TWI772577B - take-up unit - Google Patents

Abstract

In the tape sticking device, the protective film that has been wound up can be discarded while continuously forming the workpiece group.

A take-up unit comprising: a take-up part with a holding part for holding a belt-shaped protective film and arranged to face each other; a rotation mechanism for rotating the take-up part; When the winding part on the other side approaches or separates, when the film is wound, the film is held by the clamping part, and the winding part is rotated by the rotating mechanism to wind the film, and the wound film is discarded , each clamping part releases the film, and the reeling part is separated by the advancing and retreating components so that the distance between them becomes larger than the width of the film, so that the film can be pulled out and discarded.

Description

take-up unit

Field of Invention

The present invention relates to a take-up unit for taking up the protective film from which the adhesive tape has been peeled off.

Background of the Invention

A tape attaching device for forming a workpiece set in which a ring frame and a wafer are integrated through an adhesive tape (for example, refer to Patent Document 1), arranges the wafer in the opening of the ring frame, and attaches the adhesive tape to the ring frame and the wafer. wafer.

prior art literature Patent Literature

Patent Document 1: Japanese Patent Laid-Open No. 2015-220365

Summary of Invention

The adhesive tape used in the tape sticking device described in Patent Document 1 is constituted by providing an adhesive layer on a circular base material of a size that can close the opening of the annular frame. In addition, the adhesive tape is arranged in a state where the adhesive layer is attached to the tape-shaped protective film at equal intervals in the extending direction of the protective film, and the protective film to which the adhesive tape is attached is rolled. It circulates in a state of being rolled and formed into a tape roll.

In the tape attaching device, the adhesive tape is peeled from the protective film and attached to the ring frame and the wafer. In addition, the protective film from which the adhesive tape has been peeled off is wound up by the take-up lever with which the tape sticking device is equipped. After the take-up rod winds up the protective film by a certain amount, the attachment of the adhesive tape to the wafer and the ring frame will be temporarily stopped, and the take-up rod will be removed from the attachment device by the operator. In addition, after the protective film is pulled out from the winding rod, the operator can install the winding rod on the tape sticking device again, so that the device can be operated again. Then, the protective film pulled out from the take-up rod is discarded.

As described above, when the wound protective film is discarded, there is a problem that after the tape sticking device is temporarily stopped, the operation of removing the winding rod by an operator is required, which requires labor and time.

Therefore, in the tape sticking device, in order to efficiently and continuously perform the formation of the workpiece group, there is a problem in that it is not necessary to remove the wound rolls from the tape sticking device by an operator. The winding rod of the protective film, and the operation of pulling out the protective film from the winding rod and installing it again, can periodically discard the wound protective film.

The present invention for solving the above-mentioned problems is a winding unit for winding up a protective film from which an adhesive tape has been peeled off in a tape sticking device, wherein the tape sticking device includes a table, and The adhesive tape is peeled from the protective film and attached to the ring frame and the wafer to be integrated to form a workpiece unit, and the aforementioned workbench support has an opening The annular frame and supports the wafer positioned at the opening, the adhesive tape is a circular adhesive tape attached to the strip-shaped protective film and is a size that blocks the opening of the annular frame, and the take-up unit is provided with: 2 winding parts respectively provided with clamping parts for clamping the side end parts of the strip-shaped protective film and arranged to face each other; 2 rotating mechanisms respectively rotating the winding parts; One of the winding parts of the two winding parts is approached or separated in the axial direction with respect to the other winding part. Holding the protective film, and rotating the winding part with the rotating mechanism, so that the winding part winds the protective film, and when discarding the protective film wound on the two winding parts, each of the protective films is discarded. The protective film held by the clamping part is released, and the distance between the two opposite winding parts is made larger than the width of the protective film by the advancing and retreating assembly, and the protective film is removed from the protective film. The take-up part is pulled out and discarded.

Preferably, the winding portion includes an inlet, and the inlet is an inlet through which the protective film is passed when the protective film is sandwiched by the holding portion, and is formed on an outer surface of the protective film around which it is wound. There is a tapered surface, and the tapered surface is formed by reducing the diameter of the front end of the winding portion facing the vicinity of the inlet port.

Preferably, the advancing and retracting assembly includes: a motor for advancing and retracting, which is a driving source for moving the winding portion in the axial direction; The holding judging part, after the two holding parts have held the protective film, the two winding parts are moved toward each other by the advancing and retreating assembly. If the load current value detected by the forward/backward load detection part is greater than or equal to the value set in advance when moving in the direction away from When the current value becomes smaller than the set value, it is determined that the protective film is not held by the holding portion.

Preferably, the rotating mechanism includes: a rotating motor that serves as a rotating drive source; a rotating load detection unit that detects a load current value of the rotating motor, and further includes a disconnection determination unit, and the disconnection determination unit is used for When the protective film wound by the two winding parts is discarded, after the two winding parts are moved in a direction away from each other by the advancing and retracting unit, the rotation load is rotated by the rotating mechanism. When the load current value detected by the detection part is smaller than the preset value, it is determined that the protective film has been pulled out from the take-up part, and the detected load current value is greater than the preset value In the case of , it is judged that the protective film has not been pulled out from the winding portion.

Because the winding unit of the present invention is provided with: 2 winding parts, respectively provided with clamping parts for clamping the side end portions of the tape-shaped protective film, and arranged to face each other; 2 rotating mechanisms, respectively rotating the winding parts ; And the forward and backward assembly, so that the winding part on one side of the 2 winding parts is approached or separated in the axial direction relative to the winding part on the other side, so when the protective film is wound in the 2 winding parts, each The protective film is clamped by the clamping part, and the winding part is rotated by the rotating mechanism, and the protective film is wound on the winding part. Hold part The held protective film is released, and the two opposite winding parts are separated by the advancing and retreating assembly so that the distance between them becomes larger than the width of the protective film, and the protective film is pulled out from the winding part and discarded. Therefore, it is not necessary to carry out the work of removing the take-up rod on which the protective film has been wound from the tape sticking device by the operator as in the past, and removing the protective film from the take-up rod and re-installing the work, and it is possible to periodically remove the protective film. The rolled protective film is discarded.

The take-up portion is provided with an inlet port through which the protective film is passed when sandwiching the protective film by the holding portion, and a tapered surface is formed on the outer surface of the winding protective film. It is formed by reducing the diameter of the front ends of the winding sections facing each other near the inlet, so that the two winding sections can wind the protective film that has passed through the inlet to overlap the tapered surface, thereby becoming When the protective film is discarded, the protective film can be pulled out from the take-up part more easily.

The advancing and retreating assembly includes: an advancing and retreating motor, which is a drive source for moving the winding portion in the axial direction; After the protective film has been clamped by the two gripping parts, when the two winding parts are moved in a direction away from each other by the advancing and retracting unit, the load current value detected by the advancing and retracting load detection part is greater than or equal to the preset value. In the following case, it is determined that the protective film is sandwiched by the clamping part, and when the detected load current value becomes smaller than the set value, it is determined that the protective film is not clamped by the clamping part, and thereby, it becomes It is possible to prevent a situation in which the rotation mechanism rotates the winding section in a state in which the protective film is not clamped by the clamping section, thereby causing a winding error.

The rotating mechanism is provided with: a rotating motor serving as a rotating drive source; and a rotating load detecting portion, which detects the load current value of the rotating motor, and further includes a disconnection determination portion, which is used for connecting the two winding portions. When the wound protective film is discarded, the two winding parts are moved in a direction away from each other by the advance and retract unit, and when the winding part is rotated by the rotating mechanism, the load current value detected by the rotation load detection part is higher than that in advance. When the set value is smaller, it is judged that the protective film has been pulled out from the winding section, and when the detected load current value is greater than or equal to the value set in advance, it is judged that the protective film has not been removed from the winding section. This makes it possible to prevent, for example, a situation in which the winding unit starts winding a new protective film in a state in which the protective film wound in a roll shape has not been pulled out from each winding section. A situation occurs that causes a device error to occur.

1: Tape attachment device

2: Tape roll

5: Coiling unit

10: Shell

12: Support roller

14: Peel off the board

16: Press Roller

20: Adhesive tape

21: Protective film

22: Reel

30: Workbench

30a: 1st support surface

30b: 2nd support surface

50A, 50B: Coiler

51A, 51B: Rotary mechanism

52A, 52B: Advance and retreat components

59: Support abutment

120: Support member

500: Clamping part

500a, 500b: splint

500c: Cylinder mechanism

501: Rotation axis

502: Shell

502a: Conical face

502b: Entry

503: Support table

503a: Fixing bolts

510: Motor for rotation

510b: Motor shaft

511: Active pulley

512: Endless conveyor belt

513: driven pulley

518: Rotating load detection section

519: Unplug the Judgment

520: Ball Screw

521: Guide rail

522: Motor for advance and retreat

523: Movable components

523a: block

523b: Support plate

527: Forward and backward load detection section

528: Clamping judgment part

F: Ring Frame

W: Wafer

WU: Workpiece Unit

+X, -X, Y, +Y, -Y, +Z, -Z: Direction

FIG. 1 is a schematic view showing an example of a tape sticking apparatus including a take-up unit.

FIG. 2 is a perspective view showing an example of a winding unit.

FIG. 3 is a perspective view showing a state in which the protective film wound by the winding unit is discarded.

Form for carrying out the invention

The tape sticking apparatus 1 shown in FIG. 1 is an apparatus that can form a workpiece unit WU, and includes, for example, a box-shaped housing 10, wherein the workpiece unit WU is formed by an adhesive tape 20, a ring frame F, and a wafer W. constitute. In addition, inside the casing 10, a table 30 is arranged to support a ring having an opening. The frame F also supports the wafer W positioned at the opening; the support roller 12 supports the tape roll 2 composed of the adhesive tape 20, the protective film 21 and the roll 22; the peeling plate 14 peels the adhesive tape 20 from the protective film 21 The pressing roller 16 presses the adhesive tape 20 on the annular frame F and the wafer W; In addition, the tape sticking device provided with the winding unit 5 of the present invention is not limited to the tape sticking device 1 shown in the present embodiment.

The circular adhesive tape 20 is composed of a substrate layer and an adhesive layer, wherein the substrate layer is composed of resin, and the adhesive layer is disposed on one side of the substrate layer. The adhesive tape 20 is disposed on the tape-shaped protective film 21 in a state where the adhesive layer is adhered at equal intervals in the extending direction of the protective film 21, and the protective film 21 protects the adhesive tape 20 before sticking. adhesive surface. The protective film 21 made of resin such as polyester polymer is wound around the cylindrical reel 22 so that the protective film 21 side is positioned inside, thereby forming the roll-shaped tape roll 2 . The protective film 21 is peeled off before the adhesive tape 20 is attached to the wafer W and the ring frame F. As shown in FIG.

The wafer W is, for example, a semiconductor wafer whose outer shape is circular. The ring-shaped ring frame F made of SUS or the like has an opening whose diameter is larger than the diameter of the wafer W. As shown in FIG. The diameter of the adhesive tape 20 is larger than the opening diameter of the ring frame F to block the opening of the ring frame F, and is formed smaller than the width of the protective film 21 in the Y-axis direction.

A support roller 12 is inserted through the reel 22 of the tape roll 2, and the support roller 12 is attached to the ceiling of the casing 10 through, for example, a support member 120, and the tape roll 2 is received by the support roller 12 in a hollow and rotatable state. branch support. A rotary drive mechanism (not shown) such as a motor is connected to one end side of the support roller 12 , and the support roller 12 can be rotated around the axis in the Y-axis direction by the rotational force of the rotary drive mechanism. The support roller 12 is formed to be longer than the tape roll 2 in the Y-axis direction, and supports the entirety of the tape roll 2 .

Obliquely below the backup roll 12, a peeling plate 14 that peels off the protective film 21 from the adhesive tape 20 is provided so as to extend in the Y-axis direction. The peeling plate 14 is inclined with respect to the X-axis Y-axis plane so that the one end side farther from the support roller 12 is positioned downward, and becomes thinner toward the one end side. The width in the Y-axis direction of the release plate 14 is larger than the diameter of the adhesive tape 20 .

The protective film 21 is formed so as to be folded back on one end side of the release plate 14 to be peeled off from the adhesive tape 20 . A pressing roller 16 is arranged at a position close to one end of the peeling plate 14 , and the pressing roller 16 presses down the adhesive tape 20 with the protective film 21 peeled off and the adhesive layer exposed below. In addition, a table 30 supporting the wafer W and the ring frame F is provided at a position lower than the peeling plate 14 and the pressing roller 16 .

For example, a pair of slack prevention rollers, not shown, extending in the Y-axis direction is disposed at a position farther than the diameter of the ring frame F from the peeling plate 14 in the −X direction at least, and the adhesive tape 20 has been peeled off. The protective film 21 is sandwiched from above and below by a pair of slack preventing rollers so as not to be slack above the wafer W and the ring frame F, and can be continuously wound by the winding unit 5 .

A first support surface 30 a for supporting the wafer W is formed in the center of the upper surface of the circular table 30 . In addition, a second support surface 30b is provided around the first support surface 30a, and the second support surface 30b is provided for the wafer W to which the wafer W has been positioned. The ring frame F in the state of being located in the opening is supported. For example, the first support surface 30a is formed at a position slightly higher than the second support surface 30b, and is configured to position the upper surfaces of the wafer W and the ring frame F at substantially the same height. A moving mechanism (not shown) is provided below the table 30, and the table 30 is configured to be movable in the X-axis direction orthogonal to the Y-axis direction on the horizontal plane by the moving mechanism.

For example, the winding unit 5 of the present invention is disposed at a position that is distant from the table 30 toward the −X direction side by a predetermined distance below the backup roll 12 .

As shown in FIG. 2 , the winding unit 5 includes two winding sections 50A and 50B, each of which includes a holding section 500 for holding a side end portion of the tape-shaped protective film 21 in the Y-axis direction, and is arranged on the Opposite in the Y-axis direction; the two rotating mechanisms 51A, 51B rotate the winding parts 50A, 50B, respectively; the forward and backward assembly 52A makes the winding part 50A on one side of the two rotating mechanisms 51A, 51B wind up relative to the other side The part 50B approaches or separates in the axial direction (Y-axis direction); and the advancing and retreating assembly 52B makes the other winding part 50B approach or separate in the axial direction (Y-axis direction) with respect to the one winding part 50A.

The advancing and retracting unit 52A is disposed on the front surface of, for example, a plate-shaped support base 59 extending in the Y-axis direction, and includes: a ball screw 520 having an axis in the Y-axis direction; a pair of guide rails 521; and The ball screw 520 is arranged in parallel; the forward/backward motor 522 is connected to one end of the ball screw 520 on the −Y direction side and serves as a drive source for moving the winding portion 50A in the axial direction; and a movable member 523 is arranged with Rotating mechanism 51A and winding part 50A. The movable member 523 includes a block 523a, which has a A nut screwed on the ball screw 520 and arranged to be slidable on a pair of guide rails 521; and a support plate 523b, protruding from the upper surface of the block 523a toward the +X direction side, and inside it A winding portion 50A is arranged on the side surface.

When the ball screw 520 is rotated by the forward/backward motor 522, the movable member 523 is guided by the pair of guide rails 521 to move in the Y-axis direction, and the winding portion supported by the movable member 523 is moved in the Y-axis direction. 50A moves in the Y-axis direction.

For example, the forward/backward load detection unit 527 for detecting the load current value of the forward/backward motor 522 is electrically connected to the forward/backward motor 522 .

Since the advancing/retracting unit 52B shown in FIG. 2 that moves the winding section 50B in the Y-axis direction is formed in the same configuration as the advancing/retracting unit 52A, description thereof is omitted.

The rotation mechanism 51A that rotates the winding unit 50A includes a rotation motor 510 serving as a rotation drive source, and the rotation motor 510 is provided on the support plate, for example, with a motor shaft 510b protruding from the outer surface side of the support plate 523b. 523b on the front end side. The winding part 50A is arrange|positioned in the position which becomes the lower part of the rotation motor 510 in the inner surface of the support plate 523b. The winding unit 50A includes a rotating shaft 501 whose axial direction is the Y-axis direction, and the rear end side (+Y-direction side) of the rotating shaft 501 is rotatably supported by the support plate 523b and extends from the outer surface of the support plate 523b. protrude.

A driving pulley 511 is mounted on the motor shaft 510 b of the rotation motor 510 , and an endless belt 512 is wound around the driving pulley 511 . A driven pulley 513 is attached to the rear end side of the rotating shaft 501 of the winding section 50A, and the endless belt 512 is also wound around the driven pulley 513 superior. The rotation motor 510 drives the driving pulley 511 to rotate, thereby rotating the endless belt 512 according to the rotation of the driving pulley 511 , and rotating the driven pulley 513 and the rotating shaft 501 by the rotation of the endless belt 512 .

For example, a rotation load detection unit 518 that detects the load current value of the rotation motor 510 is electrically connected to the rotation motor 510 .

Since the rotation mechanism 51B shown in FIG. 2 which rotates the winding part 50B is formed in the same structure as the rotation mechanism 51A, the description is abbreviate|omitted.

As shown in FIG. 2 , the winding portion 50A includes, for example, a gripping portion 500 , the aforementioned rotating shaft 501 , a housing 502 that accommodates the gripping portion 500 inside, and is fixed to the distal end side of the rotating shaft 501 and supported inside the housing 502 . The support table 503 of the clamping part 500 .

The case 502 has, for example, a substantially cylindrical outer shape, and the protective film 21 is wound around the outer surface thereof. The outer diameter of the casing 502 is reduced in diameter from the middle portion in the longitudinal direction (Y-axis direction) toward the front end side (-Y direction side), and a part of the outer surface of the casing 502 is formed to be inclined toward the front end side of the casing 502 Tapered surface 502a.

An entrance port 502b through which the protective film 21 is passed when the protective film 21 is clamped by the clamp portion 500 is formed on the front end side of the case 502 . For example, the inlet port 502b is formed by being cut out in a slit shape from the front end of the casing 502 to the vicinity of the middle portion in the longitudinal direction.

The support stand 503 has, for example, an L-shaped outer shape in a side view, and is fixed to the housing 502 by fixing bolts 503a. In addition, the support table 503 and the housing can be moved along with the rotation of the rotating shaft 501. 502 and the clamping part 500 supported by the support stand 503 rotate integrally.

The clamping part 500 includes, for example, a clamping plate 500b fixed to the upper surface of the support table 503, a cylinder mechanism 500c arranged on the upper surface of the supporting table 503 so that the clamping plate 500a can move up and down, and a clamping plate 500b that clamps and enters the clamping plate 500b. The splint 500a of the protective film 21 between the splints 500b.

The winding portion 50B formed so as to face the winding portion 50A and disposed on the support plate 523b of the advancing and retracting unit 52B in the Y-axis direction has the same configuration as that of the winding portion 50A, so the description is omitted.

For example, a dust box (not shown) is provided below the winding unit 5, and this dust box can store the protective film 21 wound in a roll shape when the winding unit 5 drops the protective film 21 and discards it. Discarded protective film 21 .

Below, the operation|movement of the winding unit 5 when a workpiece|work unit is formed by the tape sticking apparatus 1 shown in FIG. 1 is demonstrated.

For example, the tape sticking device 1 includes a protective film pull-out mechanism (not shown), and the front end of the protective film 21 can be pulled out diagonally downward from the tape roll 2 by the protective film pull-out mechanism. Then, the protective film 21 is placed on the peeling plate 14 and folded in the −X direction, and then guided to the winding unit 5 .

As shown in FIG. 2 , after guiding the front end side of the protective film 21 to the winding unit 5, the winding section 50A can be moved toward the −Y direction side by the advancing and retracting member 52A so as to be close to the side end portion of the protective film 21, so that The side end portion of the protective film 21 enters into the inlet port 502b. In addition, the winding section 50B can be moved toward the +Y direction side by the advancing and retracting member 52B so as to be close to the side end portion of the protective film 21, so that the side end portion of the protective film 21 can enter the inlet port 502b. After that, the cylinder mechanism 500c lowers the clamping plate 500a and lowers the clamping plate 500a. The protective film 21 is sandwiched between the clamping plate 500a and the clamping plate 500b, whereby the respective clamping portions 500 of the winding portions 50A and 50B clamp the side end portions of the protective film 21 .

Next, for example, the advancing/retracting unit 52A moves the winding unit 50A toward the +Y direction side, and the advancing/retracting unit 52B moves the winding unit 50B toward the -Y direction side, thereby causing the two winding units 50A and 50B to move away from each other. direction move. This is an operation performed to prevent a situation where the protective film 21 may not be relative to the winding sections 50A, 50B when the protective film pull-out mechanism guides the leading end side of the protective film 21 to the winding unit 5 . The rotation of the winding sections 50A and 50B is started in such a state when the respective holding sections 500 of the winding sections 50A and 50B do not sandwich the side end portions of the protective film 21 by properly positioning them.

When the two winding parts 50A and 50B are moved away from each other, the forward/backward load detection unit 527 can detect the current value flowing in each of the forward/backward motors 522 of the forward/backward unit 52A and the forward/backward unit 52B.

As shown in FIG. 2 , the forward and backward load detection portion 527 is connected with a clamping determination portion 528 , and the clamping determination portion 528 can determine whether or not the protective film 21 is clamped by the clamping portion 500 . A predetermined set value (current value) for the load current value of the forward/backward motor 522 is stored in advance in the grip determination unit 528 . The aforementioned predetermined set value is, for example, a value selected experimentally or empirically in accordance with the material of the protective film 21 and the like, and is used for the clamping determination unit 528 to determine whether or not the protective film 21 is clamped by each clamping part 500 . The current value stored in the side end portion.

The information on the load current value of the forward and backward motor 522 detected by the forward/backward load detection unit 527 is sent to the gripping judgment unit 528, and the The determination unit 528 compares the value of the load current value of the forward/backward motor 522 with the above-mentioned predetermined set value. Since the protective film 21 is made of resin such as ester, it has a certain degree of tensile strength against mechanical external force. Therefore, when the forward and backward assemblies 52A, 52B move the respective winding portions 50A, 50B in a state where the respective gripping portions 500 hold the side end portions of the protective film 21 in a direction away from each other, the tensile strength of the protective film 21 is increased. The resulting load is applied to the advancing and retreating components 52A, 52B. On the other hand, when the advancing and retracting assemblies 52A, 52B move the respective winding portions 50A, 50B in a state in which the gripping portions 500 do not hold the side end portion of the protective film 21 in a direction away from each other, the advancing and retracting assemblies 52A, 52B move in a direction away from each other. 52B does not apply the load due to the tensile strength of the protective film 21 .

The advancing and retracting assemblies 52A and 52B are in either a state in which the side end portions of the protective film 21 are not clamped by each of the clamping portions 500 or a state in which the side end portions of the protective film 21 are clamped by the clamping portions 500 . Feedback control is performed so that the winding parts 50A and 50B are moved at a predetermined speed. According to this, in the state in which the side end portions of the protective film 21 are clamped by the respective clamping portions 500 , the supply to the advancing and retracting motor 522 is compared with the state in which the side end portions of the protective film 21 are not clamped by the respective clamping portions 500 . Since the electric power of the forward and backward motor 522 can be rotated at a certain number of rotations, the load current value of the forward and backward motor 522 detected by the forward and backward load detection unit 527 becomes a predetermined set value or more. As a result, the clamping determination part 528 can determine that the protective film 21 is clamped by the clamping parts 500 of the winding parts 50A and 50B, and can start the protection film 21 by the winding parts 50A and 50B according to the program. take-up action.

On the other hand, in the state in which the side end portion of the protective film 21 is not clamped by each clamping portion 500 , the electric power supplied to the advancing and retracting motor 522 does not increase, so the detection by the advancing and retracting load detection portion 527 is made. The load current value of the forward/backward motor 522 does not exceed a predetermined set value. As a result, the nip determination part 528 determines that the protective film 21 is not pinched by each of the nip parts 500 of the winding parts 50A and 50B. In this case, for example, the clamping error judgment is issued from the clamping judgment unit 528, and in accordance with a program, the front end side of the protective film 21 is re-elected relative to the roll by the protective film pull-out mechanism (not shown). The positioning of the take-up parts 50A and 50B is performed again, and the holding of the protective film 21 by the holding parts 500 of the winding parts 50A and 50B is performed again.

The advancing and retreating units 52A and 52B are provided with: an advancing and retreating motor 522 serving as a drive source for moving the winding parts 50A and 50B in the axial direction; The clamping determination part 528, when the clamping determination part 528 moves the two winding parts 50A, 50B in the direction away from each other by the advancing and retreating assemblies 52A, 52B after the two clamping parts 500 have clamped the protective film 21, When the load current value detected by the forward/backward load detection unit 527 is greater than or equal to a preset value, it is determined that the clamping unit 500 is sandwiching the protective film 21, and the detected load current value becomes smaller than the set value. In the case of , it is determined that the protective film 21 is not held by the holding portion 500 , whereby it is possible to prevent the situation where the rotating mechanisms 51A and 51B are in a state where the holding portion 500 has not held the protective film 21 yet. When the winding parts 50A and 50B are rotated, a winding error occurs.

The winding operation of the protective film 21 by the winding sections 50A and 50B after it has been determined that the protective film 21 has been pinched by each of the pinching sections 500 is performed as described below. The protective film 21 is gripped by the gripping portions 500 in a state where no slack in the Y-axis direction occurs, and the rotation motors 510 of the rotation mechanisms 51A and 51B are driven to cause the winding portions 50A, 50A, 51B to rotate. After the 50B is rotated in the same direction at the same speed, as shown in FIG. 3 , each side end portion of the protective film 21 held by the holding portions 500 can be wound around the tapered surface 502a of the casing 502 to form a protective film. 21 rolls of film.

By rotating the support roller 12 shown in FIG. 1 in conjunction with the start of the winding operation of the protective film 21 by the winding unit 5, the adhesive tape 20 fed from the tape roll 2 can be peeled off on one side. The protective film 21 is peeled off from the end side by the plate 14 , and is pressed down by the pressing roller 16 abutting on the base layer side, and attached to the end of the ring frame F positioned on the table 30 . Furthermore, the center of the ring frame F supported by the stage 30 is substantially the same as the center of the wafer W. After that, when the table 30 is moved in the −X direction while the support roller 12 is rotated and the protective film 21 is taken up by the take-up unit 5, the wafer W, the ring frame F, and the pressing roller 16 That is, it moves relatively in the X-axis direction. As a result, the adhesive tape 20 can be attached to the wafer W and the ring frame F by the downward pressing force generated by the pressing roller 16, so that the adhesive tape 20, the ring frame F, and the wafer W can be formed. The workpiece unit WU.

For example, by feeding out the entire protective film 21 from the tape roll 2 shown in FIG. 1 , the protective film 21 of a predetermined length is wound on the After the winding parts 50A, 50B of the winding unit 5, the roll-shaped protective film 21 wound around the two winding parts 50A, 50B can be discarded. First, each cylinder mechanism 500c shown in FIG. 3 lifts the clamping plate 500a to release the side end portion of the protective film 21 held by the holding portions 500 of the winding portions 50A and 50B. Then, the advance/retract unit 52A moves the winding unit 50A to a predetermined position on the +Y direction side, and the forward/backward unit 52B moves the winding unit 50B to a predetermined position on the -Y direction side so that the winding units 50A, 50B The distance between them becomes larger than the width of the protective film 21 . As a result, the protective film 21 can be pulled out from the winding parts 50A and 50B, and the protective film 21 can be dropped and discarded in a dust box (not shown) arranged below the winding unit 5 .

Furthermore, it is also possible to provide, for example, between the table 30 shown in FIG. 1 and the take-up unit 5, a configuration including a cutting unit for cutting the protective film 21 from which the adhesive tape has been peeled off may be provided. , and is configured to cut the protective film 21 in the width direction by the cutting unit when the protective film 21 is discarded.

In this way, the winding unit 5 of the present invention is provided with: two winding parts 50A, 50B, each of which is provided with the holding part 500 for holding the side end portion of the tape-shaped protective film 21 and arranged to face each other; Mechanisms 51A and 51B respectively rotate the winding parts 50A and 50B; advance and retreat assemblies 52A and 52B make the winding part on one side of the two winding parts 50A and 50B approach or approach the winding part on the other side in the axial direction. Therefore, when the protective film 21 is wound by the two winding parts 50A and 50B, the protective film 21 is held by each of the holding parts 500 and rotated by the rotation mechanisms 51A and 51B. Winding parts 50A, 50B, winding parts 50A, 50B wind up the protective film 21, and when discarding the protective film 21 wound on the two winding parts 50A, 50B, each nip part 500 The clamped protective film 21 is released, and the two opposite winding parts 50A, 50B are separated by the advancing and retreating components 52A, 52B so that the distance between them becomes larger than the width of the protective film 21, and the protective film 21 can be separated. It is pulled out from the winding parts 50A, 50B and discarded. Therefore, it is not necessary to carry out the work of removing the take-up rod from the tape sticking device 1 and re-installing it by an operator as in the past, and the protective film 21 that has been peeled off and rolled up from the adhesive tape 20 can be periodically removed. obsolete.

In addition, the winding parts 50A and 50B are provided with an inlet 502b through which the protective film 21 is held by the holding part 500, and a tapered surface 502a is formed on the outer surface of the winding protective film 21. The tapered The surface 502a is formed by reducing the diameter of the respective casings 502 of the winding sections 50A, 50B facing each other near the inlet 502b, so that the two winding sections 50A, 50B can take up the protective film 21 that has passed through the inlet 502b. By overlapping with the tapered surface 502a, when the protective film 21 is discarded, the protective film 21 can be more easily pulled out from the winding parts 50A and 50B. This is because when the protective film 21 is wound up, the surface on which the protective film 21 is wound becomes the tapered surface 502a, so that the contact of the protective film 21 with the winding parts 50A and 50B (the protective film 21 can be rolled into a protective film) The area of the inner peripheral surface of the film 21) is kept small, and the protective film 21 can be wound around the winding parts 50A and 50B, so when the protective film 21 is pulled out from the winding parts 50A and 50B, the protective film 21 can act on the winding parts 50A and 50B. The reason is that the frictional force at the point of contact between the pick-up parts 50A and 50B and the protective film 21 is small.

For example, as described above, by separating the winding sections 50A, 50B by the advancing and retreating elements 52A, 52B so that the width of the space between them becomes larger than the width of the protective film 21, the following situation may occur: the protective film 21 is only Either the winding portion 50A or the winding portion 50B is pulled out, and the protective film 21 is still wound around the winding portion on one side as it is. In such a state, even if the leading end side of the new protective film 21 is guided to the winding unit 5 by the protective film pull-out mechanism (not shown), there may be a case where the winding cannot be started by two In the case of winding the protective film 21 by the parts 50A and 50B, the winding unit 5 is damaged due to improper operation. In order to prevent such a situation from occurring, the winding unit 5 performs the following operations.

As described above, after the winding sections 50A and 50B are separated by the advancing and retracting units 52A and 52B, the rotation motors 510 of the rotation mechanisms 51A and 51B are driven to rotate the winding sections 50A and 50B in the same direction. At this time, the rotation load detection unit 518 is caused to detect the current value flowing in the rotation motors 510 of the rotation mechanisms 51A and 51B.

For example, as shown in FIG. 3 , the rotation load detection unit 518 is connected with a removal determination unit 519 that determines whether or not the protective film 21 has been removed from the winding units 50A and 50B. A predetermined set value (current value) regarding the load current value of the rotation motor 510 is stored in advance in the disconnection determination unit 519 . The predetermined set value is a value selected experimentally or empirically in accordance with, for example, the material of the protective film 21, the weight of the protective film 21 in a roll shape, and the like, and is used for the removal determination unit 519 to determine whether or not the The current value stored by the protective film 21 being pulled out from the winding parts 50A and 50B.

The information about the load current value of each rotary motor 510 detected by the rotary load detection section 518 is sent to the disconnection determination section 519, and the disconnection determination section 519 compares the value of the load current value of each rotary motor 510 with the above-mentioned value. set value for comparison. Since the weight of the protective film 21 that has been wound into a roll has increased, for example, when the protective film 21 is still wound on either the winding portion 50A or the winding portion 50B as it is, The weight of the protective film 21 is applied to the winding portion on one side of the state in which the protective film 21 is wound as it is.

In addition, the rotation mechanisms 51A and 51B are feedback-controlled so as to rotate the winding parts 50A and 50B at the same predetermined rotation speed. Therefore, more power is supplied to the winding portion on one side with the protective film 21 wound as it is by the rotation motor 510 than the winding portion on the side with the protective film 21 pulled out.

For example, it is assumed that the load current value of the rotation motor 510 of the rotation mechanism 51A detected by the rotation load detection unit 518 is equal to or greater than a predetermined set value, and the rotation load detection unit 518 detects that the rotation motor 510 of the rotation mechanism 51B has a The load current value has become smaller than the specified set value. In this case, the removal determination part 519 determines that the protective film 21 is still wound around the winding part 50A as it is, and the protective film 21 has been removed from the winding part 50B. Next, for example, the pull-out determination unit 519 issues an alarm for an incorrect pull-out judgment, and according to a program, the guide of the new protective film 21 to the take-up unit 5 by the protective film pull-out mechanism (not shown) is stopped.

For example, it is assumed that the load power of each rotation motor 510 of the rotation mechanism 51A and the rotation mechanism 51B detected by the rotation load detection unit 518 is The flow value becomes smaller than the predetermined set value. In this case, the removal determination part 519 determines that the protective film 21 has been removed from the winding parts 50A and 50B. Then, according to the program, for example, the positioning of the new protective film 21 with respect to the winding sections 50A and 50B by the protective film pulling mechanism (not shown) is performed again, and the winding sections 50A and 50B are performed again. The protective film 21 is clamped by each clamping portion 500 .

In this way, the rotating mechanisms 51A and 51B are provided with: a rotating motor 510 serving as a rotating drive source; a rotating load detecting unit 518 which detects the load current value of the rotating motor 510; The section 519 moves the two winding sections 50A, 50B away from each other by the advancing and retracting units 52A, 52B when discarding the protective film 21 wound by the two winding sections 50A, 50B, and then the rotating mechanism 51A , 51B, when the winding parts 50A and 50B are rotated, and the load current value detected by the rotation load detection part 518 is smaller than the value set in advance, it is determined that the protection has been removed from the winding parts 50A and 50B. The film 21 determines that the protective film 21 has not been pulled out from the 50A and 50B when the detected load current value is greater than or equal to the value set in advance. This makes it possible to prevent, for example, a situation where winding up is caused. The unit 5 starts to take up the new protective film 21 without pulling out the protective film 21 wound in the roll form from each of the winding parts 50A and 50B, and an apparatus error occurs.

In addition, the winding unit 5 of the present invention is not limited to the above-mentioned embodiment, and the respective configurations of the tape sticking device 1 and the winding unit 5 shown in the attached drawings are not limited to this, and can be make use of the invention Appropriate changes can be made within the scope of the effect.

5: Coiling unit

21: Protective film

50A, 50B: Coiler

51A, 51B: Rotary mechanism

52A, 52B: Advance and retreat components

59: Support abutment

500: Clamping part

500a, 500b: splint

500c: Cylinder mechanism

501: Rotation axis

502: Shell

502a: Conical face

502b: Entry

503: Support table

503a: Fixing bolts

510: Motor for rotation

510b: Motor shaft

511: Active pulley

512: Endless conveyor belt

513: driven pulley

518: Rotating load detection section

519: Unplug the Judgment

520: Ball Screw

521: Guide rail

522: Motor for advance and retreat

523: Movable components

523a: block

523b: Support plate

527: Forward and backward load detection section

528: Clamping judgment part

+X, -X, +Y, -Y, +Z, -Z: Direction

Claims (5)

A winding unit is a winding unit for winding a protective film from which an adhesive tape has been peeled off in a tape sticking device, wherein the tape sticking device is provided with a worktable, and the adhesive tape is peeled from the protective film and attached The annular frame and the wafer are integrated to form a workpiece unit, the worktable supports the annular frame with an opening and supports the wafer positioned at the opening, the adhesive tape is attached to the strip-shaped protective film and In order to close the circular adhesive tape of the size of the opening of the annular frame, the above-mentioned winding unit includes: two winding parts, each of which has a clamping part that clamps a side end portion of the strip-shaped protective film, and is arranged so as to be Opposite; 2 rotating mechanisms, respectively make the coiling part rotate; and forward and backward components, make the coiling part on one side of the two coiling parts approach or separate in the axial direction with respect to the coiling part on the other side, the 2 When the protective film is wound by each winding part, the protective film is clamped by each of the clamping parts, and the winding part is rotated by the rotating mechanism, so that the winding part winds the protective film , when discarding the protective film wound on the two winding parts, the protective film held by each of the clamping parts is released, and the two opposite winding parts are made by the advancing and retreating assembly. When the distance therebetween becomes larger than the width of the protective film, the protective film is pulled out from the winding section and discarded. The coiling unit of claim 1, wherein the coiling portion is provided with an inlet port, and the inlet port is before being clamped by the clamping portion. When the protective film is passed through, a tapered surface is formed on the outer surface of the protective film, and the tapered surface is formed by reducing the diameter of the front end of the winding portion facing each other in the vicinity of the inlet. to make. The reeling unit according to claim 1 or 2, wherein the advancing and retreating assembly includes: an advancing and retreating motor that serves as a drive source for moving the winding portion in the axial direction; and an advancing and retreating load detection portion that detects the advancing and retreating motor The load current value of the device is further provided with a clamping judging part, and the clamping judging part moves the two winding parts away from each other with the advancing and retreating assembly after the two clamping parts have clamped the protective film. When the load current value detected by the forward/backward load detection portion is greater than or equal to a preset value, it is determined that the protective film is sandwiched by the clamping portion, and the detected load current value becomes a ratio of When the set value is smaller, it is determined that the protective film is not held by the holding portion. The winding unit according to claim 1 or 2, wherein the rotating mechanism includes: a rotating motor serving as a rotating drive source; and a rotating load detection unit that detects a load current value of the rotating motor, and further includes a disconnection determination unit and the pull-out determination unit moves the two winding sections away from each other by the advancing and retracting unit when discarding the protective film wound by the two winding sections, and then uses the rotating mechanism to make the winding section move away from each other. When the take-up part rotates, if the load current value detected by the rotation load detection part is smaller than the preset value, it is judged that the protective film has been pulled out from the take-up part, and the detected load current value is If the value is greater than or equal to the value set in advance, it is determined that the protective film has not been pulled out from the winding part. Down. The winding unit according to claim 3, wherein the rotating mechanism includes: a rotating motor serving as a rotating drive source; When discarding the protective film wound by the two winding sections, the pull-out determination unit moves the two winding sections away from each other by the advancing and retracting unit, and then uses the rotating mechanism to move the winding section away from each other. During rotation, when the load current value detected by the rotation load detection part is smaller than the preset value, it is determined that the protective film has been pulled out from the winding part, and the detected load current value is When it is more than the value set in advance, it is judged that the said protective film has not been pulled out from the said winding part.

Images