TWI764351B - Thermal sensor - Google Patents

Abstract

A thermal sensor is provided. The thermal sensor includes a thermal sensing array and a calibration circuit. The thermal sensing array includes a plurality of thermal sensing cells. The thermal sensing cells include a first unmasked thermal sensing cell and a first masked thermal sensing cell. The first unmasked thermal sensing cell senses and obtains a first unmasked sensing data. The first masked thermal sensing cell is disposed adjacent to the first unmasked thermal sensing cell, and the first masked thermal sensing cell obtains a first masked sensing data. The calibration circuit is coupled to the first masked thermal sensing cell and the first unmasked thermal sensing cell. The calibration circuit calibrates the first unmasked sensing data obtained by the first unmasked thermal sensing cell according to the first masked sensing data obtained by the first masked thermal sensing cell which the first unmasked thermal sensing cell is adjacent to.

Description

thermal sensor

The present invention relates to a sensor, and particularly to a thermal sensor.

The thermal sensor can generally sense the thermal radiation emitted by the target area or the target, and can generate corresponding thermal sensing results or thermal images accordingly. However, in addition to receiving the thermal radiation emitted by the target area or object, the thermal sensor often also receives thermal energy provided by other media through thermal conduction, resulting in errors in sensing results or inconsistencies in thermal images. evenly.

In order to correct the error caused by heat conduction, the conventional thermal sensor usually controls the opening and closing of a shutter to block the thermal radiation injected into the thermal sensor, and only senses the thermal conduction for correction. But first, the opening and closing of the shutter needs to be controlled by an additional control circuit, which increases the cost. Furthermore, when the shutter is closed, all thermal radiation is blocked, resulting in missing information in sensing results or thermal images. Finally, mechanical shutters are more susceptible to damage, rendering the thermal sensor unable to perform its corrective function. Therefore, it is necessary to improve the thermal sensor of the conventional technology.

The present invention provides a thermal sensor, which calibrates the sensing results through the sensing results of the unshielded thermal sensing cells and the shielded thermal sensing cells in the thermal sensor.

The thermal sensor of the present invention includes a thermal sensing array and a calibration circuit. The thermal sensing array includes a plurality of thermal sensing cells. The thermal sensing cells include a first unshielded thermal sensing cell and a first shielded thermal sensing cell. The first unshielded thermal sensing cell obtains first unshielded sensing information. The first shielded thermal sensing cells are disposed adjacent to the first unshielded thermal sensing cells, and obtain first shielded sensing information. The calibration circuit is coupled to the first unshielded thermal sensing cell and the first shielded thermal sensing cell. The calibration circuit calibrates the first unshielded sensing information obtained by the adjacent first unshielded thermal sensing cells according to the first shielded sensing information.

Based on the above, the thermal sensor corrects the unshaded sensing information obtained by the unshaded thermal sensing cell adjacent to the shaded thermal sensing cell through the shaded sensing information obtained by the shaded thermal sensing cell, so as to Eliminate non-ideal factors such as errors or unevenness in the sensing results.

1, 2: Thermal sensor

10, 10-1, 10-2, 10-3, 10-4: Thermal Sensing Array

10m: shielding thermal sensing cells

10u: Unshielded thermal sensing cell

11, 21, 21a, 21b, 21c: Correction circuit

12: Lens

23: Operational circuit

210: Analog Subtractor

211, 212: Analog-to-digital converters

213: Digit Subtractor

214: switch circuit

CH: heat conduction

RH: heat radiation

FIG. 1A is a schematic diagram of a thermal sensor according to an embodiment of the present invention.

FIG. 1B is a partially enlarged schematic view of the thermal sensing array shown in FIG. 1A .

FIG. 2A is a schematic diagram of a thermal sensor according to an embodiment of the present invention.

FIG. 2B is a schematic diagram of a calibration circuit according to an embodiment of the present invention.

FIG. 2C is a schematic diagram of a calibration circuit according to an embodiment of the present invention.

FIG. 2D is a schematic diagram of a calibration circuit according to an embodiment of the present invention.

3A-3D are schematic diagrams of a plurality of thermal sensing arrays according to embodiments of the present invention.

FIG. 1A is a schematic diagram of a thermal sensor 1 according to an embodiment of the present invention. The thermal sensor 1 includes a thermal sensing array 10 , a calibration circuit 11 and a lens 12 . The lens 12 can receive thermal radiation RH emitted from the target object or target area. The thermal sensing array 10 can be used to sense thermal radiation RH transmitted through the lens 12 . The thermal sensing array 10 includes a plurality of thermal sensing cells, including an unshielded thermal sensing cell 10u and a shielded thermal sensing cell 10m. The unshaded thermal sensing cells 10u and the shaded thermal sensing cells 10m can perform sensing to obtain unshaded sensing information and shaded sensing information, respectively. The calibration circuit 11 is coupled to the unshielded thermal sensing cell 10u and the shielded thermal sensing cell 10m. The calibration circuit 11 can correct the unshielded sensing information according to the shielded sensing information, thereby generating a thermal sensing image of the target area or object.

Generally speaking, in the thermal sensing array 10, the unshielded thermal sensing cell 10u is adjacent to at least one shielded thermal sensing cell 10m. Further, the calibration circuit 11 may calibrate the unshielded sensing information obtained by the adjacent unshielded thermal sensing cells 10u according to the shielded sensing information obtained by the shielded thermal sensing cells 10m. Therefore, in the thermal sensing image generated by the thermal sensor 1, non-ideal factors such as errors or unevenness of the thermal sensing image can be preferably eliminated.

In detail, for the overall operation of the thermal sensor 1, the lens 12 of the thermal sensor 1 can receive the thermal radiation RH emitted by the target area or the target object, the thermal radiation RH After passing through the lens 12 , it can be injected into the thermal sensing array 10 .

The thermal sensing array 10 has a plurality of thermal sensing cells, and the thermal sensing cells include unshielded thermal sensing cells 10u and shielded thermal sensing cells 10m. The thermal sensing cells can sense the thermal radiation RH to obtain sensing information, and generate thermal sensing images accordingly. In this embodiment, the unshielded thermal sensing cells 10u and the shielded thermal sensing cells 10m are staggered in the row and column directions, that is, the unshielded thermal sensing cells 10u are arranged in both the row and column directions. 10m adjacent to the shielded thermal sensing cell. However, the present invention is not limited to this arrangement, as long as the unshielded thermal sensing cells 10u are adjacent to at least one shielded thermal sensing cell 10m. For the sensing operation of the thermal sensing array 10 , in addition to the thermal radiation RH transmitted from the target area or the target object received by the lens 12 through thermal radiation, the thermal sensor 1 itself can also be transmitted through thermal conduction or other In this way, the thermal conduction CH from the air, the sensor support material, the operator, or other sources is received, rather than the thermal energy provided by the target area or object, thereby causing errors or non-uniformity of the thermal sensing image. . Therefore, the thermal sensing array 10 is provided with unshielded thermal sensing cells 10u and shielded thermal sensing cells 10m. The unshielded thermal sensing cell 10u can sense the thermal radiation RH and thermal conduction CH injected by the penetrating lens 12, and obtain unshielded sensing information. The shielded thermal sensing cell 10m is a shielded thermal sensing cell, which can sense the heat conduction CH and obtain the shielding sensing information. In one embodiment, the shielding of the thermal sensing cells 10m can be achieved by disposing or coating a thermal shielding material on the non-thermal sensing cells 10u. The present invention does not limit the implementation of the shielding thermal sensing cells 10m.

After the calibration circuit 11 receives the unshaded sensing information and the shading sensing information, the calibration circuit 11 can calibrate the shading sensing information sensed by the shading thermal sensing cell 10m. The unshielded sensing information sensed by the unshielded thermal sensing cells 10u adjacent to the shielded thermal sensing cell 10m is shielded, so that errors or unevenness in the thermal sensing image can be effectively eliminated.

In one embodiment, the calibration circuit 11 deducts the unshielded sensing information sensed by the unshielded thermal sensing cell 10u from the shielded sensing information sensed by the shielded thermal sensing cell 10m adjacent to the unshielded thermal sensing cell 10u. information to generate corrected unmasked sensing information. For example, please refer to FIG. 1B . FIG. 1B is a partially enlarged schematic diagram of the thermal sensing array 10 shown in FIG. 1A . The calibration circuit 11 corrects the unmasked sensing information according to the masked sensing information, and the following formula can be referred to. (1) to (3).

v(m+1,n)=r(m+1,n)+c(m+1,n) (1)

v(m,n)=c(m,n) (2)

r'(m+1,n)=v(m+1,n)-v(m,n)=r(m+1,n)+[c(m+1,n)-c(m,n )] (3) wherein, in formula (1), v(m+1,n) is the unshielded sensing information sensed by the unshielded thermal sensing cell 10u disposed at the position (m+1,n), It contains the heat radiation information of r(m+1,n) and the heat conduction information of c(m+1,n). In formula (2), v(m,n) is the shading sensing information sensed by the shading thermal sensing cell 10m disposed at the position (m,n), which only includes the heat conduction information of c(m,n) .

In formula (3), after obtaining v(m,n) and v(m+1,n), the correction circuit 11 can deduct v(m,n) from v(m+1,n) to generate a corrected The unmasked sensing information r'(m+1,n). Specifically, since both c(m+1,n) and c(m,n) are obtained from the adjacent unshielded thermal sensing cells 10u and shielded thermal sensing cells 10m, the correction circuit 11 can In order to use c(m,n) to approximate c(m+1,n), after deducting c(m,n) from v(m+1,n), the heat conduction information c(m+1,n) ) can preferably be eliminated so that only thermal radiation information remains in the corrected unmasked sensing information r'(m+1,n).

In addition, in one embodiment, the correction circuit 11 may correct the unmasked sensing information according to the average of the masked sensing information. For example, please refer to FIG. 1B , which is a partially enlarged schematic diagram of the thermal sensing array 10 shown in FIG. 1A . Next, the arrangement of the thermal sensing array 10 in FIG. 1B and the following formulas (4), (5) The operation of the correction circuit 11 will be described.

c'(m+1,n)=(v(m+1,n-1)+v(m,n)+v(m+2,n)+v(m+1,n+1))/ 4 (4)

r'(m+1,n)=v(m+1,n)-c'(m+1,n) (5) Wherein, in formula (4), v(m+1,n-1) , v(m,n), v(m+2,n), v(m+1,n+1) are positions (m+1,n-1), (m,n), (m+2 ,n), (m+1,n+1) The shading sensing information obtained by the shading thermal sensing cell 10m only contains the heat conduction information, and c'(m+1,n) is these Average of unmasked sensing information. Further, in formula (5), the correction circuit 11 can deduct the phase of the unshielded sensing information v(m+1,n) obtained by the unshielded thermal sensing cell 10u on (m+1,n) The average c'(m+1,n) of the unshaded sensing information obtained by the adjacent shaded thermal sensing cells 10m is obtained to obtain the corrected unshaded sensing information r'(m+1,n).

In other words, the calibration circuit 11 can obtain a plurality of occlusion sensing information adjacent to the position (m+1,n), and the calibration circuit 11 can use the average c'(m+1,n) of the occlusion sensing information to be used for The thermal conduction information c(m+1,n) at position (m+1,n) is approximated by C'(m+1,n) is subtracted to eliminate the heat conduction information in the unmasked sensing information, so that only the thermal radiation information remains in the corrected unmasked sensing information r'(m+1,n).

Therefore, the thermal sensor 1 can set the unshielded thermal sensing cell 10u and the shielded thermal sensing cell 10m in the thermal sensing array 10 so that the unshielded thermal sensing cell 10u is adjacent to at least one shielded thermal sensing cell 10m . In this way, the correction circuit 11 can use the shaded sensing information obtained by the shaded thermal sensing cells 10m to correct the unshaded sensing information sensed by the adjacent unshaded thermal sensing cells 10u, excluding the thermal sensing image. non-ideal factors such as error or unevenness. On the other hand, the thermal sensor 1 can correct the sensing result of the thermal sensor in real time without interrupting the sensing operation, so as to avoid the omission of information of the thermal image, thereby improving the performance of the thermal sensor 1 . Ease of operation.

In one embodiment, the calibration circuit 11 can not only calibrate the unshielded sensing information obtained by the adjacent unshielded thermal sensing cells 10u according to the shielding sensing information, the calibration circuit 11 can also calibrate the unshielded sensing information The sensing information is used to restore the sensing results of the adjacent shielded thermal sensing cells 10m, thereby generating a thermal sensing image. Next, the operation of the correction circuit 11 will be described with reference to FIG. 1B and the following equations (6), (7).

v'(m,n)=(v(m,n-1)+v(m-1,n)+v(m+1,n)+v(m,n+1))/4 (6)

r'(m,n)=v'(m,n)-v(m,n) (7) Among them, in formula (6), v(m,n-1), v(m-1,n ), v(m+1,n), v(m,n+1) are positions (m,n-1), (m-1,n), (m+1,n), (m,n respectively For the unshielded sensing information obtained by the unshielded thermal sensing cells 10u on +1), v'(m,n) is the average of the unshielded sensing information. In formula (7), v(m,n) is the shading sensing information obtained by the shading thermal sensing cell 10m at the position, which only includes heat conduction information. Correction circuit 11 The masked sensing information v(m,n) is subtracted from the average v'(m,n) of the unmasked sensing information, thereby generating restored masked sensing information.

In other words, the calibration circuit 11 can use the average v'(m,n) of the unmasked sensing information to approximate the unmasked sensing information of the position (m,n) by deducting the heat conduction information v(m,n ) to remove the heat conduction information, so that only the heat radiation information remains in the restored sensing information.

Therefore, the thermal sensor 1 can restore the sensing result of the adjacent shaded thermal sensing cells through the unshaded sensing information. In this way, the thermal sensing image generated by the thermal sensor 1 can not only eliminate non-ideal factors such as errors or non-uniformity in the thermal sensing image, but also restore the shielding of the thermal sensing cells. Sensing results, thereby improving the image quality and resolution of thermal sensing images.

FIG. 2A is a schematic diagram of a thermal sensor 2 according to an embodiment of the present invention. The thermal sensor 2 shown in FIG. 2 is similar to the thermal sensor 1 shown in FIG. 1 , except that in the thermal sensor 2 , the calibration circuit 11 is replaced by the calibration circuit 21 , and the thermal sensor 2 It also includes an arithmetic circuit 23 coupled to the correction circuit 21 . The correction circuit 21 can convert the corrected sensing data into digital data, and provide the digital data to the operation circuit 23 . The arithmetic circuit 23 can receive the corrected sensing data to perform digital operations, and generate thermal images accordingly. Roughly speaking, the thermal sensor 2 can correct the error caused by the heat conduction CH through the correction circuit 21 , and the thermal sensor 2 can also eliminate other non-existent faults of the thermal sensor 2 by means of digital operation through the operation circuit 23 . Ideal factor for better thermal image generation.

FIG. 2B is a schematic diagram of a calibration circuit 21a according to an embodiment of the present invention. In this embodiment, the correction circuit 21a may include an analog subtractor 210 and an analog-to-digital conversion A converter (analog to digital converter, ADC) 211. The analog subtractor 210 is coupled to the thermal sensing array 10 for receiving the masked thermal sensing information v(m,n) and the unmasked thermal sensing information v(m+1,n). The analog subtractor 210 may be used to subtract the unmasked thermal sensing information v(m+1,n) of the analog data and the adjacent shaded thermal sensing information v(m,n) to generate a corrected unmasked thermal sensing information v(m,n) Sensing information r'(m+1,n). The analog-to-digital converter 211 is coupled to the analog subtractor 210 for converting the corrected unmasked thermal sensing information r'(m+1,n) of the analog data into the corrected unmasked thermal sensing information R of the digital data '(m+1,n), and supplied to the arithmetic circuit 23, where lowercase r'(m+1,n) and uppercase R'(m+1,n) represent the corrected unmasked analog and digital, respectively Thermal sensing information. Accordingly, the operation circuit 23 can receive the sensing data of the digital data, and perform digital operations, and accordingly eliminate other non-ideal factors in the thermal sensor 2, such as process unevenness or noise interference, for better produce high-quality thermal images.

FIG. 2C is a schematic diagram of a calibration circuit 21b according to an embodiment of the present invention. In this embodiment, the correction circuit 21b may include an analog-to-digital converter 212 and a digital subtractor 213 . In this embodiment, the calibration circuit 21b firstly receives the analog shaded thermal sensing information v(m,n) and the unmasked thermal sensing information v(m+1,n) through the analog-to-digital converter 212, and converts them into digital The masked thermal sensing information V(m,n) and the unmasked thermal sensing information V(m+1,n) of the data are then provided to the digital subtractor 213 for subtraction, where the lowercase v(m+1,n ) and V(m+1,n) represent the analog and digital unmasked thermal sensing information, respectively. In this embodiment, the digital subtractor 213 may be used to subtract the unmasked thermal sensing information V(m+1,n) and the masked thermal sensing information V(m,n) of the digital data to generate The corrected unmasked thermal sensing information R'(m+1,n) of the digital data. The arithmetic circuit 23 can proceed accordingly Perform digital operations to generate thermal images.

FIG. 2D is a schematic diagram of a calibration circuit 21c according to an embodiment of the present invention. The calibration circuit 21c shown in FIG. 2D is similar to the calibration circuit 21a shown in FIG. 2B , except that the calibration circuit 21c further includes a switch circuit 214 . The correction circuit 21 c includes an analog subtractor 210 , an analog-to-digital converter 211 and a switch circuit 214 . For the operations of the analog subtractor 210 and the analog-to-digital converter 211 , please refer to the relevant paragraphs of FIG. 2B above, and will not be repeated here.

In detail, the calibration circuit 21c of FIG. 2D may further include a switch circuit 214 to receive the thermal sensing information v(0,0)~v(x,y), and the switch circuit 214 selects the unshielded heat to be calculated. The sensing information v(m+1,n) and the shielding thermal sensing information v(m,n) are respectively provided to the positive input terminal and the negative input terminal of the analog subtractor 210 . In this way, the analog subtractor 210 can correctly deduct the masked thermal sensing information v(m,n) from the unmasked thermal sensing information v(m+1,n) according to the signal provided by the switch circuit 214, so as to facilitate the The correction circuit 21c and the operation circuit 23 perform subsequent operations.

Further, the arithmetic circuit 23 may be, for example, a central processing unit (Central Processing Unit, CPU), or other programmable general-purpose or special-purpose Micro Control Unit (Micro Control Unit, MCU), microprocessor (Microprocessor), Digital Signal Processor (DSP), Programmable Controller, Application Specific Integrated Circuit (ASIC), Graphics Processing Unit (GPU), Arithmetic Logic Unit , ALU), complex programmable logic device (Complex Programmable Logic Device, CPLD), field programmable Field Programmable Gate Array (FPGA) or other similar elements or a combination of the above elements. Alternatively, the operation circuit 23 can be designed through a hardware description language (HDL) or any other digital circuit design methods well known to those skilled in the art, and can be designed through a field programmable logic gate array ( Field Programmable Gate Array, FPGA), Complex Programmable Logic Device (Complex Programmable Logic Device, CPLD) or Application-specific Integrated Circuit (Application-specific Integrated Circuit, ASIC) way to realize the hardware circuit. As long as the operation circuit 23 can receive the corrected sensing data provided by the correction circuit 21 and perform digital operations on the corrected sensing data, it belongs to the scope of the present invention.

In short, after the thermal sensor 2 generates the corrected unmasked sensing information through the correction circuit 21 and converts it into the form of digital signals, the thermal sensor 2 can further perform digital operations through the arithmetic circuit 23 . to compensate the sensing information. Therefore, in addition to eliminating heat conduction information, the thermal sensor 2 can further eliminate other non-ideal factors such as process unevenness or noise interference, thereby generating a high-quality thermal image.

2B to 2D are only exemplary embodiments of the calibration circuit 21 in the thermal sensor 2, and those skilled in the present invention can certainly modify or combine them according to different design concepts or usage requirements. For example, the structures of the correction circuits 21a and 21b shown in FIGS. 2B and 2C can be modified to generate a plurality of corrected unmasked sensing information simultaneously in a parallel operation. Alternatively, the switch circuit 214 shown in FIG. 2D can also be applied to the calibration circuit 21b shown in FIG. 2C , and the switch circuit 214 can be coupled to the thermal sensor Between the measurement array 10 and the analog-to-digital converter 212 , or the switch circuit 214 can be coupled between the analog-to-digital converter 212 and the digital subtractor 213 . As long as the switch circuit 214 is coupled before the digital subtractor 213 , the switch circuit 214 can select correct sensing information to input to the positive input terminal and the negative input terminal of the digital subtractor 213 .

3A to 3D are schematic diagrams of thermal sensing arrays 10-1 to 10-4 according to embodiments of the present invention. In the embodiment shown in FIG. 3A , the unshielded thermal sensing cells 10u in the thermal sensing array 10-1 can be formed into a rectangle and disposed adjacent to the shielded thermal sensing cells 10m in a surrounding manner. And the rectangles formed by each unshielded thermal sensing cell 10u can be arranged along the column direction and the row direction of the thermal sensing array 10-1.

In the embodiment shown in Figure 3B, thermal sensing array 10-2 is similar to thermal sensing array 10-1. Likewise, the unshielded thermal sensing cells 10u in the thermal sensing array 10-2 may be formed into a rectangle and disposed adjacent to the shielded thermal sensing cells 10m in a surrounding manner. However, in the thermal sensing array 10 - 2 , the rectangles formed by the unshielded thermal sensing cells 10u are aligned only in the column direction, and staggered in the row direction.

In the embodiment shown in FIG. 3C , the unshielded thermal sensing cells 10u and the shielded thermal sensing cells 10m can be respectively arranged in multiple rows of the thermal sensing array 10 - 3 , and many unshielded thermal sensing cells 10u Each row may be staggered with a plurality of rows shielding the thermal sensing cells 10m.

In the embodiment shown in FIG. 3D , the unshielded thermal sensing cells 10u and the shielded thermal sensing cells 10m can be respectively arranged as multiple columns of the thermal sensing array 10-4, and many unshielded thermal sensing cells 10u The columns may be staggered with a plurality of columns shielding the thermal sensing cells 10m.

Of course, those skilled in the art can of course modify or combine the thermal sensing arrays shown in FIGS. 1A , 1B, 3A to 3D according to different design concepts or usage requirements. For example, in the thermal sensing array 10-1 shown in FIG. 3A, the distance between each shielded thermal sensing cell 10m can be changed from one unshielded thermal sensing cell 10u to two unshielded thermal sensing cells 10u apart. Cell 10u. Alternatively, in the thermal sensing array 10 - 3 shown in FIG. 3C , the multiple rows formed by each shielded thermal sensing cell 10m can be changed from unshielded thermal sensing cells 10u separated by one row to two rows apart. The thermal sensing cell 10u is not shielded. It should be noted that the above descriptions are merely illustrative of the arrangement of the thermal sensing arrays, and should not be used to limit the implementation of the thermal sensing arrays, as long as the unshielded thermal sensing cells 10u are adjacent to at least one shielded array. The thermal sensing cells 10m all belong to the scope of the thermal sensing array of the present invention.

To sum up, the thermal sensor of the present invention can be provided with an unshielded thermal sensing cell and a shielded thermal sensing cell, and the unshielded thermal sensing cell is adjacent to at least one shielded thermal sensing cell. The calibration circuit in the sensor can correct the sensing information obtained by the unshielded thermal sensing cell adjacent to the shielded thermal sensing cell according to the sensing information obtained by the shielded thermal sensing cell. Accordingly, the thermal sensor can correct the sensing result of the thermal sensor in real time, so as to avoid information omission of the thermal image, thereby improving the operational convenience of the thermal sensor. On the other hand, the thermal sensor can also restore the sensing result of the shielded thermal sensing cell, so as to improve the image quality of the thermal image.

1: Thermal sensor

10: Thermal Sensing Array

11: Correction circuit

12: Lens

10m: shielding thermal sensing cells

10u: Unshielded thermal sensing cell

CH: heat conduction

RH: heat radiation

Claims (12)

A thermal sensor, comprising: a thermal sensing array including a plurality of thermal sensing cells, the thermal sensing cells comprising: a plurality of first unshielded thermal sensing cells for obtaining a plurality of first unshielded sensing cells information; and a plurality of first shaded thermal sensing cells to obtain a plurality of first shaded sensing information, wherein each of the first unshaded thermal sensing cells is adjacent to at least one of the first shaded thermal sensing cells ; And a calibration circuit, coupled to each of the first unshielded thermal sensing cells and each of the first shielded thermal sensing cells, the calibration circuit based on the first shielded sensing information, the adjacent each of the first Each of the first unshielded sensing information obtained by the unshielded thermal sensing cells is corrected. The thermal sensor of claim 1, wherein each of the first unshielded sensing information sensed by each of the first unshielded thermal sensing cells includes thermal radiation information and thermal conduction information, and each of the first shielded thermal sensing cells Each of the first shading sensing information sensed by the cell includes heat conduction information. The thermal sensor of claim 1, wherein the calibration circuit deducts at least one of the adjacent first shadowed sensing information from each of the first unmasked sensing information to generate each of the corrected firsts An unmasked sensing information. The thermal sensor of claim 1, wherein the first unshielded thermal sensing cells surround at least one of the first shielded thermal sensing cells, wherein the calibration circuit is based on the first shielded thermal sensing cells One of the information, the first unshielded sensing data obtained for the surrounding first unshielded thermal sensing cells information for correction. The thermal sensor of claim 1, wherein a plurality of unshielded thermal sensing cells of the thermal sensing cells are disposed along a first direction, and a plurality of shielded thermal sensing cells of the thermal sensing cells Disposed along the first direction, the unshielded thermal sensing cells are respectively adjacent to the shielded thermal sensing cells. The thermal sensor of claim 1, wherein the thermal sensing cells include a plurality of unshielded thermal sensing cells and a plurality of shielded thermal sensing cells, the unshielded thermal sensing cells in a first The direction and a second direction are staggered with the shielded thermal sensing cells. The thermal sensor of claim 1, wherein the calibration circuit further obtains at least one obtained by at least one of the first shielded thermal sensing cells adjacent to each of the first unshielded thermal sensing cells For masked sensing information, the calibration circuit deducts the average of the at least one masked sensing information from each of the first unmasked sensing information to generate each of the corrected first unmasked sensing information. The thermal sensor as claimed in claim 1, wherein the calibration circuit further restores each of the adjacent first shielded thermal sensing cells sensed by at least one of the adjacent first shielded thermal sensing cells according to each of the first unshielded sensing information. the first occlusion sensing information. The thermal sensor of claim 8, wherein the calibration circuit obtains at least one unshielded thermal sensor obtained by at least one of the first unshielded thermal sensing cells adjacent to each of the first shielded thermal sensing cells masking sensing information, the calibration circuit calculates an average of the at least one unmasked sensing information, and deducts the average of the at least one unmasked sensing information each of the adjacent first occlusion sensing information to generate each of the restored first occlusion sensing information. The thermal sensor of claim 1, further comprising: an operation circuit coupled to the calibration circuit, the operation circuit performing a digital operation according to each of the corrected first unmasked sensing information to generate a Thermal image. The thermal sensor of claim 10, wherein the calibration circuit further comprises: an analogous subtractor coupled to the first unshielded thermal sensing cells and the first shielded thermal sensing cells, the analogous subtraction The device deducts each of the first unmasked sensing information from one of the adjacent first masked sensing information to generate each of the corrected first unmasked sensing information; and an analog digitizer to digital converter, ADC), coupled to the subtractor and the operation circuit, the analog digital converter receives the corrected first unmasked sensing information, and converts the corrected first unmasked sensing information Convert from analog to digital. The thermal sensor of claim 10, wherein the calibration circuit further comprises: an analog digital converter coupled to the first unshielded thermal sensing cells and the first shielded thermal sensing cells, the analog A digital converter converts each of the first unmasked sensing information and each of the first masked sensing information from analog to digital; a digital subtractor is coupled to the analog-to-digital converter and the operation circuit, and the digital subtractor receives Each of the first unmasked sensing information and each of the first shading senses of the digit detecting information, and subtracting one of the adjacent first masking information from each of the first unmasked information to generate each corrected first unmasked sensing information.

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