TWI721293B - Dry chemical adsorption treatment device for cyclone dust collection - Google Patents

Abstract

The invention provides a dry chemical adsorption processing device for cyclone dust collection, which includes a shell with a barrier element to distinguish the upper and lower shell spaces, the top of the shell has a gas outlet hole connected to the upper shell space, and the bottom of the shell has a gas inlet The tube communicates with the lower shell space, the adsorption assembly is located in the upper shell space, the gas transmission tube is inserted in the barrier element to communicate with the upper and lower shell spaces, and the cyclone assembly is located in the lower shell space, allowing the gas from the shell to enter the tube from The mixed gas received from the outside forms a cyclone, so that the dust in the mixed gas will fall to the bottom of the lower shell space under the influence of centrifugal force and gravity, and the remaining mixed gas will be transferred to the upper shell space through the gas transfer tube, and the harmful materials will be adsorbed by the adsorption components , In order to form filtered gas to be output through the gas output hole, the present invention prolongs the service life of the processing device by separating the dust.

Description

Dry chemical adsorption treatment device for cyclone dust collection

The invention relates to a chemical adsorption treatment device, in particular to a cyclone dust collection dry chemical adsorption treatment device combining airflow separation dust and dry adsorption technology.

With the advancement of technology, many convenient technological products, such as liquid crystal displays, smart phones or computers, have changed people's living habits and brought convenience to users. The formation of a technological product requires countless manufacturing processes, as well as production and processing in multiple factories, in order to form a technological product that is very common in the living environment.

The manufacturing of these technological products, such as semiconductors, from equipment manufacturing, integrated circuit manufacturing, wafer material manufacturing, photomask manufacturing, etc., to form wafers, packaging, and applications. In these processes, such as wafer manufacturing and subsequent cleaning, etc. The process uses high-flow volatile organic solvents such as acetone, methyl ethyl ketone, and isopropanol, which are easily oxidized and toxic gases, and plants are prone to form organic waste gas during the treatment process. Therefore, in order to protect the environment, many regulations must be passed to stipulate the emission standards of air pollutants.

Nowadays, there are many waste gas treatment methods, such as dry, wet, combustion or thermal cracking. The dry type is an adsorbent that uses chemical reaction and inorganic adsorption, and the exhaust gas is physically adsorbed in the adsorbent; the combustion type uses The burner burns and oxidizes the exhaust gas; the thermal cracking type uses a thermal heater to destroy the oxidation, or the heater performs a high-temperature reaction; the wet type uses a washing method, which is neutralized by alkali or acid dissolved in water, and is neutralized by an oxidant or deoxidizer The way to carry out redox.

Please refer to the first figure, the conventional dry chemical adsorption treatment device 10 uses a housing 12 in the path after the exhaust gas enters, with a chemical adsorbent 14 and a filter screen 16. When the exhaust gas passes through the filter screen 16 and the chemical After the adsorbent 14, the large particles of dust inside will be filtered out by the filter 16, and the chemical adsorbent 14 will adsorb the toxic gas in the exhaust gas, and the filtered gas will be output through the exhaust hole 122 of the housing 12 to make The filtered and adsorbed waste gas can meet the emission standards.

However, after using this adsorption treatment device for a period of time, due to the accumulation of dust, the filtering and adsorption effects will deteriorate. It is necessary to replace the filter or the chemical adsorbent regularly. If the exhaust gas entering the device is too dirty or forgotten If there is a problem during filtration, it will cause the related machines in the plant to crash. Whether it is frequent shutdowns to replace filters and chemical adsorbents, or filter clogging caused by dirty exhaust gas, the machine will crash. Both will seriously affect the production efficiency of the product.

In view of this, the present invention provides a dry chemical adsorption treatment device for cyclone dust collection. With a special airflow design, the dust in the exhaust gas can be effectively treated and the filter life can be prolonged.

The main purpose of the present invention is to provide a dry chemical adsorption treatment device for cyclone dust collection, which uses cyclone components to generate a cyclone cyclone in the incoming exhaust gas, and uses this cyclone cyclone and special structural design to remove the heavy dust in the exhaust gas. Fall naturally to avoid excessive dust accumulation on the adsorption components, thereby increasing the service life of the device.

Another object of the present invention is to provide a dry chemical adsorption treatment device for cyclone dust collection, which can effectively adsorb exhaust gas and avoid the emission of toxic gases into the external environment.

Another object of the present invention is to provide a dry chemical adsorption treatment device for cyclone dust collection. Naturally falling dust can be directly removed from the bottom of the device, and no shutdown is required to remove accumulated dust.

In order to achieve the above objective, the present invention provides a dry chemical adsorption treatment device for cyclone dust collection, which includes a shell with a barrier element to separate an upper shell space and a lower shell space from the inside. The barrier element is used to isolate the upper and lower shells. Lower shell space, the top of the shell has a gas outlet hole connected to the upper shell space, the bottom has a gas inlet pipe connected to the lower shell space, an adsorption assembly is located in the upper shell space, and a gas transmission tube penetrates the barrier element It is used to connect the upper and lower shell spaces. A cyclone component is located in the lower shell space. The mixed gas received from the outside by the gas inlet pipe of the shell can form a cyclone, and the dust in the mixed gas is subjected to centrifugal force and The influence of gravity falls to the bottom of the lower shell space, and the remaining mixed gas will be transferred to the upper shell space through the gas transmission tube, and the harmful material in the mixed gas is adsorbed by the adsorption component to form filtered gas and output through the gas outlet hole.

In the present invention, the cyclone assembly is a ring-shaped funnel-shaped structure, the bottom opening is smaller than the top opening, and a cyclone can be formed in the ring-shaped funnel-shaped structure to make the dust of the mixed air fall from the bottom opening.

In the present invention, the cyclone assembly may also include a first wind deflector, a gap is formed between the side and the inner wall of the housing, a second wind deflector is arranged on the first wind deflector, and the center of the second wind deflector has a An annular opening, a third wind deflector is arranged on the second wind deflector and is located on the annular opening, the third wind deflector is smaller than the second wind deflector and larger than the annular opening, the first wind deflector, A whirling cyclone can be formed between the second wind deflector and the third wind deflector, and the annular openings and gaps can make dust fall.

In the present invention, the bottom of the casing has a dust discharge port, and the dust at the bottom of the casing can be discharged from the dust discharge port.

In the present invention, there is a first filter element between the blocking element and the adsorption assembly for filtering the mixed gas transmitted between the adsorption elements through the gas transmission tube; there is a second filter element between the adsorption assembly and the gas output hole, and After filtering the filtered gas generated by the adsorption component.

In the present invention, the adsorption components are composed of the same or different adsorbents.

In the present invention, a high-pressure gas input hole is provided on the top of the casing, which can receive high-pressure gas from the outside so as to pass into the adsorption assembly and remove the dust clogged at the bottom of the adsorption assembly.

In the present invention, the gas inlet pipe is a curved pipe, and the opening of the curved pipe is an inclined opening.

The following detailed descriptions are combined with specific embodiments and accompanying drawings to make it easier to understand the purpose, technical content, characteristics and effects of the present invention.

Dry chemical adsorption treatment device, in the face of the harmless treatment of various process exhaust gas in the semiconductor field, can effectively remove harmful gases generated by dry etching, ion implantation, physical or chemical vapor deposition and other processes, by adsorbing the adsorption material in the component and The waste gas is treated by physical adsorption and chemical reaction. According to different waste gas treatments, different specifications of adsorption components can be designed to produce the best adsorption design. The addition of cyclone components can reduce the blockage of the adsorption components and prolong the timeliness of waste gas treatment. , At the same time, it also affects the production efficiency of the machine.

First, referring to the second and third figures of the present invention, a dry chemical adsorption device 20 for cyclone dust collection includes a housing 22, an adsorption assembly 24, a gas transmission tube 26, and a cyclone assembly 28. The housing 22 has a blocking element 221 to separate an upper housing space 222 and a lower housing space 223 from the inside of the housing 22, and the blocking element 221 isolates the upper housing space 222 and the lower housing space 223; the housing 22 has a gas outlet hole 224 at the top that communicates with the upper housing space 222, and a gas inlet pipe 225 at the bottom communicates with the lower housing space 223. In this embodiment, the gas inlet pipe 225 is a curved pipe with an opening. It is an inclined surface opening; the bottom of the housing 22 also has a dust discharge port 226; the adsorption assembly 24 is located in the upper housing space 222. In this embodiment, the adsorption assembly 24 has adsorbents 242, 242' with different sizes, 242", but the present invention does not limit what kind of chemical composition the adsorption component 24 should be composed of adsorbents 242, 242', 242", and can be the same adsorbent 242 or different adsorbents 242, 242' , 242", the user can decide which chemical composition of the adsorbent 242, 242', 242" to use according to the exhaust gas generated by the installed machine; the gas transmission pipe 26 is inserted in the barrier element 221 for communication The upper housing space 222 and the lower housing space 223; the cyclone assembly 28 is located in the lower housing space 223; in addition, the housing 22 is also provided with a first filter element 30 and a second filter element 32, the first filter element 30 It is arranged between the blocking element 221 and the adsorption assembly 24, and the second filter element 32 is arranged between the adsorption assembly 24 and the gas output hole 224. In the present invention, the first filter element 30 and the second filter element 32 are filter screens.

In this embodiment, please refer to Figure 4, and refer to Figures 2 and 3 at the same time. The cyclone assembly 28 further includes a first wind deflector 282, a second wind deflector 284, and a third wind deflector 282. The wind deflector 286, the side of the first wind deflector 282 and the inner wall of the housing 22 form a gap G1, the second wind deflector 284 is arranged on the first wind deflector 282, and the center of the second wind deflector 284 has An annular opening O1, the third wind deflector 286 is arranged on the second wind deflector 284, and is located on the annular opening O1, the size of the third wind deflector 286 is smaller than the second wind deflector 284 and larger than the annular Opening O1.

After describing the structure of the above-mentioned embodiment of the present invention, the operation mode of the present invention will be described in detail. Please refer to the fifth figure of the present invention, and please refer to the second, third and fourth figures at the same time. The dry chemical adsorption device 20 can use the gas inlet pipe 225 of the housing 22 to connect the exhaust gas pipeline of an external machine (not shown), so that the mixed gas A1 in the pipeline, such as exhaust gas containing toxic gas and dust, is free The gas inlet pipe 225 enters. The inlet direction of the mixed gas A1 is controlled by the special shape and opening angle of the gas inlet pipe 225, and then the mixed gas A1 is moved around the inner wall of the housing 22 and above and below the first windshield 282 The surface flows in layers according to different gravity, and then flows from the annular opening O1 of the second wind deflector 284 to the third wind deflector 286 to form a cyclone cyclone. When the mixed gas A1 forms a cyclone on the first wind deflector 282, When the second windshield 284 and the third windshield 286 are between the second windshield 284 and the third windshield 286, the heavier particles in the mixed gas A1, such as dust A2, will be affected by the centrifugal force and gravity, and fall between the annular opening O1 and the gap G1 to be removed. Fall to the bottom of the casing 22, and the remaining mixed gas A1 will move upward from the third wind deflector 286, and then be transmitted to the first filter element 30 through the gas transmission pipe 26 for filtration, and the filtered mixed gas A1 is transmitted to the adsorption assembly 24 In, the adsorbents 242, 242', 242" of the adsorption assembly 24 adsorb the harmful materials in the mixed gas A1. After the adsorption assembly 24 absorbs the harmful materials in the mixed gas A1, a filtered gas A3 will be formed to filter the gas A3 then flows to the second filter element 32 to filter and pass, so as to be output from the gas output hole 224 to an external pipeline (not shown in the figure).

Following the upper stage, the dust falling on the bottom of the housing 22 can be discharged through the dust outlet 226. The present invention does not limit the way of extracting the dust. For example, a switch can be designed at the dust outlet 226, and an external extraction device can be used for extraction, or The fallen dust is accumulated into an extractable space through the dust outlet 226, and the user can remove the dust from the outside. No matter what method, it is not necessary to stop the operation of the dry chemical adsorption device 20 for cyclone dust collection. , There is no need to involve related machines connected to the dry chemical adsorption device 20 of cyclone dust collection.

Furthermore, referring to the sixth figure of the present invention, a high-pressure gas input hole 227 can also be designed on the top of the housing 22, which can receive high-pressure gas A4 from the outside of the dry chemical adsorption device 20 for collecting dust by a cyclone. The dust-collecting dry chemical adsorption device 20 accumulates too dirty mixed gas in a short period of time, for example, when there is too much dust in it, and cannot immediately fall through the cyclone formed by the cyclone assembly 28, it is easy to fall in the first filter element 30 and the adsorption assembly 24 Accumulations are formed at the bottom, resulting in insufficient pressure of the output filtered gas. At this time, the gas inlet pipe 225 and the gas outlet hole 224 of the housing 22 can be closed, and then high-pressure gas can be introduced through the high-pressure gas input hole 227, so as to discharge the accumulation at the bottom of the first filter element 30 and the adsorption assembly 24 downward. Open to fall to the bottom of the housing 22.

In addition, the present invention can also provide a cyclone assembly of another structure. Please refer to the seventh figure of the present invention. The cyclone assembly 42 of the dry chemical adsorption device 40 for cyclone dust collection is an annular funnel-shaped structure. The cyclone assembly The bottom opening 422 of 42 is smaller than the top opening 424. The rest of the structure of the dry chemical adsorption device 40 for cyclone dust collection is the same as the above-mentioned embodiment, and will not be repeated here. However, the cyclone assembly 42 of this annular funnel-shaped structure can make the gas enter the mixed gas A1 flowing into the pipe 225, and a cyclone is formed in this annular funnel-like structure, and centrifugal force and gravity are used to make the dust A2 spin the cyclone assembly 42 The bottom opening 422 drops. The other methods of adsorbing the mixed gas A1 and forming the filtered gas are the same as the above-mentioned embodiment, and will not be repeated here.

The present invention is mainly to add a cyclone component, the exhaust gas is used to form an airflow inside first, and the heavier or larger dust is dropped first by centrifugal force and gravity to prevent the exhaust gas from directly clogging the filter screen or the adsorption component. As a result, the filter screen or adsorption components need to be replaced and cleaned frequently. If it is necessary to perform replacement and cleaning, it is necessary to stop the entry of exhaust gas, so that the machines in the front-end process also need to be shut down, and the replacement schedule of the later-end exhaust gas treatment, if it is often required to shut down, will affect the output of the front-end process The product efficiency affects the production efficiency. Assuming that in order to improve performance, replacement and cleaning are done from time to time. Once the device for treating exhaust gas is blocked, it will also cause a crash and affect performance. Therefore, the present invention can greatly improve the efficiency of waste gas treatment, avoid the dust clogging caused by the treatment device, and in the dust treatment, the whole machine does not need to be disassembled to deal with the clogging. The method of separating gas and dust can be used separately. Dispose of the fallen dust.

Therefore, the present invention is obviously different from the conventional processing device in terms of increasing the service life of the dry chemical adsorption processing device, or improving the production efficiency of the connected machine, or dust processing. Taiwan, and even the completion time of the entire industrial product, bring a good performance improvement.

The above-mentioned embodiments are only to illustrate the technical ideas and features of the present invention, and their purpose is to enable those who are familiar with the art to understand the content of the present invention and implement them accordingly. When they cannot be used to limit the patent scope of the present invention, That is, all equal changes or modifications made in accordance with the spirit of the present invention should still be covered by the patent scope of the present invention.

10‧‧‧Dry chemical adsorption treatment device 12‧‧‧Shell 122‧‧‧Exhaust hole 14‧‧‧Chemical adsorbent 16‧‧‧Filter 20‧‧‧Dry chemical adsorption device for cyclone dust collection 22‧‧ ‧Shell 221‧‧‧Blocking element 222‧‧‧Upper shell space 223‧‧‧Lower shell space 224‧‧‧Gas output hole 225‧‧‧Gas inlet pipe 226‧‧‧Dust discharge port 227‧‧‧ High-pressure gas input holes 24‧‧‧Adsorption components 242, 242', 242”‧‧Adsorbent 26‧‧‧Gas transmission pipe 28‧‧‧Cyclone component 282‧‧‧First wind baffle 284‧‧‧Second Wind deflector 286‧‧‧Third wind deflector 30‧‧‧First filter element 32‧‧‧Second filter element 40‧‧‧Dry chemical adsorption device for cyclone dust collection 42‧‧‧Cyclone assembly 422‧‧‧ Bottom opening 424 ‧ ‧ Top opening A1 ‧ ‧ Mixed gas A2 ‧ ‧ Dust A3 ‧ ‧ Filter gas A4 ‧ ‧ High pressure gas G1 ‧ ‧ Gap O1 ‧ ‧ Ring opening

The first figure is a schematic diagram of the structure of a conventional dry chemical adsorption treatment device. The second figure is a schematic diagram of the structure of the first embodiment of the present invention. The third figure is a schematic diagram of the gas inlet pipe in the present invention. The fourth figure is a schematic diagram of the positional relationship of the wind deflectors of the cyclone assembly of the present invention. The fifth figure is a schematic diagram of the operation of introducing gas in the first embodiment of the present invention. The sixth figure is a schematic diagram of the high-pressure gas input hole provided with high-pressure gas in the present invention. The seventh figure is a schematic diagram of the structure of the second embodiment of the present invention.

20‧‧‧Dry chemical adsorption device for cyclone dust collection

22‧‧‧Shell

221‧‧‧Barrier element

222‧‧‧Upper shell space

223‧‧‧Lower shell space

224‧‧‧Gas output hole

225‧‧‧Gas inlet pipe

226‧‧‧Dust discharge outlet

24‧‧‧Adsorption component

242、242’、242”‧‧‧Adsorbent

26‧‧‧Gas transfer tube

28‧‧‧Cyclone Components

282‧‧‧First Windshield

284‧‧‧Second wind deflector

286‧‧‧Third Windshield

30‧‧‧First filter element

32‧‧‧Second filter element

G1‧‧‧Gap

O1‧‧‧Annular opening

Claims (8)

A dry chemical adsorption treatment device for cyclone dust collection, comprising: a housing with a blocking element to separate an upper housing space and a lower housing space from the inside, and the blocking element isolates the upper housing space and The lower shell space, the top of the shell has a gas outlet hole communicating with the upper shell space, and the bottom has a gas inlet pipe communicating with the lower shell space, the gas inlet pipe is a curved pipe; an adsorption assembly , Which is located in the upper shell space; a gas transmission tube which penetrates through the barrier element to communicate with the upper shell space and the lower shell space; and a cyclone assembly which is located in the lower shell The cyclone component can make the mixed gas received from the outside by the gas inlet pipe of the casing form a cyclonic cyclone, so that the dust in the mixed gas will fall to the bottom of the lower casing space under the influence of gravity and centrifugal force. The mixed gas is transmitted to the upper shell space through the gas transmission tube, and the harmful material in the mixed gas is adsorbed by the adsorption component to form filtered gas to be output through the gas output hole, wherein the cyclone component further includes ：A first wind deflector, the side of which forms a gap with the inner wall of the housing; a second wind deflector, which is arranged on the first wind deflector, and the center of the second wind deflector has a An annular opening; and a third wind deflector, which is arranged on the second wind deflector and located on the annular opening, the third wind deflector is smaller than the second wind deflector and larger than the ring The cyclone can be formed between the first wind deflector, the second wind deflector, and the third wind deflector, and the annular opening and the gap can make the dust fall. The dry chemical adsorption treatment device for cyclone dust collection according to claim 1, wherein the cyclone component is a ring-shaped funnel-shaped structure, the bottom opening is smaller than the top opening, the ring-shaped funnel The cyclone can be formed in the shape structure, so that the dust of the mixed air falls from the bottom opening. The dry chemical adsorption treatment device for cyclone dust collection according to claim 1, wherein the bottom of the casing further has a dust discharge port, and the dust at the bottom of the casing can be discharged from the dust discharge port. The dry chemical adsorption treatment device for cyclone dust collection according to claim 1, wherein there is a first filter element between the barrier element and the adsorption assembly for filtering the gas transmission tube to the adsorption element between the mixed composition. The dry chemical adsorption treatment device for cyclone dust collection according to claim 4, wherein there is a second filter element between the adsorption assembly and the gas output hole for filtering the filtered gas generated after passing through the adsorption assembly. The dry chemical adsorption treatment device for cyclone dust collection according to claim 1, wherein the adsorption components are composed of the same or different adsorbents. The dry chemical adsorption treatment device for cyclone dust collection according to claim 1, wherein the top of the casing further has a high-pressure gas input hole, which can receive high-pressure gas from the outside to pass into the adsorption assembly to eliminate the adsorption The dust clogged at the bottom of the module. The dry chemical adsorption treatment device for cyclone dust collection according to claim 1, wherein the opening of the curved tube is an inclined opening.

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