TWI741341B - Organic waste gas concentrated heat storage combustion backflow system and method - Google Patents
Organic waste gas concentrated heat storage combustion backflow system and method Download PDFInfo
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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Abstract
本發明為一種有機廢氣濃縮蓄熱燃燒回流系統及其方法,主要係將蓄熱氣經由不同路徑來進行回收或排放,另該蓄熱燃燒爐的排氣經由該回收熱交換器來進行熱交換,並於進行熱交換後再輸送到該廢氣進氣管路,使燃燒後的氣體進入該吸附轉輪之吸附區循環利用,而不經過該煙囪來進行排放,讓該煙囪的排放量降低,並使有機廢氣的處理效率提升,同時,蓄熱燃燒爐之加熱室的蓄熱氣提供給該加熱器來使用。 The present invention is an organic waste gas concentrated heat storage combustion recirculation system and method. It mainly recovers or discharges heat storage gas through different paths. In addition, the exhaust gas of the heat storage combustion furnace undergoes heat exchange through the recovery heat exchanger, and After the heat exchange is carried out, it is transported to the exhaust gas intake pipe, so that the burned gas enters the adsorption zone of the adsorption runner for recycling, instead of passing through the chimney for discharge, so that the emission of the chimney is reduced, and the organic The efficiency of waste gas treatment is improved, and at the same time, the heat storage gas in the heating chamber of the regenerative combustion furnace is supplied to the heater for use.
Description
本發明係有關於一種有機廢氣濃縮蓄熱燃燒回流系統及其方法,尤指一種用來將蓄熱氣經由不同路徑來進行回收或排放,使有機廢氣的處理效率提升,同時,蓄熱燃燒爐之加熱室的蓄熱氣提供給該加熱器來使用,而適用於半導體產業、光電產業或化學相關產業的有機廢氣處理系統或類似設備。 The present invention relates to a system and method for condensing and regenerative combustion and recirculation of organic waste gas, in particular to a method for recycling or discharging the heat storage gas through different paths, so as to improve the treatment efficiency of organic waste gas. At the same time, the heating chamber of the regenerative combustion furnace The heat storage gas is provided to the heater for use, and it is suitable for organic waste gas treatment systems or similar equipment in the semiconductor industry, photoelectric industry or chemical-related industries.
按,目前在半導體產業或光電產業的製造生產過程中都會產生具有揮發性有機氣體(VOC),因此,在各廠區都會安裝處理揮發性有機氣體(VOC)的處理設備,以避免揮發性有機氣體(VOC)直接排入空氣中而造成空氣污染。而目前經由該處理設備所脫附的濃縮氣體大都是輸送到該焚燒爐來進行燃燒,再將燃燒後的氣體來輸送到煙囪來進行排放。 According to the current manufacturing process in the semiconductor industry or the optoelectronic industry, volatile organic gases (VOC) are generated. Therefore, processing equipment for processing volatile organic gases (VOC) will be installed in each plant to avoid volatile organic gases. (VOC) is directly discharged into the air to cause air pollution. At present, most of the concentrated gas desorbed by the processing equipment is transported to the incinerator for combustion, and then the combusted gas is transported to the chimney for discharge.
但是近年來,不管是中央政府或是各地方政府都對空氣汙染非常重視,也因此在煙囪的排放標準上訂定了有關懸浮微粒(PM10)及細懸浮微粒(PM2.5)空氣品質標準,並依據其國內健康影響研究結果,以健康影響為優先考量,將「細懸浮微粒(PM2.5)」24小時值訂為35μg/m3、年平均值訂為15μg/m3。且環保署初步訂於民國109(2020)年達成全國細懸浮微粒濃度年平均值15μg/m3的目標,同時將依國際管制趨勢發展,逐期檢討其細懸浮微粒(PM2.5)空氣品質標準,並朝達成WHO提出之空氣品質準則 值(24小時值訂為25μg/m3、年平均值訂為10μg/m3)為空氣品質改善目標。 However, in recent years, both the central government and local governments have attached great importance to air pollution. Therefore, air quality standards for suspended particulates (PM 10 ) and fine suspended particulates (PM 2.5) have been set in the emission standards of chimneys. And based on the results of its domestic health impact research, with health impact as the priority consideration, the 24-hour value of "fine suspended particulates (PM 2.5 )" is set at 35μg/m 3 , and the annual average value is set at 15μg/m 3 . In addition, the Environmental Protection Agency preliminarily plans to achieve the national annual average concentration of fine suspended particulates of 15μg/m 3 in the Republic of China 109 (2020). At the same time, it will review its fine suspended particulates (PM 2.5 ) air quality standards in accordance with the development of international control trends. , And to achieve the air quality guidelines proposed by the WHO (the 24-hour value is set at 25μg/m 3 , and the annual average is set at 10μg/m 3 ) as the air quality improvement target.
因此,本發明人有鑑於上述缺失,期能提出一種具有提升有機廢氣處理效率的有機廢氣濃縮蓄熱燃燒回流系統及其方法,令使用者可輕易操作組裝,乃潛心研思、設計組製,以提供使用者便利性,為本發明人所欲研發之發明動機者。 Therefore, in view of the above-mentioned shortcomings, the inventors hope to propose a system and method for concentrating and regenerative combustion and recirculation of organic waste gas, which can improve the efficiency of organic waste gas treatment, so that users can easily operate and assemble. It provides user convenience and is the motive of the invention that the inventor intends to develop.
本發明之主要目的,在於提供一種有機廢氣濃縮蓄熱燃燒回流系統及其方法,主要係將蓄熱氣經由不同路徑來進行回收或排放,另該蓄熱燃燒爐的排氣經由該回收熱交換器來進行熱交換,並於進行熱交換後再輸送到該廢氣進氣管路,使燃燒後的氣體進入該吸附轉輪之吸附區循環利用,而不經過該煙囪來進行排放,讓該煙囪的排放量降低,並使有機廢氣的處理效率提升,同時,蓄熱燃燒爐之加熱室的蓄熱氣提供給該加熱器來使用,進而增加整體之實用性。 The main purpose of the present invention is to provide an organic waste gas concentrated heat storage combustion recirculation system and method thereof, which mainly recover or discharge the heat storage gas through different paths, and the exhaust gas of the heat storage combustion furnace is carried out through the recovery heat exchanger. After the heat exchange, the exhaust gas is transported to the exhaust gas inlet pipe, so that the combusted gas enters the adsorption zone of the adsorption runner for recycling, instead of passing through the chimney for discharge, so that the chimney's emissions Reduce and improve the efficiency of organic waste gas treatment. At the same time, the regenerative gas in the heating chamber of the regenerative combustion furnace is provided to the heater for use, thereby increasing the overall practicability.
本發明之另一目的,在於提供一種有機廢氣濃縮蓄熱燃燒回流系統及其方法,透過該加熱器係可以連接一熱氣輸出管路,且該熱氣輸出管路的另一端係與該回流熱氣回收管路連接,讓經由該熱氣輸出管路所輸送的熱氣傳輸到該回流熱氣回收管路內,再輸送到回流熱交換器內,另外,該加熱器也可以連接一熱氣排放管路,且該熱氣排放管路的另一端係連接至一煙囪,使經由該熱氣排放管路所輸送的熱氣傳輸到該煙囪來進行排放,進而增加整體之利用性。 Another object of the present invention is to provide an organic waste gas concentrated heat storage combustion recirculation system and method thereof. A hot gas output pipeline can be connected through the heater, and the other end of the hot gas output pipeline is connected to the return hot gas recovery pipe The hot gas is connected to the hot gas output pipeline to transfer the hot gas to the return hot gas recovery pipeline, and then to the return heat exchanger. In addition, the heater can also be connected to a hot gas discharge pipeline, and the hot gas The other end of the discharge pipeline is connected to a chimney, so that the hot gas conveyed through the hot gas discharge pipeline is transferred to the chimney for discharge, thereby increasing the overall utilization.
本發明之再一目的,在於提供一種有機廢氣濃縮蓄熱燃燒回流系統及其方法,其中當該蓄熱燃燒爐係設為三塔式蓄熱燃燒爐或是旋轉 式蓄熱燃燒爐時,係設有至少一掃氣(purge)管路,該掃氣(purge)管路的另一端係供新鮮空氣進入,或是與該加熱器所連接的熱氣回收管路之另一端連接,使經由該熱氣回收管路所輸送的熱氣傳輸到該掃氣(purge)管路內,再經由該掃氣(purge)管路來回到該三塔式蓄熱燃燒爐或是旋轉式蓄熱燃燒爐內進行燃燒,進而增加整體之操作性。 Another object of the present invention is to provide an organic waste gas concentration regenerative combustion recirculation system and method thereof, wherein when the regenerative combustion furnace is set as a three-tower regenerative combustion furnace or a rotary In the case of a regenerative combustion furnace, at least one purge pipeline is provided, and the other end of the purge pipeline is for fresh air to enter, or another heat recovery pipeline connected to the heater One end is connected, so that the hot gas delivered through the hot gas recovery pipeline is transferred to the purge pipeline, and then back to the three-tower regenerative combustion furnace or rotary heat storage via the purge pipeline Combustion is carried out in the combustion furnace, thereby increasing the overall operability.
為了能夠更進一步瞭解本發明之特徵、特點和技術內容,請參閱以下有關本發明之詳細說明與附圖,惟所附圖式僅提供參考與說明用,非用以限制本發明。 In order to further understand the features, characteristics and technical content of the present invention, please refer to the following detailed description and accompanying drawings of the present invention. However, the accompanying drawings are only for reference and description, and are not intended to limit the present invention.
A‧‧‧一側 A‧‧‧ side
B‧‧‧另一側 B‧‧‧The other side
10‧‧‧蓄熱燃燒爐 10‧‧‧Regenerative combustion furnace
101‧‧‧蓄熱床 101‧‧‧Heat storage bed
11‧‧‧加熱室 11‧‧‧Heating room
111‧‧‧熱氣出口 111‧‧‧Hot gas outlet
12‧‧‧進氣管路 12‧‧‧Air intake pipe
13‧‧‧出氣管路 13‧‧‧Exhaust pipe
14‧‧‧掃氣(Purge)管路 14‧‧‧Purge pipeline
20‧‧‧吸附轉輪 20‧‧‧Adsorption wheel
201‧‧‧吸附區 201‧‧‧Adsorption zone
202‧‧‧冷卻區 202‧‧‧Cooling Zone
203‧‧‧脫附區 203‧‧‧Desorption area
21‧‧‧廢氣進氣管路 21‧‧‧Exhaust gas intake pipe
22‧‧‧淨氣排放管路 22‧‧‧Clean air discharge pipeline
221‧‧‧風車 221‧‧‧Windmill
222‧‧‧淨氣旁通管路 222‧‧‧Clean gas bypass line
2221‧‧‧淨氣旁通控制閥門 2221‧‧‧Clean air bypass control valve
23‧‧‧冷卻氣進氣管路 23‧‧‧Cooling gas intake pipe
231‧‧‧氣體旁通管路 231‧‧‧Gas bypass line
24‧‧‧冷卻氣輸送管路 24‧‧‧Cooling gas delivery pipeline
241‧‧‧冷卻氣控制閥門 241‧‧‧Cooling gas control valve
25‧‧‧熱氣輸送管路 25‧‧‧Hot gas delivery pipeline
251‧‧‧熱氣控制閥門 251‧‧‧Hot gas control valve
26‧‧‧脫附濃縮廢氣管路 26‧‧‧Desorption concentrated waste gas pipeline
261‧‧‧風車 261‧‧‧Windmill
27‧‧‧連通管路 27‧‧‧Connecting pipeline
271‧‧‧連通控制閥門 271‧‧‧Connecting control valve
30‧‧‧加熱器 30‧‧‧Heater
31‧‧‧蓄熱氣體回收管路 31‧‧‧Heat storage gas recovery pipeline
321‧‧‧熱氣輸出管路 321‧‧‧Hot gas output pipeline
322‧‧‧熱氣排放管路 322‧‧‧Hot gas exhaust pipe
323‧‧‧熱氣輸送管路 323‧‧‧Hot gas delivery pipeline
40‧‧‧回流熱交換器 40‧‧‧Reflux heat exchanger
401‧‧‧回流冷側管路 401‧‧‧Return cold side pipeline
402‧‧‧回流熱側管路 402‧‧‧Return hot side pipeline
41‧‧‧回流熱氣回收管路 41‧‧‧Return hot gas recovery pipeline
42‧‧‧回流回收管路 42‧‧‧Return and recovery pipeline
421‧‧‧風車 421‧‧‧Windmill
60‧‧‧除塵設備 60‧‧‧Dust removal equipment
70‧‧‧煙囪 70‧‧‧Chimney
71‧‧‧煙囪排放管路 71‧‧‧Chimney discharge line
711‧‧‧風車 711‧‧‧Windmill
S100‧‧‧吸附區吸附 S100‧‧‧Adsorption zone adsorption
S110‧‧‧冷卻區冷卻 S110‧‧‧Cooling area cooling
S120‧‧‧脫附區脫附 S120‧‧‧Desorption zone desorption
S130‧‧‧蓄熱氣體輸送 S130‧‧‧Heat storage gas delivery
S140‧‧‧排出氣體回收輸送 S140‧‧‧Exhaust gas recovery and transportation
S150‧‧‧經過回流回收管路 S150‧‧‧Passes through the return line
第1圖係為本發明之主要實施方式的主要步驟流程圖。 Figure 1 is a flowchart of the main steps of the main embodiment of the present invention.
第2圖係為本發明之二塔式蓄熱燃燒爐之加熱器的該熱氣輸出管路連接架構示意圖。 Figure 2 is a schematic diagram of the connection structure of the hot gas output pipeline of the heater of the two-tower regenerative combustion furnace of the present invention.
第3圖係為本發明之二塔式蓄熱燃燒爐之加熱器的該熱氣排放管路連接架構示意圖。 Figure 3 is a schematic diagram of the connection structure of the hot gas discharge pipeline of the heater of the two-tower regenerative combustion furnace of the present invention.
第4圖係為本發明之二塔式蓄熱燃燒爐之另一實施方式的架構示意圖。 Figure 4 is a schematic structural diagram of another embodiment of the two-tower regenerative combustion furnace of the present invention.
第5圖係為本發明之三塔式蓄熱燃燒爐之加熱器的該熱氣輸出管路連接架構示意圖。 Figure 5 is a schematic diagram of the connection structure of the hot gas output pipeline of the heater of the three-tower regenerative combustion furnace of the present invention.
第6圖係為本發明之三塔式蓄熱燃燒爐之加熱器的該熱氣排放管路連接架構示意圖。 Figure 6 is a schematic diagram of the connection structure of the hot gas discharge pipeline of the heater of the three-tower regenerative combustion furnace of the present invention.
第7圖係為本發明之三塔式蓄熱燃燒爐之加熱器的該熱氣輸送管路連 接架構示意圖。 Figure 7 is the connection of the hot gas delivery pipeline of the heater of the three-tower regenerative combustion furnace of the present invention Schematic diagram of the connection structure.
第8圖係為本發明之旋轉式蓄熱燃燒爐之加熱器的該熱氣輸出管路連接架構示意圖。 Figure 8 is a schematic diagram of the connection structure of the hot gas output pipeline of the heater of the rotary regenerative combustion furnace of the present invention.
第9圖係為本發明之旋轉式蓄熱燃燒爐之加熱器的該熱氣排放管路連接架構示意圖。 Figure 9 is a schematic diagram of the connection structure of the hot gas discharge pipeline of the heater of the rotary regenerative combustion furnace of the present invention.
第10圖係為本發明之旋轉式蓄熱燃燒爐之加熱器的該熱氣輸送管路連接架構示意圖。 Fig. 10 is a schematic diagram of the connection structure of the hot gas conveying pipeline of the heater of the rotary regenerative combustion furnace of the present invention.
請參閱第1~10圖,係為本發明實施例之示意圖,而本發明之有機廢氣濃縮蓄熱燃燒回流系統及其方法的最佳實施方式係運用於半導體產業、光電產業或化學相關產業的揮發有機廢氣處理系統或類似設備,主要是用來將蓄熱氣經由不同路徑來進行回收或排放,使有機廢氣的處理效率提升,同時,蓄熱燃燒爐10之加熱室11的蓄熱氣提供給該加熱器30來使用。
Please refer to Figures 1 to 10, which are schematic diagrams of the embodiments of the present invention. The best implementation of the organic waste gas concentrated heat storage combustion recirculation system and method of the present invention is applied to the volatilization of the semiconductor industry, optoelectronic industry or chemical-related industries. The organic waste gas treatment system or similar equipment is mainly used to recover or discharge the heat storage gas through different paths to improve the treatment efficiency of organic waste gas. At the same time, the heat storage gas in the
而本發明之主要實施方式的有機廢氣濃縮蓄熱燃燒回流系統,主要係設有一蓄熱燃燒爐(RTO)10、一吸附轉輪20、一加熱器30及一回流熱交換器40(如第2圖至第10圖所示),其中該加熱器30係連接有一蓄熱氣體回收管路31,該回流熱交換器40係設有回流冷側管路401及回流熱側管路402,該回流熱交換器40係連接有一回流熱氣回收管路41及一回流回收管路42,另該蓄熱燃燒爐(RTO)10內係設有蓄熱床101,並透過該蓄熱床101來進行蓄、放熱使用,以回收高溫排氣的熱能,來供預熱低溫進氣使用,且該蓄熱燃燒爐(RTO)
10係設有一加熱室11、至少一進氣管路12及至少一出氣管路13,該加熱室11係設有一熱氣出口111。另該蓄熱燃燒爐(RTO)10之加熱室11係組設有一燃燒機(如第2圖至第10圖所示),而該燃燒機係透過燃料氣體或是燃料液體來進行燃燒,並將燃燒時之熱氣傳遞給蓄熱燃燒爐(RTO)10之加熱室11使用,再者,該燃燒機係設有一空氣管路,且該空氣管路係設有一風機,透過該風機以將該空氣管路內之空氣推送至該燃燒機內以幫助燃燒溫度提高。
The main embodiment of the present invention is the organic waste gas concentrated heat storage combustion recirculation system, mainly equipped with a regenerative combustion furnace (RTO) 10, an
而該吸附轉輪20係為沸石濃縮轉輪或是其他材質之濃縮轉輪,且該吸附轉輪20內係設有吸附區201、冷卻區202及脫附區203,該吸附轉輪20係設有一廢氣進氣管路21、一淨氣排放管路22、一冷卻氣進氣管路23、一冷卻氣輸送管路24、一熱氣輸送管路25及一脫附濃縮廢氣管路26(如第2圖至第10圖所示),而該廢氣進氣管路21的另一端係連接至該吸附轉輪20之吸附區201的一側A,以使該吸附轉輪20之吸附區201吸附該廢氣進氣管路21內的廢氣,且該淨氣排放管路22之一端係與該吸附轉輪20之吸附區201的另一側B連接,讓該廢氣經該吸附轉輪20之吸附區201淨化後再由該淨氣排放管路22來輸送。
The
另該冷卻氣進氣管路23的一端係與該吸附轉輪20之冷卻區202的一側A連接,而該冷卻氣進氣管路23係有兩種實施態樣,其中第一種實施態樣為該冷卻氣進氣管路23乃是供外氣進入(如第2圖及第3圖所示),而該外氣係為新鮮空氣,以將該外氣用來輸送到該吸附轉輪20之冷卻區202內提供降溫使用,另第二種實施態樣係該冷卻氣進
氣管路23係設有一氣體旁通管路231(如第4圖所示),該氣體旁通管路231之一端係與該冷卻氣進氣管路23連接,而該氣體旁通管路231之另一端係與該廢氣進氣管路21連接,透過該氣體旁通管路231來將部份的廢氣輸送到該吸附轉輪20之冷卻區202內提供降溫使用。
In addition, one end of the cooling
另該冷卻氣輸送管路24的一端係與該吸附轉輪20之冷卻區202的另一側B連接,而該冷卻氣輸送管路24的另一端係與該加熱器30連接(如第2圖至第10圖所示),以將該冷卻氣輸送管路24內的冷卻氣輸送到該加熱器30內使用,其中該加熱器30係為空氣對空氣熱交換器、液體對空氣熱交換器、電加熱器、瓦斯加熱器之其中任一種,另該熱氣輸送管路25的一端係與該吸附轉輪20之脫附區203的另一側B連接,而該熱氣輸送管路25的另一端係與該加熱器30連接,且該吸附轉輪20之脫附區203的一側A係與該脫附濃縮氣體管路26的一端連接,使將經由該加熱器30所提升之熱氣透過該熱氣輸送管路25來傳輸到該吸附轉輪20之脫附區203來進行脫附使用,並將經過高溫所脫附下來的脫附濃縮氣體透過該脫附濃縮氣體管路26來傳輸運送,且該脫附濃縮氣體管路26的另一端係與該蓄熱燃燒爐10之至少一進氣管路12連接,讓該脫附濃縮氣體進入該蓄熱燃燒爐10來進行熱氧化破壞。另該脫附濃縮氣體管路26係設有一風車261(如第4圖所示),以將該脫附濃縮氣體管路26內的脫附濃縮氣體進行抽送。
In addition, one end of the cooling gas delivery pipeline 24 is connected to the other side B of the cooling zone 202 of the adsorption runner 20, and the other end of the cooling gas delivery pipeline 24 is connected to the heater 30 (such as the second Figures to 10), to transport the cooling air in the cooling air delivery pipe 24 to the heater 30 for use, where the heater 30 is an air-to-air heat exchanger and a liquid-to-air heat exchange Any one of a heater, an electric heater, or a gas heater, and one end of the hot gas delivery pipeline 25 is connected to the other side B of the desorption zone 203 of the adsorption rotor 20, and the hot gas delivery pipeline 25 The other end is connected to the heater 30, and one side A of the desorption zone 203 of the adsorption rotor 20 is connected to one end of the desorption concentrated gas pipeline 26, so that the hot gas lifted by the heater 30 The hot gas is transported to the desorption zone 203 of the adsorption rotor 20 through the hot gas transport pipeline 25 for desorption use, and the desorption concentrated gas desorbed at high temperature is transported through the desorption concentrated gas pipeline 26 And the other end of the desorbed concentrated gas pipeline 26 is connected with at least one intake pipe 12 of the regenerative combustion furnace 10, so that the desorbed concentrated gas enters the regenerative combustion furnace 10 for thermal oxidation destruction. In addition, the desorbed
另該冷卻氣輸送管路24與該熱氣輸送管路25之間係設有比例風門(如第3圖及第4圖所示),而該比例風門係設有兩種實施設計,其中第一種實施設計乃為該冷卻氣輸送管路24與該熱氣輸送管路2
5之間設有一連通管路27,且該連通管路27係設有一連通控制閥門271,而該熱氣輸送管路25係設有一熱氣控制閥門251(如第3圖所示),並透過該連通控制閥門271及該熱氣控制閥門251來形成比例風門,另第二實施設計乃為該冷卻氣輸送管路24與該熱氣輸送管路25之間設有一連通管路27,且該連通管路27係設有一連通控制閥門271,而該冷卻氣輸送管路24係設有一冷卻氣控制閥門241(如第4圖所示),並透過該連通控制閥門271及該冷卻氣控制閥門241來形成比例風門,藉此,不管是透過該連通控制閥門271及該熱氣控制閥門25之設計的比例風門或是透過該連通控制閥門271及該冷卻氣控制閥門241之設計的比例風門,皆能調整控制風力之大小,讓該熱氣輸送管路25內的溫度保持一定高溫來提供給該吸附轉輪20之脫附區203使用。
In addition, a proportional damper (as shown in Figs. 3 and 4) is arranged between the cooling
另該加熱器30係連接有一蓄熱氣體回收管路31,該蓄熱氣體回收管路31的另一端係與該蓄熱燃燒爐10之加熱室11的熱氣出口111連接(如第2圖至第10圖所示),藉此,使該蓄熱燃燒爐10之加熱室11內的蓄熱氣經由該熱氣出口111來進入該蓄熱氣體回收管路31,再經由該蓄熱氣體回收管路31來將蓄熱氣輸送至該加熱器30內進行使用。
In addition, the
另該回流熱交換器40係連接有一回流熱氣回收管路41及一回流回收管路42,該回流熱交換器40之回流冷側管路401的一端係與該淨氣排放管路22的另一端連接,該回流熱氣回收管路41的一端係與該回流熱交換器40之回流熱側管路402的一端連接,該回流熱
氣回收管路41的另一端係與該蓄熱燃燒爐10之出氣管路13連接,該回流回收管路42的一端係與該回流熱交換器40之回流熱側管路402的另一端連接,該回流回收管路42的另一端係與該廢氣進氣管路21連接(如第2圖至第10圖所示)。再者,該回流熱交換器40之回流熱氣回收管路41及該回流回收管路42係可以同時各設有一除塵設備60來使用(如第7圖所示),或是只於該回流熱交換器40之回流回收管路42上來單獨設有一除塵設備60來使用(如第6圖所示),或是只於該回流熱交換器40之回流熱氣回收管路41上來單獨設有一除塵設備60來使用(如第4圖所示),讓經過該回流熱氣回收管路41內的氣體或是經過該回流回收管路42的氣體可以透過該除塵設備60進行過濾,其中該除塵設備60係為袋式除塵器、電袋式複合除塵器、慣性除塵器、靜電除塵器、離心式除塵器、濾筒式脈衝除塵器、脈衝袋式除塵器、脈衝濾芯除塵器、脈衝噴吹袋式除塵器、濕式除塵器、濕式電除塵器、濕式靜電除塵器、水膜除塵器、文丘里管除塵器、旋風分離器、煙道除塵器、多層除塵器、負壓反吹濾袋除塵器、低壓長袋脈衝除塵器、臥式靜電除塵器、無動力除塵器、荷電水霧除塵器、多管旋風除塵器、防爆除塵器之其中任一,且該回流熱交換器40之回流回收管路42係設有一風車421(如第4圖所示),以將該回流回收管路42內的氣體推向該廢氣進氣管路21內。藉此,將經過該蓄熱燃燒爐10所燃燒後之氣體由該回流熱氣回收管路41來輸送到該回流熱交換器40之回流熱側管路402進行熱交換,再透過該回流回收管路42來輸送到該除塵設備60內以進行粉塵或二氧化矽(SiO2)等氧化物的分離,最後再將由該除塵設備60所輸出的氣體輸送到
該廢氣進氣管路21內,使燃燒後的氣體進入該吸附轉輪20之吸附區201循環利用,而不經過該煙囪70來進行排放,讓該煙囪70的排放量降低,並使有機廢氣的處理效率提升。
In addition, the
而該回流熱交換器40係連接一煙囪70,該煙囪70係設有一煙囪排放管路71(如第2圖至第4圖所示),該煙囪排放管路71的一端係與該煙囪70連接,該煙囪排放管路71的另一端係與該回流熱交換器40之回流冷側管路401的另一端連接,讓經由該淨氣排放管路22所排出淨化後氣體進入該回流熱交換器40之回流冷側管路401內進行熱交換,再經由該煙囪排放管路71來輸送到煙囪70來進行排放,且該煙囪排放管路71係設有一風車711(如第4圖所示),以將該煙囪排放管路71內的氣體推向該煙囪70內。另該淨氣排放管路22係設有一風車221(如第3圖及第4圖所示),以將該淨氣排放管路22內的氣體推向該回流熱交換器40之回流冷側管路401內。而上述之淨氣排放管路22旁係設有一淨氣旁通管路222(如第3圖及第4圖所示),而該淨氣旁通管路222之一端係與該淨氣排放管路22連接,且該淨氣旁通管路222之另一端係與該煙囪排放管路71連接,讓該淨氣排放管路22在輸送所排出淨化後氣體時,除了進入該回流熱交換器40之回流冷側管路401進行熱交換外,還透過與該淨氣排放管路22所連接的該淨氣旁通管路222來進行旁通分流,使部分的淨化後氣體直接流到該煙囪排放管路71再經由該煙囪70進行排放。另該淨氣旁通管路222係設有一淨氣旁通控制閥門2221(如第4圖所示),以透過該淨氣旁通控制閥門2221來調節由該淨氣排放管路22所輸送過來的淨化後氣體
的風量,以形成調節控制之效能。
The
而上述之蓄熱燃燒爐10係設為二塔式蓄熱燃燒爐(如第2圖至第4圖所示)、三塔式蓄熱燃燒爐(如第5圖至第7圖所示)或旋轉式蓄熱燃燒爐(如第8圖至第10圖所示)之其中任一,而該加熱器30係設有三種連接路徑,其中該第一種路徑係當該蓄熱燃燒爐10為二塔式蓄熱燃燒爐、三塔式蓄熱燃燒爐或旋轉式蓄熱燃燒爐時,該加熱器30係連接一熱氣輸出管路321(如第2圖、第5圖及第8圖所示),該熱氣輸出管路321的另一端係與該回流熱氣回收管路41連接,讓由該熱氣出口111所輸出的蓄熱氣經由該蓄熱氣體回收管路31來輸送到該加熱器30內進行使用,再透過該熱氣輸送管路321來輸送到該回流熱氣回收管路41內,使該蓄熱氣進入該回流熱氣回收管路41內並輸送到該回流熱交換器40內,使具有再循環利用之效能。
The above-mentioned
而第二種路徑係當該蓄熱燃燒爐10為二塔式蓄熱燃燒爐、三塔式蓄熱燃燒爐或旋轉式蓄熱燃燒爐時,該加熱器30係連接一熱氣排放管路322(如第3圖、第6圖及第9圖所示),該熱氣排放管路322的另一端係連接至一煙囪70,讓由該熱氣出口111所輸出的蓄熱氣經由該蓄熱氣體回收管路31來輸送到該加熱器30內進行使用,再透過該熱氣排放管路322來輸送到煙囪70來進行排放,使該蓄熱氣透過該煙囪70來將蓄熱氣進行排放至大氣中。
The second path is when the
另第三種路徑係當該蓄熱燃燒爐10為三塔式蓄熱燃燒爐或旋轉式蓄熱燃燒爐時,都設有至少一掃氣(purge)管路14,該加熱器30係連接一熱氣輸送管路323(如第7圖及第10圖所示),該熱氣輸送
管路323的另一端係與該掃氣(purge)管路14的另一端連接,讓由該熱氣出口111所輸出的蓄熱氣經由該蓄熱氣體回收管路31來輸送到該加熱器30內進行使用,再透過該熱氣輸送管路323來輸送到該掃氣(purge)管路14內,使該蓄熱氣透過該掃氣(purge)管路14來再入該蓄熱燃燒爐10內,使具有再循環利用之效能。
Another third path is when the
再者,當第1種路徑與第2種路徑時,該蓄熱燃燒爐10為三塔式蓄熱燃燒爐或旋轉式蓄熱燃燒爐時,其該蓄熱燃燒爐10係設有至少一掃氣(purge)管路14,而該掃氣(purge)管路14的另一端係供新鮮空氣進入(如第5圖、第6圖、第8圖及第9圖所示),讓該掃氣(purge)管路14由外部來送入新鮮空氣。
Furthermore, when the first path and the second path, the
另本發明之主要實施方式的有機廢氣蓄熱燃燒回流方法,其主要係用於該有機廢氣處理系統,係包括有一蓄熱燃燒爐(RTO)10、一吸附轉輪20、一加熱器30及一回流熱交換器40(如第2圖至第10圖所示),其中該吸附轉輪20係設有吸附區201、脫附區202及冷卻區203,該吸附轉輪20係連接有一廢氣進氣管路21、一淨氣排放管路22、一冷卻氣進氣管路23、一冷卻氣輸送管路24、一熱氣輸送管路25及一脫附濃縮氣體管路26,該加熱器30係連接有一蓄熱氣體回收管路31,該回流熱交換器40係設有回流冷側管路401及回流熱側管路402,該回流熱交換器40係連接有一回流熱氣回收管路41及一回流回收管路42。
In addition, the organic waste gas regenerative combustion recirculation method of the main embodiment of the present invention is mainly used in the organic waste gas treatment system. It includes a regenerative combustion furnace (RTO) 10, an
另該蓄熱燃燒爐(RTO)10內係設有蓄熱床101,並透過該蓄熱床101來進行蓄、放熱使用,以回收高溫排氣的熱能,來供預
熱低溫進氣使用,且該蓄熱燃燒爐(RTO)10係設有一加熱室11、至少一進氣管路12及至少一出氣管路13(如第2圖至第10圖所示),該加熱室11係設有一熱氣出口111。另該蓄熱燃燒爐(RTO)10之加熱室11係組設有一燃燒機,而該燃燒機係透過燃料氣體或是燃料液體來進行燃燒,並將燃燒時之熱氣傳遞給蓄熱燃燒爐(RTO)10之加熱室11使用,再者,該燃燒機係設有一空氣管路,且該空氣管路係設有一風機,透過該風機以將該空氣管路內之空氣推送至該燃燒機內以幫助燃燒溫度提高。
In addition, the regenerative combustion furnace (RTO) 10 is equipped with a
而該有機廢氣蓄熱燃燒回流方法的主要步驟(如第1圖所示)係包括:步驟S100吸附區吸附:將廢氣透過該廢氣進氣管路21的另一端來送入該吸附轉輪20之吸附區201的一側A進行吸附,再將吸附後之氣體透過該淨氣排放管路22的另一端來輸送到該回流熱交換器40之回流冷側管路401的一端。而完成上述步驟S100後即進行下一步驟S110。
The main steps (as shown in Figure 1) of the organic waste gas heat storage combustion recirculation method include: step S100 adsorption zone adsorption: the exhaust gas is sent to the
其中上述之步驟S100中該回流熱交換器40係連接一煙囪70,該煙囪70係設有一煙囪排放管路71(如第2圖至第4圖所示),該煙囪排放管路71的一端係與該煙囪70連接,該煙囪排放管路71的另一端係與該回流熱交換器40之回流冷側管路401的另一端連接,讓經由該淨氣排放管路22所排出淨化後氣體進入該回流熱交換器40之回流冷側管路401內進行熱交換,再經由該煙囪排放管路71來輸送到煙囪70來進行排放,且該煙囪排放管路71係設有一風車711(如第4圖所示),以將該煙囪排放管路71內的氣體推向該煙囪70內。另
該淨氣排放管路22係設有一風車221(如第3圖及第4圖所示),以將該淨氣排放管路22內的氣體推向該回流熱交換器40之回流冷側管路401內。而上述之淨氣排放管路22旁係設有一淨氣旁通管路222(如第3圖及第4圖所示),而該淨氣旁通管路222之一端係與該淨氣排放管路22連接,且該淨氣旁通管路222之另一端係與該煙囪排放管路71連接,讓該淨氣排放管路22在輸送所排出淨化後氣體時,除了進入該回流熱交換器40之回流冷側管路401進行熱交換外,還透過與該淨氣排放管路22所連接的該淨氣旁通管路222來進行旁通分流,使部分的淨化後氣體直接流到該煙囪排放管路71再經由該煙囪70進行排放。另該淨氣旁通管路222係設有一淨氣旁通控制閥門2221(如第4圖所示),以透過該淨氣旁通控制閥門2221來調節由該淨氣排放管路22所輸送過來的淨化後氣體的風量,以形成調節控制之效能。
In the above step S100, the
另,下一步進行的步驟S110冷卻區冷卻:透過該冷卻氣進氣管路23的另一端來輸送冷卻氣至該吸附轉輪20之冷卻區202進行冷卻,再透過該冷卻氣輸送管路24的另一端來將經過冷卻區202之冷卻氣輸送到該加熱器30內。而完成上述步驟S110後即進行下一步驟S120。
In addition, the next step S110 cooling zone cooling: the cooling air is delivered to the
其中上述之步驟S110中該冷卻氣進氣管路23的一端係與該吸附轉輪20之冷卻區202的一側A連接,而該冷卻氣進氣管路23係有兩種實施態樣,其中第一種實施態樣為該冷卻氣進氣管路23乃是供外氣進入(如第2圖及第3圖所示),而該外氣係為新鮮空氣,以將該外氣用來輸送到該吸附轉輪20之冷卻區202內提供降溫使用,另第二
種實施態樣係該冷卻氣進氣管路23係設有一氣體旁通管路231(如第4圖所示),該氣體旁通管路231之一端係與該冷卻氣進氣管路23連接,而該氣體旁通管路231之另一端係與該廢氣進氣管路21連接,透過該氣體旁通管路231來將部份的廢氣輸送到該吸附轉輪20之冷卻區202內提供降溫使用。
In the above step S110, one end of the cooling
另該冷卻氣輸送管路24的一端係與該吸附轉輪20之冷卻區202的另一側B連接,而該冷卻氣輸送管路24的另一端係與該加熱器30連接(如第2圖至第10圖所示),以將該冷卻氣輸送管路24內的冷卻氣輸送到該加熱器30內使用,其中該加熱器30係為空氣對空氣熱交換器、液體對空氣熱交換器、電加熱器、瓦斯加熱器之其中任一種,另該熱氣輸送管路25的一端係與該吸附轉輪20之脫附區203的另一側B連接,而該熱氣輸送管路25的另一端係與該加熱器30連接,且該吸附轉輪20之脫附區203的一側A係與該脫附濃縮氣體管路26的一端連接,使將經由該加熱器30所提升之熱氣透過該熱氣輸送管路25來傳輸到該吸附轉輪20之脫附區203來進行脫附使用,並將經過高溫所脫附下來的脫附濃縮氣體透過該脫附濃縮氣體管路26來傳輸運送,且該脫附濃縮氣體管路26的另一端係與該蓄熱燃燒爐10之至少一進氣管路12連接,讓該脫附濃縮氣體進入該蓄熱燃燒爐10來進行熱氧化破壞。另該脫附濃縮氣體管路26係設有一風車261(如第4圖所示),以將該脫附濃縮氣體管路26內的脫附濃縮氣體進行抽送。
In addition, one end of the cooling gas delivery pipeline 24 is connected to the other side B of the cooling zone 202 of the adsorption runner 20, and the other end of the cooling gas delivery pipeline 24 is connected to the heater 30 (such as the second Figures to 10), to transport the cooling air in the cooling air delivery pipe 24 to the heater 30 for use, where the heater 30 is an air-to-air heat exchanger and a liquid-to-air heat exchange Any one of a heater, an electric heater, or a gas heater, and one end of the hot gas delivery pipeline 25 is connected to the other side B of the desorption zone 203 of the adsorption rotor 20, and the hot gas delivery pipeline 25 The other end is connected to the heater 30, and one side A of the desorption zone 203 of the adsorption rotor 20 is connected to one end of the desorption concentrated gas pipeline 26, so that the hot gas lifted by the heater 30 The hot gas is transported to the desorption zone 203 of the adsorption rotor 20 through the hot gas transport pipeline 25 for desorption use, and the desorption concentrated gas desorbed at high temperature is transported through the desorption concentrated gas pipeline 26 And the other end of the desorbed concentrated gas pipeline 26 is connected with at least one intake pipe 12 of the regenerative combustion furnace 10, so that the desorbed concentrated gas enters the regenerative combustion furnace 10 for thermal oxidation destruction. In addition, the desorbed
另,下一步進行的步驟S120脫附區脫附:透過與該加熱器30所連接的熱氣輸送管路24來將熱氣體輸送到該吸附轉輪20之脫
附區203進行脫附,再透過該脫附濃縮氣體管路26的另一端來將脫附濃縮氣體輸送到該蓄熱燃燒爐10之至少一進氣管路12。而完成上述步驟S120後即進行下一步驟S130。
In addition, the next step S120 desorption zone desorption: the hot gas is delivered to the
其中該上述之步驟S120中該脫附濃縮氣體管路26係設有一風車261,以將該脫附濃縮氣體管路26內的脫附濃縮氣體進行抽送。另該冷卻氣輸送管路24與該熱氣輸送管路25之間係設有比例風門(如第3圖及第4圖所示),而該比例風門係設有兩種實施設計,其中第一種實施設計乃為該冷卻氣輸送管路24與該熱氣輸送管路25之間設有一連通管路27,且該連通管路27係設有一連通控制閥門271,而該熱氣輸送管路25係設有一熱氣控制閥門251(如第3圖所示),並透過該連通控制閥門271及該熱氣控制閥門251來形成比例風門,另第二實施設計乃為該冷卻氣輸送管路24與該熱氣輸送管路25之間設有一連通管路27,且該連通管路27係設有一連通控制閥門271,而該冷卻氣輸送管路24係設有一冷卻氣控制閥門241(如第4圖所示),並透過該連通控制閥門271及該冷卻氣控制閥門241來形成比例風門,藉此,不管是透過該連通控制閥門271及該熱氣控制閥門25之設計的比例風門或是透過該連通控制閥門271及該冷卻氣控制閥門241之設計的比例風門,皆能調整控制風力之大小,讓該熱氣輸送管路25內的溫度保持一定高溫來提供給該吸附轉輪20之脫附區203使用。
In the step S120 described above, the desorbed
另,下一步進行的步驟S130蓄熱氣體輸送:將該蓄熱燃燒爐10之加熱室11的蓄熱氣,透過與該熱氣出口111所連接的蓄熱氣體回收管路31來輸送到該加熱器30內。而完成上述步驟S130後
即進行下一步驟S140。
In addition, the next step S130 heat storage gas delivery: the heat storage gas in the
其中該上述之步驟S130中該加熱器30係連接有一蓄熱氣體回收管路31,該蓄熱氣體回收管路31的另一端係與該蓄熱燃燒爐10之加熱室11的熱氣出口111連接(如第2圖至第10圖所示),藉此,使該蓄熱燃燒爐10之加熱室11內的蓄熱氣經由該熱氣出口111來進入該蓄熱氣體回收管路31,再經由該蓄熱氣體回收管路31來將蓄熱氣輸送至該加熱器30內進行使用。
In the above step S130, the
而上述之蓄熱燃燒爐10係設為二塔式蓄熱燃燒爐(如第2圖至第4圖所示)、三塔式蓄熱燃燒爐(如第5圖至第7圖所示)或旋轉式蓄熱燃燒爐(如第8圖至第10圖所示)之其中任一,而該加熱器30係設有三種連接路徑,其中該第一種路徑係當該蓄熱燃燒爐10為二塔式蓄熱燃燒爐、三塔式蓄熱燃燒爐或旋轉式蓄熱燃燒爐時,該加熱器30係連接一熱氣輸出管路321(如第2圖、第5圖及第8圖所示),該熱氣輸出管路321的另一端係與該回流熱氣回收管路41連接,讓由該熱氣出口111所輸出的蓄熱氣經由該蓄熱氣體回收管路31來輸送到該加熱器30內進行使用,再透過該熱氣輸送管路321來輸送到該回流熱氣回收管路41內,使該蓄熱氣進入該回流熱氣回收管路41內並輸送到該回流熱交換器40內,使具有再循環利用之效能。
The above-mentioned
而第二種路徑係當該蓄熱燃燒爐10為二塔式蓄熱燃燒爐、三塔式蓄熱燃燒爐或旋轉式蓄熱燃燒爐時,該加熱器30係連接一熱氣排放管路322(如第3圖、第6圖及第9圖所示),該熱氣排放管路322的另一端係連接至一煙囪70,讓由該熱氣出口111所輸出的蓄熱
氣經由該蓄熱氣體回收管路31來輸送到該加熱器30內進行使用,再透過該熱氣排放管路322來輸送到煙囪70來進行排放,使該蓄熱氣透過該煙囪70來將蓄熱氣進行排放至大氣中。
The second path is when the
另第三種路徑係當該蓄熱燃燒爐10為三塔式蓄熱燃燒爐或旋轉式蓄熱燃燒爐時,都設有至少一掃氣(purge)管路14,該加熱器30係連接一熱氣輸送管路323(如第7圖及第10圖所示),該熱氣輸送管路323的另一端係與該掃氣(purge)管路14的另一端連接,讓由該熱氣出口111所輸出的蓄熱氣經由該蓄熱氣體回收管路31來輸送到該加熱器30內進行使用,再透過該熱氣輸送管路323來輸送到該掃氣(purge)管路14內,使該蓄熱氣透過該掃氣(purge)管路14來再入該蓄熱燃燒爐10內,使具有再循環利用之效能。
Another third path is when the
再者,當第1種路徑與第2種路徑時,該蓄熱燃燒爐10為三塔式蓄熱燃燒爐或旋轉式蓄熱燃燒爐時,其該蓄熱燃燒爐10係設有至少一掃氣(purge)管路14,而該掃氣(purge)管路14的另一端係供新鮮空氣進入(如第5圖、第6圖、第8圖及第9圖所示),讓該掃氣(purge)管路14由外部來送入新鮮空氣。
Furthermore, when the first path and the second path, the
另,下一步進行的步驟S140排出氣體回收輸送:將該蓄熱燃燒爐10之出氣管路13所排出之氣體經由該回流熱氣回收管路41來輸送到該回流熱交換器40之回流熱側管路402的一端。而完成上述步驟S140後即進行下一步驟S150。
In addition, the next step S140 exhaust gas recovery and transportation: the gas discharged from the
另,下一步進行的步驟S150經過回流回收管路:將輸送到該回流熱交器40之回流熱側管路402的氣體,再經由與回流熱交換
器40之回流熱側管路402的另一端所連接的回流回收管路42來輸送到該廢氣進氣管路21的一端。
In addition, the next step S150 goes through the return recovery pipeline: the gas sent to the return
其中該上述之步驟S150中的回流熱交換器40係連接有一回流熱氣回收管路41及一回流回收管路42,該回流熱交換器40之回流冷側管路401的一端係與該淨氣排放管路22的另一端連接,該回流熱氣回收管路41的一端係與該回流熱交換器40之回流熱側管路402的一端連接,該回流熱氣回收管路41的另一端係與該蓄熱燃燒爐10之出氣管路13連接,該回流回收管路42的一端係與該回流熱交換器40之回流熱側管路402的另一端連接,該回流回收管路42的另一端係與該廢氣進氣管路21連接(如第2圖至第10圖所示)。再者,該回流熱交換器40之回流熱氣回收管路41及該回流回收管路42係可以同時各設有一除塵設備60來使用(如第7圖所示),或是只於該回流熱交換器40之回流回收管路42上來單獨設有一除塵設備60來使用(如第6圖所示),或是只於該回流熱交換器40之回流熱氣回收管路41上來單獨設有一除塵設備60來使用(如第4圖所示),讓經過該回流熱氣回收管路41內的氣體或是經過該回流回收管路42的氣體可以透過該除塵設備60進行過濾,其中該除塵設備60係為袋式除塵器、電袋式複合除塵器、慣性除塵器、靜電除塵器、離心式除塵器、濾筒式脈衝除塵器、脈衝袋式除塵器、脈衝濾芯除塵器、脈衝噴吹袋式除塵器、濕式除塵器、濕式電除塵器、濕式靜電除塵器、水膜除塵器、文丘里管除塵器、旋風分離器、煙道除塵器、多層除塵器、負壓反吹濾袋除塵器、低壓長袋脈衝除塵器、臥式靜電除塵器、無動力除塵器、荷電水霧除塵器、多管旋風除塵器、
防爆除塵器之其中任一,且該回流熱交換器40之回流回收管路42係設有一風車421(如第4圖所示),以將該回流回收管路42內的氣體推向該廢氣進氣管路21內。藉此,將經過該蓄熱燃燒爐10所燃燒後之氣體由該回流熱氣回收管路41來輸送到該回流熱交換器40之回流熱側管路402進行熱交換,再透過該回流回收管路42來輸送到該除塵設備60內以進行粉塵或二氧化矽(SiO2)等氧化物的分離,最後再將由該除塵設備60所輸出的氣體輸送到該廢氣進氣管路21內,使燃燒後的氣體進入該吸附轉輪20之吸附區201循環利用,而不經過該煙囪70來進行排放,讓該煙囪70的排放量降低,並使有機廢氣的處理效率提升。
The
由以上詳細說明,可使熟知本項技藝者明瞭本發明的確可達成前述目的,實已符合專利法之規定,爰提出發明專利申請。 Based on the above detailed description, those who are familiar with this technique can understand that the present invention can indeed achieve the foregoing objectives, and that it has actually complied with the provisions of the Patent Law, and filed an application for a patent for invention.
惟以上所述者,僅為本發明之較佳實施例而已,當不能以此限定本發明實施之範圍;故,凡依本發明申請專利範圍及發明說明書內容所作之簡單的等效變化與修飾,皆應仍屬本發明專利涵蓋之範圍內。 However, the above are only the preferred embodiments of the present invention, and should not be used to limit the scope of implementation of the present invention; therefore, all simple equivalent changes and modifications made in accordance with the scope of the patent application of the present invention and the content of the description of the invention , Should still fall within the scope of the invention patent.
S100‧‧‧吸附區吸附 S100‧‧‧Adsorption zone adsorption
S110‧‧‧冷卻區冷卻 S110‧‧‧Cooling area cooling
S120‧‧‧脫附區脫附 S120‧‧‧Desorption zone desorption
S130‧‧‧蓄熱氣體輸送 S130‧‧‧Heat storage gas delivery
S140‧‧‧排出氣體回收輸送 S140‧‧‧Exhaust gas recovery and transportation
S150‧‧‧經過回流回收管路 S150‧‧‧Passes through the return line
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