TWI812938B - Biometric sensing apparatus - Google Patents

Biometric sensing apparatus Download PDF

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TWI812938B
TWI812938B TW110112391A TW110112391A TWI812938B TW I812938 B TWI812938 B TW I812938B TW 110112391 A TW110112391 A TW 110112391A TW 110112391 A TW110112391 A TW 110112391A TW I812938 B TWI812938 B TW I812938B
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light
sensing
shielding layer
sensing element
biometric
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TW110112391A
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TW202209166A (en
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陳志成
劉貴文
童子謙
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友達光電股份有限公司
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Priority to US17/356,483 priority Critical patent/US20220050985A1/en
Priority to CN202110842193.5A priority patent/CN113591664B/en
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Publication of TWI812938B publication Critical patent/TWI812938B/en

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Abstract

A biometric sensing apparatus including a light sensing device, a first light shielding layer, a second light shielding layer and a capacitive sensing device is provided. The light sensing device is disposed on a substrate. The first light shielding layer is disposed on the light sensing device. The first light shielding layer has a first pinhole corresponding to the light sensing device. The second light shielding layer is disposed on the first light shielding layer. The second light shielding layer has a second pinhole corresponding to the first pinhole. At least one of the first light shielding layer and the second light shielding layer is the first sensing electrode of the capacitive sensing device.

Description

生物特徵感測裝置biometric sensing device

本發明是有關於一種感測裝置,且特別是有關於一種生物特徵感測裝置。The present invention relates to a sensing device, and in particular to a biometric sensing device.

一般的光學式屏下指紋模組常會有厚度太厚的問題。另外,如何提升光學式屏下指紋模組的防偽辨識能力,也是目前研究的課題。General optical under-screen fingerprint modules often have the problem of being too thick. In addition, how to improve the anti-counterfeiting identification capabilities of optical under-screen fingerprint modules is also a topic of current research.

本發明提供一種生物特徵感測裝置,其可以具有較薄的厚度及/或較佳的辨識性能。The present invention provides a biometric sensing device, which can have a thinner thickness and/or better identification performance.

本發明的生物特徵感測裝置包括光感測元件、第一遮光層、第二遮光層以及電容感測元件。光感測元件設置於基板上。第一遮光層設置於光感測元件上。第一遮光層具有對應於光感測元件的第一孔洞。第二遮光層設置於第一遮光層上。第二遮光層具有對應於第一孔洞的第二孔洞。第一遮光層及第二遮光層中的至少其中之一為電容感測元件的第一感測電極。The biometric sensing device of the present invention includes a light sensing element, a first light shielding layer, a second light shielding layer and a capacitive sensing element. The light sensing element is arranged on the substrate. The first light-shielding layer is disposed on the light sensing element. The first light shielding layer has a first hole corresponding to the light sensing element. The second light-shielding layer is disposed on the first light-shielding layer. The second light-shielding layer has second holes corresponding to the first holes. At least one of the first light-shielding layer and the second light-shielding layer is a first sensing electrode of the capacitive sensing element.

基於上述,藉由將第一遮光層及第二遮光層中的至少其中之一作為電容感測元件的第一感測電極,可以使生物特徵感測裝置的厚度較薄。另外,藉由光感測元件與電容感測元件的整合(integrated),可以使生物特徵感測裝置具有較佳的辨識性能(如:提升光學式屏下指紋模組的防偽辨識能力,但不限)。Based on the above, by using at least one of the first light-shielding layer and the second light-shielding layer as the first sensing electrode of the capacitive sensing element, the thickness of the biometric sensing device can be made thinner. In addition, through the integration of light sensing elements and capacitive sensing elements, the biometric sensing device can have better identification performance (such as improving the anti-counterfeiting identification capability of the optical under-screen fingerprint module, but it does not limit).

讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。如本領域技術人員將認識到的,可以以各種不同的方式修改所描述的實施例,而不脫離本發明的精神或範圍。In order to make the above-mentioned features and advantages of the present invention more obvious and understandable, embodiments are given below and described in detail with reference to the accompanying drawings. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the invention.

在附圖中,為了清楚起見,放大了各元件等的厚度。在整個說明書中,相同的附圖標記表示相同的元件。應當理解,當諸如層、膜、區域或基板的元件被稱為在“另一元件上”、或“連接到另一元件”、“重疊於另一元件”時,其可以直接在另一元件上或與另一元件連接,或者中間元件可以也存在。相反,當元件被稱為“直接在另一元件上”或 “直接連接到”另一元件時,不存在中間元件。如本文所使用的,“連接”可以指物理及/或電連接。In the drawings, the thicknesses of components and the like are exaggerated for clarity. Throughout this specification, the same reference numbers refer to the same elements. It will be understood that when an element such as a layer, film, region or substrate is referred to as being "on," "connected to" or "overlapping" another element, it can be directly on the other element. on or connected to another element, or intervening elements may also be present. In contrast, when an element is referred to as being "directly on" or "directly connected to" another element, there are no intervening elements present. As used herein, "connected" may refer to a physical and/or electrical connection.

應當理解,儘管術語“第一”、“第二”、“第三”等在本文中可以用於描述各種元件、部件、區域、層及/或部分,但是這些元件、部件、區域、及/或部分不應受這些術語的限制。這些術語僅用於將一個元件、部件、區域、層或部分與另一個元件、部件、區域、層或部分區分開。因此,下面討論的“第三元件”、“部件”、“區域”、“層”、或“部分”可以被稱為第二元件、部件、區域、層或部分,且相對地“第二元件”、“部件”、“區域”、“層”、或“部分”可以被稱為第三元件、部件、區域、層或部分,而不脫離本文的教導。It will be understood that, although the terms "first," "second," "third," etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, and/or sections or parts thereof shall not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a "third element", "component", "region", "layer" or "section" discussed below could be termed a second element, component, region, layer or section, and relative to a "second element" ”, “component”, “region”, “layer” or “section” could be referred to as a third element, component, region, layer or section without departing from the teachings herein.

這裡使用的術語僅僅是為了描述特定實施例的目的,而不是限制性的。如本文所使用的,除非內容清楚地指示,否則單數形式“一”、“一個”和“該”旨在包括複數形式,包括“至少一個”。“或”表示“及/或”。如本文所使用的,術語“及/或”包括一個或多個相關所列項目的任何和所有組合。還應當理解,當在本說明書中使用時,術語“包括”及/或“包括”指定所述特徵、區域、整體、步驟、操作、元件的存在及/或部件,但不排除一個或多個其它特徵、區域整體、步驟、操作、元件、部件及/或其組合的存在或添加。The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms including "at least one" unless the content clearly dictates otherwise. "Or" means "and/or". As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items. It will also be understood that when used in this specification, the terms "comprises" and/or "includes" designate the presence of stated features, regions, integers, steps, operations, elements and/or components but do not exclude one or more The presence or addition of other features, regions, steps, operations, elements, parts and/or combinations thereof.

此外,諸如“下”和“上”的相對術語可在本文中用於描述一個元件與另一元件的關係,如圖所示。應當理解,相對術語旨在包括除了圖中所示的方位之外的裝置的不同方位。例如,如果一個附圖中的裝置翻轉,則被描述為在其他元件的“下”側的元件將被定向在其他元件的“上”側。因此,示例性術語“下”可以包括“下”和“上”的取向,取決於附圖的特定取向。類似地,如果一個附圖中的裝置翻轉,則被描述為在其它元件“下方”或“下方”的元件將被定向為在其它元件 “上方”。因此,示例性術語“下面”或“下面”可以包括上方和下方的取向。Additionally, relative terms, such as "lower" and "upper," may be used herein to describe one element's relationship to another element as illustrated in the Figures. It will be understood that relative terms are intended to encompass different orientations of the device in addition to the orientation illustrated in the figures. For example, if the device in one of the figures is turned over, elements described as "lower" than other elements would then be oriented "upper" than the other elements. Thus, the exemplary term "lower" may include both "lower" and "upper" orientations, depending on the particular orientation of the drawing. Similarly, if the device in one of the figures is turned over, elements described as "below" or "beneath" other elements would then be oriented "above" the other elements. Thus, the exemplary terms "below" or "lower" may include both upper and lower orientations.

本文使用的“基本上”或其他類似用語包括所述值和在本領域普通技術人員確定的特定值的可接受的偏差範圍內的平均值,考慮到所討論的測量和與測量相關的誤差的特定數量(即,測量系統的限制)。例如,“基本上”可以表示在所述值的一個或多個標準偏差內,或±30%、±20%、±10%、±5%內。As used herein, "substantially" or other similar terms include the stated value and the average within an acceptable range of deviations from the particular value as determined by one of ordinary skill in the art, taking into account the measurement in question and errors associated with the measurement. A specific quantity (i.e., a limit of the measurement system). For example, "substantially" may mean within one or more standard deviations of the stated value, or within ±30%, ±20%, ±10%, ±5%.

除非另有定義,本文使用的所有術語(包括技術和科學術語)具有與本發明所屬領域的普通技術人員通常理解的相同的含義。將進一步理解的是,諸如在通常使用的字典中定義的那些術語應當被解釋為具有與它們在相關技術和本發明的上下文中的含義一致的含義,並且將不被解釋為理想化的或過度正式的意義,除非本文中明確地這樣定義。Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms such as those defined in commonly used dictionaries should be construed to have meanings consistent with their meanings in the context of the relevant technology and the present invention, and are not to be construed as idealistic or excessive Formal meaning, unless expressly defined as such herein.

本文參考作為理想化實施例的示意圖的截面圖來描述示例性實施例。因此,可以預期到作為例如製造技術及/或公差的結果的圖示的形狀變化。因此,本文所述的實施例不應被解釋為限於如本文所示的區域的特定形狀,而是包括例如由製造導致的形狀偏差。例如,示出或描述為平坦的區域通常可以具有粗糙及/或非線性特徵。此外,所示的銳角可以是圓的。因此,圖中所示的區域本質上是示意性的,並且它們的形狀不是旨在示出區域的精確形狀,並且不是旨在限制權利要求的範圍。Example embodiments are described herein with reference to cross-sectional illustrations that are schematic illustrations of idealized embodiments. Accordingly, variations in the shape of the illustrations, for example as a result of manufacturing techniques and/or tolerances, are to be expected. Thus, embodiments described herein should not be construed as limited to the particular shapes of regions illustrated herein but are to include deviations in shapes that result, for example, from manufacturing. For example, regions shown or described as flat may typically have rough and/or non-linear characteristics. Additionally, the acute angles shown may be rounded. Accordingly, the regions shown in the figures are schematic in nature and their shapes are not intended to show the precise shapes of the regions and are not intended to limit the scope of the claims.

圖1A是依照本發明的第一實施例的一種生物特徵感測裝置及其一種使用方式的部分剖視示意圖。圖1B是依照本發明的第一實施例的一種生物特徵感測裝置的部分剖視示意圖。圖1C是依照本發明的第一實施例的一種生物特徵感測裝置的部分電路連接示意圖。圖1D是依照本發明的第一實施例的一種生物特徵感測裝置的部分上視示意圖。圖1E是依照本發明的第一實施例的一種生物特徵感測裝置的部分時序示意圖。舉例而言,在圖1A或圖1D中,僅示例性地繪示在生物特徵感測裝置中的光感測元件或電容感測元件所對應的部分位置或部分區域。圖1B可以是對應於圖1A中區域R1的放大圖。1A is a partial cross-sectional schematic diagram of a biometric sensing device and a usage thereof according to the first embodiment of the present invention. 1B is a partial cross-sectional schematic diagram of a biometric sensing device according to the first embodiment of the present invention. 1C is a partial circuit connection diagram of a biometric sensing device according to the first embodiment of the present invention. FIG. 1D is a partial top view of a biometric sensing device according to the first embodiment of the present invention. FIG. 1E is a partial timing diagram of a biometric sensing device according to the first embodiment of the present invention. For example, in FIG. 1A or FIG. 1D , only partial positions or partial regions corresponding to the light sensing elements or capacitive sensing elements in the biometric sensing device are illustrated. FIG. 1B may be an enlarged view corresponding to the region R1 in FIG. 1A.

生物特徵感測裝置100包括光感測元件120、第一遮光層131、第二遮光層132以及電容感測元件160。光感測元件120設置於基板110的基板表面110a上。第一遮光層131設置於光感測元件120上。第一遮光層131具有對應於光感測元件120的第一孔洞131P。第二遮光層132設置於第一遮光層131上。第二遮光層132包含對應於第一孔洞131P的第二孔洞132P。第一遮光層131及第二遮光層132中的至少其中之一為電容感測元件160的第一感測電極161。也就是說,作為第一感測電極161的第一遮光層131或第二遮光層132為導電層。The biometric sensing device 100 includes a light sensing element 120, a first light shielding layer 131, a second light shielding layer 132, and a capacitive sensing element 160. The light sensing element 120 is disposed on the substrate surface 110a of the substrate 110. The first light-shielding layer 131 is disposed on the light sensing element 120 . The first light shielding layer 131 has a first hole 131P corresponding to the light sensing element 120 . The second light-shielding layer 132 is disposed on the first light-shielding layer 131 . The second light-shielding layer 132 includes second holes 132P corresponding to the first holes 131P. At least one of the first light-shielding layer 131 and the second light-shielding layer 132 is the first sensing electrode 161 of the capacitive sensing element 160 . That is to say, the first light-shielding layer 131 or the second light-shielding layer 132 as the first sensing electrode 161 is a conductive layer.

在本實施例中,遮光層的一孔洞(如:第一遮光層131的一第一孔洞131P及/或第二遮光層132的一第二孔洞132P)可以對應於一光感測元件120,但本發明不限於此。在一未繪示的實施例中,遮光層的多個孔洞(如:第一遮光層131的多個第一孔洞131P及/或第二遮光層132的多個第二孔洞132P)可以對應於類似於光感測元件120的一光感測元件。In this embodiment, a hole in the light-shielding layer (such as a first hole 131P in the first light-shielding layer 131 and/or a second hole 132P in the second light-shielding layer 132) may correspond to a light sensing element 120, However, the present invention is not limited to this. In an embodiment not shown, the plurality of holes in the light-shielding layer (such as the plurality of first holes 131P in the first light-shielding layer 131 and/or the plurality of second holes 132P in the second light-shielding layer 132 ) may correspond to A light sensing element similar to the light sensing element 120 .

在本實施例中,生物特徵感測裝置100可以更包括絕緣層。絕緣層可以是由多個堆疊的絕緣膜層所構成。絕緣層的整體或部分的絕緣層可能被稱為平坦層(planarization layer;PL layer)、保護層(如:背通道保護層(back channel passivation layer;BP layer),但不限)或緩衝層,但本發明不限於此。In this embodiment, the biometric sensing device 100 may further include an insulation layer. The insulating layer may be composed of multiple stacked insulating film layers. The whole or part of the insulating layer may be called a planarization layer (PL layer), a protective layer (such as a back channel passivation layer (BP layer), but not limited to) or a buffer layer, However, the present invention is not limited to this.

在本實施例中,第一遮光層131及第二遮光層132可以藉由彼此間的絕緣層而彼此分隔。舉例而言,生物特徵感測裝置100可以更包括第一絕緣層141或第二絕緣層142,但本發明不限於此。第一絕緣層141可以覆蓋第一遮光層131。第二遮光層132可以覆蓋第二絕緣層142。In this embodiment, the first light-shielding layer 131 and the second light-shielding layer 132 may be separated from each other by an insulating layer therebetween. For example, the biometric sensing device 100 may further include a first insulation layer 141 or a second insulation layer 142, but the invention is not limited thereto. The first insulation layer 141 may cover the first light shielding layer 131 . The second light shielding layer 132 may cover the second insulation layer 142.

在一實施例中,部分的絕緣層可以填入遮光層中對應的孔洞,但本發明不限於此。舉例而言,部分的第一絕緣層141可以填入第一遮光層131的第一孔洞131P。In one embodiment, part of the insulating layer can be filled into corresponding holes in the light-shielding layer, but the invention is not limited thereto. For example, part of the first insulation layer 141 may be filled in the first hole 131P of the first light-shielding layer 131 .

在本實施例中,生物特徵感測裝置100可以更包括導光元件150。導光元件150可以對應於遮光層的孔洞(如:第二遮光層132的第二孔洞132P)。導光元件150可以包括透鏡(如:微透鏡(micro lens)),但本發明不限於此。In this embodiment, the biometric sensing device 100 may further include a light guide element 150 . The light guide element 150 may correspond to a hole in the light shielding layer (eg, the second hole 132P of the second light shielding layer 132 ). The light guide element 150 may include a lens (such as a micro lens), but the present invention is not limited thereto.

在一實施例中,導光元件150可以嵌入對應的遮光層的孔洞,但本發明不限於此。In one embodiment, the light guide element 150 can be embedded in the hole of the corresponding light shielding layer, but the invention is not limited thereto.

在一實施例中,導光元件150可以為預先成型(pre-formed)的元件,但本發明不限於此。In one embodiment, the light guide component 150 may be a pre-formed component, but the invention is not limited thereto.

在一實施例中,導光元件150可以藉由壓印的方式形成。舉例而言,可以在對應的遮光層的頂表面(如:對應於光感測元件120處,前述的遮光層中最遠離光感測元件120的表面)上塗佈透光材料,然後,藉由壓印前述透光材料的方式形成對應的導光元件150。In one embodiment, the light guide element 150 can be formed by imprinting. For example, a light-transmitting material can be coated on the top surface of the corresponding light-shielding layer (such as: corresponding to the light-sensing element 120, the surface of the aforementioned light-shielding layer farthest from the light-sensing element 120), and then, by The corresponding light guide element 150 is formed by imprinting the aforementioned light-transmitting material.

在本實施例中,生物特徵感測裝置100可以更包括濾光層。濾光層可以位於光感測元件120上。濾光層可以包括紅外線截止(IR-cut)材質、紅外線濾除(IR filter)材質、紅光濾除(red filter)材質、綠光濾除(green filter)材質、藍光濾除(blue filter)材質或其他可能的彩色濾除(color filter)材質。In this embodiment, the biometric sensing device 100 may further include a filter layer. A filter layer may be located on the light sensing element 120. The filter layer can include IR-cut material, IR filter material, red filter material, green filter material, and blue filter material. Material or other possible color filter materials.

在一實施例中,濾光層190在不同區域可能具有不同的材質,但本發明不限於此。舉例而言,在濾光層190中,區域191、區域192、區域193或區域194中的其中兩者可能具有不同的材質。In one embodiment, the filter layer 190 may have different materials in different areas, but the invention is not limited thereto. For example, in the filter layer 190, two of the regions 191, 192, 193 or 194 may have different materials.

在本實施例中,濾光層190可以位於第一絕緣層141與第二絕緣層142之間,但本發明不限於此。In this embodiment, the filter layer 190 may be located between the first insulating layer 141 and the second insulating layer 142, but the invention is not limited thereto.

在一實施例中,可以藉由濾光層190提升對應的光感測元件120的訊號雜訊比(Signal-to-noise ratio;SNR)。In one embodiment, the signal-to-noise ratio (SNR) of the corresponding light sensing element 120 can be improved through the filter layer 190 .

在一實施例中,光感測元件120可以是由多個堆疊的膜層(如:對應的電極層及對應的感光層)所構成,但本發明不限於此。前述的感光層可以包括光電轉換材質(photoelectric conversion material)。舉例而言,感光層可以藉由吸光而使光感測元件120產生對應的電訊號,但本發明不限於此。在一實施例中,感光層的材質可以包括富矽氧化物(silicon rich oxide;SRO)、富矽氮化物(silicon rich nitride;SRN)、富矽氮氧化物(silicon rich oxynitride;SRON)、富矽碳化物(silicon rich carbide;SRC)、富矽碳氧化物(silicon richoxycarbide)、氫化富矽氧化物(hydrogenated silicon rich oxide)、氫化富矽氮化物(hydrogenated silicon rich nitride)、氫化富矽氮氧化物(hydrogenated silicon rich oxynitride)或上述之組合、摻雜或堆疊,但本發明不限於此。In one embodiment, the light sensing element 120 may be composed of a plurality of stacked film layers (such as corresponding electrode layers and corresponding photosensitive layers), but the invention is not limited thereto. The aforementioned photosensitive layer may include a photoelectric conversion material. For example, the photosensitive layer can absorb light to cause the light sensing element 120 to generate a corresponding electrical signal, but the invention is not limited thereto. In one embodiment, the material of the photosensitive layer may include silicon rich oxide (SRO), silicon rich nitride (SRN), silicon rich oxynitride (SRON), rich Silicon rich carbide (SRC), silicon rich oxycarbide, hydrogenated silicon rich oxide, hydrogenated silicon rich nitride, hydrogenated silicon rich nitride (hydrogenated silicon rich oxynitride) or a combination, doping or stacking of the above, but the invention is not limited thereto.

在一可能的實施例中,光感測元件120可以包括模組化(modular)的光感測元件。In a possible embodiment, the light sensing element 120 may include a modular light sensing element.

在一實施例中,若(即,其中一種可能的態樣)導電的第一遮光層131為電容感測元件160的第一感測電極161,則導電的第一遮光層131與光感測元件120電性分離。In an embodiment, if (that is, one of the possible aspects) the conductive first light-shielding layer 131 is the first sensing electrode 161 of the capacitive sensing element 160, then the conductive first light-shielding layer 131 is connected to the light sensing element 161. Component 120 is electrically isolated.

在一實施例中,若(即,其中一種可能的態樣)導電的第二遮光層132為電容感測元件160的第一感測電極161,則導電的第二遮光層132與光感測元件120電性分離。In one embodiment, if (that is, one of the possible aspects) the conductive second light-shielding layer 132 is the first sensing electrode 161 of the capacitive sensing element 160, then the conductive second light-shielding layer 132 is connected to the light sensing element 161. Component 120 is electrically isolated.

在一實施例中,若(即,其中一種可能的態樣)導電的第一遮光層131及導電的第二遮光層132為電容感測元件160的第一感測電極161,則導電的第一遮光層131及導電的第二遮光層132與光感測元件120電性分離。並且,構成第一感測電極161的第一遮光層131及第二遮光層132在其他未繪示的區域中,可以藉由其他的導電元件(如:導電通孔(conductive via),但不限)彼此電性連接。In an embodiment, if (that is, one of the possible aspects) the conductive first light-shielding layer 131 and the conductive second light-shielding layer 132 are the first sensing electrodes 161 of the capacitive sensing element 160, then the conductive third light-shielding layer 132 is the first sensing electrode 161 of the capacitive sensing element 160. A light-shielding layer 131 and a conductive second light-shielding layer 132 are electrically separated from the light sensing element 120 . Moreover, the first light-shielding layer 131 and the second light-shielding layer 132 constituting the first sensing electrode 161 can be formed by other conductive elements (such as conductive vias) in other areas not shown, but not limited) are electrically connected to each other.

在一實施例中,電容感測元件160的第一感測電極161可以浮動接地(floating ground)或物理性接地(physical ground),但本發明不限於此。In one embodiment, the first sensing electrode 161 of the capacitive sensing element 160 may be floating ground or physical ground, but the invention is not limited thereto.

在一實施例中,第一感測電極161的圖案(pattern)或佈線(layout)可以依據設計上的需求而加以調整,於本發明並不加以限制。舉例而言,在第一感測電極161未對應或未重疊於光感測元件120的區域,其圖案或佈線可以依據電路的對應需求而加以調整。In one embodiment, the pattern or layout of the first sensing electrode 161 can be adjusted according to design requirements, and is not limited in the present invention. For example, in the area where the first sensing electrode 161 does not correspond to or overlap with the light sensing element 120, its pattern or wiring can be adjusted according to the corresponding needs of the circuit.

在本實施例中,電容感測元件160可以更包括第二感測電極162。於生物特徵感測裝置100的厚度方向D1(如:垂直於基板表面110a的一方向)上,第二感測電極162對應於第一感測電極161設置。也就是說,在厚度方向D1上,第二感測電極162重疊(包括完全重疊或部分重疊)於第一感測電極161。In this embodiment, the capacitive sensing element 160 may further include a second sensing electrode 162 . In the thickness direction D1 of the biometric sensing device 100 (eg, a direction perpendicular to the substrate surface 110 a ), the second sensing electrode 162 is disposed corresponding to the first sensing electrode 161 . That is to say, in the thickness direction D1, the second sensing electrode 162 overlaps (including completely overlapping or partially overlapping) the first sensing electrode 161.

在一實施例中,於生物特徵感測裝置100可以更包括位於第二感測電極162上的保護層(未繪示)。In one embodiment, the biometric sensing device 100 may further include a protective layer (not shown) located on the second sensing electrode 162 .

在本實施例中,在生物特徵感測裝置100的某一區域(如:類似於圖1A中適於手指F按壓/觸摸,且加以感測及/或辨識的區域;但不限)中,於生物特徵感測裝置100的厚度方向D1上,第二感測電極162、第一感測電極161及光感測元件120可以彼此重疊。In this embodiment, in a certain area of the biometric sensing device 100 (such as: similar to the area suitable for pressing/touching by the finger F in FIG. 1A and sensing and/or identifying; but not limited to), In the thickness direction D1 of the biometric sensing device 100, the second sensing electrode 162, the first sensing electrode 161 and the light sensing element 120 may overlap each other.

在一實施例中,第二感測電極162的材質可以包括氧化鋅(ZnO)、氧化錫(SnO)、氧化銦鋅(Indium-Zinc Oxide;IZO)、氧化鎵鋅(Gallium-Zinc Oxide;GZO)、氧化鋅錫(Zinc-Tin Oxide;ZTO)或氧化銦錫(Indium-Tin Oxide;ITO)或上述之組合、摻雜或堆疊,但本發明不限於此。In one embodiment, the material of the second sensing electrode 162 may include zinc oxide (ZnO), tin oxide (SnO), indium zinc oxide (Indium-Zinc Oxide; IZO), gallium zinc oxide (Gallium-Zinc Oxide; GZO) ), zinc-tin oxide (Zinc-Tin Oxide; ZTO) or indium-tin oxide (Indium-Tin Oxide; ITO) or a combination, doping or stacking of the above, but the invention is not limited thereto.

在一實施例中,第二感測電極162的圖案(pattern)或佈線(layout)可以依據設計上的需求而加以調整,於本發明並不加以限制。In one embodiment, the pattern or layout of the second sensing electrode 162 can be adjusted according to design requirements, and is not limited in the present invention.

在一實施例中,電容感測元件160可以電性連接於電容感測電路176,以進行互容(mutual capacitance)感測模式、自容(self capacitance)感測模式或其他可能的感測模式。In one embodiment, the capacitive sensing element 160 can be electrically connected to the capacitive sensing circuit 176 to perform a mutual capacitance sensing mode, a self capacitance sensing mode, or other possible sensing modes. .

舉例而言,前述的電容感測電路176可包括掃描驅動電路(Tx driving circuit)與感測驅動電路(Rx driving circuit),掃描驅動電路可以電性連接於對應的第二感測電極162,且感測驅動電路可以電性連接於對應的第一感測電極161。在互容感測模式下,在觸控偵測時間區間,可以藉由掃描驅動電路對第二感測電極162施加觸控掃描訊號,對應的第一感測電極161可以耦合觸控掃描訊號,且可以被感測驅動電路讀取及/或感測。以藉由手指按壓或觸摸生物特徵感測裝置100為例(如:圖1A所示),可以使對應的第二感測電極162產生對應的形變(如:使第二感測電極162與第一感測電極161之間的距離減少),而改變對應的第二感測電極162與對應的第一感測電極161之間的感應電容。以上對於電容感測元件160的觸控感測方式只是示例性地舉例,於本發明並不加以限制。For example, the aforementioned capacitive sensing circuit 176 may include a scan driving circuit (Tx driving circuit) and a sensing driving circuit (Rx driving circuit). The scanning driving circuit may be electrically connected to the corresponding second sensing electrode 162, and The sensing driving circuit may be electrically connected to the corresponding first sensing electrode 161 . In the mutual capacitance sensing mode, during the touch detection time interval, the touch scan signal can be applied to the second sensing electrode 162 through the scan driving circuit, and the corresponding first sensing electrode 161 can couple the touch scan signal. And can be read and/or sensed by the sensing driving circuit. Taking the biometric sensing device 100 as an example by pressing or touching it with a finger (as shown in FIG. 1A ), the corresponding second sensing electrode 162 can be deformed accordingly (such as causing the second sensing electrode 162 to be in contact with the second sensing electrode 162 ). (the distance between one sensing electrode 161 decreases), thereby changing the sensing capacitance between the corresponding second sensing electrode 162 and the corresponding first sensing electrode 161. The above touch sensing method of the capacitive sensing element 160 is only an illustrative example, and is not limited to the present invention.

在自然或非刻意的狀況下,由於手指(如:圖1A中的手指F,但不限)的厚度或力道常較不均;且/或手指按壓/觸摸的程度或位置較難一致,因此,在電容感測元件160被手指按壓/觸摸的狀態下,不同的區域(如:對應的第二感測電極162;但不限)基本上會有明顯或可被偵測/判斷的訊號差異。如此一來,可以藉由電容感測元件160辨別是否可能是手指真實地按壓/觸摸。但本發明對於辨別的方式並不加以限制。Under natural or unintentional conditions, because the thickness or strength of fingers (such as finger F in Figure 1A, but not limited to) is often uneven; and/or the degree or position of finger pressure/touch is difficult to be consistent, so , when the capacitive sensing element 160 is pressed/touched by a finger, there will basically be obvious or detectable/judgable signal differences in different areas (such as the corresponding second sensing electrode 162; but not limited to) . In this way, the capacitive sensing element 160 can be used to identify whether it is possible to be actually pressed/touched by a finger. However, the present invention does not limit the identification method.

在一實施例中,電容感測元件160的感測範圍R6大於或基本上等於3毫米(millimeter;mm)×3mm,且小於或基本上等於50mm×50mm。如此一來,可以適於調整第一感測電極161與第二感測電極162之間的距離,且/或可使電容感測元件160具有較佳的準確度。值得注意的是,前述的感測範圍R6的表示方式僅為表示電容感測元件160投影於基板表面110a的面積,本發明並未限制感測範圍R6的形狀。舉例而言,電容感測元件160投影於基板表面110a的形狀可以是四邊型、類四邊型(如:有至少一個圓角的類似四邊型)、其他類似的多邊型、類多邊型或含弧邊的可能形狀(如:圓形或橢圓形)。In an embodiment, the sensing range R6 of the capacitive sensing element 160 is greater than or substantially equal to 3 millimeters (mm) × 3 mm, and less than or substantially equal to 50 mm × 50 mm. In this way, the distance between the first sensing electrode 161 and the second sensing electrode 162 can be appropriately adjusted, and/or the capacitive sensing element 160 can have better accuracy. It is worth noting that the aforementioned expression of the sensing range R6 only represents the area of the capacitive sensing element 160 projected on the substrate surface 110a, and the present invention does not limit the shape of the sensing range R6. For example, the shape of the capacitive sensing element 160 projected onto the substrate surface 110a may be a quadrangular shape, a quadrilateral-like shape (such as a quadrilateral-like shape with at least one rounded corner), other similar polygonal shapes, polygonal-like shapes, or arc-like shapes. Possible shapes for the sides (e.g. circle or ellipse).

在一實施例中,感測單元(sensor unit)的大小或數量可以依據設計上的需求而加以調整,於本發明並不加以限制。也就是說,於感測範圍R6內,可以包括一個或多個的光感測單元或一個或多個的電容感測單元。In one embodiment, the size or number of sensor units can be adjusted according to design requirements, and is not limited in the present invention. That is to say, the sensing range R6 may include one or more light sensing units or one or more capacitive sensing units.

在本實施例中,生物特徵感測裝置100可以更包括顯示元件180。顯示元件180可以配置於第一感測電極161與第二感測電極162之間。In this embodiment, the biometric sensing device 100 may further include a display element 180 . The display element 180 may be disposed between the first sensing electrode 161 and the second sensing electrode 162 .

在一實施例中,生物特徵感測裝置100可以被稱為屏下指紋感測器(under display fingerprint sensor),但本發明不限於此。In one embodiment, the biometric sensing device 100 may be called an under display fingerprint sensor, but the invention is not limited thereto.

顯示元件180可以包括液晶顯示元件、有機發光二極體顯示元件、發光二極體顯示元件或其他適宜的顯示元件,於本發明並不加以限制。另外,在圖1A中,顯示元件180的配置方式及大小僅是示意性地繪示,於本發明並不加以限制。The display element 180 may include a liquid crystal display element, an organic light-emitting diode display element, a light-emitting diode display element or other suitable display elements, which are not limited in the present invention. In addition, in FIG. 1A , the arrangement and size of the display element 180 are only schematically illustrated and are not limited to the present invention.

舉例而言,顯示元件180中的發光單元188可以發出對應的光線L。部分的光線被手指F反射後,可以射向導光元件150(若有)。並且,適當角度的光線可以射向光感測元件120。For example, the light-emitting unit 188 in the display element 180 can emit corresponding light L. After part of the light is reflected by the finger F, it can be directed to the light guide element 150 (if any). Moreover, light at appropriate angles can be directed to the light sensing element 120 .

發光單元188例如是發光二極體或對應的畫素單元(pixel unit),於本發明並不加以限制。The light-emitting unit 188 is, for example, a light-emitting diode or a corresponding pixel unit, which is not limited in the present invention.

在本實施例中,至少藉由光感測元件120可以使生物特徵感測裝置100適於感測光線。在一實施例中,生物特徵感測裝置100可以適於感測由生物特徵(如:指紋,但不限)所反射的光線,但本發明不限於此。In this embodiment, at least the light sensing element 120 can be used to make the biometric sensing device 100 suitable for sensing light. In one embodiment, the biometric sensing device 100 may be adapted to sense light reflected by biometric features (such as, but not limited to, fingerprints), but the invention is not limited thereto.

在本實施例中,藉由生物特徵感測裝置100中電容感測元件160及光感測元件120的配置方式,可以辨別藉由光感測元件120所擷取的指紋圖案或訊號是否可能是藉由手指真實地按壓/觸摸所得。除此之外,由於具有孔洞且導電的遮光層可以作為電容感測元件160的感測電極,因此可以降低生物特徵感測裝置100的厚度。In this embodiment, through the configuration of the capacitive sensing element 160 and the light sensing element 120 in the biometric sensing device 100, it can be determined whether the fingerprint pattern or signal captured by the light sensing element 120 may be Really pressed/touched by fingers. In addition, since the conductive light-shielding layer with holes can serve as the sensing electrode of the capacitive sensing element 160, the thickness of the biometric sensing device 100 can be reduced.

在本實施例中,光感測元件120及電容感測元件160訊號連接於同一感測晶片170。感測晶片170可以包括對應的積體電路。舉例而言,感測晶片170可以包括對應的電容感測電路176、光感測電路172及/或時序控制電路(未繪示)。於感測時段內,光感測元件120適於藉由光感測電路172被輸入光感訊號,電容感測元件160適於藉由電容感測電路176被輸入電容訊號。In this embodiment, the optical sensing element 120 and the capacitive sensing element 160 are signal-connected to the same sensing chip 170 . Sensing die 170 may include corresponding integrated circuits. For example, the sensing chip 170 may include corresponding capacitive sensing circuits 176, light sensing circuits 172, and/or timing control circuits (not shown). During the sensing period, the light sensing element 120 is adapted to receive a light sensing signal through the light sensing circuit 172 , and the capacitance sensing element 160 is adapted to receive a capacitance signal through the capacitance sensing circuit 176 .

在一實施例中,晶片連接於電容感測元件160的通道數可以小於晶片連接於光感測元件120的通道數,但本發明不限於此。In one embodiment, the number of channels through which the chip is connected to the capacitive sensing element 160 may be smaller than the number of channels through which the chip is connected to the optical sensing element 120, but the invention is not limited thereto.

在本實施例中,光感訊號的時序與電容訊號的時序至少部分重疊。以圖1E為例,電容感測元件160可以於時間T1與時間T3之間、時間T4與時間T7之間以及時間T8與時間TN之間被致能,而具有對應的電容訊號。光感測元件120可以於時間T2與時間T5之間以及時間T6與時間T9之間被致能,而具有對應的電容訊號。圖1E的時序僅是示例性的表示,於本發明並不加以限制。In this embodiment, the timing of the light sensing signal and the timing of the capacitance signal at least partially overlap. Taking FIG. 1E as an example, the capacitive sensing element 160 can be enabled between time T1 and time T3, between time T4 and time T7, and between time T8 and time TN, and have corresponding capacitance signals. The light sensing element 120 can be enabled between time T2 and time T5 and between time T6 and time T9, and have corresponding capacitance signals. The timing sequence in FIG. 1E is only an exemplary representation and is not limiting to the present invention.

在一實施例中,可以在藉由電容感測元件160辨別是否可能是手指真實地按壓/觸摸時,也可以藉由光感測元件120進行指紋圖案或訊號辨別;或是,在藉由光感測元件120進行指紋圖案或訊號辨別時,也可以藉由電容感測元件160辨別是否可能是手指真實地按壓/觸摸。如使一來,可以生物特徵感測裝置100適於進行防偽的生物特徵感測辨識。In one embodiment, when the capacitive sensing element 160 is used to identify whether a finger may actually be pressed/touched, the light sensing element 120 can also be used to identify the fingerprint pattern or signal; or, when using light, When the sensing element 120 performs fingerprint pattern or signal identification, the capacitive sensing element 160 can also be used to identify whether it is actually pressed/touched by a finger. In this way, the biometric sensing device 100 can be suitable for anti-counterfeiting biometric sensing and identification.

在本實施例中,感測時段(如:圖1E中的時間T1到時間TN,但不限)小於或基本上等於5秒。如使一來,可以提升防偽辨識的準確度(如:提升模擬按壓及短時間圖案抽換的困難度)。In this embodiment, the sensing period (eg, time T1 to time TN in FIG. 1E , but not limited to) is less than or substantially equal to 5 seconds. If used, the accuracy of anti-counterfeiting identification can be improved (for example, the difficulty of simulated pressing and short-term pattern switching can be improved).

在本實施例中,電容訊號的致能時間(enabling time)的長度大於光感訊號的致能時間的長度。在一實施例中,光感訊號的感測時間及/或反應時間通常短於電容訊號的感測時間及/或反應時間。舉例而言,能致使電容訊號產生的形變或電容變化量可能會對應於生物的反應或作動時間,而需要相較較長的感測時間及/或反應時間。因此,可藉由電容訊號的致能時間的長度大於光感訊號的致能時間的長度,以提升辨識的準確度。In this embodiment, the length of the enabling time of the capacitive signal is greater than the length of the enabling time of the light sensing signal. In one embodiment, the sensing time and/or response time of the light sensing signal is generally shorter than the sensing time and/or response time of the capacitive signal. For example, the amount of deformation or capacitance change that causes a capacitance signal may correspond to the reaction or action time of the organism, requiring a relatively long sensing time and/or reaction time. Therefore, the accuracy of identification can be improved by making the enabling time of the capacitive signal longer than the enabling time of the light sensing signal.

在一實施例中,在完成生物特徵感測辨識後(如:時間TN之後),可以致能其他觸碰感測訊號,以進行其他的觸碰感測功能。舉例而言,光感訊號與電容訊號可以是被用於屏下指紋感測器的指紋解鎖功能,而指紋解鎖完成之後的其他觸碰感測訊號可以被用於其他應用程式。In one embodiment, after the biometric sensing and identification is completed (for example, after time TN), other touch sensing signals can be enabled to perform other touch sensing functions. For example, light sensing signals and capacitive signals can be used for the fingerprint unlocking function of the under-screen fingerprint sensor, and other touch sensing signals after the fingerprint unlocking is completed can be used for other applications.

值得注意的是,圖1E僅是示例性地說明,本發明並不限定光感訊號及/或電容訊號的致能次數。It is worth noting that FIG. 1E is only an exemplary illustration, and the present invention does not limit the number of times the light sensing signal and/or the capacitance signal is enabled.

圖2是依照本發明的第二實施例的一種生物特徵感測裝置的部分上視示意圖。第二實施例的生物特徵感測裝置200與第一實施例的生物特徵感測裝置100相似,其類似的構件以相同的標號表示,且具有類似的功能、材質或形成方式,並省略描述。FIG. 2 is a partial top view of a biometric sensing device according to the second embodiment of the present invention. The biometric sensing device 200 of the second embodiment is similar to the biometric sensing device 100 of the first embodiment. Similar components are denoted by the same reference numerals and have similar functions, materials or formation methods, and descriptions thereof are omitted.

生物特徵感測裝置200可以包括光感測元件120、第一遮光層131、第二遮光層132、電容感測元件(未直接繪示,可以類似於前述實施例的電容感測元件160)以及導光元件250。The biometric sensing device 200 may include a light sensing element 120, a first light shielding layer 131, a second light shielding layer 132, a capacitive sensing element (not directly shown, which may be similar to the capacitive sensing element 160 of the previous embodiment), and Light guide element 250.

在本實施例中,於一個感測單元中,一個導光元件250可以對應於一遮光層的一孔洞(如:第一遮光層131的一第一孔洞131P及第二遮光層132的一第二孔洞132P)。In this embodiment, in a sensing unit, a light guide element 250 may correspond to a hole in a light-shielding layer (such as: a first hole 131P in the first light-shielding layer 131 and a first hole in the second light-shielding layer 132 Two holes 132P).

圖3是依照本發明的第三實施例的一種生物特徵感測裝置的部分上視示意圖。第三實施例的生物特徵感測裝置300與第一實施例的生物特徵感測裝置100相似,其類似的構件以相同的標號表示,且具有類似的功能、材質或形成方式,並省略描述。FIG. 3 is a partial top view of a biometric sensing device according to the third embodiment of the present invention. The biometric sensing device 300 of the third embodiment is similar to the biometric sensing device 100 of the first embodiment. Similar components are represented by the same reference numerals and have similar functions, materials or formation methods, and descriptions are omitted.

生物特徵感測裝置300可以包括光感測元件120、第一遮光層131、第二遮光層132、電容感測元件(未直接繪示,可以類似於前述實施例的電容感測元件160)以及導光元件350。The biometric sensing device 300 may include a light sensing element 120, a first light shielding layer 131, a second light shielding layer 132, a capacitive sensing element (not directly shown, which may be similar to the capacitive sensing element 160 of the previous embodiment), and Light guide element 350.

在本實施例中,於一個感測單元中,一個導光元件350可以對應於一遮光層的多個孔洞(如:第一遮光層131的多個第一孔洞131P及第二遮光層132的多個第二孔洞132P)。In this embodiment, in a sensing unit, one light guide element 350 can correspond to a plurality of holes in a light-shielding layer (such as a plurality of first holes 131P in the first light-shielding layer 131 and the plurality of first holes 131P in the second light-shielding layer 132 Multiple second holes 132P).

圖4是依照本發明的第四實施例的一種生物特徵感測裝置的部分上視示意圖。第四實施例的生物特徵感測裝置400與第一實施例的生物特徵感測裝置100相似,其類似的構件以相同的標號表示,且具有類似的功能、材質或形成方式,並省略描述。FIG. 4 is a partial top view of a biometric sensing device according to the fourth embodiment of the present invention. The biometric sensing device 400 of the fourth embodiment is similar to the biometric sensing device 100 of the first embodiment. Similar components are denoted by the same reference numerals and have similar functions, materials or formation methods, and descriptions thereof are omitted.

生物特徵感測裝置100可以包括光感測元件120、第一遮光層131、第二遮光層132、電容感測元件(未直接繪示,可以類似於前述實施例的電容感測元件160)以及導光元件450。The biometric sensing device 100 may include a light sensing element 120, a first light shielding layer 131, a second light shielding layer 132, a capacitive sensing element (not directly shown, which may be similar to the capacitive sensing element 160 of the previous embodiment), and Light guide element 450.

在本實施例中,於一個感測單元中可以包括多個導光元件450。於一個感測單元中,各個導光元件450可以對應於一遮光層的多個孔洞(如:第一遮光層131的多個第一孔洞131P及第二遮光層132的多個第二孔洞132P)。In this embodiment, a plurality of light guide elements 450 may be included in one sensing unit. In a sensing unit, each light guide element 450 may correspond to a plurality of holes in a light-shielding layer (such as a plurality of first holes 131P in the first light-shielding layer 131 and a plurality of second holes 132P in the second light-shielding layer 132 ).

另外,為求清楚表示,於圖4中並未一一標示所有的導光元件450、第一孔洞131P及第二孔洞132P。In addition, for clarity of illustration, not all the light guide elements 450, the first holes 131P and the second holes 132P are marked one by one in FIG. 4 .

圖5是依照本發明的第五實施例的一種生物特徵感測裝置的部分上視示意圖。第五實施例的生物特徵感測裝置500與第四實施例的生物特徵感測裝置400相似,其類似的構件以相同的標號表示,且具有類似的功能、材質或形成方式,並省略描述。FIG. 5 is a partial top view of a biometric sensing device according to the fifth embodiment of the present invention. The biometric sensing device 500 of the fifth embodiment is similar to the biometric sensing device 400 of the fourth embodiment. Similar components are denoted by the same reference numerals and have similar functions, materials or formation methods, and descriptions thereof are omitted.

生物特徵感測裝置500可以包括光感測元件120、第一遮光層131、第二遮光層132、電容感測元件(未直接繪示,可以類似於前述實施例的電容感測元件160)、導光元件450以及虛設導光元件550。在本實施例中,虛設導光元件550的外觀、形貌及/或尺寸可以相同或相似於導光元件450。但是,光線基本上無法藉由虛設導光元件550而射向感測元件。The biometric sensing device 500 may include a light sensing element 120, a first light shielding layer 131, a second light shielding layer 132, a capacitive sensing element (not directly shown, which may be similar to the capacitive sensing element 160 of the previous embodiment), The light guide element 450 and the dummy light guide element 550. In this embodiment, the appearance, shape and/or size of the dummy light guide element 550 may be the same as or similar to the light guide element 450 . However, the light is basically unable to emit to the sensing element through the dummy light guide element 550 .

在一實施例中,虛設導光元件550的材質可以相同或相似於導光元件450。差別在於:在厚度方向D1上,光感測元件120不重疊於虛設導光元件550;且/或,光感測元件120與虛設導光元件550之間的至少一遮光層不具有對應或重疊於虛設導光元件550的孔洞。In one embodiment, the dummy light guide element 550 may be made of the same or similar material as the light guide element 450 . The difference is that: in the thickness direction D1, the light sensing element 120 does not overlap the dummy light guide element 550; and/or, at least one light shielding layer between the light sensing element 120 and the dummy light guide element 550 does not have correspondence or overlap. holes in the dummy light guide element 550 .

在一實施例中,虛設導光元件550的材質可以不同導光元件450。舉例而言,虛設導光元件550可以不透光。In one embodiment, the material of the dummy light guide element 550 may be different from that of the light guide element 450 . For example, the dummy light guide element 550 may be opaque.

另外,為求清楚表示,於圖5中並未一一標示所有的導光元件450、第一孔洞131P、第二孔洞132P及虛設導光元件550。In addition, for clarity of illustration, not all the light guide elements 450, the first holes 131P, the second holes 132P and the dummy light guide elements 550 are marked one by one in FIG. 5 .

前述實施例中,一膜層可為單層結構或多層結構。而若一膜層為多層結構的堆疊,則前述的多層結構之間可以不具有其他性質的材質。舉例而言,導電層可為單層或多層結構。而若為多層結構的導電層,則前述的多層結構之間可以不具有絕緣材質。再舉例而言,絕緣層可為單層或多層結構。而若為多層結構的絕緣層,則前述的多層結構之間可以不具有導電材質。又舉例而言,遮光層可為單層或多層結構。而若為多層結構的遮光層,則前述的多層結構之間可以不具有透光材質。In the aforementioned embodiments, a film layer may have a single-layer structure or a multi-layer structure. If a film layer is a stack of multi-layer structures, the aforementioned multi-layer structures may not have materials with other properties between them. For example, the conductive layer may be a single layer or a multi-layer structure. If it is a conductive layer with a multi-layer structure, there may be no insulating material between the aforementioned multi-layer structures. For another example, the insulating layer may be a single layer or a multi-layer structure. If it is an insulating layer with a multi-layer structure, there may be no conductive material between the multi-layer structures. For another example, the light-shielding layer can be a single-layer or multi-layer structure. If it is a light-shielding layer with a multi-layer structure, there may be no light-transmitting material between the aforementioned multi-layer structures.

綜上所述,本發明藉由將第一遮光層及第二遮光層中的至少其中之一作為電容感測元件的第一感測電極,可以使生物特徵感測裝置的厚度較薄。另外,藉由光感測元件與電容感測元件的整合,可以使生物特徵感測裝置具有較佳的辨識性能(如:提升光學式屏下指紋模組的防偽辨識能力,但不限)。To sum up, the present invention can make the thickness of the biometric sensing device thinner by using at least one of the first light-shielding layer and the second light-shielding layer as the first sensing electrode of the capacitive sensing element. In addition, through the integration of light sensing elements and capacitive sensing elements, the biometric sensing device can have better identification performance (such as improving the anti-counterfeiting identification capability of the optical under-screen fingerprint module, but not limited to).

100、200、300、400、500:生物特徵感測裝置 110:基板 110a:表面 120:光感測元件 131:第一遮光層 131P:第一孔洞 132:第二遮光層 132P:第二孔洞 141:第一絕緣層 142:第二絕緣層 150、250、350、450:導光元件 550:虛設導光元件 160:電容感測元件 161:第一感測電極 162:第二感測電極 170:感測晶片 176:電容感測電路 180:顯示元件 188:發光單元 190:濾光層 191、192、193、194:區域 D1:厚度方向 F:手指 L:光線 R1:區域 R6:感測範圍 T1、T2、T3、T4、T5、T6、T7、T8、T9、TN:時間100, 200, 300, 400, 500: Biometric sensing device 110:Substrate 110a: Surface 120:Light sensing element 131: First light shielding layer 131P:The first hole 132:Second light shielding layer 132P:Second hole 141: First insulation layer 142: Second insulation layer 150, 250, 350, 450: light guide element 550: Dummy light guide element 160: Capacitive sensing element 161: First sensing electrode 162: Second sensing electrode 170: Sensing chip 176: Capacitive sensing circuit 180:Display component 188:Light-emitting unit 190:Filter layer 191, 192, 193, 194: Area D1:Thickness direction F:finger L:Light R1:Region R6: Sensing range T1, T2, T3, T4, T5, T6, T7, T8, T9, TN: time

圖1A是依照本發明的第一實施例的一種生物特徵感測裝置及其一種使用方式的部分剖視示意圖。 圖1B是依照本發明的第一實施例的一種生物特徵感測裝置的部分剖視示意圖。 圖1C是依照本發明的第一實施例的一種生物特徵感測裝置的部分電路連接示意圖。 圖1D是依照本發明的第一實施例的一種生物特徵感測裝置的部分上視示意圖。 圖1E是依照本發明的第一實施例的一種生物特徵感測裝置的部分時序示意圖。 圖2是依照本發明的第二實施例的一種生物特徵感測裝置的部分上視示意圖。 圖3是依照本發明的第三實施例的一種生物特徵感測裝置的部分上視示意圖。 圖4是依照本發明的第四實施例的一種生物特徵感測裝置的部分上視示意圖。 圖5是依照本發明的第五實施例的一種生物特徵感測裝置的部分上視示意圖。1A is a partial cross-sectional schematic diagram of a biometric sensing device and a usage thereof according to the first embodiment of the present invention. 1B is a partial cross-sectional schematic diagram of a biometric sensing device according to the first embodiment of the present invention. 1C is a partial circuit connection diagram of a biometric sensing device according to the first embodiment of the present invention. FIG. 1D is a partial top view of a biometric sensing device according to the first embodiment of the present invention. FIG. 1E is a partial timing diagram of a biometric sensing device according to the first embodiment of the present invention. FIG. 2 is a partial top view of a biometric sensing device according to the second embodiment of the present invention. FIG. 3 is a partial top view of a biometric sensing device according to the third embodiment of the present invention. FIG. 4 is a partial top view of a biometric sensing device according to the fourth embodiment of the present invention. FIG. 5 is a partial top view of a biometric sensing device according to the fifth embodiment of the present invention.

100:生物特徵感測裝置100:Biometric sensing device

110:基板110:Substrate

110a:表面110a: Surface

160:電容感測元件160: Capacitive sensing element

161:第一感測電極161: First sensing electrode

162:第二感測電極162: Second sensing electrode

180:顯示元件180:Display components

188:發光單元188:Light-emitting unit

D1:厚度方向D1:Thickness direction

F:手指F:finger

L:光線L:Light

R1:區域R1:Region

Claims (10)

一種生物特徵感測裝置,包括:光感測元件,設置於基板上;第一遮光層,設置於所述光感測元件上,所述第一遮光層具有對應於所述光感測元件的第一孔洞;第二遮光層,設置於所述第一遮光層上,所述第二遮光層具有對應於所述第一孔洞的第二孔洞;電容感測元件,其中所述第一遮光層及所述第二遮光層中的至少其中之一為所述電容感測元件的第一感測電極,且所述電容感測元件更包括於所述生物特徵感測裝置的厚度方向上,對應於所述第一感測電極設置的第二感測電極;以及顯示元件,配置於所述第一感測電極與所述第二感測電極之間。 A biometric sensing device, including: a light sensing element disposed on a substrate; a first light shielding layer disposed on the light sensing element, the first light shielding layer having a light sensing element corresponding to the light sensing element a first hole; a second light-shielding layer disposed on the first light-shielding layer, the second light-shielding layer having a second hole corresponding to the first hole; a capacitive sensing element, wherein the first light-shielding layer and at least one of the second light-shielding layers is the first sensing electrode of the capacitive sensing element, and the capacitive sensing element is further included in the thickness direction of the biometric sensing device, corresponding to a second sensing electrode provided on the first sensing electrode; and a display element disposed between the first sensing electrode and the second sensing electrode. 一種生物特徵感測裝置,包括:光感測元件,設置於基板上;第一遮光層,設置於所述光感測元件上,所述第一遮光層具有對應於所述光感測元件的第一孔洞;第二遮光層,設置於所述第一遮光層上,所述第二遮光層具有對應於所述第一孔洞的第二孔洞;以及電容感測元件,其中所述第一遮光層及所述第二遮光層中的至少其中之一為所述電容感測元件的第一感測電極,其中於感測時段內,所述光感測元件被輸入光感訊號,所述電容感測元件被 輸入電容訊號,且所述電容訊號的致能時間長度大於所述光感訊號的致能時間長度。 A biometric sensing device, including: a light sensing element disposed on a substrate; a first light shielding layer disposed on the light sensing element, the first light shielding layer having a light sensing element corresponding to the light sensing element a first hole; a second light-shielding layer disposed on the first light-shielding layer, the second light-shielding layer having a second hole corresponding to the first hole; and a capacitive sensing element, wherein the first light-shielding layer At least one of the second light-shielding layer and the second light-shielding layer is the first sensing electrode of the capacitive sensing element, wherein during the sensing period, the light sensing element is input with a light sensing signal, and the capacitive sensing element The sensing element is A capacitive signal is input, and the enable time length of the capacitor signal is greater than the enable time length of the light sensing signal. 如請求項1或2所述的生物特徵感測裝置,更包括:透鏡,對應於所述第一孔洞或所述第二孔洞設置。 The biometric sensing device according to claim 1 or 2, further comprising: a lens provided corresponding to the first hole or the second hole. 如請求項1或2所述的生物特徵感測裝置,其中所述第一遮光層與所述光感測元件電性分離,且/或所述第二遮光層與所述光感測元件電性分離。 The biometric sensing device according to claim 1 or 2, wherein the first light-shielding layer is electrically separated from the light-sensing element, and/or the second light-shielding layer is electrically separated from the light-sensing element. Sexual separation. 如請求項1或2所述的生物特徵感測裝置,其中所述第一遮光層及所述第二遮光層為所述電容感測元件的所述第一感測電極。 The biometric sensing device according to claim 1 or 2, wherein the first light-shielding layer and the second light-shielding layer are the first sensing electrodes of the capacitive sensing element. 如請求項2所述的生物特徵感測裝置,其中所述電容感測元件更包括於所述生物特徵感測裝置的厚度方向上,對應於所述第一感測電極設置的第二感測電極。 The biometric sensing device according to claim 2, wherein the capacitive sensing element further includes a second sensing element disposed corresponding to the first sensing electrode in the thickness direction of the biometric sensing device. electrode. 如請求項1或6所述的生物特徵感測裝置,其中所述電容感測元件的感測範圍大於或等於3mm×3mm,且小於或等於50mm×50mm。 The biometric sensing device according to claim 1 or 6, wherein the sensing range of the capacitive sensing element is greater than or equal to 3mm×3mm and less than or equal to 50mm×50mm. 如請求項1或2所述的生物特徵感測裝置,其中所述光感測元件及所述電容感測元件訊號連接於同一感測晶片。 The biometric sensing device according to claim 1 or 2, wherein the light sensing element and the capacitive sensing element are signal-connected to the same sensing chip. 如請求項1或2所述的生物特徵感測裝置,其中於感測時段內,所述光感測元件被輸入光感訊號,所述電容感測元件被輸入電容訊號,且所述光感訊號的時序與所述電容訊號的時序至少部分重疊。 The biometric sensing device according to claim 1 or 2, wherein during the sensing period, the light sensing element is input with a light sensing signal, the capacitance sensing element is fed with a capacitance signal, and the light sensing element is input with a capacitance signal. The timing of the signal overlaps at least partially with the timing of the capacitive signal. 如請求項1或2所述的生物特徵感測裝置,其中於感測時段內,所述光感測元件被輸入光感訊號,所述電容感測元件被輸入電容訊號,且所述感測時段小於或等於5秒。The biometric sensing device according to claim 1 or 2, wherein during the sensing period, the light sensing element is input with a light sensing signal, the capacitance sensing element is input with a capacitance signal, and the sensing element is The period is less than or equal to 5 seconds.
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