TW202212205A - Sheet supply device and sheet supply method - Google Patents

Abstract

This sheet supply device makes it possible to prevent the timing at which an adhesive sheet is detached from a release sheet from deviating from the desired timing. The sheet supply device comprises: a feeding means 20 that repeatedly feeds and stops feeding of a web RS having an adhesive sheet AS temporarily attached at predetermined intervals to a band-shaped release sheet RL, and thereby performs intermittent feeding of the web RS; and a release means 30 that detaches the adhesive sheet AS of the web RS fed by the feeding means 20 from the release sheet RL. When feeding of the web RS is stopped, the feeding means 20 maintains a braking state in which movement of the web RS is inhibited.

Description

Sheet feeding device and sheet feeding method

The present invention relates to a sheet feeding device and a sheet feeding method.

A sheet feeding device for feeding adhesive sheets is known (for example, refer to Patent Document 1). [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2008-174247.

[The problem to be solved by the invention]

In the sheet sticking apparatus 1 (sheet feeding apparatus) described in Patent Document 1, there is a case where the drawing of the raw sheet R (raw sheet) and the stopping of the drawing of the raw sheet R are repeated. During the intermittent conveyance, when the tensioning roller 3 (pulling unit) is stopped and the drawing is stopped, the raw material sheet R in the drawing unit is pulled out unexpectedly, and the raw material sheet R is pulled back unexpectedly. Pull out the error. When such a pull-out error of the raw material sheet R occurs, the following problem occurs for removing the adhesive sheet S (adhesive sheet) from the peeling sheet RL (peeling sheet) by the peel plate 5 (peeling unit) The peeling timing (timming) is shifted from the desired timing, and it becomes impossible to attach the adhesive sheet S to a predetermined position of the wafer W (attached body).

An object of the present invention is to provide a sheet feeding device and a sheet feeding method which can prevent the timing for peeling the adhesive sheet from the release sheet from being shifted from the desired timing. [Units to solve the problem]

The present invention adopts the configuration described in the scope of the patent application. [Inventive effect]

According to the present invention, since the braking state for suppressing the movement of the green sheet is maintained while the drawing of the green sheet is stopped, it is possible to prevent the occurrence of a pull-out error of the green sheet. Therefore, the timing for peeling the adhesive sheet from the release sheet can be prevented from being shifted from the desired timing.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In this embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis orthogonal to the predetermined plane. In addition, in the present embodiment, when the direction is displayed without specifying a drawing on the basis of viewing from the straight forward direction in FIG. 1 parallel to the Y-axis, "up" is used as the arrow of the Z-axis. The direction, "down" is the opposite direction of the arrow direction of the Z-axis, "left" is the direction of the arrow of the X-axis, "right" is the opposite direction of the arrow direction of the X-axis, and "front" is the direction parallel to the Y-axis In the forward direction in FIG. 1 , the “rear” is the opposite direction of the forward direction in FIG. 1 that is parallel to the Y axis.

The sheet attaching device EA1 using the sheet feeding device EA of the present invention is provided with a raw sheet supporting unit 10 having a support shaft 11 and a guide roller 12, and supporting the raw sheet RS in a drawable manner. The RS is formed by temporarily bonding the adhesive sheet AS to the strip-shaped peeling sheet RL at predetermined intervals; the pulling unit 20 repeats the pulling of the raw sheet RS and the stopping of the pulling of the raw sheet RS to perform the raw sheet RS. The peeling unit 30 is provided with a peeling plate 31 for peeling off the adhesive sheet AS of the raw material sheet RS drawn out by the drawing unit 20 from the peeling sheet RL; the pressing unit 40 is provided with a pressing roller 41 , the pressing roller 41 is used for pressing and attaching the adhesive sheet AS peeled off by the peeling unit 30 to the adherend WK; and the recovery unit 50 is for recovering the peeling unit 30 peeling off the adhesive sheet AS peeling sheet RL; sheet The attaching device EA1 is arranged in the vicinity of the adherend conveying unit 60 for conveying the adherend WK. Moreover, the sheet supply apparatus EA of this invention is comprised from the draw-out unit 20, the peeling unit 30, and the collection|recovery unit 50.

The pull-out unit 20 is provided with: a rotary motor 21 as a driving machine, which has a brake unit (not shown); and a drive roller 22 supported by an output shaft (not shown) and connected to a pinch roller. 23 sandwich the raw sheet RS together. The pulling-out unit 20 is configured to maintain a braking state for suppressing the movement of the raw material sheet RS while the pulling-out of the raw material sheet RS is stopped. In the case of the present embodiment, a motor with a brake is used as the rotation motor 21, and the electromagnetic brake of the motor with a brake acts as a brake unit, whereby the movement of the raw material sheet RS is suppressed.

The recovery unit 50 is provided with: a rotation motor 51 as a driving device; a driving roller 52 supported by an output shaft (not shown) and sandwiching the peeling sheet RL together with a pressing roller 53; and a recovery roller 54 not shown It is supported by the output shaft of the driving machine of the 100000000000, and during the automatic operation of the sheet attaching device EA1 (sheet feeding device EA), a predetermined tension is normally applied to the peeling sheet RL existing between the recovery roller 54 and the pressing roller 53 . The collection|recovery unit 50 is set as the structure which normally applies a collection|recovery force to the peeling sheet RL which exists between the collection|recovery unit 50 and the extraction|drawing-out unit 20 while the pulling-out of the raw material sheet RS is stopped. Thereby, it can prevent that the peeling sheet RL is pulled back from the collection|recovery unit 50 side, and the slack of the peeling sheet RL between the pulling-out unit 20 and the collection|recovery unit 50 arises. Moreover, the collection|recovery unit 50 is controlled so that the tension|tensile_strength applied to the peeling sheet RL during the drawing|pulling of the raw material sheet RS and the tension|tensile_strength applied to the peeling sheet RL while the drawing of the raw material sheet RS is stopped becomes a different value. In the case of the present embodiment, the tension during stop is set to a value smaller than the tension during pulling out, and when no pulling force is applied to the raw material sheet RS, excessive tension is applied to the release sheet RL and the release sheet RL is prevented from being split. or damage.

The to-be-adhered body conveying unit 60 is provided with a support table 62 supported by a slider 61A of a linear motor 61 as a driving device, and has a pressure reducing pump or a vacuum A decompression unit (holding unit) such as an ejector and the like sucks and holds the support surface 62A.

The operation of the sheet sticking apparatus EA1 using the above sheet feeding apparatus EA will be described. First, as shown in FIG. 1(A), a user of the sheet attaching apparatus EA1 (hereinafter simply referred to as “user”) mounts the raw sheet RS on the solid line shown in FIG. 1(A) . After the sheet attaching device EA1 of each component is arranged at the initial position shown, a signal for starting the automatic operation is input through an operation unit such as an operation panel (not shown) or a personal computer (personal computer). In this way, the pull-out unit 20 and the recovery unit 50 drive the rotation motors 21 and 51 to pull out the raw material sheet RS, and when the leading end portion in the pull-out direction of the front-end adhesive sheet AS is peeled off by a predetermined length by the peeling edge 31A of the peeling plate 31, the pull-out The discharge unit 20 and the collection unit 50 stop the drive motors 21 and 51 to stop the pulling out of the raw sheet RS. In addition, the pull-out unit 20 drives the brake unit at the moment when the driving of the rotation motor 21 is stopped to stop the pull-out of the raw material sheet RS, so that unintended pull-out of the raw material sheet RS in the pull-out unit 20 does not occur and The way of pulling back maintains a braking state that inhibits the rotation of the drive roller 22 and thus the movement of the web RS.

Next, when a user, an unillustrated transfer unit such as an articulated robot or a conveyor belt places the adherend WK on the support table 62, the adherend transfer unit 60 drives the unillustrated decompression unit, and starts The adherend WK is adsorbed and held by the support surface 62A. After that, when the adherend transport unit 60 drives the linear motor 61 to move the support table 62 to the left and the adherend WK reaches a predetermined position, the pull-out unit 20 drives the brake unit to release the braking state, and the pull-out unit 20 and The recovery unit 50 drives the rotation motors 21 and 51, and pulls out the raw sheet RS in accordance with the moving speed of the adherend WK. Thereby, the adhesive sheet AS is peeled from the release sheet RL, and as shown by the two-dotted chain line in FIG. 1(A), the adhesive sheet AS peeled from the release sheet RL is pressed by the pressing roller 41 and attached to the Then body WK. Next, the entire front end adhesive sheet AS is attached to the adherend WK to form a unitary body UP. When the front end portion of the front end adhesive sheet AS in the pulling direction of the next adhesive sheet AS is followed by the peeling edge of the peeling plate 31 When 31A peels off a predetermined length, the pull-out unit 20 and the collection|recovery unit 50 stop driving the rotation motors 21 and 51, and the pull-out of the raw material sheet RS is stopped. Here, the pull-out unit 20 drives the brake unit at the moment when the driving of the rotation motor 21 is stopped to stop the pull-out of the raw material sheet RS, and the braking state is maintained in the same manner as described above. Next, when the integrated object UP reaches a predetermined position on the left of the pressing roller 41, the object conveying unit 60 stops the driving of the linear motor 61, and then stops the driving of the decompression unit (not shown), thereby releasing the suction and holding by the support surface 62A. Then body WK. Next, when a user or a transport unit (not shown) transports the integrated object UP to the next process, the attached object transport unit 60 drives the linear motor 61 to return the support table 62 to the initial position, and repeats the same operations as described above.

According to the above-described embodiment, since the braking state for suppressing the movement of the green sheet RS is maintained while the drawing of the green sheet RS is stopped, the pull-out error of the green sheet RS does not occur. Therefore, the timing for peeling the adhesive sheet AS from the release sheet RL can be prevented from being shifted from the desired timing.

The units and steps in the present invention are not limited at all as long as they can achieve the operations, functions, or steps described with respect to these units and steps, and the units and steps in the present invention are not limited to the simple implementation shown in the foregoing embodiments at all. Form constituents, processes. For example, the peeling unit may be any unit as long as it can peel off the adhesive sheet of the raw material sheet drawn out by the drawing unit from the peeling sheet, and as long as the technical common sense at the time of the present application is compared and within the scope of the technology, there is no Any limitations (the same applies to other units and steps).

The green sheet support unit 10 may be configured to support the tape-shaped adhesive sheet base material temporarily attached to the release sheet RL in a closed loop shape or an entire short width direction cutout so as to be able to be pulled out. The predetermined area divided by the slits serves as the raw material sheet RS of the adhesive sheet AS; the raw sheet support unit 10 may also be configured to use a tape-shaped adhesive sheet base material to be temporarily bonded to the raw material sheet RS of the release sheet RL, and then pull out the raw material sheet RS. In the middle of the green sheet RS, the cutting unit is used to form a closed loop or an entire slit in the short width direction in the adhesive sheet base material, and a predetermined area separated by the slit is used as the adhesive sheet AS; the green sheet supporting unit 10 may also be capable of The raw material sheet RS, which uses the inner side of the closed-loop cutout as the adhesive sheet AS and the outer side as an unnecessary sheet, is pulled out and supported. (fanfold) folds and can be pulled out to support. The sheet feeding apparatus EA or the sheet attaching apparatus EA1 of the present invention may or may not have the raw sheet supporting unit 10; in the case where the sheet feeding apparatus EA or the sheet attaching apparatus EA1 of the present invention does not have the raw sheet supporting unit 10, It is also possible to provide a configuration for supporting the raw material sheet RS so as to be able to be pulled out by another device.

The pull-out unit 20 can also use a servo motor as the rotation motor 21, and the servo device of the servo motor is locked as a brake unit to maintain the braking state; the pull-out unit 20 can also use a rotation without a brake unit. The motor 21 and a driving machine such as a chuck cylinder as a brake unit clamp the driving roller 22 and the raw material sheet RS by the driving machine such as the chuck cylinder and maintain the braking state; the pull-out unit 20 is as long as it can What kind of member may be used to maintain the braking state while the pulling out of the raw material sheet RS is stopped.

The pressing unit 40 can also be used as a driving machine for the pressing member of the pressing roller 41 to approach and leave the adhered body WK to approach and leave the unit, thereby preventing stress from acting on the adhered body WK or damaging the adhered body WK; pressing The unit 40 may also be constituted by a linear motion motor 42 as a driving machine and a holding member 43 supported by the output shaft 42A of the linear motion motor 42 and having a holding surface 43A as shown in FIG. 1(A) The holding surface 43A can be adsorbed and held by a decompression unit (holding unit) not shown such as a decompression pump or a vacuum evacuation device, and the pressing unit 40 is adsorbed and held by the holding surface 43A from the peeled unit 30 The peeled adhesive sheet AS is peeled off from the sheet RL, and the held adhesive sheet AS is pressed and attached to the adherend WK. The sheet feeding apparatus EA or the sheet attaching apparatus EA1 of the present invention may or may not have the pressing unit 40; in the case where the sheet feeding apparatus EA or the sheet attaching apparatus EA1 of the present invention does not have the pressing unit 40, a pressing unit 40 may be provided. It is constituted by pressing the adhesive sheet AS to the adhered body WK by another device.

The recovery unit 50 may be configured to give a recovery force to the peeling sheet RL existing between the recovery unit 50 and the extraction unit 20 at a predetermined timing while the drawing of the raw sheet RS is stopped; as the predetermined timing, for example, It may be performed for a predetermined time immediately after the drawing unit 20 stops the application of the drawing force, or it may be performed once or at a predetermined time interval after the drawing unit 20 and the recovery unit 50 stop the application of the drawing force and the recovery force. Do it multiple times. The recovery unit 50 can also be set so that the tension during drawing becomes the same value as the tension during stopping; the recovery unit 50 can also be set so that the tension during drawing becomes smaller than the tension during stopping; the recovery unit 50 can also be as shown in FIG. 1 . As shown in (B), a photographing unit and/or an optical sensor, an ultrasonic sensor, etc., are provided with a camera, a projector, etc. to detect the slack of the peeling sheet RL between the peeling edge 31A and the driving roller 52 The slack detection unit 55 of various sensors, etc. In this case, when the slack detection unit 55 detects the slack of the peeling sheet RL, the recovery unit 50 can drive the rotation motor 51 and remove the slack of the peeling sheet RL. In addition, the slack detection unit 55 can detect the slack of the peeling sheet RL at a position closer to the upstream side in the pulling direction of the raw material sheet than the peeling edge 31A. Contact sensor or pressure sensor to detect slack. The recovery unit 50 may also fan-fold the recovered peeling sheets RL, shred them by a shredder or the like, or stack them at will. The sheet feeding device EA or the sheet attaching device EA1 of the present invention may or may not have the recovery unit 50; in the case where the sheet feeding device EA or the sheet attaching device EA1 of the present invention does not have the recovery unit 50, a The release sheet RL is wound and collected by another device.

The adherend conveying unit 60 may employ a driving machine for moving the support table 62 in the front-rear direction to perform positioning of the adherend WK, or may employ a conveyor belt 63 as shown in FIG. 1(C). The sheet feeding apparatus EA or the sheet sticking apparatus EA1 of the present invention may or may not include the adherend conveying unit 60 .

The sheet feeding device EA may be configured to supply the adhesive sheet AS in an upside-down arrangement or a horizontal arrangement; for example, an adhesive sheet stacking device for stacking a plurality of adhesive sheets AS may be used, or for transferring the adhesive sheet AS to another The transfer device of the peeling sheet, etc. is used as a component of devices other than the sheet attaching devices EA1 and EA2; the sheet feeding device EA can also be used as a semi-automatic device for manually attaching the adhesive sheet AS to the adherend WK. The sheet attachment device is used alone.

In the present embodiment, although the sheet attaching device EA1 moves the adherend WK relative to the non-moving sheet feeding device EA and the pressing unit 40 and attaches the adhesive sheet AS to the adherend WK, it may not be The adherend WK may be moved, or the adhesive sheet AS may be attached to the adherend WK by moving the sheet feeding device EA and the pressing unit 40 while moving the adherend WK.

The material, type, shape, etc. of the adhesive sheet AS and the adherend WK in the present invention are not particularly limited. For example, the adhesive sheet AS and the adherend WK may be polygonal or other shapes such as a circle, ellipse, triangle, or quadrangle; sheet; in the case of using a heat-sensitive adhesive sheet AS, the bonding may be performed by an appropriate method, such as providing an appropriate coil heater or heat pipe for heating the adhesive sheet AS. pipe) heating side, etc. heating unit. In addition, such an adhesive sheet AS may be, for example, a single-layer adhesive sheet with only an adhesive layer, an adhesive sheet having an intermediate layer between the substrate and the adhesive layer, or an adhesive sheet on the upper surface of the substrate. An adhesive sheet with three or more layers such as a cover layer can also be a so-called double-sided adhesive sheet that can peel the substrate from the adhesive layer; the double-sided adhesive sheet can be a single layer or has a plurality of intermediate layers. The double-sided adhesive sheet can also be a single-layer or multiple-layer double-sided adhesive sheet without an intermediate layer. In addition, the adherend WK may be, for example, food, resin containers, semiconductor wafers such as silicon semiconductor wafers or compound semiconductor wafers, circuit boards, information recording substrates such as optical discs, glass plates, steel plates, pottery, and wooden boards. Alternatively, a single substance such as a resin may be a composite formed of two or more of the above-mentioned types, and a member, an article, or the like of any shape may be targeted. In addition, the adhesive sheet AS can be replaced with functional and useful readings, such as labels for information recording, labels for decoration, protective sheets, dicing tapes, and die attach films. Arbitrary sheets, films, tapes, etc., such as a die bonding tape, a recording layer forming resin sheet, and the like.

The driving machine system in the above-described embodiment can employ electric machines such as rotary motors, linear motion motors, linear motors, single-axis robots, multi-joint robots having joints with two or more axes, air cylinders, hydraulics, etc. Actuators such as oil hydraulic cylinders, rodless cylinders, and rotor cylinders can also be used as drive machines that directly or indirectly combine these components. In the aforementioned embodiment, when a rotating member such as a roller is used, a driving device for rotationally driving the rotating member may be provided, or the rotating member may be constituted by a deformable member such as rubber or resin. The surface or the main body of the rotating member may be formed of a non-deformable member to constitute the surface or the main body of the rotating member. In the aforementioned embodiment, other members such as shafts or blades that rotate or do not rotate may be used instead of the rollers. In the above-described embodiment, when a pressing unit such as a pressing roller or a pressing head or a pressing member for pressing the object to be pressed is used, a roller may be used instead of or in combination with the above-exemplified member. , round rods, blade members, brush-like members, etc., can also be formed by blowing gas such as the atmosphere or gas to press, and can also be formed by deformable members such as rubber, resin, sponge, etc. The member for pressing may be constituted by a non-deformable member such as metal or resin. In the above-described embodiment, when a peeling unit such as a peeling plate or a peeling roll or a peeling member is used for peeling off the object to be peeled off, a plate may be used instead of or in combination with the above-exemplified members. Shape members, round bars, rollers, etc., may be formed of deformable members such as rubber or resin to form members for peeling, or non-deformable members may be used to form members for peeling. In the case of using a supporting (holding) unit or a supporting (holding) member for supporting (holding) the supported member (held member), it is also possible to use a mechanical chuck, a clamping cylinder, etc. Holding unit, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, attraction adsorption, drive machine, etc. ) The composition of the supported member. In the above-described embodiment, in the case where a cutting unit or a cutting member is used for cutting the member to be cut, or a member for forming a cut or a cutting line in the member to be cut, it may be replaced. The above-exemplified member or a combination of the above-exemplified member is used by means of a cutter blade, a laser cutter, an ion beam, fire, heat, water pressure, electric heating wire, gas or The cutting member may be moved and cut by combining the structure of an appropriate driving device with the blowing of liquid or the like.

10: Raw material support unit 11: Support shaft 12: Guide roller 20: Pull out the unit 21,51: Turn the motor 22,52: Drive Roller 23,53: Press Roller 30: Peel unit 31: Peel-off board 31A: Peeling edge 40: Guide roller 41: Press Roller 42: Linear motion motor 42A: Output shaft 43: Keeping Components 43A: Keep Face 50: Recycling Unit 54: Recovery Roller 55: Slack detection unit 60: Adhesive body conveying unit 61: Linear Motor 61A: Slider 62: Support table 62A: Support surface 63: Conveyor belt AS: Adhesive film EA: Sheet Feeder EA1,EA2: Chip attachment device RS: Raw Sheet RL: release sheet UP: One thing WK: Adhered body

In FIG. 1 , (A) is an explanatory diagram of a sheet sticking device using a sheet feeding device according to an embodiment of the present invention, and (B) to (C) are explanatory diagrams of a modified example of the present invention.

10: Raw material support unit

11: Support shaft

12: Guide roller

20: Pull out the unit

21,51: Turn the motor

22,52: Drive Roller

23,53: Press Roller

30: Peel unit

31: Peel-off board

31A: Peeling edge

40: Guide roller

41: Press Roller

42: Linear motion motor

42A: Output shaft

43: Keeping Components

43A: Keep Face

50: Recycling Unit

54: Recovery Roller

55: Slack detection unit

60: Adhesive body conveying unit

61: Linear Motor

61A: Slider

62: Support table

62A: Support surface

63: Conveyor belt

AS: Adhesive film

EA: Sheet Feeder

EA1,EA2: Chip attachment device

RS: Raw Sheet

RL: release sheet

UP: One thing

WK: Adhered body

Claims (4)

A sheet feeding device is provided with: The pull-out unit repeats the pull-out of the raw material sheet and the stop of the pulling-out of the raw material sheet to carry out the intermittent conveyance of the raw material sheet, and the raw material sheet is formed by temporarily connecting the adhesive sheet to the strip-shaped peeling sheet at predetermined intervals; as well as a peeling unit for peeling off the adhesive sheet of the raw material sheet pulled out by the pulling unit from the peeling sheet; The pulling-out unit maintains a braking state for suppressing the movement of the raw material sheet while the raw material sheet is being pulled out and stopped. The sheet feeding device according to claim 1, further comprising: a recovery unit for recovering the peeling sheet from which the adhesive sheet has been peeled off by the peeling unit; The said collection|recovery unit normally applies a collection|recovery force to the said peeling sheet|seat which exists between the said collection|recovery unit and the said pull-out unit while the pulling-out of the said raw material sheet is stopped, or applies a collection|recovery force at a predetermined time sequence. The sheet feeding device according to claim 2, wherein the recovery unit is controlled so as to apply tension to the peeling sheet while the raw sheet is being drawn and to apply tension to the peeling while the raw sheet is stopped. The tension becomes a different value during the stop of the sheet. A method of supplying slices, which implements: The pulling step is performed by repeating the pulling of the raw material sheet and the stopping of the pulling out of the raw material sheet to carry out the intermittent conveying of the raw material sheet, and the raw material sheet is formed by temporarily connecting the adhesive sheet to the strip-shaped peeling sheet at a predetermined interval; The peeling step is to peel off the adhesive sheet of the raw material sheet pulled out by the pull-out unit from the peeling sheet; and The recovery step is to recover the aforementioned peeling sheet that has been peeled off the aforementioned adhesive sheet in the aforementioned peeling step; In the pulling-out step, a braking state for suppressing the movement of the raw material sheet is maintained while the raw material sheet is being pulled out and stopped.

Images