TWI759509B - Manufacturing method of glass film - Google Patents

Abstract

The conveyance step of the manufacturing method of the glass film G includes a wrinkle removal step of removing the wrinkle of the glass film G by the wrinkle removal part 20 arranged on the upstream side of the laser irradiation device 25 . In the cutting step in the manufacturing method of the glass film G, after removing the wrinkle Ge of the glass film G in the conveying step, the glass film G is separated by irradiating the glass film G with the laser light L, and the filamentous exfoliation material Gg is freed. The width direction edge part of the separated glass film G is produced.

Description

Manufacturing method of glass film

The present invention relates to a method of manufacturing a glass film that can be wound into a roll.

As is well known, a plate glass used in a flat panel display (FPD) such as a liquid crystal display and an organic electroluminescence (EL) display, a plate glass used in an organic EL illumination, and a configuration as a touch panel The plate glass used for the manufacture of the tempered glass etc. of an element, and the plate glass used for the panel of a solar cell, etc. are actually advancing in thickness reduction.

For example, Patent Document 1 discloses a glass film (thin sheet glass) having a thickness of several hundreds of μm or less. As described in this document, such a glass film is usually continuously formed by a forming apparatus using a so-called overflow down draw method.

For example, after the conveying direction of the elongated glass film continuously formed by the overflow down-draw method is changed from the vertical direction to the horizontal direction, the lateral conveying portion (horizontal conveying portion) of the conveying device continues to convey it toward the downstream side. In the middle of this conveyance, both ends in the width direction of the glass film are cut and removed. After that, the glass film is wound into a roll shape by a winding roll to constitute a glass roll.

Patent Document 1 discloses a laser dicing technique as a technique for cutting both ends in the width direction of a glass film. In laser dicing, after an initial crack is formed in a glass film by a crack forming mechanism such as a diamond cutter, the portion is irradiated with laser light and heated. After that, the heated portion is cooled by the cooling mechanism, and the initial crack is advanced by the thermal stress generated in the glass film, thereby cutting the glass film.

As another cutting method, Patent Document 2 discloses a cutting technique of a glass film using a so-called peeling phenomenon. This technique involves irradiating a glass film (glass substrate) with laser light while conveying the glass film to melt a part of the glass film, and cooling the melted part away from the irradiation area of the laser light.

In such a case, a substantially filamentous exfoliation (precipitate) is generated due to the cooling of the fused portion (for example, refer to paragraph 0044 and FIG. 3 of Patent Document 2). The phenomenon in which the filamentous exfoliation material is peeled off from the edge of the glass film is generally referred to as a peeling phenomenon. A uniform cut surface is formed on the glass film due to the generation of filamentous exfoliation. [Prior Art Document] [Patent Document]

[Patent Document 1] Japanese Patent Laid-Open No. 2012-240883 [Patent Document 2] International Publication No. 2014/002685

THE PROBLEM TO BE SOLVED BY THE INVENTION Since the glass film has flexibility, wrinkles are generated in the glass film in the middle of being conveyed in the lateral direction by the lateral conveying portion. When a wrinkle occurs, bending stress is generated in the wrinkle and its vicinity. Therefore, when the glass film is irradiated with laser light while the wrinkles are kept, unpredictable bending stress caused by the wrinkles is imparted to the fused portion. Therefore, there arises a problem that it is difficult to cut the glass film with high accuracy.

The present invention has been made in view of the above-mentioned circumstances, and has a technical problem in that, when the glass film is cut by the peeling phenomenon, the wrinkle generated in the glass film is appropriately removed, and the glass film can be cut with high accuracy. [Means of Solving Problems]

The present invention, in order to solve the above-mentioned problems, is characterized by comprising: a conveying step of conveying a long glass film from upstream to downstream along the longitudinal direction thereof; and a cutting step of conveying the above-mentioned glass film by the conveying step. A glass film, one side irradiates the glass film with laser light from a laser irradiation device, thereby separating the glass film; and the conveying step includes a wrinkle removal step, and is disposed closer to the laser irradiation device than the laser irradiation device. The wrinkle removing part on the upstream side removes the wrinkle of the glass film; in the cutting step, after removing the wrinkle of the glass film in the conveying step, the glass film is irradiated with the The laser light is used to separate the glass film, and a filamentous exfoliation is generated from the width direction end of the separated glass film.

According to such a configuration, after removing the wrinkles of the glass film by the wrinkle removing section in the conveying step, the glass film is cut (fused) by the peeling phenomenon in the cutting step, whereby a uniform The filamentous exfoliation material is generated from the width direction end portion of the glass film. Thereby, since the width direction edge part of a glass film can be formed into a uniform cross section, a glass film can be cut|disconnected with high precision.

In the manufacturing method of the said glass film, it is preferable that the said wrinkle removal part includes the rod-shaped member arrange|positioned along the width direction of the said glass film on the lower surface side of the said glass film. In this way, in the wrinkle removal step of the conveying step, the wrinkle of the glass film can be appropriately eliminated by passing the glass film through the rod-shaped member.

Moreover, the said wrinkle removal part may include the plate-shaped member arrange|positioned between the said rod-shaped member and the said laser irradiation apparatus, and the lower surface side of the said glass film may be arrange|positioned. In the wrinkle removal step, by passing the glass film through the rod-shaped member and the plate-shaped member, the wrinkle of the glass film can be more suitably eliminated.

In this case, it is desirable that the upper surface of the plate-shaped member is positioned further below than the upper end portion of the rod-shaped member. Thereby, the wrinkle of the glass film can be gradually eliminated by the rod-shaped member and the plate-shaped member.

In addition, the width of the plate-shaped member is desirably set smaller than the length of the rod-shaped member.

In the manufacturing method of the glass film, preferably, the laser irradiation device is disposed above the glass film, and two laser irradiation devices are disposed with a predetermined distance in the width direction of the glass film, so that The width of the plate-shaped member is set larger than the interval distance of the laser irradiation device. In addition, the width|variety of a plate-shaped member means the dimension of the width direction of a plate-shaped member orthogonal to the longitudinal direction of the glass film to be conveyed.

By setting the width of the plate-like member to be larger than the distance between the two laser irradiation devices as described above, the wrinkle can be surely eliminated before the glass film reaches the position where the laser light is irradiated.

In this case, the width of the plate-shaped member is preferably 1.02 times or more the spacing distance of the laser irradiation device, and 0.95 times or less the length of the rod-shaped member.

In the conveying step, it is preferable that the glass film is conveyed by moving the conveying sheet in contact with the lower surface of the glass film on a platform, and the wrinkle removing portion is provided in a relatively The irradiation position of the laser light by the laser irradiation device is further upstream, and is provided on the upper surface where the sheet for conveyance should be partitioned upward from the upper surface of the platform, and the laser On the upstream side of the irradiation position of the irradiated light, the conveyance sheet is in a state of being in contact with the upper surface of the table.

According to such a configuration, the glass film whose wrinkles have been removed by the wrinkle removing portion is stably supported by the upper surface of the stage at the irradiation position of the laser light. Thereby, the glass film can be cut with high accuracy at the irradiation position of the laser light. [Effect of invention]

According to this invention, when cutting a glass film by a peeling phenomenon, the wrinkle which generate|occur|produces in a glass film can be removed suitably, and a glass film can be cut|disconnected with high precision.

Hereinafter, embodiments for implementing the present invention will be described in detail with reference to the drawings. 1 to 6 show the first embodiment of the manufacturing apparatus for carrying out the manufacturing method of the glass film of the present invention.

1 : is a schematic side view which shows typically the whole structure of the manufacturing apparatus of a glass film. As shown in FIG. 1 , the manufacturing apparatus 1 includes: a forming part 2 that forms a glass film G; a direction changing part 3 that converts the advancing direction of the glass film G from the vertical to the horizontal; The glass film G is transported in the lateral direction; the cutting portion 5 cuts the width direction end portion Ga and the end portion Gb of the glass film G as the non-product portion Gc while being continuously transported in the lateral direction by the lateral transport portion 4; and The winding portion 6 forms the glass roll R by winding the product portion Gd obtained by cutting the non-product portion Gc by the cutting portion 5 into a roll shape.

In addition, in the following description, "upstream" (side) means the position close to the forming part 2 or the glass roll base material Ra, and "downstream" (side) means the position close to the winding part 6 . Moreover, the thickness of the product portion Gd of the present embodiment is 300 μm or less, preferably 10 μm or more and 200 μm or less, more preferably 50 μm or more and 100 μm or less, but not limited to this.

The forming part 2 includes: a forming body 7, an overflow groove 7a is formed at the upper end and is substantially wedge-shaped when viewed in cross-section; an edge roller 8 is arranged just below the forming body 7, and sandwiches the self-forming body from the front and back sides. 7 overflowing molten glass;

The forming part 2 makes the molten glass overflowing from the upper part of the overflow groove 7a of the forming body 7 flow down along both side surfaces, respectively, and merges at the lower end to form a film-shaped molten glass. The edge roll 8 controls the width direction shrinkage of a molten glass, and forms the glass film G of predetermined width. The annealing furnace 9 is used to apply strain relief treatment to the glass film G. The annealing furnace 9 has annealer rollers 10 arranged in multiple stages in the up-down direction.

Under the annealing furnace 9, there are arranged support rollers 11 that sandwich the glass film G from both the front and back sides. Between the support roll 11 and the edge roll 8, or between the support roll 11 and the annealing furnace roll 10 at any one place, tension|tensile_strength for promoting thinning of the glass film G is given.

The direction changing portion 3 is provided at a position below the support roller 11 . A plurality of guide rollers 12 that guide the glass film G are arranged in a curved shape in the direction changing portion 3 . These guide rollers 12 guide the glass film G conveyed in the vertical direction in the lateral direction.

The lateral conveyance part 4 is arrange|positioned ahead (downstream side) of the advancing direction of the direction change part 3. As shown in FIG. This lateral conveyance part 4 has the 1st conveyance apparatus 13, the 2nd conveyance apparatus 14, and the 3rd conveyance apparatus 15 in this order from the upstream.

The first conveying device 13 includes an endless belt-shaped conveying belt 16 and a drive device 17 for the conveying belt 16 . The first conveyance device 13 continuously conveys the glass film G passing through the direction changing section 3 to the downstream side by bringing the upper surface of the conveyance belt 16 into contact with the glass film G. The drive device 17 includes a roller for driving the conveyor belt 16, a drive body 17a such as a sprocket, and a motor (not shown) that rotates the drive body 17a.

The 2nd conveyance apparatus 14 has the stage 18 which supports the glass film G, and the sheet|seat 19 for conveying the glass film G.

The stage 18 has the wrinkle removal part 20 for removing the wrinkle Ge generated in the glass film G during conveyance. In this embodiment, the wrinkle removal part 20 contains the rod-shaped member 20a. The rod-shaped member 20a is constituted by a member having a cylindrical surface, but is not limited to this shape. In order to remove the wrinkle Ge of the glass film G, the rod-shaped member 20a may have a curved surface that is convex upward, and may be configured to be semicircular or elliptical in cross-sectional view.

As shown in FIG. 3, although the rod-shaped member 20a is being fixed to the upper surface 18a of the platform 18, it is not limited to this form. The rod-shaped member 20a may be configured to be rotatable at a position spaced upward from the upper surface 18a of the platform 18 . In this case, the rod-shaped member 20a may be idly rotated, or may be rotationally driven by the drive mechanism. The diameter D of the rod-shaped member 20a is set to 2 mm or more and 100 mm or less, but is not limited to this range, and can be appropriately set according to the size of the glass film G or the product portion Gd, and the like. In addition, in the case where the rod-shaped member 20a has a shape other than a cylindrical shape (for example, a triangular prism shape or a semi-cylindrical shape), the height of the rod-shaped member 20a is preferably 10 mm or more and 100 mm or less, and the rod-shaped member 20a is preferably connected to the glass via the conveyance sheet 23 . The radius of curvature of the contact portion is preferably R1 mm or more and R100 mm or less.

The rod-shaped member 20a is arranged along the width direction W of the glass film G. As shown in FIG. That is, the rod-shaped member 20a is arrange|positioned so that the longitudinal direction of the glass film G may be orthogonal to the upper surface 18a of the stage 18. As shown in FIG.

As shown in FIGS. 2 and 4 , the length LR of the rod-shaped member 20 a is set to be shorter than the width WG of the glass film G.

In the width direction end portion Ga and the end portion Gb of the glass film G, a portion (hereinafter referred to as an “ear portion”) Gf having a thickness larger than that of the central portion is formed. When the rod-shaped member 20a is arranged on the lower surface side of the glass film G, the length LR of the rod-shaped member 20a is set so as not to overlap with the ear portion Gf. That is, it is desirable to set the length LR of the rod-shaped member 20a to be shorter than the width WC of the portion of the glass film G that does not include the center side in the width direction of the ear portion Gf. Thereby, the rod-shaped member 20a which supports the glass film G does not support the ear part Gf of the glass film G, but supports the part on the center side in the width direction rather than the ear part Gf of the glass film G. The length LR of the rod-shaped member 20a is preferably 1.1 times or more the spacing distance DL of the laser irradiation device 25 and 0.98 times or less the width WC of the portion on the center side of the glass film G.

The conveyance sheet 19 is formed of, for example, a foamed resin sheet, but is not limited to this material. The sheet 19 for conveyance is pulled out from the sheet roll 21 arrange|positioned below the platform 18, and moves from the upstream to the downstream on the platform 18 (refer FIG. 1). The sheet 19 for conveyance contacts the lower surface of the glass film G on the platform 18, and this glass film G is conveyed to the downstream side by this movement. After passing through the upper surface 18a of the table 18, the sheet 19 for conveyance is collected at a position below the table 18 by a winding device not shown.

The width WS of the sheet 19 for conveyance is set larger than the length LR of the bar-shaped member 20a. Moreover, the width WS of the sheet 19 for conveyance is set smaller than the width WG of the glass film G. More specifically, the width WS of the sheet 19 for conveyance is preferably set smaller than the width WC of the portion of the glass film G on the center side in the width direction excluding the ear portion Gf (see FIG. 4 ).

Although the thickness TS of the sheet 19 for conveyance is set to 0.05 mm or more and 2 mm or less, it is not limited to this range, and can be appropriately set so that the ears Gf of the glass film G do not come into contact with the upper surface 18a of the table 18 .

The 3rd conveyance apparatus 15 has the stage 22 which supports the glass film G, and the sheet|seat 23 for conveying the glass film G. The third conveyance device 15 moves the conveyance sheet 23 drawn out from the sheet roll 24 arranged below the upstream side of the platform 22 to the downstream side on the platform 22 , thereby cutting the glass cut by the cutting unit 5 . The non-product portion Gc and the product portion Gd of the film G are conveyed toward the downstream side.

As shown in FIGS. 1 and 2 , the cutting portion 5 is arranged between the second conveying device 14 and the third conveying device 15 of the lateral conveying portion 4 . The cutting unit 5 includes a laser irradiation device 25 , a stage 26 supporting the glass film, and a recovery device 27 for recovering the filamentous exfoliation Gg generated by irradiating the glass film G with the laser light L of the laser irradiation device 25 .

The laser irradiation device 25 is disposed above the platform 26 and further downstream than the wrinkle removing portion 20 . The laser irradiation device 25 is configured to irradiate other laser light L, such as a CO ₂ laser and a Yttrium-Aluminum Garnet (YAG) laser, downward, for example. In this embodiment, two laser irradiation apparatuses 25 are arranged so as to cut both end portions Ga and Gb in the width direction of the glass film G (see FIG. 2 ).

The laser beam L irradiates the glass film G at a predetermined position (irradiation position) O. The distance D1 between the irradiation position O and the rod-shaped member 20a of the wrinkle removal part 20 is set to be 200 mm or more and 2000 mm or less, but is not limited to this range, and depends on the size of the glass film G and the rod-shaped member 20a. size is set appropriately.

The platform 26 has an opening 26a that penetrates in the up-down direction. The irradiation position O of the laser light L of the laser irradiation device 25 is set within the range of the opening portion 26a.

As shown in FIGS. 2 and 3 , the recovery device 27 is arranged below the platform 26 . The collection|recovery apparatus 27 is comprised by the belt conveyor 27a. In the present embodiment, two belt conveyors 27a are arranged corresponding to each end portion Ga and end portion Gb of the glass film G. As shown in FIG. Each belt conveyor 27a conveys the filamentous exfoliation object Gg along the direction (width direction) orthogonal to the conveyance direction (longitudinal direction) of the glass film G, that is, from the inner side of the glass film G in the width direction to the outer side.

The winding portion 6 is provided on the downstream side of the third conveying device 15 . The winding unit 6 includes a winding roller 28 , a motor (not shown) that rotationally drives the winding roller 28 , and a protective sheet supply unit 29 that supplies the protective sheet 29 a to the winding roller 28 . The winding section 6 winds the product section Gd in a roll shape by rotating the winding roller 28 by a motor while overlapping the protective sheet 29a fed from the protective sheet supply section 29 with the product section Gd. The wound product portion Gd is constituted as a glass reel R.

Hereinafter, the method of manufacturing the glass roll R by the manufacturing apparatus 1 of the said structure is demonstrated. The manufacturing method of the glass roll R includes: a forming step of forming a band-shaped glass film G by the forming unit 2; a conveying step of conveying the glass film G by the direction changing unit 3 and the lateral conveying unit 4; and a cutting step of using the cutting unit 5. Cut the width direction edge part Ga and edge part Gb of the glass film G;

In the forming step, the molten glass overflowing from the upper side of the overflow groove 7a of the formed body 7 of the forming unit 2 is caused to flow down along both side surfaces, respectively, and merges at the lower end to form a film-shaped molten glass. At this time, the width direction shrinkage of the molten glass is regulated by the edge roll 8, and the glass film G of predetermined width is formed. Then, the strain relief treatment (slow cooling step) is applied to the glass film G by the annealing furnace 9 . The glass film G is formed to have a predetermined thickness by the tension of the backup roll 11 .

In the conveyance step, the conveyance direction of the glass film G is changed to the lateral direction by the direction changing unit 3 , and the glass film G is conveyed to the winding unit 6 on the downstream side by each of the conveying apparatuses 13 to 15 .

A large number of wrinkles Ge are irregularly generated on the glass film G during the conveyance process by the lateral conveyance unit 4 . These wrinkles Ge are eliminated by the glass film G passing through the wrinkle removing part 20 of the second conveying device 14 (a wrinkle removing step). That is, when the glass film G passes through the rod-shaped member 20a of the wrinkle removal unit 20, it is pressed against the upper surface 18a of the platform 18 by the rod-shaped member 20a located on the lower surface side of the glass film G together with the conveying sheet 19 farther up. At this time, the wrinkle Ge of the glass film G disappears when the glass film G is stretched by the rod-shaped member 20a.

When the sheet 19 for conveyance passes through the rod-shaped member 20a, it is lifted up by the rod-shaped member 20a. Thereby, the upper surface 18a of the table 18 is separated from the upper surface 18a of the table 18 by a part of the upstream side rather than the rod-shaped member 20a, and a part of the downstream side rather than the rod-shaped member 20a of the sheet 19 for conveyance. As shown in FIG. 3 , the separation distance between the conveyance sheet 19 and the upper surface 18a of the table 18 in the vertical direction decreases as the conveyance sheet 19 moves downstream from the rod-shaped member 20a. The conveyance sheet 19 is in contact with the upper surface 18a of the stage 18 at the upstream side of the irradiation position O of the laser light L of the laser irradiation device 25 .

The glass film G is supported by the table 18 via the sheet 19 for conveyance by contacting the upper surface 18a of the table 18 with the sheet 19 for conveyance. The sheet 19 for conveyance moves the glass film G to the irradiation position O of the laser beam L while maintaining the contact with the upper surface 18a of the stage 18.

In the cutting step, the laser beam L is irradiated to the glass film G conveyed by the second conveying device 14 from the laser irradiation device 25 of the cutting unit 5 to cut both widthwise end portions Ga and end portions of the glass film G in the width direction. Gb. Thereby, the glass film G is separated into the non-product portion Gc and the product portion Gd.

Specifically, when the glass film G is irradiated with the laser light L (see FIG. 6A ), a part of the glass film G is melted by the heating of the laser light L (see FIG. 6B ). Since the glass film G is conveyed by the second conveying device 14 , the melted portion is away from the laser light L. As shown in FIG.

Thereby, the fused portion of the glass film G is cooled. The fused portion is cooled to generate thermal strain, and the resulting stress acts as a tensile force on the unfused portion. By this action, the filamentous exfoliation material Gg is separated from the width direction end portion of the non-product portion Gc and the width direction end portion of the product portion Gd. The separated filamentous exfoliation object Gg moves downward by its own weight (see FIG. 6C ). The filament-shaped exfoliation product Gg is deformed into a spiral shape after being separated from the non-product portion Gc or the product portion Gd. In the cutting step, the filamentous exfoliation material Gg generated from the non-product portion Gc and the product portion Gd is recovered by the recovery device 27 (recovery step).

In addition, the non-product part Gc is conveyed to the downstream side by the 3rd conveyance apparatus 15, and collect|recovers by the other collection|recovery apparatus not shown on the upstream side of the winding part 6. FIG.

In the winding step, the protective sheet 29 a is supplied to the product portion Gd from the protective sheet supply portion 29 , and the product portion Gd conveyed by the third conveying device 15 is wound into a roll by the winding roller 28 of the winding portion 6 . shape. The glass roll R is completed by winding up the product portion Gd of a predetermined length by the winding roll 28 .

According to the manufacturing method of the glass film G of the present embodiment described above, in the cutting step, the glass film G is removed by removing the wrinkles Ge of the glass film G by the wrinkle removing part 20 (rod-shaped member 20 a ). It is possible to cut out the product portion Gd from the glass film G with high precision. At the irradiation position O of the laser light L of the laser irradiation device 25 , the glass film G is stably supported on the upper surface 18 a of the stage 18 via the conveyance sheet 19 . Thereby, the uniform filamentous exfoliation material Gg can be produced from the product part Gd, and the high-quality glass film G (glass roll R) can be manufactured by making the cut surface of the product part Gd uniform.

7 to 10 show the second embodiment of the manufacturing apparatus and the manufacturing method of the glass film. In the present embodiment, the configurations of the second conveying device 14, the third conveying device 15, and the cutting unit 5 of the lateral conveying unit 4 are different from those of the first embodiment.

As shown in FIGS. 7 to 9 , the wrinkle removing unit 20 of the second conveying device 14 includes, in addition to the rod-shaped member 20a of the first embodiment, a plate-shaped member 20b disposed on the downstream side of the rod-shaped member 20a. .

The plate-shaped member 20b is arranged between the rod-shaped member 20a and the laser irradiation device 25 in the conveyance direction of the glass film G. The plate-like member 20b is fixed to the upper surface 18a of the platform 18 . The width WP of the plate-shaped member 20b (the length of the plate-shaped member 20b in the width direction of the glass film G) is set to be smaller than the length LR of the rod-shaped member 20a. The width WP of the plate-shaped member 20b is preferably 1.02 times or more the spacing distance DL of the laser irradiation device 25 and 0.95 times or less the length LR of the rod-shaped member 20a. The length LP of the plate-shaped member 20b in the conveyance direction of the glass film G is preferably 10 mm or more and 500 mm or less, but is not limited to this range, and is appropriately set according to the dimensions of the glass film G and the product portion Gd .

The thickness TP of the plate-shaped member 20b is set to be smaller than the diameter D of the rod-shaped member 20a. Therefore, the upper surface 20c of the plate-shaped member is positioned below the upper end portion 20d of the rod-shaped member 20a. The thickness TP of the plate-shaped member 20b is set to 1 mm or more and 95 mm or less, but is not limited to this range, and is appropriately set according to the diameter D of the rod-shaped member 20a. The height difference between the upper surface 20c of the plate-shaped member 20b and the upper end portion 20d of the rod-shaped member 20a is preferably 3 mm or more and 50 mm or less.

In the conveyance direction of the glass film G, the distance D2 between the irradiation position O of the laser light L of the laser irradiation device 25 and the plate-like member 20b is set to be 50 mm or more and 1950 mm or less, but it is not limited to this range, but It is appropriately set according to the dimensions of the glass film G and the product portion Gd. Moreover, it is desirable to set the spacing distance D3 of the plate-shaped member 20b and the rod-shaped member 20a in the conveyance direction of the glass film G to 50 mm or more and 1500 mm or less.

The third conveying device 15 includes a plurality of (three in this example) conveying belts 30 a to 30 c for conveying the glass film G, and a drive device 31 for each of the conveying belts 30 a to 30 c. As shown in FIG. 8 , the conveyor belts 30a to 30c are configured in an endless belt shape, and include a first conveyor belt 30a that contacts a portion on the side of one end portion Ga in the width direction of the glass film G, and a width direction of the glass film G. The second conveyor belt 30b which is in contact with the part on the side of the other end Gb, and the third conveyor belt 30c which is in contact with the center part in the width direction of the glass film G. The drive device 31 includes a drive body 31a such as a roller and a sprocket for driving each of the conveyor belts 30a to 30c, and a motor (not shown) that rotates the drive body 31a.

As shown in FIG. 8, each conveyance belt 30a - the conveyance belt 30c are partitioned in the width direction of the glass film G. Thereby, gaps are formed between the first conveyor belt 30a and the third conveyor belt 30c and between the second conveyor belt 30b and the third conveyor belt 30c.

The laser irradiation device 25 of the cutting unit 5 is arranged above the third conveying device 15 . The irradiation position O of the laser beam L of the laser irradiation apparatus 25 is set so that it may correspond to the clearance gap between each conveyance belt 30a - the conveyance belt 30c. The cutting part 5 of the present embodiment does not include the table 26 of the first embodiment, but may include a table that can be arranged in the gap between the conveyor belts 30a to 30c. The collection|recovery apparatus 27 is arrange|positioned so that it may cross the 1st conveyor belt 30a and the 2nd conveyor belt 30b inside each of the conveyor belts 30a and 30b.

When manufacturing the glass film G (glass roll R) by the manufacturing apparatus 1 of this embodiment, similarly to 1st Embodiment, the shaping|molding process, the conveying process, the cutting process, and the winding process are performed, but the wrinkle of the conveying process is performed. The aspect of the pleat removal step is different from that of the first embodiment.

In the wrinkle removal step, first, the glass film G passes through the rod-shaped member 20 a provided on the stage 18 of the second conveying device 14 . At this time, the glass film G is pressed to a position higher than the upper surface 18a of the table 18 by the rod-shaped member 20a located on the lower surface side of the glass film G together with the sheet 19 for conveyance. At this time, the plurality of wrinkles Ge generated on the glass film G disappears by being stretched by the rod-shaped member 20a by the glass film G.

When the wrinkle Ge remains in the glass film G even after passing through the rod-shaped member 20a, the wrinkle Ge is eliminated by the glass film G passing through the plate-shaped member 20b. The rod-shaped member 20a is in linear contact with the glass film G via the conveyance sheet 19, whereas the plate-shaped member 20b is in planar contact via the conveyance sheet 19. Thereby, the wrinkle Ge which is not removed by the rod-shaped member 20a passes through the plate-shaped member 20b by the glass film G, and disappears surely.

The conveyance sheet 19 is spaced upward from the upper surface 18a of the stage 18 when passing through the rod-shaped member 20a and the plate-shaped member 20b, but after passing through the plate-shaped member 20b, it is located closer to the irradiation position O of the laser light L The upstream side is in contact with the upper surface 18a. Thereby, the glass film G is supported on the upper surface 18a of the stage 18 at the upstream side of the irradiation position O of the laser light L. As shown in FIG. Therefore, the glass film G is cut by the laser irradiation device 25 in a state where it is stably supported on the upper surface 18 a of the stage 18 . Thereby, since the uniform filamentous exfoliation Gg can be continuously produced from the width direction edge part of the product part Gd, cutting of the glass film G can be performed with high precision.

In the cutting process of this embodiment, while the glass film G is conveyed by the third conveyance device 15, the laser light L is irradiated from the laser irradiation device 25 arranged above. After that, the filamentous exfoliation object Gg (see FIG. 10 ) is recovered by the recovery device 27 , the non-product portion Gc of the glass film G is transported by the first conveyor belt 30 a and the second conveyor belt 30 b of the third transport device 15 , and the non-product portion Gc of the glass film G is transported by the The three conveying belts 30c convey the product portion Gd. The other steps such as the forming step and the winding step in this embodiment are the same as those in the first embodiment.

11 and 12 show a third embodiment of a manufacturing apparatus and a manufacturing method of a glass film. In the above-described first and second embodiments, the example in which the glass film G is produced by the overflow down-draw method is shown, and in the present embodiment, the production of the glass film by a roll-to-roll process (Roll to Roll) is exemplified. G (glass reel R) method.

As shown in FIGS. 11 and 12 , the manufacturing apparatus 1 includes, on the most upstream side, a glass roll base Ra in which the glass film G to be processed is formed into a roll shape instead of the forming section 2 of the first embodiment, Direction conversion unit 3 . The glass roll base material Ra is wound around the supply roll 32 . On the downstream side of the glass roll base material Ra, as in the first embodiment, the lateral conveyance part 4 , the cutting part 5 , and the winding part 6 are arranged in this order. The configuration of each of the elements 4 to 6 is the same as that of the first embodiment.

The manufacturing method of the glass film G (glass roll R) of the present embodiment includes a glass film supply step of drawing out the glass film G for processing from the glass roll base material Ra and supplying it to the downstream side, a conveying step, a cutting step, and the winding step. In a glass film supply process, the manufacturing apparatus 1 draws out the glass film G for processing from the glass roll base material Ra by rotating the supply roller 32, and moves it to a downstream side. The subsequent conveying step, cutting step, and winding step are the same as those of the first embodiment.

In the present embodiment, in the cutting step, the glass film G for processing can be separated into a plurality of glass films G, and a part or all of them can be used as a product. In this case, a plurality of winding rollers 28 are arranged in the winding section 6 in accordance with the number of manufactured products.

13 and 14 show a fourth embodiment of a glass film manufacturing apparatus and a method of manufacturing a glass film using the same.

As shown in FIGS. 13 and 14 , the manufacturing apparatus 1 includes, on the most upstream side, a glass roll base material Ra in which the glass film G to be processed is formed into a roll shape instead of the forming section 2 of the second embodiment, Direction conversion unit 3 . The glass roll base material Ra is wound around the supply roll 32 . On the downstream side of the glass roll base material Ra, as in the second embodiment, the lateral conveyance part 4 , the cutting part 5 , and the winding part 6 are arranged in this order. The configuration of each of the elements 4 to 6 is the same as that of the second embodiment.

In addition, this invention is not limited to the structure of the said embodiment, nor is it limited to the said effect. In the present invention, various modifications can be made without departing from the gist of the present invention.

In the second embodiment, the wrinkle removal part 20 including one rod-shaped member 20a and one plate-shaped member 20b is shown as an example, but it is not limited to this, and a plurality of rod-shaped members, A plurality of plate-like members.

1‧‧‧Manufacturing device 2‧‧‧Forming part 3‧‧‧Direction changing part 4‧‧‧Transverse conveying part 5‧‧‧Cutting part 6‧‧‧Winding part 7‧‧‧Forming body 7a‧‧‧ Overflow grooves 8‧‧‧Edge rolls 9‧‧‧annealing furnace 10‧‧‧annealing furnace rolls 11‧‧‧support rolls 12‧‧‧guide rolls 13‧‧‧first conveying device 14‧‧‧second conveying device 15‧‧‧Third conveying device 16‧‧‧Conveying belt 17‧‧‧driving device 17a‧‧‧driving body 18, 22, 26‧‧‧Platform 18a‧‧‧Platform upper surface 19, 23‧‧‧transportation Sheet material 20‧‧‧Wrinkle removal part 20a‧‧‧Rod-shaped member 20b‧‧‧Plat-shaped member 20c‧‧‧Top surface 20d of the plate-shaped member ‧Sheet reel 25‧‧‧Laser irradiation device 26a‧‧‧Opening part 27‧‧‧Recovery device 27a‧‧‧belt conveyor 28‧‧‧winding roller 29‧‧‧protective sheet supply part 29a ‧‧‧Protective sheet 30a‧‧‧First conveyor belt 30b‧‧‧Second conveyor belt 30c‧‧‧Third conveyor belt 31‧‧‧Drive device 31a‧‧‧Driver 32‧‧‧Supply roller D‧ ‧‧Diameters D1, D2, D3 of rod-shaped member ‧‧‧Interval distance DL‧‧‧Interval distance of laser irradiation device G‧‧‧Glass film Ga, Gb‧‧‧Width direction end Gc‧‧‧Non-product Part Gd‧‧‧Products PartGe‧‧‧Wrinkle of glass filmGf‧‧‧Ear Gg‧‧‧filament peeling IV-IV‧‧‧Line L‧‧‧laser LP‧‧‧glass film Length in the conveying direction LR‧‧‧Length of rod-shaped member O‧‧‧Irradiation position of laser light R‧‧‧Glass roll Ra‧‧‧Glass roll base TP‧‧‧Thickness of plate-like member TS‧ ‧‧Thickness of conveying sheet V-V‧‧‧Line W‧‧‧Width direction of glass film WC‧‧‧Width of glass film on the center side in width direction excluding ears WG‧‧‧Width of glass film WP‧‧‧Width of plate member WS‧‧‧Width of conveying sheet

1 : is a side view which shows the manufacturing apparatus of the glass film of 1st Embodiment. FIG. 2 is a plan view of a manufacturing apparatus of a glass film. FIG. 3 is an enlarged side view of a main part of a manufacturing apparatus of a glass film. FIG. 4 is a sectional view taken along the line IV-IV of FIG. 2 . FIG. 5 is a sectional view taken along the line V-V in FIG. 2 . 6A is a cross-sectional view of a glass film for explaining a cutting step. 6B is a cross-sectional view of the glass film for explaining the cutting step. 6C is a cross-sectional view of the glass film for explaining the cutting step. It is a side view which shows the manufacturing apparatus of the glass film of 2nd Embodiment. 8 is a plan view of a manufacturing apparatus of a glass film. FIG. 9 is an enlarged side view of a main part of a manufacturing apparatus of a glass film. FIG. 10 is an X-X line sectional view of FIG. 8 . 11 is a side view showing a manufacturing apparatus of a glass film according to a third embodiment. 12 is a plan view of a manufacturing apparatus of a glass film. 13 is a side view showing a manufacturing apparatus of a glass film according to a fourth embodiment. Fig. 14 is a plan view of a control device for the glass film.

1‧‧‧Manufacturing equipment

3‧‧‧Direction conversion part

4‧‧‧Horizontal conveying section

5‧‧‧Cut off

6‧‧‧winding section

12‧‧‧Guide Roller

13‧‧‧First conveying device

14‧‧‧Second conveying device

15‧‧‧The third conveying device

16‧‧‧Conveyor belt

18, 22, 26‧‧‧Platform

18a‧‧‧Top surface of platform

19, 23‧‧‧Conveying sheet

20‧‧‧Wrinkle removal section

20a‧‧‧Rod member

25‧‧‧Laser irradiation device

26a‧‧‧Opening

27‧‧‧Recycling device

27a‧‧‧Belt conveyor

28‧‧‧winding roller

D‧‧‧diameter of rod-shaped member

DL‧‧‧Separation distance

G‧‧‧glass film

Ga, Gb‧‧‧width direction edge

Gc‧‧‧non-products department

Gd‧‧‧Products Department

Ge‧‧‧Wrinkle

Gg‧‧‧filament peeling

Line IV-IV‧‧‧

LR‧‧‧Length of rod-shaped member

O‧‧‧Irradiation position of laser light

R‧‧‧glass reel

V-V‧‧‧line

W‧‧‧Width direction of glass film

WG‧‧‧Width of glass film

Claims (5)

A method for producing a glass film, comprising: a conveying step of conveying a long glass film from upstream to downstream along its longitudinal direction; and a cutting step of conveying the glass film by the conveying step, The glass film is separated by irradiating the glass film with laser light from a laser irradiation device on one side; and in the conveying step, the conveyance sheet is placed on the platform by the conveyance sheet that is brought into contact with the lower surface of the glass film. The glass film is moved upward to convey the glass film, and the conveying step includes a wrinkle removal step. The wrinkle removal part on the upper surface with the upper surface facing upwards removes the wrinkle of the glass film; the wrinkle removal part includes a rod-shaped member and a plate-shaped member, wherein the rod-shaped member is located in the glass film The lower surface side of the film is arranged along the width direction of the glass film, the plate-shaped member is arranged between the rod-shaped member and the laser irradiation device, and is arranged on the lower surface side of the glass film In the cutting step, after the wrinkle of the glass film is removed in the conveying step, and after the conveying sheet is brought into contact with the upper surface of the platform, the The said glass film is irradiated with the said laser light, and the said glass film is separated, and a filamentous exfoliation material is produced|generated from the width direction edge part of the said separated glass film. The method for producing a glass film as described in claim 1, wherein The upper surface of the said plate-shaped member is located below the upper end part of the said rod-shaped member. The manufacturing method of the glass film according to claim 1 or 2, wherein the width of the plate-shaped member is set to be smaller than the length of the rod-shaped member. The method for producing a glass film according to claim 1 or claim 2, wherein the laser irradiation device is disposed above the glass film with a predetermined interval in the width direction of the glass film The two are arranged at a distance, and the width of the plate-like member is set to be larger than the distance between the laser irradiation devices. The method for producing a glass film according to claim 4, wherein the width of the plate-shaped member is 1.02 times or more the separation distance of the laser irradiation device, and 0.95 of the length of the rod-shaped member times or less.

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