TW202007433A - Dry chemisorption processing device for cyclonic dust collection capable of prolong lifespan of processing device by separating dust - Google Patents

Abstract

The invention provides a dry chemisorption processing device for cyclonic dust connection, which comprises a shell having a partition member element to be divided into an upper shell space and a lower shell space. The top of the shell is provided with a gas outlet hole communicated with the upper shell space, and the bottom is provided with a gas inlet pipe communicated with the lower shell space. An absorption member is located in the upper shell space. A gas transmission pipe is penetrated in the partition member and communicates the upper shell space with the lower shell space. A cyclone member is located in the lower shell space to enable the gas mixture received from the outside from the gas inlet pipe of the shell forming a cyclone, such that the dust in the gas mixture may fall to the bottom of the lower shell space by the effect of centrifugal force and gravity, and the remaining gas mixture may be transmitted to the upper shell space through the gas transmission pipe, wherein the harmful matters may be adsorbed by the adsorption member and the filtered gas may be outputted through the gas output hole. The invention may prolong the lifespan of the processing device by separating dust.

Description

Dry-type chemical adsorption treatment device for cyclone dust collection

The invention relates to a chemical adsorption treatment device, especially a dry chemical adsorption treatment device combining cyclone dust collection with airflow separation dust and dry adsorption technology.

With the advancement of technology, many convenient technological products have been brought to users, such as LCD monitors, smart phones or computers, etc., which have changed people's living habits and brought convenience to users. To form a technology product, it takes countless manufacturing processes and production and processing through multiple factories to form a very common technology product in the living environment.

The manufacture of these technological products, such as semiconductors, from equipment manufacturing, integrated circuit manufacturing, wafer material manufacturing, photomask manufacturing, etc., to form wafers, packaging, and applications. In these processes, such as wafer manufacturing processes and subsequent cleaning, etc. The process will use high-flow volatile organic solvents such as acetone, methyl ethyl ketone, and isopropyl alcohol that are easily oxidized and toxic gases. Factories are likely to form organic waste gas during the process. Therefore, in order to protect the environment, it is necessary to stipulate the emission standards of air pollutants through many regulations.

Nowadays, there are many waste gas treatment methods, such as dry type, wet type, combustion type or thermal cracking type. The dry type is an adsorbent that uses chemical reactions and inorganic adsorption, and the physical adsorption of exhaust gas is used in the adsorbent; the combustion type is the use of The burner burns and oxidizes the exhaust gas; the thermal cracking type uses a hot heater to destroy the oxidation, or the heater performs a high-temperature reaction; the wet type uses a washing method, which is neutralized by alkali or acid dissolved in water, and neutralized by an oxidant or deoxidizer Ways to carry out redox.

Referring to the first figure, the conventional dry chemical adsorption treatment device 10 uses a casing 12 in the path after the exhaust gas enters, and is provided with a chemical adsorbent 14 and a filter 16 when the exhaust gas passes through the filter 16 and the chemical After the adsorbent 14, the large particles of dust will be filtered by the filter 16, and the chemical adsorbent 14 will adsorb the toxic gas in the exhaust gas, and the filtered gas will be output through the exhaust hole 122 of the housing 12, so that The filtered and adsorbed exhaust gas can meet the emission standards.

However, after using this adsorption treatment device for a period of time, due to the accumulation of dust, the filtering and adsorption effects will be deteriorated. It is necessary to regularly replace the filter or chemical adsorbent. If the exhaust gas entering the device is too dirty or forgotten Replacement, if problems occur during filtration, it will cause the related machines in the plant to crash together, whether it is frequent shutdown to replace the filter screen, chemical adsorbent, or the filter is blocked due to the dirty exhaust gas. All will seriously affect the production efficiency of the product.

In view of this, the present invention provides a dry-type chemical adsorption treatment device for cyclone dust collection. With a special airflow design, it can effectively perform the dust treatment in the exhaust gas and extend the life of the filtration.

The main object of the present invention is to provide a dry-type chemical adsorption treatment device for cyclone dust collection, which uses cyclone components to generate cyclones for the incoming exhaust gas, and uses this cyclone cyclone and special structural design to remove the heavier dust in the exhaust gas Fall naturally to prevent excessive dust from accumulating on the adsorption assembly, thereby increasing the service life of the device.

Another object of the present invention is to provide a dry-type chemical adsorption treatment device for cyclone dust collection, which can effectively perform the adsorption of exhaust gas and avoid the discharge of toxic gases into the external environment.

Still another object of the present invention is to provide a dry-type chemical adsorption treatment device for cyclone dust collection. Naturally falling dust can be directly removed from the bottom of the device, and no shutdown is required when removing accumulated dust.

In order to achieve the above object, the present invention provides a dry-type chemical adsorption treatment device for cyclone dust collection, which includes a housing with a barrier element to distinguish an upper housing space and a lower housing space from the inside, the barrier element is used to isolate, In the lower housing space, a gas output hole at the top of the housing communicates with the upper housing space, a gas inlet tube at the bottom communicates with the lower housing space, an adsorption component is located in the upper housing space, and a gas transmission tube is inserted through the blocking element In the middle, it is used to connect the upper and lower housing spaces. A cyclone component is located in the lower housing space, which can make the mixed gas received from the outside of the gas inlet pipe of the housing form a cyclonic cyclone, and make the dust in the mixed gas subject to centrifugal force and The influence of gravity falls to the bottom of the lower housing space, and the remaining mixed gas is transmitted to the upper housing space through the gas transmission tube, and the harmful materials in the mixed gas are adsorbed by the adsorption component to form the filtered gas to be output through the gas output hole.

In the present invention, the cyclone component is a ring-shaped funnel-shaped structure, the bottom opening is smaller than the top opening, and a cyclonic cyclone can be formed in the ring-shaped funnel-shaped structure to make the mixed air dust fall from the bottom opening.

In the present invention, the cyclone assembly may also include a first wind deflector, a gap is formed between the side and the inner wall of the housing, a second wind deflector is provided on the first wind deflector, and the center of the second wind deflector has a A ring-shaped opening, a third wind deflector is disposed on the second wind deflector and is located on the ring-shaped opening, the third wind deflector is smaller than the second wind deflector and larger than the ring-shaped opening, the first wind deflector, A cyclonic cyclone can be formed between the second wind deflector and the third wind deflector, and the ring-shaped opening and the gap can make the dust fall.

In the present invention, the bottom of the casing has a dust discharge port, and the dust at the bottom of the casing can be discharged from the dust discharge port.

In the present invention, there is a first filter element between the blocking element and the adsorption component, which is used to filter the mixed gas transmitted between the adsorption elements through the gas transmission tube; there is a second filter element between the adsorption component and the gas output hole. The filtered gas generated after filtering through the adsorption component.

In the present invention, the adsorption component is composed of the same or different adsorbents.

In the present invention, a high-pressure gas input hole is provided on the top of the casing, and the high-pressure gas can be received from the outside to pass into the adsorption component to remove the dust blocked at the bottom of the adsorption component.

In the present invention, the gas inlet pipe system is a curved pipe, and the curved pipe opening is an inclined opening.

The following detailed description will be made with specific embodiments and accompanying drawings to make it easier to understand the purpose, technical content, features, and effects of the present invention.

The dry chemical adsorption treatment device can effectively remove the harmful gases generated by the dry etching, ion implantation, physical or chemical vapor deposition processes in the face of the harmless treatment of exhaust gases in various processes in the semiconductor field. Exhaust gas is generated by physical adsorption and chemical reaction. According to different exhaust gas treatment, different specifications of adsorption components can be designed to produce the best adsorption design. The cyclone component can reduce the blocking of the adsorption component and extend the timeliness of exhaust gas treatment , At the same time, it affects the production efficiency of the machine.

First of all, please refer to the second and third figures of the present invention. A cyclone dust collecting dry chemical adsorption device 20 includes a housing 22, an adsorption assembly 24, a gas transmission pipe 26 and a cyclone assembly 28. The housing 22 has a blocking element 221 to distinguish an upper shell space 222 and a lower shell space 223 from the inside of the shell 22, and the blocking element 221 isolates the upper shell space 222 and the lower shell space 223; 22 A gas output hole 224 at the top communicates with the upper housing space 222, and a gas inlet tube 225 at the bottom communicates with the lower housing space 223. In this embodiment, the gas inlet tube 225 is a curved tube with a curved shape and its opening It is a sloped opening; the bottom of the housing 22 also has a dust discharge port 226; the adsorption assembly 24 is located in the upper housing space 222, in this embodiment, the adsorption assembly 24 has different sizes of adsorbents 242, 242', 242", but the present invention does not limit what chemical composition of the adsorbent 24 should be composed of adsorbents 242, 242', 242", and can be the same adsorbent 242 or different adsorbents 242, 242' , 242", the user can decide which chemical components of the adsorbent 242, 242', 242" to use according to the exhaust gas generated by the installed machine; the gas transmission tube 26 is penetrated in the blocking element 221 for communication The upper housing space 222 and the lower housing space 223; the cyclone assembly 28 is located in the lower housing space 223; In addition, the housing 22 is also provided with a first filter element 30 and a second filter element 32, the first filter element 30 It is arranged between the blocking element 221 and the adsorption component 24, and the second filter element 32 is arranged between the adsorption component 24 and the gas output hole 224. In the present invention, the first filter element 30 and the second filter element 32 are filter screens.

In this embodiment, please refer to the fourth figure and refer to the second and third figures at the same time. The cyclone assembly 28 further includes a first wind deflector 282, a second wind deflector 284 and a third A windshield 286, a gap G1 is formed between the side of the first windshield 282 and the inner wall of the housing 22, the second windshield 284 is disposed on the first windshield 282, and the center of the second windshield 284 has An annular opening O1, a third windshield 286 is disposed on the second windshield 284, and is located on the annular opening O1, the size of the third windshield 286 is smaller than the second windshield 284 and larger than the ring Opening O1.

After explaining the structure of the above embodiment of the present invention, the operation mode of the present invention will be described in detail. Please refer to the fifth diagram of the present invention, and refer to the second, third and fourth diagrams at the same time. The dry-type chemical adsorption device 20 can use the gas inlet pipe 225 of the housing 22 to connect to the exhaust pipe of an external machine (not shown), so that the mixed gas A1 in the pipe, such as exhaust gas containing toxic gas and dust, The gas inlet pipe 225 enters, the mixed gas A1 is controlled by the special shape and opening angle of the gas inlet pipe 225, and then the mixed gas A1 is wound around the inner wall of the housing 22 and above and below the first wind deflector 282 The surface flows in different layers according to the gravity, and then flows from the annular opening O1 of the second windshield 284 to the third windshield 286 to form a cyclonic cyclone. When the mixed gas A1 forms a cyclone on the first windshield 282, Between the second wind deflector 284 and the third wind deflector 286, the heavier particles in the mixed gas A1, such as dust A2, will be affected by the centrifugal force and gravity, and fall from the annular opening O1 and the gap G1 to fall Fall to the bottom of the housing 22, and the remaining mixed gas A1 will be upward from the third windshield 286, and then transmitted to the first filter element 30 through the gas transmission pipe 26 for filtering, the filtered mixed gas A1 is then transmitted to the adsorption assembly 24 In the process, the adsorbent 242, 242', 242" of the adsorbing component 24 adsorbs the harmful materials in the mixed gas A1. When the adsorbing component 24 adsorbs the harmful materials in the mixed gas A1, a filtered gas A3 is formed. A3 flows to the second filter element 32 for filtering and passing through, and is output from the gas output hole 224 to an external pipeline (not shown).

Following the upper stage, the dust falling on the bottom of the housing 22 can be discharged through the dust discharge port 226. The present invention does not limit the way of extracting dust. For example, a switch can be designed at the dust discharge port 226 to use an external extraction device for extraction, or The accumulated dust is accumulated into an extractable space through the dust discharge port 226, and the user can remove the dust on the outside by himself. In any way, the operation of the dry chemical adsorption device 20 of the cyclone dust collection does not need to be stopped No need to be involved in the relevant machine connected to the cyclone dust collection dry chemical adsorption device 20.

Furthermore, referring to the sixth figure of the present invention, a high-pressure gas input hole 227 can also be designed on the top of the housing 22, which can receive the high-pressure gas A4 from the outside of the dry-type chemical adsorption device 20 of the cyclone dust collector, assuming the cyclone The dry-type chemical adsorption device 20 for dust collection accumulates a dirty gas mixture in a short period of time, for example, it has too much dust, and cannot be immediately dropped by the cyclone formed by the cyclone component 28, it is easy for the first filter element 30 and the adsorption component 24 Accumulation forms at the bottom, resulting in insufficient pressure of the filtered gas output. At this time, the gas inlet pipe 225 and the gas outlet hole 224 of the housing 22 can be closed, that is, high-pressure gas can be introduced through the high-pressure gas inlet hole 227 to discharge the accumulation at the bottom of the first filter element 30 and the adsorption assembly 24 downward To fall to the bottom of the housing 22.

In addition, the present invention can also provide a cyclone assembly with another structure. Please refer to the seventh diagram of the present invention. The cyclone assembly 42 of the dry chemical adsorption device 40 of the cyclone dust collector is an annular funnel-shaped structure. The cyclone assembly The bottom opening 422 of 42 is smaller than the top opening 424, and the remaining structure of the dry-type chemical adsorption device 40 of the cyclone dust collector is the same as the above embodiment, and will not be repeated here. However, the cyclone component 42 of the ring-shaped funnel-shaped structure can make the mixed gas A1 flowing into the gas inlet pipe 225. In this ring-shaped funnel-shaped structure, a cyclonic cyclone is formed. Using centrifugal force and gravity, the dust A2 spins the cyclone component 42 The bottom opening 422 falls. The remaining methods of adsorbing the mixed gas A1 and forming the filtered gas are the same as those in the above embodiment, and will not be repeated here.

The present invention is mainly to add a cyclone component, use the exhaust gas to form the air flow first, and use the centrifugal force and gravity to drop the heavier or larger dust first, so as to avoid the exhaust gas directly blocking the filter or the adsorption component. As a result, the filter screen or adsorption components must be replaced and cleaned frequently. If the replacement and cleaning are to be carried out, the exhaust gas must be stopped, so that the machines in the front-end process also need to be shut down, and the replacement schedule for the exhaust gas treatment in the back stage, if it needs to be shut down from time to time, will affect the output of the front-end process. Product efficiency affects production efficiency. It is assumed that in order to improve performance, replacement and cleaning are not performed from time to time. Once the device for processing exhaust gas is blocked, it will also cause downtime and affect performance. Therefore, the present invention can greatly improve the efficiency of exhaust gas treatment, avoiding the dust clogging caused by the treatment device, and in the dust treatment, it is not necessary to disassemble the entire machine to deal with the clogging. The method of separating gas and dust can be used by itself Dispose of the falling dust.

Therefore, the present invention is obviously different from the conventional processing device in terms of increasing the service life of the dry chemical adsorption processing device, improving the production efficiency of the connected machine, or dust treatment, and can Taiwan, and even the completion time of the entire industrial product, bring good performance improvement.

The above-mentioned embodiments are only to illustrate the technical ideas and features of the present invention, and its purpose is to enable those skilled in the art to understand the content of the present invention and implement it accordingly, but cannot limit the patent scope of the present invention, That is to say, any equal changes or modifications made according to the spirit disclosed by the present invention should still be covered by the patent scope of the present invention.

10‧‧‧ dry chemical adsorption treatment device 12‧‧‧ case 122‧‧‧ exhaust hole 14‧‧‧ chemical adsorbent 16‧‧‧ filter 20 20‧‧‧ cyclone dust collection dry chemical adsorption device 22‧‧ ‧Shell 221‧‧‧Blocking element 222‧‧‧Upper housing space 223‧‧‧Lower housing space 224‧‧‧Gas output hole 225‧‧‧Gas inlet pipe 226‧‧‧Dust discharge port 227‧‧‧ High-pressure gas input hole 24‧‧‧adsorption assembly 242, 242′, 242″‧‧‧adsorbent 26‧‧‧ gas transmission pipe 28‧‧‧ cyclone assembly 282‧‧‧first windshield 284‧‧‧ second Windshield 286‧‧‧ Third windshield 30‧‧‧First filter element 32‧‧‧Second filter element 40‧‧‧Cyclone dust collection dry chemical adsorption device 42‧‧‧Cyclone assembly 422‧‧‧ Bottom opening 424‧‧‧Top opening A1‧‧‧ Mixed gas A2‧‧‧Dust A3‧‧‧Filter gas A4‧‧‧High pressure gas G1‧‧‧Gap O1‧‧‧Annular opening

The first figure is a schematic structural view of a conventional dry chemical adsorption treatment device. The second figure is a schematic structural view of the first embodiment of the present invention. The third figure is a schematic diagram of the gas inlet pipe in the present invention. The fourth figure is a schematic diagram of the positional relationship of the windshields of the cyclone assembly in the present invention. The fifth figure is a schematic diagram of the operation of the gas in the first embodiment of the present invention. The sixth figure is a schematic diagram of the present invention provided with a high-pressure gas input hole to pass high-pressure gas. The seventh figure is a schematic structural view of a second embodiment of the present invention.

20‧‧‧ Dry chemical adsorption device for cyclone dust collection

22‧‧‧Housing

221‧‧‧Blocking element

222‧‧‧Upper housing space

223‧‧‧Lower shell space

224‧‧‧Gas output hole

225‧‧‧Gas inlet tube

226‧‧‧ Dust outlet

24‧‧‧Adsorption module

242, 242’, 242” ‧‧‧ adsorbent

26‧‧‧gas transmission tube

28‧‧‧Cyclone component

282‧‧‧The first windshield

284‧‧‧Second windshield

286‧‧‧third windshield

30‧‧‧First filter element

32‧‧‧Second filter element

G1‧‧‧Gap

O1‧‧‧Annular opening

Claims (10)

A dry chemical adsorption treatment device for cyclone dust collection includes: a housing with a blocking element to distinguish an upper housing space and a lower housing space from the inside, the blocking element isolates the upper housing space and In the lower housing space, a gas output hole at the top of the housing communicates with the upper housing space, and a gas inlet tube at the bottom communicates with the lower housing space; an adsorption component is located in the upper housing space; A gas transmission tube, which is penetrated in the blocking element to connect the upper housing space and the lower housing space; and a cyclone component, which is located in the lower housing space, the cyclone component can make the shell The mixed gas received from the outside of the gas inlet pipe of the body forms a cyclonic cyclone, so that the dust in the mixed gas falls to the bottom of the lower housing space under the influence of gravity and centrifugal force, and the remaining mixed gas will pass through the gas transmission tube It is transmitted to the upper housing space, and the harmful materials in the mixed gas are adsorbed by the adsorption component to form filtered gas to be output through the gas output hole. The dry-type chemical adsorption treatment device for cyclone dust collection according to claim 1, wherein the cyclone component is a ring-shaped funnel-shaped structure, the bottom opening of which is smaller than the top opening, and the cyclonic cyclone can be formed in the ring-shaped funnel-shaped structure, so that The dust of the mixed air falls from the bottom opening. The dry-type chemical adsorption treatment device for cyclone dust collection according to claim 1, wherein the cyclone assembly further comprises: a first wind deflector whose side is formed with a gap with the inner wall of the casing; a second wind deflector , Which is arranged on the first windshield, the center of the second windshield has an annular opening; and a third windshield, which is arranged on the second windshield and located on the On the annular opening, the third wind deflector is smaller than the second wind deflector and larger than the annular opening. The first wind deflector, the second wind deflector, and the third wind deflector may form the Cyclone cyclone, the annular opening and the gap can make the dust fall. The dry-type chemical adsorption treatment device for cyclone dust collection according to claim 1, wherein a dust discharge port is further provided at the bottom of the casing, and the dust at the bottom of the casing can be discharged from the dust discharge port. The dry-type chemical adsorption processing device for cyclone dust collection according to claim 1, wherein a first filter element is further provided between the blocking element and the adsorption component for filtering the transmission between the adsorption element and the gas transmission tube mixed composition. The dry chemical adsorption treatment device of cyclone dust collection according to claim 5, wherein a second filter element is further arranged between the adsorption component and the gas output hole, for filtering the filtered gas generated after passing through the adsorption component. The dry-type chemical adsorption treatment device for cyclone dust collection according to claim 1, wherein the adsorption component is composed of the same or different adsorbents. The dry chemical adsorption treatment device for cyclone dust collection as described in claim 1, wherein the top of the casing is further provided with a high-pressure gas input hole, which can receive high-pressure gas from the outside to pass into the adsorption assembly to exclude the adsorption The dust blocked at the bottom of the module. The dry-type chemical adsorption treatment device for cyclone dust collection according to claim 1, wherein the gas inlet pipe system is a curved pipe. The dry-type chemical adsorption treatment device for cyclone dust collection according to claim 9, wherein the opening of the curved tube is a sloped opening.

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