TWI759815B - Elastic and electroconductive pin, manufacturing method thereof and probe card using the same - Google Patents

Abstract

An elastic and electroconductive pin includes surface-modified nano-fullerene spheres, surface-modified nano-metal particles and surface-modified graphene each having surface function groups; and a polymeric material for crosslinking the surface-modified nano-fullerene spheres, nano-metal particles and graphene together to form a pin structure, wherein the surface function groups enhances bonding between the surface-modified nano-fullerene spheres, nano-metal particles and graphene to increase the transfer paths for electrons, and increasing the adhering strengths between the polymeric material and the surface-modified nano-fullerene spheres, surface-modified nano-metal particles and surface-modified graphene. A manufacturing method for the pin and a probe card using the pin are also disclosed.

Description

Elastic conductive cylinder, manufacturing method and probe card using the same

The present invention relates to an elastic conductive cylinder, a manufacturing method and a probe card using the same, and particularly relates to a surface-modified nanofuller sphere, a surface-modified nano-metal particle and a surface Modified graphene, elastic conductive column formed by combining with polymer material, manufacturing method and probe card using the same.

With the rapid development of the semiconductor industry, electrical testing of semiconductor devices has become very important. The probe card (Probe card) with multiple conductive columns is the medium between the wafer and the electronic test system. bridge to complete the electrical test of the wafer.

As the size of components decreases and the frequency of product use increases, the column spacing and resistance of component testing also need to be reduced and reduced to meet future component testing designs. At present, there are many types of test cylinders, including: probe card, spring form (pogo pin) and soft silicone type (rubber socket), etc. These probes are made of: rhenium/tungsten (La/W), nickel/gold (Ni/Au) and copper/palladium/silver alloys (Cu/Pd/Ag), some materials have low hardness, resulting in continuous friction during the test and loss of service life (currently, the service life of soft silicone rubber is about 40 to 80K times) ), as the number of uses increases, the electrical stability decreases and affects the test measurement results. In addition, the surface of the component to be tested also has metal components, such as tin (Sn), silver (Ag), copper (Cu) etc., during the test process, the contact between the two causes the probe surface and the metal to be tested to produce a eutectic effect, and these adherent particles will increase the resistance and affect the reliability and yield. According to the above-mentioned technical development problems, in order to meet the demand for thinner and lighter internal components, reduce product expenditure costs and improve the added value of product quality testing, nanofuller spheres and silicone polymers are used to develop materials such as A flexible cylinder with long life, anti-sticking, low clearing frequency and low resistance is produced.

The US7438563 patent discloses a connector for testing a semiconductor package. The material combination used in this case is to coat the surface of the silicone ball with nickel/gold conductive material, mix it with the silicone, and finally use the magnetron method to manufacture and integrate the semiconductor electrical properties. Test components. However, such connectors suffer from low lifetime, high test pressure and high resistance and high cost.

Therefore, how to improve the problems of low lifetime, high test pressure, high resistance and high expenditure cost of the current soft test probe (material composition: gold/nickel/polymer) is the problem to be solved in this case.

Therefore, the purpose of the present invention is to provide an elastic conductive cylinder with low current, low test compression force and long life, a manufacturing method and a probe card using the same.

In order to achieve the above purpose, the present invention provides an elastic conductive cylinder, comprising: a surface-modified nanofuller sphere, a surface-modified nano-metal particle and a surface-modified graphene, each of which has a surface functional group. And polymer material, the nanofuller sphere that described surface modification has crossed, the nano metal particle that described surface modification has crossed and the graphene that described surface modification has crossed together to form a columnar shape Structure, by the surface functional groups to increase the bonding between the surface-modified nanofuller spheres, the surface-modified nano-metal particles and the surface-modified graphene , in order to increase the electron transfer path, and increase the polymer material, the surface-modified nanofuller sphere, the surface-modified nano-metal Adhesion strength of particles and the surface-modified graphene.

The present invention further provides a probe card, comprising: a frame body; a base plate, disposed on the frame body and having a plurality of holes; and a plurality of the elastic conductive pillars, penetrating the holes of the base plate and protruding Out of both sides of the substrate for electrical contact.

The present invention further provides a method for manufacturing an elastic conductive pillar, comprising the following steps: providing nanofuller spheres, nano metal particles and graphene; Graphene, so that the nanofuller sphere, the nano metal particles and the graphene generate surface functional groups; the nanofuller sphere, the surface modified nanofuller sphere, the The surface-modified nano-metal particles and the surface-modified graphene are linked together to form a mixture; and the mixture is hot-pressed to form a columnar structure, which is increased by the surface functional groups The surface-modified nanofuller spheres, the surface-modified nano-metal particles and the surface-modified graphene are bonded to each other to increase the electron transfer path and increase the The adhesion strength of the polymer material, the surface-modified nanofuller spheres, the surface-modified nano-metal particles, and the surface-modified graphene.

With the above embodiments, an elastic conductive cylinder with low current, low test compression force, and long life can be provided, using nanofuller with high hardness, high mechanical strength (high hardness and high elastic strength) and electrical conductivity. The sphere, combined with nano-silver particles (or nano-silver flakes), graphene and polymer materials, can replace the materials of the existing soft test probes to improve test life, reduce test pressure, resistance and cost.

In order to make the above-mentioned content of the present invention more obvious and easy to understand, the preferred embodiments are exemplified below, and are described in detail as follows in conjunction with the accompanying drawings.

S10, S20, S30, S40: Steps

10: Elastic conductive cylinder

14: Columnar structure

15: Hydrophobic material layer

20: Frame

30: Substrate

32: Holes

100: Probe card

[FIG. 1] is a schematic cross-sectional view of an elastic conductive cylinder according to a preferred embodiment of the present invention.

[FIG. 2] shows a partial cross-sectional schematic diagram of a probe card according to a preferred embodiment of the present invention.

[FIG. 3] is a flow chart showing a manufacturing method of an elastic conductive cylinder according to a preferred embodiment of the present invention.

[FIG. 4] shows the microstructure diagram of the elastic conductive cylinder according to the preferred embodiment of the present invention.

[Fig. 5] shows a silver composition distribution diagram of [Fig. 4].

[FIG. 6] shows the distribution diagram of the nanofuller spheres and graphene of [FIG. 4].

[ Fig. 7 ] is a diagram showing the distribution of oxygen atoms in [ Fig. 4 ].

The present disclosure proposes to use nanofuller spheres with high hardness, high mechanical strength (high hardness and high elastic strength) and electrical conductivity, combined with nanosilver particles (or nanosilver flakes), graphene and polymer materials, To replace the material of the existing soft test probe to improve test life, reduce test pressure, resistance and cost.

Furthermore, the present disclosure utilizes the combination of hydrophobic material, conductive material and macromolecular material (such as silicone, resin or rubber) to mold components with electrical conductivity and elasticity. Abrasive and elastic cylinder.

The basic purpose of the present disclosure is to reduce the size of the product components used in high-frequency components (eg, 5G components) and artificial intelligence. In addition, the frequency of the component under test increases, so that the overall resistance of the tested cylinder will decrease. Therefore, by integrating nanofuller spheres with conductive and high hardness, conductive silica gel and anti-wear materials, test cylinders and products that can be used for shrinking components and increasing frequencies in the future are fabricated.

During the detection process, the object to be tested (component) will compress the top of the conductive cylinder to test the electrical properties of the component. After the test, the top of the cylinder needs to be pushed back to the origin to complete the detection process. Therefore, in the present disclosure, the conductive rubber with elastic structural characteristics is integrated with the nanofuller sphere material to fabricate components with low resistance and high elasticity, so as to fabricate the column for high frequency testing.

FIG. 1 shows a schematic cross-sectional view of an elastic conductive cylinder 10 according to a preferred embodiment of the present invention. As shown in FIG. 1 , the elastic conductive pillar 10 includes a pillar structure 14 , and the features of the pillar structure 14 will be described later. In addition, the elastic conductive pillar 10 may further include a hydrophobic material layer 15 covering the outer surface of the pillar structure 14 to provide a hydrophobic effect. In one example, the thickness of the hydrophobic material layer 15 is between 10 nm and 20 nm, the diameter of the elastic conductive pillars 10 is between 50 μm (micrometer) and 600 μm, and the height is between 50 μm and 800 μm.

FIG. 2 is a schematic partial cross-sectional view of the probe card 100 according to the preferred embodiment of the present invention. As shown in FIG. 2 , the probe card 100 includes a frame body 20 , a substrate 30 and an elastic conductive column body 10 . The substrate 30 is disposed on the frame body 20 and has a plurality of holes 32 . The elastic conductive pillars 10 penetrate through the holes 32 of the substrate 30 and protrude from both sides of the substrate 30 for electrical contact. The elastic conductive column 10 may further penetrate the frame body 20 , which is not particularly limited here. The material of the substrate 30 can be the same polymer material as the elastic conductive column 10 , such as resin or silicone.

FIG. 3 shows a flow chart of a manufacturing method of an elastic conductive cylinder according to a preferred embodiment of the present invention. As shown in FIG. 3 and FIG. 1 , the manufacturing method of the elastic conductive column 10 includes the following steps. First, in step S10 , nanofuller spheres (spherical fullerenes (fullerene) composed of multiple layers of graphene), nano metal particles and graphene are provided. Next, in step S20, the nanofuller spheres, the nano metal particles and the graphene are subjected to Surface modification, so that the nanofuller spheres, the nano metal particles and the graphene generate surface functional groups. Then, in step S30, the surface-modified nanofuller spheres, the surface-modified nano-metal particles, and the surface-modified graphene are connected together with a polymer material to form a mixture. In one example, the polymer material is a reactive polymer, such as epoxy silane/epoxy resin/silicone/acrylic (acrylic resin). Next, in step S40 , the mixture is hot-pressed to form a columnar structure 14 .

The surface functional groups are used to increase the bonding between the surface-modified nanofuller spheres, the surface-modified nano-metal particles and the surface-modified graphene, so as to Increase the electron transfer path, and increase the adhesion strength of the polymer material and the surface-modified nanofuller spheres, the surface-modified nano-metal particles and the surface-modified graphene . Examples of surface-modifying materials include, but are not limited to: cetyltrimethylammonium bromide, 4-ethoxybenzoyl chloride, 1,2-bis(trichlorosilyl chloride) ) ethane, 1,6-bis(trichlorosilyl)hexane.

Therefore, as shown in FIG. 1 , the elastic conductive column 10 of this embodiment includes: surface-modified nanofuller spheres, surface-modified nano-metal particles, and surface-modified graphene, each of which has Surface functional group; and a polymer material, wherein the polymer material and the surface-modified nanofuller spheres, the surface-modified nano-metal particles, and the surface-modified graphene are each crossed Linked together to form a columnar structure 14, the surface-modified nanofuller spheres, the surface-modified nano-metal particles and the surface-modified nanoparticle are increased by the surface functional groups The bonding between the modified graphenes to increase the electron transfer path, and increase the polymer material and the surface-modified nanofuller spheres, the surface-modified nano-metal particles and all The adhesion strength of the surface-modified graphene. Surface-modified nanometal particles include, but are not limited to, silver, platinum, gold, palladium, nickel, copper, lead, tin, aluminum, titanium, alloys and mixtures thereof.

In one example, the surface-modified nanofuller spheres are hollow nanofuller spheres (having a scale between 500 nm and 10 μm), and the surface-modified nanofuller spheres are internally Solid nanofuller spheres of metal nanoparticles, and the material of the metal nanoparticles comprises selected from the group consisting of iron, cobalt and nickel, and has a dimension between 100 nm and 2 μm, wherein the surface The functional group is selected from the group consisting of -OH, -SH, -COOH, -SiH, -SiOR and -NH ₂ .

In one example, the parameters of the materials used are shown in Table 1, where wt% represents weight percent.

In addition, the above manufacturing method may further include the following steps of coating a hydrophobic material layer 15 on the columnar structure 14 . In one example, the outer surface of the columnar structure 14 can be coated by soaking or vapor, and the material used can be, for example, fluorine-containing silyl-Si(CHF) _nF , which can achieve the coating of the hydrophobic material layer.

FIG. 4 shows a microstructure diagram of an elastic conductive cylinder according to a preferred embodiment of the present invention. In FIG. 4 , the black parts are mainly polymer materials. FIG. 5 shows the silver composition distribution diagram of FIG. 4 . As shown in FIG. 5 , the whitish portion represents the silver component. FIG. 6 shows a distribution diagram of the nanofuller spheres and graphene of FIG. 4 . As shown in FIG. 6 , the off-white parts represent nanofuller spheres and graphene, which are mainly composed of carbon (C), so they are shown together in FIG. 6 . FIG. 7 shows a distribution diagram of oxygen atoms of FIG. 4 . As shown in FIG. 7 , the whitish portions represent oxygen atoms. Therefore, the elastic conductive pillars may further contain oxygen atoms distributed in the polymer material. Of course, hot pressing can also be performed in an oxygen-free environment, so oxygen atoms are not an essential component.

The technical differences between US7438563 and this case include at least two features. In terms of material preparation, US7438563 mainly uses silica gel spheres as the main body to deposit nickel and gold films outside the spheres. In the present disclosure, the surfaces of hollow nanofuller spheres/nanofuller spheres containing iron or nickel, nanosilver and graphene are first modified. In terms of process, US7438563 mixes conductive silicone spheres with silicone and manufactures components through magnetic control. In the present disclosure, the above-mentioned materials are mixed with resin (or silicone) to manufacture components by means of screen printing/hot pressing/magnetron. Therefore, there are obvious differences from the previous case in both the material end and the process end. The effects of the present disclosure can reduce the compression force and travel during testing and reduce the resistance during testing. The detailed comparative information is shown in Table 2. That is, the elastic conductive cylinders are tested for elasticity and conductivity. The test results are compared with the prior art as shown in Table 2, where m-ohm represents milliohms, and the length of the elastic conductive cylinders is 800 microns.

As can be seen from Table 2, the elastic conductive cylinder has the following characteristics: when the elastic conductive cylinder is compressed by 0.25mm, the required compressive force is between 13g and 23g; and the elastic conductive cylinder has a range from 0.02 to 0.04 resistance value in ohms. It is worth noting that, in addition to the surface-modified nanofuller spheres, the surface-modified nano-metal particles and the surface-modified graphene, the material of the elastic conductive column 10 may further include carbon nanotubes . this Besides, the elastic conductive cylinder 10 may have a cylindrical shape, a square column shape, a conical shape or other shapes.

With the above embodiments, an elastic conductive cylinder with low current, low test compression force, and long life can be provided, using nanofuller with high hardness, high mechanical strength (high hardness and high elastic strength) and electrical conductivity. The sphere, combined with nano-silver particles (or nano-silver flakes), graphene and polymer materials, can replace the materials of the existing soft test probes to improve test life, reduce test pressure, resistance and cost.

The specific embodiments proposed in the detailed description of the preferred embodiments are only used to facilitate the description of the technical content of the present invention, rather than limiting the present invention to the above-mentioned embodiments in a narrow sense, without exceeding the spirit of the present invention and the scope of the patent application Under the circumstance, all kinds of changes and implementations made belong to the scope of the present invention.

S10, S20, S30, S40: Steps

Claims (10)

An elastic conductive cylinder, comprising: a surface-modified nanofuller sphere, a surface-modified nano-metal particle, and a surface-modified graphene, each of which has a surface functional group; and a polymer material, the high The molecular material is cross-linked with the surface-modified nanofuller spheres, the surface-modified nano-metal particles and the surface-modified graphene to form a columnar structure. The surface functional groups are used to increase the bonding between the surface-modified nanofuller spheres, the surface-modified nano-metal particles and the surface-modified graphene to increase the electron transfer path, and increase the adhesion strength of the polymer material and the surface-modified nanofuller spheres, the surface-modified nano-metal particles and the surface-modified graphene, The polymer material is a reactive polymer material. The elastic conductive cylinder according to claim 1, further comprising a hydrophobic material layer covering the outer surface of the cylinder structure. The elastic conductive cylinder according to claim 1, wherein the surface-modified nanofuller spheres are hollow nanofuller spheres with a dimension between 500 nm and 10 μm. The elastic conductive cylinder according to claim 1, wherein the surface-modified nanofuller spheres are solid nanofuller spheres with metal nanoparticles inside, and the material of the metal nanoparticles comprises is selected from the group consisting of iron, cobalt and nickel, and has a dimension between 100 nm and 2 μm. The elastic conductive cylinder according to claim 1, wherein the surface functional group comprises a group selected from the group consisting of -OH, -SH, -COOH, -SiH, -SiOR and -NH ₂ . The elastic conductive cylinder according to claim 1 has the following characteristics: when the elastic conductive cylinder is compressed by 0.25mm, the required compression force is between 13g and 23g; and the elastic conductive cylinder has Resistor values ranging from 0.02 to 0.04 ohms. The elastic conductive cylinder according to claim 1, further comprising oxygen atoms distributed in the polymer material. A probe card, comprising: a frame body; a substrate disposed on the frame body and having a plurality of holes; and a plurality of elastic conductive cylinders as described in claim 1, penetrating the holes of the substrate, And the two sides of the substrate are protruded for electrical contact. A manufacturing method of an elastic conductive cylinder, comprising the following steps: providing nanofuller spheres, nano metal particles and graphene; modification, so that the nanofuller spheres, the nano metal particles and the graphene generate surface functional groups; the surface modified nanofuller spheres, the surface The modified nano metal particles and the surface modified graphene are connected together to form a mixture, wherein the polymer material is a reactive polymer material; and the mixture is hot pressed to form a Columnar structure, through the surface functional group to increase the surface-modified nanofuller sphere, the surface-modified nano-metal particles and the surface-modified graphene among each other bonding to increase the electron transfer path and increase the polymer material and the surface modification The adhesion strength of the surface-modified nanofuller spheres, the surface-modified nano-metal particles, and the surface-modified graphene. The manufacturing method of the elastic conductive pillar as claimed in claim 9, further comprising the step of: coating a hydrophobic material layer on the outer surface of the pillar structure.

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