TWI765352B - High thermal conductivity ceramic substrate with protective pad and high-power module with the same - Google Patents

High thermal conductivity ceramic substrate with protective pad and high-power module with the same Download PDF

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TWI765352B
TWI765352B TW109132198A TW109132198A TWI765352B TW I765352 B TWI765352 B TW I765352B TW 109132198 A TW109132198 A TW 109132198A TW 109132198 A TW109132198 A TW 109132198A TW I765352 B TWI765352 B TW I765352B
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pads
welding
pad
mounting
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TW202137422A (en
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余河潔
廖陳正龍
林俊佑
安正 黃
陳昆賜
梁榮華
詹雅惠
楊奇樺
黃孝登
王敬文
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璦司柏電子股份有限公司
大陸商上海釗輝科技有限公司
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一種具有保護接墊的高導熱陶瓷基板,供焊接設置至少一大功率電路元件,該高導熱陶瓷基板是被導熱連結至一金屬散熱器,且該高導熱陶瓷基板包括:一基板本體,具有一設置面及在一高度方向相反於該設置面的安裝散熱面;至少一佈局於該基板本體上述設置面的電路層,該電路層包括至少一個供超聲波焊接的金屬熔焊墊和至少一供上述大功率電路元件焊接的安裝墊;複數成形於該基板本體該安裝散熱面且彼此間隔設置、供導熱連結該金屬散熱器的金屬散熱安裝塊,其包含至少一個在垂直上述高度方向的投影面上全覆蓋上述熔焊墊的振盪穩定的支撐保護接墊。 A high-thermal-conductivity ceramic substrate with protective pads for soldering and setting at least a large-power circuit element, the high-thermal-conductivity ceramic substrate is thermally connected to a metal radiator, and the high-thermal-conductivity ceramic substrate comprises: a substrate body having a A setting surface and a mounting heat dissipation surface opposite to the setting surface in a height direction; at least one circuit layer arranged on the above-mentioned setting surface of the substrate body, the circuit layer comprising at least one metal welding pad for ultrasonic welding and at least one for the above-mentioned Mounting pads for welding high-power circuit components; a plurality of metal heat dissipation mounting blocks formed on the mounting heat dissipation surface of the substrate body and arranged at intervals from each other for thermally connecting the metal heat sink, including at least one projection surface perpendicular to the above-mentioned height direction Oscillation-stabilized support pads that fully cover the above fusion pads.

Description

具有保護接墊的高導熱陶瓷基板及具該基板的大功率模組 High thermal conductivity ceramic substrate with protective pad and high-power module with the same

一種高導熱陶瓷基板,尤其是一種具有特殊結構設計的保護接墊的高導熱陶瓷基板。 A high thermal conductivity ceramic substrate, especially a high thermal conductivity ceramic substrate with a special structurally designed protective pad.

隨著環保意識的推廣,空污問題被媒體廣泛報導使得越來越多消費者選擇以電動交通工具取代內燃機為動力的傳統交通工具,例如以電動機車取代二行程機車以及以電動房車取代傳統汽車,而這些電動交通工具都依賴大功率的電動馬達以提供動力,因此市場對於大功率的電力控制元件的需求非常殷切,也引起各大供應商競相投入研發,例如日商瑞薩電子(Renesas Electronics)宣布推出100安培大電流功率金屬氧化物半導體場效電晶體(MOSFET),適用於消費性產品中的馬達驅動器,如無線電動工具及動力輔助自行車。 With the promotion of environmental awareness, air pollution has been widely reported by the media, making more and more consumers choose electric vehicles to replace traditional vehicles powered by internal combustion engines, such as replacing two-stroke locomotives with electric scooters and replacing traditional cars with electric RVs , and these electric vehicles all rely on high-power electric motors to provide power, so the market demand for high-power power control components is very strong, and it has also caused major suppliers to invest in research and development, such as Renesas Electronics (Renesas Electronics) ) announced the launch of a 100-amp high-current power metal-oxide-semiconductor field-effect transistor (MOSFET) for motor drives in consumer products such as cordless power tools and power-assisted bicycles.

上述大功率元件消耗的能量大一方面代表電流效率較高,但是大功率元件自身帶有內電阻且工作電流大,因此有一定比例的電能會被轉換為熱能也是不可避免的。如果無法盡快將大功率元件的熱能逸散,高發熱元件所產生的熱能將會積聚在靠近大功率元件的附近,使得高發熱元件的運作環境非常不理想而影響其工作效能。目前比較被普遍採行的解決方案是使用陶瓷材料做為電路基板的絕緣材料層,陶瓷基板做為電路板的 一種,其具有與半導體接近的熱膨脹係數及高耐熱能力,尤其相較於傳統例如FR4等材質的電路基板,具有良好的導熱係數,適用於具備高發熱量的產品,而且其高硬度、加工性好、尺寸精度高、高絕緣電阻、和極強的電路圖形附著力,加上材料來源豐富容易取得,因此成為用以配置大功率元件的印刷電路的基板的首選。 On the one hand, the high energy consumption of the above-mentioned high-power components means that the current efficiency is high, but the high-power components themselves have internal resistance and large operating current, so it is inevitable that a certain proportion of electric energy will be converted into heat energy. If the heat energy of the high-power element cannot be dissipated as soon as possible, the heat energy generated by the high-heat element will accumulate near the high-power element, making the operating environment of the high-heat element very unsatisfactory and affecting its performance. At present, the more commonly adopted solution is to use ceramic material as the insulating material layer of the circuit substrate, and the ceramic substrate as the circuit board One, it has a thermal expansion coefficient close to that of semiconductors and high heat resistance, especially compared with traditional circuit substrates such as FR4 and other materials, it has a good thermal conductivity, suitable for products with high heat generation, and its high hardness and good workability , high dimensional accuracy, high insulation resistance, and strong circuit pattern adhesion, coupled with abundant material sources and easy access, so it has become the first choice for the substrate of the printed circuit used to configure high-power components.

最常見的陶瓷材料有氧化鋁(Aluminum Oxide,Al2O3)製成的直接覆銅(Direct Bonded Copper,DBC)基板,其中,氧化鋁在單晶結構下導熱係數可達35Wm-1K-1,多晶結構下則有20至27Wm-1K-1。其他常見的陶瓷材料基板,還有:氮化鋁(AlN)、氧化鈹(BeO)及碳化矽(SiC)等。由於上述導熱性能良好的陶瓷材料常用在有高功率電子元件的電路基板中,因此該類基板有時又稱作高功率印刷電路基板(Power Electronic Substrate)。 The most common ceramic materials are Direct Bonded Copper ( DBC ) substrates made of aluminum oxide (Aluminum Oxide , Al2O3). Under the crystal structure, there are 20 to 27Wm -1 K -1 . Other common ceramic material substrates include: aluminum nitride (AlN), beryllium oxide (BeO), and silicon carbide (SiC). Since the above-mentioned ceramic materials with good thermal conductivity are commonly used in circuit substrates with high-power electronic components, such substrates are sometimes called high-power printed circuit substrates (Power Electronic Substrate).

鋁導電條在空氣中會與氧反應很快生成氧化膜,能防止進一步氧化,所以鋁導電條是大功率元件引刷電路常用的打線材料。然而,因為鋁的氧化活性強故在高溫焊接時表面會快速生成氧化層而無法與焊錫連接,因此傳統的熱電焊法是無法將鋁導電條焊接在銅質的熔焊墊上,如圖1所示,一般是採用例如超聲波振盪焊接設備84將鋁導電條85和熔焊墊86焊接。然而相較於傳統FR-4塑膠基板,陶瓷的基板本體87硬且脆非常容易在超音波震盪時破裂而造成電路斷線的問題,因此製造的量率一直難以提高直接降低了產能和提高了成本。 The aluminum conductive strip will react with oxygen quickly to form an oxide film in the air, which can prevent further oxidation, so the aluminum conductive strip is a commonly used wire-bonding material for the brush circuit of high-power components. However, due to the strong oxidation activity of aluminum, an oxide layer will rapidly form on the surface during high-temperature welding and cannot be connected to the solder. Therefore, the traditional thermoelectric welding method cannot weld the aluminum conductive strip on the copper welding pad, as shown in Figure 1. As shown, the aluminum conductive strips 85 and the welding pads 86 are generally welded using, for example, ultrasonic oscillation welding equipment 84 . However, compared with the traditional FR-4 plastic substrate, the ceramic substrate body 87 is hard and brittle, and it is very easy to rupture during ultrasonic vibration, causing the problem of circuit breakage. Therefore, it has been difficult to increase the manufacturing volume rate, which directly reduces the production capacity and improves the cost.

此外,雖然大功率元件可以很容易經由焊錫焊接在佈局在陶瓷基板表面的焊墊上,但是容易產生過多的熱能聚積,由於印刷電路板和 電路元件間的熱膨脹係數不一,金屬銅與鋁的熱膨脹係數為16.5與23ppm/K,而陶瓷材料氧化鋁、氮化鋁與氮化矽大約分別是7、4.5與3.5ppm/K,當陶瓷基板與結合的金屬層熱膨脹係數差異過大時,在高溫的焊接環境或運作環境下反覆經熱脹冷縮,導熱接墊90的膨脹量會大於基板本體87的膨脹量,導致導熱接墊90的銅層會翹曲變形金屬及陶瓷基板之間的界面容易產生破裂、翹曲或變形剝離的問題,也勢必會造成因熱應力而讓接點產生受損的風險,通常需要高效率的散熱手段才能有效解決熱能積蓄的問題。 In addition, although high-power components can be easily soldered on the pads arranged on the surface of the ceramic substrate, it is easy to generate excessive thermal energy accumulation due to the printed circuit board and the The thermal expansion coefficients of circuit components are different. The thermal expansion coefficients of metal copper and aluminum are 16.5 and 23ppm/K, while the ceramic materials alumina, aluminum nitride and silicon nitride are about 7, 4.5 and 3.5ppm/K respectively. When the thermal expansion coefficient difference between the substrate and the bonded metal layer is too large, the thermal expansion and contraction of the thermally conductive pad 90 will be greater than that of the substrate body 87 under repeated thermal expansion and contraction in a high-temperature soldering environment or operating environment. The copper layer will warp and deform. The interface between the metal and the ceramic substrate is prone to cracking, warping or deformation and peeling, and it will inevitably cause the risk of damage to the contacts due to thermal stress. High-efficiency heat dissipation methods are usually required. In order to effectively solve the problem of thermal energy accumulation.

為此,目前常用的方法有以下幾種:一是在大功率電路元件和其他電路元件之間配置大範圍空置空間,經由熱對流或是熱輻射將所發出的熱能逸散至印刷電路板周圍的空氣及環境,但此種散熱效率並不高;二是如圖2的大功率組件88中在上述焊接有大功率電路元件89的陶瓷的基板本體87的背面鋪設例如銅質導熱接墊90,再透過導熱膠91等材料熱連結導熱性質更好的金屬散熱器92(Heat-Sink)而將大功率電路元件89發出的熱能傳導逸散,但是因為銅的熱膨脹係數遠大於陶瓷基板,此種做法會導致基板本體87翹曲變形甚至斷裂,而導熱接墊90也會翹曲變形甚至剝落造成散熱效率低落,而且導熱膠91本身的導熱係數遠低於金屬,因此即使在金屬散熱器92遠離產熱電子元件的遠端加裝風扇,金屬導熱器的92導熱效果也會大打折扣。 To this end, the following methods are commonly used at present: one is to configure a large range of vacant space between high-power circuit components and other circuit components, and to dissipate the emitted heat energy to the periphery of the printed circuit board through thermal convection or thermal radiation Second, as shown in the high-power component 88 in FIG. 2, on the back of the ceramic substrate body 87 welded with the high-power circuit element 89, for example, copper thermally conductive pads 90 are laid on the backside. , and then thermally connect the metal heat sink 92 (Heat-Sink) with better thermal conductivity through the thermal conductive adhesive 91 and other materials to conduct and dissipate the thermal energy emitted by the high-power circuit element 89, but because the thermal expansion coefficient of copper is much larger than that of the ceramic substrate, this This method will cause the substrate body 87 to warp and deform or even break, and the thermally conductive pads 90 will also warp and deform or even peel off, resulting in low heat dissipation efficiency, and the thermal conductivity of the thermally conductive adhesive 91 itself is much lower than that of metal. If a fan is installed at the far end away from the heat-generating electronic components, the 92% heat conduction effect of the metal heat conductor will also be greatly reduced.

此外,一般在焊接有大功率元件的導熱電路板背面,經常會透過例如濺鍍等方式,在背面長一層例如銅層做為導熱接墊90,藉此跟同樣是例如銅材質的金屬散熱器92妥善結合,而將大功率電路元件89發出的熱能傳導逸散。因此,一般規劃是在陶瓷的基板本體87的正面,形成包含 供焊接大功率電路元件89的安裝墊93和焊接鋁導電條85的熔焊墊86;藉此形成高導熱陶瓷基板98,讓大功率元件發熱能由金屬散熱器92導出。 In addition, generally, on the back of the heat-conducting circuit board to which high-power components are welded, a layer such as a copper layer is often grown on the back as a heat-conducting pad 90 by means such as sputtering, so as to be used as a heat-dissipating pad 90, which is also made of copper. 92 is properly combined, and the heat energy emitted by the high-power circuit element 89 is conducted and dissipated. Therefore, the general plan is to form the front surface of the ceramic substrate body 87 to include Mounting pads 93 for soldering high-power circuit elements 89 and welding pads 86 for soldering aluminum conductive strips 85 ;

請參閱圖2,為克服此問題,申請人進一步將整片的銅層,區隔為面積更小且彼此些微的間隙94的多片例如六角形的銅層區塊95,一方面仍然可以讓上方的陶瓷基板和下方的鰭片型金屬散熱器保持良好的結合與導熱接觸,另方面可以在銅層區塊95熱脹冷縮時,藉由些微的間隙94作為類似橋樑或鐵軌伸縮縫的緩衝區,使得銅層區塊95和陶瓷間的熱膨脹差異不會造成翹區剝落等結構損壞。 Please refer to FIG. 2 , in order to overcome this problem, the applicant further divides the whole copper layer into multiple pieces of copper layer blocks 95 such as hexagonal copper layers with smaller areas and slight gaps 94 . The upper ceramic substrate and the lower fin-type metal heat sink maintain good bonding and thermal contact. On the other hand, when the copper layer block 95 expands and contracts, the slight gap 94 can be used as a bridge or rail expansion joint. A buffer zone is provided so that the difference in thermal expansion between the copper layer block 95 and the ceramic will not cause structural damage such as warpage peeling.

然而,當銅層區塊95的各自尺寸過小時,由於超聲波振盪焊接設備84進行超聲波振盪焊接時,對應於上述些微的間隙94處的基板本體87將缺乏銅層區塊95的下方支撐,因而非常容易在超聲波振盪和溫升的協同作用下產生些微破裂狹縫,甚至造成電路斷路的問題,因此製造的良率一直難以提高,直接限制產能並使成本居高不下。而大功率電路元件89下方的間隙94處,也因缺少了銅層區塊95的直接散熱,使得大功率電路元件89發出的熱能在間隙94周遭積聚,無法充分發散。 However, when the respective sizes of the copper layer blocks 95 are too small, when the ultrasonic oscillation welding equipment 84 performs ultrasonic oscillation welding, the substrate body 87 corresponding to the above-mentioned slight gap 94 will lack the support below the copper layer blocks 95, so It is very easy to produce slight cracks and slits under the synergistic effect of ultrasonic oscillation and temperature rise, and even cause the problem of circuit breakage. Therefore, it has been difficult to improve the manufacturing yield, which directly limits the production capacity and keeps the cost high. The gap 94 below the high-power circuit element 89 also lacks direct heat dissipation from the copper layer block 95 , so that the heat energy emitted by the high-power circuit element 89 accumulates around the gap 94 and cannot be fully dissipated.

尤其如圖3所示,申請人更擅長將例如FR-4等多層印刷電路板96中預先形成略大於陶瓷基板的尺寸的開口97,然後以絕緣膠材99固化黏著將高導熱陶瓷基板98鑲嵌在該開口97,再把用來驅動或控制大功率電路元件89的其餘低電流電路和相關元件,以高密度和高複雜度的結構設置於FR4的電路板上,並和陶瓷基板上的電路相互導接,形成特殊的複合電路板。 Especially as shown in FIG. 3 , the applicant is better at pre-forming openings 97 slightly larger than the size of the ceramic substrate in a multilayer printed circuit board 96 such as FR-4, and then inlaying the high thermal conductivity ceramic substrate 98 with insulating adhesive 99 by curing and adhering. In the opening 97, the remaining low-current circuits and related components used to drive or control the high-power circuit components 89 are arranged on the FR4 circuit board in a high-density and high-complexity structure, and are connected with the circuit on the ceramic substrate. They are connected to each other to form a special composite circuit board.

此種結構的電路板被稱為熱電分離電路板,一方面可以將大 功率電路元件89發出的大量熱能先縱向地經由基板本體87及圖式下方的金屬散熱器攜出,避免FR-4銅箔印刷電路板96中的其他電路元件受到大功率電路元件89發出的大量熱能的影響;另方面,複雜的電路設計也不需要遷就陶瓷基板的簡單結構,可以在多層板中盡情發揮,盡量微型化,並且節約相對昂貴的陶瓷基板用料。 A circuit board with this structure is called a thermoelectric separation circuit board. A large amount of heat energy emitted by the power circuit element 89 is first carried out longitudinally through the substrate body 87 and the metal heat sink below the drawing, so as to prevent other circuit elements in the FR-4 copper foil printed circuit board 96 from being subjected to a large amount of heat emitted by the high-power circuit element 89 On the other hand, the complex circuit design does not need to accommodate the simple structure of the ceramic substrate, and can be fully utilized in the multi-layer board, miniaturized as much as possible, and saves relatively expensive ceramic substrate materials.

因此,如何一方面在超聲波焊接時保護硬且脆的陶瓷的基板本體不致破裂,以及改善導熱接墊和陶瓷基板的翹曲變形,同時確保金屬散熱器和導熱接墊良好的熱連接,就是本案所要達到的目的。 Therefore, how to protect the hard and brittle ceramic substrate body from cracking during ultrasonic welding, improve the warpage deformation of the thermally conductive pad and the ceramic substrate, and at the same time ensure a good thermal connection between the metal heat sink and the thermally conductive pad, this is the case. the purpose to be achieved.

本發明之一目的在提供一種具有保護接墊的高導熱陶瓷基板,能夠在以超聲波振盪焊接鋁導電條時,大幅降低陶瓷基板破裂的風險,有效提升產品良率。 One object of the present invention is to provide a high thermal conductivity ceramic substrate with protective pads, which can greatly reduce the risk of cracking of the ceramic substrate when welding aluminum conductive strips by ultrasonic oscillation, and effectively improve product yield.

本發明之另一目的在提供一種具有保護接墊的高導熱陶瓷基板,供在大功率電路元件工作時充分散熱而避免陶瓷基板背面的均勻導熱接墊翹曲變形或破裂。 Another object of the present invention is to provide a highly thermally conductive ceramic substrate with protective pads for fully dissipating heat during operation of high-power circuit elements to avoid warping or cracking of the uniform thermally conductive pads on the back of the ceramic substrate.

本發明之又一目的在提供一種具有保護接墊的高導熱陶瓷基板的大功率模組,可以提高均勻導熱接墊和金屬散熱鰭片之間的導熱效率,讓大功率元件發出的熱能更快逸散而不積聚,以提高其工作效率。 Another object of the present invention is to provide a high-power module with a high-thermal-conductivity ceramic substrate with protective pads, which can improve the heat-conducting efficiency between the uniform thermal-conductivity pads and the metal heat-dissipating fins, and make the thermal energy emitted by the high-power components faster. Escape without accumulation to improve its working efficiency.

為達上述目的,本發明揭露一種具有保護接墊的高導熱陶瓷基板,供焊接設置至少一個工作電流達數十安培的大功率電路元件,以及該高導熱陶瓷基板是被導熱連結至一金屬散熱器,且該高導熱陶瓷基板包括:一基板本體,具有一設置面及在一高度方向相反於該設置面的安裝散 熱面;至少一佈局於該基板本體上述設置面的電路層,前述電路層包括至少一個金屬材質供超聲波焊接的熔焊墊,以及至少一供上述大功率電路元件焊接的安裝墊;以及複數成形於上述基板本體上述安裝散熱面且彼此間隔設置、供導熱連結至上述金屬散熱器的金屬散熱安裝塊;其中,在上述高度方向對應於上述熔焊墊的金屬散熱安裝塊,是至少一個在垂直上述高度方向的投影面上全覆蓋上述熔焊墊的振盪穩定的支撐保護接墊。以及至少一個在垂直上述高度方向的投影面上全覆蓋上述安裝墊的均勻導熱接墊。 In order to achieve the above purpose, the present invention discloses a high thermal conductivity ceramic substrate with protective pads for welding at least one high-power circuit element with an operating current of tens of amperes, and the high thermal conductivity ceramic substrate is thermally connected to a metal for heat dissipation. and the high thermal conductivity ceramic substrate includes: a substrate body having a setting surface and a mounting surface opposite to the setting surface in a height direction hot surface; at least one circuit layer arranged on the above-mentioned setting surface of the substrate body, the above-mentioned circuit layer includes at least one welding pad of metal material for ultrasonic welding, and at least one mounting pad for welding the above-mentioned high-power circuit components; and a plurality of forming A metal heat-dissipating mounting block that is mounted on the heat-dissipating surface of the substrate body and is spaced apart from each other for thermally connecting to the metal heat sink; wherein, the metal heat-dissipating mounting block corresponding to the welding pad in the height direction is at least one vertical The above-mentioned projection surface in the height direction completely covers the above-mentioned vibration-stable support and protection pads of the above-mentioned welding pads. and at least one uniform thermal conductive pad that fully covers the mounting pad on a projection plane perpendicular to the height direction.

當把包括一金屬散熱器安裝於上具有保護接墊的高導熱陶瓷基板,就可以構成本發明的一種大功率模組,其包括:至少一個工作電流達數十安培的大功率電路元件;一金屬散熱器;一供焊接設置上述大功率電路元件、並且導熱連接上述金屬散熱器的高導熱陶瓷基板,該高導熱陶瓷基板包括:一基板本體,具有一設置面及在一高度方向相反於該設置面的安裝散熱面;至少一佈局於該基板本體上述設置面的電路層,前述電路層包括至少一個金屬材質供超聲波焊接的熔焊墊,以及至少一供上述大功率電路元件焊接的安裝墊;以及複數成形於上述基板本體上述安裝散熱面且彼此間隔設置、供導熱連結至上述金屬散熱器的金屬散熱安裝塊;其中,在上述高度方向對應於上述熔焊墊的金屬散熱安裝塊,是至少一個在垂直上述高度方向的投影面上全覆蓋上述熔焊墊的振盪穩定的支撐保護接墊。以及至少一個在垂直上述高度方向的投影面上全覆蓋上述安裝墊的均勻導熱接墊。 When a metal heat sink is installed on a high thermal conductivity ceramic substrate with protective pads, a high-power module of the present invention can be formed, which includes: at least one high-power circuit element with an operating current of tens of amperes; a Metal radiator; a high-thermal-conductivity ceramic substrate for soldering the high-power circuit elements and thermally connecting the metal radiator, the high-thermal-conductivity ceramic substrate includes: a substrate body with a setting surface and a height direction opposite to the metal radiator. The installation and heat dissipation surface of the setting surface; at least one circuit layer arranged on the above-mentioned setting surface of the substrate body, the aforementioned circuit layer includes at least one metal welding pad for ultrasonic welding, and at least one for welding the above-mentioned high-power circuit components. Mounting pad And a plurality of metal heat dissipation mounting blocks formed on the above-mentioned mounting heat dissipation surface of the above-mentioned substrate body and spaced apart from each other for thermally connected to the above-mentioned metal heat sink; wherein, the metal heat dissipation mounting block corresponding to the above-mentioned welding pad in the above-mentioned height direction is At least one vibration-stable support protection pad that fully covers the welding pad on a projection plane perpendicular to the height direction. and at least one uniform thermal conductive pad that fully covers the mounting pad on a projection plane perpendicular to the height direction.

本發明在陶瓷基板的基板本體的安裝散熱面設置彼此間隔 的金屬散熱安裝塊,其包含了:藉由在垂直上述高度方向的投影面上全覆蓋上述熔焊墊的振盪穩定的支撐保護接墊,來防止陶瓷基板在超聲波振盪焊接時斷裂以及電路受損;以及藉由在上述高度方向對應於上述安裝墊的均勻導熱接墊,來防止陶瓷基板和均勻導熱接墊翹曲變形甚至斷裂,更藉由下方均勻導熱接墊的完整披覆,讓大功率電路元件所發的熱,可以被順暢有效地導出至陶瓷基板下方的散熱器,藉此確保操作環境的適當溫度,有效確保工作效能和使用壽命。 In the present invention, the mounting and heat dissipation surfaces of the substrate body of the ceramic substrate are arranged to be spaced apart from each other The metal heat-dissipating mounting block includes: by fully covering the above-mentioned welding pad on the projection surface perpendicular to the above-mentioned height direction, the vibration-stable support and protection pads are used to prevent the ceramic substrate from being broken during ultrasonic vibration welding and circuit damage. ; And by the uniform thermal conductive pad corresponding to the above-mentioned mounting pad in the above-mentioned height direction, the ceramic substrate and the uniform thermal conductive pad are prevented from being warped, deformed or even broken, and by the complete coating of the uniform thermal conductive pad below, the high power The heat generated by the circuit components can be smoothly and effectively dissipated to the heat sink under the ceramic substrate, thereby ensuring the proper temperature of the operating environment and effectively ensuring the work efficiency and service life.

1、1’、98:高導熱陶瓷基板 1, 1', 98: High thermal conductivity ceramic substrate

10、10’、87:基板本體 10, 10', 87: Substrate body

102:設置面 102: Setting Faces

104:安裝散熱面 104: Install the cooling surface

12:電路層 12: circuit layer

122、122’、86:熔焊墊 122, 122', 86: welding pad

124、124’、93:安裝墊 124, 124', 93: Mounting pads

14、14’:金屬散熱安裝塊 14, 14': Metal heat dissipation mounting block

140、140’、140”、140''':支撐保護接墊 140, 140', 140", 140''': Support protection pads

142、142’、142”、142''':均勻導熱接墊 142, 142', 142", 142''': uniform thermal pad

144’:其餘金屬散熱安裝塊 144': The rest of the metal heat dissipation mounting block

146”:階梯狀結構 146": stepped structure

16、16’、94:間隙 16, 16', 94: Gap

17、84:超聲波振盪焊接設備 17, 84: Ultrasonic Oscillation Welding Equipment

2、2’、89:大功率電路元件 2, 2', 89: High-power circuit components

3、92:金屬散熱器 3, 92: Metal radiator

5、5’、85:鋁導電條 5, 5', 85: aluminum conductive strip

7’:銅導電條 7': Copper conductive strip

8’、96:印刷電路板 8', 96: PCB

81’、97:開口 81', 97: Opening

82’、99:絕緣膠材 82', 99: insulating material

83’:焊接墊 83': Solder Pad

88:大功率組件 88: High-power components

9:大功率模組 9: High power module

90:導熱接墊 90: thermal pad

91:導熱膠 91: thermal paste

95:銅層區塊 95: Copper layer block

圖1為一先前技術的大功率模組的側視示意圖。 FIG. 1 is a schematic side view of a high-power module of the prior art.

圖2為一先前技術的大功率模組的超聲波焊接側視示意圖。 FIG. 2 is a schematic side view of ultrasonic welding of a high-power module of the prior art.

圖3為一先前技術的高導熱陶瓷基板的俯視示意圖。 FIG. 3 is a schematic top view of a prior art high thermal conductivity ceramic substrate.

圖4為本發明具有保護接墊的高導熱陶瓷基板之第一較佳實施例的側視示意圖,說明支撐保護接墊和熔焊墊的對應形狀關係,以及均勻導熱接墊和安裝墊的對應形狀關係。 4 is a schematic side view of the first preferred embodiment of the high thermal conductivity ceramic substrate with protective pads according to the present invention, illustrating the corresponding shape relationship between the supporting protective pads and the welding pads, and the correspondence between the uniform thermally conductive pads and the mounting pads shape relationship.

圖5為本發明具有保護接墊的高導熱陶瓷基板之第一較佳實施例的俯視示意圖。 FIG. 5 is a schematic top view of the first preferred embodiment of the high thermal conductivity ceramic substrate with protective pads of the present invention.

圖6為本發明具有保護接墊的高導熱陶瓷基板大功率模組側視示意圖。 6 is a schematic side view of a high-power module with a high thermal conductivity ceramic substrate having protective pads according to the present invention.

圖7為本發明具有保護接墊的高導熱陶瓷基板之第二較佳實施例的俯視示意圖。 7 is a schematic top view of a second preferred embodiment of the high thermal conductivity ceramic substrate with protective pads of the present invention.

圖8為本發明具有保護接墊的高導熱陶瓷基板之第三較佳實施例的仰視示意圖,說明支撐保護接墊和均勻導熱接墊的階梯狀設計。 8 is a schematic bottom view of the third preferred embodiment of the high thermal conductivity ceramic substrate with protective pads of the present invention, illustrating a stepped design for supporting the protective pads and the uniform thermally conductive pads.

圖9是圖8實施例的側視示意圖。 FIG. 9 is a schematic side view of the embodiment of FIG. 8 .

圖10是本發明具有保護接墊的高導熱陶瓷基板之第四較佳實施例的仰視示意圖。 10 is a schematic bottom view of the fourth preferred embodiment of the high thermal conductivity ceramic substrate with protective pads of the present invention.

有關本發明之前述及其他技術內容、特點與功效,在以下配合參考圖式之較佳實施例的詳細說明中,將可清楚呈現;此外,在各實施例中,相同之元件將以相似之標號表示。 The foregoing and other technical contents, features and effects of the present invention will be clearly presented in the following detailed description of the preferred embodiments with reference to the drawings; in addition, in each embodiment, the same elements will be represented by similar label representation.

本發明一種具有保護接墊的高導熱陶瓷基板及具該基板的大功率模組之第一較佳實施例,如圖4至圖5所示,高導熱陶瓷基板1包含一例如是氮化鋁材質的基板本體10、電路層12和例釋為多個彼此形成有間隙的銅質導熱墊,在此定義為金屬散熱安裝塊14,金屬散熱安裝塊14較佳高度是大於60微米(micro-meter,μm)最佳厚度是150微米。電路層12是設置在基板本體10上方的設置面102,且為配合多個大功率電路元件的設置,本例中也設置有多個熔焊墊122和安裝墊124。在基板本體10的相反側面,則定義為安裝散熱面104,且基板本體10板厚的方向定義為高度方向。 A first preferred embodiment of a high thermal conductivity ceramic substrate with protective pads and a high-power module with the substrate of the present invention, as shown in FIG. 4 to FIG. 5 , the high thermal conductivity ceramic substrate 1 includes a The substrate body 10, the circuit layer 12, and the material of the substrate body 10 and the circuit layer 12 are illustrated as a plurality of copper thermally conductive pads with gaps formed with each other, which are defined as metal heat dissipation mounting blocks 14. The preferred height of the metal heat dissipation mounting blocks 14 is greater than 60 microns (micro- meter, μm) optimal thickness is 150 μm. The circuit layer 12 is the setting surface 102 disposed above the substrate body 10 , and in order to match the setting of a plurality of high-power circuit elements, a plurality of welding pads 122 and mounting pads 124 are also provided in this example. The opposite side of the substrate body 10 is defined as the mounting heat dissipation surface 104 , and the direction of the thickness of the substrate body 10 is defined as the height direction.

高導熱陶瓷基板1的製作方法,例如是先在基板本體10的設置面102和安裝散熱面104以濺鍍法全面形成銅質金屬層,再以光刻法分別在高導熱陶瓷基板1的設置面102去除部分不需導通的區域而形成電路層12,以及在安裝散熱面104形成彼此具有間隙的金屬散熱安裝塊14,上述兩者均可視情況需要再以電鍍或類似方式增厚。當然,熟悉本技術領域人士也可以採用濺鍍以外的類似方式構成上述兩面的電路層和金屬散熱安裝塊。 The manufacturing method of the high thermal conductivity ceramic substrate 1, for example, firstly forms a copper metal layer on the entire surface 102 and the mounting heat dissipation surface 104 of the substrate body 10 by sputtering, and then uses photolithography to respectively install the high thermal conductivity ceramic substrate 1. The circuit layer 12 is formed by removing some non-conductive areas on the surface 102 , and the metal heat dissipation mounting blocks 14 with gaps are formed on the mounting heat dissipation surface 104 . Of course, those skilled in the art can also use similar methods other than sputtering to form the above-mentioned two-sided circuit layers and metal heat dissipation mounting blocks.

接著將至少一個工作電流達數十安培以上的大功率電路元件2的底部電極焊接在安裝墊124上,大功率電路元件2例如是德商英飛凌科技公司(Infineon Technologies AG)所因應電動房車以及軌道列車的應用所出品、30-80kW功率級電流高達160安培的IGBT型AUIRGPS 4067 D1電源管理積體電路(power management IC),然後以超聲波振盪焊接設備17將本例中的多條彼此併聯的鋁導電條5,逐一將一端焊接在熔焊墊122上、另一端則同樣逐一焊接在大功率電路元件2的頂部電極上。本例中,由於數十安培的電流若行經單一金屬導電條,仍會因些微電阻而造成莫大的熱干擾,再考量陶瓷基板的空間節約,必須讓各導電條以大致同心的方式內外排列。 Next, the bottom electrode of at least one high-power circuit element 2 with an operating current of more than tens of amperes is welded on the mounting pad 124 . and the application of rail trains, IGBT type AUIRGPS 4067 D1 power management IC (power management IC) with 30-80kW power stage current up to 160 amps, and then the ultrasonic oscillation welding equipment 17 is used to connect multiple strips in parallel with each other in this example One end of the aluminum conductive strip 5 is welded to the welding pad 122 one by one, and the other end is also welded to the top electrode of the high-power circuit element 2 one by one. In this example, if a current of tens of amperes flows through a single metal conductive strip, it will still cause great thermal interference due to a small resistance. Considering the space saving of the ceramic substrate, the conductive strips must be arranged in a roughly concentric manner.

其中,上述金屬散熱安裝塊中,最特殊的在於其中有振盪穩定的支撐保護接墊140,此處所稱的支撐保護接墊140是在垂直於上述高度方向的投影面上、對應於熔焊墊122位置而設置的,尤其是支撐保護接墊140的面積不小於熔焊墊122的面積,也就是在垂直上述高度方向的投影面方向上,可以全覆蓋設置面102上的熔焊墊122的投影面積。因此,在超聲波振盪焊接過程中,不會有任何熔接振盪位置會超過此支撐保護接墊140的支撐範圍,藉此穩定地提供應力學支撐,而防止基板本體10在超聲波振盪下因懸空沒有受到支撐而破裂。而由於上述多條導電條的內外設置模式,唯有在下方的支撐達成全覆蓋,才能如此確保陶瓷基板本體的結構完整以及良率提升。 Among the above-mentioned metal heat dissipation mounting blocks, the most special feature is that there are support and protection pads 140 with stable oscillation. 122 position, especially the area of the support and protection pad 140 is not less than the area of the welding pad 122, that is, in the direction of the projection surface perpendicular to the above-mentioned height direction, it can fully cover the welding pad 122 on the setting surface 102. shadow area. Therefore, during the ultrasonic oscillation welding process, no welding oscillation position will exceed the support range of the support and protection pads 140 , thereby stably providing stress support, and preventing the substrate body 10 from being suspended due to ultrasonic oscillation. support and rupture. Due to the above-mentioned internal and external arrangement modes of the plurality of conductive strips, only the support below can achieve full coverage, so as to ensure the structural integrity of the ceramic substrate body and improve the yield.

另方面,金屬散熱安裝塊14也另外包含多個均勻導熱接墊142,此處的均勻導熱接墊142是指在垂直於上述高度方向的投影面上對應於安裝墊124位置而設置的,而且均勻導熱接墊142的面積也是至少不小於 安裝墊124的面積,除了可以在超聲波振盪焊接過程中穩定地提供應力支撐而防止基板本體10在超聲波振盪下破裂,並且可以完全運用安裝墊124的散熱面積進行散熱,藉此避免大功率電路元件2的熱能因間隙的存在而有部分區域導熱不良,造成熱能積聚在間隙附近,一方面影響大功率電路元件2的運作環境與效能,另方面更導致介面的穩固結合受到損害。 On the other hand, the metal heat dissipation mounting block 14 additionally includes a plurality of uniform thermally conductive pads 142. The uniform thermally conductive pads 142 here refer to the positions corresponding to the mounting pads 124 on the projection plane perpendicular to the above-mentioned height direction, and The area of the uniform thermal pad 142 is also at least not less than The area of the mounting pad 124 can stably provide stress support during the ultrasonic oscillation welding process to prevent the substrate body 10 from breaking under the ultrasonic oscillation, and can fully utilize the heat dissipation area of the mounting pad 124 for heat dissipation, thereby avoiding high-power circuit components. Due to the existence of the gap, the thermal energy of 2 has poor thermal conductivity in some areas, resulting in the accumulation of thermal energy near the gap. On the one hand, it affects the operating environment and performance of the high-power circuit element 2, and on the other hand, the stable connection of the interface is damaged.

本例中,上述金屬散熱安裝塊14之間具有不大於300微米且最佳為200微米的間隙16,使得各均勻導熱接墊142在受熱時可以將大功率電路元件2發出的熱能均勻分散,並且每一均勻導熱接墊142均有足夠的空間供受熱膨脹而不致因無處膨脹導致翹曲變形甚至介面剝離,同樣也可使基板本體10避免相同的翹曲變形甚至微裂。 In this example, there is a gap 16 between the above-mentioned metal heat dissipation mounting blocks 14 not greater than 300 microns and preferably 200 microns, so that each uniform thermal conductive pad 142 can evenly disperse the heat energy emitted by the high-power circuit element 2 when heated, Moreover, each uniform thermally conductive pad 142 has enough space for thermal expansion without causing warpage deformation or even interface peeling due to nowhere expansion, and the substrate body 10 can also avoid the same warpage deformation or even micro-cracks.

本例中,支撐保護接墊140是面積大於熔焊墊122的面積的六角型形狀,而均勻導熱接墊142也是面積大於安裝墊124的面積的六角型形狀,因此,支撐保護接墊140的面積不一定會和均勻導熱接墊142相等,當然,熟知本技術領域之人可以輕易推知,只要能滿足上述兩種投影面上全覆蓋的要求,支撐保護接墊140的面積也可和均勻導熱接墊142的面積相等,而且支撐保護接墊140和均勻導熱接墊142的形狀也可以是其他圖形,並無礙於本案實施。 In this example, the support and protection pads 140 are in a hexagonal shape with an area larger than that of the welding pads 122 , and the uniform thermally conductive pads 142 are also in a hexagonal shape with an area larger than that of the mounting pads 124 . The area is not necessarily equal to the uniform thermal conductive pad 142. Of course, those skilled in the art can easily infer that as long as the above-mentioned requirements for full coverage on the two projection surfaces are met, the area of the supporting protection pad 140 can also be uniformly thermally conductive. The areas of the pads 142 are equal, and the shapes of the support and protection pads 140 and the uniform thermally conductive pads 142 can also be other shapes, which does not hinder the implementation of this case.

請參閱圖6,本例中還將上述焊接有大功率電路元件2的高導熱陶瓷基板1,透過金屬散熱安裝塊14焊接在一例如是電動馬達的高功率用電設備的銅製散熱鰭片的金屬散熱器3上,以藉由金屬散熱器3的散熱鰭片而更快地將大功率電路元件2發出的熱能導出並逸散。並且同步利用馬達內部的例如水冷裝置,形成一具有保護接墊的高導熱陶瓷基板1的大功率模組 9,因為金屬態的焊錫和銅材質的金屬散熱安裝塊14以及銅製的金屬散熱器3具有良好接觸相容性和導熱性,且銅具有較佳的導熱係數(380Wm-1K-1),故能以最快速率將均勻導熱接墊142接收自大功率電路元件2的熱能吸收然後藉由水冷式馬達的水冷裝置攜出且逸散。 Referring to FIG. 6 , in this example, the above-mentioned high thermal conductivity ceramic substrate 1 welded with high-power circuit components 2 is also welded to a copper heat-dissipating fin of a high-power electrical equipment such as an electric motor through a metal heat-dissipating mounting block 14 . On the metal heat sink 3 , the heat energy emitted by the high-power circuit element 2 can be quickly conducted and dissipated by the heat dissipation fins of the metal heat sink 3 . And synchronously use the water cooling device inside the motor to form a high-power module 9 with a high thermal conductivity ceramic substrate 1 with protective pads, because the metal solder, the metal heat dissipation mounting block 14 made of copper and the metal heat sink 3 made of copper have Good contact compatibility and thermal conductivity, and copper has a better thermal conductivity (380Wm -1 K -1 ), so the uniform thermal pad 142 can receive the heat energy absorbed from the high-power circuit element 2 at the fastest rate and then borrow it. Entrained and dissipated by the water cooling of the water-cooled motor.

本發明在基板本體的安裝散熱面設置彼此間隔的金屬散熱安裝塊,其包含了:藉由在垂直上述高度方向的投影面上全覆蓋上述熔焊墊的支撐保護接墊,以及在上述高度方向的投影面上全覆蓋於上述安裝墊的均勻導熱接墊,可以防止陶瓷基板在超聲波振盪焊接時斷裂以及電路斷線;並且防止陶瓷基板和均勻導熱接墊翹曲變形甚至斷裂或剝落。 In the present invention, metal heat-dissipating mounting blocks spaced apart from each other are arranged on the mounting and heat-dissipating surface of the substrate body, which comprises: supporting and protecting the pads by fully covering the welding pads on the projection surface perpendicular to the height direction, and a support and protection pad in the height direction The uniform thermal conductive pads on the projection surface of the above-mentioned mounting pads are fully covered, which can prevent the ceramic substrate from breaking and circuit disconnection during ultrasonic oscillation welding;

本發明在陶瓷基板的基板本體的安裝散熱面設置藉由金屬焊接的方式將一金屬散熱器全面積熱連接均勻導熱接墊,而形成一具有保護接墊的高導熱陶瓷基板的大功率模組,可以對高功率電路元件提供更好的導熱而確保操作環境的適當溫度,藉此增加陶瓷基板以及大功率模組的製造良率和降低成本,並延長使用壽命。 In the present invention, the mounting heat dissipation surface of the substrate body of the ceramic substrate is provided with a metal heat sink by means of metal welding to thermally connect the entire area of a metal radiator with evenly thermally conductive pads to form a high-power module with a high thermal conductivity ceramic substrate with protective pads , which can provide better heat conduction for high-power circuit components and ensure an appropriate temperature of the operating environment, thereby increasing the manufacturing yield of ceramic substrates and high-power modules, reducing costs, and extending service life.

本發明具有保護接墊的高導熱陶瓷基板及具該基板的大功率模組的第二較佳實施例如下所述,本例中與前一較佳實施例相同部分於此不再贅述,相似的元件也使用相似名稱與標號,僅就差異部分提出說明。本例中高導熱陶瓷基板的製作方法,例如是先在基板本體的設置面和安裝散熱面以電著法全面形成銅質金屬層,再以光刻法分別在高導熱陶瓷基板的設置面形成電路層,以及在安裝散熱面形成金屬散熱安裝塊。 The second preferred embodiment of the high thermal conductivity ceramic substrate with protective pads and the high-power module with the substrate of the present invention is as follows, and the same parts in this embodiment as the previous preferred embodiment will not be repeated here, and are similar. Elements of the same type also use similar names and numbers, and only the differences are explained. The manufacturing method of the high thermal conductivity ceramic substrate in this example, for example, firstly forms a copper metal layer on the setting surface of the substrate body and the mounting and heat dissipation surface by electrical bonding, and then forms circuits on the setting surface of the high thermal conductivity ceramic substrate by photolithography. layer, and a metal heat dissipation mounting block is formed on the mounting heat dissipation surface.

請參閱圖7,在本例中,熔焊墊122’為長條的矩形以形成一端子匯流排供多條鋁導電條5’焊接,相對的,金屬散熱安裝塊14’中的振盪 穩定的支撐保護接墊140’也是長條的矩形,並且在基於基板本體10’厚度的高度方向的投影面上全覆蓋熔焊墊122’;安裝墊124’則是正方形而均勻導熱接墊142’是長方形並且在基於基板本體10’厚度的高度方向的投影面上全覆蓋安裝墊124’;緊鄰支撐保護接墊140’和均勻導熱接墊142’的金屬散熱安裝塊14’也都分別是原正六角形而被支撐保護接墊140’和均勻導熱接墊142’截餘的殘餘形狀,金屬散熱安裝塊14’中除了支撐保護接墊140’、均勻導熱接墊142’以及緊鄰上述支撐保護接墊140’和上述均勻導熱接墊142’者以外的複數個其餘金屬散熱安裝塊144’均為正六角型。 Referring to FIG. 7, in this example, the welding pad 122' is a long rectangle to form a terminal bus bar for welding a plurality of aluminum conductive bars 5'. On the contrary, the vibration in the metal heat dissipation mounting block 14' The stable support and protection pads 140 ′ are also elongated rectangles, and fully cover the welding pads 122 ′ on the projection surface based on the height direction of the thickness of the substrate body 10 ′; the mounting pads 124 ′ are square and uniformly thermally conductive pads 142 ' is a rectangle and fully covers the mounting pads 124' on the projection surface of the height direction based on the thickness of the substrate body 10'; the metal heat dissipation mounting blocks 14' adjacent to the support protection pads 140' and the uniform thermally conductive pads 142' are also respectively The original regular hexagonal shape is the residual shape of the support and protection pads 140' and the uniform thermally conductive pads 142'. In the metal heat dissipation mounting block 14', in addition to the support and protection pads 140', the uniform thermally conductive pads 142' and the support protection A plurality of other metal heat dissipation mounting blocks 144 ′ other than the pads 140 ′ and the above-mentioned uniform thermally conductive pads 142 ′ are all regular hexagonal.

在本例中,長條的矩形熔焊墊122’作為端子匯流排可以供多條鋁導電條5’焊接,例如可以實現多個較小功率的大功率電路元件2’之間的並聯電路,來達成等效於一個較大功率的大功率電路元件的電流輸出要求,以降低每個較小功率的大功率電路元件2’的電流而減輕發熱的問題,使得成本得以下降並且應用範圍更廣,有助於產品的市場推展。 In this example, the long rectangular welding pad 122' can be used as a terminal bus bar for welding a plurality of aluminum conductive bars 5', for example, a parallel circuit between a plurality of low-power high-power circuit elements 2' can be realized, To achieve the current output requirement equivalent to a high-power high-power circuit element, to reduce the current of each low-power high-power circuit element 2' and reduce the problem of heating, so that the cost can be reduced and the application range is wider. , which contributes to the market promotion of the product.

本例的高導熱陶瓷基板1’也可以應用在前述的熱電分離電路板上,其做法例如是在FR-4銅箔的印刷電路板8’上預先以雷射切割形成一尺寸略大於高導熱陶瓷基板1’的開口81’,然後以絕緣膠材82’將高導熱陶瓷基板1’鑲嵌在開口81’而與印刷電路板8’結合,再以銅導電條7’焊接在熔焊墊122’和印刷電路板8’上的焊接墊83’,以將高導熱陶瓷基板1’與印刷電路板8’電性連接以形成熱電分離電路板。 The high thermal conductivity ceramic substrate 1' of this example can also be applied to the above-mentioned thermoelectric separation circuit board. For example, a printed circuit board 8' of FR-4 copper foil is pre-cut by laser to form a size slightly larger than the high thermal conductivity. The opening 81' of the ceramic substrate 1', then the high thermal conductivity ceramic substrate 1' is embedded in the opening 81' with insulating glue 82' and combined with the printed circuit board 8', and then soldered to the welding pad 122 with copper conductive strips 7' ' and the solder pads 83' on the printed circuit board 8' to electrically connect the high thermal conductivity ceramic substrate 1' with the printed circuit board 8' to form a thermoelectrically separated circuit board.

當然,如熟悉本技術領域人士所能輕易理解,上述各實施例中的支撐保護接墊和均勻導熱接墊都不侷限於六角型設計,如圖8至10的第三及四實施例所示,亦可選擇為正方形支撐保護接墊140”、均勻導熱接墊 142”,或略呈長方形的支撐保護接墊140'''、均勻導熱接墊142''',或任何簡單幾何形狀,尤其如圖8及9所示,為避免陶瓷基板和接墊間因為材質的熱膨脹係數不一,無論是在製造安裝過程或未來使用過程,均可能因為受熱膨脹而導致介面剝離,此時,亦可將上述支撐保護接墊140”、均勻導熱接墊142”均採用階梯狀結構146”,藉以分散熱應力,亦均無礙於本發明之實施。 Of course, as can be easily understood by those skilled in the art, the support and protection pads and the uniform thermally conductive pads in the above embodiments are not limited to hexagonal designs, as shown in the third and fourth embodiments of FIGS. 8 to 10 . , can also be selected as square support pads 140", uniform thermal pads 142", or slightly rectangular support and protection pads 140"", uniform thermally conductive pads 142", or any simple geometry, especially as shown in Figures 8 and 9, in order to avoid the The thermal expansion coefficients of the materials are different. No matter in the manufacturing and installation process or the future use process, the interface may be peeled off due to thermal expansion. The step-like structure 146'' is used to disperse thermal stress, which does not hinder the implementation of the present invention.

綜上所述,本發明在垂直上述高度方向的投影面上全覆蓋上述熔焊墊的振盪穩定支撐保護接墊,可以防止陶瓷基板在超聲波振盪焊接時斷裂以及電路斷線;在上述高度方向對應於上述安裝墊的均勻導熱接墊,可以防止陶瓷基板和均勻導熱接墊翹曲變形甚至斷裂或剝落;以金屬焊接全面積熱連接均勻導熱接墊的金屬散熱器,可以對大功率電路元件提供更好的導熱;以及採取長條矩形熔焊墊做為端子匯流排可以更進一步降低大功率電路元件的溫升,擴大產品應用範圍;有效達成了本發明之上述目的。 To sum up, the present invention fully covers the vibration stable support protection pad of the welding pad on the projection plane perpendicular to the height direction, which can prevent the ceramic substrate from breaking and circuit disconnection during ultrasonic vibration welding; corresponding to the above height direction. The uniform thermal conductive pads used in the above mounting pads can prevent the ceramic substrate and the uniform thermal conductive pads from warping, deformed, or even broken or peeled off. Better heat conduction; and the use of long rectangular welding pads as terminal bus bars can further reduce the temperature rise of high-power circuit components and expand the scope of product application; effectively achieve the above objectives of the present invention.

惟以上所述者,僅為本發明之較佳實施例而已,不能以此限定本發明實施之範圍,凡是依本發明申請專利範圍及發明說明書內容所作之簡單的等效變化與修飾,皆應仍屬本發明專利涵蓋之範圍內。 However, the above are only the preferred embodiments of the present invention, which cannot limit the scope of the present invention. Any simple equivalent changes and modifications made according to the scope of the patent application of the present invention and the contents of the description of the invention should be It still falls within the scope of the patent of the present invention.

1:高導熱陶瓷基板 1: High thermal conductivity ceramic substrate

10:基板本體 10: Substrate body

102:設置面 102: Setting Faces

104:安裝散熱面 104: Install the cooling surface

12:電路層 12: circuit layer

122:熔焊墊 122: Fusion pad

124:安裝墊 124: Mounting pads

14:金屬散熱安裝塊 14: Metal cooling mounting block

140:支撐保護接墊 140: Support protection pad

142:均勻導熱接墊 142: Uniform thermal pad

16:間隙 16: Gap

17:超聲波振盪焊接設備 17: Ultrasonic Oscillation Welding Equipment

2:大功率電路元件 2: High-power circuit components

5:鋁導電條 5: Aluminum conductive strip

Claims (9)

一種具有保護接墊的高導熱陶瓷基板,供焊接設置至少一個工作電流達至少數十安培的大功率電路元件,以及該高導熱陶瓷基板是被導熱連結至一金屬散熱器,且該高導熱陶瓷基板包括:一基板本體,具有一設置面及在一高度方向相反於該設置面的安裝散熱面;至少一佈局於該基板本體上述設置面的電路層,前述電路層包括至少一個金屬材質供超聲波焊接的熔焊墊,以及至少一供上述大功率電路元件焊接的安裝墊;以及複數成形於上述基板本體上述安裝散熱面且彼此分別留有間隙地設置、供導熱連結至上述金屬散熱器的金屬散熱安裝塊;其中,在上述高度方向對應於上述熔焊墊的金屬散熱安裝塊,是至少一個在垂直上述高度方向的投影面上全覆蓋上述熔焊墊的振盪穩定的支撐保護接墊。 A high thermal conductivity ceramic substrate with protective pads, for welding at least one high-power circuit element with an operating current of at least tens of amperes, and the high thermal conductivity ceramic substrate is thermally connected to a metal heat sink, and the high thermal conductivity ceramic substrate The substrate includes: a substrate body with a setting surface and a mounting heat dissipation surface opposite to the setting surface in a height direction; at least one circuit layer arranged on the setting surface of the substrate body, and the circuit layer includes at least one metal material for ultrasonic waves Welded welding pads, and at least one mounting pad for soldering the above-mentioned high-power circuit components; and a plurality of metal formed on the above-mentioned mounting and heat-dissipating surfaces of the above-mentioned substrate body and respectively leaving a gap with each other for thermally connecting to the above-mentioned metal heat sink. A heat-dissipating mounting block; wherein, the metal heat-dissipating mounting block corresponding to the welding pad in the height direction is at least one vibration-stable support protection pad that fully covers the welding pad on a projection plane perpendicular to the height direction. 如申請專利範圍第1項所述的具有保護接墊的高導熱陶瓷基板,其中在上述高度方向對應於上述安裝墊的金屬散熱安裝塊,是至少一個在垂直上述高度方向的投影面上全覆蓋上述安裝墊的均勻導熱接墊。 The high thermal conductivity ceramic substrate with protective pads according to claim 1, wherein at least one metal heat dissipation mounting block corresponding to the mounting pad in the height direction is fully covered on the projection surface perpendicular to the height direction Uniform thermally conductive pads of the above mounting pads. 如申請專利範圍第1或2項所述的具有保護接墊的高導熱陶瓷基 板,其中上述振盪穩定支撐保護接墊是矩型。 High thermal conductivity ceramic base with protective pads as described in claim 1 or 2 The plate, wherein the above-mentioned oscillation stabilization support protection pads are rectangular. 如申請專利範圍第3項所述的具有保護接墊的高導熱陶瓷基板,其中上述金屬散熱安裝塊是高度大於60微米的銅層。 The high thermal conductivity ceramic substrate with protective pads according to claim 3, wherein the metal heat dissipation mounting block is a copper layer with a height greater than 60 microns. 一種大功率模組,包括:至少一個工作電流至少數十安培的大功率電路元件;一金屬散熱器;一供焊接設置上述大功率電路元件、並且導熱連接上述金屬散熱器的高導熱陶瓷基板,該高導熱陶瓷基板包括:一基板本體,具有一設置面及再一高度方向相反於該設置面的安裝散熱面;至少一佈局於該基板本體上述設置面的電路層,前述電路層包括至少一個金屬材質供超聲波焊接的熔焊墊,以及至少一供上述大功率電路元件焊接的安裝墊;以及複數成形於上述基板本體上述安裝散熱面且彼此間隔設置、供導熱連結至上述金屬散熱器的金屬散熱安裝塊;其中,在上述高度方向對應於上述熔焊墊的金屬散熱安裝塊,是至少一個在垂直上述高度方向的投影面上全覆蓋上述熔焊墊的振盪穩定支撐保護接墊。 A high-power module, comprising: at least one high-power circuit element with an operating current of at least tens of amperes; a metal radiator; a high-thermal-conductivity ceramic substrate for welding the high-power circuit element and thermally connected to the metal radiator, The high thermal conductivity ceramic substrate includes: a substrate body with a setting surface and another mounting heat dissipation surface whose height direction is opposite to the setting surface; at least one circuit layer arranged on the setting surface of the substrate body, and the circuit layer includes at least one Metal welding pads for ultrasonic welding, and at least one mounting pad for welding the above-mentioned high-power circuit components; and a plurality of metal formed on the above-mentioned mounting and heat-dissipating surfaces of the above-mentioned substrate body and spaced apart from each other for thermally connecting to the above-mentioned metal heat sink. A heat-dissipating mounting block; wherein, the metal heat-dissipating mounting block corresponding to the welding pad in the height direction is at least one vibration stable supporting protection pad that fully covers the welding pad on a projection plane perpendicular to the height direction. 如申請專利範圍第5項所述的大功率模組,其中在上述高度方向 對應於上述安裝墊的金屬散熱安裝塊,是至少一個在垂直上述高度方向的投影面上全覆蓋上述安裝墊的均勻導熱接墊。 The high-power module according to claim 5, wherein in the above-mentioned height direction The metal heat-dissipating mounting block corresponding to the mounting pad is at least one uniform heat-conducting pad that fully covers the mounting pad on a projection plane perpendicular to the height direction. 如申請專利範圍第5或6項所述的大功率模組,其中上述振盪穩定支撐保護接墊是矩型。 The high-power module according to claim 5 or 6, wherein the above-mentioned vibration-stabilizing support and protection pads are rectangular. 如申請專利範圍第7項所述的大功率模組,其中上述大功率電路元件是一電源管理積體電路。 The high-power module of claim 7, wherein the high-power circuit element is a power management integrated circuit. 如申請專利範圍第5或6項所述的大功率模組,更包括複數分別由超聲波熔接至上述振盪穩定支撐保護接墊和上述大功率電路元件的高電流金屬導電條。 The high-power module as described in claim 5 or 6 of the claimed scope further comprises a plurality of high-current metal conductive strips welded to the above-mentioned oscillation stable support protection pad and the above-mentioned high-power circuit element respectively by ultrasonic welding.
TW109132198A 2020-03-27 2020-03-27 High thermal conductivity ceramic substrate with protective pad and high-power module with the same TWI765352B (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201131713A (en) * 2010-03-15 2011-09-16 Tsung-Hsien Lin Electronic assembly
TW201212306A (en) * 2010-09-10 2012-03-16 Ho Cheng Ind Co Ltd LED heat-conduction substrate and heat-dissipation module structure
TW201438155A (en) * 2013-07-16 2014-10-01 King Dragon Internat Inc Semiconductor device package with slanting structures
TW201829108A (en) * 2016-12-14 2018-08-16 日商新川股份有限公司 Wire bonding device and wire bonding method
TWM595383U (en) * 2020-01-22 2020-05-11 英屬維京群島商艾格生科技股份有限公司 A heat dissipation type electronic device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201131713A (en) * 2010-03-15 2011-09-16 Tsung-Hsien Lin Electronic assembly
TW201212306A (en) * 2010-09-10 2012-03-16 Ho Cheng Ind Co Ltd LED heat-conduction substrate and heat-dissipation module structure
TW201438155A (en) * 2013-07-16 2014-10-01 King Dragon Internat Inc Semiconductor device package with slanting structures
TW201829108A (en) * 2016-12-14 2018-08-16 日商新川股份有限公司 Wire bonding device and wire bonding method
TWM595383U (en) * 2020-01-22 2020-05-11 英屬維京群島商艾格生科技股份有限公司 A heat dissipation type electronic device

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