TWI749802B - Conveying device - Google Patents
Conveying device Download PDFInfo
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- TWI749802B TWI749802B TW109135044A TW109135044A TWI749802B TW I749802 B TWI749802 B TW I749802B TW 109135044 A TW109135044 A TW 109135044A TW 109135044 A TW109135044 A TW 109135044A TW I749802 B TWI749802 B TW I749802B
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Abstract
Description
本發明涉及一種輸送裝置,特別是用於運送半導體晶圓的輸送裝置。The invention relates to a conveying device, in particular to a conveying device for conveying semiconductor wafers.
半導體製程所使用的機台,其機械手臂極為精密,而且對於運輸晶圓時的穩定度要求極高。若在傳輸過程中機械手臂稍微偏離或是作動不順 (例如是振動),則會造成晶圓刮傷甚至破片,進而導致企業蒙受巨大的經濟損失。The machine used in the semiconductor manufacturing process has extremely precise robotic arms and extremely high requirements for stability when transporting wafers. If the robot arm deviates slightly or does not move smoothly (for example, vibration) during the transmission process, the wafer will be scratched or even broken, which will cause the company to suffer huge economic losses.
此外,廠商也相當要求機台的運輸效率,若機械手臂運輸晶圓的速度慢,生產產品的效率會大打折扣,進而延宕產品的交付時程,因此影響客戶的訂單而降低企業的競爭力。In addition, manufacturers also require the transportation efficiency of the machine. If the robot arm transports wafers at a slow speed, the efficiency of the production product will be greatly reduced, which will delay the delivery time of the product, thus affecting customer orders and reducing the competitiveness of the company.
因此,如何提出一種可解決上述問題的輸送裝置,是目前業界亟欲投入研發資源解決的問題之一。Therefore, how to propose a conveying device that can solve the above-mentioned problems is one of the problems that the industry urgently wants to invest in research and development resources to solve.
有鑑於此,本發明之一目的在於提出一種可有解決上述問題的輸送裝置,其包括夾持臂以及平衡感測器。平衡感測器設置於夾持臂上。平衡感測器包括本體、導電線路以及滑動導體。本體具有容置槽。導電線路設置於容置槽的側壁上。滑動導體位於容置槽內,其中滑動導體設置以接觸或分離於導電線路使導電線路產生閉路或開路,且平衡感測器根據導電線路的開路或閉路判別夾持臂處於平衡狀態或傾斜狀態。In view of this, one purpose of the present invention is to provide a conveying device that can solve the above-mentioned problems, which includes a clamping arm and a balance sensor. The balance sensor is arranged on the clamping arm. The balance sensor includes a body, a conductive circuit, and a sliding conductor. The body has a containing groove. The conductive circuit is arranged on the side wall of the containing groove. The sliding conductor is located in the accommodating slot, and the sliding conductor is arranged to contact or be separated from the conductive circuit to make the conductive circuit closed or open, and the balance sensor judges that the clamping arm is in a balanced state or an inclined state according to the open circuit or closed circuit of the conductive circuit.
在本發明的一個或多個實施方式中,輸送裝置更包括座體,其中座體連接夾持臂,且座體用以沿著水平方向移動。In one or more embodiments of the present invention, the conveying device further includes a seat body, wherein the seat body is connected to the clamping arm, and the seat body is used to move along the horizontal direction.
在本發明的一個或多個實施方式中,輸送裝置更包括座體,其中夾持臂可移動地連接座體並用以沿著鉛直方向相對於座體移動。In one or more embodiments of the present invention, the conveying device further includes a seat body, wherein the clamping arm is movably connected to the seat body and used to move relative to the seat body in a vertical direction.
在本發明的一個或多個實施方式中,輸送裝置更包括升降體,其中升降體位於座體上並連接夾持臂,且升降體用以帶動夾持臂移動。In one or more embodiments of the present invention, the conveying device further includes a lifting body, wherein the lifting body is located on the base and connected to the clamping arm, and the lifting body is used to drive the clamping arm to move.
在本發明的一個或多個實施方式中,導電線路包括電性分離的二線圈結構。In one or more embodiments of the present invention, the conductive circuit includes an electrically separated two-coil structure.
在本發明的一個或多個實施方式中,其中側壁為環狀,二線圈結構相互平行且環設於容置槽的側壁。In one or more embodiments of the present invention, the side wall is ring-shaped, and the two coil structures are parallel to each other and are ring-shaped on the side wall of the accommodating groove.
在本發明的一個或多個實施方式中,滑動導體為液態金屬。In one or more embodiments of the present invention, the sliding conductor is liquid metal.
在本發明的一個或多個實施方式中,平衡感測器更包括透明頂蓋,且透明頂蓋覆蓋容置槽。In one or more embodiments of the present invention, the balance sensor further includes a transparent top cover, and the transparent top cover covers the accommodating groove.
在本發明的一個或多個實施方式中,輸送裝置更包括控制器,其中控制器電性連接夾持臂及平衡感測器,控制器根據導電線路所產生的閉路以控制夾持臂停止。In one or more embodiments of the present invention, the conveying device further includes a controller, wherein the controller is electrically connected to the clamping arm and the balance sensor, and the controller controls the clamping arm to stop according to the closed circuit generated by the conductive circuit.
在本發明的一個或多個實施方式中,輸送裝置更包括控制器及警示器,其中控制器電性連接平衡感測器及警示器,控制器根據導電線路所產生的閉路以控制警示器發出警報。In one or more embodiments of the present invention, the conveying device further includes a controller and a warning device, wherein the controller is electrically connected to the balance sensor and the warning device, and the controller controls the warning device to emit according to the closed circuit generated by the conductive circuit alarm.
綜上所述,本發明的輸送裝置具有夾持臂及平衡感測器,且平衡感測器是利用容置槽中滑動導體的位置來影響導電線路的開路與斷路,導電線路的開路與斷路代表夾持臂處於傾斜狀態或平衡狀態,因此可以有效且準確地即時反應夾持臂的狀況。除此之外,利用上述的平衡感測器可以進一步控制夾持臂,當平衡感測器偵測到夾持臂處於傾斜狀態時,可以立即停止夾持臂,進而避免夾持臂傾斜而以錯誤的角度接觸待輸送物體。In summary, the conveying device of the present invention has a clamping arm and a balance sensor, and the balance sensor uses the position of the sliding conductor in the accommodating groove to affect the opening and breaking of the conductive circuit, and the opening and breaking of the conductive circuit It means that the gripping arm is in a tilted or balanced state, so it can effectively and accurately reflect the status of the gripping arm in real time. In addition, the above-mentioned balance sensor can be used to further control the clamping arm. When the balance sensor detects that the clamping arm is in a tilted state, it can immediately stop the clamping arm to prevent the clamping arm from tilting. Wrong angle contact with the object to be conveyed.
以上所述僅係用以闡述本發明所欲解決的問題、解決問題的技術手段、及其產生的功效等等,本發明之具體細節將在下文的實施方式及相關圖式中詳細介紹。The above description is only used to illustrate the problems to be solved by the present invention, the technical means to solve the problems, and the effects produced by them, etc. The specific details of the present invention will be described in detail in the following embodiments and related drawings.
以下將以圖式揭露本發明之複數個實施方式,為明確說明起見,許多實務上的細節將在以下敘述中一併說明。然而,應瞭解到,這些實務上的細節不應用以限制本發明。也就是說,在本發明部分實施方式中,這些實務上的細節是非必要的。此外,為簡化圖式起見,一些習知慣用的結構與元件在圖式中將以簡單示意的方式繪示之。Hereinafter, a plurality of embodiments of the present invention will be disclosed in drawings. For clear description, many practical details will be described in the following description. However, it should be understood that these practical details should not be used to limit the present invention. That is to say, in some embodiments of the present invention, these practical details are unnecessary. In addition, in order to simplify the drawings, some conventionally used structures and elements are shown in the drawings in a simple and schematic manner.
請參考第1A圖及第1B圖。第1A圖根據本發明一些實施方式繪示運送裝置100a的側面示意圖。第1B圖繪示第1A圖中運送裝置100a的傾斜狀態示意圖。在本發明的一些實施方式中,輸送裝置100a包括座體110、夾持臂130以及平衡感測器150。夾持臂130設置於座體110上,而平衡感測器150設置於夾持臂130上。具體而言,座體110可例如是至少沿著水平方向移動的機械移動座或機械轉動座,而夾持臂130可例如是運送晶圓用的夾取臂。此外,平衡感測器150用於感測夾持臂130處於平衡狀態或傾斜狀態。在實際應用中,當夾持臂130處於平衡狀態時,夾持臂130能水平地抬起晶圓;當夾持臂130處於傾斜狀態時,夾持臂130難以精準的水平抬起晶圓,而可能導致晶圓滑落、刮傷或破片。Please refer to Figure 1A and Figure 1B. FIG. 1A shows a schematic side view of the
請參考第2A圖、第2B圖、第3A圖及第3B圖。第2A圖繪示為第1A圖中運輸裝置100a的平衡感測器150的上視示意圖。第2B圖繪示為第2A圖中平衡感測器150的上視示意圖。第3A圖繪示為第2A圖中平衡感測器150沿著剖面線A-A繪製的剖面圖。第3B圖繪示為第2B圖中平衡感測器150沿著剖面線B-B繪製的剖面圖。在本發明的一些實施方式中,平衡感測器150的本體C包括容置槽151、導電線路153以及滑動導體155。導電線路153設置於容置槽151的環狀的側壁151a上,且側壁151a垂直於容置槽151的底面151b。滑動導體155是可滑動於容置槽151內的導體,滑動導體155可以是液態金屬(例如是液態的汞),但本發明並不以此為限,本發明所屬技術領域中具有通常知識者能以其他適合的導電物質替換之。當滑動導體155接觸導電線路153時,導電線路153產生閉路,而當滑動導體155分離於導電線路153時,導電線路153產生開路。平衡感測器150則是根據導電線路153所產生的開路或閉路來判別夾持臂130是處於平衡狀態或傾斜狀態。
Please refer to Figure 2A, Figure 2B, Figure 3A and Figure 3B. FIG. 2A is a schematic top view of the
具體來說,導電線路153可包括電性分離的二線圈結構153a,其中二線圈結構153a相互平行且環設於容置槽151的環形側壁151a上,且導電線路153的二線圈結構153a可例如是由金、銀、銅、鐵、鋁或其合金的導電材料所製成,本發明並不以此為限。在第3A圖中,夾持臂130處於平衡狀態,而滑動導體155與容置槽151的側壁151a彼此分離,此時導電線路153也與滑動導體155彼此分離而產生開路。在第3B圖中,夾持臂130處於傾斜狀態(可能是因為受到撞擊或震動),滑動導體155會受地心引力影響而移動至側壁151a並同時接觸二線圈結構153a,此時二線圈結構153a經由滑動導體155電性導通,因此導電線路153產生閉路。然而,應理解,此僅為示例性實施例且本平衡感測器150可搭配任何適用之導電線路153而無任何限制。為了本揭露簡潔起見,並未包括每個實例,但本申請案涵蓋任何此類實施例。
Specifically, the
在本發明的一些實施方式中,平衡感測器150更包括透明頂蓋157,且透明頂蓋157位於容置槽151上方並覆蓋容置槽151。具體來說,透明頂蓋157與容置槽151的側壁151a及平坦的底面151b共同形成封閉的容置空間以容納滑動導體155。事實上,透明頂蓋157便於使用者目視滑動導體155的位置,藉此使用者可以即時目視得知夾持臂130的傾斜方向。此外,透明頂蓋157是由硬質的透明材料所製成,例如為玻璃或是例如為聚氯乙烯(Poly vinyl chloride, PVC)的透明塑料,但本發明並不以此為限。In some embodiments of the present invention, the
請參考第4圖,第4圖根據本發明一些實施方式繪示運送裝置100a的功能方塊圖。在本發明的一些實施方式中,平衡感測器150更包括控制器158,其中控制器158電性連接座體110、夾持臂130及導電線路153,控制器158根據導電線路153所產生的閉路來控制座體110及夾持臂130停止。此外,當導電線路153產生的開路時,控制器158控制座體110及夾持臂130維持運行。在本發明的一些實施方式中,平衡感測器150更可以包括警示器159,其中控制器158更電性連接警示器159,控制器158根據導電線路153所產生的閉路控制警示器159發出警報,以提醒使用者夾持臂130目前處於傾斜狀態。由於平衡感測器150的控制器158可以即時根據導電線路153判斷夾持臂130處於平衡狀態或傾斜狀態,當控制器158判斷夾持臂130處於傾斜狀態時,控制器158控制座體110和夾持臂130停止運行,因此可以避免夾持臂130在傾斜狀態下夾持晶圓,進而避免晶圓刮損或破面的情形發生。具體而言,控制器158可以為處理器、微處理器或其他具有運算功能的運算裝置。警示器159則可以包括顯示器、燈源或擴音器以便於以圖形、文字、燈光或聲音向使用者發出提醒。Please refer to FIG. 4, which illustrates a functional block diagram of the
在本發明的一些實施方式中,當座體110在水平移動時,控制器158關閉控制座體110和夾持臂130停止的功能。也就是說,控制器158控制座體110和夾持臂130停止的功能僅在座體110不移動時開啟。控制器158僅根據夾持臂130的夾取動作或相對於座體110的鉛直移動是處於平衡狀態或傾斜狀態來控制夾持臂130維持運作或停止,進而排除座體110移動時影響滑動導體155並誤觸控制器158的停止功能。In some embodiments of the present invention, when the
請參考第1C圖及第1D圖。第1C圖及第1D圖根據本發明一些實施方式繪示運送裝置100c的側面示意圖。在本發明的一些實施方式中,輸送裝置100c包括座體110、升降體120、夾持臂130以及平衡感測器150。升降體120位於座體110上並連接夾持臂130,且升降體120可經由馬達致動進而帶動夾持臂130升降。在第1C圖及第1D圖中,升降體120將夾持臂130升降至不同的高度。具體而言,由於平衡感測器150設置在夾持臂130上,因此在升降體120帶動夾持臂130 升降的過程中,平衡感測器150會同時判別夾持臂130處於平衡狀態或傾斜狀態。在本發明的一些實施方式中,升降體120包括電動滑軌及滑塊,電動滑軌沿著鉛直方向延伸,滑塊可移動地連接於電動滑軌,而滑塊用於固定夾持臂130並相對於電動滑軌移動,藉此升降體120可帶動夾持臂130沿著鉛直方向相對於座體110移動,但本發明並不以此為限。Please refer to Figure 1C and Figure 1D. 1C and 1D show schematic side views of the conveying
綜上所述,本發明的輸送裝置具有夾持臂及平衡感測器,且平衡感測器是利用容置槽中滑動導體的位置來影響導電線路的開路與斷路,導電線路的開路與斷路代表夾持臂處於傾斜狀態或平衡狀態,因此可以有效且準確地即時反應夾持臂的狀況。除此之外,利用上述的平衡感測器可以進一步控制夾持臂,當平衡感測器偵測到夾持臂處於傾斜狀態時,可以立即停止夾持臂,進而避免夾持臂傾斜而以錯誤的角度接觸待輸送物體。In summary, the conveying device of the present invention has a clamping arm and a balance sensor, and the balance sensor uses the position of the sliding conductor in the accommodating groove to affect the opening and breaking of the conductive circuit, and the opening and breaking of the conductive circuit It means that the gripping arm is in a tilted or balanced state, so it can effectively and accurately reflect the status of the gripping arm in real time. In addition, the above-mentioned balance sensor can be used to further control the clamping arm. When the balance sensor detects that the clamping arm is in a tilted state, it can immediately stop the clamping arm to prevent the clamping arm from tilting. Wrong angle contact with the object to be conveyed.
本發明不同實施方式已描述如上,應可理解的是不同實施方式僅作為實例來呈現,而不作為限定。在不脫離本發明的精神和範圍下,可根據本文的揭露對本揭露的實施方式做許多更動。因此,本發明的廣度和範圍不應受上述描述的實施例所限制。The different embodiments of the present invention have been described above, and it should be understood that the different embodiments are presented only as examples and not as limitations. Without departing from the spirit and scope of the present invention, many changes can be made to the implementation of the present disclosure based on the disclosure herein. Therefore, the breadth and scope of the present invention should not be limited by the above-described embodiments.
100a, 100b, 100c:運送裝置
110:座體
120:升降體
130:夾持臂
150:平衡感測器
151:容置槽
151a:側壁
151b:底面
153:導電線路
153a:線圈結構
155:滑動導體
157:透明頂蓋
158:控制器
159:警示器
C:本體
100a, 100b, 100c: transport device
110: seat body
120: Lifting body
130: Clamping arm
150: balance sensor
151:
為達成上述的優點和特徵,將參考實施方式對上述簡要描述的原理進行更具體的闡釋,而具體實施方式被展現在附圖中。這些附圖僅例示性地描述本發明,因此不限制發明的範圍。通過附圖,將清楚解釋本發明的原理,且附加的特徵和細節將被完整描述,其中: 第1A圖根據本發明一個或多個實施方式繪示運送裝置的側面示意圖; 第1B圖繪示第1A圖中運送裝置的夾持臂處於傾斜狀態的側面示意圖; 第1C圖及第1D圖根據本發明一些實施方式繪示運送裝置的側面示意圖; 第2A圖繪示為第1A圖中運輸裝置的平衡感測器的上視示意圖; 第2B圖繪示為第2A圖中平衡感測器的上視示意圖; 第3A圖繪示為第2A圖中平衡感測器沿著剖面線A-A繪製的剖面圖; 第3B圖繪示為第2B圖中平衡感測器沿著剖面線B-B繪製的剖面圖;以及 第4圖根據本發明一個或多個實施方式繪示運送裝置的功能方塊圖。 In order to achieve the above advantages and features, the principles briefly described above will be explained in more detail with reference to the embodiments, and the specific embodiments are shown in the accompanying drawings. These drawings only exemplarily describe the invention, and therefore do not limit the scope of the invention. The principle of the present invention will be clearly explained through the accompanying drawings, and additional features and details will be fully described, among which: Fig. 1A shows a schematic side view of a conveying device according to one or more embodiments of the present invention; Figure 1B is a schematic side view of the clamping arm of the conveying device in Figure 1A in an inclined state; FIG. 1C and FIG. 1D show schematic side views of the conveying device according to some embodiments of the present invention; Figure 2A is a schematic top view of the balance sensor of the transport device in Figure 1A; Figure 2B is a schematic top view of the balance sensor in Figure 2A; Figure 3A is a cross-sectional view of the balance sensor in Figure 2A drawn along the section line A-A; Figure 3B is a cross-sectional view of the balance sensor in Figure 2B drawn along the section line B-B; and Fig. 4 shows a functional block diagram of the conveying device according to one or more embodiments of the present invention.
國內寄存資訊(請依寄存機構、日期、號碼順序註記) 無 國外寄存資訊(請依寄存國家、機構、日期、號碼順序註記) 無 Domestic deposit information (please note in the order of deposit institution, date and number) none Foreign hosting information (please note in the order of hosting country, institution, date, and number) none
100a:運送裝置 100a: transport device
110:座體 110: seat body
130:夾持臂 130: Clamping arm
150:平衡感測器 150: balance sensor
Claims (10)
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TW109135044A TWI749802B (en) | 2020-10-08 | 2020-10-08 | Conveying device |
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US20120320361A1 (en) * | 2004-12-22 | 2012-12-20 | Tetsuya Ishikawa | Cluster tool architecture for processing a substrate |
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GB693824A (en) * | 1949-09-28 | 1953-07-08 | Norman Lynn | Improvements in and relating to spirit-levels |
JP4805934B2 (en) * | 2005-08-17 | 2011-11-02 | 株式会社ジーデバイス | Small tilt / vibration sensor and its manufacturing method |
KR100948300B1 (en) * | 2007-12-27 | 2010-03-17 | 주식회사 동부하이텍 | An apparatus for transmitting a wafer cassette and a method of transmitting the wafer cassette |
CN102032901A (en) * | 2009-09-30 | 2011-04-27 | 亿光电子工业股份有限公司 | Tilt sensor |
CN202494446U (en) * | 2012-01-05 | 2012-10-17 | 浙江金中机电科技有限公司 | Horizontal dynamic automatic monitor |
CN103968806B (en) * | 2013-02-01 | 2016-06-29 | 中国科学院理化技术研究所 | Liquid metal droplet electronic level gauge |
CN206536457U (en) * | 2017-03-14 | 2017-10-03 | 合肥鑫晟光电科技有限公司 | A kind of baseplate transportation robot |
US11101163B2 (en) * | 2018-01-30 | 2021-08-24 | Taiwan Semiconductor Manufacturing Co., Ltd. | Systems and methods for automated robotic arm sensing |
CN208478308U (en) * | 2018-08-16 | 2019-02-05 | 德淮半导体有限公司 | Wafer grabbing device and semiconductor processing equipment |
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US20120320361A1 (en) * | 2004-12-22 | 2012-12-20 | Tetsuya Ishikawa | Cluster tool architecture for processing a substrate |
US20070269302A1 (en) * | 2006-05-22 | 2007-11-22 | Naontech Co., Ltd. | Semiconductor material handling system |
US20180065816A1 (en) * | 2015-03-30 | 2018-03-08 | Nikon Corporation | Object carrier device, exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, object carrying method, and exposure method |
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