TWI716076B - An optical collimation system - Google Patents

Abstract

max{D3，D4，D5}；min{D3，D4，D5}表示D3、D4及D5中的最小值，max{D3，D4，D5}表示D3、D4及D5中的最大值。合理設置物面與像面之間各凸透鏡的形狀及光焦度，保證光學準直系統對預設數值孔徑及預設波長的光束的準直效果良好。 The embodiment of the present invention discloses an optical collimation system for collimating light beams with a preset numerical aperture and a preset wavelength. The aforementioned optical collimation system includes a first plano-convex lens and a first curved lens which are sequentially located on one side of the object surface A meniscus convex lens, a second meniscus convex lens, a third meniscus convex lens, and a first biconvex lens; the refractive power of the first plano-convex lens is D1, and the refractive power of the first meniscus convex lens is D2. The refractive power of the second meniscus convex lens is D3, the refractive power of the third meniscus convex lens is D4, and the refractive power of the first biconvex lens is D5; where D1>0, D2>0, D3 >0, D4>0, D5>0, and min{D3, D4, D5}

max{D3, D4, D5}; min{D3, D4, D5} represents the minimum value of D3, D4, and D5, and max{D3, D4, D5} represents the maximum value of D3, D4, and D5. Properly set the shape and optical power of each convex lens between the object surface and the image surface to ensure that the optical collimation system has a good collimation effect for the beams of preset numerical aperture and preset wavelength.

Description

An optical collimation system

The embodiment of the present invention relates to the field of optical setting technology, for example, an optical collimation system.

Optical lithography is a process in which a lithography machine uses an optical projection exposure method to etch the circuit device structure pattern on the photomask onto the silicon wafer. The lithography machine is mainly composed of five parts: exposure light source, illumination system, photomask, lithography projection objective lens and silicon wafer work table. In order to obtain a higher resolution of photolithography, the wavelength of the light emitted by the exposure light source is required to develop in the deep ultraviolet or even extreme ultraviolet band. At the same time, it is also required that the lithography projection objective lens must have a high numerical aperture. Therefore, it is necessary to develop aberration detection technology for the deep ultraviolet incident light and high numerical aperture projection lithography objective lens.

In the polarization aberration test of the projection objective, the sensor module located on the mirror surface of the projection object functions to verify the polarization state. The light emitted from the mirror surface of the projected object has a high numerical aperture, and the polarization component in the polarization aberration sensor can only work under the condition of parallel light or parallel-like light with a small angle deviating from parallel. Therefore, an optical component is required. Converge divergent light into parallel light.

The collimating lens in the prior art can usually converge visible light with a small numerical aperture, but cannot converge the incident deep ultraviolet light with a high numerical aperture into parallel light.

In view of this, an embodiment of the present invention provides an optical collimation system to solve the technical problem that the high numerical aperture deep ultraviolet incident light cannot be condensed into parallel light in the prior art.

max{D3，D4，D5}；min{D3，D4，D5}表示D3、D4及D5中的最小值，max{D3，D4，D5}表示D3、D4及D5中的最大值。 In a first aspect, an embodiment of the present invention provides an optical collimation system, which is characterized in that it is used for collimating light beams with a preset numerical aperture and a preset wavelength. The aforementioned optical collimation system includes one side of the object surface. The first plano-convex lens, the first meniscus-shaped convex lens, the second meniscus-shaped convex lens, the third meniscus-shaped convex lens, and the first double-convex lens; the refractive power of the aforementioned first plano-convex lens is D1, and the aforementioned first meniscus-shaped convex lens The refractive power of the first biconvex lens is D2, the refractive power of the second meniscus lens is D3, the refractive power of the third meniscus lens is D4, and the refractive power of the first biconvex lens is D5; where D1 >0, D2>0, D3>0, D4>0, D5>0, and min{D3, D4, D5}

max{D3, D4, D5}; min{D3, D4, D5} represents the minimum value of D3, D4, and D5, and max{D3, D4, D5} represents the maximum value of D3, D4, and D5.

In some embodiments, the difference between the refractive power D5 of the aforementioned first lenticular lens and the refractive power D4 of the aforementioned third meniscus lens satisfies a first preset condition, and the first preset condition is The difference between the refractive power D5 of the convex lens and the refractive power D4 of the third meniscus lens is zero; the refractive power D4 of the aforementioned third meniscus convex lens and the refractive power of the aforementioned second meniscus convex lens The difference between D3 satisfies the second preset condition, and the second preset condition is that the difference between the refractive power D4 of the third meniscus lens and the refractive power D3 of the second meniscus lens is zero.

In some embodiments, the first plano-convex lens includes a first surface close to the object surface and a second surface away from the object surface, and the first meniscus convex lens includes a first surface close to the object surface. Three surfaces and a fourth surface far away from the object surface. The second meniscus lens includes a fifth surface close to the object surface and a sixth surface away from the object surface. The third meniscus The convex lens includes a seventh surface close to the object surface and an eighth surface away from the object surface. The first lenticular lens includes a ninth surface close to the object surface and a tenth surface away from the object surface. Surface; wherein, the first surface is a plane; the second surface is a hyperhemispherical surface, and the second surface is a homogeneous surface, the hyperhemispherical surface includes a hemispherical surface and the two end points of the hemispherical surface in the optical axis direction An outer surface formed by extending a predetermined distance; the third surface, the fourth surface, the fifth surface, the sixth surface, the seventh surface, the eighth surface, the ninth surface, and the tenth surface are spherical surfaces , And the fifth surface is a uniform surface, and the tenth surface is an aperture surface of the optical collimation system.

In some embodiments, the preparation materials of the first plano-convex lens, the first meniscus convex lens, the second meniscus convex lens, the third meniscus convex lens, and the first biconvex lens include fused silica.

max{D7，D8，D9}；min{D7，D8，D9}表示D7、D8及D9中的最小值，max{D7，D8，D9}表示D7、D8及D9中的最大值。 In a second aspect, an embodiment of the present invention provides an optical collimation system, which is characterized in that it is used to collimate light beams with a preset numerical aperture and a preset wavelength. The aforementioned optical collimation system includes one side of the object surface. The second plano-convex lens, the fourth meniscus-shaped convex lens, the fifth meniscus-shaped convex lens and the second double-convex lens; the refractive power of the aforementioned second plano-convex lens is D6, and the refractive power of the aforementioned fourth meniscus convex lens is D7, The refractive power of the fifth meniscus lens is D8, and the refractive power of the second lenticular lens is D9; where D6>0, D7>0, D8>0, D9>0, and min{D7, D8 , D9}

max{D7, D8, D9}; min{D7, D8, D9} represents the minimum value of D7, D8, and D9, and max{D7, D8, D9} represents the maximum value of D7, D8, and D9.

In some embodiments, the difference between the refractive power D9 of the aforementioned second lenticular lens and the refractive power D8 of the aforementioned fifth meniscus lens satisfies the third preset condition, and the third preset condition is the second double The difference between the refractive power D9 of the convex lens and the refractive power D8 of the fifth meniscus lens is zero; the refractive power D8 of the fifth meniscus lens and the refractive power of the fourth meniscus lens are The difference between D7 satisfies the fourth preset condition, and the fourth preset condition is that the difference between the refractive power D8 of the fifth meniscus lens and the refractive power D7 of the fourth meniscus lens is zero.

In some embodiments, the second plano-convex lens includes an eleventh surface close to the object surface and a twelfth surface away from the object surface; the fourth meniscus convex lens includes a side close to the object surface And the fourteenth surface on the side away from the object surface, the fifth meniscus lens includes a fifteenth surface on the side close to the object surface and a sixteenth surface on the side far from the object surface, The second lenticular lens includes a seventeenth surface on the side close to the object surface and an eighteenth surface on the side away from the object surface; wherein the eleventh surface is a flat surface; the twelfth surface is a hyperhemispherical surface, And the aforementioned twelfth surface is a uniform surface, and the hyper-hemispherical surface includes a hemispherical surface and an outer surface formed by two end points of the aforementioned hemispherical surface extending a predetermined distance in the optical axis direction; the aforementioned thirteenth surface and the aforementioned fourteenth surface Surface, the fifteenth surface, the sixteenth surface, the seventeenth surface, and the eighteenth surface The surface is a spherical surface, and the aforementioned eighteenth surface is the diaphragm surface of the aforementioned optical collimation system.

In some embodiments, the preparation materials of the second plano-convex lens, the fourth meniscus convex lens, the fifth meniscus convex lens, and the second biconvex lens include fused silica.

max{D11，D12}；min{D11，D12}表示D11及D12中的最小值，max{D11，D12}表示D11及D12中的最大值。 In a third aspect, an embodiment of the present invention provides an optical collimation system, which is characterized in that it is used for collimating light beams with a preset numerical aperture and a preset wavelength. The aforementioned optical collimation system includes one side of the object surface. The third plano-convex lens, the sixth meniscus-shaped convex lens, and the third double-convex lens; the aforementioned third plano-convex lens has a refractive power of D10, the aforementioned sixth meniscus-shaped convex lens has a refractive power of D11, and the aforementioned third double-convex lens has a refractive power The focal power is D12; where D10>0, D11>0, D12>0, and min{D11, D12}

max{D11, D12}; min{D11, D12} represents the minimum value of D11 and D12, and max{D11, D12} represents the maximum value of D11 and D12.

In some embodiments, the third plano-convex lens includes a nineteenth surface close to the object surface and a twentieth surface away from the object surface; the sixth meniscus convex lens includes a side close to the object surface The twenty-first surface and the twenty-second surface on the side away from the object surface. The third lenticular lens includes the twenty-third surface on the side close to the object surface and the twenty-fourth surface on the side away from the object surface. Surface; wherein the nineteenth surface is a plane; the twentieth surface is a hyperhemispherical surface, and the twentieth surface is a homogeneous surface, the hyperhemispherical surface includes a hemispherical surface and the two end points of the hemispherical surface in light An outer surface formed by extending a predetermined distance in the axial direction; the twenty-first surface, the twenty-second surface, and the twenty-third surface are spherical surfaces, the twenty-fourth surface is aspherical, and the first The twenty-four surface is the diaphragm surface of the aforementioned optical collimation system.

In some embodiments, the preparation materials of the third plano-convex lens, the sixth meniscus lens, and the third lenticular lens include fused silica.

In some embodiments, the aforementioned predetermined numerical aperture is NA, where NA>0; the aforementioned predetermined wavelength is λ, where λ=193.368nm.

max{D3，D4，D5}。藉由合理設置物面與像面之間各凸透鏡的形狀及光焦度，可保證本發明實施例提供的光學準直系統對預設數值孔徑及預設波長的光束的準直效果良好。 The optical collimation system provided by the embodiment of the present invention is characterized in that it is used for collimating light beams with a preset numerical aperture and a preset wavelength, and includes a first plano-convex lens and a first meniscus which are sequentially located on one side of the object surface Convex lens, second meniscus convex lens, third meniscus convex lens and first double convex lens; first plano-convex lens, first meniscus convex lens, second meniscus convex lens, third meniscus convex lens and first The refractive power of the biconvex lens is greater than zero, and the first plano-convex lens D1, the second meniscus-shaped convex lens, the refractive power D3, the third meniscus-shaped convex lens, the refractive power D4, and the first bi-convex lens, the refractive power D5 Meet min{D3, D4, D5}

max{D3, D4, D5}. By reasonably setting the shape and optical power of each convex lens between the object surface and the image surface, it can be ensured that the optical collimation system provided by the embodiment of the present invention has a good collimation effect for the beams with the preset numerical aperture and the preset wavelength.

In order to more clearly describe the technical means of the exemplary embodiments of this specification, the following briefly introduces the drawings required to describe the embodiments. Obviously, the schemes introduced are only part of the schemes of the embodiments to be described in this specification, not all schemes. For those with ordinary knowledge in the technical field, they can be further based on These schemes result in other schemes.

CL1, CL2, CL3‧‧‧Optical collimation system

L0‧‧‧Virtual lens

L1‧‧‧The first plano-convex lens

L2‧‧‧First meniscus convex lens

L3‧‧‧The second meniscus convex lens

L4‧‧‧The third meniscus convex lens

L5‧‧‧The first biconvex lens

L6‧‧‧Second Plano-Convex Lens

L7‧‧‧Fourth meniscus convex lens

L8‧‧‧Fifth meniscus convex lens

L9‧‧‧The second biconvex lens

L10‧‧‧The third plano-convex lens

L11‧‧‧Sixth meniscus convex lens

L12‧‧‧The third biconvex lens

S0‧‧‧The surface of the virtual lens

S1‧‧‧First surface

S2‧‧‧Second surface

S3‧‧‧The third surface

S4‧‧‧Fourth surface

S5‧‧‧Fifth surface

S6‧‧‧Sixth surface

S7‧‧‧Seventh surface

S8‧‧‧Eighth surface

S9‧‧‧Ninth surface

S10‧‧‧Tenth surface

S11‧‧‧Eleventh surface

S12‧‧‧Twelfth surface

S13‧‧‧Thirteenth surface

S14‧‧‧Fourteenth surface

S15‧‧‧Fifteenth surface

S16‧‧‧Sixteenth surface

S17‧‧‧Seventeenth surface

S18‧‧‧The eighteenth surface

S19‧‧‧The nineteenth surface

S20‧‧‧20th surface

S21‧‧‧The twenty-first surface

S22‧‧‧The twenty-second surface

S23‧‧‧Twenty-third surface

S24‧‧‧Twenty-fourth surface

[Fig. 1] is a schematic structural diagram of an optical collimation system provided by an embodiment of the present invention.

[Figure 2] is a bar graph of the low-order spherical aberration and low-order coma of each surface of the optical collimation system provided in Figure 1.

[Figure 3] is a schematic diagram of the relationship between the image-side collimation of the optical collimation system provided in Figure 1 and the height of the object.

[Fig. 4] is an example diagram of a ray aberration curve obtained by the optical collimation system provided in Fig. 1 after being flipped along the xy plane.

[Fig. 5] is a schematic structural diagram of another optical collimation system provided by an embodiment of the present invention.

[Figure 6] is a schematic diagram of the relationship between the image side collimation of the optical collimation system provided in Figure 5 and the height of the object side.

[Fig. 7] is an example diagram of a ray aberration curve obtained by the optical collimation system provided in Fig. 5 after being flipped along the xy plane.

[Figure 8] is a schematic structural diagram of another optical collimation system provided by an embodiment of the present invention.

[Fig. 9] is a schematic diagram of the relationship between the image-side collimation of the optical collimation system provided in Fig. 8 and the height of the object side.

[Fig. 10] is an example diagram of a ray aberration curve obtained by the optical collimation system provided in Fig. 8 after being flipped along the xy plane.

In the following, the technical means of this specification will be fully described through specific implementations in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of this specification, rather than all of the embodiments.

max{D3，D4，D5}；min{D3，D4，D5}表示D3、D4及D5中的最小值，max{D3，D4，D5}表示D3、D4及D5中的最大值。採用上述技術手段，藉由合理設置物面與像面之間每個凸透鏡的形狀及光焦度，可保證本發明實施例提供的光學準直系統對預設數值孔徑及預設波長的光束的準直效果良好。 The collimator in the prior art can usually only converge visible light with a small numerical aperture (for example, less than 1), but cannot converge the incident deep ultraviolet light with a high numerical aperture into parallel light. Based on the above technical problems, an embodiment of the present invention provides an optical collimation system, which is characterized in that it is used to collimate light beams with a preset numerical aperture and a preset wavelength, and includes a first plano-convex lens sequentially located on one side of the object surface , The first meniscus convex lens, the second meniscus convex lens, the third meniscus convex lens and the first biconvex lens; the refractive power of the first plano-convex lens is D1, the refractive power of the first meniscus convex lens Is D2, the refractive power of the second meniscus convex lens is D3, the refractive power of the third meniscus convex lens is D4, and the refractive power of the first biconvex lens is D5; where D1>0, D2 >0, D3>0, D4>0, D5>0, and min{D3, D4, D5}

max{D3, D4, D5}; min{D3, D4, D5} represents the minimum value of D3, D4, and D5, and max{D3, D4, D5} represents the maximum value of D3, D4, and D5. Using the above technical means, by reasonably setting the shape and refractive power of each convex lens between the object plane and the image plane, the optical collimation system provided by the embodiment of the present invention can ensure that the optical collimation system provided by the embodiment of the present invention has a preset numerical aperture and a preset wavelength. The collimation effect is good.

The above is an embodiment of the present specification. The technical means in the embodiment of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiment of the present invention.

max{D3，D4，D5}；min{D3，D4，D5}表示D3、D4及D5中的最小值，max{D3，D4，D5}表示D3、D4及D5中的最大值。 FIG. 1 is a schematic structural diagram of an optical collimation system provided by an embodiment of the present invention. As shown in FIG. 1, the optical collimation system CL1 provided by an embodiment of the present invention can be used to collimate light beams of preset numerical aperture and preset wavelength. For straight operation, the optical collimation system CL1 includes a first plano-convex lens L1, a first meniscus-shaped convex lens L2, a second meniscus-shaped convex lens L3, a third meniscus-shaped convex lens L4, and a first biconvex lens, which are sequentially located on the object surface side L5; the refractive power of the first plano-convex lens L1 is D1, the refractive power of the first meniscus lens L2 is D2, the refractive power of the second meniscus lens L3 is D3, and the third meniscus lens L4 is The optical power is D4, and the optical power of the first biconvex lens L5 is D5; where D1>0, D2>0, D3>0, D4>0, D5>0, and min{D3, D4, D5}

max{D3, D4, D5}; min{D3, D4, D5} represents the minimum value of D3, D4, and D5, and max{D3, D4, D5} represents the maximum value of D3, D4, and D5.

max{D3，D4，D5}，min{D3，D4，D5}表示D3、D4及D5中的最小值，max{D3，D4，D5}表示D3、D4及D5中的最大值，目的是為了消去第二彎月形凸透鏡L3、第三彎月形凸透鏡L4及第一雙凸透鏡L5帶來的球差，保證光學準直系統對入射光束的準直效果良好。 As shown in Figure 1, the optical collimation system CL1 provided by the embodiment of the present invention consists of five lenses from the object plane to the image plane, namely, a first plano-convex lens L1, a first meniscus convex lens L2, and a second meniscus convex lens. L3, the third meniscus convex lens L4 and the first biconvex lens L5, the first plano convex lens L1, the first meniscus convex lens L2, the second meniscus convex lens L3, the third meniscus convex lens L4 and the first biconvex lens L5 all have positive refractive power, namely D1>0, D2>0, D3>0, D4>0, D5>0, where the refractive power can represent the inverse of the effective focal length of the lens. At the same time, the refractive power D1 of the first plano-convex lens L1, the refractive power D3 of the second meniscus lens L3, the refractive power D4 of the third meniscus lens L4, and the refractive power D5 of the first biconvex lens L5 satisfy min{D3, D4, D5}

max{D3, D4, D5}, min{D3, D4, D5} represents the minimum value of D3, D4, and D5, max{D3, D4, D5} represents the maximum value of D3, D4, and D5. Eliminate the spherical aberration caused by the second meniscus convex lens L3, the third meniscus convex lens L4, and the first double convex lens L5 to ensure that the optical collimation system has a good collimation effect on the incident light beam.

max{D3，D4，D5}，保證本發明實施例提供的光學準直系統可對預設數值孔徑預計預設波長的入射光束進行良好的準直，保證出射至像面的光束的準直性良好，保證像方感測器中需平行光入射的光學組件可正常工作，保證像方感測器能精確測量光線通過投影物鏡的像質。 To sum up, the optical collimation system provided by the embodiment of the present invention has a first plano-convex lens, a first meniscus-shaped convex lens, a second meniscus-shaped convex lens, and a third convex lens arranged in sequence between the object plane and the image plane. The meniscus lens and the first biconvex lens are provided with the first plano-convex lens, the first meniscus convex lens, the second meniscus convex lens, the third meniscus convex lens, and the first biconvex lens all have positive refractive power, and the first The refractive power D1 of the plano-convex lens, the refractive power D3 of the second meniscus convex lens, the refractive power D4 of the third meniscus convex lens, and the refractive power D5 of the first biconvex lens satisfy min{D3, D4, D5}

max{D3, D4, D5}, to ensure that the optical collimation system provided by the embodiment of the present invention can collimate the incident beam with a preset numerical aperture and a preset wavelength, and ensure the collimation of the beam emitted to the image surface Good, to ensure that the optical components in the image-side sensor that require parallel light incidence can work normally, and to ensure that the image-side sensor can accurately measure the image quality of the light passing through the projection objective.

Optionally, the optical collimation system CL1 provided by the embodiment of the present invention can be applied to the case of an immersion projection objective lens. The immersion liquid may be water or oil. The embodiment of the present invention only uses the immersion liquid as water for exemplification. As shown in Figure 1, when the immersion liquid is water, the water can be used as the virtual lens L0, which is a biplanar lens. The incident point light source of the object plane is located on the surface S0 of the virtual lens L0, along the optical axis, as shown in Figure 1. In the Z direction, the distance between the virtual lens L0 and the first plano-convex lens L1 is very small, less than one-thousandth of the thickness of the first plano-convex lens L1, so the incident point light source on the object plane can also be approximated as the first plano-convex lens L1 surface.

|D4-D3|

0，保證第二彎月形凸透鏡L3的光焦度D3、第三彎月形凸透鏡L4的光焦度D4及第一雙凸透鏡L5的光焦度D5均勻變化，保證第二彎月形凸透鏡L3、第三彎月形凸透鏡L4及第一雙凸透鏡L5可達到消除像差及均勻匯聚光線的效果。 Optionally, the difference between the refractive power D5 of the first lenticular lens L5 and the refractive power D4 of the third meniscus lens L4 satisfies a first predetermined condition, wherein the first predetermined condition may be the first double The difference between the refractive power D5 of the convex lens L5 and the refractive power D4 of the third meniscus lens L4 is zero or a small value close to zero; the refractive power D4 of the third meniscus lens L4 is equal to that of the third meniscus lens L4. The difference between the refractive power D3 of the two meniscus convex lenses L3 satisfies a second preset condition, where the second preset condition may be the refractive power D4 of the third meniscus convex lens L4 and the second meniscus convex lens The difference between the optical powers D3 of L3 is zero or a small value close to zero. This guarantees |D5-D4|

|D4-D3|

0. Ensure that the refractive power D3 of the second meniscus lens L3, the refractive power D4 of the third meniscus lens L4, and the refractive power D5 of the first biconvex lens L5 are uniformly changed, and the second meniscus lens L3 is guaranteed , The third meniscus convex lens L4 and the first double convex lens L5 can achieve the effect of eliminating aberrations and uniformly converging light.

Optionally, the first plano-convex lens L1 includes a first surface S1 close to the object surface and a second surface S2 far away from the object surface, and the first meniscus convex lens L2 includes a third surface S3 close to the object surface. And a fourth surface S4 on the side away from the object surface. The second meniscus lens L3 includes a fifth surface S5 on the side close to the object surface and a sixth surface S6 on the side away from the object surface. The third meniscus convex lens L4 includes The seventh surface S7 on the side close to the object surface and the eighth surface S8 on the side away from the object surface. The first lenticular lens L5 includes a ninth surface S9 on the side close to the object surface and a tenth surface S10 on the side far from the object surface; Among them, the first surface S1 is a plane; the second surface S2 is a hyper-hemispherical surface, and the second surface S2 is a homogeneous surface. The hyper-hemispherical surface includes a hemispherical surface and the two end points of the hemispherical surface extend in the optical axis direction. The outer surface formed by the distance; the third surface S3, the fourth surface S4, the fifth surface S5, the sixth surface S6, the seventh surface S7, the eighth surface S8, the ninth surface S9 and the tenth surface S10 are all spherical surfaces, and The fifth surface S5 is a uniform surface, and the tenth surface S10 is an aperture surface of the optical collimation system.

Exemplarily, referring to FIG. 1 continuously, setting the first surface S1 as a plane can ensure that the immersion water flows freely on the first surface S1 without causing aberration. The second surface S2 is set as a hyper-hemispherical surface and a uniform surface to ensure that the spherical aberration and coma generated by the second surface S2 are extremely small and almost negligible. Among them, the hyper-hemispherical surface can be understood as two of the hemispherical surface and the hemispherical surface. The outer surface formed by the end point extending a preset distance in the optical axis direction. Set the third surface S3, The fourth surface S4, the fifth surface S5, the sixth surface S6, the seventh surface S7, the eighth surface S8, the ninth surface S9, and the tenth surface S10 are all spherical surfaces, and the fifth surface S5 is a uniform surface. The surface S10 is the diaphragm surface of the optical collimation system, which can ensure that each surface has a good light convergence effect, and the spherical aberration and coma generated are negligible, and the collimation effect of the optical collimation system is good.

Specifically, Figure 2 is a bar graph of the low-order spherical aberration and low-order coma of each surface of the optical collimation system provided in Figure 1. The abscissa represents the surface number of each mirror, and the ordinate represents the aberration coefficient. . As shown in Fig. 2, the first surface S1 is a plane, which does not produce spherical aberration and coma; the second surface S2 is a hyper-hemispherical surface and is a homogeneous surface, and each order of spherical aberration is small and does not produce coma; The fifth surface S5 is a uniform surface, and each order of spherical aberration is small and does not produce coma; at the same time, the spherical aberration and coma value produced by each surface can be positively and negatively offset to ensure the spherical aberration and coma of the entire optical collimation system The difference is small and can be ignored, ensuring good collimation effect of the optical collimation system.

Optionally, in the optical collimation system CL1 provided by the embodiment of the present invention, the preset numerical aperture may be NA, where NA>0; the preset wavelength may be λ, where λ=193.368nm, which is the embodiment of the present invention The provided optical collimation system can use a deep ultraviolet light source with a wavelength of 193.368 nanometers, and the numerical aperture of the object side meets a large numerical aperture value. For example, the numerical aperture NA can be 1.35, which ensures that a higher lithography resolution can be achieved.

Optionally, the first plano-convex lens L1, the first meniscus-shaped convex lens L2, the second meniscus-shaped convex lens L3, the third meniscus-shaped convex lens L4, and the first biconvex lens L5 can be made of fused silica, whose refractive index It is 1.5602, the immersion liquid can be water, and its refractive index is 1.436157.

Table 1 exemplarily shows the parameter value of each optical component of the optical collimation system CL1 as shown in FIG. 1 provided by the embodiment of the present invention. The column of "Serial Number" represents the value of each optical component from the object plane to the image plane. The serial number corresponding to a surface; the "radius" column shows the sphere of each surface Surface radius; the "thickness/spacing" column indicates the distance between the vertices of adjacent surfaces, and the value in the lens indicates the thickness of the lens; the "material" column indicates the material between each surface and the next surface. The material of the lens is fused silica, and the immersion liquid is water.

The optical collimation system provided by the embodiment of the present invention uses a light source with a wavelength of 193.368 nanometers, a numerical aperture NA=1.35 on the object side, and each parameter shown in Table 1, which can ensure that the beam received by the image side is parallel light. In a small field of view, the collimation of parallel light can be less than 0.5°, the effective focal length of the object side is 5.0834mm, and the F number is 0.37. The F number is defined as the ratio of the effective focal length of the object side to the diameter of the entrance pupil. The total length of the optical collimation system is 13.2mm, which ensures that the entire optical collimation system has a good collimation effect. At the same time, the entire optical collimation system has a compact structure and good performance.

It should be noted that Table 1 only provides an example of each of the optical collimation system CL1 The parameter values of each optical component, it can be understood that when the parameter value of each optical component in the optical collimation system is scaled with the value shown in Table 1, the parameter value is also within the protection scope of the embodiment of the present invention .

3 is a schematic diagram of the relationship between the image-side collimation of the optical collimation system provided in FIG. 1 and the object height. The image-side collimation is defined as the angle between the emitted light of the image side and the optical axis (z-axis). As shown in Figure 3, the deviation of the image side's light at the most edge of the meridian (+Y, -Y) and the principal ray's collimation degree increases with the increase of the object height, but it is collimated within 20μm of the object height The maximum deviation of the degree is controlled within 0.25°, which has a better collimation degree.

Fig. 4 is an example diagram of a ray aberration curve obtained by the optical collimation system provided in Fig. 1 after being flipped along the xy plane, wherein the unit of the vertical axis is mm, and the abscissa is the diameter direction along the pupil plane. The three coordinates from top to bottom correspond to the object height of 13μm, 6.5μm and 0μm in FIG. 1. It can be seen from the figure that the optical collimation system provided by the embodiment of the present invention has better image quality within -59.6nm-+59.6nm (0.3 wavelengths).

It is understandable that the aforementioned meridian plane refers to the plane formed by the chief ray of the off-axis object point and the principal axis of the aforementioned optical collimation system; the aforementioned sagittal plane refers to the chief ray of the off-axis object point and is connected to the meridian plane. Vertical plane.

It should be noted that, in FIG. 4, the aforementioned relative field height (Relative Field Height) refers to the ratio of the image height position to the total image height length (ie, the image height position/total image height length). According to Figure 4, at the first image height position, the relative field of view height is 1, and the angle between the parallel light and the optical axis of the corresponding collimator lens is 0.15°; at the second image height position, the relative field of view The height is 0.5, and the angle between the parallel light and the optical axis at one end of the corresponding collimator lens is 0.075°; at the third image height position, the relative field of view height is 0, and the object side at one end of the corresponding collimator lens The angle between the parallel light and the optical axis is 0°.

max{D7，D8，D9}；min{D7，D8，D9}表示D7、D8及D9中的最小值，max{D7，D8，D9}表示D7、D8及D9中的最大值。 FIG. 5 is a schematic structural diagram of another optical collimation system provided by an embodiment of the present invention. As shown in FIG. 5, the optical collimation system CL2 provided by an embodiment of the present invention can be used to perform processing on beams of preset numerical aperture and preset wavelength. For collimation operation, the optical collimation system CL2 includes a second plano-convex lens L6, a fourth meniscus-shaped convex lens L7, a fifth meniscus-shaped convex lens L8, and a second double-convex lens L9, which are sequentially located on one side of the object plane; a second plano-convex lens L6 The refractive power of the fourth meniscus lens L7 is D7, the fifth meniscus lens L8 has a refractive power of D8, and the second double convex lens L9 has a refractive power of D9; among them, D6 >0, D7>0, D8>0, D9>0, and min{D7, D8, D9}

max{D7, D8, D9}; min{D7, D8, D9} represents the minimum value of D7, D8, and D9, and max{D7, D8, D9} represents the maximum value of D7, D8, and D9.

max{D7，D8，D9}；min{D7，D8，D9}表示D7、D8及D9中的最小值，max{D7，D8，D9}表示D7、D8及D9中的最大值，目的是為了消去第四彎月形凸透鏡L7、第五彎月形凸透鏡L8及第二雙凸透鏡L9帶來的球差，保證光學準直系統對入射光束的準直效果良好。 As shown in Figure 5, the optical collimation system CL2 provided by the embodiment of the present invention consists of four lenses from the object plane to the image plane, namely the second plano-convex lens L6, the fourth meniscus convex lens L7, and the fifth meniscus convex lens. L8, and the second biconvex lens L9, the second plano-convex lens L6, the fourth meniscus lens L7, the fifth meniscus lens L8 and the second biconvex lens L9 all have positive refractive power, that is, D6>0, D7>0 , D8>0, D9>0. At the same time, the refractive power D6 of the second plano-convex lens L6, the refractive power D7 of the fourth meniscus lens L7, the refractive power D8 of the fifth meniscus lens L8, and the refractive power D9 of the second biconvex lens L9 satisfy min{D7, D8, D9}

max{D7, D8, D9}; min{D7, D8, D9} represents the minimum of D7, D8, and D9, max{D7, D8, D9} represents the maximum of D7, D8, and D9, the purpose is Eliminate the spherical aberration caused by the fourth meniscus convex lens L7, the fifth meniscus convex lens L8, and the second double convex lens L9 to ensure that the optical collimation system has a good collimating effect on the incident light beam.

max{D7，D8，D9}，保證本發明實施例提供的光學準直系統可對預設數值孔徑以及預設波長的入射光束進行良好的準直，保證出射至像面的光束的具備良好的準直性，保證像方感測器中需平行光入射的光學組件可正常工作，保證像方感測器能精確測量光線通過投影物鏡的像質。 In summary, the optical collimation system provided by the embodiment of the present invention has a second plano-convex lens, a fourth meniscus convex lens, a fifth meniscus convex lens, and a second biconvex lens in sequence between the object plane and the image plane. At the same time, the second plano-convex lens, the fourth meniscus-shaped convex lens, the fifth meniscus-shaped convex lens and the second double-convex lens all have positive refractive power, and the second plano-convex lens L6 has a refractive power D6 and the fourth meniscus-shaped convex lens The refractive power D7 of L7, the refractive power D8 of the fifth meniscus lens L8 and the refractive power D9 of the second lenticular lens L9 satisfy min{D7, D8, D9}

max{D7, D8, D9}, to ensure that the optical collimation system provided by the embodiment of the present invention can collimate the incident light beam with the preset numerical aperture and the preset wavelength well, and ensure that the beam emitted to the image surface has a good quality The collimation ensures that the optical components in the image-side sensor that need parallel light to enter can work normally, and the image-side sensor can accurately measure the image quality of the light passing through the projection lens.

Optionally, the optical collimation system CL2 provided by the embodiment of the present invention can be applied to the immersion projection objective lens. The immersion liquid may be water or oil. The embodiment of the present invention only uses the immersion liquid as water for illustrative description. As shown in Figure 5, when the immersion liquid is water, the water can be used as the virtual lens L0, which is a biplanar lens. The incident point light source of the object plane is located on the surface S0 of the virtual lens L0, along the optical axis, as shown in Figure 5. In the Z direction, the distance between the virtual lens L0 and the second plano-convex lens L6 is very small and much smaller than the thickness of the second plano-convex lens L6. Therefore, the incident point light source on the object plane can also be approximated as being on the surface of the second plano-convex lens L6.

|D8-D7|

0，保證第四彎月形凸透鏡L7的光焦度D7、第五彎月形凸透鏡L8的光焦度D8及第二雙凸透鏡L9的光焦度D9均勻變化，保證第四彎月形凸透鏡L7、第五彎月形凸透鏡L8及第二雙凸透鏡L9可達到消除像差及均勻匯聚光線的效果。 Optionally, the difference between the refractive power D9 of the second lenticular lens L9 and the refractive power D8 of the fifth meniscus lens L8 satisfies the third preset condition, wherein the third preset condition may be the second double The difference between the refractive power D9 of the convex lens L9 and the refractive power D8 of the fifth meniscus lens L8 is zero or a small value close to zero; the refractive power D8 of the fifth meniscus lens L8 is equal to that of the fifth meniscus lens L8. The difference between the refractive power D7 of the four meniscus lens L7 satisfies the fourth preset condition, where the fourth preset condition may be the refractive power D8 of the fifth meniscus lens L8 and the fourth meniscus lens L8 The difference between the optical powers of L7 and D7 is zero or a small value close to zero, which can guarantee |D9-D8|

|D8-D7|

0. Ensure that the optical power D7 of the fourth meniscus lens L7, the optical power D8 of the fifth meniscus lens L8, and the optical power D9 of the second biconvex lens L9 are uniformly changed to ensure that the fourth meniscus lens L7 1. The fifth meniscus lens L8 and the second double convex lens L9 can achieve the effect of eliminating aberrations and uniformly converging light.

Optionally, the second plano-convex lens L6 includes an eleventh surface S11 on the side close to the object surface and a twelfth surface S12 on the side away from the object surface. The fourth meniscus convex lens L7 includes a tenth surface S11 on the side close to the object surface. Three surfaces S13 and a fourteenth surface S14 on the side away from the object surface. The fifth meniscus lens L8 includes a fifteenth surface S15 on the side close to the object surface and a sixteenth surface S16 on the side away from the object surface. The lenticular lens L9 includes a seventeenth surface S17 on the side close to the object surface and an eighteenth surface S18 on the side far from the object surface; wherein, the eleventh surface S11 is a flat surface; the twelfth surface S12 is a hyperhemispherical surface, and the The twelfth surface S12 is a uniform surface, and the hyper-hemispherical surface includes a hemispherical surface and an outer surface formed by two end points of the hemispherical surface extending a predetermined distance in the optical axis direction; the thirteenth surface S13, the fourteenth surface S14, and the second The fifteenth surface S15, the sixteenth surface S16, the seventeenth surface S17, and the eighteenth surface S18 are spherical surfaces, and the eighteenth surface S18 is the diaphragm surface of the optical collimation system CL2.

Exemplarily, referring to FIG. 5 continuously, setting the eleventh surface S11 as a plane can ensure that the immersion water flows freely on the eleventh surface S11 without causing aberration. The twelfth surface S12 is set as a hyper-hemispherical surface and a uniform surface to ensure that the spherical aberration and coma generated by the twelfth surface S12 are extremely small and can be almost ignored. Among them, the hyper-hemispherical surface can be understood as the hemispherical surface and the hemispherical surface The outer surface formed by the two end points extending a preset distance in the optical axis direction. Set The thirteenth surface S13, the fourteenth surface S14, the fifteenth surface S15, the sixteenth surface S16, the seventeenth surface S17 and the eighteenth surface S18 are all spherical surfaces, and the eighteenth surface S18 is the optical collimation system CL2 The diaphragm surface can ensure that each surface has a good converging effect on the light, the spherical aberration and coma produced can be ignored, and the collimation effect of the optical collimation system is guaranteed.

Optionally, in the optical collimation system CL2 provided by the embodiment of the present invention, the preset numerical aperture may be NA, where NA>0; the preset wavelength may be λ, where λ=193.368nm, which is the embodiment of the present invention The provided optical collimation system can use a deep ultraviolet light source with a wavelength of 193.368 nanometers, and the numerical aperture of the object side meets a large numerical aperture value. For example, the numerical aperture NA can be 1.35, which ensures that a higher lithography resolution can be achieved.

Optionally, the preparation materials of the second plano-convex lens L6, the fourth meniscus lens L7, the fifth meniscus lens L8, and the second biconvex lens L9 may include fused silica, the refractive index of which is 1.5602, and the immersion liquid may be water , Its refractive index is 1.436157.

Table 2 exemplarily shows the parameter value of each optical component of the optical collimation system CL2 as shown in FIG. 5 provided by the embodiment of the present invention. The column of "Serial Number" represents every time between the object surface and the image surface. The serial number corresponding to a surface; the "radius" column shows the spherical radius of each surface; the "thickness/spacing" column shows the distance between the vertices of adjacent surfaces, and the value in the lens represents the thickness of the lens; The column shows the material between each surface and the next surface. Here, the lens material is fused silica and the immersion liquid is water for example.

The optical collimation system provided by the embodiment of the present invention uses a light source with a wavelength of 193.368 nanometers, a numerical aperture NA=1.35 on the object side, and each parameter shown in Table 2, which can ensure that the beam received by the image side is parallel light. The effective focal length of the object side is 4.8mm, the F number is 0.35, and the F number is defined as the ratio of the effective focal length of the object side to the diameter of the entrance pupil. The total length of the optical collimation system is 11mm, which ensures that the entire optical collimation system has a good collimation effect. At the same time, the entire optical collimation system has a compact structure and good performance.

It should be noted that Table 2 only provides an exemplary parameter value of each optical component in the optical collimation system CL2. It is understandable that when the parameter value of each optical component in the optical collimation system is as shown in Table 2 The parameter values obtained by equal scaling are also within the protection scope of the embodiments of the present invention.

6 is a schematic diagram of the relationship between the image-side collimation of the optical collimation system provided in FIG. 5 and the height of the object side. The image-side collimation is defined as the angle between the emitted light of the image side and the optical axis (z-axis). As shown in Figure 6, the deviation of the collimation of the image side light at the positive edge of the meridian +Y and the chief ray increases with the increase of the object height, while the collimation of the negative edge of the meridian -Y The deviation decreases with the increase of the object height. The maximum deviation of the collimation within 20μm of the object height is controlled within 0.36°, which has a better collimation.

FIG. 7 is an example diagram of a ray aberration curve obtained by the optical collimation system provided in FIG. 5 after being flipped along the xy plane, wherein the unit of the vertical axis is mm, and the abscissa is the diameter direction along the pupil plane. The three coordinates from top to bottom correspond to the object heights of 16 μm, 8 μm and 0 μm in FIG. 5. It can be seen from the figure that the non-marginal rays of the optical collimating system provided by the embodiment of the present invention have aberrations of less than one wavelength in the three fields of view as shown in FIG. 7, and the imaging quality is good.

It is understandable that the aforementioned meridian plane refers to the plane formed by the chief ray of the off-axis object point and the principal axis of the aforementioned optical collimation system; the aforementioned sagittal plane refers to the chief ray of the off-axis object point and is connected to the meridian plane. Vertical plane.

It should be noted that in FIG. 7, the aforementioned Relative Field Height (Relative Field Height) refers to the ratio of the image height position to the total image height length (ie, the image height position/total image height length). According to Figure 7, at the first image height position, the relative field of view height is 1, and the angle between the parallel light and the optical axis at one end of the corresponding collimator lens is 0.2°; at the second image height position, the relative field of view The height is 0.5, and the angle between the parallel light and the optical axis at one end of the corresponding collimator lens is 0.1°; at the third image height position, the relative field of view height is 0, and the object side at one end of the corresponding collimator lens The angle between the parallel light and the optical axis is 0°.

max{D11，D12}；min{D11，D12}表示D11及D12中的最小值，max{D11，D12}表示D11及D12中的最大值。 FIG. 8 is a schematic structural diagram of another optical collimation system provided by an embodiment of the present invention. As shown in FIG. 8, the optical collimation system CL3 provided by an embodiment of the present invention can be used to perform processing on beams of preset numerical aperture and preset wavelength. For collimation operation, the optical collimation system CL3 includes a third plano-convex lens L10, a sixth meniscus-shaped convex lens L11, and a third double-convex lens L12, which are sequentially located on the side of the object surface; the optical power of the third plano-convex lens L10 is D10, The refractive power of the six meniscus convex lens L11 is D11, and the refractive power of the third biconvex lens L12 is D12; where D10>0, D11>0, D12>0, and min{D11, D12}

max{D11, D12}; min{D11, D12} represents the minimum value of D11 and D12, and max{D11, D12} represents the maximum value of D11 and D12.

max{D11，D12}；min{D11，D12}表示D11及D12中的最小值，max{D11，D12}表示D11及D12中的最大值，目的是為了消去第六彎月形凸透鏡L11及第三雙凸透鏡L12帶來的球差，保證光學準直系統對入射光束的準直效果良好。 As shown in Figure 8, the optical collimation system CL3 provided by the embodiment of the present invention consists of three lenses from the object plane to the image plane, namely a third plano-convex lens L10, a sixth meniscus-shaped convex lens L11, and a third double-convex lens L12. The third plano-convex lens L10, the sixth meniscus-shaped convex lens L11, and the third double-convex lens L12 all have positive refractive power, that is, D10>0, D11>0, D12>0. At the same time, the refractive power D10 of the third plano-convex lens L10, the refractive power D11 of the sixth meniscus lens L11 and the refractive power D12 of the third double convex lens L12 satisfy min{D11, D12}

max{D11, D12}; min{D11, D12} represents the minimum value of D11 and D12, max{D11, D12} represents the maximum value of D11 and D12, the purpose is to eliminate the sixth meniscus lens L11 and the first The spherical aberration brought by the three double convex lens L12 ensures that the optical collimation system has a good collimation effect on the incident beam.

max{D11，D12}，保證本發明實施例提供的光學準直系統可對預設數值孔徑以及預設波長的入射光束進行良好的準直，保證出射至像面的光束的具備良好的準直性，保證像方感測器中需平行光入射的光學組件可正常工作，保證像方感測器能精確測量光線通過投影物鏡的像質。 In summary, the optical collimation system provided by the embodiment of the present invention has a third plano-convex lens, a sixth meniscus-shaped convex lens, and a third double-convex lens in sequence between the object plane and the image plane, and a third plano-convex lens is provided at the same time. , Both the sixth meniscus lens and the third double convex lens have positive refractive power, and the third plano-convex lens L10 has a refractive power D10, the sixth meniscus lens L11 has a refractive power D11, and the third double convex lens L12 has a refractive power. The focal power D12 satisfies min{D11, D12}

max{D11, D12}, to ensure that the optical collimation system provided by the embodiment of the present invention can collimate the incident beam with the preset numerical aperture and the preset wavelength, and ensure that the beam emitted to the image surface has a good collimation To ensure that the optical components in the image-side sensor that require parallel light incidence can work normally, and to ensure that the image-side sensor can accurately measure the image quality of the light passing through the projection objective.

Optionally, the optical collimation system CL3 provided by the embodiment of the present invention can be applied In the case of the immersion projection objective lens, the immersion liquid may be water or oil, and the embodiment of the present invention only uses the immersion liquid as water for exemplary description. As shown in Figure 8, when the immersion liquid is water, the water can be used as the virtual lens L0, which is a biplanar lens. The incident point light source of the object plane is located on the surface S0 of the virtual lens L0, along the optical axis, as shown in Figure 8. In the Z direction, the distance between the virtual lens L0 and the third plano-convex lens L10 is very small, much smaller than the thickness of the third plano-convex lens L10, so the incident point light source on the object plane can also be approximated as being on the surface of the third plano-convex lens L10.

Optionally, the third plano-convex lens L10 includes a nineteenth surface S19 on the side close to the object surface and a twentieth surface S20 on the side away from the object surface. The sixth meniscus convex lens L11 includes a second surface S19 on the side close to the object surface. Eleven surface S21 and a twenty-second surface S22 on the side away from the object surface. The third lenticular lens L12 includes a twenty-third surface S23 on the side close to the object surface and a twenty-fourth surface S24 on the side away from the object surface; Among them, the nineteenth surface S19 is a flat surface; the twentieth surface S20 is a hyper-hemispherical surface, and the twentieth surface S20 is a homogeneous surface. The hyper-hemispherical surface includes a hemispherical surface and the two end points of the hemispherical surface are in the optical axis direction. An outer surface formed by extending a predetermined distance; the twenty-first surface S21, the twenty-second surface S22, and the twenty-third surface S23 are spherical surfaces, the twenty-fourth surface S24 is aspherical, and the twenty-fourth surface S24 is an optical The diaphragm surface of the collimation system CL3.

Exemplarily, referring to FIG. 8 continuously, setting the nineteenth surface S19 as a plane can ensure that the immersion water flows freely on the nineteenth surface S19 without causing aberration. The twentieth surface S20 is set as a hyper-hemispherical surface and a uniform surface to ensure that the spherical aberration and coma generated by the twentieth surface S20 are very small and almost negligible. Among them, the hyper-hemispheric surface can be understood as a hemispherical surface and a hemispherical surface The two end points of the outer surface are formed after extending a preset distance in the optical axis direction. The twenty-first surface S21, the twenty-second surface S22, and the twenty-third surface S23 are all spherical surfaces, the twenty-fourth surface S24 is an aspheric surface, and the twenty-fourth surface S24 is the diaphragm of the optical collimation system CL3 surface, It can ensure that each surface has a good converging effect on the light, the spherical aberration and coma produced can be ignored, and the collimation effect of the optical collimation system is guaranteed to be good.

，其中，P是拱高函數，h是鏡片上的點到光軸的高度，K及C1至Cn是非球面項係數，R是最高點半徑。 Optionally, the diaphragm surface (S24) in the optical collimation system CL3 provided by the embodiment of the present invention is an aspheric surface, and the twenty-fourth surface S24 can be described by the following formula:

, Where P is the crown height function, h is the height from the point on the lens to the optical axis, K and C1 to Cn are the coefficients of the aspheric terms, and R is the radius of the highest point.

Optionally, in the optical collimation system CL3 provided by the embodiment of the present invention, the preset numerical aperture may be NA, where NA>0; the preset wavelength may be λ, where λ=193.368nm, which is the embodiment of the present invention The provided optical collimation system can use a deep ultraviolet light source with a wavelength of 193.368 nanometers, and the numerical aperture of the object side meets a large numerical aperture value. For example, the numerical aperture NA can be 1.35, which ensures that a higher lithography resolution can be achieved.

Optionally, the preparation materials of the third plano-convex lens L10, the sixth meniscus lens L11, and the third lenticular lens L12 may include fused silica, which has a refractive index of 1.5602, and the immersion liquid may be water, which has a refractive index of 1.436157.

Table 3 exemplarily shows the parameter value of each optical component of the optical collimation system CL3 as shown in FIG. 8 provided by the embodiment of the present invention, wherein the column of "Serial Number" represents the value of each optical component from the object plane to the image plane. The serial number corresponding to a surface; the "radius" column shows the spherical radius of each surface; the "thickness/spacing" column shows the distance between the vertices of adjacent surfaces, and the value in the lens represents the thickness of the lens; The column shows the material between each surface and the next surface. Here, the lens material is fused silica and the immersion liquid is water for example.

The optical collimation system provided by the embodiment of the present invention uses a light source with a wavelength of 193.368 nanometers, a numerical aperture NA=1.35 on the object side and each parameter shown in Table 3, which can ensure that the beam received by the image side is parallel light. The effective focal length of the object side is 4.8mm, and the F number is 0.37. The F number is defined as the ratio of the effective focal length of the object side to the diameter of the entrance pupil. The total length of the optical collimation system is 12mm, which ensures that the entire optical collimation system has a good collimation effect. At the same time, the entire optical collimation system has a compact structure and good performance.

It should be noted that Table 3 only provides exemplary parameter values of each optical component in the optical collimation system CL3. It can be understood that when the parameter values of each optical component in the optical collimation system are as shown in Table 3 The parameter values obtained by equal scaling are also within the protection scope of the embodiments of the present invention.

9 is a schematic diagram of the relationship between the image-side collimation of the optical collimation system provided in FIG. 8 and the height of the object side. The image-side collimation is defined as the angle between the emitted light of the image side and the optical axis (z axis). As shown in Figure 9, the ray on the image side is at the edge of the meridian (+Y, -Y) and the principal ray The deviation of the straightness becomes larger with the increase of the height of the object, but the maximum deviation of the collimation within 20μm of the object height is controlled within 0.25°, which has a better collimation.

FIG. 10 is an example diagram of a ray aberration curve obtained by the optical collimation system provided in FIG. 8 after being flipped along the xy plane, where the unit of the vertical axis is mm, and the abscissa is the diameter direction along the pupil plane. The three coordinates from top to bottom correspond to the object height of 16μm, 8μm and 0μm in FIG. 8. It can be seen from the figure that the optical collimation system provided by the embodiment of the present invention has better image quality in the range of -22.7 nm to ten 22.7 nm (0.12 wavelengths).

It is understandable that the aforementioned meridian plane refers to the plane formed by the chief ray of the off-axis object point and the principal axis of the aforementioned optical collimation system; the aforementioned sagittal plane refers to the chief ray of the off-axis object point and is connected to the meridian plane. Vertical plane.

It should be noted that, in FIG. 10, the aforementioned Relative Field Height (Relative Field Height) refers to the ratio of the image height position to the total image height length (ie, image height position/total image height length). According to Figure 10, at the first image height position, the relative field of view height is 1, and the angle between the parallel light and the optical axis at one end of the corresponding collimator lens is 0.2°; at the second image height position, the relative field of view The height is 0.5, and the angle between the parallel light and the optical axis at one end of the corresponding collimator lens is 0.1°; at the third image height position, the relative field of view height is 0, and the object side at one end of the corresponding collimator lens The angle between the parallel light and the optical axis is 0°.

L0‧‧‧Virtual lens

L1‧‧‧The first plano-convex lens

L2‧‧‧First meniscus convex lens

L3‧‧‧The second meniscus convex lens

L4‧‧‧The third meniscus convex lens

L5‧‧‧The first biconvex lens

S0‧‧‧The surface of the virtual lens

S1‧‧‧First surface

S2‧‧‧Second surface

S3‧‧‧The third surface

S4‧‧‧Fourth surface

S5‧‧‧Fifth surface

S6‧‧‧Sixth surface

S7‧‧‧Seventh surface

S8‧‧‧Eighth surface

S9‧‧‧Ninth surface

S10‧‧‧Tenth surface

CL1‧‧‧Optical Collimation System

Claims (12)

An optical collimation system, which is characterized in that it is used to collimate light beams with a preset numerical aperture and a preset wavelength. The aforementioned optical collimation system includes a first plano-convex lens (L1) and a A meniscus convex lens (L2), a second meniscus convex lens (L3), a third meniscus convex lens (L4) and a first double convex lens (L5); the refractive power of the aforementioned first plano convex lens (L1) is D1, the refractive power of the first meniscus lens (L2) is D2, the refractive power of the second meniscus lens (L3) is D3, and the refractive power of the third meniscus lens (L4) Is D4, the refractive power of the aforementioned first biconvex lens (L5) is D5; where, D1>0, D2>0, D3>0, D4>0, D5>0, and min{D3, D4, D5}

max{D3, D4, D5}; min{D3, D4, D5} represents the minimum value of D3, D4, and D5, and max{D3, D4, D5} represents the maximum value of D3, D4, and D5. The optical collimation system described in item 1 of the scope of patent application, wherein the difference between the refractive power D5 of the first lenticular lens (L5) and the refractive power D4 of the third meniscus lens (L4) The value satisfies the first preset condition, and the first preset condition is that the difference between the refractive power D5 of the first lenticular lens (L5) and the refractive power D4 of the third meniscus lens (L4) is zero; The difference between the refractive power D4 of the third meniscus lens (L4) and the refractive power D3 of the aforementioned second meniscus lens (L3) satisfies the second preset condition, and the second preset condition is the third The difference between the refractive power D4 of the meniscus convex lens (L4) and the refractive power D3 of the second meniscus convex lens (L3) is zero. Such as the optical collimation system described in item 1 of the scope of patent application, wherein the first flat convex transparent The mirror (L1) includes a first surface (S1) on the side close to the object surface and a second surface (S2) on the side away from the object surface. The first meniscus lens (L2) includes a side close to the object surface The third surface (S3) and the fourth surface (S4) on the side far from the object surface. The second meniscus lens (L3) includes a fifth surface (S5) on the side close to the object surface and a fifth surface (S5) far away from the object surface. The sixth surface (S6) on the surface side, the third meniscus lens (L4) includes a seventh surface (S7) on the side close to the object surface and an eighth surface (S8) on the side away from the object surface, The first lenticular lens (L5) includes a ninth surface (S9) on the side close to the object surface and a tenth surface (S10) on the side away from the object surface; wherein, the first surface (S1) is a flat surface; The second surface (S2) is a hyper-hemispherical surface, and the foregoing second surface (S2) is a homogeneous surface. The hyper-hemispherical surface includes a hemispherical surface and the two end points of the foregoing hemispherical surface extend a predetermined distance in the optical axis direction. Outer surface; the third surface (S3), the fourth surface (S4), the fifth surface (S5), the sixth surface (S6), the seventh surface (S7), the eighth surface (S8) The ninth surface (S9) and the tenth surface (S10) are spherical surfaces, the fifth surface (S5) is a uniform surface, and the tenth surface (S10) is the diaphragm surface of the optical collimation system. The optical collimation system described in item 1 of the scope of patent application, wherein the first plano-convex lens (L1), the first meniscus convex lens (L2), the second meniscus convex lens (L3), and the first The preparation materials of the three meniscus convex lens (L4) and the aforementioned first double convex lens (L5) include fused silica. An optical collimation system, characterized in that it is used to collimate light beams with a preset numerical aperture and a preset wavelength. The aforementioned optical collimation system includes a second plano-convex lens (L6) and a Four meniscus convex lens (L7), fifth meniscus convex lens (L8) and second double convex lens (L9); the refractive power of the second plano-convex lens (L6) is D6, and the fourth meniscus convex lens ( The refractive power of L7) is D7, the refractive power of the fifth meniscus lens (L7) is D8, and the refractive power of the second biconvex lens (L9) is D9; where D6>0, D7>0 , D8>0, D9>0, and min{D7, D8, D9}

max{D7, D8, D9}; min{D7, D8, D9} represents the minimum value of D7, D8, and D9, and max{D7, D8, D9} represents the maximum value of D7, D8, and D9. The optical collimation system described in item 5 of the scope of patent application, wherein the difference between the refractive power D9 of the second lenticular lens (L9) and the refractive power D8 of the fifth meniscus lens (L8) The value satisfies the third preset condition, and the third preset condition is that the difference between the refractive power D9 of the second lenticular lens (L9) and the refractive power D8 of the fifth meniscus lens (L8) is zero; The difference between the refractive power D8 of the fifth meniscus convex lens and the refractive power D7 of the aforementioned fourth meniscus convex lens satisfies the fourth preset condition, and the fourth preset condition is that the fifth meniscus convex lens (L8 The difference between the refractive power D8 of the fourth meniscus lens (L7) and the refractive power D7 of the fourth meniscus lens (L7) is zero. The optical collimation system described in item 6 of the scope of patent application, wherein the second plano-convex lens (L6) includes an eleventh surface (S11) on the side close to the object surface and a tenth surface on the side far from the object surface. Two surfaces (S12); the fourth meniscus lens (L7) includes a thirteenth surface (S13) on the side close to the object surface and a fourteenth surface (S14) on the side away from the object surface. The fifth The meniscus convex lens (L8) includes a fifteenth surface (S15) on the side close to the object surface and a sixteenth surface (S16) on the side away from the object surface. The second lenticular lens (L9) includes The seventeenth surface (S17) on the side of the face and away from the aforementioned The eighteenth surface (S18) on the side of the object surface; wherein the aforementioned eleventh surface (S11) is a flat surface; the aforementioned twelfth surface (S12) is a hyperhemispherical surface, and the aforementioned twelfth surface (S12) is uniform Bright surface, hyper-hemispherical surface includes a hemispherical surface and an outer surface formed by two end points of the aforementioned hemispherical surface extending a predetermined distance in the optical axis direction; the aforementioned thirteenth surface (S13), the aforementioned fourteenth surface (S14), The fifteenth surface (S15), the sixteenth surface (S16), the seventeenth surface (S17), and the eighteenth surface (S18) are spherical surfaces, and the eighteenth surface (S18) is the optical standard The diaphragm surface of the straight system. The optical collimation system described in item 5 of the scope of patent application, wherein the second plano-convex lens (L6), the fourth meniscus convex lens (L6), the fifth meniscus convex lens (L8), and the first The preparation material of the biconvex lens (L9) contains fused silica. An optical collimation system, characterized by being used for collimating light beams with preset numerical aperture and preset wavelength. The aforementioned optical collimation system includes a third plano-convex lens (L10) and a Six meniscus convex lens (L11) and third double convex lens (L12); the refractive power of the third plano-convex lens (L10) is D10, the refractive power of the sixth meniscus convex lens (L11) is D11, the aforementioned The refractive power of the third biconvex lens (L12) is D12; where D10>0, D11>0, D12>0, and min{D11, D12}

max{D11, D12}; min{D11, D12} represents the minimum value of D11 and D12, and max{D11, D12} represents the maximum value of D11 and D12. The optical collimation system described in item 9 of the scope of patent application, wherein the third plano-convex lens (L10) includes a nineteenth surface (S19) on the side close to the object surface and a second surface away from the object surface. Ten surface (S20); the aforementioned sixth meniscus convex lens (L11) includes close The twenty-first surface (S21) on the side of the object surface and the twenty-second surface (S22) on the side away from the object surface. The third lenticular lens (L12) includes the twentieth surface on the side close to the object surface. Three surfaces (S23) and a twenty-fourth surface (S24) on the side away from the aforementioned object surface; wherein the aforementioned nineteenth surface (S19) is a flat surface; the aforementioned twentieth surface (S20) is a hyperhemispherical surface, and the aforementioned The twentieth surface (S20) is a homogeneous surface, and the hyperhemispherical surface includes a hemispherical surface and an outer surface formed by extending the two end points of the aforementioned hemispherical surface at a predetermined distance in the optical axis direction; the aforementioned twenty-first surface (S21) , The aforementioned twenty-second surface (S22) and the aforementioned twenty-third surface (S23) are spherical surfaces, the aforementioned twenty-fourth surface (S24) is aspherical, and the aforementioned twenty-fourth surface (S24) is the aforementioned optical collimation The diaphragm surface of the system. The optical collimation system described in item 9 of the scope of patent application, wherein the preparation materials of the third plano-convex lens (L10), the sixth meniscus lens (L11), and the third biconvex lens (L12) include melt quartz. For the optical collimation system described in any one of items 1 to 11 in the scope of the patent application, the aforementioned predetermined numerical aperture is NA, where NA>0; the aforementioned predetermined wavelength is λ, where λ=193.368nm .

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