TWI764317B - Circuit board and method of fabricating the same - Google Patents

Circuit board and method of fabricating the same

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TWI764317B
TWI764317B TW109135387A TW109135387A TWI764317B TW I764317 B TWI764317 B TW I764317B TW 109135387 A TW109135387 A TW 109135387A TW 109135387 A TW109135387 A TW 109135387A TW I764317 B TWI764317 B TW I764317B
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electroplating
blocks
plating
block
metal layer
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TW109135387A
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Chinese (zh)
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TW202215919A (en
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胡佩琪
李睿中
林志文
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旺宏電子股份有限公司
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Abstract

A method of fabricating a circuit board includes forming a conductive layer on a surface of a substrate, and patterning the conductive layer to define a plurality of plating regions and a plurality of plating lines. The plating regions have at least two different sizes, and a first group of the plating regions are interconnected by a first plating line of the plating lines, and a second group of the plating regions are interconnected by a second plating line of the plating lines, in which a ratio of a total area of the first group of the plating regions to a total area of the second group of the plating regions is from about 1 to about 5. A solder mask is formed on the surface of the substrate, in which the solder mask covers the plating lines and partially exposes the plating regions. At least one metal layer is electroplated on the exposed plating regions, in which a topmost surface of the metal layer is below a top surface of the solder mask.

Description

電路板與其製造方法Circuit board and method of making the same

本揭露是關於一種電路板與其製造方法。The present disclosure relates to a circuit board and a manufacturing method thereof.

電鍍技術已廣泛地應用於各種工業應用中,以電路板技術(包含印刷電路板、IC載板等)為例,電路板包含有基板(如核心層或是多層線路板等,但不限於此)以及設置在基板表面上的接觸墊,其中以核心層為例,核心層可以包含絕緣材料層,如FR4樹脂材料等。基板上可配置有經圖案化的多個導電區塊,而接觸墊則可以透過電鍍的方式形成在這些導電區塊上。由於接觸墊會做為電路板與其他組件之間訊號或是電流連接的介面,若是接觸墊具有不平整的電鍍厚度將會導致不期望的缺陷例如組裝的不正常或是不均勻的負載等。因此,電鍍金屬層的厚度均勻性對於產品的品質有著關鍵性的影響。Electroplating technology has been widely used in various industrial applications. Taking circuit board technology (including printed circuit boards, IC substrates, etc.) as an example, circuit boards include substrates (such as core layers or multi-layer circuit boards, etc., but not limited to this) ) and a contact pad disposed on the surface of the substrate, wherein taking the core layer as an example, the core layer may include an insulating material layer, such as FR4 resin material and the like. A plurality of patterned conductive blocks can be disposed on the substrate, and contact pads can be formed on these conductive blocks by means of electroplating. Since the contact pads serve as the interface for signal or current connection between the circuit board and other components, if the contact pads have uneven plating thickness, undesired defects such as abnormal assembly or uneven loading will be caused. Therefore, the thickness uniformity of the electroplated metal layer has a critical influence on the quality of the product.

於本揭露的一些實施方式中,一種製造電路板的方法包含形成導體層於基板的表面上,圖案化導體層以定義複數個電鍍區塊以及複數個電鍍線,其中電鍍區塊包含至少兩種不同的尺寸,電鍍區塊中的第一組由電鍍線中的第一電鍍線連接,電鍍區塊中的第二組由電鍍線中的第二電鍍線連接,其中電鍍區塊的第一組的總面積與電鍍區塊的第二組的總面積的比例約為1至5。形成防焊層於基板的表面上,其中防焊層覆蓋電鍍線以及部分暴露電鍍區塊。電鍍至少一金屬層在暴露的電鍍區塊上,其中金屬層的最頂表面低於防焊層的頂表面。In some embodiments of the present disclosure, a method of manufacturing a circuit board includes forming a conductor layer on a surface of a substrate, patterning the conductor layer to define a plurality of electroplating blocks and a plurality of electroplating lines, wherein the electroplating blocks include at least two Different sizes, a first group of electroplating blocks is connected by a first electroplating line of electroplating lines, a second group of electroplating blocks is connected by a second electroplating line of electroplating lines, wherein the first group of electroplating blocks is The ratio of the total area to the total area of the second group of electroplating blocks is about 1 to 5. A solder resist layer is formed on the surface of the substrate, wherein the solder resist layer covers the plated lines and partially exposes the plated blocks. At least one metal layer is electroplated on the exposed electroplated blocks, wherein the topmost surface of the metal layer is lower than the top surface of the solder mask.

於一些實施例中,方法更包含在將金屬層電鍍於暴露的電鍍區塊之後,在電鍍區塊之第一組中之相鄰兩者之間的位置截斷第一電鍍線,以及在電鍍區塊之第二組中之相鄰兩者之間的位置截斷第二電鍍線。In some embodiments, the method further includes, after electroplating the metal layer on the exposed electroplating blocks, cutting off a first electroplating line at a location between adjacent ones of the first set of electroplating blocks, and in the electroplating area The second plating line is cut off at a position between two adjacent ones of the second group of blocks.

於一些實施例中,方法更包含在將金屬層電鍍於暴露的電鍍區塊之前,凹陷電鍍區塊中的至少一者。In some embodiments, the method further includes recessing at least one of the plated areas before electroplating the metal layer on the exposed plated areas.

於一些實施例中,電鍍區塊之第一組以串聯方式連接,電鍍區塊之第二組以串聯方式連接In some embodiments, the first set of electroplating blocks are connected in series and the second set of electroplating blocks are connected in series

本揭露之一些實施方式提供了一種製造電路板的方法,包含形成導體層於基板的表面上;圖案化導體層以定義複數個電鍍區塊以及一電鍍線,其中所有的電鍍區塊由電鍍線連接;形成防焊層於基板的表面上,其中防焊層覆蓋電鍍線以及部分暴露電鍍區塊;以及電鍍至少一金屬層在暴露的電鍍區塊上,其中金屬層的最頂表面低於防焊層的頂表面。Some embodiments of the present disclosure provide a method of manufacturing a circuit board, including forming a conductor layer on a surface of a substrate; patterning the conductor layer to define a plurality of electroplating blocks and a electroplating line, wherein all the electroplating blocks are formed by the electroplating line connecting; forming a solder resist layer on the surface of the substrate, wherein the solder resist layer covers the plated lines and partially exposed plated blocks; and electroplating at least one metal layer on the exposed plated blocks, wherein the topmost surface of the metal layer is lower than the resist the top surface of the solder layer.

本揭露之一些實施方式提供了一種電路板,包含基板、設置於基板的表面上的複數個接觸墊,以及防焊層。接觸墊包含複數個電鍍區塊與設置於電鍍區塊上的金屬層,電鍍區塊包含至少兩種不同的尺寸。防焊層覆蓋基板的表面與電鍍區塊的邊緣,其中接觸墊的最頂表面低於防焊層的頂表面,且接觸墊的最頂表面與防焊層的頂表面之間的間距大於0微米且小於5微米。Some embodiments of the present disclosure provide a circuit board including a substrate, a plurality of contact pads disposed on a surface of the substrate, and a solder mask. The contact pad includes a plurality of electroplating blocks and metal layers disposed on the electroplating blocks, and the electroplating blocks include at least two different sizes. The solder mask covers the surface of the substrate and the edge of the electroplating block, wherein the topmost surface of the contact pad is lower than the top surface of the solder mask, and the distance between the topmost surface of the contact pad and the top surface of the solder mask is greater than 0 microns and less than 5 microns.

於一些實施例中,電路板更包含電鍍線尾段從電鍍區塊中的第一電鍍區塊延伸並指向相鄰的第二電鍍區塊。In some embodiments, the circuit board further includes electroplating line tails extending from the first electroplating block of the electroplating blocks and pointing to an adjacent second electroplating block.

於一些實施例中,電鍍線尾段與第一電鍍區塊連接而不與第二電鍍區塊連接。In some embodiments, the plated line tails are connected to the first plated block but not to the second plated block.

於一些實施例中,電路板更包含兩電鍍線尾段,分別自電鍍區塊中相鄰的兩者延伸並指向彼此。In some embodiments, the circuit board further includes two electroplating line tails, respectively extending from two adjacent electroplating blocks and pointing toward each other.

於一些實施例中,金屬層嵌入電鍍區塊中的至少一者。In some embodiments, the metal layer is embedded in at least one of the electroplating blocks.

藉由適當地安排電鍍區塊的布局,可以使得電鍍時的電流密度更為均勻,進而讓電鍍厚度也變得更為均勻。因此,由此方法所製造的電路板上的接觸墊也可具有均勻的厚度。By properly arranging the layout of the electroplating blocks, the current density during electroplating can be made more uniform, thereby making the electroplating thickness more uniform. Therefore, the contact pads on the circuit board produced by this method can also have a uniform thickness.

以下將以圖式及詳細說明清楚說明本發明之精神,任何所屬技術領域中具有通常知識者在瞭解本發明之較佳實施例後,當可由本發明所教示之技術,加以改變及修飾,其並不脫離本發明之精神與範圍。The following will clearly illustrate the spirit of the present invention with drawings and detailed descriptions. After understanding the preferred embodiments of the present invention, anyone with ordinary knowledge in the technical field can make changes and modifications by the techniques taught in the present invention. without departing from the spirit and scope of the present invention.

本揭露提供了一種製造電路板的方法,其中藉由適當地配置電鍍區塊的佈局,使得在電鍍過程中的電流密度可以更為均勻,進而讓電鍍的厚度更為均勻。因此,使用此方法所製作的電路板,其上之接觸墊也具有均勻的厚度。The present disclosure provides a method for manufacturing a circuit board, wherein by appropriately configuring the layout of the electroplating blocks, the current density during the electroplating process can be more uniform, thereby making the thickness of the electroplating more uniform. Therefore, the circuit boards fabricated by this method also have uniform thicknesses on the contact pads.

第1A圖至第7B圖繪示根據本揭露之電路板的製造方法之多個實施例的不同製造階段,其中第1A、2A、3A、4A、5A、6A、7A圖為上視圖,第1B、2B、3B、4B、5B、6B、7B圖為沿第1A圖至第7A圖中之線段A-A的剖面圖。參照第1A圖與第1B圖,提供基板100,基板100包含有核心層102,核心層102可包含有多個導電通孔於其中以連接核心層102相對表面的線路。核心層102可包含樹脂材料,例如環氧樹脂、聚醯亞胺樹脂、BT(bismaleimide triazine)樹脂、FR4樹脂、或FR5樹脂。於一些實施例中,金屬箔層104,如銅或銅合金的薄層覆蓋在核心層102的表面。FIGS. 1A to 7B illustrate different manufacturing stages of various embodiments of the circuit board manufacturing method according to the present disclosure, wherein FIGS. 1A, 2A, 3A, 4A, 5A, 6A, and 7A are top views, and FIG. 1B , 2B, 3B, 4B, 5B, 6B, and 7B are cross-sectional views along line A-A in Figures 1A to 7A. Referring to FIGS. 1A and 1B , a substrate 100 is provided, the substrate 100 includes a core layer 102 , and the core layer 102 may include a plurality of conductive vias therein for connecting lines on opposite surfaces of the core layer 102 . The core layer 102 may include a resin material, such as epoxy resin, polyimide resin, BT (bismaleimide triazine) resin, FR4 resin, or FR5 resin. In some embodiments, a metal foil layer 104 , such as a thin layer of copper or copper alloy, covers the surface of the core layer 102 .

參照第2A圖與第2B圖,執行預清潔製程以清潔基板100。舉例而言,預清潔製程可以被執行以移除基板100之表面,尤其是金屬箔層104上的殘存物,這些殘存物可能會導致接觸墊的阻值提高。於一些實施例中,預清潔製程是用以移除金屬箔層104上的原生氧化物。於一些實施例中,預清潔製程包含乾式蝕刻或是濕式蝕刻。於預清潔製程之後,毯覆形成導體層110於基板100的表面上。舉例而言,導體層110形成於基板100的金屬箔層104上,而金屬箔層104可被視為種子層,使得導體層110可以平整地形成在基板100的表面。亦即,導體層110可具有均勻的厚度而共形地形成在基板100的金屬箔層104上。於一些實施例中,金屬箔層104全面地覆蓋核心層102,而導體層110全面地覆蓋金屬箔層104。Referring to FIGS. 2A and 2B , a pre-cleaning process is performed to clean the substrate 100 . For example, a pre-cleaning process may be performed to remove residues on the surface of the substrate 100, especially the metal foil layer 104, which may lead to increased resistance of the contact pads. In some embodiments, the pre-clean process is used to remove native oxides on the metal foil layer 104 . In some embodiments, the pre-clean process includes dry etching or wet etching. After the pre-cleaning process, the conductor layer 110 is blanket formed on the surface of the substrate 100 . For example, the conductor layer 110 is formed on the metal foil layer 104 of the substrate 100 , and the metal foil layer 104 can be regarded as a seed layer, so that the conductor layer 110 can be formed on the surface of the substrate 100 flatly. That is, the conductor layer 110 may have a uniform thickness to be conformally formed on the metal foil layer 104 of the substrate 100 . In some embodiments, the metal foil layer 104 fully covers the core layer 102 , and the conductor layer 110 fully covers the metal foil layer 104 .

參照第3A圖與第3B圖,對導體層110與其下方之金屬箔層104執行圖案化製程,以定義出多個電鍍區塊120與多條電鍍線130。於一些實施例中,導體層110與其下方之金屬箔層104更定義有至少一電鍍框190以及至少一夾具電極140,多條電鍍線130則是連接至電鍍框190,而後再經由連接線192連接至夾具電極140。於一些實施例中,電鍍區塊120、電鍍線130、夾具電極140、電鍍框190以及連接線192為相同材料層,且透過同一道蝕刻製程所定義。當進行電鍍製程時,由夾具電極140所提供的電流通過連接線192至電鍍框190,而後再透過與電鍍框190連接的各電鍍線130分配至各電鍍區塊120。Referring to FIGS. 3A and 3B , a patterning process is performed on the conductor layer 110 and the metal foil layer 104 thereunder to define a plurality of electroplating blocks 120 and a plurality of electroplating lines 130 . In some embodiments, the conductor layer 110 and the metal foil layer 104 below it further define at least one electroplating frame 190 and at least one fixture electrode 140 , and the plurality of electroplating lines 130 are connected to the electroplating frame 190 and then through the connecting lines 192 . Connect to the clamp electrode 140 . In some embodiments, the plating block 120 , the plating line 130 , the jig electrode 140 , the plating frame 190 and the connecting line 192 are the same material layer and are defined by the same etching process. During the electroplating process, the current provided by the fixture electrodes 140 is sent to the electroplating frame 190 through the connecting wires 192 , and then distributed to the electroplating blocks 120 through the electroplating wires 130 connected to the electroplating frame 190 .

由於電路板可包含有多個功能不同的接觸墊,且這些接觸墊可能會有對應地具有不同的形狀及/或面積,以滿足使用需求。因此,這些對應於接觸墊的電鍍區塊120也會具有不同的形狀及/或面積。Since the circuit board may include a plurality of contact pads with different functions, and these contact pads may have correspondingly different shapes and/or areas to meet the usage requirements. Therefore, the plated blocks 120 corresponding to the contact pads also have different shapes and/or areas.

舉例而言,電鍍區塊120包含有具有較大面積的第一電鍍區塊120A以及具有較小面積的第二電鍍區塊120B。於一些實施例中,第一電鍍區塊120A的數量是複數個,且第一電鍍區塊120A設置於基板100的中心區域。於一些實施例中,第二電鍍區塊120B的數量是複數個,且第二電鍍區塊120B設置於基板100的外圍區域並且圍繞第一電鍍區塊120A。於一些實施例中,具有較大面積的第一電鍍區塊120A可以在後續作為與插座的端子(金手指)對接的端子(金手指),或是作為銲接處的焊墊。而具有較小面積的第二電鍍區塊120B則可作為測試墊、端子或是焊墊。For example, the plating block 120 includes a first plating block 120A having a larger area and a second plating block 120B having a smaller area. In some embodiments, the number of the first electroplating blocks 120A is plural, and the first electroplating blocks 120A are disposed in the central area of the substrate 100 . In some embodiments, the number of the second electroplating blocks 120B is plural, and the second electroplating blocks 120B are disposed in the peripheral area of the substrate 100 and surround the first electroplating blocks 120A. In some embodiments, the first electroplating block 120A having a larger area can be used as a terminal (gold finger) butt joint with a terminal (gold finger) of the socket, or as a solder pad at a soldering place. The second plating block 120B having a smaller area can be used as a test pad, a terminal or a solder pad.

每一第一電鍍區塊120A的面積與每一第二電鍍區塊120B的面積之間的比例關係是根據使用需求而定,而可在極大的範圍值內變化。舉例而言,每一第一電鍍區塊120A的面積與每一第二電鍍區塊120B的面積之比例可大於5。於一些實施例中,每一第一電鍍區塊120A的面積與每一第二電鍍區塊120B的面積之比例可大於20。The proportional relationship between the area of each of the first electroplating blocks 120A and the area of each of the second electroplating blocks 120B is determined according to usage requirements, and can be varied within a very wide range. For example, the ratio of the area of each first electroplating block 120A to the area of each second electroplating block 120B may be greater than 5. In some embodiments, the ratio of the area of each first electroplating block 120A to the area of each second electroplating block 120B may be greater than 20.

由於每一第一電鍍區塊120A的面積與每一第二電鍍區塊120B的面積之比例可以極大,若是每一第一電鍍區塊120A與每一第二電鍍區塊120B各自獨立地與電鍍框190連接,則流經每一第一電鍍區塊120A的電流與流經每一第二電鍍區塊120B的電流也因此出現差異,因而導致在後續的電鍍製程中出現不均勻的電鍍厚度。Since the ratio of the area of each first electroplating block 120A to the area of each second electroplating block 120B can be very large, if each first electroplating block 120A and each second electroplating block 120B are independently plated with When the frame 190 is connected, the current flowing through each first electroplating block 120A and the current flowing through each second electroplating block 120B are also different, resulting in uneven plating thickness in the subsequent electroplating process.

為了解決上述問題,本揭露之電鍍線130可用以連接全部的第二電鍍區塊120B,使得連接的第二電鍍區塊120B的總面積近似於第一電鍍區塊120A的面積。In order to solve the above problem, the electroplating line 130 of the present disclosure can be used to connect all the second electroplating blocks 120B, so that the total area of the connected second electroplating blocks 120B is similar to that of the first electroplating block 120A.

舉例而言,第一電鍍區塊120A在所有的電鍍區塊120中具有最大的面積,而每一第一電鍍區塊120A透過第一電鍍線130A分別連接至電鍍框190。第二電鍍區塊120B可以被分組(圖中為一組)而藉由第二電鍍線130B連接,這些成組的第二電鍍區塊120B透過第二電鍍線130B以串聯的方式連接至電鍍框190。於一些實施例中,每一第一電鍍區塊120A的面積與成組的第二電鍍區塊120B的總面積之比例約為1至5。於另一些實施例中,每一第一電鍍區塊120A的面積與成組的第二電鍍區塊120B的總面積之比例約為5至1。For example, the first electroplating block 120A has the largest area among all the electroplating blocks 120 , and each first electroplating block 120A is respectively connected to the electroplating frame 190 through the first electroplating line 130A. The second electroplating blocks 120B can be grouped (a group in the figure) and connected by second electroplating lines 130B, and these groups of second electroplating blocks 120B are connected to the electroplating frame in series through the second electroplating lines 130B 190. In some embodiments, the ratio of the area of each first electroplating block 120A to the total area of the group of second electroplating blocks 120B is about 1-5. In other embodiments, the ratio of the area of each first electroplating block 120A to the total area of the group of second electroplating blocks 120B is about 5-1.

透過將面積較小的第二電鍍區塊120B分組並以串聯的方式連接,這些相連的第二電鍍區塊120B的總面積將會近似於第一電鍍區塊120A的面積。因此,每一電鍍線130所通過的電鍍面積也會更為平均,進而讓電鍍線130之壓降與電流變得更為均勻。By grouping the second plating blocks 120B with smaller areas and connecting them in series, the total area of these connected second plating blocks 120B will approximate the area of the first plating block 120A. Therefore, the plating area that each plating line 130 passes through will be more uniform, thereby making the voltage drop and current of the plating line 130 more uniform.

參照第4A圖與第4B圖。防焊層150形成在基板100上,用以控制電鍍金屬所沉積的位置。防焊層150可以透過一或多道黃光微影製程製作。防焊層150包含絕緣材料且具有足夠的厚度以定義出多個在第一電鍍區塊120A和第二電鍍區塊120B上的開口152,其中防焊層150的厚度大於電鍍區塊120的厚度。Refer to Figures 4A and 4B. The solder mask layer 150 is formed on the substrate 100 to control where the electroplating metal is deposited. The solder mask layer 150 can be fabricated by one or more yellow photolithography processes. The solder mask 150 includes an insulating material and has a sufficient thickness to define a plurality of openings 152 on the first electroplating block 120A and the second electroplating block 120B, wherein the thickness of the solder resist 150 is greater than the thickness of the electroplating block 120 .

於一些實施例中,防焊層150僅覆蓋第一電鍍區塊120A和第二電鍍區塊120B的外緣,而第一電鍍區塊120A和第二電鍍區塊120B的大部分面積皆暴露於防焊層150。第一電鍍區塊120A和第二電鍍區塊120B所暴露的面積便是後續電鍍金屬所沉積的位置。同樣地,防焊層150僅覆蓋夾具電極140的外緣,而使得夾具電極140大部分的面積皆暴露於防焊層150。In some embodiments, the solder mask layer 150 only covers the outer edges of the first electroplating block 120A and the second electroplating block 120B, and most areas of the first electroplating block 120A and the second electroplating block 120B are exposed to the Solder mask 150 . The exposed area of the first electroplating block 120A and the second electroplating block 120B is where the subsequent electroplating metal is deposited. Likewise, the solder resist layer 150 only covers the outer edge of the fixture electrode 140 , so that most of the area of the fixture electrode 140 is exposed to the solder resist layer 150 .

於一些實施例中,防焊層150會覆蓋核心層102未被第一電鍍區塊120A、第二電鍍區塊120B和夾具電極140所蓋住的區域。電鍍線130、電鍍框190以及連接線192均會被防焊層150覆蓋。In some embodiments, the solder mask layer 150 covers areas of the core layer 102 that are not covered by the first plating block 120A, the second plating block 120B, and the fixture electrodes 140 . The plating line 130 , the plating frame 190 and the connecting line 192 are all covered by the solder resist layer 150 .

參照第5A圖與第5B圖,執行一或多個電鍍製程以形成一或多個金屬層160在第一電鍍區塊120A和第二電鍍區塊120B所暴露的表面上。舉例而言,夾具電極140透過夾具連接至電源供應器,使得電壓被施加至夾具電極140。如此一來,夾具電極140便可以視為電鍍基板100時的電壓源。Referring to FIGS. 5A and 5B, one or more electroplating processes are performed to form one or more metal layers 160 on the exposed surfaces of the first electroplating block 120A and the second electroplating block 120B. For example, the clamp electrode 140 is connected to a power supply through the clamp such that a voltage is applied to the clamp electrode 140 . In this way, the clamp electrode 140 can be regarded as a voltage source when the substrate 100 is electroplated.

第一電鍍區塊120A與成組的第二電鍍區塊120B透過對應的電鍍線130連接至電鍍框190,其中第一電鍍區塊120A分別透過對應的第一電鍍線130A連接至電鍍框190,成組的第二電鍍區塊120B透過第二電鍍線130B連接至電鍍框190。電鍍框190透過連接線192與夾具電極140連接,使得電鍍框190具有與夾具電極140實質上相同的電壓位準。The first electroplating block 120A and the group of second electroplating blocks 120B are connected to the electroplating frame 190 through the corresponding electroplating lines 130, wherein the first electroplating blocks 120A are respectively connected to the electroplating frame 190 through the corresponding first electroplating lines 130A, The grouped second plating blocks 120B are connected to the plating frame 190 through the second plating lines 130B. The electroplating frame 190 is connected to the clamp electrode 140 through the connecting wire 192 , so that the electroplating frame 190 has substantially the same voltage level as the clamp electrode 140 .

如前所述,具有較小面積的第二電鍍區塊120B之間藉由第二電鍍線130B連接,使得這些連接的第二電鍍區塊120B之總面積近似於第一電鍍區塊120A的面積,故流經各個電鍍線130之壓降與電流可以更為均勻。因此,形成在第一電鍍區塊120A與第二電鍍區塊120B上的一或多個金屬層160也可以具有較為均勻的厚度。As mentioned above, the second electroplating blocks 120B with smaller areas are connected by the second electroplating lines 130B, so that the total area of the connected second electroplating blocks 120B is similar to the area of the first electroplating block 120A , so the voltage drop and current flowing through each plating line 130 can be more uniform. Therefore, the one or more metal layers 160 formed on the first electroplating block 120A and the second electroplating block 120B can also have a relatively uniform thickness.

於一些實施例中,金屬層160包含有底層金屬層162以及頂層金屬層164,其中底層金屬層162位於頂層金屬層164和第一電鍍區塊120A與第二電鍍區塊120B之間。底層金屬層162可包含具有良好接著性的金屬,如鎳(Ni),其中底層金屬層162具有阻障特性,用以避免頂層金屬層164的材料滲透進入核心層102。頂層金屬層164可包含具有較高硬度的金屬且用以防止底層金屬層162氧化,頂層金屬層164舉例而言可以包含金的合金。In some embodiments, the metal layer 160 includes a bottom metal layer 162 and a top metal layer 164, wherein the bottom metal layer 162 is located between the top metal layer 164 and the first electroplating block 120A and the second electroplating block 120B. The bottom metal layer 162 may include a metal with good adhesion, such as nickel (Ni), wherein the bottom metal layer 162 has barrier properties to prevent the material of the top metal layer 164 from penetrating into the core layer 102 . The top metal layer 164 may include a metal with higher hardness and is used to prevent oxidation of the bottom metal layer 162, and the top metal layer 164 may include, for example, an alloy of gold.

參照第6A圖與第6B圖,執行截斷製程,以在電鍍金屬層160於第一電鍍區塊120A與第二電鍍區塊120B上之後截斷至少一個的電鍍線130。舉例而言,用以連接第二電鍍區塊120B的第二電鍍線130B,會在金屬層160電鍍於第一電鍍區塊120A與第二電鍍區塊120B上之後被截斷。更進一步地說,第二電鍍線130B是在相鄰兩第二電鍍區塊120B之間的位置被截斷,使得第二電鍍區塊120B之間不會直接連接彼此。於一些實施例中,用以分別將第一電鍍區塊120A連接至電鍍框190的第一電鍍線130A不會被截斷。Referring to FIGS. 6A and 6B, a cutting process is performed to cut at least one plating line 130 after the metal layer 160 is plated on the first plating block 120A and the second plating block 120B. For example, the second plating line 130B for connecting the second plating block 120B is cut off after the metal layer 160 is plated on the first plating block 120A and the second plating block 120B. More specifically, the second electroplating lines 130B are cut off at positions between two adjacent second electroplating blocks 120B, so that the second electroplating blocks 120B are not directly connected to each other. In some embodiments, the first plating lines 130A used to respectively connect the first plating blocks 120A to the plating frame 190 are not cut off.

於一些實施例中,用以截斷第二電鍍線130B的截斷製程可以透為雷射鑽孔,而雷射光會穿透防焊層150以截斷第二電鍍線130B。因此,防焊層150中會形成多個穿孔154,而基板100的核心層102的一部分會暴露於此些穿孔154。In some embodiments, the cutting process for cutting off the second electroplating line 130B may be a laser drilling process, and the laser light penetrates the solder mask 150 to cut off the second electroplating line 130B. Therefore, a plurality of through holes 154 are formed in the solder mask layer 150 , and a part of the core layer 102 of the substrate 100 is exposed to the through holes 154 .

參照第7A圖與第7B圖,執行切斷製程以切割基板100並移除基板100包含有夾具電極140與電鍍框190(見第6A圖)的部分,以得到電路板200,其中電路板200可以作為IC載板或是連接電路板等。Referring to FIGS. 7A and 7B, a severing process is performed to cut the substrate 100 and remove the portion of the substrate 100 including the jig electrodes 140 and the plating frame 190 (see FIG. 6A ) to obtain a circuit board 200, wherein the circuit board 200 It can be used as an IC carrier board or connected to a circuit board.

如第7A圖所示,第一電鍍線130A從對應的第一電鍍區塊120A延伸並終止於電路板200的邊緣。第二電鍍線130B的一端也會終止於電路板200的邊緣。然而,第二電鍍線130B會在金屬層160電鍍完之後被截斷,因此,會有多個電鍍線尾段132存在於電路板200上。每個電鍍線尾段132從其中一個第二電鍍區塊120B延伸並指向相鄰的另一第二電鍍區塊120B。從相鄰對的第二電鍍區塊120B所延伸的電鍍線尾段132會對齊彼此。每一電鍍線尾段132不會與相鄰的電鍍線尾段132直接連接,也不會與相鄰的另一第二電鍍區塊120B直接連接。As shown in FIG. 7A , the first plating line 130A extends from the corresponding first plating block 120A and terminates at the edge of the circuit board 200 . One end of the second plating line 130B also terminates at the edge of the circuit board 200 . However, the second electroplating line 130B will be cut off after the metal layer 160 is electroplated. Therefore, a plurality of electroplating line tails 132 will exist on the circuit board 200 . Each electroplating line tail 132 extends from one of the second electroplating blocks 120B and points to the adjacent other second electroplating block 120B. Electroplating line tails 132 extending from adjacent pairs of second electroplating blocks 120B are aligned with each other. Each electroplating line tail section 132 is not directly connected to the adjacent electroplating line tail section 132, nor is it directly connected to another adjacent second electroplating block 120B.

如第7B圖所示,電路板200包含有核心層102,設置在核心層102表面的電鍍區塊120,設置在電鍍區塊120上的金屬層160,以及介於電鍍區塊120之間的防焊層150。由金屬箔層104、導體層110、與金屬層160所共同組成的疊層可以被稱為接觸墊180,接觸墊180在核心層102上。每一接觸墊180包含有下部部分182與上部部分184,其中下部部分182包含了金屬箔層104與導體層110,且下部部分182被上部部分184以及防焊層150所覆蓋。上部部分184包含了金屬層160,且上部部分184暴露於防焊層150。接觸墊180之下部部分182的寬度W1大於接觸墊180之上部部分184的寬度W2。As shown in FIG. 7B , the circuit board 200 includes a core layer 102 , an electroplating block 120 disposed on the surface of the core layer 102 , a metal layer 160 disposed on the electroplating block 120 , and an electroplating block 120 between the electroplating blocks 120 . Solder mask 150 . The stack composed of the metal foil layer 104 , the conductor layer 110 , and the metal layer 160 may be referred to as a contact pad 180 on the core layer 102 . Each contact pad 180 includes a lower portion 182 and an upper portion 184 , wherein the lower portion 182 includes the metal foil layer 104 and the conductor layer 110 , and the lower portion 182 is covered by the upper portion 184 and the solder mask layer 150 . The upper portion 184 contains the metal layer 160 and the upper portion 184 is exposed to the solder mask 150 . The width W1 of the lower portion 182 of the contact pad 180 is greater than the width W2 of the upper portion 184 of the contact pad 180 .

防焊層150具有厚度T1,厚度T1是從核心層102的頂表面起算至防焊層150的頂表面S2。電鍍區塊120具有厚度T2,厚度T2是從核心層102的頂表面起算至接觸墊180的下部部分182的頂表面S3。接觸墊180具有厚度T3,厚度T3是從核心層102的頂表面起算至接觸墊180的最頂表面S1。金屬層160具有厚度T4,厚度T4是從下部部分182的頂表面S3起算至接觸墊180的最頂表面S1。The solder mask layer 150 has a thickness T1 from the top surface of the core layer 102 to the top surface S2 of the solder mask layer 150 . The plated block 120 has a thickness T2 from the top surface of the core layer 102 to the top surface S3 of the lower portion 182 of the contact pad 180 . The contact pad 180 has a thickness T3 from the top surface of the core layer 102 to the topmost surface S1 of the contact pad 180 . The metal layer 160 has a thickness T4 from the top surface S3 of the lower portion 182 to the topmost surface S1 of the contact pad 180 .

於一些實施例中,接觸墊180的最頂表面S1低於防焊層150的頂表面S2。防焊層150的厚度T1大於接觸墊180的厚度T3,防焊層150的厚度T1大於電鍍區塊120的厚度T2與金屬層160的厚度T4之和。間距G存在於接觸墊180的最頂表面S1與防焊層150的頂表面S2之間。於一些實施例中,接觸墊180的最頂表面S1與防焊層150的頂表面S2之間的間距G為大於0微米且小於5微米,較佳地為大於0微米且小於2微米。In some embodiments, the topmost surface S1 of the contact pad 180 is lower than the top surface S2 of the solder mask 150 . The thickness T1 of the solder mask layer 150 is greater than the thickness T3 of the contact pad 180 , and the thickness T1 of the solder mask layer 150 is greater than the sum of the thickness T2 of the electroplating block 120 and the thickness T4 of the metal layer 160 . A gap G exists between the topmost surface S1 of the contact pad 180 and the top surface S2 of the solder mask 150 . In some embodiments, the distance G between the topmost surface S1 of the contact pad 180 and the top surface S2 of the solder mask 150 is greater than 0 micrometers and less than 5 micrometers, preferably greater than 0 micrometers and less than 2 micrometers.

於一些實施例中,接觸墊180的金屬層160包含有底層金屬層162接觸對應的電鍍區塊120,底層金屬層162例如是鎳層。接觸墊180的金屬層160包含有頂層金屬層164設置在對應的底層金屬層162上,頂層金屬層164例如是含金合金的層。頂層金屬層164用以提供足夠的硬度以保護接觸墊180不易被損壞。In some embodiments, the metal layer 160 of the contact pad 180 includes an underlying metal layer 162 that contacts the corresponding electroplating block 120 . The underlying metal layer 162 is, for example, a nickel layer. The metal layer 160 of the contact pad 180 includes a top metal layer 164 disposed on the corresponding bottom metal layer 162. The top metal layer 164 is, for example, a layer containing gold alloy. The top metal layer 164 is used to provide sufficient hardness to protect the contact pads 180 from damage.

雖然第1A圖至第7B圖之實施例是以基板100包含核心層102,且金屬箔層104與導體層110設置在核心層102的表面為例進行說明,然而在其他的實施例中,基板可以包含多層線路板,此時金屬箔層與導體層,或是其後經圖案化得到的電鍍區塊,為設置在多層線路板的表面,本發明不限於此。Although the embodiments in FIGS. 1A to 7B are described by taking the substrate 100 including the core layer 102 and the metal foil layer 104 and the conductor layer 110 disposed on the surface of the core layer 102 as an example, in other embodiments, the substrate It can include a multi-layer circuit board. At this time, the metal foil layer and the conductor layer, or the electroplating block obtained by patterning thereafter, are arranged on the surface of the multi-layer circuit board, and the present invention is not limited to this.

參照第8圖與第9圖,其分別為本揭露之製造電路板的方法之不同實施例的上視圖,其中第8圖與第9圖的階段與前述第3A圖與第3B圖相同,且是跟著第1A-2B圖並在後續接著執行第4A-7B圖之步驟。Referring to FIG. 8 and FIG. 9, which are respectively top views of different embodiments of the method for manufacturing a circuit board of the present disclosure, wherein the stages of FIG. 8 and FIG. 9 are the same as the aforementioned FIG. 3A and FIG. 3B, and This is followed by the steps of Figures 1A-2B followed by the execution of Figures 4A-7B.

如第8圖所示,基板300,如核心層或是多層線路板上設置有多個電鍍區塊320、多條電鍍線330、至少一電鍍框390、至少一夾具電極340,以及至少一連接線392。電鍍線330分別連接至電鍍框390,電鍍框390與夾具電極340之間透過連接線392連接。本實施例中,電鍍區塊320具有多種尺寸以及形狀,例如包含有圓形以及長度不同的各種矩形等。本實施例可以按照之前所述的方式將電鍍區塊320進行分組,使得成組的電鍍區塊320的面積趨於相近。舉例而言,一部分的電鍍區塊320,如電鍍區塊320A,由電鍍線330A所串聯連接,成組的電鍍區塊320A中的每個電鍍區塊320的形狀與尺寸不盡相同。以此類推,一部分的電鍍區塊320,如電鍍區塊320B,由電鍍線330B所串聯連接,一部分的電鍍區塊320,如電鍍區塊320C,由電鍍線330C所串聯連接,一部分的電鍍區塊320,如電鍍區塊320D,由電鍍線330D所串聯連接,而剩下的電鍍區塊320,如電鍍區塊320E,則是由電鍍線330E所串聯連接。As shown in FIG. 8, a substrate 300, such as a core layer or a multi-layer circuit board, is provided with a plurality of electroplating blocks 320, a plurality of electroplating lines 330, at least one electroplating frame 390, at least one clamp electrode 340, and at least one connection Line 392. The electroplating lines 330 are respectively connected to the electroplating frames 390 , and the electroplating frames 390 and the clamp electrodes 340 are connected through the connecting wires 392 . In this embodiment, the electroplating blocks 320 have various sizes and shapes, such as circles and various rectangles with different lengths. In this embodiment, the electroplating blocks 320 can be grouped in the manner described above, so that the areas of the grouped electroplating blocks 320 tend to be similar. For example, a part of the electroplating blocks 320, such as the electroplating blocks 320A, are connected in series by the electroplating lines 330A, and each electroplating block 320 in the group of the electroplating blocks 320A is different in shape and size. By analogy, a part of the electroplating blocks 320, such as the electroplating block 320B, are connected in series by the electroplating line 330B, a part of the electroplating blocks 320, such as the electroplating block 320C, are connected in series by the electroplating line 330C, and a part of the electroplating area Blocks 320, such as electroplating block 320D, are connected in series by electroplating lines 330D, while the remaining electroplating blocks 320, such as electroplating block 320E, are connected in series by electroplating lines 330E.

成組的電鍍區塊320A、電鍍區塊320B、電鍍區塊320C、電鍍區塊320D、電鍍區塊320E中,其各自的總面積大致相近。舉例而言,這些成組的電鍍區塊320中,具有最大的總面積的那一組與具有最小的總面積的那一組的面積比例可設計為不大於五,以提升電鍍的均勻性。In the grouped electroplating block 320A, electroplating block 320B, electroplating block 320C, electroplating block 320D, and electroplating block 320E, their respective total areas are approximately similar. For example, among the groups of electroplating blocks 320 , the area ratio of the group with the largest total area and the group with the smallest total area can be designed to be no greater than five, so as to improve the uniformity of electroplating.

如第9圖所示,基板400,如核心層或是多層線路板上設置有多個電鍍區塊420、多條電鍍線430、至少一電鍍框490、至少一夾具電極440,以及至少一連接線492。本實施例之電鍍區塊420的配置大致上與第8圖相同,但是電鍍線430的路徑不同。例如,本實施例中電鍍線430的數量變更為四條,而電鍍線430A、430B、430C、430D分別以串聯及並聯的方式連接多個電鍍區塊420A、420B、420C、420D,使得各組電鍍區塊420之間的總面積比例不大於5。As shown in FIG. 9, a substrate 400, such as a core layer or a multi-layer circuit board, is provided with a plurality of electroplating blocks 420, a plurality of electroplating lines 430, at least one electroplating frame 490, at least one fixture electrode 440, and at least one connection Line 492. The configuration of the plating block 420 in this embodiment is substantially the same as that shown in FIG. 8 , but the paths of the plating lines 430 are different. For example, in this embodiment, the number of the plating lines 430 is changed to four, and the plating lines 430A, 430B, 430C, and 430D are respectively connected in series and in parallel to the plurality of plating blocks 420A, 420B, 420C, and 420D, so that each group of plating The total area ratio between the blocks 420 is not greater than 5.

比對第8圖與第9圖可以得知,實務上可以配合不同的佈線需求調整電鍍線的路徑以及數量,且電鍍區塊之連接方式可以為串聯方式連接或是串聯及並聯方式連接,以提升製程設計的靈活性。Comparing Figure 8 and Figure 9, it can be seen that in practice, the path and quantity of the electroplating lines can be adjusted according to different wiring requirements, and the connection mode of the electroplating blocks can be connected in series or in series and in parallel. Improve process design flexibility.

參照第10圖與第11圖,其分別為本揭露之製造電路板的方法之不同實施例的上視圖,其中第10圖與第11圖的階段與前述第3A圖與第3B圖相同,且是跟著第1A-2B圖並在後續接著執行第4A-7B圖之步驟。Referring to FIGS. 10 and 11, which are top views of different embodiments of the method for manufacturing a circuit board of the present disclosure, respectively, wherein the stages of FIGS. 10 and 11 are the same as those of the aforementioned FIGS. 3A and 3B, and This is followed by the steps of Figures 1A-2B followed by the execution of Figures 4A-7B.

如第10圖所示,基板500,如核心層或是多層線路板上設置有多個電鍍區塊520、多條電鍍線530、至少一電鍍框590、至少一夾具電極540,以及至少一連接線592。電鍍區塊520被分組並透過對應的電鍍線530連接。舉例而言,電鍍線530A連接電鍍區塊520A,電鍍區塊520A可包含有至少兩種尺寸以及形狀。電鍍線530B連接電鍍區塊520B,電鍍區塊520B可包含有至少兩種尺寸以及形狀。電鍍線530C連接電鍍區塊520C,電鍍區塊520C可包含有至少兩種尺寸以及形狀。電鍍線530A、530B以及530C連接至電鍍框590,電鍍框590透過連接線592與夾具電極540連接。而這些被分組的電鍍區塊520A、520B、520C各自的總面積大致相近。As shown in FIG. 10, a substrate 500, such as a core layer or a multi-layer circuit board, is provided with a plurality of electroplating blocks 520, a plurality of electroplating lines 530, at least one electroplating frame 590, at least one clamp electrode 540, and at least one connection Line 592. The plating blocks 520 are grouped and connected by corresponding plating lines 530 . For example, the plating line 530A is connected to the plating block 520A, and the plating block 520A may include at least two sizes and shapes. The plating line 530B is connected to the plating block 520B, and the plating block 520B may include at least two sizes and shapes. The plating line 530C is connected to the plating block 520C, and the plating block 520C may include at least two sizes and shapes. The electroplating lines 530A, 530B and 530C are connected to the electroplating frame 590 , and the electroplating frame 590 is connected to the clamp electrode 540 through the connecting wire 592 . The total areas of the grouped electroplating blocks 520A, 520B, and 520C are approximately similar.

舉例而言,在這些三組電鍍區塊520A、520B、520C中,成組的電鍍區塊520B具有最大的總面積,而成組的電鍍區塊520A/520C具有較小的總面積。成組的電鍍區塊520B之總面積與成組的電鍍區塊520A/520C的總面積的比例關係為不大於5。For example, among the three sets of electroplating blocks 520A, 520B, 520C, the set of electroplating blocks 520B has the largest total area, and the set of electroplating blocks 520A/520C has a smaller total area. The ratio of the total area of the grouped electroplating blocks 520B to the total area of the grouped electroplating blocks 520A/520C is not greater than 5.

如第11圖所示,基板600,如核心層或是多層線路板上設置有多個電鍍區塊620、電鍍線630、至少一電鍍框690、至少一夾具電極640,以及至少一連接線692。於一些實施例中,所有的電鍍區塊620皆透過單一一條電鍍線630連接,其中這些電鍍區塊620包含有至少兩種尺寸與形狀,電鍍區塊620的形狀不僅限於矩形與圓形,而可出現如三角形或是其他多邊形的組合。As shown in FIG. 11, a substrate 600, such as a core layer or a multi-layer circuit board, is provided with a plurality of electroplating blocks 620, electroplating lines 630, at least one electroplating frame 690, at least one clamp electrode 640, and at least one connecting line 692 . In some embodiments, all the electroplating blocks 620 are connected through a single electroplating line 630, wherein the electroplating blocks 620 include at least two sizes and shapes. The shapes of the electroplating blocks 620 are not limited to rectangles and circles, but Combinations such as triangles or other polygons can appear.

參照第12圖與第13圖,其分別為本揭露之製造電路板的方法另一實施例的剖面圖,其中是跟著第1A-4B圖之後,並在後續接著執行第6A-7B圖之步驟。Referring to FIGS. 12 and 13, which are respectively cross-sectional views of another embodiment of the method for manufacturing a circuit board of the present disclosure, wherein the steps of FIGS. 1A-4B are followed, and the steps of FIGS. 6A-7B are subsequently performed. .

如第12圖所示,於一些實施例中,基板700,如核心層702上的電鍍區塊720B的面積小於電鍍區塊720A的面積。本方法更包含形成圖案化遮罩770於基板700上,以暴露具有較小面積的電鍍區塊720B並讓面積較大的電鍍區塊720A被圖案化遮罩770所覆蓋。於一些實施例中,電鍍區塊720A、720B可進一步被電鍍線730連接至電鍍框790。As shown in FIG. 12, in some embodiments, the area of the plating block 720B on the substrate 700, such as the core layer 702, is smaller than the area of the plating block 720A. The method further includes forming a patterned mask 770 on the substrate 700 to expose the electroplating block 720B with a smaller area and allow the electroplating block 720A with a larger area to be covered by the patterned mask 770 . In some embodiments, electroplating blocks 720A, 720B may be further connected to electroplating frame 790 by electroplating lines 730 .

接著,執行蝕刻製程以凹陷電鍍區塊720B。被凹陷的電鍍區塊720B仍覆蓋其下方的核心層702。亦即,每一個被凹陷的電鍍區塊720B具有中心部分722與周邊部分724,其中中心部分722暴露於防焊層750與圖案化遮罩770,而周邊部分724被防焊層750與圖案化遮罩770覆蓋。周邊部分724的厚度大於中心部分722的厚度。每一個電鍍區塊720包含有金屬箔層702以及導體層704,其中導體層704被凹陷,而金屬箔層702仍被導體層704所覆蓋。Next, an etching process is performed to recess the plated block 720B. The recessed plated block 720B still covers the core layer 702 below it. That is, each recessed plated block 720B has a central portion 722 and a peripheral portion 724, wherein the central portion 722 is exposed to the solder mask 750 and the patterned mask 770, and the peripheral portion 724 is exposed to the solder mask 750 and the patterned mask 770. Mask 770 covers. The thickness of the peripheral portion 724 is greater than the thickness of the central portion 722 . Each electroplating block 720 includes a metal foil layer 702 and a conductor layer 704 , wherein the conductor layer 704 is recessed and the metal foil layer 702 is still covered by the conductor layer 704 .

如第13圖所示,圖案化遮罩770被移除,並執行電鍍製程,以沉積金屬層760在所暴露的電鍍區塊720的表面上。沉積在具有較小面積的電鍍區塊720B上的金屬層760的厚度H2,大於沉積在具有較大面積的電鍍區塊720A上的金屬層760的厚度H1。於一些實施例中,金屬層760會嵌入電鍍區塊720B中,而金屬層760跟電鍍區塊720B之間的介面會低於防焊層750和電鍍區塊720B之間的介面。As shown in FIG. 13 , the patterned mask 770 is removed, and an electroplating process is performed to deposit a metal layer 760 on the exposed surface of the electroplated block 720 . The thickness H2 of the metal layer 760 deposited on the plated block 720B with the smaller area is greater than the thickness H1 of the metal layer 760 deposited on the plated block 720A with the larger area. In some embodiments, the metal layer 760 is embedded in the plated block 720B, and the interface between the metal layer 760 and the plated block 720B is lower than the interface between the solder mask 750 and the plated block 720B.

本揭露提供了一種製造電路板的方法,藉由適當地安排電鍍區塊的布局,可以使得電鍍時的電流密度更為均勻,進而讓電鍍厚度也變得更為均勻。因此,由此方法所製造的電路板上的接觸墊也可具有均勻的厚度。The present disclosure provides a method for manufacturing a circuit board. By properly arranging the layout of the electroplating blocks, the current density during electroplating can be made more uniform, thereby making the electroplating thickness more uniform. Therefore, the contact pads on the circuit board produced by this method can also have a uniform thickness.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何熟習此技藝者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed as above with examples, it is not intended to limit the present invention. Anyone skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection of the present invention The scope shall be determined by the scope of the appended patent application.

100,300,400,500,600,700:基板 102,702:核心層 104,704:金屬箔層 110,710:導體層 120,320,320A,320B,320C,320D,320E,420,420A,420B,420C,420D,520,520A,520B,520C,620,720A,720B:電鍍區塊 120A:第一電鍍區塊 120B:第二電鍍區塊 130,330,330A,330B,330C,330D,330E,430,430A,430B,430C,430D,530,520A,520B,520C,630,730:電鍍線 132:電鍍線尾段 130A:第一電鍍線 130B:第二電鍍線 140,340,440,540,640:夾具電極 150,750:防焊層 152:開口 154:穿孔 160,760:金屬層 162:底層金屬層 164:頂層金屬層 180:接觸墊 182:下部部分 184:上部部分 190,390,490,590,690,790:電鍍框 192,392,492,592,692:連接線 200:電路板 722:中心部分 724:周邊部分 770:圖案化遮罩 A-A:線段 W1,W2:寬度 T1,T2,T3,T4:厚度 S1:最頂表面 S2,S3:頂表面 G:間距 H1,H2:厚度 100,300,400,500,600,700: Substrate 102,702: Core Layer 104,704: Metal foil layer 110,710: Conductor layer 120, 320, 320A, 320B, 320C, 320D, 320E, 420, 420A, 420B, 420C, 420D, 520, 520A, 520B, 520C, 620, 720A, 720B: Electroplating Blocks 120A: The first electroplating block 120B: Second electroplating block 130, 330, 330A, 330B, 330C, 330D, 330E, 430, 430A, 430B, 430C, 430D, 530, 520A, 520B, 520C, 630, 730: Electroplating wire 132: Electroplating line tail 130A: The first plating line 130B: Second Electroplating Line 140, 340, 440, 540, 640: Clamp electrodes 150,750: Solder mask 152: Opening 154: Perforation 160,760: Metal Layer 162: Bottom metal layer 164: top metal layer 180: Contact pad 182: Lower part 184: Upper part 190,390,490,590,690,790: Electroplating frame 192,392,492,592,692: Connecting wires 200: circuit board 722: Center Section 724: Peripheral part 770: Patterned Mask A-A: line segment W1,W2: width T1,T2,T3,T4: Thickness S1: Topmost surface S2, S3: Top surface G: Spacing H1,H2: Thickness

為讓本發明之上述和其他目的、特徵、優點與實施例能更明顯易懂,所附圖式之詳細說明如下: 第1A圖至第7B圖繪示根據本揭露之電路板的製造方法之多個實施例的不同製造階段。 第8圖至第11圖分別為本揭露之製造電路板的方法之不同實施例的上視圖。 第12圖與第13圖分別為本揭露之製造電路板的方法另一實施例的剖面圖。 In order to make the above and other objects, features, advantages and embodiments of the present invention more clearly understood, the detailed description of the accompanying drawings is as follows: FIGS. 1A-7B illustrate different manufacturing stages of various embodiments of the circuit board manufacturing method according to the present disclosure. FIGS. 8 to 11 are top views of different embodiments of the method for manufacturing a circuit board of the present disclosure, respectively. FIG. 12 and FIG. 13 are respectively cross-sectional views of another embodiment of the method for manufacturing a circuit board of the present disclosure.

國內寄存資訊(請依寄存機構、日期、號碼順序註記) 無 國外寄存資訊(請依寄存國家、機構、日期、號碼順序註記) 無 Domestic storage information (please note in the order of storage institution, date and number) none Foreign deposit information (please note in the order of deposit country, institution, date and number) none

100:基板 102:核心層 120:電鍍區塊 120A:第一電鍍區塊 120B:第二電鍍區塊 130:電鍍線 130A:第一電鍍線 130B:第二電鍍線 140:夾具電極 190:電鍍框 192:連接線 A-A:線段 100: Substrate 102: Core Layer 120: Electroplating block 120A: The first electroplating block 120B: Second electroplating block 130: Electroplating line 130A: The first plating line 130B: Second Electroplating Line 140: Fixture electrode 190: Electroplating frame 192: connecting line A-A: line segment

Claims (10)

一種製造電路板的方法,包含: 形成一導體層於一基板的一表面上; 圖案化該導體層以定義複數個電鍍區塊以及複數個電鍍線,其中該些電鍍區塊包含至少兩種不同的尺寸,該些電鍍區塊中的一第一組由該些電鍍線中的一第一電鍍線連接,該些電鍍區塊的一第二組由該些電鍍線中的一第二電鍍線連接,其中該些電鍍區塊的該第一組的總面積與該些電鍍區塊的該第二組的總面積的比例約為1至5; 形成一防焊層於該基板的該表面上,其中該防焊層覆蓋該些電鍍線以及部分暴露該些電鍍區塊;以及 電鍍至少一金屬層在暴露的該些電鍍區塊上,其中該金屬層的最頂表面低於該防焊層的頂表面。 A method of manufacturing a circuit board, comprising: forming a conductor layer on a surface of a substrate; The conductor layer is patterned to define a plurality of electroplating blocks and a plurality of electroplating lines, wherein the electroplating blocks include at least two different sizes, and a first group of the electroplating blocks is composed of a plurality of electroplating lines. A first plating line is connected, a second group of the plating blocks is connected by a second plating line of the plating lines, wherein the total area of the first group of the plating blocks and the plating areas The proportion of the total area of this second group of blocks is about 1 to 5; forming a solder mask on the surface of the substrate, wherein the solder mask covers the electroplating lines and partially exposes the electroplating blocks; and Electroplating at least one metal layer on the exposed plated blocks, wherein the topmost surface of the metal layer is lower than the top surface of the solder mask. 如請求項1所述之方法,更包含在將該金屬層電鍍於暴露的該些電鍍區塊之後,在該些電鍍區塊之該第一組中之相鄰兩者之間的位置截斷該第一電鍍線,以及在該些電鍍區塊之該第二組中之相鄰兩者之間的位置截斷該第二電鍍線。The method of claim 1, further comprising, after electroplating the metal layer on the exposed electroplating blocks, cutting the metal layer at a position between two adjacent ones of the first group of the electroplating blocks a first electroplating line, and cutting the second electroplating line at a position between two adjacent ones of the second group of the electroplating blocks. 如請求項1所述之方法,更包含在將該金屬層電鍍於暴露的該些電鍍區塊之前,凹陷該些電鍍區塊中的至少一者。The method of claim 1, further comprising recessing at least one of the plated areas before electroplating the metal layer on the exposed plated areas. 如請求項1所述之方法,其中該些電鍍區塊之該第一組以串聯方式連接,該些電鍍區塊之該第二組以串聯方式連接。The method of claim 1, wherein the first group of the electroplating blocks are connected in series and the second group of the electroplating blocks are connected in series. 一種製造電路板的方法,包含: 形成一導體層於一基板的一表面上; 圖案化該導體層以定義複數個電鍍區塊以及一電鍍線,其中所有的該些電鍍區塊由該電鍍線連接; 形成一防焊層於該基板的該表面上,其中該防焊層覆蓋該電鍍線以及部分暴露該些電鍍區塊;以及 電鍍至少一金屬層在暴露的該些電鍍區塊上,其中該金屬層的最頂表面低於該防焊層的頂表面。 A method of manufacturing a circuit board, comprising: forming a conductor layer on a surface of a substrate; patterning the conductor layer to define a plurality of electroplating blocks and a electroplating line, wherein all the electroplating blocks are connected by the electroplating line; forming a solder mask on the surface of the substrate, wherein the solder mask covers the plated lines and partially exposes the plated blocks; and Electroplating at least one metal layer on the exposed plated blocks, wherein the topmost surface of the metal layer is lower than the top surface of the solder mask. 一種電路板,包含: 一基板; 複數個接觸墊,設置於該基板的一表面上,其中該些接觸墊包含複數個電鍍區塊與設置於該些電鍍區塊上的一金屬層,該些電鍍區塊包含至少兩種不同的尺寸;以及 一防焊層,覆蓋該基板的該表面與該些電鍍區塊的邊緣,其中該些接觸墊的最頂表面低於該防焊層的頂表面,且該些接觸墊的最頂表面與該防焊層的頂表面之間的間距大於0微米且小於5微米。 A circuit board containing: a substrate; A plurality of contact pads are disposed on a surface of the substrate, wherein the contact pads include a plurality of electroplating blocks and a metal layer disposed on the electroplating blocks, and the electroplating blocks include at least two different size; and a solder mask covering the surface of the substrate and the edges of the electroplating blocks, wherein the topmost surfaces of the contact pads are lower than the top surface of the solder mask, and the topmost surfaces of the contact pads are the same as the The spacing between the top surfaces of the solder mask is greater than 0 microns and less than 5 microns. 如請求項6所述之電路板,更包含一電鍍線尾段從該些電鍍區塊中的一第一電鍍區塊延伸並指向相鄰的一第二電鍍區塊。The circuit board of claim 6, further comprising an electroplating line tail extending from a first electroplating block among the electroplating blocks and pointing to an adjacent second electroplating block. 如請求項7所述之電路板,其中該電鍍線尾段與該第一電鍍區塊連接而不與該第二電鍍區塊連接。The circuit board of claim 7, wherein the plating line tail is connected to the first plating block but not to the second plating block. 如請求項6所述之電路板,更包含兩電鍍線尾段,分別自該些電鍍區塊中相鄰的兩者延伸並指向彼此。The circuit board of claim 6, further comprising two electroplating line tails extending from adjacent two of the electroplating blocks and pointing toward each other. 如請求項6所述之電路板,其中該金屬層嵌入該些電鍍區塊中的至少一者。The circuit board of claim 6, wherein the metal layer is embedded in at least one of the electroplating blocks.
TW109135387A 2020-10-13 2020-10-13 Circuit board and method of fabricating the same TWI764317B (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1585114A (en) * 2003-08-22 2005-02-23 全懋精密科技股份有限公司 Semiconductor sealing baseplate structure of electric padding metal protective layer and producing method thereof
TW200901420A (en) * 2007-06-29 2009-01-01 Phoenix Prec Technology Corp Package substrate structure and manufacturing method thereof
TW201021658A (en) * 2008-11-28 2010-06-01 Phoenix Prec Technology Corp Circuit board with embedded trace structure and method for preparing the same
TW201625094A (en) * 2014-12-18 2016-07-01 欣興電子股份有限公司 Circuit board and method of manufacturing the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1585114A (en) * 2003-08-22 2005-02-23 全懋精密科技股份有限公司 Semiconductor sealing baseplate structure of electric padding metal protective layer and producing method thereof
TW200901420A (en) * 2007-06-29 2009-01-01 Phoenix Prec Technology Corp Package substrate structure and manufacturing method thereof
TW201021658A (en) * 2008-11-28 2010-06-01 Phoenix Prec Technology Corp Circuit board with embedded trace structure and method for preparing the same
TW201625094A (en) * 2014-12-18 2016-07-01 欣興電子股份有限公司 Circuit board and method of manufacturing the same

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