TWI710658B - Manufacturing chamber and heat treatment furnace for SiC high temperature oxidation process - Google Patents

Abstract

The present invention provides a manufacturing chamber and a heat treatment furnace used in a SiC high-temperature oxidation process. The manufacturing chamber includes: a cylindrical heat insulation device with a closed heat insulation space inside; and a heat insulation board assembly including a plurality of stacked in a vertical direction The heat insulation boards are arranged together; the heat insulation board elements are adjacently arranged above the cylindrical heat insulation device; and the craft boat is used to carry the workpiece to be processed; the craft boat is arranged adjacently above the heat insulation board assembly. The manufacturing chamber for the SiC high-temperature oxidation process provided by the present invention not only has a higher use temperature and a smaller furnace cavity volume, but also can simplify the overall structure of the equipment.

Description

Manufacturing chamber and heat treatment furnace for SiC high temperature oxidation process

The invention relates to the field of semiconductor manufacturing, in particular, to a manufacturing chamber and a heat treatment furnace used in a SiC high temperature oxidation process.

SiC material has outstanding advantages such as wide frequency gap, high saturation drift speed, high thermal conductivity, and high critical breakdown electric field. It belongs to the third generation of semiconductor materials and is suitable for preparing high-power, high-frequency, high-pressure, high-temperature, radiation-resistant electronic devices.

SiC material is the only wide-bandgap semiconductor that can directly oxidize and grow SiO ₂ films. The most commonly used method is to grow SiO ₂ films using high-temperature dry oxygen or wet oxygen thermal oxidation methods, and the thermal oxidation process obtains SiO ₂ films and interface characteristics The quality is the best.

The temperature of the SiC high-temperature oxidation process is as high as 1500°C, and conventional high-temperature equipment cannot meet the manufacturing requirements. At present, the industry uses a high-temperature oxidation furnace for the high-temperature oxidation process of SiC wafers, and the high-temperature oxidation furnace is a key production equipment of the SiC device integrated circuit production line.

The highest temperature of an existing high-temperature annealing furnace is 1950°C, which is low in use temperature, which is not conducive to ion start, and the electrical performance of the device is not easily improved. At the same time, the number of heat insulation baffles in the manufacturing chamber is large, and the chamber volume is large, which is not conducive to the control of key indicators such as temperature uniformity, air tightness, and cleanliness of the chamber. In addition, the transition structure for cooling the intake pipe is lengthy, which is not conducive to the overall optimization of the equipment.

The present invention aims to solve at least one of the technical problems existing in the prior art. It proposes a manufacturing chamber and heat treatment furnace for SiC high-temperature oxidation process, which not only has a higher use temperature and a smaller furnace chamber volume, but also The overall structure of the equipment can be simplified.

In order to achieve the objective of the present invention, a manufacturing chamber for SiC high-temperature oxidation process is provided, which includes: a cylindrical heat insulation device with a closed heat insulation space inside; and a heat insulation board assembly including a plurality of stacked in a vertical direction Heat insulation boards placed together; the heat insulation board assembly is arranged adjacently above the cylindrical heat insulation device; and a craft boat for carrying a workpiece to be processed; the craft boat is arranged adjacent to the partition Above the hot plate assembly.

Preferably, the cylindrical heat insulation device includes: a quartz cylinder, an upper end and a lower end of the quartz cylinder are both closed ends, the enclosed heat insulation space is formed inside, and the quartz cylinder is provided with a through hole A perforation at the upper and lower ends; a quartz tube, the quartz tube is sealed and penetrated in the perforation of the quartz cylinder; and a heat insulation material filled in between the quartz tube and the quartz cylinder Inside the thermal insulation space.

Preferably, the production chamber further includes a boat loading and unloading flange, and the boat loading and unloading flange is sealed against the lower end of the quartz cylinder for supporting the cylindrical heat insulation device and the heat insulation plate The components and the craft boat can move up and down, and an air inlet pipe is sealed through the boat loading and unloading flange and communicates with the inside of the quartz tube.

Preferably, the lower end of the quartz cylinder is provided with a filter hole, the filter hole communicates the heat insulation space with the outside of the quartz cylinder, and a screening program is provided in the filter hole; the boat loading and unloading A sandwich pipeline is arranged in the flange, one end of the sandwich pipeline is communicated with the filter hole, and the other end of the sandwich pipeline is communicated with a second suction device.

Preferably, a fourth sealing ring is arranged between the lower end of the quartz cylinder and the boat loading and unloading flange, and the fourth sealing ring surrounds the filter hole.

Preferably, a fifth sealing ring is provided between the lower end of the quartz cylinder and the boat loading and unloading flange, and the lower end opening of the quartz tube, the filter hole and the fourth sealing ring are all located In the sealing area surrounded by the fifth sealing ring.

Preferably, the heat insulation board element is provided with a vent hole penetrating the thickness of each heat insulation board, and the vent hole communicates with the inside of the quartz tube for transporting process gas to the process boat your region.

Preferably, the production chamber further includes: a production tube body, the upper end of the production tube body is closed, and the lower end is open; the axial direction of the production tube body is vertically arranged; an inner cylinder body, the inner cylinder body The upper end and the lower end are both open and coaxially arranged inside the production tube; an annular gap is formed between the inner cylinder and the production tube; the cylindrical heat insulation device, the heat insulation board assembly and The process boat can rise into the inner cylinder; and a process pipe flange, which has a ring structure; the process pipe flange is sealed with the lower end of the production pipe and the lower end of the inner cylinder Connection; the top surface of the process pipe flange is provided with a downwardly recessed annular gas groove, and the annular gas groove is in butt communication with the annular gap; the process pipe flange is provided with the annular gas A transverse air passage communicated with the groove, and the transverse air passage communicates with a first suction device.

Preferably, the process tube flange is butt-mounted on a furnace barrel flange; the furnace barrel flange has a ring structure and is fixedly installed on a fabricated tube body, and the furnace barrel flange is located on the process tube Above the flange and surrounding the outer side of the production tube; the top surface of the process pipe flange is provided with an upwardly protruding annular flange, the annular flange surrounds the outer side of the production tube Around; and, an annular groove is provided on the lower surface of the furnace barrel flange, the annular flange Extends into the annular groove; the upper surface of the annular flange, the surface of the annular groove opposite to the upper surface of the annular flange, and the outer peripheral wall of the pipe body together form an annular shape A first sealing ring is arranged in the annular space.

Preferably, both the process pipe flange and the furnace barrel flange are provided with an annular cooling water channel.

Preferably, a temperature measuring sleeve is arranged in the furnace tube flange, the detection end of the temperature measuring sleeve is located on the inner peripheral wall of the furnace tube flange, and the other end of the temperature measuring sleeve passes through Extends through the furnace barrel flange; and a temperature sensor is arranged in the temperature measuring sleeve.

Preferably, the production tube, the inner cylinder, the heat insulation board assembly, and the cylindrical heat insulation device are all cylindrical and arranged coaxially; the outer edge of the heat insulation board element There is a gap between the inner cylinder and the inner wall of the inner cylinder for conveying the production gas to the area where the craft boat is located.

As another technical solution, the present invention also provides a heat treatment furnace for SiC high-temperature oxidation process, the heat treatment furnace includes the above-mentioned manufacturing chamber provided by the present invention.

The present invention has the following beneficial effects:

In the technical solution for the production chamber and heat treatment furnace for the SiC high-temperature oxidation process provided by the present invention, the production chamber includes a cylindrical heat insulation device with a closed heat insulation space inside; and the heat insulation board assembly includes a plurality of vertical Heat insulation boards stacked together in directions; and a craft boat, which are adjacently arranged above the heat insulation board assembly. By using the cylindrical heat insulation device and the heat insulation board elements, the high temperature radiation in the area where the craft boat is located can be blocked more effectively, so that the operating temperature of the area where the craft boat is located can be increased to more than 2000 ℃ to meet the production of high-performance devices Request, and cylindrical The volume of the heat insulation device and the heat insulation board element is small, which can reduce the volume of the furnace cavity and simplify the overall structure of the equipment.

1: Make the tube body

2: inner cylinder

3: Craft boat

4: Insulation board

5: Cylindrical heat insulation device

6: The first sealing ring

7: Furnace flange

8: The first exhaust device

9: Process pipe flange

10: Boat loading and unloading flange

11: Annular gap

13: Sandwich pipeline

16: The second sealing ring

17: The third sealing ring

18: The fourth sealing ring

19: Fifth sealing ring

20: Thermowell

21: Temperature sensor

22: intake pipe

41: Vent

51: Quartz Cylinder

52: Quartz tube

53: Insulation material

71: second cooling channel

91: Annular air groove

92: transverse airway

93: The first cooling channel

94: Ring flange

131: Exhausting End

The first figure is a cross-sectional view of a manufacturing chamber used for a SiC high-temperature oxidation process provided by an embodiment of the present invention.

The second figure is a cross-sectional view of the cylindrical heat insulation device used in the embodiment of the present invention.

The third image is an enlarged view of area I in the first image.

The fourth figure is a structural diagram of the temperature measuring sleeve used in the embodiment of the present invention.

In order to enable those skilled in the art to better understand the technical solutions of the present invention, the manufacturing chamber and heat treatment furnace for SiC high temperature oxidation process provided by the present invention will be described in detail below in conjunction with the accompanying drawings.

Please refer to the first figure. The manufacturing chamber for the SiC high temperature oxidation process provided by the embodiment of the present invention includes a cylindrical heat insulation device 5, a heat insulation plate element and a craft boat 3, wherein the cylindrical heat insulation The inside of the device 5 has a closed thermal insulation space. The heat insulation board assembly includes a plurality of heat insulation boards 4 stacked together in a vertical direction, and the heat insulation board assembly is adjacently arranged above the cylindrical heat insulation device 5. The craft boat 3 is used to carry the workpiece to be processed, and the craft boat 3 is arranged adjacently above the heat insulation board assembly.

By using the cylindrical heat insulation device 5 and the heat insulation board element in combination, the temperature in the chamber can be distributed in a vertical direction in a stepped manner, that is, gradually increase from bottom to top. For example, the chamber is on the bottom insulation board 4 The temperature in the following area is 1300°C. As a result, the high temperature radiation in the area where the process boat 3 is located can be blocked more effectively, and the use temperature of the area where the process boat 3 is located can be increased. The temperature is above 2000°C to meet the manufacturing requirements of high-performance devices, and the volume of the cylindrical heat insulation device 5 and the heat insulation plate element is small, so that the volume of the furnace cavity can be reduced and the overall structure of the equipment can be simplified.

In addition, since the above-mentioned cylindrical heat insulation device 5 has a better heat insulation effect, the heating power can be reduced on the premise that the use temperature meets the production requirements, thereby reducing the production cost.

In this embodiment, as shown in the second figure, the cylindrical heat insulating device 5 includes a quartz cylinder 51, a quartz tube 52 and a heat insulating material 53, wherein the upper and lower ends of the quartz cylinder 51 are both closed ends, and the quartz cylinder 51 A closed heat-insulating space is formed inside, and the quartz cylinder 51 is provided with a perforation penetrating the upper and lower ends thereof. Preferably, the perforation is located on the longitudinal axis of the quartz cylinder 51; the quartz tube 52 is sealed through the perforation of the quartz cylinder 51 Inside, as an air inlet pipe for the production gas to pass through, the air inlet of the quartz tube 52 is connected to an external air source pipe. The heat insulating material 53 is filled in the heat insulating space between the quartz tube 52 and the quartz cylinder 51. The heat insulating material 53 is, for example, heat insulating cotton. Of course, in practical applications, the insulation space can also be vacuum.

In this embodiment, the heat shield element is provided with a vent 41 penetrating the thickness of each heat shield 4, and the vent 41 communicates with the inside of the quartz tube 52, and is used to deliver the production gas to the process boat 3 area.

Depending on the situation, there is an annular gap between the heat insulation board 4 and the inner wall of the chamber, so that the production gas can enter the area of the craft boat 3 through the vent 41 while also entering the area of the craft boat 3 through the annular gap. As a result, the production gas can enter the production area more uniformly, and the production uniformity can be improved.

In addition, with the help of the cylindrical heat insulation device 5 and the heat insulation plate element, the temperature of the chamber below the production area can be distributed stepwise in the vertical direction, so that the production gas passing through the quartz tube 52 and the vent 41 can be It is preheated before reaching the production area, which can improve production efficiency.

In this embodiment, the craft boat 3 is arranged adjacently above the heat insulation board assembly 5 for carrying the workpiece to be processed. Specifically, the craft boat 3 includes a support, on which fixed grooves are arranged at intervals along the vertical direction, and each fixed groove is used to carry a workpiece to be processed. In practical applications, the number of fixed grooves can reach 50, and the process boat 3 can be used to load workpieces of various specifications, such as SiC wafers with a diameter of 6 inches or 4 inches.

In this embodiment, the production chamber further includes a boat loading and unloading flange (flange) 10, the boat loading and unloading flange 10 is sealed against the lower end of the quartz cylinder 51, and is used to support the cylindrical heat insulation device 5 and the heat insulation plate element. It can move up and down with the craft boat 3, and the air inlet pipe 22 is sealed through the boat loading and unloading flange 10 and communicates with the inside of the quartz tube 52.

In this embodiment, as shown in the third figure, the lower end of the quartz cylinder 51 is provided with a filter hole, which communicates the above-mentioned heat insulation space with the outside of the quartz cylinder 51, and a screening program 14 is provided in the filter hole. Used to filter impurities in the gas discharged from the thermal insulation structure 5. In addition, the boat loading and unloading flange 10 is provided with an interlayer pipeline 13, one end of the interlayer pipeline 13 communicates with the filter hole, and the other end of the interlayer pipeline 13 communicates with a second air extraction device (not shown in the figure). With the help of the screening program 14 and the interlayer pipeline 13, the gas in the thermal insulation space can be extracted and filtered to ensure that the gas emitted by the materials in the thermal insulation space will not pollute the area where the craft boat 3 is located, thereby improving the cleanliness of the chamber degree.

In this embodiment, a fourth sealing ring 18 is provided between the lower end of the quartz cylinder 51 and the boat loading and unloading flange 10. The fourth sealing ring 18 surrounds the filter hole and is used to seal the filter hole to ensure heat insulation. The tightness of the space. Depending on the situation, the fourth sealing ring 18 is a V-shaped sealing ring.

In this embodiment, a fifth sealing ring 19 is also provided between the lower end of the quartz cylinder 51 and the boat mounting flange 10, and the lower end opening of the quartz tube 51, the filter hole and the fourth sealing ring 19 are all located in the fifth sealing ring. 18 surrounding the sealed area. Depending on the situation, the fifth sealing ring 19 is a star-shaped sealing ring.

In this embodiment, the production chamber further includes a production tube body 1, an inner cylinder body 2 and a process tube flange 9. Wherein, the upper end of the tube 1 is closed and the lower end is open; and the axial direction of the tube 1 is vertically arranged. The upper and lower ends of the inner cylinder 2 are open, and are coaxially arranged inside the manufacturing tube 1; an annular gap 11 is formed between the inner cylinder 2 and the manufacturing tube 1. In addition, the cylindrical heat insulation device 5, the heat insulation board element and the craft boat 3 can move up and down relative to the inner cylinder 2 so as to be able to rise into the inner cylinder 2 or move out from the inner cylinder 2. In this way, the process boat 3 can be replaced more conveniently, and the parts such as the cylindrical heat insulation device 5, the heat insulation plate element, and the process boat 3 can be maintained.

Depending on the situation, the tube body 1 and the inner cylinder body 2 are made of ultra-pure graphite, and a pyrolytic carbon coating is formed on the inner and outer surfaces of the two to ensure the air tightness of the chamber.

As shown in the first and third figures, the process pipe flange 9 has an annular structure, and the process pipe flange 9 is hermetically connected to the lower end of the production pipe body 1 and the lower end of the inner cylinder body 2; and, the process pipe flange The top surface of 9 is provided with a downwardly recessed annular gas groove 91 which is connected to the annular gap 11; the process pipe flange 9 is provided with a transverse air passage 92 communicating with the annular gas groove 91. 92 is in communication with the first suction device 8. The annular gap 11, the annular gas groove 91 and the transverse air passage 92 constitute an exhaust passage communicating with the inside of the inner cylinder 2 through which the reacted gas is discharged.

In this embodiment, the process tube flange 9 is butt-mounted on the furnace tube flange 7. The furnace tube flange 7 has a ring structure and is fixedly installed on the manufacturing tube body 1, and the furnace tube flange 7 is located in the process tube method. The blue 9 is above and around the outer periphery of the tube body 1 made.

Depending on the situation, a second sealing ring 16 is provided between the boat loading and unloading flange 10 and the process pipe flange 9 to seal the gap between the two to ensure the production of the pipe body 1 and the inner cylinder body 2. The annular gap between and the sealing of the inner cylinder 2.

In this embodiment, the gas outlet end 131 of the interlayer pipeline 13 is located between the boat loading and unloading flange 10 and the process pipe flange 9; and the second sealing ring 16 is located inside the gas outlet end 131 of the interlayer pipeline 13; and, A third sealing ring 17 is provided between the boat loading and unloading flange 10 and the process pipe flange 9. The third sealing ring 17 is located outside the air outlet 131 of the interlayer pipeline 13. With the aid of the second sealing ring 16 and the third sealing ring 17, the gap between the boat loading and unloading flange 10 and the process pipe flange 9 can be double-sealed, and the gas outlet end 131 of the sandwich pipeline 13 can be sealed at the same time.

Depending on the situation, the third sealing ring 17 is a V-shaped sealing ring. This kind of seal ring has a large deformation and a better sealing effect. The second sealing ring 16 may be an O-shaped sealing ring.

In addition, the top surface of the process pipe flange 9 is provided with an upwardly protruding annular flange 94, which surrounds the outer periphery of the manufacturing tube body 1; and, an annular recess is provided on the lower surface of the furnace flange 7 Groove, the annular flange 94 extends into the annular groove. The upper surface of the annular flange 94, the surface of the annular groove opposite to the upper surface of the annular flange 94, and the outer peripheral wall of the pipe body 1 together constitute an annular space. The annular space is provided with a first sealing ring 6 for The gap between the process pipe flange 9 and the production pipe body 1 is sealed, so as to ensure the sealability in the production pipe body 1. Depending on the situation, the first sealing ring 6 is a perfluoro rubber ring.

In summary, with the aid of the sealing system constituted by the first and fifth sealing rings, the air tightness of the chamber can be improved, and the gas leakage of the entire system can be effectively reduced.

In this embodiment, the process tube flange 9 is provided with an annular first cooling channel 93, and the process tube flange 9 is cooled by passing a cooling medium (such as cooling water) into the first cooling channel 93, thereby indirectly Cool the parts near the flange 9 of the process pipe. Similarly, an annular second cooling channel 71 is provided in the furnace flange 7. The furnace flange 7 is cooled by passing a cooling medium into the second cooling channel 71, thereby indirectly cooling the parts near the furnace flange 7.

With the above-mentioned first cooling channel 93 and second cooling channel 71, the influence of high temperature on the sealing ring can be effectively reduced, so that the sealing ring can be prevented from failing under high temperature conditions. It is found through experiments that the first cooling channel 93 and the second cooling channel 71 can control the temperature change of the seal ring below 200°C.

In this embodiment, as shown in the fourth figure, a temperature measuring sleeve 20 is provided in the furnace tube flange 7. The detection end of the temperature measuring sleeve 20 is located on the inner peripheral wall of the furnace tube flange 7 to enable Close to the production tube 1. The other end of the temperature measuring sleeve 20 extends through the furnace barrel flange 7; and a temperature sensor 21 is provided in the temperature measuring sleeve 20.

Depending on the situation, the temperature measuring sleeve 20 is a bellows. Optimally, the outer diameter of the bellows is small to meet the use of ultra-high temperature environments.

In this embodiment, the tube body 1, the inner cylinder body 2, the heat insulation board element, and the cylindrical heat insulation device 5 are all cylindrical, and are arranged coaxially; and the outer edge of the heat insulation board element and the inner cylinder There is a gap between the inner walls of the body 2 for transporting the production gas to the area where the process boat 3 is located. In this way, while the production gas enters the area of the craft boat 3 through the vent 41 of the heat insulation plate 4, it can also enter the craft boat 3 through the gap between the outer edge of the heat shield element and the inner wall of the inner cylinder 2. area. As a result, the production gas can enter the production area more uniformly, and the production uniformity can be improved.

It is found through experiments that the maximum temperature of the manufacturing chamber provided by the present invention reaches above 2000°C; the gas leakage rate of the chamber is less than 1E-7mbar.l/s; the metal contamination rate of the chamber is less than 1E+1latoms/cm ² .

It should be noted that the fabrication chamber provided by the present invention can be applied to, for example, a high-temperature vacuum heat treatment process of SiC wafers. Or, by replacing the materials of the corresponding parts of the heat treatment furnace (for example, making the tube body) without changing the structure, the production chamber provided by the present invention can also be used in the heat treatment process of lower temperature such as silicon wafer.

To sum up, the manufacturing chamber provided by the present invention includes a cylindrical heat insulation device with a closed heat insulation space inside; a heat insulation board assembly including a plurality of heat insulation boards stacked together in a vertical direction; and The craft boat is arranged adjacently above the heat insulation board assembly. Through the use of cylindrical heat insulation device and heat insulation board elements, the high temperature in the area where the craft boat is located can be blocked more effectively Radiation, which can increase the operating temperature of the craft boat area to more than 2000 ℃ to meet the production requirements of high-performance devices, and the volume of the cylindrical heat insulation device and heat insulation board components is small, which can reduce the volume of the chamber. Simplify the overall structure of the equipment.

As another technical solution, the present invention also provides a heat treatment furnace, which includes the above-mentioned production chamber provided by the present invention.

The heat treatment furnace provided by the present invention not only has a higher use temperature and a smaller chamber volume, but also can simplify the overall structure of the equipment by using the above-mentioned manufacturing chamber provided by the present invention.

It can be understood that the above implementations are merely exemplary implementations used to illustrate the principle of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also regarded as the protection scope of the present invention.

1‧‧‧Making the tube body

2‧‧‧Inner cylinder

3‧‧‧Craft Boat

4‧‧‧Insulation board

5‧‧‧Cylinder heat insulation device

6‧‧‧First sealing ring

7‧‧‧Flange of furnace tube

8‧‧‧The first exhaust device

9‧‧‧Process pipe flange

10‧‧‧Boat loading and unloading flange

11‧‧‧Annular gap

13‧‧‧Sandwich pipe

22‧‧‧Intake pipe

41‧‧‧Vent

52‧‧‧Quartz tube

71‧‧‧Second cooling channel

91‧‧‧Annular air groove

92‧‧‧Horizontal airway

93‧‧‧The first cooling channel

Claims (12)

A manufacturing chamber for SiC high-temperature oxidation process, comprising: a cylindrical heat insulation device with a closed heat insulation space inside; and a heat insulation board assembly including a plurality of heat insulation boards stacked together in a vertical direction The heat insulation board assembly is arranged adjacently above the cylindrical heat insulation device; and a craft boat for carrying a workpiece to be processed; the craft boat is arranged adjacently above the heat insulation board assembly; wherein The cylindrical heat insulation device includes: a quartz cylinder, the upper end and the lower end of the quartz cylinder are both closed ends, the closed heat insulation space is formed inside, and the quartz cylinder is provided with a quartz cylinder penetrating the upper end and the lower end. Perforation; a quartz tube, the quartz tube is sealed through the perforation of the quartz cylinder; and a heat insulating material filled in the heat insulation space between the quartz tube and the quartz cylinder . The manufacturing chamber described in item 1 of the scope of patent application, wherein the manufacturing chamber further includes a boat loading and unloading flange, and the boat loading and unloading flange is sealed against the lower end of the quartz cylinder for supporting the The cylindrical heat insulation device, the heat insulation board assembly and the craft boat can move up and down, and the air inlet pipe is sealed and penetrated on the boat loading and unloading flange and communicates with the inside of the quartz tube. As described in item 2 of the scope of patent application, a filter hole is provided at the lower end of the quartz cylinder, and the filter hole communicates the heat insulation space with the outside of the quartz cylinder, and the filter hole There is a screening program; the boat loading and unloading flange is provided with a sandwich pipeline, one end of the sandwich pipeline is connected with the filter hole, and the other end of the sandwich pipeline is connected with a second air extraction device . As described in item 3 of the scope of patent application, a fourth sealing ring is arranged between the lower end of the quartz cylinder and the boat loading and unloading flange, and the fourth sealing ring surrounds the filter hole . As described in item 4 of the scope of patent application, a fifth sealing ring is provided between the lower end of the quartz cylinder and the boat loading and unloading flange, and the lower end of the quartz tube is open, and the filter Both the hole and the fourth sealing ring are located in the sealing area surrounded by the fifth sealing ring. According to the manufacturing chamber described in the first item of the scope of patent application, wherein the heat insulation board element is provided with a vent hole penetrating the thickness of each heat insulation board, and the vent hole communicates with the inside of the quartz tube, It is used to deliver production gas to the area where the craft boat is located. The manufacturing chamber described in item 2 of the scope of patent application, wherein the manufacturing chamber further includes: a manufacturing tube body, the upper end of the manufacturing tube body is closed, and the lower end is open; the axial direction of the manufacturing tube body is vertically arranged An inner cylinder, the upper and lower ends of the inner cylinder are open, and are coaxially arranged inside the production tube; an annular gap is formed between the inner cylinder and the production tube; the cylindrical The heat insulation device, the heat insulation board assembly and the process boat can be raised into the inner cylinder; and a process pipe flange having a ring structure; the process pipe flange and the manufacturing pipe body The lower end and the lower end of the inner cylinder are both hermetically connected; the top surface of the process pipe flange is provided with an annular gas groove recessed downward, and the annular gas groove is in butt communication with the annular gap; A transverse air passage communicating with the annular air groove is arranged in the pipe flange, and the transverse air passage is communicated with a first air suction device. The manufacturing chamber described in item 7 of the scope of patent application, wherein the process pipe flange is butt-mounted on a furnace barrel flange; the furnace barrel flange is a ring structure and is fixedly installed on the manufacturing pipe body , The furnace barrel flange is located above the process pipe flange and surrounds the outer side of the production pipe body; the top surface of the process pipe flange is provided with an upwardly protruding annular flange, the ring The flange surrounds the outer side of the production tube; and, an annular groove is provided on the lower surface of the furnace barrel flange, and the annular flange extends into the annular groove; the annular convex The upper surface of the rim, the surface of the annular groove opposite to the upper surface of the annular flange, and the outer peripheral wall of the pipe body together constitute an annular space, and a first sealing ring is arranged in the annular space. In the manufacturing chamber described in item 8 of the scope of patent application, an annular cooling water channel is provided in the process pipe flange and the furnace barrel flange. The manufacturing chamber described in item 8 of the scope of patent application, wherein a temperature measuring sleeve is arranged in the furnace barrel flange, and the detection end of the temperature measuring sleeve is located on the inner peripheral wall of the furnace barrel flange , The other end of the temperature measuring sleeve extends out through the furnace barrel flange; and a temperature sensor is arranged in the temperature measuring sleeve. The manufacturing chamber described in any one of the 7th to 10th items of the scope of the patent application, wherein the manufacturing tube, the inner cylinder, the heat insulation board assembly and the cylindrical heat insulation device are all It is cylindrical and arranged coaxially; there is a gap between the outer edge of the insulation board element and the inner wall of the inner cylinder, which is used to transport the production gas to the area where the process boat is located. A heat treatment furnace for SiC high-temperature oxidation process, wherein the heat treatment furnace includes the production chamber described in any one of items 1 to 11 in the scope of patent application.

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