TWI756056B - Sensing device - Google Patents

Abstract

A sensing device including a sensing structure layer, a first organic layer, a first light blocking pattern, a second organic layer, a second light blocking pattern, a third organic layer, a third light blocking pattern, and a plurality of micro lenses. The first organic layer is located on the sensing structure layer and includes a first opening. The first light blocking pattern is located on the first organic layer. The first organic layer including a second opening is located on the first light blocking pattern, wherein an overlap rate of a projection of the first opening and the second opening along a normal direction of the substrate is less than 10%. The second light blocking pattern is located on the second organic layer. The third organic layer is located on the second light blocking pattern. The third light blocking pattern is located on the third organic layer. The plurality of micro lenses is located on the third organic layer.

Description

sensing device

The present invention relates to a sensing device, and more particularly, to a fingerprint sensing device.

Currently, portable electronic devices equipped with biometric identification systems (such as fingerprints or iris) are developing towards full-screen or ultra-narrow bezels. Therefore, in recent years, under-screen optical sensors have been used in portable electronic devices. In the above-mentioned under-screen optical sensor, a miniature optical imaging device is arranged below the screen of the portable electronic device, and the image of the object pressed above the screen is captured through a part of the light-transmitting area of the screen. Taking an under-screen fingerprint sensor as an example, it generally includes a sensing structure layer and an optomechanical structure layer disposed above it, wherein the optomechanical structure layer has a microlens and must be designed with a certain thickness to serve as a focal length, so that the light The organic structure layer includes a thick film structure with multiple layers stacked on each other; however, the thick film structure itself has a large stress, which causes the problem of warpage of the fingerprint sensor after formation, which is useful for subsequent operations such as the fingerprint sensor. Processes such as cutting or bonding with the display panel will have adverse effects.

The present invention provides a sensing device, which can solve the problem of warpage caused by the multi-layer structure.

The sensing device of the present invention includes a sensing structure layer, a first organic layer, a first light shielding pattern, a second organic layer, a second light shielding pattern, a third organic layer, a third light shielding pattern and a plurality of microlenses. The sensing structure layer is located on the substrate and includes a plurality of sensing units, scan lines and read lines. The first organic layer is located on the sensing structure layer and has a plurality of first openings. The first light-shielding pattern is located on the first organic layer and defines a first light-passing area, wherein the first light-passing area corresponds to the sensing elements of the plurality of sensing units. The first organic layer is located on the first light-shielding pattern and has a second opening, wherein the overlap ratio of the projection of the second opening and the first opening on the substrate along the normal direction of the substrate is less than 10%. The second light-shielding pattern is located on the second organic layer and defines a second light-passing area, wherein the second light-passing area corresponds to the first light-passing area. The third organic layer is on the second light shielding pattern. The third light-shielding pattern is located on the third organic layer and defines a third light-passing area, wherein the third light-passing area corresponds to the second light-passing area. A plurality of microlenses are located in the third light passing area.

In an embodiment of the present invention, the above-mentioned sensing device further includes a filter layer and a fourth organic layer. The filter layer is located on the second light shielding pattern and formed in the second opening. The fourth organic layer is located on the filter layer and disposed between the second organic layer and the third organic layer.

In an embodiment of the present invention, the above-mentioned fourth organic layer has a third opening, the third opening corresponds to the first opening, and the projection of the third opening and the second opening on the substrate along the normal direction of the substrate overlaps rate is less than 10%.

In an embodiment of the present invention, the fourth organic layer has a third opening, the overlap ratio of the projection of the third opening and the first opening on the substrate along the normal direction of the substrate is less than 10%, and the third opening and The overlap ratio of the projection of the second opening on the substrate along the normal direction of the substrate is less than 10%.

In an embodiment of the present invention, the extending direction of the first opening and the extending direction of the second opening are substantially parallel to the second direction, and the first opening and the second opening respectively correspond to adjacent reading lines.

In an embodiment of the present invention, the extending direction of the first opening, the extending direction of the second opening, and the extending direction of the third opening are substantially parallel to the extending direction of the reading line, and the first opening and the second opening are respectively Corresponds to adjacent read lines.

In an embodiment of the present invention, the extending direction of the first opening and the extending direction of the second opening are substantially parallel to the extending direction of the scan line, and the first opening and the second opening respectively correspond to adjacent scan lines .

In an embodiment of the present invention, the above-mentioned first opening includes a first longitudinal opening and a first lateral opening, and the second opening includes a second longitudinal opening and a second lateral opening, wherein the extension direction of the first longitudinal opening and the first The extending directions of the two longitudinal openings are substantially parallel to the extending directions of the reading lines, and the first longitudinal openings and the second longitudinal openings respectively correspond to the adjacent reading lines, wherein the extending directions of the first lateral openings and the second lateral openings The extending direction of the scan line is substantially parallel to the extending direction of the scan line, and the first lateral opening and the second lateral opening respectively correspond to the adjacent scan lines.

In an embodiment of the present invention, the extending direction of the first opening, the extending direction of the second opening, and the extending direction of the third opening are substantially parallel to the extending direction of the reading line, and the first opening and the second opening are substantially parallel to each other. And the adjacent projections of the third openings on the substrate along the normal direction of the substrate respectively correspond to three adjacent reading lines.

In an embodiment of the present invention, the above-mentioned sensing device further includes a first inorganic layer and a second inorganic layer, the first inorganic layer is located between the first organic layer and the second organic layer, and the first light-shielding pattern is disposed on the on the first inorganic layer, and the second inorganic layer is located between the second organic layer and the third organic layer, wherein the second light-shielding pattern is arranged on the second inorganic layer.

In an embodiment of the present invention, each of the above-mentioned plurality of sensing units includes an active element and a sensing element, wherein the active element and the sensing element are electrically connected.

Based on the above, in the sensing device of the present invention, at least two organic layers are provided with a plurality of openings, and the overlap ratio of the projections of the openings in the adjacent organic layers on the substrate along the normal direction of the substrate is less than 10%, In this way, the stress of the original unpatterned multi-layer organic layer can be reduced, so as to achieve the effect of stress dispersion, thereby avoiding the problem of warpage caused by the multi-layer structure of the sensing device of this embodiment.

FIG. 1A is a schematic top view of the sensing device according to the first embodiment of the present invention. FIG. 1B is a schematic cross-sectional view of the sensing device according to the line A1-A1' of FIG. 1A .

1A and 1B at the same time, the sensing device 100 of this embodiment includes a substrate SB, a sensing structure layer SE, an organic layer PL2, a light-shielding pattern BM1, an organic layer PL3, a light-shielding pattern BM2, a filter layer FL, and an organic layer PL4, the organic layer PL5, the light shielding pattern BM3, and the plurality of microlenses ML.

In some embodiments, the substrate SB may be a flexible substrate or a rigid substrate. In some embodiments, the sensing structure layer SE may include the following components, but it should be noted that the present invention is not limited thereto. The sensing structure layer SE may include, for example, a plurality of sensing units SU, scan lines SL, and read lines DL. In addition, the sensing structure layer SE may further include wirings such as power supply lines (not shown), which are not limited in the present invention. It is worth mentioning that, for example, a buffer layer (not shown) may be disposed between the substrate SB and the sensing structure layer SE. The material of the buffer layer can be silicon oxide, silicon nitride, or a stacked layer of at least two of the above-mentioned materials, which is not limited in the present invention.

In some embodiments, each of the plurality of sensing units SU includes an active element T and a sensing element SC, but the present invention is not limited thereto. The active element T is located on the substrate SB, for example, and includes a gate electrode G, a semiconductor layer CH, a source electrode S, and a drain electrode D. The gate electrode G is provided corresponding to, for example, the semiconductor layer CH, and an inter-gate insulating layer GL is provided therebetween. The source electrode S and the drain electrode D are disposed on the inter-gate insulating layer GL and partially in contact with the semiconductor layer CH. The scan line SL and the read line DL are also disposed on the substrate SB, for example, wherein the scan line SL is electrically connected to the source S of the active element T, and the read line DL is electrically connected to the drain D of the active element T, so as to Read the signal sensed by the sensing element SC. In this embodiment, the scanning line SL extends along the first direction e1, the reading line DL extends along the second direction e2, and the first direction e1 and the second direction e2 are staggered. For example, the scan line SL and the read line DL belong to different layers. Specifically, in some embodiments, the scan line SL and the gate G belong to the same film layer (the first metal layer), and the read line DL, the source electrode S and the drain electrode D belong to the same film layer (the second metal layer) ). The following takes the formation method of the first metal layer as an example, but it should be noted that the present invention is not limited to this. First, a first metal material layer (not shown) may be comprehensively formed on the substrate SB by a physical vapor deposition method or a metal chemical vapor deposition method. Next, a patterned photoresist material layer (not shown) is formed on the first metal material layer. After that, using the patterned photoresist layer as a mask, an etching process is performed on the first metal material layer to form the scan line SL and the gate electrode G. In this embodiment, the active element T is any bottom gate type thin film transistor known to those skilled in the art. However, although this embodiment takes the bottom gate type thin film transistor as an example, the present invention is not limited thereto. In other embodiments, the active element T may also be a top gate type thin film transistor or other suitable types of thin film transistors.

The sensing element SC is also located on the substrate SB, for example, and includes a first electrode SC1, a photosensitive layer SC2 and a second electrode SC3. The first electrode SC1 , the photosensitive layer SC2 and the second electrode SC3 are sequentially stacked on the substrate SB, for example, in this order. In some embodiments, the area of the second electrode SC3 is larger than that of the photosensitive layer SC2, and the outlines of the first electrode SC1 and the second electrode SC3 may partially overlap. In this embodiment, the first electrode SC1 and the read line DL, the source electrode S, and the drain electrode D belong to the same film layer (the second metal layer), but the invention is not limited to this. In other embodiments, the first electrode SC1 may be formed of another metal layer (third metal layer). In some embodiments, the first electrode SC1 and the second electrode SC3 may include a transparent conductive material or an opaque conductive material, which depends on the application of the sensing device 100 . In this embodiment, the sensing device 100 can be used as an under-screen fingerprint sensor. Therefore, light from the outside world (such as light reflected by a fingerprint) will pass through the second electrode SC3 and be incident on the photosensitive layer SC2, based on Therefore, the second electrode SC3 is made of a light-transmitting conductive material. The photosensitive layer SC2 has the property of converting light energy into electrical energy, so as to realize the function of optical sensing. In some embodiments, the material of the photosensitive layer SC2 may include a silicon-rich material, which may be silicon-rich oxide, silicon-rich nitride, silicon-rich oxynitride, silicon-rich carbide, silicon-rich oxycarbide, hydrogen-rich silicon-rich material oxides, hydrogenated silicon-rich nitrides, hydrogenated silicon-rich carbides, or other suitable materials or combinations thereof.

In some embodiments, the sensing structure layer SE further includes an organic layer PL1. For example, the organic layer PL1 is located on the active element T and the first electrode SC1 of the sensing element SC and covers the active element T. In some embodiments, the organic layer PL1 has an opening O exposing the first electrode SC1 of the sensing element SC, wherein the photosensitive layer SC2 is located in the opening O to contact the first electrode SC1, and the second electrode SC3 is disposed in the organic layer PL1 and Contact with the photosensitive layer SC2. The formation method of the organic layer PL1 is formed by, for example, a spin coating method. The material of the organic layer PL1 is, for example, an organic insulating material, which may be polyimide, polyester, benzocyclobutene (BCB), polymethylmethacrylate (PMMA), polyvinylphenol (polyvinylphenol). (4-vinylphenol), PVP), polyvinyl alcohol (PVA), polytetrafluoroethylene (PTFE), hexamethyldisiloxane (HMDSO) or a stack of at least two of the above materials , but the present invention is not limited to this. In this embodiment, the organic layer PL1 has a single-layer structure, but the present invention is not limited to this. In other embodiments, the organic layer PL1 may be a multi-layer structure.

For example, the organic layer PL2 is located on the organic layer PL1 of the sensing structure layer SE and covers the second electrode SC3 of the sensing element SC, wherein the organic layer PL2 has a first opening OP1. The formation method of the organic layer PL2 is formed by, for example, a spin coating method. The material of the organic layer PL2 is, for example, an organic insulating material, which can be polyimide, polyester, benzocyclobutene, polymethyl methacrylate, polyvinyl phenol, polyvinyl alcohol, polytetrafluoroethylene, hexamethylene disiloxane or a stacked layer of the above at least two materials, but the present invention is not limited to this. In this embodiment, the organic layer PL2 has a single-layer structure, but the present invention is not limited to this. In other embodiments, the organic layer PL2 may be a multi-layer structure. The plurality of first openings OP1 included in the organic layer PL2 correspond to, for example, regions where part of the scan lines SL, part of the read lines DL, or a combination thereof are provided. In this embodiment, the first opening OP1 corresponds to a region where part of the reading line DL is disposed, that is, the extending direction of the first opening OP1 and the extending direction (the second direction e2 ) of the reading line DL are substantially parallel.

In some embodiments, the sensing device 100 of this embodiment may further include an inorganic layer BP1. The inorganic layer BP1 is, for example, located on the organic layer PL2 and covers the top surface and sidewalls of the organic layer PL2. In detail, a part of the inorganic layer BP1 is disposed on the top surface of the organic layer PL2, and another part of the inorganic layer BP1 is conformally disposed in the first opening OP1 to cover the sidewall of the organic layer PL2 and part of the organic layer PL1. The formation method of the inorganic layer BP1 is formed by, for example, a physical vapor deposition method or a chemical vapor deposition method. In this embodiment, the material of the inorganic layer BP1 may be silicon oxide, silicon nitride, silicon oxynitride, or a stacked layer of at least two of the above materials, but the invention is not limited to this. In this embodiment, the inorganic layer BP1 has a single-layer structure, but the present invention is not limited to this. In other embodiments, the inorganic layer BP1 may be a multi-layer structure.

The light shielding pattern BM1 is located on the organic layer PL2, for example, and is used to define the light passing region LR1. Specifically, the material of the light-shielding pattern BM1 includes light-shielding and/or reflective materials, which may be metals, alloys, nitrides of the foregoing materials, oxides of the foregoing materials, oxynitrides of the foregoing materials, or other suitable light-shielding and / or reflective material. In some embodiments, the material of the light-shielding pattern BM1 may be molybdenum, molybdenum oxide or stacked layers thereof. Based on this, the light passing region LR1 can be defined in the region where the light shielding pattern BM1 is not provided. In addition, the inorganic layer BP1 can be disposed on the organic layer PL2 so that the light shielding pattern BM1 can be disposed on the inorganic layer BP1, as illustrated in this embodiment, but it should be noted that the present invention is not limited to this. In other embodiments, if the light-shielding pattern BM1 is selected, it can be directly connected to the organic layer PL2, or the inorganic layer BP1 can be omitted. The setting of the light shielding pattern BM1 can effectively prevent stray light from being incident on the plurality of sensing units SU, so as to prevent the stray light from affecting the sensing result. In this embodiment, the light passing region LR1 is set corresponding to the sensing element SC of the sensing unit SU, so that the sensing element SC can convert the light passing through the light passing region LR1 into a corresponding electrical signal. In addition, in some embodiments, the region provided with the light shielding pattern BM1 may be used to shield the active element T of the sensing unit SU (not shown in the drawings). Specifically, the light shielding pattern BM1 may be located above the active element T and at least shield the semiconductor layer CH of the active element T, thereby preventing light from the outside from irradiating the semiconductor layer CH, thereby avoiding the leakage of the active element T. The method for forming the light-shielding pattern BM1 is, for example, firstly forming a light-shielding pattern material layer (not shown) by sputtering or other methods. Next, a patterned photoresist material layer (not shown) is formed on the light shielding pattern material layer. After that, using the patterned photoresist layer as a mask, an etching process is performed on the light-shielding pattern material layer to form a light-shielding pattern BM1. In addition, the light-shielding pattern BM1 of the present embodiment is also disposed in the first opening OP1 , which can shield large-angle light (eg, oblique light) from the outside and avoid the phenomenon of light leakage. Based on this, when the sensing device 100 of the present embodiment is used as an under-screen fingerprint sensor, for example, the interference of stray light on the sensing unit SU caused by oblique light can be avoided, thereby improving the signal-to-noise ratio of light to achieve better Clear fingerprint image. Furthermore, it also avoids the sensed image distortion.

The organic layer PL3 is, for example, located on the inorganic layer BP1 and covers the light shielding pattern BM1. The method for forming the organic layer PL3 is, for example, firstly, using a spin coating method to form an organic pattern material layer (not shown). Next, a patterned photoresist material layer (not shown) is formed on the organic pattern material layer. Then, using the patterned photoresist layer as a mask, an etching process is performed on the organic pattern material layer. The material of the organic layer PL3 is, for example, an organic insulating material, which can be polyimide, polyester, benzocyclobutene, polymethyl methacrylate, polyvinyl phenol, polyvinyl alcohol, polytetrafluoroethylene, hexamethylene disiloxane or a stacked layer of the above at least two materials, but the present invention is not limited to this. In this embodiment, the organic layer PL3 has a single-layer structure, but the present invention is not limited to this. In other embodiments, the organic layer PL3 may be a multi-layer structure. In this embodiment, the organic layer PL3 includes a plurality of second openings OP2. For example, the second opening OP2 corresponds to a region in which a part of the scan line SL, a part of the read line DL, or a combination thereof is provided. In the present embodiment, the second opening OP2 corresponds to a region where part of the reading line DL is disposed, that is, the extending direction of the second opening OP2 is substantially parallel to the extending direction (the second direction e2 ) of the reading line DL. In addition, in some embodiments, the overlap ratio of the projection of the second opening OP2 and the first opening OP1 on the substrate SB along the normal direction n of the substrate SB is less than 10%. In this embodiment, the projections of the second opening OP2 and the first opening OP1 on the substrate SB along the normal direction n of the substrate SB do not overlap at all. Based on the above-mentioned arrangement relationship between the second opening OP2 and the first opening OP1, the projections of the second opening OP2 and the first opening OP1 on the substrate SB along the normal direction n of the substrate SB will be arranged in a staggered arrangement, that is, the second opening The OP2 and the first opening OP1 correspond to the adjacent read lines DL respectively. Based on this, the present embodiment can reduce the stress of the original unpatterned organic layer by disposing the organic layer PL3 having the second opening OP2 and making the second opening OP2 and the first opening OP1 have the above arrangement relationship, thereby achieving The effect of stress dispersion.

In some embodiments, the sensing device 100 of this embodiment may further include an inorganic layer BP2. The inorganic layer BP2 is, for example, located on the organic layer PL3, and covers the top surface and sidewalls of the organic layer PL3. In detail, a part of the inorganic layer BP2 is disposed on the top surface of the organic layer PL3, and another part of the inorganic layer BP2 is conformally disposed in the second opening OP2 to cover the sidewall of the organic layer PL3 and part of the shading pattern BM1. The formation method of the inorganic layer BP2 is formed by, for example, a physical vapor deposition method or a chemical vapor deposition method. In some embodiments, the material of the inorganic layer BP2 may be silicon oxide, silicon nitride, silicon oxynitride, or a stacked layer of at least two of the above materials. In this embodiment, the material of the inorganic layer BP2 is silicon nitride. In this embodiment, the inorganic layer BP2 has a single-layer structure, but the present invention is not limited to this. In other embodiments, the inorganic layer BP2 may be a multi-layer structure.

The light shielding pattern BM2 is located on the organic layer PL3, for example, and is used to define the light passing region LR2. In detail, the material of the light-shielding pattern BM2 includes light-shielding and/or reflective materials, which can be metals, alloys, nitrides of the foregoing materials, oxides of the foregoing materials, oxynitrides of the foregoing materials, or other suitable light-shielding and / or reflective material. In some embodiments, the material of the light-shielding pattern BM2 may be molybdenum, molybdenum oxide or stacked layers thereof. Based on this, the light passing region LR2 can be defined in the region where the light shielding pattern BM2 is not provided. In addition, the inorganic layer BP2 can be disposed on the organic layer PL3 so that the light shielding pattern BM2 is disposed on the inorganic layer BP2, as illustrated in this embodiment, but it should be noted that the present invention is not limited to this. In other embodiments, if the light-shielding pattern BM2 is selected, it can also be directly attached to the organic layer PL3, and the inorganic layer BP2 may not be provided. The setting of the shading pattern BM2 can effectively prevent stray light from being incident to the plurality of sensing units SU, so as to prevent the stray light from affecting the sensing result. In this embodiment, the light passing region LR2 is set corresponding to the light passing region LR1, that is, corresponding to the sensing element SC of the sensing unit SU, so that the sensing element SC can connect the passing light passing region LR2 to the sensing element SC of the sensing unit SU. The light passing through the outside of the region LR1 is converted into a corresponding electrical signal. The method of forming the light-shielding pattern BM2 is, for example, firstly forming a light-shielding pattern material layer (not shown) by sputtering or other methods. Next, a patterned photoresist material layer (not shown) is formed on the light shielding pattern material layer. After that, using the patterned photoresist layer as a mask, an etching process is performed on the light-shielding pattern material layer to form a light-shielding pattern BM2.

For example, the filter layer FL is located on the inorganic layer BP2 and covers the light shielding pattern BM2, but the invention is not limited thereto. In this embodiment, the filter layer FL is also disposed in the second opening OP2. In some embodiments, the filter layer FL can provide the effect of filtering. Specifically, in this embodiment, the filter layer FL may be an IR-cut filter layer. That is, when the sensing unit SU of this embodiment converts visible light from the outside into electrical signals, it usually converts infrared light that cannot be seen by the naked eye into electrical signals, so that when the electrical signals are converted into image display, the display The resulting image is susceptible to distortion or dispersion due to infrared light. Based on this, the present embodiment can avoid this problem by disposing the filter layer FL. However, the present invention is not limited to this. When the sensing unit SU of this embodiment converts infrared light from the outside into electrical signals, the filter layer FL of this embodiment can be an IR pass filter. light layer. In addition, in other embodiments, the filter layer FL may also be other types of filter layers, so as to have an anti-counterfeiting effect.

The organic layer PL4 is located, for example, on the filter layer FL. The formation method of the organic layer PL4 is formed by, for example, a spin coating method. The material of the organic layer PL4 is, for example, an organic insulating material, which can be polyimide, polyester, benzocyclobutene, polymethylmethacrylate, polyvinylphenol, polyvinyl alcohol, polytetrafluoroethylene, hexamethylene disiloxane or a stacked layer of the above at least two materials, but the present invention is not limited to this. In this embodiment, the organic layer PL4 has a single-layer structure, but the present invention is not limited to this. In other embodiments, the organic layer PL4 may be a multi-layer structure. In other embodiments, the organic layer PL4 may also have openings, wherein the openings of the organic layer PL4 and the second openings OP2 of the lower layer are also arranged in a staggered arrangement along the projection of the normal direction n of the substrate SB on the substrate SB, thereby To achieve the effect of stress dispersion.

The organic layer PL5 is located, for example, on the organic layer PL4. The formation method of the organic layer PL5 is formed by, for example, a spin coating method. The material of the organic layer PL5 is, for example, an organic insulating material, which can be polyimide, polyester, benzocyclobutene, polymethyl methacrylate, polyvinyl phenol, polyvinyl alcohol, polytetrafluoroethylene, hexamethylene disiloxane or a stacked layer of the above at least two materials, but the present invention is not limited to this. In this embodiment, the organic layer PL5 has a single-layer structure, but the present invention is not limited to this. In other embodiments, the organic layer PL5 may be a multi-layer structure. In some embodiments, an inorganic layer (not shown) may be disposed between the organic layer PL5 and the organic layer PL4, but the invention is not limited thereto.

The light shielding pattern BM3 is located on the organic layer PL5, for example, and is used to define the light passing region LR3. Specifically, the material of the light-shielding pattern BM3 includes light-shielding and/or reflective materials, which may be metals, alloys, nitrides of the foregoing materials, oxides of the foregoing materials, oxynitrides of the foregoing materials, or other suitable light-shielding and / or reflective material. In some embodiments, the material of the light-shielding pattern BM3 may be molybdenum, molybdenum oxide or stacked layers thereof. Based on this, the light passing region LR3 can be defined in the region where the light shielding pattern BM3 is not provided. In addition, an inorganic layer can be additionally disposed on the organic layer PL5 so that the light-shielding pattern BM3 can be disposed on the inorganic layer, and the present invention is not limited to this. The light-shielding pattern BM3 may be directly attached to the organic layer PL5. The setting of the light shielding pattern BM3 can effectively prevent stray light from being incident to the plurality of sensing units SU, so as to prevent the stray light from affecting the sensing result. In this embodiment, the light passing region LR3 is set corresponding to the light passing region LR2, that is, corresponding to the sensing element SC of the sensing unit SU, so that the sensing element SC can pass the passing light passing region LR3, The light from the outside of the light passing region LR2 and the light passing region LR1 is converted into corresponding electrical signals. The method for forming the light-shielding pattern BM3 is, for example, firstly forming a light-shielding pattern material layer (not shown) by sputtering or other methods. Next, a patterned photoresist material layer (not shown) is formed on the light shielding pattern material layer. Then, using the patterned photoresist layer as a mask, an etching process is performed on the light-shielding pattern material layer to form a light-shielding pattern BM3. In some embodiments, an inorganic layer (not shown) may be disposed between the light-shielding pattern BM3 and the organic layer PL5 , but the invention is not limited thereto.

The plurality of microlenses ML are, for example, located on the organic layer PL5 and disposed in the third light passing region LR3. In detail, the plurality of microlenses ML are located in the third light passing region LR3 defined by the light shielding pattern BM3, and are disposed corresponding to the plurality of sensing units SU. For example, the plurality of microlenses ML are arranged in an array and have a central axis (not shown) passing through the center thereof. In some embodiments, the first opening OP1 and the second opening OP2 also have a central axis (not shown) passing through the center thereof, wherein the central axis of each microlens ML may be related to the first opening OP1 and the second opening OP2 The center axis of one of them is aligned, but the present invention is not limited to this. Based on this, the plurality of microlenses ML can be used to further improve the effect of light collimation, so as to reduce the problems of light leakage and light mixing caused by scattered light or refracted light. In some embodiments, the plurality of microlenses ML may be symmetric lenticular lenses, asymmetric lenticular lenses, plano-convex lenses or meniscus lenses, but the invention is not limited thereto. In addition, each or more of the plurality of microlenses ML may be disposed corresponding to one sensing unit SU, but the present invention is not limited thereto.

Based on the above, in this embodiment, at least two organic layers are provided with a plurality of openings, and the overlap ratio of the projections of the openings in the adjacent organic layers on the substrate along the normal direction of the substrate is less than 10%, so that the The stress of the original unpatterned multi-layer organic layer is reduced to achieve the effect of stress dispersion, thereby avoiding the problem of warpage caused by the multi-layer structure in the sensing device of this embodiment. Furthermore, in this embodiment, a light-shielding pattern is also arranged in the above-mentioned opening, so as to shield the light of a large angle from the outside (such as oblique light) and avoid the phenomenon of light leakage, and improve the signal-to-noise ratio of light to obtain clearer image.

2A is a schematic top view of a sensing device according to a second embodiment of the present invention. FIG. 2B is a schematic cross-sectional view of the sensing device according to the line A2-A2' of FIG. 2A . . It must be noted here that the embodiments shown in FIGS. 2A and 2B respectively use the element numbers and part of the contents of the embodiment in FIGS. 1A and 1B , wherein the same or similar reference numbers are used to represent the same or similar elements, and The description of the same technical content is omitted. For the description of the omitted parts, reference may be made to the descriptions and effects of the foregoing embodiments, and the following embodiments will not be repeated.

2A and 2B at the same time, the main difference between the sensing device 200 of this embodiment and the sensing device 100 of the previous embodiment is that the organic layer PL4 in the sensing device 200 of this embodiment further includes a plurality of third Opening OP3. The third opening OP3 also corresponds to, for example, a region where a part of the scan line SL, a part of the read line DL, or a combination thereof are provided. In the present embodiment, the third opening OP3 corresponds to a region where part of the reading line DL is disposed, that is, the extending direction of the third opening OP3 is substantially parallel to the extending direction (the second direction e2 ) of the reading line DL. In addition, in some embodiments, the overlap ratio of the projection of the third opening OP3 and the second opening OP2 on the substrate SB along the normal direction n of the substrate SB is less than 10%. In this embodiment, the projections of the third opening OP3 and the second opening OP2 along the normal direction n of the substrate SB on the substrate SB do not overlap at all. In addition, the third opening OP3 corresponds to, for example, the first opening OP1. In some embodiments, the projections of the third opening OP3 and the first opening OP1 on the substrate SB along the normal direction n of the substrate SB may overlap with each other. Based on the above-mentioned arrangement relationship between the first opening OP1, the second opening OP2 and the third opening OP3, the projections of the third opening OP3 and the second opening OP2 on the substrate SB along the normal direction n of the substrate SB will be staggered to each other, That is, the third opening OP3 and the second opening OP2 correspond to the adjacent reading lines DL, respectively, and the third opening OP3 and the first opening OP1 correspond to the same reading line DL respectively.

Based on this, the present embodiment can further reduce the stress of the original unpatterned organic layer by disposing the organic layer PL4 having the third opening OP3 and making the above arrangement relationship between the second opening OP2 and the third opening OP3 , thereby achieving the effect of stress dispersion.

3A is a schematic top view of a sensing device according to a third embodiment of the present invention. FIG. 3B is a schematic cross-sectional view of the sensing device according to the line A3-A3' of FIG. 3A . . It must be noted here that the embodiments shown in FIGS. 3A and 3B respectively use the element numbers and part of the contents of the embodiment in FIGS. 1A and 1B , wherein the same or similar reference numbers are used to represent the same or similar elements, and The description of the same technical content is omitted. For the description of the omitted parts, reference may be made to the descriptions and effects of the foregoing embodiments, and the following embodiments will not be repeated.

3A and 3B at the same time, the main difference between the sensing device 300 of the present embodiment and the sensing device 100 of the previous embodiment is that the organic layer PL2 in the sensing device 300 of the present embodiment has the first opening OP1 Corresponding to a region where a part of the scan line SL is provided, that is, the extending direction of the first opening OP1 is substantially parallel to the extending direction (the first direction e1 ) of the scan line SL. In addition, the second opening OP2 of the organic layer PL3 also corresponds to the region where part of the scan line SL is disposed, that is, the extending direction of the second opening OP2 is substantially parallel to the extending direction (the first direction e1 ) of the scan line SL. In addition, in some embodiments, the overlap ratio of the projection of the first opening OP1 and the second opening OP2 on the substrate SB along the normal direction n of the substrate SB is less than 10%. In this embodiment, the projections of the first opening OP1 and the second opening OP2 along the normal direction n of the substrate SB on the substrate SB do not overlap at all. Based on the above-mentioned arrangement relationship between the first opening OP1 and the second opening OP2, the projections of the first opening OP1 and the second opening OP2 on the substrate SB along the normal direction n of the substrate SB are arranged to be displaced from each other, that is, the first opening The OP1 and the second opening OP2 correspond to the adjacent scan lines SL respectively.

In addition, in this embodiment, each of the plurality of microlenses ML corresponds to three sensing elements SC, but it should be noted that the present invention is not limited to this. Each may correspond to other numbers of sensing elements SC.

Based on this, in this embodiment, each of the first opening OP1 and the second opening OP2 corresponds to the adjacent scan line SL, which can also reduce the stress of the original unpatterned organic layer, thereby achieving the effect of stress dispersion.

4A is a schematic top view of a sensing device according to a fourth embodiment of the present invention. FIG. 4B is a schematic cross-sectional view of the sensing device according to the line A4-A4' of FIG. 4A . . It must be noted here that the embodiments shown in FIG. 4A and FIG. 4B respectively use the element numbers and part of the content of the embodiment in FIG. 1A and FIG. 1B , wherein the same or similar reference numbers are used to represent the same or similar elements, and The description of the same technical content is omitted. For the description of the omitted parts, reference may be made to the descriptions and effects of the foregoing embodiments, and the following embodiments will not be repeated.

4A and 4B at the same time, the main difference between the sensing device 400 of the present embodiment and the sensing device 100 of the previous embodiment is that the organic layer PL2 in the sensing device 400 of the present embodiment has the first opening OP1 The first vertical opening OP11 and the first horizontal opening OP12 are included, and the second opening OP2 included in the organic layer PL3 includes the second vertical opening OP21 and the second horizontal opening OP22. For example, the first vertical opening OP11 and the second vertical opening OP21 correspond to a region where part of the reading line DL is provided, that is, the extending direction of the first vertical opening OP11 and the second vertical opening OP21 and the extending direction of the reading line DL ( The second direction e2) is substantially parallel. For example, the first lateral opening OP12 and the second lateral opening OP22 correspond to the area where part of the scan line SL is arranged, that is, the extending direction of the first lateral opening OP12 and the second lateral opening OP22 is the same as the extending direction of the scan line SL (the first lateral opening OP22). The direction e1) is substantially parallel. In addition, in some embodiments, the overlap ratio of the projection of the first vertical opening OP11 and the second vertical opening OP21 on the substrate SB along the normal direction n of the substrate SB is less than 10%. In this embodiment, the projections of the first vertical opening OP11 and the second vertical opening OP21 on the substrate SB along the normal direction n of the substrate SB do not overlap at all. Based on the above-mentioned arrangement relationship between the first vertical opening OP11 and the second vertical opening OP21, the projections of the first vertical opening OP11 and the second vertical opening OP21 on the substrate SB along the normal direction n of the substrate SB will be arranged in a dislocation arrangement, that is, , the first vertical opening OP11 and the second vertical opening OP21 correspond to the adjacent reading lines DL respectively. In addition, in some embodiments, the overlap ratio of the projection of the first lateral opening OP12 and the second lateral opening OP22 on the substrate SB along the normal direction n of the substrate SB is less than 10%. In this embodiment, the projections of the first lateral opening OP12 and the second lateral opening OP22 on the substrate SB along the normal direction n of the substrate SB do not overlap at all. Based on the above-mentioned arrangement relationship between the first lateral opening OP12 and the second lateral opening OP22, the projections of the first lateral opening OP12 and the second lateral opening OP22 on the substrate SB along the normal direction n of the substrate SB will be arranged in a staggered arrangement, that is, , the first lateral opening OP12 and the second lateral opening OP22 correspond to adjacent scan lines SL respectively.

Based on this, in this embodiment, the first opening OP1 including the first vertical opening OP11 and the first horizontal opening OP12 and the second opening OP2 including the second vertical opening OP21 and the second horizontal opening OP22 are provided, and the first opening OP1 is provided. The above-mentioned arrangement relationship between the first opening OP1 and the second opening OP2 can further reduce the stress of the original unpatterned organic layer, thereby achieving the effect of stress dispersion.

5A is a schematic top view of a sensing device according to a second embodiment of the present invention. FIG. 5B is a schematic cross-sectional view of the sensing device according to the line A5-A5' of FIG. 5A . . It must be noted here that the embodiments shown in FIGS. 5A and 5B respectively use the element numbers and part of the contents of the embodiment in FIGS. 1A and 1B , wherein the same or similar reference numbers are used to represent the same or similar elements, and The description of the same technical content is omitted. For the description of the omitted parts, reference may be made to the descriptions and effects of the foregoing embodiments, and the following embodiments will not be repeated.

5A and 5B at the same time, the main difference between the sensing device 500 of this embodiment and the sensing device 100 of the previous embodiment is that the organic layer PL4 in the sensing device 500 of this embodiment further includes a plurality of third Opening OP3. The third opening OP3 also corresponds to, for example, a region where a part of the scan line SL, a part of the read line DL, or a combination thereof are provided. In the present embodiment, the third opening OP3 corresponds to a region where part of the reading line DL is disposed, that is, the extending direction of the third opening OP3 is substantially parallel to the extending direction (the second direction e2 ) of the reading line DL. In addition, in some embodiments, the overlap ratio of the projection of the third opening OP3 and the second opening OP2 on the substrate SB along the normal direction n of the substrate SB is less than 10%. In addition, the overlap ratio of the projection of the third opening OP3 and the first opening OP1 on the substrate SB along the normal direction n of the substrate SB is less than 10%. In this embodiment, the projections of the third opening OP3, the first opening OP1 and the second opening OP2 on the substrate SB along the normal direction n of the substrate SB do not overlap at all. In detail, based on the arrangement relationship between the first opening OP1 , the second opening OP2 and the third opening OP3 , the first opening OP1 , the second opening OP2 and the third opening OP3 are connected to the substrate along the normal direction n of the substrate SB. The projections on SB will be arranged in a dislocation arrangement in this order, that is, the adjacent projections of the first opening OP1, the second opening OP2 and the third opening OP3 on the substrate SB along the normal direction n of the substrate SB will correspond to the adjacent projections respectively. The three read lines DL.

Based on this, in the present embodiment, by disposing the organic layer PL4 having the third opening OP3 and having the above-mentioned disposition relationship among the first opening OP1 , the second opening OP2 and the third opening OP3 , the original unpatterned layer can be further reduced. the stress of the organic layer, thereby achieving the effect of stress dispersion.

6 is a schematic cross-sectional view of an electronic device according to an embodiment of the present invention.

Please refer to FIG. 6 , which shows an electronic device 10 . In some embodiments, the electronic device 10 may be an off-screen fingerprint recognition device, such as an electronic device such as a smart phone, a tablet computer, a notebook computer, or a touch-sensitive display device. The electronic device 10 of this embodiment includes, for example, a display panel 1000 and a sensing device 100 , wherein the display panel 1000 and the sensing device 100 can be bonded by a sealant FG, but the invention is not limited thereto. The display panel 1000 is, for example, suitable for providing the illumination light beam L1 to the finger F through the light emitting structure LE it has, and then reflects the sensing light beam L2 therethrough. In this embodiment, the display panel 1000 is an organic light-emitting diode (organic light-emitting diode; OLED) display panel, but the invention is not limited to this. In other embodiments, the display panel 1000 can also be a liquid crystal display panel or other suitable display panels. For example, the sensing device 100 is disposed below the display panel 1000 to receive the sensing light beam L2 reflected by the finger F, thereby performing fingerprint recognition.

To sum up, in the sensing device of the present invention, at least two organic layers are provided with a plurality of openings, and the overlap ratio of the projections of the openings in the adjacent organic layers on the substrate along the normal direction of the substrate is less than 10 %, the stress of the original unpatterned multi-layer organic layer can be reduced, so as to achieve the effect of stress dispersion, thereby avoiding the problem of warpage caused by the multi-layer structure of the sensing device of this embodiment. Furthermore, in this embodiment, a light-shielding pattern is also arranged in the above-mentioned opening, so as to shield the light of a large angle from the outside (such as oblique light) and avoid the phenomenon of light leakage, and improve the signal-to-noise ratio of light to obtain clearer image.

10: Electronics 100, 200, 300, 400, 500: Sensing device 1000: Display panel e1: first direction e2: the second direction n: normal direction A1-A1', A2-A2', A3-A3', A4-A4', A5-A5': section line BM1, BM2, BM3: Shading pattern BP1, BP2: inorganic layer CH: semiconductor layer D: drain DL: read line F: finger FG: Sealant FL: filter layer G: gate GL: Intergate insulating layer L1: Lighting beam L2: Sensing beam LE: Light Emitting Structure LR1, LR2, LR3: Light passing area ML: Micro lens O, OP1, OP2, OP3: Opening PL1, PL2, PL3, PL4, PL5: organic layer S: source SB: Substrate SC: Sensing element SC1: first electrode SC2: photosensitive layer SC3: Second electrode SE: Sensing Structure Layer SL: scan line SU: Sensing Unit T: Active element

FIG. 1A is a schematic top view of the sensing device according to the first embodiment of the present invention. FIG. 1B is a schematic cross-sectional view of the sensing device according to the line A1-A1' of FIG. 1A . 2A is a schematic top view of a sensing device according to a second embodiment of the present invention. FIG. 2B is a schematic cross-sectional view of the sensing device according to the line A2-A2' of FIG. 2A . 3A is a schematic top view of a sensing device according to a third embodiment of the present invention. FIG. 3B is a schematic cross-sectional view of the sensing device according to the line A3-A3' of FIG. 3A . 4A is a schematic top view of a sensing device according to a fourth embodiment of the present invention. FIG. 4B is a schematic cross-sectional view of the sensing device according to the line A4-A4' of FIG. 4A . 5A is a schematic top view of a sensing device according to a fifth embodiment of the present invention. FIG. 5B is a schematic cross-sectional view of the sensing device according to the line A5-A5' of FIG. 5A . 6 is a schematic cross-sectional view of an electronic device according to an embodiment of the present invention.

100: Sensing device

e1: first direction

e2: the second direction

n: normal direction

A1-A1': section line

BM1, BM2, BM3: Shading pattern

BP1, BP2: inorganic layer

DL: read line

FL: filter layer

GL: Intergate insulating layer

LR1, LR2, LR3: Light passing area

ML: Micro lens

O, OP1, OP2: Opening

PL1, PL2, PL3, PL4, PL5: organic layer

SB: Substrate

SC: Sensing element

SC1: first electrode

SC2: photosensitive layer

SC3: Second electrode

SE: Sensing Structure Layer

Claims (11)

A sensing device, comprising: The sensing structure layer, located on the substrate, includes a plurality of sensing units, scan lines and read lines; a first organic layer located on the sensing structure layer and having a first opening; a first light-shielding pattern, located on the first organic layer and defining a first light-passing area, the first light-passing area corresponding to the sensing elements of the plurality of sensing units; The second organic layer is located on the first light-shielding pattern and has a second opening, wherein the overlap ratio of the projection of the second opening and the first opening on the substrate along the normal direction of the substrate is less than 10%; a second light-shielding pattern located on the second organic layer and defining a second light-passing area, the second light-passing area corresponding to the first light-passing area; a third organic layer, located on the second light-shielding pattern; a third light-shielding pattern on the third organic layer and defining a third light-passing area, the third light-passing area corresponding to the second light-passing area; and A plurality of microlenses are located in the third light passing region. The sensing device of claim 1, further comprising: a filter layer located on the second light shielding pattern and formed in the second opening; and The fourth organic layer is located on the filter layer and disposed between the second organic layer and the third organic layer. The sensing device of claim 2, wherein the fourth organic layer has a third opening, the third opening corresponds to the first opening, and the third opening and the second opening are along the The overlap ratio of the projection of the normal direction of the substrate on the substrate is less than 10%. The sensing device of claim 2, wherein the fourth organic layer has a third opening, and the third opening and the first opening are projected on the substrate along a normal direction of the substrate. The overlap ratio is less than 10%, and the overlap ratio of the projection of the third opening and the second opening on the substrate along the normal direction of the substrate is less than 10%. The sensing device according to claim 1, wherein the extending direction of the first opening and the extending direction of the second opening are substantially parallel to the extending direction of the reading line, and the first opening and the extending direction are substantially parallel to each other. Each of the second openings corresponds to the adjacent read lines. The sensing device of claim 3, wherein an extending direction of the first opening, an extending direction of the second opening, and an extending direction of the third opening are substantially parallel to an extending direction of the reading line , the first opening and the second opening respectively correspond to the adjacent reading lines. The sensing device according to claim 1, wherein the extending direction of the first opening and the extending direction of the second opening are substantially parallel to the extending direction of the scan line, and the first opening and the extending direction Each of the second openings corresponds to the adjacent scan lines. The sensing device of claim 1, wherein the first opening includes a first longitudinal opening and a first lateral opening, and the second opening includes a second longitudinal opening and a second lateral opening, wherein The extension direction of the first longitudinal opening and the extension direction of the second longitudinal opening are substantially parallel to the extension direction of the reading line, and the first longitudinal opening and the second longitudinal opening correspond to the corresponding adjacent to the read line, The extending direction of the first lateral opening and the extending direction of the second lateral opening are substantially parallel to the extending direction of the scan line, and the first lateral opening and the second lateral opening respectively correspond to adjacent of the scan line. The sensing device of claim 4, wherein an extending direction of the first opening, an extending direction of the second opening, and an extending direction of the third opening are substantially parallel to an extending direction of the reading line , and the adjacent projections of the first opening, the second opening and the third opening on the substrate along the normal direction of the substrate respectively correspond to the adjacent three reading lines. The sensing device of claim 1, further comprising: a first inorganic layer located between the first organic layer and the second organic layer, wherein the first light-shielding pattern is disposed on the first inorganic layer; and The second inorganic layer is located between the second organic layer and the third organic layer, wherein the second light-shielding pattern is disposed on the second inorganic layer. The sensing device of claim 1, wherein each of the plurality of sensing units includes an active element and the sensing element, the active element and the sensing element being electrically connected.

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