TWI760737B - Flexible circuit substrate and chip on film package structure - Google Patents

Flexible circuit substrate and chip on film package structure Download PDF

Info

Publication number
TWI760737B
TWI760737B TW109114581A TW109114581A TWI760737B TW I760737 B TWI760737 B TW I760737B TW 109114581 A TW109114581 A TW 109114581A TW 109114581 A TW109114581 A TW 109114581A TW I760737 B TWI760737 B TW I760737B
Authority
TW
Taiwan
Prior art keywords
area
circuit substrate
flexible circuit
film
chip
Prior art date
Application number
TW109114581A
Other languages
Chinese (zh)
Other versions
TW202143431A (en
Inventor
廖峻鋐
Original Assignee
南茂科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 南茂科技股份有限公司 filed Critical 南茂科技股份有限公司
Priority to TW109114581A priority Critical patent/TWI760737B/en
Priority to CN202010553325.8A priority patent/CN113594126A/en
Publication of TW202143431A publication Critical patent/TW202143431A/en
Application granted granted Critical
Publication of TWI760737B publication Critical patent/TWI760737B/en

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49838Geometry or layout
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/4985Flexible insulating substrates

Abstract

A flexible circuit substrate includes a flexible film, a plurality of leads, and a solder resist layer. The flexible film has two transmission areas located on both sides of the flexible film and a packaging area located between the two transmission areas. The packaging area has a chip bonding area, a coverage area surrounding the chip bonding area, and an external connection area located outside the coverage area. The plurality of leads are disposed on the flexible film and located in the packaging area. The plurality of leads includes a plurality of inner lead portions and a plurality of outer lead portions. The plurality of inner lead portions extend into the chip bonding area, and the plurality of outer lead portions extend from the coverage area to the external connection area and are arranged adjacent to each other between the two transmission areas, wherein each of the outermost outer lead portions has at least one hollow pattern. The solder resist layer is disposed on the flexible film and is located in the coverage area. The solder resist layer partially covers the plurality of leads and exposes the chip bonding area and the external connection area. A chip on film package structure is also provided.

Description

可撓性線路基板及薄膜覆晶封裝結構Flexible circuit substrate and thin film flip chip package structure

本發明是有關於一種線路基板與封裝結構,且特別是有關於一種可撓性線路基板與薄膜覆晶封裝結構。 The present invention relates to a circuit substrate and a packaging structure, and more particularly, to a flexible circuit substrate and a film-on-chip packaging structure.

薄膜覆晶(Chip-On-Film,COF)封裝結構是一種應用捲帶自動接合技術的封裝結構。由於薄膜覆晶封裝結構與其他元件(如面板等)之間的接合需為高密度接合,因此通常會於可撓性薄膜的傳輸區域與外接引腳之間的空白區域設計用於外引腳接合作業的對位標記(alignment mark),而對位標記一般是在引腳形成製程時一併形成的實心金屬圖案,透過確認此對位標記與其他元件上的對位圖案在形狀和位置上的對應重合,以確保外引腳接合作業的準確度。 Chip-on-Film (COF) packaging structure is a packaging structure using tape and reel automatic bonding technology. Since the bonding between the film-on-chip package structure and other components (such as panels, etc.) needs to be high-density bonding, the blank area between the transmission area of the flexible film and the external pins is usually designed for external pins The alignment mark of the bonding operation, and the alignment mark is generally a solid metal pattern formed together with the lead forming process. By confirming that the alignment mark and the alignment pattern on other components are in shape and position The corresponding coincidence to ensure the accuracy of the outer pin bonding operation.

然而,隨著積體電路密集度提高,位於空白區域上的實心對位標記越來越靠近傳輸區域,機台上帶動可撓性薄膜移動的機構或與薄膜覆晶封裝結構一起捲收的間隔帶(Spacer)上的凸點易造成實心對位標記損傷或摩擦變色,進而造成對位標記反光或 變形而導致對位標記的對位精準度變差,降低薄膜覆晶封裝結構與其他元件之間的接合良率。 However, as the density of integrated circuits increases, the solid alignment marks on the blank area are getting closer and closer to the transfer area, and the mechanism on the machine that drives the flexible film to move or the gap between the film-on-chip packaging structure and the winding The bumps on the tape (Spacer) can easily cause damage to the solid alignment mark or discoloration by friction, which in turn causes the alignment mark to reflect light or The deformation leads to poor alignment accuracy of the alignment marks, and reduces the bonding yield between the thin film-on-chip package structure and other components.

本發明提供一種可撓性線路基板與薄膜覆晶封裝結構,其用來作為對位標記的鏤空圖案可以具有較佳的對位精準度,以增加薄膜覆晶封裝結構與其他元件之間的接合良率。 The present invention provides a flexible circuit substrate and a chip-on-film packaging structure. The hollow pattern used as an alignment mark can have better alignment accuracy, so as to increase the bonding between the chip-on-film packaging structure and other components. Yield.

本發明的一種可撓性線路基板,包括可撓性薄膜、多個引腳以及防銲層。可撓性薄膜具有位於可撓性薄膜兩側的二個傳輸區域與位於二個傳輸區域之間的封裝區域。封裝區域內具有晶片接合區、環繞晶片接合區的覆蓋區與位於覆蓋區外側的外接區。多個引腳設置於可撓性薄膜上且位於封裝區域內。多個引腳包括多個內引腳部與多個外引腳部,多個內引腳部延伸入晶片接合區內,多個外引腳部自覆蓋區內延伸至外接區且在二個傳輸區域之間相鄰排列,其中最外側的外引腳部分別具有至少一鏤空圖案。防銲層設置於可撓性薄膜上且位於覆蓋區。防銲層局部覆蓋多個引腳並暴露出晶片接合區與外接區。 A flexible circuit substrate of the present invention comprises a flexible film, a plurality of pins and a solder resist layer. The flexible film has two transmission areas located on both sides of the flexible film and an encapsulation area located between the two transmission areas. The package area includes a die bonding area, a coverage area surrounding the die bonding area, and an external area outside the coverage area. A plurality of pins are arranged on the flexible film and located in the package area. The plurality of pins include a plurality of inner pin portions and a plurality of outer pin portions, the plurality of inner pin portions extend into the die bonding area, and the plurality of outer pin portions extend from the coverage area to the outer area and are located between the two The transmission areas are arranged adjacent to each other, wherein the outermost outer pin portions respectively have at least one hollow pattern. The solder mask is arranged on the flexible film and is located in the coverage area. The solder mask partially covers the plurality of pins and exposes the die bonding area and the external area.

在本發明的一實施例中,上述的最外側的外引腳部為最接近二個傳輸區域的二個外引腳部。 In an embodiment of the present invention, the outermost outer lead portions are the two outer lead portions closest to the two transmission regions.

在本發明的一實施例中,上述的至少一鏤空圖案貫穿最外側的外引腳部,且暴露出可撓性薄膜。 In an embodiment of the present invention, the above-mentioned at least one hollow pattern penetrates the outermost outer pin portion and exposes the flexible film.

在本發明的一實施例中,上述的最外側的外引腳部為虛 設引腳。 In an embodiment of the present invention, the above-mentioned outermost outer pin portion is a dummy Set pins.

在本發明的一實施例中,以俯視觀之,上述的至少一鏤空圖案的形狀為矩形、圓形、T字形、十字形或其組合。 In an embodiment of the present invention, in a plan view, the shape of the at least one hollow pattern is a rectangle, a circle, a T-shape, a cross, or a combination thereof.

在本發明的一實施例中,上述的至少一鏤空圖案包括二個鏤空圖案。 In an embodiment of the present invention, the above-mentioned at least one hollow pattern includes two hollow patterns.

在本發明的一實施例中,上述的二個鏤空圖案沿外引腳部的延伸方向排列。 In an embodiment of the present invention, the above-mentioned two hollow patterns are arranged along the extending direction of the outer lead portion.

在本發明的一實施例中,上述的最外側的外引腳部的寬度大於其餘的外引腳部的寬度。 In an embodiment of the present invention, the width of the outermost outer lead portion is greater than the width of the remaining outer lead portions.

在本發明的一實施例中,上述的最外側的外引腳部的寬度介於100微米至350微米。 In an embodiment of the present invention, the width of the outermost outer lead portion is between 100 μm and 350 μm.

在本發明的一實施例中,上述的最外側的外引腳部至可撓性薄膜的邊緣的最短距離不小於3.5毫米。 In an embodiment of the present invention, the shortest distance from the outermost outer pin portion to the edge of the flexible film is not less than 3.5 mm.

本發明的一種薄膜覆晶封裝結構,包括上述的可撓性線路基板以及晶片。晶片配置於可撓性線路基板上,且位於晶片接合區內,其中晶片電性連接多個內引腳部。 A film-on-chip package structure of the present invention includes the above-mentioned flexible circuit substrate and a chip. The chip is disposed on the flexible circuit substrate, and is located in the chip bonding area, wherein the chip is electrically connected to the plurality of inner lead parts.

基於上述,在本發明的薄膜覆晶封裝結構中,利用在可撓性線路基板的最外側的外引腳部上形成透光的至少一鏤空圖案,在光源(正光源或背光源)的輔助下,可以透過鏤空圖案觀看到位於下方的其他元件(例如面板)上的對位圖案,因此可以用來作為薄膜覆晶封裝結構與其他元件接合時的對位標記。此外,由於鏤空圖案位於最外側的外引腳部上,如此一來,相較於設計於傳輸 區域與引腳之間空白區域上的實心對位標記而言,鏤空圖案可以較遠離傳輸區域,因此可避免機台上帶動可撓性線路基板移動的機構或間隔帶上的凸點造成對位標記損傷或摩擦變色,進而防止因對位標記損傷變色而導致薄膜覆晶封裝結構與其他元件無法準確對位的情況發生。換句話說,可撓性線路基板上用來作為對位標記的鏤空圖案可以具有較佳的對位精準度,以增加薄膜覆晶封裝結構與其他元件之間的接合良率。 Based on the above, in the film-on-chip package structure of the present invention, at least one hollow pattern that transmits light is formed on the outermost lead portion of the flexible circuit substrate, and the auxiliary light source (positive light source or backlight source) is used. At the bottom, the alignment pattern on other components (such as a panel) located below can be seen through the hollow pattern, so it can be used as an alignment mark when the thin-film-on-chip package structure is bonded to other components. In addition, since the hollow pattern is located on the outermost pin part, it is more efficient than design in transmission For the solid alignment mark on the blank area between the area and the pin, the hollow pattern can be farther away from the transfer area, so it can avoid the alignment caused by the mechanism on the machine that drives the flexible circuit substrate or the bumps on the spacer belt. Mark damage or friction discoloration, thereby preventing the occurrence of the situation that the film-on-chip packaging structure and other components cannot be accurately aligned due to the damage and discoloration of the alignment mark. In other words, the hollow pattern used as the alignment mark on the flexible circuit substrate can have better alignment accuracy, so as to increase the bonding yield between the film-on-chip package structure and other components.

為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。 In order to make the above-mentioned features and advantages of the present invention more obvious and easy to understand, the following embodiments are given and described in detail with the accompanying drawings as follows.

10:傳輸區域 10: Transfer area

12:傳輸孔 12: Transmission hole

20:封裝區域 20: Package area

202:晶片接合區 202: Wafer Bonding Area

204:覆蓋區 204: Coverage area

206:外接區 206: Outboard area

30:其他元件 30: Other components

31:對位圖案 31: Alignment pattern

100、100a、100b:薄膜覆晶封裝結構 100, 100a, 100b: Thin film flip chip package structure

110:可撓性線路基板 110: Flexible circuit substrate

112:可撓性薄膜 112: Flexible film

114、115:引腳 114, 115: pins

1141:內引腳部 1141: Inner pin part

1142、1142’:外引腳部 1142, 1142': outer pin part

1142a、1142a1、1142a2:鏤空圖案 1142a, 1142a1, 1142a2: hollow pattern

1152:實心對位標記 1152: Solid registration mark

116:防銲層 116: Solder mask

120:晶片 120: Wafer

A:區域 A: area

A1:空白區域 A1: Blank area

D:延伸方向 D: extension direction

E:邊緣 E: edge

w1、w2:寬度 w1, w2: width

L:最短距離 L: shortest distance

圖1A是本發明一實施例的薄膜覆晶封裝結構的俯視示意圖。 FIG. 1A is a schematic top view of a chip on film packaging structure according to an embodiment of the present invention.

圖1B是圖1A的區域A的放大示意圖。 FIG. 1B is an enlarged schematic view of area A of FIG. 1A .

圖1C是圖1A的薄膜覆晶封裝結構與其他元件接合時的局部放大示意圖。 FIG. 1C is a partially enlarged schematic view of the chip on film package structure of FIG. 1A when it is bonded with other components.

圖1D是先前技術的薄膜覆晶封裝結構的局部俯視示意圖。 FIG. 1D is a partial top plan view of a chip-on-film packaging structure of the prior art.

圖2是本發明另一實施例的薄膜覆晶封裝結構的局部俯視示意圖。 FIG. 2 is a partial top plan view of a chip on film packaging structure according to another embodiment of the present invention.

圖3是本發明又一實施例的薄膜覆晶封裝結構的局部俯視示意圖。 FIG. 3 is a partial top plan view of a chip on film packaging structure according to another embodiment of the present invention.

參照本實施例之圖式以更全面地闡述本發明。然而,本發明亦可以各種不同的形式體現,而不應限於本文中所述之實施例。圖式中的層或區域的厚度、尺寸或大小會為了清楚起見而放大。 The present invention is more fully described with reference to the drawings of this embodiment. However, the present invention may be embodied in various forms and should not be limited to the embodiments described herein. The thickness, size or size of layers or regions in the drawings may be exaggerated for clarity.

圖1A是本發明一實施例的薄膜覆晶封裝結構的俯視示意圖。圖1B是圖1A的區域A的放大示意圖。圖1C是圖1A的薄膜覆晶封裝結構與其他元件接合時的局部放大示意圖。圖1D是先前技術的薄膜覆晶封裝結構的局部俯視示意圖。請同時參考圖1A至圖1C,在本實施例中,薄膜覆晶封裝結構100包括可撓性線路基板110以及晶片120,其中可撓性線路基板110包括可撓性薄膜112、多個引腳114以及防銲層116。 FIG. 1A is a schematic top view of a chip on film packaging structure according to an embodiment of the present invention. FIG. 1B is an enlarged schematic view of area A of FIG. 1A . FIG. 1C is a partially enlarged schematic view of the chip on film package structure of FIG. 1A when it is bonded with other components. FIG. 1D is a partial top plan view of a chip-on-film packaging structure of the prior art. 1A to FIG. 1C at the same time, in this embodiment, the chip on film package structure 100 includes a flexible circuit substrate 110 and a chip 120, wherein the flexible circuit substrate 110 includes a flexible film 112, a plurality of pins 114 and solder mask 116 .

進一步而言,可撓性薄膜112具有分別位於兩側的二個傳輸區域10與位於二個傳輸區域10之間的封裝區域20,其中傳輸區域10上可以具有傳輸孔12,以供傳輸以及定位。封裝區域20內具有晶片接合區202、環繞晶片接合區202的覆蓋區204與位於覆蓋區204外側的外接區206。此外,可撓性薄膜112的材質例如是聚乙烯對苯二甲酸酯(polyethylene terephthalate,PET)、聚醯亞胺(Polyimide,PI)、聚醚(polyethersulfone,PES)、碳酸脂(polycarbonate,PC)或其他適合的可撓性材料。 Further, the flexible film 112 has two transmission areas 10 located on both sides and an encapsulation area 20 located between the two transmission areas 10, wherein the transmission area 10 may have transmission holes 12 for transmission and positioning . The package area 20 includes a die bonding area 202 , a coverage area 204 surrounding the die bonding area 202 , and an external area 206 located outside the coverage area 204 . In addition, the material of the flexible film 112 is, for example, polyethylene terephthalate (PET), polyimide (PI), polyethersulfone (PES), and carbonate (PC). ) or other suitable flexible material.

多個引腳114設置於可撓性薄膜112上且位於封裝區域20內。多個引腳114包括多個內引腳部1141與多個外引腳部 1142,其中多個內引腳部1141延伸入晶片接合區202內,而多個外引腳部1142自覆蓋區204內延伸至外接區206且在二個傳輸區域10之間相鄰排列。此外,最外側的外引腳部1142’分別具有至少一鏤空圖案1142a。 A plurality of pins 114 are disposed on the flexible film 112 and located in the package area 20 . The plurality of pins 114 include a plurality of inner pin parts 1141 and a plurality of outer pin parts 1142 , wherein a plurality of inner lead portions 1141 extend into the die bonding area 202 , and a plurality of outer lead portions 1142 extend from the coverage area 204 to the outer area 206 and are adjacently arranged between the two transfer areas 10 . In addition, the outermost outer pin portions 1142' respectively have at least one hollow pattern 1142a.

另一方面,防銲層116設置於可撓性薄膜112上且位於覆蓋區204,防銲層116局部覆蓋多個引腳114並暴露出晶片接合區202與外接區206。晶片120配置於可撓性線路基板110上,且位於晶片接合區202內,其中晶片120電性連接多個內引腳部1141。更具體而言,晶片120透過多個金屬凸塊(圖未繪示)電性連接多個內引腳部1141。 On the other hand, the solder mask layer 116 is disposed on the flexible film 112 and located in the cover area 204 , and the solder mask layer 116 partially covers the plurality of pins 114 and exposes the die bonding area 202 and the external area 206 . The chip 120 is disposed on the flexible circuit substrate 110 and located in the chip bonding area 202 , wherein the chip 120 is electrically connected to the plurality of inner lead portions 1141 . More specifically, the chip 120 is electrically connected to the plurality of inner lead portions 1141 through a plurality of metal bumps (not shown).

在本實施例的薄膜覆晶封裝結構100中,由於可撓性線路基板110的鏤空圖案1142a為透光,在光源(正光源或背光源)的輔助下,可以透過鏤空圖案1142a觀看到下方的圖案,因此可用來作為薄膜覆晶封裝結構100接合其他元件(例如面板)時的對位標記。更具體而言,請參考圖1C,當進行薄膜覆晶封裝結構100上的外引腳部1142與其他元件30上的電性端子(圖未繪示)的接合作業時,可透過透光的鏤空圖案1142a觀看其形狀與其他元件30上的對位圖案31是否重合對應,進而使得外引腳部1142與電性端子可以準確接合。此外,由於鏤空圖案1142a是設置於最外側的外引腳部1142’上,如此一來,相較於圖1D中設計於傳輸區域10與引腳115之間空白區域A1上的實心對位標記1152而言,鏤空圖案1142a可以較遠離傳輸區域10,因此可避免傳輸過程中機 台上帶動可撓性線路基板110移動的機構(例如棘輪或是滾輪)刮傷對位標記,或者在可撓性線路基板110與間隔帶一起捲收時,避免間隔帶上對應傳輸區域10附近設置的凸點摩擦損傷對位標記,進而防止因對位標記損傷而導致薄膜覆晶封裝結構100與其他元件無法準確對位的情況發生。換句話說,可撓性線路基板110上用來作為對位標記的鏤空圖案1142a可以具有較佳的對位精準度,以增加薄膜覆晶封裝結構與其他元件之間的接合良率。 In the chip-on-film package structure 100 of the present embodiment, since the hollow pattern 1142a of the flexible circuit substrate 110 is light-transmitting, with the aid of a light source (positive light source or a backlight), the hollow pattern 1142a can be used to view the lower side. The pattern can be used as an alignment mark when the chip on film package structure 100 is bonded to other components (eg, a panel). More specifically, referring to FIG. 1C , when the external lead portion 1142 on the chip-on-film package structure 100 and the electrical terminals (not shown) on the other components 30 are joined together, the transparent transparent The shape of the hollow pattern 1142a corresponds to whether the shape of the hollow pattern 1142a coincides with the alignment pattern 31 on the other components 30, so that the outer pin portion 1142 and the electrical terminal can be accurately connected. In addition, since the hollow pattern 1142a is disposed on the outermost outer pin portion 1142', as a result, compared with the solid alignment mark designed on the blank area A1 between the transmission area 10 and the pin 115 in FIG. 1D For 1152, the hollow pattern 1142a can be farther away from the transmission area 10, so it can avoid the machine during the transmission process. The mechanism (such as a ratchet or roller) on the stage that drives the flexible circuit substrate 110 to move scratches the alignment marks, or when the flexible circuit substrate 110 is rolled up with the spacer belt, avoid the spacer belt near the corresponding transmission area 10 The provided bumps are rubbed to damage the alignment marks, thereby preventing the occurrence of a situation where the thin film chip-on-package structure 100 and other components cannot be accurately aligned due to damage to the alignment marks. In other words, the hollow pattern 1142a used as the alignment mark on the flexible circuit substrate 110 can have better alignment accuracy, so as to increase the bonding yield between the thin film on chip package structure and other components.

進一步而言,目前的實心對位標記1152通常是與引腳115在同一製程中形成,其形成方式一般是將銅層以蝕刻方式形成各自分離的引腳115及實心對位標記1152並於銅層上形成鍍錫層。實心對位標記1152若與機台上的帶動機構或間隔帶上的凸點發生摩擦也可能導致實心對位標記1152變色而影響影像的判讀,進而造成無法準確對位的情況發生。因此,藉由本實施例中鏤空圖案1142a的設計,即便最外側的外引腳部1142’上的錫層受到摩擦而變色也不會影響鏤空圖案1142a的判讀,因此可避免對位不良的情況發生。 Further, the current solid alignment marks 1152 are usually formed in the same process as the pins 115, and the formation method is generally to etch the copper layer to form the respective separated pins 115 and the solid alignment marks 1152, and then the copper layer is formed. A tin plating layer is formed on the layer. If the solid alignment mark 1152 rubs with the driving mechanism on the machine or the bump on the spacer belt, it may also cause the solid alignment mark 1152 to change color and affect the interpretation of the image, thereby causing the inability to accurately align. Therefore, with the design of the hollow pattern 1142a in this embodiment, even if the tin layer on the outermost pin portion 1142' is rubbed and discolored, the interpretation of the hollow pattern 1142a will not be affected, so the occurrence of poor alignment can be avoided. .

在一實施例中,最外側的外引腳部1142’可以為最接近二個傳輸區域10的二個外引腳部1142。然而,本發明不限於此,最外側的外引腳部1142’的數量與位置可以視實際設計上的需求而定。 In one embodiment, the outermost outer pin parts 1142' may be the two outer pin parts 1142 closest to the two transmission regions 10. However, the present invention is not limited thereto, and the number and position of the outermost outer pin portions 1142' may be determined according to actual design requirements.

在一實施例中,至少一鏤空圖案1142a可以是貫穿最外側的外引腳部1142’且暴露出可撓性薄膜112,因此光源可以選擇 使用正光源或背光源,以使光源在選擇上更具有彈性,但本發明不限於此。 In one embodiment, at least one hollow pattern 1142a may penetrate through the outermost pin portion 1142' and expose the flexible film 112, so the light source can be selected A positive light source or a backlight source is used to make the selection of the light source more flexible, but the present invention is not limited thereto.

在一實施例中,最外側的外引腳部1142’例如為虛設引腳(dummy lead),但本發明不限於此。在此,虛設引腳例如是位於可可撓性薄膜112上沒有訊號引腳通過的區域,僅設置於用來補強可撓性薄膜112的結構強度。 In one embodiment, the outermost lead portion 1142' is, for example, a dummy lead, but the invention is not limited thereto. Here, the dummy pins are, for example, located on the flexible film 112 where no signal pins pass through, and are only provided to reinforce the structural strength of the flexible film 112 .

在一實施例中,如圖1A與圖1B所示,鏤空圖案1142a可以為多個鏤空圖案1142a。舉例而言,鏤空圖案1142a可以包括二個鏤空圖案1142a1、1142a2。此外,以俯視觀之,鏤空圖案1142a的形狀可以為矩形、圓形、T字形、十字形或其組合。舉例而言,二個鏤空圖案1142a1、1142a2可以分別是圓形與矩形的組合。然而,本發明不限於此,在其他實施例中,多個鏤空圖案1142a的數量與形狀可以具有不同的組合態樣。 In one embodiment, as shown in FIGS. 1A and 1B , the hollow pattern 1142a may be a plurality of hollow patterns 1142a. For example, the hollow pattern 1142a may include two hollow patterns 1142a1 and 1142a2. In addition, in a top view, the shape of the hollow pattern 1142a may be a rectangle, a circle, a T-shape, a cross shape or a combination thereof. For example, the two hollow patterns 1142a1 and 1142a2 may be a combination of a circle and a rectangle, respectively. However, the present invention is not limited thereto, and in other embodiments, the number and shape of the plurality of hollow patterns 1142a may have different combinations.

在一實施例中,二個鏤空圖案1142a1、1142a2可以沿外引腳部1142的延伸方向D排列。然而,本發明不限於此,二個鏤空圖案1142a1、1142a2依實際設計上的需求也可以具有不同的排列方式。 In one embodiment, the two hollow patterns 1142a1 and 1142a2 may be arranged along the extending direction D of the outer lead portion 1142 . However, the present invention is not limited to this, and the two hollow patterns 1142a1 and 1142a2 may also have different arrangements according to actual design requirements.

在一實施例中,最外側的外引腳部1142’的寬度w1可以大於其餘的外引腳部1142的寬度w2,以使最外側的外引腳部1142’具有較大空間可以設置鏤空圖案1142a。舉例而言,最外側的外引腳部1142’的寬度w1可以是介於100微米(micrometer,μm)至350微米,而其餘的外引腳部1142的寬度w2可以介於20微米 至40微米。然而,本發明不限於此,最外側的外引腳部1142’的寬度w1與其餘的外引腳部1142的寬度w2可以依實際設計上的需求進行調整。 In one embodiment, the width w1 of the outermost outer pin portion 1142 ′ may be greater than the width w2 of the remaining outer pin portions 1142 , so that the outermost outer pin portion 1142 ′ has a larger space for setting the hollow pattern. 1142a. For example, the width w1 of the outermost outer lead portion 1142' may be between 100 micrometers (micrometer, μm) to 350 micrometers, and the width w2 of the remaining outer lead portions 1142 may be between 20 micrometers to 40 microns. However, the present invention is not limited thereto, and the width w1 of the outermost outer pin portion 1142' and the width w2 of the remaining outer pin portions 1142 can be adjusted according to actual design requirements.

在一實施例中,最外側的外引腳部1142’至可撓性薄膜112的邊緣E可以具有最短距離L,以避免在傳動過程中刮傷最外側的外引腳部1142’,進而降低薄膜覆晶封裝結構100的接合良率。舉例而言,最短距離L可以是不小於3.5毫米(millimeter,mm),但本發明不限於此。 In one embodiment, the outermost outer pin portion 1142' to the edge E of the flexible film 112 may have the shortest distance L, so as to avoid scratching the outermost outer pin portion 1142' during the transmission process, thereby reducing the Bonding yield of the chip on film package structure 100 . For example, the shortest distance L may be not less than 3.5 millimeters (millimeter, mm), but the present invention is not limited thereto.

在此必須說明的是,以下實施例沿用上述實施例的元件標號與部分內容,其中採用相同或近似的標號來表示相同或近似的元件,並且省略了相同技術內容的說明,關於省略部分的說明可參考前述實施例,下述實施例不再重複贅述。 It must be noted here that the following embodiments use the element numbers and parts of the above-mentioned embodiments, wherein the same or similar numbers are used to represent the same or similar elements, and the description of the same technical content is omitted, and the description of the omitted part is omitted. Reference may be made to the foregoing embodiments, and detailed descriptions in the following embodiments will not be repeated.

圖2是本發明另一實施例的薄膜覆晶封裝結構的局部俯視示意圖。請參考圖2,本實施例的薄膜覆晶封裝結構100a類似於上述實施例的薄膜覆晶封裝結構100,而其差別在於:二個鏤空圖案1142a1、1142a2可以分別是T字形與矩形的組合。 FIG. 2 is a partial top plan view of a chip on film packaging structure according to another embodiment of the present invention. Referring to FIG. 2 , the chip-on-film package structure 100a of this embodiment is similar to the chip-on-film package structure 100 in the above-mentioned embodiment, but the difference is that the two hollow patterns 1142a1 and 1142a2 can be a combination of T-shape and rectangle, respectively.

圖3是本發明又一實施例的薄膜覆晶封裝結構的局部俯視示意圖。請參考圖3,本實施例的薄膜覆晶封裝結構100b類似於上述實施例的薄膜覆晶封裝結構100,而其差別在於:二個鏤空圖案1142a1、1142a2可以分別是十字形與T字形的組合。 FIG. 3 is a partial top plan view of a chip on film packaging structure according to another embodiment of the present invention. Referring to FIG. 3 , the chip on film package structure 100b of this embodiment is similar to the chip on film package structure 100 in the above-mentioned embodiment, and the difference is that the two hollow patterns 1142a1 and 1142a2 can be a combination of a cross shape and a T shape, respectively. .

應說明的是,本發明不限制前述實施例中的鏤空圖案1142a的數量形狀及其排列組合態樣,只要最外側的外引腳部 1142’分別具有至少一鏤空圖案1142a皆屬於本發明的保護範圍。 It should be noted that the present invention does not limit the number, shape and arrangement of the hollow patterns 1142a in the foregoing embodiments, as long as the outermost pin portion is the outermost Each of 1142' having at least one hollow pattern 1142a belongs to the protection scope of the present invention.

綜上所述,在本發明的薄膜覆晶封裝結構中,利用在可撓性線路基板的最外側的外引腳部上形成透光的至少一鏤空圖案,在光源的輔助下,可以透過鏤空圖案觀看到位於下方的其他元件(例如面板)上的對位圖案,因此可用來作為薄膜覆晶封裝結構與其他元件接合時的對位標記。此外,由於鏤空圖案設置於最外側的外引腳部上,如此一來,相較於設計於傳輸區域與引腳之間空白區域上的實心對位標記而言,鏤空圖案可以較遠離傳輸區域,因此可避免機台上帶動可撓性線路基板移動的機構或間隔帶上的凸點造成對位標記損傷或摩擦變色,進而防止因對位標記損傷變色而導致薄膜覆晶封裝結構與其他元件無法準確對位的情況發生。換句話說,可撓性線路基板上用來作為對位標記的鏤空圖案可以具有較佳的對位精準度,以增加薄膜覆晶封裝結構與其他元件之間的接合良率。 To sum up, in the chip-on-film package structure of the present invention, at least one hollow pattern that transmits light is formed on the outermost pin portion of the flexible circuit substrate, and with the assistance of a light source, the hollow pattern can be transmitted through the hollow. The pattern sees the alignment pattern on other components (such as a panel) located below, so it can be used as an alignment mark when the thin-film-on-chip package structure is bonded to other components. In addition, since the hollow pattern is disposed on the outermost outer pin portion, the hollow pattern can be farther away from the transmission area than the solid alignment marks designed on the blank area between the transmission area and the lead. Therefore, it can avoid the alignment mark damage or friction discoloration caused by the mechanism on the machine that drives the flexible circuit substrate to move or the bumps on the spacer belt, thereby preventing the film-on-chip packaging structure and other components from being damaged and discolored due to the alignment mark. A situation where accurate alignment is not possible occurs. In other words, the hollow pattern used as the alignment mark on the flexible circuit substrate can have better alignment accuracy, so as to increase the bonding yield between the film-on-chip package structure and other components.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。 Although the present invention has been disclosed as above with examples, it is not intended to limit the present invention. Anyone with ordinary knowledge in the technical field can make some changes and modifications without departing from the spirit and scope of the present invention. The protection scope of the present invention shall be determined by the scope of the appended patent application.

10:傳輸區域10: Transfer area

12:傳輸孔12: Transmission hole

20:封裝區域20: Package area

202:晶片接合區202: Wafer Bonding Area

204:覆蓋區204: Coverage area

206:外接區206: Outboard area

100:薄膜覆晶封裝結構100: Thin film flip chip package structure

110:可撓性線路基板110: Flexible circuit substrate

112:可撓性薄膜112: Flexible film

114:引腳114: pin

1141:內引腳部1141: Inner pin part

1142、1142’:外引腳部1142, 1142': outer pin part

1142a、1142a1、1142a2:鏤空圖案1142a, 1142a1, 1142a2: hollow pattern

116:防銲層116: Solder mask

120:晶片120: Wafer

A:區域A: area

D:延伸方向D: extension direction

E:邊緣E: edge

Claims (10)

一種可撓性線路基板,包括:可撓性薄膜,具有位於所述可撓性薄膜兩側的二個傳輸區域與位於所述二個傳輸區域之間的封裝區域,其中所述封裝區域內具有晶片接合區、環繞所述晶片接合區的覆蓋區與位於所述覆蓋區外側的外接區;多個引腳,設置於所述可撓性薄膜上且位於所述封裝區域內,所述多個引腳包括多個內引腳部與多個外引腳部,所述多個內引腳部延伸入所述晶片接合區內,所述多個外引腳部自所述覆蓋區內延伸至所述外接區且在所述二個傳輸區域之間相鄰排列,其中最外側的所述外引腳部分別具有至少一鏤空圖案,其中所述至少一鏤空圖案僅貫穿最外側的所述外引腳部,且暴露出所述可撓性薄膜;以及防銲層,設置於所述可撓性薄膜上且位於所述覆蓋區,所述防銲層局部覆蓋所述多個引腳並暴露出所述晶片接合區與所述外接區。 A flexible circuit substrate, comprising: a flexible film, having two transmission areas located on both sides of the flexible film and an encapsulation area located between the two transmission areas, wherein the encapsulation area has a die bonding area, a covering area surrounding the die bonding area, and an external area located outside the covering area; a plurality of pins are disposed on the flexible film and located in the packaging area, the plurality of pins The lead includes a plurality of inner lead portions and a plurality of outer lead portions, the plurality of inner lead portions extend into the die bonding area, and the plurality of outer lead portions extend from the footprint area to The outer region is adjacently arranged between the two transmission regions, wherein the outermost pin portions respectively have at least one hollow pattern, wherein the at least one hollow pattern only penetrates the outermost outer portion. a lead portion, and the flexible film is exposed; and a solder resist layer, disposed on the flexible film and located in the coverage area, the solder resist layer partially covers the plurality of leads and exposes extracting the wafer bonding area and the external area. 如請求項1所述的可撓性線路基板,其中最外側的所述外引腳部為最接近所述二個傳輸區域的二個所述外引腳部。 The flexible circuit substrate according to claim 1, wherein the outermost lead portions are the two outer lead portions closest to the two transmission regions. 如請求項1所述的可撓性線路基板,其中最外側的所述外引腳部為虛設引腳。 The flexible circuit substrate according to claim 1, wherein the outermost pin portion is a dummy pin. 如請求項1所述的可撓性線路基板,其中以俯視觀之,所述至少一鏤空圖案的形狀為矩形、圓形、T字形、十字形或其組合。 The flexible circuit substrate according to claim 1, wherein in a top view, the shape of the at least one hollow pattern is a rectangle, a circle, a T-shape, a cross shape or a combination thereof. 如請求項1所述的可撓性線路基板,其中所述至少一鏤空圖案包括二個鏤空圖案。 The flexible circuit substrate of claim 1, wherein the at least one hollow pattern includes two hollow patterns. 如請求項5所述的可撓性線路基板,其中所述二個鏤空圖案沿所述外引腳部的延伸方向排列。 The flexible circuit substrate according to claim 5, wherein the two hollow patterns are arranged along the extending direction of the outer lead portion. 如請求項1所述的可撓性線路基板,其中最外側的所述外引腳部的寬度大於其餘的所述外引腳部的寬度。 The flexible wiring substrate according to claim 1, wherein the outermost lead portion has a width greater than that of the remaining outer lead portions. 如請求項7所述的可撓性線路基板,其中最外側的所述外引腳部的所述寬度介於100微米至350微米。 The flexible circuit substrate according to claim 7, wherein the width of the outermost lead portion is between 100 microns and 350 microns. 如請求項1所述的可撓性線路基板,其中最外側的所述外引腳部至所述可撓性薄膜的邊緣的最短距離不小於3.5毫米。 The flexible circuit substrate according to claim 1, wherein the shortest distance from the outermost pin portion to the edge of the flexible film is not less than 3.5 mm. 一種薄膜覆晶封裝結構,包括:如申請專利範圍第1項至第9項中任一項所述的可撓性線路基板;以及晶片,配置於所述可撓性線路基板上,且位於所述晶片接合區內,其中所述晶片電性連接所述多個內引腳部。 A film-on-chip package structure, comprising: the flexible circuit substrate according to any one of the first to ninth claims in the scope of application; and a chip, disposed on the flexible circuit substrate and located in the flexible circuit substrate in the die bonding area, wherein the die is electrically connected to the plurality of inner lead portions.
TW109114581A 2020-04-30 2020-04-30 Flexible circuit substrate and chip on film package structure TWI760737B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW109114581A TWI760737B (en) 2020-04-30 2020-04-30 Flexible circuit substrate and chip on film package structure
CN202010553325.8A CN113594126A (en) 2020-04-30 2020-06-17 Flexible circuit substrate and chip-on-film package structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW109114581A TWI760737B (en) 2020-04-30 2020-04-30 Flexible circuit substrate and chip on film package structure

Publications (2)

Publication Number Publication Date
TW202143431A TW202143431A (en) 2021-11-16
TWI760737B true TWI760737B (en) 2022-04-11

Family

ID=78237874

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109114581A TWI760737B (en) 2020-04-30 2020-04-30 Flexible circuit substrate and chip on film package structure

Country Status (2)

Country Link
CN (1) CN113594126A (en)
TW (1) TWI760737B (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102890348A (en) * 2012-10-18 2013-01-23 深圳市华星光电技术有限公司 COF (chip on film) base band, manufacturing method of COF base band, liquid crystal display module
US8808837B2 (en) * 2007-12-21 2014-08-19 Lg Electronics Inc. Flexible film and display device comprising the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8808837B2 (en) * 2007-12-21 2014-08-19 Lg Electronics Inc. Flexible film and display device comprising the same
CN102890348A (en) * 2012-10-18 2013-01-23 深圳市华星光电技术有限公司 COF (chip on film) base band, manufacturing method of COF base band, liquid crystal display module

Also Published As

Publication number Publication date
CN113594126A (en) 2021-11-02
TW202143431A (en) 2021-11-16

Similar Documents

Publication Publication Date Title
US7728945B2 (en) Structure for circuit assembly
JP4068635B2 (en) Wiring board
US8274166B2 (en) Semiconductor device and method of manufacturing the same
US5768107A (en) Electric circuit substrate having a multilayer alignment mark structure
JP2006228761A (en) Tab tape and manufacturing method thereof
US20160111299A1 (en) Methods of Fabricating Tape Film Packages
JP2008283195A (en) Alignment mark, semiconductor chip including the same, semiconductor package including the chip and methods of fabricating the same
US10177012B2 (en) Wiring substrate and electronic component device
KR20030004060A (en) Wiring substrate having position information
US9313880B2 (en) Printed circuit board, printed circuit board assembly sheet and method of manufacturing the same
US20230387375A1 (en) Method of manufacturing electronic device
US20220393087A1 (en) Led display substrate and method for manufacturing the same, display panel
TWI760737B (en) Flexible circuit substrate and chip on film package structure
TWI662672B (en) Chip on film package structure
JP2012209284A (en) Method of manufacturing wiring substrate
JPH01119088A (en) Printed wiring board for mounting surface mounting parts
JP2003264349A (en) Alignment mark structure in electric circuit board
US7488675B2 (en) Method for fabricating IC board without ring structure
TWI726441B (en) Flexible circuit substrate and chip-on-film package structure
TWI798805B (en) Semiconductor package substrate and manufacturing method thereof
JP3759703B2 (en) Semiconductor device using COF film and manufacturing method thereof
JP4969377B2 (en) Semiconductor device
JP2005203388A (en) Semiconductor device and manufacturing method thereof
CN117913055A (en) Electronic device and method for manufacturing the same
JP2005197355A (en) Semiconductor device and manufacturing method thereof, circuit board, and electronic equipment