TWI731325B - Hub type blade and hub type blade manufacturing method - Google Patents

Abstract

The hub type blade 100 has an aluminum hub 10; a blade main body 30; a pressure sensitive adhesive connection part 120, which is disposed between the aluminum hub 10 and the blade main body 30 and connects the aluminum hub 10 and the blade main body 30 by holding a blade attachment surface 10A and a connection surface 30T; and a connection reinforcing part 140, which if provided on an outer circumference side and an inner circumference side of the pressure adhesive connection part 120 and reinforces the connection between the blade attachment surface 10A and the connection surface 30T.

Description

Hub-shaped cutting blade and manufacturing method of hub-shaped cutting blade

The present invention relates to a method for manufacturing a hub-shaped dicing sheet and a hub-type dicing sheet for cutting substrates of semiconductor materials and the like and singulated into a wafer shape.

This application claims priority based on Japanese Patent Application No. 2018-080938, Japanese Patent Application No. 2018-080939, and Japanese Patent Application No. 2018-080940 filed in Japan on April 19, 2018, and the content is used here.

It is well known that when cutting a substrate such as a semiconductor material and singulating it into a wafer shape, a dicing sheet formed into a circular shape is used. As a form for stable rotation of the dicing sheet, it is widely used to hold the dicing sheet body on the hub member. The hub-shaped cutting blade (for example, refer to Patent Document 1).

The hub-type cutting disc usually includes, for example, a hub made of aluminum alloy and an electroformed cutting disc body formed by nickel plating on one side of the hub, and the hub and the electroformed cutting disc body are integrally connected.

For example, the above-mentioned conventional hub-shaped dicing blade is immersed in a nickel plating solution in which diamond superabrasive grains are dispersed, and an aluminum base metal applied with a mask is immersed, and nickel is plated on the forming surface of the dicing blade to form the original plate of the electroformed dicing blade body. . After that, the main body of the dicing blade is protruded by outer diameter processing and alkaline etching, the diamond superabrasive grains are exposed by electrolytic dressing, and dicer dressing is performed to complete the hub-shaped dicing blade.

The above-mentioned conventional manufacturing method of the hub-shaped cutting blade has undergone many complicated and difficult-to-control steps, so it is difficult to efficiently manufacture high-precision products.

Therefore, the hub and the dicing blade body are formed separately, and the hub and the dicing blade body that have passed the inspection are efficiently developed by forming a pressure-sensitive adhesive surface with adhesive tape, etc., to efficiently develop a hub-type dicing blade that can be manufactured. If the connection is made by an adhesive tape or the like, the hub and the dicing blade body can be connected in a short time, so the hub-shaped dicing blade can be manufactured efficiently.

[Prior technical literature]

〔Patent Documents〕

[Patent Document 1] Japanese Patent Laid-Open No. 5-345281 (A)

However, the hub-shaped dicing sheet connected by an adhesive tape or the like can be efficiently manufactured. On the other hand, the part connected by the adhesive force may not have sufficient strength due to the cutting conditions, so it has a factor of increasing as needed. The adhesive strength of the connected part is expected.

The present invention is completed in consideration of the above circumstances, and aims to provide a hub-shaped cutting blade and a manufacturing method of the hub-shaped cutting blade, which relates to an adhesive having at least either side of the hub and the cutting blade body connected by adhesive force The hub-shaped cutting piece of the sexual connection part can increase the connection strength of the part connected by adhesive force as needed.

In order to solve the above-mentioned problems, the present invention proposes the following technical means.

(1) The first aspect of the present invention is a hub-type cutting blade, which includes: a hub capable of rotating about an axis and a cutting blade mounting surface is formed on one side in the direction of the axis; and a cutting blade body is formed with The connecting surface connected to the cutting blade mounting surface; the adhesive connecting portion is arranged between the hub and the cutting blade body, and any one of the cutting blade mounting surface and the connecting surface is maintained by adhesive force, and by Adhesive force or adhesion to hold the other, and connect the hub and the cutting piece body; and the connection reinforcing part is arranged on at least any one of the outer peripheral side and the inner peripheral side of the adhesive connecting part, and sandwiches the cut sheet At least one of the mounting surface and the adhesive connection portion, and at least one of the connection surface and the adhesive connection portion is connected by the portion held by the adhesive force.

According to the hub-shaped dicing blade of (1) above, since the adhesive connecting portion connects the dicing-chip mounting surface or/and the connection surface by adhesive force, the hub-shaped dicing blade can be efficiently manufactured.

In addition, the adhesive connection part is provided with a connection reinforcement part on the outer circumference side or/and the inner circumference side, and the connection reinforcement part encompasses (including) at least one of the dicing sheet mounting surface and the adhesive connection part, the connection surface and the adhesive connection part The connection is made by the part held by the adhesive force, so the connection strength between the hub and the cutting blade body can be increased. As a result, high-speed rotation can be performed and cutting ability can be improved.

In this specification, the so-called adhesive connection means that at least one of the cutting blade mounting surface and the connecting surface is maintained by adhesive force to connect the hub and the cutting blade body.

In addition, the so-called adhesive connection part is arranged between the hub and the main body of the dicing blade, holding either one of the attachment surface of the dicing blade and the connecting surface by adhesive force, and connecting by holding the other by adhesive force or adhesion The part of the hub and the cutting blade body.

In addition, the outer peripheral side of the adhesive connecting portion refers to the outer peripheral side of any one of the constituent elements of the adhesive connecting portion. For example, the adhesive connecting portion has an adhesive connecting member (such as an adhesive) on the base material. In the case of an adhesive tape), it may include the outer peripheral side of either the base material and the adhesive resin, or may include a part located inside any of the constituent elements. In addition, the so-called constituent elements may be in contact or separated. In addition, the inner peripheral side of the adhesive connection part is also the same.

In addition, the so-called connection reinforcing part means that it is arranged on the outer peripheral side or/and the inner peripheral side of the adhesive connecting part, between at least any one of the attachment surface of the dicing sheet and the connecting surface and the adhesive connecting part, including by adhesive The force-maintained parts are, for example, the part connecting the hub and the cutting blade body, the hub and the adhesive connection part, and the cutting blade body and the adhesive connection part.

(2) In the hub-shaped dicing sheet described in (1) above, the adhesive connecting portion may be formed by a double-sided adhesive connecting member.

According to the hub-type dicing blade of (2) above, since the adhesive connecting portion is formed by a double-sided adhesive connecting member, it is possible to connect the dicing blade mounting surface of the hub and the dicing blade body in a short time by adhesive force Surface, and efficiently manufacture hub-shaped cutting discs.

In this specification, the so-called adhesive connection member refers to a single-sided adhesive member with one side as an adhesive surface, and a double-sided adhesive member with both sides as an adhesive surface. Various constitutions such as those with flexible resins (hereinafter referred to as adhesives), those with adhesives formed in a sheet shape with one or both sides as adhesive surfaces (adhesive transfer tape, etc.).

(3) In the hub-shaped dicing sheet described in (1) or (2) above, the connecting reinforcement portion may be formed in the circumferential direction of at least one of the outer peripheral side and the inner peripheral side of the adhesive connecting portion, and becomes The structure of connecting the dicing blade mounting surface and the connecting surface.

According to the hub-shaped cutting blade of (3) above, since the connecting reinforcing portion is formed in the circumferential direction (symmetrical with respect to the axis) of at least one of the outer peripheral side and the inner peripheral side of the adhesive connecting portion, it is possible to make the hub-shaped cutting The film rotates steadily. In addition, since the dicing blade mounting surface and the connection surface are connected, a large connection force can be stably ensured.

Here, the term "formed in the circumferential direction" includes forming over the entire circumference in the circumferential direction and intermittently forming in the circumferential direction.

(4) In the hub-shaped dicing sheet described in (1) or (2) above, the connection reinforcing portion may extend over the entire circumference of at least one of the outer peripheral side and the inner peripheral side of the adhesive connecting portion in the circumferential direction. Formation becomes a structure that seals the held part by adhesive force.

According to the hub-shaped dicing blade of (4) above, since the connection reinforcement part is configured to seal the outer circumference side or/and the inner circumference side of the adhesive connection part, it is possible to suppress cutting fluid, particles, etc. during cutting or cooling during the manufacturing process. Liquid etc. invade the adhesive surface.

As a result, it is possible to suppress the deterioration of the adhesive surface, such as cutting fluid (for example, alkaline cutting fluid) or coolant harmful to the adhesive.

(5) In the hub-shaped dicing sheet described in any one of (1) to (4) above, the connection reinforcement portion may be formed by curing a photocurable resin.

According to the hub-shaped dicing sheet of (5) above, since the connection reinforcing part is formed by curing a light-curing resin and is cured in a short time by irradiating light, the connection reinforcing part can be efficiently formed. In addition, since it hardens in a short time, it is possible to suppress mutual movement of the hub and the dicing blade body, and it is possible to suppress the formation of defective connection reinforcement parts during curing of the adhesive, thereby improving the quality of the hub-shaped dicing blade.

In addition, since it is hardened by light irradiation, energy can be saved when forming the connection reinforcement.

(6) In the hub-shaped dicing sheet described in (5) above, the photocurable resin may be a delayed photocurable resin.

According to the hub-type dicing blade of (6) above, since the connection reinforcing portion is formed by curing a delayed light-curing resin, an appropriate time can be secured from applying the adhesive to connecting the hub and the dicing blade body.

(7) In the hub-shaped cutting blade described in any one of (1) to (6) above, the hub may be formed of aluminum or aluminum alloy.

According to the hub-shaped cutting blade of (7) above, since the hub is formed of aluminum or aluminum alloy, it can be rotated at a high speed and cut efficiently.

(8) In the hub-shaped cutting blade described in any one of (1) to (6) above, the hub may be formed of magnesium or a magnesium alloy.

According to the hub-type cutting blade of (8) above, since the hub is formed of magnesium or a magnesium alloy and has a high specific strength, it can be rotated at a high speed and cut efficiently.

In addition, since the damping capacity is excellent, the occurrence of vibration can be suppressed and cutting can be performed stably.

(9) In the hub-shaped cutting blade described in any one of (1) to (6) above, the hub may be formed of titanium or a titanium alloy.

According to the hub-type cutting blade of (9) above, since the hub is formed of a titanium alloy or pure titanium and has a large specific strength, it can be rotated at a high speed. As a result, the cutting ability of the hub-type cutting blade can be improved.

(10) In the hub-shaped cutting blade described in any one of (1) to (6) above, the hub may be formed of plastic or fiber-reinforced plastic.

According to the hub-type cutting blade of (10) above, since the hub is formed of plastic or fiber-reinforced plastic and has a large specific strength, it can be rotated at a high speed.

As a result, the cutting ability of the hub-type cutting blade can be improved.

(11) In the hub-shaped cutting disc of (10) above, the plastic hub may also be a polycarbonate hub.

According to the above-mentioned (11) hub-type cutting blade, since the hub is made of polycarbonate (specific strength of 52.5kN·m/kg, specific strength of aluminum alloy is about 25.2kN·m/kg), it can be rotated at high speed. Cut efficiently.

(12) The second aspect of the present invention is a method of manufacturing a hub-shaped cutting blade for manufacturing a hub-shaped cutting blade. The hub-shaped cutting blade includes a cutting blade that can rotate about an axis and has a cut formed on one side in the direction of the axis. The hub of the blade mounting surface and the cutting blade body formed with the connecting surface connected to the cutting blade mounting surface. The manufacturing method of the hub type cutting blade includes the cutting blade mounting step of connecting the hub and the cutting blade body. In the dicing blade mounting step, a flat plate-shaped adhesive connecting member whose at least one surface is an adhesive surface is connected to any one of the dicing blade mounting surface and the connecting surface by adhesive force or bonding, and the adhesive connecting member Connected to the other of the dicing blade mounting surface and the connecting surface by adhesive force or bonding, and any one of the dicing blade mounting surface and the connecting surface is connected by adhesive connection due to adhesive force. The hub is connected to the dicing blade body, and the adhesive connecting member is connected to one of the dicing blade mounting surface and the connecting surface until the hub is connected to the dicing blade body, or the hub is connected to After the dicing piece body is connected, a reinforcing adhesive is arranged in the circumferential direction of at least one of the outer peripheral side and the inner peripheral side of the adhesive connecting member, and the reinforcing adhesive is cured to form a connecting reinforcing part.

According to the method for manufacturing a hub-shaped dicing blade of (12) above, in the dicing blade mounting step, the adhesive connecting member is connected to one of the dicing blade mounting surface and the connecting surface until the hub and the dicing blade body are connected , Or after the hub is connected to the dicing blade body, a reinforcing adhesive is placed on the outer peripheral side and the inner peripheral side of the adhesive connecting member. That is, since the adhesive connecting member is connected to one of the dicing blade mounting surface and the connecting surface, the reinforcing adhesive is arranged on the outer peripheral side or/and the inner peripheral side of the adhesive connecting member, so that the adhesive connection In the area where the dicing blade mounting surface on the outer peripheral side or/and the inner peripheral side of the member faces the connection surface, the reinforcing adhesive can be easily and efficiently arranged in the circumferential direction. As a result, it is possible to efficiently manufacture the hub-shaped dicing sheet.

Here, as the reinforcing adhesive forming the connection reinforcing portion, for example, an adhesive cured by volatilizing a solvent, a light curing adhesive represented by an ultraviolet curing adhesive, a thermosetting resin, an anaerobic resin, etc. can be used.

(13) In the method of manufacturing a hub-shaped dicing sheet described in (12) above, any one of the attachment surface of the dicing sheet and the connecting surface is connected to form a doughnut-shaped double-face with adhesive surfaces on both sides Adhesive connecting member, in which at least one of the outer peripheral side and inner peripheral side of the double-sided adhesive connecting member is arranged with a reinforcing adhesive in the circumferential direction, the hub is connected to the dicing blade body, and the reinforcing adhesive is bonded The agent is connected to the dicing blade mounting surface and the connection surface, and the reinforcing adhesive is hardened to form a connection reinforcing portion.

According to the method for manufacturing the hub-shaped dicing blade of (13) above, since any one of the dicing blade mounting surface and the connecting surface is formed into a doughnut-shaped double-sided adhesive connecting member with adhesive surfaces on both sides, the At least one of the outer peripheral side and the inner peripheral side of the surface-adhesive connecting member is provided with a reinforcing adhesive in the circumferential direction to connect the hub and the dicing blade body, so that the hub and the dicing blade body can be efficiently connected. In addition, since the reinforcing adhesive forming the connection reinforcing portion is arranged before connecting the hub and the dicing blade body, the reinforcing adhesive can be easily and reliably arranged on the dicing blade mounting surface and the connecting surface. As a result, a large connection force can be imparted to the connection reinforcement portion.

(14) In the method for manufacturing a hub-shaped dicing sheet described in (12) or (13), a photo-curing resin can be used as the reinforcing adhesive, and the photo-curing resin can be cured by irradiating light to it , Form the above-mentioned connection reinforcement.

According to the method of manufacturing a hub-shaped dicing sheet (14), since the connection reinforcement portion is formed by a photo-curable resin, the connection reinforcement portion can be efficiently formed. In addition, since the hardening takes place in a short time, it is possible to suppress the mutual movement of the hub and the cutting blade body before the reinforcing adhesive hardens, and to improve the quality of the hub-shaped cutting blade.

In addition, since the light is irradiated to harden the photo-curable resin, energy saving can be achieved in the connection reinforcement part.

In addition, by using a photocurable resin that cures in a short time, the lead time can be shortened and the generation of semi-finished products accompanying the formation of the connection reinforcement can be suppressed.

(15) In the method for manufacturing a hub-shaped dicing sheet described in (12) or (13), a retarded light-curing resin can be used as the reinforcing adhesive, and the retarded light-curing resin can be irradiated with light. It is hardened to form the above-mentioned connection reinforcement.

According to the method of manufacturing the hub-shaped dicing blade of (15) above, the retarded light-curing resin is used to harden to form the connection reinforcement. Therefore, it is possible to ensure a proper degree of connection between the hub and the dicing blade body after the reinforcement adhesive is applied. The time, the hub can be easily aligned with the cutting blade body.

In addition, since it is cured in a short time after being irradiated with light, the connection reinforcement can be formed efficiently and stably.

According to the manufacturing method of the hub-shaped dicing blade and the hub-shaped dicing blade of the present invention, the hub-shaped dicing blade having an adhesive connection portion that connects the hub and the dicing blade body by adhesive force can be enlarged as needed The strength of the connection of the parts connected by adhesion.

10‧‧‧Aluminum Wheel (Wheel)

10A‧‧‧Cutting disc mounting surface

10B, 10C, 10D, 10E, 30B, 30C, 30D, 30E‧‧‧Reinforced holding part

10H‧‧‧Mounting hole

11‧‧‧Cutting disc installation part

12‧‧‧Drive source connection

30‧‧‧Cutting disc body

30F‧‧‧Exposed

30G‧‧‧Notable Department

30H, 120H, 125H, 220H, 320H, 420H, 420HA, 420HB, 520H, 520HA, 520HB‧‧‧round hole

30T‧‧‧Connecting surface

31‧‧‧Metal base material

32‧‧‧Diamond super abrasive grain (abrasive grain)

40‧‧‧Adhesive supply device

42, 42A, 42B, 52, 52A, 52B‧‧‧Adhesive connection part

100, 100A, 200, 300, 400, 400A, 400B, 500, 500A, 500B‧‧‧Wheel cutting disc

120, 125, 220, 320‧‧‧Double-sided adhesive tape (double-sided adhesive member, adhesive connecting member, adhesive connecting part)

120A, 120B, 125A, 125B, 220A, 220B, 320A, 320B, 420S, 520S‧‧‧Adhesive surface

121, 221, 321, 421, 421A, 421B, 521, 521A, 521B‧‧‧Tape base material

122, 123, 222, 223, 322, 323, 423, 423A, 423B, 522, 522A, 522B‧‧‧Adhesive (adhesive adhesive resin)

140, 240, 340, 440, 440A, 440B, 540, 540A, 540B‧‧‧Connection reinforcement (UV-curing resin, UV-curing adhesive, light-curing resin)

140L, 240L‧‧‧Reinforcement adhesive (adhesive)

141, 241, 341, 341A, 341B, 441, 441A, 441B, 541, 541A, 541B ‧ ‧ External connection reinforcement

142, 242, 342, 342A, 342B, 442, 442A, 442B, 542, 542A, 542B

420, 420A, 420B, 520, 520A, 520B‧‧‧Adhesive tape (adhesive connection member, adhesive connection part)

422, 422A, 422B, 523, 523A, 523B‧‧‧Adhesive resin part (adhesive connection part)

O1‧‧‧Axis

S11~S14, S21~S25, S101~S104, S201~S204, S301~S305, S401~S406, S501~S506‧‧‧Steps

Fig. 1 is a perspective view illustrating an example of a schematic configuration of a hub-shaped cutting blade according to a first embodiment of the present invention.

Fig. 2 is a diagram illustrating the schematic configuration of the hub-shaped cutting blade of the first embodiment, and is a partial cross-sectional view indicated by arrows Z-Z in Fig. 1.

Fig. 3 is a diagram illustrating the outline of the outer peripheral side connection reinforcement portion of the hub-type dicing blade of the first embodiment, and is a partial enlarged view indicated by III in Fig. 2.

4 is a diagram illustrating the outline of the inner peripheral side connection reinforcement portion of the hub-type dicing blade of the first embodiment, and is a partially enlarged view indicated by IV in FIG. 2.

Fig. 5 is a flowchart illustrating an example of the outline of the manufacturing procedure of the hub-shaped dicing blade of the first embodiment.

6 is a diagram illustrating the outline of the manufacturing procedure of the hub-shaped dicing blade of the first embodiment, and is a schematic flowchart illustrating an example of the procedure of manufacturing the dicing sheet material.

Fig. 7 is a flowchart illustrating an outline of an example of the dicing blade mounting procedure of the first embodiment.

Fig. 8 is a conceptual diagram illustrating an example of application of the reinforcing adhesive in the dicing sheet mounting step of the first embodiment.

Fig. 9 is a partial cross-sectional view illustrating a schematic configuration of a hub-shaped cutting blade of a first modification of the first embodiment, and shown by arrows Z-Z in Fig. 1.

Fig. 10 is a diagram illustrating an example of a schematic configuration of a hub-shaped cutting blade of a second embodiment of the present invention, and is a cross-sectional view indicated by arrows Z-Z in Fig. 1.

FIG. 11 is a diagram illustrating the outline of the outer peripheral side connection reinforcing portion of the hub-type dicing blade of the second embodiment, and is a partial enlarged view indicated by XI in FIG. 10.

Fig. 12 is a diagram illustrating the outline of the outer peripheral side connection reinforcement portion of the hub-type dicing blade of the second embodiment, and is a partially enlarged view indicated by XII in Fig. 10.

Fig. 13 is a flowchart illustrating an outline of an example of the dicing blade mounting procedure of the second embodiment.

14(A) and 14(B) are conceptual diagrams illustrating an example of the application of the reinforcing adhesive in the dicing sheet mounting step of the second embodiment.

Fig. 15 is an example of a schematic configuration of a hub-shaped dicing blade according to a third embodiment of the present invention, and a partial enlarged view illustrating the outline of the outer peripheral side connection reinforcement part in the cross section indicated by the arrow Z-Z in Fig. 1.

Fig. 16 is an example of a schematic configuration of a hub-shaped dicing blade according to a third embodiment of the present invention, and a partial enlarged view showing the outline of the inner peripheral side connection reinforcement part in the cross section indicated by the arrow Z-Z in Fig. 1.

Fig. 17 is a flowchart illustrating an outline of an example of the dicing blade mounting procedure of the third embodiment.

Fig. 18 is a partial cross-sectional view illustrating a schematic configuration of a hub-shaped cutting blade according to a fourth embodiment of the present invention, and is indicated by arrows Z-Z in Fig. 1.

Fig. 19 is a flowchart illustrating an outline of an example of the dicing blade mounting procedure of the fourth embodiment.

Fig. 20 is a partial cross-sectional view illustrating the schematic configuration of a hub-shaped dicing blade according to a first modification of the fourth embodiment, and shown by arrows Z-Z in Fig. 1.

Fig. 21 is a partial cross-sectional view illustrating a schematic configuration of a hub-shaped cutting blade of a second modification of the fourth embodiment, and shown by arrows Z-Z in Fig. 1.

Fig. 22 is a partial cross-sectional view illustrating a schematic configuration of a hub-shaped cutting blade according to a fifth embodiment of the present invention, and is indicated by arrows Z-Z in Fig. 1.

Fig. 23 is a flowchart illustrating an outline of an example of the dicing blade mounting procedure of the fifth embodiment.

Fig. 24 is a partial cross-sectional view illustrating a schematic configuration of a hub-shaped cutting blade of a first modification of the fifth embodiment, and shown by arrows Z-Z in Fig. 1.

Fig. 25 is a partial cross-sectional view illustrating the schematic configuration of a hub-shaped cutting blade of a second modification of the fifth embodiment, and shown by arrows Z-Z in Fig. 1.

<First Implementation Type>

Hereinafter, the hub-shaped cutting blade of the first embodiment of the present invention will be described with reference to FIGS. 1 to 4.

Fig. 1 is a perspective view illustrating an example of a schematic configuration of a hub-shaped cutting blade according to a first embodiment of the present invention, and Fig. 2 is a partial cross-sectional view indicated by arrows Z-Z in Fig. 1. In addition, FIG. 3 is a detailed partial enlarged view explaining the main part of the outer peripheral side connection reinforcement part (connection reinforcement part), and FIG. 4 is a detailed partial enlarged view explaining the main part of the inner circumference side connection reinforcement part (connection reinforcement part) .

In Figures 1 to 4, the symbol 100 represents a hub-shaped dicing sheet, the symbol 10 represents an aluminum hub (hub), the symbol 10A represents the mounting surface of the dicing sheet, and the symbol 120 represents a double-sided adhesive tape (adhesive connection member, adhesive tape), symbol 30 indicates the body of the dicing sheet, symbol 30T indicates the connecting surface, and symbol 140 indicates the connecting reinforcing part.

As shown in Figures 1 to 4, the hub-type dicing sheet 100 includes, for example, an aluminum hub 10, a double-sided adhesive tape (adhesive connection member) 120, a connection reinforcement 140, and a dicing sheet body 30, which can cut wafers (semiconductor materials, etc.) Substrate) and singulate it into an IC chip (wafer-like) and the like. In addition, the double-sided adhesive tape 120 constitutes an adhesive connection part.

The aluminum hub (hub) 10 includes, for example, an outer peripheral wall portion located on one side of the axis O1 direction and formed in a cylindrical shape, and a cutting blade attachment portion connected to the other side of the outer peripheral wall portion in the axis O1 direction and having a substantially truncated cone. 11. And a drive source connecting portion 12 connected to the other side of the cutting blade mounting portion 11 in the direction of the axis O1 and having an enlarged diameter on the other side. In addition, in the aluminum hub 10, the dicing blade mounting surface 10A is formed on one side in the axis O1 direction of the dicing blade mounting portion 11, and a cylindrical mounting hole 10H centered on the axis O1 is formed around the axis O1.

In this embodiment, the aluminum hub 10 is formed with a maximum outer diameter of 55.4 mm, for example.

In addition, the aluminum hub 10 is formed of, for example, an aluminum alloy (for example, a specific strength of 222 kN·m/kg). The material of the aluminum alloy can be appropriately set, and for example, A2017, A5083, A7075 (JIS standard), etc. are preferable.

In addition, the aluminum hub 10 may be formed of, for example, aluminum.

In addition, as a material other than aluminum or aluminum alloy, the wheel hub 10 may be formed of, for example, magnesium or magnesium alloy, titanium alloy or pure titanium (Ti) (JIS 1 type, etc.), or plastic.

The magnesium alloy is preferably, for example, MB3 (Mg-8.4% Al-0.6% Zn-0.25% Mn), MB5 (Mg-3.3% Zn-0.6% Zr), MB6 (Mg-5.5% Zn-0.6% Zr) Wait.

In addition, the hub 10 may also be formed of pure magnesium.

As the titanium alloy, for example, αβ alloy (Ti-6 Al-6 V-2 Sn, Ti-6 Al-4 V, etc.), β alloy (Ti-3 Al-8 V-6 Cr-4 Zr-4 Mo, Ti-10 V-2 Fe-3 Al, Ti-15 V-3 Cr-3 Sn-3Al, etc.).

In addition, pure titanium (Ti) (JIS 1 type, etc.) may also be used.

Regarding the type of plastic, it can be appropriately set from engineering plastics, fiber reinforced plastics, and general engineering plastics depending on the object to be cut. For example, the specific strength is preferably 40kN. Above m/kg, the specific strength is more preferably 50kN. m/kg or more. In addition, the Izod impact strength is preferably 2.0 (kJ/m ² ) or more.

In addition, it is more preferable to use polycarbonate (specific strength of 52.5 kN·m/kg, specific strength of aluminum alloy about 25.2 kN·m/kg).

In addition, as engineering plastics, for example, nylon (registered trademark) such as nylon 6 (PA6) and nylon 66 (PA66), polyacetal (POM), polyethylene terephthalate (PET), and ultra high Molecular polyethylene (U-PE), polyether ether ketone (PEEK) (registered trademark), polyphenylene sulfide (PPS) (registered trademark), polyether imide (PEI) (registered trademark), Teflon (registered trademark) PTFE) (registered trademark), polychlorotrifluoroethylene (PCTFE) (registered trademark); as fiber reinforced plastic, for example, carbon fiber reinforced plastic (CFRP), glass fiber reinforced plastic (GFRP) are preferred; as general-purpose plastic, such as Preferred are acrylic, acrylonitrile-butadiene-styrene (ABS) and the like.

The dicing sheet mounting surface 10A is preferably polished, for example, so that the area where the double-sided adhesive tape 120 is attached is _{a smooth processed surface with a surface roughness R max} of 0 μm to 20 μm (JIS B0601-1982). Attach double-sided adhesive tape 120.

In addition, in the dicing sheet mounting surface 10A, a reinforcement holding portion 10B is formed in an area corresponding to the connection reinforcement portion 140 on the outer peripheral side (outer side) of the double-sided adhesive tape 120 in the diameter direction, and is formed on the inner circumference of the double-sided adhesive tape 120 The area corresponding to the side (inside) connection reinforcement portion 140 forms a reinforcement holding portion 10C.

The reinforcement holding parts 10B and 10C are formed by sand blasting or shot blasting to form a surface roughness R _max of 5 μm-50 μm, which is suitable for fixing the connection reinforcement part 140.

In addition, whether to form the reinforcement holding portions 10B, 10C, and the surface roughness, etc., can be arbitrarily set.

As shown in FIGS. 2 to 4, the double-sided adhesive tape (double-sided adhesive member) 120 includes, for example, a tape base material 121, and an adhesive that is coated on the dicing sheet mounting surface 10A side of the tape base material 121 to form the adhesive surface 120A 122, and an adhesive 123 applied to the surface on the connecting surface 30T side of the dicing sheet body 30 to form the adhesive surface 120B.

In addition, the double-sided adhesive tape 120 has an outer diameter smaller than the outer diameter of the aluminum hub 10 and a circular hole 120H formed with a diameter larger than the mounting hole 30H of the dicing blade body 30 on the inner peripheral side.

In addition, the outer diameter, thickness (for example, 0.1 mm or less), elastic coefficient, holding force (adhesive force), etc. of the double-sided adhesive tape 120 are preferably, for example, to maintain the flatness of the dicing sheet body 30 (right angle with respect to the axis O1). ), and the cutting blade body 30 is not damaged due to the torsional deformation caused by the cutting torque during the cutting of the hub-shaped cutting blade 100.

In addition, the double-sided adhesive tape 120 preferably has conductivity.

In this embodiment, the tape substrate 121 is composed of, for example, an aluminum foil with a thickness of 25 μm, and the adhesives 122 and 123 with adhesive properties are composed of acrylic resin mixed with conductive particles. The thickness of the double-sided adhesive tape 120 is 85 μm. . In addition, the electrical resistance between the aluminum hub 10 and the cutting blade body 30 is about 4.5Ω.

In addition, whether the double-sided adhesive tape 120 has conductivity can be arbitrarily set.

As a double-sided adhesive tape having a tape base material and having conductivity, for example, AL-25DC (trade name, manufactured by 3M Co., Ltd.) or AL7620 (trade name, manufactured by Dexerials Co., Ltd.) can be applied. In addition, 7848YCWB (trade name, manufactured by Sekisui Chemical Industry Co., Ltd.) or 7840YCWB (trade name, manufactured by Sekisui Chemical Industry Co., Ltd.), etc. can also be applied.

In addition, X-7001 (trade name, manufactured by Japan 3M Co., Ltd.) can also be used with a folded conductive fabric as a base material, or a non-woven fabric such as 9720S (trade name, manufactured by Japan 3M Co., Ltd.) As a base material.

In addition, as a non-conductive one, #8602TNFW-05 (trade name, manufactured by DIC Co., Ltd.), etc. can also be applied.

In addition, the dicing blade body 30 includes, for example, a metal base material 31 composed of an alloy mainly composed of nickel (Ni) or a nickel alloy, and diamond superabrasive grains (abrasive grains) 32 dispersed in the metal base material 31.

In addition, the dicing blade body 30 has, for example, a circular plate shape having an outer diameter of 55.05 mm and a blade thickness of 0.015 mm to 0.04 mm (for example, 20 μm), and a circular hole 30H having a diameter of 42.00 mm is formed on the inner circumference side coaxially with the axis O1.

In addition, as an alloy containing nickel as a main component, for example, nickel-phosphorus (Ni-P), nickel-cobalt (Ni-Co), and nickel-boron (Ni-B) are preferably used.

In addition, the diamond superabrasive grains 32 are composed of diamonds of 3 μm to 10 μm (average particle diameter of 5 μm) and a concentration of 50 to 125, for example, and are exposed from the surface of the metal base material 31 by about 2 μm.

Regarding the dicing sheet body 30, one side is an exposed surface 30F that is located opposite to the aluminum hub 10 and is exposed to the outside, and the other side is a connection surface 30T that is connected to the aluminum hub 10 via a double-sided adhesive tape 120.

The connection surface 30T, for example, the diamond super abrasive grain 32 does not protrude from the surface of the metal base material 31 and is formed as a flat surface.

On the exposed surface 30F and the outer peripheral side of the dicing blade body 30, the protrusions and the circular holes 30H protruding from the aluminum hub 10 are configured to expose the diamond superabrasive grains 32 from the metal base material 31.

In addition, in this embodiment, on the outer periphery of the dicing blade body 30, there are chamfered prominent portions 30G formed on both sides.

In addition, the connection surface 30T is formed with a reinforcement holding portion 30B corresponding to the connection reinforcement portion 140 in the area on the outer circumference side of the double-sided adhesive tape 120, and is formed in the area on the inner circumference side of the double-sided adhesive tape 120 corresponding to the connection reinforcement portion 140的reinforcement holding portion 30C.

The surface roughness of the reinforcement holding portions 30B and 30C can be appropriately set. For example, when the diamond super abrasive grains 32 are exposed from the surface of the metal base material 31 by etching or the like, it is preferable to stabilize the fixation of the connection reinforcement portion 140.

As shown in FIGS. 2 to 4, the connection reinforcing portion 140 includes, for example, an outer circumferential side connection reinforcing portion 141 formed on the outer circumferential side of the double-sided adhesive tape 120, and an inner circumferential side of the circular hole 30H formed on the double-sided adhesive tape 120 The inner peripheral side of the connector is connected to the reinforcing portion 142.

The outer peripheral side connection reinforcing portion 141 connects the dicing sheet mounting surface 10A and the connecting surface 30T over the entire circumference of the outer peripheral side of the double-sided adhesive tape 120.

The inner peripheral side connection reinforcing portion 142 connects the dicing sheet mounting surface 10A and the connecting surface 30T over the entire inner peripheral side of the double-sided adhesive tape 120.

As a result, the connection reinforcing portion 140 liquid tightly seals the outer peripheral side and the inner peripheral side of the double-sided adhesive tape 120.

The connection reinforcement part 140 is an adhesive resin part formed by curing an adhesive, and in this embodiment, it is formed by curing an ultraviolet curing adhesive (preferably a delayed ultraviolet curing adhesive). In addition, as the adhesive constituting the connection reinforcement portion 140, for example, an adhesive that cures with time, a photocurable adhesive represented by an ultraviolet curing adhesive, a thermosetting resin, and an anaerobic resin can be suitably used.

In addition, it is preferable to have conductivity, and when the double-sided adhesive tape 120 does not have conductivity, it is more preferable to have conductivity.

In addition, as the adhesive constituting the connection reinforcement portion 140, an ultraviolet curing adhesive is preferable, and a delayed ultraviolet curing adhesive (ultraviolet curing adhesive (delayed curing type)) is more preferable.

Delayed ultraviolet curing adhesives are not conductive. For example, AUV-8800, AUV-0082P (trade name, manufactured by Nitta Gel Co., Ltd.), CV7831 (trade name, manufactured by Matsushita Co., Ltd.), SX-UV200 can be used. (Trade name, manufactured by CEMEDINE Co., Ltd.), etc.

In addition, as an ultraviolet curable adhesive that does not have electrical conductivity, for example, U-1542N (trade name, manufactured by Chemical Technology Co., Ltd.), U-1542F (trade name, manufactured by Chemical Technology Co., Ltd.), and 429-GEL ( Trade name, manufactured by Diamax Co., Ltd.), etc.

In addition, as a conductive adhesive, for example, CN-3160L, CN-7120 (trade name, manufactured by Kaken Technology Co., Ltd.), TB3351C (trade name, manufactured by ThreeBond Co., Ltd.), and epoxy resin can be mixed ThreeBond3380 (trade name, manufactured by ThreeBond Co., Ltd.) made of silver (Ag)-based fillers is diluted with a solvent (for example, ethyl acetate) and used.

In addition, as a non-conductive adhesive, there are, for example, cyanoacrylate-based instant adhesives (for example, ALTECO CN2 (trade name, manufactured by ALTECO Co., Ltd.), ALTECO CN4 (trade name, manufactured by ALTECO Co., Ltd.), Cemedine 3000DXF (trade name, manufactured by CEMEDINE Co., Ltd.), Cemedine 3000DXLL (trade name, manufactured by CEMEDINE Co., Ltd.), Cemedine 3000DXL (trade name, manufactured by CEMEDINE Co., Ltd.), Aron Alpha EXTRA impact (trade name, Toagosei Co., Ltd.) Co., Ltd.), Aron Alpha EXTRA4000 (trade name, manufactured by Toagosei Co., Ltd.), etc.

In addition, in the case of applying a non-conductive adhesive, for example, gold (Au), silver (Ag) and other metals represented by MicroPearl AU-201 (trade name, Sekisui Chemical Industry Co., Ltd.) are coated ( coating) Conductive particles (for example, a particle size of 10μm) formed on particles are mixed with epoxy-based adhesives or acrylic-based adhesives, coated and cured, so that the hub 310 and the dicing blade body 330 can also be formed through the conductive particles power ups.

Next, the outline of the manufacturing steps of the hub-shaped cutting blade of the first embodiment will be described with reference to FIGS. 5 to 7. Fig. 5 is a flowchart illustrating an example of the outline of the manufacturing procedure of the hub-shaped dicing blade of the first embodiment.

As shown in Figure 5, the manufacturing steps of the hub-type cutting blade are, for example, installing separately manufactured and inspected aluminum hubs (hubs) and cutting blade raw materials (cutting blade body) (S11), outer diameter processing (S12), and cutting machine Finishing (S13), inspection (S14).

First, an example of preparation of an aluminum hub will be described.

The aluminum hub (wheel hub) is manufactured (prepared) according to the following steps, for example.

(1) First, a round bar of aluminum alloy is rotated around the axis and cut to form a shape.

(2) Then, it is formed into the shape of an aluminum hub and cut to a predetermined length in the axial direction.

(3) Next, if necessary, pre-treat the mounting surface of the dicing sheet.

In the pretreatment, for example, when the dicing sheet mounting surface 10A is formed to have a surface roughness R _max of 0 μm to 20 μm, polishing processing or electric discharge processing is performed. In addition, when the formed titanium hub is cut, it can also be cut so as to have a predetermined surface roughness.

In addition, when the surface roughness R _{max of the} connection reinforcement holding parts 10B and 10C is formed to be 5 μm to 50 μm, it is preferable to perform sandblasting or bead blasting.

The dicing sheet mounting surface 10A is preferably such that the adhesive surface 120A of the double-sided adhesive tape 120 is sufficiently connected, for example, the surface roughness R _{max is} formed to be 0 μm to 20 μm.

In addition, if necessary, the adhesive constituting the connection reinforcement portion 140 is preferably implemented by sandblasting or bead blasting so that the dicing sheet mounting surface 10A is sufficiently bonded to form the surface roughness R _{max of the} connection reinforcement holding portions 10B, 10C to 5 μm~ 50μm.

Next, referring to FIG. 6, an example of the preparation of the dicing sheet material will be described. Fig. 6 is a flowchart illustrating the outline of the procedure for manufacturing the dicing sheet material.

As shown in FIG. 6, the preparation of the dicing sheet material includes, for example, preparation of SUS base metal (S21), dispersion plating (S22), masking (S23), etching (S24), and inner diameter processing (S25). Then, through the preparation of the SUS base metal (S21) to the inner diameter processing (S25), the dicing sheet material is completed.

(1) Preparation of SUS base metal (S21)

First, a SUS base metal (a base metal made of stainless steel) suitable for forming the raw material of the dicing sheet is prepared.

The SUS base metal (stainless steel base metal) is formed of, for example, a stainless steel disc, and the nickel plating surface is preferably mirror-finished.

At this time, it is preferable to shield unnecessary parts such as the parts corresponding to the circular holes 30H of the raw material of the dicing sheet and the nickel plating.

(2) Disperse plating step (S22)

Then, the original plate of the dicing sheet material is formed by dispersion plating.

Dispersion plating is to dispose SUS base metal in a nickel plating solution containing diamond superabrasive grains stored in a dispersion plating device, so that the plating surface of the SUS base metal is grown by electrolytic plating to form a dispersed nickel layer. Form the original plate of the raw material of the cut sheet.

(3) Shading (S23)

Next, in the original plate of the dicing sheet material peeled from the SUS base metal, the parts unnecessary for the etching process are masked.

In this embodiment, the flat surface on the side where the nickel plating is formed is shielded. This surface becomes the connecting surface 30T of the dicing blade body 30. In addition, the reinforcement holding parts 30B and 30C may be removed and shielded.

(4) Etching (S24)

Then, the original plate of the raw material of the dicing sheet with the shielding is reversely electrolytically etched to dissolve nickel from the metal base material, and the diamond superabrasive grains are exposed and become obvious.

(5) Inside diameter processing (S25)

Next, the original plate of the dicing sheet material that has been significantly processed in the etching step is subjected to inner diameter processing to form the dicing sheet material.

The inner diameter is processed by irradiating a laser beam while supplying liquid (for example, water) to process the circular hole 30H to form a dicing sheet material. The inner diameter processing is the same as the outer diameter processing described later.

After the above S21~S25, the raw material of the cutting chip is completed by satisfying the quality inspection.

In addition, the steps of S21 to S25 are shown as an example, and can be changed or omitted as appropriate.

Next, referring to FIG. 5 and FIG. 7, the outline of the manufacturing steps of the hub-shaped cutting blade of the first embodiment will be described. Fig. 7 is a flowchart illustrating the outline of the steps of the dicing blade mounting step of the first embodiment.

As shown in FIG. 5, the manufacturing steps of the hub-shaped cutting blade include, for example, a cutting blade mounting step (S11), an outer diameter processing step (S12), a cutting machine trimming step (S13), and an inspection step (S14). Then, the separately manufactured aluminum hub (hub) and the raw material of the cutting blade (the body of the cutting blade) are installed in the cutting blade installation step, and the outer diameter processing, cutting machine trimming and inspection steps are performed to complete the hub-shaped cutting blade.

〔1〕Installation steps of cutting discs (S11)

The cutting blade installation step is for separately manufactured and separately inspected aluminum hubs (hubs) and cutting blade raw materials (cutting blade body), connect the adhesive connecting member with at least one of the adhesive surfaces to any of the cutting blade mounting surface and the connecting surface. One, the adhesive connecting member is connected to the other of the cutting blade mounting surface and the connecting surface by adhesive connection or bonding, and the hub and the cutting blade body are installed. At this time, after the adhesive connecting member is connected to the dicing blade mounting surface or the connecting surface until the hub and the dicing blade body are connected, or after the hub and the dicing blade body are connected, by connecting the adhesive connecting member on the outer peripheral side and the inner peripheral side At least any one of the sides is provided with an adhesive and hardened to form a connection reinforcement part. In addition, a part of the connection reinforcement portion may also be formed before the adhesive connection member is connected to the mounting surface or the connection surface of the dicing sheet.

The dicing sheet mounting step is composed of, for example, the steps of S101 to S104 shown in FIG. 7.

(1) Paste double-sided adhesive tape on the wheel hub (S101)

First, stick a double-sided adhesive tape on the mounting surface of the aluminum wheel dicing sheet.

When sticking the double-sided adhesive tape 120 on the dicing sheet mounting surface 10A of the aluminum hub 10, prepare a doughnut-shaped double-sided adhesive tape 120 in advance. For example, use a jig to rotate the double-sided adhesive tape 120 and the aluminum hub 10 The axis O1 is coaxial and adheres to the cutting blade mounting surface 10A.

(2) Coating and reinforcing adhesive (S102)

As shown in FIG. 8, the application of the adhesive, for example, makes the aluminum hub (semi-finished product) connected (attached) with double-sided adhesive tape (double-sided adhesive member) 120 vertical, and rotates around the axis O1, and the double-sided adhesive tape 120 is attached. The liquid adhesive 140L is supplied from the adhesive supply device 40 to the outer and inner peripheral sides of the slab, and is applied over the entire circumference in the circumferential direction. The dicing sheet body (dicing sheet material) 30 shown by a dotted chain line in FIG. 8 shows before the dicing sheet material is installed.

In the first embodiment, the adhesive is applied to the outer and inner sides of the double-sided adhesive tape 120.

(3) Connect the cutting disc material to the hub (S103)

Then, the raw material of the cutting disc is pasted on the aluminum wheel hub.

When installing (adhering) the cutting disc material to the aluminum hub, for example, arranging the cutting disc material on a flat platform, and using a jig to make the axis of the aluminum hub and the circular hole of the cutting disc material coaxial. Then, press the aluminum hub with double-sided adhesive tape on the dicing sheet material to connect.

(4) Hardening of the reinforcing adhesive (S104)

Then, the reinforcing adhesive is hardened to form a connection reinforcing part.

In the case of using a delayed ultraviolet curable adhesive as the adhesive, the coated delayed ultraviolet curable adhesive is irradiated with ultraviolet rays to cure it. The time from irradiating ultraviolet rays to curing is preferably within 30 seconds, for example.

Follow the steps from S101 to S104 to complete the cutting sheet installation product (semi-finished product).

In addition, the steps of S101 to S104 are shown as an example, and can be changed or omitted as appropriate.

Hereinafter, the outer diameter processing step (S12), the cutting machine trimming step (S13), and the inspection step (S14) will be described with reference to FIG. 5

〔2〕Outer diameter processing step (S12)

In the outer diameter processing step, outer diameter processing is performed on the raw material of the cut-off piece mounted on the aluminum hub.

In addition, in the outer diameter processing step, for example, the semi-finished product made by adhering the raw material of the cutting sheet to the aluminum hub rotates around the axis O1, and the processing part is supplied with liquid (for example, water) for cooling, while the laser beam is irradiated to the cutting sheet. The outer periphery of the body is cut.

In this case, for example, it is preferable to form a jet water column (jet liquid column) at the processing part, and to guide the laser beam to the processing part while reflecting the laser beam in the jet water column.

In this case, it is more preferable to make the jet water column as a laminar flow without unevenness as much as possible, and to totally reflect the laser beam. In addition, the wavelength of the laser beam is preferably 200 nm to 700 nm, for example.

In addition, the laser beam can be irradiated without water supply, and other well-known processing methods such as electric discharge machining or grinding can be used instead of laser beam processing to perform outer diameter processing.

[3] Cutting machine trimming steps (S13)

In the trimming step of the cutting machine, the semi-finished product processed by the outer diameter is trimmed by the cutting machine (for example, cutting a dressing board) to make it obvious.

[4] Inspection procedure (S14)

In the inspection step, for example, the kerf width of the silicon wafer is inspected and the prescribed inspection specifications are inspected. If the inspection passes, the hub-shaped dicing disc is completed.

In addition, the steps of S11 to S14 are shown as an example, and can be changed or omitted as appropriate.

According to the hub-type cutting blade 100 of the first embodiment, the hub is formed of aluminum alloy, and the connection strength between the aluminum hub 10 and the cutting blade body 30 is increased by the connection reinforcing portion 140, so that it can rotate at a high speed (for example, 30,000 rpm or more) , Can cut efficiently.

According to the hub-type dicing blade 100 of the first embodiment, the adhesive connecting portion is formed by the double-sided adhesive tape 120, so that the dicing blade mounting surface 10A side of the aluminum hub 10 and the connecting surface of the dicing blade body 30 can be connected in a short time 30T for connection, and efficient manufacturing of hub-shaped cutting discs.

In addition, according to the hub-type cutting blade 100, the connecting reinforcing portion 140 connects the aluminum hub 10 and the cutting blade body 30, and the connection strength between the aluminum hub 10 and the cutting blade body 30 is increased, and cutting can be stabilized even under a large load.

In addition, according to the hub-shaped dicing sheet 100, since it is formed over the entire circumference of the outer peripheral side and the inner peripheral side of the double-sided adhesive tape 120 in the circumferential direction, the hub-type dicing sheet 100 can rotate stably.

In addition, according to the hub-shaped dicing sheet 100, the connection reinforcing portion 140 is formed by a delayed ultraviolet curing adhesive, which is easy to apply and hardens in a short time, so the connection reinforcing portion 140 can be efficiently formed.

In addition, according to the hub-shaped dicing sheet 100, the surface roughness R _{max of the} dicing sheet mounting surface 10A is formed to be 0 μm to 20 μm, and the connecting surface 30T is a flat surface. Therefore, the aluminum hub 10 can be stably mounted and cut by the double-sided adhesive tape 120.片体30。 Tablet body 30.

In addition, with the hub-shaped dicing sheet 100, since the connecting reinforcement 140 is arranged between the dicing blade mounting surface 10A and the connecting surface 30T, the surface roughness R _{max of the} reinforcement holding parts 10B, 10C is formed to be 5 μm to 50 μm, and the holding part is reinforced Since the diamond super abrasive grains 32 are exposed from the metal base material 31 in 30B and 30C, the connection reinforcement part 140 can be connected stably.

In addition, with the hub-shaped dicing sheet 100, since the connecting reinforcing part 140 seals the outer and inner peripheral sides of the adhesive connecting part 120, cutting fluid (for example, alkaline cutting fluid) and the like are prevented from entering the adhesive surface 120A of the double-sided adhesive tape 120. 120B, therefore, the deterioration of the adhesive surfaces 120A and 120B can be suppressed and the life can be extended.

In addition, even if the jet water jet is used in the outer diameter processing, the deterioration of the adhesive surfaces 120A and 120B caused by the cooling water can be suppressed, and the quality of the hub-shaped dicing blade 100 can be improved.

In addition, according to the hub-type cutting blade 100, it is possible to alleviate the sharp bending of the cutting blade main body 30 at the outer edge of the aluminum hub 10, and it is possible to suppress the cutting blade main body 30 from breaking during cutting.

According to the manufacturing method of the hub-type dicing blade of the first embodiment, since the reinforcing adhesive 140L is applied before connecting the aluminum hub 10 and the dicing blade body 30, there can be a gap between the dicing blade mounting surface 10A and the connecting surface 30T. Efficiently apply 140L of reinforcing adhesive.

In addition, according to the manufacturing method of the hub-shaped cutting blade of the first embodiment, the irradiated laser beam is guided by the jet liquid column, so that the outer diameter of the cutting blade body 30 can be processed with high precision and efficiency.

In addition, when the hub is formed of magnesium or a magnesium alloy, the specific strength of the hub becomes larger, and the number of rotations can be increased more than that of the aluminum hub. In addition, magnesium or magnesium alloy has excellent damping ability, so it is possible to suppress the occurrence of vibration and perform cutting stably.

In addition, when the hub is formed of titanium or a titanium alloy, it is lightweight and can suppress deformation due to external force during cutting, and can rotate at a high speed, so cutting can be performed efficiently.

In addition, when the hub is formed of plastic, it is light in weight and capable of high-speed rotation. In addition, various materials can be efficiently set in accordance with the object to be cut, and as a result, cutting can be performed efficiently.

In addition, when the plastic is made of polycarbonate (specific strength of 52.5kN·m/kg, specific strength of aluminum alloy is about 25.2kN·m/kg), it has sufficient specific strength to suppress cutting. Due to the deformation caused by the external force, and because it can rotate at a high speed, it can cut efficiently.

<First Embodiment (First Modification)>

Hereinafter, referring to FIG. 9, the hub-shaped cutting blade of the first modification of the first embodiment of the present invention will be described. Fig. 9 illustrates a schematic configuration of a hub-shaped cutting blade of a first modification of the first embodiment, and is a partial cross-sectional view shown by arrows Z-Z in Fig. 1.

In FIG. 9, symbol 100A represents a hub-shaped dicing sheet, symbol 125 represents a double-sided adhesive member, and symbol 140 represents a connection reinforcing part.

As shown in FIG. 9, the hub-shaped cutting blade 100A includes, for example, an aluminum hub 10, a double-sided adhesive member 125, a cutting blade body 30, and a connection reinforcing portion 140. In addition, the double-sided adhesive member 125 constitutes an adhesive connection portion.

The hub-type dicing sheet 100A is provided with a double-sided adhesive member 125 instead of the double-sided adhesive tape 120, and the aluminum hub 10, the dicing sheet body 30, and the connection reinforcement portion 140 can be the same as those of the first embodiment. In addition, with regard to the manufacturing steps, the same steps as those of the first embodiment can be applied.

The double-sided adhesive member 125 is composed of an adhesive formed in a sheet shape. A first adhesive surface 125A is formed on one surface, and a second adhesive surface 125B is formed on the other surface.

Then, a structure is formed in which the first adhesive surface 125A is connected to the dicing sheet mounting surface 10A, and the second adhesive surface 125B is connected to the connecting surface 30T.

In addition, the double-sided adhesive member 125 is preferably conductive, and for example, transfer tape 9707 (trade name, manufactured by 3M Co., Ltd.), transfer tape 9709S (trade name, manufactured by 3M Co., Ltd.), and DAITAC can be applied. #8035N (trade name, manufactured by DIC Co., Ltd.), T4420W (trade name, manufactured by Dexerials Co., Ltd.).

In addition, as a non-conductive double-sided adhesive member, for example, GA5905 (trade name, manufactured by Nitto Denko Co., Ltd.), 5915 (trade name, manufactured by Nitto Denko Co., Ltd.), DAITAC#8080 (trade name, DIC) can be applied. Co., Ltd.), 467MP (trade name, manufactured by Japan 3M Co., Ltd.).

According to the hub-shaped dicing sheet 100A of the first modification of the first embodiment, the double-sided adhesive member 125 has a configuration without a tape base material, and the elasticity of the adhesive connection portion is moderately suppressed.

As a result, the snaking of the cutting blade body 30 is suppressed, and the cutting can be performed stably.

<Second Implementation Type>

Hereinafter, referring to FIGS. 10 to 12, the hub-shaped cutting blade of the second embodiment of the present invention will be described. Fig. 10 illustrates an example of a schematic configuration of a hub-shaped cutting blade of the second embodiment of the present invention, and is a partial cross-sectional view indicated by arrows Z-Z in Fig. 1. In addition, FIG. 11 is a partial enlarged view illustrating the details of important parts of the outer peripheral side connection reinforcement portion (connection reinforcement portion) indicated by XI in FIG. 10, and FIG. 12 is a partial enlarged view illustrating the inner circumference side connection reinforcement portion ( An enlarged view of a detailed part of the important part of the connection reinforcement part.

In Figures 10 to 12, the symbol 200 represents the hub-shaped dicing sheet, the symbol 220 represents the double-sided adhesive tape (double-sided adhesive member, adhesive connection part), the symbol 240 represents the connection reinforcement part, and the symbol 241 represents the outer peripheral side connection reinforcement part ( Connection reinforcement part), and symbol 242 denotes an inner peripheral side connection reinforcement part (connection reinforcement part).

As shown in FIGS. 10 to 12, the hub-shaped cutting blade 200 includes an aluminum hub (hub) 10, a double-sided adhesive tape (double-sided adhesive member, adhesive connection part) 220, a cutting blade body 30 and a connection reinforcement part 240. In addition, the double-sided adhesive tape 220 constitutes an adhesive connection part.

_{In this embodiment, the surface roughness R max} of the dicing sheet mounting surface 10A of the aluminum hub 10 is formed to be 0 μm to 20 μm. In addition, a reinforcement holding portion 10D is formed on the outer peripheral side of the dicing blade attachment portion 11, and a reinforcement holding portion 10E is formed on the inner peripheral side of the dicing blade attachment surface 10A to hold the connection reinforcement portion 240.

The reinforcement holding portion 10D is formed on the outer peripheral surface of the dicing blade attachment portion 11.

The reinforcement holding portion 10E is formed on the inner peripheral side of the application area of the double-sided adhesive tape 220.

In addition, the surface roughness of the reinforcement holding portion 10D and the reinforcement holding portion 10E can be arbitrarily set. For example, it is preferable to set the surface roughness R _max to 5 μm-50 μm by sandblasting or bead spraying. Others are the same as the aluminum hub of the first embodiment, so the description is omitted.

As shown in FIGS. 10 to 12, the double-sided adhesive tape (double-sided adhesive member, adhesive connection portion) 220 includes, for example, a tape base material 221, and an adhesive adhesive applied to the dicing sheet mounting surface 10A side of the tape base material 221 222, and an adhesive adhesive 233 applied on the connecting surface 30T side of the tape base material 221. In addition, the adhesive adhesive 222 forms an adhesive surface 220A, and the adhesive adhesive 223 forms an adhesive surface 220B.

In addition, the outer circumference of the double-sided adhesive tape 220 has the same diameter as the aluminum hub 10, and the inner circumference is formed with a circular hole 220H having the same diameter as the circular hole 30H of the dicing blade body 30, forming a doughnut shape.

In addition, the thickness (for example, 0.1 mm or less) of the double-sided adhesive tape 220, the coefficient of elasticity, the holding force (adhesive force), the conductivity, etc. are the same as those of the first embodiment, so the description is omitted.

For example, the dicing blade body 30 extends from a position corresponding to the outer diameter of the aluminum hub 10 on the outer circumference side of the connecting surface 30T to a position corresponding to the circular hole 30H on the inner circumference side, and no diamond protrudes from the surface of the metal base material 31. The super abrasive grains 32 make it into a flat surface.

In addition, a reinforcement holding portion 30D is formed on the outer peripheral side than a position corresponding to the outer diameter of the aluminum hub 10 of the connecting surface 30T, and a reinforcement holding portion 30E is formed on the inner peripheral surface of the circular hole 30H of the dicing blade body 30. It is preferable that the reinforcement holding part 30D and the reinforcement holding part 30E expose the diamond superabrasive grains 32 from the metal base material 31. Others are the same as the dicing blade body 30 of the first embodiment, so the description is omitted.

In this embodiment, the connection reinforcing portion 240 includes, for example, an outer circumferential side connection reinforcing portion 241 formed on the outer circumferential side of the double-sided adhesive tape 220, and an inner circumferential side formed on the inner circumferential side of the circular hole 220H of the double-sided adhesive tape 220. The reinforcing part 242 is connected to the peripheral side.

The outer peripheral side connecting reinforcement portion 241 is, for example, a structure in which the reinforcement holding portion 10D of the aluminum hub 10 is connected to the reinforcement holding portion 30D of the dicing blade body 30 over the entire circumference of the double-sided adhesive tape 220.

Then, on the outer peripheral side of the double-sided adhesive tape 220, the adhesive surfaces 220A and 220B are sealed to be liquid-tight.

The inner peripheral side connection reinforcement portion 242 is, for example, over the entire inner circumference of the double-sided adhesive tape 220, and the reinforcement holding portion 30E is connected from the reinforcement holding portion 10E of the aluminum hub 10 via the circular hole 220H.

Then, on the inner peripheral side of the double-sided adhesive tape 220, the adhesive surfaces 220A and 220B are sealed to be liquid-tight.

In addition, the connection reinforcing part 240 is an adhesive resin part formed by curing an adhesive, and the same as the first embodiment can be applied.

Next, the outline of the manufacturing steps of the hub-shaped dicing sheet of the second embodiment will be described with reference to FIG. 13, FIG. 14(A), and FIG. 14(B).

Fig. 13 is a flowchart illustrating the outline of the dicing blade mounting procedure of the second embodiment. 14(A) and 14(B) are conceptual diagrams explaining the application of the reinforcing adhesive in the dicing sheet mounting step.

The manufacturing steps of the hub-shaped dicing blade of the second embodiment apply the steps (S201 to S204) shown in FIG. 13 instead of the steps (S101 to S104) of the dicing blade mounting step (S11) of the first embodiment. Others are the same as the first embodiment, so the description is omitted.

As shown in FIG. 13, the cutting blade installation step of the second embodiment is composed of, for example, the steps of S201 to S204.

(1) Paste the double-sided adhesive tape on the wheel hub (S201)

(2) Connect the cutting disc material to the hub (S202)

Regarding S201 and S202, the same steps as S101 and S103 of the first embodiment can be applied.

(3) Coating and reinforcing adhesive (S203)

Then, a reinforcing adhesive is applied to the outer peripheral side and the inner peripheral side of the semi-finished product obtained by connecting the dicing sheet material (the dicing sheet body) 30 to the aluminum hub 10.

The application of the reinforcing adhesive can be performed, for example, as shown in Figs. 14(A) and 14(B). Fig. 14(A) and Fig. 14(B) are conceptual diagrams explaining the application of the reinforcing adhesive in the dicing sheet mounting step.

As shown in FIG. 14(A), the application of the reinforcing adhesive forming the outer peripheral side connection reinforcing portion 241, for example, places the semi-finished aluminum hub 10 side on the upper side, and rotates the axis O1 with an inclination with respect to the vertical direction, and is supplied from the adhesive The device 40 supplies 240L of reinforcing adhesive to the outer peripheral side of the double-sided adhesive tape 220 over the entire circumference.

In addition, as shown in FIG. 14(B), the application of the reinforcing adhesive that forms the inner peripheral side connection reinforcing portion 242, for example, rotates the semi-finished dicing sheet body 30 on the upper side, and the axis O1 is inclined with respect to the vertical direction. The reinforcing adhesive 240L is supplied from the adhesive supply device 40 to the entire inner circumference of the double-sided adhesive tape 220.

Hardening of reinforcing adhesive (S204)

The reinforcing adhesive is hardened to form a connection reinforcing part.

The hardening of the reinforcing adhesive (S204) is the same as in the first embodiment, so the description is omitted.

Complete the cutting sheet installation product (semi-finished product) through the steps of S201~S204.

In addition, the steps of S201 to S204 are shown as an example, and can be changed or omitted as appropriate.

According to the hub-type cutting blade 200 of the second embodiment, the connecting reinforcement portion 240 connects the aluminum hub 10 and the cutting blade body 30, so the connection strength between the aluminum hub 10 and the cutting blade body 30 can be increased.

In addition, according to the hub-shaped dicing sheet 200, the surface roughness R _{max of the} reinforcement holding parts 10D, 10E is formed to be 5 μm to 50 μm, and the reinforcement holding parts 30D, 30E expose the diamond super abrasive grains 32, so that the connection reinforcement 240 can be connected stably In the aluminum hub 10 and the cutting blade body 30.

In addition, the double-sided adhesive tape 220 is connected to the outer peripheral side by connecting the reinforcing part 240.

In addition, according to the manufacturing method of the hub-shaped cutting blade of the second embodiment, since the connecting reinforcement portion 240 is formed after connecting the aluminum hub 10 and the cutting blade body 30, the hub-shaped cutting blade 200 can be efficiently manufactured.

In addition, according to the hub-type dicing blade 200, the dicing blade body 30 can be relieved from abrupt bending of the dicing blade body 30 at the outer edge of the aluminum hub 10, and the dicing blade body 30 can be prevented from breaking during cutting.

In addition, according to the hub-shaped dicing sheet 200, the connection reinforcing portion 240 is formed by a delayed ultraviolet curing adhesive, which is easy to apply and hardens in a short time, so the connection reinforcing portion 240 can be formed efficiently.

<Third Implementation Type>

Hereinafter, referring to FIGS. 15 to 17, the hub-shaped cutting blade of the third embodiment of the present invention will be described. Fig. 15 is a partially enlarged view for explaining the outline of the outer peripheral side connection and reinforcement portion of the hub-type dicing blade of the third embodiment, and Fig. 16 is a partially enlarged view for explaining the outline of the inner peripheral side connection and reinforcement portion. In FIGS. 15 and 16, the symbol 300 indicates a hub-shaped dicing sheet, the symbol 10 indicates an aluminum hub, the symbol 320 indicates a double-sided adhesive tape, the symbol 30 indicates the dicing sheet body, and the symbol 340 indicates a connection reinforcing part.

As shown in FIG. 15 and FIG. 16, the hub-type cutting blade 300 includes, for example, an aluminum hub 10, a double-sided adhesive tape (adhesive connection member, adhesive connection part) 320, a cutting blade body 30 and a connection reinforcement part 340. In addition, the double-sided adhesive tape 320 constitutes an adhesive connection part.

In addition, the aluminum hub 10 and the cutting blade body 30 are the same as those of the first embodiment, so the same reference numerals are assigned and the description is omitted.

In addition, the wheel hub 10 may also be formed of materials other than aluminum or aluminum alloy, such as magnesium or magnesium alloy, titanium or titanium alloy, or plastic. The plastic can also be polycarbonate.

As shown in FIG. 15 and FIG. 16, the double-sided adhesive tape (adhesive connection member) 320 includes, for example, a tape base material 321, an adhesive 322 applied to the dicing sheet mounting surface 10A side of the tape base material 321, and a dicing sheet body Adhesive 323 on the connecting surface 30T side on the 30 side. In addition, the adhesive 322 forms the adhesive surface 320A, and the adhesive 323 forms the adhesive surface 320B.

The tape base material 321 is configured, for example, in the shape of a doughnut whose outer circumference is the same diameter as the outer diameter of the aluminum hub 10 and a circular hole 320H having the same diameter as the mounting hole 30H of the dicing blade body 30 is formed on the inner circumference side.

The adhesives 322 and 323 are formed to be smaller than the diameter of the tape base material 321 on the outer peripheral side, and are formed to be larger than the diameter of the circular hole 320H on the inner peripheral side.

In addition, the thickness (for example, 0.1 mm or less) of the double-sided adhesive tape 320, the coefficient of elasticity, the holding force (adhesive force), etc., the conductivity, etc. are the same as those of the first embodiment, so the description is omitted.

The connection reinforcement portion 340 includes, for example, an outer circumferential side connection reinforcement portion 341 formed on the outer circumferential side of the double-sided adhesive tape 320 and an inner circumferential side connection reinforcement portion 342 formed on the inner circumferential side of the double-sided adhesive tape 320.

The connection reinforcing part 340 is an adhesive resin part formed by curing an adhesive, and the same as the first embodiment can be used.

The outer peripheral side connection reinforcement portion 341 includes, for example, a connection reinforcement portion 341A that connects the tape base material 321 and the dicing sheet mounting surface 10A, and a connection reinforcement portion 341B that connects the tape base material 321 and the connection surface 30T.

The inner peripheral side connection reinforcement portion 342 includes, for example, a connection reinforcement portion 342A that connects the tape base material 321 and the dicing blade mounting surface 10A, and a connection reinforcement portion 342B that connects the tape base material 321 and the connection surface 30T.

In addition, the connection reinforcing portion 340 seals the adhesive surface 320A and the adhesive surface 320B to be liquid-tight at the inner peripheral side and the outer peripheral side edge of the double-sided adhesive tape 320. Others are the same as the first embodiment, so the description is omitted.

Next, referring to FIG. 17, the outline of the manufacturing steps of the hub-shaped cutting blade of the third embodiment will be described. Fig. 17 is a flowchart illustrating the outline of the steps of the dicing blade mounting procedure of the third embodiment.

In the manufacturing steps of the hub-shaped dicing blade of the third embodiment, the steps shown in Fig. 17 (S301~S305) are used instead of the steps (S101~S104) of the dicing blade installation step (S11) of the first embodiment. . Otherwise, the same steps as the first embodiment can be applied.

As shown in FIG. 17, the dicing blade installation step of the third embodiment is composed of, for example, the steps of S301 to S305.

(1) Apply a reinforcing adhesive to the target area of the double-sided adhesive tape (S301)

The area corresponding to the connection reinforcement portions 341A and 342A on the side of the dicing sheet mounting surface 10A of the double-sided adhesive tape 320 is coated with a reinforcement adhesive. In addition, it is also possible to apply the reinforcing adhesive to the area corresponding to the connection reinforcing parts 341A and 342A of the dicing sheet mounting surface 10A (without double-sided adhesive tape) by the same steps as in the first embodiment, instead of applying the reinforcing adhesive. The reinforcing adhesive is applied to the double-sided adhesive tape.

(2) Adhere double-sided adhesive tape and deploy adhesive to the wheel hub (S302)

Stick double-sided adhesive tape 320 to the hub. Thereby, the adhesive which forms the connection reinforcement part 341A, 342A is arrange|positioned between the tape base material 321 and the dicing sheet attachment surface 10A.

S302 is the same as S101 of the first embodiment, so the description is omitted.

(3) Coating and reinforcing adhesive (S303)

The area corresponding to the connection reinforcing portions 341B and 342B on the connection surface 30T side of the double-sided adhesive tape 320 in S303 is coated with a reinforcing adhesive. The application of the reinforcing adhesive can apply the same steps as in the first embodiment.

(4) Connect the cutting disc material to the hub (S304)

(5) Hardening of the reinforcing adhesive (S305)

Regarding S304 and S305, the same steps as S103 and S104 of the first embodiment can be applied.

Follow the steps of S301~S305 to complete the cut-off piece installation product (semi-finished product).

In addition, the steps of S301 to S305 are an example, and can be changed or omitted as appropriate.

According to the hub-shaped dicing sheet 300 of the third embodiment, the adhesives 322 and 323 constituting the double-sided adhesive tape 320 are sealed by the outer peripheral side connection reinforcement part 341 and the inner peripheral side connection reinforcement part 342, so the adhesive can be suppressed Deterioration of 322, 323.

<Fourth Implementation Type>

Hereinafter, referring to FIG. 18, the hub-shaped cutting blade of the fourth embodiment of the present invention will be described. Fig. 18 is a partial cross-sectional view illustrating the schematic configuration of the hub-shaped cutting blade of the fourth embodiment and indicated by arrows Z-Z in Fig. 1.

In FIG. 18, the symbol 400 represents a hub-shaped dicing sheet, the symbol 10 represents an aluminum hub, the symbol 42 represents an adhesive connection part, the symbol 420 represents an adhesive tape, the symbol 422 represents an adhesive resin part, and the symbol 440 represents a connection reinforcement part.

As shown in FIG. 18, the hub-shaped cutting blade 400 includes, for example, an aluminum hub 10, an adhesive connecting portion 42, a cutting blade body 30 and a connecting reinforcing portion 440.

Then, the aluminum hub 10 and the cutting blade body 30 are connected via the adhesive connection portion 42 and the connection reinforcement portion 440.

In addition, the adhesive connecting portion 42 includes an adhesive resin portion 422 and an adhesive tape 420. The adhesive resin portion 422 and the adhesive tape 420 are arranged in the order from the dicing sheet mounting surface 10A, and the adhesive tape 420 is connected to the connecting surface 30T.

The dicing blade body 30 is the same as the first embodiment, so the description is omitted.

The aluminum hub 10 is provided with an adhesive resin part 422 on the dicing sheet mounting surface 10A, and is connected to the adhesive tape 420 via the adhesive resin part 422.

In addition, for the aluminum hub 10, it is preferable that, for example, the surface roughness R _{max of the} dicing sheet mounting surface 10A is formed to be 5 μm to 50 μm (JIS B0601-1982). Others are the same as the first embodiment, so the description is omitted.

In addition, the wheel hub 10 may also be formed of materials other than aluminum or aluminum alloy, such as magnesium or magnesium alloy, titanium or titanium alloy, or plastic. The plastic can also be polycarbonate.

In addition, as shown in FIG. 18, the adhesive tape 420 includes, for example, a tape substrate 421 and an adhesive 423 applied on the connecting surface 30T side of the tape substrate 421. The surface of the adhesive 423 is a single-sided adhesive tape that becomes the adhesive surface 420S. . Then, the adhesive 423 is connected to the connection surface 30T.

In addition, the outer circumferential side of the adhesive tape 420 is smaller than the outer diameter of the dicing blade mounting surface 10A, and a circular hole 420H having a diameter larger than the circular hole 30H of the dicing blade body 30 is formed on the inner circumferential side, which is doughnut-shaped.

The tape substrate 421 and the adhesive 423 constituting the adhesive tape 420 may also have the same configuration as the tape substrate 121 and the adhesive 123 of the adhesive tape 120 of the first embodiment. In addition, the tape base material 421 is preferably such that the adhesive constituting the adhesive resin portion 422 is stably fixed. Other than that the adhesive is single-sided, it is the same as the first embodiment, so the description is omitted.

In addition, the outer diameter, thickness (for example, 0.1 mm or less), coefficient of elasticity, retention (adhesion), and conductivity of the adhesive tape 420 are approximately the same as those of the double-sided adhesive tape of the first embodiment, so the description is omitted.

The adhesive resin portion 422 is formed on the dicing blade mounting surface 10A, and is formed by curing, for example, an adhesive mainly composed of epoxy resin or cyanoacrylate resin, or an acrylic resin-based adhesive. In addition, it is possible to arbitrarily set whether the adhesive resin portion 423 has conductivity, but it is preferable to have conductivity.

In addition, the adhesive resin portion 422 preferably maintains the flatness of the dicing blade body 30, such as the coefficient of elasticity, holding force (adhesive force), etc., so that the torsional deformation caused by the cutting torque during cutting does not cause damage to the dicing blade body 30. Settings.

As the conductive adhesive, for example, CN-3160L, CN-7120 (trade name, manufactured by Kaken Technology Co., Ltd.), TB3351C (trade name, manufactured by ThreeBond Co., Ltd.), and epoxy resin mixed with silver ( ThreeBond3380 (trade name, manufactured by ThreeBond Co., Ltd.) etc. made of Ag)-based fillers are diluted with a solvent (for example, ethyl acetate) and used.

In addition, as a non-conductive adhesive, for example, ultraviolet curing adhesive (delayed curing type) (for example, AUV-8800, AUV-0082P (trade name, manufactured by Nitta Gel Co., Ltd.), CV7831 (product Name, manufactured by Panasonic Corporation), SX-UV300 (trade name, manufactured by CEMEDINE Co., Ltd.), or cyanoacrylate-based instant adhesive (for example, ALTECO CN2 (trade name, manufactured by ALTECO Co., Ltd.), ALTECO CN4 (trade name, manufactured by ALTECO Co., Ltd.), Cemedine 3000DXF (trade name, manufactured by CEMEDINE Co., Ltd.), Cemedine 3000DXLL (trade name, manufactured by CEMEDINE Co., Ltd.), Cemedine 3000DXL (trade name, manufactured by CEMEDINE Co., Ltd.) , Aron Alpha EXTRA impact (trade name, manufactured by Toagosei Co., Ltd.), Aron Alpha EXTRA4000 (trade name, manufactured by Toagosei Co., Ltd.)).

The connection reinforcement portion 440 includes an outer circumference side connection reinforcement portion 441 and an inner circumference side connection reinforcement portion 442. As shown in FIG.

The outer peripheral side connection reinforcement portion 441 is formed over the entire circumference of the adhesive connection portion 42 and connects the dicing blade mounting surface 10A and the connection surface 30T.

In addition, the inner circumferential side connection reinforcing portion 442 is formed over the entire inner circumferential side of the adhesive connection portion 42 and connects the dicing sheet mounting surface 10A and the connection surface 30T.

In addition, the connection reinforcing portion 440 seals the outer peripheral side and the inner peripheral side of the adhesive connection portion 42 to be liquid-tight.

In addition, the connection reinforcement part 440 is an adhesive resin part formed by curing an adhesive, and the same as in the first embodiment can be applied.

Next, referring to FIG. 19, the outline of the dicing sheet mounting step of the fourth embodiment will be described. Fig. 19 is a flowchart illustrating the outline of the procedure of the dicing blade mounting procedure of the fourth embodiment.

The manufacturing steps of the hub-shaped dicing blade of the fourth embodiment apply the steps (S401 to S406) shown in FIG. 19 instead of the steps of the dicing blade mounting step S11 (S101 to S104) of the first embodiment. Otherwise, the same steps as the first embodiment can be applied.

(1) Apply adhesive to the wheel hub (S401)

First, the adhesive forming the adhesive resin portion 422 is applied to the target area of the adhesive connection portion 42 of the dicing piece mounting surface 10A of the aluminum hub 10.

In addition, instead of the dicing sheet mounting surface 10A, an adhesive forming the adhesive resin portion 422 may be coated on the back surface of the tape base 421 (the surface opposite to the adhesive 423) of the adhesive tape 420.

(2) Glue the adhesive tape to the wheel hub (S402)

Then, the adhesive tape 420 is bonded to the coated adhesive. At this time, the axis O1 of the aluminum hub 10 and the axis of the adhesive tape 420 are coaxially bonded.

(3) Adhesive hardening (S403)

Then, the adhesive is hardened, and the adhesive tape 420 is connected to the adhesive resin portion 422.

(4) Coating and reinforcing adhesive (S404)

Then, an adhesive for reinforcement which forms the connection reinforcement part 440 is applied to the outer peripheral side and the inner peripheral side of the adhesive connection part 42. The same steps as the first embodiment can be applied to the application of the reinforcing adhesive.

(5) Connect the cutting disc material to the hub (S405)

Then, the raw material of the cutting disc is pasted on the aluminum wheel hub.

When sticking the cutting disc material to the aluminum hub, the same steps as in the first embodiment can be applied.

(6) Hardening of the reinforcing adhesive (S406)

Next, the reinforcing adhesive is hardened to form a connection reinforcing part.

The hardening of the reinforcing adhesive can apply the same steps as in the first embodiment.

Follow the steps from S401 to S406 to complete the cut-off piece installation product (semi-finished product).

In addition, the steps of S401 to S406 are shown as an example, and can be changed or omitted as appropriate.

According to the hub-type dicing blade 400 of the fourth embodiment, the adhesive tape 420 is connected to the dicing blade mounting surface 10A by the adhesive resin portion 422, so that a large connection strength can be ensured.

In addition, according to the hub-shaped dicing sheet 400, the connection reinforcing portion 440 is formed on the outer peripheral side and the inner peripheral side of the adhesive tape 420, so the deterioration of the adhesive 423 can be suppressed.

<Fourth Embodiment (First Modification)>

Hereinafter, referring to FIG. 20, a hub-shaped cutting blade of a first modification of the fourth embodiment of the present invention will be described. Fig. 20 is a partial cross-sectional view illustrating an example of a schematic configuration of a hub-shaped cutting blade of a first modification of the fourth embodiment.

In FIG. 20, reference numeral 400A represents a hub-shaped dicing sheet, reference numeral 10 represents an aluminum hub, reference numeral 42A represents an adhesive connection portion, reference numeral 420A represents an adhesive tape, reference numeral 422A represents an adhesive resin portion, and reference numeral 440A represents a connection reinforcement portion.

As shown in FIG. 20, the hub-type cutting blade 400A includes, for example, an aluminum hub 10, an adhesive connecting portion 42A, a cutting blade body 30, and a connecting reinforcement portion 440A.

Then, the aluminum hub 10 and the dicing blade body 30 are connected via the adhesive connection portion 42A and the connection reinforcement portion 440A.

In addition, the adhesive connecting portion 42A includes an adhesive resin portion 422A and an adhesive tape 420A, and the self-dicing sheet mounting surface 10A is arranged in the order of the adhesive resin portion 422A and the adhesive tape 420A to be connected to the connecting surface 30T.

The aluminum hub 10 and the cutting blade body 30 are the same as those of the first embodiment, so the description is omitted.

In addition, the wheel hub 10 may also be formed of materials other than aluminum or aluminum alloy, such as magnesium or magnesium alloy, titanium or titanium alloy, or plastic. The plastic can also be polycarbonate.

In addition, as shown in FIG. 20, the adhesive tape 420A includes, for example, a tape base material 421A and an adhesive 423A applied to the connecting surface 30T side of the tape base material 421A. The surface of the adhesive 423A is a single-sided adhesive tape that becomes the adhesive surface 420S. .

In addition, for example, the tape base material 421A has the same diameter on the outer circumference side as the dicing blade mounting surface 10A, and has a circular hole 420HA having the same diameter as the circular hole 30H of the dicing blade body 30 formed on the inner circumference side, and has a doughnut shape.

In addition, the diameter of the outer circumference of the adhesive 423A is smaller than the tape base material 421A, and the diameter of the inner circumference is larger than the circular hole 420HA. Others are the same as the fourth embodiment, so the description is omitted.

The adhesive resin portion 422A is formed on the dicing sheet mounting surface 10A, and the outer and inner diameters are formed corresponding to the tape base material 421A of the adhesive tape 420A. Others are the same as the fourth embodiment, so the description is omitted.

The connection reinforcement part 440A includes an outer circumference side connection reinforcement part 441A and an inner circumference side connection reinforcement part 442A.

The outer peripheral side connection reinforcing portion 441A is formed over the entire circumference of the adhesive 423A constituting the adhesive tape 420A, and connects the tape base material 421A and the connection surface 30T.

In addition, the inner circumferential side connection reinforcing portion 442A is formed over the entire inner circumferential side of the adhesive 423A constituting the adhesive tape 420A, and connects the tape base material 421A and the connection surface 30T.

In addition, the connection reinforcing portion 440A seals the outer peripheral side and the inner peripheral side of the adhesive 423A to be liquid-tight. Others are the same as the fourth embodiment, so the description is omitted.

<Fourth Embodiment (Second Modification)>

Hereinafter, referring to FIG. 21, a hub-shaped cutting blade of a second modification of the fourth embodiment of the present invention will be described. Fig. 21 is a partial cross-sectional view illustrating an example of a schematic configuration of a hub-shaped cutting blade of a second modification of the fourth embodiment.

In FIG. 21, reference numeral 400B represents a hub-shaped dicing sheet, reference numeral 10 represents an aluminum hub, reference numeral 42B represents an adhesive connection portion, reference numeral 420B represents an adhesive tape, reference numeral 422B represents an adhesive resin portion, and reference numeral 440B represents a connection reinforcement portion.

As shown in FIG. 21, the hub-type cutting blade 400B includes, for example, an aluminum hub 10, an adhesive connecting portion 42B, a cutting blade body 30, and a connecting reinforcing portion 440B.

Then, the aluminum hub 10 and the dicing blade body 30 are connected via the adhesive connection portion 42B and the connection reinforcement portion 440B.

In addition, the adhesive connecting portion 42B includes an adhesive resin portion 422B and an adhesive tape 420B, and the adhesive resin portion 422B and the adhesive tape 420B are arranged in the order of the adhesive resin portion 422B and the adhesive tape 420B from the dicing sheet mounting surface 10A to be connected to the connecting surface 30T. The aluminum hub 10 is the same as the fourth embodiment, and the cutting blade body 30 is the same as the fourth embodiment, so the description is omitted.

In addition, as shown in FIG. 21, the adhesive tape 420B includes, for example, a tape substrate 421B, and an adhesive 423B applied to the connecting surface 30T side of the tape substrate 421B. The surface of the adhesive 423B is a single-sided adhesive tape that becomes the adhesive surface 420S. .

In addition, for example, the tape base material 421B has the same diameter on the outer circumference side as the dicing blade mounting surface 10A, and on the inner circumference side, a circular hole 420HB having the same diameter as the circular hole 30H of the dicing blade body 30 is formed, and has a doughnut shape.

In addition, the outer peripheral side and the inner peripheral side of the adhesive 423B are formed to have the same diameter as the tape base material 421A. Others are the same as the fourth embodiment, so the description is omitted.

The adhesive resin portion 422B is the same as the first modification of the fourth embodiment, so the description is omitted.

The connection reinforcement part 440B includes an outer circumference side connection reinforcement part 441B and an inner circumference side connection reinforcement part 442B.

The outer peripheral side connection reinforcing portion 441B is formed over the entire circumference of the adhesive 423B constituting the adhesive tape 420B, and connects the tape base material 421B and the connection surface 30T.

In addition, the inner circumferential side connection reinforcing portion 442B is formed over the entire inner circumferential side of the adhesive 423B constituting the adhesive tape 420B, and connects the tape base material 421B and the connection surface 30T.

In addition, the connection reinforcing portion 440B seals the outer peripheral side and the inner peripheral side of the adhesive 423B to be liquid-tight. Others are the same as the fourth embodiment, so the description is omitted.

<Fifth Implementation Type>

Hereinafter, referring to Figs. 22 and 23, the hub-shaped cutting blade of the fifth embodiment of the present invention will be described. Fig. 22 is a partial cross-sectional view illustrating the schematic configuration of the hub-shaped cutting blade of the fifth embodiment and indicated by arrows Z-Z in Fig. 1. In addition, FIG. 23 is a flowchart illustrating an outline of an example of the dicing sheet mounting procedure of the fifth embodiment.

In FIG. 22, reference numeral 500 represents a hub-shaped dicing sheet, reference numeral 10 represents an aluminum hub, reference numeral 52 represents an adhesive connecting portion, reference numeral 520 represents an adhesive tape, reference numeral 523 represents an adhesive resin portion, and reference numeral 540 represents a connection reinforcement portion.

As shown in FIG. 22, the hub-shaped cutting blade 500 includes, for example, an aluminum hub 10, an adhesive connecting portion 52, a cutting blade body 30 and a connecting reinforcing portion 540.

Then, the aluminum hub 10 and the cutting blade body 30 are connected via the adhesive connection portion 52 and the connection reinforcement portion 540.

In addition, the adhesive connection part 52 includes an adhesive tape 520 and an adhesive resin part 523. The self-cut sheet mounting surface 10A is arranged in the order of the adhesive tape 520 and the adhesive resin part 523. The surface of the adhesive 522 is a single-sided adhesive that becomes the adhesive surface 520S. tape. Then, the adhesive resin portion 522 is connected to the dicing sheet mounting surface 10A.

The aluminum hub 10 is the same as the first embodiment, so the description is omitted.

In addition, the wheel hub 10 may also be formed of materials other than aluminum or aluminum alloy, such as magnesium or magnesium alloy, titanium or titanium alloy, or plastic. The plastic can also be polycarbonate.

In addition, the adhesive resin portion 523 is connected to the adhesive tape 520 arranged on the connection surface 30T. Others are the same as the adhesive resin portion 422 of the fourth embodiment, so the description is omitted.

The adhesive tape 520 includes a tape base material 521 and an adhesive 522, and the adhesive 522 is disposed on the dicing sheet mounting surface 10A side of the tape base material 521. Then, the tape base material 521 and the adhesive resin part 523 are connected. The tape substrate 521 and the adhesive 522 can be the same as the tape substrate 421 and the adhesive 423 of the fourth embodiment.

In this embodiment, the dicing blade body 30 covers the entire surface of the connecting surface 30T, and has a structure in which the diamond super abrasive grains 32 are exposed from the metal base material 31.

The connection reinforcement part 540 includes an outer circumference side connection reinforcement part 541 and an inner circumference side connection reinforcement part 542.

The outer peripheral side connection reinforcement portion 541 is formed over the entire circumference of the adhesive connection portion 52 and connects the dicing blade mounting surface 10A and the connection surface 30T.

In addition, the inner circumferential side connection reinforcing portion 542 is formed over the entire inner circumferential side of the adhesive connection portion 52, and connects the dicing blade mounting surface 10A and the connection surface 30T.

In addition, the connection reinforcing part 540 seals the outer peripheral side and the inner peripheral side of the adhesive connection part 52 to be liquid-tight.

In addition, the connection reinforcement portion 540 is a bonding resin portion formed by curing the adhesive, and the adhesive forming the connection reinforcement portion 540 may be the same as the first embodiment.

Next, the outline of the dicing sheet mounting step of the fifth embodiment will be described with reference to FIG. 23. Fig. 23 is a flowchart illustrating the outline of the steps of the dicing blade mounting step of the fifth embodiment.

The manufacturing steps of the hub-shaped dicing blade of the fifth embodiment apply the steps (S501 to S506) shown in FIG. 23 instead of the steps (S101 to S104) of the dicing blade mounting step (S11) of the first embodiment.

(1) Apply adhesive to the dicing sheet material (S501)

First, the adhesive forming the adhesive resin portion 523 is applied to the target area of the adhesive connecting portion 52 on the connecting surface 30T of the dicing sheet material (the dicing sheet body) 30.

In addition, instead of the connecting surface 30T, an adhesive forming the adhesive resin portion 523 may be coated on the back surface of the tape base 521 of the adhesive tape 520 (the surface opposite to the adhesive 522).

(2) Bond the adhesive tape to the dicing sheet material (S502)

Then, the adhesive tape 520 is bonded to the coated adhesive. At this time, the axis O1 of the dicing blade body 30 and the axis of the adhesive tape 520 are coaxially bonded.

(3) Adhesive hardening (S503)

Then, the adhesive is hardened, and the adhesive tape 520 is connected to the adhesive resin portion 523.

(4) Coating and reinforcing adhesive (S504)

Then, an adhesive for reinforcement which forms the connection reinforcement part 540 is coated on the outer peripheral side and the inner peripheral side of the adhesive connection part 52. The same steps as the first embodiment can be applied to the application of the reinforcing adhesive.

(5) Connect the hub to the cutting disc material (S505)

Then, the aluminum hub is pasted on the raw material of the cutting disc.

When sticking the aluminum hub to the cutting disc material, the same steps as in the first embodiment can be applied.

(6) Hardening of reinforcing adhesive (S506)

Next, the reinforcing adhesive is hardened to form a connection reinforcing part.

The hardening of the reinforcing adhesive can apply the same steps as in the first embodiment.

Follow the steps from S501 to S506 to complete the cut-off piece installation product (semi-finished product).

In addition, the steps of S501 to S506 are an example, and can be changed or omitted as appropriate.

According to the hub-shaped dicing blade 500 of the fifth embodiment, the adhesive tape 520 is connected to the connecting surface 30T by the adhesive resin portion 523, and therefore, the dicing blade body 30 can be maintained with a large connection strength.

In addition, according to the hub-shaped dicing blade 500, since the dicing blade body 30 is connected by the adhesive resin portion 523, the dicing blade body having air permeability can be easily and surely maintained.

In addition, according to the hub-shaped dicing sheet 500, since the connection reinforcing portion 540 is formed on the outer peripheral side and the inner peripheral side of the adhesive tape 520, the deterioration of the adhesive 522 can be suppressed.

<Fifth Implementation Type (First Modification Example>

Hereinafter, referring to FIG. 24, a hub-shaped cutting blade of a first modification of the fifth embodiment of the present invention will be described. Fig. 24 is a partial cross-sectional view illustrating an example of a schematic configuration of a hub-shaped cutting blade of a first modification of the fifth embodiment.

In FIG. 24, symbol 500A represents a hub-shaped dicing sheet, symbol 10 represents an aluminum hub, symbol 52A represents an adhesive connection part, symbol 520A represents an adhesive tape, symbol 532A represents an adhesive resin part, and symbol 540A represents a connection reinforcement part.

As shown in FIG. 24, the hub-type cutting blade 500A includes, for example, an aluminum hub 10, an adhesive connecting portion 52A, a cutting blade body 30, and a connecting reinforcement portion 540A.

Then, the aluminum hub 10 and the dicing blade body 30 are connected via the adhesive connection part 52A and the connection reinforcement part 540A.

In addition, the adhesive connecting portion 52A includes an adhesive resin portion 523A and an adhesive tape 520A, and the self-dicing sheet mounting surface 10A is arranged in the order of the adhesive tape 520A and the adhesive resin portion 523A to be connected to the connecting surface 30T.

The aluminum hub 10 is the same as the first embodiment, and the cutting blade body 30 is the same as the fifth embodiment, so the description is omitted

In addition, as shown in FIG. 24, the adhesive tape 520A includes, for example, a tape substrate 521A, and an adhesive 522A applied to the dicing sheet mounting surface 10A side of the tape substrate 521A. The surface of the adhesive 522A is a single side that becomes the adhesive surface 520S. Adhesive tape.

In addition, the tape base material 521A is formed with the same diameter as the dicing blade mounting surface 10A on the outer circumference side, and a circular hole 520HA having the same diameter as the circular hole 30H of the dicing blade body 30 is formed on the inner circumference side, and has a doughnut shape. In addition, the diameter of the outer circumference of the adhesive 522A is smaller than the tape base material 521A, and the diameter of the inner circumference is larger than the circular hole 520HA. Others are the same as the fifth embodiment, so the description is omitted.

The adhesive resin part 523A is formed on the connection surface 30T, and the outer diameter and the inner diameter are formed corresponding to the tape base material 521A of the adhesive tape 520A. Others are the same as the adhesive resin portion 423 of the fourth embodiment, so the description is omitted.

The connection reinforcement part 540A includes an outer circumference side connection reinforcement part 541A and an inner circumference side connection reinforcement part 542A.

The outer peripheral side connection reinforcing portion 541A is formed over the entire circumference of the adhesive 522A constituting the adhesive tape 520A, and connects the tape base material 521A and the connection surface 30T.

The inner peripheral side connection reinforcing portion 542A is formed over the entire inner circumference of the adhesive 522A constituting the adhesive tape 520A, and connects the tape base material 521A and the connection surface 30T.

In addition, the connection reinforcing portion 540A seals the outer peripheral side and the inner peripheral side of the adhesive 522A to be liquid-tight. Others are the same as the first modification of the fourth embodiment, so the description is omitted.

<Fifth Embodiment (Second Modification)>

Hereinafter, referring to FIG. 25, a hub-shaped cutting blade of a second modification of the fifth embodiment of the present invention will be described. FIG. 25 is a partial cross-sectional view illustrating an example of a schematic configuration of a hub-shaped cutting blade of a second modification of the fifth embodiment.

In FIG. 25, symbol 500B represents a hub-shaped dicing sheet, symbol 10 represents an aluminum hub, symbol 52B represents an adhesive connection part, symbol 520B represents an adhesive tape, symbol 523B represents an adhesive resin part, and symbol 540B represents a connection reinforcement part.

As shown in FIG. 25, the hub-type cutting blade 500B includes, for example, an aluminum hub 10, an adhesive connecting portion 52B, a cutting blade body 30, and a connecting reinforcing portion 540B.

Then, the aluminum hub 10 and the dicing blade body 30 are connected via the adhesive connection part 52B and the connection reinforcement part 540B.

In addition, the adhesive connecting portion 52B includes an adhesive resin portion 523B and an adhesive tape 520B, and is connected to the connecting surface 30T from the dicing sheet mounting surface 10A in the order of the adhesive tape 520B and the adhesive resin portion 523B. The aluminum hub 10 is the same as the second embodiment, and the cutting blade body 30 is the same as the fifth embodiment, so the description is omitted.

In addition, as shown in FIG. 25, the adhesive tape 520B includes, for example, a tape base material 521B and an adhesive 522B applied to the dicing sheet mounting surface 10A side of the tape base material 521B. The surface of the adhesive 522B is a single side of the adhesive surface 520S. Adhesive tape.

In addition, the tape base material 521B, for example, has the same diameter on the outer circumference side as the dicing blade mounting surface 10A, and has a circular hole 520HB having the same diameter as the circular hole 30H of the dicing blade body 30 on the inner circumference side, and has a doughnut shape. In addition, the outer peripheral side and the inner peripheral side of the adhesive 522B are formed with the same diameter as the tape base material 521A. Others are the same as the fifth embodiment, so the description is omitted.

The adhesive resin portion 523B is the same as the adhesive resin portion 523A of the first modification of the fifth embodiment, so the description is omitted.

The connection reinforcement part 540B includes an outer circumference side connection reinforcement part 541B and an inner circumference side connection reinforcement part 542B.

The outer peripheral side connection reinforcing portion 541B is formed over the entire circumference of the adhesive 522B constituting the adhesive tape 520B, and connects the tape base material 521B and the dicing sheet mounting surface 10A.

In addition, the inner circumferential side connection reinforcing portion 542B is formed over the entire inner circumferential side of the adhesive 522B constituting the adhesive tape 520B, and connects the tape base material 521B and the dicing sheet mounting surface 10A.

In addition, the connection reinforcing portion 540B seals the outer peripheral side and the inner peripheral side of the adhesive 522B to be liquid-tight. Others are the same as the fifth embodiment, so the description is omitted.

In addition, various changes can be added to the technical matters described in the above-mentioned embodiments without departing from the spirit of the invention.

For example, the type of the connection reinforcement part can be appropriately set, and the connection reinforcement part of the first embodiment to the fifth embodiment can also be applied in combination.

In addition, in the above embodiment, the connection reinforcement is formed over the entire circumference of the outer and inner sides of the adhesive connection part. The case of sealing the adhesive connection part has been described, but it may only be used in the adhesive connection. Either one of the outer peripheral side and the inner peripheral side of the part forms a connection reinforcement part. In addition, the connection reinforcement part may be formed intermittently in the circumferential direction of the outer peripheral side and the inner peripheral side of the adhesive connection part.

In addition, for example, in the case where both the dicing blade mounting surface 10A and the connecting surface 30T are connected to the adhesive connecting portion by adhesive force, the connection reinforcement may be formed only on either of the dicing blade mounting surface 10A and the connecting surface 30T. unit.

In addition, the use of a double-sided adhesive tape as an adhesive connection member or a double-sided adhesive member to which the tape base material shown in the first modification example of the first embodiment type is not applied can be appropriately set.

In addition, in the above embodiment, the case where the connection reinforcement is formed by curing of a delayed ultraviolet curing adhesive has been described. However, various resins such as ultraviolet curing adhesives, thermosetting resins, and anaerobic resins may also be applied.

In addition, in the above embodiment, the case where the hub constituting the hub-shaped cutting blade is formed of aluminum alloy has been described, and it can also be formed by replacing the aluminum alloy with pure aluminum or other materials. In addition, as the metal material, the specific strength is preferably pure aluminum ((JIS standard A1060-O) specific strength 25.9) or higher.

For example, it can also be formed by replacing the aluminum alloy with magnesium or a magnesium alloy.

In addition, as the magnesium alloy, for example, MB3 (Mg-8.4% Al-0.6% Zn-0.25% Mn), MB5 (Mg-3.3% Zn-0.6% Zr), MB6 (Mg-5.5% Zn-0.6% Zr) etc.

If the hub is formed of magnesium or magnesium alloy, the specific strength of the hub can be increased, and the number of rotations can be greater than that of the aluminum hub. In addition, magnesium or magnesium alloy has excellent damping ability, so it is possible to suppress the occurrence of vibration and perform cutting stably.

In addition, for example, pure titanium (Ti) (JIS 1 type, etc.) or titanium alloy (specific strength of about 288 kN·m/kg, and specific strength of aluminum alloy is about 222 kN·m/kg) to form the wheel hub.

In addition, as the titanium alloy, for example, αβ alloy (Ti-6 Al-6 V-2 Sn, Ti-6 Al-4 V, etc.), β alloy (Ti-3 Al-8 V-6 Cr-4 Zr -4 Mo, Ti-10 V-2 Fe-3 Al, Ti-15 V-3 Cr-3 Sn-3Al, etc.).

If the hub is formed of pure titanium or titanium alloy, the specific strength of the hub can be increased, and the cutting can be performed more efficiently by rotating at a higher speed than the aluminum hub. In addition, it is possible to suppress deformation of the hub due to external force during cutting.

In addition, the hub may be formed of, for example, plastic, which can be appropriately set from general-purpose plastics such as engineering plastics, fiber-reinforced plastics, and acrylic resins.

In addition, as the plastic, for example, a specific strength of 40kN is preferred. m/kg or more, more preferably a specific strength of 50kN. m/kg or more. In addition, the Izod impact strength is preferably 2.0 (kJ/m ² ) or more.

The wheel hub is formed by plastic, which can make it light in weight and high-speed rotation. In addition, it is possible to efficiently perform cutting by setting various materials depending on the object to be cut.

In addition, if the hub is formed of polycarbonate (specific strength 52.5kN·m/kg, aluminum alloy specific strength approximately 25.2kN·m/kg), it has sufficient specific strength, so it can be rotated at high speed and efficiently Make a cut.

In addition, in the above-mentioned embodiment, the case where the dicing blade body 30 has a structure in which diamond super abrasive grains 32 are dispersed on a nickel-plated metal base material 31 has been described. However, for example, copper (Cu) Or copper alloys (e.g., Cu-Sn) as a representative of various applicable metal base materials, metal cutting chips with abrasive particles dispersed in them, resin cutting chips made of phenol resin, etc., for glass powders containing ceramic powder mixed with abrasive particles (Inorganic material) Various dicing blade bodies such as ceramic dicing blades (vitrified blades) formed by calcining and dicing blades formed of cemented carbide.

In the present invention, various dicing blade bodies that cannot be formed as electroplated dicing blades can be connected by the adhesive connection portion.

In addition, the flowcharts shown in FIG. 5, FIG. 6, FIG. 7, FIG. 13, FIG. 17, FIG. 19, and FIG. 23 are just an example, and can be appropriately changed (omitted or added).

〔Industrial availability〕

According to the manufacturing method of the hub-shaped dicing blade and the hub-shaped dicing blade of the present invention, the hub-shaped dicing blade having an adhesive connection portion that connects the hub and the dicing blade body by adhesive force can be enlarged as needed Due to the strength of the connected parts by adhesive force, it has industrial applicability.

10‧‧‧Aluminum Wheel (Wheel)

10A‧‧‧Cutting disc mounting surface

10H‧‧‧Mounting hole

11‧‧‧Cutting disc installation part

12‧‧‧Drive source connection

30‧‧‧Cutting disc body

30F‧‧‧Exposed

30G‧‧‧Notable Department

30H、120H‧‧‧round hole

30T‧‧‧Connecting surface

31‧‧‧Metal base material

32‧‧‧Diamond super abrasive grain (abrasive grain)

100‧‧‧Wheel cutting disc

120‧‧‧Double-sided adhesive tape (double-sided adhesive member, adhesive connecting member, adhesive connecting part)

121‧‧‧Tape base material

122、123‧‧‧Adhesive (adhesive adhesive resin)

140‧‧‧Connection reinforcement (UV-curing resin, UV-curing adhesive, light-curing resin)

141‧‧‧Connecting reinforcement on the outer peripheral side

142‧‧‧Inner peripheral side connection reinforcement part

O1‧‧‧Axis

Claims (15)

A hub-type cutting blade, characterized by comprising: a hub capable of rotating around an axis and a cutting blade mounting surface is formed on one side of the axis direction; a cutting blade body is formed with a connecting surface connected to the cutting blade mounting surface Connecting surface; Adhesive connecting portion, arranged between the hub and the cutting blade body, by adhesive force to maintain the cutting blade mounting surface and the connecting surface of any one, and by adhesive force or adhesion to maintain the other , And connect the hub and the dicing blade body; and the connection reinforcing part, which is arranged on at least one of the outer peripheral side and the inner peripheral side of the adhesive connecting part, and is connected to the dicing blade mounting surface and the adhesive connecting part The bonding surface and the connection surface are in contact with at least one of the bonding surfaces of the adhesive connection portion that is bonded by adhesive force. The hub-shaped dicing sheet according to claim 1, wherein the adhesive connecting portion is composed of a double-sided adhesive connecting member. The hub-type dicing blade according to claim 1, wherein the connection reinforcing portion is formed in the circumferential direction of at least one of the outer peripheral side and the inner peripheral side of the adhesive connecting portion to connect the dicing blade mounting surface and the connection The composition of the noodles. The hub-shaped dicing sheet according to claim 1, wherein the connecting reinforcing portion is formed over the entire circumference of at least one of the outer peripheral side and the inner peripheral side of the adhesive connecting portion, and is sealed by adhesive force The structure of the retained part. The hub-shaped dicing blade according to claim 1, wherein the connection reinforcement portion is formed by curing a light-curing resin. The hub-shaped cutting disc as described in claim 5, where The above-mentioned photocurable resin is a delayed photocurable resin. The hub-shaped cutting blade described in any one of claims 1 to 6, wherein the hub is formed of aluminum or aluminum alloy. The hub-type cutting blade described in any one of claims 1 to 6, wherein the hub is formed of magnesium or magnesium alloy. The hub-shaped cutting blade described in any one of claims 1 to 6, wherein the hub is formed of titanium or a titanium alloy. The hub-shaped cutting blade described in any one of claims 1 to 6, wherein the hub is formed of plastic or fiber reinforced plastic. Such as the hub-shaped cutting disc described in claim 10, wherein the plastic hub is a polycarbonate hub. A manufacturing method of a hub-shaped cutting blade, which is a manufacturing method of a hub-shaped cutting blade for manufacturing a hub-shaped cutting blade. The hub-shaped cutting blade includes: a hub that can rotate around an axis and is formed on one side in the direction of the axis There is a dicing blade mounting surface; and a dicing blade body formed with a connecting surface connected to the dicing blade mounting surface. The method of manufacturing the hub-type dicing blade is characterized by including a dicing blade mounting step of connecting the hub and the dicing blade body In the above-mentioned dicing sheet mounting step, a flat-plate-shaped adhesive connecting member whose at least one surface is an adhesive surface is connected to any one of the dicing sheet mounting surface and the connecting surface by adhesive force or bonding, and the adhesive The sexual connecting member is connected to the other of the cutting blade mounting surface and the connecting surface by adhesive force or bonding. Any one of the cutting blade mounting surface and the connecting surface connects the hub and the cutting blade body by an adhesive connection due to adhesive force, and the adhesive connecting member is connected to the cutting blade mounting surface and the above After one of the connecting surfaces is connected to the hub and the dicing blade body, or after the hub is connected to the dicing blade body, at least one of the outer peripheral side and the inner peripheral side of the adhesive connecting member The reinforcing adhesive is arranged in the circumferential direction of, and the above-mentioned reinforcing adhesive is hardened to form a connection reinforcing part. The method for manufacturing a hub-shaped dicing sheet as described in claim 12, wherein any one of the attachment surface of the dicing sheet and the connecting surface is formed into a doughnut-shaped double-sided adhesive connecting member with adhesive surfaces on both sides Arranging a reinforcing adhesive in the circumferential direction on at least one of the outer and inner sides of the double-sided adhesive connecting member, connecting the hub with the cutting blade body, and connecting the reinforcing adhesive with the cutting The sheet mounting surface and the connecting surface are connected, and the reinforcing adhesive is hardened to form the connecting reinforcing portion. The method for manufacturing a hub-shaped dicing sheet according to claim 12 or 13, wherein a photo-curing resin is used as the reinforcing adhesive, and the photo-curing resin is irradiated with light to cure it to form the connection reinforcing portion. The method for manufacturing a hub-shaped dicing sheet according to claim 12 or 13, wherein a delayed light-curing resin is used as the reinforcing adhesive, and the delayed light-curing resin is cured by irradiating light to form the connection Reinforcement department.

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