TWI697620B - 低溫泵 - Google Patents

低溫泵 Download PDF

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Publication number
TWI697620B
TWI697620B TW108105745A TW108105745A TWI697620B TW I697620 B TWI697620 B TW I697620B TW 108105745 A TW108105745 A TW 108105745A TW 108105745 A TW108105745 A TW 108105745A TW I697620 B TWI697620 B TW I697620B
Authority
TW
Taiwan
Prior art keywords
cryopump
compressor
gas
flushing gas
heat exchanger
Prior art date
Application number
TW108105745A
Other languages
English (en)
Chinese (zh)
Other versions
TW201937060A (zh
Inventor
中村正寿
Original Assignee
日商住友重機械工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 日商住友重機械工業股份有限公司 filed Critical 日商住友重機械工業股份有限公司
Publication of TW201937060A publication Critical patent/TW201937060A/zh
Application granted granted Critical
Publication of TWI697620B publication Critical patent/TWI697620B/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
TW108105745A 2018-02-21 2019-02-21 低溫泵 TWI697620B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-028382 2018-02-21
JP2018028382A JP6929601B2 (ja) 2018-02-21 2018-02-21 クライオポンプ

Publications (2)

Publication Number Publication Date
TW201937060A TW201937060A (zh) 2019-09-16
TWI697620B true TWI697620B (zh) 2020-07-01

Family

ID=67686825

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108105745A TWI697620B (zh) 2018-02-21 2019-02-21 低溫泵

Country Status (3)

Country Link
JP (1) JP6929601B2 (ja)
TW (1) TWI697620B (ja)
WO (1) WO2019163762A1 (ja)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4324565A (en) * 1979-08-30 1982-04-13 Linde Aktiengesellschaft Removal of lubricant mists and lubricant vapors from a gaseous stream
US4693736A (en) * 1986-09-12 1987-09-15 Helix Technology Corporation Oil cooled hermetic compressor used for helium service
JP2000266416A (ja) * 1999-03-15 2000-09-29 Sanyo Electric Co Ltd 極低温冷凍装置
TW201307682A (zh) * 2011-04-11 2013-02-16 Sumitomo Heavy Industries 低溫泵系統、壓縮機及低溫泵的再生方法
CN104343664A (zh) * 2013-07-23 2015-02-11 住友重机械工业株式会社 压缩机及冷却系统
KR20150114225A (ko) * 2014-04-01 2015-10-12 주식회사 조인솔루션 스토리지 탱크를 이용한 가변용량형 크라이오 압축기장치
TW201540950A (zh) * 2014-03-18 2015-11-01 Sumitomo Heavy Industries 低溫泵及低溫泵的再生方法
TW201708705A (zh) * 2015-07-17 2017-03-01 厄利孔萊博爾德真空有限責任公司 幫浦系統

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04330388A (ja) * 1991-04-30 1992-11-18 Ebara Corp 真空ポンプ装置
JP2003090287A (ja) * 2001-09-17 2003-03-28 Ebara Corp ドライ真空ポンプ及びその運転方法
JP5808691B2 (ja) * 2012-02-23 2015-11-10 住友重機械工業株式会社 クライオポンプ、及びクライオポンプの再生方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4324565A (en) * 1979-08-30 1982-04-13 Linde Aktiengesellschaft Removal of lubricant mists and lubricant vapors from a gaseous stream
US4693736A (en) * 1986-09-12 1987-09-15 Helix Technology Corporation Oil cooled hermetic compressor used for helium service
JP2000266416A (ja) * 1999-03-15 2000-09-29 Sanyo Electric Co Ltd 極低温冷凍装置
TW201307682A (zh) * 2011-04-11 2013-02-16 Sumitomo Heavy Industries 低溫泵系統、壓縮機及低溫泵的再生方法
CN104343664A (zh) * 2013-07-23 2015-02-11 住友重机械工业株式会社 压缩机及冷却系统
TW201540950A (zh) * 2014-03-18 2015-11-01 Sumitomo Heavy Industries 低溫泵及低溫泵的再生方法
KR20150114225A (ko) * 2014-04-01 2015-10-12 주식회사 조인솔루션 스토리지 탱크를 이용한 가변용량형 크라이오 압축기장치
TW201708705A (zh) * 2015-07-17 2017-03-01 厄利孔萊博爾德真空有限責任公司 幫浦系統

Also Published As

Publication number Publication date
WO2019163762A1 (ja) 2019-08-29
JP6929601B2 (ja) 2021-09-01
TW201937060A (zh) 2019-09-16
JP2019143534A (ja) 2019-08-29

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