TWI687668B - Gas quality monitoring device - Google Patents

Gas quality monitoring device Download PDF

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TWI687668B
TWI687668B TW107102485A TW107102485A TWI687668B TW I687668 B TWI687668 B TW I687668B TW 107102485 A TW107102485 A TW 107102485A TW 107102485 A TW107102485 A TW 107102485A TW I687668 B TWI687668 B TW I687668B
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light
monitoring
sensing element
gas quality
quality monitor
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TW107102485A
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TW201932812A (en
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陳台彰
劉昭朋
梁金興
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創星淨聯科技股份有限公司
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Abstract

A gas quality monitoring device is provided, which includes a lighting component and a monitoring sensing element. The lighting component has a lighting element and a focus lens. The lighting element emits a light beam going through the focus lens then forms a focus beam in a monitoring area. Part of the focus beam forms a monitoring light which is reflected light. The monitoring sensing element is used for sensing light signal of the monitoring light. The sensing surface of the monitoring sensing element is parallel to the path of the light beam.

Description

氣體品質監測器 Gas quality monitor

本發明有關於一種氣體品質監測器,尤指一種可提高監測準確性及提供校正性之氣體品質監測器。 The invention relates to a gas quality monitor, in particular to a gas quality monitor that can improve monitoring accuracy and provide correction.

氣體中充滿各種不同粒徑的懸浮粒子,例如粒徑小於或等於2.5μm的懸浮粒子稱為PM2.5,粒徑小於或等於10μm的懸浮粒子稱為PM10。 The gas is filled with suspended particles of various particle sizes. For example, suspended particles with a particle size less than or equal to 2.5 μm are called PM2.5, and suspended particles with a particle size less than or equal to 10 μm are called PM10.

新英格蘭醫學期刊指出,PM2.5每增加10微克,就會提高10%的肺癌發生率,各類癌症也會提高5%;而世界衛生組織也提及:每增加10μg/m3之PM10將提高0.2-0.6%之死亡率,每增加10μg/m3之PM2.5將提高6-13%之心肺疾病致死率。因此,各國政府及民眾對於氣體品質的偵測也愈發重視。 The New England Journal of Medicine pointed out that every 10 micrograms of PM2.5 will increase the incidence of lung cancer by 10%, and various types of cancer will also increase by 5%; and the World Health Organization also mentioned that every 10μg/m3 increase in PM10 will increase With a mortality rate of 0.2-0.6%, each additional PM2.5 of 10 μg/m3 will increase the mortality of cardiopulmonary diseases by 6-13%. Therefore, governments and people of various countries have paid more and more attention to the detection of gas quality.

針對PM2.5而言,習知監測器主要是由一發光元件與一感測元件構成,藉由發光元件發射出偵測光於欲偵測之氣體,由感測元件感測散射光,再由一處理器根據該散射光之光訊號計算出氣體所含之懸浮粒子之濃度。 For PM2.5, the conventional monitor is mainly composed of a light-emitting element and a sensing element. The light-emitting element emits detection light to the gas to be detected, and the sensing element senses the scattered light. A processor calculates the concentration of suspended particles contained in the gas based on the light signal of the scattered light.

惟上述習知監測器之可靠性低,經過長時間使用後,發光元件或感測元件的衰退會造成量測的偏移。此外,對於大顆粒的懸浮粒子未經適當的處理,造成精確度判讀的落差。再者,其濃度偵測區間 窄,僅能偵測高濃度;而懸浮粒子間的差距大(甚至高達100%)也造成習知監測器校正困難。 However, the reliability of the above-mentioned conventional monitors is low. After a long period of use, the deterioration of the light-emitting element or the sensing element may cause measurement deviation. In addition, large particles of suspended particles are not properly processed, resulting in a drop in accuracy. Furthermore, the concentration detection interval Narrow, it can only detect high concentrations; the large gap between suspended particles (even up to 100%) also makes it difficult to calibrate conventional monitors.

據此,如何能有一種可提高監測準確性及提供校正性之『氣體品質監測器』,是相關技術領域人士亟待解決之課題。 According to this, how to have a "gas quality monitor" that can improve the monitoring accuracy and provide correction is a problem that people in the related technical fields need to solve urgently.

於一實施例中,本發明提出一種氣體品質監測器,包括:一發光組件,包含一發光元件與一聚焦鏡,發光元件發出光束通過聚焦鏡後形成聚焦光束聚焦於一監測區,部分聚焦光束形成一監測光,監測光為反射光;以及一監測光感測元件,用以感測監測光之光訊號,監測光感測元件之感測面平行於光束之光路;其中,該發光元件與該聚焦鏡之間設有一分光鏡,該監測光射入該分光鏡後產生一分光束射入該監測光感測元件,該發光組件、該監測光感測元件與該分光鏡設置於一殼體內,該殼體相對應於該光束之光路設有一透光區。 In one embodiment, the present invention provides a gas quality monitor, including: a light-emitting component, including a light-emitting element and a focusing mirror, the light-emitting element emits a light beam passing through the focusing mirror to form a focused beam focused on a monitoring area, part of the focused beam Forming a monitoring light, the monitoring light is reflected light; and a monitoring light sensing element for sensing the optical signal of the monitoring light, the sensing surface of the monitoring light sensing element is parallel to the optical path of the light beam; wherein, the light emitting element and A beam splitter is arranged between the focusing mirrors, and the monitoring light enters the beam splitter to generate a split beam to enter the monitoring light sensing element. The light emitting component, the monitoring light sensing element and the beam splitter are arranged in a shell In the body, the housing is provided with a light-transmitting area corresponding to the light path of the light beam.

100、200:氣體品質監測器 100, 200: gas quality monitor

10:發光組件 10: Light emitting components

11:發光元件 11: Light emitting element

12:聚焦鏡 12: Focusing lens

13:監測區 13: Monitoring area

20:監測光感測元件 20: Monitor light sensing elements

21:感測面 21: Sensing surface

22:監測透鏡 22: Monitoring lens

30:穿透光感測元件 30: penetrating light sensing element

31:感測面 31: Sensing surface

32:穿透透鏡 32: penetrating lens

40:分光鏡 40: Beamsplitter

50:殼體 50: shell

51:透光區 51: Light transmitting area

L1:光束 L1: beam

L2:聚焦光束 L2: Focused beam

L3:監測光 L3: Monitoring light

L4、L6:平行光 L4, L6: parallel light

L5:穿透光 L5: Penetrating light

L7:分光束 L7: split beam

圖1為本發明一實施例之結構示意圖。 FIG. 1 is a schematic structural diagram of an embodiment of the invention.

圖2為本發明另一實施例之結構示意圖。 2 is a schematic structural diagram of another embodiment of the present invention.

圖3為圖2實施例設置於殼體內之結構示意圖。 FIG. 3 is a schematic structural view of the embodiment of FIG. 2 disposed in the housing.

請參閱圖1所示實施例,氣體品質監測器100包括一發光組件10及一監測光感測元件20。 Please refer to the embodiment shown in FIG. 1, the gas quality monitor 100 includes a light emitting element 10 and a monitoring light sensing element 20.

發光組件10包含一發光元件11與一聚焦鏡12,發光元件11發出光束L1通過聚焦鏡12後形成聚焦光束L2聚焦於一監測區13。部分聚焦光束L2形成一監測光L3,於本實施例中,監測光L3為散射光。 The light-emitting assembly 10 includes a light-emitting element 11 and a focusing mirror 12. The light-emitting element 11 emits a light beam L1 through the focusing mirror 12 to form a focused light beam L2 to focus on a monitoring area 13. The partially focused light beam L2 forms a monitoring light L3. In this embodiment, the monitoring light L3 is scattered light.

監測光感測元件20之感測面21平行於光束L1之光路。於監測光感測元件20與監測區13之間設有一監測透鏡22,監測光L3射向監測透鏡22後形成一平行光L4,而後射入監測光感測元件20。由監測光感測元件20感測平行光L4(相當於監測光L3)之光訊號。 The sensing surface 21 of the monitoring light sensing element 20 is parallel to the optical path of the light beam L1. A monitoring lens 22 is provided between the monitoring light sensing element 20 and the monitoring area 13. After the monitoring light L3 strikes the monitoring lens 22, a parallel light L4 is formed, and then enters the monitoring light sensing element 20. The optical signal of the parallel light L4 (equivalent to the monitoring light L3) is sensed by the monitoring light sensing element 20.

於監測區13相對於設有發光元件11之一側設有一穿透光感測元件30,穿透光感測元件30之感測面31朝向監測區13,穿透光感測元件30與監測區13之間設有一穿透透鏡32,另一部分聚焦光束L2形成穿透光L5射向穿透透鏡32後形成一平行光L6,而後射入穿透光感測元件30,由穿透光感測元件感測平行光L6(相當於穿透光L5)之光訊號。 A penetrating light sensing element 30 is provided on the side of the monitoring area 13 opposite to the light emitting element 11, and the sensing surface 31 of the penetrating light sensing element 30 faces the monitoring area 13, penetrating the light sensing element 30 and monitoring A penetrating lens 32 is provided between the areas 13, and another part of the focused light beam L2 forms penetrating light L5 and strikes the penetrating lens 32 to form a parallel light L6, and then enters the penetrating light sensing element 30. The sensing element senses the optical signal of parallel light L6 (equivalent to transmitted light L5).

發光組件10、監測光感測元件20及穿透光感測元件30可設置於不同空間位置而不限於同一平面上,設置的原則在於發光組件及穿透光感測元件30相對設置於監測區13兩側,而監測光感測元件20之感測面21朝向監測區13即可。 The light emitting element 10, the monitoring light sensing element 20 and the through light sensing element 30 can be disposed at different spatial positions without being limited to the same plane, the principle of the arrangement is that the light emitting element and the through light sensing element 30 are relatively arranged in the monitoring area 13 on both sides, and the sensing surface 21 of the monitoring light-sensing element 20 only needs to face the monitoring area 13.

本實施例藉由監測光感測元件20感測光束之散射(scattering)率訊號,由穿透光感測元件30感測光束之穿透(absorption)率訊號,可提高對氣體偵測的準確性,於正常情況下,監測光感測元件20及穿透光感測元件30的量測率應為一高一低,對於所偵測的訊號進行訊雜比、演算法、回歸分析等校正,可對氣體品質監測器100進行校正。若監測光感測元件20及穿透光感測元件30所偵測的訊號值皆為高或皆為低時,可立即判知是哪一個感測元件發生故障而予以維修或更換。 In this embodiment, by monitoring the light-scattering rate signal of the light beam sensed by the light sensing element 20 and the absorption rate signal of the light beam sensed by the penetrating light sensing element 30, the accuracy of gas detection can be improved Under normal circumstances, the measurement rate of the monitoring light-sensing element 20 and the penetrating light-sensing element 30 should be one high and one low. Correct the signal-to-noise ratio, algorithm, regression analysis, etc. of the detected signal. , The gas quality monitor 100 can be calibrated. If the signal values detected by the monitoring light-sensing element 20 and the penetrating light-sensing element 30 are both high or low, it can be immediately determined which sensing element is faulty and repaired or replaced.

請參閱圖2所示實施例,氣體品質監測器200包括一發光組件10及一監測光感測元件20。 Please refer to the embodiment shown in FIG. 2, the gas quality monitor 200 includes a light emitting component 10 and a monitoring light sensing element 20.

發光組件10包含一發光元件11與一聚焦鏡12,於發光元件11與聚焦鏡12之間設有一分光鏡40。發光元件11發出光束L1通過聚焦鏡12後形成聚焦光束L2聚焦於一監測區13。部分聚焦光束L2形成一監測光L3,於本實施例中,監測光L3為反射光。 The light-emitting assembly 10 includes a light-emitting element 11 and a focusing mirror 12, and a dichroic mirror 40 is provided between the light-emitting element 11 and the focusing mirror 12. The light emitting element 11 emits the light beam L1 through the focusing mirror 12 to form a focused light beam L2 to focus on a monitoring area 13. The partially focused light beam L2 forms a monitoring light L3. In this embodiment, the monitoring light L3 is reflected light.

監測光感測元件20之感測面21平行於光束L1之光路。監測光L3射入分光鏡40後產生一分光束L7射入監測光感測元件20,由監測光感測元件20感測分光束L7(相當於監測光L3)之光訊號。 The sensing surface 21 of the monitoring light sensing element 20 is parallel to the optical path of the light beam L1. After the monitoring light L3 enters the dichroic mirror 40, a sub-beam L7 is generated and enters the monitoring light sensing element 20. The monitoring light sensing element 20 senses the optical signal of the sub-beam L7 (equivalent to the monitoring light L3).

請參閱圖3所示實施例,發光組件10、監測光感測元件20與分光鏡40設置於一殼體50內,殼體50相對應於光束L1之光路設有一透光區51。殼體50與透光區51的材質不限,可相同或不同,例如,為提供聚焦光束L2與監測光L3射出及射入殼體50,因此透光區51可採用透明玻璃或其他透光性良好之材質。 Referring to the embodiment shown in FIG. 3, the light-emitting assembly 10, the monitoring light sensing element 20 and the beam splitter 40 are disposed in a housing 50. The housing 50 has a light-transmitting area 51 corresponding to the optical path of the light beam L1. The materials of the housing 50 and the light-transmitting area 51 are not limited, and may be the same or different. For example, in order to provide the focused beam L2 and the monitoring light L3 to exit and enter the housing 50, the light-transmitting area 51 may use transparent glass or other light-transmitting Good quality material.

請參閱圖1及圖2所示,本發明之發光元件11可為雷射半導體或雷射二極體,則光束L1為雷射光束。監測光感測元件20與穿透光感測元件30的形式不限,例如可採用光敏晶片。監測光感測元件20耦接於一處理器(圖中未示出),由處理器根據監測光感測元20所感測之光訊號,計算出監測區13之氣體所含之懸浮粒子(例如PM10、PM2.5)之濃度。 Please refer to FIGS. 1 and 2. The light-emitting element 11 of the present invention may be a laser semiconductor or a laser diode, and the light beam L1 is a laser beam. The forms of the monitoring light sensing element 20 and the penetrating light sensing element 30 are not limited, and for example, a photosensitive wafer may be used. The monitoring light sensing element 20 is coupled to a processor (not shown in the figure), and the processor calculates the suspended particles contained in the gas in the monitoring area 13 according to the optical signal sensed by the monitoring light sensing element 20 (for example PM10, PM2.5) concentration.

綜上所述,本發明所提供之氣體品質監測器,確實可達到提高監測準確性及提供校正性等作用。值得說明的是,圖1與圖2的主要架構相同,皆包含一發光組件10及一監測光感測元件20,於此架構下,再搭配穿透光感測元件30或分光鏡40,可進一步獲致其他功效。 In summary, the gas quality monitor provided by the present invention can indeed achieve the functions of improving monitoring accuracy and providing correction. It is worth noting that the main architectures of FIG. 1 and FIG. 2 are the same, both include a light-emitting element 10 and a monitoring light sensing element 20. Under this architecture, together with the penetrating light sensing element 30 or the beam splitter 40, Further obtain other effects.

惟以上所述之具體實施例,僅係用於例釋本發明之特點及功效,而非用於限定本發明之可實施範疇,於未脫離本發明上揭之精神與技術範疇下,任何運用本發明所揭示內容而完成之等效改變及修飾,均仍應為下述之申請專利範圍所涵蓋。 However, the specific embodiments described above are only used to illustrate the features and effects of the present invention, rather than to limit the scope of the invention, and any application without departing from the spirit and technical scope of the invention The equivalent changes and modifications completed by the disclosure of the present invention should still be covered by the following patent application scope.

200:氣體品質監測器 200: gas quality monitor

10:發光組件 10: Light emitting components

11:發光元件 11: Light emitting element

12:聚焦鏡 12: Focusing lens

13:監測區 13: Monitoring area

20:監測光感測元件 20: Monitor light sensing elements

21:感測面 21: Sensing surface

40:分光鏡 40: Beamsplitter

L1:光束 L1: beam

L2:聚焦光束 L2: Focused beam

L3:監測光 L3: Monitoring light

L7:分光束 L7: split beam

Claims (6)

一種氣體品質監測器,包括:一發光組件,包含一發光元件與一聚焦鏡,該發光元件發出光束通過該聚焦鏡後形成聚焦光束聚焦於一監測區,部分該聚焦光束形成一監測光,該監測光為反射光;以及一監測光感測元件,用以感測該監測光之光訊號,該監測光感測元件之感測面平行於該光束之光路;其中,該發光元件與該聚焦鏡之間設有一分光鏡,該監測光射入該分光鏡後產生一分光束射入該監測光感測元件。 A gas quality monitor includes a light-emitting component including a light-emitting element and a focusing mirror. The light-emitting element emits a light beam passing through the focusing mirror to form a focused light beam and focuses on a monitoring area. Part of the focused light beam forms a monitoring light. The monitoring light is reflected light; and a monitoring light sensing element for sensing the optical signal of the monitoring light, the sensing surface of the monitoring light sensing element is parallel to the optical path of the light beam; wherein, the light emitting element and the focusing There is a beam splitter between the mirrors, and the monitor light enters the beam splitter to generate a beam of light to enter the monitor light sensing element. 如申請專利範圍第1項所述之氣體品質監測器,其中該發光組件、該監測光感測元件與該分光鏡設置於一殼體內,該殼體相對應於該光束之光路設有一透光區。 The gas quality monitor as described in item 1 of the patent application scope, wherein the light emitting component, the monitoring light sensing element and the beam splitter are disposed in a housing, and the housing is provided with a light transmission corresponding to the optical path of the light beam Area. 如申請專利範圍第1項所述之氣體品質監測器,其中該光束為雷射光束。 The gas quality monitor as described in item 1 of the patent application scope, wherein the beam is a laser beam. 如申請專利範圍第1項所述之氣體品質監測器,其中該發光元件為雷射半導體或雷射二極體。 The gas quality monitor as described in item 1 of the patent application scope, wherein the light emitting element is a laser semiconductor or a laser diode. 如申請專利範圍第1項所述之氣體品質監測器,其中該監測光感測元件為光敏晶片。 The gas quality monitor as described in item 1 of the patent application scope, wherein the monitoring light sensing element is a photosensitive wafer. 如申請專利範圍第1項所述之氣體品質監測器,其中該監測光感測元件耦接於一處理器,由該處理器根據該監測光感測元件所感測之該光訊號,計算出該監測區之氣體所含之懸浮粒子之濃度。 The gas quality monitor as described in item 1 of the patent application scope, wherein the monitoring light sensing element is coupled to a processor, and the processor calculates the light signal according to the optical signal sensed by the monitoring light sensing element The concentration of suspended particles contained in the gas in the monitoring area.
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TWM518328U (en) * 2015-11-27 2016-03-01 Genuine Lasers Corp Gas detection system

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