記載之黑色複合微粒製造裝置之裝置,製造了含氮化鈦粒子TiN-1。 具體而言,黑色複合微粒製造裝置中,對電漿炬的高頻振蕩用線圈施加約4MHz及約80kVA的高頻電壓,從電漿氣體供給源,作為電漿氣體供給氬氣50L/min及氮50L/min的混合氣體,在電漿炬內產生了氬-氮熱電漿火焰。從材料供給裝置的噴霧氣體供給源供給了10L/min的載氣。 對如上述那樣獲得之Ti粒子,以各自的質量比成為Ti/Fe/Si=餘量/0.05/0.05之方式混合了Fe粉(JIP270M、JFE STEEL CORPORATION製造)及Si粉(Silicon powder SI006031)。將該混合物與作為載氣之氬氣一同供給至電漿炬內的熱電漿火焰中,使其在熱電漿火焰中蒸發,從而以氣相狀態高度分散。 並且,作為藉由氣體供給裝置供給至腔室內之氣體,使用了氮。此時的腔室內的流速設為5m/sec,供給量設為1,000L/min。並且,旋風分離器內的壓力設為50kPa,並且,各原料從腔室向旋風分離器的供給速度設為10m/s(平均值)。 如此獲得含氮化鈦粒子TiN-1。(Titanium nitride-containing particles (TiN-1)) First, Ti particles (TC-200, manufactured by TOHO TECHNICAL SERVICE CO., LTD.) were subjected to plasma treatment in Ar gas to form Ti nanoparticles . The Ti nanoparticles after the plasma treatment were allowed to stand for 24 hours under the conditions of an O 2 concentration of 50 ppm or less and 30° C. in an Ar gas atmosphere. After that, it was left to stand at 30° C. for 24 hours in a state in which O 2 gas was introduced into an Ar atmosphere so that the O 2 concentration became 100 ppm (pretreatment of Ti particles). Then, the obtained Ti nanoparticles were classified using a TTSP separator manufactured by Hosokawa Micron Corporation under the condition that the yield became 10%, thereby obtaining Ti particle powder. The primary particle diameter of the obtained powder was observed by TEM, and the average particle diameter of 100 particles was obtained by arithmetic mean, and the result was 120 nm. The titanium nitride-containing particle TiN-1 was produced by using the apparatus according to the black composite fine particle production apparatus described in FIG. 1 of International Publication No. 2010/147098. Specifically, in the black composite particle production apparatus, a high-frequency voltage of about 4 MHz and about 80 kVA is applied to the high-frequency oscillation coil of the plasma torch, and from the plasma gas supply source, argon gas of 50 L/min and The mixed gas of nitrogen 50L/min produced an argon-nitrogen thermal plasma flame in the plasma torch. A carrier gas of 10 L/min was supplied from the spray gas supply source of the material supply device. With respect to the Ti particles obtained as described above, Fe powder (JIP270M, manufactured by JFE Steel Corporation) and Si powder (Silicon powder SI006031) were mixed so that the respective mass ratios were Ti/Fe/Si=balance/0.05/0.05. This mixture is supplied to a thermoplasmic flame in a plasma torch together with argon as a carrier gas, and is evaporated in the thermoplasmic flame to be highly dispersed in a gas phase state. In addition, nitrogen was used as the gas supplied into the chamber by the gas supply device. The flow velocity in the chamber at this time was 5 m/sec, and the supply amount was 1,000 L/min. In addition, the pressure in the cyclone was set to 50 kPa, and the supply speed of each raw material from the chamber to the cyclone was set to 10 m/s (average value). In this way, titanium nitride-containing particles TiN-1 were obtained.

對所得之含氮化鈦粒子TiN-1,藉由ICP發光分光分析法,測定了鈦(Ti)原子、鐵(Fe)原子及矽(Si)原子的含量。另外,ICP發光分光分析法中,使用了Seiko Instruments Inc.製造的ICP發光分光分析裝置“SPS3000”(商品名)。 利用HORIBA, Ltd.製造的氧・氮分析裝置“EMGA-620W/C”(商品名)測定並藉由惰性氣體熔融熱導法計算出了氮原子的含量。上述之結果,含氮化鈦粒子TiN中所含之各原子的質量比為Ti/N/Fe/Si=57/34/0.0030/0.0020。The content of titanium (Ti) atoms, iron (Fe) atoms, and silicon (Si) atoms was measured with respect to the obtained titanium nitride-containing particles TiN-1 by ICP emission spectrometry. In addition, in the ICP emission spectroscopy, the ICP emission spectroscopy "SPS3000" (trade name) manufactured by Seiko Instruments Inc. was used. The content of nitrogen atoms was measured and calculated by an inert gas fusion thermal conductivity method using an oxygen-nitrogen analyzer "EMGA-620W/C" (trade name) manufactured by HORIBA, Ltd. As a result of the above, the mass ratio of the atoms contained in the titanium nitride-containing particles TiN was Ti/N/Fe/Si=57/34/0.0030/0.0020.

關於含氮化鈦粒子TiN-1的X射線衍射,將粉末試樣填充於鋁製標準試樣保持器中,藉由廣角X射線衍射法(Rigaku Corporation製造,商品名“RU-200R”)進行了測定。作為測定條件,X射線源設為CuKα射線,輸出設為50kV/200mA,狹縫系統設為1°-1°-0.15mm-0.45mm,測定步長(2θ)設為0.02°,掃描速度設為2°/分鐘。 並且,測定了在衍射角2θ(42.6°)附近觀察到之源自TiN(200)面之峰的衍射角2θ。而且,藉由該源自(200)面之峰的半寬度,利用謝勒(Scherrer)公式,求出了構成粒子之微晶尺寸。其結果,峰的衍射角為42.62°,微晶尺寸為10nm。另外,完全沒有觀察到TiO2 引起之X射線衍射峰。X-ray diffraction of titanium nitride-containing particles TiN-1 was carried out by a wide-angle X-ray diffraction method (manufactured by Rigaku Corporation, trade name "RU-200R") by filling a powder sample into a standard sample holder made of aluminum. measured. As measurement conditions, the X-ray source was set to CuKα rays, the output was set to 50kV/200mA, the slit system was set to 1°-1°-0.15mm-0.45mm, the measurement step (2θ) was set to 0.02°, and the scanning speed was set to is 2°/min. Furthermore, the diffraction angle 2θ of the peak derived from the TiN (200) plane observed in the vicinity of the diffraction angle 2θ (42.6°) was measured. Then, from the half width of the peak originating from the (200) plane, the crystallite size of the constituent particles was obtained using Scherrer's formula. As a result, the diffraction angle of the peak was 42.62°, and the crystallite size was 10 nm. In addition, X-ray diffraction peaks due to TiO 2 were not observed at all.

(含氮化鈦粒子TiN-2) 作為Ti粒子,代替TOHO TECHNICAL SERVICE CO., LTD.製造的“TC-200”,使用Sigma-Aldrich Co. LLC. 製造的“578347”,以各自的質量比成為Ti/Fe/Si=餘量/0.5/1之方式混合了Fe粉及Si粉,除此以外,以與TiN-1相同的方法獲得含氮化鈦粒子TiN-2。 另外,藉由X射線衍射測定之峰的衍射角為42.81°,微晶尺寸為12nm。(TiN-2 containing titanium nitride particles) As Ti particles, instead of "TC-200" manufactured by TOHO TECHNICAL SERVICE CO., LTD., "578347" manufactured by Sigma-Aldrich Co. LLC. was used, and the respective mass ratios were used. Except that Fe powder and Si powder were mixed so that Ti/Fe/Si = balance/0.5/1, titanium nitride-containing particles TiN-2 were obtained in the same manner as TiN-1. In addition, the diffraction angle of the peak measured by X-ray diffraction was 42.81°, and the crystallite size was 12 nm.

(含氮化鈦粒子TiN-3) 以各自的質量比成為Ti/Fe/Si=餘量/1/2之方式混合了Fe粉及Si粉,除此以外,以與TiN-1相同的方法獲得含氮化鈦粒子TiN-3。 另外,藉由X射線衍射測定之峰的衍射角為43.1°,微晶尺寸為12nm。(Titanium nitride-containing particles TiN-3) Fe powder and Si powder were mixed so that the respective mass ratios were Ti/Fe/Si=balance/1/2, in the same manner as TiN-1. Titanium nitride-containing particles TiN-3 were obtained. In addition, the diffraction angle of the peak measured by X-ray diffraction was 43.1°, and the crystallite size was 12 nm.

(鈦黑A-1的製作) 將平均粒徑15nm的氧化鈦MT-150A(商品名,TAYCA CORPORATION製造)稱量100g,將BET(Brunauer,Emmett,Teller)比表面積300m2 /g的二氧化矽粒子AEROSIL300(註冊商標)300/30(Evonik公司製造)稱量25g,及將Disperbyk190(商品名,BYK公司製造)稱量100g,將該些添加到離子電氣交換水71g中,從而獲得混合物。之後,使用KURABO製造的MAZERSTAR KK-400W,在公轉轉速1,360rpm、自轉轉速1,047rpm下,對混合物進行了30分鐘的處理,藉此獲得均勻的混合物水溶液。將該混合物水溶液填充於石英容器中,利用小型回轉爐(MOTOYAMA CO.,LTD.製造),在氧環境中加熱至920℃。之後,用氮取代小型回轉爐內,在相同溫度下,使氨氣以100mL/min流動5小時,藉此實施了氮化還原處理。藉由乳鉢對結束後回收之粉末進行粉碎,從而獲得包含Si原子且粉末狀的比表面積73m2 /g的鈦黑〔包含鈦黑粒子及Si原子之被分散體〕(以下,標記為“鈦黑A-1”)。(Production of Titanium Black A-1) 100 g of titanium oxide MT-150A (trade name, manufactured by TAYCA CORPORATION) having an average particle diameter of 15 nm was weighed, and a BET (Brunauer, Emmett, Teller) specific surface area of 300 m 2 /g of dioxide was weighed. 25 g of silicon particles AEROSIL300 (registered trademark) 300/30 (manufactured by Evonik Corporation) and 100 g of Disperbyk190 (trade name, manufactured by BYK Corporation) were weighed, and these were added to 71 g of ion-exchanged water to obtain a mixture. Then, using MAZERSTAR KK-400W manufactured by KURABO, the mixture was treated at a revolution speed of 1,360 rpm and an autorotation speed of 1,047 rpm for 30 minutes, whereby a homogeneous mixture aqueous solution was obtained. This mixture aqueous solution was filled in a quartz container, and heated to 920° C. in an oxygen atmosphere using a small rotary kiln (manufactured by MOTOYAMA CO., LTD.). After that, the inside of the small rotary kiln was replaced with nitrogen, and ammonia gas was flowed at 100 mL/min for 5 hours at the same temperature, thereby performing nitridation reduction treatment. The powder collected after the end was pulverized by a mortar to obtain titanium black containing Si atoms and having a powdery specific surface area of 73 m 2 /g [a dispersion containing titanium black particles and Si atoms] (hereinafter, marked as "titanium black"). black A-1").

(含有Fe原子之含氮化鈮粒子(NbN)的製作) 藉由以下方法製作了含有Fe原子之含氮化鈮粒子。 首先,準備Mitsuwa Chemicals Co.,Ltd.製造的鈮(粉末)<100-325mesh>作為原料(以下,還稱為“金屬原料粉末”。)。 接著,將上述金屬原料粉末在Ar氣中進行電漿處理,藉此進行了Nb奈米粒子化。上述電漿處理的條件依照下述電漿處理(1)。(Preparation of Fe atom-containing niobium nitride-containing particles (NbN)) Fe atom-containing niobium nitride-containing particles were prepared by the following method. First, niobium (powder) <100-325mesh> manufactured by Mitsuwa Chemicals Co., Ltd. was prepared as a raw material (hereinafter, also referred to as "metal raw material powder"). Next, the above-mentioned metal raw material powder was subjected to plasma treatment in an Ar gas to form Nb nanoparticles. The conditions of the above-mentioned plasma treatment are in accordance with the following plasma treatment (1).

・電漿處理(1) 藉由以下方法進行了電漿處理(1)。利用依據上述黑色複合微粒製造裝置之裝置,藉由以下條件進行了電漿處理(1)。 ・施加於高頻振蕩用線圈之高頻電壓:頻率 約4MHz、電壓 約80kVA ・電漿氣體:氬氣(供給量 100L/min) ・載氣:氬氣(供給量 10L/min) ・腔室內環境:氬氣(供給量 1,000l/min、腔室內流速 5m/sec) ・旋風分離器內環境:氬氣、內壓 50kPa ・材料從腔室向旋風分離器的供給速度:10m/s(平均值)・Plasma treatment (1) Plasma treatment (1) was performed by the following method. Plasma treatment (1) was performed under the following conditions using the apparatus according to the above-mentioned black composite particle production apparatus.・High-frequency voltage applied to the high-frequency oscillation coil: Frequency about 4MHz, voltage about 80kVA ・Plasma gas: Argon gas (supply rate 100L/min) ・Carrier gas: Argon gas (supply rate 10L/min) ・In the chamber Environment: Argon gas (supply volume 1,000l/min, flow velocity in chamber 5m/sec) ・Environment in cyclone: Argon gas, internal pressure 50kPa ・Supply velocity of material from chamber to cyclone: 10m/s (average value)

接著,準備Fe粉(JIP270M,JFE STEEL CORPORATION製),藉由電漿處理(1)的條件進行電漿處理,從而進行了Fe奈米粒子化。Next, Fe powder (JIP270M, manufactured by JFE STEEL CORPORATION) was prepared, and plasma treatment was performed under the conditions of plasma treatment (1) to form Fe nanoparticles.

接著,混合藉由上述獲得之Nb奈米粒子及Fe奈米粒子,從而獲得原料金屬粉末。對該原料金屬粉末,在氮氣中進行電漿處理,藉此獲得含氮化鈮粒子。上述電漿處理的條件依照下述的電漿處理(2)。Next, the Nb nanoparticles and Fe nanoparticles obtained above are mixed to obtain raw metal powders. This raw material metal powder was plasma-treated in nitrogen gas to obtain niobium nitride-containing particles. The conditions of the above-mentioned plasma treatment are in accordance with the following plasma treatment (2).

・ 電漿處理(2) 藉由以下方法進行了電漿處理(2)。另外,裝置使用了與電漿處理(1)相同者。 ・施加於高頻振蕩用線圈之高頻電壓:頻率 約4MHz、電壓 約80kVA ・電漿氣體:氬氣及氮氣(供給量 分別為50L/min) ・載氣:氮氣(供給量 10L/min) ・腔室內環境:氮氣(供給量 1,000L/min、腔室內流速 5m/sec) ・旋風分離器內環境:氮氣、內壓 50kPa ・材料從腔室向旋風分離器的供給速度:10m/s(平均值)・Plasma treatment (2) Plasma treatment (2) was performed by the following method. In addition, the apparatus used the same thing as plasma treatment (1).・High-frequency voltage applied to the high-frequency oscillation coil: Frequency about 4MHz, voltage about 80kVA ・Plasma gas: Argon gas and nitrogen gas (supply 50L/min each) ・Carrier gas: Nitrogen (supply 10L/min)・Environment in the chamber: Nitrogen gas (supply rate 1,000L/min, flow velocity in the chamber 5m/sec) ・Environment in the cyclone: nitrogen gas, internal pressure 50kPa ・Supply velocity of material from the chamber to the cyclone: 10m/s ( average value)

將結束電漿處理(2)後的粒子,利用Ar氣,藉由NIHON SHINTECH CO.,LTD.製造的分流型濕度供給裝置SRH,以在大氣中成為相對濕度95%之條件導入20℃的氮氣,並靜置了24小時。之後,利用Hosokawa Micron Corporation製造的TTSP分離器,以產率成為10%之條件,對所得之粒子進行分級,從而獲得含氮化鈮粒子(NbN)。另外,向分離器供給了氮氣。 對所得之含氮化鈮粒子,藉由ICP發光分光分析法測定了鐵(Fe)原子的含量,其結果為50質量ppm。The particles after the completion of the plasma treatment (2) were introduced into nitrogen gas at 20°C under the condition of a relative humidity of 95% in the atmosphere by using Ar gas and a split-flow humidity supply device SRH manufactured by NIHON SHINTECH CO., LTD. , and left it for 24 hours. Then, using a TTSP separator manufactured by Hosokawa Micron Corporation, the obtained particles were classified so that the yield was 10% to obtain niobium nitride-containing particles (NbN). In addition, nitrogen gas was supplied to the separator. The content of iron (Fe) atoms of the obtained niobium nitride-containing particles was measured by ICP emission spectrometry, and as a result, it was 50 mass ppm.

(含有Fe原子之含氮化釩粒子(VN)的製作) 在含有Fe原子之含氮化鈮粒子的製作中,代替Mitsuwa Chemicals Co.,Ltd.製造的鈮(粉末)<100-325mesh>,使用了TAIYO KOKO Co., LTD.製造的金屬釩粉末VHO,除此以外,藉由相同的方法製作了含有Fe原子之含氮化釩粒子(VN)。對所得之含氮化釩粒子,藉由ICP發光分光分析法測定了鐵(Fe)原子的含量,其結果為50質量ppm。(Production of Fe atom-containing vanadium nitride-containing particles (VN)) In the production of Fe atom-containing niobium nitride-containing particles, instead of Niobium (powder) <100-325mesh> manufactured by Mitsuwa Chemicals Co., Ltd., Vanadium nitride-containing particles (VN) containing Fe atoms were produced by the same method except that metal vanadium powder VHO manufactured by TAIYO KOKO Co., LTD. was used. The content of iron (Fe) atoms in the obtained vanadium nitride-containing particles was measured by ICP emission spectrometry, and as a result, it was 50 mass ppm.

<分散劑> 作為分散劑,使用了以下結構的分散劑A。各結構單元中記載之數值表示各結構單元相對於所有結構單元的質量%。<Dispersant> As the dispersant, the dispersant A having the following structure was used. The numerical value described in each structural unit represents the mass % of each structural unit with respect to all structural units.

・分散劑A [化學式38]

Figure 02_image542
・Dispersant A [Chemical formula 38]
Figure 02_image542

<黏結樹脂> 作為黏結樹脂,使用了以下樹脂A。各結構單元中記載之數值表示各結構單元相對於所有結構單元的莫耳%。另外,樹脂A的式中,各縮寫表示以下。 BzMA:甲基丙烯酸芐酯 MMA:甲基丙烯酸甲酯<Binder resin> As the binder resin, the following resin A was used. The numerical value described in each structural unit represents the mole % of each structural unit with respect to all structural units. In addition, in the formula of resin A, each abbreviation shows the following. BzMA: Benzyl methacrylate MMA: Methyl methacrylate

・樹脂A

Figure 02_image544
・Resin A
Figure 02_image544

<聚合性化合物> ・聚合性化合物M1:二新戊四醇六丙烯酸酯(Nippon Kayaku Co.,Ltd.製造,商品名“KAYARAD”,參閱下述式) [化學式39]

Figure 02_image546
・聚合性化合物M2:PET-30(新戊四醇三丙烯酸酯,Nippon Kayaku Co., Ltd.製造)<Polymerizable compound> ・Polymerizable compound M1: Dipionaerythritol hexaacrylate (manufactured by Nippon Kayaku Co., Ltd., trade name "KAYARAD", refer to the following formula) [Chemical formula 39]
Figure 02_image546
・Polymerizable compound M2: PET-30 (neopentaerythritol triacrylate, manufactured by Nippon Kayaku Co., Ltd.)

<光聚合起始劑> ・OXE-01:Irgacure OXE01(商品名,BASF JAPAN LTD.製造,相當於肟化合物。) [化學式40]

Figure 02_image548
<Photopolymerization initiator> ・OXE-01: Irgacure OXE01 (trade name, manufactured by BASF JAPAN LTD., equivalent to an oxime compound.) [Chemical formula 40]
Figure 02_image548

・OXE-02:Irgacure OXE02(商品名,BASF JAPAN LTD.製造,相當於肟化合物。) [化學式41]

Figure 02_image550
・OXE-02: Irgacure OXE02 (trade name, manufactured by BASF JAPAN LTD., equivalent to an oxime compound.) [Chemical formula 41]
Figure 02_image550

・PI-3:具有下述結構之光聚合起始劑(相當於肟化合物。)・PI-3: Photopolymerization initiator having the following structure (equivalent to an oxime compound.)

[化學式42]

Figure 02_image552
[Chemical formula 42]
Figure 02_image552

・NCI-831(商品名,ADEKA CORPORATION製造,相當於肟化合物。) [化學式43]

Figure 02_image554
・NCI-831 (trade name, manufactured by ADEKA CORPORATION, equivalent to an oxime compound.) [Chemical formula 43]
Figure 02_image554

・IRG-379:IRGACURE 379EG(商品名,BASF JAPAN LTD.製造,相當於肟化合物。) [化學式44]

Figure 02_image556
・IRG-379: IRGACURE 379EG (trade name, manufactured by BASF JAPAN LTD., equivalent to an oxime compound.) [Chemical formula 44]
Figure 02_image556

<界面活性劑> ・F-1:以下述式表示之化合物(重量平均分子量(Mw)=15,311) 其中,下述式中,以式(A)及(B)表示之結構單元分別為62莫耳%、38莫耳%。以式(B)表示之結構單元中,a、b、c分別滿足a+c=14、b=17的關係。<Surfactant> ・F-1: A compound represented by the following formula (weight average molecular weight (Mw) = 15, 311) In the following formula, the structural units represented by the formulae (A) and (B) are respectively 62 mol%, 38 mol%. In the structural unit represented by formula (B), a, b, and c satisfy the relationship of a+c=14 and b=17, respectively.

[化學式45]

Figure 02_image558
[Chemical formula 45]
Figure 02_image558

<有機溶劑> ・PGMEA:丙二醇單甲醚乙酸酯 ・環戊酮 ・乙酸丁酯<Organic solvent> ・PGMEA: Propylene glycol monomethyl ether acetate ・Cyclopentanone ・Butyl acetate

〔著色劑分散液的製備〕 首先,利用攪拌機(IKA公司製造的EUROSTAR),將著色劑、分散劑及有機溶劑混合15分鐘,從而獲得上述成分的混合液。接著,對所得之混合液,使用SHINMARU ENTERPRISES CORPORATION製造的NPM-Pilot,在下述條件下進行了分散處理,從而獲得著色劑分散液。[Preparation of Colorant Dispersion Liquid] First, a colorant, a dispersant, and an organic solvent were mixed for 15 minutes with a mixer (EUROSTAR manufactured by IKA) to obtain a mixed liquid of the above-mentioned components. Next, the obtained mixed liquid was subjected to dispersion treatment using NPM-Pilot manufactured by SHINMARU ENTERPRISES CORPORATION under the following conditions to obtain a colorant dispersion liquid.

<分散條件> ・珠徑:φ0.05mm、(NIKKATO CORPORATION製造的氧化鋯珠、YTZ) ・珠填充率:65體積% ・研磨圓周速度:10m/sec ・分離器圓周速度:13m/s ・進行分散處理之混合液量:15kg ・循環流量(泵供給量):90kg/hour ・處理液溫度:19~21℃ ・冷卻水:水 ・處理時間:22小時左右<Dispersion conditions> ・Bead diameter: φ0.05mm, (zirconia beads manufactured by NIKKATO CORPORATION, YTZ) ・Bead filling rate: 65% by volume ・Peripheral grinding speed: 10 m/sec ・Peripheral speed of separator: 13 m/s ・Performance Mixed liquid volume for dispersion treatment: 15kg ・Circulation flow rate (pump supply rate): 90kg/hour ・Processing liquid temperature: 19~21℃ ・Cooling water: water ・Processing time: about 22 hours

[性能評價] 〔曝光靈敏度〕 在將表面進行了SiO2 處理之Si基板上,使用各硬化性組成物,以可獲得膜厚1.5μm的硬化膜之方式調整轉速,並藉由旋塗法形成了塗膜(硬化性組成物層)。將所形成之塗膜,在加熱板上藉由100℃、2分鐘的熱處理(預烘烤)而使其乾燥。對上述預烘烤後的附帶塗膜(硬化性組成物層)之基板,利用i射線步進機(Canon Inc.製造的FPA3000i5+),通過形成有長度200μm×寬度20μm的線圖案之光罩,對上述塗膜記性了曝光。利用Tokyo Electron Limited製造的Coater Developer ACT8,作為顯影液使用氢氧化四甲基銨,對曝光後的塗膜進行了30秒的旋覆浸沒顯影。顯影後藉由純水進行了20秒的噴淋沖洗處理。將顯影後圖案未被剝離而維持之最低曝光量作為曝光靈敏度而進行了評價。另外,作為曝光靈敏度,在上述試驗條件下,實際使用上小於500mJ/cm2 為較佳。結果綜合示於表4。[Performance Evaluation] [Exposure Sensitivity] On a Si substrate whose surface was treated with SiO 2 , each curable composition was used, and the rotational speed was adjusted so that a cured film having a thickness of 1.5 μm was obtained, and formed by spin coating. A coating film (hardenable composition layer) is formed. The formed coating film was dried by heat treatment (prebaking) at 100° C. for 2 minutes on a hot plate. Using an i-ray stepper (FPA3000i5+ manufactured by Canon Inc.), the above-mentioned pre-baked substrate with a coating film (curable composition layer) was passed through a mask having a line pattern of 200 μm in length and 20 μm in width. Exposure was recorded on the above-mentioned coating film. The coating film after exposure was subjected to spin-on immersion development for 30 seconds using Coater Developer ACT8 manufactured by Tokyo Electron Limited and using tetramethylammonium hydroxide as a developer. After the development, a shower rinsing process was performed with pure water for 20 seconds. The minimum exposure amount maintained without peeling the pattern after development was evaluated as exposure sensitivity. In addition, the exposure sensitivity is preferably less than 500 mJ/cm 2 in practical use under the above-mentioned test conditions. The results are collectively shown in Table 4.

〔黏附性〕 利用SEM(Scanning Electron Microscope)觀察了在藉由上述曝光靈敏度的試驗製作之圖案狀的硬化膜中是否產生圖案缺損, 並依據下述基準進行了評價。結果綜合示於表4。[Adhesion] Whether or not a pattern defect occurred in the patterned cured film produced by the above-mentioned exposure sensitivity test was observed by SEM (Scanning Electron Microscope), and evaluated based on the following criteria. The results are collectively shown in Table 4.

-評價基準- A:完全未觀察到圖案缺損。 B:每1.0μm見方的圖案上存在1~3個圖案缺損。 C:每1.0μm見方的圖案上存在4個以上且10個以下的圖案缺損。 D:每1.0μm見方的圖案上存在11個以上的圖案缺損。 另外,評價“B”以上為實際使用範圍。- Evaluation Criteria - A: No pattern defect was observed at all. B: There are 1 to 3 pattern defects per 1.0 μm square pattern. C: There are 4 or more and 10 or less pattern defects per 1.0 μm square pattern. D: There are 11 or more pattern defects per 1.0 μm square pattern. In addition, the evaluation "B" or more is the actual use range.

〔圖案形狀〕 對在上述曝光靈敏度的評價中製作之圖案狀的硬化膜進行了後烘烤(溫度:220℃、時間:300秒)。利用測長SEM(Scanning Electron Microscope)測定了後烘烤後的硬化膜的圖案形狀。具體而言,測定線圖案端部的膜厚與中央部的膜厚,計算比例(圖案端部的膜厚/中央部的膜厚),並依據以下基準進行了評價。另外,評價“2”以上為實際使用範圍。 ・7:比例超過0.98且1.00以下,基於SEM之觀察中觀察不到圖案中央部與端部的膜厚上存在差異。 ・6:比例超過0.96且0.98以下,可觀察到圖案中央部與端部的膜厚上存在微小的差異。 ・5:比例超過0.94且0.96以下,可觀察到圖案中央部與端部的膜厚上存在差異。 ・4:比例超過0.92且0.94以下,端部的膜厚較薄且稍微變形,但為實際使用上不成問題之級別。 ・3:比例超過0.90且0.92以下,端部的膜厚較薄且變形,但為實際使用上不成問題之級別。 ・2:比例超過0.80且0.90以下,端部的膜厚較薄,但為可實際使用之級別。 ・1:比例為0.80以下,端部的膜厚較薄,在容許範圍外。[Pattern shape] Post-baking (temperature: 220° C., time: 300 seconds) was performed on the pattern-shaped cured film produced in the evaluation of the above-mentioned exposure sensitivity. The pattern shape of the cured film after post-baking was measured with a length-measuring SEM (Scanning Electron Microscope). Specifically, the film thickness at the edge of the line pattern and the film thickness at the center were measured, and the ratio (film thickness at the pattern edge/film thickness at the center) was calculated, and evaluated based on the following criteria. In addition, evaluation "2" or more is the actual use range.・7: The ratio is more than 0.98 and 1.00 or less, and the difference in film thickness between the center part and the edge part of the pattern is not observed by SEM observation.・6: The ratio is more than 0.96 and 0.98 or less, and a slight difference in film thickness at the center part and the edge part of the pattern is observed.・5: The ratio is more than 0.94 and 0.96 or less, and a difference in film thickness between the center part and the edge part of the pattern is observed.・4: The ratio is more than 0.92 and 0.94 or less, and the film thickness at the edge is thin and slightly deformed, but it is a level that does not pose a problem in practical use.・3: The ratio is more than 0.90 and 0.92 or less, and the film thickness at the end portion is thin and deformed, but it is a level that does not pose a problem in practical use.・2: The ratio is more than 0.80 and 0.90 or less, and the film thickness at the edge is thin, but it is a level that can be used practically.・1: The ratio is 0.80 or less, and the film thickness at the edge is thin and outside the allowable range.

〔顯影性〕 當在上述曝光靈敏度的評價中製作之圖案狀的硬化膜中進行曝光時, 利用SEM(倍率:20,000倍)觀察了被光罩遮蔽且未照射有光之區域(未曝光部)中的殘渣的有無,並對顯影性進行了評價。評價基準如下,結果綜合示於表4。[Developability] When exposing to the patterned cured film prepared in the evaluation of the above-mentioned exposure sensitivity, a region (unexposed portion) that was shielded by a mask and not irradiated with light was observed by SEM (magnification: 20,000 times). The presence or absence of residues was evaluated for developability. The evaluation criteria are as follows, and Table 4 shows the results comprehensively.

-評價基準- A:在未曝光部完全未觀察到殘渣。 B:每1.0μm見方的未曝光部上觀察到1個以上且3個以下的殘渣。 C:每1.0μm見方的未曝光部上觀察到4個以上且10個以下的殘渣。 D:每1.0μm見方的未曝光部上觀察到11個以上的殘渣。 實際使用上“C”以上為較佳,“A”及“B”評價為具有優異之性能。- Evaluation Criteria - A: No residue was observed in the unexposed part at all. B: One or more and three or less residues are observed per 1.0 μm square unexposed portion. C: 4 or more and 10 or less residues are observed per 1.0-micrometer-square unexposed part. D: 11 or more residues were observed per unexposed portion of 1.0 μm square. In actual use, "C" or higher is preferable, and "A" and "B" are evaluated as having excellent performance.

[表4]

Figure 106118513-A0304-0003
[Table 4]
Figure 106118513-A0304-0003

從表4所示之結果得知,含有規定的多官能硫醇化合物之實施例24~54及59的硬化性組成物(含有黑色顏料之硬化性組成物)具有優異之曝光靈敏度且具有與支撐體的優異之黏附性。 另一方面,不含有多官能硫醇化合物之比較例4的硬化性組成物不具有上述效果。含有不具有相互作用性基團之多官能硫醇化合物之比較例5及比較例6的多官能硫醇化合物不具有上述效果。 以式(2)表示之多官能硫醇化合物的m為3以上之實施例25~54及59的硬化性組成物與實施例24的硬化性組成物相比,具有更優異之曝光靈敏度。 與硫醇基不同之相互作用性基團為羥基(實施例26)、胺基(實施例27)或吡啶基(實施例31)之硬化性組成物和與硫醇基不同之相互作用性基團為苯基(實施例30)或Si基(實施例32)之硬化性組成物相比,具有更優異之顯影性。 與硫醇基不同之相互作用性基團為羧酸基(實施例25)、磷酸基(實施例28)或磺酸基(實施例29)之硬化性組成物和與硫醇基不同之相互作用性基團為羥基(實施例26)、胺基(實施例27)或吡啶基(實施例31)之硬化性組成物相比,具有進一步優異之顯影性。推測這是由於與硫醇基不同之相互作用性基團的差異引起之未曝光部的溶解性的差異。 實施例33的硬化性組成物與m+n相等且m/n更大之實施例41的硬化性組成物相比,具有更優異之圖案形狀,且具有對支撐體的更優異之黏附性。 光聚合起始劑為肟化合物之實施例33、47、48、49及50的硬化性組成物與實施例59的硬化性組成物相比,具有更優異之曝光靈敏度。From the results shown in Table 4, it was found that the curable compositions (curable compositions containing black pigments) of Examples 24 to 54 and 59 containing the prescribed polyfunctional thiol compounds had excellent exposure sensitivity and had Excellent adhesion to the body. On the other hand, the curable composition of Comparative Example 4 which does not contain a polyfunctional thiol compound does not have the above-mentioned effects. The polyfunctional thiol compounds of Comparative Example 5 and Comparative Example 6 containing a polyfunctional thiol compound having no interactive group did not have the above-mentioned effects. Compared with the curable composition of Example 24, the curable compositions of Examples 25 to 54 and 59 in which m of the polyfunctional thiol compound represented by the formula (2) is 3 or more have more excellent exposure sensitivity. A sclerosing composition in which the interactive group different from the thiol group is a hydroxyl group (Example 26), an amine group (Example 27) or a pyridyl group (Example 31), and the interactive group different from the thiol group Compared with the curable composition whose group is phenyl group (Example 30) or Si group (Example 32), it has more excellent developability. A sclerosing composition in which the interacting group different from the thiol group is a carboxylic acid group (Example 25), a phosphoric acid group (Example 28) or a sulfonic acid group (Example 29), and the interaction group different from the thiol group Compared with the curable composition in which the active group is a hydroxyl group (Example 26), an amino group (Example 27) or a pyridyl group (Example 31), it has further excellent developability. It is presumed that this is due to the difference in solubility of the unexposed part due to the difference in the interactive group different from the thiol group. Compared with the curable composition of Example 41 in which m+n is equal and m/n is larger, the curable composition of Example 33 has a more excellent pattern shape and has a more excellent adhesion to the support. Compared with the curable composition of Example 59, the curable compositions of Examples 33, 47, 48, 49 and 50 in which the photopolymerization initiator was an oxime compound had more excellent exposure sensitivity.

另外,表4中,上箭頭表示與緊上的欄相同,“-”表示硬化性組成物不含有該成分。In addition, in Table 4, the upward arrow indicates the same as the column immediately above, and "-" indicates that the curable composition does not contain this component.

代替聚合性化合物M1而使用了聚合性化合物M2,除此以外,與實施例33相同地製作了硬化性組成物並進行了評價的結果,得到與實施例33相同的結果。A curable composition was produced and evaluated in the same manner as in Example 33, except that the polymerizable compound M2 was used instead of the polymerizable compound M1, and the same results as in Example 33 were obtained.

代替聚合性化合物M1而使用了聚合性化合物M1及M2的混合物(混合物中的M1及M2的含有質量比為M1的含有質量:M2的含有質量=1:1,上述混合物相對於硬化性組成物總體的含量與實施例33中的聚合性化合物M1的含量相同。),除此以外,與實施例33相同地製作了硬化性組成物並進行了評價的結果,得到與實施例33相同的結果。In place of the polymerizable compound M1, a mixture of the polymerizable compounds M1 and M2 was used (the content-to-mass ratio of M1 and M2 in the mixture is the content-mass ratio of M1: the content-mass of M2=1:1, the above-mentioned mixture relative to the curable composition The total content was the same as the content of the polymerizable compound M1 in Example 33.), except that a curable composition was produced and evaluated in the same manner as in Example 33, and the same results as in Example 33 were obtained. .

[碳黑分散物(CB分散液)的製備及硬化性組成物的評價] 上述的著色劑分散液的製備中,將著色劑設為碳黑(商品名“Color Black S170”,Degussa-Hüls AG製造,平均一次粒徑17nm、BET比表面積200m2 /g、藉由氣黑方式製造之碳黑),除此以外,藉由相同的方法獲得碳黑分散物(CB分散液)。[Preparation of Carbon Black Dispersion (CB Dispersion) and Evaluation of Curable Composition] In the preparation of the above-described colorant dispersion, the colorant was carbon black (trade name "Color Black S170", Degussa-Hüls AG). A carbon black dispersion (CB dispersion) was obtained by the same method except that the average primary particle size was 17 nm, the BET specific surface area was 200 m 2 /g, and carbon black was produced by the gas black method.

實施例33的硬化性組成物的製備中,代替以硬化性組成物中含有58質量%的含氮化鈦粒子TiN-1之方式添加之著色劑分散液,使用了含有含氮化鈦粒子TiN-1之著色劑分散液與上述CB分散液的混合物(硬化性組成物中的含氮化鈦粒子TiN-1:硬化性組成物中的碳黑=45:13(質量比)、上述硬化性組成物中的含氮化鈦粒子TiN-1與碳黑的合計含量為58質量%。),除此以外,以相同的方法製備硬化性組成物,並用此進行了評價。評價的結果得知,可獲得與實施例33相同的評價(包括曝光靈敏度和黏附性)。In the preparation of the curable composition of Example 33, instead of the colorant dispersion liquid added so that the curable composition contained 58% by mass of titanium nitride-containing particles TiN-1, TiN containing titanium nitride-containing particles was used. -1 Mixture of the colorant dispersion and the above-mentioned CB dispersion (titanium nitride-containing particles TiN-1 in the curable composition: carbon black in the curable composition = 45:13 (mass ratio), the above curable Except that the total content of the titanium nitride-containing particles TiN-1 and carbon black in the composition was 58% by mass), a curable composition was prepared in the same manner and evaluated using this. As a result of the evaluation, it was found that the same evaluation (including exposure sensitivity and adhesion) as in Example 33 was obtained.

[彩色顏料分散物(PY分散液)的製備和硬化性組成物的評價] 上述著色劑分散液的製備中,將著色劑設為顏料黃150(Hangzhou Star-up Pigment Co., Ltd.製造,商品名6150顏料黄5GN),除此以外,藉由相同的方法獲得彩色顏料分散物(PY分散液)。[Preparation of Color Pigment Dispersion (PY Dispersion) and Evaluation of Curable Composition] In the preparation of the above-mentioned colorant dispersion, the colorant was Pigment Yellow 150 (manufactured by Hangzhou Star-up Pigment Co., Ltd., A color pigment dispersion (PY dispersion) was obtained by the same method except for the trade name 6150 Pigment Yellow 5GN).

實施例33的硬化性組成物的製備中,代替以硬化性組成物中含有58質量%的含氮化鈦粒子TiN-1之方式添加之著色劑分散液,使用了含有含氮化鈦粒子TiN-1之著色劑分散液與上述PY分散液的混合物(硬化性組成物中的含氮化鈦粒子TiN-1:硬化性組成物中的顏料黃150=45:13(質量比)、硬化性組成物中的含氮化鈦粒子TiN-1與顏料黃150的合計含量為58質量%。),除此以外,以相同的方法製備硬化性組成物,並用此進行了評價。評價的結果得知,可獲得與實施例33相同的評價(包括曝光靈敏度和黏附性)。另外,作為硬化膜,為黑色更濃的膜。In the preparation of the curable composition of Example 33, instead of the colorant dispersion liquid added so that the curable composition contained 58% by mass of titanium nitride-containing particles TiN-1, TiN containing titanium nitride-containing particles was used. The mixture of the colorant dispersion liquid of -1 and the above-mentioned PY dispersion liquid (titanium nitride-containing particles TiN-1 in the curable composition: Pigment yellow 150 in the curable composition = 45:13 (mass ratio), curable Except that the total content of titanium nitride-containing particles TiN-1 and Pigment Yellow 150 in the composition was 58% by mass), a curable composition was prepared and evaluated in the same manner. As a result of the evaluation, it was found that the same evaluation (including exposure sensitivity and adhesion) as in Example 33 was obtained. Moreover, as a cured film, it is a film with a darker black.

[彩色顏料分散物(PR分散液)的製備] 上述著色劑分散液的製備中,將著色劑設為C.I.Pigment Red 254(Ciba Specialty Chemicals公司製造),除此以外,藉由相同的方法獲得彩色顏料分散物(PR分散液)。[Preparation of Color Pigment Dispersion (PR Dispersion)] In the preparation of the above-mentioned colorant dispersion, a color was obtained by the same method except that the colorant was C.I. Pigment Red 254 (manufactured by Ciba Specialty Chemicals). Pigment dispersion (PR dispersion).

[彩色顏料分散物(PB分散液)的製備] 上述著色劑分散液的製備中,將著色劑設為C.I.Pigment Blue 15:6(DIC CORPORATION製造),除此以外,藉由相同的方法獲得彩色顏料分散物(PB分散液)。[Preparation of Color Pigment Dispersion (PB Dispersion)] In the preparation of the above-mentioned colorant dispersion, a color was obtained by the same method except that the colorant was C.I. Pigment Blue 15:6 (manufactured by DIC CORPORATION). Pigment dispersion (PB dispersion).

[彩色顏料分散物(PV分散液)的製備] 上述著色劑分散液的製備中,將著色劑設為C.I.Pigment Violet 23(Clariant製造),除此以外,藉由相同的方法獲得彩色顏料分散物(PV分散液)。[Preparation of Color Pigment Dispersion (PV Dispersion)] In the preparation of the above-mentioned colorant dispersion, a color pigment dispersion was obtained by the same method except that the colorant was C.I. Pigment Violet 23 (manufactured by Clariant). (PV dispersion).

實施例33的硬化性組成物的製備中,代替以硬化性組成物中含有58質量%的含氮化鈦粒子TiN-1之方式添加之著色劑分散液,使用了上述含氮化鈦粒子TiN-1、PY、PR、PB及PV分散液的混合物(硬化性組成物中的含氮化鈦粒子TiN-1、PY、PR、PB及PV的比;含氮化鈦粒子TiN-1:PY:PR:PB:PV=70:17:37:36:10(質量比)、硬化性組成物中的含氮化鈦粒子TiN-1、PY、PR、PB及PV的合計含量為58質量%。),除此以外,以相同的方法製備硬化性組成物,並用此進行了評價。評價的結果得知,可獲得與實施例33相同的評價(包括曝光靈敏度和黏附性),而且可獲得紅外區域的遮光性優異之膜。In the preparation of the curable composition of Example 33, the above-mentioned titanium nitride-containing particle TiN was used in place of the colorant dispersion liquid added so that the curable composition contained 58% by mass of the titanium nitride-containing particles TiN-1. -1. Mixture of PY, PR, PB and PV dispersion (ratio of titanium nitride-containing particles TiN-1, PY, PR, PB and PV in curable composition; titanium nitride-containing particles TiN-1:PY :PR:PB:PV=70:17:37:36:10 (mass ratio), the total content of titanium nitride-containing particles TiN-1, PY, PR, PB and PV in the curable composition is 58% by mass ), except that the curable composition was prepared in the same way and evaluated. As a result of the evaluation, it was found that the same evaluation (including exposure sensitivity and adhesion) as in Example 33 was obtained, and a film excellent in light-shielding properties in the infrared region was obtained.

實施例33的硬化性組成物的製備中,代替以硬化性組成物中含有58質量%的含氮化鈦粒子TiN-1之方式添加之著色劑分散液,使用了上述含氮化鈦粒子TiN-1與以下示出之化合物SQ-23的混合物(硬化性組成物中的含氮化鈦粒子TiN-1及化合物SQ-23的比;含氮化鈦粒子TiN-1:化合物SQ-23=50:8(質量比)、硬化性組成物中的含氮化鈦粒子TiN-1及化合物SQ-23的合計含量為58質量%。),除此以外,以相同之方式製備硬化性組成物,並用此進行了評價。評價的結果得知,可獲得與實施例33相同的評價(包括曝光靈敏度和黏附性),而且可獲得紅外區域的遮光性優異之膜。In the preparation of the curable composition of Example 33, the above-mentioned titanium nitride-containing particle TiN was used in place of the colorant dispersion liquid added so that the curable composition contained 58% by mass of the titanium nitride-containing particles TiN-1. Mixture of -1 and compound SQ-23 shown below (ratio of titanium nitride-containing particles TiN-1 and compound SQ-23 in curable composition; titanium nitride-containing particles TiN-1: compound SQ-23= A curable composition was prepared in the same manner, except that the total content of the titanium nitride-containing particles TiN-1 and the compound SQ-23 in the curable composition was 50:8 (mass ratio) of 58 mass %.) , and evaluated with this. As a result of the evaluation, it was found that the same evaluation (including exposure sensitivity and adhesion) as in Example 33 was obtained, and a film excellent in light-shielding properties in the infrared region was obtained.

實施例33的硬化性組成物的製備中,代替以硬化性組成物中含有58質量%的含氮化鈦粒子TiN-1之方式添加之著色劑分散液,使用了上述含氮化鈦粒子TiN-1與下述化合物A-52的混合物(硬化性組成物中的含氮化鈦粒子TiN-1及化合物A-52的比;含氮化鈦粒子TiN-1:化合物A-52=50:8(質量比)、硬化性組成物中的含氮化鈦粒子TiN-1及化合物A-52的合計含量為58質量%。),除此以外,以相同的方法製備硬化性組成物,並用此進行了評價。評價的結果得知,可獲得與實施例33相同的評價(包括曝光靈敏度和黏附性),而且可獲得紅外區域的遮光性優異之膜。In the preparation of the curable composition of Example 33, the above-mentioned titanium nitride-containing particle TiN was used in place of the colorant dispersion liquid added so that the curable composition contained 58% by mass of the titanium nitride-containing particles TiN-1. A mixture of -1 and the following compound A-52 (ratio of titanium nitride-containing particles TiN-1 and compound A-52 in curable composition; titanium nitride-containing particles TiN-1: compound A-52=50: 8 (mass ratio), the total content of titanium nitride-containing particles TiN-1 and compound A-52 in the curable composition is 58 mass %.), a curable composition was prepared in the same manner, and used together This was evaluated. As a result of the evaluation, it was found that the same evaluation (including exposure sensitivity and adhesion) as in Example 33 was obtained, and a film excellent in light-shielding properties in the infrared region was obtained.

・化合物SQ-23 [化學式46]

Figure 02_image560
・Compound SQ-23 [Chemical formula 46]
Figure 02_image560

・化合物A-52(另外,下述式中Ph表示苯基。) [化學式47]

Figure 02_image562
・Compound A-52 (In addition, in the following formula, Ph represents a phenyl group.) [Chemical formula 47]
Figure 02_image562

實施例1中,除了未使用界面活性劑F-1以外,以相同之方式進行了評價。評價的結果得知,得到與實施例1相同的結果。In Example 1, the evaluation was carried out in the same manner except that the surfactant F-1 was not used. As a result of the evaluation, it was found that the same results as in Example 1 were obtained.

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Claims (30)

一種硬化性組成物,其含有多官能硫醇化合物、聚合性化合物及光聚合起始劑,其中前述多官能硫醇化合物為以式(2)表示之化合物,
Figure 106118513-A0305-02-0175-1
式中,R2表示碳數1以上的2價的連結基,m表示2~14的整數,n表示1~15的整數,M1分別獨立地表示單鍵、-O-、-S-、-N(R4)-、-C(=O)-、-C(=O)-O-、-O-C(=O)-O-、-C(=O)-NH-、-O-C(=O)-NH-、-S(=O)-、-S(=O)-O-、-S(=O)2-、-S(=O)2-O-或-CH=N-,R4表示1價的有機基,L3表示m+n價的連結基,R1表示選自包括羥基、NRaRa-、吡啶基、吡啶鎓基、銨基、鏻基、羧酸基或其鹽、磷酸基或其鹽、磺酸基或其鹽、未取代芳基、-Si(RX)p(RY)3-p及-(ORA)q-RZ之群組之至少1種;另外,p表示1~3的整數,RX表示水解性基團,RY表示除水解性基團之1價的有機基,p個RX及3-p個RY可分別相同,亦可不同,並且,RZ表示氫原子、烷基或烷氧基,q表示1~4的整數,RA表示碳數1~15的伸烷基,Ra表示1價的有機基;R3表示2價的未取代脂肪族烴基、-C(=O)-、-C(=O)-O-、-O-C(=O)-O-、-C(=O)-NH-、-CH=N-、-N(R)-、或將該些與選自下述所示之連結基群組之基團進行組合而得之基團,R表示烷基; 連結基群組:2價的未取代脂肪族烴基、-O-、-S-、-N(R4)-、-C(=O)-、-C(=O)-O-、-O-C(=O)-O-、-C(=O)-NH-、-O-C(=O)-NH-、-S(=O)-、-S(=O)-O-、-S(=O)2-、-S(=O)2-O-、-CH=N-及組合該些而得之基團;前述連結基群組中的R4表示1價的有機基;另外,R2及R3可彼此相同,亦可不同,n個R1、m個R2、n個R2、n個R3、m個M1及n個M1可分別相同,亦可不同;其中,m相對於n的值(m/n)為2~5。
A curable composition comprising a polyfunctional thiol compound, a polymerizable compound and a photopolymerization initiator, wherein the polyfunctional thiol compound is a compound represented by formula (2),
Figure 106118513-A0305-02-0175-1
In the formula, R 2 represents a divalent linking group having 1 or more carbon atoms, m represents an integer of 2 to 14, n represents an integer of 1 to 15, and M 1 independently represents a single bond, -O-, -S-, -N(R 4 )-, -C(=O)-, -C(=O)-O-, -OC(=O)-O-, -C(=O)-NH-, -OC(= O)-NH-, -S(=O)-, -S(=O)-O-, -S(=O) 2 -, -S(=O) 2 -O- or -CH=N-, R 4 represents a monovalent organic group, L 3 represents an m+n-valent linking group, and R 1 represents a group selected from the group consisting of hydroxyl group, NR a R a -, pyridyl group, pyridinium group, ammonium group, phosphonium group, and carboxylic acid group or its salt, phosphoric acid group or its salt, sulfonic acid group or its salt, unsubstituted aryl group, -Si(R X ) p (R Y ) 3-p and -(OR A ) q -R Z of the group At least one; in addition, p represents an integer of 1 to 3, R X represents a hydrolyzable group, R Y represents a monovalent organic group other than a hydrolyzable group, and p pieces of R X and 3-p pieces of R Y can be respectively The same or different, and R Z represents a hydrogen atom, an alkyl group or an alkoxy group, q represents an integer of 1 to 4, R A represents an alkylene group having 1 to 15 carbon atoms, and R a represents a monovalent organic group ; R 3 represents a divalent unsubstituted aliphatic hydrocarbon group, -C(=O)-, -C(=O)-O-, -OC(=O)-O-, -C(=O)-NH- , -CH=N-, -N(R)-, or a group obtained by combining these with a group selected from the linking group group shown below, R represents an alkyl group; linking group group : Divalent unsubstituted aliphatic hydrocarbon group, -O-, -S-, -N(R 4 )-, -C(=O)-, -C(=O)-O-, -OC(=O) -O-, -C(=O)-NH-, -OC(=O)-NH-, -S(=O)-, -S(=O)-O-, -S(=O) 2 - , -S(=O) 2 -O-, -CH=N- and groups obtained by combining these; R 4 in the aforementioned linking group group represents a monovalent organic group; in addition, R 2 and R 3 They may be the same or different from each other, and n R 1 , m R 2 , n R 2 , n R 3 , m M 1 and n M 1 may be respectively the same or different; where m is relative to The value of n (m/n) is 2 to 5.
如申請專利範圍第1項所述之硬化性組成物,其中前述m為3~14的整數。 The curable composition according to claim 1, wherein m is an integer from 3 to 14. 一種硬化性組成物,其含有多官能硫醇化合物、聚合性化合物及光聚合起始劑,其中前述多官能硫醇化合物為以式(2)表示之化合物,
Figure 106118513-A0305-02-0176-2
式中,R2表示碳數1以上的2價的連結基,m表示3~14的整數,n表示1~15的整數,M1分別獨立地表示單鍵、-O-、-S-、-N(R4)-、-C(=O)-、-C(=O)-O-、-O-C(=O)-O-、-C(=O)-NH-、-O-C(=O)-NH-、-S(=O)-、-S(=O)-O-、-S(=O)2-、-S(=O)2-O-或-CH=N-,R4表示1價的有機基,L3表示m+n價的連結基,R1表示選自包括羥基、NRaRa-、吡啶基、吡 啶鎓基、銨基、鏻基、羧酸基或其鹽、磷酸基或其鹽、磺酸基或其鹽、未取代芳基、-Si(RX)p(RY)3-p及-(ORA)q-RZ之群組之至少1種;另外,p表示1~3的整數,RX表示水解性基團,RY表示除水解性基團之1價的有機基,p個RX及3-p個RY可分別相同,亦可不同,並且,RZ表示氫原子、烷基或烷氧基,q表示1~4的整數,RA表示碳數1~15的伸烷基,Ra表示1價的有機基;R3表示2價的未取代脂肪族烴基、-C(=O)-、-C(=O)-O-、-O-C(=O)-O-、-C(=O)-NH-、-CH=N-、-N(R)-、或將該些與選自下述所示之連結基群組之基團進行組合而得之基團,R表示烷基;連結基群組:2價的未取代脂肪族烴基、-O-、-S-、-N(R4)-、-C(=O)-、-C(=O)-O-、-O-C(=O)-O-、-C(=O)-NH-、-O-C(=O)-NH-、-S(=O)-、-S(=O)-O-、-S(=O)2-、-S(=O)2-O-、-CH=N-及組合該些而得之基團;前述連結基群組中的R4表示1價的有機基;另外,R2及R3可彼此相同,亦可不同,n個R1、m個R2、n個R2、n個R3、m個M1及n個M1可分別相同,亦可不同。
A curable composition comprising a polyfunctional thiol compound, a polymerizable compound and a photopolymerization initiator, wherein the polyfunctional thiol compound is a compound represented by formula (2),
Figure 106118513-A0305-02-0176-2
In the formula, R 2 represents a divalent linking group having 1 or more carbon atoms, m represents an integer of 3 to 14, n represents an integer of 1 to 15, and M 1 independently represents a single bond, -O-, -S-, -N(R 4 )-, -C(=O)-, -C(=O)-O-, -OC(=O)-O-, -C(=O)-NH-, -OC(= O)-NH-, -S(=O)-, -S(=O)-O-, -S(=O) 2 -, -S(=O) 2 -O- or -CH=N-, R 4 represents a monovalent organic group, L 3 represents an m+n-valent linking group, and R 1 represents a group selected from the group consisting of hydroxyl group, NR a R a -, pyridyl group, pyridinium group, ammonium group, phosphonium group, and carboxylic acid group or its salt, phosphoric acid group or its salt, sulfonic acid group or its salt, unsubstituted aryl group, -Si(R X ) p (R Y ) 3-p and -(OR A ) q -R Z of the group At least one; in addition, p represents an integer of 1 to 3, R X represents a hydrolyzable group, R Y represents a monovalent organic group other than a hydrolyzable group, and p pieces of R X and 3-p pieces of R Y can be respectively The same or different, and R Z represents a hydrogen atom, an alkyl group or an alkoxy group, q represents an integer of 1 to 4, R A represents an alkylene group having 1 to 15 carbon atoms, and R a represents a monovalent organic group ; R 3 represents a divalent unsubstituted aliphatic hydrocarbon group, -C(=O)-, -C(=O)-O-, -OC(=O)-O-, -C(=O)-NH- , -CH=N-, -N(R)-, or a group obtained by combining these with a group selected from the linking group group shown below, R represents an alkyl group; the linking group group : Divalent unsubstituted aliphatic hydrocarbon group, -O-, -S-, -N(R 4 )-, -C(=O)-, -C(=O)-O-, -OC(=O) -O-, -C(=O)-NH-, -OC(=O)-NH-, -S(=O)-, -S(=O)-O-, -S(=O) 2 - , -S(=O) 2 -O-, -CH=N- and groups obtained by combining these; R 4 in the aforementioned linking group group represents a monovalent organic group; in addition, R 2 and R 3 They may be the same or different from each other, and the n R 1 s , m R 2 s, n R 2 s, n R 3 s, m M 1 s , and n M 1 s may be the same or different, respectively.
一種硬化性組成物,其含有多官能硫醇化合物、聚合性化合物及光聚合起始劑,其中前述多官能硫醇化合物為以式(2)表示之化合物,
Figure 106118513-A0305-02-0177-3
式中,R2表示碳數1以上的2價的連結基,m表示2~14的整數,n表示1~15的整數,M1分別獨立地表示單鍵、-O-、-S-、-N(R4)-、-C(=O)-、-C(=O)-O-、-O-C(=O)-O-、-C(=O)-NH-、-O-C(=O)-NH-、-S(=O)-、-S(=O)-O-、-S(=O)2-、-S(=O)2-O-或-CH=N-,R4表示1價的有機基,L3表示m+n價的連結基,R1表示選自包括羥基、NRaRa-、吡啶基、吡啶鎓基、銨基、鏻基、羧酸基或其鹽、磷酸基或其鹽、磺酸基或其鹽、未取代芳基、-Si(RX)p(RY)3-p及-(ORA)q-RZ之群組之至少1種;另外,p表示1~3的整數,RX表示水解性基團,RY表示除水解性基團之1價的有機基,p個RX及3-p個RY可分別相同,亦可不同,並且,RZ表示氫原子、烷基或烷氧基,q表示1~4的整數,RA表示碳數1~15的伸烷基,Ra表示1價的有機基;R3表示2價的未取代脂肪族烴基、-C(=O)-、-C(=O)-O-、-O-C(=O)-O-、-C(=O)-NH-、-CH=N-、-N(R)-、或將該些與選自下述所示之連結基群組之基團進行組合而得之基團,R表示烷基;連結基群組:2價的未取代脂肪族烴基、-O-、-S-、-N(R4)-、-C(=O)-、-C(=O)-O-、-O-C(=O)-O-、-C(=O)-NH-、-O-C(=O)-NH-、-S(=O)-、-S(=O)-O-、-S(=O)2-、-S(=O)2-O-、-CH=N-及組合該些而得之基團;前述連結基群組中的R4表示1價的有機基;另外,R2及R3可彼此相同,亦可不同,n個R1、m個R2、n個R2、n個R3、m個M1及n個M1可分別相同,亦可不同。
A curable composition comprising a polyfunctional thiol compound, a polymerizable compound and a photopolymerization initiator, wherein the polyfunctional thiol compound is a compound represented by formula (2),
Figure 106118513-A0305-02-0177-3
In the formula, R 2 represents a divalent linking group having 1 or more carbon atoms, m represents an integer of 2 to 14, n represents an integer of 1 to 15, and M 1 independently represents a single bond, -O-, -S-, -N(R 4 )-, -C(=O)-, -C(=O)-O-, -OC(=O)-O-, -C(=O)-NH-, -OC(= O)-NH-, -S(=O)-, -S(=O)-O-, -S(=O) 2 -, -S(=O) 2 -O- or -CH=N-, R 4 represents a monovalent organic group, L 3 represents an m+n-valent linking group, and R 1 represents a group selected from the group consisting of hydroxyl group, NR a R a -, pyridyl group, pyridinium group, ammonium group, phosphonium group, and carboxylic acid group or its salt, phosphoric acid group or its salt, sulfonic acid group or its salt, unsubstituted aryl group, -Si(R X ) p (R Y ) 3-p and -(OR A ) q -R Z of the group At least one; in addition, p represents an integer of 1 to 3, R X represents a hydrolyzable group, R Y represents a monovalent organic group other than a hydrolyzable group, and p pieces of R X and 3-p pieces of R Y can be respectively The same or different, and R Z represents a hydrogen atom, an alkyl group or an alkoxy group, q represents an integer of 1 to 4, R A represents an alkylene group having 1 to 15 carbon atoms, and R a represents a monovalent organic group ; R 3 represents a divalent unsubstituted aliphatic hydrocarbon group, -C(=O)-, -C(=O)-O-, -OC(=O)-O-, -C(=O)-NH- , -CH=N-, -N(R)-, or a group obtained by combining these with a group selected from the linking group group shown below, R represents an alkyl group; the linking group group : Divalent unsubstituted aliphatic hydrocarbon group, -O-, -S-, -N(R 4 )-, -C(=O)-, -C(=O)-O-, -OC(=O) -O-, -C(=O)-NH-, -OC(=O)-NH-, -S(=O)-, -S(=O)-O-, -S(=O) 2 - , -S(=O) 2 -O-, -CH=N- and groups obtained by combining these; R 4 in the aforementioned linking group group represents a monovalent organic group; in addition, R 2 and R 3 They may be the same or different from each other, and the n R 1 s , m R 2 s, n R 2 s, n R 3 s, m M 1 s , and n M 1 s may be the same or different, respectively.
如申請專利範圍第4項所述之硬化性組成物,其中 前述m為3~14的整數。 The curable composition as described in item 4 of the scope of the application, wherein The aforementioned m is an integer of 3 to 14. 如申請專利範圍第1項至第5項中任一項所述之硬化性組成物,其中前述R1表示選自包括NRaRa-、吡啶基、吡啶鎓基、銨基、鏻基、磷酸基或其鹽、磺酸基或其鹽、未取代芳基、-Si(RX)p(RY)3-p及-(ORA)q-RZ之群組之至少1種,另外,p表示1~3的整數,RX表示水解性基團,RY表示除水解性基團之1價的有機基,p個RX及3-p個RY可分別相同,亦可不同,並且,RZ表示氫原子、烷基或烷氧基,q表示1~4的整數,RA表示碳數1~15的伸烷基,Ra表示1價的有機基。 The curable composition according to any one of items 1 to 5 of the claimed scope, wherein the aforementioned R 1 represents a group selected from the group consisting of NR a R a -, pyridyl, pyridinium, ammonium, phosphonium, at least one of the group of phosphoric acid group or its salt, sulfonic acid group or its salt, unsubstituted aryl group, -Si(R X ) p (R Y ) 3-p and -(OR A ) q -R Z , In addition, p represents an integer of 1 to 3, R X represents a hydrolyzable group, and R Y represents a monovalent organic group other than a hydrolyzable group, and p R X and 3-p R Y may be the same, respectively, or may be In addition, R Z represents a hydrogen atom, an alkyl group or an alkoxy group, q represents an integer of 1 to 4, R A represents an alkylene group having 1 to 15 carbon atoms, and R a represents a monovalent organic group. 如申請專利範圍第1項至第5項中任一項所述之硬化性組成物,其中前述R1係選自包括羥基、NRaRa-、吡啶基、吡啶鎓基、銨基、鏻基、羧酸基或其鹽、磷酸基或其鹽及磺酸基或其鹽之群組之至少1種,另外,Ra表示1價的有機基。 The curable composition according to any one of items 1 to 5 of the claimed scope, wherein the aforementioned R 1 is selected from the group consisting of hydroxyl, NR a R a -, pyridyl, pyridinium, ammonium, phosphonium at least one of a group, a carboxylic acid group or a salt thereof, a phosphoric acid group or a salt thereof, and a sulfonic acid group or a salt thereof, and R a represents a monovalent organic group. 如申請專利範圍第1項至第5項中任一項所述之硬化性組成物,其中前述R1係選自包括羥基、NRaRa-、吡啶基、羧酸基或其鹽、磷酸基或其鹽及磺酸基或其鹽之群組之至少1種,另外,Ra表示1價的有機基。 The curable composition according to any one of items 1 to 5 of the claimed scope, wherein the aforementioned R 1 is selected from the group consisting of hydroxyl, NR a R a -, pyridyl, carboxylate or its salt, phosphoric acid at least one of a group or a salt thereof and a sulfonic acid group or a salt thereof, and R a represents a monovalent organic group. 如申請專利範圍第1項至第5項中任一項所述之硬化性組成物,其還含有著色劑。 The curable composition according to any one of claims 1 to 5 of the claimed scope, further comprising a colorant. 如申請專利範圍第9項所述之硬化性組成物,其中前述著色劑含有黑色顏料。 The curable composition according to claim 9, wherein the colorant contains a black pigment. 如申請專利範圍第10項所述之硬化性組成物,其中前述黑色顏料含有選自包括鈦黑及氮氧化鈮之群組之至少1種。 The curable composition according to claim 10, wherein the black pigment contains at least one selected from the group consisting of titanium black and niobium oxynitride. 如申請專利範圍第10項所述之硬化性組成物,其中前述黑色顏料含有鈦黑,前述鈦黑係選自包括低次氧化鈦、氮氧化鈦及氮化鈦之群組之至少1種。 The curable composition of claim 10, wherein the black pigment contains titanium black, and the titanium black is at least one selected from the group consisting of sub-titanium oxide, titanium oxynitride and titanium nitride. 如申請專利範圍第9項所述之硬化性組成物,其中前述著色劑含有選自包括氮氧化鈦;氮氧化鈮;氮氧化釩;以及含有選自包括Nb、V、Co、Cr、Cu、Mn、Ru、Fe、Ni、Sn、Ti及Ag之群組之1種或2種以上的金屬元素之金屬氧化物及金屬氮化物之群組之至少1種。 The curable composition of claim 9, wherein the coloring agent contains titanium oxynitride; niobium oxynitride; vanadium oxynitride; and contains Nb, V, Co, Cr, Cu, At least one of the group of metal oxides and metal nitrides of one or more metal elements from the group of Mn, Ru, Fe, Ni, Sn, Ti, and Ag. 如申請專利範圍第1項至第5項中任一項所述之硬化性組成物,其中前述光聚合起始劑為肟化合物。 The curable composition according to any one of items 1 to 5 of the claimed scope, wherein the photopolymerization initiator is an oxime compound. 如申請專利範圍第1項至第5項中任一項所述之硬化性組成物,更含有分散劑,前述分散劑為高分子化合物,前述高分子化合物含有包含接枝鏈之結構單元,前述接枝鏈含有聚酯結構。 The curable composition according to any one of items 1 to 5 of the scope of the application, further comprising a dispersant, the dispersant is a polymer compound, the polymer compound contains a structural unit including a graft chain, the aforementioned The graft chains contain polyester structures. 一種硬化膜,其是使申請專利範圍第1項至第15項中任一項所述之硬化性組成物硬化來獲得。 A cured film obtained by curing the curable composition described in any one of Claims 1 to 15. 一種濾色器,其含有申請專利範圍第16項所述之硬化膜。 A color filter comprising the cured film described in claim 16 of the scope of application. 一種遮光膜,其含有申請專利範圍第16項所述之硬化膜。 A light-shielding film comprising the cured film described in claim 16 of the patent application. 一種固體攝像元件,其含有申請專利範圍第16項所述之硬化膜。 A solid-state imaging element comprising the cured film described in claim 16 of the patent application. 一種圖像顯示裝置,其含有申請專利範圍第16項所述之硬化膜。 An image display device comprising the cured film described in claim 16 of the patent application scope. 一種硬化膜的製造方法,其含有:硬化性組成物層形成製程,使用申請專利範圍第1項至第15項中任一項所述之硬化性組成物,在支撐體上形成硬化性組成物層;及曝光製程,對前述硬化性組成物層進行曝光。 A method for producing a cured film, comprising: a process for forming a layer of a curable composition, using the curable composition described in any one of the first to 15th claims in the scope of application, and forming the curable composition on a support layer; and an exposure process, exposing the aforementioned curable composition layer. 如申請專利範圍第21項所述之硬化膜的製造方法,其中前述硬化性組成物層形成製程包含在前述支撐體上塗佈前述硬化性組成物,從而在前述支撐體上形成前述硬化性組成物層之製程。 The method for manufacturing a cured film according to claim 21, wherein the curable composition layer forming process comprises coating the curable composition on the support to form the curable composition on the support Material layer process. 如申請專利範圍第21項或第22項所述之硬化膜的製造方法,其還含有:顯影製程,對所曝光之前述硬化性組成物層進行顯影;及清洗製程,對所顯影之前述硬化性組成物層進行清洗。 The method for producing a cured film according to the 21st or 22nd claim, further comprising: a development process, for developing the exposed curable composition layer; and a cleaning process for developing the developed hardening layer The composition layer is cleaned. 一種多官能硫醇化合物,其為以式(2)表示之化合物,
Figure 106118513-A0305-02-0181-4
式中,R2表示碳數1以上的2價的連結基,m表示2~14的整數,n表示1~15的整數,M1分別獨立地表示單鍵、-O-、-S-、-N(R4)-、-C(=O)-、-C(=O)-O-、-O-C(=O)-O-、-C(=O)-NH-、-O-C(=O)-NH-、-S(=O)-、-S(=O)-O-、-S(=O)2-、-S(=O)2-O-或-CH=N-,R4表示1價的有 機基,L3表示m+n價的連結基,R1表示選自包括羥基、NRaRa-、吡啶基、吡啶鎓基、銨基、鏻基、羧酸基或其鹽、磷酸基或其鹽、磺酸基或其鹽、未取代芳基、-Si(RX)p(RY)3-p及-(ORA)q-RZ之群組之至少1種;另外,p表示1~3的整數,RX表示水解性基團,RY表示除水解性基團之1價的有機基,p個RX及3-p個RY可分別相同,亦可不同,並且,RZ表示氫原子、烷基或烷氧基,q表示1~4的整數,RA表示碳數1~15的伸烷基,Ra表示1價的有機基;R3表示2價的未取代脂肪族烴基、-C(=O)-、-C(=O)-O-、-O-C(=O)-O-、-C(=O)-NH-、-CH=N-、-N(R)-、或將該些與選自下述所示之連結基群組之基團進行組合而得之基團,R表示烷基;連結基群組:2價的未取代脂肪族烴基、-O-、-S-、-N(R4)-、-C(=O)-、-C(=O)-O-、-O-C(=O)-O-、-C(=O)-NH-、-O-C(=O)-NH-、-S(=O)-、-S(=O)-O-、-S(=O)2-、-S(=O)2-O-、-CH=N-及組合該些而得之基團;前述連結基群組中的R4表示1價的有機基;另外,R2及R3可彼此相同,亦可不同,n個R1、m個R2、n個R2、n個R3、m個M1及n個M1可分別相同,亦可不同;其中,m相對於n的值(m/n)為2~5。
A polyfunctional thiol compound, which is a compound represented by formula (2),
Figure 106118513-A0305-02-0181-4
In the formula, R 2 represents a divalent linking group having 1 or more carbon atoms, m represents an integer of 2 to 14, n represents an integer of 1 to 15, and M 1 independently represents a single bond, -O-, -S-, -N(R 4 )-, -C(=O)-, -C(=O)-O-, -OC(=O)-O-, -C(=O)-NH-, -OC(= O)-NH-, -S(=O)-, -S(=O)-O-, -S(=O) 2 -, -S(=O) 2 -O- or -CH=N-, R 4 represents a monovalent organic group, L 3 represents an m+n-valent linking group, and R 1 represents a group selected from the group consisting of hydroxyl group, NR a R a -, pyridyl group, pyridinium group, ammonium group, phosphonium group, and carboxylic acid group or its salt, phosphoric acid group or its salt, sulfonic acid group or its salt, unsubstituted aryl group, -Si(R X ) p (R Y ) 3-p and -(OR A ) q -R Z of the group At least one; in addition, p represents an integer of 1 to 3, R X represents a hydrolyzable group, R Y represents a monovalent organic group other than a hydrolyzable group, and p pieces of R X and 3-p pieces of R Y can be respectively The same or different, and R Z represents a hydrogen atom, an alkyl group or an alkoxy group, q represents an integer of 1 to 4, R A represents an alkylene group having 1 to 15 carbon atoms, and R a represents a monovalent organic group ; R 3 represents a divalent unsubstituted aliphatic hydrocarbon group, -C(=O)-, -C(=O)-O-, -OC(=O)-O-, -C(=O)-NH- , -CH=N-, -N(R)-, or a group obtained by combining these with a group selected from the linking group group shown below, R represents an alkyl group; the linking group group : Divalent unsubstituted aliphatic hydrocarbon group, -O-, -S-, -N(R 4 )-, -C(=O)-, -C(=O)-O-, -OC(=O) -O-, -C(=O)-NH-, -OC(=O)-NH-, -S(=O)-, -S(=O)-O-, -S(=O) 2 - , -S(=O) 2 -O-, -CH=N- and groups obtained by combining these; R 4 in the aforementioned linking group group represents a monovalent organic group; in addition, R 2 and R 3 They may be the same or different from each other, and n R 1 , m R 2 , n R 2 , n R 3 , m M 1 and n M 1 may be respectively the same or different; where m is relative to The value of n (m/n) is 2 to 5.
如申請專利範圍第24項所述之多官能硫醇化合物,其中前述m為3~14的整數。 The polyfunctional thiol compound according to claim 24, wherein m is an integer from 3 to 14. 一種多官能硫醇化合物,其為以式(2)表示之化合物,
Figure 106118513-A0305-02-0183-5
式中,R2表示碳數1以上的2價的連結基,m表示3~14的整數,n表示1~15的整數,M1分別獨立地表示單鍵、-O-、-S-、-N(R4)-、-C(=O)-、-C(=O)-O-、-O-C(=O)-O-、-C(=O)-NH-、-O-C(=O)-NH-、-S(=O)-、-S(=O)-O-、-S(=O)2-、-S(=O)2-O-或-CH=N-,R4表示1價的有機基,L3表示m+n價的連結基,R1表示選自包括羥基、NRaRa-、吡啶基、吡啶鎓基、銨基、鏻基、羧酸基或其鹽、磷酸基或其鹽、磺酸基或其鹽、未取代芳基、-Si(RX)p(RY)3-p及-(ORA)q-RZ之群組之至少1種;另外,p表示1~3的整數,RX表示水解性基團,RY表示除水解性基團之1價的有機基,p個RX及3-p個RY可分別相同,亦可不同,並且,RZ表示氫原子、烷基或烷氧基,q表示1~4的整數,RA表示碳數1~15的伸烷基,Ra表示1價的有機基;R3表示2價的未取代脂肪族烴基、-C(=O)-、-C(=O)-O-、-O-C(=O)-O-、-C(=O)-NH-、-CH=N-、-N(R)-、或將該些與選自下述所示之連結基群組之基團進行組合而得之基團,R表示烷基;連結基群組:2價的未取代脂肪族烴基、-O-、-S-、-N(R4)-、-C(=O)-、-C(=O)-O-、-O-C(=O)-O-、-C(=O)-NH-、-O-C(=O)-NH-、-S(=O)-、-S(=O)-O-、-S(=O)2-、-S(=O)2-O-、-CH=N-及組合該些而得之基團;前述連結基群組中的R4表示1價的有機基; 另外,R2及R3可彼此相同,亦可不同,n個R1、m個R2、n個R2、n個R3、m個M1及n個M1可分別相同,亦可不同。
A polyfunctional thiol compound, which is a compound represented by formula (2),
Figure 106118513-A0305-02-0183-5
In the formula, R 2 represents a divalent linking group having 1 or more carbon atoms, m represents an integer of 3 to 14, n represents an integer of 1 to 15, and M 1 independently represents a single bond, -O-, -S-, -N(R 4 )-, -C(=O)-, -C(=O)-O-, -OC(=O)-O-, -C(=O)-NH-, -OC(= O)-NH-, -S(=O)-, -S(=O)-O-, -S(=O) 2 -, -S(=O) 2 -O- or -CH=N-, R 4 represents a monovalent organic group, L 3 represents an m+n-valent linking group, and R 1 represents a group selected from the group consisting of hydroxyl group, NR a R a -, pyridyl group, pyridinium group, ammonium group, phosphonium group, and carboxylic acid group or its salt, phosphoric acid group or its salt, sulfonic acid group or its salt, unsubstituted aryl group, -Si(R X ) p (R Y ) 3-p and -(OR A ) q -R Z of the group At least one; in addition, p represents an integer of 1 to 3, R X represents a hydrolyzable group, R Y represents a monovalent organic group other than a hydrolyzable group, and p pieces of R X and 3-p pieces of R Y can be respectively The same or different, and R Z represents a hydrogen atom, an alkyl group or an alkoxy group, q represents an integer of 1 to 4, R A represents an alkylene group having 1 to 15 carbon atoms, and R a represents a monovalent organic group ; R 3 represents a divalent unsubstituted aliphatic hydrocarbon group, -C(=O)-, -C(=O)-O-, -OC(=O)-O-, -C(=O)-NH- , -CH=N-, -N(R)-, or a group obtained by combining these with a group selected from the linking group group shown below, R represents an alkyl group; the linking group group : Divalent unsubstituted aliphatic hydrocarbon group, -O-, -S-, -N(R 4 )-, -C(=O)-, -C(=O)-O-, -OC(=O) -O-, -C(=O)-NH-, -OC(=O)-NH-, -S(=O)-, -S(=O)-O-, -S(=O) 2 - , -S(=O) 2 -O-, -CH=N- and groups obtained by combining these; R 4 in the aforementioned linking group group represents a monovalent organic group; In addition, R 2 and R 3 They may be the same or different from each other, and the n R 1 s , m R 2 s, n R 2 s, n R 3 s, m M 1 s , and n M 1 s may be the same or different, respectively.
一種多官能硫醇化合物,其為以式(2)表示之化合物,
Figure 106118513-A0305-02-0184-6
式中,R2表示碳數1以上的2價的連結基,m表示2~14的整數,n表示1~15的整數,M1分別獨立地表示單鍵、-O-、-S-、-N(R4)-、-C(=O)-、-C(=O)-O-、-O-C(=O)-O-、-C(=O)-NH-、-O-C(=O)-NH-、-S(=O)-、-S(=O)-O-、-S(=O)2-、-S(=O)2-O-或-CH=N-,R4表示1價的有機基,L3表示m+n價的連結基,R1表示選自包括羥基、NRaRa-、吡啶基、吡啶鎓基、銨基、鏻基、羧酸基或其鹽、磷酸基或其鹽、磺酸基或其鹽、未取代芳基、-Si(RX)p(RY)3-p及-(ORA)q-RZ之群組之至少1種;另外,p表示1~3的整數,RX表示水解性基團,RY表示除水解性基團之1價的有機基,p個RX及3-p個RY可分別相同,亦可不同,並且,RZ表示氫原子、烷基或烷氧基,q表示1~4的整數,RA表示碳數1~15的伸烷基,Ra表示1價的有機基;R3表示2價的未取代脂肪族烴基、-C(=O)-、-C(=O)-O-、-O-C(=O)-O-、-C(=O)-NH-、-CH=N-、-N(R)-、或將該些與選自下述所示之連結基群組之基團進行組合而得之基團,R表示烷基;連結基群組:2價的未取代脂肪族烴基、-O-、-S-、-N(R4)-、-C(=O)-、-C(=O)-O-、-O-C(=O)-O-、-C(=O)-NH-、-O-C(=O)-NH-、-S (=O)-、-S(=O)-O-、-S(=O)2-、-S(=O)2-O-、-CH=N-及組合該些而得之基團;前述連結基群組中的R4表示1價的有機基;另外,R2及R3可彼此相同,亦可不同,n個R1、m個R2、n個R2、n個R3、m個M1及n個M1可分別相同,亦可不同。
A polyfunctional thiol compound, which is a compound represented by formula (2),
Figure 106118513-A0305-02-0184-6
In the formula, R 2 represents a divalent linking group having 1 or more carbon atoms, m represents an integer of 2 to 14, n represents an integer of 1 to 15, and M 1 independently represents a single bond, -O-, -S-, -N(R 4 )-, -C(=O)-, -C(=O)-O-, -OC(=O)-O-, -C(=O)-NH-, -OC(= O)-NH-, -S(=O)-, -S(=O)-O-, -S(=O) 2 -, -S(=O) 2 -O- or -CH=N-, R 4 represents a monovalent organic group, L 3 represents an m+n-valent linking group, and R 1 represents a group selected from the group consisting of hydroxyl group, NR a R a -, pyridyl group, pyridinium group, ammonium group, phosphonium group, and carboxylic acid group or its salt, phosphoric acid group or its salt, sulfonic acid group or its salt, unsubstituted aryl group, -Si(R X ) p (R Y ) 3-p and -(OR A ) q -R Z of the group At least one; in addition, p represents an integer of 1 to 3, R X represents a hydrolyzable group, R Y represents a monovalent organic group other than a hydrolyzable group, and p pieces of R X and 3-p pieces of R Y can be respectively The same or different, and R Z represents a hydrogen atom, an alkyl group or an alkoxy group, q represents an integer of 1 to 4, R A represents an alkylene group having 1 to 15 carbon atoms, and R a represents a monovalent organic group ; R 3 represents a divalent unsubstituted aliphatic hydrocarbon group, -C(=O)-, -C(=O)-O-, -OC(=O)-O-, -C(=O)-NH- , -CH=N-, -N(R)-, or a group obtained by combining these with a group selected from the linking group group shown below, R represents an alkyl group; the linking group group : Divalent unsubstituted aliphatic hydrocarbon group, -O-, -S-, -N(R 4 )-, -C(=O)-, -C(=O)-O-, -OC(=O) -O-, -C(=O)-NH-, -OC(=O)-NH-, -S (=O)-, -S(=O)-O-, -S(=O) 2 - , -S(=O) 2 -O-, -CH=N- and groups obtained by combining these; R 4 in the aforementioned linking group group represents a monovalent organic group; in addition, R 2 and R 3 They may be the same or different from each other, and the n R 1 s , m R 2 s, n R 2 s, n R 3 s, m M 1 s , and n M 1 s may be the same or different, respectively.
如申請專利範圍第27項所述之多官能硫醇化合物,其中前述m為3~14的整數。 The polyfunctional thiol compound according to claim 27, wherein m is an integer from 3 to 14. 如申請專利範圍第24項至第28項中任一項所述之多官能硫醇化合物,其中前述R1表示選自包括NRaRa-、吡啶基、吡啶鎓基、銨基、鏻基、磷酸基或其鹽、磺酸基或其鹽、未取代芳基、-Si(RX)p(RY)3-p及-(ORA)q-RZ之群組之至少1種,另外,p表示1~3的整數,RX表示水解性基團,RY表示除水解性基團之1價的有機基,p個RX及3-p個RY可分別相同,亦可不同,並且,RZ表示氫原子、烷基或烷氧基,q表示1~4的整數,RA表示碳數1~15的伸烷基,Ra表示1價的有機基。 The polyfunctional thiol compound according to any one of items 24 to 28 of the claimed scope, wherein the aforementioned R 1 represents a group selected from the group consisting of NR a R a -, pyridyl, pyridinium, ammonium, phosphonium , phosphoric acid group or its salt, sulfonic acid group or its salt, unsubstituted aryl group, -Si(R X ) p (R Y ) 3-p and -(OR A ) q -R Z at least one kind of the group , in addition, p represents an integer of 1 to 3, R X represents a hydrolyzable group, R Y represents a monovalent organic group other than the hydrolyzable group, p R X and 3-p R Y may be the same, respectively, In addition, R Z represents a hydrogen atom, an alkyl group or an alkoxy group, q represents an integer of 1 to 4, R A represents an alkylene group having 1 to 15 carbon atoms, and R a represents a monovalent organic group. 如申請專利範圍第24項至第28項中任一項所述之多官能硫醇化合物,其中前述R1係選自包括羥基、NRaRa-、吡啶基、吡啶鎓基、銨基、鏻基、羧酸基或其鹽、磷酸基或其鹽及磺酸基或其鹽之群組之至少1種,另外,Ra表示1價的有機基。 The polyfunctional thiol compound as described in any one of items 24 to 28 of the claimed scope, wherein the aforementioned R 1 is selected from the group consisting of hydroxyl, NR a R a -, pyridyl, pyridinium, ammonium, At least one of a phosphonium group, a carboxylic acid group or a salt thereof, a phosphoric acid group or a salt thereof, and a sulfonic acid group or a salt thereof, and R a represents a monovalent organic group.
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