TW201625094A - Circuit board and method of manufacturing the same - Google Patents

Circuit board and method of manufacturing the same Download PDF

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Publication number
TW201625094A
TW201625094A TW103144285A TW103144285A TW201625094A TW 201625094 A TW201625094 A TW 201625094A TW 103144285 A TW103144285 A TW 103144285A TW 103144285 A TW103144285 A TW 103144285A TW 201625094 A TW201625094 A TW 201625094A
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layer
electrode
circuit board
conductive layer
dielectric
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TW103144285A
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Chinese (zh)
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TWI586237B (en
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林建辰
林永清
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欣興電子股份有限公司
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Abstract

A circuit board and a manufacturing method thereof are provided. The circuit board includes a dielectric core, a passive device, a first circuit pattern, a second circuit pattern, a first conductive via and a second conductive via. The passive device has a main body, a first electrode and a second electrode. The first and second electrodes are disposed on two opposed sides of the main body, respectively. The first and the second electrodes have a first end and a second end opposite to each other, respectively. The second end of the first electrode and the second end of the second electrode are disposed in the dielectric core layer. The first end of the first electrode and the first end of the second electrode are protruded from the dielectric core. The first and second circuit patterns are disposed on the opposed surfaces of the dielectric core layer, respectively. The first conductive via is disposed in the dielectric core layer and is connected with the first circuit pattern and the second end of the first electrode and the second end of the second electrode. The second via is disposed in the dielectric core layer and is connected with the first circuit pattern and the second circuit pattern.

Description

線路板及其製作方法 Circuit board and manufacturing method thereof

本發明是有關於一種線路板及其製作方法,且特別是有關於一種具有內埋式元件的線路板及其製作方法。 The present invention relates to a circuit board and a method of fabricating the same, and more particularly to a circuit board having a buried component and a method of fabricating the same.

近年來,隨著電子技術的日新月異,使得更人性化的科技產品相繼問世,同時這些科技產品朝向輕、薄、短、小的趨勢設計。為了減少電子元件配置於線路板上的面積或符合其他需要,這些電子產品內可配置具有內埋式元件的線路板。 In recent years, with the rapid development of electronic technology, more humanized technology products have been introduced, and these technology products are designed to be light, thin, short and small. In order to reduce the area of the electronic components disposed on the circuit board or to meet other needs, a circuit board having embedded components may be disposed in the electronic products.

在目前習知的具有內埋式電子元件的線路板製程中,通常先在核心板中形成通孔。接著,以膠帶封閉通孔的一端,以形成用以容置電子元件的凹槽。然後,將電子元件置於凹槽中,並藉由膠帶使電子元件固定於凹槽中。之後,壓合介電材料與導電層。在壓合的過程中,介電材料會填入容置有電子元件的凹槽中。 In the conventional circuit board process with embedded electronic components, through holes are usually formed in the core board. Next, one end of the through hole is closed with a tape to form a recess for accommodating the electronic component. The electronic component is then placed in the recess and the electronic component is secured in the recess by tape. Thereafter, the dielectric material and the conductive layer are laminated. During the lamination process, the dielectric material fills into the recess in which the electronic component is housed.

然而,由於上述的凹槽需容置整個電子元件,因此核心板的厚度必然有一定的限制而無法持續薄化。此外,由於凹槽需符合電子元件的尺寸而具有一定的深度,因此容易造成介電材料 在壓合的過程中無法填滿凹槽而產生空隙的問題。 However, since the above-mentioned groove needs to accommodate the entire electronic component, the thickness of the core plate is necessarily limited and cannot be continuously thinned. In addition, since the groove needs to have a certain depth in accordance with the size of the electronic component, it is easy to cause a dielectric material. The problem of not being able to fill the grooves during the press-fitting process creates voids.

本發明提供一種線路板的製作方法,可製作具有較薄厚度的線路板。 The invention provides a method for manufacturing a circuit board, which can produce a circuit board having a thin thickness.

本發明提供一種線路板,其具有較薄的厚度。 The present invention provides a wiring board having a relatively thin thickness.

本發明提供一種線路板的製作方法,其包括下列步驟:首先,提供承載板,承載板包括介電基板以及位於介電基板上的第一導電層。接著,於第一導電層上形成圖案層,圖案層具有暴露出部分第一導電層的凹槽。然後,藉由黏著材料而將被動元件固定於凹槽中,其中被動元件具有主體以及分別配置於主體的相對二側上的第一電極與第二電極,第一電極與第二電極各自具有彼此相對的第一端與的第二端,第一電極的第一端與第二電極的第一端位於所述凹槽中,且第一電極的第二端以及第二電極的第二端突出於凹槽。之後,於圖案層上形成介電層。接著,分離承載板與第一導電層。然後,移除第一導電層。而後,至少移除部分黏著材料,以至少暴露出第一電極的第一端與第二電極的第一端。此外,於介電層中形成盲孔與通孔,盲孔暴露出所述第一電極的第二端與所述第二電極的第二端。最後,分別於介電層的相對二表面上形成第一線路圖案與第二線路圖案,以及分別於盲孔與通孔中形成第一導孔與第二導孔,其中第一線路圖案藉由第一導孔與所述第一電極的第二端以及所述第二電極的第二端電性連 接,且第二線路圖案藉由第二導孔與第一線路圖案電性連接。 The invention provides a method for manufacturing a circuit board, comprising the following steps: First, a carrier board is provided, the carrier board comprising a dielectric substrate and a first conductive layer on the dielectric substrate. Next, a pattern layer is formed on the first conductive layer, the pattern layer having a recess exposing a portion of the first conductive layer. Then, the passive component is fixed in the recess by the adhesive material, wherein the passive component has a main body and first and second electrodes respectively disposed on opposite sides of the main body, the first electrode and the second electrode respectively having each other The first end and the second end of the first electrode, the first end of the first electrode and the first end of the second electrode are located in the groove, and the second end of the first electrode and the second end of the second electrode protrude In the groove. Thereafter, a dielectric layer is formed on the pattern layer. Next, the carrier plate and the first conductive layer are separated. Then, the first conductive layer is removed. Then, at least a portion of the adhesive material is removed to expose at least the first end of the first electrode and the first end of the second electrode. In addition, a blind via and a via are formed in the dielectric layer, and the blind via exposes the second end of the first electrode and the second end of the second electrode. Finally, a first line pattern and a second line pattern are formed on opposite surfaces of the dielectric layer, and a first via hole and a second via hole are respectively formed in the blind via and the via hole, wherein the first line pattern is formed by The first via hole is electrically connected to the second end of the first electrode and the second end of the second electrode And the second line pattern is electrically connected to the first line pattern by the second via hole.

依照本發明實施例所述的線路板的製作方法,所述至少移除部分黏著材料的方法例如是進行濕式蝕刻製程,以移除整個黏著材料。 According to the manufacturing method of the circuit board according to the embodiment of the invention, the method for removing at least part of the adhesive material is, for example, performing a wet etching process to remove the entire adhesive material.

依照本發明實施例所述的線路板的製作方法,所述至少移除部分黏著材料的方法例如是進行雷射蝕刻處理,以移除整個或部分黏著材料。 According to the manufacturing method of the circuit board according to the embodiment of the invention, the method of removing at least part of the adhesive material is, for example, performing a laser etching process to remove all or part of the adhesive material.

依照本發明實施例所述的線路板的製作方法,所述圖案層的形成方法包括:首先,於第一導電層上形成罩幕層。接著,以罩幕層為罩幕,於第一導電層上形成材料層。然後移除罩幕層。 According to the method of fabricating a circuit board according to the embodiment of the invention, the method for forming the pattern layer comprises: first, forming a mask layer on the first conductive layer. Next, a mask layer is used as a mask to form a material layer on the first conductive layer. Then remove the mask layer.

依照本發明實施例所述的線路板的製作方法,所述材料層例如是金屬層,且於第一導電層上形成材料層的方法例如是進行電鍍製程。 According to the manufacturing method of the circuit board according to the embodiment of the invention, the material layer is, for example, a metal layer, and the method of forming a material layer on the first conductive layer is, for example, performing an electroplating process.

依照本發明實施例所述的線路板的製作方法,所述金屬層例如與第一導電層的材料相同。 According to the method of fabricating a circuit board according to an embodiment of the invention, the metal layer is, for example, the same material as the first conductive layer.

依照本發明實施例所述的線路板的製作方法,所述承載板更包括第二導電層與分離層,其中第二導電層位於介電基板與第一導電層之間,分離層位於第一導電層與第二導電層之間,且在分離承載板與第一導電層的過程中第一導電層與分離層分離。 According to the manufacturing method of the circuit board of the embodiment of the invention, the carrier board further includes a second conductive layer and a separation layer, wherein the second conductive layer is located between the dielectric substrate and the first conductive layer, and the separation layer is located at the first The first conductive layer and the separation layer are separated between the conductive layer and the second conductive layer, and during the process of separating the carrier and the first conductive layer.

依照本發明實施例所述的線路板的製作方法,所述被動元件例如是多層陶瓷電容器(multilayer ceramic capacitor;MLCC)。 According to the manufacturing method of the circuit board according to the embodiment of the invention, the passive component is, for example, a multilayer ceramic capacitor (MLCC).

本發明提供一種線路板,包括介電核心層、被動元件、 第一線路圖案、第二線路圖案、第一導孔以及第二導孔。被動元件具有主體以及分別配置於主體的相對二側上的第一電極與第二電極,其中第一電極與第二電極各自具有彼此相對的第一端與的第二端,第一電極的第二端與第二電極的第二端配置於介電核心層中,且第一電極的第一端與第二電極的第一端突出於介電核心層。第一線路圖案與第二線路圖案分別配置於介電核心層的相對二表面上。第一導孔配置於介電核心層中且連接第一線路圖案與第一電極的第二端以及第二電極的第二端。而第二導孔則配置於介電核心層中且連接第一線路圖案與第二線路圖案。 The invention provides a circuit board comprising a dielectric core layer, a passive component, a first line pattern, a second line pattern, a first via, and a second via. The passive component has a body and first and second electrodes respectively disposed on opposite sides of the body, wherein the first electrode and the second electrode each have a first end and a second end opposite to each other, the first electrode The second ends of the second ends and the second electrodes are disposed in the dielectric core layer, and the first ends of the first electrodes and the first ends of the second electrodes protrude from the dielectric core layer. The first line pattern and the second line pattern are respectively disposed on opposite surfaces of the dielectric core layer. The first via is disposed in the dielectric core layer and connects the first line pattern with the second end of the first electrode and the second end of the second electrode. The second via hole is disposed in the dielectric core layer and connects the first line pattern and the second line pattern.

依照本發明實施例所述的線路板,所述線路板更包括配置於介電基板上且至少暴露出第一電極的第一端與第二電極的第一端的黏著層。 According to the circuit board of the embodiment of the invention, the circuit board further includes an adhesive layer disposed on the dielectric substrate and exposing at least the first end of the first electrode and the first end of the second electrode.

依照本發明實施例所述的線路板,所述被動元件例如是多層陶瓷電容器。 According to the wiring board of the embodiment of the invention, the passive component is, for example, a multilayer ceramic capacitor.

基於上述,本發明是先以黏著材料將被動原件的一部分固定於凹槽中,再壓合作為介電核心層的介電層以覆蓋被動原件的剩餘部分,使得介電層可以緊密地包覆被動元件而不會有空隙存在被動元件與介電層之間。此外,由於被動元件部分埋於介電核心層中而非整個被動元件埋入介電核心層,因此可有效地減少線路板的厚度。另外,此部分埋入式被動元件結構所外露出來的電極可以直接當成接墊(pad)而與其他電子元件連接。 Based on the above, the invention firstly fixes a part of the passive original in the groove with the adhesive material, and then presses the dielectric layer of the dielectric core layer to cover the remaining part of the passive original, so that the dielectric layer can be tightly coated. The passive component does not have a gap between the passive component and the dielectric layer. In addition, since the passive component is partially buried in the dielectric core layer and the entire passive component is buried in the dielectric core layer, the thickness of the wiring board can be effectively reduced. In addition, the exposed electrode of the partially buried passive component structure can be directly connected to other electronic components as a pad.

為讓本發明的上述特徵和優點能更明顯易懂,下文特舉 實施例,並配合所附圖式作詳細說明如下。 In order to make the above features and advantages of the present invention more apparent, the following is a special The embodiments are described in detail below in conjunction with the drawings.

10、20‧‧‧線路板 10, 20‧‧‧ circuit board

15b、15c‧‧‧第一端 15b, 15c‧‧‧ first end

25b、25c‧‧‧第二端 25b, 25c‧‧‧ second end

100‧‧‧承載板 100‧‧‧ carrying board

101a、101b‧‧‧罩幕層 101a, 101b‧‧ ‧ cover layer

102‧‧‧介電基板 102‧‧‧ dielectric substrate

102a、102b、122、132‧‧‧表面 102a, 102b, 122, 132‧‧‧ surface

112a、112b‧‧‧介電層 112a, 112b‧‧‧ dielectric layer

103a、103b‧‧‧材料層 103a, 103b‧‧‧ material layer

104a、104b、108a、108b‧‧‧導電層 104a, 104b, 108a, 108b‧‧‧ conductive layer

105a、105b‧‧‧圖案層 105a, 105b‧‧‧ pattern layer

106a、106b‧‧‧分離層 106a, 106b‧‧‧ separation layer

107a、107b‧‧‧凹槽 107a, 107b‧‧‧ Groove

109‧‧‧黏著材料 109‧‧‧Adhesive materials

200a、200b‧‧‧結構 200a, 200b‧‧‧ structure

110‧‧‧被動元件 110‧‧‧ Passive components

110a‧‧‧主體 110a‧‧‧ Subject

110b、110c‧‧‧電極 110b, 110c‧‧‧ electrodes

113a、113b‧‧‧開口 113a, 113b‧‧‧ openings

114a、114b‧‧‧防焊層 114a, 114b‧‧‧ solder mask

115‧‧‧通孔 115‧‧‧through hole

116‧‧‧錫球 116‧‧‧ solder balls

117‧‧‧盲孔 117‧‧‧Blind hole

124、134‧‧‧線路圖案 124, 134‧‧‧ line pattern

125、127‧‧‧導孔 125, 127‧‧ ‧ guide hole

圖1A至圖1K為依照本發明的第一實施例所繪示的線路板的製作流程剖面示意圖。 1A to 1K are schematic cross-sectional views showing a manufacturing process of a circuit board according to a first embodiment of the present invention.

圖2A至圖2C為依照本發明的第二實施例所繪示的線路板的製作流程剖面示意圖。 2A-2C are schematic cross-sectional views showing a manufacturing process of a circuit board according to a second embodiment of the present invention.

圖1A至圖1K為依照本發明的第一實施例所繪示的線路板的製作流程剖面示意圖。首先,提供承載板100。在本實施例中,承載板100包括介電基板102、導電層104a與104b、分離層106a與106b以及導電層108a和108b。然而,本發明並不限於此,在其他實施例中,承載板可以僅包括介電基板以及配置於其上下二側的導電層,或者可以是本領域中常用的其他承載板。以下將先詳細說明本實施例的承載板100的製作方式。 1A to 1K are schematic cross-sectional views showing a manufacturing process of a circuit board according to a first embodiment of the present invention. First, the carrier board 100 is provided. In the present embodiment, the carrier board 100 includes a dielectric substrate 102, conductive layers 104a and 104b, separation layers 106a and 106b, and conductive layers 108a and 108b. However, the present invention is not limited thereto. In other embodiments, the carrier board may include only the dielectric substrate and the conductive layers disposed on the upper and lower sides thereof, or may be other carrier boards commonly used in the art. The manner in which the carrier board 100 of the present embodiment is fabricated will be described in detail below.

請參照圖1A,於介電基板102的相對的表面102a與表面102b上分別形成導電層104a、104b。介電基板102的材料例如為環氧樹脂,但不以此為限。導電層104a、104b例如是銅層。導電層104a、104b例如是藉由壓合的方式形成於介電基板102上。然後,分別於導電層104a、104b上形成分離層106a、106b。分離 層106a、106b的材料例如是有機無機之低黏著性複合物。接著,以電鍍或壓合方式將導電層108a、108b分別形成於分離層106a、106b上。導電層108a、108b例如是銅層。特別一提的是,分離層106a、106b具有低黏著性,可分別黏著導電層104a與導電層108a以及黏著導電層104b與導電層108b。 Referring to FIG. 1A, conductive layers 104a, 104b are formed on the opposite surfaces 102a and 102b of the dielectric substrate 102, respectively. The material of the dielectric substrate 102 is, for example, an epoxy resin, but is not limited thereto. The conductive layers 104a, 104b are, for example, copper layers. The conductive layers 104a, 104b are formed on the dielectric substrate 102, for example, by press bonding. Separate layers 106a, 106b are then formed on the conductive layers 104a, 104b, respectively. Separation The material of the layers 106a, 106b is, for example, an organic-inorganic low-adhesive composite. Next, conductive layers 108a, 108b are formed on the separation layers 106a, 106b, respectively, by plating or press bonding. The conductive layers 108a, 108b are, for example, copper layers. In particular, the separation layers 106a, 106b have low adhesion, and the conductive layer 104a and the conductive layer 108a and the adhesion conductive layer 104b and the conductive layer 108b may be adhered, respectively.

接著,請參照圖1B,分別於導電層108a、108b上形成罩幕層101a、101b。罩幕層101a、101b用來定義後續欲形成凹槽的位置。在本實施例中,可使用微影曝光的方式將罩幕層101a、101b分別形成於導電層108a、108b上。然後,以罩幕層101a、101b為罩幕,分別於導電層108a、108b上形成材料層103a、103b。材料層103a、103b可以是金屬層,並且此金屬層可與導電層108a、108b的材料相同。在本實施例中,於導電層108a、108b上形成材料層103a、103b的方法例如是進行電鍍製程。 Next, referring to FIG. 1B, mask layers 101a, 101b are formed on the conductive layers 108a, 108b, respectively. The mask layers 101a, 101b are used to define the locations at which the grooves are to be subsequently formed. In the present embodiment, the mask layers 101a, 101b may be formed on the conductive layers 108a, 108b, respectively, using lithographic exposure. Then, with the mask layers 101a, 101b as masks, material layers 103a, 103b are formed on the conductive layers 108a, 108b, respectively. The material layers 103a, 103b may be metal layers, and this metal layer may be the same material as the conductive layers 108a, 108b. In the present embodiment, the method of forming the material layers 103a, 103b on the conductive layers 108a, 108b is, for example, an electroplating process.

之後,請參照圖1C,移除罩幕層101a、101b,以分別形成圖案層105a、105b。圖案層105a具有暴露出部分導電層108a的凹槽107a,而圖案層105b具有暴露出部分導電層108b的凹槽107b。在本實施例中,凹槽107a、107b的位置、數量與大小皆相同,但本發明不限於此,可依需求改變凹槽的位置、數量與大小。 Thereafter, referring to FIG. 1C, the mask layers 101a, 101b are removed to form the pattern layers 105a, 105b, respectively. The pattern layer 105a has a groove 107a exposing a portion of the conductive layer 108a, and the pattern layer 105b has a groove 107b exposing a portion of the conductive layer 108b. In the present embodiment, the positions, the numbers, and the sizes of the grooves 107a, 107b are the same, but the present invention is not limited thereto, and the position, the number, and the size of the grooves can be changed as needed.

然後,請參照圖1D,於凹槽107a、107b中填入黏著材料109。黏著材料109例如是有機無機複合式熱固形材料。接著,將被動元件110置於凹槽107a、107b中,藉由黏著材料109將被動元件110固定於凹槽107a、107b中。在本實施例中,被動元件 110例如是多層陶瓷電容器,其具有主體110a以及分別配置於主體110a的相對二側上的電極110b、110c,其中電極110b具有彼此相對的第一端15b與第二端25b,而電極110c具有彼此相對的第一端15c與第二端25c。被動元件110的詳細結構為本領域技術人員所熟知,於此不另行說明。重要的是,被動元件110並未整個置於凹槽107a、107b中。在本實施例中,電極110b的第一端15b、電極110c的第一端15c以及一部分的主體110a置於凹槽107a、107b中,且電極110b的第二端25b、電極110c的第二端25c以及剩餘的主體110a突出於凹槽107a、107b。在其他實施例中,視元件的設計也可以是僅電極110b的第一端15b與電極110c的第一端15c置於凹槽107a、107b中。此外,被動元件110的位於凹槽107a、107b底部的部分並未接觸導電層108a、108b,即黏著材料109包覆被動元件110的位於凹槽107a、107b底部的部分,以避免後續移除導電層108a、108b時被動元件110受到損壞。另外,在本實施例中,固定於凹槽107a、107b中的被動元件110是相同的被動元件,但本發明不限於此,凹槽107a、107b中的被動元件也可以是不同的被動元件或者是凹槽107a中可以是被動元件而凹槽107b則是主動元件,又或者是凹槽107a中可以是主動元件而凹槽107b則是被動元件。 Then, referring to FIG. 1D, the adhesive material 109 is filled in the grooves 107a and 107b. The adhesive material 109 is, for example, an organic-inorganic composite thermosetting material. Next, the passive component 110 is placed in the recesses 107a, 107b, and the passive component 110 is secured in the recesses 107a, 107b by the adhesive material 109. In this embodiment, the passive component 110 is, for example, a multilayer ceramic capacitor having a body 110a and electrodes 110b, 110c respectively disposed on opposite sides of the body 110a, wherein the electrode 110b has a first end 15b and a second end 25b opposite to each other, and the electrodes 110c have each other The opposite first end 15c and second end 25c. The detailed structure of the passive component 110 is well known to those skilled in the art and will not be described herein. Importantly, the passive component 110 is not entirely disposed in the recesses 107a, 107b. In this embodiment, the first end 15b of the electrode 110b, the first end 15c of the electrode 110c, and a portion of the main body 110a are disposed in the grooves 107a, 107b, and the second end 25b of the electrode 110b and the second end of the electrode 110c 25c and the remaining body 110a protrude from the grooves 107a, 107b. In other embodiments, the view element may be designed such that only the first end 15b of the electrode 110b and the first end 15c of the electrode 110c are placed in the grooves 107a, 107b. In addition, portions of the passive component 110 at the bottom of the recesses 107a, 107b do not contact the conductive layers 108a, 108b, i.e., the adhesive material 109 covers portions of the passive component 110 at the bottom of the recesses 107a, 107b to avoid subsequent removal of conductive Passive element 110 is damaged when layers 108a, 108b. In addition, in the present embodiment, the passive elements 110 fixed in the grooves 107a, 107b are the same passive elements, but the invention is not limited thereto, and the passive elements in the grooves 107a, 107b may also be different passive elements or It may be that the recess 107a may be a passive component and the recess 107b is an active component, or the recess 107a may be an active component and the recess 107b may be a passive component.

而後,請參照圖1E,分別於圖案層105a、105b上形成介電層112a、112b。在本實施例中,介電層112a、112b覆蓋突出於凹槽107a、107b的被動元件110的部分(即電極110b的第二端 25b、電極110c的第二端25c以及部分的主體110a)。介電層112a、112b的材料例如是ABF膜(Ajinomoto build-up film)或半固化樹脂。在本實施例中,導電層114a與114b以及介電層112a、112b是藉由壓合的方式形成於圖案層105a、105b上。介電層112a、112b即為本發明所欲形成的線路板中的介電核心層,而被動元件110則部分埋於介電核心層中。 Then, referring to FIG. 1E, dielectric layers 112a, 112b are formed on the pattern layers 105a, 105b, respectively. In the present embodiment, the dielectric layers 112a, 112b cover portions of the passive component 110 that protrude from the recesses 107a, 107b (i.e., the second end of the electrode 110b) 25b, the second end 25c of the electrode 110c and a portion of the body 110a). The material of the dielectric layers 112a, 112b is, for example, an ABF film (Ajinomoto build-up film) or a semi-cured resin. In the present embodiment, the conductive layers 114a and 114b and the dielectric layers 112a and 112b are formed on the pattern layers 105a and 105b by press bonding. The dielectric layers 112a, 112b are the dielectric core layers in the circuit board to be formed by the present invention, and the passive components 110 are partially buried in the dielectric core layer.

其後,請參照圖1F,進行分離製程,將導電層108a、108b與介電基板102分離,以形成兩個內埋有被動元件110的結構200a與200b。在本實施例中,結構200a與200b具有相同的組成結構。由於分離層106a位於導電層108a與導電層104a之間,且分離層106b位於導電層108b與導電層104b之間,因此在分離製程中可輕易從分離層106a、106b處來將導電層108a與導電層104a分離。 Thereafter, referring to FIG. 1F, a separation process is performed to separate the conductive layers 108a, 108b from the dielectric substrate 102 to form two structures 200a and 200b in which the passive elements 110 are buried. In the present embodiment, the structures 200a and 200b have the same composition. Since the separation layer 106a is located between the conductive layer 108a and the conductive layer 104a, and the separation layer 106b is located between the conductive layer 108b and the conductive layer 104b, the conductive layer 108a can be easily separated from the separation layers 106a, 106b in the separation process. The conductive layer 104a is separated.

以下將以結構200a為例來對後續的製程做說明。請參照圖1G,對結構200a進行濕式蝕刻製程,以將結構200a中的導電層108a、114a與圖案層105a移除。由於黏著材料109包覆突出於介電層112a的電極110b的第一端15b、電極110c的第一端15c以及部分的主體110a,因此在上述濕式蝕刻製程中可避免被動元件110受到損壞。 The following process will be described by taking the structure 200a as an example. Referring to FIG. 1G, the structure 200a is subjected to a wet etching process to remove the conductive layers 108a, 114a and the pattern layer 105a in the structure 200a. Since the adhesive material 109 covers the first end 15b of the electrode 110b protruding from the dielectric layer 112a, the first end 15c of the electrode 110c, and a portion of the body 110a, the passive element 110 can be prevented from being damaged during the wet etching process described above.

接著,請參照圖1H,移除整個黏著材料109,以暴露電極110b的第一端15b以及電極110c的第一端15c。在本實施例中,移除黏著材料109的方法例如是進行濕式蝕刻製程。 Next, referring to FIG. 1H, the entire adhesive material 109 is removed to expose the first end 15b of the electrode 110b and the first end 15c of the electrode 110c. In the present embodiment, the method of removing the adhesive material 109 is, for example, a wet etching process.

由圖1H可以看出,在本實例中,由於介電層112a壓合 於固定有被動元件110的結構上,因此做為線路板中的介電核心層的介電層112a可以緊密地包覆被動元件110,而不會有空隙存在被動元件110與介電層112a之間。 As can be seen from FIG. 1H, in the present example, the dielectric layer 112a is pressed. In the structure in which the passive component 110 is fixed, the dielectric layer 112a serving as the dielectric core layer in the wiring board can tightly cover the passive component 110 without voids in the passive component 110 and the dielectric layer 112a. between.

然後,請參照圖1I,於介電層112a中形成盲孔117與通孔115,其中盲孔117暴露出電極110b的第二端25b以及電極110c的第二端25c。形成盲孔117與通孔115的方法例如是進行雷射鑽孔。在本實施例中,於介電層112a的表面132上進行雷射鑽孔以形成通孔115,但本發明不限於此,在其他實施例中亦可從介電層112a的表面122上進行雷射鑽孔以形成通孔115。 Then, referring to FIG. 1I, a blind via 117 and a via 115 are formed in the dielectric layer 112a, wherein the blind via 117 exposes the second end 25b of the electrode 110b and the second end 25c of the electrode 110c. The method of forming the blind holes 117 and the through holes 115 is, for example, laser drilling. In the present embodiment, laser drilling is performed on the surface 132 of the dielectric layer 112a to form the via 115. However, the present invention is not limited thereto, and may be performed from the surface 122 of the dielectric layer 112a in other embodiments. The laser is drilled to form a through hole 115.

之後,請參照圖1J,分別於於盲孔117與通孔115中形成導孔127、125。形成導孔127、125的方法例如是進行電鍍製程,或者是將導電材料(例如導電膠)填入盲孔117與通孔115中。然後,於介電層112a的表面122與表面132上分別形成線路圖案124、134。線路圖案124、134的形成方式為本領域技術人員所熟知,於此不另作說明。線路圖案124藉由導孔127與電極110b的第二端25b以及電極110c的第二端25c電性連接,而線路圖案134藉由導孔125與線路圖案124電性連接。如此一來,即可完成具有部分埋入式被動元件的線路板10的製作。 Thereafter, referring to FIG. 1J, via holes 127, 125 are formed in the blind vias 117 and the vias 115, respectively. The method of forming the via holes 127, 125 is, for example, performing an electroplating process, or filling a conductive material (for example, a conductive paste) into the blind vias 117 and the via holes 115. Then, line patterns 124, 134 are formed on the surface 122 and the surface 132 of the dielectric layer 112a, respectively. The manner in which the line patterns 124, 134 are formed is well known to those skilled in the art and will not be described herein. The circuit pattern 124 is electrically connected to the second end 25b of the electrode 110b and the second end 25c of the electrode 110c via the via 127, and the line pattern 134 is electrically connected to the line pattern 124 via the via 125. In this way, the fabrication of the circuit board 10 having the partially buried passive component can be completed.

特別一提的是,在本實施例中,線路圖案134的厚度與電極110b的第一端15b以及電極110c的第一端15c突出於介電層112a的表面132的厚度的差異落在3μm的範圍內。也就是說,線路圖案134的厚度可大於電極110b的第一端15b以及電極110c 的第一端15c突出於介電層112a的表面132的厚度,亦可小於電極110b的第一端15b以及電極110c的第一端15c突出於介電層112a的表面132的厚度,只要二者之間的差距不超過3μm即可。如此一來,可確保線路板10的線路圖案具有均勻的線路厚度。 In particular, in the present embodiment, the difference between the thickness of the line pattern 134 and the thickness of the first end 15b of the electrode 110b and the first end 15c of the electrode 110c protruding from the surface 132 of the dielectric layer 112a falls within 3 μm. Within the scope. That is, the thickness of the line pattern 134 may be greater than the first end 15b of the electrode 110b and the electrode 110c The first end 15c protrudes from the thickness of the surface 132 of the dielectric layer 112a, and may also be smaller than the thickness of the first end 15b of the electrode 110b and the first end 15c of the electrode 110c protruding from the surface 132 of the dielectric layer 112a, as long as the two The difference between them is no more than 3μm. In this way, it is ensured that the line pattern of the wiring board 10 has a uniform line thickness.

此外,由於線路板10可藉由突出於介電層112a的表面132的電極110b的第一端15b以及電極110c的第一端15c來做為接墊,所以線路板10不需形成額外的接墊來連接其他電子元件。 In addition, since the circuit board 10 can be used as a pad by the first end 15b of the electrode 110b protruding from the surface 132 of the dielectric layer 112a and the first end 15c of the electrode 110c, the circuit board 10 does not need to form an additional connection. Pad to connect other electronic components.

在本實施例中,在形成線路板10之後,還可以進一步對線路板10進行後續製程。請參照圖1K,於介電層112a的表面122上形成防焊層114a,並於介電層112a的表面132上形成防焊層114b。防銲層114a、114b的材料例如是一般熟知的綠漆。形成防焊層114a、114b的方法例如是噴墨式圖案印刷(ink-jet printing method)或一般的傳統影像轉移方式。防銲層114a覆蓋部分線路圖案124,且防銲層114a具有暴露出部分線路圖案124的開口113a。防銲層114a所暴露的線路圖案124可作為與外部元件連接的接墊。防銲層114b覆蓋部分線路圖案134,且防銲層114b具有暴露部分線路圖案134以及部分電極110b、110c的開口113b。然後,於開口113b中形成焊球116,焊球116連接線路圖案134以及電極110b、110c。焊球的材料例如是錫。如此一來,被動元件110可透過焊球116與其他電子元件電性連接。 In the present embodiment, after the circuit board 10 is formed, the subsequent process of the circuit board 10 can be further performed. Referring to FIG. 1K, a solder resist layer 114a is formed on the surface 122 of the dielectric layer 112a, and a solder resist layer 114b is formed on the surface 132 of the dielectric layer 112a. The material of the solder resist layers 114a, 114b is, for example, a commonly known green lacquer. The method of forming the solder resist layers 114a, 114b is, for example, an ink-jet printing method or a general conventional image transfer method. The solder resist layer 114a covers a portion of the wiring pattern 124, and the solder resist layer 114a has an opening 113a exposing a portion of the wiring pattern 124. The line pattern 124 exposed by the solder resist layer 114a can serve as a pad for connection to external components. The solder resist layer 114b covers a portion of the wiring pattern 134, and the solder resist layer 114b has an opening 113b exposing a portion of the wiring pattern 134 and the partial electrodes 110b, 110c. Then, solder balls 116 are formed in the openings 113b, and the solder balls 116 are connected to the wiring patterns 134 and the electrodes 110b and 110c. The material of the solder ball is, for example, tin. In this way, the passive component 110 can be electrically connected to other electronic components through the solder ball 116.

在本實施例中,線路板10是具有兩層線路圖案的線路板結構,當然,在其他實施例中,在形成防焊層114a、114b之前還 可視實際需求來進行增層製程,以製作具有所需層數的線路圖案。上述的增層製程為本領域技術人員所熟知,於此不另行說明。此外,在本實施例中,由於被動元件110是部分埋於介電層112a中,而非整個被動元件110埋入介電層112a中,因此可有效地減少線路板10的厚度。 In the present embodiment, the circuit board 10 is a circuit board structure having two layers of line patterns. Of course, in other embodiments, before the solder resist layers 114a, 114b are formed. The layering process can be performed according to actual needs to produce a line pattern having a desired number of layers. The above-described build-up process is well known to those skilled in the art and will not be described herein. Further, in the present embodiment, since the passive element 110 is partially buried in the dielectric layer 112a, and not the entire passive element 110 is buried in the dielectric layer 112a, the thickness of the wiring board 10 can be effectively reduced.

圖2A至圖2C是依照本發明的第二實施例所繪示的線路板的製作流程剖面示意圖。在此必須說明的是,下述實施例沿用前述實施例的部份製作流程,並對圖1F之結構200a進行後續的製程。因此,下述實施例將沿用前述實施例的元件標號與部分內容,其中採用相同的標號來表示相同或近似的元件,並且省略了相同技術內容的說明。關於省略部分的說明可參考前述實施例,下述實施例不再重複贅述。 2A-2C are schematic cross-sectional views showing a manufacturing process of a circuit board according to a second embodiment of the present invention. It should be noted here that the following embodiment follows the partial fabrication process of the foregoing embodiment and performs subsequent processes for the structure 200a of FIG. 1F. Therefore, the following embodiments will be used to refer to the same or similar elements in the above-mentioned embodiments, and the same reference numerals are used to denote the same or similar elements, and the description of the same technical content is omitted. For the description of the omitted portions, reference may be made to the foregoing embodiments, and the following embodiments are not repeated.

本實施例之線路板20的製作流程的可以採用與前述實施例之線路板10的製作流程大致相同的製作方式,在圖1F之後,對結構200a進行濕式蝕刻法製程,以將結構200a中的導電層108a、114a與圖案層105a移除。接著,如圖2A所示,移除部分黏著材料109,以電極110b的第一端15b以及電極110c的第一端15c。移除部分黏著材料109的方法例如是進行雷射蝕刻製程。在本實施例中,在進行雷射蝕刻製程期間,可同時進行雷射鑽孔以於介電層112a中形成盲孔117與通孔115。在本實施例中,進行雷射蝕刻製程後,被動元件110上還附著部分未移除的黏著材料109。在其他實施例中,雷射蝕刻製程亦可完全移除被動元件110 上所有黏著材料109,形成如圖11所示的結構。 The manufacturing process of the circuit board 20 of this embodiment can be performed in substantially the same manner as the manufacturing process of the circuit board 10 of the foregoing embodiment. After FIG. 1F, the structure 200a is subjected to a wet etching process to place the structure 200a. The conductive layers 108a, 114a are removed from the pattern layer 105a. Next, as shown in FIG. 2A, a portion of the adhesive material 109 is removed to the first end 15b of the electrode 110b and the first end 15c of the electrode 110c. A method of removing a portion of the adhesive material 109 is, for example, a laser etching process. In this embodiment, during the laser etching process, laser drilling may be simultaneously performed to form the blind vias 117 and the vias 115 in the dielectric layer 112a. In this embodiment, after the laser etching process, a portion of the adhesive material 109 that is not removed is also attached to the passive component 110. In other embodiments, the laser etch process can also completely remove the passive component 110. All of the adhesive material 109 is formed to form a structure as shown in FIG.

然後,如圖2B所示,分別於於盲孔117與通孔115中形成導孔127、125,以及於介電層112a的相對的表面122與表面132上分別形成線路圖案124、134。線路圖案124藉由導孔127與被動元件110的電極110b、110c電性連接,而線路圖案134藉由導孔125與線路圖案124電性連接。如此一來,即可完成部分埋入式被動元件的線路板20的製作。之後,可對線路板20進行後續製程。請參照圖2C,於介電層112a的表面122上形成防焊層114a,且防銲層114a具有暴露出部分線路圖案124的開口113a,以及於介電層112a的表面132上形成防焊層114b,且防銲層114b具有暴露部分線路圖案134以及部分電極110b、110c的開口113b。然後,於開口113b中形成焊球116,焊球116連接線路圖案134以及電極110b、110c。如此一來,被動元件110可透過焊球116與其他電子元件電性連接。 Then, as shown in FIG. 2B, via holes 127, 125 are formed in the blind vias 117 and the vias 115, respectively, and line patterns 124, 134 are formed on the opposite surfaces 122 and 132 of the dielectric layer 112a, respectively. The circuit pattern 124 is electrically connected to the electrodes 110b and 110c of the passive component 110 via the via 127, and the wiring pattern 134 is electrically connected to the wiring pattern 124 via the via 125. In this way, the fabrication of the circuit board 20 of the partially buried passive component can be completed. Thereafter, the circuit board 20 can be subsequently processed. Referring to FIG. 2C, a solder resist layer 114a is formed on the surface 122 of the dielectric layer 112a, and the solder resist layer 114a has an opening 113a exposing a portion of the wiring pattern 124, and a solder resist layer is formed on the surface 132 of the dielectric layer 112a. 114b, and the solder resist layer 114b has an opening 113b exposing a portion of the wiring pattern 134 and the partial electrodes 110b, 110c. Then, solder balls 116 are formed in the openings 113b, and the solder balls 116 are connected to the wiring patterns 134 and the electrodes 110b and 110c. In this way, the passive component 110 can be electrically connected to other electronic components through the solder ball 116.

在上述第一實施例與第二實施例中,介電基板102的表面102a以及表面102b皆會進行上述的製程步驟,但本發明不限於此。在其他實施例中,也可以僅在表面102a上或僅在表面102b上進行上述的製程步驟。 In the first embodiment and the second embodiment described above, the surface 102a and the surface 102b of the dielectric substrate 102 are subjected to the above-described process steps, but the invention is not limited thereto. In other embodiments, the process steps described above may also be performed only on surface 102a or only on surface 102b.

綜上所述,本發明先藉由黏著材料將被動元件的一部分固定於凹槽中,再壓合作為介電核心層的介電層,因此可使介電層緊密地包覆被動元件而不會在被動元件與介電層之間產生空隙。 In summary, the present invention first fixes a part of the passive component in the recess by the adhesive material, and then presses the dielectric layer into the dielectric core layer, so that the dielectric layer can tightly cover the passive component without A gap is created between the passive component and the dielectric layer.

此外,由於被動元件是部分埋於介電核心層中而非整個被動元件埋入介電核心層,因此可有效地薄化線路板。 In addition, since the passive component is partially buried in the dielectric core layer and the entire passive component is buried in the dielectric core layer, the wiring board can be effectively thinned.

另外,在本發明的線路板中,部分埋入式被動元件的電極可以做為接墊而與其他電子元件連接。 Further, in the wiring board of the present invention, the electrode of the partially buried passive component can be used as a pad to be connected to other electronic components.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。 Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any one of ordinary skill in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of the invention is defined by the scope of the appended claims.

10‧‧‧線路板 10‧‧‧ circuit board

15b、15c‧‧‧第一端 15b, 15c‧‧‧ first end

25b、25c‧‧‧第二端 25b, 25c‧‧‧ second end

112a‧‧‧介電層 112a‧‧‧ dielectric layer

110‧‧‧被動元件 110‧‧‧ Passive components

110a‧‧‧主體 110a‧‧‧ Subject

110b、110c‧‧‧電極 110b, 110c‧‧‧ electrodes

122、132‧‧‧表面 122, 132‧‧‧ surface

124、134‧‧‧線路圖案 124, 134‧‧‧ line pattern

125、127‧‧‧導孔 125, 127‧‧ ‧ guide hole

Claims (10)

一種線路板的製作方法,包括:提供承載板,所述承載板包括介電基板以及位於所述介電基板上的第一導電層;於所述第一導電層上形成圖案層,所述圖案層具有暴露出部分第一導電層的凹槽;藉由黏著材料而將被動元件固定於所述凹槽中,其中所述被動元件具有主體以及分別配置於所述主體的相對二側上的第一電極與第二電極,所述第一電極與所述第二電極各自具有彼此相對的第一端與的第二端,所述第一電極的第一端與所述第二電極的第一端位於所述凹槽中,且所述第一電極的第二端以及所述第二電極的第二端突出於所述凹槽;於所述圖案層上形成介電層;分離所述承載板與所述第一導電層;移除所述第一導電層;至少移除部分所述黏著材料,以暴露出所述第一電極的第一端與所述第二電極的第一端;於所述介電層中形成盲孔與通孔,所述盲孔暴露出所述第一電極的第二端與所述第二電極的第二端;以及分別於所述介電層的相對二表面上形成第一線路圖案與第二線路圖案,以及分別於所述盲孔與所述通孔中形成第一導孔與第二導孔,其中第一線路圖案藉由所述第一導孔與所述第一電極的 第二端以及所述第二電極的第二端電性連接,且第二線路圖案藉由所述第二導孔與所述第一線路圖案電性連接。 A method for fabricating a circuit board, comprising: providing a carrier board, the carrier board comprising a dielectric substrate and a first conductive layer on the dielectric substrate; forming a pattern layer on the first conductive layer, the pattern The layer has a recess exposing a portion of the first conductive layer; the passive component is fixed in the recess by an adhesive material, wherein the passive component has a body and a first surface disposed on opposite sides of the body An electrode and a second electrode, each of the first electrode and the second electrode having a first end and a second end opposite to each other, a first end of the first electrode and a first end of the second electrode An end is located in the recess, and a second end of the first electrode and a second end of the second electrode protrude from the recess; a dielectric layer is formed on the pattern layer; a plate and the first conductive layer; removing the first conductive layer; removing at least a portion of the adhesive material to expose a first end of the first electrode and a first end of the second electrode; Forming a blind hole and a through hole in the dielectric layer, the blind Exposing a second end of the first electrode and a second end of the second electrode; and forming a first line pattern and a second line pattern on opposite surfaces of the dielectric layer, respectively Forming a first via hole and a second via hole in the via hole and the through hole, wherein the first line pattern is formed by the first via hole and the first electrode The second end and the second end of the second electrode are electrically connected, and the second line pattern is electrically connected to the first line pattern by the second guiding hole. 如申請專利範圍第1項所述的線路板的製作方法,其中至少移除部分所述黏著材料的方法包括進行濕式蝕刻製程,以移除整個所述黏著材料。 The method of fabricating a circuit board according to claim 1, wherein the method of removing at least a portion of the adhesive material comprises performing a wet etching process to remove the entire adhesive material. 如申請專利範圍第1項所述的線路板的製作方法,其中至少移除部分所述黏著材料的方法包括進行雷射蝕刻處理,以移除整個或部分所述黏著材料。 The method of fabricating a circuit board according to claim 1, wherein the method of removing at least a portion of the adhesive material comprises performing a laser etching process to remove all or part of the adhesive material. 如申請專利範圍第1項所述的線路板的製作方法,其中所述圖案層的形成方法包括:於所述第一導電層上形成罩幕層;以所述罩幕層為罩幕,於所述第一導電層上形成材料層;以及移除所述罩幕層。 The method for fabricating a circuit board according to claim 1, wherein the method for forming the pattern layer comprises: forming a mask layer on the first conductive layer; and using the mask layer as a mask, Forming a material layer on the first conductive layer; and removing the mask layer. 如申請專利範圍第4項所述的線路板的製作方法,其中所述材料層為金屬層,且於所述第一導電層上形成所述材料層的方法包括進行電鍍製程。 The method of fabricating a circuit board according to claim 4, wherein the material layer is a metal layer, and the method of forming the material layer on the first conductive layer comprises performing an electroplating process. 如申請專利範圍第5項所述的線路板的製作方法,其中所述金屬層與所述第一導電層的材料相同。 The method of fabricating a circuit board according to claim 5, wherein the metal layer is the same material as the first conductive layer. 如申請專利範圍第1項所述的線路板的製作方法,其中所述承載板更包括第二導電層與分離層,其中所述第二導電層位於所述介電基板與所述第一導電層之間,所述分離層位於第一導電 層與第二導電層之間,且在分離所述承載板與所述第一導電層的過程中第一導電層與所述分離層分離。 The manufacturing method of the circuit board of claim 1, wherein the carrier board further comprises a second conductive layer and a separation layer, wherein the second conductive layer is located on the dielectric substrate and the first conductive layer Between the layers, the separation layer is located at the first conductive The first conductive layer is separated from the separation layer between the layer and the second conductive layer, and during the separation of the carrier plate from the first conductive layer. 一種線路板,包括:介電核心層層;被動元件,具有主體以及分別配置於所述主體的相對二側上的第一電極與第二電極,其中所述第一電極與所述第二電極各自具有彼此相對的第一端與第二端,所述第一電極的第二端與所述第二電極的第二端配置於所述介電核心層中,且所述第一電極的第一端與所述第二電極的第一端突出於所述介電核心層;第一線路圖案與第二線路圖案,分別配置於所述介電核心層的相對二表面上;第一導孔,配置於所述介電核心層中且連接所述第一線路圖案與所述第一電極的第二端以及所述第二電極的第二端;以及第二導孔,配置於所述介電核心層中且連接所述第一線路圖案與所述第二線路圖案。 A circuit board comprising: a dielectric core layer; a passive component having a body and first and second electrodes respectively disposed on opposite sides of the body, wherein the first electrode and the second electrode Each of the first end and the second end opposite to each other, the second end of the first electrode and the second end of the second electrode are disposed in the dielectric core layer, and the first electrode a first end of the second electrode protrudes from the dielectric core layer; a first line pattern and a second line pattern are respectively disposed on opposite surfaces of the dielectric core layer; the first via hole Disposed in the dielectric core layer and connecting the first line pattern with the second end of the first electrode and the second end of the second electrode; and a second via hole disposed in the dielectric layer And connecting the first line pattern and the second line pattern in the electric core layer. 如申請專利範圍第8項所述的線路板,更包括黏著層,配置於所述介電核心層上且至少暴露出所述第一電極的第一端與所述第二電極的第一端。 The circuit board of claim 8, further comprising an adhesive layer disposed on the dielectric core layer and exposing at least the first end of the first electrode and the first end of the second electrode . 如申請專利範圍第8項所述的線路板,其中所述被動元件包括多層陶瓷電容器。 The circuit board of claim 8, wherein the passive component comprises a multilayer ceramic capacitor.
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11304310B1 (en) 2020-10-13 2022-04-12 Macronix International Co., Ltd. Method of fabricating circuit board
TWI764317B (en) * 2020-10-13 2022-05-11 旺宏電子股份有限公司 Circuit board and method of fabricating the same
TWI803114B (en) * 2021-12-22 2023-05-21 大陸商鵬鼎控股(深圳)股份有限公司 Circuit board with embedded component and method of fabricating the same
TWI807407B (en) * 2021-08-05 2023-07-01 大陸商宏啟勝精密電子(秦皇島)有限公司 Flexible circuit board and method of manufacturing the same

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CN103906372B (en) * 2012-12-27 2017-03-01 碁鼎科技秦皇岛有限公司 There is circuit board of embedded element and preparation method thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11304310B1 (en) 2020-10-13 2022-04-12 Macronix International Co., Ltd. Method of fabricating circuit board
TWI764317B (en) * 2020-10-13 2022-05-11 旺宏電子股份有限公司 Circuit board and method of fabricating the same
US11678439B2 (en) 2020-10-13 2023-06-13 Macronix International Co., Ltd. Circuit board
TWI807407B (en) * 2021-08-05 2023-07-01 大陸商宏啟勝精密電子(秦皇島)有限公司 Flexible circuit board and method of manufacturing the same
TWI803114B (en) * 2021-12-22 2023-05-21 大陸商鵬鼎控股(深圳)股份有限公司 Circuit board with embedded component and method of fabricating the same

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