TWI632423B - Photosensitive resin composition - Google Patents

Photosensitive resin composition Download PDF

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TWI632423B
TWI632423B TW102142583A TW102142583A TWI632423B TW I632423 B TWI632423 B TW I632423B TW 102142583 A TW102142583 A TW 102142583A TW 102142583 A TW102142583 A TW 102142583A TW I632423 B TWI632423 B TW I632423B
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Taiwan
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meth
acrylate
parts
solvent
resin composition
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TW102142583A
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Chinese (zh)
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TW201435489A (en
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Hiroyuki Miura
三浦洋之
松浦龍一
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Sumitomo Chemical Company, Limited
住友化學股份有限公司
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Publication of TW201435489A publication Critical patent/TW201435489A/en
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/033Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09BORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B11/00Diaryl- or thriarylmethane dyes
    • C09B11/04Diaryl- or thriarylmethane dyes derived from triarylmethanes, i.e. central C-atom is substituted by amino, cyano, alkyl
    • C09B11/10Amino derivatives of triarylmethanes
    • C09B11/24Phthaleins containing amino groups ; Phthalanes; Fluoranes; Phthalides; Rhodamine dyes; Phthaleins having heterocyclic aryl rings; Lactone or lactame forms of triarylmethane dyes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/22Absorbing filters
    • G02B5/223Absorbing filters containing organic substances, e.g. dyes, inks or pigments
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/22Absorbing filters
    • G02B5/23Photochromic filters
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials For Photolithography (AREA)
  • Liquid Crystal (AREA)
  • Polymerisation Methods In General (AREA)
  • Optical Filters (AREA)

Abstract

本發明提供一種感光性樹脂組成物,係含有黏合劑樹脂(A)、聚合性化合物(B)、聚合起始劑(C)、體質顏料(D)及溶劑(E),其中,前述溶劑(E)係含有相對於前述溶劑(E)為70至99質量%之溶解度參數為8.0至9.1(cal/cm3)1/2的溶劑(E1),且含有相對於前述溶劑(E)為1至30質量%之溶解度參數為9.2至11.0(cal/cm3)1/2的溶劑(E2)。 The present invention provides a photosensitive resin composition containing a binder resin (A), a polymerizable compound (B), a polymerization initiator (C), an extender pigment (D), and a solvent (E), wherein the solvent ( E) It contains a solvent (E1) having a solubility parameter of 8.0 to 9.1 (cal / cm 3 ) 1/2 with respect to the aforementioned solvent (E), and contains 1 with respect to the aforementioned solvent (E). Solvent (E2) having a solubility parameter of 9.2 to 11.0 (cal / cm 3 ) 1/2 to 30% by mass.

Description

感光性樹脂組成物 Photosensitive resin composition

本發明有關感光性樹脂組成物。 The present invention relates to a photosensitive resin composition.

在液晶顯示面板、致電發光面板、電漿顯示面板、電子紙等顯示裝置中所使用的彩色濾光片等之圖案(pattern),係使用感光性樹脂組成物而製造。具體上,係藉由在基板上塗布感光性樹脂組成物後,乾燥,將得到之乾燥膜選擇性地曝光後,顯像來形成圖案。 Patterns of color filters and the like used in display devices such as liquid crystal display panels, telephone light-emitting panels, plasma display panels, and electronic paper are manufactured using a photosensitive resin composition. Specifically, a pattern is formed by applying a photosensitive resin composition on a substrate and then drying the resulting dried film after selectively exposing it to development.

作為如此的感光性樹脂組成物者,例如在日本特開2011-221310號公報中,係揭示含有黏合劑(binder)樹脂、聚合性化合物、聚合起始劑、體質顏料及溶劑的感光性樹脂組成物,且揭示使用丙二醇單甲基醚乙酸酯作為前述溶劑的例子。 As such a photosensitive resin composition, for example, Japanese Patent Application Laid-Open No. 2011-221310 discloses a photosensitive resin composition containing a binder resin, a polymerizable compound, a polymerization initiator, an extender pigment, and a solvent. And an example of using propylene glycol monomethyl ether acetate as the aforementioned solvent is disclosed.

由前述以往的感光性樹脂組成物所得到之乾燥膜,其低黏性(tack)有不一定能夠滿足的情形,又,由前述以往的感光性樹脂組成物所得到之圖案,其之硬度有不一定能夠滿足的情形。 The dry film obtained from the aforementioned conventional photosensitive resin composition may not necessarily have a low tack, and the pattern obtained from the aforementioned conventional photosensitive resin composition may have a hardness of Situations that may not be satisfied.

為了解決前述課題,本發明提供以下之[1]。 In order to solve the aforementioned problems, the present invention provides the following [1].

[1]一種感光性樹脂組成物,含有黏合劑樹脂(A)、聚合性化合物(B)、聚合起始劑(C)、體質顏料(D)及溶劑(E),其中,前述溶劑(E),係含有相對於前述溶劑(E)為70至99質量%之溶解度參數為8.0至9.1(cal/cm3)1/2的溶劑(E1),且含有相對於前述溶劑(E)為1至30質量%之溶解度參數為9.2至11.0(cal/cm3)1/2之溶劑(E2)。 [1] A photosensitive resin composition containing a binder resin (A), a polymerizable compound (B), a polymerization initiator (C), an extender pigment (D), and a solvent (E), wherein the solvent (E ), Containing 70 to 99% by mass of the solvent (E1) with a solubility parameter of 8.0 to 9.1 (cal / cm 3 ) 1/2 with respect to the aforementioned solvent (E), and containing 1 to the aforementioned solvent (E) A solvent (E2) having a solubility parameter of 9.2 to 11.0 (cal / cm 3 ) 1/2 to 30% by mass.

又,本發明提供以下之[2]至[10]。 The present invention also provides the following [2] to [10].

[2]如前述[1]所述之感光性樹脂組成物,其中,前述聚合起始劑(C)是肟化合物。 [2] The photosensitive resin composition according to the above [1], wherein the polymerization initiator (C) is an oxime compound.

[3]如前述[1]或[2]所述之感光性樹脂組成物,其中,前述黏合劑樹脂(A)的酸價是50至180mg-KOH/g。 [3] The photosensitive resin composition according to the above [1] or [2], wherein the acid value of the binder resin (A) is 50 to 180 mg-KOH / g.

[4]如前述[1]至[3]中任一項所述之感光性樹脂組成物,其中,前述黏合劑樹脂(A)的含量,相對於前述黏合劑樹脂(A)及前述聚合性化合物(B)的合計量100質量份,係30至80質量份。 [4] The photosensitive resin composition according to any one of the above [1] to [3], wherein the content of the binder resin (A) is relative to the binder resin (A) and the polymerizability The total amount of the compound (B) is 100 parts by mass, and is 30 to 80 parts by mass.

[5]如前述[1]至[4]中任一項所述之感光性樹脂組成物,其中,前述體質顏料(D)為氧化矽。 [5] The photosensitive resin composition according to any one of the above [1] to [4], wherein the extender pigment (D) is silicon oxide.

[6]如前述[1]至[5]中任一項所述之感光性樹脂組成物,其更含有著色劑。 [6] The photosensitive resin composition according to any one of the above [1] to [5], further containing a colorant.

[7]如前述[6]所述之感光性樹脂組成物,其中,著色劑是含有顏料的著色劑。 [7] The photosensitive resin composition according to the above [6], wherein the colorant is a coloring agent containing a pigment.

[8]如前述[6]或[7]所述之感光性樹脂組成物,其中,著色劑是含有染料的著色劑。 [8] The photosensitive resin composition according to the above [6] or [7], wherein the colorant is a coloring agent containing a dye.

[9]一種圖案,係藉由如前述[1]至[8]中任一項所述之感光性樹脂組成物所形成者。 [9] A pattern formed by the photosensitive resin composition according to any one of [1] to [8].

[10]一種顯示裝置,含有如前述[9]所述之圖案。 [10] A display device comprising the pattern according to the aforementioned [9].

若依本發明,可以提供一種感光性樹脂組 成物,其賦與有可滿足之低黏性之乾燥膜,並且,賦與有可滿足之硬度之圖案。 According to the present invention, a photosensitive resin group can be provided. The finished product is provided with a dry film having a satisfactory low viscosity and a pattern having a satisfactory hardness.

本發明的感光性樹脂組成物,係含有黏合劑樹脂(A)、聚合性化合物(B)、聚合起始劑(C)、體質顏料(D)及溶劑(E)。 The photosensitive resin composition of the present invention contains a binder resin (A), a polymerizable compound (B), a polymerization initiator (C), an extender pigment (D), and a solvent (E).

黏合劑樹脂(A)較佳含有:在具有源自不飽和羧酸之結構單元的加成聚合物(a)(以下,有稱為「(a)」的情形)中,與有環氧基之不飽和化合物(b)(以下,有稱為「(b)」的情形)反應之黏合劑樹脂(Aa)。 The binder resin (A) preferably contains an addition polymer (a) having a structural unit derived from an unsaturated carboxylic acid (hereinafter, referred to as "(a)") and an epoxy group. The unsaturated resin (b) (hereinafter referred to as "(b)") is a binder resin (Aa).

作為(a)者,例如,可以列舉,使不飽和羧酸(a1)(以下,有稱為「(a1)」的情形),與可與(a1)加成聚合的具有不飽和鍵之單體(a2)(以下,有稱為「(a2)」的情形),加成聚合而得到之加成聚合物。 Examples of (a) include, for example, an unsaturated carboxylic acid (a1) (hereinafter referred to as "(a1)") and a unit having an unsaturated bond capable of addition polymerization with (a1). (A2) (hereinafter referred to as "(a2)"), an addition polymer obtained by addition polymerization.

作為(a1)者,例如可以列舉:(甲基)丙烯酸、巴豆酸、鄰-乙烯基苯甲酸、間-乙烯基苯甲酸、對-乙烯基苯甲酸等不飽和單羧酸類;馬來酸、富馬酸、檸康酸、中康酸、衣康酸、3-乙烯基鄰苯二甲酸、4-乙烯基鄰苯二甲酸、3,4,5,6-四氫鄰苯二甲酸、1,2,3,6-四氫鄰苯二甲酸、二甲基四氫鄰苯二甲酸、1,4-環己烯二羧酸等不飽和二羧酸類;甲基-5-降冰片烯-2,3-二羧酸、5-羧基雙環[2.2.1]庚-2- 烯、5,6-二羧基雙環[2.2.1]庚-2-烯、5-羧基-5-甲基雙環[2.2.1]庚-2-烯、5-羧基-5-乙基雙環[2.2.1]庚-2-烯、5-羧基-6-甲基雙環[2.2.1]庚-2-烯、5-羧基-6-乙基雙環[2.2.1]庚-2-烯等含有羧基之雙環不飽和化合物類;琥珀酸單[2-(甲基)丙烯醯基氧基乙基]酯、鄰苯二甲酸單[2-(甲基)丙烯醯基氧基乙基]酯等2元以上的多元羧酸不飽和單[(甲基)丙烯醯基氧基烷基]酯類;α-(羥基甲基)丙烯酸等在同一分子中含有羥基及羧基之不飽和化合物類等。 Examples of (a1) include unsaturated monocarboxylic acids such as (meth) acrylic acid, crotonic acid, o-vinylbenzoic acid, m-vinylbenzoic acid, and p-vinylbenzoic acid; maleic acid, Fumaric acid, citraconic acid, mesaconic acid, itaconic acid, 3-vinyl phthalic acid, 4-vinyl phthalic acid, 3,4,5,6-tetrahydrophthalic acid, 1 Unsaturated dicarboxylic acids such as 2,2,3,6-tetrahydrophthalic acid, dimethyltetrahydrophthalic acid, 1,4-cyclohexene dicarboxylic acid; methyl-5-norbornene- 2,3-dicarboxylic acid, 5-carboxybicyclo [2.2.1] hept-2- Ene, 5,6-dicarboxybicyclo [2.2.1] hept-2-ene, 5-carboxy-5-methylbicyclo [2.2.1] hept-2-ene, 5-carboxy-5-ethylbicyclo [ 2.2.1] hept-2-ene, 5-carboxy-6-methylbicyclo [2.2.1] hept-2-ene, 5-carboxy-6-ethylbicyclo [2.2.1] hept-2-ene, etc. Bicyclic unsaturated compounds containing carboxyl groups; mono [2- (meth) acrylfluorenyloxyethyl] succinate, mono [2- (meth) acrylfluorenyloxyethyl] phthalate Unsaturated mono-((meth) acrylfluorenyloxyalkyl] esters of polybasic carboxylic acids of 2 or more members; unsaturated compounds such as α- (hydroxymethyl) acrylic acid containing hydroxyl and carboxyl groups in the same molecule .

其中,從共聚合反應性之觀點或是鹼溶解性之觀點而言適合使用(甲基)丙烯酸。 Among them, (meth) acrylic acid is preferably used from the viewpoint of copolymerization reactivity or the viewpoint of alkali solubility.

因此,在本說明書中,「(甲基)丙烯酸」是表示選自丙烯酸及甲基丙烯酸所成群組中至少1種。「(甲基)丙烯醯基」及「(甲基)丙烯酸酯」等記載也有同樣的意思。 Therefore, in the present specification, "(meth) acrylic acid" means at least one selected from the group consisting of acrylic acid and methacrylic acid. The terms "(meth) acrylfluorenyl" and "(meth) acrylate" have the same meaning.

作為(a2)者,例如可以列舉:(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸正丁酯、(甲基)丙烯酸二級丁酯、(甲基)丙烯酸三級丁酯等(甲基)丙烯酸烷酯類;(甲基)丙烯酸環己酯、(甲基)丙烯酸2-甲基環己酯、(甲基)丙烯酸三環[5.2.1.02.6]癸-8-酯(在該技術領域,是以(甲基)丙烯酸二環戊酯當作慣用名)、(甲基)丙烯酸二環戊基氧基乙酯、(甲基)丙烯酸異冰片酯等(甲基)丙烯酸環狀烷酯類;(甲基)丙烯酸苯酯、(甲基)丙烯酸苯甲酯等(甲基)丙烯 酸芳酯或芳烷酯類;馬來酸二乙酯、富馬酸二乙酯、依康酸二乙酯等二羧酸二酯;(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸2-羥基丙酯等羥基烷酯類;雙環[2.2.1]庚-2-烯、5-甲基雙環[2.2.1]庚-2-烯、5-乙基雙環[2.2.1]庚-2-烯、5-羥基雙環[2.2.1]庚-2-烯、5-羥基甲基雙環[2.2.1]庚-2-烯、5-(2’-羥基乙基)雙環[2.2.1]庚-2-烯、5-甲氧基雙環[2.2.1]庚-2-烯、5-乙氧基雙環[2.2.1]庚-2-烯、5,6-二羥基雙環[2.2.1]庚-2-烯、5,6-二(羥基甲基)雙環[2.2.1]庚-2-烯、5,6-二(2’-羥基乙基)雙環[2.2.1]庚-2-烯、5,6-二甲氧基雙環[2.2.1]庚-2-烯、5,6-二乙氧基雙環[2.2.1]庚-2-烯、5-羥基-5-甲基雙環[2.2.1]庚-2-烯、5-羥基-5-乙基雙環[2.2.1]庚-2-烯、5-羥基甲基-5-甲基雙環[2.2.1]庚-2-烯、5-三級丁氧基羰基雙環[2.2.1]庚-2-烯、5-環己氧基羰基雙環[2.2.1]庚-2-烯、5-苯氧基羰基雙環[2.2.1]庚-2-烯、5,6-雙(三級丁氧基羰基)雙環[2.2.1]庚-2-烯、5,6-雙(環己氧基羰基)雙環[2.2.1]庚-2-烯等雙環不飽和化合物類;N-苯基馬來醯亞胺、N-環己基馬來醯亞胺、N-苯甲基馬來醯亞胺、3-馬來醯亞胺苯甲酸N-琥珀醯亞胺酯、4-馬來醯亞胺丁酸N-琥珀醯亞胺酯、6-馬來醯亞胺己酸N-琥珀醯亞胺酯、3-馬來醯亞胺丙酸N-琥珀醯亞胺酯、N-(9-吖啶基)馬來醯亞胺等二羰基醯亞胺衍生物類;苯乙烯、α-甲基苯乙烯、間-甲基苯乙烯、對-甲基苯 乙烯、乙烯基甲苯、對-甲氧基苯乙烯、丙烯腈、甲基丙烯腈、氯化乙烯、氯化亞乙烯、丙烯醯胺、甲基丙烯醯胺、乙酸乙烯酯、1,3-丁二烯、異戊二烯、2,3-二甲基-1,3-丁二烯等。 Examples of (a2) include methyl (meth) acrylate, ethyl (meth) acrylate, n-butyl (meth) acrylate, secondary butyl (meth) acrylate, and (meth) acrylic acid. Tertiary butyl esters and other alkyl (meth) acrylates; cyclohexyl (meth) acrylate, 2-methylcyclohexyl (meth) acrylate, tricyclo (meth) acrylate [5.2.1.0 2.6 ] decyl -8-ester (in this technical field, dicyclopentyl (meth) acrylate is used as a common name), dicyclopentyloxyethyl (meth) acrylate, isobornyl (meth) acrylate, etc. Cycloalkyl (meth) acrylates; aryl (meth) acrylates or aralkyl esters such as phenyl (meth) acrylate, phenyl methyl (meth) acrylate; diethyl maleate, Fumar Dicarboxylic acid diesters such as diethyl acid and diethyl itaconic acid; hydroxyalkyl esters such as 2-hydroxyethyl (meth) acrylate and 2-hydroxypropyl (meth) acrylate; bicyclic [2.2.1 ] Hept-2-ene, 5-methylbicyclo [2.2.1] hept-2-ene, 5-ethylbicyclo [2.2.1] hept-2-ene, 5-hydroxybicyclo [2.2.1] hept- 2-ene, 5-hydroxymethylbicyclo [2.2.1] hept-2-ene, 5- (2'-hydroxyethyl) bicyclo [2.2.1] hept-2-ene, 5-methoxybicyclo [ 2. 2.1] hept-2-ene, 5-ethoxybicyclo [2.2.1] hept-2-ene, 5,6-dihydroxybicyclo [2.2.1] hept-2-ene, 5,6-di (hydroxyl (Methyl) bicyclo [2.2.1] hept-2-ene, 5,6-bis (2'-hydroxyethyl) bicyclo [2.2.1] hept-2-ene, 5,6-dimethoxybicyclo [ 2.2.1] hept-2-ene, 5,6-diethoxybicyclo [2.2.1] hept-2-ene, 5-hydroxy-5-methylbicyclo [2.2.1] hept-2-ene, 5-hydroxy-5-ethylbicyclo [2.2.1] hept-2-ene, 5-hydroxymethyl-5-methylbicyclo [2.2.1] hept-2-ene, 5-tert-butoxycarbonyl Bicyclo [2.2.1] hept-2-ene, 5-cyclohexyloxycarbonylbicyclo [2.2.1] hept-2-ene, 5-phenoxycarbonylbicyclo [2.2.1] hept-2-ene, 5 , 6-Bis (tertiary butoxycarbonyl) bicyclo [2.2.1] hept-2-ene, 5,6-bis (cyclohexyloxycarbonyl) bicyclo [2.2.1] hept-2-ene, etc. Saturated compounds; N-phenylmaleimide, N-cyclohexylmaleimide, N-benzylmaleimide, 3-maleimidebenzoate, N-succinimide Ester, 4-maleimide iminobutyric acid N-succinimide, 6-maleimide iminohexanoate N-succinimide, 3-maleimide propionate N-succinimide Derivatives such as amine esters, N- (9-acridyl) maleimide, etc. Class; styrene, α-methylstyrene, m-methylstyrene, p-methylstyrene, vinyl toluene, p-methoxystyrene, acrylonitrile, methacrylonitrile, vinyl chloride, Vinyl chloride, acrylamide, methacrylamide, vinyl acetate, 1,3-butadiene, isoprene, 2,3-dimethyl-1,3-butadiene, and the like.

(a2)是以具有選自三環癸烷骨架及三環癸烯骨架所成群組中之至少1種骨架,與乙烯性不飽和鍵之化合物(a2-1)(以下有稱為(a2-1)的情形)為佳。(a2)是(a2-1)的情形,可以抑制顯像所致之圖案之膜減少。 (a2) is a compound (a2-1) (hereinafter referred to as (a2) having at least one skeleton selected from the group consisting of a tricyclodecane skeleton and a tricyclodecene skeleton, and an ethylenically unsaturated bond; -1) is better. (a2) is the case of (a2-1), and it is possible to suppress the decrease in the film of the pattern due to the development.

在此,本說明書中之「三環癸烷骨架」及「三環癸烯骨架」分別是指以下之結構(各個鍵結鍵是在任意點)。 Here, the "tricyclodecane skeleton" and "tricyclodecene skeleton" in this specification refer to the following structures (each bond is at an arbitrary point).

作為(a2-1)者,可以列舉:(甲基)丙烯酸二環戊酯、(甲基)丙烯酸二環戊烯酯、(甲基)丙烯酸二環戊基氧基乙酯、(甲基)丙烯酸二環戊烯基氧基乙酯。此等可以分別單獨或是組合2種以上而使用。 Examples of (a2-1) include dicyclopentyl (meth) acrylate, dicyclopentenyl (meth) acrylate, dicyclopentyloxyethyl (meth) acrylate, and (methyl) Dicyclopentenyloxyethyl acrylate. These can be used individually or in combination of 2 or more types.

作為(b)者,例如可以列舉:具有鏈式烯烴經環氧化的結構與乙烯性不飽和鍵之單體(b-1)(以下有稱為「(b-1)」的情形)、具有環烯烴經環氧化的結構與乙烯性不飽和鍵之單體(b-2)(以下有稱為「(b-2)」的情形)。作為(b)者,從反應性的觀點而言是以(b-1)為佳。 Examples of (b) include a monomer (b-1) having an epoxidized structure of a chain olefin and an ethylenically unsaturated bond (hereinafter referred to as "(b-1)"), Cycloolefin epoxidized structure and ethylenically unsaturated monomer (b-2) (hereinafter referred to as "(b-2)"). As (b), (b-1) is preferred from the viewpoint of reactivity.

作為(b-1)者,可以列舉:(甲基)丙烯酸縮水甘油酯、(甲基)丙烯酸β-甲基縮水甘油酯、(甲基)丙烯酸β-乙基縮水甘油酯、縮水甘油基乙烯基醚、鄰-乙烯基苯甲基縮水甘油基醚、間-乙烯基苯甲基縮水甘油基醚、對-乙烯基苯甲基縮水甘油基醚、α-甲基-鄰-乙烯基苯甲基縮水甘油基醚、α-甲基-間-乙烯基苯甲基縮水甘油基醚、α-甲基-對-乙烯基苯甲基縮水甘油基醚、2,3-雙(縮水甘油基氧基甲基)苯乙烯、2,4-雙(縮水甘油基氧基甲基)苯乙烯、2,5-雙(縮水甘油基氧基甲基)苯乙烯、2,6-雙(縮水甘油基氧基甲基)苯乙烯、2,3,4-參(縮水甘油基氧基甲基)苯乙烯、2,3,5-參(縮水甘油基氧基甲基)苯乙烯、2,3,6-參(縮水甘油基氧基甲基)苯乙烯、3,4,5-參(縮水甘油基氧基甲基)苯乙烯、2,4,6-參(縮水甘油基氧基甲基)苯乙烯、日本特開平7-248625號公報中所記載的化合物等。 Examples of (b-1) include glycidyl (meth) acrylate, β-methylglycidyl (meth) acrylate, β-ethylglycidyl (meth) acrylate, and glycidylethylene Ether, o-vinylbenzyl glycidyl ether, m-vinylbenzyl glycidyl ether, p-vinylbenzyl glycidyl ether, α-methyl-o-vinylbenzyl Glycidyl ether, α-methyl-m-vinylbenzyl glycidyl ether, α-methyl-p-vinylbenzyl glycidyl ether, 2,3-bis (glycidyloxy Methyl) styrene, 2,4-bis (glycidyloxymethyl) styrene, 2,5-bis (glycidyloxymethyl) styrene, 2,6-bis (glycidyl) Oxymethyl) styrene, 2,3,4-gins (glycidyloxymethyl) styrene, 2,3,5-gins (glycidyloxymethyl) styrene, 2,3, 6-gins (glycidyloxymethyl) styrene, 3,4,5-gins (glycidyloxymethyl) styrene, 2,4,6-gins (glycidyloxymethyl) Styrene, compounds described in Japanese Patent Application Laid-Open No. 7-248625, and the like.

作為(b-2)者,可以列舉:乙烯基環己烯單氧化物、1,2-環氧基-4-乙烯基環己烷(例如,Celloxide2000;Daicel(股)公司製)、丙烯酸3,4-環氧基環己基甲酯(例如,Cyclomer-A400;Daicel(股)公司製)、甲基丙烯酸3,4-環氧基環己基甲酯(例如,Cyclomer-M100;Daicel(股)公司製)、式(I)所示化合物、式(II)所示化合物等。 Examples of (b-2) include vinylcyclohexene monooxide, 1,2-epoxy-4-vinylcyclohexane (for example, Celloxide2000; manufactured by Daicel Corporation), and acrylic acid 3 1,4-epoxycyclohexyl methyl ester (for example, Cyclomer-A400; manufactured by Daicel (Stock) Corporation), 3,4-epoxy cyclohexyl methyl methacrylate (for example, Cyclomer-M100; Daicel (stock) Company), a compound represented by formula (I), a compound represented by formula (II), and the like.

[式(I)及式(II)中,R1及R2互相獨立表示氫原子、或是碳數 1至4的烷基,在該烷基中所含的氫原子可以被羥基取代。 [In the formula (I) and the formula (II), R 1 and R 2 independently represent a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and the hydrogen atom contained in the alkyl group may be substituted with a hydroxyl group.

X1及X2互相獨立表示單鍵、-R3-、*-R3-O-、*-R3-S-、*-R3-NH-。 X 1 and X 2 each independently represents a single bond, -R 3 -, * - R 3 -O -, * - R 3 -S -, * - R 3 -NH-.

R3表示碳數1至6的烷二基。 R 3 represents an alkyldiyl group having 1 to 6 carbon atoms.

*表示與O的鍵結鍵]。 * Indicates a bond with O].

黏合劑樹脂(Aa)可經過二階段步驟而製造。此情形,例如,可參考在文獻「高分子合成的實驗法」(大津隆行著發行所;化學同人(股)第1版第1刷1972年3月1日發行)中記載的方法,及在日本特開2001-89533號公報中記載的方法等而製造。 The adhesive resin (Aa) can be produced through a two-step process. In this case, for example, reference may be made to the method described in the document "Experimental Method of Polymer Synthesis" (by Otsu Takayuki Publishing House; Chemical Co., Ltd., 1st edition, 1st issue, March 1, 1972), and It is manufactured by a method described in Japanese Patent Application Laid-Open No. 2001-89533.

黏合劑樹脂(Aa)的製造中,首先,作為第一階段,得到(a1)與(a2)的加成聚合物(a)。具體上,例示如:將預定量的(a1)及(a2)、聚合起始劑與溶劑等放入反應容器中,藉由氮氣取代氧氣,於脫氧的環境中,攪拌、加熱、保溫的方法。在此使用的聚合起始劑與溶劑等,並無特別限定,可以使用該領域技術通常使用者中的任何一種。作為聚合起始劑者,例如,可以列舉:偶氮化合物(2,2’-偶氮雙異丁腈、2,2’-偶氮雙(2,4-二甲基戊腈)等)或有機過氧化物(苯甲醯過氧化物等),作為溶劑者,只要可以溶解各單體者即可,可以使用後述溶劑等作為著色感光性樹脂組成物的溶劑。 In the production of the binder resin (Aa), first, as the first stage, (a1) and (a2) addition polymers (a) are obtained. Specifically, for example, a method of putting a predetermined amount of (a1) and (a2), a polymerization initiator, a solvent, and the like into a reaction container, replacing nitrogen with nitrogen, and stirring, heating, and holding in a deoxidized environment. . The polymerization initiator, solvent, and the like used herein are not particularly limited, and any of those skilled in the art can be used. Examples of the polymerization initiator include azo compounds (2,2'-azobisisobutyronitrile, 2,2'-azobis (2,4-dimethylvaleronitrile), etc.) or The organic peroxide (such as benzamidine peroxide) may be any solvent as long as it can dissolve each monomer, and a solvent such as a solvent described later can be used as a solvent for the colored photosensitive resin composition.

又,得到之加成聚合物,可以直接使用反應後的溶液,也可以使用經濃縮或是稀釋的溶液,也可以使用以再沉澱等方法作成固體(粉體)而取出者。 In addition, the obtained addition polymer may be directly used as a solution after the reaction, a concentrated or diluted solution, or a solid (powder) obtained by reprecipitation or the like and taken out.

源自(a1)及(a2)的結構單元之比率,相對於構成加成聚合物(a)之全結構單元之合計莫耳數,以在下述範圍為佳。 The ratio of the structural units derived from (a1) and (a2) is preferably within the following range relative to the total number of moles of all the structural units constituting the addition polymer (a).

源自(a1)的結構單元:5至50莫耳%,更佳的是10至45莫耳% Structural unit derived from (a1): 5 to 50 mole%, more preferably 10 to 45 mole%

源自(a2)的結構單元:50至95莫耳%,更佳的是55至90莫耳% Structural unit derived from (a2): 50 to 95 mole%, more preferably 55 to 90 mole%

其次,作為第2階段者,將得到之加成聚合物所具有的源自(a1)之結構單元中之羧基的一部分,與(b)反應。因為反應性高,未反應的(b)不易殘留,故作為(b)者是以(b-1)為佳。 Next, as the second stage, a part of the carboxyl group in the structural unit (a1) derived from the obtained addition polymer is reacted with (b). Because of its high reactivity, unreacted (b) is less likely to remain, so (b) is preferred as (b).

具體上,持續上述,將燒瓶內之環境氣體的氮氣以空氣取代,將(b)設成相對於(a1)的莫耳數為5至80莫耳%,將反應觸媒(例如參(二甲基胺基甲基)酚等)設成相對於(a1)、(b)及(a2)的合計量為0.001至5質量%,並且將聚合禁止劑(例如,氫醌等)設成相對於(a1)、(b)及(a2)的合計量為0.001至5質量%,置入燒瓶內,通常,在60至130℃,反應1至10小時,可以得到黏合劑樹脂(Aa)。又,與聚合條件同樣,可以考慮製造設備、由聚合產生的發熱量等,適當調整置入方法及反應溫度。 Specifically, continuing the above, the nitrogen gas in the ambient gas in the flask was replaced with air, (b) was set to 5 to 80 mol% relative to (a1), and the reaction catalyst (for example, reference (2) Methylaminomethyl) phenol, etc.) is set to 0.001 to 5% by mass based on the total amount of (a1), (b), and (a2), and a polymerization inhibitor (for example, hydroquinone, etc.) is set to be relative The total amount of (a1), (b), and (a2) is 0.001 to 5% by mass, and it is placed in a flask. Usually, it is reacted at 60 to 130 ° C for 1 to 10 hours to obtain an adhesive resin (Aa). In addition, similarly to the polymerization conditions, the production equipment, the amount of heat generated by polymerization, and the like can be considered, and the insertion method and reaction temperature can be appropriately adjusted.

又,此時,(b)的莫耳數,相對於(a1)的莫耳數,是以設成10至75莫耳%為佳,更佳是15至70莫耳%。藉由將(b)的莫耳數設成在此範圍內,有保存安定性、耐溶劑性及耐熱性的平衡性變良好之傾向。 At this time, the molar number of (b) is preferably set to 10 to 75 molar%, more preferably 15 to 70 molar% relative to the molar number of (a1). By setting the molar number of (b) within this range, there is a tendency that the balance between storage stability, solvent resistance and heat resistance becomes good.

作為黏合劑樹脂(Aa)者,可以列舉:(甲基)丙烯酸/(甲基)丙烯酸二環戊酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應的樹脂、(甲基)丙烯酸/(甲基)丙烯酸苯甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸環己酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/苯乙烯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/N-環己基馬來醯亞胺的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、巴豆酸/(甲基)丙烯酸二環戊酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、巴豆酸/(甲基)丙烯酸苯甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、巴豆酸/(甲基)丙烯酸環己酯共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、巴豆酸/苯乙烯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、巴豆酸/巴豆酸甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、巴豆酸/N-環己基馬來醯亞胺的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂;馬來酸/(甲基)丙烯酸二環戊酯共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、馬來酸/(甲基)丙烯酸苯甲酯共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、馬來酸/(甲基)丙烯酸環己酯共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、馬來酸/苯乙烯的共聚合物與(甲基)丙 烯酸縮水甘油酯反應之樹脂、馬來酸/馬來酸甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、馬來酸/N-環己基馬來醯亞胺的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂;(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸二環戊酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸苯甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸環己酯共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/苯乙烯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/N-環己基馬來醯亞胺的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂;(甲基)丙烯酸/(甲基)丙烯酸二環戊酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸苯甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸環己酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/苯乙烯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/N-環己基馬來醯亞 胺的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂;巴豆酸/(甲基)丙烯酸二環戊酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、巴豆酸/(甲基)丙烯酸苯甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、巴豆酸/(甲基)丙烯酸環己酯共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、巴豆酸/苯乙烯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、巴豆酸/巴豆酸甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、巴豆酸/N-環己基馬來醯亞胺的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂;馬來酸/(甲基)丙烯酸二環戊酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、馬來酸/(甲基)丙烯酸苯甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、馬來酸/(甲基)丙烯酸環己酯共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、馬來酸/苯乙烯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、馬來酸/馬來酸甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、馬來酸/N-環己基馬來醯亞胺的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂;(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸二環戊酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹 脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸苯甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸環己酯共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/苯乙烯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/N-環己基馬來醯亞胺的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂;再者,作為黏合劑樹脂(Aa)者,係以在和(a1)與(a2-1)與(a2-1)以外的(a2)共聚合而得到之加成聚合物中,與(b)反應而得之樹脂為更佳。黏合劑樹脂(Aa)藉由上述之結構,而所得到之圖案有與基板的密著性及耐溶劑性優良之傾向。 Examples of the binder resin (Aa) include a resin in which a copolymer of (meth) acrylic acid / dicyclopentyl (meth) acrylate reacts with glycidyl (meth) acrylate, and (meth) acrylic acid / Resin reacted with copolymer of benzyl (meth) acrylate and glycidyl (meth) acrylate, copolymer of (meth) acrylic acid / cyclohexyl (meth) acrylate and (meth) acrylic acid Resin reacted with glyceride, copolymer of (meth) acrylic acid / styrene and glycidyl (meth) acrylate reacted, copolymer of (meth) acrylic acid / methyl (meth) acrylate and ( Resin reacted with glycidyl (meth) acrylate, Resin reacted with copolymer of (meth) acrylic acid / N-cyclohexylmaleimide and glycidyl (meth) acrylate, crotonic acid / (methyl) Resin reacted with a copolymer of dicyclopentyl acrylate and glycidyl (meth) acrylate, resin reacted with a copolymer of crotonic acid / benzyl (meth) acrylate and glycidyl (meth) acrylate, Crotonic acid / cyclohexyl (meth) acrylate copolymer with glycidyl (meth) acrylate Resin, crotonic acid / styrene copolymer reacted with glycidyl (meth) acrylate, resin crotonic acid / methyl crotonic acid copolymer reacted with glycidyl (meth) acrylate, croton Acid / N-cyclohexylmaleimide co-polymer reacted with glycidyl (meth) acrylate resin; maleic acid / dicyclopentyl (meth) acrylate copolymer with (meth) acrylic acid Glycidyl-resin-reactive resin, maleic acid / benzyl (meth) acrylate copolymer, and glycidyl (meth) acrylate-reactive resin, maleic acid / cyclohexyl (meth) acrylate copolymer Resin reacted with glycidyl (meth) acrylate, maleic acid / styrene copolymer and (meth) acrylic acid Resin reacted with glycidyl enoate, copolymer of maleic acid / methyl maleate reacted with glycidyl (meth) acrylate, copolymer of maleic acid / N-cyclohexylmaleimide Resin in which polymer reacts with glycidyl (meth) acrylate; resin in which (meth) acrylic acid / maleic anhydride / dicyclopentyl (meth) acrylate reacts with glycidyl (meth) acrylate Resin of (meth) acrylic acid / maleic anhydride / benzyl (meth) acrylate copolymer reacting with glycidyl (meth) acrylate, (meth) acrylic acid / maleic anhydride / (meth) Resin reacted with cyclohexyl acrylate copolymer and glycidyl (meth) acrylate, resin reacted with (meth) acrylic acid / maleic anhydride / styrene copolymer with glycidyl (meth) acrylate, ( (Meth) acrylic acid / maleic anhydride / methyl (meth) acrylate copolymer reacted with glycidyl (meth) acrylate, (meth) acrylic acid / maleic anhydride / N-cyclohexyl maleic acid Resin reacted with copolymer of imine and glycidyl (meth) acrylate; (meth) acrylic acid / (meth) propylene Dicyclopentyl ester copolymer copolymer with 3,4-epoxycyclohexyl methyl methacrylate resin, (meth) acrylic acid / benzyl (meth) acrylate copolymer and methacrylic acid 3 , 4-epoxycyclohexyl methyl ester resin, resin of (meth) acrylic acid / (meth) acrylic acid cyclohexyl co-polymer reacted with 3,4-epoxy cyclohexyl methyl methacrylate , Resins in which (meth) acrylic acid / styrene copolymers react with 3,4-epoxycyclohexyl methyl methacrylate, (meth) acrylic acid / methyl (meth) acrylate copolymers, and Resin for 3,4-epoxycyclohexyl methyl methacrylate reaction, (meth) acrylic acid / N-cyclohexyl malea Resin of amine copolymer with 3,4-epoxycyclohexyl methacrylate; crotonic acid / dicyclopentyl (meth) acrylate copolymer with 3,4-epoxy methacrylate Cyclohexyl methyl ester resin, crotonic acid / (meth) acrylic acid benzyl co-polymer and 3,4-epoxy cyclohexyl methyl methacrylate resin, crotonic acid / (methyl) Cyclohexyl acrylate copolymer with 3,4-epoxycyclohexyl methyl methacrylate resin, crotonic acid / styrene copolymer and 3,4-epoxy cyclohexyl methyl methacrylate Resin for reaction, copolymer of crotonic acid / methyl crotonic acid and 3,4-epoxycyclohexyl methacrylate, resin of crotonic acid / N-cyclohexylmaleimide Resin reacted with 3,4-epoxycyclohexyl methyl methacrylate; maleic acid / dicyclopentyl (meth) acrylate copolymer and 3,4-epoxy cyclohexyl methyl methacrylate Resin for ester reaction, resin for copolymerization of maleic acid / benzyl (meth) acrylate with 3,4-epoxycyclohexyl methacrylate, maleic acid / (meth) propyl Cyclohexyl acid copolymer copolymer with 3,4-epoxycyclohexyl methyl methacrylate resin, maleic acid / styrene copolymer and 3,4-epoxy cyclohexyl methyl methacrylate Resin for ester reaction, resin for reaction of maleic acid / methyl maleate copolymer with 3,4-epoxycyclohexyl methyl methacrylate, maleic acid / N-cyclohexyl maleimide Co-polymer with 3,4-epoxycyclohexyl methyl methacrylate resin; (meth) acrylic acid / maleic anhydride / (meth) acrylic acid dicyclopentyl ester copolymer and methacrylic acid 3,4-epoxycyclohexyl methyl ester reaction tree Resin, (meth) acrylic acid / maleic anhydride / benzyl (meth) acrylate copolymer, and 3,4-epoxycyclohexyl methyl methacrylate resin, (meth) acrylic acid / male Resins of maleic anhydride / cyclohexyl (meth) acrylate copolymer with 3,4-epoxy cyclohexyl methyl methacrylate, (meth) acrylic acid / maleic anhydride / styrene copolymer and 3,4-epoxy cyclohexyl methyl methacrylate reaction resin, (meth) acrylic acid / maleic anhydride / methyl (meth) acrylate copolymer and 3,4-epoxy methacrylate Resin for reaction with cyclohexyl methyl ester, resin for reaction of (meth) acrylic acid / maleic anhydride / N-cyclohexyl maleimide with 3,4-epoxy cyclohexyl methyl methacrylate; The binder resin (Aa) is an addition polymer obtained by copolymerizing with (a2) and (a2) other than (a1) and (a2-1) and (a2-1). ) The resin obtained by the reaction is more preferable. The adhesive resin (Aa) has the above-mentioned structure, and the obtained pattern tends to have excellent adhesion to the substrate and solvent resistance.

在加成聚合物(a)為由(a1)與(a2-1)與(a2-1)以外之(a2)所成的情形,源自(a2-1)及(a2-1)以外之(a2)的結構單元比率(源自(a2-1)之結構單元:源自(a2-1)以外之(a2)之結構單元)是以10:90至60:40為佳,以10:90至40:60為較佳,以10:90至30:70為更佳。 In the case where the addition polymer (a) is made of (a2) other than (a1) and (a2-1) and (a2-1), it is derived from something other than (a2-1) and (a2-1) The structural unit ratio of (a2) (structural units derived from (a2-1): structural units derived from (a2) other than (a2-1)) is preferably 10:90 to 60:40, and 10: 90 to 40:60 is more preferable, and 10:90 to 30:70 is more preferable.

在將(a1)與(a2-1)與(a2-1)以外之(a2)共聚合而得到之加成聚合物中,與(b)反應而得到之樹脂者,可以列舉:(甲基)丙烯酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯 酸苯甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸環己酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸二環戊酯/苯乙烯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸二環戊酯/N-環己基馬來醯亞胺的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂;巴豆酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸苯甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、巴豆酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸環己酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、巴豆酸/(甲基)丙烯酸二環戊酯/苯乙烯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、巴豆酸/(甲基)丙烯酸二環戊酯/巴豆酸甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、巴豆酸/(甲基)丙烯酸二環戊酯/N-環己基馬來醯亞胺的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂;馬來酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸苯甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、馬來酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸環己酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、馬來酸/(甲基)丙烯酸二環戊酯/苯乙烯的共聚合物與(甲基)丙烯 酸縮水甘油酯反應之樹脂、馬來酸/(甲基)丙烯酸二環戊酯/馬來酸甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、馬來酸/(甲基)丙烯酸二環戊酯/N-環己基馬來醯亞胺的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂;(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸苯甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸環己酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸二環戊酯/苯乙烯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸甲酯的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸二環戊酯/N-環己基馬來醯亞胺的共聚合物與(甲基)丙烯酸縮水甘油酯反應之樹脂;(甲基)丙烯酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸苯甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸環己酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸二環戊酯/苯乙烯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸甲酯的共聚合物與甲基丙烯酸3,4-環氧基環 己基甲酯反應之樹脂、(甲基)丙烯酸/(甲基)丙烯酸二環戊酯/N-環己基馬來醯亞胺的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂;巴豆酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸苯甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、巴豆酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸環己酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、巴豆酸/(甲基)丙烯酸二環戊酯/苯乙烯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、巴豆酸/(甲基)丙烯酸二環戊酯/巴豆酸甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、巴豆酸/(甲基)丙烯酸二環戊酯/N-環己基馬來醯亞胺的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂;馬來酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸苯甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、馬來酸/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸環己酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、馬來酸/(甲基)丙烯酸二環戊酯/苯乙烯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、馬來酸/(甲基)丙烯酸二環戊酯/馬來酸甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、馬來酸/(甲基)丙烯酸二環戊酯/N-環己基馬來醯亞胺的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂;(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸二環戊酯/ (甲基)丙烯酸苯甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸環己酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸二環戊酯/苯乙烯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸二環戊酯/(甲基)丙烯酸甲酯的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂、(甲基)丙烯酸/馬來酸酐/(甲基)丙烯酸二環戊酯/N-環己基馬來醯亞胺的共聚合物與甲基丙烯酸3,4-環氧基環己基甲酯反應之樹脂;此等黏合劑樹脂(A),可以分別單獨使用,也可以組合2種以上而使用。 Among the addition polymers obtained by copolymerizing (a1) with (a2-1) and (a2) other than (a2-1), resins obtained by reacting with (b) include: (methyl ) Acrylic acid / (meth) acrylic acid dicyclopentyl ester / (meth) acrylic acid Resin reacted with copolymer of benzyl acid and glycidyl (meth) acrylate, copolymer of (meth) acrylic acid / dicyclopentyl (meth) acrylate / cyclohexyl (meth) acrylate and Resin reacted with (meth) glycidyl, resin reacted with (meth) acrylic acid / dicyclopentyl / (meth) acrylate / styrene and glycidyl (meth) acrylate, ) Resin reacted with acrylic acid / dicyclopentyl (meth) acrylate / methyl (meth) acrylate copolymer and glycidyl (meth) acrylate, (meth) acrylic acid / (meth) acrylic acid bicyclic Resin reacted with amyl ester / N-cyclohexyl maleimide copolymer and glycidyl (meth) acrylate; crotonic acid / dicyclopentyl (meth) acrylate / benzyl (meth) acrylate Resins reacted with glycidyl (meth) acrylate, copolymers of crotonic acid / dicyclopentyl (meth) acrylate / cyclohexyl (meth) acrylate, and glycidyl (meth) acrylate Ester reaction resin, crotonic acid / dicyclopentyl (meth) acrylate / styrene copolymer and glycidyl (meth) acrylate Resin, crotonic acid / dicyclopentyl (meth) acrylate / methyl crotonate copolymer and glycidyl (meth) acrylate reacting resin, crotonic acid / dicyclopentyl (meth) acrylate / Resin of N-cyclohexylmaleimide co-polymer reacted with glycidyl (meth) acrylate; co-polymer of maleic acid / dicyclopentyl (meth) acrylate / benzyl (meth) acrylate Resin reacting polymer with glycidyl (meth) acrylate, copolymer of maleic acid / dicyclopentyl (meth) acrylate / cyclohexyl (meth) acrylate, and glycidyl (meth) acrylate Resin, maleic acid / dicyclopentyl (meth) acrylate / styrene copolymer and (meth) propylene Resin reacted with glycidyl acid, resin reacted with maleic acid / dicyclopentyl (meth) acrylate / methyl maleate and glycidyl (meth) acrylate reacted, maleic acid / (formaldehyde) (Resin) copolymer of dicyclopentyl acrylate / N-cyclohexylmaleimide and glycidyl (meth) acrylate; (meth) acrylic acid / maleic anhydride / (meth) acrylic acid di Resin for the reaction of cyclopentyl ester / benzyl (meth) acrylate copolymer with glycidyl (meth) acrylate, (meth) acrylic acid / maleic anhydride / dicyclopentyl (meth) acrylate / ( Copolymer of cyclohexyl methacrylate copolymer with glycidyl (meth) acrylate, copolymer of (meth) acrylic acid / maleic anhydride / dicyclopentyl (meth) acrylate / styrene Resin reacted with glycidyl (meth) acrylate, copolymer of (meth) acrylic acid / maleic anhydride / dicyclopentyl (meth) acrylate / (meth) acrylate, and (meth) acrylic acid Resin of glycidyl ester, copolymer of (meth) acrylic acid / maleic anhydride / dicyclopentyl (meth) acrylate / N-cyclohexylmaleimide, and ( Base) glycidyl acrylate resin; (meth) acrylic acid / dicyclopentyl (meth) acrylate / benzyl (meth) acrylate copolymer with 3,4-epoxy methacrylate Hexyl methyl ester resin, copolymer of (meth) acrylic acid / dicyclopentyl (meth) acrylate / cyclohexyl (meth) acrylate, and 3,4-epoxy cyclohexyl methyl methacrylate Resin for reaction, resin for (meth) acrylic acid / dicyclopentyl (meth) acrylate / styrene copolymer with 3,4-epoxy cyclohexyl methyl methacrylate, (meth) acrylic acid / (Meth) acrylate dicyclopentyl ester / (meth) acrylate copolymer and 3,4-epoxy methacrylate ring Hexyl methyl ester resin, copolymer of (meth) acrylic acid / dicyclopentyl (meth) acrylate / N-cyclohexylmaleimide, and 3,4-epoxycyclohexyl methacrylate Resin for ester reaction; resin for crotonic acid / dicyclopentyl (meth) acrylate / benzyl (meth) acrylate reacted with 3,4-epoxycyclohexyl methacrylate, croton Acid / dicyclopentyl (meth) acrylate / cyclohexyl (meth) acrylate copolymer, 3,4-epoxycyclohexyl methyl methacrylate resin, crotonic acid / (meth) Copolymer of dicyclopentyl acrylate / styrene copolymer with 3,4-epoxycyclohexyl methyl methacrylate, co-polymer of crotonic acid / dicyclopentyl (meth) acrylate / methyl crotonic acid Resin in which polymer reacts with 3,4-epoxycyclohexyl methyl methacrylate, co-polymer of crotonic acid / dicyclopentyl (meth) acrylate / N-cyclohexylmaleimide and methyl 3,4-epoxy cyclohexyl methyl acrylate resin; maleic acid / dicyclopentyl (meth) acrylate / benzyl (meth) acrylate copolymer with 3,4-methacrylic acid Epoxy cyclohexyl Resin for methyl ester reaction, resin for maleic acid / dicyclopentyl (meth) acrylate / cyclohexyl (meth) acrylate copolymer and 3,4-epoxycyclohexyl methyl methacrylate Resin of maleic acid / dicyclopentyl (meth) acrylate / styrene copolymer reacted with 3,4-epoxycyclohexyl methyl methacrylate, maleic acid / (meth) acrylic acid dipolymer Resin for the reaction of cyclopentyl ester / methyl maleate copolymer with 3,4-epoxy cyclohexyl methyl methacrylate, maleic acid / dicyclopentyl (meth) acrylate / N-cyclohexyl Resin in which the copolymer of maleimide and 3,4-epoxycyclohexyl methyl methacrylate is reacted; (meth) acrylic acid / maleic anhydride / (meth) acrylic acid dicyclopentyl ester / Resin for the copolymer of benzyl (meth) acrylate and 3,4-epoxycyclohexyl methyl methacrylate, (meth) acrylic acid / maleic anhydride / (meth) acrylic acid dicyclopentyl ester / (Meth) acrylic acid cyclohexyl copolymer copolymer with 3,4-epoxycyclohexyl methyl methacrylate resin, (meth) acrylic acid / maleic anhydride / (meth) acrylic acid dicyclopentyl Ester / styrene copolymer with 3,4-epoxycyclohexyl methyl methacrylate resin, (meth) acrylic acid / maleic anhydride / (meth) acrylic acid dicyclopentyl ester / (methyl Resin of methyl acrylate copolymer reacted with 3,4-epoxy cyclohexyl methacrylate, (meth) acrylic acid / maleic anhydride / (meth) acrylic acid dicyclopentyl ester / N-cyclo Hexyl maleimide copolymers with 3,4-epoxy cyclohexyl methyl methacrylate resins; these binder resins (A) can be used individually or in combination of two or more use.

黏合劑樹脂(A)的聚苯乙烯換算之重量平均分子量(Mw),較佳是8×103至100×103,更佳是10×103至50×103。黏合劑樹脂(A)的重量平均分子量(Mw),在前述的範圍內時,感光性樹脂組成物的塗布性及乾燥膜之低黏性有變更良好的傾向,且在顯像時不易發生膜減少,再者,有在顯像時非畫素部分的移除性良好之傾向。 The polystyrene equivalent weight average molecular weight (Mw) of the binder resin (A) is preferably 8 × 10 3 to 100 × 10 3 , and more preferably 10 × 10 3 to 50 × 10 3 . When the weight average molecular weight (Mw) of the binder resin (A) is within the aforementioned range, the coatability of the photosensitive resin composition and the low viscosity of the dry film tend to change well, and the film is unlikely to occur during development. Decreasing, and furthermore, there is a tendency that the removal property of the non-pixel portion is good during development.

黏合劑樹脂(A)的酸價,較佳是30至200mg-KOH/g,更佳是40至190mg-KOH/g,再更佳是50至180mg-KOH/g。酸價是測定作為用以中和1g黏合劑樹脂(A)而必需的氫氧化鉀量(mg)之值,可使用氫氧化鉀水溶液藉由滴定而求得。 The acid value of the binder resin (A) is preferably 30 to 200 mg-KOH / g, more preferably 40 to 190 mg-KOH / g, and even more preferably 50 to 180 mg-KOH / g. The acid value is a value for measuring the amount (mg) of potassium hydroxide necessary to neutralize 1 g of the binder resin (A), and can be obtained by titration using an aqueous potassium hydroxide solution.

黏合劑樹脂(A),雖是以只由前述之黏合劑樹脂(Aa)所構成者為佳,但也可以含有其他樹脂。作為如此之樹脂者,可以列舉:環氧樹脂、丙烯酸樹脂、胺基甲酸乙酯(urethane)樹脂、聚酯樹脂、聚醯亞胺樹脂、聚烯烴樹脂、酚醛清漆樹脂、聚胺樹脂等。 Although the binder resin (A) is preferably composed of only the above-mentioned binder resin (Aa), it may contain other resins. Examples of such a resin include epoxy resin, acrylic resin, urethane resin, polyester resin, polyimide resin, polyolefin resin, novolac resin, and polyamine resin.

在黏合劑樹脂(A)含有黏合劑樹脂(Aa)以外的樹脂之情形,黏合劑樹脂(Aa)的含量,相對於黏合劑樹脂(A),是以20至99質量%為佳,以50至99質量%為更佳。 In the case where the binder resin (A) contains a resin other than the binder resin (Aa), the content of the binder resin (Aa) is preferably 20 to 99% by mass relative to the binder resin (A), and is preferably 50 to 50% by mass. It is more preferably 99% by mass.

聚合性化合物(B),只要為可藉由因光或是熱的作用而由聚合起始劑(C)產生之活性自由基、酸等開始聚合之化合物即可,無特別限定者。作為聚合性化合物(B)者,可以列舉具有聚合性的碳-碳不飽和鍵之化合物等,較佳是使用單官能單體、2官能單體、3官能以上的多官能單體。又,作為聚合性化合物(B)者,是以使用不具酸性基之化合物為佳。 The polymerizable compound (B) is not particularly limited as long as it is a compound capable of starting polymerization by an active radical, an acid, or the like generated from the polymerization initiator (C) by the action of light or heat. Examples of the polymerizable compound (B) include compounds having a polymerizable carbon-carbon unsaturated bond, and a monofunctional monomer, a bifunctional monomer, and a trifunctional or higher polyfunctional monomer are preferably used. As the polymerizable compound (B), a compound having no acidic group is preferably used.

作為單官能單體者,可以列舉:壬基苯基卡必醇(甲基)丙烯酸酯、(甲基)丙烯酸2-羥基-3-苯氧基丙酯、2-乙基己基卡必醇(甲基)丙烯酸酯、(甲基)丙烯酸2-羥基乙酯、N-乙烯基吡咯啶酮等。 Examples of the monofunctional monomer include nonylphenylcarbitol (meth) acrylate, 2-hydroxy-3-phenoxypropyl (meth) acrylate, and 2-ethylhexylcarbitol ( (Meth) acrylate, 2-hydroxyethyl (meth) acrylate, N-vinylpyrrolidone and the like.

作為2官能單體者,可以列舉:1,6-己烷二醇二(甲基)丙烯酸酯、乙二醇二(甲基)丙烯酸酯、新戊二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、雙酚A的雙(丙烯醯氧基乙基)醚、3-甲基戊烷二醇二(甲基)丙烯酸 酯、三環癸烷二甲醇二(甲基)丙烯酸酯等。 Examples of the bifunctional monomer include 1,6-hexanediol di (meth) acrylate, ethylene glycol di (meth) acrylate, neopentyl glycol di (meth) acrylate, and Ethylene glycol di (meth) acrylate, bis (propyleneoxyethyl) ether of bisphenol A, 3-methylpentanediol di (meth) acrylic acid Esters, tricyclodecanedimethanol di (meth) acrylate, and the like.

作為3官能以上的多官能單體者,可以列舉:三羥甲基丙烷三(甲基)丙烯酸酯、新戊四醇三(甲基)丙烯酸酯、新戊四醇四(甲基)丙烯酸酯、二新戊四醇五(甲基)丙烯酸酯、二新戊四醇六(甲基)丙烯酸酯、新戊四醇三(甲基)丙烯酸酯與酸酐的反應物、二新戊四醇五(甲基)丙烯酸酯與酸酐的反應物、大阪有機化學工業(股)製的V#1000、V#802、STAR-501,及共榮社化學(股)製的UA-306H、UA-306T、UA-306I,第一工業製藥(股)製的New Frontier R-1150等胺基甲酸乙酯丙烯酸酯等。其中,以使用2官能單體、3官能以上的多官能單體為佳。 Examples of the trifunctional or higher polyfunctional monomer include trimethylolpropane tri (meth) acrylate, neopentaerythritol tri (meth) acrylate, neopentaerythritol tetra (meth) acrylate Dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, reactant of neopentaerythritol tri (meth) acrylate and anhydride, dipentaerythritol penta Reactant of (meth) acrylic acid ester and anhydride, V # 1000, V # 802, STAR-501 made by Osaka Organic Chemical Industry Co., Ltd., and UA-306H, UA-306T made by Kyoeisha Chemical Co., Ltd. , UA-306I, New Frontier R-1150 manufactured by Daiichi Kogyo Pharmaceutical Co., Ltd. and other urethane acrylates. Among them, it is preferable to use a bifunctional monomer and a trifunctional or higher polyfunctional monomer.

又,作為聚合性化合物(B)者,也可以使用下述的聚合性化合物。 As the polymerizable compound (B), the following polymerizable compounds can also be used.

此等聚合性化合物(B),可以分別單獨使用,也可以組合2種以上來使用。 These polymerizable compounds (B) may be used alone or in combination of two or more kinds.

聚合性化合物(B)的含量,相對於感光性樹脂組成物的固形分,以1至50質量%為佳,以5至30質量%為更佳。又,黏合劑樹脂(A)的含量,相對於黏合劑性樹脂(A)及聚合性化合物(B)的合計量100質量份,以30至80質量份為佳。 The content of the polymerizable compound (B) is preferably 1 to 50% by mass, and more preferably 5 to 30% by mass based on the solid content of the photosensitive resin composition. The content of the binder resin (A) is preferably 30 to 80 parts by mass based on 100 parts by mass of the total amount of the binder resin (A) and the polymerizable compound (B).

在此,固形分是指除去在感光性樹脂組成物中所含有的溶劑之總成分。 Here, the solid content means a total component excluding a solvent contained in the photosensitive resin composition.

黏合劑樹脂(A)的含量在前述範圍時,由於乾燥膜的黏性更被抑制,且有得到無色不均之彩色濾光片的傾向故而為佳。 When the content of the binder resin (A) is in the aforementioned range, the viscosity of the dried film is more suppressed, and a color filter having colorless unevenness is more likely to be obtained.

聚合起始劑(C),係用以開始聚合聚合性化合物(B)之產生活性自由基、酸等之化合物,且可為藉由光的作用而產生活性自由基、酸等的光聚合起始劑,也可為藉由熱的作用而產生活性自由基、酸等的熱聚合起始劑,但以光聚合起始劑為佳,以藉由光的作用而產生活性自由基之光自由基聚合起始劑為更佳。 The polymerization initiator (C) is a compound for starting the polymerization of the polymerizable compound (B) to generate active radicals, acids, and the like, and can be used for photopolymerization to generate active radicals, acids, and the like by the action of light. The initiator may also be a thermal polymerization initiator that generates active radicals, acids, and the like by the action of heat, but a photopolymerization initiator is preferred in order to generate the free radicals by the action of light. A radical polymerization initiator is more preferred.

聚合起始劑(C),係以肟化合物為佳。藉由使用此種聚合起始劑,感光性樹脂組成物變高感度,又使 用此等形成的膜在解像度及耐溶劑性優良之圖案良好。再者,藉由併用聚合起始助劑(C-1),得到之感光性樹脂組成物變更高感度,使用此等形成彩色濾光片之際的生產性提高,故佳。 The polymerization initiator (C) is preferably an oxime compound. By using such a polymerization initiator, the photosensitive resin composition becomes more sensitive, and The film formed by these methods has a good pattern with excellent resolution and solvent resistance. Further, it is preferable that the photosensitive resin composition obtained by using the polymerization initiation aid (C-1) in combination has a high sensitivity, and productivity is improved when a color filter is formed by using these.

作為肟化合物者,可以列舉:N-苯甲醯基氧基-1-(4-苯基硫基苯基)丁烷-1-酮-2-亞胺、N-乙醯氧基-1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]乙烷-1-亞胺、N-乙醯氧基-1-[9-乙基-6-{2-甲基-4-(3,3-二甲基-2,4-二氧雜環戊基甲基氧基)苯甲醯基}-9H-咔唑-3-基]乙烷-1-亞胺等。也可以使用Irgacure(註冊商標)OXE-01、OXE-02(以上,日本BASF(股)製)、N-1919(ADEKA(股)製)等市售品。其中是以N-苯甲醯氧基-1-(4-苯基硫基苯基)辛烷-1-酮-2-亞胺(下式)為佳。 Examples of the oxime compound include N-benzyloxy-1- (4-phenylthiophenyl) butane-1-one-2-imine, and N-ethoxyl-1- [9-Ethyl-6- (2-methylbenzylfluorenyl) -9H-carbazol-3-yl] ethane-1-imine, N-ethoxyl-1- [9-ethyl -6- {2-methyl-4- (3,3-dimethyl-2,4-dioxolylmethyloxy) benzyl} -9H-carbazol-3-yl] Ethane-1-imine and the like. Commercially available products such as Irgacure (registered trademark) OXE-01, OXE-02 (above, made in Japan by BASF (stock)), N-1919 (made by ADEKA (stock)) can also be used. Among them, N-benzyloxy-1- (4-phenylthiophenyl) octan-1-one-2-imine (the following formula) is preferred.

又,作為肟化合物以外的聚合起始劑者,可以列舉:聯咪唑化合物、苯烷基酮(alkylphenone)化合物、三化合物、醯基膦氧化合物等。 Examples of the polymerization initiator other than the oxime compound include a biimidazole compound, an alkylphenone compound, and Compounds, fluorenylphosphine oxide compounds, and the like.

作為聯咪唑化合物者,可以列舉:2,2’-雙(2-氯苯基)-4,4’,5,5’-四苯基聯咪唑、2,2’-雙(2,3-二氯苯基)-4,4’,5,5’-四苯基聯咪唑(例如,參考日本特開平6-75372號公報、日本特開平6-75373號公報等)、2,2’-雙(2-氯苯 基)-4,4’,5,5’-四苯基聯咪唑、2,2’-雙(2-氯苯基)-4,4’,5,5’-四(烷氧基苯基)聯咪唑、2,2’-雙(2-氯苯基)-4,4’,5,5’-四(二烷氧基苯基)聯咪唑、2,2’-雙(2-氯苯基)-4,4’,5,5’-四(三烷氧基苯基)聯咪唑(例如,參照日本特公昭48-38403號公報、日本特開昭62-174204號公報等)、4,4’,5,5’-位的苯基為由烷氧羰基所取代的咪唑化合物(例如,參考日本特開平7-10913號公報等)等。較佳可以列舉:2,2’-雙(2-氯苯基)-4,4’,5,5’-四苯基聯咪唑、2,2’-雙(2,3-二氯苯基)-4,4’,5,5’-四苯基聯咪唑、2,2’-雙(2,4-二氯苯基)-4,4’,5,5’-四苯基聯咪唑。 Examples of the biimidazole compound include 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'-tetraphenylbiimidazole and 2,2'-bis (2,3- Dichlorophenyl) -4,4 ', 5,5'-tetraphenylbiimidazole (for example, refer to Japanese Patent Laid-Open No. 6-75372, Japanese Patent Laid-Open No. 6-75373, etc.), 2,2'- Bis (2-chlorobenzene Phenyl) -4,4 ', 5,5'-tetraphenylbiimidazole, 2,2'-bis (2-chlorophenyl) -4,4', 5,5'-tetrakis (alkoxyphenyl) ) Biimidazole, 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'-tetrakis (dialkoxyphenyl) biimidazole, 2,2'-bis (2-chloro Phenyl) -4,4 ', 5,5'-tetrakis (trialkoxyphenyl) biimidazole (for example, refer to Japanese Patent Publication No. 48-38403, Japanese Patent Publication No. 62-174204, etc.), The phenyl group at the 4,4 ', 5,5'-position is an imidazole compound substituted with an alkoxycarbonyl group (for example, refer to Japanese Patent Application Laid-Open No. 7-10913). Preferred examples include: 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'-tetraphenylbiimidazole, 2,2'-bis (2,3-dichlorophenyl) ) -4,4 ', 5,5'-tetraphenylbiimidazole, 2,2'-bis (2,4-dichlorophenyl) -4,4', 5,5'-tetraphenylbiimidazole .

作為苯烷基酮化合物者,可以列舉:二乙氧基苯乙酮、2-甲基-2-(N-嗎啉基)-1-(4-甲基硫基苯基)丙烷-1-酮、2-二甲基胺基-1-(4-(N-嗎啉基)苯基)-2-苯甲基丁烷-1-酮、2-二甲基胺基-1-(4-(N-嗎啉基)苯基)-2-(4-甲基苯基甲基)丁烷-1-酮、2-羥基-2-甲基-1-苯基丙烷-1-酮、苯甲基二甲基縮醛、2-羥基-2-甲基-1-[4-(2-羥基乙氧基)苯基]丙烷-1-酮、1-羥基環己基苯基酮、2-羥基-2-甲基-1-(4-異丙烯基苯基)丙烷-1-酮的寡聚物等,較佳是2-甲基-2-(N-嗎啉基)-1-(4-甲基硫基苯基)丙烷-1-酮、2-二甲基胺基-1-(4-(N-嗎啉基)苯基)-2-苯甲基丁烷-1-酮等。也可以使用Irgacure(註冊商標)369、907(以上,日本BASF(股)製)等市售品。 Examples of the phenalkyl ketone compound include diethoxyacetophenone, 2-methyl-2- (N-morpholinyl) -1- (4-methylthiophenyl) propane-1- Ketone, 2-dimethylamino-1- (4- (N-morpholinyl) phenyl) -2-benzylbutane-1-one, 2-dimethylamino-1- (4 -(N-morpholinyl) phenyl) -2- (4-methylphenylmethyl) butane-1-one, 2-hydroxy-2-methyl-1-phenylpropane-1-one, Benzyl dimethyl acetal, 2-hydroxy-2-methyl-1- [4- (2-hydroxyethoxy) phenyl] propane-1-one, 1-hydroxycyclohexylphenyl ketone, 2 -Hydroxy-2-methyl-1- (4-isopropenylphenyl) propane-1-one, etc., preferably 2-methyl-2- (N-morpholinyl) -1- (4-methylthiophenyl) propane-1-one, 2-dimethylamino-1- (4- (N-morpholinyl) phenyl) -2-benzylbutane-1- Ketones, etc. Commercial products such as Irgacure (registered trademark) 369, 907 (above, made by Japan BASF (stock)) can also be used.

作為三化合物者,可以列舉:2,4-雙(三氯甲基)-6-(4-甲氧基苯基)-1,3,5-三、2,4-雙(三氯甲基)-6- (4-甲氧基萘基)-1,3,5-三、2,4-雙(三氯甲基)-6-胡椒基-1,3,5-三、2,4-雙(三氯甲基)-6-(4-甲氧基苯乙烯基)-1,3,5-三、2,4-雙(三氯甲基)-6-[2-(5-甲基呋喃-2-基)乙烯基]-1,3,5-三、2,4-雙(三氯甲基)-6-[2-(呋喃-2-基)乙烯基]-1,3,5-三、2,4-雙(三氯甲基)-6-[2-(4-二乙基胺基-2-甲基苯基)乙烯基]-1,3,5-三、2,4-雙(三氯甲基)-6-[2-(3,4-二甲氧基苯基)乙烯基]-1,3,5-三等。 As three Examples of compounds include 2,4-bis (trichloromethyl) -6- (4-methoxyphenyl) -1,3,5-tris , 2,4-bis (trichloromethyl) -6- (4-methoxynaphthyl) -1,3,5-tris , 2,4-bis (trichloromethyl) -6-piperyl-1,3,5-tri , 2,4-bis (trichloromethyl) -6- (4-methoxystyryl) -1,3,5-tris , 2,4-bis (trichloromethyl) -6- [2- (5-methylfuran-2-yl) vinyl] -1,3,5-tris , 2,4-bis (trichloromethyl) -6- [2- (furan-2-yl) vinyl] -1,3,5-tris , 2,4-bis (trichloromethyl) -6- [2- (4-diethylamino-2-methylphenyl) vinyl] -1,3,5-tris , 2,4-bis (trichloromethyl) -6- [2- (3,4-dimethoxyphenyl) vinyl] -1,3,5-tris Wait.

作為醯基膦氧化物化合物者,可以列舉2,4,6-三甲基苯甲醯基二苯基膦氧化物等。也可以使用Irgacure(註冊商標)819(日本BASF(股)製)等市售品。 Examples of the fluorenylphosphine oxide compound include 2,4,6-trimethylbenzylidenediphenylphosphine oxide and the like. Commercial products such as Irgacure (registered trademark) 819 (manufactured by BASF (Japan)) can also be used.

又,作為肟化合物、聯咪唑化合物、苯烷基酮化合物、三化合物及醯基膦氧化物以外的聚合起始劑(C)者,可以列舉:苯偶姻、苯偶姻甲基醚、苯偶姻乙基醚、苯偶姻異丙基醚、苯偶姻異丁基醚等苯偶姻化合物;二苯甲酮、鄰-苯甲醯基苯甲酸甲酯、4-苯基二苯甲酮、4-苯甲醯基-4’-甲基二苯基硫化物、3,3’,4,4’-四(三級丁基過氧羰基)二苯甲酮、2,4,6-三甲基二苯甲酮等二苯甲酮化合物;9,10-菲醌、2-乙基蒽醌、樟腦醌等醌化合物;10-丁基-2-氯吖啶酮、二苯甲醯、苯基乙醛酸甲酯、二茂鈦化合物等。 In addition, as an oxime compound, a biimidazole compound, a benzoyl ketone compound, Examples of the polymerization initiator (C) other than the compound and the fluorenylphosphine oxide include benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, and benzoin Benzoin compounds such as isobutyl ether; benzophenone, o-benzylidene methyl benzoate, 4-phenylbenzophenone, 4-benzylidene-4'-methyldiphenyl Sulfides, benzophenone compounds such as 3,3 ', 4,4'-tetrakis (tert-butylperoxycarbonyl) benzophenone, 2,4,6-trimethylbenzophenone; 9 ,, 10-phenanthrenequinone, 2-ethylanthraquinone, camphorquinone and other quinone compounds; 10-butyl-2-chloroacridone, benzophenone, methyl phenylglyoxylate, titanocene compound and the like.

此等聚合起始劑(C),可以分別單獨使用,也可以組合2種以上使用。 These polymerization initiators (C) may be used alone or in combination of two or more kinds.

聚合起始劑(C)的含量,相對於樹脂(A)及聚合性化合物(B)的合計量100質量份,較佳是0.1至80質量 份,更佳是1至60質量份。聚合起始劑的合計量在此範圍內時,可以高感度地形成圖案,圖案的耐藥品性、機械強度、表面平滑性有變良好之傾向。 The content of the polymerization initiator (C) is preferably 0.1 to 80 parts by mass based on 100 parts by mass of the total amount of the resin (A) and the polymerizable compound (B). Parts, more preferably 1 to 60 parts by mass. When the total amount of the polymerization initiator is within this range, a pattern can be formed with high sensitivity, and the chemical resistance, mechanical strength, and surface smoothness of the pattern tend to be good.

聚合起始劑(C)是以與聚合起始助劑(C-1)(尤其是胺類)組合而使用為佳。聚合起始助劑(C-1)是用以促進藉由聚合起始劑(C)而開始聚合的聚合性化合物的聚合而使用的化合物,或是增感劑。 The polymerization initiator (C) is preferably used in combination with a polymerization initiator (C-1) (especially an amine). The polymerization initiation aid (C-1) is a compound or a sensitizer used to promote the polymerization of a polymerizable compound that is polymerized by the polymerization initiator (C).

作為聚合起始助劑(C-1)者,可以列舉:胺化合物、噻唑啉化合物、烷氧基蒽化合物、噻噸酮(thioxanthone)化合物、羧酸化合物、硫醇化合物等。 Examples of the polymerization initiation aid (C-1) include amine compounds, thiazoline compounds, alkoxyanthracene compounds, thioxanthone compounds, carboxylic acid compounds, and thiol compounds.

作為胺化合物者,可以列舉:三乙醇胺、甲基二乙醇胺、三異丙醇胺、4-二甲基胺基苯甲酸甲酯、4-二甲基胺基苯甲酸乙酯、4-二甲基胺基苯甲酸異戊酯、苯甲酸2-二甲基胺基乙酯、4-二甲基胺基苯甲酸2-乙基己酯、N,N-二甲基對甲苯胺、4,4’-雙(二甲基胺)二苯甲酮(通稱米希勒酮)、4,4’-雙(二乙基胺)二苯甲酮、4,4’-雙(乙基甲基胺基)二苯甲酮等,其中以4,4’-雙(二乙基胺)二苯甲酮為佳。也可以使用EAB-F(保土谷化學工業(股)製)等市售品。 Examples of the amine compound include triethanolamine, methyldiethanolamine, triisopropanolamine, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, and 4-dimethylamine. Isoamylaminobenzoate, 2-dimethylaminoethyl benzoate, 2-ethylhexyl 4-dimethylaminobenzoate, N, N-dimethyl-p-toluidine, 4, 4'-bis (dimethylamine) benzophenone (commonly known as Michler's ketone), 4,4'-bis (diethylamine) benzophenone, 4,4'-bis (ethylmethyl) Among them, 4,4'-bis (diethylamine) benzophenone is preferred. Commercial products such as EAB-F (manufactured by Hodogaya Chemical Industry Co., Ltd.) can also be used.

作為噻唑啉化合物者,可以列舉式(III-1)至式(III-3)所示化合物等。 Examples of the thiazoline compound include compounds represented by formula (III-1) to formula (III-3).

作為烷氧基蒽化合物者,可以列舉:9,10-二甲氧基蒽、2-乙基-9,10-二甲氧基蒽、9,10-二乙氧基蒽、2-乙基-9,10-二乙氧基蒽、9,10-二丁氧基蒽、2-乙基-9,10-二丁氧基蒽等。 Examples of the alkoxyanthracene compound include 9,10-dimethoxyanthracene, 2-ethyl-9,10-dimethoxyanthracene, 9,10-diethoxyanthracene, and 2-ethyl -9,10-diethoxyanthracene, 9,10-dibutoxyanthracene, 2-ethyl-9,10-dibutoxyanthracene, and the like.

作為噻噸酮化合物者,可以列舉:2-異丙基噻噸酮、4-異丙基噻噸酮、2,4-二乙基噻噸酮、2,4-二氯噻噸酮、1-氯-4-丙氧基噻噸酮等。 Examples of the thioxanthone compound include 2-isopropylthioxanthone, 4-isopropylthioxanthone, 2,4-diethylthioxanthone, 2,4-dichlorothioxanthone, 1 -Chloro-4-propoxythioxanthone and the like.

作為羧酸化合物者,可以列舉:苯基硫基乙酸、甲基苯基硫基乙酸、乙基苯基硫基乙酸、甲基乙基苯基硫基乙酸、二甲基苯基硫基乙酸、甲氧基苯基硫基乙酸、二甲氧基苯基硫基乙酸、氯苯基硫基乙酸、二氯苯基硫基乙酸、N-苯基甘胺酸、苯氧基乙酸、萘基硫乙酸、N-萘基甘胺酸、萘氧基乙酸等。 Examples of the carboxylic acid compound include phenylthioacetic acid, methylphenylthioacetic acid, ethylphenylthioacetic acid, methylethylphenylthioacetic acid, dimethylphenylthioacetic acid, Methoxyphenylthioacetic acid, dimethoxyphenylthioacetic acid, chlorophenylthioacetic acid, dichlorophenylthioacetic acid, N-phenylglycine, phenoxyacetic acid, naphthylthio Acetic acid, N-naphthyl glycine, naphthyloxyacetic acid, and the like.

作為硫醇化合物者,可以列舉:2-硫基唑、2-硫基噻唑、2-硫基苯并咪唑、2-硫基苯并噻唑、2-硫基苯并唑、2-硫基菸鹼酸、2-硫基吡啶、2-硫基吡啶-3- 醇、2-硫基吡啶、2-硫基吡啶-3-醇、2-硫基吡啶-N-氧化物、4-胺基-6-羥基-2-硫基嘧啶、4-胺基-6-羥基-2-硫基嘧啶、4-胺基-2-硫基嘧啶、6-胺基-5-亞硝基-2-硫尿嘧啶、4,5-二胺基-6-羥基-2-硫基嘧啶、4,6-二胺基-2-硫基嘧啶、2,4-二胺基-6-硫基嘧啶、4,6-二羥基-2-硫基嘧啶、4,6-二甲基-2-硫基嘧啶、4-羥基-2-硫基-6-甲基嘧啶、4-羥基-2-硫基-6-丙基嘧啶、2-硫基-4-甲基嘧啶、2-硫基嘧啶、2-硫尿嘧啶、3,4,5,6-四氫嘧啶-2-硫醇、4,5-二苯基咪唑-2-硫醇、2-硫基咪唑、2-硫基-1-甲基咪唑、4-胺基-3-聯胺基-5-硫基-1,2,4-三唑、3-胺基-5-硫基-1,2,4-三唑、2-甲基-4H-1,2,4-三唑-3-硫醇、4-甲基-4H-1,2,4-三唑-3-硫醇、3-硫基-1H-1,2,4-三唑-3-硫醇、2-胺基-5-硫基-1,3,4-噻二唑、5-胺基-1,3,4-噻二唑-2-硫醇、2,5-二硫基-1,3,4-噻二唑、(呋喃-2-基)甲烷硫醇、2-硫基-5-噻唑酮、2-硫基噻唑啉、2-硫基-4(3H)-喹唑啉酮、1-苯基-1H-四唑-5-硫醇、2-喹啉硫醇、2-硫基-5-甲基苯并咪唑、2-硫基-5-硝基苯并咪唑、6-胺基-2-硫基苯并噻唑、5-氯-2-硫基苯并噻唑、6-乙氧基-2-硫基苯并噻唑、6-硝基-2-硫基苯并噻唑、2-硫基萘并咪唑、2-硫基萘并唑、3-硫基-1,2,4-三唑、4-胺基-6-硫基吡唑并[2,4-d]吡啶、2-胺基-6-嘌呤硫醇、6-硫基嘌呤、4-硫基-1H-吡唑并[2,4-d]嘧啶、己烷二硫醇、癸烷二硫醇、1,4-雙(甲基硫基)苯、丁二醇雙(3-硫基丙酸酯)、丁二醇雙(3-硫基乙酸酯)、乙二醇雙(3-硫基乙酸酯)、三羥甲基丙烷參(3-硫基乙酸酯)、丁二醇雙(3-硫基丙酸酯)、三羥甲基丙烷參(3-硫基丙酸酯)、三羥甲 基丙烷參(3-硫基乙酸酯)、新戊四醇肆(3-硫基丙酸酯)、新戊四醇肆(3-硫基乙酸酯)、參羥基乙基參(3-硫基丙酸酯)、新戊四醇肆(3-硫基丁酸酯)、1,4-雙(3-硫基丁基氧基)丁烷等。 Examples of the thiol compound include: 2-thio group Azole, 2-thiothiazole, 2-thiobenzimidazole, 2-thiobenzothiazole, 2-thiobenzo Azole, 2-thionicotinic acid, 2-thiopyridine, 2-thiopyridine-3-ol, 2-thiopyridine, 2-thiopyridin-3-ol, 2-thiopyridine-N- Oxide, 4-amino-6-hydroxy-2-thiopyrimidine, 4-amino-6-hydroxy-2-thiopyrimidine, 4-amino-2-thiopyrimidine, 6-amino-5 -Nitroso-2-thiouracil, 4,5-diamino-6-hydroxy-2-thiopyrimidine, 4,6-diamino-2-thiopyrimidine, 2,4-diamino -6-thiopyrimidine, 4,6-dihydroxy-2-thiopyrimidine, 4,6-dimethyl-2-thiopyrimidine, 4-hydroxy-2-thio-6-methylpyrimidine, 4 -Hydroxy-2-thio-6-propylpyrimidine, 2-thio-4-methylpyrimidine, 2-thiopyrimidine, 2-thiouracil, 3,4,5,6-tetrahydropyrimidine-2 -Thiol, 4,5-diphenylimidazole-2-thiol, 2-thioimidazole, 2-thio-1-methylimidazole, 4-amino-3-diamino-5-thio -1,2,4-triazole, 3-amino-5-thio-1,2,4-triazole, 2-methyl-4H-1,2,4-triazole-3-thiol, 4-methyl-4H-1,2,4-triazole-3-thiol, 3-thio-1H-1,2,4-triazole-3-thiol, 2-amino-5-thio -1,3,4-thiadiazole, 5-amino-1,3,4-thiadiazole-2-thiol, 2,5-dithio-1,3,4-thiadiazole, (Furan-2-yl) methanethiol, 2-thio-5- Thiazolone, 2-thiothiazoline, 2-thio-4 (3H) -quinazolinone, 1-phenyl-1H-tetrazol-5-thiol, 2-quinoline thiol, 2-thio 5-methylbenzimidazole, 2-thio-5-nitrobenzimidazole, 6-amino-2-thiobenzothiazole, 5-chloro-2-thiobenzothiazole, 6- Ethoxy-2-thiobenzothiazole, 6-nitro-2-thiobenzothiazole, 2-thionaphthoimidazole, 2-thionaphtho Azole, 3-thio-1,2,4-triazole, 4-amino-6-thiopyrazolo [2,4-d] pyridine, 2-amino-6-purinethiol, 6- Thiopurine, 4-thio-1H-pyrazolo [2,4-d] pyrimidine, hexanedithiol, decanedithiol, 1,4-bis (methylthio) benzene, butane Alcohol bis (3-thiopropionate), butanediol bis (3-thioacetate), ethylene glycol bis (3-thioacetate), trimethylolpropane ginseng (3-thiopropionate) Methyl acetate), butanediol bis (3-thiopropionate), trimethylolpropane ginseng (3-thiopropionate), trimethylolpropane ginseng (3-thioacetate) ), Neopentaerythritol (3-thiopropionate), neopentaerythritol (3-thioacetate), hydroxyethyl ginseng (3-thiopropionate), neopentyl Alcohol (3-thiobutyrate), 1,4-bis (3-thiobutyloxy) butane, and the like.

在使用聚合起始助劑(C-1)的情形,其含量,相對於樹脂(A)及聚合性化合物(B)的合計量100質量份,較佳是0.01至50質量份,更佳是0.1至40質量份。又,相對於每1莫耳聚合起始劑(C),較佳是含有0.01至10莫耳,更佳是0.01至5莫耳。聚合起始助劑(C-1)的含量在此範圍內時,可以更高感度地形成圖案,有提高圖案的生產性之傾向。 When the polymerization initiation aid (C-1) is used, the content thereof is preferably 0.01 to 50 parts by mass, more preferably 100 parts by mass relative to the total amount of the resin (A) and the polymerizable compound (B). 0.1 to 40 parts by mass. In addition, it is preferably 0.01 to 10 moles, more preferably 0.01 to 5 moles per 1 mole of the polymerization initiator (C). When the content of the polymerization initiator (C-1) is within this range, a pattern can be formed with higher sensitivity, and the productivity of the pattern tends to be improved.

體質顏料(D)雖無特別限定,但可以使用選自氧化矽、硫酸鋇、氧化鈦、氧化鋅、氧化鋁、氧化鎂及碳酸鈣所成群組中之至少一種。又,從透明性的觀點而言,體質顏料的平均粒徑是以在500nm以下為佳。其中,從可信度與乾燥膜的低黏性的觀點而言是以氧化矽為佳。 The extender pigment (D) is not particularly limited, but at least one selected from the group consisting of silicon oxide, barium sulfate, titanium oxide, zinc oxide, aluminum oxide, magnesium oxide, and calcium carbonate can be used. From the viewpoint of transparency, the average particle diameter of the extender pigment is preferably 500 nm or less. Among them, silicon oxide is preferred from the viewpoint of reliability and low viscosity of the dried film.

體質顏料(D)的含量,相對於樹脂(A)及聚合性化合物(B)的合計量100質量份,較佳是0.1至80質量份,更佳是1至30質量份。體質顏料的含量在此範圍內時,有乾燥膜的低黏性及耐溶劑性變良好之傾向。 The content of the extender pigment (D) is preferably 0.1 to 80 parts by mass, and more preferably 1 to 30 parts by mass based on 100 parts by mass of the total amount of the resin (A) and the polymerizable compound (B). When the content of the extender pigment is within this range, the low viscosity and solvent resistance of the dried film tend to be good.

本發明的感光性樹脂組成物,是含有溶解度參數為8.0至9.1(cal/cm3)1/2的溶劑(E1),與溶解度參數為9.2至11.0(cal/cm3)1/2的溶劑(E2)。藉由使用含有此種預定的溶劑之感光性組成物,可以得到有能滿足之低黏 性之乾燥膜,且,可以得到有能滿足之硬度之圖案。 The photosensitive resin composition of the present invention contains a solvent (E1) having a solubility parameter of 8.0 to 9.1 (cal / cm 3 ) 1/2 and a solvent having a solubility parameter of 9.2 to 11.0 (cal / cm 3 ) 1/2 . (E2). By using a photosensitive composition containing such a predetermined solvent, a dry film having a satisfactory low viscosity can be obtained, and a pattern having a satisfactory hardness can be obtained.

作為溶解度參數為8.0至9.1(cal/cm3)1/2的溶劑(E1)者,於括弧中記載而附上其之溶解度參數((cal/cm3)1/2)時,可以列舉:乙二醇單異丁基醚(8.9)、二乙二醇單2-乙基己基醚(8.4)、二丙二醇單正丙基醚(8.8)、二丙二醇單正丁基醚(8.5)、三丙二醇單正丙基醚(8.5)、三丙二醇單正丁基醚(8.2)、乙二醇二甲基醚(8.6)、二乙二醇二甲基醚(8.6)、二乙二醇二乙基醚(8.6)、二乙二醇二正丁基醚(8.3)、三乙二醇二甲基醚(8.4)、二乙二醇乙基甲基醚(8.6)、二乙二醇單正丁基醚乙酸酯(9.0)、丙二醇單甲基醚乙酸酯(9.0)、二丙二醇單甲基醚乙酸酯(8.1)、乙基-3-乙氧基丙酸酯(9.1)、乙酸正丙酯(8.6)、丙酸正丙酯(8.6)、丙酸正丁酯(8.3)、丙酸正戊酯(8.4)、乙酸乙酯(9.1)、乙酸丁酯(8.3)等。其中,從溶解度的觀點而言,以如丙二醇單甲基醚乙酸酯的二醇單醚之醯酯(acylate)為佳,以如伸烷二醇、二伸烷二醇或是三伸烷二醇的單烷基醚的烷酸酯(alkanoate)為更佳。 As a solvent (E1) having a solubility parameter of 8.0 to 9.1 (cal / cm 3 ) 1/2 , when the solubility parameter ((cal / cm 3 ) 1/2 ) is described in parentheses, the following can be enumerated: Ethylene glycol monoisobutyl ether (8.9), diethylene glycol mono 2-ethylhexyl ether (8.4), dipropylene glycol mono-n-propyl ether (8.8), dipropylene glycol mono-n-butyl ether (8.5), three Propylene glycol mono-n-propyl ether (8.5), tripropylene glycol mono-n-butyl ether (8.2), ethylene glycol dimethyl ether (8.6), diethylene glycol dimethyl ether (8.6), diethylene glycol diethyl Ether (8.6), diethylene glycol di-n-butyl ether (8.3), triethylene glycol dimethyl ether (8.4), diethylene glycol ethyl methyl ether (8.6), diethylene glycol mono-n-butyl ether Butyl ether acetate (9.0), propylene glycol monomethyl ether acetate (9.0), dipropylene glycol monomethyl ether acetate (8.1), ethyl-3-ethoxypropionate (9.1), N-propyl acetate (8.6), n-propyl propionate (8.6), n-butyl propionate (8.3), n-amyl propionate (8.4), ethyl acetate (9.1), butyl acetate (8.3), and the like. Among them, from the viewpoint of solubility, acylate of a glycol monoether such as propylene glycol monomethyl ether acetate is preferable, and e.g., butanediol, dialkylene glycol, or trialkylene is preferred. Alkanoates of monoalkyl ethers of glycols are more preferred.

作為溶解度參數為9.2至11.0(cal/cm3)1/2的溶劑(E2)者,於括弧中記載而附上其之溶解度參數((cal/cm3)1/2)時,可以列舉:乙二醇單丙基醚(10.6)、乙二醇單異丙基醚(9.2)、乙二醇單正丁基醚(10.2)、乙二醇單己基醚(9.4)、乙二醇單苯基醚(10.9)、乙二醇單苯甲基醚(10.8)、乙二醇單烯丙基醚(9.8)、二乙二醇單甲基醚(10.7)、二乙二醇單正丁基醚(10.0)、二乙二醇單己基醚(9.7)、二乙二醇單 2-乙基己基醚(9.2)、二乙二醇單苯甲基醚(9.6)、三乙二醇單甲基醚(10.2)、三乙二醇單乙基醚(9.9)、三乙二醇單正丁基醚(9.3)、聚乙二醇單甲基醚(9.2)、丙二醇單甲基醚(10.7)、丙二醇單正丙基醚(9.7)、丙二醇單正丁基醚(9.3)、丙二醇單三級丁基醚(9.7)、丙二醇單苯基醚(11.0)、二丙二醇單甲基醚(9.6)、三丙二醇單甲基醚(9.4)、乙二醇單正丁基醚乙酸酯(10.3)、丙二醇二乙酸酯(9.6)、甲基3-甲氧基丙酸酯(9.5)、乳酸甲酯(10.7)、乳酸丁酯(9.8)、環己酮(9.9)、4-羥基-4-甲基-2-戊酮(別名二丙酮醇)(10.2)、1-丁醇(11.4)、二烷(10.0)、氯仿(9.3)、丙酮(9.9)、1,1,2,2-四氯乙烷(9.7)等。其中,從溶解性的觀點而言,以羥基化合物為佳,以如丙二醇單甲基醚的二醇單醚、或如4-羥基-4-甲基-2-戊酮的羥基酮為更佳,以伸烷二醇、二伸烷二醇、或是三伸烷二醇的單烷基醚、或羥基烷酮為更佳。 As a solvent (E2) having a solubility parameter of 9.2 to 11.0 (cal / cm 3 ) 1/2 , when the solubility parameter ((cal / cm 3 ) 1/2 ) is included in the parentheses, the following can be enumerated: Ethylene glycol monopropyl ether (10.6), ethylene glycol monoisopropyl ether (9.2), ethylene glycol mono-n-butyl ether (10.2), ethylene glycol monohexyl ether (9.4), ethylene glycol monobenzene Ether (10.9), ethylene glycol monobenzyl ether (10.8), ethylene glycol monoallyl ether (9.8), diethylene glycol monomethyl ether (10.7), diethylene glycol mono-n-butyl ether Ether (10.0), diethylene glycol monohexyl ether (9.7), diethylene glycol mono 2-ethylhexyl ether (9.2), diethylene glycol monobenzyl ether (9.6), triethylene glycol monomethyl Ether (10.2), triethylene glycol monoethyl ether (9.9), triethylene glycol mono-n-butyl ether (9.3), polyethylene glycol monomethyl ether (9.2), propylene glycol monomethyl ether (10.7) ), Propylene glycol mono-n-propyl ether (9.7), propylene glycol mono-n-butyl ether (9.3), propylene glycol mono-tertiary butyl ether (9.7), propylene glycol monophenyl ether (11.0), dipropylene glycol monomethyl ether (9.6 ), Tripropylene glycol monomethyl ether (9.4), ethylene glycol mono-n-butyl ether acetate (10.3), propylene glycol diacetate (9.6), methyl 3-methoxypropionic acid (9.5), methyl lactate (10.7), butyl lactate (9.8), cyclohexanone (9.9), 4-hydroxy-4-methyl-2-pentanone (also known as diacetone alcohol) (10.2), 1- Butanol (11.4), two Alkane (10.0), chloroform (9.3), acetone (9.9), 1,1,2,2-tetrachloroethane (9.7) and the like. Among them, from the viewpoint of solubility, a hydroxy compound is preferable, and a diol monoether such as propylene glycol monomethyl ether or a hydroxy ketone such as 4-hydroxy-4-methyl-2-pentanone is more preferable. It is more preferable to use alkylene glycol, dialkylene glycol, or monoalkyl ether of trialkylene glycol, or hydroxyalkanone.

溶解度參數為8.0至9.1(cal/cm3)1/2的溶劑(E1)含量,相對於溶劑(E),是70至99質量%,較佳是70至97質量%,溶解度參數為9.2至11.0(cal/cm3)1/2的溶劑(E2)含量,相對於溶劑(E),是1至30質量%,較佳是3至30質量%。溶劑的質量%之比率在前述範圍時,溶解性、塗布時的平坦性有變良好的傾向。又,溶劑(E),雖也可以含有溶劑(E1)及溶劑(E2)以外的溶劑,但其之含量,相對於溶劑(E),通常是20質量%以下,較佳是10質量%以下。 The content of the solvent (E1) having a solubility parameter of 8.0 to 9.1 (cal / cm 3 ) 1/2 is 70 to 99% by mass, preferably 70 to 97% by mass with respect to the solvent (E), and the solubility parameter is 9.2 to The solvent (E2) content of 11.0 (cal / cm 3 ) 1/2 is 1 to 30% by mass, and preferably 3 to 30% by mass, with respect to the solvent (E). When the ratio of the mass% of the solvent is within the above range, the solubility and flatness at the time of coating tend to be good. The solvent (E) may contain solvents other than the solvent (E1) and the solvent (E2), but its content is usually 20% by mass or less, and preferably 10% by mass or less, based on the solvent (E). .

又,溶解度參數是由下述式求得。 The solubility parameter is obtained from the following formula.

溶解度參數=(ΔE/V)1/2 Solubility parameter = (ΔE / V) 1/2

ΔE:凝集能量(蒸發焓(enthalpy))、V:莫耳體積 ΔE: agglutination energy (enthalpy), V: mole volume

溶劑(E)可以在合成黏合劑樹脂(A)之際使用。 The solvent (E) can be used when synthesizing the binder resin (A).

溶劑(E)的含量,相對於感光性樹脂組成物,較佳是60至95質量%,更佳是70至90質量%。換言之,感光性樹脂組成物的固形物,較佳是5至40質量%,更佳是10至30質量%。溶劑(E)的含量在前述範圍時,塗布時的平坦性有變良好的傾向。 The content of the solvent (E) is preferably 60 to 95% by mass, and more preferably 70 to 90% by mass based on the photosensitive resin composition. In other words, the solid content of the photosensitive resin composition is preferably 5 to 40% by mass, and more preferably 10 to 30% by mass. When the content of the solvent (E) is within the above range, the flatness at the time of coating tends to be good.

本發明的感光性樹脂組成物,係以更含有著色劑(F)為佳。作為此種著色劑(F)者,可以列舉顏料及染料,但從圖案之耐熱性及耐光性的觀點而言,以含有顏料為佳。 The photosensitive resin composition of the present invention preferably further contains a colorant (F). Examples of such a coloring agent (F) include pigments and dyes, but from the viewpoint of heat resistance and light resistance of a pattern, it is preferable to contain a pigment.

作為顏料者,係列舉有機顏料及無機顏料,可以列舉在彩色指數(The Society of Dyers and Colourists出版)中分類為顏料的化合物。 Examples of pigments include organic pigments and inorganic pigments, and compounds classified as pigments in the Color Index (published by The Society of Dyers and Colourists) can be cited.

作為有機顏料者,係列舉:C.I.顏料黃1、3、12、13、14、15、16、17、20、24、31、53、83、86、93、94、109、110、117、125、128、137、138、139、147、148、150、153、154、166、173、194、214等黃色顏料;C.I.顏料橘13、31、36、38、40、42、43、51、55、59、61、64、65、71、73等橘色顏料;C.I.顏料紅9、97、105、122、123、144、149、166、168、176、177、180、192、209、215、216、224、242、254、255、264、265等紅色顏料;C.I.顏料藍15、15:3、15:4、15:6、60等藍色顏料; C.I.顏料紫1、19、23、29、32、36、38等紫色顏料;C.I.顏料綠7、36、58等綠色顏料;C.I.顏料褐23、25等褐色顏料;C.I.顏料黑1、7等黑色顏料等。 For organic pigments, the series includes: CI Pigment Yellow 1, 3, 12, 13, 14, 15, 16, 17, 20, 24, 31, 53, 83, 86, 93, 94, 109, 110, 117, 125 , 128, 137, 138, 139, 147, 148, 150, 153, 154, 166, 173, 194, 214 and other yellow pigments; CI Pigment Orange 13, 31, 36, 38, 40, 42, 43, 51, 55 , 59, 61, 64, 65, 71, 73 and other orange pigments; CI Pigment Red 9, 97, 105, 122, 123, 144, 149, 166, 168, 176, 177, 180, 192, 209, 215, 216, 224, 242, 254, 255, 264, 265 and other red pigments; CI Pigment Blue 15, 15: 3, 15: 4, 15: 6, 60 and other blue pigments; CI Pigment Purple 1, 19, 23, 29, 32, 36, 38 and other purple pigments; CI Pigment Green 7, 36, 58 and other green pigments; CI Pigment Brown 23 and 25 and other brown pigments; CI Pigment Black 1, 7 and other black pigments Pigments, etc.

其中,以C.I.顏料黃138、139、150,C.I.顏料紅177、242、254,C.I.顏料紫23,C.I.顏料藍15:3、15:6,C.I.顏料綠7、36、58為佳。 Among them, C.I. Pigment Yellow 138, 139, 150, C.I. Pigment Red 177, 242, 254, C.I. Pigment Violet 23, C.I. Pigment Blue 15: 3, 15: 6, and C.I. Pigment Green 7, 36, 58 are preferred.

此等顏料,可以單獨也可以混合2種以上而使用。 These pigments may be used alone or in combination of two or more.

前述顏料,可因應需要施以下述處理:松脂處理、使用經導入酸性基或是鹼性基之顏料衍生物或顏料分散劑等之表面處理、藉由高分子化合物等而對顏料表面的接枝處理、藉由硫酸微粒化法等之微粒化處理、或是為了除去雜質而藉由有機溶劑或水等之洗淨處理、藉由離子性雜質的離子交換法等的除去處理等。又,顏料是以有均勻粒徑為佳。藉由含有顏料分散劑進行分散處理,可以得到顏料在溶液中均勻分散之狀態的顏料分散液。 The aforementioned pigments may be subjected to the following treatments, if necessary: surface treatment with a pigment derivative or pigment dispersant introduced with an acidic or basic group, or grafting of the pigment surface with a polymer compound or the like Treatment, micronization treatment by a sulfuric acid micronization method, etc., or cleaning treatment by an organic solvent or water, etc. to remove impurities, and removal treatment by an ion exchange method such as an ionic impurity. The pigment preferably has a uniform particle size. By performing a dispersion treatment containing a pigment dispersant, a pigment dispersion liquid in a state where the pigment is uniformly dispersed in the solution can be obtained.

作為前述顏料分散劑者,可以使用市售的界面活性劑,可以列舉:矽氧系、氟系、酯系、陽離子系、陰離子系、非離子系、兩性、聚酯系、聚胺系、丙烯酸系等界面活性劑等。作為前述界面活性劑者,可以列舉:聚氧乙烯烷基醚類、聚氧乙烯烷基苯基醚類、聚乙二醇二酯類、山梨糖醇酐脂肪酸酯類、脂肪酸改質聚酯類、3級胺改質聚胺基甲酸乙酯類、聚乙烯亞胺類等之外,商品名方 面可以列舉KP(信越化學工業(股)製)、Flowlen(共榮社化學(股)製)、Solsperse(Zeneca(股)製)、EFKA(日本BASF(股)製)、Ajisper(註冊商標)(味之素精緻科技(股)製)、Disperbyk(BYK公司製)等。此等,可以分別單獨使用,也可以組合2種以上來使用。 As the pigment dispersant, a commercially available surfactant can be used, and examples thereof include silica-based, fluorine-based, ester-based, cationic, anionic, non-ionic, amphoteric, polyester-based, polyamine-based, and acrylic acid. Department of surfactants and so on. Examples of the surfactant include polyoxyethylene alkyl ethers, polyoxyethylene alkylphenyl ethers, polyethylene glycol diesters, sorbitan fatty acid esters, and fatty acid modified polyesters. , Grade 3 amine modified polyurethanes, polyethyleneimines, etc. Examples include KP (Shin-Etsu Chemical Industry Co., Ltd.), Flowlen (Kyoeisha Chemical Co., Ltd.), Solsperse (Zeneca (Stock)), EFKA (Japan BASF (Stock)), Ajisper (registered trademark) (Ajinomoto Exquisite Technology Co., Ltd.), Disperbyk (by BYK), etc. These can be used individually or in combination of 2 or more types.

在使用顏料分散劑的情形,其使用量,相對於顏料,較佳是100質量%以下,更佳是5至50質量%。顏料分散劑的使用量在前述之範圍內時,有可以得到均勻分散狀態之顏料分散液的傾向。 In the case of using a pigment dispersant, the amount used is preferably 100% by mass or less, more preferably 5 to 50% by mass, relative to the pigment. When the amount of the pigment dispersant used is within the aforementioned range, there is a tendency that a pigment dispersion liquid in a uniformly dispersed state can be obtained.

作為著色劑(F)者,可以使用公知的染料,作為染料者,可以列舉:油溶性染料、酸性染料等。 As a colorant (F), a well-known dye can be used, and as a dye, an oil-soluble dye, an acid dye, etc. can be mentioned.

此等染料,係配合對溶劑的溶解度以及使用含有該染料的著色硬化性樹脂組成物而形成彩色濾光片之圖案時之光褪色耐性或分光光譜而適當地選擇。 These dyes are appropriately selected depending on the solubility in a solvent and the light fading resistance or the spectral spectrum when a pattern of a color filter is formed using a coloring curable resin composition containing the dye.

染料無特別限定,可以使用公知的染料,例如,可以列舉:溶劑染料、酸性染料、直接染料、媒染染料等。作為染料者,例如,可以列舉在彩色指數(The Society of Dyers and Colourists出版)中分類為顏料以外之有色相者的化合物,或在染色筆記(色染公司)中記載之習知染料。又,依化學結構的話,可以列舉:偶氮染料、菁染料(cyanine dye)、三苯基甲烷染料、呫噸(xanthene)染料、酞菁染料、蒽醌染料、萘醌染料、醌亞胺染料、次甲基染料、偶氮次甲基染料、方酸菁染料(Squarylium Dyes)、吖啶染料、苯乙烯基染料、香豆素染料、喹啉染料、及硝基染 料等。其中以有機溶劑可溶性染料為佳。 The dye is not particularly limited, and known dyes can be used, and examples thereof include solvent dyes, acid dyes, direct dyes, and mordant dyes. Examples of the dyes include compounds classified as colored people other than pigments in the color index (published by The Society of Dyers and Colourists), and conventional dyes described in dyeing notes (color dyeing companies). Depending on the chemical structure, examples include azo dyes, cyanine dyes, triphenylmethane dyes, xanthene dyes, phthalocyanine dyes, anthraquinone dyes, naphthoquinone dyes, and quinoneimine dyes. , Methine dye, azomethine dye, Squarylium Dyes, acridine dye, styryl dye, coumarin dye, quinoline dye, and nitro dye 料 等。 Waiting. Among them, organic solvent-soluble dyes are preferred.

具體上,可以列舉:C.I.溶劑黃4、14、15、23、24、38、62、63、68、82、94、98、99、117、162、163、167、189;C.I.溶劑紅45、49、111、125、130、143、145、146、150、151、155、168、169、172、175、181、207、218、222、227、230、245、247;C.I.溶劑橘2、7、11、15、26、56、77、86;C.I.溶劑紫11、13、14、26、31、36、37、38、45、47、48、51、59、60;C.I.溶劑藍4、5、14、18、35、36、37、45、58、59、59:1、63、67、68、69、70、78、79、83、90、94、97、98、100、101、102、104、105、111、112、122、128、132、136、139;C.I.溶劑綠1、3、4、5、7、28、29、32、33、34、35等C.I.溶劑染料;C.I.酸性黃1、3、7、9、11、17、23、25、29、34、36、38、40、42、54、65、72、73、76、79、98、99、111、112、113、114、116、119、123、128、134、135、138、139、140、144、150、155、157、160、161、163、168、169、172、177、178、179、184、190、193、196、197、199、202、203、204、205、207、212、214、220、221、228、230、232、235、238、240、242、243、251; C.I.酸性紅1、4、8、14、17、18、26、27、29、31、33、34、35、37、40、42、44、50、51、52、57、66、73、76、80、87、88、91、92、94、95、97、98、103、106、111、114、129、133、134、138、143、145、150、151、155、158、160、172、176、182、183、195、198、206、211、215、216、217、227、228、249、252、257、258、260、261、266、268、270、274、277、280、281、289、308、312、315、316、339、341、345、346、349、382、383、388、394、401、412、417、418、422、426;C.I.酸性橘6、7、8、10、12、26、50、51、52、56、62、63、64、74、75、94、95、107、108、169、173;C.I.酸性紫6B、7、9、15、16、17、19、21、23、24、25、30、34、38、49、72、102;C.I.酸性藍1、3、5、7、9、11、13、15、17、18、22、23、24、25、26、27、29、34、38、40、41、42、43、45、48、51、54、59、60、62、70、72、74、75、78、80、82、83、86、87、88、90、90:1、91、92、93、93:1、96、99、100、102、103、104、108、109、110、112、113、117、119、120、123、126、127、129、130、131、138、140、142、143、147、150、151、154、158、161、166、167、168、170、171、175、182、183、184、187、192、199、203、204、205、210、213、229、234、236、242、243、256、259、267、269、278、280、285、290、296、315、324:1、335、340;C.I.酸性綠1、3、5、6、7、8、9、11、13、14、15、 16、22、25、27、28、41、50、50:1、58、63、65、80、104、105、106、109等C.I.酸性染料;C.I.直接黃2、33、34、35、38、39、43、47、50、54、58、68、69、70、71、86、93、94、95、98、102、108、109、129、136、138、141;C.I.直接紅79、82、83、84、91、92、96、97、98、99、105、106、107、172、173、176、177、179、181、182、184、204、207、211、213、218、220、221、222、232、233、234、241、243、246、250;C.I.直接橘26、34、39、41、46、50、52、56、57、61、64、65、68、70、96、97、106、107;C.I.直接紫47、52、54、59、60、65、66、79、80、81、82、84、89、90、93、95、96、103、104;C.I.直接藍1、2、3、6、8、15、22、25、28、29、40、41、42、47、52、55、57、71、76、77、78、80、81、84、85、86、90、93、94、95、97、98、99、100、101、106、107、108、109、113、114、115、117、119、120、137、149、150、153、155、156、158、159、160、161、162、163、164、165、166、167、168、170、171、172、173、188、189、190、192、193、194、195、196、198、199、200、201、202、203、207、209、210、212、213、214、222、225、226、228、229、236、237、238、242、243、244、245、246、247、248、249、250、251、252、256、257、259、260、268、274、275、293;C.I.直接綠25、27、31、32、34、37、63、65、66、67、 68、69、72、77、79、82等C.I.直接染料;C.I.分散黃51、54、76;C.I.分散紫26、27;C.I.分散藍1、14、56、60等C.I.分散染料;C.I.鹼性紅1、10;C.I.鹼性藍1、3、5、7、9、19、21、22、24、25、26、28、29、40、41、45、47、54、58、59、60、64、65、66、67、68、81、83、88、89;C.I.鹼性紫2;C.I.鹼性紅9;C.I.鹼性綠1;等C.I.鹼性染料(Basic dye);C.I.反應性黃2、76、116;C.I.反應性橘16;C.I.反應性紅36;等C.I.反應性染料;C.I.媒染黃5、8、10、16、20、26、30、31、33、42、43、45、56、61、62、65;C.I.媒染紅1、2、3、4、9、11、12、14、17、18、19、22、23、24、25、26、27、29、30、32、33、36、37、38、39、41、42、43、45、46、48、52、53、56、62、63、71、74、76、78、85、86、88、90、94、95;C.I.媒染橘3、4、5、8、12、13、14、20、21、23、24、28、29、32、34、35、36、37、42、43、47、48;C.I.媒染紫1、1:1、2、3、4、5、6、7、8、10、11、14、15、16、17、18、19、21、22、23、24、27、28、30、 31、32、33、36、37、39、40、41、44、45、47、48、49、53、58;C.I.媒染藍1、2、3、7、8、9、12、13、15、16、19、20、21、22、23、24、26、30、31、32、39、40、41、43、44、48、49、53、61、74、77、83、84;C.I.媒染綠1、3、4、5、10、13、15、19、21、23、26、29、31、33、34、35、41、43、53等C.I.媒染染料(Mordant dye)。 Specific examples include: CI solvent yellow 4, 14, 15, 23, 24, 38, 62, 63, 68, 82, 94, 98, 99, 117, 162, 163, 167, 189; CI solvent red 45, 49, 111, 125, 130, 143, 145, 146, 150, 151, 155, 168, 169, 172, 175, 181, 207, 218, 222, 227, 230, 245, 247; CI solvent orange 2, 7 , 11, 15, 26, 56, 77, 86; CI Solvent Violet 11, 13, 14, 26, 31, 36, 37, 38, 45, 47, 48, 51, 59, 60; CI Solvent Blue 4, 5 , 14, 18, 35, 36, 37, 45, 58, 59, 59: 1, 63, 67, 68, 69, 70, 78, 79, 83, 90, 94, 97, 98, 100, 101, 102 , 104, 105, 111, 112, 122, 128, 132, 136, 139; CI solvent green 1, 3, 4, 5, 7, 28, 29, 32, 33, 34, 35 and other CI solvent dyes; CI acid Yellow 1, 3, 7, 9, 11, 17, 23, 25, 29, 34, 36, 38, 40, 42, 54, 65, 72, 73, 76, 79, 98, 99, 111, 112, 113 , 114, 116, 119, 123, 128, 134, 135, 138, 139, 140, 144, 150, 155, 157, 160, 161, 163, 168, 169, 172, 177, 178, 179, 184, 190 , 193, 196, 197, 199, 202, 203, 204, 205, 207, 212, 214, 220, 221, 228, 230, 232, 235, 238, 240, 242, 243, 251; CI Acid Red 1, 4, 8, 14, 17, 18, 26, 27, 29, 31, 33, 34, 35, 37, 40, 42, 44, 50, 51, 52, 57, 66, 73, 76 , 80, 87, 88, 91, 92, 94, 95, 97, 98, 103, 106, 111, 114, 129, 133, 134, 138, 143, 145, 150, 151, 155, 158, 160, 172 , 176, 182, 183, 195, 198, 206, 211, 215, 216, 217, 227, 228, 249, 252, 257, 258, 260, 261, 266, 268, 270, 274, 277, 280, 281 , 289, 308, 312, 315, 316, 339, 341, 345, 346, 349, 382, 383, 388, 394, 401, 412, 417, 418, 422, 426; CI acid orange 6, 7, 8, 10, 12, 26, 50, 51, 52, 56, 62, 63, 64, 74, 75, 94, 95, 107, 108, 169, 173; CI Acid Violet 6B, 7, 9, 15, 16, 17 , 19, 21, 23, 24, 25, 30, 34, 38, 49, 72, 102; CI Acid Blue 1, 3, 5, 7, 9, 9, 11, 13, 15, 17, 18, 22, 23, 24, 25, 26, 27, 29, 34, 38, 40, 41, 42, 43, 45, 48, 51, 54, 59, 60, 62, 70, 72, 74, 75, 78, 80, 82, 83, 86, 87, 88, 90, 90: 1, 91, 92, 93, 9 3: 1, 96, 99, 100, 102, 103, 104, 108, 109, 110, 112, 113, 117, 119, 120, 123, 126, 127, 129, 130, 131, 138, 140, 142, 143, 147, 150, 151, 154, 158, 161, 166, 167, 168, 170, 171, 175, 182, 183, 184, 187, 192, 199, 203, 204, 205, 210, 213, 229, 234, 236, 242, 243, 256, 259, 267, 269, 278, 280, 285, 290, 296, 315, 324: 1, 335, 340; CI Acid Green 1, 3, 5, 6, 7, 8 , 9, 11, 13, 14, 15, 16, 22, 25, 27, 28, 41, 50, 50: 1, 58, 63, 65, 80, 104, 105, 106, 109 and other CI acid dyes; CI Direct Yellow 2, 33, 34, 35, 38 , 39, 43, 47, 50, 54, 58, 68, 69, 70, 71, 86, 93, 94, 95, 98, 102, 108, 109, 129, 136, 138, 141; CI Direct Red 79, 82, 83, 84, 91, 92, 96, 97, 98, 99, 105, 106, 107, 172, 173, 176, 177, 179, 181, 182, 184, 204, 207, 211, 213, 218, 220, 221, 222, 232, 233, 234, 241, 243, 246, 250; CI Direct Orange 26, 34, 39, 41, 46, 50, 52, 56, 57, 61, 64, 65, 68, 70 , 96, 97, 106, 107; CI Direct Purple 47, 52, 54, 59, 60, 65, 66, 79, 80, 81, 82, 84, 89, 90, 93, 95, 96, 103, 104; CI Direct Blue 1, 2, 3, 6, 8, 15, 22, 25, 28, 29, 40, 41, 42, 47, 52, 55, 57, 71, 76, 77, 78, 80, 81, 84 , 85, 86, 90, 93, 94, 95, 97, 98, 99, 100, 101, 106, 107, 108, 109, 113, 114, 115, 117, 119, 120, 137, 149, 150, 153 , 155, 156, 158, 159, 160, 161, 162, 163, 164, 165, 166, 167, 168, 170, 171, 172, 173, 188, 189, 190, 192, 193, 194, 195, 196, 198, 199, 200, 201, 202, 203, 207, 209, 210, 212, 213, 214, 222, 225, 226, 228, 229, 236, 237, 238, 242, 243, 244, 245, 246, 247, 248, 249, 250, 251, 252, 256, 257, 259, 260, 268, 274, 275, 293; CI Direct Green 25, 27, 31, 32, 34, 37, 63, 65, 66, 67, CI direct dyes such as 68, 69, 72, 77, 79, 82; CI disperse yellow 51, 54, 76; CI disperse violet 26, 27; CI disperse blue 1, 14, 56, 60 and other CI disperse dyes; CI basic Red 1, 10; CI Basic Blue 1, 3, 5, 7, 9, 19, 21, 22, 24, 25, 26, 28, 29, 40, 41, 45, 47, 54, 58, 59, 60 , 64, 65, 66, 67, 68, 81, 83, 88, 89; CI basic violet 2; CI basic red 9; CI basic green 1; etc. CI basic dyes; CI reactivity Yellow 2, 76, 116; CI reactive orange 16; CI reactive red 36; etc. CI reactive dyes; CI mordant yellow 5, 8, 10, 16, 20, 26, 30, 31, 33, 42, 43, 43, 45, 56, 61, 62, 65; CI mordant red 1, 2, 3, 4, 9, 11, 12, 14, 17, 18, 19, 22, 23, 24, 25, 26, 27, 29, 30 , 32, 33, 36, 37, 38, 39, 41, 42, 43, 45, 46, 48, 52, 53, 56, 62, 63, 71, 74, 76, 78, 85, 86, 88, 90 , 94, 95; CI Mordant Orange 3, 4, 5, 8, 12, 13, 14, 20, 21, 23, 24, 28, 29, 32, 34, 35, 36, 37, 42, 43, 47, 48; CI Mordant Violet 1, 1: 1,2,3,4,5 6,7,8,10,11,14,15,16,17,18,19,21,22,23,24,27,28,30, 31, 32, 33, 36, 37, 39, 40, 41, 44, 45, 47, 48, 49, 53, 58; CI mordant blue 1, 2, 3, 7, 8, 9, 12, 13, 15 , 16, 19, 20, 21, 22, 23, 24, 26, 30, 31, 32, 39, 40, 41, 43, 44, 48, 49, 53, 61, 74, 77, 83, 84; CI Mordant green 1, 3, 4, 5, 10, 13, 15, 19, 21, 23, 26, 29, 31, 33, 34, 35, 41, 43, 53 and other CI mordant dyes.

C.I.還原綠1等C.I.還原染料(Vatdye;又稱為甕染料)等。 C.I. reduced green 1 and the like C.I. reduced dye (Vatdye; also known as vat dye) and the like.

此等染料,只要配合所期望之彩色濾光片的分光光譜而適當選擇即可。 These dyes may be appropriately selected in accordance with the spectral spectrum of the desired color filter.

染料是以含有在分子內具有呫噸骨架的化合物為佳。 The dye is preferably a compound containing a xanthene skeleton in the molecule.

著色劑(F)的含量,相對於感光性樹脂組成物的固形分,較佳是5至60質量%,更佳是5至45質量%。著色劑(F)的含量在前述之範圍內時,可以得到所期望之分光或色濃度。 The content of the colorant (F) is preferably 5 to 60% by mass, and more preferably 5 to 45% by mass based on the solid content of the photosensitive resin composition. When the content of the colorant (F) is within the aforementioned range, a desired spectroscopic or color density can be obtained.

本發明的感光性樹脂組成物,可以含有界面活性劑。作為界面活性劑者,可以列舉:矽氧系界面活性劑、氟系界面活性劑、有氟原子之矽氧系界面活性劑等。藉由含有界面活性劑,有塗布時的平坦性變良好之傾向。 The photosensitive resin composition of the present invention may contain a surfactant. Examples of the surfactant include a silicon-based surfactant, a fluorine-based surfactant, and a silicon-based surfactant having a fluorine atom. By including a surfactant, the flatness at the time of coating tends to be good.

作為矽氧系界面活性劑者,可以列舉:有矽氧烷鍵之界面活性劑。具體上,可以列舉:Toray silicon DC3PA、同SH7PA、同DC11PA、同SH21PA、同SH28PA、同SH29PA、同SH30PA、聚醚改質矽油SH8400(東麗道康寧(Toray Dow Corning)(股)製),KP321、KP322、KP323、KP324、KP326、KP340、KP341(信越化學工業(股)製),TSF400、TSF401、TSF410、TSF4300、TSF4440、TSF4445、TSF-4446、TSF4452、TSF4460(日本Momentive Performance Materials合同公司製)等。 Examples of the siloxane-based surfactant include a surfactant having a siloxane bond. Specifically, it can be listed: Toray silicon DC3PA, SH7PA, DC11PA, SH21PA, SH28PA, SH29PA, SH30PA, polyether modified silicone oil SH8400 (manufactured by Toray Dow Corning (stock)), KP321, KP322, KP323, KP324, KP326 , KP340, KP341 (made by Shin-Etsu Chemical Industry Co., Ltd.), TSF400, TSF401, TSF410, TSF4300, TSF4440, TSF4445, TSF-4446, TSF4452, TSF4460 (made by Japan Momentive Performance Materials contract company), etc.

作為氟系界面活性劑者,可以列舉有氟碳鏈之界面活性劑。具體上,可以列舉:Fluorinert(註冊商標)FC430、同FC431(住友3M(股)製),Megafac(註冊商標)F142D、同F171、同F172、同F173、同F177、同F183、同R30(DIC(股)製),EFTOP(註冊商標)EF301、同EF303、同EF351、同EF352(三菱材料電子化成(股)製),Surflon(註冊商標)S381、同S382、同SC101、同SC105(旭硝子(股)製),E5844(Daikin工業(股)製)等。 Examples of the fluorosurfactant include a fluorocarbon chain surfactant. Specific examples include: Fluorinert (registered trademark) FC430, same as FC431 (Sumitomo 3M (shares)), Megafac (registered trademark) F142D, same F171, same F172, same F173, same F177, same F183, same R30 (DIC (Stock) system), EFTOP (registered trademark) EF301, same EF303, same EF351, same EF352 (Mitsubishi Materials Electronics Co., Ltd.), Surflon (registered trademark) S381, same S382, same SC101, same SC105 (Asahi Glass (Asahi Glass) Share) system), E5844 (Daikin Industrial (shares) system), etc.

作為有氟原子之矽氧系界面活性劑者,可以列舉:有矽氧烷鍵及氟碳鏈之界面活性劑。具體上,可以列舉:Megafac(註冊商標)R08、同BL20、同F475、同F477、同F443(DIC(股)製)等。較佳可列舉Megafac(註冊商標)F475。 Examples of the siloxane surfactant having a fluorine atom include a surfactant having a siloxane bond and a fluorocarbon chain. Specific examples include Megafac (registered trademark) R08, same BL20, same F475, same F477, and F443 (DIC (shares) system). Preferable examples include Megafac (registered trademark) F475.

界面活性劑,相對於感光性樹脂組成物,較佳是0.001質量%至0.2質量%,更佳是0.002質量%至0.1質量%,特佳是0.01質量%至0.05質量%。藉由含有界面活性劑在此範圍,可以使塗膜的 平坦性變成良好。 The surfactant is preferably 0.001% by mass to 0.2% by mass, more preferably 0.002% by mass to 0.1% by mass, and particularly preferably 0.01% by mass to 0.05% by mass with respect to the photosensitive resin composition. By containing a surfactant in this range, the The flatness becomes good.

本發明的感光性樹脂組成物,可因應需要而含有填充劑、其他的高分子化合物、密著促進劑、抗氧化劑、紫外線吸收劑、光安定劑、鏈轉移劑等各種添加劑。 The photosensitive resin composition of the present invention may contain various additives such as fillers, other polymer compounds, adhesion promoters, antioxidants, ultraviolet absorbers, light stabilizers, and chain transfer agents as needed.

本發明的感光性樹脂組成物,可藉由混合黏合劑樹脂(A)、聚合性化合物(B)、聚合起始劑(C)、體質顏料(D)、溶劑(E)及因應必要的著色劑(F)或其他的成分而得到。 The photosensitive resin composition of the present invention can be mixed with a binder resin (A), a polymerizable compound (B), a polymerization initiator (C), an extender pigment (D), a solvent (E), and necessary coloring. Agent (F) or other components.

又,作為著色劑(F)而混合顏料的情形,例如,以依照以下的順序調製為佳。 When a pigment is mixed as the colorant (F), for example, it is preferably prepared in the following order.

首先,將顏料預先與溶劑(E)混合,使用珠粒研磨機(bead mill)等分散,直到顏料之平均粒徑變成0.2μm以下左右。此時,可因應必要調配顏料分散劑、黏合劑樹脂(A)的一部分或全部。在得到的顏料分散液中,將剩餘的黏合劑樹脂(A)、聚合性化合物(B)、聚合起始劑(C)、體質顏料(D)、及因應必要而使用的其他成分、還有因應必要而追加之溶劑(E),以變成預定之濃度之方式而添加,而可以得到感光性樹脂組成物。 First, the pigment is mixed with the solvent (E) in advance, and dispersed using a bead mill or the like until the average particle diameter of the pigment becomes about 0.2 μm or less. In this case, a part or all of the pigment dispersant and the binder resin (A) may be blended as necessary. In the obtained pigment dispersion liquid, the remaining binder resin (A), polymerizable compound (B), polymerization initiator (C), extender pigment (D), and other components used as necessary, and The solvent (E) added as necessary is added so as to have a predetermined concentration, and a photosensitive resin composition can be obtained.

作為本發明之感光性樹脂組成物對基板之塗布方法者,可以列舉:擠出塗布法、直接凹版塗布法、反轉凹版塗布法、CAP塗布法、模具塗布法等。又,也可以使用浸漬塗布機、輥筒塗布機、棒塗布機、旋轉塗布機、狹縫&旋轉塗布機、狹縫塗布機(也有稱為模具塗布機、簾流塗布機、無旋轉塗布機之情形)、噴墨等塗布裝置塗布。 其中,以使用狹縫塗布機、旋轉塗布機、輥筒塗布機等塗布為佳。 Examples of the method for coating the substrate with the photosensitive resin composition of the present invention include an extrusion coating method, a direct gravure coating method, a reverse gravure coating method, a CAP coating method, and a die coating method. In addition, a dip coater, a roll coater, a bar coater, a spin coater, a slit & spin coater, a slit coater (also referred to as a die coater, a curtain coater, and a spinless coater) can also be used. (Case)), coating by inkjet and other coating devices. Among them, coating using a slit coater, a spin coater, a roll coater, or the like is preferred.

作為在基板上塗布感光性樹脂組成物而得到之塗膜的乾燥方法者,可以列舉:加熱乾燥、自然乾燥、通風乾燥、減壓乾燥等方法。也可以組合複數種方法來進行。 Examples of a method for drying a coating film obtained by applying a photosensitive resin composition to a substrate include methods such as heat drying, natural drying, ventilation drying, and reduced pressure drying. It is also possible to combine plural methods.

乾燥溫度是以10至120℃為佳,以25至100℃為更佳。又,加熱時間,以10秒鐘至60分鐘為佳,以30秒鐘至30分鐘為更佳。 The drying temperature is preferably 10 to 120 ° C, and more preferably 25 to 100 ° C. The heating time is preferably 10 seconds to 60 minutes, and more preferably 30 seconds to 30 minutes.

減壓乾燥是以在50至150Pa的壓力下,20至25℃的溫度範圍中進行為佳。 Drying under reduced pressure is preferably performed at a temperature of 20 to 25 ° C under a pressure of 50 to 150 Pa.

將塗膜乾燥而得到之乾燥膜的膜厚,並無特別限定,可以藉由使用的材料、用途等而適當調整,通常,是0.1至20μm,而以1至6μm為佳。 The film thickness of the dried film obtained by drying the coating film is not particularly limited, and can be appropriately adjusted depending on the materials used, applications, and the like. Usually, it is 0.1 to 20 μm, and preferably 1 to 6 μm.

乾燥膜隔著用以形成目的圖案之光罩而曝光。此時光罩上之圖案形狀並無特別限定,可使用因應作為目的之用途之圖案形狀。又,作為聚合起始劑(C)而使用熱聚合起始劑的情形,係藉由曝光而使乾燥膜加熱,此熱作用在熱聚合起始劑。 The dry film is exposed through a mask for forming a desired pattern. In this case, the shape of the pattern on the photomask is not particularly limited, and a pattern shape according to the intended use can be used. When a thermal polymerization initiator is used as the polymerization initiator (C), the dried film is heated by exposure, and this heat acts on the thermal polymerization initiator.

作為在曝光所使用的光源者,係以產生250至450nm波長之光的光源為佳。例如,將未達350nm的光,使用遮斷此波長區域的濾光片來遮斷,或者將436nm附近、408nm附近、365nm附近的光,使用取出此等波長區域的帶通濾光片(band pass filter)選擇性地取出。作為光源 者,可列舉:水銀燈、發光二極管、金屬鹵素燈、鹵素燈等。 As the light source used in the exposure, a light source that generates light with a wavelength of 250 to 450 nm is preferred. For example, use a filter that cuts off this wavelength range to cut light below 350 nm, or use a band-pass filter (band) that removes these wavelengths around 436 nm, 408 nm, and 365 nm. pass filter). As a light source Examples thereof include a mercury lamp, a light emitting diode, a metal halide lamp, and a halogen lamp.

為了可以對曝光面全體均勻地照射平行光線,或將光罩與基材對齊正確位置,係以使用光罩對準器、步進器等裝置為佳。 In order to uniformly radiate parallel light to the entire exposure surface, or to align the photomask and the substrate at the correct position, it is preferable to use a device such as a photomask aligner and a stepper.

使曝光乾燥膜而得到之曝光膜與顯像液接觸,而溶解預定部分(例如,未曝光部分),顯像,藉此可以得到圖案。作為顯像液者,雖可以使用有機溶劑,但由於曝光膜的曝光部分不易因顯像液而溶解或澎潤,且可以得到良好形狀的圖案,故以使用鹼性化合物的水溶液為佳。 The exposed film obtained by exposing the dried film is brought into contact with a developing solution, and a predetermined portion (for example, an unexposed portion) is dissolved and developed, whereby a pattern can be obtained. As the developer, an organic solvent can be used, but since the exposed portion of the exposure film is not easily dissolved or swollen by the developer, and a well-shaped pattern can be obtained, an aqueous solution of a basic compound is preferably used.

顯像方法,可為覆液法、浸漬法、噴霧法等中任何一種。再者,於顯像時可以將基板傾斜成任意之角度。 The development method may be any of a liquid coating method, a dipping method, and a spray method. Furthermore, the substrate can be tilted at an arbitrary angle during development.

顯像後,以水洗為佳。 After development, it is better to wash with water.

作為前述鹼性化合物者,可以列舉:氫氧化鈉、氫氧化鉀、磷酸氫二鈉、磷酸二氫鈉、磷酸氫二銨、磷酸二氫銨、磷酸二氫鉀、矽酸鈉、矽酸鉀、碳酸鈉、碳酸鉀、碳酸氫鈉、碳酸氫鉀、硼酸鈉、硼酸鉀、氨等無機鹼性化合物;四甲基銨氫氧化物、2-羥基乙基三甲基銨氫氧化物、單甲基胺、二甲基胺、三甲基胺、單乙基胺、二乙基胺、三乙基胺、單異丙基胺、二異丙基胺、乙醇胺等有機鹼性化合物。 Examples of the basic compound include sodium hydroxide, potassium hydroxide, disodium hydrogen phosphate, sodium dihydrogen phosphate, diammonium hydrogen phosphate, ammonium dihydrogen phosphate, potassium dihydrogen phosphate, sodium silicate, and potassium silicate. , Sodium carbonate, potassium carbonate, sodium bicarbonate, potassium bicarbonate, sodium borate, potassium borate, ammonia and other inorganic basic compounds; tetramethylammonium hydroxide, 2-hydroxyethyltrimethylammonium hydroxide, mono Organic basic compounds such as methylamine, dimethylamine, trimethylamine, monoethylamine, diethylamine, triethylamine, monoisopropylamine, diisopropylamine, and ethanolamine.

其中,以氫氧化鉀、碳酸氫鈉、四甲基銨氫氧化物為 佳。 Among them, potassium hydroxide, sodium bicarbonate, and tetramethylammonium hydroxide are used as good.

此等無機及有機鹼性化合物的水溶液中之濃度,較佳是0.01至10質量%,以0.03至5質量%為更佳。 The concentration in the aqueous solution of these inorganic and organic basic compounds is preferably 0.01 to 10% by mass, and more preferably 0.03 to 5% by mass.

前述鹼性化合物的水溶液,也可以含有界面活性劑。 The aqueous solution of the basic compound may contain a surfactant.

作為界面活性劑者,可以列舉:聚氧乙烯烷基醚、聚氧乙烯芳基醚、聚氧乙烯烷基芳基醚、其他的聚氧乙烯衍生物、氧乙烯/氧丙烯嵌段共聚合物、山梨糖醇酐脂肪酸酯、聚氧乙烯山梨糖醇酐脂肪酸酯、聚氧乙烯山梨糖醇脂肪酸酯、甘油脂肪酸酯、聚氧乙烯脂肪酸酯、聚氧乙烯烷基胺等非離子系界面活性劑;月桂醇硫酸酯鈉、油醇硫酸酯鈉、月桂基硫酸鈉、月桂基硫酸銨、十二烷基苯磺酸鈉、十二烷基萘磺酸鈉等陰離子系界面活性劑;硬脂胺鹽酸鹽、月桂基三甲基銨氯化物等陽離子系界面活性劑等。 Examples of the surfactant include polyoxyethylene alkyl ether, polyoxyethylene aryl ether, polyoxyethylene alkyl aryl ether, other polyoxyethylene derivatives, and oxyethylene / oxypropylene block copolymers. , Sorbitan fatty acid ester, polyoxyethylene sorbitan fatty acid ester, polyoxyethylene sorbitol fatty acid ester, glycerin fatty acid ester, polyoxyethylene fatty acid ester, polyoxyethylene alkylamine, etc. Ionic surfactants; anionic interfacial activities such as sodium lauryl sulfate, sodium oleyl sulfate, sodium lauryl sulfate, ammonium lauryl sulfate, sodium dodecylbenzenesulfonate, sodium dodecylnaphthalenesulfonate Agents; cationic surfactants such as stearylamine hydrochloride, lauryltrimethylammonium chloride, etc.

鹼性化合物的水溶液中之界面活性劑濃度,較佳是0.01至10質量%,更佳是0.05至8質量%,特佳是0.1至5質量%。 The concentration of the surfactant in the aqueous solution of the basic compound is preferably 0.01 to 10% by mass, more preferably 0.05 to 8% by mass, and particularly preferably 0.1 to 5% by mass.

藉由將如上述方式所得到之圖案進一步的烘烤,可以得到經熱硬化之圖案。作為烘烤溫度者,通常是25℃以上220℃以下,較佳是25℃以上200℃以下,更佳是25℃以上160℃以下,再更佳是25℃以上120℃以下。作為烘烤時間者,通常是1至300分鐘,較佳是1至180 分鐘,更佳是1至60分鐘。 By further baking the pattern obtained as described above, a heat-hardened pattern can be obtained. The baking temperature is usually 25 ° C to 220 ° C, preferably 25 ° C to 200 ° C, more preferably 25 ° C to 160 ° C, and even more preferably 25 ° C to 120 ° C. As the baking time, usually 1 to 300 minutes, preferably 1 to 180 Minutes, more preferably from 1 to 60 minutes.

如上述方式所得到之圖案,例如,可以有用於在液晶顯示裝置中所使用的感光間隙材料(photo spacer)、可圖案化的保護塗膜、彩色濾光片。又,本發明的感光性樹脂組成物,可適合利用於用以形成作為液晶顯示裝置或是圖像感測器(image sensor)的畫素之膜或圖案等,可利用在將此等膜或圖案作為其構成零組件之一部分而具備的彩色濾光片、陣列基板、再者,可利用在具備此等彩色濾光片及/或是陣列基板等之顯示裝置,例如,液晶顯示裝置、有機EL裝置、固體攝影裝置等。 The pattern obtained as described above may include, for example, a photo spacer, a patternable protective coating film, and a color filter used in a liquid crystal display device. In addition, the photosensitive resin composition of the present invention can be suitably used for forming a film or a pattern of pixels as a liquid crystal display device or an image sensor, and can be used for such a film or The pattern includes a color filter, an array substrate, and an array substrate, which are part of the components, and can be used in a display device having such a color filter and / or an array substrate, such as a liquid crystal display device, an organic substrate, and the like. EL devices, solid-state imaging devices, etc.

(實施例) (Example)

以下,藉由實施例更詳細說明本發明之著色感光性樹脂組成物。例中之「%」及「份」若無特別論述,是表示質量%及質量份。 Hereinafter, the coloring photosensitive resin composition of this invention is demonstrated in detail using an Example. In the examples, "%" and "part" indicate mass% and mass parts unless otherwise specified.

〈黏合劑樹脂(A1)溶液的合成〉 <Synthesis of Binder Resin (A1) Solution>

在具備攪拌裝置、滴下漏斗、冷凝器、溫度計、氣體導入管的燒瓶中,放入67份之丙二醇單甲基醚乙酸酯、33份之丙二醇單甲基醚,一面以氮氣取代一面攪拌,昇溫到120℃。其次,在由11份之丙烯酸二環戊酯、31份之甲基丙烯酸苯甲酯、23份之甲基丙烯酸所成單體混合物中,以相對於單體混合物100份為1份之比率添加Perbutyl O。將此自滴下漏斗花2小時滴到燒瓶中,進一步,在120℃攪拌2小時,得到共聚合物。其次,將燒瓶內以空氣取代,將甲基丙烯酸縮水甘油酯10份、三苯基膦0.46份、及甲 基氫醌0.08份投入上述共聚合物之溶液中,在120℃持續反應直到固形分酸價變成150mg-KOH/g時停止反應,加入75份的丙二醇單甲基醚乙酸酯、5份之丙二醇單甲基醚,藉此可得到含有30質量%之重量平均分子量(Mw)為30×103,酸價為150mg-KOH/g的黏合劑樹脂(A1)的溶液。黏合劑樹脂(A1)是具有下述之結構單元者。 In a flask equipped with a stirring device, a dropping funnel, a condenser, a thermometer, and a gas introduction tube, put 67 parts of propylene glycol monomethyl ether acetate and 33 parts of propylene glycol monomethyl ether, and stir while replacing with nitrogen. The temperature was raised to 120 ° C. Secondly, in a monomer mixture of 11 parts of dicyclopentyl acrylate, 31 parts of benzyl methacrylate, and 23 parts of methacrylic acid, a ratio of 1 part to 100 parts of the monomer mixture was added. Perbutyl O. The self-driving funnel was dropped into the flask over 2 hours, and further stirred at 120 ° C for 2 hours to obtain a copolymer. Next, the inside of the flask was replaced with air, 10 parts of glycidyl methacrylate, 0.46 parts of triphenylphosphine, and 0.08 parts of methylhydroquinone were put into the solution of the above copolymer, and the reaction was continued at 120 ° C until the solid content When the acid value became 150 mg-KOH / g, the reaction was stopped, and 75 parts of propylene glycol monomethyl ether acetate and 5 parts of propylene glycol monomethyl ether were added to obtain a weight average molecular weight (Mw) containing 30% by mass. A solution of 30 × 10 3 binder resin (A1) having an acid value of 150 mg-KOH / g. The binder resin (A1) is one having the following structural units.

〈黏合劑樹脂(A2)溶液的合成〉 <Synthesis of Binder Resin (A2) Solution>

在具備攪拌裝置、滴下漏斗、冷凝器、溫度計、氣體導入管的燒瓶中,放置67份之丙二醇單甲基醚乙酸酯、33份之丙二醇單甲基醚,一面以氮氣取代一面攪拌,昇溫到120℃。其次,在由10份之丙烯酸二環戊酯、34份甲基丙烯酸苯甲酯、20份之甲基丙烯酸所成單體混合物中,以相對於單體混合物100份為1份之比率添加Perbutyl O。將此自滴下漏斗花2小時滴到燒瓶中,進一步,在120℃攪拌2小時,得到共聚合物。其次,將燒瓶內以空氣取代,將甲基丙烯酸縮水甘油酯10份、三苯基膦0.44份、及甲基氫醌0.08份投入上述共聚合物之溶液中,在120℃持續反應直到固形分酸價變成130mg-KOH/g時停止反應,加入74份的丙二醇單甲基醚乙酸酯、5份之丙二醇單甲基醚,藉 此可得到含有30質量%之重量平均分子量(Mw)為30×103,酸價為130mg-KOH/g的黏合劑樹脂(A2)之溶液。黏合劑樹脂(A2)是具有下述之結構單元者。 In a flask equipped with a stirring device, a dropping funnel, a condenser, a thermometer, and a gas introduction tube, 67 parts of propylene glycol monomethyl ether acetate and 33 parts of propylene glycol monomethyl ether were placed, and stirred while replacing with nitrogen, and the temperature was raised. To 120 ° C. Next, Perbutyl was added to a monomer mixture of 10 parts of dicyclopentyl acrylate, 34 parts of benzyl methacrylate, and 20 parts of methacrylic acid at a ratio of 1 part to 100 parts of the monomer mixture. O. The self-driving funnel was dropped into the flask over 2 hours, and further stirred at 120 ° C for 2 hours to obtain a copolymer. Next, the inside of the flask was replaced with air, 10 parts of glycidyl methacrylate, 0.44 parts of triphenylphosphine, and 0.08 parts of methylhydroquinone were put into the solution of the above copolymer, and the reaction was continued at 120 ° C until the solid content When the acid value became 130 mg-KOH / g, the reaction was stopped, and 74 parts of propylene glycol monomethyl ether acetate and 5 parts of propylene glycol monomethyl ether were added to obtain a weight average molecular weight (Mw) containing 30% by mass. A solution of 30 × 10 3 binder resin (A2) having an acid value of 130 mg-KOH / g. The binder resin (A2) is one having the following structural units.

〈黏合劑樹脂(A3)溶液的合成〉 <Synthesis of Binder Resin (A3) Solution>

在具備攪拌機、溫度計、回流冷卻管、滴下漏斗、及氣體導入管的燒瓶中,放入413份之丙二醇單甲基醚乙酸酯。之後,將氮氣經由氣體導入管導入燒瓶內,將燒瓶內環境取代成氮氣,添加144份之甲基丙烯酸苯甲酯、30份之丙烯酸二環戊酯、35份之甲基丙烯酸及5.2份之偶氮雙異丁腈,在100℃攪拌5小時。之後冷卻到室溫,得到含有33.6質量%之重量平均分子量(Mw)為10×103,酸價為110mg-KOH/g的黏合劑樹脂(A3)之溶液。樹脂(A3)是具有下述之結構單元者。 In a flask equipped with a stirrer, a thermometer, a reflux cooling tube, a dropping funnel, and a gas introduction tube, 413 parts of propylene glycol monomethyl ether acetate was placed. After that, nitrogen was introduced into the flask through a gas introduction tube, and the environment in the flask was replaced with nitrogen, and 144 parts of benzyl methacrylate, 30 parts of dicyclopentyl acrylate, 35 parts of methacrylic acid, and 5.2 parts of Azobisisobutyronitrile was stirred at 100 ° C for 5 hours. After cooling to room temperature, a solution containing a binder resin (A3) having a weight-average molecular weight (Mw) of 33.6% by mass of 10 × 10 3 and an acid value of 110 mg-KOH / g was obtained. The resin (A3) is one having the following structural units.

〈黏合劑樹脂(A4)溶液的合成) 〈Synthesis of Binder Resin (A4) Solution)

在具備回流冷卻管、滴下漏斗、及攪拌機的1L燒瓶 內,適量流入氮氣而取代成氮氣環境,放入371份的丙二醇單甲基醚乙酸酯,一面攪拌一面加熱到85℃。其次,將54份的丙烯酸、丙烯酸3,4-環氧基三環[5.2.1.02.6]癸烷-8-酯及丙烯酸3,4-環氧基三環[5.2.1.02.6]癸烷-9-酯的混合物225份、乙烯基甲苯(異構物混合物)81份、丙二醇單甲基醚乙酸酯80份的混合溶液花4小時滴下。另一方面,將使聚合起始劑2,2-偶氮雙(2,4-二甲基戊腈)30份溶解到丙二醇單甲基醚乙酸酯160份中之溶液花5小時滴下。起始劑溶液滴下終止後,維持在同溫度4小時後,冷卻至室溫為止,可得到含有37.5質量%之重量平均分子量(Mw)為10×103,酸價為115mg-KOH/g的黏合劑樹脂(A4),且B型黏度(23℃)為246mPas之溶液。黏合劑樹脂(A4)是具有下述之結構單元者。 In a 1 L flask equipped with a reflux cooling tube, a dropping funnel, and a stirrer, a suitable amount of nitrogen was flowed in to replace the nitrogen atmosphere, and 371 parts of propylene glycol monomethyl ether acetate was placed, and heated to 85 ° C while stirring. Next, 54 parts of acrylic acid, acrylic acid 3,4-epoxytricyclo [5.2.1.0 2.6 ] decane-8-ester, and acrylic acid 3,4-epoxytricyclo [5.2.1.0 2.6 ] decane- A mixed solution of 225 parts of a 9-ester mixture, 81 parts of vinyl toluene (isomer mixture), and 80 parts of propylene glycol monomethyl ether acetate was dropped over 4 hours. On the other hand, a solution obtained by dissolving 30 parts of a polymerization initiator 2,2-azobis (2,4-dimethylvaleronitrile) in 160 parts of propylene glycol monomethyl ether acetate was dropped over 5 hours. After the dropping of the starter solution was terminated, the temperature was maintained at the same temperature for 4 hours, and then cooled to room temperature, and a weight average molecular weight (Mw) of 37.5% by mass was 10 × 10 3 and an acid value of 115 mg-KOH / g A solution of an adhesive resin (A4) and a B-type viscosity (23 ° C) of 246 mPas. The binder resin (A4) is one having the following structural units.

合成例所得到之樹脂之重量平均分子量(Mw)及數量平均分子量(Mn)的測定,係使用GPC法,用以下的條件進行。 The weight average molecular weight (Mw) and the number average molecular weight (Mn) of the resin obtained in the synthesis example were measured using the GPC method under the following conditions.

裝置:K2479(島津製作所(股)製) Installation: K2479 (made by Shimadzu Corporation)

管柱:SHIMADZU Shim-pack GPC-80M Column: SHIMADZU Shim-pack GPC-80M

管柱溫度:40℃ Column temperature: 40 ℃

溶劑:THF(四氫呋喃) Solvent: THF (tetrahydrofuran)

流速:1.0ml/min Flow rate: 1.0ml / min

檢測器:RI Detector: RI

〈式(F1)所示化合物的合成〉 <Synthesis of compound represented by formula (F1)>

將式(IV-1)所示化合物40.5份與2,6-二甲基苯胺(東京化成(股)製)60.5份在遮光條件下混合,在N-甲基吡啶酮200份中,於150℃攪拌8小時。將得到之反應液冷卻到室溫後,添加到水1200份、35%鹽酸75份的混合液中,在室溫攪泮1小時時,析出結晶。將析出之結晶當作吸引過濾之殘渣而取得並以甲醇100份洗淨後,在60℃減壓乾燥1晚,得到式(IV-2)所示化合物49份。收率是85%。 40.5 parts of the compound represented by the formula (IV-1) and 60.5 parts of 2,6-dimethylaniline (manufactured by Tokyo Chemical Industry Co., Ltd.) were mixed under light-shielding conditions, and 200 parts of N-methylpyridone were mixed at 150 Stir at 8 ° C for 8 hours. After the resulting reaction solution was cooled to room temperature, it was added to a mixed solution of 1200 parts of water and 75 parts of 35% hydrochloric acid, and when stirred at room temperature for 1 hour, crystals were precipitated. The precipitated crystal was taken as a residue by suction filtration, washed with 100 parts of methanol, and then dried under reduced pressure at 60 ° C. for one night to obtain 49 parts of a compound represented by formula (IV-2). The yield was 85%.

其次,將(IV-2)所示化合物28.8份,與1-溴丙烷21.6份及碳酸鉀24.2份加到N-甲基吡啶酮144份中,於90℃攪拌4小時,將得到之反應液冷卻到室溫後濃縮,添加到水560份中,在10至15℃攪拌1小時時,會析出結晶。將生成之結晶當作吸引過濾之殘渣而取得後乾燥,以離子交換水1000份洗淨後,在60℃減壓乾燥1晚,得到式(F1)所示化合物30.0份。收率是91%。 Next, 28.8 parts of the compound shown in (IV-2), 21.6 parts of 1-bromopropane and 24.2 parts of potassium carbonate were added to 144 parts of N-methylpyridone, and the resulting reaction solution was stirred at 90 ° C for 4 hours. After cooling to room temperature, it was concentrated, added to 560 parts of water, and crystals were precipitated when stirred at 10 to 15 ° C for 1 hour. The resulting crystals were taken as a residue for suction filtration, and then dried, washed with 1,000 parts of ion-exchanged water, and dried under reduced pressure at 60 ° C. for one night to obtain 30.0 parts of a compound represented by formula (F1). The yield was 91%.

式(F1)所示化合物的鑑定 Identification of compound represented by formula (F1)

(質量分析)離子化模式=ESI+:m/z=[M+H]+659.3精確質量(Exact Mass):658.3 (Mass analysis) Ionization mode = ESI +: m / z = [M + H] + 659.3 Exact Mass: 658.3

實施例1 Example 1 [感光性樹脂組成物1的調製] [Preparation of photosensitive resin composition 1]

將下述者混合: Mix the following:

在得到之感光性樹脂組成物1中的全溶劑(E)中佔有的丙二醇單甲基醚乙酸酯(溶劑(E1))之比率是93.3質量%,丙二醇單甲基醚(溶劑(E2))的比率是6.7質量%。又,黏合劑樹脂(A1)與聚合性化合物(B)的質量比率(黏合劑樹脂(A1)/聚合性化合物(B))是70/30。 The ratio of propylene glycol monomethyl ether acetate (solvent (E1)) occupied in the total solvent (E) in the obtained photosensitive resin composition 1 was 93.3% by mass, and propylene glycol monomethyl ether (solvent (E2)) The ratio) is 6.7% by mass. The mass ratio of the binder resin (A1) to the polymerizable compound (B) (binder resin (A1) / polymerizable compound (B)) was 70/30.

實施例2 Example 2 [感光性樹脂組成物2的調製] [Preparation of photosensitive resin composition 2]

將下述者混合: Mix the following:

在得到之感光性樹脂組成物2中的全溶劑(E)中佔有的丙二醇單甲基醚乙酸酯(溶劑(E1))的比率是96.9質量%,丙二醇單甲基醚(溶劑(E2))的比率是3.1質量%。又,黏合劑樹脂(A1)與聚合性化合物(B)的質量比率(黏合劑樹脂(A1) /聚合性化合物(B))是60/40。 The ratio of propylene glycol monomethyl ether acetate (solvent (E1)) occupied in the total solvent (E) in the obtained photosensitive resin composition 2 was 96.9% by mass, and propylene glycol monomethyl ether (solvent (E2)) The ratio) is 3.1% by mass. The mass ratio of the binder resin (A1) to the polymerizable compound (B) (binder resin (A1) / Polymerizable compound (B)) is 60/40.

實施例3 Example 3

[感光性樹脂組成物3的調製] [Preparation of photosensitive resin composition 3]

將下述者混合:著色劑(F):C.I.顏料藍15:6 27份 Mix the following: Colorant (F): C.I. Pigment Blue 15: 6 27 parts

著色劑(F):C.I.顏料紫23 0.5份 Colorant (F): C.I. Pigment Violet 23 0.5 parts

丙烯酸系顏料分散劑 10份 10 parts of acrylic pigment dispersant

黏合劑樹脂(A1)溶液 27.7份 27.7 parts of binder resin (A1) solution

(黏合劑樹脂(A1) 8.3份)及溶劑(E):丙二醇單甲基醚乙酸酯 140份,並使用珠粒研磨機充分分散顏料而得到顏料分散液;將該顏料分散液與下述者混合而得到感光性樹脂組成物3:黏合劑樹脂(A1)溶液 227份 (8.3 parts of binder resin (A1)) and solvent (E): 140 parts of propylene glycol monomethyl ether acetate, and the pigment was sufficiently dispersed using a bead mill to obtain a pigment dispersion; the pigment dispersion was mixed with the following To obtain a photosensitive resin composition 3: 227 parts of a binder resin (A1) solution

(黏合劑樹脂(A1) 68.1份);聚合性化合物(B):二新戊四醇六丙烯酸酯(KAYARAD(註冊商標)DPHA;日本化藥(股)製) 32份;聚合起始劑(C):N-苯甲醯氧基-1-(4-苯基硫基苯基)辛烷-1-酮-2-亞胺(Irgacure(註冊商標)OXE-01;日本BASF(股)製) 5.4份;聚合起始劑(C):雙(2,4,6-三甲基苯甲醯基)苯膦氧化物(Irgacure(註冊商標)819;日本BASF(股)製) 8.6份:聚合起始助劑(C):二乙基噻噸酮(KAYACURE(註冊商標)DETX-S;日本化藥(股)製) 4.3份;體質顏料(D)分散液:PMA-ST;日產化學(股)製 36份; 溶劑(E):丙二醇單甲基醚乙酸酯 497份;以及界面活性劑:聚醚改質矽油(Toray silicon SH8400:東麗道康寧(股)製) 0.5份。 (68.1 parts of binder resin (A1)); polymerizable compound (B): dipentaerythritol hexaacrylate (KAYARAD (registered trademark) DPHA; manufactured by Nippon Kayaku Co., Ltd.); polymerization initiator ( C): N-benzyloxy-1- (4-phenylthiophenyl) octane-1-one-2-imine (Irgacure (registered trademark) OXE-01; manufactured by BASF Japan) ) 5.4 parts; polymerization initiator (C): bis (2,4,6-trimethylbenzyl) phenylphosphine oxide (Irgacure (registered trademark) 819; made by Japan BASF (stock)) 8.6 parts: Polymerization initiation aid (C): 4.3 parts of diethylthioxanthone (KAYACURE (registered trademark) DETX-S; manufactured by Nippon Kayaku Co., Ltd.); physical pigment (D) dispersion: PMA-ST; Nissan Chemical 36 shares; Solvent (E): 497 parts of propylene glycol monomethyl ether acetate; and surfactant: 0.5 part of polyether modified silicone oil (Toray silicon SH8400: manufactured by Toray Dow Corning Co., Ltd.).

在得到之感光性樹脂組成物3的全溶劑(E)中佔有之丙二醇單甲基醚乙酸酯(溶劑(E1))的比率是94.2質量%,丙二醇單甲基醚(溶劑(E2))的比率是5.8質量%,又,黏合劑樹脂(A1)與聚合性化合物(B)的質量比率(黏合劑樹脂(A1)/聚合性化合物(B))是70/30。 The ratio of propylene glycol monomethyl ether acetate (solvent (E1)) occupied in the total solvent (E) of the obtained photosensitive resin composition 3 was 94.2% by mass, and propylene glycol monomethyl ether (solvent (E2)) The ratio was 5.8% by mass, and the mass ratio of the binder resin (A1) to the polymerizable compound (B) (binder resin (A1) / polymerizable compound (B)) was 70/30.

實施例4 Example 4

[感光性樹脂組成物4的調製] [Preparation of photosensitive resin composition 4]

將下述者混合:著色劑(F):C.I.顏料藍15:6 27份 Mix the following: Colorant (F): C.I. Pigment Blue 15: 6 27 parts

著色劑(F):C.I.顏料紫23 0.5份 Colorant (F): C.I. Pigment Violet 23 0.5 parts

丙烯酸系顏料分散劑 10份 10 parts of acrylic pigment dispersant

黏合劑樹脂(A2)溶液 24.7份 Adhesive resin (A2) solution 24.7 parts

(黏合劑樹脂(A2) 7.4份)及溶劑(E):丙二醇單甲基醚乙酸酯 140份,並使用珠粒研磨機充分分散顏料而得到顏料分散液;將該顏料分散液與下述者混合而得到感光性樹脂組成物4:黏合劑樹脂(A2)溶液 191份 (7.4 parts of binder resin (A2)) and solvent (E): 140 parts of propylene glycol monomethyl ether acetate, and the pigment was sufficiently dispersed using a bead mill to obtain a pigment dispersion liquid; the pigment dispersion liquid was as follows To obtain a photosensitive resin composition 4: 191 parts of a binder resin (A2) solution

(黏合劑樹脂(A2) 57.3份);聚合性化合物(B):二新戊四醇六丙烯酸酯(KAYARAD(註冊商標)DPHA;日本化藥(股)製) 43份;聚合起始劑(C):N-苯甲醯氧基-1-(4-苯基硫基苯基)辛烷-1- (57.3 parts of binder resin (A2)); polymerizable compound (B): dipentaerythritol hexaacrylate (KAYARAD (registered trademark) DPHA; manufactured by Nippon Kayaku Co., Ltd.); polymerization initiator ( C): N-benzyloxy-1- (4-phenylthiophenyl) octane-1-

在得到之感光性樹脂組成物中的全溶劑(E)中佔有之丙二醇單甲基醚乙酸酯(溶劑(E1))的比率是95.1質量%,丙二醇單甲基醚(溶劑(E2))之比率是4.9質量%。又,黏合劑樹脂(A2)與聚合性化合物(B)的質量比率(黏合劑樹脂(A2)/聚合性化合物(B))是60/40。 The ratio of propylene glycol monomethyl ether acetate (solvent (E1)) in the total solvent (E) in the obtained photosensitive resin composition was 95.1% by mass, and propylene glycol monomethyl ether (solvent (E2)) The ratio was 4.9% by mass. The mass ratio of the binder resin (A2) to the polymerizable compound (B) (binder resin (A2) / polymerizable compound (B)) was 60/40.

實施例5 Example 5 [感光性樹脂組成物5的調製] [Preparation of photosensitive resin composition 5]

將下述者混合: Mix the following:

在得到之感光性樹脂組成物中的全溶劑(E)中佔有之丙二醇單甲基醚乙酸酯(溶劑(E1))的比率是93.8質量%,丙二醇單甲基醚(溶劑(E2))的比率是6.2質量%,又,黏合劑樹脂(A1)與聚合性化合物(B)的質量比率(黏合劑樹脂(A1)/聚合性化合物(B))是75/25。 The ratio of propylene glycol monomethyl ether acetate (solvent (E1)) in the total solvent (E) in the obtained photosensitive resin composition was 93.8% by mass, and propylene glycol monomethyl ether (solvent (E2)) The ratio was 6.2% by mass, and the mass ratio of the binder resin (A1) to the polymerizable compound (B) (binder resin (A1) / polymerizable compound (B)) was 75/25.

實施例6 Example 6 [感光性樹脂組成物6的調製] [Preparation of photosensitive resin composition 6]

將下述者混合:著色劑(F):C.I.顏料藍15:6 27份 Mix the following: Colorant (F): C.I. Pigment Blue 15: 6 27 parts

著色劑(F):C.I.顏料紫23 0.5份 Colorant (F): C.I. Pigment Violet 23 0.5 parts

丙烯酸系顏料分散劑 10份 10 parts of acrylic pigment dispersant

黏合劑樹脂(A1)溶液 27.7份 27.7 parts of binder resin (A1) solution

(黏合劑樹脂(A1) 8.3份)及溶劑(E):丙二醇單甲基醚乙酸酯 140份,並使用珠粒研磨機充分分散顏料而得到顏料分散液;將該顏料分散液與下述者混合而得到感光性樹脂組成物6:黏合劑樹脂(A1)溶液 227份 (8.3 parts of binder resin (A1)) and solvent (E): 140 parts of propylene glycol monomethyl ether acetate, and the pigment was sufficiently dispersed using a bead mill to obtain a pigment dispersion; the pigment dispersion was mixed with the following To obtain a photosensitive resin composition 6: 227 parts of a binder resin (A1) solution

(黏合劑樹脂(A1) 68.1份);聚合性化合物(B):二新戊四醇六丙烯酸酯(KAYARAD(註冊商標)DPHA;日本化藥(股)製) 32份;聚合起始劑(C):N-苯甲醯氧基-1-(4-苯基硫基苯基)辛烷-1-酮-2-亞胺(Irgacure(註冊商標)OXE-01;日本BASF(股)製) 5.8份;聚合起始劑(C):雙(2,4,6-三甲基苯甲醯基)苯膦氧化物(Irgacure(註冊商標)819;日本BASF(股)製) 9.4份:聚合起始助劑(C):二乙基噻噸酮(KAYACURE(註冊商標)DETX-S;日本化藥(股)製) 4.7份;體質顏料(D)分散液:PMA-ST;日產化學(股)製 36份;溶劑(E):丙二醇單甲基醚 190份;溶劑(E):丙二醇單甲基醚乙酸酯 317份;以及界面活性劑:聚醚改質矽油(Toray silicon SH8400: 東麗道康寧(股)製) 0.5份。 (68.1 parts of binder resin (A1)); polymerizable compound (B): dipentaerythritol hexaacrylate (KAYARAD (registered trademark) DPHA; manufactured by Nippon Kayaku Co., Ltd.); polymerization initiator ( C): N-benzyloxy-1- (4-phenylthiophenyl) octane-1-one-2-imine (Irgacure (registered trademark) OXE-01; manufactured by BASF Japan) ) 5.8 parts; polymerization initiator (C): bis (2,4,6-trimethylbenzyl) phenylphosphine oxide (Irgacure (registered trademark) 819; made by Japan BASF (stock)) 9.4 parts: Polymerization initiation aid (C): Diethylthioxanthone (KAYACURE (registered trademark) DETX-S; manufactured by Nippon Kayaku Co., Ltd.); 4.7 parts; constitution pigment (D) dispersion: PMA-ST; 36 parts (stock); solvent (E): 190 parts of propylene glycol monomethyl ether; solvent (E): 317 parts of propylene glycol monomethyl ether acetate; and surfactant: polyether modified silicone oil (Toray silicon SH8400 : Toray Dow Corning Co., Ltd.) 0.5 copies.

在得到之感光性樹脂組成物6中的全溶劑(E)中佔有之丙二醇單甲基醚乙酸酯(溶劑(E1))的比率是71.2質量%,丙二醇單甲基醚(溶劑(E2))的比率是28.9質量%,又,黏合劑樹脂(A1)與聚合性化合物(B)的質量比率(黏合劑樹脂(A1)/聚合性化合物(B))是70/30。 The ratio of propylene glycol monomethyl ether acetate (solvent (E1)) occupied in the total solvent (E) in the obtained photosensitive resin composition 6 was 71.2% by mass, and propylene glycol monomethyl ether (solvent (E2)) The ratio of) is 28.9% by mass, and the mass ratio of the binder resin (A1) to the polymerizable compound (B) (binder resin (A1) / polymerizable compound (B)) is 70/30.

比較例1 Comparative Example 1

[感光性樹脂組成物7的調製] [Preparation of photosensitive resin composition 7]

依日本特開2011-221310號公報實施例1而得到感光性樹脂組成物7。 According to Example 1 of Japanese Patent Application Laid-Open No. 2011-221310, a photosensitive resin composition 7 was obtained.

實施例7 Example 7

[感光性樹脂組成物8的調製] [Preparation of photosensitive resin composition 8]

將下述者混合:著色劑(F):C.I.顏料藍15:6 26份 Mix the following: Colorant (F): C.I. Pigment Blue 15: 6 26 parts

著色劑(F):式(F1)所示化合物 6.4份 Colorant (F): 6.4 parts of the compound represented by formula (F1)

丙烯酸系顏料分散劑 9.0份 Acrylic pigment dispersant 9.0 parts

黏合劑樹脂(A4)溶液 26.7份 Adhesive resin (A4) solution 26.7 parts

(黏合劑樹脂(A4) 10份) (10 parts of adhesive resin (A4))

溶劑(E):4-羥基-4-甲基-2-戊酮 31份及溶劑(E):丙二醇單甲基醚乙酸酯 282份,並使用珠粒研磨機充分分散顏料而得到顏料分散液;將該顏料分散液與下述者混合而得到感光性樹脂組成物8:黏合劑樹脂(A3)溶液 108份 Solvent (E): 31 parts of 4-hydroxy-4-methyl-2-pentanone and solvent (E): 282 parts of propylene glycol monomethyl ether acetate, and the pigment was sufficiently dispersed using a bead mill to obtain pigment dispersion This pigment dispersion was mixed with the following to obtain a photosensitive resin composition 8: 108 parts of a binder resin (A3) solution

(黏合劑樹脂(A3) 36.3份); 聚合性化合物(B):二新戊四醇六丙烯酸酯(KAYARAD(註冊商標)DPHA;日本化藥(股)製) 47份;聚合起始劑(C):N-苯甲醯氧基-1-(4-苯基硫基苯基)辛烷-1-酮-2-亞胺(Irgacure(註冊商標)OXE-01;日本BASF(股)製)9.3份;聚合起始劑(C):2-甲基-2-(N-嗎啉基)-1-(4-甲基硫基苯基)丙烷-1-酮(Irgacure 907;日本BASF(股)製) 1.9份;聚合起始助劑(C):二乙基噻噸酮(KAYACURE(註冊商標)DETX-S;日本化藥(股)製) 5.6份;體質顏料(D)分散液:PMA-ST;日產化學(股)製 37份;溶劑(E):4-羥基-4-甲基-2-戊酮 168份溶劑(E):丙二醇單甲基醚乙酸酯 260份;以及界面活性劑:聚醚改質矽油(Toray silicon SH8400:東麗道康寧(股)製) 0.1份。 (36.3 parts of binder resin (A3)); Polymerizable compound (B): 47 parts of dipentaerythritol hexaacrylate (KAYARAD (registered trademark) DPHA; manufactured by Nippon Kayaku Co., Ltd.); polymerization initiator (C): N-benzyloxy- 9.3 parts of 1- (4-phenylthiophenyl) octane-1-one-2-imine (Irgacure (registered trademark) OXE-01; manufactured by BASF (Japan)); polymerization initiator (C) : 1.9 parts of 2-methyl-2- (N-morpholinyl) -1- (4-methylthiophenyl) propan-1-one (Irgacure 907; manufactured by BASF Japan); polymerization initiation Auxiliary agent (C): 5.6 parts of diethylthioxanthone (KAYACURE (registered trademark) DETX-S; manufactured by Nippon Kayaku Co., Ltd.); physical pigment (D) dispersion: PMA-ST; 37 parts; solvent (E): 168 parts of 4-hydroxy-4-methyl-2-pentanone; solvent (E): 260 parts of propylene glycol monomethyl ether acetate; and surfactant: polyether modified silicone oil (Toray silicon SH8400: Toray Dow Corning Co., Ltd.) 0.1 part.

在得到之感光性樹脂組成物8中的全溶劑(E)中佔有之丙二醇單甲基醚乙酸酯(溶劑(E1))的比率是75.7質量%,4-羥基-4-甲基-2-戊酮(溶劑(E2))的比率是24.3質量%,又,黏合劑樹脂(A3)與黏合劑樹脂(A4)與聚合性化合物(B)的質量比率(黏合劑樹脂(A3)/黏合劑樹脂(A4)/聚合性化合物(B))是11/39/50。 The ratio of propylene glycol monomethyl ether acetate (solvent (E1)) occupied in the total solvent (E) in the obtained photosensitive resin composition 8 was 75.7 mass%, and 4-hydroxy-4-methyl-2 -The ratio of pentanone (solvent (E2)) is 24.3% by mass, and the mass ratio of the binder resin (A3) to the binder resin (A4) to the polymerizable compound (B) (binder resin (A3) / binder) The resin (A4) / polymerizable compound (B)) was 11/39/50.

實施例8 Example 8

[感光性樹脂組成物9的調製] [Preparation of photosensitive resin composition 9]

將下述者混合:著色劑(F):C.I.顏料藍15:6 26份 Mix the following: Colorant (F): C.I. Pigment Blue 15: 6 26 parts

著色劑(F):式(F1)所示化合物 6.4份 Colorant (F): 6.4 parts of the compound represented by formula (F1)

丙烯酸系顏料分散劑 9.0份 Acrylic pigment dispersant 9.0 parts

黏合劑樹脂(A4)溶液 26.7份 Adhesive resin (A4) solution 26.7 parts

(黏合劑樹脂(A4) 10份) (10 parts of adhesive resin (A4))

溶劑(E):4-羥基-4-甲基-2-戊酮 31份及溶劑(E):丙二醇單甲基醚乙酸酯 282份,並使用珠粒研磨機充分分散顏料而得到顏料分散液;將該顏料分散液與下述者混合而得到感光性樹脂組成物9:黏合劑樹脂(A4)溶液 97份 Solvent (E): 31 parts of 4-hydroxy-4-methyl-2-pentanone and solvent (E): 282 parts of propylene glycol monomethyl ether acetate, and the pigment was sufficiently dispersed using a bead mill to obtain pigment dispersion This pigment dispersion was mixed with the following to obtain a photosensitive resin composition 9: 97 parts of a binder resin (A4) solution

(黏合劑樹脂(A4) 36.4份);聚合性化合物(B):二新戊四醇六丙烯酸酯(KAYARAD(註冊商標)DPHA;日本化藥(股)製) 47份;聚合起始劑(C):N-苯甲醯氧基-1-(4-苯基硫基苯基)辛烷-1-酮-2-亞胺(Irgacure(註冊商標)OXE-01;日本BASF(股)製) 9.3份;聚合起始劑(C):2-甲基-2-(N-嗎啉基)-1-(4-甲基硫基苯基)丙烷-1-酮(Irgacure 907;日本BASF(股)製) 1.9份;聚合起始助劑(C):二乙基噻噸酮(KAYACURE(註冊商標)DETX-S;日本化藥(股)製) 5.6份;體質顏料(D)分散液:PMA-ST;日產化學(股)製 37份;溶劑(E):4-羥基-4-甲基-2-戊酮 168份 (36.4 parts of binder resin (A4)); polymerizable compound (B): dipentaerythritol hexaacrylate (KAYARAD (registered trademark) DPHA; manufactured by Nippon Kayaku Co., Ltd.); polymerization initiator ( C): N-benzyloxy-1- (4-phenylthiophenyl) octane-1-one-2-imine (Irgacure (registered trademark) OXE-01; manufactured by BASF Japan) ) 9.3 parts; polymerization initiator (C): 2-methyl-2- (N-morpholinyl) -1- (4-methylthiophenyl) propane-1-one (Irgacure 907; Japan BASF 1.9 parts; manufactured by Co., Ltd .; polymerization initiator (C): diethylthioxanthone (KAYACURE (registered trademark) DETX-S; manufactured by Nippon Kayaku Co., Ltd.); 5.6 parts; dispersion of constitution pigment Liquid: PMA-ST; 37 parts made by Nissan Chemical Co., Ltd .; solvent (E): 168 parts of 4-hydroxy-4-methyl-2-pentanone

溶劑(E):丙二醇單甲基醚乙酸酯 272份;以及界面活性劑:聚醚改質矽油(Toray silicon SH8400:東麗道康寧(股)製) 0.1份。 Solvent (E): 272 parts of propylene glycol monomethyl ether acetate; and surfactant: 0.1 part of polyether modified silicone oil (Toray silicon SH8400: manufactured by Toray Dow Corning Co., Ltd.).

在得到之感光性樹脂組成物9中的全溶劑(E)中佔有之丙二醇單甲基醚乙酸酯(溶劑(E1))的比率是75.7質量%,4-羥基-4-甲基-2-戊酮(溶劑(E2))的比率是24.3質量%。又,黏合劑樹脂(A4)與聚合性化合物(B)的質量比率(黏合劑樹脂(A4)/聚合性化合物(B))是50/50。 The ratio of propylene glycol monomethyl ether acetate (solvent (E1)) occupied in the total solvent (E) in the obtained photosensitive resin composition 9 was 75.7 mass%, and 4-hydroxy-4-methyl-2 The ratio of -pentanone (solvent (E2)) was 24.3% by mass. The mass ratio of the binder resin (A4) to the polymerizable compound (B) (binder resin (A4) / polymerizable compound (B)) was 50/50.

比較例2 Comparative Example 2

[感光性樹脂組成物10的調製] [Preparation of photosensitive resin composition 10]

將下述者混合:著色劑(F):C.I.顏料藍15:6 26份 Mix the following: Colorant (F): C.I. Pigment Blue 15: 6 26 parts

著色劑(F):式(F1)所示化合物 6.4份 Colorant (F): 6.4 parts of the compound represented by formula (F1)

丙烯酸系顏料分散劑 4.3份 4.3 parts of acrylic pigment dispersant

黏合劑樹脂(A4)溶液 32份 Adhesive resin (A4) solution 32 parts

(黏合劑樹脂(A4) 12份) (12 parts of adhesive resin (A4))

溶劑(E):4-羥基-4-甲基-2-戊酮 29份及溶劑(E):丙二醇單甲基醚乙酸酯 243份,並使用珠粒研磨機充分分散顏料而得到顏料分散液;將該顏料分散液與下述者混合而得到感光性樹脂組成物10:黏合劑樹脂(A4)溶液 121份 Solvent (E): 29 parts of 4-hydroxy-4-methyl-2-pentanone and solvent (E): 243 parts of propylene glycol monomethyl ether acetate, and the pigment was sufficiently dispersed using a bead mill to obtain pigment dispersion This pigment dispersion was mixed with the following to obtain a photosensitive resin composition 10: 121 parts of a binder resin (A4) solution

(黏合劑樹脂(A4) 45.4份);聚合性化合物(B):二新戊四醇六丙烯酸酯(KAYARAD(註冊商標)DPHA;日本化藥(股)製) 52份;聚合起始劑(C):N-苯甲醯氧基-1-(4-苯基硫基苯基)辛烷-1-酮-2-亞胺(Irgacure(註冊商標)OXE-01;日本BASF(股)製) 11份; 聚合起始劑(C):2-甲基-2-(N-嗎啉基)-1-(4-甲基硫基苯基)丙烷-1-酮(Irgacure 907;日本BASF(股)製) 2.1份;聚合起始助劑(C):二乙基噻噸酮(KAYACURE(註冊商標)DETX-S;日本化藥(股)製) 6.3份;溶劑(E):4-羥基-4-甲基-2-戊酮 168份溶劑(E):丙二醇單甲基醚乙酸酯 320份;以及界面活性劑:聚醚改質矽油(Toray silicon SH8400:東麗道康寧(股)製) 0.1份。 (45.4 parts of binder resin (A4)); polymerizable compound (B): 52 parts of dipentaerythritol hexaacrylate (KAYARAD (registered trademark) DPHA; manufactured by Nippon Kayaku Co., Ltd.); polymerization initiator ( C): N-benzyloxy-1- (4-phenylthiophenyl) octane-1-one-2-imine (Irgacure (registered trademark) OXE-01; manufactured by BASF Japan) ) 11 copies; Polymerization initiator (C): 2-methyl-2- (N-morpholinyl) -1- (4-methylthiophenyl) propane-1-one (Irgacure 907; manufactured by BASF Japan) ) 2.1 parts; polymerization initiation aid (C): diethylthioxanthone (KAYACURE (registered trademark) DETX-S; manufactured by Nippon Kayaku Co., Ltd.) 6.3 parts; solvent (E): 4-hydroxy-4 -168 parts of methyl-2-pentanone solvent (E): 320 parts of propylene glycol monomethyl ether acetate; and surfactant: polyether modified silicone oil (Toray silicon SH8400: manufactured by Toray Dow Corning Co., Ltd.) 0.1 Serving.

在得到之感光性樹脂組成物10中的全溶劑(E)中佔有之丙二醇單甲基醚乙酸酯(溶劑(E1))的比率是75.8質量%,4-羥基-4-甲基-2-戊酮(溶劑(E2))的比率是24.2質量%,又,黏合劑樹脂(A4)與聚合性化合物(B)的質量比率(黏合劑樹脂(A4)/聚合性化合物(B))是50/50。 The ratio of propylene glycol monomethyl ether acetate (solvent (E1)) occupied in the total solvent (E) in the obtained photosensitive resin composition 10 was 75.8% by mass, and 4-hydroxy-4-methyl-2 -The ratio of pentanone (solvent (E2)) is 24.2% by mass, and the mass ratio of the binder resin (A4) to the polymerizable compound (B) (binder resin (A4) / polymerizable compound (B)) is 50/50.

〈圖案的製作〉 <Making a Pattern>

在2吋見方的玻璃基板上,以旋轉塗布法塗布感光性樹脂組成物後,於100℃預烘烤3分鐘形成乾燥膜。放冷後,在前述基板上所形成的乾燥膜,隔著以與此乾燥膜之間隔成為100μm之方式所配置的石英玻璃製光罩,使用曝光機(TME-150RSK;TOPCON(股)製)於大氣環境下,以50mJ/cm2的曝光量(365nm為基準)施行光照射。作為光罩者,係使用形成有50μm線間隔(line and space)圖案者。光照射後,將得到之曝光膜,在含有非離子系界面活性劑0.12%與碳酸鈉2%之水系顯像液中,於24℃浸漬顯像60秒鐘,水洗後,於烘烤爐中,於230℃進行30分鐘後烘烤, 得到圖案。 A photosensitive resin composition was applied on a 2-inch square glass substrate by a spin coating method, and then dried at 100 ° C. for 3 minutes to form a dry film. After being allowed to cool, an exposure machine (TME-150RSK; manufactured by TOPCON) was used with a dry mask formed on the substrate through a quartz glass photomask arranged so that the interval between the dry film and the dry film became 100 μm. Under the atmospheric environment, light irradiation was performed with an exposure amount of 50 mJ / cm 2 (365 nm as a reference). As the photomask, a 50 μm line and space pattern was used. After light irradiation, the obtained exposure film was immersed in a water-based imaging solution containing 0.12% of a non-ionic surfactant and 2% of sodium carbonate for development for 60 seconds at 24 ° C. After washing with water, it was placed in a baking oven. After 30 minutes at 230 ° C, a pattern was obtained.

〈解像度評詁〉 <Resolution Evaluation>

將得到的圖案使用雷射顯微鏡(Axio Imager MAT蔡司公司製)觀察,將解像的最小尺寸當作解像度。解像度愈高,愈可以在高精細的彩色濾光片的製造中使用。 The obtained pattern was observed using a laser microscope (Axio Imager MAT Zeiss), and the minimum size of the image was taken as the resolution. The higher the resolution, the more it can be used in the manufacture of high-definition color filters.

〈顯像不均評詁〉 <Unevenness evaluation>

將得到的圖案使用雷射顯微鏡(Axio Imager MAT蔡司公司製)觀察,在圖案上無水漬者評估為○(看不到顯像不均),有水漬者評估為×(看到顯像不均)。在看得到顯像不均的情形,在使用於製造彩色濾光片之際,產生色不均。 The obtained pattern was observed with a laser microscope (Axio Imager MAT Zeiss), and those with no water stains on the pattern were evaluated as ○ (no unevenness in development was observed), and those with water stains were evaluated as × (when the image was not visible) Both). When the development unevenness is seen, color unevenness occurs when it is used for manufacturing a color filter.

〈耐溶劑性評詁〉 〈Solvent Resistance Evaluation〉

在前述基板上所形成的圖案中,滴下丙二醇單甲基醚乙酸酯1ml,靜止30秒鐘後,使用旋轉塗布機以旋轉數1000rpm旋轉10秒鐘,將圖案上之丙二醇單甲基醚乙酸酯振離。由測定與丙二醇單甲基醚乙酸酯接觸前後之膜厚值,依下述式計算膜厚保持率。膜厚保持率愈高硬化性愈良好,在使用於製造彩色濾光片之際,可以防止混色,改善顯像不均。 In the pattern formed on the substrate, 1 ml of propylene glycol monomethyl ether acetate was dropped, and after standing for 30 seconds, the spin coater was used to rotate at 1000 rpm for 10 seconds to rotate the propylene glycol monomethyl ether ethyl on the pattern The acid ester vibrates. By measuring the film thickness value before and after contact with propylene glycol monomethyl ether acetate, the film thickness retention ratio was calculated according to the following formula. The higher the film thickness retention rate, the better the hardenability. When used in the manufacture of color filters, it can prevent color mixing and improve uneven development.

(膜厚保持率)(%)=(接觸後之膜厚)/(接觸前之膜厚) (Film thickness retention rate) (%) = (Film thickness after contact) / (Film thickness before contact)

〈全面曝光顯像膜之製作〉 〈Production of comprehensive exposure imaging film〉

在2吋見方的玻璃板上黏貼PET薄膜(東麗公司製Lumirror 75-T60)並製作基板。在基板的PET薄膜側,將感光性樹脂組成物藉由旋轉塗布法塗布,於熱盤上,於80℃預烘烤2分鐘。放冷後,對前述基板上所形成之乾燥膜的 全面,使用曝光機(TME-150RSK;TOPCON(股)製),於大氣環境下,以150mJ/cm2的曝光量(365nm為基準)施行光照射。光照射後,在含有非離子系界面活性劑0.12%與氫氧化鉀0.04%之水系顯像液中,於23℃浸漬50秒鐘顯像,以純水洗淨,而得到全面曝光顯像膜。將得到之全面曝光顯像膜,使用膜厚測定裝置(DEKTAK3;ULVAC公司(股)製)測定時是2μm。 A PET film (Lumirror 75-T60, manufactured by Toray Corporation) was attached to a 2-inch square glass plate to prepare a substrate. On the PET film side of the substrate, a photosensitive resin composition was applied by a spin coating method, and pre-baked at 80 ° C for 2 minutes on a hot plate. After cooling, the entire surface of the dry film formed on the substrate was exposed using an exposure machine (TME-150RSK; manufactured by TOPCON Co., Ltd.) at an exposure of 150mJ / cm 2 (based on 365nm) in the atmospheric environment. Light exposure. After light irradiation, it was immersed in an aqueous imaging solution containing 0.12% of non-ionic surfactant and 0.04% of potassium hydroxide at 23 ° C for 50 seconds for development and washed with pure water to obtain a comprehensive exposure imaging film. . When the obtained full-exposure imaging film was measured using a film thickness measuring device (DEKTAK3; manufactured by ULVAC Corporation), it was 2 μm.

〈十字切割(cross cut)試驗〉 <Cross cut test>

針對得到之全面曝光顯像膜,根據JIS K5600-5-6進行膠帶剝離試驗(十字切割試驗),評估與PET薄膜的密著性。將結果在表1中顯示。 With respect to the obtained fully exposed developing film, a tape peeling test (cross cutting test) was performed in accordance with JIS K5600-5-6, and the adhesion to the PET film was evaluated. The results are shown in Table 1.

〈鉛筆硬度〉 <Pencil hardness>

針對得到之全面曝光顯像膜,根據JIS-K5400,使用鉛筆刮痕硬度試驗機(安田精機製作所有限公司製)進行鉛筆硬度測定。又,負重是設為1,000g。 The obtained full-exposure imaging film was subjected to pencil hardness measurement using a pencil scratch hardness tester (manufactured by Yasuda Seiki Seisakusho Co., Ltd.) in accordance with JIS-K5400. The load was set to 1,000 g.

〈黏性評估〉 <Viscosity Evaluation>

在5cm見方PET薄膜(東麗(股)製Lumirror 75-T60),將感光性樹脂組成物使用薄膜塗布機(film applicator)(太佑機材(股)製AP75)塗布,在熱盤上,於80℃預烘烤2分鐘。放冷後,在前述5cm見方PET薄膜上形成的乾燥膜,壓附另外的5cm見方PET薄膜(東麗(股)製Lumirror 75-T60)後,剝離該壓附之PET薄膜。在乾燥膜上沒有不均且剝離之PET薄膜上無轉印者評估為○(看不到黏性),在乾燥膜上有不均且剝離之PET薄膜上有轉印者評估為×(看得到黏 性)。看得到有黏性的情形,在使用於製造彩色濾光片之際,會產生色不均。 A 5 cm square PET film (Lumirror 75-T60 manufactured by Toray Industries Co., Ltd.) was applied with a photosensitive resin composition using a film applicator (AP75 manufactured by Taiyou Machinery Co., Ltd.), and applied on a hot plate at 80 Pre-bake at 2 ° C for 2 minutes. After leaving to cool, a 5 cm square PET film (Lumirror 75-T60 manufactured by Toray Co., Ltd.) was laminated with the dried film formed on the aforementioned 5 cm square PET film, and the laminated PET film was peeled off. A non-uniform and peeled PET film with no unevenness on the dried film was evaluated as ○ (tackiness was not observed), and a non-uniform and peeled PET film with unevenness on the dried film was evaluated as × (see Get sticky Sex). It can be seen that there is stickiness. When it is used for manufacturing a color filter, color unevenness may occur.

依本發明的話,可以提供賦與具有可以滿足之低黏性之乾燥膜,並且,賦與具有可以滿足之硬度之圖案的感光性樹脂組成物。 According to the present invention, it is possible to provide a photosensitive resin composition provided with a dry film having a satisfactory low viscosity and a pattern having a satisfactory hardness.

藉由使用本發明的感光性樹脂組成物,可以得到改善顯像不均之解像度高的圖案。藉由本發明得到之圖案,有用於作為在液晶顯示裝置、有機EL顯示裝置、或電子紙顯示裝置等所用之顯示用彩色濾光片。 By using the photosensitive resin composition of the present invention, it is possible to obtain a pattern with high resolution that improves uneven development. The pattern obtained by the present invention is useful as a color filter for display used in a liquid crystal display device, an organic EL display device, or an electronic paper display device.

Claims (10)

一種感光性樹脂組成物,係含有黏合劑樹脂(A)、聚合性化合物(B)、聚合起始劑(C)、體質顏料(D)及溶劑(E);其中,前述體質顏料(D),相對於樹脂(A)及聚合性化合物(B)的合計量100質量份,係1至30質量份;前述溶劑(E)係含有相對於前述溶劑(E)為70至99質量%之溶解度參數為8.0至9.1(cal/cm3)1/2的溶劑(E1),且含有相對於前述溶劑(E)為1至30質量%之溶解度參數為9.2至11.0(cal/cm3)1/2的溶劑(E2)。A photosensitive resin composition containing a binder resin (A), a polymerizable compound (B), a polymerization initiator (C), an extender pigment (D), and a solvent (E); wherein the extender pigment (D) 1 to 30 parts by mass based on 100 parts by mass of the total amount of the resin (A) and the polymerizable compound (B); the solvent (E) contains a solubility of 70 to 99% by mass relative to the solvent (E) The solvent (E1) having a parameter of 8.0 to 9.1 (cal / cm 3 ) 1/2 and containing a solubility parameter of 1 to 30% by mass relative to the aforementioned solvent (E) is 9.2 to 11.0 (cal / cm 3 ) 1 / 2 solvent (E2). 如申請專利範圍第1項所述之感光性樹脂組成物,其中,前述聚合起始劑(C)是肟化合物。The photosensitive resin composition according to item 1 of the scope of patent application, wherein the polymerization initiator (C) is an oxime compound. 如申請專利範圍第1或2項所述之感光性樹脂組成物,其中,前述黏合劑樹脂(A)的酸價是50至180mg-KOH/g。The photosensitive resin composition according to item 1 or 2 of the scope of patent application, wherein the acid value of the binder resin (A) is 50 to 180 mg-KOH / g. 如申請專利範圍第1或2項所述之感光性樹脂組成物,其中,前述黏合劑樹脂(A)的含量,相對於前述黏合劑樹脂(A)及前述聚合性化合物(B)的合計量100質量份,係30至80質量份。The photosensitive resin composition according to claim 1 or claim 2, wherein the content of the binder resin (A) is relative to the total amount of the binder resin (A) and the polymerizable compound (B). 100 parts by mass, from 30 to 80 parts by mass. 如申請專利範圍第1或2項所述之感光性樹脂組成物,其中,前述體質顏料(D)是氧化矽。The photosensitive resin composition according to item 1 or 2 of the scope of patent application, wherein the extender pigment (D) is silica. 如申請專利範圍第1或2項所述之感光性樹脂組成物,更含有著色劑。The photosensitive resin composition according to item 1 or 2 of the patent application scope further contains a colorant. 如申請專利範圍第6項所述的感光性樹脂組成物,其中,著色劑是含有顏料的著色劑。The photosensitive resin composition as described in Claim 6 of a patent application range whose coloring agent is a coloring agent containing a pigment. 如申請專利範圍第6項所述的感光性樹脂組成物,其中,著色劑是含有染料的著色劑。The photosensitive resin composition according to item 6 of the scope of patent application, wherein the colorant is a coloring agent containing a dye. 一種圖案,藉由如申請專利範圍第1或2項所述之感光性樹脂組成物所形成者。A pattern formed by a photosensitive resin composition as described in item 1 or 2 of the scope of patent application. 一種顯示裝置,含有如申請專利範圍第9項所述之圖案。A display device includes a pattern as described in item 9 of the scope of patent application.
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