TWI723947B - Manufacturing method of optical film in transfer manner and manufacturing method of transfer mother die - Google Patents
Manufacturing method of optical film in transfer manner and manufacturing method of transfer mother die Download PDFInfo
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本發明涉及一種光學膜片的製造方法,尤其涉及一種光學膜片的轉印式製造方法及轉印母模的製造方法。The present invention relates to a manufacturing method of an optical film, in particular to a transfer type manufacturing method of an optical film and a manufacturing method of a transfer master mold.
現有的一種光學膜片的製造方法為透過平面狀的轉印母模壓印的方法在光學膜片上轉印光學微結構,進而形成一光學膜片。然而,現有的轉印母模需要經由特殊的製程在母模的表面形成轉印用微結構(例如:使用電鑄方法製作轉印滾輪,再以轉印滾輪壓印母模形成微結構),上述的特殊製程經常需要耗費大量的經費與時間,而使得以轉印式方法製造光學膜片的製造時間及製造成本大幅提升。An existing method for manufacturing an optical film is to transfer the optical microstructure on the optical film through a method of imprinting through a flat transfer master mold to form an optical film. However, the existing transfer master mold requires a special process to form a microstructure for transfer on the surface of the master mold (for example, electroforming is used to make a transfer roller, and then the transfer roller is used to imprint the master mold to form the microstructure). The above-mentioned special manufacturing process often consumes a lot of money and time, which greatly increases the manufacturing time and manufacturing cost of the optical film manufactured by the transfer method.
於是,本發明人認為上述缺陷可改善,乃特潛心研究並配合科學原理的運用,終於提出一種設計合理且有效改善上述缺陷的本發明。Therefore, the inventor believes that the above-mentioned shortcomings can be improved, and with great concentration of research and the application of scientific principles, we finally propose an invention with reasonable design and effective improvement of the above-mentioned shortcomings.
本發明實施例在於提供一種光學膜片的轉印式製造方法及轉印母模的製造方法,其能有效地改良現有光學膜片的轉印式製造方法。The embodiment of the present invention is to provide a transfer-type manufacturing method of an optical film and a manufacturing method of a transfer master mold, which can effectively improve the existing transfer-type manufacturing method of an optical film.
本發明實施例公開一種光學膜片的轉印式製造方法,其包括:一轉印滾輪製造步驟,其包括:一第一前置步驟:提供一金屬滾筒,所述金屬滾筒具有一圓柱狀的外表面;一塗佈步驟:於所述金屬滾筒的所述外表面塗佈圍繞360度的一負光阻層;一曝光步驟:將一第一波長光源穿透過至少一個光罩而形成二維圖形化光源,將所述二維圖形化光源照射於所述負光阻層的表面,而使得所述負光阻層受到所述二維圖形化光源照射的部位形成多個曝光區域,所述負光阻層未被所述二維圖形化光源照射的部位形成多個未曝光區域;及一顯影步驟:移除所述負光阻層上多個所述未曝光區域的材料,而使得所述負光阻層形成多個壓印圖形;其中,多個所述壓印圖形圍繞於所述金屬滾筒的所述外表面,而和所述金屬滾筒共同構成一轉印滾輪;一轉印母模製造步驟,其包括:一第二前置步驟:提供片狀的一母模基材,及位於所述母模基材上的一光硬化材料層;一滾輪壓印步驟:透過所述轉印滾輪滾壓於所述光硬化材料層上,以使得所述光硬化材料層形成有形狀互補於多個所述壓印圖形的多個轉印微結構;一光硬化步驟:照射一第二波長光源於所述光硬化材料層而使得所述光硬化材料層固化,進而使得所述光硬化材料層和所述母模基材構成一轉印母模;以及一光學膜片轉印步驟,其包括:一第三前置步驟:提供一透明的膜片基材及設置於所述膜片基材表面的一底漆層;一膜片壓印步驟:透過所述轉印母模的多個所述轉印微結構壓印於所述底漆層,而使得所述底漆層形成形狀互補於多個所述轉印微結構的多個光學微結構;及一熱固化步驟:加熱所述底漆層以固化所述底漆層,進而使得所述膜片基材和所述底漆層構成一光學膜片。The embodiment of the present invention discloses a transfer type manufacturing method of an optical film, which includes: a transfer roller manufacturing step, which includes: a first pre-step: providing a metal roller, the metal roller having a cylindrical shape Outer surface; a coating step: coating a negative photoresist layer around 360 degrees on the outer surface of the metal drum; an exposure step: passing a first wavelength light source through at least one photomask to form a two-dimensional A patterned light source, irradiating the two-dimensional patterned light source on the surface of the negative photoresist layer, so that the part of the negative photoresist layer irradiated by the two-dimensional patterned light source forms a plurality of exposure areas, the The portion of the negative photoresist layer that is not illuminated by the two-dimensional patterned light source forms a plurality of unexposed regions; and a developing step: remove the material of the plurality of unexposed regions on the negative photoresist layer, so that the The negative photoresist layer forms a plurality of imprinted patterns; wherein, the plurality of imprinted patterns surround the outer surface of the metal cylinder, and together with the metal cylinder form a transfer roller; a transfer master The mold manufacturing step includes: a second pre-step: providing a sheet-like master mold base material and a photohardening material layer on the master mold base material; a roller embossing step: through the rotation The printing roller is rolled on the photo-curing material layer so that the photo-curing material layer is formed with a plurality of transfer microstructures whose shapes are complementary to the plurality of embossed patterns; a photo-curing step: irradiating a second A wavelength light source is applied to the photo-curing material layer to cure the photo-curing material layer, so that the photo-curing material layer and the master base material form a transfer master mold; and an optical film transfer step, It includes: a third pre-step: providing a transparent film substrate and a primer layer disposed on the surface of the film substrate; a film embossing step: passing through the transfer master mold Each of the transfer microstructures is imprinted on the primer layer, so that the primer layer forms a plurality of optical microstructures with shapes complementary to the plurality of transfer microstructures; and a thermal curing step: heating the primer layer The primer layer is used to cure the primer layer, so that the film substrate and the primer layer form an optical film.
本發明實施例也公開一種轉印母模製造方法,其包括:一轉印滾輪製造步驟,其包括:一第一前置步驟:提供一金屬滾筒,所述金屬滾筒具有一圓柱狀的外表面;一塗佈步驟:於所述金屬滾筒的所述外表面塗佈圍繞360度的一負光阻層;一曝光步驟:將一第一波長光源穿透過至少一個光罩而形成二維圖形化光源,將所述二維圖形化光源照射於所述負光阻層的表面,而使得所述負光阻層受到所述二維圖形化光源照射的部位形成多個曝光區域,所述負光阻層未被所述二維圖形化光源照射的部位形成多個未曝光區域;及一顯影步驟:移除所述負光阻層上多個所述未曝光區域的材料,而使得所述負光阻層形成多個壓印圖形,進而使得所述負光阻層和所述金屬滾筒共同構成一轉印滾輪;一轉印母模製造步驟,其包括:一第二前置步驟:提供片狀的一母模基材及位於所述母模基材上的一光硬化材料層;一滾輪壓印步驟:透過所述轉印滾輪滾壓於所述光硬化材料層上,以使得所述光硬化材料層形成有形狀互補於多個所述壓印圖形的多個轉印微結構;一光硬化步驟:照射一第二波長光源於所述光硬化材料層而使得所述光硬化材料層固化,進而使得所述光硬化材料層和所述母模基材構成一轉印母模。The embodiment of the present invention also discloses a method for manufacturing a transfer master mold, which includes: a transfer roller manufacturing step, which includes: a first pre-step: providing a metal roller, the metal roller having a cylindrical outer surface A coating step: coating a negative photoresist layer around 360 degrees on the outer surface of the metal drum; an exposure step: passing a first wavelength light source through at least one photomask to form a two-dimensional pattern A light source, irradiating the two-dimensional patterned light source on the surface of the negative photoresist layer, so that the part of the negative photoresist layer irradiated by the two-dimensional patterned light source forms a plurality of exposure areas, the negative light The part of the resist layer not irradiated by the two-dimensional patterned light source forms a plurality of unexposed areas; and a developing step: remove the material of the plurality of unexposed areas on the negative photoresist layer, so that the negative The photoresist layer forms a plurality of embossed patterns, so that the negative photoresist layer and the metal roller together form a transfer roller; a transfer master mold manufacturing step includes: a second pre-step: providing a sheet A master mold substrate and a photo-curing material layer on the master mold substrate; a roller embossing step: rolling on the photo-curing material layer through the transfer roller, so that the The photo-curing material layer is formed with a plurality of transfer microstructures whose shapes are complementary to the multiple embossed patterns; a photo-curing step: irradiating a second wavelength light source on the photo-curing material layer to make the photo-curing material layer Curing, so that the photo-hardening material layer and the master mold base material form a transfer master mold.
綜上所述,本發明的其中一有益效果在於,本發明所提供的光學膜片的轉印式製造方法及其轉印母模的製造方法,其能夠通過在所述金屬滾筒的所述外表面塗佈所述負光阻層,且透過所述曝光步驟和所述顯影步驟而在所述負光阻層上形成多個所述壓印圖形,而構成所述轉印滾輪,進而透過所述轉印滾輪製造所述轉印母模,再透過所述轉印母模製造所述光學膜片。In summary, one of the beneficial effects of the present invention is that the method for manufacturing the optical film and the method for manufacturing the transfer master mold provided by the present invention can be passed on the outer surface of the metal roller. The surface is coated with the negative photoresist layer, and a plurality of the imprint patterns are formed on the negative photoresist layer through the exposure step and the development step to form the transfer roller, and then pass through the The transfer roller makes the transfer master mold, and then the optical film is made through the transfer master mold.
因此使得本發明能夠大幅降低所述轉印母模,和使用所述轉印母模所製造的光學膜片的製造時間及製造成本。Therefore, the present invention can greatly reduce the manufacturing time and manufacturing cost of the transfer master mold and the optical film manufactured by using the transfer master mold.
為能更進一步瞭解本發明的特徵及技術內容,請參閱以下有關本發明的詳細說明與附圖,但是此等說明與附圖僅用來說明本發明,而非對本發明的保護範圍作任何的限制。In order to further understand the features and technical content of the present invention, please refer to the following detailed descriptions and drawings about the present invention, but these descriptions and drawings are only used to illustrate the present invention, and do not make any claims about the protection scope of the present invention. limit.
以下是通過特定的具體實施例來說明本發明所公開有關“光學膜片的轉印式製造方法及轉印母模製造方法”的實施方式,本領域技術人員可由本說明書所公開的內容瞭解本發明的優點與效果。本發明可通過其他不同的具體實施例加以施行或應用,本說明書中的各項細節也可基於不同觀點與應用,在不悖離本發明的構思下進行各種修改與變更。另外,本發明的附圖僅為簡單示意說明,並非依實際尺寸的描繪,事先聲明。以下的實施方式將進一步詳細說明本發明的相關技術內容,但所公開的內容並非用以限制本發明的保護範圍。The following are specific specific examples to illustrate the implementation of the "optical film transfer manufacturing method and transfer master mold manufacturing method" disclosed in the present invention. Those skilled in the art can understand the present disclosure from the content disclosed in this specification. The advantages and effects of the invention. The present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be based on different viewpoints and applications, and various modifications and changes can be made without departing from the concept of the present invention. In addition, the drawings of the present invention are merely schematic illustrations, and are not drawn according to actual size, and are stated in advance. The following embodiments will further describe the related technical content of the present invention in detail, but the disclosed content is not intended to limit the protection scope of the present invention.
應當可以理解的是,雖然本文中可能會使用到“第一”、“第二”、“第三”等術語來描述各種元件或者信號,但這些元件或者信號不應受這些術語的限制。這些術語主要是用以區分一元件與另一元件,或者一信號與另一信號。另外,本文中所使用的術語“或”,應視實際情況可能包括相關聯的列出項目中的任一個或者多個的組合。It should be understood that although terms such as "first", "second", and "third" may be used herein to describe various elements or signals, these elements or signals should not be limited by these terms. These terms are mainly used to distinguish one element from another, or one signal from another signal. In addition, the term "or" used in this document may include any one or a combination of more of the associated listed items depending on the actual situation.
[實施例一][Example 1]
如圖1至圖10所示,本發明實施例公開一種光學膜片800的轉印式製造方法,以及用以成型所述光學膜片800的轉印母模600的製造方法。為便於理解所述光學膜片800的轉印式製造方法,以下將先介紹所述轉印母模600的製造方法,接著再介紹透過所述轉印母模600製造所述光學膜片800的方法。As shown in FIGS. 1 to 10, the embodiment of the present invention discloses a transfer-type manufacturing method of an
請參考圖1所示,所述轉印母模600的製造方法包括一轉印滾輪製造步驟S1和一轉印母模製造步驟S2,而所述光學膜片800的製造方法包括所述轉印滾輪製造步驟S1、所述轉印母模製造步驟S2,還進一步包括一光學膜片轉印步驟S3。Please refer to FIG. 1, the manufacturing method of the
其中,所述轉印滾輪製造步驟S1包括:第一前置步驟S11、塗佈步驟S12、曝光步驟S13、及顯影步驟S14。如圖2所示,所述第一前置步驟S11為提供一金屬滾筒110,所述金屬滾筒110能夠定義有一中心軸線111,所述金屬滾筒110具有一外表面112,所述外表面112呈圓柱形,並且所述金屬滾筒110至少於所述外表面112的部分是由鎳金屬、鉻金屬、銅金屬、鋁金屬等類型的金屬材料或合金材料所製成。Wherein, the transfer roller manufacturing step S1 includes: a first pre-step S11, a coating step S12, an exposure step S13, and a development step S14. As shown in FIG. 2, the first pre-step S11 is to provide a
如圖2所示,所述塗佈步驟S12為透過一塗佈設備200在所述金屬滾筒110的所述外表面112塗佈圍繞360度的一負光阻層300。本實施例中使用的所述塗佈設備200,其包括一塗佈機構210、相對設置於所述塗佈機構210下方的一旋轉模組220、一直線驅動模組230、以及相對設置於所述旋轉模組220下方的一承載台240。其中,所述金屬滾筒110設置於所述旋轉模組220上,透過所述旋轉模組220帶動所述金屬滾筒110繞著其中心軸線111旋轉,所述塗佈機構210設置於所述直線驅動模組230上,透過所述直線驅動模組230能夠帶動所述塗佈機構210沿著和所述中心軸線111平行的方向往復位移。當所述金屬滾筒110受到所述旋轉模組220驅動旋轉時,所述塗佈機構210同時受到所述直線驅動模組230驅動而沿著所述中心軸線111方向直線位移,而將負光阻材料塗佈於所述金屬滾筒110的所述外表面112,進而構成所述負光阻層300。As shown in FIG. 2, the coating step S12 is to coat a negative
如圖2及圖3所示,所述負光阻材料塗佈於所述金屬滾筒110表面後,形成360度圍繞所述金屬滾筒110的所述外表面112的所述負光阻層300。本實施例中,所述負光阻層300的厚度介於0.1微米(μm)~8微米的範圍之間。特別說明,本發明的所述塗佈步驟S12是以保持負光阻層300厚度的均勻性方式來實施,所以所述負光阻層300無須被限制在較薄的厚度。As shown in FIGS. 2 and 3, after the negative photoresist material is coated on the surface of the
於本實施例中,所述負光阻層300為能夠對340奈米(nm)~380奈米波長的紫外光線感光的負光阻劑材料所製成。更詳細地說,所述負光阻層300可以是由聚異戊二烯橡膠(Polyisoprene rubber)或環氧基聚合物(Epoxy-based polymer)等材料製成,但本發明並不以此為限。舉例來說,在本發明未繪示的其他實施例中,所述負光阻層300也可以由硫醇烯聚合物(Thiol-enes(OSTE)polymer)等負光阻劑材料製成。In this embodiment, the negative
如圖3及圖4所示,所述曝光步驟S13為將一第一波長光源400產生的光線穿透過至少一個光罩500而形成二維圖形化光源410,將所述二維圖形化光源410照射於所述負光阻層300的表面,並使得所述第一波長光源400和至少一個所述光罩500相對於所述負光阻層300的表面位移,而使得所述負光阻層300受到所述二維圖形化光源410照射的部位形成多個曝光區域301,而未被所述二維圖形化光源410照射的部位形成多個未曝光區域302。本實施例中,所述第一波長光源400可以是用來發出紫外光線、且較佳是包含有能夠發出介於340奈米~380奈米波長的紫外光線的至少一個發光二極體晶片,因此所述第一波長光源400產生的所述光線照射於所述負光阻層300後能夠使得所述負光阻層300感光。As shown in FIGS. 3 and 4, the exposure step S13 is to pass light generated by a first
更詳細地說,如圖3所示,於本實施例中,當進行所述曝光步驟S13時,所述金屬滾筒110能夠和所述第一波長光源400以及至少一個所述光罩500以所述中心軸線111為中心相對旋轉,同時所述第一波長光源400和至少一個所述光罩500能夠沿著和所述中心軸線111平行的方向和所述金屬滾筒110相對地直線往復位移,而使得所述二維圖形化光源410能夠照射到所述負光阻層300的所述表面的各個不同位置。In more detail, as shown in FIG. 3, in this embodiment, when the exposure step S13 is performed, the
如圖4所示,至少一個所述光罩500具有一透光基板510,以及設置於所述透光基板510上的多個遮蔽圖形520。其中,所述透光基板510可以為石英基板或玻璃基板,多個所述遮蔽圖形520可以是由圖形化的鉻金屬膜所形成,所述透光基板510未被多個所述遮蔽圖形520所遮蔽的位置形成了多個透光部分511。As shown in FIG. 4, at least one of the
如圖5所示,於本實施例中,所述曝光步驟S13所採用的至少一個所述光罩500的數量進一步限定為一個,所述光罩500上的所述遮蔽圖形520是由相互平行的多個第一軸向條紋521,以及和多個所述第一軸向條紋521正交的多個第二軸向條紋522所組成,因此使得所述遮蔽圖形520形成了格柵狀的二維圖形,而多個所述透光部分511則形成了矩形的形狀。As shown in FIG. 5, in this embodiment, the number of at least one
如圖6所示,所述顯影步驟S14為移除所述負光阻層300上多個所述未曝光區域302的材料,而使得所述負光阻層300形成多個壓印圖形310。更詳細地說,所述顯影步驟S14可以使用對應於所述負光阻層300材料的顯影劑進行,當進行所述顯影步驟S14時,所述負光阻層300上的多個所述未曝光區域302能夠被所述顯影劑溶解移除,而所述負光阻層300的多個所述曝光區域301的材料則無法被所述顯影劑溶解而被保留在所述金屬滾筒110的所述外表面112上而形成了多個所述壓印圖形310,進而使得所述負光阻層300和所述金屬滾筒110共同地構成一轉印滾輪100。As shown in FIG. 6, the developing step S14 is to remove the material of the plurality of
本實施例中,在所述顯影步驟S14中,負光阻層300的多個所述未曝光區域302的材料被完全地移除,因此使得任兩個相鄰的所述壓印圖形310之間形成貫穿過所述負光阻層300的一間隙,而使得所述金屬滾筒110的所述外表面112能夠從任兩個相鄰的所述壓印圖形310之間的所述間隙暴露出來。In this embodiment, in the developing step S14, the material of the plurality of
本實施例中,在所述顯影步驟S14中,任一個所述壓印圖形310的高度h大致上等同於所述負光阻層300的厚度,而使得任一個所述壓印圖形310的高度h介於1微米~8微米的範圍之間,任一個所述壓印圖形310的寬度W介於0.3微米~0.8微米之間,並且相鄰的任兩個所述壓印圖形310的間距P介於0.6微米~1.6微米之間。In this embodiment, in the developing step S14, the height h of any one of the embossed
如圖1及圖7、圖8所示,所述轉印母模製造步驟S2包括:第二前置步驟S21、滾輪壓印步驟S22、及光硬化步驟S23。其中,所述第二前置步驟S21為提供片狀的一母模基材610,以及位於所述母模基材610一表面上的一光硬化材料層620。其中,所述母模基材610可以為聚對苯二甲酸乙二酯(PET)材料所製成的薄膜,而所述光硬化材料層620能夠為紫外光硬化樹脂材料所製成。更詳細地說,所述光硬化材料層620能夠被395奈米~410奈米波長的紫外光照射而固化,並且所述光硬化材料層620在固化前具有可塑性。As shown in FIGS. 1, 7 and 8, the transfer master mold manufacturing step S2 includes: a second pre-step S21, a roller embossing step S22, and a light curing step S23. Wherein, the second pre-step S21 is to provide a sheet-shaped
所述轉印母模製造步驟S2當中的所述滾輪壓印步驟S22為透過所述轉印滾輪100滾壓於所述光硬化材料層620上,以使得所述光硬化材料層620形成有形狀互補於多個所述壓印圖形310的多個轉印微結構630。所述光硬化步驟S23為透過一第二波長光源700所產生的光線照射於所述光硬化材料層620,而使得所述光硬化材料層620和多個所述轉印微結構630固化,進而使得所述光硬化材料層620和所述母模基材610構成一轉印母模600。The roller embossing step S22 in the transfer master mold manufacturing step S2 is to roll on the photo-
本實施例中,所述第二波長光源700可以是用來發出紫外光線、且較佳是包含有能夠發出介於395奈米~410奈米波長的紫外光線的至少一個發光二極體晶片,因而使得所述光硬化材料層620能夠被所述第二波長光源700所發出的光線照射而固化。In this embodiment, the second
如圖7所示,本發明實施例中,於所述滾輪壓印步驟S22中,所述母模基材610和所述光硬化材料層620是沿著和所述轉印滾輪100轉動方向相同的方向從所述轉印滾輪100的一進料側101通過所述轉印滾輪100之後,再從一出料側102穿出所述轉印滾輪100。並且本實施例中,所述母模基材610具有透光性,並且所述第二波長光源700是安排在所述母模基材610相對於所述轉印滾輪100的一側,而使得所述第二波長光源700產生的所述光線能夠穿透過所述母模基材610後照射於所述光硬化材料層620和所述轉印滾輪100接觸的位置,因此使得所述轉印滾輪100在所述光硬化材料層620的所述表面壓印出多個所述轉印微結構630以後,能夠立刻透過所述第二波長光源700所產生的光線將所述光硬化材料層620和多個所述轉印微結構630固化,因而使得多個所述轉印微結構630成型後能夠快速地固化,而降低了多個所述轉印微結構630變形的機會,進而提高了多個所述轉印微結構630形狀的精密度。此外,所述轉印母模製造步驟S2當中所使用的所述第二波長光源700所產生的所述光線的波長和所述第一波長光源400所產生的所述光線的波長範圍不同。換句話說,用以使得所述光硬化材料層620固化的第二波長光源700所產生的所述光線的波長範圍和所述轉印滾輪100表面的所述負光阻層300的感光範圍不同,因而使得所述轉印滾輪100表面的所述負光阻層300和多個所述壓印圖形310被所述第二波長光源700產生的所述光線照射時不會受到影響。As shown in FIG. 7, in the embodiment of the present invention, in the roller embossing step S22, the
如圖1及圖9、圖10所示,所述光學膜片轉印步驟S3包括:第三前置步驟S31、膜片壓印步驟S32、和一熱固化步驟S33。其中,所述第三前置步驟S31為提供一透明的膜片基材810,及設置於所述膜片基材810表面的一底漆層820。其中所述膜片基材810可以為聚對苯二甲酸乙二酯(polyethylene terephthalate,PET)、或定向拉伸聚丙烯薄膜(Oriented Polypropylene,OPP)材料所製成的薄膜,而所述底漆層820可以為透明的熱固化的環氧樹脂材料(Epoxy)所製成,因此所述底漆層820能夠透過加熱手段而固化,並且所述底漆層820在固化前具有可塑性。As shown in FIGS. 1, 9 and 10, the optical film transfer step S3 includes: a third pre-step S31, a film embossing step S32, and a thermal curing step S33. Wherein, the third pre-step S31 is to provide a
如圖9及圖10所示,所述膜片壓印步驟S32是過所述轉印母模600的多個所述轉印微結構630壓印於所述底漆層820,而使得所述底漆層820形成形狀互補於多個所述轉印微結構630的多個光學微結構830。As shown in FIGS. 9 and 10, the film embossing step S32 is to emboss a plurality of the
所述熱固化步驟S33是透過加熱所述底漆層820,而使得所述底漆層820和多個所述光學微結構830受熱固化,而使得所述底漆層820和所述膜片基材810共同構成所述光學膜片800。In the thermal curing step S33, by heating the
[實施例二][Example 2]
參閱圖11至圖13所示,其為本發明的實施例二,需先說明的是,本實施例類似於上述實施例一,所以兩個實施例的相同處則不再加以贅述。Referring to FIG. 11 to FIG. 13, it is the second embodiment of the present invention. It should be noted that this embodiment is similar to the above-mentioned first embodiment, so the similarities between the two embodiments will not be repeated.
如圖11和圖12所示,於本實施例中,其中所述曝光步驟S13所使用的至少一個所述光罩500限定為一第一光罩500a和一第二光罩500b,其中所述第一光罩500a具有一第一透光基板510a,以及沿著第一軸向排列設置於所述第一透光基板510a上的多個第一遮蔽圖形520a。所述第二光罩500b具有一第二透光基板510b,和沿著垂直於所述第一軸向的第二軸向排列設置於所述第二透光基板510b上的多個第二遮蔽圖形520b。As shown in FIGS. 11 and 12, in this embodiment, the at least one
本實施例中,所述曝光步驟S13進一步區分為第一曝光子步驟S131和第二曝光子步驟S132。其中,所述第一曝光子步驟S131為將所述第一波長光源400穿透過所述第一光罩500a形成第一軸向的圖形化光源(圖未繪示)照射於所述負光阻層300的所述表面,而使得所述負光阻層300曝光,所述第二曝光子步驟S132為將所述第一波長光源400穿透過所述第二光罩500b形成第二軸向的圖形化光源(圖未繪示)照射於所述負光阻層300表面,而使得所述負光阻層曝光。In this embodiment, the exposure step S13 is further divided into a first exposure sub-step S131 and a second exposure sub-step S132. Wherein, the first exposure sub-step S131 is to irradiate the first-
如圖13所示,通過所述第一曝光子步驟S131和所述第二曝光子步驟S132使得所述負光阻層300重複曝光後,能夠在所述負光阻層300的表面形成多個曝光區域301和多個未曝光區域302的曝光圖形。其中,在所述第一曝光子步驟S131和所述第二曝光子步驟S132中,所述負光阻層300未被多個所述第一遮蔽圖形520a和多個所述第二遮蔽圖形520b遮蔽的位置形成了多個所述曝光區域301。而在所述第一曝光子步驟S131和所述第二曝光子步驟S132中,所述負光阻層300被多個所述第一遮蔽圖形520a和多個所述第二遮蔽圖形520b遮蔽的位置則形成了多個所述未曝光區域302。As shown in FIG. 13, after the
特別說明,本發明實施例二中,所述第一曝光子步驟S131和所述第二曝光子步驟S132中是分別使用所述第一光罩500a和所述第二光罩500b對所述負光阻層300曝光,然而本發明不限於此。舉例來說,本發明在所述第一曝光子步驟S131和所述第二曝光子步驟S132中也能夠使用同一個光罩對所述負光阻層300曝光。更詳細地說,本發明在實施完成所述第一曝光子步驟S131後,能夠將所述第一光罩500a旋轉90度以後,再以旋轉90度以後的所述第一光罩500a對所述負光阻層300進行所述第二曝光子步驟S132。In particular, in the second embodiment of the present invention, in the first exposure sub-step S131 and the second exposure sub-step S132, the
[實施例三][Example Three]
參閱圖14和圖15所示,其為本發明的實施例三,需先說明的是,本實施例類似於上述實施例一,所以兩個實施例的相同處則不再加以贅述。Refer to Figure 14 and Figure 15, which is the third embodiment of the present invention. It should be noted that this embodiment is similar to the above-mentioned first embodiment, so the similarities between the two embodiments will not be repeated.
如圖14及圖15所示,於本實施例中,所述顯影步驟S14中,負光阻層300的多個所述未曝光區域302的材料被移除的深度小於所述負光阻層300的厚度,因此使得所述負光阻層300在多個所述未曝光區域302的材料未被完全移除,而遮蔽於所述金屬滾筒110的所述外表面112。As shown in FIGS. 14 and 15, in the present embodiment, in the developing step S14, the material of the plurality of
更詳細地說,在本實施例中,所述負光阻層300的厚度t介於1微米~10微米的範圍,並且所述顯影步驟S14中,所述負光阻層300在任一個所述未曝光區域302位置的材料被所述顯影劑移除的材料深度介於0.2微米~0.6微米之間,因此使得所述負光阻層300在多個所述未曝光區域302位置的材料被移除的深度小於所述負光阻層300的厚度t,因而使得所述負光阻層300在多個所述未曝光區域302的位置形成了多個盲孔,並且使得任一個所述壓印圖形310的高度h等同於所述負光阻層300在任一個未曝光區域302被所述顯影劑所移除的材料深度,而介於0.2微米~0.6微米之間。In more detail, in this embodiment, the thickness t of the
[本發明實施例的技術效果][Technical Effects of Embodiments of the Invention]
本發明的其中一有益效果在於,本發明所提供的光學膜片的轉印式製造方法及其轉印母模的製造方法,其能夠通過在所述金屬滾筒的所述外表面塗佈所述負光阻層,且透過所述曝光步驟和所述顯影步驟而在所述負光阻層上形成多個所述壓印圖形,而構成所述轉印滾輪,進而透過所述轉印滾輪製造所述轉印母模,再透過所述轉印母模製造所述光學膜片。One of the beneficial effects of the present invention is that the transfer type manufacturing method of the optical film and the manufacturing method of the transfer master mold provided by the present invention can be achieved by coating the outer surface of the metal roller with the A negative photoresist layer, and through the exposure step and the development step, a plurality of the imprint patterns are formed on the negative photoresist layer to form the transfer roller, which is then manufactured through the transfer roller The transfer master mold is then used to manufacture the optical film through the transfer master mold.
因此使得本發明能夠大幅降低所述轉印母模,和使用所述轉印母模所製造的光學膜片的製造時間及製造成本。Therefore, the present invention can greatly reduce the manufacturing time and manufacturing cost of the transfer master mold and the optical film manufactured by using the transfer master mold.
以上所公開的內容僅為本發明的優選可行實施例,並非因此侷限本發明的專利範圍,所以凡是運用本發明說明書及圖式內容所做的等效技術變化,均包含於本發明的專利範圍內。The content disclosed above is only the preferred and feasible embodiments of the present invention, and does not limit the patent scope of the present invention. Therefore, all equivalent technical changes made by using the description and drawings of the present invention are included in the patent scope of the present invention. Inside.
100:轉印滾輪 101:進料側 102:出料側 110:金屬滾筒 111:中心軸線 112:外表面 200:塗佈設備 210:塗佈機構 220:旋轉模組 230:直線驅動模組 240:承載台 300:負光阻層 301:曝光區域 302:未曝光區域 310:壓印圖形 400:第一波長光源 410:二維圖形化光源 500:光罩 510:透光基板 511:透光部分 520:遮蔽圖形 521:第一軸向條紋 522:第二軸向條紋 500a:第一光罩 510a:第一透光基板 520a:第一遮蔽圖形 500b:第二光罩 510b:第二透光基板 520b:第二遮蔽圖形 600:轉印母模 610:母模基材 620:光硬化材料層 630:轉印微結構 700:第二波長光源 800:光學膜片 810:膜片基材 820:底漆層 830:光學微結構 S1:轉印滾輪製造步驟 S11:第一前置步驟 S12:塗佈步驟 S13:曝光步驟 S14:顯影步驟 S2:轉印母模製造步驟 S21:第二前置步驟 S22:滾輪壓印步驟 S23:光硬化步驟 S3:光學膜片轉印步驟 S31:第三前置步驟 S32:膜片壓印步驟 S33:熱固化步驟 P:壓印圖形間距 W:壓印圖形寬度 h:壓印圖形高度 t:負光阻層厚度 100: Transfer roller 101: feed side 102: discharge side 110: Metal roller 111: central axis 112: Outer surface 200: Coating equipment 210: coating mechanism 220: Rotating module 230: Linear drive module 240: bearing platform 300: negative photoresist layer 301: exposure area 302: unexposed area 310: Embossed graphics 400: first wavelength light source 410: Two-dimensional graphical light source 500: Mask 510: Transparent substrate 511: Translucent part 520: Shading graphics 521: First axial stripes 522: Second axial stripes 500a: first mask 510a: the first transparent substrate 520a: the first masking figure 500b: second mask 510b: second transparent substrate 520b: The second masking figure 600: transfer master 610: Master base material 620: Light hardening material layer 630: Transfer microstructure 700: second wavelength light source 800: optical diaphragm 810: Diaphragm substrate 820: Primer layer 830: Optical Microstructure S1: manufacturing steps of transfer roller S11: The first pre-step S12: Coating step S13: Exposure step S14: Development step S2: Manufacturing steps of transfer master mold S21: Second pre-step S22: Roller embossing steps S23: Light hardening step S3: Optical film transfer step S31: The third pre-step S32: Film embossing step S33: Thermal curing step P: Pitch of embossed graphics W: Width of embossed graphics h: height of embossed graphics t: thickness of negative photoresist layer
圖1為本發明實施例一的光學膜片的轉印式製造方法的流程示意圖。FIG. 1 is a schematic flow chart of a transfer type manufacturing method of an optical film according to Embodiment 1 of the present invention.
圖2為本發明實施例一的光學膜片的轉印式製造方法的塗佈步驟的示意圖。2 is a schematic diagram of the coating step of the transfer type manufacturing method of the optical film according to the first embodiment of the present invention.
圖3為本發明實施例一的光學膜片的轉印式製造方法的曝光步驟的立體示意圖。3 is a three-dimensional schematic diagram of the exposure step of the transfer type manufacturing method of the optical film according to the first embodiment of the present invention.
圖4為本發明實施例一的光學膜片的轉印式製造方法的曝光步驟的剖面放大示意圖。4 is an enlarged schematic cross-sectional view of the exposure step of the transfer type manufacturing method of the optical film according to the first embodiment of the present invention.
圖5為本發明實施例一的光學膜片的轉印式製造方法的曝光步驟所使用的光罩的平面示意圖。5 is a schematic plan view of the photomask used in the exposure step of the transfer type manufacturing method of the optical film according to the first embodiment of the present invention.
圖6為本發明實施例一實施完成顯影步驟後的負光阻層和金屬滾筒的局部剖面示意圖。6 is a schematic partial cross-sectional view of the negative photoresist layer and the metal roller after the development step is completed in the first embodiment of the present invention.
圖7為本發明實施例一的光學膜片的轉印式製造方法的轉印母模製造步驟的動作示意圖。FIG. 7 is a schematic diagram of the operation of the manufacturing step of the transfer master mold in the transfer manufacturing method of the optical film according to the first embodiment of the present invention.
圖8為從圖7的VIII部分所取的局部放大示意圖。Fig. 8 is a partial enlarged schematic view taken from part VIII of Fig. 7.
圖9及圖10為本發明實施例一的光學膜片的轉印式製造方法的光學膜片轉印步驟的示意圖。9 and 10 are schematic diagrams of the optical film transfer step in the transfer manufacturing method of the optical film according to the first embodiment of the present invention.
圖11為本發明實施例二的光學膜片的轉印式製造方法的第一曝光子步驟使用的第一光罩的平面示意圖。11 is a schematic plan view of the first photomask used in the first exposure substep of the transfer manufacturing method of the optical film according to the second embodiment of the present invention.
圖12為本發明實施例二的光學膜片的轉印式製造方法的第二曝光子步驟使用的第二光罩的平面示意圖。12 is a schematic plan view of the second photomask used in the second exposure substep of the transfer type manufacturing method of the optical film according to the second embodiment of the present invention.
圖13為本發明實施例二的光學膜片的轉印式製造方法通過第一曝光子步驟和第二曝光子步驟於負光阻層形成的曝光圖形的平面示意圖。13 is a schematic plan view of the exposure pattern formed on the negative photoresist layer through the first exposure sub-step and the second exposure sub-step in the transfer manufacturing method of the optical film according to the second embodiment of the present invention.
圖14為本發明實施例三的光學膜片的轉印式製造方法的曝光步驟的示意圖。14 is a schematic diagram of the exposure step of the transfer type manufacturing method of the optical film according to the third embodiment of the present invention.
圖15為本發明實施例三的光學膜片的轉印式製造方法的顯影步驟的示意圖。15 is a schematic diagram of the development step of the transfer type manufacturing method of the optical film according to the third embodiment of the present invention.
100:轉印滾輪 100: Transfer roller
101:進料側 101: feed side
102:出料側 102: discharge side
110:金屬滾筒 110: Metal roller
112:外表面 112: Outer surface
300:負光阻層 300: negative photoresist layer
310:壓印圖形 310: Embossed graphics
600:轉印母模 600: transfer master
610:母模基材 610: Master base material
620:光硬化材料層 620: Light hardening material layer
630:轉印微結構 630: Transfer microstructure
700:第二波長光源 700: second wavelength light source
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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TW201351062A (en) * | 2012-04-17 | 2013-12-16 | Univ Michigan | Methods for making micro-and nano-scale conductive grids for transparent electrodes and polarizers by to roll optical lithography |
US20180179053A1 (en) * | 2015-05-20 | 2018-06-28 | uBeam Inc. | Membrane bonding with photoresist |
TWM598227U (en) * | 2020-04-16 | 2020-07-11 | 光群雷射科技股份有限公司 | Production equipment for transfer print rollers |
TWM601832U (en) * | 2020-06-12 | 2020-09-21 | 光群雷射科技股份有限公司 | Lens transfer roller and lens transfer layer |
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TW201351062A (en) * | 2012-04-17 | 2013-12-16 | Univ Michigan | Methods for making micro-and nano-scale conductive grids for transparent electrodes and polarizers by to roll optical lithography |
US20180179053A1 (en) * | 2015-05-20 | 2018-06-28 | uBeam Inc. | Membrane bonding with photoresist |
TWM598227U (en) * | 2020-04-16 | 2020-07-11 | 光群雷射科技股份有限公司 | Production equipment for transfer print rollers |
TWM601832U (en) * | 2020-06-12 | 2020-09-21 | 光群雷射科技股份有限公司 | Lens transfer roller and lens transfer layer |
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