TWI701386B - 附除害功能之乾式真空泵 - Google Patents

附除害功能之乾式真空泵 Download PDF

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Publication number
TWI701386B
TWI701386B TW106116110A TW106116110A TWI701386B TW I701386 B TWI701386 B TW I701386B TW 106116110 A TW106116110 A TW 106116110A TW 106116110 A TW106116110 A TW 106116110A TW I701386 B TWI701386 B TW I701386B
Authority
TW
Taiwan
Prior art keywords
pump
dry
combustion
exhaust gas
abatement
Prior art date
Application number
TW106116110A
Other languages
English (en)
Chinese (zh)
Other versions
TW201802357A (zh
Inventor
吉田真也
青木康照
細谷和正
関口信一
駒井哲夫
Original Assignee
日商荏原製作所股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商荏原製作所股份有限公司 filed Critical 日商荏原製作所股份有限公司
Publication of TW201802357A publication Critical patent/TW201802357A/zh
Application granted granted Critical
Publication of TWI701386B publication Critical patent/TWI701386B/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/005—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by heat treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Incineration Of Waste (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Drying Of Semiconductors (AREA)
  • Treating Waste Gases (AREA)
TW106116110A 2016-06-08 2017-05-16 附除害功能之乾式真空泵 TWI701386B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2016114182 2016-06-08
JP2016-114182 2016-06-08
JP2017-057560 2017-03-23
JP2017057560A JP6785695B2 (ja) 2016-06-08 2017-03-23 除害機能付ドライ真空ポンプ

Publications (2)

Publication Number Publication Date
TW201802357A TW201802357A (zh) 2018-01-16
TWI701386B true TWI701386B (zh) 2020-08-11

Family

ID=60686829

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106116110A TWI701386B (zh) 2016-06-08 2017-05-16 附除害功能之乾式真空泵

Country Status (3)

Country Link
JP (1) JP6785695B2 (ja)
KR (1) KR102338068B1 (ja)
TW (1) TWI701386B (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024134839A1 (ja) * 2022-12-22 2024-06-27 カンケンテクノ株式会社 ドライ真空ポンプのクリーニング方法及びドライ真空ポンプのクリーニング装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201346140A (zh) * 2012-01-31 2013-11-16 Sumitomo Heavy Industries 冷凝捕集器及冷凝捕集器的控制方法
EP2784321A1 (en) * 2013-03-28 2014-10-01 Ebara Corporation Vacuum pump with abatement function
EP2987951A1 (en) * 2014-08-22 2016-02-24 WABCO Europe BVBA Vacuum pump with eccentrically driven vane
TW201608135A (zh) * 2014-06-27 2016-03-01 亞特里爾斯布契股份有限公司 真空幫浦系統中的抽泵方法及真空幫浦系統

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6166102B2 (ja) * 2013-05-30 2017-07-19 株式会社荏原製作所 除害機能付真空ポンプ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201346140A (zh) * 2012-01-31 2013-11-16 Sumitomo Heavy Industries 冷凝捕集器及冷凝捕集器的控制方法
EP2784321A1 (en) * 2013-03-28 2014-10-01 Ebara Corporation Vacuum pump with abatement function
TW201608135A (zh) * 2014-06-27 2016-03-01 亞特里爾斯布契股份有限公司 真空幫浦系統中的抽泵方法及真空幫浦系統
EP2987951A1 (en) * 2014-08-22 2016-02-24 WABCO Europe BVBA Vacuum pump with eccentrically driven vane

Also Published As

Publication number Publication date
KR102338068B1 (ko) 2021-12-10
TW201802357A (zh) 2018-01-16
JP2017223215A (ja) 2017-12-21
KR20170138946A (ko) 2017-12-18
JP6785695B2 (ja) 2020-11-18

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