TWI705302B - Colored photosensitive resin composition - Google Patents

Colored photosensitive resin composition Download PDF

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TWI705302B
TWI705302B TW104125450A TW104125450A TWI705302B TW I705302 B TWI705302 B TW I705302B TW 104125450 A TW104125450 A TW 104125450A TW 104125450 A TW104125450 A TW 104125450A TW I705302 B TWI705302 B TW I705302B
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meth
resin composition
acrylate
photosensitive resin
pigment
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TW104125450A
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TW201612636A (en
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松浦龍一
寺川貴清
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日商住友化學股份有限公司
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/105Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10Esters
    • C08F220/26Esters containing oxygen in addition to the carboxy oxygen
    • C08F220/32Esters containing oxygen in addition to the carboxy oxygen containing epoxy radicals
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators

Abstract

本發明之著色感光性樹脂組合物含有著色劑(A)、樹脂(B)、聚合性化合物(C)、及聚合起始劑(D),且作為著色劑(A),含有鹵化鋅酞菁顏料、C.I.顏料黃185、及C.I.顏料藍15:3或C.I.顏料藍15:4。 The colored photosensitive resin composition of the present invention contains a colorant (A), a resin (B), a polymerizable compound (C), and a polymerization initiator (D), and as a colorant (A), it contains a halogenated zinc phthalocyanine Pigment, CI Pigment Yellow 185, and CI Pigment Blue 15:3 or CI Pigment Blue 15:4.

Description

著色感光性樹脂組合物 Colored photosensitive resin composition

本發明係關於一種著色感光性樹脂組合物。 The present invention relates to a colored photosensitive resin composition.

著色感光性樹脂組合物係用於製造液晶顯示面板等顯示裝置中之彩色濾光片。近年來,為了擴大顯示器能夠顯示之顏色再現區域而不斷進行開發,作為其一環,對彩色濾光片亦要求顏色更深者。為了滿足該要求,可列舉提高彩色濾光片中之有色材料濃度之方法,但存在若有色材料濃度上升,則圖案形狀變差等作為感光性組合物之性能變差之情況。 The colored photosensitive resin composition is used to manufacture color filters in display devices such as liquid crystal display panels. In recent years, in order to expand the color reproduction area that can be displayed on the display, continuous development has been made. As part of this, the color filter is also required to have a deeper color. In order to meet this requirement, a method of increasing the concentration of the colored material in the color filter can be cited. However, if the concentration of the colored material increases, the pattern shape may deteriorate, and the performance as a photosensitive composition may deteriorate.

專利文獻1中記載有如下綠色感光性樹脂組合物,其為了設計顏色較深之綠色之彩色濾光片,而包含含有C.I.顏料綠G58、藍色有色材料及黃色有色材料之著色劑、樹脂、聚合性單體、光聚合起始劑、以及溶劑。 Patent Document 1 describes the following green photosensitive resin composition, which contains CI Pigment Green G58, a blue colored material and a yellow colored material containing coloring agent, resin, in order to design a darker green color filter Polymerizable monomer, photopolymerization initiator, and solvent.

[先前技術文獻] [Prior Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本專利特開2012-247539號公報 [Patent Document 1] Japanese Patent Laid-Open No. 2012-247539

本發明之目的在於獲得一種亮度較高之著色感光性樹脂組合物。 The object of the present invention is to obtain a coloring photosensitive resin composition with higher brightness.

本發明包含以下之發明。 The present invention includes the following inventions.

[1]一種著色感光性樹脂組合物,其含有著色劑(A)、樹脂(B)、聚合性化合物(C)、及聚合起始劑(D),且作為著色劑(A),含有鹵化鋅酞菁顏料、C.I.顏料黃185、及C.I.顏料藍15:3或C.I.顏料藍15:4。 [1] A colored photosensitive resin composition comprising a colorant (A), a resin (B), a polymerizable compound (C), and a polymerization initiator (D), and as a colorant (A), a halogenated Zinc phthalocyanine pigment, CI Pigment Yellow 185, and CI Pigment Blue 15:3 or CI Pigment Blue 15:4.

[2]如[1]中所記載之著色感光性樹脂組合物,其中鹵化鋅酞菁顏料為C.I.顏料綠58。 [2] The colored photosensitive resin composition as described in [1], wherein the halogenated zinc phthalocyanine pigment is C.I. Pigment Green 58.

[3]如[1]或[2]中所記載之著色感光性樹脂組合物,其中C.I.顏料黃185之含量相對於聚合性化合物(C)100質量份為10~50質量份。 [3] The colored photosensitive resin composition as described in [1] or [2], wherein the content of C.I. Pigment Yellow 185 is 10 to 50 parts by mass relative to 100 parts by mass of the polymerizable compound (C).

[4]如[1]至[3]中任一項所記載之著色感光性樹脂組合物,其中著色劑(A)之合計量相對於著色感光性樹脂組合物之固形物成分100質量份為20~50質量份。 [4] The colored photosensitive resin composition as described in any one of [1] to [3], wherein the total amount of the colorant (A) is 100 parts by mass of the solid content of the colored photosensitive resin composition 20-50 parts by mass.

[5]一種彩色濾光片,其係由如上述[1]至[4]中任一項所記載之著色感光性樹脂組合物而形成。 [5] A color filter formed of the colored photosensitive resin composition as described in any one of [1] to [4] above.

能夠由本發明之著色感光性樹脂組合物製造良好之亮度之彩色濾光片。 A color filter with good brightness can be manufactured from the colored photosensitive resin composition of the present invention.

圖1係表示圖案之剖面形狀之模式圖。圖1(p1)係表示當於著色圖案上積層無機膜時,於無機膜不易發生龜裂或剝離之良好之剖面,圖1(p2)係表示於無機膜容易發生龜裂或剝離之剖面。 Fig. 1 is a schematic diagram showing the cross-sectional shape of the pattern. Fig. 1(p1) shows a good cross section where cracks or peeling is less likely to occur in the inorganic film when an inorganic film is laminated on a colored pattern, and Fig. 1(p2) shows a cross section where cracks or peeling easily occurs on the inorganic film.

本發明之著色感光性樹脂組合物含有著色劑(A)、樹脂(B)、聚合性化合物(C)、及聚合起始劑(D)。 The colored photosensitive resin composition of the present invention contains a colorant (A), a resin (B), a polymerizable compound (C), and a polymerization initiator (D).

本發明之著色感光性樹脂組合物較佳為進而含有溶劑(E)。 The colored photosensitive resin composition of the present invention preferably further contains a solvent (E).

本發明之著色感光性樹脂組合物亦可進而含有選自由調平劑(F) 及硫醇化合物所組成之群中之至少1種。 The colored photosensitive resin composition of the present invention may further contain a leveling agent (F) And at least one of the group consisting of thiol compounds.

能夠由本發明之著色感光性樹脂組合物製造亮度較高之彩色濾光片。進而,該著色感光性樹脂組合物於圖案之製作時不易產生源自於著色感光性樹脂組合物之剝離片,亦能夠以良好之圖案形狀製作圖案。 A color filter with high brightness can be manufactured from the colored photosensitive resin composition of the present invention. Furthermore, the colored photosensitive resin composition is less likely to produce a release sheet derived from the colored photosensitive resin composition during the production of a pattern, and it is also possible to produce a pattern with a good pattern shape.

於本說明書中,作為各成分而例示之化合物只要無特別事先說明,則可單獨使用或組合使用複數種。 In this specification, the compound exemplified as each component can be used singly or in combination of plural kinds unless otherwise specified.

<著色劑(A)> <Colorant (A)>

於本發明之著色感光性樹脂組合物中,作為著色劑(A),含有C.I.顏料藍15:3或C.I.顏料藍15:4、鹵化鋅酞菁顏料、及C.I.顏料黃185。 In the colored photosensitive resin composition of the present invention, as the colorant (A), C.I. Pigment Blue 15:3 or C.I. Pigment Blue 15:4, halogenated zinc phthalocyanine pigment, and C.I. Pigment Yellow 185 are contained.

作為鹵化鋅酞菁顏料,可列舉C.I.顏料綠58。 As the halogenated zinc phthalocyanine pigment, C.I. Pigment Green 58 can be cited.

鹵化鋅酞菁顏料之含量相對於聚合性化合物(C)100質量份,通常為10~120質量份,較佳為20~110質量份,更佳為25~70質量份。若鹵化鋅酞菁顏料之含量處於上述範圍內,則可獲得亮度尤佳之彩色濾光片。 The content of the halogenated zinc phthalocyanine pigment is usually 10 to 120 parts by mass, preferably 20 to 110 parts by mass, and more preferably 25 to 70 parts by mass relative to 100 parts by mass of the polymerizable compound (C). If the content of the zinc halide phthalocyanine pigment is within the above range, a color filter with particularly good brightness can be obtained.

C.I.顏料黃185之含量相對於聚合性化合物(C)100質量份,通常為10~50質量份,較佳為20~50質量份,更佳為25~45質量份,進而較佳為25~40質量份。若C.I.顏料黃185之含量處於上述範圍內,則可獲得亮度及圖案形狀優異之彩色濾光片。 The content of CI Pigment Yellow 185 relative to 100 parts by mass of the polymerizable compound (C) is usually 10-50 parts by mass, preferably 20-50 parts by mass, more preferably 25-45 parts by mass, and still more preferably 25~ 40 parts by mass. If the content of C.I. Pigment Yellow 185 is within the above range, a color filter with excellent brightness and pattern shape can be obtained.

C.I.顏料藍15:3及C.I.顏料藍15:4之含量合計相對於聚合性化合物(C)100質量份,通常為1~30質量份,較佳為1~25質量份,更佳為5~15質量份,進而較佳為5~9質量份。若C.I.顏料藍15:3或C.I.顏料藍15:4之含量處於上述範圍內,則可獲得圖案形狀尤為優異之彩色濾光片。 The total content of CI Pigment Blue 15:3 and CI Pigment Blue 15:4 relative to 100 parts by mass of the polymerizable compound (C) is usually 1-30 parts by mass, preferably 1-25 parts by mass, more preferably 5~ 15 parts by mass, more preferably 5-9 parts by mass. If the content of C.I. Pigment Blue 15:3 or C.I. Pigment Blue 15:4 is within the above range, a color filter with particularly excellent pattern shape can be obtained.

於著色劑(A)中,作為綠色顏料,較佳為僅含有鹵化鋅酞菁顏 料,更佳為僅含有C.I.顏料綠58。 In the colorant (A), as a green pigment, it is preferable to contain only a zinc halide phthalocyanine pigment It is more preferable to contain only C.I. Pigment Green 58.

著色劑(A)亦可含有其他公知之顏料。但是,於本發明之著色感光性樹脂組合物中,作為著色劑,較佳為僅含有C.I.顏料綠58、C.I.顏料黃185、及C.I.顏料藍15:3或C.I.顏料藍15:4。 The colorant (A) may also contain other well-known pigments. However, in the colored photosensitive resin composition of the present invention, it is preferable to contain only C.I. Pigment Green 58, C.I. Pigment Yellow 185, and C.I. Pigment Blue 15:3 or C.I. Pigment Blue 15:4 as the coloring agent.

著色劑(A)較佳為進而含有C.I.顏料黃138。 The coloring agent (A) preferably further contains C.I. Pigment Yellow 138.

著色劑(A)之合計量相對於著色感光性樹脂組合物之固形物成分100質量份,通常為20~50質量份,較佳為20~45質量份,更佳為20~35質量份,進而較佳為20~30質量份。 The total amount of the coloring agent (A) is usually 20-50 parts by mass, preferably 20-45 parts by mass, and more preferably 20-35 parts by mass with respect to 100 parts by mass of the solid content of the colored photosensitive resin composition. More preferably, it is 20-30 mass parts.

此處,本說明書中之所謂「固形物成分之總量」係指自著色感光性樹脂組合物之總量除去溶劑之含量所得之量。固形物成分之總量及對應其之各成分之含量例如可利用液相層析法或氣相層析法等公知之分析方法而測定。 Here, the "total amount of solid content" in this specification refers to the amount obtained by excluding the solvent content from the total amount of the colored photosensitive resin composition. The total amount of solid components and the content of each component corresponding to it can be measured, for example, by a known analysis method such as liquid chromatography or gas chromatography.

<樹脂(B)> <Resin (B)>

作為樹脂(B),並無特別限定,較佳為鹼可溶性樹脂。作為樹脂(B),可列舉以下之樹脂[K1]~[K6]等。 The resin (B) is not particularly limited, but an alkali-soluble resin is preferred. As resin (B), the following resin [K1]~[K6] etc. are mentioned.

樹脂[K1]:選自由不飽和羧酸及不飽和羧酸酐所組成之群中之至少1種(a)(以下存在稱為「(a)」之情況)、與具有碳數2~4之環狀醚結構及乙烯性不飽和鍵之單體(b)(以下存在稱為「(b)」之情況)之共聚物。 Resin [K1]: At least one selected from the group consisting of unsaturated carboxylic acids and unsaturated carboxylic anhydrides (a) (hereinafter referred to as "(a)"), and those with 2 to 4 carbon atoms A copolymer of cyclic ether structure and ethylenically unsaturated bond monomer (b) (hereinafter referred to as "(b)").

樹脂[K2]:(a)、(b)、及能夠與(a)共聚之單體(c)(但是,與(a)及(b)不同)(以下存在稱為「(c)」之情況)之共聚物。 Resin [K2]: (a), (b), and monomer (c) that can be copolymerized with (a) (however, different from (a) and (b)) (hereinafter referred to as "(c)" Situation) of the copolymer.

樹脂[K3]:(a)與(c)之共聚物。 Resin [K3]: a copolymer of (a) and (c).

樹脂[K4]:使(a)與(c)之共聚物和(b)反應而獲得之樹脂。 Resin [K4]: A resin obtained by reacting the copolymer of (a) and (c) and (b).

樹脂[K5]:使(b)與(c)之共聚物和(a)反應而獲得之樹脂。 Resin [K5]: A resin obtained by reacting the copolymer of (b) and (c) and (a).

樹脂[K6]:使(b)與(c)之共聚物和(a)反應,進而使其與羧酸酐反應而獲得之樹脂。 Resin [K6]: A resin obtained by reacting the copolymer of (b) and (c) and (a), and then reacting with carboxylic anhydride.

作為(a),例如可列舉:丙烯酸、甲基丙烯酸、丁烯酸、鄰、 間、對乙烯基苯甲酸等不飽和單羧酸;順丁烯二酸、反丁烯二酸、甲基順丁烯二酸、甲基反丁烯二酸、伊康酸、3-乙烯基鄰苯二甲酸、4-乙烯基鄰苯二甲酸、3,4,5,6-四氫鄰苯二甲酸、1,2,3,6-四氫鄰苯二甲酸、二甲基四氫鄰苯二甲酸、1,4-環己烯二羧酸等不飽和二羧酸;甲基-5-降

Figure 104125450-A0202-12-0005-7
烯-2,3-二羧酸、5-羧基雙環[2.2.1]庚-2-烯、5,6-二羧基雙環[2.2.1]庚-2-烯、5-羧基-5-甲基雙環[2.2.1]庚-2-烯、5-羧基-5-乙基雙環[2.2.1]庚-2-烯、5-羧基-6-甲基雙環[2.2.1]庚-2-烯、5-羧基-6-乙基雙環[2.2.1]庚-2-烯等含有羧基之雙環不飽和化合物;順丁烯二酸酐、甲基順丁烯二酸酐、伊康酸酐、3-乙烯基鄰苯二甲酸酐、4-乙烯基鄰苯二甲酸酐、3,4,5,6-四氫鄰苯二甲酸酐、1,2,3,6-四氫鄰苯二甲酸酐、二甲基四氫鄰苯二甲酸酐、5,6-二羧基雙環[2.2.1]庚-2-烯酐(雙環庚烯二甲酸酐)等不飽和二羧酸酐;琥珀酸單[2-(甲基)丙烯醯氧基乙基]酯、鄰苯二甲酸單[2-(甲基)丙烯醯氧基乙基]酯等二元以上之多元羧酸之不飽和單[(甲基)丙烯醯氧基烷基]酯;以及丙烯酸α-(羥基甲基)酯等在同一分子中含有羥基及羧基之不飽和丙烯酸酯等。 As (a), for example, unsaturated monocarboxylic acids such as acrylic acid, methacrylic acid, crotonic acid, ortho, meta, and p-vinyl benzoic acid; maleic acid, fumaric acid, methyl cis Butenedioic acid, methyl fumaric acid, itaconic acid, 3-vinylphthalic acid, 4-vinylphthalic acid, 3,4,5,6-tetrahydrophthalic acid, Unsaturated dicarboxylic acids such as 1,2,3,6-tetrahydrophthalic acid, dimethyltetrahydrophthalic acid, 1,4-cyclohexene dicarboxylic acid; methyl-5-lower
Figure 104125450-A0202-12-0005-7
Ene-2,3-dicarboxylic acid, 5-carboxybicyclo[2.2.1]hept-2-ene, 5,6-dicarboxybicyclo[2.2.1]hept-2-ene, 5-carboxy-5-methyl Bicyclo[2.2.1]hept-2-ene, 5-carboxy-5-ethylbicyclo[2.2.1]hept-2-ene, 5-carboxy-6-methylbicyclo[2.2.1]hept-2 -Alkenes, 5-carboxy-6-ethylbicyclo[2.2.1]hept-2-ene and other bicyclic unsaturated compounds containing carboxyl groups; maleic anhydride, methyl maleic anhydride, itaconic anhydride, 3 -Vinyl phthalic anhydride, 4-vinyl phthalic anhydride, 3,4,5,6-tetrahydrophthalic anhydride, 1,2,3,6-tetrahydrophthalic anhydride , Dimethyltetrahydrophthalic anhydride, 5,6-dicarboxybicyclo[2.2.1]hept-2-ene anhydride (bicycloheptene dicarboxylic acid anhydride) and other unsaturated dicarboxylic acid anhydrides; succinic acid mono[2 -(Meth) acrylate oxyethyl] ester, phthalic acid mono [2-(meth) acrylate oxyethyl] ester and other unsaturated mono [(methyl) ) Allyloxyalkyl] ester; and α-(hydroxymethyl) acrylate and other unsaturated acrylates containing hydroxyl and carboxyl groups in the same molecule.

其中,就共聚反應性之方面或於鹼水溶液中之溶解性之方面而言,較佳為丙烯酸、甲基丙烯酸、順丁烯二酸酐等。 Among them, acrylic acid, methacrylic acid, maleic anhydride, etc. are preferred in terms of copolymerization reactivity or solubility in an aqueous alkali solution.

(b)例如係指具有碳數2~4之環狀醚結構(例如選自由環氧乙烷環、氧雜環丁烷環、及四氫呋喃環(氧雜環戊烷環)所組成之群中之至少1種)及乙烯性不飽和鍵之聚合性化合物。(b)較佳為具有碳數2~4之環狀醚及(甲基)丙烯醯氧基之單體。 (b) For example, it refers to a cyclic ether structure having a carbon number of 2 to 4 (for example, selected from the group consisting of an oxirane ring, an oxetane ring, and a tetrahydrofuran ring (oxolane ring) At least one of) and ethylenically unsaturated bond polymerizable compound. (b) Preferably, it is a monomer having a cyclic ether with 2 to 4 carbon atoms and a (meth)acryloxy group.

於本說明書中,所謂「(甲基)丙烯酸」係表示選自由丙烯酸及甲基丙烯酸所組成之群中之至少1種。「(甲基)丙烯醯基」及「(甲基)丙烯酸 酯」等表述亦具有相同意義。 In this specification, the term "(meth)acrylic acid" means at least one selected from the group consisting of acrylic acid and methacrylic acid. "(Meth) Acrylic" and "(Meth) Acrylic Expressions such as "ester" also have the same meaning.

作為(b),可列舉:具有環氧乙烷基及乙烯性不飽和鍵之單體(b1)(以下存在稱為「(b1)」之情況)、具有氧雜環丁基及乙烯性不飽和鍵之單體(b2)(以下存在稱為「(b2)」之情況)、具有四氫呋喃基及乙烯性不飽和鍵之單體(b3)(以下存在稱為「(b3)」之情況)等。 Examples of (b) include: monomer (b1) having an oxirane group and an ethylenically unsaturated bond (hereinafter referred to as "(b1)"), an oxetanyl group and an ethylenically unsaturated bond. Saturated bond monomer (b2) (hereinafter referred to as "(b2)"), monomer with tetrahydrofuran group and ethylenically unsaturated bond (b3) (hereinafter referred to as "(b3)") Wait.

(b1)例如可列舉:具有使不飽和脂肪族烴環氧化而成之結構之單體(b1-1)(以下存在稱為「(b1-1)」之情況)、具有使不飽和脂環式烴環氧化而成之結構之單體(b1-2)(以下存在稱為「(b1-2)」之情況)。 (b1) Examples include: monomer (b1-1) having a structure obtained by epoxidizing unsaturated aliphatic hydrocarbon (hereinafter referred to as "(b1-1)"), having an unsaturated aliphatic ring The monomer (b1-2) of the structure formed by the epoxidation of the hydrocarbon (hereinafter referred to as "(b1-2)").

作為(b1-1),可列舉:(甲基)丙烯酸縮水甘油酯、(甲基)丙烯酸β-甲基縮水甘油酯、(甲基)丙烯酸β-乙基縮水甘油酯、縮水甘油基乙烯醚、鄰乙烯基苄基縮水甘油醚、間乙烯基苄基縮水甘油醚、對乙烯基苄基縮水甘油醚、α-甲基-鄰乙烯基苄基縮水甘油醚、α-甲基-間乙烯基苄基縮水甘油醚、α-甲基-對乙烯基苄基縮水甘油醚、2,3-雙(縮水甘油氧基甲基)苯乙烯、2,4-雙(縮水甘油氧基甲基)苯乙烯、2,5-雙(縮水甘油氧基甲基)苯乙烯、2,6-雙(縮水甘油氧基甲基)苯乙烯、2,3,4-三(縮水甘油氧基甲基)苯乙烯、2,3,5-三(縮水甘油氧基甲基)苯乙烯、2,3,6-三(縮水甘油氧基甲基)苯乙烯、3,4,5-三(縮水甘油氧基甲基)苯乙烯、2,4,6-三(縮水甘油氧基甲基)苯乙烯等。 Examples of (b1-1) include: glycidyl (meth)acrylate, β-methylglycidyl (meth)acrylate, β-ethylglycidyl (meth)acrylate, and glycidyl vinyl ether , O-vinylbenzyl glycidyl ether, m-vinylbenzyl glycidyl ether, p-vinylbenzyl glycidyl ether, α-methyl-o-vinylbenzyl glycidyl ether, α-methyl-m-vinyl Benzyl glycidyl ether, α-methyl-p-vinylbenzyl glycidyl ether, 2,3-bis(glycidyloxymethyl)styrene, 2,4-bis(glycidyloxymethyl)benzene Ethylene, 2,5-bis(glycidoxymethyl)styrene, 2,6-bis(glycidoxymethyl)styrene, 2,3,4-tris(glycidoxymethyl)benzene Ethylene, 2,3,5-tris(glycidoxymethyl)styrene, 2,3,6-tris(glycidyloxymethyl)styrene, 3,4,5-tris(glycidoxymethyl) Methyl)styrene, 2,4,6-tris(glycidoxymethyl)styrene, etc.

作為(b1-2),可列舉:一氧化乙烯基環己烯、1,2-環氧基-4-乙烯基環己烷(例如,Celloxide2000;Daicel化學工業(股)製造)、(甲基)丙烯酸3,4-環氧環己基甲酯(例如,Cyclomer A400;Daicel化學工業(股)製造)、(甲基)丙烯酸3,4-環氧環己基甲酯(例如,Cyclomer M100;Daicel化學工業(股)製造)、式(I)所表示之化合物、及式(II)所表示之化合物等。 Examples of (b1-2) include: vinylcyclohexene monoxide, 1,2-epoxy-4-vinylcyclohexane (for example, Celloxide2000; Daicel Chemical Industry Co., Ltd.), (methyl ) 3,4-epoxycyclohexyl methyl acrylate (for example, Cyclomer A400; manufactured by Daicel Chemical Industry Co., Ltd.), 3,4-epoxycyclohexyl methyl (meth)acrylate (for example, Cyclomer M100; Daicel Chemical Industrial (Stock) Manufacturing), the compound represented by formula (I), the compound represented by formula (II), etc.

Figure 104125450-A0202-12-0007-1
Figure 104125450-A0202-12-0007-1

[式(I)及式(II)中,Ra及Rb相互獨立地表示氫原子或碳數1~4之烷基,該烷基所含之氫原子亦可經羥基取代。 [In the formula (I) and Formula (II), R a and R b each independently represent a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, the hydrogen atoms contained in the alkyl group may be replaced by the hydroxyl group.

Xa及Xb相互獨立地表示單鍵、-Rc-、*-Rc-O-、*-Rc-S-、*-Rc-NH-。 X a and X b each independently represents a single bond, -R c -, * - R c -O -, * - R c -S -, * - R c -NH-.

R3表示碳數1~6之烷二基。 R 3 represents an alkanediyl group having 1 to 6 carbon atoms.

*表示與O之鍵結鍵] *Indicates the bond with O]

作為碳數1~4之烷基,可列舉:甲基、乙基、正丙基、異丙基、正丁基、第二丁基、第三丁基等。 Examples of the alkyl group having 1 to 4 carbon atoms include methyl, ethyl, n-propyl, isopropyl, n-butyl, sec-butyl, and t-butyl.

作為氫原子經羥基取代之烷基,可列舉:羥甲基、1-羥乙基、2-羥乙基、1-羥丙基、2-羥丙基、3-羥丙基、1-羥基-1-甲基乙基、2-羥基-1-甲基乙基、1-羥丁基、2-羥丁基、3-羥丁基、4-羥丁基等。 Examples of alkyl groups in which hydrogen atoms are substituted with hydroxy groups include: hydroxymethyl, 1-hydroxyethyl, 2-hydroxyethyl, 1-hydroxypropyl, 2-hydroxypropyl, 3-hydroxypropyl, 1-hydroxy -1-methylethyl, 2-hydroxy-1-methylethyl, 1-hydroxybutyl, 2-hydroxybutyl, 3-hydroxybutyl, 4-hydroxybutyl, etc.

作為R1及R2,可較佳地列舉:氫原子、甲基、羥甲基、1-羥乙基、2-羥乙基,且可更佳地列舉氫原子、甲基。 As R 1 and R 2 , preferably, a hydrogen atom, a methyl group, a hydroxymethyl group, a 1-hydroxyethyl group, and a 2-hydroxyethyl group, and more preferably a hydrogen atom and a methyl group are mentioned.

作為烷二基,可列舉:亞甲基、伸乙基、1,2-丙二基、1,3-丙二基、1,4-丁二基、1,5-戊二基、1,6-己二基等。 Examples of alkanediyl groups include: methylene, ethylene, 1,2-propanediyl, 1,3-propanediyl, 1,4-butanediyl, 1,5-pentanediyl, 1, 6-Hexanediyl and so on.

作為X1及X2,可較佳地列舉:單鍵、亞甲基、伸乙基、*-CH2-O-(*表示與O之鍵結鍵)基、*-CH2CH2-O-基,且可更佳地列舉單鍵、*-CH2CH2-O-基。 Examples of X 1 and X 2 preferably include: single bond, methylene group, ethylene group, *-CH 2 -O- (* represents a bond with O) group, *-CH 2 CH 2- O-group, and more preferably single bond, *-CH 2 CH 2 -O- group.

作為式(I)所表示之化合物,可列舉式(I-1)~式(I-15)所表示之化合物等。可較佳地列舉:式(I-1)、式(I-3)、式(I-5)、式(I-7)、式(I-9)、式(I-11)~式(I-15)。可更佳地列舉:式(I-1)、式(I-7)、式(I-9)、式(I-15)。 Examples of the compound represented by formula (I) include compounds represented by formula (I-1) to formula (I-15), and the like. It may be better to enumerate: formula (I-1), formula (I-3), formula (I-5), formula (I-7), formula (I-9), formula (I-11) ~ formula ( I-15). More preferably, formula (I-1), formula (I-7), formula (I-9), and formula (I-15) can be cited.

Figure 104125450-A0202-12-0008-2
Figure 104125450-A0202-12-0008-2

作為式(II)所表示之化合物,可列舉式(II-1)~式(II-15)所表示之化合物等。可較佳地列舉:式(II-1)、式(II-3)、式(II-5)、式(II-7)、式(II-9)、式(II-11)~式(II-15)。 As the compound represented by formula (II), compounds represented by formula (II-1) to formula (II-15) and the like can be mentioned. It may be better to enumerate: formula (II-1), formula (II-3), formula (II-5), formula (II-7), formula (II-9), formula (II-11) ~ formula ( II-15).

可更佳地列舉:式(II-1)、式(II-7)、式(II-9)、式(II-15)。 More preferably, formula (II-1), formula (II-7), formula (II-9), and formula (II-15) can be cited.

Figure 104125450-A0202-12-0009-3
Figure 104125450-A0202-12-0009-3

式(I)所表示之化合物及式(II)所表示之化合物可分別單獨使用。又,該等能夠以任意比率混合。於進行混合之情形時,其混合比率以莫耳比計,較佳為以式(I):式(II)計為5:95~95:5,更佳為10:90~90:10,進而較佳為20:80~80:20。 The compound represented by the formula (I) and the compound represented by the formula (II) can be used independently, respectively. In addition, these can be mixed in any ratio. In the case of mixing, the mixing ratio is calculated in molar ratio, preferably 5:95~95:5 in formula (I): formula (II), more preferably 10:90~90:10, More preferably, it is 20:80 to 80:20.

作為具有氧雜環丁基及乙烯性不飽和鍵之單體(b2),更佳為具有氧雜環丁基及(甲基)丙烯醯氧基之單體。作為(b2),可列舉:3-甲基-3-甲基丙烯醯氧基甲基氧雜環丁烷、3-甲基-3-丙烯醯氧基甲基氧雜環丁烷、3-乙基-3-甲基丙烯醯氧基甲基氧雜環丁烷、3-乙基-3-丙烯醯 氧基甲基氧雜環丁烷、3-甲基-3-甲基丙烯醯氧基乙基氧雜環丁烷、3-甲基-3-丙烯醯氧基乙基氧雜環丁烷、3-乙基-3-甲基丙烯醯氧基乙基氧雜環丁烷、3-乙基-3-丙烯醯氧基乙基氧雜環丁烷等。 The monomer (b2) having an oxetanyl group and an ethylenically unsaturated bond is more preferably a monomer having an oxetanyl group and a (meth)acryloxy group. Examples of (b2) include 3-methyl-3-methacryloxymethyloxetane, 3-methyl-3-methacryloxymethyloxetane, 3- Ethyl-3-methacryloyloxymethyloxetane, 3-ethyl-3-propene Oxymethyl oxetane, 3-methyl-3-methacryloyloxyethyl oxetane, 3-methyl-3-acryloyloxyethyl oxetane, 3-ethyl-3-methacryloxyethyloxetane, 3-ethyl-3-methacryloxyethyloxetane, etc.

作為具有四氫呋喃基與乙烯性不飽和鍵之單體(b3),更佳為具有四氫呋喃基及(甲基)丙烯醯氧基之單體。 As the monomer (b3) having a tetrahydrofuran group and an ethylenically unsaturated bond, a monomer having a tetrahydrofuran group and a (meth)acryloxy group is more preferable.

作為(b3),具體而言,可列舉:丙烯酸四氫糠酯(例如,Viscoat V #150,大阪有機化學工業(股)製造)、甲基丙烯酸四氫糠酯等。 As (b3), specifically, tetrahydrofurfuryl acrylate (for example, Viscoat V #150, manufactured by Osaka Organic Chemical Industry Co., Ltd.), tetrahydrofurfuryl methacrylate, etc. are mentioned.

作為(c),可列舉:(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸正丁酯、(甲基)丙烯酸第二丁酯、(甲基)丙烯酸第三丁酯、(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸十二烷基酯、(甲基)丙烯酸月桂酯、(甲基)丙烯酸硬脂酯、(甲基)丙烯酸環戊酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸2-甲基環己酯、(甲基)丙烯酸三環[5.2.1.02,6]癸-8-基酯(於該技術領域中,作為慣用名,稱為「(甲基)丙烯酸二環戊酯」。又,存在稱為「(甲基)丙烯酸三環癸酯」之情況)、(甲基)丙烯酸三環[5.2.1.02,6]癸烯-8-基酯(於該技術領域中,作為慣用名,稱為「(甲基)丙烯酸二環戊烯酯」)、(甲基)丙烯酸二環戊氧基乙酯、(甲基)丙烯酸異

Figure 104125450-A0202-12-0010-8
酯、(甲基)丙烯酸金剛烷酯、(甲基)丙烯酸烯丙酯、(甲基)丙烯酸炔丙酯、(甲基)丙烯酸苯酯、(甲基)丙烯酸萘酯、(甲基)丙烯酸苄酯等(甲基)丙烯酸酯;(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸2-羥基丙酯等含羥基之(甲基)丙烯酸酯;順丁烯二酸二乙酯、反丁烯二酸二乙酯、伊康酸二乙酯等二羧酸二酯;雙環[2.2.1]庚-2-烯、5-甲基雙環[2.2.1]庚-2-烯、5-乙基雙環[2.2.1]庚-2-烯、5-羥基雙環[2.2.1]庚-2-烯、5-羥基甲基雙環[2.2.1]庚-2-烯、5-(2'-羥基乙基)雙環[2.2.1]庚-2-烯、5-甲氧基雙環[2.2.1]庚-2- 烯、5-乙氧基雙環[2.2.1]庚-2-烯、5,6-二羥基雙環[2.2.1]庚-2-烯、5,6-二(羥基甲基)雙環[2.2.1]庚-2-烯、5,6-二(2'-羥基乙基)雙環[2.2.1]庚-2-烯、5,6-二甲氧基雙環[2.2.1]庚-2-烯、5,6-二乙氧基雙環[2.2.1]庚-2-烯、5-羥基-5-甲基雙環[2.2.1]庚-2-烯、5-羥基-5-乙基雙環[2.2.1]庚-2-烯、5-羥基甲基-5-甲基雙環[2.2.1]庚-2-烯、5-第三丁氧基羰基雙環[2.2.1]庚-2-烯、5-環己氧基羰基雙環[2.2.1]庚-2-烯、5-苯氧基羰基雙環[2.2.1]庚-2-烯、5,6-雙(第三丁氧基羰基)雙環[2.2.1]庚-2-烯、5,6-雙(環己氧基羰基)雙環[2.2.1]庚-2-烯等雙環不飽和化合物;N-苯基順丁烯二醯亞胺、N-環己基順丁烯二醯亞胺、N-苄基順丁烯二醯亞胺、3-順丁烯二醯亞胺苯甲酸N-丁二醯亞胺酯、4-順丁烯二醯亞胺丁酸N-丁二醯亞胺酯、6-順丁烯二醯亞胺己酸N-丁二醯亞胺酯、3-順丁烯二醯亞胺丙酸N-丁二醯亞胺酯、N-(9-吖啶基)順丁烯二醯亞胺等二羰基醯亞胺衍生物;苯乙烯、α-甲基苯乙烯、間甲基苯乙烯、對甲基苯乙烯、乙烯基甲苯、對甲氧基苯乙烯、丙烯腈、甲基丙烯腈、氯乙烯、偏二氯乙烯、丙烯醯胺、甲基丙烯醯胺、乙酸乙烯酯、1,3-丁二烯、異戊二烯、2,3-二甲基-1,3-丁二烯等。 Examples of (c) include: methyl (meth)acrylate, ethyl (meth)acrylate, n-butyl (meth)acrylate, second butyl (meth)acrylate, and third (meth)acrylate Butyl ester, 2-ethylhexyl (meth)acrylate, lauryl (meth)acrylate, lauryl (meth)acrylate, stearyl (meth)acrylate, cyclopentyl (meth)acrylate Esters, cyclohexyl (meth)acrylate, 2-methylcyclohexyl (meth)acrylate, tricyclo[5.2.1.0 2,6 ]dec-8-yl (meth)acrylate (in this technical field Among them, as a common name, it is called "dicyclopentyl (meth)acrylate." In addition, there are cases where it is called "tricyclodecyl (meth)acrylate"), tricyclic (meth)acrylate [5.2. 1.0 2,6 ] Decene-8-yl ester (in this technical field, as a common name, called "(meth)acrylate dicyclopentenyl ester"), (meth)acrylate dicyclopentyloxyethyl Esters, (meth) acrylic iso
Figure 104125450-A0202-12-0010-8
Ester, adamantyl (meth)acrylate, allyl (meth)acrylate, propargyl (meth)acrylate, phenyl (meth)acrylate, naphthyl (meth)acrylate, (meth)acrylic acid Benzyl esters and other (meth)acrylates; 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate and other hydroxyl-containing (meth)acrylates; diethyl maleate , Diethyl fumarate, diethyl itconate and other dicarboxylic acid diesters; bicyclo[2.2.1]hept-2-ene, 5-methylbicyclo[2.2.1]hept-2-ene , 5-Ethylbicyclo[2.2.1]hept-2-ene, 5-hydroxybicyclo[2.2.1]hept-2-ene, 5-hydroxymethylbicyclo[2.2.1]hept-2-ene, 5 -(2'-hydroxyethyl)bicyclo[2.2.1]hept-2-ene, 5-methoxybicyclo[2.2.1]hept-2-ene, 5-ethoxybicyclo[2.2.1]hept -2-ene, 5,6-dihydroxybicyclo[2.2.1]hept-2-ene, 5,6-bis(hydroxymethyl)bicyclo[2.2.1]hept-2-ene, 5,6-di (2'-hydroxyethyl)bicyclo[2.2.1]hept-2-ene, 5,6-dimethoxybicyclo[2.2.1]hept-2-ene, 5,6-diethoxybicyclo[ 2.2.1]hept-2-ene, 5-hydroxy-5-methylbicyclo[2.2.1]hept-2-ene, 5-hydroxy-5-ethylbicyclo[2.2.1]hept-2-ene, 5-hydroxymethyl-5-methylbicyclo[2.2.1]hept-2-ene, 5-tertiary butoxycarbonylbicyclo[2.2.1]hept-2-ene, 5-cyclohexoxycarbonylbicyclo [2.2.1]Hept-2-ene, 5-phenoxycarbonyl bicyclo[2.2.1]hept-2-ene, 5,6-bis(tertiary butoxycarbonyl)bicyclo[2.2.1]hept- Bicyclic unsaturated compounds such as 2-ene, 5,6-bis(cyclohexyloxycarbonyl)bicyclo[2.2.1]hept-2-ene; N-phenylmaleimide, N-cyclohexylcis Butylene diimide, N-benzyl maleimide, 3-maleimide benzoate N-butane diimidate, 4-maleimide butyric acid N-butanediimidate, 6-maleimide hexanoic acid N-butanediimidate, 3-maleimide propionate N-butanediimidate, N -(9-Acridinyl)maleimide and other dicarbonylimines derivatives; styrene, α-methylstyrene, m-methylstyrene, p-methylstyrene, vinyl toluene, P-methoxystyrene, acrylonitrile, methacrylonitrile, vinyl chloride, vinylidene chloride, acrylamide, methacrylamide, vinyl acetate, 1,3-butadiene, isoprene, 2,3-Dimethyl-1,3-butadiene, etc.

該等之中,就共聚反應性及耐熱性之方面而言,較佳為(甲基)丙烯酸苄酯、(甲基)丙烯酸三環癸酯、苯乙烯、N-苯基順丁烯二醯亞胺、N-環己基順丁烯二醯亞胺、N-苄基順丁烯二醯亞胺、雙環[2.2.1]庚-2-烯等。就形成圖案時之顯影性優異之方面而言,更佳為(甲基)丙烯酸苄酯、(甲基)丙烯酸三環癸酯。 Among them, in terms of copolymerization reactivity and heat resistance, benzyl (meth)acrylate, tricyclodecyl (meth)acrylate, styrene, and N-phenylmaleic acid are preferred. Imine, N-cyclohexyl maleimide, N-benzyl maleimide, bicyclo[2.2.1]hept-2-ene, etc. In terms of excellent developability at the time of pattern formation, benzyl (meth)acrylate and tricyclodecyl (meth)acrylate are more preferable.

於樹脂[K1]中,源自於各成分之結構單元之比率於構成樹脂[K1]之全部結構單元中,較佳為處於以下之範圍。 In the resin [K1], the ratio of the structural units derived from each component to all the structural units constituting the resin [K1] is preferably in the following range.

源自於(a)之結構單元:2~50莫耳%(更佳為10~45莫耳%) The structural unit derived from (a): 2~50 mol% (more preferably 10~45 mol%)

源自於(b)之結構單元:50~98莫耳%(更佳為55~90莫耳%) The structural unit derived from (b): 50~98 mol% (more preferably 55~90 mol%)

若樹脂[K1]之結構單元之比率處於上述範圍,則存在保存穩定性、顯影性、所獲得之圖案之耐溶劑性優異之傾向。 If the ratio of the structural unit of the resin [K1] is in the above range, there is a tendency that storage stability, developability, and solvent resistance of the obtained pattern are excellent.

樹脂[K1]例如能夠以文獻「高分子合成之實驗法」(大津隆行著,發行所:化學同人(股),第1版第1次印刷,1972年3月1日發行)中所記載之方法及該文獻中所記載之引用文獻為參考而製造。 The resin [K1] can be described in, for example, the document "Experimental Method of Polymer Synthesis" (by Otsu Takayuki, Publishing House: Chemical Doujin (Stock), First Edition, First Printing, Issued on March 1, 1972) The method and the cited documents described in this document are manufactured by reference.

具體可列舉將(a)及(b)之特定量、聚合起始劑、及溶劑等裝入至反應容器中,於脫氧環境下,進行攪拌、加熱、保溫之方法。再者,此處所使用之聚合起始劑及溶劑等並無特別限定,任何該領域中通常所使用者均可使用。例如,作為聚合起始劑,可列舉偶氮化合物(2,2'-偶氮二異丁腈、2,2'-偶氮二(2,4-二甲基戊腈)等)或有機過氧化物(過氧化苯甲醯等),作為溶劑,只要為使各單體溶解者即可,作為著色感光性樹脂組合物之溶劑,可使用下述溶劑(E)等。 Specific examples include a method of charging specific amounts of (a) and (b), polymerization initiator, solvent, etc., into a reaction vessel, and performing stirring, heating, and heat preservation in a deoxidizing environment. Furthermore, the polymerization initiator, solvent, etc. used here are not particularly limited, and can be used by any user generally in the field. For example, as the polymerization initiator, azo compounds (2,2'-azobisisobutyronitrile, 2,2'-azobis(2,4-dimethylvaleronitrile), etc.) or organic The oxide (benzyl peroxide, etc.) can be any solvent that dissolves each monomer, and as a solvent for the colored photosensitive resin composition, the following solvent (E) can be used.

所獲得之共聚物可直接使用反應後之溶液,可使用經濃縮或稀釋之溶液,亦可使用藉由再沈澱等方法以固體(粉體)之形式提取而得者。尤其是於該聚合時,使用下述溶劑(E)作為溶劑,藉此可直接使用反應後之溶液,從而可簡化製造步驟。 The obtained copolymer can be directly used as a solution after the reaction, a concentrated or diluted solution, or a solid (powder) obtained by reprecipitation and other methods can be used. In particular, during the polymerization, the following solvent (E) is used as a solvent, whereby the solution after the reaction can be used directly, and the manufacturing steps can be simplified.

於樹脂[K2]中,源自於各成分之結構單元之比率於構成樹脂[K2]之全部結構單元中,較佳為處於以下之範圍。 In the resin [K2], the ratio of the structural units derived from each component to all the structural units constituting the resin [K2] is preferably in the following range.

源自於(a)之結構單元:4~45莫耳%(更佳為10~30莫耳%) The structural unit derived from (a): 4~45 mol% (more preferably 10~30 mol%)

源自於(b)之結構單元:2~95莫耳%(更佳為5~80莫耳%) The structural unit derived from (b): 2~95 mol% (more preferably 5~80 mol%)

源自於(c)之結構單元:1~65莫耳%(更佳為5~60莫耳%) The structural unit derived from (c): 1~65 mol% (more preferably 5~60 mol%)

若樹脂[K2]之結構單元之比率處於上述範圍,則存在保存穩定性、顯影性、所獲得之圖案之耐溶劑性、耐熱性及機械強度優異之傾向。 If the ratio of the structural units of the resin [K2] is in the above range, there is a tendency that storage stability, developability, solvent resistance, heat resistance, and mechanical strength of the obtained pattern are excellent.

樹脂[K2]例如可與作為樹脂[K1]之製造方法而記載之方法同樣地製造。 The resin [K2] can be manufactured in the same manner as the method described as the manufacturing method of the resin [K1], for example.

具體可列舉將(a)、(b)及(c)之特定量、聚合起始劑、及溶劑裝入至反應容器中,於脫氧環境下,進行攪拌、加熱、保溫之方法。所獲得之共聚物可直接使用反應後之溶液,可使用經濃縮或稀釋之溶液,亦可使用藉由再沈澱等方法以固體(粉體)之形式提取而得者。 Specific examples include a method of charging specific amounts of (a), (b) and (c), a polymerization initiator, and a solvent into a reaction vessel, and performing stirring, heating, and heat preservation in a deoxygenated environment. The obtained copolymer can be directly used as a solution after the reaction, a concentrated or diluted solution, or a solid (powder) obtained by reprecipitation and other methods can be used.

於樹脂[K3]中,源自於各成分之結構單元之比率於構成樹脂[K3]之全部結構單元中,較佳為處於以下之範圍。 In the resin [K3], the ratio of the structural units derived from each component to all the structural units constituting the resin [K3] is preferably in the following range.

(a)2~55莫耳%,更佳為10~50莫耳% (a) 2~55 mol%, more preferably 10~50 mol%

(c)45~98莫耳%,更佳為50~90莫耳% (c) 45~98 mole%, more preferably 50~90 mole%

樹脂[K3]例如可與作為樹脂[K1]之製造方法而記載之方法同樣地製造。 The resin [K3] can be manufactured in the same manner as the method described as the manufacturing method of the resin [K1], for example.

樹脂[K4]可藉由如下方法而製造,即,獲得(a)與(c)之共聚物,使(b)所具有之碳數2~4之環狀醚與(a)所具有之羧酸及/或羧酸酐加成。 The resin [K4] can be manufactured by the following method, namely, obtain the copolymer of (a) and (c), make (b) the cyclic ether with carbon number 2~4 and (a) the carboxyl Acid and/or carboxylic anhydride addition.

首先,與作為樹脂[K1]之製造方法而記載之方法同樣地製造(a)與(c)之共聚物。於該情形時,源自於各成分之結構單元之比率於構成(a)與(c)之共聚物之全部結構單元中,較佳為處於以下之範圍。 First, the copolymer of (a) and (c) is produced in the same manner as the method described as the production method of resin [K1]. In this case, the ratio of the structural unit derived from each component among all the structural units constituting the copolymer of (a) and (c) is preferably in the following range.

(a)5~50莫耳%,更佳為10~45莫耳% (a) 5~50 mol%, more preferably 10~45 mol%

(c)50~95莫耳%,更佳為55~90莫耳% (c) 50~95 mole%, more preferably 55~90 mole%

繼而,使(b)所具有之碳數2~4之環狀醚與上述共聚物中之源自於(a)之羧酸及/或羧酸酐之一部分反應。 Then, the cyclic ether having 2 to 4 carbon atoms in (b) is partially reacted with the carboxylic acid and/or carboxylic anhydride derived from (a) in the above-mentioned copolymer.

繼(a)與(c)之共聚物之製造後,將燒瓶內環境自氮氣置換為空氣,並將(b)、及羧酸或羧酸酐與環狀醚之反應觸媒(三(二甲基胺基甲基)苯酚等)及聚合抑制劑(對苯二酚等)等加入至燒瓶內,例如於60~130℃下反應1~10小時,藉此可獲得樹脂[K4]。 Following the manufacture of the copolymer of (a) and (c), the atmosphere in the flask was replaced with air from nitrogen, and (b), and the reaction catalyst of carboxylic acid or carboxylic anhydride and cyclic ether (tris(dimethyl) Aminomethyl)phenol, etc.) and polymerization inhibitors (hydroquinone, etc.) are added to the flask and reacted at 60~130°C for 1~10 hours to obtain resin [K4].

(b)之使用量相對於(a)100莫耳,較佳為5~80莫耳,更佳為10~75莫耳。藉由設為該範圍,存在保存穩定性、顯影性、耐溶劑性、耐 熱性、機械強度、及感度之平衡性變得良好之傾向。就環狀醚之反應性較高,不易殘留未反應之(b)之方面而言,作為用於樹脂[K4]之(b),較佳為(b1),進而較佳為(b1-1)。 The usage amount of (b) relative to (a) 100 mol, preferably 5 to 80 mol, more preferably 10 to 75 mol. By setting it in this range, there are storage stability, developability, solvent resistance, and The balance of heat, mechanical strength, and sensitivity tends to become better. Regarding the high reactivity of the cyclic ether, the unreacted (b) is less likely to remain, as (b) for the resin [K4], (b1) is preferred, and (b1-1) ).

上述反應觸媒之使用量相對於(a)、(b)、及(c)之合計量,較佳為0.001~5質量%。上述聚合抑制劑之使用量相對於(a)、(b)、及(c)之合計量,較佳為0.001~5質量%。 The amount of the reaction catalyst used is preferably 0.001 to 5% by mass relative to the total amount of (a), (b), and (c). The amount of the polymerization inhibitor used is preferably 0.001 to 5% by mass relative to the total amount of (a), (b), and (c).

裝入方法、反應溫度、及時間等反應條件可考慮製造設備或因聚合而產生之發熱量等進行適當調整。再者,可與聚合條件同樣地考慮製造設備或因聚合而產生之發熱量等,適當調整裝入方法或反應溫度。 The reaction conditions such as the loading method, reaction temperature, and time can be appropriately adjusted in consideration of manufacturing equipment or heat generation due to polymerization. In addition, it is possible to appropriately adjust the charging method and the reaction temperature in consideration of manufacturing equipment, heat generation due to polymerization, etc., in the same manner as the polymerization conditions.

關於樹脂[K5],作為第一階段,與上述樹脂[K1]之製造方法同樣地獲得(b)與(c)之共聚物。與上述同樣地,所獲得之共聚物可直接使用反應後之溶液,可使用經濃縮或稀釋之溶液,亦可使用藉由再沈澱等方法以固體(粉體)之形式提取而得者。 Regarding the resin [K5], as the first stage, a copolymer of (b) and (c) was obtained in the same manner as the method for producing the resin [K1] described above. Similar to the above, the obtained copolymer can be directly used as a solution after the reaction, a concentrated or diluted solution, or a solid (powder) obtained by reprecipitation or the like can also be used.

源自於(b)及(c)之結構單元之比率相對於構成上述共聚物之全部結構單元之合計莫耳數,較佳為處於以下之範圍。 The ratio of the structural units derived from (b) and (c) to the total number of moles of all the structural units constituting the copolymer is preferably in the following range.

源自於(b)之結構單元:5~95莫耳%(更佳為10~90莫耳%) The structural unit derived from (b): 5~95 mol% (more preferably 10~90 mol%)

源自於(c)之結構單元:5~95莫耳%(更佳為10~90莫耳%) The structural unit derived from (c): 5~95 mol% (more preferably 10~90 mol%)

進而,於與樹脂[K4]之製造方法相同之條件下,使(a)所具有之羧酸或羧酸酐和(b)與(c)之共聚物所具有之源自於(b)之環狀醚反應,藉此可獲得樹脂[K5]。 Furthermore, under the same conditions as the production method of resin [K4], the carboxylic acid or carboxylic anhydride contained in (a) and the copolymer of (b) and (c) are derived from the ring in (b) Like ether reaction, thereby obtaining resin [K5].

與上述共聚物反應之(a)之使用量相對於(b)100莫耳,較佳為5~80莫耳。就環狀醚之反應性較高,不易殘留未反應之(b)之方面而言,作為用於樹脂[K5]之(b),較佳為(b1),進而較佳為(b1-1)。 The usage amount of (a) reacted with the above-mentioned copolymer is preferably 5 to 80 mol relative to (b) 100 mol. Regarding the high reactivity of the cyclic ether, the unreacted (b) is unlikely to remain, as (b) for the resin [K5], (b1) is preferred, and (b1-1) ).

樹脂[K6]係使樹脂[K5]進而與羧酸酐反應後所得之樹脂。使羧酸酐和藉由環狀醚與羧酸或羧酸酐之反應而產生之羥基反應。 Resin [K6] is a resin obtained by further reacting resin [K5] with carboxylic anhydride. The carboxylic acid anhydride is reacted with the hydroxyl group produced by the reaction of the cyclic ether with the carboxylic acid or the carboxylic acid anhydride.

作為羧酸酐,可列舉:順丁烯二酸酐、甲基順丁烯二酸酐、伊康酸酐、3-乙烯基鄰苯二甲酸酐、4-乙烯基鄰苯二甲酸酐、3,4,5,6-四氫鄰苯二甲酸酐、1,2,3,6-四氫鄰苯二甲酸酐、二甲基四氫鄰苯二甲酸酐、5,6-二羧基雙環[2.2.1]庚-2-烯酐(雙環庚烯二甲酸酐)等。 Examples of carboxylic anhydrides include maleic anhydride, methyl maleic anhydride, itaconic anhydride, 3-vinyl phthalic anhydride, 4-vinyl phthalic anhydride, 3,4,5 ,6-Tetrahydrophthalic anhydride, 1,2,3,6-tetrahydrophthalic anhydride, dimethyltetrahydrophthalic anhydride, 5,6-dicarboxybicyclo[2.2.1] Hept-2-ene anhydride (bicycloheptene dicarboxylic acid anhydride) and the like.

作為樹脂(B),具體可列舉:(甲基)丙烯酸3,4-環氧環己基甲酯/(甲基)丙烯酸共聚物、丙烯酸3,4-環氧三環[5.2.1.02,6]癸酯/(甲基)丙烯酸共聚物等樹脂[K1];(甲基)丙烯酸縮水甘油酯/(甲基)丙烯酸苄酯/(甲基)丙烯酸共聚物、(甲基)丙烯酸縮水甘油酯/苯乙烯/(甲基)丙烯酸共聚物、丙烯酸3,4-環氧三環[5.2.1.02,6]癸酯/(甲基)丙烯酸/N-環己基順丁烯二醯亞胺共聚物、3-甲基-3-(甲基)丙烯醯氧基甲基氧雜環丁烷/(甲基)丙烯酸/苯乙烯共聚物等樹脂[K2];(甲基)丙烯酸苄酯/(甲基)丙烯酸共聚物、苯乙烯/(甲基)丙烯酸共聚物、(甲基)丙烯酸苄酯/(甲基)丙烯酸三環癸酯/(甲基)丙烯酸共聚物等樹脂[K3];使(甲基)丙烯酸縮水甘油酯與(甲基)丙烯酸苄酯/(甲基)丙烯酸共聚物加成所得之樹脂、使(甲基)丙烯酸縮水甘油酯與(甲基)丙烯酸三環癸酯/苯乙烯/(甲基)丙烯酸共聚物加成所得之樹脂、使(甲基)丙烯酸縮水甘油酯與(甲基)丙烯酸三環癸酯/(甲基)丙烯酸苄酯/(甲基)丙烯酸共聚物加成所得之樹脂等樹脂[K4];使(甲基)丙烯酸與(甲基)丙烯酸三環癸酯/(甲基)丙烯酸縮水甘油酯之共聚物反應所得之樹脂、使(甲基)丙烯酸與(甲基)丙烯酸三環癸酯/苯乙烯/(甲基)丙烯酸縮水甘油酯之共聚物反應所得之樹脂等樹脂[K5];使四氫鄰苯二甲酸酐進而與使(甲基)丙烯酸與(甲基)丙烯酸三環癸酯/(甲基)丙烯酸縮水甘油酯之共聚物反應所得的樹脂反應而獲得之樹脂等樹脂[K6]等。 Specific examples of the resin (B) include: 3,4-epoxycyclohexylmethyl (meth)acrylate/(meth)acrylic acid copolymer, 3,4-epoxy tricyclic acrylic acid [5.2.1.0 2,6 ] Resins such as decyl ester/(meth)acrylic acid copolymer [K1]; glycidyl (meth)acrylate/benzyl (meth)acrylate/(meth)acrylic acid copolymer, glycidyl (meth)acrylate /Styrene/(meth)acrylic acid copolymer, acrylic acid 3,4-epoxy tricyclo[5.2.1.0 2,6 ]decyl ester/(meth)acrylic acid/N-cyclohexyl maleimide copolymer Resins such as 3-methyl-3-(meth)acryloyloxymethyloxetane/(meth)acrylic acid/styrene copolymer [K2]; benzyl (meth)acrylate/( Resins such as meth)acrylic acid copolymer, styrene/(meth)acrylic acid copolymer, benzyl (meth)acrylate/tricyclodecyl (meth)acrylate/(meth)acrylic acid copolymer [K3]; The resin obtained by adding glycidyl (meth)acrylate and benzyl (meth)acrylate/(meth)acrylic acid copolymer to make glycidyl (meth)acrylate and tricyclodecyl (meth)acrylate/ Resin obtained by addition of styrene/(meth)acrylic acid copolymer, copolymerization of glycidyl (meth)acrylate with tricyclodecyl (meth)acrylate/benzyl (meth)acrylate/(meth)acrylic acid Resins such as resins obtained by addition of substances [K4]; resins obtained by reacting (meth)acrylic acid with a copolymer of tricyclodecyl (meth)acrylate/glycidyl (meth)acrylate, and (meth) Acrylic acid and (meth)acrylate tricyclodecyl ester/styrene/(meth)acrylate glycidyl ester copolymer resin and other resins [K5]; make tetrahydrophthalic anhydride and make (methyl) ) Resins such as resins obtained by reacting acrylic acid and tricyclodecyl (meth)acrylate/glycidyl (meth)acrylate copolymers to obtain resins [K6], etc.

該等樹脂可單獨使用,亦可併用2種以上。 These resins may be used alone, or two or more types may be used in combination.

樹脂(B)之聚苯乙烯換算之重量平均分子量較佳為3,000~ 100,000,更佳為5,000~50,000,進而較佳為5,000~30,000。若分子量處於上述範圍,則存在未曝光部於顯影液中之溶解性較高,所獲得之圖案之殘膜率或硬度亦較高之傾向。 The weight average molecular weight of resin (B) in terms of polystyrene is preferably 3,000~ 100,000, more preferably 5,000 to 50,000, and still more preferably 5,000 to 30,000. If the molecular weight is in the above range, the solubility of the unexposed part in the developer is higher, and the residual film rate or hardness of the obtained pattern tends to be higher.

樹脂(B)之分子量分佈[重量平均分子量(Mw)/數量平均分子量(Mn)]較佳為1.1~6,更佳為1.2~4。 The molecular weight distribution [weight average molecular weight (Mw)/number average molecular weight (Mn)] of the resin (B) is preferably 1.1-6, more preferably 1.2-4.

樹脂(B)之酸值較佳為50~180mg-KOH/g,更佳為60~150mg-KOH/g。 The acid value of the resin (B) is preferably 50 to 180 mg-KOH/g, more preferably 60 to 150 mg-KOH/g.

此處,酸值係作為中和1g之樹脂所需之氫氧化鉀之量(mg)而測定之值,例如可藉由使用氫氧化鉀水溶液進行滴定而求出。 Here, the acid value is a value measured as the amount (mg) of potassium hydroxide required to neutralize 1 g of resin, and it can be determined, for example, by titration using an aqueous potassium hydroxide solution.

樹脂(B)之含量相對於著色感光性樹脂組合物之固形物成分,較佳為7~65質量%,更佳為13~60質量%,進而較佳為17~55質量%,尤佳為17~40質量%。若樹脂(B)之含量處於上述範圍,則存在未曝光部於顯影液中之溶解性較高之傾向。 The content of the resin (B) relative to the solid content of the colored photosensitive resin composition is preferably 7-65% by mass, more preferably 13-60% by mass, still more preferably 17-55% by mass, and particularly preferably 17-40% by mass. If the content of the resin (B) is within the above range, the unexposed part tends to have higher solubility in the developer.

<聚合性化合物(C)> <Polymerizable compound (C)>

聚合性化合物(C)之重量平均分子量較佳為3,000以下。聚合性化合物(C)只要為能夠藉由利用照射光自聚合起始劑(D)產生之活性自由基等而聚合之化合物,則無特別限定,可列舉具有聚合性之乙烯性不飽和鍵之化合物等。 The weight average molecular weight of the polymerizable compound (C) is preferably 3,000 or less. The polymerizable compound (C) is not particularly limited as long as it is a compound that can be polymerized by active radicals generated from the polymerization initiator (D) by irradiating light, and examples thereof include polymerizable ethylenically unsaturated bonds. Compound etc.

作為聚合性化合物(C),較佳為具有3個以上乙烯性不飽和鍵之光聚合性化合物,例如可列舉:三羥甲基丙烷三(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、三季戊四醇八(甲基)丙烯酸酯、三季戊四醇七(甲基)丙烯酸酯、四季戊四醇十(甲基)丙烯酸酯、四季戊四醇九(甲基)丙烯酸酯、異氰尿酸三(2-(甲基)丙烯醯氧基乙基)酯、乙二醇改性季戊四醇四(甲基)丙烯酸酯、乙二醇改性二季戊四醇六(甲基)丙烯酸酯、丙二醇改性季戊四醇四(甲基)丙烯酸 酯、丙二醇改性二季戊四醇六(甲基)丙烯酸酯、己內酯改性季戊四醇四(甲基)丙烯酸酯、己內酯改性二季戊四醇六(甲基)丙烯酸酯等。其中,可列舉二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯等。 The polymerizable compound (C) is preferably a photopolymerizable compound having 3 or more ethylenically unsaturated bonds, for example, trimethylolpropane tri(meth)acrylate, pentaerythritol tri(meth)acrylic acid Esters, pentaerythritol tetra(meth)acrylate, dipentaerythritol penta(meth)acrylate, dipentaerythritol hexa(meth)acrylate, tripentaerythritol octa(meth)acrylate, tripentaerythritol hepta(meth)acrylate , Pentaerythritol deca(meth)acrylate, pentaerythritol nine(meth)acrylate, tris(2-(meth)acryloxyethyl)isocyanurate, ethylene glycol modified pentaerythritol tetra(meth)acrylate Base) acrylate, ethylene glycol modified dipentaerythritol hexa(meth)acrylate, propylene glycol modified pentaerythritol tetra(meth)acrylic acid Ester, propylene glycol modified dipentaerythritol hexa(meth)acrylate, caprolactone modified pentaerythritol tetra(meth)acrylate, caprolactone modified dipentaerythritol hexa(meth)acrylate, etc. Among them, dipentaerythritol penta(meth)acrylate, dipentaerythritol hexa(meth)acrylate, and the like can be mentioned.

聚合性化合物(C)之含量相對於著色感光性樹脂組合物中之樹脂(B)100質量份,較佳為20~150質量份。 The content of the polymerizable compound (C) is preferably 20 to 150 parts by mass with respect to 100 parts by mass of the resin (B) in the colored photosensitive resin composition.

<聚合起始劑(D)> <Polymerization initiator (D)>

作為聚合起始劑(D),只要為可藉由光或熱之作用產生活性自由基,使聚合性化合物(C)之聚合開始者,則無特別限定,可使用公知之自由基聚合起始劑。 The polymerization initiator (D) is not particularly limited as long as it can generate living radicals by the action of light or heat to initiate polymerization of the polymerizable compound (C), and a known radical polymerization initiator can be used. Agent.

作為聚合起始劑(D),較佳為藉由光之作用而產生活性自由基之化合物,更佳為烷基苯酮化合物、三

Figure 104125450-A0202-12-0017-9
化合物、醯基氧化膦化合物、肟化合物、及聯咪唑化合物,尤其是進而較佳為含有肟化合物之聚合起始劑。 The polymerization initiator (D) is preferably a compound that generates active free radicals by the action of light, more preferably alkylphenone compounds, three
Figure 104125450-A0202-12-0017-9
The compound, the phosphine oxide compound, the oxime compound, and the biimidazole compound are particularly preferably a polymerization initiator containing an oxime compound.

作為O-醯基肟化合物,可列舉:N-苯甲醯氧基-1-(4-苯基硫基苯基)丁烷-1-酮-2-亞胺、N-苯甲醯氧基-1-(4-苯基硫基苯基)辛烷-1-酮-2-亞胺、N-乙醯氧基-1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]乙烷-1-亞胺、N-乙醯氧基-1-[9-乙基-6-{2-甲基-4-(3,3-二甲基-2,4-二氧雜環戊基甲基氧基)苯甲醯基}-9H-咔唑-3-基]乙烷-1-亞胺等。亦可使用Irgacure OXE01、OXE02(以上係BASF公司製造)、N-1919(ADEKA公司製造)等市售品。 Examples of the O-phenyloxime compound include: N-benzyloxy-1-(4-phenylthiophenyl)butan-1-one-2-imine, N-benzyloxy -1-(4-phenylthiophenyl)octane-1-one-2-imine, N-acetoxy-1-[9-ethyl-6-(2-methylbenzyl) Yl)-9H-carbazol-3-yl]ethane-1-imine, N-acetoxy-1-[9-ethyl-6-{2-methyl-4-(3,3- Dimethyl-2,4-dioxolylmethyloxy)benzyl}-9H-carbazol-3-yl]ethane-1-imine and the like. Commercial products such as Irgacure OXE01, OXE02 (the above are made by BASF), and N-1919 (made by ADEKA) can also be used.

本發明之著色感光性樹脂組合物亦可含有聚合起始助劑(D1)。於含有聚合起始助劑(D1)之情形時,通常係與聚合起始劑(D)組合使用。聚合起始助劑(D1)係用以促進藉由聚合起始劑(D)而開始聚合之聚合性化合物(C)之聚合之化合物或增感劑。 The colored photosensitive resin composition of the present invention may also contain a polymerization initiation assistant (D1). When the polymerization initiator (D1) is contained, it is usually used in combination with the polymerization initiator (D). The polymerization initiation assistant (D1) is a compound or sensitizer used to promote the polymerization of the polymerizable compound (C) that starts polymerization by the polymerization initiator (D).

作為聚合起始助劑(D1),可列舉:胺化合物、烷氧基蒽化合物、 9-氧硫

Figure 104125450-A0202-12-0018-10
化合物、羧酸化合物、硫醇化合物等,較佳為硫醇化合物。該等聚合起始助劑可單獨使用,亦可併用2種以上。 Examples of the polymerization initiation aid (D1) include amine compounds, alkoxyanthracene compounds, and 9-oxysulfur
Figure 104125450-A0202-12-0018-10
The compound, carboxylic acid compound, thiol compound, etc. are preferably thiol compounds. These polymerization initiation aids may be used alone or in combination of two or more kinds.

聚合起始劑(D)之含量相對於著色感光性樹脂組合物之固形物成分,較佳為1~20質量%,更佳為1~10質量%,進而較佳為3~10質量%。 The content of the polymerization initiator (D) is preferably 1 to 20% by mass, more preferably 1 to 10% by mass, and still more preferably 3 to 10% by mass relative to the solid content of the colored photosensitive resin composition.

於使用聚合起始助劑(D1)之情形時,其含量相對於聚合起始劑(D)1莫耳,較佳為0.01~10莫耳,更佳為0.01~5莫耳。 In the case of using the polymerization initiator (D1), its content is relative to 1 mol of the polymerization initiator (D), preferably 0.01 to 10 mol, more preferably 0.01 to 5 mol.

聚合起始劑(D)與聚合起始助劑(D1)之合計含量相對於著色感光性樹脂組合物之固形物成分,較佳為1~35質量%,更佳為1~25質量%,進而較佳為1~20質量%,尤佳為5~20質量%。 The total content of the polymerization initiator (D) and the polymerization initiator (D1) relative to the solid content of the colored photosensitive resin composition is preferably 1 to 35% by mass, more preferably 1 to 25% by mass, More preferably, it is 1-20 mass %, More preferably, it is 5-20 mass %.

本發明之著色感光性樹脂組合物較佳為含有溶劑(E)。溶劑(E)並無特別限定,可使用該領域中通常使用之溶劑。例如可自酯溶劑(含有-COO-之溶劑)、酯溶劑以外之醚溶劑(含有-O-之溶劑)、醚酯溶劑(含有-COO-及-O-之溶劑)、酯溶劑以外之酮溶劑(含有-CO-之溶劑)、醇溶劑、芳香族烴溶劑、醯胺溶劑、二甲基亞碸等中選擇而使用。 It is preferable that the colored photosensitive resin composition of this invention contains a solvent (E). The solvent (E) is not particularly limited, and solvents commonly used in this field can be used. For example, it can be selected from ester solvents (solvents containing -COO-), ether solvents other than ester solvents (solvents containing -O-), ether ester solvents (solvents containing -COO- and -O-), ketones other than ester solvents Choose and use solvents (solvents containing -CO-), alcohol solvents, aromatic hydrocarbon solvents, amide solvents, dimethyl sulfide, etc.

作為酯溶劑,可列舉:乳酸甲酯、乳酸乙酯、乳酸丁酯、2-羥基異丁酸甲酯、乙酸乙酯、乙酸正丁酯、乙酸異丁酯、甲酸戊酯、乙酸異戊酯、丙酸丁酯、丁酸異丙酯、丁酸乙酯、丁酸丁酯、丙酮酸甲酯、丙酮酸乙酯、丙酮酸丙酯、乙醯乙酸甲酯、乙醯乙酸乙酯、環己醇乙酸酯、γ-丁內酯等。 Examples of ester solvents include methyl lactate, ethyl lactate, butyl lactate, methyl 2-hydroxyisobutyrate, ethyl acetate, n-butyl acetate, isobutyl acetate, pentyl formate, and isoamyl acetate , Butyl propionate, isopropyl butyrate, ethyl butyrate, butyl butyrate, methyl pyruvate, ethyl pyruvate, propyl pyruvate, methyl acetate, ethyl acetate, cyclic Hexanol acetate, γ-butyrolactone, etc.

作為醚溶劑,可列舉:乙二醇單甲醚、乙二醇單乙醚、乙二醇單丙醚、乙二醇單丁醚、二乙二醇單甲醚、二乙二醇單乙醚、二乙二醇單丁醚、丙二醇單甲醚、丙二醇單乙醚、丙二醇單丙醚、丙二醇單丁醚、3-甲氧基-1-丁醇、3-甲氧基-3-甲基丁醇、四氫呋喃、四氫吡喃、1,4-二

Figure 104125450-A0202-12-0018-11
烷、二乙二醇二甲醚、二乙二醇二乙醚、二乙二醇甲基乙基醚、二乙二醇二丙醚、二乙二醇二丁醚、苯甲醚、苯乙醚、甲基 苯甲醚等。 Examples of ether solvents include ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monobutyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, and Ethylene glycol monobutyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monobutyl ether, 3-methoxy-1-butanol, 3-methoxy-3-methylbutanol, Tetrahydrofuran, tetrahydropyran, 1,4-bis
Figure 104125450-A0202-12-0018-11
Alkane, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol methyl ethyl ether, diethylene glycol dipropyl ether, diethylene glycol dibutyl ether, anisole, phenylethyl ether, Methyl anisole and so on.

作為醚酯溶劑,可列舉:甲氧基乙酸甲酯、甲氧基乙酸乙酯、甲氧基乙酸丁酯、乙氧基乙酸甲酯、乙氧基乙酸乙酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、2-甲氧基丙酸甲酯、2-甲氧基丙酸乙酯、2-甲氧基丙酸丙酯、2-乙氧基丙酸甲酯、2-乙氧基丙酸乙酯、2-甲氧基-2-甲基丙酸甲酯、2-乙氧基-2-甲基丙酸乙酯、乙酸3-甲氧基丁酯、乙酸3-甲基-3-甲氧基丁酯、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯、丙二醇單丙醚乙酸酯、乙二醇單甲醚乙酸酯、乙二醇單乙醚乙酸酯、二乙二醇單乙醚乙酸酯、二乙二醇單丁醚乙酸酯、二丙二醇甲醚乙酸酯等。 Examples of ether ester solvents include: methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate, 3-methoxypropionic acid Methyl ester, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, methyl 2-methoxypropionate, 2-methoxypropionic acid Ethyl ester, 2-methoxypropyl propionate, 2-ethoxy methyl propionate, 2-ethoxy ethyl propionate, 2-methoxy-2-methyl propionate, 2- Ethoxy-2-methyl ethyl propionate, 3-methoxy butyl acetate, 3-methyl-3-methoxy butyl acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate , Propylene glycol monopropyl ether acetate, ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monoethyl ether acetate, diethylene glycol monobutyl ether acetate, two Propylene glycol methyl ether acetate, etc.

作為酮溶劑,可列舉:4-羥基-4-甲基-2-戊酮、丙酮、2-丁酮、2-庚酮、3-庚酮、4-庚酮、4-甲基-2-戊酮、環戊酮、環己酮、異佛爾酮等。 Examples of the ketone solvent include: 4-hydroxy-4-methyl-2-pentanone, acetone, 2-butanone, 2-heptanone, 3-heptanone, 4-heptanone, 4-methyl-2- Pentanone, cyclopentanone, cyclohexanone, isophorone, etc.

作為醇溶劑,可列舉:甲醇、乙醇、丙醇、丁醇、己醇、環己醇、乙二醇、丙二醇、甘油等。 Examples of alcohol solvents include methanol, ethanol, propanol, butanol, hexanol, cyclohexanol, ethylene glycol, propylene glycol, and glycerin.

作為芳香族烴溶劑,可列舉:苯、甲苯、二甲苯、均三甲苯等。 Examples of the aromatic hydrocarbon solvent include benzene, toluene, xylene, mesitylene, and the like.

作為醯胺溶劑,可列舉:N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、N-甲基吡咯啶酮等。 Examples of the amide solvent include N,N-dimethylformamide, N,N-dimethylacetamide, N-methylpyrrolidone, and the like.

該等溶劑可單獨使用,亦可併用2種以上。 These solvents may be used alone or in combination of two or more kinds.

上述溶劑中,就塗佈性、乾燥性之方面而言,較佳為1atm下之沸點為120℃以上且180℃以下之有機溶劑。其中,較佳為丙二醇單甲醚乙酸酯、乳酸乙酯、丙二醇單甲醚、3-乙氧基丙酸乙酯、乙二醇單甲醚、二乙二醇單甲醚、二乙二醇單乙醚、3-甲氧基丁基乙酸酯、3-甲氧基-1-丁醇、4-羥基-4-甲基-2-戊酮、N,N-二甲基甲醯胺等,更佳為丙二醇單甲醚乙酸酯、丙二醇單甲醚、二丙二醇甲醚乙酸酯、乳酸 乙酯、3-甲氧基丁基乙酸酯、3-甲氧基-1-丁醇、3-乙氧基丙酸乙酯等。 Among the above solvents, in terms of coating properties and drying properties, an organic solvent having a boiling point of 120°C or more and 180°C or less at 1 atm is preferred. Among them, propylene glycol monomethyl ether acetate, ethyl lactate, propylene glycol monomethyl ether, 3-ethoxy ethyl propionate, ethylene glycol monomethyl ether, diethylene glycol monomethyl ether, and diethylene glycol monomethyl ether are preferred. Alcohol monoethyl ether, 3-methoxybutyl acetate, 3-methoxy-1-butanol, 4-hydroxy-4-methyl-2-pentanone, N,N-dimethylformamide Etc., more preferably propylene glycol monomethyl ether acetate, propylene glycol monomethyl ether, dipropylene glycol methyl ether acetate, lactic acid Ethyl ester, 3-methoxybutyl acetate, 3-methoxy-1-butanol, ethyl 3-ethoxypropionate, etc.

溶劑(E)之含量相對於著色感光性樹脂組合物,較佳為70~95質量%,更佳為75~92質量%。換言之,著色感光性樹脂組合物之固形物成分較佳為5~30質量%,更佳為8~25質量%。 The content of the solvent (E) is preferably 70 to 95% by mass, and more preferably 75 to 92% by mass relative to the colored photosensitive resin composition. In other words, the solid content of the colored photosensitive resin composition is preferably 5 to 30% by mass, more preferably 8 to 25% by mass.

若溶劑(E)之含量處於上述範圍,則塗佈時之平坦性變得良好,當形成彩色濾光片時,色濃度不會不足,故而存在顯示特性變得良好之傾向。 If the content of the solvent (E) is in the above range, the flatness during coating becomes good, and the color density is not insufficient when forming a color filter, so there is a tendency for the display characteristics to become good.

<調平劑(F)> <Leveling Agent (F)>

作為調平劑(F),可列舉:聚矽氧系界面活性劑、氟系界面活性劑、及具有氟原子之聚矽氧系界面活性劑等。該等可於側鏈具有聚合性基。 As the leveling agent (F), silicone-based surfactants, fluorine-based surfactants, and silicone-based surfactants having fluorine atoms, and the like can be cited. These may have a polymerizable group in the side chain.

作為聚矽氧系界面活性劑,可列舉於分子內具有矽氧烷鍵之界面活性劑等。具體可列舉:Toray Silicone DC3PA、Toray Silicone SH7PA、Toray Silicone DC11PA、Toray Silicone SH21PA、Toray Silicone SH28PA、Toray Silicone SH29PA、Toray Silicone SH30PA、Toray Silicone SH8400(商品名:Dow Corning Toray(股)製造)、KP321、KP322、KP323、KP324、KP326、KP340、KP341(信越化學工業(股)製造)、TSF400、TSF401、TSF410、TSF4300、TSF4440、TSF4445、TSF-4446、TSF4452、及TSF4460(Momentive Performance Materials Japan LLC公司製造)等。 As the polysiloxane-based surfactant, a surfactant having a siloxane bond in the molecule, etc. can be cited. Specific examples include: Toray Silicone DC3PA, Toray Silicone SH7PA, Toray Silicone DC11PA, Toray Silicone SH21PA, Toray Silicone SH28PA, Toray Silicone SH29PA, Toray Silicone SH30PA, Toray Silicone SH8400 (trade name: manufactured by Dow Corning Toray (stock)), KP321, KP322, KP323, KP324, KP326, KP340, KP341 (manufactured by Shin-Etsu Chemical Co., Ltd.), TSF400, TSF401, TSF410, TSF4300, TSF4440, TSF4445, TSF-4446, TSF4452, and TSF4460 (manufactured by Momentive Performance Materials Japan LLC) Wait.

作為上述氟系界面活性劑,可列舉於分子內具有氟碳鏈之界面活性劑等。具體可列舉:Fluorad(註冊商標)FC430、Fluorad FC431(住友3M(股)製造)、MEGAFAC(註冊商標)F142D、MEGAFAC F171、MEGAFAC F172、MEGAFAC F173、MEGAFAC F177、MEGAFAC F183、MEGAFAC F554、MEGAFAC R30、MEGAFAC RS-718- K(DIC(股)製造)、Eftop(註冊商標)EF301、Eftop EF303、Eftop EF351、Eftop EF352(Mitsubishi Materials Electronic Chemicals(股)製造)、Surflon(註冊商標)S381、Surflon S382、Surflon SC101、Surflon SC105(旭硝子(股)製造)、及E5844(Daikin Fine Chemical研究所(股)製造)等。 As the above-mentioned fluorine-based surfactant, a surfactant having a fluorocarbon chain in the molecule and the like can be cited. Specific examples include: Fluorad (registered trademark) FC430, Fluorad FC431 (manufactured by Sumitomo 3M Co., Ltd.), MEGAFAC (registered trademark) F142D, MEGAFAC F171, MEGAFAC F172, MEGAFAC F173, MEGAFAC F177, MEGAFAC F183, MEGAFAC F554, MEGAFAC R30, MEGAFAC RS-718- K (manufactured by DIC (Stock)), Eftop (registered trademark) EF301, Eftop EF303, Eftop EF351, Eftop EF352 (manufactured by Mitsubishi Materials Electronic Chemicals (stock)), Surflon (registered trademark) S381, Surflon S382, Surflon SC101, Surflon SC105 (Manufactured by Asahi Glass Co., Ltd.), and E5844 (manufactured by Daikin Fine Chemical Research Institute Co., Ltd.), etc.

作為上述具有氟原子之聚矽氧系界面活性劑,可列舉於分子內具有矽氧烷鍵及氟碳鏈之界面活性劑等。具體可列舉:MEGAFAC(註冊商標)R08、MEGAFAC BL20、MEGAFAC F475、MEGAFAC F477、及MEGAFAC F443(DIC(股)製造)等。 As the polysiloxane-based surfactant having a fluorine atom, a surfactant having a siloxane bond and a fluorocarbon chain in the molecule can be cited. Specific examples include MEGAFAC (registered trademark) R08, MEGAFAC BL20, MEGAFAC F475, MEGAFAC F477, and MEGAFAC F443 (manufactured by DIC Co., Ltd.).

調平劑(F)之含量相對於著色感光性樹脂組合物之總量,較佳為0.001質量%以上且0.2質量%以下,較佳為0.002質量%以上且0.1質量%以下,更佳為0.01質量%以上且0.05質量%以下。再者,該含量並不含上述顏料分散劑之含量。 The content of the leveling agent (F) relative to the total amount of the colored photosensitive resin composition is preferably 0.001% by mass or more and 0.2% by mass or less, preferably 0.002% by mass or more and 0.1% by mass or less, and more preferably 0.01 Mass% or more and 0.05 mass% or less. Furthermore, this content does not include the content of the aforementioned pigment dispersant.

本發明之著色感光性樹脂組合物亦可視需要含有填充劑、其他高分子化合物、密接促進劑、抗氧化劑、紫外線吸收劑、光穩定劑、鏈轉移劑等添加劑。 The colored photosensitive resin composition of the present invention may optionally contain additives such as fillers, other polymer compounds, adhesion promoters, antioxidants, ultraviolet absorbers, light stabilizers, and chain transfer agents.

本發明之著色感光性樹脂組合物可藉由利用先前公知之方法,將著色劑(A)、樹脂(B)、聚合性化合物(C)及聚合起始劑(D)、視需要之溶劑(E)或調平劑(F)等其他添加劑攪拌、混合而製造。 The colored photosensitive resin composition of the present invention can be used to mix the colorant (A), the resin (B), the polymerizable compound (C), the polymerization initiator (D), and the solvent ( E) or leveling agent (F) and other additives are stirred and mixed to produce.

較佳為於混合後,利用孔徑0.05~5.0μm左右之過濾器進行過濾。 Preferably, after mixing, filter with a filter with a pore size of about 0.05 to 5.0 μm.

作為著色劑(A)而含有之C.I.顏料藍15:3、C.I.顏料藍15:4、鹵化鋅酞菁顏料、及C.I.顏料黃185較佳為分別以顏料分散液之形式與其他成分混合。 C.I. Pigment Blue 15:3, C.I. Pigment Blue 15:4, halogenated zinc phthalocyanine pigment, and C.I. Pigment Yellow 185 contained as the colorant (A) are preferably mixed with other components in the form of a pigment dispersion.

各顏料分散液可藉由使上述顏料中之任一者分散至含有顏料分散劑之溶劑(E)中而製備。 Each pigment dispersion liquid can be prepared by dispersing any one of the above-mentioned pigments in the solvent (E) containing the pigment dispersant.

顏料分散劑可單獨使用,亦可組合使用2種以上。 The pigment dispersant may be used alone or in combination of two or more kinds.

作為顏料分散劑,可列舉丙烯酸系界面活性劑等公知之顏料分散劑,以商品名而言可列舉:KP(信越化學工業(股)製造)、Flowlen(共榮社化學(股)製造)、Solsperse(註冊商標)(Avecia公司製造)、EFKA(註冊商標)(BASF公司製造)、Ajisper(註冊商標)(Ajinomoto Fine-Techno(股)製造)、Disperbyk(註冊商標)(BYK-Chemie公司製造)等。 As the pigment dispersing agent, known pigment dispersing agents such as acrylic surfactants can be cited. In terms of trade names, KP (manufactured by Shin-Etsu Chemical Co., Ltd.), Flowlen (manufactured by Kyoeisha Chemical Co., Ltd.), Solsperse (registered trademark) (manufactured by Avecia), EFKA (registered trademark) (manufactured by BASF), Ajisper (registered trademark) (manufactured by Ajinomoto Fine-Techno (stock)), Disperbyk (registered trademark) (manufactured by BYK-Chemie) Wait.

顏料分散劑之使用量相對於顏料,較佳為1質量%以上且100質量%以下,更佳為5質量%以上且50質量%以下。若顏料分散劑之使用量處於該範圍,則可獲得均勻之分散狀態之顏料分散液。 The amount of the pigment dispersant used is preferably 1% by mass or more and 100% by mass or less, and more preferably 5% by mass or more and 50% by mass or less relative to the pigment. If the usage amount of the pigment dispersant is in this range, a uniformly dispersed pigment dispersion liquid can be obtained.

當使顏料分散至溶劑(E)中時,可使用珠磨機等公知之分散機。 When dispersing the pigment in the solvent (E), a known dispersing machine such as a bead mill can be used.

本發明之著色感光性樹脂組合物作為彩色濾光片等之塗膜(以下,存在將某些形狀解像而成之塗膜稱為「圖案」之情況)之材料而較有用。由該著色感光性樹脂組合物獲得之彩色濾光片之圖案形狀較佳。 The colored photosensitive resin composition of the present invention is useful as a material for coating films such as color filters (hereinafter, coating films obtained by resolving certain shapes may be referred to as "patterns"). The pattern shape of the color filter obtained from the colored photosensitive resin composition is preferable.

作為由本發明之著色感光性樹脂組合物形成圖案之方法,可列舉光微影法、噴墨法、印刷法等。其中,較佳為光微影法。 As a method of forming a pattern from the colored photosensitive resin composition of the present invention, a photolithography method, an inkjet method, a printing method, etc. can be cited. Among them, the photolithography method is preferred.

光微影法係藉由將上述著色感光性樹脂組合物塗佈至基板,進行乾燥,介隔光罩曝光,並進行顯影而獲得圖案之方法。 The photolithography method is a method of obtaining a pattern by applying the colored photosensitive resin composition described above to a substrate, drying, exposing through a photomask, and developing.

作為上述基板,例如可列舉玻璃、金屬、塑膠等,可為板狀,亦可為膜狀。亦可於該等基板上形成有彩色濾光片、各種絕緣或導電膜、驅動電路等構造體。 As said substrate, glass, metal, plastic, etc. are mentioned, for example, and it may be a plate shape or a film shape. Structures such as color filters, various insulating or conductive films, and driving circuits may also be formed on these substrates.

對基板之塗佈例如可使用旋轉塗佈機、狹縫式&旋轉塗佈機、狹縫式塗佈機(有時亦被稱為模嘴塗佈機、淋幕式平面塗佈機、非旋轉塗佈機)、噴墨等塗佈裝置而進行。 For coating the substrate, for example, spin coater, slit & spin coater, slit coater (sometimes called die nozzle coater, curtain type flat coater, non- Spin coater), inkjet and other coating devices.

作為塗佈至基板之著色感光性樹脂組合物之乾燥方法,例如可 列舉:加熱乾燥、自然乾燥、通風乾燥、減壓乾燥等方法。亦可將複數種方法組合而進行。作為乾燥溫度,較佳為10~120℃,更佳為50~100℃。又,作為加熱時間,較佳為10秒鐘~60分鐘,更佳為30秒鐘~10分鐘。減壓乾燥較佳為於50~150Pa之壓力下,以20~25℃之溫度範圍進行。 As a drying method of the colored photosensitive resin composition applied to the substrate, for example, Examples: heating drying, natural drying, ventilating drying, vacuum drying and other methods. It is also possible to combine plural methods. The drying temperature is preferably 10 to 120°C, more preferably 50 to 100°C. Moreover, as the heating time, 10 seconds to 60 minutes are preferable, and 30 seconds to 10 minutes are more preferable. Drying under reduced pressure is preferably performed under a pressure of 50 to 150 Pa and a temperature of 20 to 25°C.

藉由乾燥而獲得之膜係介隔用以形成目標圖案之光罩而曝光。 The film obtained by drying is exposed through a photomask for forming the target pattern.

此時之光罩上之圖案形狀並無特別限定,係使用對應於目標用途之圖案形狀。 The pattern shape on the mask at this time is not particularly limited, and the pattern shape corresponding to the target application is used.

作為用於曝光之光源,較佳為產生250~450nm之波長之光之光源。例如亦可使用對該波長區域進行截止之濾光片而截止未達350nm之光,或使用提取該等波長區域之帶通濾光片而選擇性地提取436nm附近、408nm附近、365nm附近之光。具體可列舉:水銀燈、發光二極體、金屬鹵化物燈、鹵素燈等。 As a light source for exposure, a light source that generates light with a wavelength of 250 to 450 nm is preferred. For example, a filter that cuts off the wavelength region can be used to cut off light below 350nm, or a bandpass filter that extracts these wavelength regions can be used to selectively extract light near 436nm, 408nm, and 365nm. . Specific examples include mercury lamps, light-emitting diodes, metal halide lamps, halogen lamps, and the like.

為了能夠均勻地對整個曝光面照射平行光線,或進行光罩與基材之準確之對位,較佳為使用光罩對準曝光機、步進式曝光機等裝置。 In order to be able to irradiate the entire exposure surface with parallel light uniformly, or to accurately align the photomask with the substrate, it is preferable to use a photomask alignment exposure machine, stepping exposure machine and other devices.

於曝光後,使未曝光部接觸顯影液而溶解,藉此進行顯影。藉由該顯影,可獲得圖案。作為顯影液,亦可使用有機溶劑,但為了不易因顯影液發生塗膜之曝光部之溶解或膨潤,獲得良好之形狀之圖案,較佳為鹼性化合物之水溶液。 After the exposure, the unexposed part is brought into contact with the developer solution to dissolve, thereby performing development. By this development, a pattern can be obtained. As the developer, an organic solvent can also be used. However, in order to prevent dissolution or swelling of the exposed part of the coating film due to the developer, and to obtain a pattern with a good shape, an aqueous solution of an alkaline compound is preferred.

顯影方法可為浸置法、浸漬法、噴霧法等中之任一種。進而,亦可於顯影時將基板傾斜任意之角度。 The development method may be any of immersion method, dipping method, spray method and the like. Furthermore, the substrate may be inclined at any angle during development.

較佳為於顯影後進行水洗。 It is preferable to wash with water after development.

作為上述鹼性化合物,可列舉:氫氧化鈉、氫氧化鉀、磷酸氫二鈉、磷酸二氫鈉、磷酸氫二銨、磷酸二氫銨、磷酸二氫鉀、矽酸鈉、矽酸鉀、碳酸鈉、碳酸鉀、碳酸氫鈉、碳酸氫鉀、硼酸鈉、硼酸 鉀、氨等無機鹼性化合物;氫氧化四甲基銨、氫氧化2-羥乙基三甲基銨、單甲基胺、二甲基胺、三甲基胺、單乙基胺、二乙基胺、三乙基胺、單異丙基胺、二異丙基胺、乙醇胺等有機鹼性化合物。其中,較佳為氫氧化鉀、碳酸氫鈉、及氫氧化四甲基銨。 Examples of the above basic compounds include sodium hydroxide, potassium hydroxide, disodium hydrogen phosphate, sodium dihydrogen phosphate, diammonium hydrogen phosphate, ammonium dihydrogen phosphate, potassium dihydrogen phosphate, sodium silicate, potassium silicate, Sodium carbonate, potassium carbonate, sodium bicarbonate, potassium bicarbonate, sodium borate, boric acid Inorganic basic compounds such as potassium and ammonia; tetramethylammonium hydroxide, 2-hydroxyethyltrimethylammonium hydroxide, monomethylamine, dimethylamine, trimethylamine, monoethylamine, diethyl Organic basic compounds such as base amine, triethylamine, monoisopropylamine, diisopropylamine, ethanolamine, etc. Among them, potassium hydroxide, sodium bicarbonate, and tetramethylammonium hydroxide are preferred.

該等鹼性化合物之水溶液中之濃度較佳為0.01~10質量%,更佳為0.03~5質量%。 The concentration in the aqueous solution of the basic compound is preferably 0.01-10% by mass, more preferably 0.03-5% by mass.

上述鹼性化合物之水溶液亦可含有界面活性劑。 The aqueous solution of the above-mentioned basic compound may also contain a surfactant.

作為界面活性劑,可列舉:聚氧乙烯烷基醚、聚氧乙烯芳基醚、聚氧乙烯烷基芳基醚、其他聚氧乙烯衍生物、氧化乙烯/丙二醇嵌段共聚物、山梨醇酐脂肪酸酯、聚氧乙烯山梨醇酐脂肪酸酯、聚氧乙烯山梨醇脂肪酸酯、甘油脂肪酸酯、聚氧乙烯脂肪酸酯、聚氧乙烯烷基胺等非離子系界面活性劑; 月桂醇硫酸酯鈉、油醇硫酸酯鈉、月桂基硫酸鈉、月桂基硫酸銨、十二烷基苯磺酸鈉、十二烷基萘磺酸鈉等陰離子系界面活性劑; 硬脂胺鹽酸鹽、月桂基三甲基氯化銨等陽離子系界面活性劑等。 Examples of surfactants include polyoxyethylene alkyl ethers, polyoxyethylene aryl ethers, polyoxyethylene alkyl aryl ethers, other polyoxyethylene derivatives, ethylene oxide/propylene glycol block copolymers, and sorbitol anhydride Non-ionic surfactants such as fatty acid esters, polyoxyethylene sorbitan fatty acid esters, polyoxyethylene sorbitan fatty acid esters, glycerin fatty acid esters, polyoxyethylene fatty acid esters, polyoxyethylene alkylamines, etc.; Anionic surfactants such as sodium lauryl sulfate, sodium oleyl sulfate, sodium lauryl sulfate, ammonium lauryl sulfate, sodium dodecylbenzene sulfonate, sodium dodecyl naphthalene sulfonate; Cationic surfactants such as stearylamine hydrochloride and lauryltrimethylammonium chloride.

鹼性化合物之水溶液中之界面活性劑之濃度較佳為0.01~10質量%,更佳為0.05~8質量%,尤佳為0.1~5質量%。 The concentration of the surfactant in the aqueous solution of the basic compound is preferably 0.01-10% by mass, more preferably 0.05-8% by mass, and particularly preferably 0.1-5% by mass.

亦可進而視需要進行後烘烤。後烘烤較佳為以150~250℃、1~240分鐘之範圍而進行。 You may further perform post-baking as needed. The post-baking is preferably performed in the range of 150 to 250°C for 1 to 240 minutes.

可適當調整後烘烤後之塗膜之膜厚,較佳為0.5~5μm,尤佳為0.5~3μm。 The film thickness of the post-baking coating film can be adjusted appropriately, preferably 0.5~5μm, particularly preferably 0.5~3μm.

藉由本發明之著色感光性樹脂組合物而獲得之圖案作為彩色濾光片而較有用。 The pattern obtained by the colored photosensitive resin composition of the present invention is more useful as a color filter.

該彩色濾光片能夠以公知之態樣用於顯示裝置(液晶顯示裝置、有機EL(Electroluminescence,電致發光)裝置等)、固體攝像元件、電 子紙等各種與著色圖像相關之機器。 The color filter can be used in display devices (liquid crystal display devices, organic EL (Electroluminescence, electroluminescence) devices, etc.), solid-state imaging devices, and electronic devices in a well-known manner. Sub-paper and other machines related to colored images.

[實施例] [Example]

繼而,列舉實施例而更具體地說明本發明。實施例及比較例中之「%」及「份」,只要無特別事先說明,則為質量%及質量份。 Next, the present invention will be explained more specifically by citing examples. The "%" and "parts" in the examples and comparative examples are mass% and mass parts unless otherwise specified.

合成例1 Synthesis example 1

對具備回流冷凝器、滴液漏斗、及攪拌機之1L之燒瓶內通入適量氮氣,而置換成氮氣環境,加入丙二醇單甲醚乙酸酯280重量份,一面攪拌,一面加熱至80℃。繼而,歷時5小時滴加丙烯酸38重量份、丙烯酸3,4-環氧三環[5.2.1.02,6]癸-8或/及9-基酯之混合物289重量份、及丙二醇單甲醚乙酸酯125重量份之混合溶液。另一方面,歷時6小時滴加使2,2-偶氮二(2,4-二甲基戊腈)33重量份溶解於丙二醇單甲醚乙酸酯235重量份後所得之混合溶液。於滴加結束後,以同一溫度保持4小時後,冷卻至室溫,獲得B型黏度(23℃)為125mPa.s,固形物成分為37.0重量%,溶液酸值為27mg-KOH/g之共聚物之溶液(樹脂B-1溶液)。所獲得之共聚物(樹脂B-1)之重量平均分子量Mw為9200,分散度為2.08。 A 1L flask equipped with a reflux condenser, a dropping funnel, and a stirrer was introduced with a proper amount of nitrogen and replaced with a nitrogen atmosphere. 280 parts by weight of propylene glycol monomethyl ether acetate was added and heated to 80°C while stirring. Then, 38 parts by weight of acrylic acid, 289 parts by weight of a mixture of 3,4-epoxytricyclo[5.2.1.0 2,6 ]dec-8 or/and 9-yl ester of acrylic acid, and propylene glycol monomethyl ether were added dropwise over 5 hours A mixed solution of 125 parts by weight of acetate. On the other hand, a mixed solution obtained by dissolving 33 parts by weight of 2,2-azobis(2,4-dimethylvaleronitrile) in 235 parts by weight of propylene glycol monomethyl ether acetate was added dropwise over 6 hours. After the dripping is finished, keep it at the same temperature for 4 hours and then cool to room temperature to obtain a type B viscosity (23℃) of 125mPa. s, the solid content is 37.0% by weight, the solution acid value is 27mg-KOH/g copolymer solution (resin B-1 solution). The weight average molecular weight Mw of the obtained copolymer (resin B-1) was 9,200, and the degree of dispersion was 2.08.

關於上述合成例中獲得之樹脂之聚苯乙烯換算重量平均分子量Mw及數量平均分子量Mn之測定,係使用GPC(Gel Permeation Chromatography,凝膠滲透層析)法,利用以下之條件而進行。 The measurement of the polystyrene-converted weight average molecular weight Mw and the number average molecular weight Mn of the resin obtained in the above synthesis example was performed using the GPC (Gel Permeation Chromatography) method under the following conditions.

裝置:HLC-8120GPC(Tosoh(股)製造) Device: HLC-8120GPC (manufactured by Tosoh Co., Ltd.)

管柱:TSK-GELG2000HXL Column: TSK-GELG2000HXL

管柱溫度:40℃ Column temperature: 40℃

溶劑:四氫呋喃[THF] Solvent: Tetrahydrofuran [THF]

流速:1.0mL/min Flow rate: 1.0mL/min

受檢液體固形物成分濃度:0.001~0.01質量% Concentration of tested liquid solid content: 0.001~0.01% by mass

注入量:50μL Injection volume: 50μL

檢測器:RI(Refractive Index,折射率) Detector: RI (Refractive Index, refractive index)

校正用標準物質:TSK STANDARD POLYSTYRENE Standard material for calibration: TSK STANDARD POLYSTYRENE

F-40、F-4、F-288、A-2500、A-500 F-40, F-4, F-288, A-2500, A-500

(Tosoh(股)製造) (Manufactured by Tosoh Co., Ltd.)

[顏料分散液1之製備] [Preparation of Pigment Dispersion Liquid 1]

將13.0份之C.I.顏料綠58、 2.0份之丙烯酸系顏料分散劑、及 85.0份之丙二醇單甲醚乙酸酯 Add 13.0 parts of C.I. Pigment Green 58, 2.0 parts of acrylic pigment dispersant, and 85.0 parts of propylene glycol monomethyl ether acetate

混合,使用珠磨機,使顏料充分地分散,藉此獲得顏料分散液(A-1)。 Mixing and using a bead mill to fully disperse the pigment, thereby obtaining a pigment dispersion liquid (A-1).

[顏料分散液2之製備] [Preparation of Pigment Dispersion Liquid 2]

將5.0份之C.I.顏料黃185、 3.5份之丙烯酸系顏料分散劑、及 91.5份之丙二醇單甲醚乙酸酯 Add 5.0 parts of C.I. Pigment Yellow 185, 3.5 parts of acrylic pigment dispersant, and 91.5 parts of propylene glycol monomethyl ether acetate

混合,使用珠磨機,使顏料充分地分散,藉此獲得顏料分散液(A-2)。 By mixing and using a bead mill, the pigment is sufficiently dispersed to obtain a pigment dispersion liquid (A-2).

[顏料分散液3之製備] [Preparation of Pigment Dispersion Liquid 3]

將12.0份之C.I.顏料藍15:3、 4.0份之丙烯酸系顏料分散劑、及 84.0份之丙二醇單甲醚乙酸酯 12.0 parts of C.I. Pigment Blue 15:3, 4.0 parts of acrylic pigment dispersant, and 84.0 parts of propylene glycol monomethyl ether acetate

混合,使用珠磨機,使其充分地分散,藉此獲得顏料分散液(A-3)。 The mixture was mixed and a bead mill was used to sufficiently disperse the pigment dispersion liquid (A-3).

[顏料分散液4之製備] [Preparation of Pigment Dispersion 4]

將15.0份之C.I.顏料黃138、 4.5份之丙烯酸系顏料分散劑、及 80.5份之丙二醇單甲醚乙酸酯 15.0 parts of C.I. Pigment Yellow 138, 4.5 parts of acrylic pigment dispersant, and 80.5 parts of propylene glycol monomethyl ether acetate

混合,使用珠磨機,使顏料充分地分散,藉此獲得顏料分散液(A-4)。 By mixing and using a bead mill, the pigment is sufficiently dispersed to obtain a pigment dispersion liquid (A-4).

[顏料分散液5之製備] [Preparation of Pigment Dispersion Liquid 5]

將11.0份之C.I.顏料綠7、 3.0份之丙烯酸系顏料分散劑、及 86.0份之丙二醇單甲醚乙酸酯 Add 11.0 parts of C.I. Pigment Green 7, 3.0 parts of acrylic pigment dispersant, and 86.0 parts of propylene glycol monomethyl ether acetate

混合,使用珠磨機,使顏料充分地分散,藉此獲得顏料分散液(A-5)。 By mixing and using a bead mill, the pigment is sufficiently dispersed to obtain a pigment dispersion liquid (A-5).

實施例1~6及比較例1~2 Examples 1 to 6 and Comparative Examples 1 to 2

[著色感光性樹脂組合物之製備] [Preparation of colored photosensitive resin composition]

將表1所記載之成分混合,而獲得著色感光性樹脂組合物。以使著色感光性樹脂組合物之固形物成分成為表1之「固形物成分(%)」之方式,混合丙二醇單甲醚乙酸酯。 The components described in Table 1 were mixed to obtain a colored photosensitive resin composition. Propylene glycol monomethyl ether acetate was mixed so that the solid content of the colored photosensitive resin composition became the "solid content (%)" in Table 1.

Figure 104125450-A0202-12-0027-4
Figure 104125450-A0202-12-0027-4

於表1中,各成分係如下所述。 In Table 1, the components are as follows.

著色分散劑(A1):顏料分散液(A-1) Coloring dispersant (A1): pigment dispersion (A-1)

著色分散劑(A2):顏料分散液(A-2) Coloring dispersant (A2): Pigment dispersion (A-2)

著色分散劑(A3):顏料分散液(A-3) Coloring dispersant (A3): pigment dispersion (A-3)

著色分散劑(A4):顏料分散液(A-4) Coloring dispersant (A4): Pigment dispersion (A-4)

著色分散劑(A5):顏料分散液(A-5) Coloring dispersant (A5): pigment dispersion (A-5)

樹脂(B1):樹脂B-1溶液 Resin (B1): Resin B-1 solution

聚合性化合物(C1):二季戊四醇六丙烯酸酯(KAYARAD DPHA;日本化藥(股)製造) Polymerizable compound (C1): Dipentaerythritol hexaacrylate (KAYARAD DPHA; manufactured by Nippon Kayaku Co., Ltd.)

聚合起始劑D1:N-苯甲醯氧基-1-(4-苯基硫基苯基)辛烷-1-酮-2-亞胺(Irgacure OXE 01;BASF公司製造;O-醯基肟化合物) Polymerization initiator D1: N-benzyloxy-1-(4-phenylsulfanylphenyl)octane-1-one-2-imine (Irgacure OXE 01; manufactured by BASF; O-acyl Oxime compound)

[圖案之製作] [Pattern making]

藉由旋轉塗佈法,對2英吋見方之玻璃基板(Eagle XG;Corning公司製造)上塗佈著色感光性樹脂組合物後,以100℃預烘烤3分鐘。 冷卻後,將塗佈有該著色感光性樹脂組合物之基板與具有圖案之石英玻璃製光罩之間隔設為100μm,使用曝光機(TME-150RSK;TOPCON(股)製造),於大氣環境下,以150mJ/cm2之曝光量(365nm基準)進行光照射。作為光罩,係使用形成有線寬50μm(間距50μm)之線與間隙圖案之光罩。於光照射後,於24℃下,將上述塗膜浸漬至含有0.12%之非離子系界面活性劑及0.04%之氫氧化鉀之水系顯影液中60秒鐘而進行顯影,水洗後,於烘箱中,於230℃下進行30分鐘後烘烤,而獲得圖案。 The colored photosensitive resin composition was coated on a 2-inch square glass substrate (Eagle XG; manufactured by Corning Corporation) by a spin coating method, and then prebaked at 100°C for 3 minutes. After cooling, the distance between the substrate coated with the colored photosensitive resin composition and the patterned quartz glass photomask was set to 100 μm, and an exposure machine (TME-150RSK; manufactured by TOPCON (Stock)) was used in an atmospheric environment , Light irradiation is performed with an exposure amount of 150mJ/cm 2 (365nm standard). As the photomask, a photomask with a pattern of lines and gaps with a line width of 50μm (pitch 50μm) is used. After light irradiation, the above coating film is immersed in an aqueous developer containing 0.12% of non-ionic surfactant and 0.04% of potassium hydroxide at 24°C for 60 seconds to develop. After washing with water, place in an oven In, post-baking was performed at 230°C for 30 minutes to obtain a pattern.

[膜厚測定] [Film thickness measurement]

針對所獲得之圖案,使用膜厚測定裝置(DEKTAK3;日本真空技術(股)製造)測定膜厚。將結果示於表2。 For the obtained pattern, the film thickness was measured using a film thickness measuring device (DEKTAK3; manufactured by Nippon Vacuum Technology Co., Ltd.). The results are shown in Table 2.

[色度評價] [Chromaticity Evaluation]

針對所獲得之圖案,使用測色機(OSP-SP-200;Olympus(股)製造)測定分光,使用C光源之特性函數,測定CIE(International Commission on Illumination,國際照明委員會)之XYZ表色系統中之xy色度座標(x,y)與亮度Y。將結果示於表2。 For the obtained pattern, use a color measuring machine (OSP-SP-200; manufactured by Olympus Co., Ltd.) to measure the spectroscopy, and use the characteristic function of the C light source to measure the CIE (International Commission on Illumination, International Commission on Illumination) XYZ color system Among the xy chromaticity coordinates (x, y) and brightness Y. The results are shown in Table 2.

[圖案形狀] [Pattern shape]

針對所獲得之圖案之剖面,使用掃描型電子顯微鏡(S-4000;Hitachi High-Technologies(股)製造),觀察形狀。若為圖1(p1)所示之形狀,則評價為○,若為圖1(p2)所示之形狀,則評價為×。若為圖1(p1)所示之形狀,則存在當於圖案上積層無機膜時,不易於無機膜發生龜裂或剝離之傾向。將結果示於表2。 Regarding the cross section of the obtained pattern, a scanning electron microscope (S-4000; manufactured by Hitachi High-Technologies (stock)) was used to observe the shape. If it is the shape shown in FIG. 1 (p1), it is evaluated as ○, and if it is the shape shown in FIG. 1 (p2), it is evaluated as ×. If it is the shape shown in Figure 1 (p1), when the inorganic film is laminated on the pattern, the inorganic film tends to be less likely to crack or peel off. The results are shown in Table 2.

[剝離片之觀察] [Observation of peeling film]

於圖案之製作中,以目視觀察顯影後之顯影液。將於顯影液中未觀察到源自於著色感光性樹脂組合物之剝離片之情況評價為○,將觀察到剝離片之情況評價為×。若於顯影液中觀察到源自於著色感光性樹脂組合物之剝離片,則有以異物之形式附著至圖案上,而成為不良之原因之虞,故而欠佳。將結果示於表2。 In the pattern making, visually observe the developing solution after development. The case where the release sheet derived from the colored photosensitive resin composition was not observed in the developer was evaluated as ○, and the case where the release sheet was observed was evaluated as ×. If a release sheet derived from the colored photosensitive resin composition is observed in the developer, it may adhere to the pattern as a foreign matter, which may cause a defect, so it is not preferable. The results are shown in Table 2.

Figure 104125450-A0202-12-0029-5
Figure 104125450-A0202-12-0029-5

[產業上之可利用性] [Industrial availability]

能夠由本發明之著色感光性樹脂組合物製造亮度較高之彩色濾光片。 A color filter with high brightness can be manufactured from the colored photosensitive resin composition of the present invention.

Claims (5)

一種著色感光性樹脂組合物,其含有著色劑(A)、樹脂(B)、聚合性化合物(C)、及聚合起始劑(D),且作為著色劑(A),含有鹵化鋅酞菁顏料、C.I.顏料黃185、及C.I.顏料藍15:3或C.I.顏料藍15:4。 A colored photosensitive resin composition containing a coloring agent (A), a resin (B), a polymerizable compound (C), and a polymerization initiator (D), and as a coloring agent (A), containing a halogenated zinc phthalocyanine Pigment, CI Pigment Yellow 185, and CI Pigment Blue 15:3 or CI Pigment Blue 15:4. 如請求項1之著色感光性樹脂組合物,其中鹵化鋅酞菁顏料為C.I.顏料綠58。 The coloring photosensitive resin composition of claim 1, wherein the halogenated zinc phthalocyanine pigment is C.I. Pigment Green 58. 如請求項1之著色感光性樹脂組合物,其中C.I.顏料黃185之含量相對於聚合性化合物(C)100質量份為10~50質量份。 According to the coloring photosensitive resin composition of claim 1, wherein the content of C.I. Pigment Yellow 185 is 10-50 parts by mass relative to 100 parts by mass of the polymerizable compound (C). 如請求項1之著色感光性樹脂組合物,其中著色劑(A)之合計量相對於著色感光性樹脂組合物之固形物成分100質量份為20~50質量份。 The colored photosensitive resin composition of claim 1, wherein the total amount of the colorant (A) is 20-50 parts by mass relative to 100 parts by mass of the solid content of the colored photosensitive resin composition. 一種彩色濾光片,其係由如請求項1之著色感光性樹脂組合物而形成。 A color filter, which is formed of the coloring photosensitive resin composition of claim 1.
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