TW202137422A - High-thermal-conductivity ceramic substrate with protective connecting pad and high-power module including the substrate connecting the high-thermal-conductivity ceramic substrate to a metal heat radiator in a heat conducting manner - Google Patents

High-thermal-conductivity ceramic substrate with protective connecting pad and high-power module including the substrate connecting the high-thermal-conductivity ceramic substrate to a metal heat radiator in a heat conducting manner Download PDF

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TW202137422A
TW202137422A TW109132198A TW109132198A TW202137422A TW 202137422 A TW202137422 A TW 202137422A TW 109132198 A TW109132198 A TW 109132198A TW 109132198 A TW109132198 A TW 109132198A TW 202137422 A TW202137422 A TW 202137422A
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pad
mounting
thermal
ceramic substrate
welding
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TWI765352B (en
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余河潔
廖陳正龍
林俊佑
安正 黃
陳昆賜
梁榮華
詹雅惠
楊奇樺
黃孝登
王敬文
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璦司柏電子股份有限公司
大陸商上海釗輝科技有限公司
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Abstract

A high-thermal-conductivity ceramic substrate with a protective connecting pad is provided for receiving at least one high-power circuit component welded and mounted thereto. The high-thermal-conductivity ceramic substrate is connected to a metal heat radiator in a heat conducting manner. The high-thermal-conductivity ceramic substrate includes a substrate body having a setting surface and a mounting and heat radiating surface opposite to the setting surface in a height direction; at least one circuit layer disposed on the setting surface of the substrate body, wherein the circuit layer includes at least one metal fusion-welding pad for ultraviolet welding and at least one mounting pad for welding the high-power circuit component; and a plurality of metal heat radiating and mounting blocks formed on the mounting and heat radiating surface of the substrate body and spaced from each other and connected with the metal heat radiator in a heat conducting manner, wherein each of the metal heat radiating and mounting blocks includes at least one supportive and protective connecting pad which fully covers the fusion-welding pads on a projection surface vertical to the height direction and stably vibrates.

Description

具有保護接墊的高導熱陶瓷基板及具該基板的大功率模組 High thermal conductivity ceramic substrate with protective pad and high-power module with the substrate

一種高導熱陶瓷基板,尤其是一種具有特殊結構設計的保護接墊的高導熱陶瓷基板。 A high thermal conductivity ceramic substrate, in particular a high thermal conductivity ceramic substrate with a protective pad with a special structure design.

隨著環保意識的推廣,空污問題被媒體廣泛報導使得越來越多消費者選擇以電動交通工具取代內燃機為動力的傳統交通工具,例如以電動機車取代二行程機車以及以電動房車取代傳統汽車,而這些電動交通工具都依賴大功率的電動馬達以提供動力,因此市場對於大功率的電力控制元件的需求非常殷切,也引起各大供應商競相投入研發,例如日商瑞薩電子(Renesas Electronics)宣布推出100安培大電流功率金屬氧化物半導體場效電晶體(MOSFET),適用於消費性產品中的馬達驅動器,如無線電動工具及動力輔助自行車。 With the promotion of environmental protection awareness, the issue of air pollution has been widely reported by the media, making more and more consumers choose electric vehicles instead of traditional vehicles powered by internal combustion engines, such as electric vehicles instead of two-stroke locomotives and electric motorhomes instead of traditional cars , And these electric vehicles rely on high-power electric motors to provide power. Therefore, the market has a very strong demand for high-power power control components, which has also caused major suppliers to rush to invest in research and development, such as Renesas Electronics (Renesas Electronics). ) Announced the launch of 100 ampere high-current power metal oxide semiconductor field effect transistors (MOSFETs), suitable for motor drives in consumer products, such as wireless power tools and power assisted bicycles.

上述大功率元件消耗的能量大一方面代表電流效率較高,但是大功率元件自身帶有內電阻且工作電流大,因此有一定比例的電能會被轉換為熱能也是不可避免的。如果無法盡快將大功率元件的熱能逸散,高發熱元件所產生的熱能將會積聚在靠近大功率元件的附近,使得高發熱元件的運作環境非常不理想而影響其工作效能。目前比較被普遍採行的解決方案是使用陶瓷材料做為電路基板的絕緣材料層,陶瓷基板做為電路板的 一種,其具有與半導體接近的熱膨脹係數及高耐熱能力,尤其相較於傳統例如FR4等材質的電路基板,具有良好的導熱係數,適用於具備高發熱量的產品,而且其高硬度、加工性好、尺寸精度高、高絕緣電阻、和極強的電路圖形附著力,加上材料來源豐富容易取得,因此成為用以配置大功率元件的印刷電路的基板的首選。 The large amount of energy consumed by the above-mentioned high-power components represents higher current efficiency. However, the high-power components themselves have internal resistances and large operating currents. Therefore, it is inevitable that a certain proportion of electrical energy will be converted into thermal energy. If the heat energy of the high-power components cannot be dissipated as quickly as possible, the heat generated by the high-heating components will accumulate in the vicinity of the high-power components, making the operating environment of the high-heating components very unsatisfactory and affecting their working performance. At present, the more commonly adopted solution is to use ceramic materials as the insulating material layer of the circuit board, and the ceramic substrate as the circuit board One type, which has a thermal expansion coefficient close to that of semiconductors and high heat resistance, especially compared to traditional circuit substrates such as FR4, has good thermal conductivity, is suitable for products with high calorific value, and has high hardness and good processability , High dimensional accuracy, high insulation resistance, and strong circuit pattern adhesion, coupled with abundant sources of materials and easy to obtain, it has become the first choice for printed circuit substrates used to configure high-power components.

最常見的陶瓷材料有氧化鋁(Aluminum Oxide,Al2O3)製成的直接覆銅(Direct Bonded Copper,DBC)基板,其中,氧化鋁在單晶結構下導熱係數可達35Wm-1K-1,多晶結構下則有20至27Wm-1K-1。其他常見的陶瓷材料基板,還有:氮化鋁(AlN)、氧化鈹(BeO)及碳化矽(SiC)等。由於上述導熱性能良好的陶瓷材料常用在有高功率電子元件的電路基板中,因此該類基板有時又稱作高功率印刷電路基板(Power Electronic Substrate)。 The most common ceramic materials are Direct Bonded Copper (DBC) substrates made of aluminum oxide (Al2O3). Among them, the thermal conductivity of aluminum oxide can reach 35Wm -1 K -1 under a single crystal structure. There are 20 to 27 Wm -1 K -1 under the crystal structure. Other common ceramic substrates include aluminum nitride (AlN), beryllium oxide (BeO), and silicon carbide (SiC). Since the above-mentioned ceramic materials with good thermal conductivity are commonly used in circuit substrates with high-power electronic components, this type of substrate is sometimes referred to as a high-power printed circuit substrate (Power Electronic Substrate).

鋁導電條在空氣中會與氧反應很快生成氧化膜,能防止進一步氧化,所以鋁導電條是大功率元件引刷電路常用的打線材料。然而,因為鋁的氧化活性強故在高溫焊接時表面會快速生成氧化層而無法與焊錫連接,因此傳統的熱電焊法是無法將鋁導電條焊接在銅質的熔焊墊上,如圖1所示,一般是採用例如超聲波振盪焊接設備84將鋁導電條85和熔焊墊86焊接。然而相較於傳統FR-4塑膠基板,陶瓷的基板本體87硬且脆非常容易在超音波震盪時破裂而造成電路斷線的問題,因此製造的量率一直難以提高直接降低了產能和提高了成本。 Aluminum conductive strips will quickly react with oxygen in the air to form an oxide film, which can prevent further oxidation. Therefore, aluminum conductive strips are commonly used wire bonding materials for high-power component brush-drawing circuits. However, because of the strong oxidation activity of aluminum, an oxide layer is quickly formed on the surface during high temperature welding and cannot be connected to the solder. Therefore, the traditional thermoelectric welding method cannot weld the aluminum conductive strip to the copper welding pad, as shown in Figure 1. As shown, generally, the aluminum conductive strip 85 and the welding pad 86 are welded by using, for example, an ultrasonic vibration welding device 84. However, compared with the traditional FR-4 plastic substrate, the ceramic substrate body 87 is hard and brittle, and it is very easy to break during ultrasonic vibration and cause circuit disconnection. Therefore, the manufacturing rate has been difficult to increase, which directly reduces the production capacity and improves cost.

此外,雖然大功率元件可以很容易經由焊錫焊接在佈局在陶瓷基板表面的焊墊上,但是容易產生過多的熱能聚積,由於印刷電路板和 電路元件間的熱膨脹係數不一,金屬銅與鋁的熱膨脹係數為16.5與23ppm/K,而陶瓷材料氧化鋁、氮化鋁與氮化矽大約分別是7、4.5與3.5ppm/K,當陶瓷基板與結合的金屬層熱膨脹係數差異過大時,在高溫的焊接環境或運作環境下反覆經熱脹冷縮,導熱接墊90的膨脹量會大於基板本體87的膨脹量,導致導熱接墊90的銅層會翹曲變形金屬及陶瓷基板之間的界面容易產生破裂、翹曲或變形剝離的問題,也勢必會造成因熱應力而讓接點產生受損的風險,通常需要高效率的散熱手段才能有效解決熱能積蓄的問題。 In addition, although high-power components can be easily soldered on the pads laid out on the surface of the ceramic substrate by soldering, they are prone to excessive heat accumulation due to the printed circuit board and The thermal expansion coefficients of circuit components are different. The thermal expansion coefficients of metal copper and aluminum are 16.5 and 23 ppm/K, while the ceramic materials alumina, aluminum nitride and silicon nitride are about 7, 4.5 and 3.5 ppm/K, respectively. When the thermal expansion coefficient difference between the substrate and the bonded metal layer is too large, the thermally conductive pad 90 will expand more than the substrate body 87 due to repeated thermal expansion and contraction in a high-temperature welding environment or operating environment, resulting in a thermally conductive pad 90 The copper layer will warp and deform. The interface between the metal and the ceramic substrate is prone to cracking, warping or deformation and peeling. It will also inevitably cause the risk of damage to the contacts due to thermal stress. Generally, efficient heat dissipation means are required. In order to effectively solve the problem of thermal energy accumulation.

為此,目前常用的方法有以下幾種:一是在大功率電路元件和其他電路元件之間配置大範圍空置空間,經由熱對流或是熱輻射將所發出的熱能逸散至印刷電路板周圍的空氣及環境,但此種散熱效率並不高;二是如圖2的大功率組件88中在上述焊接有大功率電路元件89的陶瓷的基板本體87的背面鋪設例如銅質導熱接墊90,再透過導熱膠91等材料熱連結導熱性質更好的金屬散熱器92(Heat-Sink)而將大功率電路元件89發出的熱能傳導逸散,但是因為銅的熱膨脹係數遠大於陶瓷基板,此種做法會導致基板本體87翹曲變形甚至斷裂,而導熱接墊90也會翹曲變形甚至剝落造成散熱效率低落,而且導熱膠91本身的導熱係數遠低於金屬,因此即使在金屬散熱器92遠離產熱電子元件的遠端加裝風扇,金屬導熱器的92導熱效果也會大打折扣。 To this end, currently commonly used methods are as follows: One is to configure a large range of vacant spaces between high-power circuit components and other circuit components, and dissipate the emitted heat energy to the periphery of the printed circuit board through thermal convection or thermal radiation. The heat dissipation efficiency is not high in the air and environment. Second, in the high-power component 88 as shown in FIG. , And then through the thermally conductive adhesive 91 and other materials to thermally connect the metal heat sink 92 (Heat-Sink) with better thermal conductivity to conduct and dissipate the thermal energy emitted by the high-power circuit element 89, but because the thermal expansion coefficient of copper is much greater than that of the ceramic substrate, this This method will cause the substrate body 87 to warp, deform or even break, and the thermal conductive pad 90 will also warp, deform or even peel off, resulting in low heat dissipation efficiency, and the thermal conductivity of the thermal conductive glue 91 itself is much lower than that of metal, so even in the metal heat sink 92 If a fan is installed at the far end away from the heat-generating electronic components, the heat conduction effect of the metal heat spreader will be greatly reduced.

此外,一般在焊接有大功率元件的導熱電路板背面,經常會透過例如濺鍍等方式,在背面長一層例如銅層做為導熱接墊90,藉此跟同樣是例如銅材質的金屬散熱器92妥善結合,而將大功率電路元件89發出的熱能傳導逸散。因此,一般規劃是在陶瓷的基板本體87的正面,形成包含 供焊接大功率電路元件89的安裝墊93和焊接鋁導電條85的熔焊墊86;藉此形成高導熱陶瓷基板98,讓大功率元件發熱能由金屬散熱器92導出。 In addition, generally on the back of a thermally conductive circuit board with high-power components soldered, a layer of copper, such as a copper layer, is often grown on the back as a thermally conductive pad 90 through methods such as sputtering, so as to be similar to a metal heat sink made of copper, for example. 92 is properly combined, and the thermal energy emitted by the high-power circuit element 89 is conducted and dissipated. Therefore, the general plan is to form the front surface of the ceramic substrate body 87, which contains The mounting pad 93 for welding the high-power circuit element 89 and the welding pad 86 for welding the aluminum conductive strip 85 are used to form a high-thermal-conductivity ceramic substrate 98 so that the heat of the high-power element can be derived from the metal heat sink 92.

請參閱圖2,為克服此問題,申請人進一步將整片的銅層,區隔為面積更小且彼此些微的間隙94的多片例如六角形的銅層區塊95,一方面仍然可以讓上方的陶瓷基板和下方的鰭片型金屬散熱器保持良好的結合與導熱接觸,另方面可以在銅層區塊95熱脹冷縮時,藉由些微的間隙94作為類似橋樑或鐵軌伸縮縫的緩衝區,使得銅層區塊95和陶瓷間的熱膨脹差異不會造成翹區剝落等結構損壞。 Please refer to Figure 2. In order to overcome this problem, the applicant further divides the entire copper layer into multiple pieces of smaller area and a slight gap 94, such as hexagonal copper layer blocks 95. On the one hand, it can still be The upper ceramic substrate and the lower fin-shaped metal heat sink maintain good bonding and thermal contact. On the other hand, when the copper layer block 95 expands and shrinks, the slight gap 94 can be used as a bridge or rail expansion joint. The buffer zone prevents the thermal expansion difference between the copper layer block 95 and the ceramic from causing structural damage such as peeling of the warped area.

然而,當銅層區塊95的各自尺寸過小時,由於超聲波振盪焊接設備84進行超聲波振盪焊接時,對應於上述些微的間隙94處的基板本體87將缺乏銅層區塊95的下方支撐,因而非常容易在超聲波振盪和溫升的協同作用下產生些微破裂狹縫,甚至造成電路斷路的問題,因此製造的良率一直難以提高,直接限制產能並使成本居高不下。而大功率電路元件89下方的間隙94處,也因缺少了銅層區塊95的直接散熱,使得大功率電路元件89發出的熱能在間隙94周遭積聚,無法充分發散。 However, when the respective sizes of the copper layer blocks 95 are too small, because the ultrasonic oscillation welding equipment 84 performs ultrasonic oscillation welding, the substrate body 87 corresponding to the above-mentioned slight gap 94 will lack support under the copper layer blocks 95, and thus It is very easy to produce slight cracking slits under the synergistic effect of ultrasonic oscillation and temperature rise, and even cause the problem of circuit disconnection. Therefore, the yield rate of manufacturing has been difficult to increase, which directly limits the production capacity and keeps the cost high. The gap 94 under the high-power circuit element 89 also lacks the direct heat dissipation of the copper layer block 95, so that the heat generated by the high-power circuit element 89 accumulates around the gap 94 and cannot be fully dissipated.

尤其如圖3所示,申請人更擅長將例如FR-4等多層印刷電路板96中預先形成略大於陶瓷基板的尺寸的開口97,然後以絕緣膠材99固化黏著將高導熱陶瓷基板98鑲嵌在該開口97,再把用來驅動或控制大功率電路元件89的其餘低電流電路和相關元件,以高密度和高複雜度的結構設置於FR4的電路板上,並和陶瓷基板上的電路相互導接,形成特殊的複合電路板。 Especially as shown in Figure 3, the applicant is better at pre-forming an opening 97 slightly larger than the size of the ceramic substrate in a multilayer printed circuit board 96 such as FR-4, and then solidify and adhere the high thermal conductivity ceramic substrate 98 with an insulating glue 99 In the opening 97, the remaining low-current circuits and related components used to drive or control the high-power circuit components 89 are arranged on the FR4 circuit board in a high-density and high-complexity structure, and are connected to the circuit on the ceramic substrate. Connect each other to form a special composite circuit board.

此種結構的電路板被稱為熱電分離電路板,一方面可以將大 功率電路元件89發出的大量熱能先縱向地經由基板本體87及圖式下方的金屬散熱器攜出,避免FR-4銅箔印刷電路板96中的其他電路元件受到大功率電路元件89發出的大量熱能的影響;另方面,複雜的電路設計也不需要遷就陶瓷基板的簡單結構,可以在多層板中盡情發揮,盡量微型化,並且節約相對昂貴的陶瓷基板用料。 The circuit board of this structure is called a thermoelectric separation circuit board, on the one hand, it can be large The large amount of heat energy emitted by the power circuit element 89 is first carried out longitudinally through the substrate body 87 and the metal heat sink below the figure to prevent other circuit elements in the FR-4 copper foil printed circuit board 96 from being emitted by the high-power circuit element 89. The influence of thermal energy; on the other hand, complex circuit design does not need to accommodate the simple structure of the ceramic substrate. It can be fully utilized in the multilayer board, miniaturized as much as possible, and relatively expensive ceramic substrate materials are saved.

因此,如何一方面在超聲波焊接時保護硬且脆的陶瓷的基板本體不致破裂,以及改善導熱接墊和陶瓷基板的翹曲變形,同時確保金屬散熱器和導熱接墊良好的熱連接,就是本案所要達到的目的。 Therefore, how to protect the hard and brittle ceramic substrate body from cracking during ultrasonic welding, improve the warpage deformation of the thermal conductive pad and the ceramic substrate, and at the same time ensure a good thermal connection between the metal heat sink and the thermal conductive pad, is this case The purpose to be achieved.

本發明之一目的在提供一種具有保護接墊的高導熱陶瓷基板,能夠在以超聲波振盪焊接鋁導電條時,大幅降低陶瓷基板破裂的風險,有效提升產品良率。 An object of the present invention is to provide a high thermal conductivity ceramic substrate with protective pads, which can greatly reduce the risk of cracking of the ceramic substrate when welding aluminum conductive strips by ultrasonic oscillation, and effectively improve the product yield.

本發明之另一目的在提供一種具有保護接墊的高導熱陶瓷基板,供在大功率電路元件工作時充分散熱而避免陶瓷基板背面的均勻導熱接墊翹曲變形或破裂。 Another object of the present invention is to provide a highly thermally conductive ceramic substrate with protective pads for sufficient heat dissipation when high-power circuit components are in operation, so as to avoid warping, deformation or cracking of the uniform thermally conductive pads on the back of the ceramic substrate.

本發明之又一目的在提供一種具有保護接墊的高導熱陶瓷基板的大功率模組,可以提高均勻導熱接墊和金屬散熱鰭片之間的導熱效率,讓大功率元件發出的熱能更快逸散而不積聚,以提高其工作效率。 Another object of the present invention is to provide a high-power module with a high thermal conductivity ceramic substrate with protective pads, which can improve the thermal conductivity between the uniform thermal pads and the metal heat sink fins, so that the high-power components can emit heat faster Dissipate without accumulating to improve its work efficiency.

為達上述目的,本發明揭露一種具有保護接墊的高導熱陶瓷基板,供焊接設置至少一個工作電流達數十安培的大功率電路元件,以及該高導熱陶瓷基板是被導熱連結至一金屬散熱器,且該高導熱陶瓷基板包括:一基板本體,具有一設置面及在一高度方向相反於該設置面的安裝散 熱面;至少一佈局於該基板本體上述設置面的電路層,前述電路層包括至少一個金屬材質供超聲波焊接的熔焊墊,以及至少一供上述大功率電路元件焊接的安裝墊;以及複數成形於上述基板本體上述安裝散熱面且彼此間隔設置、供導熱連結至上述金屬散熱器的金屬散熱安裝塊;其中,在上述高度方向對應於上述熔焊墊的金屬散熱安裝塊,是至少一個在垂直上述高度方向的投影面上全覆蓋上述熔焊墊的振盪穩定的支撐保護接墊。以及至少一個在垂直上述高度方向的投影面上全覆蓋上述安裝墊的均勻導熱接墊。 To achieve the above objective, the present invention discloses a high thermal conductivity ceramic substrate with protective pads for soldering to set at least one high-power circuit element with a working current of tens of amperes, and the high thermal conductivity ceramic substrate is thermally connected to a metal heat sink. The high thermal conductivity ceramic substrate includes: a substrate body with a mounting surface and a mounting surface opposite to the mounting surface in a height direction Hot surface; at least one circuit layer arranged on the above-mentioned setting surface of the substrate body, the aforementioned circuit layer includes at least one metal material for ultrasonic welding welding pad, and at least one mounting pad for welding the above-mentioned high-power circuit components; and plural shapes Metal heat-dissipating mounting blocks arranged on the mounting and heat-dissipating surfaces of the substrate body and spaced apart from each other for thermally connecting to the metal heat sink; wherein the metal heat-dissipating mounting blocks corresponding to the welding pad in the height direction are at least one vertical The projection surface in the height direction is fully covered with the oscillation stable support and protection pad of the welding pad. And at least one uniform heat conducting pad that fully covers the mounting pad on the projection surface perpendicular to the height direction.

當把包括一金屬散熱器安裝於上具有保護接墊的高導熱陶瓷基板,就可以構成本發明的一種大功率模組,其包括:至少一個工作電流達數十安培的大功率電路元件;一金屬散熱器;一供焊接設置上述大功率電路元件、並且導熱連接上述金屬散熱器的高導熱陶瓷基板,該高導熱陶瓷基板包括:一基板本體,具有一設置面及在一高度方向相反於該設置面的安裝散熱面;至少一佈局於該基板本體上述設置面的電路層,前述電路層包括至少一個金屬材質供超聲波焊接的熔焊墊,以及至少一供上述大功率電路元件焊接的安裝墊;以及複數成形於上述基板本體上述安裝散熱面且彼此間隔設置、供導熱連結至上述金屬散熱器的金屬散熱安裝塊;其中,在上述高度方向對應於上述熔焊墊的金屬散熱安裝塊,是至少一個在垂直上述高度方向的投影面上全覆蓋上述熔焊墊的振盪穩定的支撐保護接墊。以及至少一個在垂直上述高度方向的投影面上全覆蓋上述安裝墊的均勻導熱接墊。 When a metal heat sink is installed on a high thermal conductivity ceramic substrate with protective pads, a high-power module of the present invention can be constructed, which includes: at least one high-power circuit element with a working current of several tens of amperes; A metal heat sink; a high thermal conductivity ceramic substrate for soldering the high-power circuit components and thermally connecting the metal heat sink, the high thermal conductivity ceramic substrate includes: a substrate body with a setting surface and a height direction opposite to the The mounting surface of the mounting surface; at least one circuit layer arranged on the mounting surface of the substrate body, the aforementioned circuit layer includes at least one metal welding pad for ultrasonic welding, and at least one mounting pad for welding the above-mentioned high-power circuit components And a plurality of metal heat dissipation mounting blocks formed on the mounting heat dissipation surface of the substrate body and spaced apart from each other for thermally conductive connection to the metal heat sink; wherein, the metal heat dissipation mounting blocks corresponding to the welding pad in the height direction are At least one support and protection pad that fully covers the welding pad on the projection surface perpendicular to the height direction and is stable in oscillation. And at least one uniform heat conducting pad that fully covers the mounting pad on the projection surface perpendicular to the height direction.

本發明在陶瓷基板的基板本體的安裝散熱面設置彼此間隔 的金屬散熱安裝塊,其包含了:藉由在垂直上述高度方向的投影面上全覆蓋上述熔焊墊的振盪穩定的支撐保護接墊,來防止陶瓷基板在超聲波振盪焊接時斷裂以及電路受損;以及藉由在上述高度方向對應於上述安裝墊的均勻導熱接墊,來防止陶瓷基板和均勻導熱接墊翹曲變形甚至斷裂,更藉由下方均勻導熱接墊的完整披覆,讓大功率電路元件所發的熱,可以被順暢有效地導出至陶瓷基板下方的散熱器,藉此確保操作環境的適當溫度,有效確保工作效能和使用壽命。 In the present invention, the mounting and heat dissipation surfaces of the substrate body of the ceramic substrate are arranged to be spaced apart from each other The metal heat-dissipating mounting block includes: by covering the welding pad on the projection surface perpendicular to the height direction, the oscillation stable support and protection pad is used to prevent the ceramic substrate from breaking and circuit damage during ultrasonic oscillation welding ; And by the uniform thermal pads corresponding to the mounting pads in the above height direction, to prevent the ceramic substrate and uniform thermal pads from warping and deforming or even breaking, moreover, by covering the uniform thermal pads below, high power The heat generated by the circuit components can be smoothly and effectively discharged to the radiator under the ceramic substrate, thereby ensuring the proper temperature of the operating environment, and effectively ensuring the working efficiency and service life.

1、1’、98:高導熱陶瓷基板 1, 1’, 98: High thermal conductivity ceramic substrate

10、10’、87:基板本體 10, 10’, 87: Substrate body

102:設置面 102: Set the surface

104:安裝散熱面 104: Install the cooling surface

12:電路層 12: Circuit layer

122、122’、86:熔焊墊 122, 122’, 86: Welding pad

124、124’、93:安裝墊 124, 124’, 93: Mounting pad

14、14’:金屬散熱安裝塊 14, 14’: Metal heat-dissipating mounting block

140、140’、140”、140''':支撐保護接墊 140, 140’, 140”, 140''': Support and protection pads

142、142’、142”、142''':均勻導熱接墊 142, 142’, 142”, 142''': uniform thermal pad

144’:其餘金屬散熱安裝塊 144’: Other metal heat dissipation installation blocks

146”:階梯狀結構 146": Stepped structure

16、16’、94:間隙 16, 16’, 94: gap

17、84:超聲波振盪焊接設備 17, 84: Ultrasonic vibration welding equipment

2、2’、89:大功率電路元件 2, 2’, 89: High-power circuit components

3、92:金屬散熱器 3.92: Metal radiator

5、5’、85:鋁導電條 5. 5’, 85: Aluminum conductive strip

7’:銅導電條 7’: Copper conductive strip

8’、96:印刷電路板 8’, 96: printed circuit board

81’、97:開口 81’, 97: opening

82’、99:絕緣膠材 82’, 99: insulating rubber material

83’:焊接墊 83’: Welding pad

88:大功率組件 88: High-power components

9:大功率模組 9: High-power module

90:導熱接墊 90: Thermally conductive pad

91:導熱膠 91: Thermal conductive glue

95:銅層區塊 95: Copper layer block

圖1為一先前技術的大功率模組的側視示意圖。 FIG. 1 is a schematic side view of a prior art high-power module.

圖2為一先前技術的大功率模組的超聲波焊接側視示意圖。 Fig. 2 is a schematic side view of ultrasonic welding of a prior art high-power module.

圖3為一先前技術的高導熱陶瓷基板的俯視示意圖。 FIG. 3 is a schematic top view of a prior art high thermal conductivity ceramic substrate.

圖4為本發明具有保護接墊的高導熱陶瓷基板之第一較佳實施例的側視示意圖,說明支撐保護接墊和熔焊墊的對應形狀關係,以及均勻導熱接墊和安裝墊的對應形狀關係。 4 is a schematic side view of the first preferred embodiment of the high thermal conductivity ceramic substrate with protective pads of the present invention, illustrating the corresponding shape relationship between the supporting protective pads and the welding pads, and the corresponding uniform thermal pads and mounting pads Shape relationship.

圖5為本發明具有保護接墊的高導熱陶瓷基板之第一較佳實施例的俯視示意圖。 5 is a schematic top view of the first preferred embodiment of the high thermal conductivity ceramic substrate with protective pads of the present invention.

圖6為本發明具有保護接墊的高導熱陶瓷基板大功率模組側視示意圖。 6 is a schematic side view of a high-power module with a high thermal conductivity ceramic substrate with protective pads according to the present invention.

圖7為本發明具有保護接墊的高導熱陶瓷基板之第二較佳實施例的俯視示意圖。 FIG. 7 is a schematic top view of the second preferred embodiment of the high thermal conductivity ceramic substrate with protective pads according to the present invention.

圖8為本發明具有保護接墊的高導熱陶瓷基板之第三較佳實施例的仰視示意圖,說明支撐保護接墊和均勻導熱接墊的階梯狀設計。 FIG. 8 is a bottom view of the third preferred embodiment of the high thermal conductivity ceramic substrate with protective pads of the present invention, illustrating the stepped design of the supporting protective pads and uniform thermal conductive pads.

圖9是圖8實施例的側視示意圖。 Fig. 9 is a schematic side view of the embodiment of Fig. 8.

圖10是本發明具有保護接墊的高導熱陶瓷基板之第四較佳實施例的仰視示意圖。 10 is a schematic bottom view of the fourth preferred embodiment of the high thermal conductivity ceramic substrate with protective pads of the present invention.

有關本發明之前述及其他技術內容、特點與功效,在以下配合參考圖式之較佳實施例的詳細說明中,將可清楚呈現;此外,在各實施例中,相同之元件將以相似之標號表示。 The foregoing and other technical contents, features and effects of the present invention will be clearly presented in the following detailed description of the preferred embodiments with reference to the drawings; in addition, in each embodiment, the same elements will be similar The label indicates.

本發明一種具有保護接墊的高導熱陶瓷基板及具該基板的大功率模組之第一較佳實施例,如圖4至圖5所示,高導熱陶瓷基板1包含一例如是氮化鋁材質的基板本體10、電路層12和例釋為多個彼此形成有間隙的銅質導熱墊,在此定義為金屬散熱安裝塊14,金屬散熱安裝塊14較佳高度是大於60微米(micro-meter,μm)最佳厚度是150微米。電路層12是設置在基板本體10上方的設置面102,且為配合多個大功率電路元件的設置,本例中也設置有多個熔焊墊122和安裝墊124。在基板本體10的相反側面,則定義為安裝散熱面104,且基板本體10板厚的方向定義為高度方向。 The present invention is a first preferred embodiment of a high-thermal-conductivity ceramic substrate with protective pads and a high-power module with the substrate. As shown in FIGS. 4 to 5, the high-thermal-conductivity ceramic substrate 1 includes a ceramic substrate, such as aluminum nitride. The substrate body 10, the circuit layer 12, and a plurality of copper thermal pads with gaps formed with each other are exemplified by the material of the substrate body 10, which is defined as the metal heat dissipation mounting block 14. The preferred height of the metal heat dissipation mounting block 14 is greater than 60 microns (micro- meter, μm) The optimal thickness is 150 microns. The circuit layer 12 is arranged on the installation surface 102 above the substrate body 10, and to match the arrangement of a plurality of high-power circuit components, a plurality of welding pads 122 and mounting pads 124 are also provided in this example. The opposite side surface of the substrate body 10 is defined as the mounting heat dissipation surface 104, and the thickness direction of the substrate body 10 is defined as the height direction.

高導熱陶瓷基板1的製作方法,例如是先在基板本體10的設置面102和安裝散熱面104以濺鍍法全面形成銅質金屬層,再以光刻法分別在高導熱陶瓷基板1的設置面102去除部分不需導通的區域而形成電路層12,以及在安裝散熱面104形成彼此具有間隙的金屬散熱安裝塊14,上述兩者均可視情況需要再以電鍍或類似方式增厚。當然,熟悉本技術領域人士也可以採用濺鍍以外的類似方式構成上述兩面的電路層和金屬散熱安裝塊。 The manufacturing method of the high thermal conductivity ceramic substrate 1 is, for example, firstly forming a copper metal layer on the installation surface 102 and the mounting heat dissipation surface 104 of the substrate body 10 by sputtering, and then respectively install the copper metal layer on the high thermal conductivity ceramic substrate 1 by photolithography. A portion of the surface 102 that does not need to be connected is removed to form the circuit layer 12, and a metal heat-dissipating mounting block 14 with a gap between each other is formed on the mounting heat-dissipating surface 104, both of which can be thickened by electroplating or the like as necessary. Of course, those skilled in the art can also use similar methods other than sputtering to form the above-mentioned two-sided circuit layers and metal heat-dissipating mounting blocks.

接著將至少一個工作電流達數十安培以上的大功率電路元件2的底部電極焊接在安裝墊124上,大功率電路元件2例如是德商英飛凌科技公司(Infineon Technologies AG)所因應電動房車以及軌道列車的應用所出品、30-80kW功率級電流高達160安培的IGBT型AUIRGPS 4067 D1電源管理積體電路(power management IC),然後以超聲波振盪焊接設備17將本例中的多條彼此併聯的鋁導電條5,逐一將一端焊接在熔焊墊122上、另一端則同樣逐一焊接在大功率電路元件2的頂部電極上。本例中,由於數十安培的電流若行經單一金屬導電條,仍會因些微電阻而造成莫大的熱干擾,再考量陶瓷基板的空間節約,必須讓各導電條以大致同心的方式內外排列。 Next, solder the bottom electrode of at least one high-power circuit component 2 with a working current of more than tens of amperes on the mounting pad 124. The high-power circuit component 2 is, for example, an electric motorhome produced by Infineon Technologies AG. And the IGBT type AUIRGPS 4067 D1 power management integrated circuit (power management IC) produced by the application of the rail train, 30-80kW power level current up to 160 amperes, and then use the ultrasonic oscillation welding equipment 17 to connect the multiple in this example in parallel with each other One end of the aluminum conductive strip 5 is welded to the welding pad 122 one by one, and the other end is also welded to the top electrode of the high-power circuit element 2 one by one. In this example, if a current of tens of amperes passes through a single metal conductive strip, it will still cause great thermal interference due to some micro-resistance. In addition, considering the space saving of the ceramic substrate, the conductive strips must be arranged approximately concentrically inside and outside.

其中,上述金屬散熱安裝塊中,最特殊的在於其中有振盪穩定的支撐保護接墊140,此處所稱的支撐保護接墊140是在垂直於上述高度方向的投影面上、對應於熔焊墊122位置而設置的,尤其是支撐保護接墊140的面積不小於熔焊墊122的面積,也就是在垂直上述高度方向的投影面方向上,可以全覆蓋設置面102上的熔焊墊122的投影面積。因此,在超聲波振盪焊接過程中,不會有任何熔接振盪位置會超過此支撐保護接墊140的支撐範圍,藉此穩定地提供應力學支撐,而防止基板本體10在超聲波振盪下因懸空沒有受到支撐而破裂。而由於上述多條導電條的內外設置模式,唯有在下方的支撐達成全覆蓋,才能如此確保陶瓷基板本體的結構完整以及良率提升。 Among the above-mentioned metal heat-dissipating mounting blocks, the most special feature is that there is a support and protection pad 140 that is stable in oscillation. 122, especially the area of the support and protection pad 140 is not less than the area of the welding pad 122, that is, in the direction of the projection surface perpendicular to the height direction, it can fully cover the welding pad 122 on the installation surface 102 shadow area. Therefore, during the ultrasonic oscillation welding process, no welding oscillation position will exceed the support range of the support and protection pad 140, thereby stably providing stress support, and preventing the substrate body 10 from being suspended due to the ultrasonic oscillation. Supported and broken. However, due to the above-mentioned internal and external arrangement mode of the plurality of conductive bars, only the support underneath can achieve full coverage, so as to ensure the structural integrity of the ceramic substrate body and increase the yield rate.

另方面,金屬散熱安裝塊14也另外包含多個均勻導熱接墊142,此處的均勻導熱接墊142是指在垂直於上述高度方向的投影面上對應於安裝墊124位置而設置的,而且均勻導熱接墊142的面積也是至少不小於 安裝墊124的面積,除了可以在超聲波振盪焊接過程中穩定地提供應力支撐而防止基板本體10在超聲波振盪下破裂,並且可以完全運用安裝墊124的散熱面積進行散熱,藉此避免大功率電路元件2的熱能因間隙的存在而有部分區域導熱不良,造成熱能積聚在間隙附近,一方面影響大功率電路元件2的運作環境與效能,另方面更導致介面的穩固結合受到損害。 On the other hand, the metal heat-dissipating mounting block 14 additionally includes a plurality of uniformly thermally conductive pads 142. The uniformly thermally conductive pads 142 here refer to the positions corresponding to the mounting pads 124 on the projection surface perpendicular to the above-mentioned height direction, and The area of the uniform thermal pad 142 is also at least not less than The area of the mounting pad 124 can not only provide stable stress support during the ultrasonic oscillation welding process to prevent the substrate body 10 from cracking under ultrasonic oscillation, but also can fully utilize the heat dissipation area of the mounting pad 124 for heat dissipation, thereby avoiding high-power circuit components. Due to the existence of the gap, the thermal energy of 2 has poor heat conduction in some areas, causing heat energy to accumulate near the gap. On the one hand, it affects the operating environment and performance of the high-power circuit component 2;

本例中,上述金屬散熱安裝塊14之間具有不大於300微米且最佳為200微米的間隙16,使得各均勻導熱接墊142在受熱時可以將大功率電路元件2發出的熱能均勻分散,並且每一均勻導熱接墊142均有足夠的空間供受熱膨脹而不致因無處膨脹導致翹曲變形甚至介面剝離,同樣也可使基板本體10避免相同的翹曲變形甚至微裂。 In this example, there is a gap 16 between the metal heat-dissipating mounting blocks 14 not greater than 300 microns, and preferably 200 microns, so that the uniform thermal conductive pads 142 can evenly disperse the thermal energy emitted by the high-power circuit element 2 when heated. Moreover, each uniform thermal pad 142 has enough space for thermal expansion without causing warping deformation or even interface peeling due to nowhere to expand, and the substrate body 10 can also avoid the same warping deformation or even microcracking.

本例中,支撐保護接墊140是面積大於熔焊墊122的面積的六角型形狀,而均勻導熱接墊142也是面積大於安裝墊124的面積的六角型形狀,因此,支撐保護接墊140的面積不一定會和均勻導熱接墊142相等,當然,熟知本技術領域之人可以輕易推知,只要能滿足上述兩種投影面上全覆蓋的要求,支撐保護接墊140的面積也可和均勻導熱接墊142的面積相等,而且支撐保護接墊140和均勻導熱接墊142的形狀也可以是其他圖形,並無礙於本案實施。 In this example, the support and protection pad 140 has a hexagonal shape with an area larger than that of the welding pad 122, and the uniform thermally conductive pad 142 is also a hexagonal shape with an area larger than the area of the mounting pad 124. Therefore, the support and protection pad 140 The area may not be equal to the uniform thermal conductive pad 142. Of course, those skilled in the art can easily infer that as long as the above-mentioned two projection surface requirements for full coverage can be met, the area of the supporting and protecting pad 140 can also be uniformly thermally conductive. The areas of the pads 142 are equal, and the shapes of the supporting and protecting pads 140 and the uniform thermal conductive pads 142 can also be other patterns, which will not hinder the implementation of this case.

請參閱圖6,本例中還將上述焊接有大功率電路元件2的高導熱陶瓷基板1,透過金屬散熱安裝塊14焊接在一例如是電動馬達的高功率用電設備的銅製散熱鰭片的金屬散熱器3上,以藉由金屬散熱器3的散熱鰭片而更快地將大功率電路元件2發出的熱能導出並逸散。並且同步利用馬達內部的例如水冷裝置,形成一具有保護接墊的高導熱陶瓷基板1的大功率模組 9,因為金屬態的焊錫和銅材質的金屬散熱安裝塊14以及銅製的金屬散熱器3具有良好接觸相容性和導熱性,且銅具有較佳的導熱係數(380Wm-1K-1),故能以最快速率將均勻導熱接墊142接收自大功率電路元件2的熱能吸收然後藉由水冷式馬達的水冷裝置攜出且逸散。 Please refer to FIG. 6, in this example, the high thermal conductivity ceramic substrate 1 welded with high-power circuit components 2 is also welded to a copper heat sink fin of a high-power electrical equipment such as an electric motor through a metal heat-dissipating mounting block 14. On the metal heat sink 3, the heat energy emitted by the high-power circuit element 2 can be led out and dissipated more quickly by the heat dissipation fins of the metal heat sink 3. And synchronously use the water cooling device inside the motor to form a high-power module 9 with a high thermal conductivity ceramic substrate 1 with protective pads, because the metallic solder and the copper metal heat dissipation mounting block 14 and the copper metal heat sink 3 have Good contact compatibility and thermal conductivity, and copper has better thermal conductivity (380Wm -1 K -1 ), so the uniform thermal pad 142 can be absorbed by the heat energy of the high-power circuit element 2 at the fastest rate and then borrowed It is carried and dissipated by the water-cooled device of the water-cooled motor.

本發明在基板本體的安裝散熱面設置彼此間隔的金屬散熱安裝塊,其包含了:藉由在垂直上述高度方向的投影面上全覆蓋上述熔焊墊的支撐保護接墊,以及在上述高度方向的投影面上全覆蓋於上述安裝墊的均勻導熱接墊,可以防止陶瓷基板在超聲波振盪焊接時斷裂以及電路斷線;並且防止陶瓷基板和均勻導熱接墊翹曲變形甚至斷裂或剝落。 In the present invention, metal heat-dissipating mounting blocks spaced apart from each other are arranged on the mounting and heat-dissipating surface of the substrate body, which includes: a support and protection pad that fully covers the welding pad on the projection surface perpendicular to the height direction, and The uniform thermal conductive pads on the projection surface of the above-mentioned mounting pads are completely covered, which can prevent the ceramic substrate from breaking and circuit breakage during ultrasonic vibration welding; and prevent the ceramic substrate and the uniform thermal conductive pads from warping, deforming, or even breaking or peeling.

本發明在陶瓷基板的基板本體的安裝散熱面設置藉由金屬焊接的方式將一金屬散熱器全面積熱連接均勻導熱接墊,而形成一具有保護接墊的高導熱陶瓷基板的大功率模組,可以對高功率電路元件提供更好的導熱而確保操作環境的適當溫度,藉此增加陶瓷基板以及大功率模組的製造良率和降低成本,並延長使用壽命。 In the present invention, the mounting and heat dissipation surface of the substrate body of the ceramic substrate is provided by metal welding to thermally connect a metal heat sink with uniform thermal conductive pads across the entire area to form a high-power module with a high thermal conductivity ceramic substrate with protective pads , Can provide better heat conduction to high-power circuit components and ensure proper temperature of the operating environment, thereby increasing the manufacturing yield of ceramic substrates and high-power modules, reducing costs, and prolonging service life.

本發明具有保護接墊的高導熱陶瓷基板及具該基板的大功率模組的第二較佳實施例如下所述,本例中與前一較佳實施例相同部分於此不再贅述,相似的元件也使用相似名稱與標號,僅就差異部分提出說明。本例中高導熱陶瓷基板的製作方法,例如是先在基板本體的設置面和安裝散熱面以電著法全面形成銅質金屬層,再以光刻法分別在高導熱陶瓷基板的設置面形成電路層,以及在安裝散熱面形成金屬散熱安裝塊。 The second preferred embodiment of the high-thermal-conductivity ceramic substrate with protective pads and the high-power module with the substrate of the present invention is described below. In this embodiment, the same parts as the previous preferred embodiment will not be repeated here, but similar The components of also use similar names and labels, and only explain the differences. The manufacturing method of the high thermal conductivity ceramic substrate in this example, for example, is to first form a copper metal layer on the mounting surface and the mounting heat dissipation surface of the substrate body by electroforming, and then form the circuit on the mounting surface of the high thermal conductivity ceramic substrate by photolithography. Layer, and a metal heat-dissipating mounting block is formed on the mounting heat-dissipating surface.

請參閱圖7,在本例中,熔焊墊122’為長條的矩形以形成一端子匯流排供多條鋁導電條5’焊接,相對的,金屬散熱安裝塊14’中的振盪 穩定的支撐保護接墊140’也是長條的矩形,並且在基於基板本體10’厚度的高度方向的投影面上全覆蓋熔焊墊122’;安裝墊124’則是正方形而均勻導熱接墊142’是長方形並且在基於基板本體10’厚度的高度方向的投影面上全覆蓋安裝墊124’;緊鄰支撐保護接墊140’和均勻導熱接墊142’的金屬散熱安裝塊14’也都分別是原正六角形而被支撐保護接墊140’和均勻導熱接墊142’截餘的殘餘形狀,金屬散熱安裝塊14’中除了支撐保護接墊140’、均勻導熱接墊142’以及緊鄰上述支撐保護接墊140’和上述均勻導熱接墊142’者以外的複數個其餘金屬散熱安裝塊144’均為正六角型。 Please refer to FIG. 7. In this example, the welding pad 122' is a long rectangle to form a terminal bus bar for welding a plurality of aluminum conductive bars 5'. On the contrary, the oscillation in the metal heat-dissipating mounting block 14' The stable support and protection pad 140' is also an elongated rectangle, and is fully covered with the welding pad 122' on the projection surface based on the thickness of the substrate body 10' in the height direction; the mounting pad 124' is a square and uniformly thermally conductive pad 142 'Is a rectangle and fully covers the mounting pad 124' on the projection surface based on the thickness of the substrate body 10'; The original hexagonal shape is supported by the remaining shape of the protective pad 140' and the uniform thermal conductive pad 142'. The metal heat dissipation mounting block 14' except for the supporting protective pad 140', the uniform thermal conductive pad 142' and the adjacent support protection The plurality of metal heat-dissipating mounting blocks 144' other than the pad 140' and the aforementioned uniformly thermally conductive pad 142' are all of a regular hexagonal shape.

在本例中,長條的矩形熔焊墊122’作為端子匯流排可以供多條鋁導電條5’焊接,例如可以實現多個較小功率的大功率電路元件2’之間的並聯電路,來達成等效於一個較大功率的大功率電路元件的電流輸出要求,以降低每個較小功率的大功率電路元件2’的電流而減輕發熱的問題,使得成本得以下降並且應用範圍更廣,有助於產品的市場推展。 In this example, the long rectangular welding pad 122' can be used as a terminal bus bar for welding multiple aluminum conductive strips 5'. For example, a parallel circuit between multiple low-power high-power circuit elements 2'can be realized. To achieve the current output requirement equivalent to a larger power circuit element, to reduce the current of each smaller power circuit element 2'to reduce the heat problem, so that the cost can be reduced and the application range is wider. , Contribute to the market promotion of the product.

本例的高導熱陶瓷基板1’也可以應用在前述的熱電分離電路板上,其做法例如是在FR-4銅箔的印刷電路板8’上預先以雷射切割形成一尺寸略大於高導熱陶瓷基板1’的開口81’,然後以絕緣膠材82’將高導熱陶瓷基板1’鑲嵌在開口81’而與印刷電路板8’結合,再以銅導電條7’焊接在熔焊墊122’和印刷電路板8’上的焊接墊83’,以將高導熱陶瓷基板1’與印刷電路板8’電性連接以形成熱電分離電路板。 The high thermal conductivity ceramic substrate 1'of this example can also be applied to the aforementioned thermoelectric separation circuit board. For example, the method is to pre-cut the FR-4 copper foil printed circuit board 8'with a size slightly larger than the high thermal conductivity. The opening 81' of the ceramic substrate 1', then the high thermal conductivity ceramic substrate 1'is embedded in the opening 81' with an insulating glue 82' to be combined with the printed circuit board 8', and then the copper conductive strip 7'is soldered to the welding pad 122 'And the soldering pad 83' on the printed circuit board 8'to electrically connect the high thermal conductivity ceramic substrate 1'and the printed circuit board 8'to form a thermoelectric separation circuit board.

當然,如熟悉本技術領域人士所能輕易理解,上述各實施例中的支撐保護接墊和均勻導熱接墊都不侷限於六角型設計,如圖8至10的第三及四實施例所示,亦可選擇為正方形支撐保護接墊140”、均勻導熱接墊 142”,或略呈長方形的支撐保護接墊140'''、均勻導熱接墊142''',或任何簡單幾何形狀,尤其如圖8及9所示,為避免陶瓷基板和接墊間因為材質的熱膨脹係數不一,無論是在製造安裝過程或未來使用過程,均可能因為受熱膨脹而導致介面剝離,此時,亦可將上述支撐保護接墊140”、均勻導熱接墊142”均採用階梯狀結構146”,藉以分散熱應力,亦均無礙於本發明之實施。 Of course, as those skilled in the art can easily understand, the support and protection pads and uniform thermal conductive pads in the above embodiments are not limited to the hexagonal design, as shown in the third and fourth embodiments of FIGS. 8 to 10 , Can also choose to be a square support and protection pad 140", evenly thermally conductive pad 142", or a slightly rectangular support and protection pad 140"', uniform thermal conductive pad 142"', or any simple geometric shape, especially as shown in Figures 8 and 9, in order to avoid the gap between the ceramic substrate and the pad. The thermal expansion coefficient of the material is different. Whether it is in the manufacturing and installation process or in the future use process, the interface may peel off due to thermal expansion. At this time, the above-mentioned support and protection pad 140" and uniform thermal pad 142" can also be used The stepped structure 146" is used to disperse the thermal stress, which does not hinder the implementation of the present invention.

綜上所述,本發明在垂直上述高度方向的投影面上全覆蓋上述熔焊墊的振盪穩定支撐保護接墊,可以防止陶瓷基板在超聲波振盪焊接時斷裂以及電路斷線;在上述高度方向對應於上述安裝墊的均勻導熱接墊,可以防止陶瓷基板和均勻導熱接墊翹曲變形甚至斷裂或剝落;以金屬焊接全面積熱連接均勻導熱接墊的金屬散熱器,可以對大功率電路元件提供更好的導熱;以及採取長條矩形熔焊墊做為端子匯流排可以更進一步降低大功率電路元件的溫升,擴大產品應用範圍;有效達成了本發明之上述目的。 In summary, the present invention fully covers the oscillation stabilization support and protection pad of the welding pad on the projection surface perpendicular to the above height direction, which can prevent the ceramic substrate from breaking and circuit disconnection during ultrasonic oscillation welding; corresponding in the above height direction The uniform thermal conductive pads on the above mounting pads can prevent the ceramic substrate and uniform thermal conductive pads from warping, deforming, or even breaking or peeling; the metal radiator that is thermally connected to the uniform thermal conductive pads on the full area by metal welding can provide high-power circuit components Better heat conduction; and the use of long rectangular welding pads as terminal bus bars can further reduce the temperature rise of high-power circuit components and expand the scope of product application; effectively achieving the above-mentioned objectives of the present invention.

惟以上所述者,僅為本發明之較佳實施例而已,不能以此限定本發明實施之範圍,凡是依本發明申請專利範圍及發明說明書內容所作之簡單的等效變化與修飾,皆應仍屬本發明專利涵蓋之範圍內。 However, the above are only preferred embodiments of the present invention, and cannot be used to limit the scope of implementation of the present invention. All simple equivalent changes and modifications made in accordance with the scope of the patent application of the present invention and the content of the description of the invention shall apply. It still falls within the scope of the patent for this invention.

1:高導熱陶瓷基板 1: High thermal conductivity ceramic substrate

10:基板本體 10: Substrate body

102:設置面 102: Set the surface

104:安裝散熱面 104: Install the cooling surface

12:電路層 12: Circuit layer

122:熔焊墊 122: Welding pad

124:安裝墊 124: mounting pad

14:金屬散熱安裝塊 14: Metal cooling mounting block

140:支撐保護接墊 140: Support protection pad

142:均勻導熱接墊 142: uniform thermal pad

16:間隙 16: gap

17:超聲波振盪焊接設備 17: Ultrasonic vibration welding equipment

2:大功率電路元件 2: High-power circuit components

5:鋁導電條 5: Aluminum conductive strip

Claims (9)

一種具有保護接墊的高導熱陶瓷基板,供焊接設置至少一個工作電流達至少數十安培的大功率電路元件,以及該高導熱陶瓷基板是被導熱連結至一金屬散熱器,且該高導熱陶瓷基板包括: A high-thermal-conductivity ceramic substrate with protective pads for welding to set at least one high-power circuit element with an operating current of at least tens of amperes, and the high-thermal-conductivity ceramic substrate is thermally connected to a metal heat sink, and the high-thermal-conductivity ceramic The substrate includes: 一基板本體,具有一設置面及在一高度方向相反於該設置面的安裝散熱面; A substrate body with a mounting surface and a mounting and heat dissipation surface with a height direction opposite to the mounting surface; 至少一佈局於該基板本體上述設置面的電路層,前述電路層包括至少一個金屬材質供超聲波焊接的熔焊墊,以及至少一供上述大功率電路元件焊接的安裝墊;以及 At least one circuit layer arranged on the above-mentioned installation surface of the substrate body, the aforementioned circuit layer including at least one metal material welding pad for ultrasonic welding, and at least one mounting pad for welding the above-mentioned high-power circuit components; and 複數成形於上述基板本體上述安裝散熱面且彼此分別留有間隙地設置、供導熱連結至上述金屬散熱器的金屬散熱安裝塊;其中,在上述高度方向對應於上述熔焊墊的金屬散熱安裝塊,是至少一個在垂直上述高度方向的投影面上全覆蓋上述熔焊墊的振盪穩定的支撐保護接墊。 A plurality of metal heat-dissipating mounting blocks formed on the mounting and heat-dissipating surface of the substrate body and provided with gaps respectively for thermally connecting to the metal heat sink; wherein, the metal heat-dissipating mounting blocks corresponding to the welding pads in the height direction , Is at least one supporting and protecting pad that fully covers the welding pad on the projection surface perpendicular to the height direction. 如申請專利範圍第1項所述的具有保護接墊的高導熱陶瓷基板,其中上述金屬散熱安裝塊中,在上述高度方向對應於上述安裝墊的金屬散熱安裝塊,是至少一個在垂直上述高度方向的投影面上全覆蓋上述安裝墊的均勻導熱接墊。 The high thermal conductivity ceramic substrate with protective pads according to the first item of the scope of patent application, wherein among the metal heat dissipation mounting blocks, at least one metal heat dissipation mounting block corresponding to the mounting pad in the height direction is at least one vertical to the height The projection surface of the direction is fully covered with the uniform thermal conductive pad of the mounting pad. 如申請專利範圍第1或2項所述的具有保護接墊的高導熱陶瓷基板,其中上述振盪穩定支撐保護接墊是矩型。 As described in item 1 or 2 of the scope of patent application, the high thermal conductivity ceramic substrate with protective pads, wherein the above-mentioned oscillation stable support and protective pads are rectangular. 如申請專利範圍第3項所述的具有保護接墊的高導熱陶瓷基板,其中上述金屬散熱安裝塊是高度大於60微米的銅層。 As described in item 3 of the scope of patent application, the high thermal conductivity ceramic substrate with protective pads, wherein the metal heat dissipation mounting block is a copper layer with a height greater than 60 microns. 一種大功率模組,包括: A high-power module, including: 至少一個工作電流至少數十安培的大功率電路元件; At least one high-power circuit component with a working current of at least tens of amperes; 一金屬散熱器; A metal radiator; 一供焊接設置上述大功率電路元件、並且導熱連接上述金屬散熱器的高導熱陶瓷基板,該高導熱陶瓷基板包括: A high-thermal-conductivity ceramic substrate for soldering the above-mentioned high-power circuit components and thermally connecting the above-mentioned metal heat sink, and the high-thermal-conductivity ceramic substrate includes: 一基板本體,具有一設置面及再一高度方向相反於該設置面的安裝散熱面; A substrate body having an installation surface and a mounting and heat dissipation surface whose height direction is opposite to the installation surface; 至少一佈局於該基板本體上述設置面的電路層,前述電路層包括至少一個金屬材質供超聲波焊接的熔焊墊,以及至少一供上述大功率電路元件焊接的安裝墊;以及 At least one circuit layer arranged on the above-mentioned installation surface of the substrate body, the aforementioned circuit layer including at least one metal material welding pad for ultrasonic welding, and at least one mounting pad for welding the above-mentioned high-power circuit components; and 複數成形於上述基板本體上述安裝散熱面且彼此間隔設置、供導熱連結至上述金屬散熱器的金屬散熱安裝塊;其中,在上述高度方向對應於上述熔焊墊的金屬散熱安裝塊,是至少一個在垂直上述高度方向的投影面上全覆蓋上述熔焊墊的振盪穩定支撐保護接墊。 A plurality of metal heat-dissipating mounting blocks formed on the mounting and heat-dissipating surface of the substrate body and spaced apart from each other for thermally connecting to the metal heat sink; wherein the metal heat-dissipating mounting block corresponding to the welding pad in the height direction is at least one On the projection surface perpendicular to the height direction, the oscillating stabilization support and protection pads are fully covered with the welding pads. 如申請專利範圍第5項所述的大功率模組,其中上述金屬散熱安裝塊中,在上述高度方向對應於上述安裝墊的金屬散熱安裝塊,是至少一個在垂直上述高度方向的投影面上全覆蓋上述安裝墊的均勻導熱接墊。 As for the high-power module described in item 5 of the scope of patent application, in the metal heat dissipation mounting block, the metal heat dissipation mounting block corresponding to the mounting pad in the height direction is at least one on the projection surface perpendicular to the height direction A uniform thermal pad covering the above mounting pad. 如申請專利範圍第5或6項所述的大功率模組,其中上述振盪穩定支撐保護接墊是矩型。 For the high-power module described in item 5 or 6 of the scope of patent application, the above-mentioned oscillation stable support and protection pad is rectangular. 如申請專利範圍第7項所述的大功率模組,其中上述大功率電路元件是一電源管理積體電路。 The high-power module described in item 7 of the scope of patent application, wherein the above-mentioned high-power circuit element is a power management integrated circuit. 如申請專利範圍第5或6項所述的大功率模組,更包括複數分別由超聲波熔接至上述振盪穩定支撐保護接墊和上述大功率電路元件的高電流金屬導電條。 For example, the high-power module described in item 5 or 6 of the scope of patent application further includes a plurality of high-current metal conductive strips respectively welded to the above-mentioned oscillation stable support protection pad and the above-mentioned high-power circuit element by ultrasonic welding.
TW109132198A 2020-03-27 2020-03-27 High thermal conductivity ceramic substrate with protective pad and high-power module with the same TWI765352B (en)

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