TWI702197B - Glass frit, method for manufacturing glass frit, and aluminium paste - Google Patents

Glass frit, method for manufacturing glass frit, and aluminium paste Download PDF

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TWI702197B
TWI702197B TW107110706A TW107110706A TWI702197B TW I702197 B TWI702197 B TW I702197B TW 107110706 A TW107110706 A TW 107110706A TW 107110706 A TW107110706 A TW 107110706A TW I702197 B TWI702197 B TW I702197B
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glass frit
mol
aluminum
glass
substrate
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TW201841846A (en
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上迫浩一
新井傑也
菅原美愛子
小林賢一
小宮秀利
松井正五
錦織潤
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日商亞特比目有限公司
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C8/00Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
    • C03C8/02Frit compositions, i.e. in a powdered or comminuted form
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C8/00Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
    • C03C8/14Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions
    • C03C8/18Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions containing free metals
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/02Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/14Conductive material dispersed in non-conductive inorganic material
    • H01B1/16Conductive material dispersed in non-conductive inorganic material the conductive material comprising metals or alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B3/00Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
    • H01B3/02Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances
    • H01B3/08Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances quartz; glass; glass wool; slag wool; vitreous enamels
    • H01B3/084Glass or glass wool in binder
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B3/00Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
    • H01B3/02Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances
    • H01B3/08Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances quartz; glass; glass wool; slag wool; vitreous enamels

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Abstract

The present invention relates to a glass frit for use in an aluminum paste for forming an aluminum electrode on the back surface of a solar cell or the like, a method for manufacturing a glass frit, and an aluminum paste. The present invention aims to realize the manufacturing of a glass frit which does not contain metals such as iron, copper, nickel, which can melt at a low temperature necessary for the manufacture of a solar cell or the like, and whose main components are only vanadium and barium.
The glass frit of the present invention is manufactured by heating 55 to 80 mol% of vanadium V2O5 and 15 to 30 mol% of barium BaO as the main materials, or 10 to 55 mol% of vanadium V2O5 and 10 to 40 mol% of barium BaO as the main materials to produce molten glass, and pulverizing the fragments which are formed by rapidly cooling the molten glass, wherein the glass frit is melted at 650℃ or less.

Description

玻璃料、玻璃料製造方法及鋁膏 Glass frit, glass frit manufacturing method and aluminum paste

本發明係有關於一種在形成太陽能電池的背面等的鋁電極之鋁膏所使用的玻璃料、玻璃料製造方法及鋁膏。 The present invention relates to a glass frit used in an aluminum paste for forming an aluminum electrode on the back of a solar cell, a method for manufacturing the glass frit, and an aluminum paste.

以往,屬於能夠再生利用的能源之一之太陽能電池之開發係基於20世紀的主角之半導體技術而進行。其係支配人類生存之全球性水準的重要開發。其開發課題不僅是將太陽光轉換成為電能之效率,而且亦在面對減低製造成本及無公害之課題之下進行。致力於實現該等開發課題中,一般認為特別是減低或削除在電極所使用的銀(Ag)和鉛(Pb)之使用量為重要的。 In the past, the development of solar cells, one of the renewable energy sources, was based on the semiconductor technology of the protagonist of the 20th century. It is an important development that governs the global level of human survival. The subject of its development is not only the efficiency of converting sunlight into electrical energy, but also the subject of reducing manufacturing costs and being pollution-free. In efforts to achieve these development issues, it is generally believed that reducing or eliminating the use of silver (Ag) and lead (Pb) used in electrodes is particularly important.

例如將鋁膏塗佈、燒結在構成太陽能電池之矽基板(p型)的背面全面而形成鋁電極(p+),並將引線焊接在此。 For example, aluminum paste is coated and sintered on the entire back surface of a silicon substrate (p-type) constituting a solar cell to form an aluminum electrode (p+), and leads are welded there.

但是將引線直接焊接鋁電極時,其拉伸強度較弱,故以往是在鋁電極挖掘複數個孔穴且將銀膏塗佈、燒結在此處,並將引線焊接在此。 However, when the lead wire is directly welded to the aluminum electrode, its tensile strength is weak. Therefore, in the past, multiple holes were excavated in the aluminum electrode, and silver paste was applied and sintered there, and the lead wire was welded there.

將鋁膏塗佈、燒結在太陽能電池背面而形成之鋁電極,因為長期間被暴露在嚴酷的條件,在構成鋁膏等之玻璃料中存在鐵、銅、鎳、鉻等金屬時,該等金屬有產生低劣作用致使太陽能電池的性能劣化之可能性。 The aluminum electrode formed by coating and sintering aluminum paste on the back of the solar cell is exposed to severe conditions for a long time. When iron, copper, nickel, chromium and other metals are present in the glass frit constituting the aluminum paste, the Metal has the possibility of degrading the performance of solar cells.

因此,期望出現一種在構成鋁膏等之玻璃料中不含有該等鐵等造成不良影響之材料且在低溫會熔融之新穎玻璃料。 Therefore, it is desired to produce a novel glass frit that does not contain such iron and other materials that cause adverse effects in the glass frit constituting the aluminum paste and the like, and will melt at low temperatures.

本發明者等係使製造一種不含有鐵、銅、鎳、鉻等金屬,且在製造太陽能電池等所必要的低溫會熔融,且主成分只有釩及鋇之玻璃料成為可能。 The inventors of the present invention made it possible to produce a glass frit that does not contain metals such as iron, copper, nickel, and chromium, melts at a low temperature necessary for the production of solar cells, etc., and has only vanadium and barium as its main components.

因此,本發明係製造一種玻璃料,其係要混入至在基板塗佈、燒結而形成導電性電極之導電性膏者,該玻璃料為:以55至80莫耳%的釩V2O5及15至30莫耳%的鋇BaO作為主材料進行加熱而生成熔融玻璃,且將該熔融玻璃急速冷卻而形成的碎片進行粉碎而製造者,該玻璃料係在650℃以下會熔融。 Therefore, the present invention is to produce a glass frit that is mixed into the conductive paste that is coated and sintered on the substrate to form a conductive electrode. The glass frit is: 55 to 80 mole% of vanadium V 2 O 5 And 15 to 30 mol% of barium BaO is heated as the main material to produce molten glass, and the fragments formed by rapid cooling of the molten glass are crushed to produce the glass frit that melts at 650°C or lower.

此時,係使其不含有鐵、銅、鎳、鉻。 At this time, the system should not contain iron, copper, nickel, and chromium.

又,係將0至15莫耳%的鋁Al2O3、0至10莫耳%的硼B2O3及0至7莫耳%的矽SiO2之一種以上混入主材料作為添加物且加熱而生成熔融玻璃。 In addition, one or more of 0 to 15 mol% aluminum Al 2 O 3 , 0 to 10 mol% boron B 2 O 3 and 0 to 7 mol% silicon SiO 2 are mixed into the main material as additives and Heating produces molten glass.

而且,係使用鋁膏作為導電性膏。 Furthermore, aluminum paste is used as the conductive paste.

又,前述之在基板塗佈、燒結而形成導電性電極一事,係在太陽能電池的基板塗佈、燒結而形成導電性鋁電極。 In addition, the aforementioned coating and sintering on the substrate to form the conductive electrode is to apply and sinter the substrate of the solar cell to form the conductive aluminum electrode.

而且,本發明係製造一種玻璃料,其係要混入至在基板塗佈、燒結而形成導電性電極之導電性膏者,該玻璃料為:以10至55莫耳%的釩V2O5及10至40莫耳%的鋇BaO作為主材料進行加熱而生成熔融玻璃,且將該熔融玻璃急速冷卻而形成的碎片進行粉碎而製造者,該玻璃料係在650℃以下熔融。 Furthermore, the present invention is to produce a glass frit that is mixed into a conductive paste that is coated and sintered on a substrate to form a conductive electrode. The glass frit is: 10 to 55 mol% of vanadium V 2 O 5 And 10-40 mol% of barium BaO is heated as a main material to produce molten glass, and the fragments formed by rapid cooling of the molten glass are crushed to produce the glass frit at 650°C or lower.

又,係將1至10莫耳%的鋁Al2O3及1至20莫耳%的硼B2O3混入主材料作為添加物且加熱而生成前述熔融玻璃。 In addition, 1 to 10 mol% of aluminum Al 2 O 3 and 1 to 20 mol% of boron B 2 O 3 are mixed into the main material as additives and heated to produce the molten glass.

而且,係將5至20莫耳%的磷P2O5及5至20莫耳%的鈣CaO混入主材料作為添加物且加熱而生成前述熔融玻璃。 In addition, 5 to 20 mol% of phosphorus P 2 O 5 and 5 to 20 mol% of calcium CaO are mixed into the main material as additives and heated to produce the aforementioned molten glass.

又,與屬於添加物之磷P2O5一起添加之鈣CaO,係設成為與磷及鹼土金屬之1種或1種以上的化合物。 In addition, calcium CaO added together with phosphorus P 2 O 5 which is an additive is set as a compound with one or more of phosphorus and alkaline earth metals.

而且,與屬於添加物之磷P2O5一起添加之前述鈣CaO,係設成為屬於與磷及鹼土金屬之1種或1種以上的化合物之磷酸三鈣Ca3(PO4)2或偏磷酸鈣Ca(PO3)2Furthermore, the aforementioned calcium CaO added together with phosphorus P 2 O 5 , which is an additive, is set to be tricalcium phosphate Ca 3 (PO 4 ) 2 or a partial compound with one or more of phosphorus and alkaline earth metals. Calcium phosphate Ca(PO 3 ) 2 .

本發明係如上所述,能夠製造一種不含有鐵、銅、鎳、鉻等金屬,且在製造太陽能電池等所必要的 低溫亦即650℃以下會熔融,且主成分只有釩及鋇之玻璃料。藉由該等玻璃料而具有下述的特徵。 As mentioned above, the present invention can produce a glass frit that does not contain iron, copper, nickel, chromium and other metals, and will melt at the low temperature necessary for the manufacture of solar cells, that is, below 650°C, and whose main components are only vanadium and barium. . These glass frits have the following characteristics.

(1)在玻璃料中能夠不含有鐵、銅、鎳、鉻等在太陽能電池的嚴酷的條件下會造成不良影響的物質。藉此,能夠消除在太陽能電池因含有鐵等而引起壽命低落一事。 (1) The glass frit may not contain iron, copper, nickel, chromium and other substances that can cause adverse effects under the harsh conditions of solar cells. Thereby, it is possible to eliminate the deterioration of the life of the solar cell due to the inclusion of iron or the like.

(2)能夠實現為了使用鋁膏所必要的較低熔點650℃以下。藉此,能夠在低熔點燒結,且能夠實現能夠使用在形成太陽能電池背面的鋁電極的鋁膏之玻璃料。 (2) It is possible to achieve the lower melting point of 650°C or lower, which is necessary for the use of aluminum paste. Thereby, it is possible to sinter at a low melting point, and it is possible to realize the glass frit of the aluminum paste that can be used to form the aluminum electrode on the back of the solar cell.

(3)藉由釩與鋇的構成,能夠消除鋁膏燒結時之太陽能電池基板的翹曲。 (3) The composition of vanadium and barium can eliminate the warpage of the solar cell substrate during aluminum paste sintering.

(4)添加磷P2O5及鹼土金屬(例如鈣CaO)而能夠改善I/V特性及密著性。 (4) Adding phosphorus P 2 O 5 and alkaline earth metals (for example, calcium CaO) can improve I/V characteristics and adhesion.

(5)以預定調配而添加鋁Al2O3及硼B2O3而能夠容易地玻璃化。 (5) Aluminum Al 2 O 3 and boron B 2 O 3 are added in a predetermined blending to easily vitrify.

第1圖係本發明的ABS玻璃之製造流程圖。 Figure 1 is a manufacturing flow chart of the ABS glass of the present invention.

第2圖係本發明的ABS玻璃之製造試樣例。 Figure 2 is an example of manufacturing samples of the ABS glass of the present invention.

第3圖係本發明的太陽能電池用鋁膏用玻璃料例。 Fig. 3 shows an example of the glass frit for aluminum paste for solar cells of the present invention.

第4圖係本發明的ABS玻璃之各成分範圍的上限下限例說明圖。 Fig. 4 is an explanatory diagram of an example of the upper and lower limit of each component range of the ABS glass of the present invention.

第5圖係本發明的太陽能電池用鋁電極煅燒用玻璃料說明圖。 Fig. 5 is an explanatory diagram of the glass frit for firing aluminum electrodes for solar cells of the present invention.

第6圖係本發明的ABS玻璃之概觀照相例。 Fig. 6 is an overview photograph example of the ABS glass of the present invention.

第7圖係本發明的ABS玻璃之製造流程圖(其2)。 Figure 7 is the manufacturing flow chart (Part 2) of the ABS glass of the present invention.

第8圖係本發明的ABS玻璃之製造試樣例(其2)。 Fig. 8 is an example of manufacturing samples of the ABS glass of the present invention (Part 2).

第9圖係本發明的太陽能電池用鋁膏用玻璃料例(其2)。 Fig. 9 shows an example of the glass frit for aluminum paste for solar cells of the present invention (Part 2).

第10圖係本發明的ABS玻璃之各成分範圍的上限下限例說明圖(其2)。 Fig. 10 is an explanatory diagram of an example of the upper and lower limit of each component range of the ABS glass of the present invention (No. 2).

第11圖係本發明的太陽能電池用鋁電極煅燒用玻璃料說明圖(其2)。 Fig. 11 is an explanatory diagram of the glass frit for firing aluminum electrodes for solar cells of the present invention (Part 2).

第12圖係本發明的鋁膏之說明圖。 Figure 12 is an explanatory diagram of the aluminum paste of the present invention.

第13圖係本發明的鋁膏之製造流程圖。 Figure 13 is a manufacturing flow chart of the aluminum paste of the present invention.

第14圖係本發明的鋁膏之煅燒流程圖。 Figure 14 is a flow chart of the calcination of the aluminum paste of the present invention.

[實施例1] [Example 1]

第1圖係揭示本發明的ABS玻璃(Art Beam太陽能電池用玻璃)之製造流程圖。 Figure 1 shows a manufacturing flow chart of the ABS glass (Art Beam solar cell glass) of the present invention.

在第1圖,S1係調配玻璃原料而進行熔融(900℃至1200℃)(電爐溫度上升後,添加且放置1小時)。這是當電爐溫度令上升至以900℃至1200℃範圍之實驗而決定的最佳溫度時,將所調配的玻璃原料放入坩堝、插入、溶解並放置1小時。又,亦可藉由電爐上升至規定溫度而將已放入至坩堝之原料熔融且放置1小時。在實驗中,玻璃原料係例如後述之第2圖顯示之下述等。 In Fig. 1, the S1 system prepares and melts glass raw materials (900°C to 1200°C) (after the electric furnace temperature rises, it is added and left for 1 hour). This is when the temperature of the electric furnace rises to the optimal temperature determined by the experiment in the range of 900°C to 1200°C, put the prepared glass material into the crucible, insert, dissolve and leave it for 1 hour. In addition, the raw material put in the crucible may be melted by raising the temperature to a predetermined temperature in an electric furnace and left for 1 hour. In the experiment, the glass raw material is, for example, the following shown in Fig. 2 described later.

Figure 107110706-A0202-12-0006-1
Figure 107110706-A0202-12-0006-1

S2係製造玻璃碎片(3至5mm)。這是如在下側所記載,將S1所製造熔融玻璃一邊流動於經冷卻的金屬滾輪上一邊製造。亦即,將熔融玻璃流入至經水冷卻之旋轉金屬滾輪之間且急速冷卻而製造3至5mm左右的玻璃碎片。 S2 produces glass fragments (3 to 5mm). This is as described on the lower side, the molten glass produced by S1 is produced while flowing on a cooled metal roller. That is, molten glass is poured between the rotating metal rollers cooled by water and rapidly cooled to produce glass fragments of about 3 to 5 mm.

S3係進行粗粉碎(粉末2至3mm)及粉碎(~50μm)。這是將S2急速冷卻後之3至5mm的玻璃碎片進行粗粉碎而成為2至3mm的粉末,進一步將其粉碎至成為50μm左右粉末。 S3 system is coarsely crushed (powder 2 to 3mm) and crushed (~50μm). This is to coarsely pulverize glass fragments of 3 to 5 mm after S2 is rapidly cooled to form a powder of 2 to 3 mm, and further pulverize it to a powder of about 50 μm.

S4係進行微粉碎(2至3μm)(噴射研磨裝置)。這是使用噴射研磨裝置,將S3之~50μm的粉末進一步微粉碎而成為2至3μm左右的粉末(玻璃粉末、玻璃料)。 S4 system is finely pulverized (2 to 3 μm) (jet milling device). This is to use a jet milling device to further pulverize the S3 ~50μm powder into a powder (glass powder, glass frit) about 2 to 3μm.

S5係完成太陽能電池鋁電極用燒結助劑的 玻璃料。 S5 is a glass frit used to complete the sintering aid for aluminum electrodes of solar cells.

如以上般,將原料上升至規定溫度(900℃至1200℃)且溶解而製造熔融玻璃,並將該熔融玻璃急速冷卻而製造玻璃碎片(3至5mm),將其粗粉碎、粉碎、微粉碎而製造2至3μm左右的玻璃料(玻璃粉末)(參照第6圖)。 As above, the raw materials are raised to a predetermined temperature (900°C to 1200°C) and dissolved to produce molten glass, and the molten glass is rapidly cooled to produce glass fragments (3 to 5 mm), which are coarsely crushed, crushed, and finely crushed And produce glass frit (glass powder) of about 2 to 3 μm (refer to Fig. 6).

第2圖係顯示本發明的ABS玻璃之製造試樣例。 Fig. 2 shows an example of manufacturing samples of the ABS glass of the present invention.

第2圖的(a)係顯示試樣No.1、試樣No.2、試樣No.3。該等係表示對試樣所賦予之名稱。 (A) of Figure 2 shows sample No. 1, sample No. 2, and sample No. 3. These are the names given to the samples.

第2圖的(b)係顯示各試樣的原料之莫耳%。例如試樣No.1係由

Figure 107110706-A0202-12-0007-2
的原料所構成。其它試樣亦由圖示的原料所構成。 Figure 2(b) shows the molar% of the raw material of each sample. For example, sample No.1 is
Figure 107110706-A0202-12-0007-2
Of raw materials. Other samples are also composed of the raw materials shown.

又,右端的「範圍」係顯示能夠製造良好的玻璃料之原料範圍,圖示的下述範圍內時能夠製造良好的玻璃料。 In addition, the "range" at the right end shows the range of raw materials that can produce a good glass frit, and a good glass frit can be produced in the following range shown in the figure.

Figure 107110706-A0202-12-0007-3
Figure 107110706-A0202-12-0007-3

Figure 107110706-A0202-12-0008-4
Figure 107110706-A0202-12-0008-4

第2圖(c)係顯示調配比(g)。這是表示將各原料以第2圖(b)的莫耳%比率調配時之g的1例。 Figure 2 (c) shows the blending ratio (g). This is an example of g when each raw material is blended at the molar% ratio shown in Figure 2(b).

第2圖(d)係顯示本發明的玻璃料之特性例。 Figure 2 (d) shows an example of the characteristics of the glass frit of the present invention.

‧可觀察到即便將熔融玻璃流出至金屬板上,亦不結晶化。 ‧It can be observed that even if the molten glass flows out onto the metal plate, it does not crystallize.

‧可觀察到試樣No.2、No.3係任一者均不結晶化。 ‧It can be observed that none of the samples No.2 and No.3 are crystallized.

‧軟化性觀察:將第1圖所製造的玻璃料添加至坩堝且使溫度上升時, ‧Observation of softening: When the glass frit manufactured in Figure 1 is added to the crucible and the temperature rises,

‧試樣No.1係在570℃表面開始熔解,在595℃完全熔解。 ‧Sample No.1 starts to melt on the surface at 570℃ and completely melts at 595℃.

‧試樣No.2、No.3係任一者均是在572℃開始熔解,在587℃完全熔解。 ‧Either sample No.2 and No.3 series starts to melt at 572°C and completely melts at 587°C.

第2圖(e)係顯示玻璃的轉變溫度之例子。針對如圖示的各轉變溫度,各自可得到圖示之值。 Figure 2 (e) shows an example of the glass transition temperature. For each transition temperature as shown in the figure, the value shown in the figure can be obtained for each.

在此,清楚明白結晶熔融溫度係試樣No.1、2、3為515℃、525℃、524℃,任一者均為600℃以下,可實現作為目標之650℃以下。 Here, it is clear that the crystal melting temperature of Sample Nos. 1, 2, and 3 is 515°C, 525°C, and 524°C, and any one of them is 600°C or less, and the target 650°C or less can be achieved.

第3圖係顯示本發明的太陽能電池用鋁膏用玻璃料例(成分莫耳比)。這是為了容易理解,而將前述實驗例的第2圖(a)、(b)的試樣No.1、2、3的莫耳%部分取出且整理而成。 Fig. 3 shows an example of the glass frit (component molar ratio) for aluminum paste for solar cells of the present invention. This is for easy understanding, and the molar% part of the sample Nos. 1, 2, and 3 in the second figures (a) and (b) of the aforementioned experimental example was taken out and arranged.

‧試樣No.1之釩V2O5為77.58莫耳%且在範圍55至80莫耳%的範圍內。鋇BaO為22.22莫耳%且在範圍15至30莫耳%的範圍內。 ‧Vanadium V 2 O 5 of sample No.1 is 77.58 mol% and is in the range of 55 to 80 mol%. Barium BaO is 22.22 mol% and is in the range of 15 to 30 mol%.

‧試樣No.2、No.3亦如圖示且在範圍內。 ‧Sample No.2 and No.3 are also within the range as shown in the figure.

針對以上的試樣No.1、2、3,可觀察、實測前述第2圖(d)、(e)記載之各種特性,特別是可達成熔融溫度為650℃以下,清楚明白可使用作為混合在太陽能電池的鋁膏之玻璃料。而且,本玻璃料不含有鐵、銅、鎳、鉻,即便長期間使用亦不會使太陽能電池的特性劣化。 For the above sample Nos. 1, 2, and 3, the various characteristics described in Figure 2 (d) and (e) can be observed and measured. In particular, the melting temperature can be reached below 650°C. It is clear that it can be used for mixing Glass frit for aluminum paste in solar cells. Moreover, this glass frit does not contain iron, copper, nickel, or chromium, and does not degrade the characteristics of the solar cell even if it is used for a long period of time.

第4圖係顯示本發明的ABS玻璃之各成分的範圍之上限下限例說明圖。 Fig. 4 is an explanatory diagram showing an example of the upper and lower limit of the range of each component of the ABS glass of the present invention.

第4圖(a)係顯示釩V2O5(55至80莫耳%)的上限下限例說明。 Figure 4(a) shows an example of the upper and lower limits of vanadium V 2 O 5 (55 to 80 mol%).

‧釩V2O5為下限(55莫耳%)以下時,不形成玻璃骨架。 ‧When vanadium V 2 O 5 is below the lower limit (55 mol%), no glass skeleton is formed.

‧釩V2O5為上限(80莫耳%)以上時,調整機械強度為困難的。耐水性劣化。 ‧When vanadium V 2 O 5 is above the upper limit (80 mol%), it is difficult to adjust the mechanical strength. Water resistance deteriorates.

第4圖(b)係顯示鋇BaO(實際上係添加BaCO3作為原料,加熱溶解時CO2被放出而成為BaO)的上限下限例說明。 Fig. 4(b) shows an example of the upper and lower limits of barium BaO (actually, BaCO 3 is added as a raw material, and CO 2 is released to become BaO during heating and dissolution).

‧鋇BaO(BaCO3)為下限(15莫耳%)以下時,均質的玻璃化變為困難。 ‧When barium BaO (BaCO 3 ) is below the lower limit (15 mol%), homogeneous vitrification becomes difficult.

‧鋇BaO(BaCO3)為上限(30莫耳%)以上時,機械強度劣化。 ‧When barium BaO (BaCO 3 ) is higher than the upper limit (30 mol%), the mechanical strength deteriorates.

第4圖(c)係顯示其它添加物(例如第4圖(d)的3種類添加物)說明。 Figure 4(c) shows the description of other additives (for example, the three types of additives in Figure 4(d)).

‧下述添加物,係不會妨礙鋁材料(3價)對矽(4價)形成P型功能、或承擔增加的任務。依照情況亦可無添加物。 ‧The following additives will not prevent aluminum materials (trivalent) from forming P-type functions on silicon (tetravalent), or assume additional tasks. Depending on the situation, there may be no additives.

第4圖(d)係顯示添加物的例子。 Figure 4(d) shows an example of additives.

‧鋁Al2O3(0至10莫耳%): ‧硼B2O3(0至7莫耳%): ‧矽SiO2(0至7莫耳%): ‧該3成分的調配比率具有良好的平衡為重要的。否則無法保持均勻性而結晶析出。亦可為任意2成分或1成分或無。但是為了保持耐水性,以添加矽SiO2為佳。 ‧Aluminum Al 2 O 3 (0 to 10 mol%): ‧Boron B 2 O 3 (0 to 7 mol%): ‧Silicon SiO 2 (0 to 7 mol%): ‧The blending ratio of the 3 components It is important to have a good balance. Otherwise, the uniformity cannot be maintained and crystals will precipitate. It may be any two components or one component or none. However, in order to maintain water resistance, it is better to add silicon SiO 2 .

第5圖係顯示本發明的太陽能電池用鋁電極煅燒用玻璃料說明圖。將鋁膏塗佈、燒結在太陽能電池背面而形成鋁電極時,這是對應混入該鋁膏之玻璃料被認為必要的課題(要求)(1)、(2)、(3)、及本發明解決之手段而製成之表格。 Fig. 5 is an explanatory diagram showing the glass frit for firing aluminum electrodes for solar cells of the present invention. When aluminum paste is coated and sintered on the back of a solar cell to form an aluminum electrode, this is a problem (requirement) (1), (2), (3), and the present invention that are considered necessary for the glass frit mixed with the aluminum paste The form made by the means of solution.

第5圖(a)係顯示課題「(1)較低的熔點」及本發明的解決手段。在本發明係如前述,係實現以釩及鋇作為主體,且600℃以下。這是因為燒結溫度係以鋁的熔點(660℃)與玻璃料的熔點之中間點來決定,所以在本發明係將玻璃料的熔點規定為650℃以下且在實驗中可實現600℃以下(第2圖(e)的結晶溶解溫度為515℃、525℃、524℃ 而可實現600℃以下)。 Figure 5(a) shows the problem "(1) Lower melting point" and the solution of the present invention. In the present invention, as mentioned above, it is realized that vanadium and barium are the main components, and the temperature is below 600°C. This is because the sintering temperature is determined by the midpoint between the melting point of aluminum (660°C) and the melting point of the glass frit. Therefore, in the present invention, the melting point of the glass frit is specified to be 650°C or less, and in the experiment can achieve 600°C or less ( The crystal dissolution temperature in Fig. 2(e) is 515°C, 525°C, and 524°C, and can achieve 600°C or less).

第5圖(b)係顯示課題「(2)對矽太陽能電池的壽命造成影響之成分構成」及本發明的解決手段。在本發明係如前述,不含有鐵、銅、鎳、鉻等。基本為釩、鋇、矽、鋁、硼的組合。在此,矽、鋁、硼係背面鋁的接觸材料。 Figure 5(b) shows the problem "(2) Composition affecting the life of silicon solar cells" and the solution of the present invention. In the present invention, as mentioned above, no iron, copper, nickel, chromium, etc. are contained. It is basically a combination of vanadium, barium, silicon, aluminum, and boron. Here, silicon, aluminum, and boron are contact materials for back aluminum.

如以上般,太陽能電池在長期嚴酷的使用條件之下,因為使用不含有會造成不良影響之鐵、銅、鎳、鉻等材料製造玻璃料,所以能夠避免該等不良影響。 As mentioned above, under long-term harsh use conditions of solar cells, glass frit is made of materials that do not contain iron, copper, nickel, chromium, etc., which will cause adverse effects, so such adverse effects can be avoided.

第5圖(c)係顯示課題「(3)矽基板係在燒結時不翹曲」及本發明的解決手段。在本發明係如前述,藉由釩、鋇的構成成分,使得鋁燒結時基板不翹曲。 Figure 5(c) shows the problem "(3) The silicon substrate does not warp during sintering" and the solution of the present invention. In the present invention, as described above, the constituent components of vanadium and barium prevent the substrate from warping during aluminum sintering.

第6圖係顯示本發明的ABS玻璃之概觀照相例。這是顯示前述第1圖的步驟所製造的ABS玻璃之概觀照相例。 Fig. 6 shows an overview photograph of the ABS glass of the present invention. This is an overview photograph showing the ABS glass manufactured by the steps in Figure 1 above.

第6圖(a)係顯示ABS玻璃的照相例。這是顯示將前述第1圖的S2之玻璃碎片(稱為ABS玻璃)進行試作實驗時之概觀照相例。 Figure 6(a) shows a photographic example of ABS glass. This is an example of an overview photograph when the glass fragments of S2 (called ABS glass) in the aforementioned Figure 1 were subjected to a trial experiment.

第6圖(b)係顯示粗碎(2至3mm)的ABS玻璃之概觀照相例。ABS玻璃係被粉碎成為2至3mm左右的玻璃片。 Figure 6 (b) shows an overview photograph of coarsely broken (2 to 3 mm) ABS glass. The ABS glass system is crushed into glass pieces of about 2 to 3 mm.

第6圖(c)係顯示粉碎(~50μm)的ABS玻璃之概觀照相例。ABS玻璃係被粉碎成為~50μm左右。而且,在噴射研磨裝置微粉碎成為2至3μm左右且完成玻璃料。 Figure 6(c) shows an overview photograph of crushed (~50μm) ABS glass. The ABS glass system is crushed to ~50μm. In addition, it is finely pulverized into about 2 to 3 μm in the jet milling device to complete the glass frit.

又,在製造混入有玻璃料之鋁膏,係例如藉由依照順序將(1)鋁微粉末、(2)本發明的玻璃料(微粉末)、(3)有機材、(4)有機溶劑、(5)樹脂(或者亦可改變順序),添加至容器且充分地攪拌來製造。 In addition, in the manufacture of aluminum paste mixed with glass frit, for example, by sequentially mixing (1) aluminum fine powder, (2) glass frit (fine powder) of the present invention, (3) organic material, and (4) organic solvent , (5) Resin (or the order can also be changed), add it to the container and fully stir to manufacture.

然後,為了將所製造的鋁膏在太陽能電池基板的背面形成需要的鋁圖案,係進行網版印刷、使溶劑消散及燒結而形成鋁電極。 Then, in order to form a required aluminum pattern on the back surface of the solar cell substrate with the manufactured aluminum paste, screen printing, solvent dissipation, and sintering are performed to form aluminum electrodes.

第7圖係顯示本發明的ABS玻璃(Art Beam太陽能電池用玻璃)之製造流程圖(其2)。 Fig. 7 shows the manufacturing flow chart (Part 2) of the ABS glass (Art Beam solar cell glass) of the present invention.

在第7圖,S11係調配玻璃原料且進行熔融(900℃至1200℃)(電爐溫度上升後,添加且放置1小時)。此係會電爐溫度上升至以900℃至1200℃範圍之實驗決定的最佳溫度時,將所調配的玻璃原料放入坩堝插入、溶解,並放置1小時。又,亦可藉由電爐上升至規定溫度而將已放入至坩堝之原料熔融且放置1小時。在實驗中,玻璃原料係例如後述之第8圖及第9圖顯示之下述等。 In Fig. 7, the S11 system prepares and melts glass raw materials (900°C to 1200°C) (after the electric furnace temperature rises, it is added and left for 1 hour). In this system, when the temperature of the electric furnace rises to the optimal temperature determined by the experiment in the range of 900°C to 1200°C, the prepared glass material is inserted into the crucible, dissolved, and left for 1 hour. In addition, the raw material put in the crucible may be melted by raising the temperature to a predetermined temperature in an electric furnace and left for 1 hour. In the experiment, the glass raw materials are, for example, the following shown in Fig. 8 and Fig. 9 described later.

Figure 107110706-A0202-12-0012-5
Figure 107110706-A0202-12-0012-5

Figure 107110706-A0202-12-0013-6
(單位為莫耳%)
Figure 107110706-A0202-12-0013-6
(Unit is mole%)

S12係製造玻璃碎片(3至5mm)。這是如在下側所記載,將S11所製造熔融玻璃一邊流通於經冷卻的金屬滾輪上一邊製造。亦即,將熔融玻璃流入至經水冷卻之旋轉金屬滾輪之間且急速冷卻而製造3至5mm左右的玻璃碎片。 S12 is the manufacturing of glass fragments (3 to 5mm). As described on the lower side, this is manufactured while circulating the molten glass manufactured by S11 on a cooled metal roller. That is, molten glass is poured between the rotating metal rollers cooled by water and rapidly cooled to produce glass fragments of about 3 to 5 mm.

S13係進行粗粉碎(粉末2至3mm)及粉碎(~50μm)。這是將S12急速冷卻後之3至5mm的玻璃碎片進行粗粉碎而成為2至3mm的粉末,進一步將其粉碎至成為50μm左右粉末。 S13 system is used for coarse crushing (powder 2 to 3mm) and crushing (~50μm). This is to coarsely pulverize glass fragments of 3 to 5 mm after S12 rapid cooling to form a powder of 2 to 3 mm, which is further pulverized to a powder of about 50 μm.

S14係進行微粉碎(2至3μm)(噴射研磨裝置)。這是使用噴射研磨裝置,將S13之~50μm的粉末進一步微粉碎而成為2至3μm左右的粉末(玻璃粉末、玻璃料)。 S14 system is finely pulverized (2 to 3 μm) (jet milling device). This is to use a jet milling device to further pulverize the S13 ~50μm powder into a powder (glass powder, glass frit) about 2 to 3μm.

S15係完成太陽能電池鋁電極用燒結助劑的玻璃料。 S15 is a glass frit used to complete the sintering aid for aluminum electrodes of solar cells.

如以上般,將原料上升至規定溫度(900℃至1200℃)且溶解而製造熔融玻璃,並將該熔融玻璃急速冷卻而製造玻璃碎片(3至5mm),將其粗粉碎、粉碎、微粉碎而製造2至3μm左右的玻璃料(玻璃粉末)。 As above, the raw materials are raised to a predetermined temperature (900°C to 1200°C) and dissolved to produce molten glass, and the molten glass is rapidly cooled to produce glass fragments (3 to 5 mm), which are coarsely crushed, crushed, and finely crushed And produce glass frit (glass powder) of about 2 to 3 μm.

第8圖係顯示本發明的ABS玻璃之製造試樣例(其2)。 Fig. 8 shows an example of manufacturing samples of the ABS glass of the present invention (Part 2).

在第8圖,(a)的「試樣11」係表示試樣11。 該等係表示對試樣11所賦予的名稱,其下段係顯示原料(材料)名稱。 In Fig. 8, "Sample 11" in (a) represents sample 11. These lines indicate the names given to the sample 11, and the lower row indicates the names of raw materials (materials).

在第8圖,(b)的「莫耳比%(範圍)」中之「莫耳比%」,係表示試樣原料的莫耳%。例如試樣11係由

Figure 107110706-A0202-12-0014-7
的原料所構成。 In Figure 8, the "molar ratio%" in the "molar ratio% (range)" in (b) represents the molar percentage of the sample material. For example, sample 11 is composed of
Figure 107110706-A0202-12-0014-7
Of raw materials.

又,第8圖(b)的「莫耳比%(範圍」中之「範圍」係顯示能夠製造良好的玻璃料之各原料範圍,圖示之下述範圍內時係能夠製造良好的玻璃料。 In addition, the "range" in the "mole ratio% (range" in Fig. 8(b)) shows the range of raw materials that can produce good glass frit. The following range in the figure shows that it can produce good glass frit .

Figure 107110706-A0202-12-0014-8
Figure 107110706-A0202-12-0014-8

Figure 107110706-A0202-12-0015-9
Figure 107110706-A0202-12-0015-9

在第8圖,(c)係表示質量(g)。這是表示將各原料以第8圖(b)的莫耳%比率調配時之g的1例。 In Figure 8, (c) represents mass (g). This is an example of g when each raw material is blended at the molar% ratio shown in Figure 8(b).

在第8圖,(d)係顯示本發明的玻璃料之特性例。 In Fig. 8, (d) shows an example of the characteristics of the glass frit of the present invention.

‧坩堝內狀態為良好。這是將上述原料放入坩堝且熔解時的狀態為良好。 ‧The state of the crucible is good. This means that the state when the above-mentioned raw materials are put into a crucible and melted is good.

‧所謂流出狀態表面為「相當混濁」,係表示在將熔解後的熔解物從坩堝內急速地流出至冷卻裝置後的狀態下,熔解物表面為「相當混濁」之狀態。 ‧The surface of the outflow state is "quite turbid", which means that the surface of the melt is "quite turbid" in the state after the melted material is quickly discharged from the crucible to the cooling device.

‧所謂軟化性觀察為「500℃:顆粒為帶圓形。600℃:顆粒之間黏住」,係表示在將第7圖所製造的璃料放入坩堝且使溫度上升時,顆粒500℃時附近為帶圓形,在600℃時顆粒之間黏住且已熔解。 ‧The so-called softening observation is "500℃: the pellets are round. 600℃: the pellets are stuck together", which means that when the glass material manufactured in Figure 7 is put into a crucible and the temperature rises, the pellets are 500℃ At 600℃, the particles are sticky and melted.

‧所謂冷卻後的狀態係表面為「棕色。上升至650℃為止而從坩堝剝落」,係表示在熔解物冷卻後的狀態下,表面為「棕色」,且將放入坩堝的熔解物上升至650℃為止時熔解物容易地從坩堝剝落。 ‧The so-called state after cooling means that the surface is "brown. It peels off from the crucible until it rises to 650℃", which means that the surface of the molten material is "brown" after cooling and the molten material put in the crucible rises to The molten material easily peels off from the crucible at 650°C.

在第8圖,在(e)的DTA,係在DTA測定(轉移點、軟化點、結晶化、結晶熔解等的各溫度測定)難以顯現尖峰。 In Fig. 8, the DTA in (e) is difficult to show sharp peaks in DTA measurement (measurement of transition point, softening point, crystallization, crystal melting, etc.).

第9圖係顯示本發明的太陽能電池用鋁膏用玻璃料例(成分莫耳比)(其2)。這是為了容易理解,而將前述實驗例的第8圖的試樣11及圖示外的其它試樣12、13的莫耳%部分取出且整理且附加其結果(密著性、I/V特性)而成。 Fig. 9 shows an example of the glass frit for aluminum paste for solar cells of the present invention (component molar ratio) (Part 2). This is for easy understanding, and the molar% part of sample 11 in Fig. 8 of the aforementioned experimental example and other samples 12 and 13 not shown in the figure are taken out and arranged, and the results (adhesion, I/V Characteristics).

在此,添加鋁Al2O3時係容易玻璃化。 Here, when aluminum Al 2 O 3 is added, it is easy to vitrify.

又,磷P2O5係即便在該狀態下添加亦難以玻璃化。因此,係將磷以鹼土金屬(例如鈣)的化合物之方式添加後,才熔解在主材料(由鋇V2O5、釩BaO所構成之主骨架)的熔解物中而能夠玻璃化。例如以磷酸二氫鈣(或磷酸鈣)的水合物(Ca(H2PO4)2‧H2O)之方式添加。 In addition, the phosphorus P 2 O 5 system is difficult to vitrify even if it is added in this state. Therefore, phosphorus is added as a compound of alkaline earth metal (for example, calcium) before it is melted in the molten material of the main material (the main skeleton composed of barium V 2 O 5 and vanadium BaO) and can be vitrified. For example, calcium dihydrogen phosphate (or calcium phosphate) hydrate (Ca(H 2 PO 4 ) 2 ‧H 2 O) is added.

針對以上的試樣11、12、13,可觀察、實測前述第8圖(d)、(e)記載之各種特性,特別是可達成熔融溫度為650℃以下,而且在試樣11進行評價在結果欄所記載的密著性(太陽能電池基板的例子係將使用玻璃料之太陽能電池的鋁膏塗附、乾燥、燒結在背面後之密著性)、以及太陽能電池的I/V特性,亦可得到比先前更良好(例如良好且為2倍左右以上)的結果。而且,本玻璃料不含有鐵、銅、鎳、鉻,即便長期間使用亦不會使太陽能電池的特性劣化。 For the above samples 11, 12, and 13, the various characteristics described in Figure 8 (d) and (e) can be observed and measured. In particular, the melting temperature can be reached below 650°C, and the sample 11 is evaluated in The adhesion described in the result column (an example of the solar cell substrate is the adhesion after the aluminum paste of the solar cell using glass frit is applied, dried, and sintered on the back), and the I/V characteristics of the solar cell are also Better results (for example, good and about 2 times or more) can be obtained than before. Moreover, this glass frit does not contain iron, copper, nickel, or chromium, and does not degrade the characteristics of the solar cell even if it is used for a long period of time.

第10圖係顯示本發明的ABS玻璃之各成分的範圍之上限下限例說明圖(其2)。 Fig. 10 is an explanatory diagram showing an example of the upper and lower limits of the range of each component of the ABS glass of the present invention (No. 2).

第10圖(a)係顯示釩V2O5(10至55莫耳%)的上限下限例說明。 Figure 10(a) shows an example of the upper and lower limits of vanadium V 2 O 5 (10 to 55 mol%).

‧釩V2O5為下限(10莫耳%)以下時,係不形成玻璃骨架。 ‧When vanadium V 2 O 5 is below the lower limit (10 mol%), no glass skeleton is formed.

‧釩V2O5為上限(55莫耳%)以上時,調整機械強度為困難的。耐水性劣化。 ‧When vanadium V 2 O 5 is above the upper limit (55 mol%), it is difficult to adjust the mechanical strength. Water resistance deteriorates.

在此,釩V2O5的範圍(10至55莫耳%)係從第4圖(55至80莫耳%)大幅度地減少,係因為添加磷P2O5(5至20莫耳%)及CaO(5至20莫耳%)等,所以最多的主材料之釩V2O5的添加比率減少。 Here, the range of vanadium V 2 O 5 (10 to 55 mol%) is greatly reduced from Figure 4 (55 to 80 mol%) because of the addition of phosphorus P 2 O 5 (5 to 20 mol%) %) and CaO (5 to 20 mol%), etc., so the addition rate of vanadium V 2 O 5 , which is the most main material, decreases.

第10圖(b)係顯示鋇BaO(實際上係添加BaCO3作為原料,加熱溶解時CO2被放出而成為BaO)的上限下限例說明。 Figure 10(b) shows an example of the upper and lower limits of barium BaO (actually, BaCO 3 is added as a raw material, and CO 2 is released when heated to dissolve to become BaO).

‧鋇BaO(BaCO3)為下限(10莫耳%)以下時,均質的玻璃化變為困難。 ‧When barium BaO (BaCO 3 ) is below the lower limit (10 mol%), homogeneous vitrification becomes difficult.

‧鋇BaO(BaCO3)為上限(40莫耳%)以上時,機械強度劣化。 ‧When barium BaO (BaCO 3 ) is above the upper limit (40 mol%), the mechanical strength will deteriorate.

第10圖(c)係顯示其它添加物(例如第10圖(d)之2種類的添加物)之說明。 Figure 10(c) shows an explanation of other additives (for example, the two types of additives in Figure 10(d)).

‧不會妨礙鋁材料(3價)對矽(4價)形成P型功能、或承擔增加的任務。依照情況亦可無添加物。 ‧It will not prevent aluminum materials (trivalent) from forming P-type functions on silicon (quaternary), or undertake additional tasks. Depending on the situation, there may be no additives.

第10圖(d)係顯示添加物的例子。 Figure 10(d) shows an example of additives.

‧鋁Al2O3(1至10莫耳%):‧硼B2O3(5至20莫耳%):‧該2成分的調配比率具有良好的平衡為重要的。否 則無法保持均勻性而結晶析出且不玻璃化。 ‧Aluminum Al 2 O 3 (1 to 10 mol%): ‧Boron B 2 O 3 (5 to 20 mol%): ‧It is important that the blending ratio of the two components has a good balance. Otherwise, the uniformity cannot be maintained and the crystals will precipitate without vitrification.

第10圖(e)係顯示磷P2O5(5至20莫耳%)、鈣CaO(5至20莫耳%)的添加例。添加磷P2O5(5至20莫耳%)及鈣CaO(5至20莫耳%),係添加磷酸三鈣Ca3(PO4)2Figure 10(e) shows an example of addition of phosphorus P 2 O 5 (5 to 20 mol%) and calcium CaO (5 to 20 mol%). Phosphorus P 2 O 5 (5 to 20 mol%) and calcium CaO (5 to 20 mol%) are added, and tricalcium phosphate Ca 3 (PO 4 ) 2 is added .

‧因為磷係與水反應,以磷酸的方式添加為佳。 ‧Because the phosphorus system reacts with water, it is better to add phosphoric acid.

‧因為含有鹼金屬之化合物係使太陽能電池特性劣化,所以添加與鹼土金屬(例如鈣)的磷化合物。 ‧Because compounds containing alkali metals deteriorate the characteristics of solar cells, phosphorus compounds with alkaline earth metals (such as calcium) are added.

‧添加硼(3價)及磷(5價)及銻(5價)的化合物時,相較於添加硼、磷之2種而成之物,同時添加3種而成之物,係在I/V特性、密著性為較差。 ‧When adding boron (trivalent), phosphorus (5-valent) and antimony (5-valent) compounds, compared with the addition of two types of boron and phosphorus, the addition of three types at the same time is in I /V characteristics and adhesion are poor.

又,作為上述與鹼土金屬(例如鈣)的磷化合物,係添加磷酸三鈣Ca3(PO4)2或偏磷酸鈣Ca(PO3)2而進實驗,任一者均能夠得到良好的結果。特別是使用前者的磷酸三鈣Ca3(PO4)2作為食品添加材,就可廉價地取得而言,而且就相較於後者,氧O的數目為若干較多之8(後者之數目為6)而言,能夠得到良好的結果。又,在製造本發明的玻璃料時,碳C(亦包化合物)係有微量地附著或混入至原料之可能性,因為藉由該氧O將該微量的碳C氧化而以氣體(碳酸氣體CO2等)的方式放出,亦能夠淨化,所以必須含有若干的氧O。 In addition, as the above-mentioned phosphorus compound with alkaline earth metals (for example, calcium), the experiment was carried out by adding tricalcium phosphate Ca 3 (PO 4 ) 2 or calcium metaphosphate Ca(PO 3 ) 2, and good results were obtained with either . In particular, the use of the former tricalcium phosphate Ca 3 (PO 4 ) 2 as a food additive can be obtained inexpensively, and compared with the latter, the number of oxygen O is 8 (the number of the latter is 6) In terms of, good results can be obtained. In addition, when manufacturing the glass frit of the present invention, carbon C (including compound) may be attached or mixed into the raw material in a small amount, because the oxygen O oxidizes the small amount of carbon C to produce gas (carbon dioxide). CO 2 etc.) can also be released, so it must contain some oxygen O.

而且,將磷酸P2O5與鈣CaO直接添加時,係無法製造良好的玻璃料。同樣地,添加成為鈣CaO的鹼土金屬以外之物,例如鈉、鉀等,在如太陽能電池長期間(例 如10年以上)被暴露強烈的太陽光之情況,係劣化而無法使用。 Moreover, when phosphoric acid P 2 O 5 and calcium CaO are directly added, it is impossible to produce a good glass frit. Similarly, substances other than alkaline earth metals added as calcium CaO, such as sodium, potassium, etc., are degraded and cannot be used when solar cells are exposed to strong sunlight for a long period of time (for example, more than 10 years).

第11圖係顯示本發明的太陽能電池用鋁電極煅燒用玻璃料說明圖(其2)。將鋁膏塗佈、燒結在太陽能電池背面而形成鋁電極時,這是對應混入該鋁膏之玻璃料被認為必要的課題(要求)(1)、(2)、(3)、(4)及本發明解決之手段而製成之表格。 Fig. 11 is an explanatory diagram showing the glass frit for firing aluminum electrodes for solar cells of the present invention (Part 2). When the aluminum paste is coated and sintered on the back of the solar cell to form the aluminum electrode, this is a problem deemed necessary for the glass frit mixed with the aluminum paste (requirement) (1), (2), (3), (4) And the table created by the solution of the present invention.

第11圖(a)係顯示課題「(1)較低的熔點」及本發明的解決手段。在本發明係如前述,係實現以釩及鋇作為主體,且600℃以下。這是因為燒結溫度係以鋁的熔點(660℃)與玻璃料的熔點之中間點來決定,所以在本發明係將玻璃料的熔點規定為650℃以下,且在實驗中能夠實現600℃以下 Figure 11(a) shows the problem "(1) Lower melting point" and the solution of the present invention. In the present invention, as mentioned above, it is realized that vanadium and barium are the main components, and the temperature is below 600°C. This is because the sintering temperature is determined by the midpoint between the melting point of aluminum (660°C) and the melting point of the glass frit. Therefore, in the present invention, the melting point of the glass frit is specified to be 650°C or less, and in the experiment, it can achieve 600°C or less

第11圖(b)係顯示課題「對(2)矽太陽能電池的壽命造成影響之成分構成」及本發明的解決手段。在本發明係如前述,不含有鐵、銅、鎳、鉻等。基本為釩、鋇、矽、鋁、硼、磷、鈣、鋅的組合。在此,鋁、硼係背面鋁的接觸材料。 Fig. 11(b) shows the problem "(2) Composition affecting the life of silicon solar cell" and the solution of the present invention. In the present invention, as mentioned above, no iron, copper, nickel, chromium, etc. are contained. It is basically a combination of vanadium, barium, silicon, aluminum, boron, phosphorus, calcium, and zinc. Here, aluminum and boron are contact materials for back aluminum.

如以上般,太陽能電池在長期嚴酷的使用條件之下,因為使用不含有會造成不良影響之鐵、銅、鎳、鉻等材料製造玻璃料,所以可避免該等不良影響。 As mentioned above, under long-term severe use of solar cells, glass frit is made of materials that do not contain iron, copper, nickel, chromium, etc. that will cause adverse effects, so such adverse effects can be avoided.

第11圖(c)係顯示課題「(3)矽基板係在燒結時不翹曲」及本發明的解決手段。在本發明係如前述,藉由釩、鋇的構成成分,使得鋁燒結時基板不翹曲。 Figure 11(c) shows the problem "(3) The silicon substrate does not warp during sintering" and the solution of the present invention. In the present invention, as described above, the constituent components of vanadium and barium prevent the substrate from warping during aluminum sintering.

第11圖(d)係顯示課題「(4)密著性、I/V改善」及本發明的解決手段。在本發明係如前述,藉由添加有磷及鈣等之構成成分,鋁燒結時與基板的密著性變為良好且亦能夠改善I/V特性。 Figure 11(d) shows the problem "(4) Adhesion, I/V improvement" and the solution of the present invention. In the present invention, as described above, by adding constituent components such as phosphorus and calcium, the adhesion of aluminum to the substrate during sintering becomes good and the I/V characteristics can also be improved.

其次,使用從第12圖至第14圖,詳細地依次說明下列步驟:在從第1圖至第11圖將前述本發明的玻璃料作為助劑而添加來製造鋁膏之步驟;及將該製成的鋁膏塗佈在太陽能電池背面且進行燒結,來形成鋁電極步驟。 Next, using FIGS. 12 to 14 to describe in detail the following steps: in FIGS. 1 to 11, the glass frit of the present invention is added as an auxiliary agent to produce aluminum paste; and The prepared aluminum paste is coated on the back of the solar cell and sintered to form an aluminum electrode step.

第12圖係顯示本發明的鋁膏之說明圖。這是鋁膏的構成成分之1例,例如下述之圖示。將該等構成成分混合而製造鋁膏(參照第13圖)。 Figure 12 is an explanatory diagram showing the aluminum paste of the present invention. This is an example of the constituent components of the aluminum paste, for example, as shown below. These components are mixed to produce an aluminum paste (see Fig. 13).

(1)鋁粉末: (1) Aluminum powder:

‧純度:99.7%以上 ‧Purity: 99.7% or more

‧平均粒度:1至20μm ‧Average particle size: 1-20μm

‧形狀:球狀、橢圓球狀 ‧Shape: spherical, elliptical

(2)本發明的釩酸鹽玻璃(玻璃料): (2) The vanadate glass (glass frit) of the present invention:

‧粒徑:1至3μm ‧Particle size: 1 to 3μm

‧鋁膏全體的重量比0.1至1% ‧The weight ratio of the whole aluminum paste is 0.1 to 1%

(3)其它玻璃粉末: (3) Other glass powder:

‧粒徑:1至3μm ‧Particle size: 1 to 3μm

鋁膏全體的重量比0至1% The weight ratio of the whole aluminum paste is 0 to 1%

(4)樹脂: (4) Resin:

‧鋁膏全體的重量比0.1至3% ‧The weight ratio of the whole aluminum paste is 0.1 to 3%

‧乙基纖維素類、硝基纖維素類等 ‧Ethyl cellulose, nitrocellulose, etc.

(5)溶劑: (5) Solvent:

‧鋁膏全體的重量比大約25%(適合於網版印刷等之黏土) ‧The weight ratio of the whole aluminum paste is about 25% (suitable for clay for screen printing, etc.)

‧二乙二醇、一丁醚等 ‧Diethylene glycol, monobutyl ether, etc.

第13圖係顯示本發明的鋁膏之製造流程圖。 Fig. 13 shows the manufacturing flow chart of the aluminum paste of the present invention.

在第13圖,S21係使用混合機將溶劑與樹脂摻混(有機媒液)。這是將前述第12圖(5)溶劑與(4)樹脂放入混合機且充分地混合而製造有機媒液。 In Figure 13, S21 uses a mixer to blend solvent and resin (organic vehicle). This is to prepare the organic medium by putting the solvent and the resin (4) in Fig. 12 (5) into the mixer and mixing them thoroughly.

S22係將玻璃摻混至有機媒液。這是將S21所製造的有機媒液、前述第12圖(2)本發明的釩酸鹽玻璃粉末(玻璃料)、及按照必要之(3)其它玻璃粉末放入混合機且充分地混合。 S22 is to blend glass into organic medium. This is to put the organic medium produced in S21, the vanadate glass powder (glass frit) of the present invention in Figure 12 (2), and other glass powders as necessary (3) into the mixer and mix them thoroughly.

S23係摻混鋁粉末。這是進一步摻混前述第12圖(1)的鋁粉末之步驟,相對於第12圖(1)的鋁粉末100重量份,係以有機媒液成為1.5至100重量份(較佳是30至50重量份)的方式混合該(1)的鋁粉末。 S23 is blended with aluminum powder. This is the step of further blending the aluminum powder of Figure 12 (1). With respect to 100 parts by weight of the aluminum powder of Figure 12 (1), the organic medium is used to make 1.5 to 100 parts by weight (preferably 30 to 50 parts by weight) of the aluminum powder of (1).

S24係完成鋁膏。 S24 series finished aluminum paste.

依照以上S21至S24的程序,將前述第12圖(5)溶劑、(4)樹脂、(2)本發明的釩酸鹽玻璃粉末(玻璃料)及按照必要之(3)其它玻璃粉末、進而(1)鋁粉末依照順序使用混合機且充分地混合,而能夠製造鋁膏。 In accordance with the procedures from S21 to S24 above, combine the solvent, (4) resin, (2) the vanadate glass powder (glass frit) of the present invention and (3) other glass powders as necessary, and then (1) The aluminum powder is mixed thoroughly using a mixer in order to produce aluminum paste.

第14圖係顯示本發明的鋁膏之煅燒流程 圖。這是顯示將前述第13圖所製成的鋁膏,塗佈、乾燥、煅燒在太陽能電池背面,來形成鋁電極時之煅燒流程圖的1例。 Figure 14 is a flow chart showing the calcination of the aluminum paste of the present invention. This is an example of a calcining flow chart when the aluminum paste prepared in Figure 13 is coated, dried, and calcined on the back of the solar cell to form an aluminum electrode.

在第14圖,S31係塗佈在太陽能電池單元的背面、矽面。例如以5至13mg/cm2的厚度塗佈。這是塗佈在形成鋁電極之對象例如太陽能電池單元背面,或直接塗佈在矽基板背面的矽面。 In Figure 14, S31 is coated on the back and silicon surface of the solar cell. For example, it is coated with a thickness of 5 to 13 mg/cm 2 . This is coated on the object that forms the aluminum electrode, such as the back of a solar cell, or directly coated on the silicon surface on the back of a silicon substrate.

S32係進行乾燥。這是將在S31所塗佈的鋁膏例如放入100至300℃的乾燥爐1分鐘至10分鐘使溶劑消散而乾燥。又,亦可輸送熱風而乾燥。 S32 system is dried. This is to put the aluminum paste applied in S31, for example, in a drying oven at 100 to 300°C for 1 minute to 10 minutes to dissipate the solvent and dry. Also, it can be dried by sending hot air.

S33係進行鋁燒結。這是例如放入500至900℃左右(必要時為1200℃)的燒結爐1至300秒進行燒結,而將鋁電極形成在太陽能電池單元的背面或矽面。又,亦可使用紅外線燈直接照射紅外線而進行燒結。該燒結時,特別是助劑之本發明的釩酸鹽玻璃熔融係堅固地固著在太陽能電池單元背面或矽面,同時亦堅強地固著在鋁粉末,能夠確認可發揮先前的玻璃粉末無法實現之較強的固著力。亦即,將引線焊接在藉由燒結而形成的鋁電極時,即便將該引線拉伸亦不會如先前地容易地剝離,而且經實驗確認固著強度為先前的數倍。 The S33 series performs aluminum sintering. For example, it is placed in a sintering furnace at about 500 to 900°C (1200°C if necessary) for sintering for 1 to 300 seconds, and the aluminum electrode is formed on the back surface or silicon surface of the solar cell. In addition, an infrared lamp may be used to directly irradiate infrared rays for sintering. During the sintering, the vanadate glass of the present invention, especially the additive, is firmly fixed to the back of the solar cell or the silicon surface, and at the same time, it is also firmly fixed to the aluminum powder. It can be confirmed that the previous glass powder cannot be used. Achieve strong fixation. That is, when the lead wire is welded to an aluminum electrode formed by sintering, even if the lead wire is stretched, it will not be easily peeled off as before, and it has been experimentally confirmed that the fixing strength is several times higher than before.

S34係進行室溫冷卻而完成。這是在S33進行鋁燒結之後,進行室溫冷卻而完成在太陽能電池背面、矽面形成鋁電極。 S34 is completed by cooling at room temperature. This is after aluminum sintering in S33 and cooling at room temperature to complete the formation of aluminum electrodes on the back of the solar cell and the silicon surface.

如以上般,藉由將添加有本發明的釩酸鹽 玻璃粉末作為助劑之鋁膏,塗佈在太陽能電池單元背面或矽面(S31)、進行乾燥(S32)、其次進行煅燒(S33),而能夠在太陽能電池單元背面或矽面形成固著強度為先前數倍之堅強地固著的鋁電極。 As above, the aluminum paste added with the vanadate glass powder of the present invention as an auxiliary agent is applied on the back or silicon surface of the solar cell (S31), dried (S32), and then calcined (S33) , And it is possible to form an aluminum electrode on the back of the solar cell or on the silicon surface with a fixed strength several times higher than before.

Claims (20)

一種玻璃料,係要混入至在基板塗佈、燒結而形成導電性電極之導電性膏者,該玻璃料為:以55至80莫耳%的釩V2O5及15至30莫耳%的鋇BaO作為不含有鹼金屬之主材料,將0至10莫耳%的鋁Al2O3、0至7莫耳%的硼B2O3、及0至7莫耳%的矽SiO2之一種以上作為添加物混入前述主材料而得且於此等混入的主材料及添加物中不含有鐵、銅、鎳、鉻者進行加熱而生成熔融玻璃,且將該熔融玻璃急速冷卻而形成的碎片進行粉碎而製造者,該玻璃料係在650℃以下會熔融。 A glass frit that is mixed into a conductive paste that is coated and sintered on a substrate to form a conductive electrode. The glass frit is: 55 to 80 mol% of vanadium V 2 O 5 and 15 to 30 mol% As the main material that does not contain alkali metal, the aluminum Al 2 O 3 of 0 to 10 mol%, the boron B 2 O 3 of 0 to 7 mol%, and the silicon SiO 2 of 0 to 7 mol% One or more of the above-mentioned main materials are mixed as additives, and the mixed main materials and additives that do not contain iron, copper, nickel, or chromium are heated to produce molten glass, and the molten glass is rapidly cooled to form The glass frit will melt below 650℃. 如申請專利範圍第1項所述之玻璃料,其中,係使用鋁膏作為前述導電性膏。 The glass frit described in item 1 of the scope of patent application, wherein aluminum paste is used as the aforementioned conductive paste. 如申請專利範圍第1項所述之玻璃料,其中前述之在基板塗佈、燒結而形成導電性電極一事,係在太陽能電池的基板塗佈、燒結而形成導電性鋁電極。 The glass frit described in the first item of the patent application, wherein the aforementioned coating and sintering on the substrate to form a conductive electrode is to coat and sinter the substrate of a solar cell to form a conductive aluminum electrode. 如申請專利範圍第2項所述之玻璃料,其中前述之在基板塗佈、燒結而形成導電性電極一事,係在太陽能電池的基板塗佈、燒結而形成導電性鋁電極。 The glass frit described in the second item of the patent application, wherein the aforementioned coating and sintering on the substrate to form a conductive electrode is to coat and sinter the substrate of a solar cell to form a conductive aluminum electrode. 一種鋁膏,係添加有如申請專利範圍第1至4項中任一項所述之玻璃料作為助劑。 An aluminum paste containing the glass frit described in any one of items 1 to 4 in the scope of the patent application as an auxiliary agent. 一種玻璃料,係要混入至在基板塗佈、燒結而形成導電性電極之導電性膏者,該玻璃料為:以10至55莫耳%的釩V2O5及10至40莫耳%的鋇BaO作為不含有鹼金屬之主材料,將添加物混入前述主材料而得且於這些 混入的主材料以及添加物中不含有鐵、銅、鎳、鉻者進行加熱而生成熔融玻璃,且將該熔融玻璃其急速冷卻而形成的碎片進行粉碎而製造者,該玻璃料係在650℃以下會熔融,其中,前述添加物為1至10莫耳%的鋁Al2O3及1至20莫耳%的硼B2O3,或是5至20莫耳%的磷P2O5及5至20莫耳%的鈣CaO,且不含有鹼金屬者之一種以上者。 A glass frit that is to be mixed into a conductive paste that is coated and sintered on a substrate to form a conductive electrode. The glass frit is: 10 to 55 mol% of vanadium V 2 O 5 and 10 to 40 mol% Barium BaO as a main material that does not contain alkali metals, is obtained by mixing additives into the aforementioned main materials, and these mixed main materials and additives that do not contain iron, copper, nickel, or chromium are heated to produce molten glass, and It is manufactured by pulverizing the fragments formed by rapid cooling of the molten glass. The glass frit is melted at 650°C or lower. The aforementioned additives are aluminum Al 2 O 3 and 1 to 20 mole% of aluminum. Mole% boron B 2 O 3 , or 5 to 20 mole% phosphorus P 2 O 5 and 5 to 20 mole% calcium CaO, and does not contain more than one kind of alkali metal. 如申請專利範圍第6項所述之玻璃料,其中,與屬於前述添加物之磷P2O5一起添加之前述鈣CaO係設成為與磷及鹼土金屬之1種或1種以上的化合物。 The glass frit according to the sixth item of the scope of patent application, wherein the calcium CaO added together with the phosphorus P 2 O 5 belonging to the aforementioned additive is set as a compound with one or more of phosphorus and alkaline earth metals. 如申請專利範圍第7項所述之玻璃料,其中,與屬於前述添加物之磷P2O5一起添加之前述鈣CaO係設成為屬於與磷及鹼土金屬之1種或1種以上的化合物之磷酸三鈣Ca3(PO4)2或偏磷酸鈣Ca(PO3)2The glass frit described in item 7 of the scope of patent application, wherein the calcium CaO added together with the phosphorus P 2 O 5 belonging to the aforementioned additives is designed to be a compound with one or more types of phosphorus and alkaline earth metals The tricalcium phosphate Ca 3 (PO 4 ) 2 or calcium metaphosphate Ca(PO 3 ) 2 . 如申請專利範圍第6項所述之玻璃料,其中,係使用鋁膏作為前述導電性膏。 The glass frit described in item 6 of the scope of patent application, wherein aluminum paste is used as the aforementioned conductive paste. 如申請專利範圍第7項所述之玻璃料,其中,係使用鋁膏作為前述導電性膏。 The glass frit described in item 7 of the scope of patent application, wherein aluminum paste is used as the aforementioned conductive paste. 如申請專利範圍第8項所述之玻璃料,其中,係使用鋁膏作為前述導電性膏。 The glass frit described in item 8 of the scope of patent application, wherein aluminum paste is used as the aforementioned conductive paste. 如申請專利範圍第6項所述之玻璃料,其中,前述在基板塗佈、燒結而形成導電性電極一事,係在太陽能電池的基板塗佈、燒結而形成導電性鋁電極。 The glass frit described in claim 6, wherein the aforementioned coating and sintering on the substrate to form a conductive electrode is to coat and sinter the substrate of a solar cell to form a conductive aluminum electrode. 如申請專利範圍第7項所述之玻璃料,其中,前述在基 板塗佈、燒結而形成導電性電極一事,係在太陽能電池的基板塗佈、燒結而形成導電性鋁電極。 The glass frit described in item 7 of the scope of patent application, wherein the aforementioned The plate coating and sintering to form a conductive electrode is to coat and sinter the solar cell substrate to form a conductive aluminum electrode. 如申請專利範圍第8項所述之玻璃料,其中,前述在基板塗佈、燒結而形成導電性電極一事,係在太陽能電池的基板塗佈、燒結而形成導電性鋁電極。 The glass frit described in claim 8, wherein the aforementioned coating and sintering on the substrate to form a conductive electrode is to coat and sinter the substrate of a solar cell to form a conductive aluminum electrode. 如申請專利範圍第9項所述之玻璃料,其中,前述在基板塗佈、燒結而形成導電性電極一事,係在太陽能電池的基板塗佈、燒結而形成導電性鋁電極。 The glass frit described in claim 9, wherein the aforementioned coating and sintering on the substrate to form a conductive electrode is coating and sintering on the substrate of a solar cell to form a conductive aluminum electrode. 如申請專利範圍第10項所述之玻璃料,其中,前述在基板塗佈、燒結而形成導電性電極一事,係在太陽能電池的基板塗佈、燒結而形成導電性鋁電極。 The glass frit described in claim 10, wherein the aforementioned coating and sintering on the substrate to form a conductive electrode is to coat and sinter the substrate of a solar cell to form a conductive aluminum electrode. 如申請專利範圍第11項所述之玻璃料,其中,前述在基板塗佈、燒結而形成導電性電極一事,係在太陽能電池的基板塗佈、燒結而形成導電性鋁電極。 The glass frit described in claim 11, wherein the aforementioned coating and sintering on the substrate to form a conductive electrode is to coat and sinter the substrate of a solar cell to form a conductive aluminum electrode. 一種鋁膏,係添加有如申請專利範圍第6至17項中任一項所述之玻璃料作為助劑。 An aluminum paste is added with the glass frit described in any one of items 6 to 17 in the scope of the patent application as an auxiliary agent. 一種玻璃料製造方法,係要混入至在基板塗佈、燒結而形成導電性電極之導電性膏之玻璃料的製造方法,其特徵在於:以55至80莫耳%的釩V2O5及15至30莫耳%的鋇BaO作為不含有鹼金屬之主材料,將0至10莫耳%的鋁Al2O3、0至7莫耳%的硼B2O3、及0至7莫耳%的矽SiO2之一種以上作為添加物混入前述主材料而得且於此等混入的主材料及添加物中不含有鐵、銅、鎳、 鉻者進行加熱而生成熔融玻璃,將該生成的熔融玻璃急速冷卻而生成碎片,將該生成的碎片粉碎而製造在650℃以下會熔融之玻璃料。 A method for manufacturing glass frit, which is a method for manufacturing glass frit that is mixed into a conductive paste that is coated and sintered on a substrate to form a conductive electrode. The method is characterized by using 55 to 80 mole% of vanadium V 2 O 5 and 15 to 30 mol% of barium BaO is used as the main material that does not contain alkali metals, and 0 to 10 mol% of aluminum Al 2 O 3 , 0 to 7 mol% of boron B 2 O 3 , and 0 to 7 mol% Ear% silicon SiO 2 is mixed into the aforementioned main material as an additive, and the mixed main material and the additive do not contain iron, copper, nickel, or chromium. The molten glass is produced by heating The molten glass is rapidly cooled to generate fragments, and the generated fragments are crushed to produce a glass frit that will melt below 650°C. 一種玻璃料製造方法,係要混入至在基板塗佈、燒結而形成導電性電極之導電性膏之玻璃料的製造方法,其特徵在於:以10至55莫耳%的釩V2O5及10至40莫耳%的鋇BaO作為不含有鹼金屬之主材料,將添加物混入前述主材料而得且於這些混入的主材料以及添加物中不含有鐵、銅、鎳、鉻者進行加熱而生成熔融玻璃,其中,前述添加物為1至10莫耳%的鋁Al2O3及1至20莫耳%的硼B2O3,或是5至20莫耳%的磷P2O5及5至20莫耳%的鈣CaO,且不含有鹼金屬者之一種以上者,將該生成的熔融玻璃急速冷卻而生成碎片,將該生成的碎片粉碎而製造在650℃以下會熔融之玻璃料。 A method for manufacturing glass frit, which is a method for manufacturing a glass frit that is mixed into a conductive paste that is coated and sintered on a substrate to form a conductive electrode. The method is characterized in that: 10 to 55 mol% of vanadium V 2 O 5 and 10 to 40 mol% of barium BaO is used as the main material that does not contain alkali metals, and the additives are mixed into the aforementioned main materials, and the mixed main materials and additives that do not contain iron, copper, nickel, or chromium are heated The molten glass is produced, wherein the aforementioned additives are 1 to 10 mol% aluminum Al 2 O 3 and 1 to 20 mol% boron B 2 O 3 , or 5 to 20 mol% phosphorus P 2 O 5 and 5 to 20 mol% of calcium CaO, and one or more of the ones that do not contain alkali metals, the resulting molten glass is rapidly cooled to generate fragments, and the resulting fragments are crushed to produce them that will melt below 650°C Frit glass.
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