TWI720373B - Power feeding mechanism, rotating base device and semiconductor processing equipment - Google Patents

Abstract

The power feeding mechanism, the rotating base device and the semiconductor processing equipment provided by the present invention are used to feed the output power of the power source into the rotating component, and include: a conductive fixing member which is electrically connected to the power source; and conductive The rotating part is electrically connected with the rotating part and rotates synchronously with the rotating part; the conductive connection structure is respectively in electrical contact with the conductive fixed part and the conductive rotating part, and does not affect the rotational movement of the conductive rotating part. The power feeding mechanism provided by the present invention can not only improve the power transmission efficiency, but also avoid the risk of ignition in the prior art.

Description

Power feeding mechanism, rotating base device and semiconductor processing equipment

The present invention relates to the technical field of semiconductor manufacturing, in particular to a power feeding mechanism, a rotating base device and semiconductor processing equipment.

In the PVD (Physical Vapor Deposition) process, the power output by the sputtering power supply is coupled to the process chamber through the electrode, and the process gas in the chamber is excited to form a plasma. The electrons and ions in the plasma Under the action, the film deposition is completed.

As the size of the wafer increases, in order to improve the product yield, the PVD process requires higher and higher film deposition uniformity. The method of rotating the susceptor can significantly improve the uniformity of the deposited film, and has been widely used. However, in order to increase the energy of the charged ions in the plasma and enhance the bombardment of the ions, it is usually achieved by feeding radio frequency to the base, and it is very challenging to maintain a good and stable radio frequency connection during the rotation of the base. Sex.

In the prior art, two inductance coils nested in each other are usually arranged around a rotatable base support. The magnetic field generated by the inductance coils can couple the radio frequency energy to the base support by means of magnetic field coupling. Parts, so as to realize the transmission of radio frequency power to the rotating base. However, this inevitably has the following problems in practical applications: First, the radio frequency power is transmitted through the inductive coil in the inductive coupling mode, there will be a problem of magnetic leakage, and the power transmission efficiency is low. Second, in order to increase the RF power fed to the base support, it is necessary to increase the voltage of the inductor coil. When the voltage rises to a certain critical value, there is a risk of ignition.

The present invention aims to solve at least one of the technical problems existing in the prior art, and proposes a power feeding mechanism, a rotating base device and a semiconductor processing equipment, which not only can improve the power transmission efficiency, but also can avoid the interference in the prior art. Fire risk.

In order to achieve the objective of the present invention, a power feeding mechanism is provided for feeding the output power of a power source into a rotating part, including: a conductive fixing part, which is electrically connected to the power source; a conductive rotating part, which is connected to the rotating part It is electrically connected and rotates synchronously with the rotating part; the conductive connection structure is respectively in electrical contact with the conductive fixing part and the conductive rotating part, and does not affect the rotational movement of the conductive rotating part.

Optionally, the conductive rotating part is opposite to the conductive fixing part and arranged at intervals; the conductive connection structure is arranged in the interval between the conductive rotating part and the conductive fixing part.

Optionally, the vertical length of the interval is greater than or equal to 1 mm.

Optionally, the two opposite surfaces of the conductive rotating member and the conductive fixing member are parallel to each other or nested with each other.

Optionally, the conductive connection structure includes a first elastic conductive component.

Optionally, the first elastic conductive member is a ring body, a plane spiral body or a cylindrical spiral body.

Optionally, the first elastic conductive component includes a soft alloy.

Optionally, a mounting groove is provided on at least one of the two opposite surfaces of the conductive rotating member and the conductive fixing member, and a part of the first elastic conductive member is disposed in the mounting groove.

Optionally, the conductive connection structure includes a second elastic conductive member, a third elastic conductive member, and a spring, wherein two ends of the spring are respectively connected to the conductive fixing member and the second elastic conductive member above it; Three elastic conductive parts are arranged on the second elastic conductive part and maintain electrical contact with the conductive rotating part under the elastic force of the spring; the hardness of the second elastic conductive part is lower than that of the third elastic conductive part.

Optionally, a recess is provided on the conductive rotating member, and at least a part of the second elastic conductive member is located in the recess.

Optionally, the conductive connection structure further includes a fixing seat connected to the spring; a mounting groove is provided on the fixing seat, and the second elastic conductive component is detachably fixed in the mounting groove.

Optionally, the conductive connection structure includes: a second elastic conductive member, which is connected to the conductive fixing member and is a ring body, the ring body surrounds the conductive rotating member; and the third elastic conductive member is connected to the conductive rotating member. The conductive rotating part is connected and located between the inner peripheral surface of the ring body and the outer peripheral surface of the conductive rotating part, and is in electrical contact with both; the hardness of the second elastic conductive part is lower than the hardness of the third elastic conductive part .

Optionally, the second elastic conductive component includes graphite or a soft alloy.

Optionally, the third elastic conductive member is a ring body, a plane spiral body or a cylindrical spiral body.

Optionally, the third elastic conductive component includes a soft alloy.

Optionally, the power feeding mechanism further includes a conductive liquid container, and a part of each of the conductive fixing member and the conductive rotating member is immersed in the conductive solution of the conductive liquid container, so that the conductive fixing member and the conductive rotating member can pass through the conductive liquid container. The conductive solution conducts electricity.

Optionally, the conductive liquid container is connected to the conductive fixing part or the conductive rotating part.

Optionally, the power feeding mechanism further includes a conductive liquid container, and a part of each of the conductive fixing member and the conductive rotating member is immersed in the conductive liquid of the conductive liquid container, so that the conductive fixing member and the conductive rotating member pass through the conductive liquid container. The conductive liquid conducts electricity.

Optionally, the rotating component includes a base, a target, or a coil.

As another technical solution, the present invention also provides a rotating base device, which includes a rotatable base, a bias power source, and a power feeding mechanism for feeding the output power of the bias power source. Into the base, the power feeding mechanism adopts the above-mentioned power feeding mechanism provided by the present invention.

Optionally, it further includes: a rotating shaft, which is arranged vertically, and the upper end of the rotating shaft is connected with the base, and the lower end of the rotating shaft is connected with the power feeding mechanism; The middle position between the upper end and the lower end is connected for driving the rotating shaft to rotate.

As another technical solution, the present invention also provides a semiconductor processing equipment, including a reaction chamber, in which the above-mentioned rotating base device provided by the present invention is provided.

The present invention has the following beneficial effects: In the technical solutions of the power feeding mechanism, the rotating base device and the semiconductor processing equipment provided by the present invention, the conductive connection structure satisfies: electrical contact with the conductive fixed part and the conductive rotating part, and does not affect the conductivity The rotating movement of the rotating part realizes the transmission of power to the rotating rotating part. At the same time, since the conductive connection structure is in electrical contact with the conductive fixed part and the conductive rotating part, compared with the inductive coupling method used in the prior art to transmit power, the power transmission efficiency is higher and the sparking in the prior art can be avoided. risk.

In order to enable those skilled in the art to better understand the technical solutions of the present invention, the power feeding mechanism, the rotating base device and the semiconductor processing equipment provided by the present invention will be described in detail below with reference to the accompanying drawings.

The power feeding mechanism provided by the present invention is used to feed the output power of the power source into the rotating component. The rotating part can be a base, a target, a coil, or the like. The power source is usually a matcher and a power supply. The matcher is used to dynamically adjust the variable capacitor in the matching circuit during the manufacturing process to match the load impedance with the output impedance of the power supply, thereby ensuring that the output power of the power supply is maximized. Applied to the plasma inside the chamber. The power supply includes radio frequency power supply, low frequency power supply, intermediate frequency power supply or DC power supply and so on.

Specifically, the power feeding mechanism includes: a conductive fixing part, a conductive rotating part, and a conductive connecting structure, wherein the conductive fixing part is electrically connected to the power source; the conductive rotating part is electrically connected to the rotating part, and rotates synchronously with the rotating part; The connection structure is respectively in electrical contact with the conductive fixing part and the conductive rotating part, and does not affect the rotational movement of the conductive rotating part. In this way, the output power of the power source can be fed into the rotating rotating part. At the same time, since the conductive connection structure is in electrical contact with the conductive fixed part and the conductive rotating part, compared with the inductive coupling method used in the prior art to transmit power, the power transmission efficiency is higher and the sparking in the prior art can be avoided. risk.

The specific implementation of the conductive connection structure will be described in detail below. Specifically, referring to Fig. 1, in the power feeding mechanism provided by the first embodiment of the present invention, the conductive rotating member 2 and the conductive fixing member 1 are opposed to each other and are arranged at intervals. The conductive connection structure is arranged in the space between the conductive rotating member 2 and the conductive fixing member 1 so as to electrically conduct the conductive rotating member 2 and the conductive fixing member 1 to realize power transmission.

In this embodiment, the conductive rotating member 2 includes a first surface 21, and the conductive fixing member 1 includes a second surface 11, and the first surface 21 is opposite to the second surface 11 and arranged at intervals. Preferably, the conductive rotating member 2 The vertical length of the interval with the conductive fixing member 1 is greater than or equal to 1 mm, that is, a distance D is provided between the first surface 21 and the second surface 11, and D is greater than or equal to 1 mm. In this way, it can be ensured that the rotational movement of the conductive rotating member 2 is not affected. The conductive fixing member 1 and the conductive rotating member 2 are preferably made of materials with good conductive properties such as red copper.

In this embodiment, the two opposite surfaces (the first surface 21 and the second surface 11) of the conductive rotating member 2 and the conductive fixing member 1 are parallel to each other or nested with each other, so that the stability of the structure can be improved. In this embodiment, a concave portion 211 is provided on the first surface 21, and a convex portion 111 is correspondingly provided on the second surface 11; and the convex portion 111 is located in the concave portion 211, so that the conductive rotating member 2 and the conductive fixed Pieces 1 form a mutually nested structure. Of course, in practical applications, convex portions may also be provided on the first surface 21, and correspondingly concave portions may be provided on the second surface 11.

In this embodiment, the conductive connection structure includes the first elastic conductive member 3. Due to its elasticity, the first elastic conductive member 3 can always maintain electrical contact with the conductive rotating member 2 during the rotation of the conductive rotating member 2, thereby The normal transmission of power is ensured, and at the same time, the first elastic conductive member 3 will not affect the rotational movement of the conductive rotating part. The first elastic conductive member 3 may be made of soft materials, such as soft alloys such as aluminum alloys and stainless steel alloys.

It should be noted that in this embodiment, the first elastic conductive member 3 is located between the bottom surface of the concave portion 211 and the top surface of the convex portion 111, but the present invention is not limited to this. In practical applications, as shown in Figure 2 As shown, the first elastic conductive member 3 may also be located between the inner circumferential surface of the concave portion 211 and the outer circumferential surface of the convex portion 111.

It should also be noted that in this embodiment, the conductive rotating member 2 and the conductive fixing member 1 form a mutually nested structure via the concave portion 211 and the convex portion 111, but the present invention is not limited to this. In practical applications, such as As shown in Figure 3, the first surface 21' and the second surface 11' can also be flat surfaces; the first elastic conductive member 3 is arranged between the first surface 21' and the second surface 11'.

In this embodiment, the first elastic conductive member 3 is a ring body. Of course, in practical applications, the first elastic conductive member 3 may also be any other structure such as a flat spiral body (like a disc-shaped spiral body) or a cylindrical spiral body.

In this embodiment, a mounting groove 22 is provided on the first surface 21, and a part of the first elastic conductive member 3 is provided in the mounting groove 22 to realize the installation of the first elastic conductive member 3. It is easy to understand that the first elastic conductive member 3 has a part located outside the mounting groove 22 to ensure that it can be in electrical contact with the second surface 11 of the conductive fixing member 1. Of course, in practical applications, installation grooves may also be provided on the second surface 11, or installation grooves may also be provided on the first surface 21 and the second surface 11 respectively.

It should be noted that, in this embodiment, there is one first elastic conductive member 3, but the present invention is not limited to this. In practical applications, there may be more than one ring-shaped first elastic conductive member 3, and they are mutually exclusive. Nested. Of course, for the first elastic conductive members 3 of other structures, other arbitrary arrangements can also be adopted.

Compared with the power feeding mechanism provided in the first embodiment, the power feeding mechanism provided in the second embodiment of the present invention also includes a conductive fixing member, a conductive rotating member, and a conductive connection structure. The difference lies in the structure of the conductive connection structure different. Only the differences between this embodiment and the above-mentioned first embodiment will be described below.

Specifically, referring to Figure 4, the conductive connection structure includes: a spring 7, a second elastic conductive member 4, and a third elastic conductive member 5, wherein the first end of the spring 7 (the lower end of the spring 7 in Figure 4) and The conductive fixing member 1 is connected. The second end of the spring 7 (the upper end of the spring 7 in Figure 4) is connected to the second elastic conductive member 4. The third elastic conductive member 5 is arranged on the second elastic conductive member 4 and maintains electrical contact with the conductive rotating member 2 under the action of the elastic force of the spring 7.

In addition, the hardness of the second elastic conductive member 4 is lower than the hardness of the third elastic conductive member 5. During actual use, the conductive rotating member 2 will drive the third elastic conductive member 5 to rotate together, resulting in relative movement between the third elastic conductive member 5 and the second elastic conductive member 4. Since the hardness of the second elastic conductive member 4 is lower than that of the third elastic conductive member 5, this makes the softer second elastic conductive member 4 easier to be worn by the third elastic conductive member 5, thereby reducing the third elastic conductive member 5 The wear of the component 5 increases the life of the third elastic conductive component 5.

At the same time, even if the second elastic conductive member 4 becomes thin due to wear, under the elastic force of the spring 7, the third elastic conductive member 5 can still be in good electrical contact with the conductive rotating member 2, thereby ensuring stable power transmission.

In practical applications, provided that the hardness of the second elastic conductive component 4 is lower than that of the third elastic conductive component 5, the second elastic conductive component 4 can be made of soft materials such as graphite or soft alloys. The third elastic conductive member 5 can be made of a soft material such as a soft alloy. Among them, the graphite powder generated during the operation of the graphite can also play a lubricating effect on the third elastic conductive component 5, so that the loss of the third elastic conductive component 5 can be further reduced.

Similar to the first elastic conductive member 3 in the above-mentioned first embodiment, the third elastic conductive member 5 may include a ring body, a plane spiral body, a cylindrical spiral body, and the like.

Optionally, the above-mentioned spring 7 may be an elastic member such as a cylindrical coil spring.

In this embodiment, a concave portion 23 is provided on the conductive rotating member 2, and at least a part of the second elastic conductive member 4 is located in the concave portion 23, so that the conductive rotating member 2 and the second elastic conductive member 4 can be nested with each other. Improved structural stability.

Optionally, the conductive connection structure further includes a fixing seat 6 connected to the spring 7; and a mounting groove is provided on the fixing seat 6, and the second elastic conductive member 4 is detachably fixed in the mounting groove. In this way, after the second elastic conductive member 4 is worn to a certain extent, the second elastic conductive member 4 can be separated from the conductive rotating member 2 by pressing down on the fixing seat 6, and then the second elastic conductive member 4 can be taken out of the mounting groove , And replace the second elastic conductive component 4 with a new one, which is easier than replacing the third elastic conductive component 5, thereby improving work efficiency.

Compared with the power feeding mechanism provided in the second embodiment, the power feeding mechanism provided by the third embodiment of the present invention also includes a conductive fixing member, a conductive rotating member, and a conductive connection structure, except that the structure of the conductive connection structure is different . Only the differences between this embodiment and the above-mentioned second embodiment will be described below.

Specifically, referring to Figure 5, the conductive connection structure includes: a second elastic conductive member 4'and a third elastic conductive member 5', wherein the second elastic conductive member 4'is connected to the conductive fixing member 1 and is a ring body , The ring body surrounds the conductive rotating member 2. The third elastic conductive member 5'is connected to the conductive rotating member 2, and is located between the inner peripheral surface of the ring body and the outer peripheral surface of the conductive rotating member 2, and is in electrical contact with both. Also, the hardness of the second elastic conductive member 4'is lower than the hardness of the third elastic conductive member 5'.

The third elastic conductive member 5'rotates synchronously with the conductive rotating member 2. During this process, relative movement occurs between the third elastic conductive member 5'and the second elastic conductive member 4'. Since the hardness of the second elastic conductive member 4'is lower than that of the third elastic conductive member 5', this makes the softer second elastic conductive member 4'easier to be worn by the third elastic conductive member 5', thereby reducing The loss of the third elastic conductive component 5'increases the life of the third elastic conductive component 5'.

The power feeding mechanism provided in the fourth embodiment of the present invention is an improvement made on the basis of the power feeding mechanism provided in the above-mentioned respective embodiments.

Specifically, referring to Figure 6, the conductive connection structure includes a conductive liquid container 8 in which a conductive liquid 9 is contained, and a part of each of the conductive fixing member 1 and the conductive rotating member 2 is immersed in the conductive solution 9 of the conductive liquid container 8. , So that the conductive fixing member 1 and the conductive rotating member 2 are electrically connected through the conductive liquid. Because the conductive liquid has good conductivity, it will not settle and agglomerate during long-term use, and it can maintain stable conductivity. The conductive liquid can be mercury, a conductive carbon-based solvent, a conductive ion solution, or any other conductive liquid.

In practical applications, the conductive liquid container 8 can be connected to the conductive fixing member 1. At this time, the conductive liquid container 8 is fixed relative to the rotating conductive rotating member 2; or, the conductive liquid container 8 can also be connected to the conductive rotating member 2. At this time, the conductive liquid container 8 rotates synchronously with the conductive rotating member 2.

In this embodiment, the conductive liquid container 8 is used in combination with the conductive connection structures in the first to third embodiments described above. Taking the first embodiment as an example, as shown in Figure 1, while the first elastic conductive member 3 is provided between the first surface 21 and the second surface 11, the conductive liquid container 8 described above can be provided so that the first surface Between 21 and the second surface 11 is filled with conductive solution.

However, the present invention is not limited to this. In practical applications, the conductive connection structure can also be only the conductive liquid container 8, that is, the conductive liquid container 8 is used alone to electrically conduct the conductive fixing member 1 and the conductive rotating member 2. For example, the first elastic conductive member 3 in the first embodiment is replaced with a conductive liquid container 8. Optionally, the conductive fixing member 1 and the conductive rotating member 2 adopt the mutually nested structure adopted in the above-mentioned first embodiment, so that the conductive liquid 9 can fill the space between the conductive fixing member 1 and the conductive rotating member 2, thereby The conductive solution 9 can be evenly distributed between the conductive fixing member 1 and the conductive rotating member 2.

In summary, the power feeding mechanism provided by the above-mentioned embodiments of the present invention can be in electrical contact with the conductive fixed part and the conductive rotating part, and does not affect the rotational movement of the conductive rotating part, thereby realizing transmission to the rotating rotating part. power. At the same time, since the conductive connection structure is in electrical contact with the conductive fixed part and the conductive rotating part, compared with the inductive coupling method used in the prior art to transmit power, the power transmission efficiency is higher and the sparking in the prior art can be avoided. risk.

As another technical solution, please refer to Figure 7. The rotating base device provided by the fifth embodiment of the present invention includes a rotatable base 101, a target 102, an upper radio frequency power supply 103, a bias power source and a power feeder. The inlet mechanism 105, wherein the base 101 is disposed in the reaction chamber 100, which is the rotating part in the above-mentioned embodiment. The target 102 is arranged above the base 101 and is electrically connected to the upper radio frequency power supply 103. The bias power source includes a matcher 106 and a power supply 107. The matcher 106 is used to dynamically adjust the variable capacitance in the matching circuit during the manufacturing process to match the load impedance with the output impedance of the power supply 107, thereby ensuring the power supply The output power of 107 is applied to the plasma inside the chamber to the greatest extent. The power supply 107 includes a radio frequency power supply, a low frequency power supply, an intermediate frequency power supply, a DC power supply, and so on.

The power feeding mechanism 105 is used to feed the output power of the bias power source into the base 101, and the power feeding mechanism 105 adopts the power feeding mechanism provided by the above-mentioned various embodiments of the present invention.

In this embodiment, the rotating base device further includes: a rotating shaft 104 and a rotating drive mechanism 108, wherein the rotating shaft 104 is arranged vertically, and the upper end of the rotating shaft 104 is connected to the base 101, and the lower end of the rotating shaft 104 is connected to the power feeder. The input mechanism 105 is connected. Here, the rotating shaft 104 is used as the above-mentioned conductive rotating part to electrically connect with the base 101, and the lower part of the rotating shaft 104 is opposite to the above-mentioned conductive fixing part and is arranged at intervals. The above-mentioned conductive connection structure is arranged in the space between the rotating shaft 104 and the conductive fixing member, so as to conduct electrical conduction between the rotating shaft 104 and the conductive fixing member to realize power transmission. The rotation driving mechanism 108 is connected to an intermediate position between the upper end and the lower end of the rotating shaft 104 for driving the rotating shaft 104 to rotate. The above-mentioned rotation driving mechanism 108 may include a motor and a transmission mechanism, and the motor is connected to the rotating shaft 104 through the transmission structure. The transmission mechanism is, for example, a belt transmission mechanism, a gear transmission mechanism, and so on. It should be noted that the rotation driving mechanism 108 bears the weight of the rotation shaft 104 and the base 101 thereon.

The rotating base device provided by the embodiments of the present invention can not only improve the power transmission efficiency, but also avoid the risk of ignition in the prior art by using the power feeding mechanism provided in the above-mentioned embodiments of the present invention.

As another technical solution, please refer to FIG. 7. An embodiment of the present invention also provides a semiconductor processing equipment, which includes a reaction chamber 100, and the reaction chamber 100 is provided with the rotating base provided by the foregoing various embodiments of the present invention.座装置。 Block device.

The semiconductor processing equipment provided by the embodiment of the present invention can not only improve the power transmission efficiency, but also avoid the risk of ignition in the prior art by using the above-mentioned rotating base device provided by the embodiment of the present invention.

It can be understood that the above implementations are merely exemplary implementations used to illustrate the principle of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also deemed to be within the protection scope of the present invention.

D‧‧‧Pitch 1‧‧‧Conductive fixing part 2‧‧‧Conductive rotating part 3‧‧‧First elastic conductive part 4,4'‧‧‧Second elastic conductive part 5,5'‧‧‧Third elastic Conductive component 6‧‧‧Fixed seat 7‧‧‧Spring 8‧‧‧Conductive liquid container 9‧‧‧Conductive liquid 11,11'‧‧‧Second surface 21,21'‧‧‧First surface 22‧‧‧ Mounting slot 100‧‧‧Reaction chamber 101‧‧‧Base 102‧‧‧Target 103‧‧‧Upper RF power supply 105‧‧‧Bias power source and power feeding mechanism 106‧‧‧Matching device 107‧‧ ‧Power source 108‧‧‧Rotary drive mechanism 111‧‧‧Convex part 211‧‧‧Concave part

Figure 1 is a structural diagram of the power feeding mechanism provided by the first embodiment of the present invention; Figure 2 is another structural diagram of the power feeding mechanism provided by the first embodiment of the present invention; Figure 3 is a structural diagram of the power feeding mechanism provided by the first embodiment of the present invention Another structural diagram of a power feeding mechanism provided by an embodiment; Figure 4 is a structural diagram of a power feeding mechanism provided by a second embodiment of the present invention; Figure 5 is a power feeding provided by a third embodiment of the present invention Structural diagram of the mechanism; Figure 6 is a structural diagram of a power feeding mechanism provided by a fourth embodiment of the present invention; Figure 7 is a structural diagram of a semiconductor processing equipment provided by a fifth embodiment of the present invention.

D‧‧‧Pitch

1‧‧‧Conductive fixing parts

2‧‧‧Conductive rotating parts

3‧‧‧The first elastic conductive part

11‧‧‧Second Surface

21‧‧‧First surface

22‧‧‧Mounting slot

111‧‧‧Protrusion

211‧‧‧Concave

Claims (17)

A power feeding mechanism is used to feed the output power of a radio frequency power source into a rotating component, and is characterized in that it comprises: a conductive fixing part which is electrically connected to the radio frequency power source; and a conductive rotating part which is connected to the The rotating part is electrically connected and rotates synchronously with the rotating part; a conductive connection structure is respectively in electrical contact with the conductive fixed part and the conductive rotating part, and does not affect the rotational movement of the conductive rotating part, so as to transmit radio frequency to the rotating part Power; wherein, the conductive rotating member is opposite to the conductive fixing member and arranged at intervals; the conductive connecting structure is arranged in the interval between the conductive rotating member and the conductive fixing member; the conductive connecting structure includes a first elastic conductive Component, a second elastic conductive component, a third elastic conductive component and a spring, wherein two ends of the spring are respectively connected to the conductive fixing component and the second elastic conductive component above it; the third elastic conductive component It is arranged on the second elastic conductive component and maintains electrical contact with the conductive rotating part under the elastic force of the spring; the hardness of the second elastic conductive component is lower than the hardness of the third elastic conductive component. The power feeding mechanism described in item 1 of the scope of patent application, wherein the vertical length of the interval is greater than or equal to 1 mm. According to the power feeding mechanism described in item 1 of the scope of patent application, the two opposite surfaces of the conductive rotating member and the conductive fixing member are parallel to each other or nested with each other. According to the power feeding mechanism described in item 1 of the scope of patent application, the first elastic conductive member is a ring, a plane spiral, or a cylindrical spiral. According to the power feeding mechanism described in item 1 of the scope of patent application, the first elastic conductive member includes a soft alloy. The power feeding mechanism according to the first item of the scope of patent application, wherein a mounting groove is provided on at least one of the two opposite surfaces of the conductive rotating member and the conductive fixing member, and the first elastic conductive member A part of it is set in the installation groove. According to the power feeding mechanism described in item 1 of the scope of patent application, a recess is provided on the conductive rotating member, and at least a part of the second elastic conductive member is located in the recess. The power feeding mechanism described in item 1 of the scope of patent application, wherein the conductive connection structure further includes a fixing seat connected to the spring; a mounting groove is provided on the fixing seat, and the second elastic conductive The components are detachably fixed in the installation slot. According to the power feeding mechanism described in item 1 of the scope of patent application, the second elastic conductive member includes a graphite or a soft alloy. According to the power feeding mechanism described in item 1 of the scope of patent application, the third elastic conductive member is a ring, a plane spiral or a cylindrical spiral. According to the power feeding mechanism described in item 1 of the scope of patent application, the third elastic conductive member includes a soft alloy. For example, the power feeding mechanism according to any one of items 1 to 8 of the scope of patent application, wherein the power feeding mechanism further includes a conductive liquid container, and a part of each of the conductive fixing member and the conductive rotating member is immersed in the In the conductive liquid of the conductive liquid container, the conductive fixing part and the conductive rotating part are electrically connected through the conductive liquid. The power feeding mechanism according to item 12 of the scope of patent application, wherein the conductive liquid container is connected to the conductive fixing part or the conductive rotating part. According to the power feeding mechanism described in item 1 of the scope of patent application, the rotating part includes a base, a target or a coil. A rotating base device includes a rotatable base, a bias power source, and a power feeding mechanism. The power feeding mechanism is used to feed the output power of the bias power source into the base. The feature is The power feeding mechanism adopts the power feeding mechanism described in any one of items 1 to 13 in the scope of patent application. The rotating base device according to item 15 of the scope of patent application, further comprising: a rotating shaft, which is vertically arranged, and the upper end of the rotating shaft is connected with the base, and the lower end of the rotating shaft is connected with the power feeding Mechanism connection; a rotary drive mechanism, which is connected to an intermediate position located between the upper end and the lower end of the rotary shaft for driving the rotary shaft to rotate. A semiconductor processing equipment, which is characterized by comprising a reaction chamber in which the rotating base device described in item 15 or 16 of the scope of patent application is arranged.

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