TWI752344B - Optical system device, bi-convex lens - Google Patents

Abstract

An optical system device 1 that parallelizes irradiated light irradiated from a light source and uniformizes the illuminance on an irradiated surface generated by the irradiated light, the optical system device 1 comprising: The lenticular lens 20 is provided in the irradiation direction of the irradiation light, and has a first surface 21 located on the incident side in the irradiation direction and a second surface 22 located on the emission side in the irradiation direction, and the second surface 22 is formed to be incident on the radius of curvature of the parallelized irradiated light, the first surface 21 is formed with a radius of curvature that uniformizes the illuminance on the irradiated surface generated by the irradiated light emitted from the second surface 22; and, The aperture 30 is arranged between the light source and the lenticular lens 20 and allows a part of the irradiation light to pass therethrough.

Description

Optical system device, lenticular lens

The present invention relates to a technique for parallelizing and homogenizing irradiated light emitted from a light source.

Conventionally, ultraviolet light irradiation devices using a large number of ultraviolet light-emitting elements such as ultraviolet LEDs have been used for curing of ultraviolet curable resins, etc. In order to prevent uneven curing of such ultraviolet curable resins, it is desirable to It has uniform illuminance on the irradiated surface. In addition, in the case of exposing with LED light using a mask, a gap is formed between the exposure target and the mask and the radiation angle of the LED light is about 120°. The irradiation surface is vertical, and the irradiation light is parallelized. Generally, a parabolic mirror or the like is used for the parallelization of such irradiation light.

Generally, a fly's eye lens or the like is used to homogenize the illuminance on the irradiated surface, and as a technique related to this, a light irradiating device is known, which includes a plurality of light emitting devices arranged on a plane. The LED array light source of the element; the first illumination optical system for collimating the light emitted from each light-emitting element; the second illumination optical system for concentrating the light emitted from the first illumination optical system to the focal position; and, the fly's eye integral a device, which has a plurality of lenses arranged on a plane, and improves the uniformity of the illuminance incident on the incident surface of each lens of the light emitted from the second illumination optical system; the incidence surface of the fly-eye integrator is arranged on the At the focal position of the second illumination optical system, the light-emitting surface of each light-emitting element is in a conjugate relationship with the incident surface of the fly-eye integrator, and the image of each light-emitting element is formed on the incident surface of the fly-eye integrator (for example, refer to the patent Reference 1).

[Previous Patent Literature] (patent literature) Patent Document 1: Japanese Patent Laid-Open No. 2016-200787.

[Problems to be Solved by Invention] When parallelizing the irradiated light and uniformizing the illuminance on the irradiated surface by the irradiated light, it is necessary to have both a device for uniformizing the illuminance and a device for parallelizing the irradiated light. The problem of equipment enlargement.

The present invention has been developed in order to solve the above-mentioned problems, and an object of the present invention is to provide an optical system device and a lenticular lens for collimating the irradiated light in a more space-saving manner and for uniformizing the illuminance on the irradiated surface by the irradiated light. .

[Technical means to solve the problem] In order to solve the above-mentioned problems, one aspect of the present invention is an optical system device that collimates irradiated light irradiated from a light source and uniformizes the illuminance on an irradiated surface generated by the irradiated light, the optical system device includes: The lenticular lens is provided in the irradiation direction of the irradiation light, and has a first surface located on the incident side in the irradiation direction and a second surface located on the emission side in the irradiation direction, and the second surface is formed to be incident on the irradiation The curvature radius of light collimation is formed on the first surface to make the illuminance on the irradiation surface uniform by the irradiation light emitted from the second surface; and the aperture is arranged between the light source and the lenticular lens. At the same time, part of the aforementioned irradiated light is allowed to pass therethrough.

Another aspect of the present invention is an optical system device that collimates irradiated light irradiated from a light source and uniformizes the illuminance on an irradiated surface by the irradiated light, the optical system device comprising: a meniscus lens, It is arranged in the irradiation direction of the irradiation light, and has a first surface located on the incident side in the irradiation direction and forming a concave surface, and a second surface located on the exit side in the irradiation direction and forming a convex surface, and the second surface is formed to The radius of curvature of the parallelized incident irradiated light, the first surface is formed with a radius of curvature of the illuminance on the irradiated surface due to the irradiated light emitted from the second surface; at least one irradiating part is used as the light source; Aperture , which is arranged between the irradiating portion and the lenticular lens and allows a part of the irradiated light to pass therethrough; The light distribution angle of the irradiated irradiation light is narrowed.

Another aspect of the present invention is a lenticular lens that parallelizes incident irradiated light and uniformizes the illuminance on an irradiated surface by the irradiated light, the lenticular lens being characterized by having a The first surface on the incident side and the second surface on the emission side in the irradiation direction, the second surface is formed with a radius of curvature that parallelizes the incident irradiation light, and the first surface is formed with the irradiation light to be emitted from the second surface The radius of curvature at which the illuminance on the resulting irradiated surface is homogenized.

[Effect of invention] According to the present invention, the irradiated light can be parallelized and the illuminance on the irradiated surface by the irradiated light can be made uniform in a more space-saving manner.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[1st Embodiment] First, the optical system device of the first embodiment will be described. FIG. 1 is a schematic perspective view showing an optical system device of the present embodiment. 2 is a schematic side view showing the configuration of the optical system device. Moreover, in FIG. 2, the cross section of apertures and a light absorption part is shown, and this cross section is obtained by the plane which passed through the optical axis and is parallel to the optical axis.

As shown in FIGS. 1 and 2, the optical system device 1 of the present embodiment includes an irradiation unit 10, a lenticular lens 20, a diaphragm 30, and a light absorption unit 40, and the irradiation unit 10 is an ultraviolet LED light source that emits ultraviolet light. , the lenticular lens 20 is arranged so that the irradiation light generated by the irradiating part 10 can be incident, the aperture 30 is arranged between the irradiating part 10 and the lenticular lens 20 on the side of the irradiating part 10 , and the light absorbing part 40 is arranged It is on the side of the lenticular lens 20 between the irradiation unit 10 and the lenticular lens 20 . With this optical system device 1 , the irradiation surface perpendicular to the optical axis direction of the lenticular lens 20 can be formed by the irradiation light generated by the irradiation unit 10 .

The diaphragm 30 is a plate-like member having a flat surface perpendicular to the optical axis direction of the lenticular lens 20, and has a hole 31 penetrating the optical axis direction. The hole portion 31 is formed in a circular shape and the center of the circle coincides with the optical axis of the lenticular lens 20 . With such a diaphragm 30 , a part of the irradiation light generated by the irradiation section 10 is emitted from the hole section 31 , and as a result, the size of the light source of the incident light to the lenticular lens 20 is defined.

The light absorbing portion 40 is a member formed in a hollow rectangular cylindrical shape and has a light absorbing surface formed on the inner wall surface, and is formed on the incident side, that is, the irradiating portion 10 and the aperture 30 side, and the output side, that is, the lenticular lens 20 side, respectively. openings, and these openings are formed as the incident-side opening 41 and the emission-side opening 42 . In the incident-side opening portion 41 , the diaphragm 30 is arranged so that only the irradiated light passing through the hole portion 31 is incident into the light absorbing portion 40 . In addition, the irradiation light emitted from the emission-side opening 42 is incident on the lenticular lens 20 . In addition, the reflectance of the inner wall surface of the light absorbing portion 40 , that is, the light absorbing surface is remarkably low, and is desirably 4% or less, whereby, among the irradiated light incident on the light absorbing portion 40 , the inner wall is irradiated. Most of the irradiated light is absorbed by the inner wall surface and is not emitted from the emission-side opening 42 . Furthermore, the light absorbing portion 40 is not limited to a hollow rectangular cylindrical shape, and may be formed as a cylindrical member having openings on the incident side and the emitting side, and is formed only so that it can be parallelized by the lenticular lens 20 . The angularly incident irradiation light can be emitted from the emission-side opening 42 . The length in the optical axis direction of the light absorbing portion 40 , that is, the distance from the incident-side opening 41 to the exit-side opening 42 is a length based on the focal length of the lenticular lens 20 .

The lenticular lens 20 is a lenticular lens having curved surfaces of a first surface 21 facing the incident side of the irradiated light and a second surface 22 facing the emission side, and the shapes of the first surface 21 and the second surface 22 are different. In the present embodiment, either one of the first surface 21 and the second surface 22 is formed as an aspherical surface in order to improve accuracy, but it may be formed as a spherical surface. The first surface 21 mainly has a function of uniformizing the illuminance on the irradiation surface by the irradiation light emitted from the lenticular lens 20 , and the second surface 22 mainly has a function of collimating the irradiation light incident on the lenticular lens 20 .

The radius of curvature r ₂ of the second surface 22 is determined by taking the light angle as θ, the size of the light source (diameter of the hole 31 ) as X, and the focal length of the lenticular lens 20 as f In the case of , the first surface 21 is assumed to be a plane, and f=r ₂ /2 is set, and X=2 is used to form the hole portion 31. According to the formula of X×f×tanθ, that is, r ₂ ×tanθ The formula is determined by specifying the light angle θ. Here, the light angle θ is the angle between the vertical line perpendicular to the irradiation surface and the irradiated light emitted from the lenticular lens 20 . Among them, when θ=0, it is an ideal parallel light, but it is actually set to, for example, 1. ° and so on as close to 0 as possible.

The radius of curvature r ₁ of the first surface 21 is determined by the illuminance on a plane perpendicular to the optical axis of the light emitted from the second surface 22 having the _{radius of curvature r 2} determined in the above-described manner Partial distribution becomes uniform. In other words, the radius of curvature r ₁ of the first surface 21 is determined based on the radius of curvature r _{2 of} the second surface.

Here, the relationship between the radius of curvature of the first surface and the diameter of the lens will be described. FIG. 5 is a diagram showing the relationship between the radius of curvature of the incident side of the first surface and the diameter of the lens. FIG. 6 is a diagram showing the radius of curvature of the incident side corresponding to the lens diameter of the first surface.

As between, on the surface irradiated by the illumination light irradiated from the lenticular lens 20 of the generated emitted homogenized in the first surface 21, radius of curvature r ₁ and the incident side lens diameter d shown in FIG. 5 , _{the formula of r 1} =5.64×d is established, and the specific value is shown in FIG. 6 . In fact, the first surface 21 having the lens diameter d may have a curvature radius r ₁ within a range of ±15% of the first-order coefficient 5.64 in the above formula.

Next, the effects of the optical system device will be described. FIG. 3 is a diagram showing a simulation result of ray tracing. Moreover, FIG. 4 is a figure which shows the non-coherent irradiance with respect to the X-axis coordinate of an irradiation surface. In addition, the X-coordinate value in FIG. 4 is the value of one of the axes of the irradiated surface which is a plane.

As shown in FIG. 3 , from the simulation result of ray tracing of the irradiated light of the optical system device 1 , it can be understood that among the irradiated light emitted from the irradiating part, there is only one that does not face the inner wall of the light absorbing part 40 . The irradiation light is incident on the lenticular lens 20 and parallelized.

In addition, as shown in FIG. 4 , it can be understood that the illuminance of the irradiation surface is uniformized by the first surface 21 of the lenticular lens 20 by the optical system device 1 .

[Second Embodiment] Next, an optical system device according to the second embodiment will be described. FIG. 7 is a schematic side view showing the configuration of the optical system device of the present embodiment. In addition, in FIG. 7, similarly to FIG. 2, the cross section of a diaphragm and a light absorption part is shown, and this cross section is cut|disconnected by the plane which passed the optical axis and was parallel to the optical axis.

As shown in FIG. 7 , the optical system device 1 a of the present embodiment is different from the first embodiment in that it includes two irradiation units 10 a and 10 b instead of the irradiation unit 10 , and further includes a light guide unit 50 .

The two irradiating parts 10 a and 10 are LED light sources that respectively irradiate light of mutually different wavelengths, and similarly to the irradiating part 10 , are arranged such that the irradiated light is incident on the incident side opening of the light absorbing part 40 through the hole part 31 of the diaphragm 30 . Section 41.

The light guide portion 50 is arranged between the irradiation portions 10 a and 10 b and the aperture 30 . The light guide portion 50 is formed in a hollow cylindrical shape, the inner wall surface is formed as a light reflection surface that totally reflects the irradiated light, and the first opening portion 51 is formed on the incident side, that is, on the irradiated portion 10a, 10b side. And a second opening 52 is formed on the exit side, that is, on the side of the diaphragm 30 . With this light guide portion 50 , the lights entering the first opening portion 51 from the irradiation portions 10 a and 10 b are mixed in the light guide portion 50 , and enter the hole portion 31 of the diaphragm 30 from the second opening portion 52 .

Examples of such a light guide portion 50 include a CPC (Compound Parabolic Concentrator) that performs light collection or NA (Numerical Aperture) conversion, or a light that guides and homogenizes light. catheter.

With the optical system device 1a of the present embodiment, it is possible to parallelize the outgoing light in which the lights of different wavelengths are mixed, and to uniformize the illuminance on the irradiation surface. In addition, in this Embodiment, although the optical system apparatus 1a was made to have two irradiation parts 10a and 10b, you may have at least two irradiation parts.

[third embodiment] Next, an optical system device according to the third embodiment will be described. FIG. 8 is a schematic side view showing the configuration of the optical system device of the present embodiment. In addition, in FIG. 8, similarly to FIG. 2, the cross section of a diaphragm and a light absorption part is shown, and this cross section is taken by the plane which passes through the optical axis and is parallel to the optical axis.

As shown in FIG. 8, the optical system device 1b of the present embodiment is different from the second embodiment in that it further includes two light distribution angle conversion units 60a and 60b.

The light distribution angle conversion part 60a is provided to correspond to the irradiation part 10a, and the light distribution angle conversion part 60b is provided to correspond to the irradiation part 10b, and either of the light distribution angle conversion parts 60a, 60b 10b is a plano-convex lens with a narrow light distribution angle, and is provided on the irradiation parts 10a and 10b so that the flat portion faces the incident side and the convex portion faces the emission side. Here, the light distribution angle conversion parts 60a and 60b are respectively provided so that the flat surfaces thereof are in close contact with the light emitting surfaces of the irradiation parts 10a and 10b.

In the optical system device 1b of the present embodiment, the light distribution angle conversion sections 60a and 60b are provided corresponding to the irradiation sections 10a and 10b, respectively, and the light distribution angles of the irradiation sections 10a and 10b are narrowed, thereby raising the irradiation surface. illuminance.

Furthermore, the optical system device 1 b may include a meniscus lens (not shown) having a concave surface on the incident side instead of the lenticular lens 20 . This meniscus lens differs from the lenticular lens 20 in that the first surface facing the incident side is formed as a concave surface. Also, the first surface, like the first surface 21 of the lenticular lens 20 , mainly has a function of uniformizing the illuminance on the irradiated surface by the irradiated light emitted from the meniscus lens. Similarly to the first surface 21 of the lenticular lens 20, the radius of curvature of the first surface is determined so that the illuminance distribution of the light emitted from the second surface on a plane perpendicular to the optical axis becomes uniform. According to the optical system device 1b including such a meniscus lens, the irradiation light whose light distribution angle is narrowed by the light distribution angle conversion portion 60a can be diffused, and the second surface on the emission side can be well-balanced for light distribution.

[4th Embodiment] Next, an optical system device according to the fourth embodiment will be described. FIG. 9 is a schematic side view showing the configuration of the optical system device of the present embodiment. In addition, in FIG. 9, similarly to FIG. 2, the cross section of a diaphragm and a light absorption part is shown, and this cross section is cut|disconnected by the plane which passes the optical axis and is parallel to the optical axis.

As shown in FIG. 9 , the optical system device 1 c of the present embodiment is different from the third embodiment in that it includes a light guide portion 50 a instead of the light guide portion 50 , and further includes a rotation drive portion 70 .

The light guide portion 50a differs from the light guide portion 50 in that the axial direction thereof faces the optical axis direction, is provided to the optical system device 1c rotatably around the rotation axis, and has gears formed on the outer peripheral wall. The axis of rotation of the light guide portion 50a is desirably positioned at a position approximately coincident with the optical axis on a plane parallel to the irradiation direction by the optical system device 1c.

The rotation drive unit 70 is a drive device that drives the light guide unit 50a to rotate around the rotating shaft via a gear formed by the light guide unit 50a, and is configured as an ultrasonic motor or a DC motor, for example.

According to the optical system apparatus 1c of this embodiment, the illuminance of the irradiation surface in a predetermined period can be made uniform by the rotation of the light guide part 50a.

Furthermore, the above-mentioned four embodiments may be combined with other embodiments, respectively. For example, the light guide part 50 in the optical system apparatus 1b of 3rd Embodiment may be comprised instead of the light guide part 50a in the optical system apparatus 1c of 4th Embodiment.

The present invention can be implemented in various other forms without departing from the gist or main features. Therefore, all points of the aforementioned embodiments are merely illustrative and should not be interpreted as limiting. The scope of the present invention is indicated by the scope of the patent application, and the description herein does not have any restriction. In addition, all changes, various improvements, substitutions, and modifications within the scope of equivalents within the scope of the claims are all within the scope of the present invention.

1: Optical system device 1a: Optical system device 1b: Optical system device 1c: Optical system device 10: Irradiation part 10a: Irradiation part 10b: Irradiation part 20: Double convex lens 21: Side 1 22: Side 2 30: Aperture 31: Hole 40: light absorption part 41: Incident side opening 42: Exit side opening 50: Light guide part 50a: Light guide 51: 1st opening 52: Second opening 60a: Light distribution angle conversion section 60b: light distribution angle conversion part

FIG. 1 is a schematic perspective view showing the configuration of an optical system device according to the first embodiment. FIG. 2 is a schematic side view showing the configuration of the optical system device according to the first embodiment. FIG. 3 is a diagram showing a simulation result of ray tracing. FIG. 4 is a diagram showing the incoherent irradiance with respect to the X-axis coordinates of the irradiation surface. FIG. 5 is a diagram showing the relationship between the radius of curvature of the incident side of the first surface and the diameter of the lens. FIG. 6 is a diagram showing the radius of curvature of the incident side corresponding to the lens diameter of the first surface. FIG. 7 is a schematic side view showing the configuration of an optical system device according to the second embodiment. Fig. 8 is a schematic side view showing the configuration of an optical system device according to a third embodiment. FIG. 9 is a schematic side view showing the configuration of an optical system device according to a fourth embodiment.

Domestic storage information (please note in the order of storage institution, date and number) none

Foreign deposit information (please mark in the order of deposit country, institution, date and number) none

10: Irradiation part

20: Double convex lens

30: Aperture

31: Hole

40: light absorption part

41: Incident side opening

42: Exit side opening

Claims (9)

An optical system device for collimating irradiated light irradiated from a light source and for uniformizing the illuminance on an irradiated surface by the irradiated light, the optical system device comprising: a lenticular lens provided for irradiating the irradiated light direction, has a first surface on the incident side in the irradiation direction and a second surface on the emission side in the irradiation direction, the second surface is formed with a radius of curvature that parallelizes the incident irradiation light, and the first surface is forming a radius of curvature for uniformizing the illuminance on the irradiated surface by the irradiated light emitted from the second surface; an aperture, which is arranged between the light source and the lenticular lens and allows a part of the irradiated light to pass; at least two irradiations a light guide part, which serves as the light source; and a light guide part, which is arranged between the at least two irradiation parts and the aperture, the light guide part has a first opening and a second opening, and the first opening allows the at least two The irradiation light irradiated by the two irradiation parts is incident, the second opening allows the irradiation light incident from the first side opening to be emitted, and the light guide part penetrates from the first opening to the second opening, and is formed in a cylindrical shape. The inner wall surface totally reflects light. The optical system device according to claim 1, wherein the aperture allows a part of the irradiated light to pass through the hole, and the radius of curvature of the second surface of the lenticular lens is based on the assumption that the first surface is a plane The focal distance in this case is determined by the size of the hole. The optical system device according to claim 1, further comprising a light absorbing portion disposed between the diaphragm and the lenticular lens, the light absorbing portion having an entrance-side opening and an exit-side opening, the incident-side opening and the exit-side opening. The side opening allows the irradiated light passing through the aperture to be incident, the exit side opening allows the irradiated light incident from the incident side opening to exit, and the light absorbing portion penetrates from the incident side opening to the exit side opening and is formed into a cylindrical shape and is contained therein The wall surface absorbs light. The optical system device according to any one of claims 1 to 3, further comprising: a light distribution angle conversion unit that is disposed between the irradiation unit and the aperture and converts light emitted from the irradiation unit The light distribution angle of the irradiated light is narrowed. The optical system device according to claim 1, wherein the at least two irradiation units emit irradiation light having wavelengths different from each other. The optical system device according to claim 1 or 5, further comprising at least two light distribution angle conversion parts, the at least two light distribution angle conversion parts are respectively provided with respect to the at least two irradiation parts, and are arranged in The light distribution angle of the irradiation light irradiated by the at least two irradiation parts is narrowed between the at least two irradiation parts and the light guide part, respectively. The optical system device according to claim 1 or 5, wherein the light guide portion is disposed so as to face the optical axis of the optical system device and is rotatable around the rotation axis, and the optical system device further includes a guide for the optical system. The rotary drive part for the rotary drive of the light part. An optical system device for collimating irradiated light irradiated from a light source and for uniformizing the illuminance on an irradiated surface by the irradiated light, the optical system device comprising: a meniscus lens provided for irradiating the irradiated light In the direction, there are a first surface located on the incident side in the irradiation direction and forming a concave surface, and a second surface located on the emission side in the irradiation direction and forming a convex surface, and the second surface is formed with a radius of curvature that parallelizes the incident irradiation light The first surface is formed with a radius of curvature for uniformizing the illuminance on the irradiation surface by the irradiation light emitted from the second surface; at least one irradiation part is formed as the light source; and a diaphragm is arranged between the irradiation part and the between the meniscus lenses and allowing a part of the irradiated light to pass therethrough; a light distribution angle conversion unit that is arranged between the irradiated part and the diaphragm and narrows the light distribution angle of the irradiated light from the irradiated part and, a light guide portion, which is disposed between the aforementioned irradiation portion and the aforementioned aperture, the light guide portion has a first opening and a second opening, the first opening allows the irradiation light emitted by the aforementioned irradiation portion to enter, the The second opening emits the irradiated light incident from the first side opening, and the light guide portion penetrates from the first opening to the second opening, is formed in a cylindrical shape, and totally reflects the light on the inner wall surface. A lenticular lens that parallelizes incident illumination light and converts The illuminance on the irradiated surface by the irradiated light is uniform, and the lenticular lens is characterized by having a first surface located on the incident side in the irradiation direction and a second surface located on the exit side in the irradiation direction, the second surface A radius of curvature for parallelizing incident irradiation light is formed, and a radius of curvature for uniformizing the illuminance on the irradiation surface by the irradiation light emitted from the second surface is formed on the first surface.

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